TWI662221B - Shaking system and operating method for chemical shakers - Google Patents

Abstract

The present invention provides a shaking machine operating system and method, wherein the system includes: at least one identity information carrying unit, at least one material information carrying unit, at least one first machine information carrying unit, and at least one first Two machine message carrying units and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system at the back end can confirm whether the operator has the machine operation authority and the After the product name, batch number, expiration date, and serial number of the materials contained in the material container are correct, the operator is allowed to operate the first machine and / or the second machine. In this way, it is possible to ensure that the shaking operation and related records of the grinding liquid or other chemical liquid storage tanks are performed under the electronic system management, and any paper records are avoided. Completion of related tasks in a manner consistent with standard operating procedures.

Description

Shaking machine operation system and method

The invention relates to the technical field of semiconductor manufacturing processes, in particular to a shaking machine operating system and method, which is used to assist operators of integrated circuit manufacturing plants (IC foundry) to complete chemical storage under the supervision of a central monitoring system at the back end. Periodic Shaking operation of a chemical container.

Chemical mechanical polishing (CMP) has been widely used in comprehensive planarization processes in semiconductor IC manufacturing processes. When performing the CMP process, the wafer must be placed between a wafer carrier (Carrier / Head) and a rotating table with polishing pads on the surface. In addition, during the process of comprehensively planarizing the wafer with the rotary table having a polishing pad, a chemical mechanical polishing slurry is continuously sprayed onto the wafer surface through a spray pipe. It is conceivable that the polishing pad and the chemical fluid polishing liquid (abbreviated as "abrasive liquid") are consumables in the CMP process, and must be replaced regularly or periodically by on-site operators.

It must be added that the polishing liquid is mainly composed of an abrasive (Abrasive), a surfactant, a pH buffer, an oxidizing agent, and a preservative; among them, the main component of the abrasive is usually silicon dioxide (SiO ₂ ) nanometer. Abrasive particles, alumina trioxide (Al ₂ O ₃ ) nano abrasive particles, or cerium oxide (CeO ₂ ) nano abrasive particles. However, the practical experience of semiconductor IC manufacturers indicates that after the storage tank is completed and stored for a period of time, the unused polishing liquid is prone to flocculation or agglomeration of nano-sized abrasive particles. Therefore, the standard operating procedures (SOP) of semiconductor IC manufacturers require that operators must periodically inspect each barrel of liquid storage tanks based on batch or material numbers, and then store liquids before flocculation or agglomeration of nano-sized abrasive particles occurs The chemical container shaker shakes the storage tank.

However, the practical experience provided by IC foundry also pointed out that there is a major flaw in the shaking operation procedure of the currently used grinding liquid or other chemical liquid storage tanks, as explained below. The shaking operation and history of storage tanks for grinding liquids or other chemical liquids are usually recorded on paper, and the paper records include at least: operator name, operator employee number, storage tank material number (or product name) when the machine is on the machine 、 Perform the operation time of shaking the liquid storage tank regularly, and the time to get off the machine. However, due to the shaking operation of the storage tanks of abrasive or other chemical liquids and the paper records were performed by humans at the same time, once human operation abnormalities occurred during the execution of the procedures or the related operations were completed in a way that did not meet the standard operating procedures, For example, the operator performs shaking operations with abrasive liquid or other chemical liquid storage tanks with mismatched material numbers. Such human error will inevitably lead to major losses for IC foundry and its customers.

From the above description, it is known that it is urgent for the integrated circuit manufacturing plant to electronically synchronize the shaking operation and the recording of the storage tank of the polishing liquid or other chemical liquid. In this way, the factory management of the integrated circuit manufacturing plant can completely and comprehensively monitor the shaking process of the grinding liquid or other chemical liquid storage tanks through the central control system and whether the operator has the execution authority. In view of this, the inventor of this case made great efforts to research and create, and finally developed and completed a shaking machine operating system and method of the present invention.

The main object of the present invention is to provide a shaking machine operating system and method, wherein the system includes: at least one identity information carrying unit, at least one material information carrying unit, and at least one first machine information carrying unit , At least one second machine message carrying unit, and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system at the back end can confirm whether the operator has the machine operation authority and the After the product name, batch number, expiration date, and serial number of the materials contained in the material container are correct, the operator is allowed to operate the first machine and / or the second machine. In this way, it is possible to ensure that the shaking operation and related records of the grinding liquid or other chemical liquid storage tanks are performed under the electronic system management, and any paper records are avoided. Completion of related tasks in a manner consistent with standard operating procedures.

