US20040074775A1 - Pulse reverse electrolysis of acidic copper electroplating solutions - Google Patents
Pulse reverse electrolysis of acidic copper electroplating solutions Download PDFInfo
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- US20040074775A1 US20040074775A1 US10/274,634 US27463402A US2004074775A1 US 20040074775 A1 US20040074775 A1 US 20040074775A1 US 27463402 A US27463402 A US 27463402A US 2004074775 A1 US2004074775 A1 US 2004074775A1
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- United States
- Prior art keywords
- copper
- plating
- pulse
- concentration
- polyether
- Prior art date
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 72
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 72
- 239000010949 copper Substances 0.000 title claims abstract description 72
- 238000009713 electroplating Methods 0.000 title claims description 11
- 230000002378 acidificating effect Effects 0.000 title claims description 10
- 238000005868 electrolysis reaction Methods 0.000 title abstract description 7
- 238000007747 plating Methods 0.000 claims abstract description 79
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 9
- 239000004033 plastic Substances 0.000 claims abstract description 9
- 229920003023 plastic Polymers 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 43
- -1 sulphur compound Chemical class 0.000 claims description 24
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 22
- 239000001117 sulphuric acid Substances 0.000 claims description 17
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 15
- 235000011149 sulphuric acid Nutrition 0.000 claims description 15
- 229920000570 polyether Polymers 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 10
- 239000005864 Sulphur Substances 0.000 claims description 9
- 229910052783 alkali metal Inorganic materials 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 229910001431 copper ion Inorganic materials 0.000 claims description 5
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical group C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 claims description 2
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- 229920001577 copolymer Polymers 0.000 claims description 2
- 229920001223 polyethylene glycol Polymers 0.000 claims description 2
- CSJDJKUYRKSIDY-UHFFFAOYSA-N 1-sulfanylpropane-1-sulfonic acid Chemical compound CCC(S)S(O)(=O)=O CSJDJKUYRKSIDY-UHFFFAOYSA-N 0.000 claims 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims 1
- 238000009826 distribution Methods 0.000 abstract description 11
- 239000002253 acid Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000010814 metallic waste Substances 0.000 abstract 1
- 239000000654 additive Substances 0.000 description 20
- 239000000243 solution Substances 0.000 description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 14
- 230000000996 additive effect Effects 0.000 description 8
- 229920001515 polyalkylene glycol Polymers 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 239000003792 electrolyte Substances 0.000 description 5
- 229910021653 sulphate ion Inorganic materials 0.000 description 5
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 5
- 229940126062 Compound A Drugs 0.000 description 4
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 4
- WIYCQLLGDNXIBA-UHFFFAOYSA-L disodium;3-(3-sulfonatopropyldisulfanyl)propane-1-sulfonate Chemical compound [Na+].[Na+].[O-]S(=O)(=O)CCCSSCCCS([O-])(=O)=O WIYCQLLGDNXIBA-UHFFFAOYSA-L 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 241001124308 Cumacea Species 0.000 description 3
- QXNVGIXVLWOKEQ-UHFFFAOYSA-N Disodium Chemical class [Na][Na] QXNVGIXVLWOKEQ-UHFFFAOYSA-N 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- KUNICNFETYAKKO-UHFFFAOYSA-N sulfuric acid;pentahydrate Chemical compound O.O.O.O.O.OS(O)(=O)=O KUNICNFETYAKKO-UHFFFAOYSA-N 0.000 description 3
- 239000005749 Copper compound Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 150000001880 copper compounds Chemical class 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- REJSMTWFWDLMQN-UHFFFAOYSA-N 3-(3-sulfopropylsulfanyl)propane-1-sulfonic acid Chemical compound OS(=O)(=O)CCCSCCCS(O)(=O)=O REJSMTWFWDLMQN-UHFFFAOYSA-N 0.000 description 1
- AFVFQIVMOAPDHO-UHFFFAOYSA-M Methanesulfonate Chemical compound CS([O-])(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-M 0.000 description 1
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical class [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- LEKPFOXEZRZPGW-UHFFFAOYSA-N copper;dicyanide Chemical compound [Cu+2].N#[C-].N#[C-] LEKPFOXEZRZPGW-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/60—Electroplating characterised by the structure or texture of the layers
- C25D5/605—Surface topography of the layers, e.g. rough, dendritic or nodular layers
- C25D5/611—Smooth layers
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
Definitions
- This invention relates to the use of pulse reverse plating to deposit copper from acid solutions onto decorative substrates, to produce a more even distribution of the copper deposit.
