TWM574300U - Shaking system for chemical shakers - Google Patents

Abstract

The present invention provides a rocking machine operating system and method, wherein the system comprises: at least one identity message carrying unit, at least one item message carrying unit, at least one first machine message carrying unit, at least one The two-machine message carrying unit and the at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system of the back end can confirm whether the operator has the operating authority of the machine and the After the item name, batch number, expiration date, and serial number of the item contained in the item container are correct, the operator is allowed to operate the first machine and/or the second machine. In this way, it can ensure that the shaking operation of the slurry or other chemical liquid storage tank and related records are carried out under the electronic system management, and any paper record is exempted, so that any human operation abnormality or non-operation can be effectively avoided. Completion of related work in a manner consistent with standard operating procedures.

Description

Shaking machine operating system

The present invention relates to the technical field of semiconductor manufacturing, and more particularly to a shaking machine operating system for assisting an operator of an IC foundry to complete a chemical storage tank under the supervision of a central monitoring system at the back end. (Chemical container) regular shaking operation (Shaking operation).

Chemical Mechanical Polishing (CMP) has been widely used in comprehensive planarization processes in semiconductor IC fabrication processes. When performing a CMP process, the wafer must be placed between a carrier carrier (Carrier/Head) and a rotating table with a polishing pad on the surface. Moreover, during the overall planarization of the wafer by the rotary table having the polishing pad, a chemical mechanical polishing slurry is continuously sprayed onto the wafer surface via a nozzle. It is conceivable that polishing pads and chemical fluid polishing fluids ("abrasives") are consumables in the CMP process and must be replaced periodically or periodically by field operators.

It must be added that the polishing liquid is mainly composed of an abrasive (Abrasive), a surfactant, a PH buffer rubber, an oxidizing agent, and a preservative; wherein the main component of the abrasive is usually cerium oxide (SiO ₂ ) nanometer. Abrasive particles, aluminum oxide (Al ₂ O ₃ ) nano-abrasive particles, or cerium oxide (CeO ₂ ) nano-abrasive particles. However, the practical experience of semiconductor IC manufacturers indicates that the unused slurry is prone to flocculation or agglomeration of the nano-milled particles after the storage of the reservoir is completed and after a period of storage. Therefore, the standard operating procedure (SOP) of a semiconductor IC manufacturer requires that the operator must periodically inspect each barrel of the reservoir according to the batch number or part number, and then store the liquid before the flocculation or agglomeration of the nano-grinding particles occurs. Shake the reservoir with a chemical container shaker.

However, the practical experience provided by IC foundry also pointed out that there is a major flaw in the shaking procedure of the currently used slurry or other chemical liquid storage tank, as explained below. The shaking operation and history of the slurry or other chemical liquid storage tank are usually recorded through the paper, and the contents of the paper record include at least the operator name, the operator's employee number, and the storage tank number (or product name). The operation time of the liquid storage tank is periodically shaken, and the time of the machine is disconnected. However, due to the shaking work of the slurry liquid storage or other chemical liquid drums and the paper recording, the human body is completed at the same time, and once the human operation abnormality occurs in the process of executing the program or the related work is completed in a manner that does not conform to the standard operating procedure, For example, the operator performs a shaking operation with a slurry or other chemical liquid storage tank whose material number does not match. Human error such as this is bound to cause significant losses to the IC foundry and its customers.

As can be seen from the above description, it is urgent for an integrated circuit manufacturer to synchronize the shaking operation of the polishing liquid or other chemical liquid storage tank with the recording. In this way, the factory tube of the integrated circuit manufacturer can completely and comprehensively monitor whether the shaking operation of the slurry or other chemical liquid storage tank is correct and whether the operator has the execution authority through the central control system. In view of this, the creator of this new type is trying hard to research and create, and finally developed a new type of shaking machine operating system of the present invention.

The main purpose of the present invention is to provide a rocking machine operating system and method, wherein the system comprises: at least one identity message carrying unit, at least one item message carrying unit, and at least one first machine message carrying unit At least one second machine message carrying unit and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system of the back end can confirm whether the operator has the operating authority of the machine and the After the item name, batch number, expiration date, and serial number of the item contained in the item container are correct, the operator is allowed to operate the first machine and/or the second machine. In this way, it can ensure that the shaking operation of the slurry or other chemical liquid storage tank and related records are carried out under the electronic system management, and any paper record is exempted, so that any human operation abnormality or non-operation can be effectively avoided. Completion of related work in a manner consistent with standard operating procedures.

