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WO2008129613A1 - Tft array inspection device - Google Patents

Tft array inspection device Download PDF

Info

Publication number
WO2008129613A1
WO2008129613A1 PCT/JP2007/057807 JP2007057807W WO2008129613A1 WO 2008129613 A1 WO2008129613 A1 WO 2008129613A1 JP 2007057807 W JP2007057807 W JP 2007057807W WO 2008129613 A1 WO2008129613 A1 WO 2008129613A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
main chamber
drive motor
drive mechanism
tft array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057807
Other languages
French (fr)
Japanese (ja)
Inventor
Hideki Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to PCT/JP2007/057807 priority Critical patent/WO2008129613A1/en
Publication of WO2008129613A1 publication Critical patent/WO2008129613A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/3306—
    • H10P72/7612—
    • H10P72/7622—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A TFT array inspection device comprises a stage (2) for a glass substrate, a stage drive mechanism, and an electronic gun unit (3) provided above a main chamber (1). The stage (2) for a glass substrate is disposed in the main chamber (1) and at least the drive motor (7a) of a Z-stage drive mechanism (7) provided in the stage drive mechanism is disposed outside the main chamber (1), whereby the main chamber can be small-sized. The Z-stage drive mechanism is driven by the Z-axis drive motor (7a) disposed outside the main chamber (1), and moves a Z-stage (2d) disposed in the main chamber (1) in the Z-direction. Since the drive motor is disposed outside the main chamber, a drive motor with a large output torque can be used to increase the drive speed of the Z-stage, thereby enhancing a throughput for inspection of a glass substrate.
PCT/JP2007/057807 2007-04-09 2007-04-09 Tft array inspection device Ceased WO2008129613A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057807 WO2008129613A1 (en) 2007-04-09 2007-04-09 Tft array inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057807 WO2008129613A1 (en) 2007-04-09 2007-04-09 Tft array inspection device

Publications (1)

Publication Number Publication Date
WO2008129613A1 true WO2008129613A1 (en) 2008-10-30

Family

ID=39875162

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057807 Ceased WO2008129613A1 (en) 2007-04-09 2007-04-09 Tft array inspection device

Country Status (1)

Country Link
WO (1) WO2008129613A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261018A (en) * 2001-03-05 2002-09-13 Yuzo Mori METHOD FOR HIGH-SPEED FILM GROWTH OF EPITAXIAL Si
JP2005227263A (en) * 2004-02-12 2005-08-25 Applied Materials Inc Electron beam test system with integrated substrate transfer module

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261018A (en) * 2001-03-05 2002-09-13 Yuzo Mori METHOD FOR HIGH-SPEED FILM GROWTH OF EPITAXIAL Si
JP2005227263A (en) * 2004-02-12 2005-08-25 Applied Materials Inc Electron beam test system with integrated substrate transfer module

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