- One of these applications is plating aluminium alloy automobile wheels, whereby the aluminium alloy surface is cleaned and degreased prior to immersion in a zincate solution, which leaves a thin zinc coating on the alloy surface. Because of the acidic nature of the copper plating solution, the zincate film would be destroyed upon immersion. To avoid destruction of the zincate film, a thin nickel coating is normally electrodeposited from a mildly acidic bath onto the zincate film, and then copper is subsequently deposited onto the nickel by electroplating from the highly acidic copper solution. The zincate/nickel treatment facilitates the plating of the copper onto aluminium alloy substrates, which cannot be electroplated directly. In the specific example of aluminium alloy automobile wheels, it is common practice to deposit a relatively thick copper film, which is usually subjected to a polishing operation prior to electrodeposition of the final nickel and chromium finish.
- the deposition of copper serves two purposes: (1) it can have levelling properties and thus can be used to hide blemishes in the cast aluminium wheel, and (2) it is soft and easily polished. Polishing of the copper surface leaves a smooth finish that looks attractive when the final finish is applied. In addition, polishing the surface spreads the soft copper and effectively seals any pores in the copper deposit, thus improving the corrosion resistance of the deposit.
- One of the drawbacks of the current technique is that a minimum thickness of copper must be deposited onto the aluminium base to ensure that no areas of the copper deposit are removed completely during the polishing operation, and to provide adequate protection of the aluminium during subsequent processing stages.
- the distribution of the copper plate is generally uneven. To achieve the required minimum thickness in recesses, excess copper is plated onto the more exposed areas of the wheel, which is very wasteful and costly for the plater.
- Another application for copper deposition is electroplating onto plastic substrates, which is very common in the automotive industry.
- the plastic substrate is pre-treated to allow it to accept a thin nickel deposit that is deposited by electroless means.
- a substantial layer of copper is applied before the final finish of nickel and chromium is applied.
- a minimum copper thickness is normally specified by the end-user of the plated part, for example the automotive manufacturer. Due to the poor distribution of copper metal deposited from conventional decorative electrolytes, achieving this minimum copper thickness in the recesses of complex-shaped parts results in excessive amounts of copper deposited on the exposed areas.
- Treeing and burning are familiar terms well known to those skilled in the electroplating art and describe faults in the plated deposit that can occur on exposed areas of an electroplated article.
- the basic chemistry of the additives used for electronics applications, and their performance under pulse reverse current plating conditions as compared to direct current conditions is explained by T. Pearson, “Effect of Pulsed Current On The Electrodeposition of Chromium and Copper”, PhD thesis, Aston University, United Kingdom, 1989, the subject matter of which is herein incorporated by reference in it is entirety.
- the additives are broadly similar to those used in general rack plating applications, and broadly comprise a sulphopropyl sulphide and a polyalkylene glycol that operate in conjunction with chloride ion.
- the use of pulse reverse current with these additives results in an electrochemical effect that causes an improved metal distribution. It is this effect that is utilised to plate copper into the holes on circuit boards. These holes are typically 0.5 mm diameter and 2-3 mm deep. The effective current density in these holes is extremely low and outside of the normal range expected in a general rack plating applications such as plating of alloy wheels.
- plating bath compositions formulated for printed circuit board applications are generally very simple and do not provide a fully bright and levelled copper deposit. Conversely, in general rack plating applications, it is the appearance of the copper deposit that is of prime importance. Because pulse plating is not used, the effect of further levellers and brightening agents on this distribution effect is inconsequential.
- the base composition of the electrolyte used for electronics applications is also different from that used in a typical rack plating application.
- a plating bath used for electronic/circuit board applications will contain 75 g/l of copper sulphate pentahydrate, 115 ml/l of concentrated sulphuric acid, 40 mg/l of chloride ion, and proprietary additives (a “low-metal/high acid bath”).
- a bath used for general-purpose rack plating typically contains 220 g/l of copper sulphate pentahydrate, 35 ml/l of concentrated sulphuric acid, 80 mg/l of chloride ion and proprietary additives (a “high-metal/low acid” bath).