In order to achieve the above-mentioned main object of the present invention, the inventor of the present invention provides an embodiment of the operating system of the shaker, which includes: at least one identity information carrying unit, which is arranged on at least one operator identity card; At least one material information carrying unit is disposed on at least one material receptacle, and the material receptacle contains a specific material; at least one first machine information carrying unit is provided On at least one first machine, and the first machine is used to use the specific material; at least one second machine information carrying unit is disposed on at least one second machine, and the The second machine is used to pre-process the specific material; and at least one portable electronic device has a reading unit; wherein, with the reading unit, the portable electronic device can read the through The material information carrying unit confirms whether the specific material contained in the material container needs to be pre-processed by the second machine; wherein, with the reading unit, the portable type The electronic device can confirm whether one of the operators holding the identity card of the operator has the authority to operate the first machine and the second machine by reading the identity information carrying unit; Unit, the portable electronic device can read the first machine message by Carrying unit carrying unit with the second embodiment to confirm the message machine first machine and the second operating state of the machine.

In addition, in order to achieve the above-mentioned main object of the present invention, the inventor of the present invention provides an embodiment of the operation method of the shaking machine, which includes the following steps: (1) setting at least one identity information carrying unit to at least one operation On the personnel identification card, at least one product information carrying unit is disposed on at least one material container, and at least one first machine information carrying unit is provided on at least one first machine. And setting at least one second machine information carrying unit on at least one second machine; wherein the material container contains a specific material (for example, grinding liquid or other chemical liquid), the The first machine is used to use the specific material, and the second machine is used to perform pretreatment on the specific material; (2) providing at least one portable electronic device, and the portable electronic device has a Reading unit; (3) picking up a grinding liquid or other chemical liquid storage tank shaking operation through the portable electronic device; (4) through the reading unit, the portable electronic device reads the The identity information carrying unit confirms whether one of the operators holding the identity card of the operator has the authority to operate the first machine and the second machine; (5) With the reading unit, the portable The portable electronic device confirms the operation status of the second machine by reading the second machine message carrying unit; (6) By the reading unit, the portable electronic device reads the material message by The method of carrying the unit confirms a plurality of basic information of the specific material (grinding liquid or other chemical liquid) contained in the material container, including at least: product name (material number), batch number, expiration date, and serial number ; And (7) the special container contained in the material container by the second machine; The fixed product performs a pretreatment (that is, a shaking operation of a grinding liquid or other chemical liquid storage tank).

<Invention>

21‧‧‧ Identity information carrying unit

31‧‧‧Material information carrying unit

41‧‧‧The first machine information carrying unit

61‧‧‧Second machine message carrying unit

5‧‧‧ Portable electronic device

CSRC‧‧‧ Central Monitoring System

2‧‧‧ Operator ID Card

3‧‧‧ material container

4‧‧‧ the first machine

6‧‧‧Second machine

51‧‧‧reading unit

R‧‧‧ Transceiver

7‧‧‧control device

8‧‧‧ electronic token unit

<Habitual knowledge>

no

FIG. 1 is a structural diagram of a shaking machine operating system according to the present invention; FIG. 2 is a perspective view of a portable electronic device; 4A is a front view showing a screen of a portable electronic device; and FIG. 4B is a front view showing a screen of a portable electronic device.

In order to describe the operating system and method of the shaker table more clearly, a preferred embodiment of the present invention will be described in detail below with reference to the drawings.

Please refer to FIG. 1, which is a structural diagram of a shaking machine operating system according to the present invention. As shown in FIG. 1, the shaking machine operating system of the present invention is mainly composed of at least one identity information carrying unit 21, at least one material information carrying unit 31, and at least one first machine information carrying unit. A carrying unit 41, at least a second machine message carrying unit 61, at least a portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the identity information carrying unit 21 is disposed on an operator identity card 2. In brief, the identity information carrying unit 21 is used to carry the basic information of an operator who holds the identity card 2 of the operator, including: name, work number, unit, rank, and qualifications to complete the machine operation Exam (Qualify). It is specifically stated that only operators who have completed the qualification test for the operation of the machine are allowed to operate the first machine 4 and the second machine 6; in addition, operators with higher ranks are allowed to operate the machine The more types there are. For example, the director, senior engineer, and chief engineer can operate the machines of different units, but the operator (OP) is only restricted to operate the machines of their units.

