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WO2009022410A1 - 弾性境界波装置 - Google Patents

弾性境界波装置 Download PDF

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Publication number
WO2009022410A1
WO2009022410A1 PCT/JP2007/065855 JP2007065855W WO2009022410A1 WO 2009022410 A1 WO2009022410 A1 WO 2009022410A1 JP 2007065855 W JP2007065855 W JP 2007065855W WO 2009022410 A1 WO2009022410 A1 WO 2009022410A1
Authority
WO
WIPO (PCT)
Prior art keywords
boundary wave
elastic boundary
dielectric layer
wave device
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/065855
Other languages
English (en)
French (fr)
Inventor
Takashi Matsuda
Satoru Matsuda
Michio Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to PCT/JP2007/065855 priority Critical patent/WO2009022410A1/ja
Priority to CN200780100263.8A priority patent/CN101796727B/zh
Priority to JP2009527999A priority patent/JP4920750B2/ja
Publication of WO2009022410A1 publication Critical patent/WO2009022410A1/ja
Priority to US12/705,565 priority patent/US7915786B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

　本発明の弾性境界波装置は、複数の弾性境界波素子を含み、前記弾性境界波素子は、圧電材料層と、前記圧電材料層の上に配置された電極と、前記電極を覆うように前記圧電材料層の上に形成された第１誘電体層と、前記第１誘電体層の上に形成された第２誘電体層とを含み、前記第２誘電体層の音速は、前記第１誘電体層の音速よりも速く、前記複数の弾性境界波素子の少なくとも１つの弾性境界波素子の第２誘電体層の音速は、他の弾性境界波素子の第２誘電体層の音速と異なることを特徴とする。これにより、弾性境界波装置のフィルタとしての抑圧度を改善することができる。
PCT/JP2007/065855 2007-08-14 2007-08-14 弾性境界波装置 Ceased WO2009022410A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2007/065855 WO2009022410A1 (ja) 2007-08-14 2007-08-14 弾性境界波装置
CN200780100263.8A CN101796727B (zh) 2007-08-14 2007-08-14 弹性边界波装置
JP2009527999A JP4920750B2 (ja) 2007-08-14 2007-08-14 弾性境界波装置
US12/705,565 US7915786B2 (en) 2007-08-14 2010-02-12 Elastic boundary wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/065855 WO2009022410A1 (ja) 2007-08-14 2007-08-14 弾性境界波装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/705,565 Continuation US7915786B2 (en) 2007-08-14 2010-02-12 Elastic boundary wave device

Publications (1)

Publication Number Publication Date
WO2009022410A1 true WO2009022410A1 (ja) 2009-02-19

Family

ID=40350474

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/065855 Ceased WO2009022410A1 (ja) 2007-08-14 2007-08-14 弾性境界波装置

Country Status (4)

Country Link
US (1) US7915786B2 (ja)
JP (1) JP4920750B2 (ja)
CN (1) CN101796727B (ja)
WO (1) WO2009022410A1 (ja)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010101166A1 (ja) * 2009-03-04 2010-09-10 株式会社村田製作所 弾性表面波素子とその製造方法
WO2010131606A1 (ja) * 2009-05-12 2010-11-18 株式会社村田製作所 弾性境界波装置
WO2011018913A1 (ja) * 2009-08-10 2011-02-17 株式会社村田製作所 弾性境界波装置
WO2011040332A1 (ja) * 2009-09-30 2011-04-07 株式会社村田製作所 弾性波フィルタ装置及びそれを備える分波器
JP2011130006A (ja) * 2009-12-15 2011-06-30 Taiyo Yuden Co Ltd 弾性波素子、通信モジュール、通信装置
CN102484466A (zh) * 2009-09-11 2012-05-30 松下电器产业株式会社 弹性波元件与弹性波元件传感器
WO2013080461A1 (ja) * 2011-11-30 2013-06-06 パナソニック株式会社 ラダー型弾性波フィルタと、これを用いたアンテナ共用器
JP2013225853A (ja) * 2012-04-19 2013-10-31 Triquint Semiconductor Inc 高結合で低損失な圧電境界波デバイスおよび関連する方法
US20140312736A1 (en) * 2008-04-01 2014-10-23 Epcos Ag Electricoacoustic Component with Structured Conductor and Dielectric Layer
JP2016501471A (ja) * 2012-11-19 2016-01-18 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 電子音響デバイスおよびその製造方法
GB2576401A (en) * 2018-06-13 2020-02-19 Skyworks Solutions Inc Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter
JP2020182130A (ja) * 2019-04-25 2020-11-05 太陽誘電株式会社 フィルタおよびマルチプレクサ
JP2022530692A (ja) * 2019-06-24 2022-06-30 レゾナント インコーポレイテッド 分割ラダー弾性波フィルタ