In order to achieve the above-mentioned main purpose of the present invention, the present invention provides an embodiment of the rocking machine operating system, comprising: at least one identity message carrying unit disposed on at least one operator identity card; At least one item message carrying unit is disposed on at least one item container, and the item container is provided with a specific item; at least one first machine message carrying unit is set On the at least one first machine, the first machine is used to use the specific item; the at least one second machine message carrying unit is disposed on the at least one second machine, and the The second machine is configured to pre-process the specific item; and the at least one portable electronic device has a reading unit; wherein the portable unit can read the portable electronic device The item information carrying unit determines whether the specific item contained in the item container needs to be preprocessed by the second machine; wherein, by the reading unit, the portable type Electronic device Confirming, by reading the identity message carrying unit, whether an operator holding the operator identity card has the authority to operate the first machine and the second machine; wherein, by the reading unit, The portable electronic device can confirm the operating states of the first machine and the second machine by reading the first machine message carrying unit and the second machine message carrying unit.

In order to more clearly describe a rocking machine operating system proposed by the present invention, a preferred embodiment of the present invention will be described in detail below with reference to the drawings.

Please refer to FIG. 1 , which is a structural diagram of a shaking machine operating system of the present invention. As shown in FIG. 1 , the rocking machine operating system of the present invention mainly comprises: at least one identity message carrying unit 21, at least one item message carrying unit 31, and at least one first machine message carrying The loading unit 41, the at least one second station message carrying unit 61, the at least one portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the identity message carrying unit 21 is disposed on an operator identity card 2. Briefly, the identity message carrying unit 21 is used to carry the basic information of an operator who holds the operator identity card 2, including: name, job number, unit, rank, and eligibility for completing the operation of the machine. Qualify. In particular, the operator who has completed the qualification test of the machine operation is allowed to operate the first machine 4 and the second machine 6; in addition, the operator with higher rank is allowed to operate the machine. The more types there are. For example, the factory manager, senior engineer, and chief engineer can operate on different units of the machine, but the operator (OP) is only restricted to operate on the machine of the unit to which it belongs.

On the other hand, the item message carrying unit 31 is disposed on a corresponding one of the chemical containers 3, and the item container 3 houses a specific item. The item message carrying unit 31 carries a plurality of basic messages about the specific item, including: a product name (or item number), a batch number, a valid date, and a serial number. For example, the product name may be used to indicate that the specific item is a chemical mechanical polishing slurry, and the material container 3 is used to hold the chemical fluid polishing liquid (referred to as "grinding liquid" ") or other chemical liquid storage tanks. On the other hand, the first machine message carrying unit 41 and the second machine message carrying unit 61 are respectively disposed on the corresponding first machine 4 and second machine 6. According to the design of the present invention, the first machine 4 is used to use the particular item; for example, the first machine 4 is a slurry or other chemical supply system. On the other hand, the second machine 6 is used to perform a pretreatment on the specific item, for example, the second machine 6 is a chemical container shaker.

As can be seen from the above description, the unit "at least one" is used to indicate that the number of the four types of message carrying units (21, 31, 41, 61) is one or more. In other words, the exact number of the four message carrying units (21, 31, 41, 61) is determined by the operator identity card 2, the item container 3, the first machine 4, and The number of the second machine 6. On the other hand, the portable electronic device 5 has a reading unit 51. The portable electronic device 5 can confirm the first machine 4 and the second by reading the first machine message carrying unit 41 and the second machine message carrying unit 61 by the reading unit 51. The operating state of the machine 6. Moreover, as shown in FIG. 1 , the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver R, and the communication protocol between the transceiver R and the portable electronic device 5 may be a wireless communication network. Including WIFI, 3G, 4G, Bluetooth, Zigbee, etc., the communication protocol between the transceiver R and the central monitoring system CSRC can be a wireless communication network or a wired communication network, wherein the wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee Wait. And the central monitoring system CSRC controls the operating states of the first machine 4 and the second machine 5 through a control device 7, wherein the control device 7 includes a programmable logic controller (PLC) or a direct digital device. One of the controllers (Direct Digital Controller, DDC) or Object Linking and Embedding (OLE) or OLE for Process Control (OPC). The operational status referred to herein may be any of the following: whether the machine is in use or whether the machine is not listed as a failed machine. Therefore, after the reading of the first machine message carrying unit 41 and the second machine message carrying unit 61 is completed, the portable electronic device 5 can learn the first machine from the central monitoring system CSRC. The type, setting parameters and operation of the table 4 and the second machine 6. In addition, the portable electronic device 5 can further confirm whether the operator holding the operator identity card 2 has the first operation by reading the identity message carrying unit 21 by the reading unit 51. The authority of the machine 4 and the second machine 6.