On the other hand, the material information carrying unit 31 is set on a corresponding chemical container 3, and the material container 3 contains a special container. Ordered goods. The material information carrying unit 31 carries a plurality of basic information about the specific material, including a product name (or material number), a batch number, an expiration date, and a serial number. For example, the product name may be used to indicate that the specific material is a chemical mechanical polishing slurry, and the material container 3 is used to contain the chemical fluid polishing slurry (referred to as "abrasive liquid ”) Or other chemical liquid storage tank. On the other hand, the first machine information carrying unit 41 and the second machine information carrying unit 61 are respectively disposed on the corresponding first machine 4 and second machine 6. According to the design of the present invention, the first machine 4 is used to use the specific material; for example, the first machine 4 is a grinding liquid or other chemical liquid supply system. On the other hand, the second machine 6 is used to perform a pretreatment on the specific material. For example, the second machine 6 is a chemical container shaker of a liquid storage tank.

It can be known from the above description that the unit "at least one" is used to indicate that the number of the four types of information carrying units (21, 31, 41, 61) is one or more. In other words, the exact number of the four types of message carrying units (21, 31, 41, 61) is determined by the identity card of the operator 2, the material container 3, the first machine 4, and The number of the second machine 6. On the other hand, the portable electronic device 5 has a reading unit 51. With the reading unit 51, the portable electronic device 5 can confirm the first machine 4 and the second machine by reading the first machine message carrying unit 41 and the second machine message carrying unit 61. Operation status of machine 6. Moreover, as shown in FIG. 1, the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver R. The communication protocol between the transceiver R and the portable electronic device 5 may be a wireless communication network. Including WIFI, 3G, 4G, Bluetooth, Zigbee, etc., the communication protocol between the transceiver R and the central monitoring system CSRC can be wireless communication Network or wired communication network, among which wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee, etc. And the central monitoring system CSRC controls the operating state of the first machine 4 and the second machine 6 through a control device 7, wherein the control device 7 includes a programmable logic controller (PLC) or a direct digital Controller (Direct Digital Controller, DDC), Object Linking and Embedding (OLE) or OLE for Process Control (OPC). The operation status referred to herein may be any of the following: whether the machine is in use or whether the machine is not listed as a faulty machine. Therefore, after reading the first machine message carrying unit 41 and the second machine message carrying unit 61, the portable electronic device 5 can learn the first machine from the central monitoring system CSRC. Types of the station 4 and the second machine 6, setting parameters, and their operating conditions. In addition, with the reading unit 51, the portable electronic device 5 can further confirm whether the operator holding the identity card 2 of the operator has the ability to operate the first by reading the identity information carrying unit 21. Authority of machine 4 and second machine 6.

In particular, before the material container 3 is mounted on the first machine 4 (ie, the grinding liquid or other chemical liquid supply system), it must be confirmed by reading the material information carrying unit 31 The basic information related to the specific material contained in the material container 3 ensures that the material container 3 is loaded into the correct first machine 4 when the specific material is in a normal state. In. The related basic information includes but is not limited to: the specific product name is correct, the batch number of the specific material is not disabled, the batch number of the specific material has a storage record, and the storage date of the specific material does not exceed the valid date Or, the specific material is periodically pre-processed by the second machine 6. In-process container 3 is confirmed to belong to After the normal state, the central monitoring system CSRC will automatically release the cabinet door of the first machine 4 cabinet. At this time, the operator can remove the material capacity from the first machine 4 that has exhausted the specific material. Setter 3, and a new material container 3 is installed in the first machine table 4.

It is worth noting that if the portable electronic device 5 reads the material information carrying unit 31 to confirm that the grinding liquid or other chemical liquid contained in the material container 3 needs to be the second machine The platform 6 pre-processes it, and the operator will be restricted by the system, and the material container 3 cannot be directly mounted on the first machine 4. To further explain, the operator must first send the material container 3 to the second machine 6 to complete the pretreatment of the material container 3 by using the second machine 6. The pretreatment referred to herein refers to performing a shaking operation on a liquid storage tank (that is, the material container 3) of the grinding liquid or other chemical liquid.

