TWI711509B - Chemical replacement system - Google Patents

Abstract

The present invention discloses a chemical replacement system, wherein the system comprises: at least one ID information carrying unit, at least one product information carrying unit, at least one machine information carrying unit, and at least one portable electronic device. According to the particular designs of the present invention, the portable electronic device has an information reading unit for reading the information carried by the three types of the information carrying units. Therefore, after confirming whether the operation staff has a machine operation authority or not as well as verifying whether the product accommodated by a product container has right product name, lot No., expired date, and quantity No., a back-end central supervision remote control (CSRC) unlocks the cabinet door of the machine, such that the operation staff is able to complete the chemical container replacement procedure. As a result, by the implementation of this novel system, man-made abnormal operation is effectively prevented from occurring in the chemical container replacement procedure because all of the chemical container replacement procedures are achieved under an electronic management without using any paper documents.

Description

Chemical reloading system

The present invention is related to the technical field of semiconductor manufacturing process, especially for assisting IC foundry to safely complete the replacement operation of chemical container through online verification.

Chemical Mechanical Polishing/Chemical Fluid (Chemical Mechanical Polishing, CMP)/(Chemical fluid) has been widely used in the comprehensive planarization process in the semiconductor IC manufacturing process. When performing the CMP process, the wafer must be placed between a wafer carrier (Carrier/Head) and a rotating table with a polishing pad on the surface. In addition, in the process of comprehensively planarizing the wafer with the rotating table with the polishing pad, a chemical mechanical polishing slurry is continuously sprayed onto the wafer surface through an injection tube. It is conceivable that the polishing pad and the chemical fluid polishing liquid (abbreviated as "polishing liquid") or other chemical liquids are consumables in the CMP process or other processes, and must be replaced by on-site operators on a regular or regular basis.

It must be added that as the line width of semiconductor IC manufacturing technology continues to shrink, process technology also changes. For example, the chemical mechanical polishing technology traditionally used in the overall planarization process has also been transferred to high-k metal gates (High-K metal gate) in the manufacturing process. However, since the line width of the metal gate is mostly below 16nm, it is necessary to filter the polishing liquid or other chemical liquid with a filter before injecting the polishing liquid or other chemical liquid into the relevant manufacturing platform. The method removes particles larger than 100 nanometers in the slurry or other chemical liquids. It is conceivable that the filter element or filter material of the filter is naturally a consumable in the CMP process and must be replaced by on-site operators on a regular or regular basis.

However, according to the practical operating experience provided by IC foundry, it can be found that the currently used polishing fluid or other chemical fluid and/or filter replacement procedure has a major defect, as explained below. The replacement operation and history of the polishing fluid or other chemical fluids and/or filters are recorded in paper, and the content of the paper record includes at least: the name of the replacement person, the replacement person’s employee number, the replacement time, the replacement item number, and the item Machine time, and the time when the product is removed from the machine. However, due to the fact that the replacement work and the paper record are completed by manpower at the same time, once the man-made abnormal operation occurs during the execution of the program, for example, the operator replaces the polishing liquid or other chemical liquid with the material number inconsistent, similar to this Human operation errors will inevitably lead to significant losses for IC foundry and its customers.

It can be seen from the above description that it is urgent for integrated circuit manufacturers to synchronize the electronic management of polishing fluids or other chemical fluids and/or filter materials, replacement operations, process steps and records. In this way, the factory pipe of the integrated circuit manufacturing plant can completely and comprehensively monitor whether the replacement material number of the polishing fluid or other chemical fluid and/or the filter element is correct through the central control system and whether the operator has the authority to replace it. In view of this, the inventor of this case tried his best to research and create, and finally developed and completed a chemical dressing system of the present invention.

The practical operating experience provided by IC foundry pointed out that the replacement operation and history of polishing fluid or other chemical fluid and/or filter are usually only recorded in paper. However, the replacement work and paper records are all done by manpower. Once an abnormal operation occurs during the execution of the program, for example, the operator uses the polishing liquid or other chemical liquids with inconsistent material numbers to chemically reload, similar This kind of human error will inevitably lead to heavy losses for IC foundry and its customers. The main purpose of the present invention is to provide a chemical reloading system which includes: at least one identity information carrying unit, at least one material information carrying unit, at least one machine information carrying unit, and at least one Portable electronic device. In particular, after the portable electronic device uses its reading unit to read the basic information carried by the information carrying units, the back-end central monitoring system can confirm whether the operator has the machine operation authority and the After the item name, batch number, expiration date, and serial number of the item contained in the item container are correct, the cabinet door of the machine is automatically released, and the operator can then proceed with the replacement of the related items. In this way, it is possible to ensure that all machine material replacements are carried out under the electronic system management, eliminating any paper records, so that it can effectively avoid the occurrence of man-made items during the process of implementing the replacement of old materials. Operation is abnormal.