Specifically, before the item container 3 is mounted on the first machine 4 (that is, the polishing liquid or other chemical liquid supply system), it must be confirmed by reading the item information carrying unit 31. The relevant basic information of the specific item accommodated by the item container 3, thereby ensuring that the item container 3 is loaded into the correct first machine table 4 when the specific item is in a normal state. Among them. The related basic information includes but is not limited to: the product name of the specific item is correct, the batch number of the specific item is not disabled, the batch number of the specific item has an inbound record, and the storage date of the specific item does not exceed the effective date. Or the particular item is periodically pre-processed with the second machine 6. After the item container 3 is confirmed to be in a normal state, the central monitoring system CSRC automatically releases the cabinet door of the cabinet of the first machine 4, and the operator can remove the consumed time from the first machine 4. The item container 3 of the specific item is completed, and a new item container 3 is loaded into the first machine 4.

It should be noted that if the portable electronic device 5 reads the item information carrying unit 31, it is confirmed that the slurry or other chemical liquid contained in the item container 3 needs to be used in the second machine. When the stage 6 performs pre-processing on it, the operator is limited by the system, and the item container 3 cannot be directly mounted on the first machine 4. Further, the operator must first send the item container 3 to the second machine table 6 to complete the pretreatment of the item container 3 by the second machine 6. The term "pretreatment" as used herein refers to performing a shaking operation on a slurry tank of a slurry or other chemical liquid (i.e., the material container 3).

1 shows that the identity message carrying unit 21, the item message carrying unit 31, the first station message carrying unit 41, and the second station message carrying unit 61 are all one-dimensional barcodes ( 1D barcode), however, this embodiment of the message carrying unit (21, 31, 41, 61) should not be limited. The identity message carrying unit 21, the item message carrying unit 31, the first station message carrying unit 41, and the second station message carrying unit 61 may be the following when the present invention is actually applied. Either: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, Maxicode, RFID tag, An NFC tag, a combination of any two of the above, or a combination of any two or more of the above.

Taking a 1D barcode as an example, the item message carrying unit 31 can be manufactured by using a Code 39 barcode generator and carrying the product name of the specific item contained in the item container 3 ( Item number), batch number, effective date, and serial number. It should be particularly noted that in order to facilitate the portable electronic device 5 to clearly read the product name (item number), batch number, expiration date, and serial number, the one-dimensional barcode of the item information carrying unit 31 must be A central seperating character is inserted between two adjacent basic messages, for example: %, $, /, ~, !, @, #, ^, &, *, (,), -, _, |, {, }, ?, <, >, \, [,] or +.

It is conceivable that the message carrying unit (21, 31, 41, 61) corresponding to different implementations, the reading unit 51 of the portable electronic device 5 can be any of the following: an RFID tag reader, NFC tag reader, image recognizer, one-dimensional bar code reader, two-dimensional bar code reader, Hanxin code reader, QR code reader, matrix bar code reader, or image capture device. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, a smart glasses, or a smart watch, the image capturing module built in the portable electronic device 5 can be directly used as the smart phone. The reading unit 51; after the image (or barcode) recognition software is installed in the portable electronic device 5, the portable electronic device can be used by using the reading unit 51 and the image recognition unit. The device 5 completes the reading of the identity message carrying unit 21, the item message carrying unit 31, the first station message carrying unit 41, and/or the second station message carrying unit 61. However, in view of the fact that most IC foundry bans the use of any type of smart electronic device in the factory, a personal digital assistant equipped with a barcode scanner (ie, reading unit 51) (Digital personal) The assistant, PDA) is the best embodiment of the portable electronic device 5.