Although FIG. 1 shows that the identity information carrying unit 21, the material information carrying unit 31, the first machine information carrying unit 41, and the second machine information carrying unit 61 are one-dimensional bar codes ( 1D barcode), but this should not be used to limit the implementation of the message carrying unit (21, 31, 41, 61). When the present invention is actually applied, the identity information carrying unit 21, the material information carrying unit 31, the first machine information carrying unit 41, and the second machine information carrying unit 61 may be the following Any one of: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, Maxicode, RFID tag, An NFC tag, a combination of any of the two, or a combination of any two or more of the foregoing.

Taking a 1D barcode as an example, the material information carrying unit 31 can be made using a Code 39 barcode generator, and it can carry the material contained in the material container 3 Product name (material number), batch number, expiration date, and serial number of the specific material. It is worth noting that in order to facilitate the clear reading of the product name (material number), batch number, expiration date, and serial number by the portable electronic device 5, when making the one-dimensional barcode of the material information carrying unit 31, it must be A central seperating character is inserted between two adjacent basic messages, for example:%, $, /, ~ ,! , @, #, ^, &, *, (,),-, _, |, {,},? , <,>, \, [,], Or +.

It can be imagined that, corresponding to the information carrying units (21, 31, 41, 61) of different implementation aspects, the reading unit 51 of the portable electronic device 5 may be any of the following: RFID tag reader, NFC tag reader, image reader, one-dimensional barcode reader, two-dimensional barcode reader, Chinese letter reader, QR code reader, matrix barcode reader, or image capture device. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capture module built in the portable electronic device 5 can be used as the Reading unit 51; In this way, after installing an image (or barcode) identification software on the portable electronic device 5, the portable electronic device 5 can be used to make the portable electronic device by using the reading unit 51 and the image recognition unit together. The device 5 finishes reading the identity information carrying unit 21, the material information carrying unit 31, the first machine information carrying unit 41, and / or the second machine information carrying unit 61. However, in view of the fact that most integrated circuit manufacturers (IC foundry) prohibit the use of any type of smart electronic devices in the factory, Digital personals equipped with a barcode scanner (ie, reading unit 51) assistant (PDA) becomes the best implementation of the portable electronic device 5.

Continue to refer to FIG. 1 and also refer to FIG. 2, which are perspective views showing the portable electronic device. It is worth noting that although the portable electronic device 5 can read the identity information carrying unit 21 to confirm whether the operator holding the operator's identity card 2 has the ability to operate the first machine 4 and the second machine 6, but considering that lower-level operators may borrow the higher-level plant manager or engineer's operator ID card 2 to arbitrarily operate the first machine 4 and / or the second machine 6, the present invention is A so-called Electronic token unit 8 is added to the operating system of the shaker; a one-time password (OTP) is stored in the electronic token unit 8. In particular, after the portable electronic device 5 finishes reading the identity information carrying unit 21, the central monitoring system CSRC can request the operator to provide the electronic token unit 8 through the portable electronic device 5; The portable electronic device 5 can repeatedly confirm whether the operator holding the identity card 2 of the operator has the authority to operate the first machine 4 and the second machine 6 by accessing the one-time authentication code. Avoid high-level factory director or engineer operator identity card 2 to be used to randomly operate the first machine 4 or the second machine 6. The present invention does not limit the implementation of the electronic token unit 8. As shown in FIG. 2, the electronic token unit 8 may be a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. In addition, after the portable electronic device 5 completes the one-time authentication code access from the electronic token unit 8, a token code generating unit (not shown) inside the portable electronic device 5 will A set of one-time authentication codes are generated again and written into the electronic token unit 8, thereby increasing the operation authority of the first machine 4 and the second machine 6.

In this way, the above description is a complete and clear description of a shaker operating system of the present invention. Next, a shaker of the present invention will be described below. Table operation method. Please refer to FIG. 2 repeatedly, and also refer to FIG. 3A and FIG. 3B at the same time, which is a flowchart showing the operation method of the shaker table of the present invention. In addition, please refer to FIG. 4A and FIG. 4B together, which are front views showing a screen of the portable electronic device. As shown in FIG. 2 and FIG. 3A, the shaking machine operation method first executes step S1, setting at least one identity information carrying unit 21 on at least one operator identity card 2, and placing at least one product information The carrying unit 31 is disposed on at least one material container 3, and at least one first machine information carrying unit 41 is disposed on at least one first machine 4, and at least one second machine The message carrying unit 61 is disposed on at least one second machine 6; wherein the material container 3 contains a specific material (for example, grinding liquid or other chemical liquid), and the first machine 4 is used for The specific material is used, and the second machine 6 is used to perform pretreatment on the specific material.

