TWM643608U - Wet diaphragm plate - Google Patents

Abstract

This creation is related to a wet-type membrane plate, through the plasma treatment of the polymer layer, the surface of the polymer layer forms a high-roughness millimeter, micron and nanocomposite structure. At the same time, plasma treatment is used to quickly improve the overall hydrophilicity of the wet membrane plate, thereby prolonging the contact time between the atomized washing liquid of the wet scrubber and the exhaust gas when passing through the wet membrane plate.

Description

wet diaphragm

The invention relates to a wet membrane plate, especially a wet membrane plate used in a wet scrubber to increase the contact time between the spray and the exhaust gas.

In the ultra-large integrated circuit (ULSI) process, the wafer cleaning technology and its cleanliness are often one of the important factors that affect the yield (Yield), component quality (Quality) and reliability (Reliability) of the wafer process. Therefore, it is necessary to clean the wafer to meet the cleanliness requirement in the related process.

The cleaning of wafers is carried out by soaking the whole batch or a single wafer with chemicals or cleaning with pure water, mainly to remove pollutants on the surface of the wafers, such as particles, organic pollutants, inorganic substances, metal ions and other impurities.

At present, the wet cleaning method is commonly used in the industry, and the most accepted one is the RCA cleaning method (RCA Clean) in the wet cleaning method. This RCA cleaning method was developed by the RCA company in the 1960s. The cleaning principle is to use different chemical formulas for cleaning, such as standard cleaning solution 1 (SC-1) and standard cleaning solution 2 (SC-2).

While cleaning with chemical formulas SC-1 (APM), SC-2 (HPM), SPM, DHF, and BHF, etc., there is often a large amount of process mixed waste gas such as acid gas, alkali gas, and volatile organic compounds. At present, the removal efficiency of volatile organic compounds has not been able to achieve good results.

Volatile organic compounds (also known as volatile organic gas pollutants, Volatile Organic Compounds, VOCs) refer to the general term for air pollutants of organic compounds with a boiling point below 250°C under atmospheric pressure. The environmental pollution problems caused by them are widely present in various types of industries.

The common volatile organic compounds in the industry are mostly composed of acetone (Acetone), isopropyl ketone (IPA), propylene glycol monomethyl ether (PGME), propylene glycol monomethyl ether acetate (PGMEA), dimethylsulfoxide (DMSO), ethanolamine (MEA), nitrogen-methyl 2-tetrahydropyrrolidone (NMP), diethylene glycol monobutyl ether (BDG), tetramethylammonium hydroxide (TMAH) and other components.

In solving the problem of mixed exhaust gas, most of them are introduced into wet scrubbers to deal with pollutants (acid, alkali, organic substances) in exhaust gas. Wet scrubbers mostly use washing liquid as the spraying material for mass transfer. With the help of the spray humidification system in the wet washing tower (use the pump to pressurize the washing liquid to produce atomized particles with a specific diameter), the spray and the incoming exhaust gas perform inertial impact, mass transfer, and dissolution to remove pollutants (acids, alkalis, organic substances) in the exhaust gas.

However, the use of water spraying materials on wet scrubbers is limited by the size of the factory equipment, and it is impossible to prolong the contact time between atomized particles and exhaust gas by installing many water spraying materials (need to expand the footprint).

For this reason, how to make the atomized particles and exhaust gas contact time in the wet scrubber to achieve good purification in the case of limited space in the factory equipment is a problem that researchers in the technical field want to solve.

The main purpose of this creation is to provide a wet membrane plate, through the plasma treatment of the polymer layer, the composite structure of millimeter, micron and nanometer can be formed on the surface due to plasma. The overall hydrophilicity of the wet membrane plate is improved by plasma treatment, thereby prolonging the contact time between the atomized particles and the exhaust gas when passing through the wet membrane plate.