- the inventors have surprisingly found that the pulse reverse current plating techniques used for printed circuit boards can translate very well to the application of plating copper in general rack plating applications including the aforementioned aluminium alloy automobile wheels and plastic substrates. This is surprising in that the current density range is very different from that applied to printed circuit boards.
- the inventors have found that the use of pulse reverse current plating in general rack plating applications causes less waste of copper as compared to conventional baths in various applications where articles are plated to a minimum thickness.
- the copper plating stage may consist of a period of pulse reverse electrolysis followed by a period of direct current electrolysis to leave the final deposit brighter than if pulse reverse electrolysis only had been applied.
- the low current density regions of an article plated with pulse reverse electrolysis retain a bright appearance when suitable proprietary additives are used, thus leaving a bright appearance across the whole item.
- the use of the pulse reverse current technique is ideally suited to applications where a more even distribution of the copper deposit is desirable, for example when plating to a minimum thickness specification, such as for alloy wheels or when plating plastic parts for automotive use.
- pulse reverse plating to deposit copper can be used for a method of plating decorative articles in an acidic copper electroplating bath comprising the steps of:
- the acid copper-plating bath further comprises a polyether and a divalent sulphur compound.
- the present invention utilizes pulse-reverse current for plating decorative articles with copper in an acidic copper plating bath to produce a desired thickness of copper on the surfaces of the decorative articles.
- the present invention is particularly useful for plating a more uniform thickness of copper onto aluminium alloy wheels and plastic parts for automotive use.
- the acidic copper plating bath of the invention generally comprises copper ions, a source of counter ions, and chloride ions. Other additives may also be added to the bath to improve the copper deposit.
- Copper ions are present in the plating bath at a concentration of about 10 to 50 g/l.
- Copper sulphate pentahydrate is an example of a copper compound that is useful in the baths of the present invention, although other copper compounds would also be known to one skilled in the art.
- the plating bath generally comprises copper sulphate pentahydrate at a concentration of about 50 to 100 g/l, preferably about 75 g/l.
- the source of counter ions in the plating bath is generally sulphate ions or methanesulphonate/methanesulphonic acid.
- a preferred source of sulphate ions is sulphuric acid.
- the counter ion is present in the plating bath at a concentration of about 50-250 ml/l, preferably about 100-150 ml/l, and most preferably about 115 ml/l.
- Chloride ions are present in the plating bath at a concentration of about 10-500 mg/l, preferably about 50-150 mg/l.
- the plating bath of the present invention further comprises a polyether and a divalent sulphur compound.
- the polyether is generally present in the plating bath at a concentration of about 50-5,000 mg/l, preferably about 300 mg/l.
- the polyether generally has a molecular weight of between 500 and 100,000.
- Preferred polyethers include polyethylene glycol and an ethylene oxide/propylene oxide co-polymer.
- the divalent sulphur compound is generally present in the plating bath at a concentration of about 1-150 mg/l, preferably about 30-50 mg/l.
- Preferred divalent sulphur compounds include mercatopropanesulponic acid or an alkali metal salt thereof, bis-(propane-3-sulphonic acid)disulphide or an alkali metal salt thereof, and bis-(ethane-2-sulphuric acid)disulphide or an alkali metal salt thereof.
- levelling compounds and brighteners may also be added to the plating bath compositions of the instant invention.
- the brighteners and levellers are added to enhance the visual performance of the deposit produced from the plating bath.
- the pulse plating regime of the plating bath consists of alternating cathodic and anodic pulses.
- the cathodic pulse time is generally between 5 and 100 ms, and the anodic pulse time is generally between 0.1 and 10 ms.
- the plating regime may comprise a final cathodic period of extended time, up to about 1 hour.
- the average applied current density is generally between 0.5-5.0 A/dm 2 .
- the current density during the anodic pulse is typically between 1 and 5 times the current density during the cathodic pulse.
- the Hull cell tests were done with a steel panel in order for the copper deposit thickness to be measured by X-ray fluorescence (XRF) technique.
- XRF X-ray fluorescence
- the panels were first plated with a minimal thickness of copper (approximately 0.1-0.2 ⁇ m) from a cyanide copper solution before being transferred to the Hull cell. All Hull cell tests were carried out at 25° C. using a “sulfast” copper anode.
