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WO2009074469A3 - Rückkontaktsolarzelle mit grossflächigen rückseiten-emitterbereichen und herstellungsverfahren hierfür - Google Patents

Rückkontaktsolarzelle mit grossflächigen rückseiten-emitterbereichen und herstellungsverfahren hierfür Download PDF

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Publication number
WO2009074469A3
WO2009074469A3 PCT/EP2008/066445 EP2008066445W WO2009074469A3 WO 2009074469 A3 WO2009074469 A3 WO 2009074469A3 EP 2008066445 W EP2008066445 W EP 2008066445W WO 2009074469 A3 WO2009074469 A3 WO 2009074469A3
Authority
WO
WIPO (PCT)
Prior art keywords
regions
emitter
solar cell
rear side
contact solar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/066445
Other languages
English (en)
French (fr)
Other versions
WO2009074469A2 (de
Inventor
Nils-Peter Harder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Solarenergieforschung GmbH
Original Assignee
Institut fuer Solarenergieforschung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut fuer Solarenergieforschung GmbH filed Critical Institut fuer Solarenergieforschung GmbH
Priority to JP2010537373A priority Critical patent/JP2011507246A/ja
Priority to CA2708616A priority patent/CA2708616A1/en
Priority to EP08858742A priority patent/EP2223344A2/de
Priority to US12/747,450 priority patent/US20110023956A1/en
Priority to AU2008334769A priority patent/AU2008334769A1/en
Publication of WO2009074469A2 publication Critical patent/WO2009074469A2/de
Publication of WO2009074469A3 publication Critical patent/WO2009074469A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00—Individual photovoltaic cells, e.g. solar cells
    • H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/146—Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

Es wird eine Rückkontakt-Solarzelle sowie ein Verfahren zu deren Herstellung beschrieben. Die Rückkontakt-Solarzelle weist ein Halbleitersubstrat (1) auf, an dessen Rückseiten-Oberfläche (3) Emitterbereiche (5), die von Emitterkontakten (11) kontaktiert werden, und Basisbereiche (7), die von Basiskontakten (13) kontaktiert werden, ausgebildet sind. Die Emitterbereiche und die Basisbereiche überlappen sich zumindest in Überlappungsbereichen, wobei die Emitterbereiche (5) in den Überlappungsbereichen (19) von der Rückseiten-Oberfläche der Solarzelle aus gesehen tiefer in das Halbleitersubstrat (1) hineinreichen als die Basisbereiche (7). Dadurch kann erreicht werden, dass einerseits ein großer Flächenanteil der Rückseite des Halbleitersubstrats mit einem Ladungsträger-sammelnden Emitter bedeckt sein kann, dieser Emitter jedoch zumindest teilweise im Inneren des Halbleitersubstrats (1) „vergraben' ist, so dass kein Risiko besteht, dass die Basiskontakte 13 einen Kurzschluss zu den vergrabenen Emitterbereichen (5) provozieren.
PCT/EP2008/066445 2007-12-11 2008-11-28 Rückkontaktsolarzelle mit grossflächigen rückseiten-emitterbereichen und herstellungsverfahren hierfür Ceased WO2009074469A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010537373A JP2011507246A (ja) 2007-12-11 2008-11-28 広いうら側エミッタ領域を有する裏面電極型太陽電池およびその製造方法
CA2708616A CA2708616A1 (en) 2007-12-11 2008-11-28 Rear-contact solar cell having extensive rear side emitter regions and method for producing the same
EP08858742A EP2223344A2 (de) 2007-12-11 2008-11-28 Rückkontaktsolarzelle mit grossflächigen rückseiten-emitterbereichen und herstellungsverfahren hierfür
US12/747,450 US20110023956A1 (en) 2007-12-11 2008-11-28 Rear-contact solar cell having extensive rear side emitter regions and method for producing the same
AU2008334769A AU2008334769A1 (en) 2007-12-11 2008-11-28 Rear-contact solar cell having large rear side emitter regions and method for producing the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007059487.0 2007-12-11
DE102007059487 2007-12-11
DE102008030880.3 2008-06-30
DE102008030880A DE102008030880A1 (de) 2007-12-11 2008-06-30 Rückkontaktsolarzelle mit großflächigen Rückseiten-Emitterbereichen und Herstellungsverfahren hierfür