In order to achieve the above-mentioned purpose, this creation discloses a wet-type membrane plate, its structure includes: a forming plate; and a polymer layer, the polymer layer is a non-planar structure, which is arranged on the upper surface of the forming plate; wherein, the upper surface of the wet-type membrane plate is a composite structure of millimeter, micron and nanometer, and the steps of preparing the wet-type membrane plate include: taking a forming plate; forming a polymer layer, the polymer layer is a non-planar structure; and using a reactive gas to perform a plasma treatment on the polymer layer to make the polymer layer hydrophilic and rough, and to form a wet membrane plate.

The invention provides an embodiment, which is a wet-type membrane plate, wherein the height of the formed plate is between 1 mm and 10 mm.

The invention provides an embodiment, which is a wet-type membrane plate, wherein the formed plate is a corrugated plate, a zigzag plate or an arc-shaped plate.

This creation provides an embodiment, which is a wet-type membrane plate, wherein the polymer layer is formed by coating a crystalline polymer solution on the upper surface of the formed plate, and then performing a heat-pressing treatment.

The invention provides an embodiment, which is a wet membrane plate, wherein the thickness of the polymer layer is between 2 and 3 microns.

In order to enable your review committee to have a better understanding and understanding of the characteristics of this creation and the functions achieved, I would like to provide examples and accompanying explanations, as follows:

In view of the known problem that the contact time between the atomized particles and the exhaust gas is too short, the purification efficiency is not high. Accordingly, this creation then proposes a wet membrane plate to solve the problems caused by the prior art.

The following will further illustrate the structure and matching method of a wet membrane plate of this creation:

Please refer to Fig. 1, which is a flow chart of the steps of one embodiment of the invention. As shown in Figure 1, a method for preparing a wet membrane plate, the steps include:

S1: Take the formed plate;

S2: After coating the crystalline polymer solution on the surface of the forming board, hot-pressing treatment is carried out so that the crystalline polymer solution forms a polymer layer on the forming board, and the polymer layer has a non-planar structure; and

S3: Plasma treatment is performed on the polymer layer with a reactive gas to make the polymer layer hydrophilic and rough, and form a wet membrane.

Wherein, before the step S1, a step S0 is further included: taking the plastic and performing molding treatment at a temperature of 150° C. to 200° C.

And as shown in step S0, a plastic is taken and subjected to a molding process at a temperature of 150° C. to 200° C. to form a molding plate 11 used in step S1. Wherein the molding treatment is a rolling forming treatment, a compression molding treatment or a thermoforming treatment, and the plastic is selected from one or a combination of a group consisting of a polyethylene terephthalate, a nylon, a polybutylene terephthalate, a polyacetal and a polypropylene.

The height of the shaped board 11 formed according to step S0 is between 1 mm and 10 mm. And this forming plate 11 except plane plate, this forming plate 11 is a corrugated plate, a zigzag plate or an arc-shaped plate etc.

Next, as shown in step S2, after coating a crystalline polymer solution on the surface of the forming board 11, a hot-pressing treatment is performed to make the crystalline polymer solution form a polymer layer 12 on the forming board 11. Wherein the crystalline polymer solution is selected from one or a combination of the group consisting of the polyethylene terephthalate, the nylon, the polybutylene terephthalate, the polyacetal and the polypropylene.

The preparation example of the crystalline polymer solution is as follows: polymer particles such as polyethylene terephthalate are dissolved in 2-chlorophenol and stirred at 60° C. until completely dissolved. The formula of the solution is a mixture of polymer particles/2-chlorophenol (2-chlorophenol) with a weight ratio of 7%. The thickness of the coated crystalline polymer solution is controlled at 2-3 microns, heated in an oven at 60°C for 3 hours and then cooled naturally.