- the pulse current regime was 10 ms cathodic, 0.5 ms anodic, which is a normal pulse regime for printed circuit board applications.
- Examples 1-5 are illustrative of the prior art and represent the current technology for general acid copper plating.
- the compositions and plating conditions used in these examples are set forth below in Table 1.
- TABLE 1 Prior art acid copper plating conditions Example 1
- Example 2 Example 3
- Example 4 Example 5
- Additive 30 mg/l disodium salt 2 Type of plating Direct current Pulse reverse Direct current Pulse reverse Direct current Current 1 amp 1 amp 1 amp 1 amp Plat
- a solution was prepared containing 210 ⁇ l copper sulphate pentahydrate, 32 ml/l sulphuric acid and 85 mg/l of chloride ion.
- Proprietary additives (Cumac 8000SL, a MacDermid process for general rack acid copper plating) were added.
- a Hull cell panel was plated at 1 amp for 15 minutes with direct current. The thickness was measured at points on the panel corresponding to primary current densities of 2.0 A/dm 2 and 0.1 A/dm 2 . The thickness at 2.0 A/dm 2 was divided by the thickness at 0.1 A/dm 2 to give a thickness ratio 6.07:1. The panel appearance was bright across the whole range.
- a solution was prepared as in example 1 and a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 3:1. The thickness ratio was calculated as before and was 6.8:1. The panel appearance was smooth matte in high current density areas and bright in low current density areas.
- a solution was prepared containing 75 g/l of copper sulphate pentahydrate, 115 ml/l of sulphuric acid, 85 mg/l of chloride ion and Cumac 8000SL additives.
- a Hull cell panel was plated at 1 amp for 15 minutes using direct current and the thickness ratio was calculated as 4.0:1. The deposit was fully bright across the whole panel.
- a solution was prepared as in example 3 and a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1. The thickness ratio was calculated as before and was 3.0:1. The deposit was smooth matte in high current density areas and bright in low current density areas.
- a solution was prepared containing 75 g/l of copper sulphate pentahydrate, 115 ml/l of sulphuric acid and 75 mg/l of chloride ion. 300 mg/l of a polyalkyleneglycol and 30 mg/l of bis-(ethane-2-sulphate)disulphide disodium salt was added. A Hull cell panel was plated at 1 amp for 15 minutes using direct current and the thickness ratio was calculated as 4.0:1. The deposit was semi-bright across the whole range.
- Examples 6-12 illustrate non-limiting plating baths of the instant invention.
- the compositions and plating conditions used in these examples are set forth below in Tables 2-3. TABLE 2 Various copper plating baths of the instant invention
- Example 6 Example 7
- Example 8 Example 9 Copper sulphate 75 g/l 75 g/l 75 g/l 75 g/l pentahydrate Sulfuric acid 115 ml/l 115 ml/l 115 ml/l 115 ml/l Chloride ion 75 mg/l 75 mg/l 150 mg/l 150 mg/l Additive 300 mg/l PAG 1 MacuSpec PPR 300 mg/l PAG 300 mg/l PAG Additive 30 mg/l disodium salt 2 30 mg/l disodium salt 3 50 mg/l disodium salt 3 Type of plating Pulse reverse Pulse reverse Pulse reverse Pulse reverse Current 1 amp 1 amp 1 amp 1 amp Plating time 15 minutes 15 minutes 15 minutes 15 minutes Thickness ratio 2.20:1
- Example 10 Copper sulphate 75 g/l 75 g/l 75 g/l pentahydrate Sulfuric acid 115 ml/l 115 ml/l 115 ml/l Chloride ion 75 mg/l 75 mg/l 75 mg/l Additive 300 mg/l PAG 1 300 mg/l PAG 300 mg/l PAG Additive 30 mg/l disodium salt 2 30 mg/l disodium salt 3 30 mg/l disodium salt 3 Additive 40 mg/l levelling compound A 50 mg/l levelling compound B 40 mg/l levelling compound A Type of plating Pulse reverse Pulse reverse Pulse reverse Current 1 amp 1 amp 1 amp Plating time 15 minutes 15 minutes 15 minutes Thickness ratio 1.70:1 2.20:1 2.15:1
- a solution was prepared containing 75 g/l of copper sulphate pentahydrate, 115 ml/l of sulphuric acid and 75 mg/l of chloride ion. 300 mg/l of a polyalkyleneglycol and 30 mg/l of bis-(ethane-2-sulphate)disulphide disodium salt was added.
