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WO2011061429A3 - Procede et dispositif de pompage a consommation d'energie reduite - Google Patents

Procede et dispositif de pompage a consommation d'energie reduite Download PDF

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Publication number
WO2011061429A3
WO2011061429A3 PCT/FR2010/052305 FR2010052305W WO2011061429A3 WO 2011061429 A3 WO2011061429 A3 WO 2011061429A3 FR 2010052305 W FR2010052305 W FR 2010052305W WO 2011061429 A3 WO2011061429 A3 WO 2011061429A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
rough vacuum
dry rough
outlet
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/FR2010/052305
Other languages
English (en)
Other versions
WO2011061429A2 (fr
Inventor
Thierry Neel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Adixen Vacuum Products SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adixen Vacuum Products SAS filed Critical Adixen Vacuum Products SAS
Priority to JP2012539382A priority Critical patent/JP5769722B2/ja
Priority to US13/505,337 priority patent/US9175688B2/en
Priority to CN201080052223.2A priority patent/CN102713299B/zh
Priority to KR1020127012734A priority patent/KR101778318B1/ko
Priority to EP10790462.5A priority patent/EP2501936B1/fr
Publication of WO2011061429A2 publication Critical patent/WO2011061429A2/fr
Anticipated expiration legal-status Critical
Publication of WO2011061429A3 publication Critical patent/WO2011061429A3/fr
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/02—Stopping of pumps, or operating valves, on occurrence of unwanted conditions
    • F04D15/0245—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition of the pump
    • F04D15/0254—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition of the pump the condition being speed or load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/02—Stopping of pumps, or operating valves, on occurrence of unwanted conditions
    • F04D15/0281—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/02—Power

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

Le dispositif de pompage comporte une pompe à vide primaire sèche munie d'un orifice d'entrée de gaz relié à une enceinte à vide et d'un orifice de sortie de gaz débouchant dans un conduit, un clapet antiretour de refoulement placé dans le conduit à la sortie de la pompe à vide primaire sèche, et un éjecteur monté en parallèle par rapport au clapet antiretour de refoulement. Le procédé de pompage comprend les étapes suivantes; on pompe les gaz contenus dans l'enceinte à vide au moyen de la pompe à vide primaire sèche par l'orifice d'entrée de gaz, on relie l'orifice de sortie de gaz de la pompe à vide primaire sèche à un éjecteur, on mesure la puissance électrique consommée par la pompe à vide primaire sèche et la pression des gaz dans le conduit à la sortie de la pompe à vide primaire sèche, on met en route l'éjecteur, après une temporisation, lorsque la pression des gaz à la sortie de la pompe à vide primaire sèche franchie une valeur de consigne en front montant et que la puissance électrique consommée par la pompe à vide primaire sèche franchie une valeur de consigne en front montant, on arrête l'éjecteur lorsque la puissance électrique consommée par la pompe à vide primaire sèche franchie une valeur de consigne en front descendant et que la pression des gaz dans le conduit à la sortie de la pompe à vide primaire sèche franchie une valeur de consigne en front descendant.
PCT/FR2010/052305 2009-11-18 2010-10-27 Procede et dispositif de pompage a consommation d'energie reduite Ceased WO2011061429A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012539382A JP5769722B2 (ja) 2009-11-18 2010-10-27 低電力消費の排気方法及び装置
US13/505,337 US9175688B2 (en) 2009-11-18 2010-10-27 Vacuum pumping system having an ejector and check valve
CN201080052223.2A CN102713299B (zh) 2009-11-18 2010-10-27 具有低功耗的泵送方法和设备
KR1020127012734A KR101778318B1 (ko) 2009-11-18 2010-10-27 전력 소비가 적은 펌핑 방법과 장치
EP10790462.5A EP2501936B1 (fr) 2009-11-18 2010-10-27 Procede et dispositif de pompage a consommation d'energie reduite

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0958138A FR2952683B1 (fr) 2009-11-18 2009-11-18 Procede et dispositif de pompage a consommation d'energie reduite
FR0958138 2009-11-18

Publications (2)

Publication Number Publication Date
WO2011061429A2 WO2011061429A2 (fr) 2011-05-26
WO2011061429A3 true WO2011061429A3 (fr) 2012-07-12

Family

ID=42342727

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2010/052305 Ceased WO2011061429A2 (fr) 2009-11-18 2010-10-27 Procede et dispositif de pompage a consommation d'energie reduite

Country Status (8)