In order to achieve the above-mentioned main objective of the present invention, the inventor of the present case provides an embodiment of the chemical reloading system, which includes: at least one identity information carrying unit, which is arranged on at least one operator identity card; At least one item information carrying unit is arranged on at least one item container, and the item container contains a specific item; at least one machine information carrying unit is arranged at least On a machine, and the machine is used to pre-process or directly use the specific material; and at least one portable electronic device has a reading unit; wherein, by the reading unit, the The portable electronic device can confirm the type of the machine and its operating status by reading the message carrying unit of the machine; at the same time, with the reading unit, the portable electronic device can read the identity message carrying unit. The method of loading unit confirms whether an operator holding the operator ID card has the authority to operate the machine; wherein, with the reading unit, the portable electronic device can carry information by reading the item The unit method confirms the plural basic information of the specific item contained in the item holder to ensure that the item holder is loaded into the correct machine when the specific item is in a normal state. In the stage.

In addition, in order to achieve the main purpose of the present invention, the inventor of the present case provides an embodiment of the chemical reloading method, which includes the following steps: (1) At least one identity information carrying unit is installed in at least one operator identity On the card, at least one material information carrying unit is set on at least one material container, and at least one machine information carrying unit is set on at least one machine; wherein, the material contains The holder contains a specific material, and the machine is used for preprocessing or directly using the specific material; (2) Provide at least one portable electronic device, and the portable electronic device has a reading unit; (3) With the reading unit, the portable electronic device carries information by reading the machine Unit confirms the type of the machine and its operating status; (4) With the reading unit, the portable electronic device confirms that it holds one of the operator’s identity cards by reading the identity information carrying unit Whether the operator has the authority to operate the machine; (5) With the reading unit, the portable electronic device confirms the contents of the material container by reading the material information carrying unit A plurality of basic information of the specific item to ensure that the item holder is loaded into the correct machine under a normal state of the specific item; and (6) by the reading unit , The portable electronic device reads the identity information carrying unit again, and completes the replacement operation of the specific item in the machine.

<The present invention>

21: Identity information carrying unit

31: Item information carrying unit

41: Machine information carrying unit

5: Portable electronic device

CSRC: Central Monitoring System

2: Operator ID card

3: Item container

4: Machine

5: Portable electronic device

51: Reading unit

6: Transceiver

7: Control device

8: Electronic token unit

<Learning>

no

Fig. 1 is a structural diagram showing a chemical reloading system of the present invention; Fig. 2 is a perspective view showing a portable electronic device; Figs. 3A and 3B are a flowchart showing the chemical reloading method of the present invention; Fig. 4A is a display The front view of the screen of the portable electronic device; and FIG. 4B shows the front view of the screen of the portable electronic device.

In order to be able to more clearly describe the chemical reloading system proposed by the present invention, the preferred embodiments of the present invention will be described in detail below in conjunction with the drawings.

Please refer to FIG. 1, which is a structural diagram of a chemical reloading system of the present invention. As shown in Figure 1, the chemical reloading system of the present invention mainly includes: at least one identity information carrying unit 21, at least one material information carrying unit 31, at least one machine information carrying unit 41, At least one portable electronic device 5 and a central monitoring system CSRC. According to the design of the present invention, the identity information carrying unit 21 is installed on an operator identity card 2. Simply put, the identity information carrying unit 21 is used to carry the basic information of an operator who holds the operator's identity card 2, including: name, job number, unit, rank, and whether to complete the machine operation qualifications Qualify. In particular, only operators who have completed the qualification test for machine operation will be allowed to operate the machine; in addition, operators with higher ranks are allowed to operate more types of machines. For example, factory directors, senior engineers, and chief engineers can all operate machines of different units, but operators (Operators, OP) are only restricted to operate machines of their units.