- a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1. The thickness ratio was calculated as 2.20:1. The panel was smooth matte in high current density areas and semi-bright in low current density areas.
- a solution was prepared containing 75 g/l copper sulphate pentahydrate, 115 ml/l sulphuric acid and 75 mg/l of chloride ion.
- Proprietary additives MacuSpec PPR, a MacDermid process for plating of printed circuit boards
- Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1.
- the thickness ratio was calculated as 1.9:1.
- the deposit was smooth matte in high current density areas and semi-bright in low current density areas.
- a solution was prepared containing 75 g/l copper sulphate pentahydrate, 115 ml/l sulphuric acid and 150 mg/l of chloride ion. 300 mg/l of polyalkyleneglycol and 30 mg/l of bis-(3-sulphopropyl)disulphide disodium salt were added.
- a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1. The thickness ratio was calculated as 2.20:1. The deposit was smooth matte in high current density areas and semi-bright in low current density areas.
- a solution was prepared containing 75 g/l copper sulphate pentahydrate, 115 ml/l sulphuric acid and 150 mg/l of chloride ion. 300 mg/l of polyalkyleneglycol and 50 mg/l of bis-(3-sulphopropyl)disulphide disodium salt were added.
- a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1. The thickness ratio was calculated as 2.15:1. The deposit was smooth matte in high current density areas and semi-bright in low current density areas.
- a solution was prepared containing 75 g/l copper sulphate pentahydrate, 115 ml/l sulphuric acid and 75 mg/l of chloride ion. 300 mg/l of polyalkyleneglycol, 30 mg/l of bis-(ethane-2-sulphate)disulphide disodium salt and 40 mg/l of commercially available levelling compound A were added.
- a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1. The thickness ratio was calculated as 1.70:1. The deposit was smooth matte in high current density areas and fully bright in low current density areas.
- a solution was prepared containing 75 g/l copper sulphate pentahydrate, 115 ml/l sulphuric acid and 75 mg/l of chloride ion. 300 mg/l of polyalkyleneglycol, 30 mg/l of bis-(3-sulphopropyl)disulphide disodium salt and 50 mg/l of commercially available levelling compound B were added.
- a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1. The thickness ratio was calculated as 2.20:1. The deposit was smooth matte in high current density areas and fully bright in low current density areas.
- a solution was prepared containing 75 g/l copper sulphate pentahydrate, 115 ml/l sulphuric acid and 75 mg/l of chloride ion. 300 mg/l of polyalkyleneglycol, 30 mg/l of bis-(3-sulphopropyl)disulphide disodium salt and 40 mg/l of commercially available levelling compound A were added.
- a Hull cell panel was plated for 15 minutes using a pulse reverse current regime with an average current of 1 amp and an anodic:cathodic current density of approximately 2:1, followed by 1 amp for 5 minutes of direct current. The thickness ratio was calculated as 2.15:1. The deposit was bright across the entire panel.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/274,634 US20040074775A1 (en) | 2002-10-21 | 2002-10-21 | Pulse reverse electrolysis of acidic copper electroplating solutions |
| PCT/US2003/024498 WO2004038070A2 (fr) | 2002-10-21 | 2003-08-06 | Electrolyse a impulsion inverse de solutions de galvanoplastie de cuivre acides |
| AU2003265370A AU2003265370A1 (en) | 2002-10-21 | 2003-08-06 | Pulse reverse electrolysis of acidic copper electroplating solutions |
| TW092122858A TWI261075B (en) | 2002-10-21 | 2003-08-20 | Pulse reverse electrolysis of acidic copper electroplating solutions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/274,634 US20040074775A1 (en) | 2002-10-21 | 2002-10-21 | Pulse reverse electrolysis of acidic copper electroplating solutions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20040074775A1 true US20040074775A1 (en) | 2004-04-22 |