With continued reference to FIG. 1, and also to FIG. 2, a perspective view of the portable electronic device is shown. It should be noted that although the portable electronic device 5 can read the identity message carrying unit 21, it is confirmed whether the operator holding the operator identity card 2 has the first machine 4 and the second machine. 6 privilege, but considering that the operator of the lower rank may borrow the operator's identity card 2 of the higher rank or engineer to operate the first machine 4 and/or the second machine 6, the new type A so-called electronic token unit 8 is added to the shaking machine operating system; wherein the electronic token unit 8 stores a One-time password (OTP). In particular, after the portable electronic device 5 completes the reading of the identity message carrying unit 21, the central monitoring system CSRC can request the operator to provide the electronic token unit 8 through the portable electronic device 5; The portable electronic device 5 can repeatedly confirm whether the operator holding the operator identity card 2 has the authority to operate the first machine 4 and the second machine 6 by accessing the one-time authentication code. It is avoided that the operator's identity card 2 of the senior manager or engineer is used to operate the first machine 4 or the second machine 6 indiscriminately. The present invention does not limit the implementation of the electronic token unit 8. As shown in FIG. 2, the electronic token unit 8 may be: a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. And after the portable electronic device 5 completes the access of the one-time authentication code from the electronic token unit 8, a token code generating unit (not shown) inside the portable electronic device 5 A set of one-time authentication codes is regenerated and written into the electronic token unit 8, thereby improving the operation authority of the first machine 4 and the second machine 6.

Thus, the above description has completely and clearly described a rocking machine operating system of the present invention. Next, the actual operation flow of the shaking machine operating system of the present invention will be further described below. Please refer to FIG. 2 repeatedly, and refer to 3A and FIG. 3B at the same time, which is a front view showing the screen of the portable electronic device. When the shaking machine operation process is performed, the at least one identity message carrying unit 21 is first disposed on the at least one operator identity card 2, and the at least one item message carrying unit 31 is disposed in at least one item. Above the device 3, and at least one first machine message carrying unit 41 is disposed on at least one first machine 4, and at least one second machine information carrying unit 61 is disposed on at least one second machine Above the stage 6; wherein the item container 3 houses a specific item (for example, a slurry or other chemical liquid), the first machine 4 is used to use the specific item, and the second machine Stage 6 is used to perform pre-processing on the particular item.

Further, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example, a barcode scanner). In the actual operation flow of the rocking machine operating system of the present invention, as shown in FIG. 4A (a), it is necessary to selectively perform a rocking machine operation through the portable electronic device 5. Then, as shown in FIG. 4A (b), the portable electronic device 5 confirms that the operator identity card 2 is held by reading the identity message carrying unit 21 by the reading unit 51. Whether an operator has the authority to operate the first machine 4 and the second machine 6. The portable electronic device 5 can confirm the second machine by reading the second machine message carrying unit 61 by using the reading unit 51, as shown in FIG. 4A(c). The operating status of station 6. The operational status referred to herein may be any of the following: whether the machine is in use or whether the machine is not listed as a failed machine. If the second machine 6 is in a non-operating state or a non-abnormal state, the operator is allowed to use the second machine 6.

Before the item container 3 is mounted on the second machine 6, as shown in FIG. 4A (d), the portable electronic device 5 must be read by the item information carrying unit 31. The method confirms a plurality of basic messages of the specific item (grinding liquid or other chemical liquid) accommodated by the item container 3, and at least includes: a product name (item number), a batch number, a valid date, and a serial number. If it is confirmed through the basic message that the item container 3 does have to use the second machine 6 to perform the shaking operation of the slurry or other chemical liquid storage tank, the operator is allowed to use the second machine 6 to The specific item contained in the item container 3 performs a pretreatment (ie, performing a shaking operation of the slurry or other chemical liquid storage tank). As shown in FIG. 4B (a), since the operating state of the second machine 6 is controlled by the central monitoring system CSRC, the portable electronic device 5 reads the identity message carrying unit 21 and the item information. After the loading unit 31, the preset signal sent by the central monitoring system CSRC is received. At this time, after the operator clicks the confirmation button displayed by the preset signal (for example, the startup confirmation button), the second machine 6 performs a complete shaking operation of the slurry or other chemical liquid storage tank.

After successfully completing the shaking operation of the slurry liquid storage tank, as shown in FIG. 4B (b), the portable electronic device 5 receives the preset signal sent by the central monitoring system CSRC, and the preset signal will be A notice indicating that the shaking of the slurry or other chemical liquid storage tank has been successfully completed. Conversely, as shown in (c) of FIG. 4B, if the shaking operation of the slurry or other chemical liquid storage tank is not successfully completed or is interrupted, and the preset signal is also notified of the warning.

