FR2864951B1 - Dispositif de type microsysteme electromecanique a film mince piezoelectrique - Google Patents

Dispositif de type microsysteme electromecanique a film mince piezoelectrique

Info

Publication number: FR2864951B1
Authority: FR; France
Prior art keywords: thin film; type device; piezoelectric thin; electromechanical microsystem; microsystem type
Prior art date: 2004-01-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR0400308A

Other languages

English (en)

Other versions

FR2864951A1 (fr

Inventor

Marc Alexandre Dubois

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement

Original Assignee

CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-01-14

Filing date

2004-01-14

Publication date

2006-03-31

2004-01-14 Application filed by CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement filed Critical CSEM Centre Suisse dElectronique et de Microtechnique SA Recherche et Développement

2004-01-14 Priority to FR0400308A priority Critical patent/FR2864951B1/fr

2005-01-12 Priority to PCT/EP2005/000430 priority patent/WO2005078752A1/fr

2005-07-15 Publication of FR2864951A1 publication Critical patent/FR2864951A1/fr

2006-03-31 Application granted granted Critical

2006-03-31 Publication of FR2864951B1 publication Critical patent/FR2864951B1/fr

2024-01-14 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0036—Movable armature with higher resonant frequency for faster switching
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H2201/00—Contacts
- H01H2201/02—Piezo element

FR0400308A 2004-01-14 2004-01-14 Dispositif de type microsysteme electromecanique a film mince piezoelectrique Expired - Fee Related FR2864951B1 (fr)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
FR0400308A FR2864951B1 (fr)	2004-01-14	2004-01-14	Dispositif de type microsysteme electromecanique a film mince piezoelectrique
PCT/EP2005/000430 WO2005078752A1 (fr)	2004-01-14	2005-01-12	Dispositif de type microsysteme electromecanique a film mince piezoelectrique

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR0400308A FR2864951B1 (fr)	2004-01-14	2004-01-14	Dispositif de type microsysteme electromecanique a film mince piezoelectrique

Publications (2)

Publication Number	Publication Date
FR2864951A1 FR2864951A1 (fr)	2005-07-15
FR2864951B1 true FR2864951B1 (fr)	2006-03-31

Family

ID=34684979

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR0400308A Expired - Fee Related FR2864951B1 (fr)	2004-01-14	2004-01-14	Dispositif de type microsysteme electromecanique a film mince piezoelectrique

Country Status (2)

Country	Link
FR (1)	FR2864951B1 (fr)
WO (1)	WO2005078752A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7098577B2 (en) *	2002-10-21	2006-08-29	Hrl Laboratories, Llc	Piezoelectric switch for tunable electronic components
US7085121B2 (en)	2002-10-21	2006-08-01	Hrl Laboratories, Llc	Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
US7656071B2 (en)	2002-10-21	2010-02-02	Hrl Laboratories, Llc	Piezoelectric actuator for tunable electronic components
EP1726048B1 (fr) *	2003-12-22	2008-09-10	Nxp B.V.	Composant electronique
JP4438786B2 (ja)	2005-11-17	2010-03-24	セイコーエプソン株式会社	Ｍｅｍｓ振動子及びその製造方法
WO2009043370A1 (fr) *	2007-10-01	2009-04-09	Telefonaktiebolaget Lm Ericsson (Publ)	Dispositif de commutation commandé en tension
US9048809B2 (en)	2012-01-03	2015-06-02	International Business Machines Corporation	Method of manufacturing switchable filters
CN111934635B (zh) *	2020-06-30	2024-03-01	上海科技大学	微机电无线信号唤醒接收器及其制备方法
CN115051680B (zh) *	2021-03-08	2026-01-09	诺思(天津)微系统有限责任公司	具有单晶和多晶体声波谐振器的滤波器及电子设备
CN114222230B (zh) *	2021-11-30	2025-08-19	瑞声声学科技(深圳)有限公司	一种麦克风芯片及麦克风

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FI108583B (fi) *	1998-06-02	2002-02-15	Nokia Corp	Resonaattorirakenteita
JP3712123B2 (ja) *	2002-03-25	2005-11-02	富士通メディアデバイス株式会社	可変キャパシタ及びその製造方法
TW540173B (en) *	2002-05-03	2003-07-01	Asia Pacific Microsystems Inc	Bulk acoustic device having integrated fine-tuning and trimming devices

2004
- 2004-01-14 FR FR0400308A patent/FR2864951B1/fr not_active Expired - Fee Related
2005
- 2005-01-12 WO PCT/EP2005/000430 patent/WO2005078752A1/fr not_active Ceased

Also Published As

Publication number	Publication date
WO2005078752A1 (fr)	2005-08-25
WO2005078752A8 (fr)	2005-10-20
FR2864951A1 (fr)	2005-07-15

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Legal Events

Date	Code	Title	Description
2014-10-31	ST	Notification of lapse	Effective date: 20140930