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WO2005078752A8 - Dispositif de type microsysteme electromecanique a film mince piezoelectrique - Google Patents

Dispositif de type microsysteme electromecanique a film mince piezoelectrique

Info

Publication number
WO2005078752A8
WO2005078752A8 PCT/EP2005/000430 EP2005000430W WO2005078752A8 WO 2005078752 A8 WO2005078752 A8 WO 2005078752A8 EP 2005000430 W EP2005000430 W EP 2005000430W WO 2005078752 A8 WO2005078752 A8 WO 2005078752A8
Authority
WO
WIPO (PCT)
Prior art keywords
film
piezoelectric thin
electromechanical microsystem
crossarm
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2005/000430
Other languages
English (en)
Other versions
WO2005078752A1 (fr
Inventor
Marc-Alexandre Dubois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement
Original Assignee
CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement filed Critical CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement
Publication of WO2005078752A1 publication Critical patent/WO2005078752A1/fr
Publication of WO2005078752A8 publication Critical patent/WO2005078752A8/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0036—Movable armature with higher resonant frequency for faster switching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H2201/00—Contacts
    • H01H2201/02—Piezo element

Landscapes

  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Dispositif de type microsystème électromécanique (MEMS) à film mince piézoélectrique (18) comportant un commutateur RF-MEMS (14) et un résonateur RF à film mince piézoélectrique (10) à ondes acoustiques de volume monté sur un substrat (12) pourvu d'un miroir acoustique (28). Le résonateur comporte une portion (16) du film mince disposée entre les deux électrodes métalliques (20, 24). Le commutateur (14) comporte une poutre bi-couche présentant une couche d'isolant (38) associée à une autre portion (36) du film piézoélectrique (18) et portant un contact métallique mobile (50) destiné à venir en appui sur des contacts métalliques fixes (46, 48) par déformation de la poutre sous l'action d'une tension sur les électrodes de commande (40, 42).
PCT/EP2005/000430 2004-01-14 2005-01-12 Dispositif de type microsysteme electromecanique a film mince piezoelectrique Ceased WO2005078752A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0400308 2004-01-14
FR0400308A FR2864951B1 (fr) 2004-01-14 2004-01-14 Dispositif de type microsysteme electromecanique a film mince piezoelectrique

Publications (2)

Publication Number Publication Date
WO2005078752A1 WO2005078752A1 (fr) 2005-08-25
WO2005078752A8 true WO2005078752A8 (fr) 2005-10-20

Family

ID=34684979

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/000430 Ceased WO2005078752A1 (fr) 2004-01-14 2005-01-12 Dispositif de type microsysteme electromecanique a film mince piezoelectrique

Country Status (2)

Country Link
FR (1) FR2864951B1 (fr)
WO (1) WO2005078752A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7098577B2 (en) * 2002-10-21 2006-08-29 Hrl Laboratories, Llc Piezoelectric switch for tunable electronic components
US7085121B2 (en) 2002-10-21 2006-08-01 Hrl Laboratories, Llc Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
US7656071B2 (en) 2002-10-21 2010-02-02 Hrl Laboratories, Llc Piezoelectric actuator for tunable electronic components
EP1726048B1 (fr) * 2003-12-22 2008-09-10 Nxp B.V. Composant electronique
JP4438786B2 (ja) 2005-11-17 2010-03-24 セイコーエプソン株式会社 Ｍｅｍｓ振動子及びその製造方法
WO2009043370A1 (fr) * 2007-10-01 2009-04-09 Telefonaktiebolaget Lm Ericsson (Publ) Dispositif de commutation commandé en tension
US9048809B2 (en) 2012-01-03 2015-06-02 International Business Machines Corporation Method of manufacturing switchable filters
CN111934635B (zh) * 2020-06-30 2024-03-01 上海科技大学 微机电无线信号唤醒接收器及其制备方法
CN115051680B (zh) * 2021-03-08 2026-01-09 诺思(天津)微系统有限责任公司 具有单晶和多晶体声波谐振器的滤波器及电子设备
CN114222230B (zh) * 2021-11-30 2025-08-19 瑞声声学科技(深圳)有限公司 一种麦克风芯片及麦克风

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI108583B (fi) * 1998-06-02 2002-02-15 Nokia Corp Resonaattorirakenteita
JP3712123B2 (ja) * 2002-03-25 2005-11-02 富士通メディアデバイス株式会社 可変キャパシタ及びその製造方法
TW540173B (en) * 2002-05-03 2003-07-01 Asia Pacific Microsystems Inc Bulk acoustic device having integrated fine-tuning and trimming devices

Also Published As

Publication number Publication date
WO2005078752A1 (fr) 2005-08-25
FR2864951B1 (fr) 2006-03-31
FR2864951A1 (fr) 2005-07-15

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