Publications (2)

Publication Number Publication Date
WO2009074469A2 WO2009074469A2 (de) 2009-06-18
WO2009074469A3 true WO2009074469A3 (de) 2009-09-24

Family

ID=40680175

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/066445 Ceased WO2009074469A2 (de) 2007-12-11 2008-11-28 Rückkontaktsolarzelle mit grossflächigen rückseiten-emitterbereichen und herstellungsverfahren hierfür

Country Status (7)

Country Link
US (1) US20110023956A1 (de)
EP (1) EP2223344A2 (de)
JP (1) JP2011507246A (de)
AU (1) AU2008334769A1 (de)
CA (1) CA2708616A1 (de)
DE (1) DE102008030880A1 (de)
WO (1) WO2009074469A2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10239845C1 (de) 2002-08-29 2003-12-24 Day4 Energy Inc Elektrode für fotovoltaische Zellen, fotovoltaische Zelle und fotovoltaischer Modul
CN102105999A (zh) 2008-07-28 2011-06-22 达伊4能量有限公司 用低温精密回蚀和钝化过程制备的具有选择性发射极的晶体硅光伏电池
WO2011105554A1 (ja) * 2010-02-26 2011-09-01 三洋電機株式会社 太陽電池及び太陽電池の製造方法
JP5792523B2 (ja) * 2010-06-18 2015-10-14 株式会社半導体エネルギー研究所 光電変換装置の作製方法
DE102010024835A1 (de) 2010-06-23 2011-12-29 International Solar Energy Research Center Konstanz Method for fabrication of a back side contact solar cell
JP5485062B2 (ja) 2010-07-30 2014-05-07 三洋電機株式会社 太陽電池の製造方法及び太陽電池
JP4944240B1 (ja) * 2010-11-30 2012-05-30 シャープ株式会社 裏面電極型太陽電池セル、配線シート付き裏面電極型太陽電池セル、太陽電池モジュール、配線シート付き裏面電極型太陽電池セルの製造方法および太陽電池モジュールの製造方法
WO2012132595A1 (ja) * 2011-03-25 2012-10-04 三洋電機株式会社 太陽電池
KR101724005B1 (ko) * 2011-04-29 2017-04-07 삼성에스디아이 주식회사 태양전지와 그 제조 방법
US8697559B2 (en) * 2011-07-07 2014-04-15 Varian Semiconductor Equipment Associates, Inc. Use of ion beam tails to manufacture a workpiece
US8692111B2 (en) * 2011-08-23 2014-04-08 Sunpower Corporation High throughput laser ablation processes and structures for forming contact holes in solar cells
KR20130047320A (ko) * 2011-10-31 2013-05-08 삼성에스디아이 주식회사 태양전지와 그 제조 방법
DE102011088899A1 (de) 2011-12-16 2013-06-20 International Solar Energy Research Center Konstanz E.V. Rückkontakt-Solarzelle und Verfahren zur Herstellung einer Rückkontakt-Solarzelle
US8993373B2 (en) * 2012-05-04 2015-03-31 Varian Semiconductor Equipment Associates, Inc. Doping pattern for point contact solar cells
NL2008755C2 (en) * 2012-05-04 2013-11-06 Tempress Ip B V Method of manufacturing a solar cell and equipment therefore.
KR101622089B1 (ko) * 2013-07-05 2016-05-18 엘지전자 주식회사 태양 전지 및 이의 제조 방법
JP6206843B2 (ja) * 2013-09-09 2017-10-04 パナソニックＩｐマネジメント株式会社 太陽電池
TWM477049U (en) * 2013-09-25 2014-04-21 Inventec Solar Energy Corp Back contact electrode solar cell
DE102013220753A1 (de) 2013-10-15 2015-04-16 SolarWorld Industries Thüringen GmbH Solarzelle und Verfahren zu deren Herstellung
US20150179847A1 (en) * 2013-12-20 2015-06-25 Seung Bum Rim Built-in bypass diode
US20170117433A1 (en) * 2014-04-03 2017-04-27 Trina Solar Energy Development Pte Ltd A hybrid all-back-contact solar cell and method of fabricating the same
US20150349180A1 (en) * 2014-05-30 2015-12-03 David D. Smith Relative dopant concentration levels in solar cells
WO2016149174A1 (en) * 2015-03-13 2016-09-22 Natcore Technology, Inc. Laser processed back contact heterojunction solar cells
US10217878B2 (en) 2016-04-01 2019-02-26 Sunpower Corporation Tri-layer semiconductor stacks for patterning features on solar cells
JP6211743B1 (ja) * 2016-12-13 2017-10-11 信越化学工業株式会社 高効率裏面電極型太陽電池セル、太陽電池モジュール、及び太陽光発電システム
JP6371894B2 (ja) * 2017-09-13 2018-08-08 信越化学工業株式会社 高効率裏面電極型太陽電池セル、太陽電池モジュール、及び太陽光発電システム
CN112018196B (zh) * 2020-08-04 2022-11-29 隆基绿能科技股份有限公司 背接触太阳电池及生产方法、背接触电池组件