Moreover, in step S2, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example, a barcode scanner). The shaking machine operation method of the present invention then executes step S3. As shown in FIG. 4A (a), a portable machine 5 is selected to execute a shaking machine operation. Next, in step S4, as shown in (b) of FIG. 4A, with the reading unit 51, the portable electronic device 5 confirms that the portable electronic device 5 holds the identity by reading the identity message carrying unit 21. Whether one of the operator identity cards 2 has the authority to operate the first machine 4 and the second machine 6. Continuing, in step S5, as shown in FIG. 4A (c), with the reading unit 51, the portable electronic device 5 can read the message carrying unit 61 of the second machine by reading the Way to confirm the operation status of the second machine 6. The operating status referred to here can be any of the following: whether the machine is in use or whether the machine is not listed as a faulty machine. If the second machine 6 is in a non-operation state or a non-abnormal state, the operator is allowed to use the second machine 6.

Before the material container 3 is mounted on the second machine 6, the method flow is to execute step S6. In step S6, as shown in FIG. 4A (d), with the reading unit 51, the portable electronic device 5 confirms the material capacity by reading the material information carrying unit 31. The plurality of basic information of the specific material (grinding liquid or other chemical liquid) contained in the setter 3 includes at least: product name (material number), batch number, expiration date, and serial number. If it is confirmed through the basic message that the material container 3 must indeed use the second machine 6 to perform the shaking operation of the grinding liquid or other chemical liquid storage tanks, the method steps will then proceed to step S7: using the second machine The stage 6 performs a pretreatment (that is, performs a shaking operation of a grinding liquid or other chemical liquid storage tank) on the specific material contained in the material container 3. As shown in (a) of FIG. 4B, since the operating state of the second machine 6 is controlled by the central monitoring system CSRC, the portable electronic device 5 is used to read the identity information carrying unit 21 and the material information. After the carrying unit 31, it will receive the preset signal sent by the central monitoring system CSRC. At this time, after the operator clicks the confirmation key (for example, the start confirmation key) displayed on the preset signal, the second machine 6 will perform a complete shaking operation of the storage tank of the grinding liquid or other chemical liquid.

After successfully completing step S7, as shown in FIG. 4B (b), the portable electronic device 5 will receive a preset signal sent by the central monitoring system CSRC, and the preset signal will display the polishing liquid or other chemical Notification that the shaking operation of the liquid storage tank has been successfully completed. Conversely, as shown in FIG. 4B (c), if the shaking operation of the grinding liquid or other chemical liquid storage tank is not successfully completed or is interrupted suddenly, the preset signal will also be notified by the relevant warning.

The operation method of the shaking machine of the present invention is to confirm whether the operator holding the identity card 2 of the operator has the authority to operate the first machine 4 and the second machine 6 through step S4. However, it must be foreseen in advance that lower-level operators may borrow the higher-level plant manager or engineer's operator ID card 2 to operate the first machine 4 or the second machine 6 indiscriminately. In the invention, a step 4A is added to the operation method of the shaking machine, which can be inserted between the step S4 and the step S5. When step 4A is performed, the portable electronic device 5 will require mutual communication with an electronic token unit 8 (as shown in FIG. 2) to repeatedly confirm whether the operator holding the operator identity card 2 has the ability to operate the The authority of the first machine 4 and the second machine 6. In short, the portable electronic device 5 can repeatedly confirm whether the operator holding the operator identity card 2 has the operation of the first by accessing the one-time authentication code in the electronic token unit 8. The authority of the machine 4 and the second machine 6 prevents the operator ID card 2 of the senior manager or engineer from being used to randomly operate the first machine 4 or the second machine 6.