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* Cited by examiner, † Cited by third party
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JP4894861B2 (ja) * 2006-12-25 2012-03-14 株式会社村田製作所 弾性境界波装置
US8154171B2 (en) * 2007-10-23 2012-04-10 Panasonic Corporation Boundary acoustic wave device
JP5339582B2 (ja) * 2008-07-31 2013-11-13 太陽誘電株式会社 弾性波デバイス
WO2010079575A1 (ja) * 2009-01-07 2010-07-15 株式会社村田製作所 弾性境界波装置
JP4841640B2 (ja) * 2009-03-25 2011-12-21 太陽誘電株式会社 弾性波デバイスおよびその製造方法
US8723392B2 (en) 2011-07-15 2014-05-13 International Business Machines Corporation Saw filter having planar barrier layer and method of making
JP5700132B2 (ja) * 2011-09-30 2015-04-15 株式会社村田製作所 弾性波装置
EP2830216A4 (en) * 2012-03-23 2016-04-27 Murata Manufacturing Co ELASTIC WAVING DEVICE AND MANUFACTURING METHOD THEREFOR
US9236849B2 (en) * 2012-04-19 2016-01-12 Triquint Semiconductor, Inc. High coupling, low loss PBAW device and associated method
KR102067310B1 (ko) * 2012-07-30 2020-01-16 스카이워크스 필터 솔루션즈 재팬 씨오., 엘티디. 탄성파 소자와 이것을 사용한 안테나 공용기
US12355415B2 (en) * 2022-01-20 2025-07-08 Skyworks Solutions, Inc. Multi-band filter with suppressed shear horizontal mode

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005069486A1 (ja) * 2004-01-19 2005-07-28 Murata Manufacturing Co., Ltd. 弾性境界波装置
JP2006279609A (ja) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk 弾性境界波素子、共振子およびラダー型フィルタ
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置

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JPH0563500A (ja) 1991-08-30 1993-03-12 Tdk Corp 表面弾性波素子
JP3139225B2 (ja) 1993-07-08 2001-02-26 株式会社村田製作所 弾性表面波フィルタ
WO1998052279A1 (fr) 1997-05-12 1998-11-19 Hitachi, Ltd. Dispositif a onde elastique
JP2005117641A (ja) 2003-09-17 2005-04-28 Matsushita Electric Ind Co Ltd 圧電体共振器、それを用いたフィルタ及び共用器
CN1914801B (zh) * 2004-02-06 2011-11-23 松下电器产业株式会社 声表面波滤波器和使用该滤波器的天线共用器
WO2005093949A1 (ja) * 2004-03-29 2005-10-06 Murata Manufacturing Co., Ltd. 弾性境界波装置の製造方法及び弾性境界波装置
EP1871006B1 (en) * 2005-04-08 2017-07-19 Murata Manufacturing Co., Ltd. Elastic wave element
JP4466655B2 (ja) * 2005-05-20 2010-05-26 株式会社村田製作所 弾性境界波装置
JP4937605B2 (ja) 2006-03-07 2012-05-23 太陽誘電株式会社 弾性境界波デバイス
JP4943787B2 (ja) 2006-09-13 2012-05-30 太陽誘電株式会社 弾性波デバイス、共振器およびフィルタ
JP2008078739A (ja) * 2006-09-19 2008-04-03 Fujitsu Media Device Kk 弾性波デバイスおよびフィルタ
JP4760911B2 (ja) * 2006-09-21 2011-08-31 株式会社村田製作所 弾性境界波装置
JP4917396B2 (ja) * 2006-09-25 2012-04-18 太陽誘電株式会社 フィルタおよび分波器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005069486A1 (ja) * 2004-01-19 2005-07-28 Murata Manufacturing Co., Ltd. 弾性境界波装置
JP2006279609A (ja) * 2005-03-29 2006-10-12 Fujitsu Media Device Kk 弾性境界波素子、共振子およびラダー型フィルタ
WO2006114930A1 (ja) * 2005-04-25 2006-11-02 Murata Manufacturing Co., Ltd. 弾性境界波装置

