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WO2008031609A8 - Method for the adjusted connection of plates and optical module produced according to said method - Google Patents

Method for the adjusted connection of plates and optical module produced according to said method

Info

Publication number
WO2008031609A8
WO2008031609A8 PCT/EP2007/008020 EP2007008020W WO2008031609A8 WO 2008031609 A8 WO2008031609 A8 WO 2008031609A8 EP 2007008020 W EP2007008020 W EP 2007008020W WO 2008031609 A8 WO2008031609 A8 WO 2008031609A8
Authority
WO
WIPO (PCT)
Prior art keywords
plates
optical module
produced according
module produced
adjusted connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2007/008020
Other languages
German (de)
French (fr)
Other versions
WO2008031609A1 (en
Inventor
Georg Guenther
Karlheinz Bartzke
Ulrich Preisser
Hans-Juergen Luetz
Erik Beckert
Steffen Boehme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Carl Zeiss AG
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG, Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Carl Zeiss AG
Publication of WO2008031609A1 publication Critical patent/WO2008031609A1/en
Publication of WO2008031609A8 publication Critical patent/WO2008031609A8/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • G02B7/004Manual alignment, e.g. micromanipulators
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Coupling Of Light Guides (AREA)

Abstract

The invention relates to a method for connecting plates and to an optical module produced according to said method. The plates (11, 22) to be connected are first arranged next to each other. At least one auxiliary element (21a) is placed in a borehole (25a) associated therewith and perpendicular to the plane of one plate, by means of winches which are parallel to the direction of the borehole, such that the auxiliary element touches the other plate. The position of the two plates in relation to each other is then adjusted and a fixed connection is created between the plates and the at least one auxiliary element by means of adhesive (26a, 27a).
PCT/EP2007/008020 2006-09-14 2007-09-14 Method for the adjusted connection of plates and optical module produced according to said method Ceased WO2008031609A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200610043185 DE102006043185B4 (en) 2006-09-14 2006-09-14 Method of adjusting plate bonding and optical assembly made by this method
DE102006043185.5 2006-09-14

Publications (2)

Publication Number Publication Date
WO2008031609A1 WO2008031609A1 (en) 2008-03-20
WO2008031609A8 true WO2008031609A8 (en) 2008-07-03

Family

ID=38983604

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/008020 Ceased WO2008031609A1 (en) 2006-09-14 2007-09-14 Method for the adjusted connection of plates and optical module produced according to said method

Country Status (2)

Country Link
DE (1) DE102006043185B4 (en)
WO (1) WO2008031609A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013209819B4 (en) 2013-05-27 2018-01-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optical structure with webs disposed thereon and method of making the same
DE102018128863A1 (en) 2018-11-16 2020-05-20 HELLA GmbH & Co. KGaA Method for gluing two components that are positioned exactly in relation to each other
DE102019209610A1 (en) * 2019-07-01 2021-01-07 Carl Zeiss Smt Gmbh Method and device for producing an adhesive connection between a first component and a second component

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3310973A1 (en) * 1983-03-25 1984-09-27 Siemens AG, 1000 Berlin und 8000 München CONNECTING PART FOR DETACHABLE CONNECTORS OF LIGHTWAVE GUIDES, METHOD FOR THE PRODUCTION THEREOF AND DEVICE FOR IMPLEMENTING THE METHOD
US4712444A (en) * 1986-09-16 1987-12-15 Ball Corporation Levered optical mount
DE4113955C1 (en) * 1991-04-29 1992-06-25 Optische Werke G. Rodenstock, 8000 Muenchen, De Securing optical element in appropriate socket - uses several recesses in socket, adjacent to flat side faces of optical element
DE4113956C2 (en) * 1991-04-29 1993-12-23 Rodenstock Optik G Optical system
US5579164A (en) * 1993-11-12 1996-11-26 Pharos Technology Corporation Spatially multiplexed image display system
US5505422A (en) * 1994-06-02 1996-04-09 Bio-Rad Laboratories Top adjustable kinematic mount
DE19623418C2 (en) * 1996-06-12 2001-04-19 Zeiss Carl Jena Gmbh Self-centering bracket for at least one lens assembly
DE19755483A1 (en) * 1997-12-13 1999-06-17 Zeiss Carl Fa Connected body
US6256118B1 (en) * 1998-05-22 2001-07-03 Eastman Kodak Company Ultraviolet curable riveting of precision aligned components
DE19825716A1 (en) * 1998-06-09 1999-12-16 Zeiss Carl Fa Optical element and socket assembly
DE10053899A1 (en) * 2000-10-31 2002-05-08 Zeiss Carl Bearing system for precision optical system minimises distortion from dynamic forces
US6639742B2 (en) * 2001-08-30 2003-10-28 3M Innovative Properties Company Apparatus and methods for mounting an optical element in an optical system
DE10228053B4 (en) * 2002-06-19 2006-06-14 Carl Zeiss Jena Gmbh Element and method for its production, in which two bodies positioned with respect to at least one adjusting axis are connected to one another in a material-locking manner
JP4565261B2 (en) * 2002-06-24 2010-10-20 株式会社ニコン Optical element holding mechanism, optical system barrel, and exposure apparatus
DE10316590A1 (en) * 2003-04-11 2004-10-28 Carl Zeiss Smt Ag Bearing for optical element connected to holder in microlithography projection lens, compensates for aberration by optical element tilting to holder when thermally expanding

Also Published As

Publication number Publication date
DE102006043185A1 (en) 2008-04-03
DE102006043185B4 (en) 2010-05-20
WO2008031609A1 (en) 2008-03-20

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