In this way, the above-mentioned system has completely and clearly explained an operating system and method of a shaking machine of the present invention; and, according to the above, it is known that the present invention has the following advantages: (1) The present invention provides a shaking machine operating system, which includes: at least one identity information carrying unit 21, at least one material information carrying unit 31, at least one first machine information carrying unit 41, and at least one The second machine message carrying unit 61 and at least one portable electronic device 5. In particular, after the portable electronic device 5 reads the basic information carried by the message carrying units (21, 31, 41, 61) with its reading unit 51, the back-end central monitoring system CSRC can Before confirming whether the operator has the machine operation authority and the product name, batch number, expiration date, and serial number of the material contained in the material container 3 If it is correct, the operator is allowed to operate the first machine 4 and / or the second machine 6. In this way, it is possible to ensure that the shaking operation and related records of the grinding liquid or other chemical liquid storage tanks are performed under the electronic system management, and any paper records are eliminated. This is to effectively avoid any human operation abnormality or non-standard operation. Completion of related tasks in a manner consistent with standard operating procedures.

It must be emphasized that the above detailed description is a specific description of the feasible embodiment of the present invention, but this embodiment is not intended to limit the patent scope of the present invention, and any equivalent implementation or change without departing from the technical spirit of the present invention, All should be included in the patent scope of this case.

Claims (10)

An operating system for a shaking machine includes: at least one identity information carrying unit, which is arranged on at least one operator's identity card; at least one material information carrying unit, which is arranged on at least one material container Above, and the material container contains a specific material; at least one first machine information carrying unit is arranged on at least one first machine, and the first machine is used for Using the specific material; at least one second machine information carrying unit is disposed on the at least one second machine, and the second machine is used to pre-process the specific material; and at least one portable The electronic device has a reading unit; wherein, by the reading unit, the portable electronic device can confirm whether the material container is accommodated by reading the material information carrying unit. The specific material needs to be pre-processed by the second machine; wherein, with the reading unit, the portable electronic device can confirm that the operation is held by reading the identity information carrying unit. One of the personnel identification cards The authority of a machine and the second machine; wherein, by means of the reading unit, the portable electronic device can read the message carrying unit of the first machine and the message carrying unit of the second machine To confirm the operation status of the first machine and the second machine. The operating system for a shaker as described in item 1 of the scope of patent application, further comprising: a central monitoring system that communicates with the portable electronic device through a transceiver device, and monitors and controls the device through a control device Operation status of the first machine and the second machine. The operating system for a shaker table described in item 1 of the scope of the patent application, wherein the specific material is a chemical fluid polishing liquid or other chemical liquid, the first machine is a grinding liquid or other chemical liquid supply system, and The second machine is a shaking machine for a liquid storage tank. The operating system for a shaking machine described in item 1 of the scope of patent application, wherein the identity information carrying unit, the material information carrying unit, the first machine information carrying unit, and the second machine information The carrying unit can be any of the following: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, matrix barcode (Maxicode), RFID tag, NFC tag, any combination of the two, or any combination of the two or more. According to the operating system of the shake machine described in item 1 of the scope of patent application, the portable electronic device may be any one of the following: smart phones, personal digital assistants, notebook computers, tablet computers, smart glasses, Or smart watch; the reading unit can be any of the following: RFID tag reader, NFC tag reader, image recognizer, one-dimensional barcode reader, two-dimensional barcode reader, Chinese letter reading Reader, QR code reader, or matrix barcode reader. According to the operating system of the shaker table described in item 1 of the scope of patent application, wherein the reading unit is an image capture device, and the portable electronic device further has an image recognition unit; The reading unit and the image recognition unit, the portable electronic device can complete the identity information carrying unit, the material information carrying unit, the first machine information carrying unit, and / or the second machine Reading of the station message carrying unit. The operating system for a shaking machine as described in item 1 of the scope of patent application, wherein the plurality of basic information carried by the material information carrying unit includes: product name, batch number, expiration date, and serial number, and A central seperating character is inserted between two adjacent basic messages. According to the shaking machine operating system described in item 1 of the scope of patent application, the operating state can be any of the following: whether the machine is in use or whether the machine is not listed as a failure machine. The operating system for a shaker machine as described in item 1 of the scope of patent application, further comprising: an electronic token unit 8 for communicating with the portable electronic device; After the portable electronic device finishes reading the identity information carrying unit, the electronic token device is used to repeatedly confirm whether the operator holding the operator's identity card has the ability to operate the first machine and the first The authority of the second machine. For example, the operating system for a shaker machine described in item 7 of the scope of patent application, wherein the message separation symbol can be any of the following:%, $, /, ~ ,! , @, #, ^, &, *, (,),-, _, |, {,},? , <,>, \, [,], Or +.