Cited By (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9941858B2 (en) * 2008-04-01 2018-04-10 Snaptrack, Inc. Electricoacoustic component with structured conductor and dielectric layer
US20140312736A1 (en) * 2008-04-01 2014-10-23 Epcos Ag Electricoacoustic Component with Structured Conductor and Dielectric Layer
JP5163805B2 (ja) * 2009-03-04 2013-03-13 株式会社村田製作所 弾性表面波素子とその製造方法
CN102334290A (zh) * 2009-03-04 2012-01-25 株式会社村田制作所 表面声波元件及其制造方法
WO2010101166A1 (ja) * 2009-03-04 2010-09-10 株式会社村田製作所 弾性表面波素子とその製造方法
CN102334290B (zh) * 2009-03-04 2014-09-17 株式会社村田制作所 表面声波元件及其制造方法
US8575818B2 (en) 2009-03-04 2013-11-05 Murata Manufacturing Co., Ltd. Surface acoustic wave element
JPWO2010131606A1 (ja) * 2009-05-12 2012-11-01 株式会社村田製作所 弾性境界波装置
WO2010131606A1 (ja) * 2009-05-12 2010-11-18 株式会社村田製作所 弾性境界波装置
WO2011018913A1 (ja) * 2009-08-10 2011-02-17 株式会社村田製作所 弾性境界波装置
US8344589B2 (en) 2009-08-10 2013-01-01 Murata Manufacturing Co., Ltd. Boundary acoustic wave device
JP5304898B2 (ja) * 2009-08-10 2013-10-02 株式会社村田製作所 弾性境界波装置
US9160299B2 (en) 2009-09-11 2015-10-13 Panasonic Intellectual Property Management Co., Ltd. Acoustic wave element and acoustic wave element sensor
CN102484466A (zh) * 2009-09-11 2012-05-30 松下电器产业株式会社 弹性波元件与弹性波元件传感器
JP5338912B2 (ja) * 2009-09-30 2013-11-13 株式会社村田製作所 弾性波フィルタ装置及びそれを備える分波器
WO2011040332A1 (ja) * 2009-09-30 2011-04-07 株式会社村田製作所 弾性波フィルタ装置及びそれを備える分波器
JP2011130006A (ja) * 2009-12-15 2011-06-30 Taiyo Yuden Co Ltd 弾性波素子、通信モジュール、通信装置
WO2013080461A1 (ja) * 2011-11-30 2013-06-06 パナソニック株式会社 ラダー型弾性波フィルタと、これを用いたアンテナ共用器
US10044340B2 (en) 2011-11-30 2018-08-07 Skyworks Filter Solutions Japan Co., Ltd. Ladder-type elastic wave filter having series and parallel resonators
US9467117B2 (en) 2011-11-30 2016-10-11 Skyworks Filter Solutions Japan Co., Ltd. Ladder-type elastic wave filter and antenna duplexer using same
JP2013225853A (ja) * 2012-04-19 2013-10-31 Triquint Semiconductor Inc 高結合で低損失な圧電境界波デバイスおよび関連する方法
US9998090B2 (en) 2012-11-19 2018-06-12 Qualcomm Incorporated Electroacoustic component and method for the production thereof
JP2016501471A (ja) * 2012-11-19 2016-01-18 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 電子音響デバイスおよびその製造方法
GB2576401A (en) * 2018-06-13 2020-02-19 Skyworks Solutions Inc Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter
GB2576401B (en) * 2018-06-13 2022-09-21 Skyworks Solutions Inc Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter
JP2020182130A (ja) * 2019-04-25 2020-11-05 太陽誘電株式会社 フィルタおよびマルチプレクサ
JP7624796B2 (ja) 2019-04-25 2025-01-31 太陽誘電株式会社 ラダー型フィルタおよびマルチプレクサ
JP2022530692A (ja) * 2019-06-24 2022-06-30 レゾナント インコーポレイテッド 分割ラダー弾性波フィルタ

Also Published As

Publication number Publication date
JPWO2009022410A1 (ja) 2010-11-11
CN101796727A (zh) 2010-08-04
US20100141088A1 (en) 2010-06-10
CN101796727B (zh) 2016-04-27
JP4920750B2 (ja) 2012-04-18
US7915786B2 (en) 2011-03-29

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