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WO2002003035A1 - Procede et dispositif pour tester une ebauche - Google Patents

Procede et dispositif pour tester une ebauche Download PDF

Info

Publication number
WO2002003035A1
WO2002003035A1 PCT/DE2001/002394 DE0102394W WO0203035A1 WO 2002003035 A1 WO2002003035 A1 WO 2002003035A1 DE 0102394 W DE0102394 W DE 0102394W WO 0203035 A1 WO0203035 A1 WO 0203035A1
Authority
WO
WIPO (PCT)
Prior art keywords
reaction
operating
test
stimulation
test object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2001/002394
Other languages
German (de)
English (en)
Inventor
Rolf Jäger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SZ TESTSYSTEME AG
Original Assignee
SZ TESTSYSTEME AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SZ TESTSYSTEME AG filed Critical SZ TESTSYSTEME AG
Priority to JP2002508052A priority Critical patent/JP2004502931A/ja
Priority to EP01984084A priority patent/EP1299696A1/fr
Publication of WO2002003035A1 publication Critical patent/WO2002003035A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D7/00—Indicating measured values

Definitions

  • the invention relates to a method and a device for testing a test specimen.
  • stimulation devices which, by specifically influencing the operating conditions in the test object or by applying predetermined stimulations, for example a predetermined voltage or pressure function, enable the test object to run through an entire operating range or to provide targeted stimulation at selected operating points .
  • predetermined stimulations for example a predetermined voltage or pressure function
  • the reactions of the test object to the stimulation serve as initial values, on the basis of which a test protocol is created and compared with reference values.
  • the duration of the evaluation can increase to an unacceptable level.
  • the test object is typically only tested at selected operating points or predominantly in "interesting" operating areas.
  • this has the serious disadvantage that the "interesting" operating areas of a new prototype are not necessarily known a priori.
  • sporadic errors are often not recognized.
  • quality gaps because only certain, specified settings are recorded.
  • the rapid measurement of individually selected points can cause undesired settling processes that falsify the measurement results.
  • feedback of the measurement results into the development or manufacturing process of the test object is insufficient or not possible at all.
  • An object of the invention is to provide a test method or a test device, to avoid the above-mentioned disadvantages of the prior art and to enable extensive tests to be carried out efficiently.
  • the implementation of the invention should not require costly or complex modifications of any existing test devices available on the market.
  • the invention is based on the basic principle of the inventive, symbiotic combination of conventional stimulation techniques (which can only be expanded essentially due to the method) with an evaluation of the reactions of the test specimen by techniques known per se from image processing. Further embodiments of the invention are refined by new techniques which advantageously support or utilize the symbiotic effect of this combination.
  • the reaction of the test object with respect to at least one test criterion is used to determine the content of the pixels to be processed.
  • the pixels also called pixels, result in a multidimensional image in which the image coordinates are determined by operating parameters. Accordingly, there is a clear association between each pixel and a specific operating area, the size of a respective pixel or its associated operating area being able to be varied as required.
  • Analog and digital results can be processed. The digital ones can be fed directly to the digital image processing.
  • the invention can be used for any types of test specimen, any operating parameters and any test criteria.
  • the invention can be used to test the functionality of an analog, digital, or hybrid electronic circuit.
  • the image i.e. the reaction of the test object is evaluated by reference to one or more stored pattern reactions, which may also be linked to one another.
  • This is useful, for example, when a subject is to be compared with a sample. It is also possible to create a fictitious sample reaction that is created by the user or that results from the mathematical or image-processing summary of several sample reactions, which thus takes into account the reactions of several sample candidates or a fictitious sample candidate.
  • a measured value obtained can also be used as a further image coordinate (variable). This can be done, for example, analogously when comparing iterative matching processes and their course and digitally when using the digital signature for random address control.
  • the undefined pixels ie the operating points that are not explicitly excited or measured during the stimulation, can be interpolated or extrapolated from the measured pixels using image processing algorithms.
  • image processing algorithms there is also a comparison without direct interpolation or extrapolation the undefined image areas possible through image processing measures.
  • the stimulation can take the form of analog, discrete or digital stimulation. Possibly. one of the operating parameters is changed continuously in order to keep the effect of any transient events as low as possible.
  • the reaction of the test object is only recorded at the specified operating points or in the specified operating ranges.
  • one of the operating parameters to be set for the stimulation can be determined for several operating points using a look-up table.
  • programmable stimuli can be generated that optimally measure a response to transients or step functions.
  • Such a stimulation can also be used to measure switching times, delay times and hysteresis behavior.
  • the resulting image can take any form which comprises selected operating points or operating areas relevant for the test. Also an afterthought
  • the image can also have gaps, ie undetermined pixel values.
  • the arrangement or distribution of the pixels within the image is arbitrary; they do not have to be arranged at regular intervals or according to a grid.
  • the picture is thus detached from any video standard.
  • the pixel clock can be derived from any clock, this z. B. could come from a test item exit.
  • Pixel type, line length and image height are freely selectable and limited by the hardware chosen for image processing.
  • the image can only consist of individual, irregularly set, spatial image points, the coordinates of which or their assigned operating points can have been selected at random. The latter is useful, for example, for random tests, which serves quality assurance and saves measurement time.
  • a value obtained from the reaction or signature can also be returned for use as a further operating parameter or measured value.
  • Such a feedback creates a sequence of operating parameters or stimulation sequence, which leads to a very characteristic reaction that can be easily evaluated. Under the operating parameters of such a stimulation sequence, there may be no function-related mathematical relationship.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)