Family
ID=32093089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US10/274,634 Abandoned US20040074775A1 (en) | 2002-10-21 | 2002-10-21 | Pulse reverse electrolysis of acidic copper electroplating solutions |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20040074775A1 (fr) |
| AU (1) | AU2003265370A1 (fr) |
| TW (1) | TWI261075B (fr) |
| WO (1) | WO2004038070A2 (fr) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040168928A1 (en) * | 2003-02-27 | 2004-09-02 | Vishwas Hardikar | Composition and method for electrodeposition of metal on a work piece |
| US20050284766A1 (en) * | 2004-06-25 | 2005-12-29 | Herdman Roderick D | Pulse reverse electrolysis of acidic copper electroplating solutions |
| US20080283404A1 (en) * | 2007-05-14 | 2008-11-20 | Nec Electronics Corporation | Method of manufacturing semiconductor device to decrease defect number of plating film |
| US20090090631A1 (en) * | 2007-10-03 | 2009-04-09 | Emat Technology, Llc | Substrate holder and electroplating system |
| US20090188553A1 (en) * | 2008-01-25 | 2009-07-30 | Emat Technology, Llc | Methods of fabricating solar-cell structures and resulting solar-cell structures |
| US8262894B2 (en) | 2009-04-30 | 2012-09-11 | Moses Lake Industries, Inc. | High speed copper plating bath |
| US20130240368A1 (en) * | 2011-09-09 | 2013-09-19 | Rohm And Haas Electronic Material Llc | Low internal stress copper electroplating method |
| CN103334135A (zh) * | 2013-06-19 | 2013-10-02 | 西北工业大学 | 一种超细晶铜线的制备方法 |
| CN103668370A (zh) * | 2013-12-19 | 2014-03-26 | 潮州市连思科技发展有限公司 | 一种光盘脉冲电镀方法 |
| US20150096895A1 (en) * | 2012-04-25 | 2015-04-09 | Atotech Deutschland Gmbh | Method and apparatus for electrolytically depositing a deposition metal on a workpiece |
| CN106757193A (zh) * | 2016-11-24 | 2017-05-31 | 中国地质大学(武汉) | 一种树叶的无氰酸性光亮镀铜的方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1712660A1 (fr) | 2005-04-12 | 2006-10-18 | Enthone Inc. | Anode insoluble |
| CN103911635B (zh) * | 2014-03-21 | 2016-02-24 | 复旦大学 | 一种电镀铜溶液 |
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| US20030085133A1 (en) * | 2001-07-26 | 2003-05-08 | Electroplating Engineers Of Japan Limited (Japanese Corporation) | Copper plating solution for embedding fine wiring, and copper plating method using the same |
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| US20040011654A1 (en) * | 2001-10-16 | 2004-01-22 | Kenji Nakamura | Method of copper plating small diameter hole |
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2002
- 2002-10-21 US US10/274,634 patent/US20040074775A1/en not_active Abandoned
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2003
- 2003-08-06 WO PCT/US2003/024498 patent/WO2004038070A2/fr not_active Ceased
- 2003-08-06 AU AU2003265370A patent/AU2003265370A1/en not_active Abandoned
- 2003-08-20 TW TW092122858A patent/TWI261075B/zh not_active IP Right Cessation
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| US2558090A (en) * | 1947-12-11 | 1951-06-26 | Westinghouse Electric Corp | Periodic reverse current electroplating apparatus |
| US2700019A (en) * | 1951-07-05 | 1955-01-18 | Westinghouse Electric Corp | Acid copper plating |
| US3328273A (en) * | 1966-08-15 | 1967-06-27 | Udylite Corp | Electro-deposition of copper from acidic baths |
| US3682788A (en) * | 1970-07-28 | 1972-08-08 | M & T Chemicals Inc | Copper electroplating |
| US3956078A (en) * | 1972-12-14 | 1976-05-11 | M & T Chemicals Inc. | Electrodeposition of copper |
| US4673469A (en) * | 1984-06-08 | 1987-06-16 | Mcgean-Rohco, Inc. | Method of plating plastics |