Country Link
US (1) US9175688B2 (fr)
EP (1) EP2501936B1 (fr)
JP (1) JP5769722B2 (fr)
KR (1) KR101778318B1 (fr)
CN (1) CN102713299B (fr)
FR (1) FR2952683B1 (fr)
TW (1) TWI507604B (fr)
WO (1) WO2011061429A2 (fr)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2815132B1 (fr) 2012-02-13 2016-07-20 J. Schmalz GmbH Procedé de fonctionnement d'un générateur de succion et générateur de succion permettant la mise en oeuvre dudit procédé
KR101995358B1 (ko) * 2012-06-28 2019-07-02 스털링 인더스트리 컨설트 게엠베하 챔버를 배기시키기 위한 방법 및 펌프 장치
FR2992927B1 (fr) * 2012-07-03 2014-08-08 Peugeot Citroen Automobiles Sa Circuit de vide avec pompe a vide pour systeme d'assistance pneumatique au freinage dans un vehicule automobile couple avec un circuit de suralimentation
KR102007839B1 (ko) * 2012-07-12 2019-08-06 엘지전자 주식회사 진공 청소기
FR2993614B1 (fr) 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
FR3008145B1 (fr) 2013-07-04 2015-08-07 Pfeiffer Vacuum Sas Pompe a vide primaire seche
EP3049679B1 (fr) * 2013-09-23 2018-07-11 Coval Cartouche pour circuit pneumatique et dispositif de prehension a ventouse comportant une telle cartouche
FR3022319B1 (fr) * 2014-06-16 2016-11-18 Coval Cartouche pour circuit pneumatique et dispositif de prehension a ventouse comportant une telle cartouche
FR3010928B1 (fr) * 2013-09-23 2016-04-01 Coval Cartouche pour circuit pneumatique et dispositif de prehension a ventouse comportant une telle cartouche
PL3123030T3 (pl) 2014-03-24 2020-03-31 Ateliers Busch S.A. Sposób pompowania w układzie pomp próżniowych i układ pomp próżniowych
KR101424959B1 (ko) * 2014-04-08 2014-08-01 한국뉴매틱(주) 진공펌프
CN106255828A (zh) * 2014-05-01 2016-12-21 阿特利耶博世股份有限公司 泵送系统中的泵送方法以及真空泵系统
PL3161318T3 (pl) 2014-06-27 2020-08-10 Ateliers Busch S.A. Sposób pompowania w układzie pomp próżniowych oraz układ pomp próżniowych
WO2016045753A1 (fr) * 2014-09-26 2016-03-31 Ateliers Busch Sa Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage
DE202014007963U1 (de) 2014-10-01 2016-01-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpsystem
CA2961979A1 (fr) * 2014-10-02 2016-04-07 Ateliers Busch Sa Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage
US9982666B2 (en) 2015-05-29 2018-05-29 Agilient Technologies, Inc. Vacuum pump system including scroll pump and secondary pumping mechanism
EP3153708B1 (fr) 2015-10-06 2019-07-17 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
FR3054005B1 (fr) * 2016-07-13 2018-08-24 Pfeiffer Vacuum Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe
CN106762641A (zh) * 2016-11-28 2017-05-31 陈琼 一种真空联合机组
DE202016007609U1 (de) 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
US11123687B2 (en) 2018-03-19 2021-09-21 Hamilton Sundstrand Corporation Vacuum assisted air separation module operation
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
US12180953B2 (en) * 2019-12-04 2024-12-31 Ateliers Busch Sa Redundant pumping system and pumping method by means of this pumping system
US11982406B1 (en) 2021-02-08 2024-05-14 United Launch Alliance, L.L.C. Method and apparatus for controlling temperature and pressure inside a propellant tank
US12110911B1 (en) 2021-02-08 2024-10-08 United Launch Alliance, L.L.C. Ejector with integrated isolation valve
TWI823675B (zh) 2022-11-14 2023-11-21 財團法人工業技術研究院 壓差產生裝置

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Publication number Priority date Publication date Assignee Title
US3239131A (en) * 1963-03-18 1966-03-08 Nash Engineering Co High vacuum ejector pump with automatic cut-in valve
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
EP1234982A1 (fr) * 2001-02-22 2002-08-28 VARIAN S.p.A. Pompe à vide
EP1609990A1 (fr) * 2003-03-03 2005-12-28 OHMI, Tadahiro Dispositif sous vide et pompe sous vide

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US3064878A (en) * 1958-01-03 1962-11-20 Nash Engineering Co Method and apparatus for high performance evacuation system
FR1600217A (fr) * 1968-03-15 1970-07-20
US4699570A (en) 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
FR2640697B1 (fr) * 1988-12-16 1993-01-08 Cit Alcatel Ensemble de pompage pour l'obtention de vides eleves
DE10033212C1 (de) * 2000-07-07 2002-01-24 Festo Ag & Co Vakuumerzeugervorrichtung
FR2822200B1 (fr) 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
CN100348865C (zh) * 2001-09-06 2007-11-14 爱发科股份有限公司 真空排气装置以及真空排气装置的运转方法
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP4365059B2 (ja) * 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法
GB0326613D0 (en) 2003-11-14 2003-12-17 Boc Group Plc Vacuum pump
JP2006037868A (ja) 2004-07-28 2006-02-09 Hitachi Ltd 負圧供給装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3239131A (en) * 1963-03-18 1966-03-08 Nash Engineering Co High vacuum ejector pump with automatic cut-in valve
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
EP1234982A1 (fr) * 2001-02-22 2002-08-28 VARIAN S.p.A. Pompe à vide
EP1609990A1 (fr) * 2003-03-03 2005-12-28 OHMI, Tadahiro Dispositif sous vide et pompe sous vide

Also Published As

Publication number Publication date
CN102713299A (zh) 2012-10-03
TWI507604B (zh) 2015-11-11
JP2013511644A (ja) 2013-04-04
EP2501936A2 (fr) 2012-09-26
KR101778318B1 (ko) 2017-09-13
TW201139850A (en) 2011-11-16
KR20120101000A (ko) 2012-09-12
US9175688B2 (en) 2015-11-03
JP5769722B2 (ja) 2015-08-26
FR2952683A1 (fr) 2011-05-20
EP2501936B1 (fr) 2016-07-27
WO2011061429A2 (fr) 2011-05-26
FR2952683B1 (fr) 2011-11-04
US20120219443A1 (en) 2012-08-30
CN102713299B (zh) 2016-04-27

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