In addition, the hot pressing treatment is after the crystalline polymer solution is coated on the forming plate 11, at a temperature of 60 to 70° C., a PDMS (Polydimethylsiloxane) stamp with a hierarchical millimeter and micron structure is softly embossed on the crystalline polymer solution on the forming plate 11, and rolled by the roll forming process, the compression molding process or the thermocompression forming process, and the pressure is controlled at 10 to 30 seconds. 10kg/cm ², and then heated in an oven at 60° C. for 3 hours and then cooled naturally. At this time, the crystalline polymer solution forms the polymer layer 12 on the molding plate (just peel off the PDMS stamp).

Among them, the preparation of PDMS stamp: Stir the PDMS main agent and hardener in a beaker with a weight ratio of 10:1, and then pour it on the mold (with hierarchical millimeter and micron structures, prepared by laser etching). Because there is a large amount of gas in the process, and in order to be able to discharge the air in the solution, first move the petri dish to a vacuum tank to evacuate, so that the air in the entire system can be completely removed. Then move the petri dish to a heating plate and heat it at 60°C for more than 12 hours to promote the complete curing reaction of the PDMS stamp. After the reaction is finished, the PDMS stamp with hierarchical millimeter and micron structures can be torn off.

At this time, the polymer layer 12 formed by using the PDMS stamp is a non-planar structure (hierarchical), the thickness of which is between 2 and 3 microns, and the surface of the non-planar structure has millimeter and micron structures.

Finally, as shown in step S3 , a reactive gas is used to perform a plasma treatment on the polymer layer to hydrophilize and roughen the polymer layer, and form a wet membrane 1 .

It utilizes rf-capacitively coupled plasma (rf-capacitively coupled) driven by a metal ring electrode to carry out the plasma treatment, and places the item to be plasma inside the plasma chamber, wherein the fixed frequency of the plasma treatment is 13.56MHz, the pressure of the plasma treatment is 10 mTorr, the power of the plasma treatment is between 10W and 100W, preferably less than 100W, and the etching time of the plasma treatment is between 1 to 5 minutes, preferably for less than 5 minutes. And, the reaction gas (O ₂ ) was used under the condition that the distance between the metal ring and the substrate was 4.6 cm and the oxygen flow rate was 2.1 sccm. In addition to oxygen, ammonia or atmospheric air can be selected as the reactive gas.

Moreover, the main advantages of radio-frequency capacitively coupled plasma are: there is no problem of electrode corrosion or contamination, and the material of the electrode will not interfere with the state of the plasma, and because the wavelength intensity of the electric field is greater than the size of the container, uniform plasma can be generated.

Furthermore, after the plasma treatment to roughen and hydrophilize, in addition to the millimeter and micron structures, nanostructures will be further formed. Therefore, the surface of the wet membrane plate 1 has millimeter, micron and nanocomposite structures with high roughness. Therefore, in the process of plasma treatment, the weak bonds on the surface of the material will be destroyed by the plasma active particles first, and then replaced by the highly reactive functional groups generated by the dissociation of the reactive gas to achieve the effect of activating the polymer surface. Common reactive functional groups include -O, -COOH and -NH2, etc., which can be used to change the reactivity of the material surface or improve wettability, adhesion and other functions, and then achieve the diffusivity of the cleaning solution.

And please refer to the 3rd figure, it is the structural representation of the wet membrane plate of one embodiment of this creation. After the above steps, the structure of a wet membrane plate 1 of the present invention includes: the forming plate 11 (height is between 1 mm and 10 mm, taking a flat plate as an example) and the polymer layer 12 (thickness is between 2 and 3 microns), the polymer layer is the non-planar structure (hierarchical type), and it is arranged on the upper surface of the forming plate through the hot-pressing treatment (at this time forming a millimeter and micron structure), and the plasma treatment is performed to make the polymer layer have a roughened surface 121 , and further form a nanostructure, wherein the upper surface of the wet membrane plate is a millimeter, micrometer and nanocomposite structure with high roughness.