| US5972192A (en) * | 1997-07-23 | 1999-10-26 | Advanced Micro Devices, Inc. | Pulse electroplating copper or copper alloys |
| US20020036144A1 (en) * | 2000-09-27 | 2002-03-28 | Lee Sun-Jung | Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming copper interconnect of semiconductor device using the same |
| US6610192B1 (en) * | 2000-11-02 | 2003-08-26 | Shipley Company, L.L.C. | Copper electroplating |
| US20030085133A1 (en) * | 2001-07-26 | 2003-05-08 | Electroplating Engineers Of Japan Limited (Japanese Corporation) | Copper plating solution for embedding fine wiring, and copper plating method using the same |
| US20040011654A1 (en) * | 2001-10-16 | 2004-01-22 | Kenji Nakamura | Method of copper plating small diameter hole |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040168928A1 (en) * | 2003-02-27 | 2004-09-02 | Vishwas Hardikar | Composition and method for electrodeposition of metal on a work piece |
| US7105082B2 (en) * | 2003-02-27 | 2006-09-12 | Novellus Systems, Inc. | Composition and method for electrodeposition of metal on a work piece |
| US20050284766A1 (en) * | 2004-06-25 | 2005-12-29 | Herdman Roderick D | Pulse reverse electrolysis of acidic copper electroplating solutions |
| US20090223827A1 (en) * | 2004-06-25 | 2009-09-10 | Herdman Roderick D | Pulse Reverse Electrolysis of Acidic Copper Electroplating Solutions |
| US20080283404A1 (en) * | 2007-05-14 | 2008-11-20 | Nec Electronics Corporation | Method of manufacturing semiconductor device to decrease defect number of plating film |
| US20090090631A1 (en) * | 2007-10-03 | 2009-04-09 | Emat Technology, Llc | Substrate holder and electroplating system |
| US7905994B2 (en) | 2007-10-03 | 2011-03-15 | Moses Lake Industries, Inc. | Substrate holder and electroplating system |
| US20090188553A1 (en) * | 2008-01-25 | 2009-07-30 | Emat Technology, Llc | Methods of fabricating solar-cell structures and resulting solar-cell structures |
| US8262894B2 (en) | 2009-04-30 | 2012-09-11 | Moses Lake Industries, Inc. | High speed copper plating bath |
| US20130240368A1 (en) * | 2011-09-09 | 2013-09-19 | Rohm And Haas Electronic Material Llc | Low internal stress copper electroplating method |
| US9493886B2 (en) * | 2011-09-09 | 2016-11-15 | Rohm And Haas Electronic Materials Llc | Low internal stress copper electroplating method |
| US20150096895A1 (en) * | 2012-04-25 | 2015-04-09 | Atotech Deutschland Gmbh | Method and apparatus for electrolytically depositing a deposition metal on a workpiece |
| CN104603334A (zh) * | 2012-04-25 | 2015-05-06 | 埃托特克德国有限公司 | 用于在工件上电解式沉积一种沉积金属的方法及装置 |
| CN104603334B (zh) * | 2012-04-25 | 2017-03-29 | 埃托特克德国有限公司 | 用于在工件上电解式沉积一种沉积金属的方法及装置 |
| US9745665B2 (en) * | 2012-04-25 | 2017-08-29 | Atotech Deutschland Gmbh | Method and apparatus for electrolytically depositing a deposition metal on a workpiece |
| US10774437B2 (en) | 2012-04-25 | 2020-09-15 | Atotech Deutschland Gmbh | Method and apparatus for electrolytically depositing a deposition metal on a workpiece |
| CN103334135A (zh) * | 2013-06-19 | 2013-10-02 | 西北工业大学 | 一种超细晶铜线的制备方法 |
| CN103668370A (zh) * | 2013-12-19 | 2014-03-26 | 潮州市连思科技发展有限公司 | 一种光盘脉冲电镀方法 |
| CN106757193A (zh) * | 2016-11-24 | 2017-05-31 | 中国地质大学(武汉) | 一种树叶的无氰酸性光亮镀铜的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2003265370A1 (en) | 2004-05-13 |
| WO2004038070A2 (fr) | 2004-05-06 |
| TWI261075B (en) | 2006-09-01 |
| AU2003265370A8 (en) | 2004-05-13 |
| WO2004038070A3 (fr) | 2004-07-01 |
| TW200407467A (en) | 2004-05-16 |
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| AS | Assignment |
Owner name: MACDERMID ACUMEN, INC., CONNECTICUT Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HERDMAN, RODERICK DENNIS;LONG, ERNEST;CRARY, MICHAEL RAY;REEL/FRAME:013593/0767 Effective date: 20021008 |
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