Thus, the above system has completely and clearly explained a rocking machine operating system and method of the present invention; and, as described above, the present invention has the following advantages:

(1) The present invention provides a rocking machine operating system, comprising: at least one identity message carrying unit 21, at least one item message carrying unit 31, at least one first machine message carrying unit 61, at least one The second machine information carrying unit 61 and at least one portable electronic device 5. In particular, after the portable electronic device 5 reads the basic information carried by the message carrying units (21, 31, 41, 61) with its reading unit 51, the central monitoring system CSRC of the back end can Allowing the operator to operate the first machine 4 and/or after confirming whether the operator has the machine operating authority and the item name, batch number, expiration date, and serial number of the item contained in the item container 3 Two machines 6. In this way, it can ensure that the shaking operation of the slurry or other chemical liquid storage tank and related records are carried out under the electronic system management, and any paper record is exempted, so that any human operation abnormality or non-operation can be effectively avoided. Completion of related work in a manner consistent with standard operating procedures.

It is to be understood that the foregoing detailed description of the preferred embodiments of the present invention is not intended to limit the scope of the invention, Both should be included in the scope of the patent in this case.

<This new type>

21‧‧‧ Identity Message Carrying Unit

31‧‧‧Site message carrying unit

41‧‧‧First machine message carrying unit

61‧‧‧Second machine message carrying unit

5‧‧‧Portable electronic devices

CSRC‧‧‧Central Monitoring System

2‧‧‧Operator ID card

3‧‧‧ Item Holder

4‧‧‧First machine

6‧‧‧Second machine

5‧‧‧Portable electronic devices

51‧‧‧Reading unit

R‧‧‧ transceiver

7‧‧‧Control device

8‧‧‧Electronic Scepter Unit

<知知>

no

1 is a perspective view showing a working system of a rocking machine of the present invention; FIG. 2 is a perspective view showing a portable electronic device; FIG. 3A is a front view showing a screen of the portable electronic device; Front view of the screen of the portable electronic device.

Claims (10)

A shaking machine operating system includes: at least one identity message carrying unit disposed on at least one operator identity card; at least one item message carrying unit disposed in at least one item container Above, and the item container is configured to receive a specific item; at least one first machine message carrying unit is disposed on at least one first machine, and the first machine is used Using the specific item; at least one second machine message carrying unit is disposed on at least one second machine, and the second machine is used to preprocess the specific item; and at least one portable The electronic device has a reading unit. The portable electronic device can confirm whether the item container is accommodated by reading the item information carrying unit. The specific item needs to be pre-processed by the second machine; wherein, by the reading unit, the portable electronic device can read the party of the identity message carrying unit Confirming that the operator holding one of the operator identity cards has the authority to operate the first machine and the second machine; wherein the portable unit can read the first The operation status of the first machine and the second machine is confirmed by means of a machine message carrying unit and the second machine message carrying unit. The rocking machine operating system of claim 1, wherein the method further comprises: a central monitoring system communicating with the portable electronic device through a transceiver device and monitoring and controlling the control device through a control device The operational status of the first machine and the second machine. The shaking machine operating system of claim 1, wherein the specific item is a chemical fluid polishing liquid or other chemical liquid, and the first machine is a polishing liquid or other chemical liquid supply system, and The second machine is a rocking machine of a liquid storage tank. The shaker machine operating system of claim 1, wherein the identity message carrying unit, the item message carrying unit, the first machine message carrying unit, and the second machine information The carrying unit can be any of the following: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above. The shaking machine operating system according to claim 1, wherein the portable electronic device can be any one of the following: a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, Or smart watch; the reading unit can be any of the following: RFID tag reader, NFC tag reader, image recognizer, one-dimensional bar code reader, two-dimensional bar code reader, Hanxin code reading , QR code reader, or matrix barcode reader. The image processing unit of the invention, wherein the reading unit is an image capturing device, and the portable electronic device further has an image recognition unit; wherein, by using The reading unit and the image recognition unit, the portable electronic device can complete the identity message carrying unit, the item message carrying unit, the first machine message carrying unit, and/or the second machine The reading of the message carrying unit. The shaking machine operating system of claim 1, wherein the plurality of basic messages carried by the item information carrying unit comprise: a product name, a batch number, an expiration date, and a serial number, and A Central seperating character is inserted between two adjacent basic messages. The rocking machine operating system of claim 1, wherein the operating state can be any of the following: whether the machine is in use or whether the machine is not listed as a faulty machine. The shaking machine operating system of claim 1, wherein the method further comprises: an electronic token unit for communicating with the portable electronic device; After the portable electronic device completes the reading of the identity message carrying unit, the electronic token device is used for repeatedly confirming whether the operator holding the operator identity card has the first machine and the second The authority of the machine. The shaking machine operating system according to claim 7, wherein the message separating symbol can be any one of the following: %, $, /, ~, !, @, #, ^, &, *, (,), -, _, |, {, }, ?, <, >, \, [,] or +.