Abstract

L'invention concerne un procédé permettant de tester une ébauche, qui comprend les étapes suivantes : stimuler l'ébauche pour ce qui est d'au moins un paramètre de fonctionnement, en plusieurs points de fonctionnement ou dans plusieurs zones de fonctionnement ; détecter la réaction de l'ébauche en ce qui concerne au moins un critère de test au niveau des points de fonctionnement ou des zones de fonctionnement. Ce procédé se caractérise en ce que la réaction est évaluée à l'aide de techniques du traitement d'images.
PCT/DE2001/002394 2000-07-03 2001-06-28 Procede et dispositif pour tester une ebauche Ceased WO2002003035A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002508052A JP2004502931A (ja) 2000-07-03 2001-06-28 試験品を試験する方法および装置
EP01984084A EP1299696A1 (fr) 2000-07-03 2001-06-28 Procede et dispositif pour tester une ebauche

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2000131078 DE10031078A1 (de) 2000-07-03 2000-07-03 Verfahren und Vorrichtung zum Testen eines Prüflings
DE10031078.8 2000-07-03

Publications (1)

Publication Number Publication Date
WO2002003035A1 true WO2002003035A1 (fr) 2002-01-10

Family

ID=7646842

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2001/002394 Ceased WO2002003035A1 (fr) 2000-07-03 2001-06-28 Procede et dispositif pour tester une ebauche

Country Status (4)

Country Link
EP (1) EP1299696A1 (fr)
JP (1) JP2004502931A (fr)
DE (1) DE10031078A1 (fr)
WO (1) WO2002003035A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003054487A1 (fr) * 2001-12-11 2003-07-03 Sz Testsysteme Ag Procede et dispositif pour tester un echantillon

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3842636A1 (de) * 1988-12-18 1990-06-21 Betr Forsch Inst Angew Forsch Verfahren zur ueberpruefung von bauteilen
DE3921093A1 (de) * 1988-05-31 1991-01-03 Brunner Wolfgang Verfahren zum darstellen der ortsaufgeloesten verteilung von physikalischen groessen auf einer anzeige sowie vorrichtung zur durchfuehrung des verfahrens
US5610994A (en) * 1995-05-03 1997-03-11 The Gleason Works Digital imaging of tooth contact pattern
DE19740024C1 (de) * 1997-09-11 1999-03-11 Siemens Ag Berührungsloses Prüfverfahren für Schweißpunkte
US6014035A (en) * 1997-07-11 2000-01-11 International Business Machines Corporation Test system and test method for liquid crystal display device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317199A (en) * 1980-01-31 1982-02-23 Tektronix, Inc. Diagnostic extender test apparatus
US5982920A (en) * 1997-01-08 1999-11-09 Lockheed Martin Energy Research Corp. Oak Ridge National Laboratory Automated defect spatial signature analysis for semiconductor manufacturing process
US5864730A (en) * 1998-04-06 1999-01-26 Xerox Corporation Photoreceptor seam signature

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3921093A1 (de) * 1988-05-31 1991-01-03 Brunner Wolfgang Verfahren zum darstellen der ortsaufgeloesten verteilung von physikalischen groessen auf einer anzeige sowie vorrichtung zur durchfuehrung des verfahrens
DE3842636A1 (de) * 1988-12-18 1990-06-21 Betr Forsch Inst Angew Forsch Verfahren zur ueberpruefung von bauteilen
US5610994A (en) * 1995-05-03 1997-03-11 The Gleason Works Digital imaging of tooth contact pattern
US6014035A (en) * 1997-07-11 2000-01-11 International Business Machines Corporation Test system and test method for liquid crystal display device
DE19740024C1 (de) * 1997-09-11 1999-03-11 Siemens Ag Berührungsloses Prüfverfahren für Schweißpunkte

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003054487A1 (fr) * 2001-12-11 2003-07-03 Sz Testsysteme Ag Procede et dispositif pour tester un echantillon

Also Published As

Publication number Publication date
JP2004502931A (ja) 2004-01-29
DE10031078A1 (de) 2002-05-02
EP1299696A1 (fr) 2003-04-09

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