Furthermore, the experimental test of the wet membrane plate 1 created by this invention can be seen from Table 1 below. After the plasma treatment (O ₂ ), the contact angle of water droplets on the wet membrane plate decreases with the increase of the plasma etching time. Table 1. Experimental data table of water droplet contact angle plasma treated surface 0 minutes 1 minute 2 minutes 3 minutes 4 minutes 5 minutes water droplet contact angle 51∘ 32∘ 18∘ 3∘ 2∘ 2∘

The contact angle refers to the angle formed when the liquid/gas interface touches the solid surface. The contact angle is a system of three different interfaces interacting. Moreover, the contact angle is also an important index to measure the affinity and hydrophobicity of the material itself. The smaller the contact angle between the material and water droplets, the higher the hydrophilicity of the material. It shows that the invention can indeed improve the hydrophilicity of the wet membrane plate 1 after plasma treatment.

Again, please refer to Fig. 4: it is the scanning electron microscope picture of one embodiment of this creation. As shown in the figure, observation by a scanning electron microscope shows that after plasma treatment (O ₂ ), the hierarchical surface of the wet membrane plate 1 becomes rougher as the etching time of the plasma treatment ((a) 0, (b) 1, (c) 2, (d) 3, (e) 4, (f) 5 minutes) increases. The contact time between atomized scrubbing particles and exhaust gas.

For this reason, compared to the conventional technology that requires sandblasting and is made of inorganic materials, this creation uses crystalline organic polymer materials to prepare wet membrane panels with millimeter and micron structures, and the wet membrane panels are treated with plasma surface treatment to achieve high-roughness wet membrane panels with millimeter, micron and nanometer structures, and the rapidly improved hydrophilic properties after plasma can effectively improve the diffusivity of atomized particles when they come into contact with exhaust gas, thereby increasing the contact time and area.

Therefore, this creation is indeed novel, progressive and can be used in industry. It should meet the patent application requirements of our country's patent law.

However, the above is only a preferred embodiment of this creation, and is not used to limit the scope of implementation of this creation. For example, all equal changes and modifications made in accordance with the shape, structure, characteristics and spirit described in the patent scope of this creation should be included in the patent scope of this creation.

S1, S2, S3: step process 1: wet diaphragm 11: Formed sheet 12: polymer layer 121: Roughened surface

Fig. 1: It is a flow chart of the steps of one embodiment of this creation;

Figures 2A-2C: It is a structural schematic diagram of the forming plate of one embodiment of this creation

Fig. 3: It is a structural schematic diagram of a wet membrane plate of an embodiment of the invention; and

Fig. 4: It is the scanning electron microscope picture of one embodiment of this creation.

1: wet diaphragm

11: Formed sheet

12: polymer layer

121: Roughened surface

Claims (5)

A wet membrane plate, its structure includes: a formed panel; and A polymer layer, the polymer layer is a non-planar structure, which is arranged on the upper surface of the formed board; Wherein, the upper surface of the wet membrane plate is a composite structure of millimeters, microns and nanometers, and the steps of preparing the wet membrane plate include: Take a forming plate; After coating a crystalline polymer solution on the surface of the forming board, performing a heat press treatment, so that the crystalline polymer solution forms a polymer layer on the forming board, and the polymer layer has a non-planar structure; and A reactive gas is used to perform a plasma treatment on the polymer layer to hydrophilize and roughen the polymer layer and form a wet membrane plate. The wet membrane plate as claimed in claim 1, wherein the height of the formed plate is between 1mm and 10mm. The wet membrane panel as described in Claim 1, wherein the formed panel is a corrugated panel, a zigzag panel or an arc-shaped panel. The wet-type membrane plate as described in Claim 1, wherein the polymer layer is formed by coating a crystalline polymer solution on the upper surface of the formed plate, and then performing a hot-pressing treatment. The wet membrane plate as claimed in claim 1, wherein the thickness of the polymer layer is between 2 and 3 microns.