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5053083A (en) * 1989-05-08 1991-10-01 The Board Of Trustees Of The Leland Stanford Junior University Bilevel contact solar cells
WO2003083955A1 (en) * 2002-03-29 2003-10-09 Ebara Corporation Photovoltaic element and method of manufacturing the same
DE102004050269A1 (de) * 2004-10-14 2006-04-20 Institut Für Solarenergieforschung Gmbh Verfahren zur Kontakttrennung elektrisch leitfähiger Schichten auf rückkontaktierten Solarzellen und Solarzelle
US20070151598A1 (en) * 2005-12-21 2007-07-05 Denis De Ceuster Back side contact solar cell structures and fabrication processes

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4665277A (en) * 1986-03-11 1987-05-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Floating emitter solar cell
US4838952A (en) * 1988-04-29 1989-06-13 Spectrolab, Inc. Controlled reflectance solar cell
US4927770A (en) * 1988-11-14 1990-05-22 Electric Power Research Inst. Corp. Of District Of Columbia Method of fabricating back surface point contact solar cells
EP0531827B1 (de) * 1991-08-30 1996-11-13 Canon Kabushiki Kaisha Solarzelle und deren Herstellungsmethode
US5641362A (en) * 1995-11-22 1997-06-24 Ebara Solar, Inc. Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell
JP3998619B2 (ja) * 2003-09-24 2007-10-31 三洋電機株式会社 光起電力素子およびその製造方法
JP2006332273A (ja) * 2005-05-25 2006-12-07 Sharp Corp 裏面電極型太陽電池
US8008575B2 (en) * 2006-07-24 2011-08-30 Sunpower Corporation Solar cell with reduced base diffusion area

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5053083A (en) * 1989-05-08 1991-10-01 The Board Of Trustees Of The Leland Stanford Junior University Bilevel contact solar cells
WO2003083955A1 (en) * 2002-03-29 2003-10-09 Ebara Corporation Photovoltaic element and method of manufacturing the same
DE102004050269A1 (de) * 2004-10-14 2006-04-20 Institut Für Solarenergieforschung Gmbh Verfahren zur Kontakttrennung elektrisch leitfähiger Schichten auf rückkontaktierten Solarzellen und Solarzelle
US20070151598A1 (en) * 2005-12-21 2007-07-05 Denis De Ceuster Back side contact solar cell structures and fabrication processes

Also Published As

Publication number Publication date
CA2708616A1 (en) 2009-06-18
DE102008030880A1 (de) 2009-06-18
EP2223344A2 (de) 2010-09-01
US20110023956A1 (en) 2011-02-03
AU2008334769A1 (en) 2009-06-18
JP2011507246A (ja) 2011-03-03
WO2009074469A2 (de) 2009-06-18

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