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WO2008129613A1 - Ｔｆｔアレイ検査装置 - Google Patents

Ｔｆｔアレイ検査装置 Download PDF

Info

Publication number
WO2008129613A1
WO2008129613A1 PCT/JP2007/057807 JP2007057807W WO2008129613A1 WO 2008129613 A1 WO2008129613 A1 WO 2008129613A1 JP 2007057807 W JP2007057807 W JP 2007057807W WO 2008129613 A1 WO2008129613 A1 WO 2008129613A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
main chamber
drive motor
drive mechanism
tft array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057807
Other languages
English (en)
French (fr)
Inventor
Hideki Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to PCT/JP2007/057807 priority Critical patent/WO2008129613A1/ja
Publication of WO2008129613A1 publication Critical patent/WO2008129613A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/3306—
    • H10P72/7612—
    • H10P72/7622—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

ＴＦＴアレイ検査装置は、ガラス基板用ステージ２とステージ駆動機構と、メインチャンバ１の上方に設けた電子銃ユニット３を備える。ガラス基板検査用ステージ２はメインチャンバ１内に設け、ステージ駆動機構が備えるＺステージ駆動機構７の少なくとも駆動モータ７ａをメインチャンバ１外に設け、メインチャンバを小型化する。Ｚステージ駆動機構は、メインチャンバ１の外部に設けられたＺ軸駆動用モータ７ａによって駆動され、メインチャンバ１内に設けられたＺステージ２ｄをＺ方向に移動する。駆動モータをメインチャンバの外部に設けることによって、大きな出力トルクを有する駆動モータの使用を可能として、Ｚステージの駆動速度を高め、ガラス基板の検査のスループットを高める。
PCT/JP2007/057807 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置 Ceased WO2008129613A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057807 WO2008129613A1 (ja) 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057807 WO2008129613A1 (ja) 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置

Publications (1)

Publication Number Publication Date
WO2008129613A1 true WO2008129613A1 (ja) 2008-10-30

Family

ID=39875162

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057807 Ceased WO2008129613A1 (ja) 2007-04-09 2007-04-09 Ｔｆｔアレイ検査装置

Country Status (1)

Country Link
WO (1) WO2008129613A1 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261018A (ja) * 2001-03-05 2002-09-13 Yuzo Mori エピタキシャルＳｉの高速成膜方法
JP2005227263A (ja) * 2004-02-12 2005-08-25 Applied Materials Inc 集積基板搬送モジュールを備えた電子ビームテストシステム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261018A (ja) * 2001-03-05 2002-09-13 Yuzo Mori エピタキシャルＳｉの高速成膜方法
JP2005227263A (ja) * 2004-02-12 2005-08-25 Applied Materials Inc 集積基板搬送モジュールを備えた電子ビームテストシステム

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