On the other hand, the material information carrying unit 31 is arranged on a corresponding chemical container 3, and the material container 3 contains a specific material. Wherein, the item information carrying unit 31 carries a plurality of basic information about the specific item, including: item name, batch number, effective date, and serial number. For example, the product name can be used to show that the specific material is a chemical mechanical polishing slurry, a chemical polishing slurry, a chemical liquid, related consumable materials, an O-ring, a gasket, or a slurry filter (Filter material). On the other hand, the machine’s information The loading unit 41 is arranged on the corresponding machine 4, and the machine 4 is used for preprocessing or directly using the specific material. For example, if the machine 4 is a polishing liquid supply system, the material contained in the material container 3 must be a chemical fluid polishing liquid (abbreviated as "grinding liquid"). Or, if the machine 4 is a slurry filtering machine, the specific material is a slurry filter, and the material container 3 is a filter housing.

It can be seen from the above description that the unit "at least one" is used to indicate that the number of the three message carrying units (21, 31, 41) is one or more. In other words, the actual number of the three types of information carrying units (21, 31, 41) is determined by the number of the operator ID card 2, the material container 3, and the machine 4. On the other hand, the portable electronic device 5 has a reading unit 51. With the reading unit 51, the portable electronic device 5 can confirm an operating state of the machine 4 by reading the machine message carrying unit 41. Moreover, as shown in FIG. 1, the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver device 6. The communication protocol between the transceiver device 6 and the portable electronic device 5 can be a wireless communication network. Including WIFI, 3G, 4G, Bluetooth, Zigbee, etc. The communication protocol between the transceiver 6 and the central monitoring system CSRC can be a wireless communication network or a wired communication network. The wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee Wait. And the central monitoring system CSRC controls the operating state of the machine 4 through a control device 7, where the control device 7 includes a programmable logic controller (PLC) or a direct digital controller (DDC) Or Object Linking and Embedding (OLE) or OLE for Process Control (OLE for Process Control, OPC). Therefore, after the machine's message carrying unit 41 is read, the portable The electronic device 5 can learn the type, setting parameters and operation status of the machine 4 from the central monitoring system CSRC. In addition, with the reading unit 51, the portable electronic device 5 can further confirm whether the operator holding the operator ID card 2 has the ability to operate the machine by reading the identity information carrying unit 21 4 permissions.

Specifically, before the material is replaced, the basic information of the specific item contained in the material container 3 can be confirmed by reading the item information carrying unit 31, so as to ensure the material The product container 3 is installed in the correct machine 4 when the specific material is in a normal state. For example, if the machine 4 is a polishing liquid supply system, reading the material information carrying unit 31 can confirm whether the product name of the specific material contained in the material container 3 is a polishing liquid. In addition, reading the item information carrying unit 31 can also confirm whether the batch number of the specific item has been disabled, whether the batch number of the specific item has a storage record, and whether the storage date of the specific item exceeds Effective date.

After the material container 3 is confirmed to be in the normal state, the central monitoring system CSRC will automatically release the cabinet door of the machine 4 cabinet. At this time, the operator can remove the exhausted specific material from the machine 4 The material container 3 of the product, and the new material container 3 is loaded into the machine 4. Moreover, after the material container 3 is installed in the correct machine 4 when the specific material is in a normal state, the portable electronic device 5 must be used to read the identity information carrying unit 21 again; After that, the central monitoring system CSRC will record the machine time of the new material container 3 and record the status of the material container 3 as "In machine". On the contrary, the central monitoring system CSRC records the old material container 3 as an empty bucket (Empty). At the same time, the central monitoring system CSRC will control The manufacturing device 7 displays the operator’s information (for example: name and job number) and the batch number (or material number) of the specific material contained in the material container 3 on the human-machine interface of the machine 4. machine interface,HMI).

Although FIG. 1 shows that the identity information carrying unit 21, the material information carrying unit 31, and the machine information carrying unit 41 are all one-dimensional barcodes (1D barcodes), the information carrying unit should not be restricted by this. Implementation of loading units (21, 31, 41). When the present invention is actually applied, the identity information carrying unit 21, the material information carrying unit 31 and the machine information carrying unit 41 can be any of the following: graphics, text, letters, numbers, one-dimensional Barcode (1D barcode), 2D barcode (2D barcode), Chinese-sensible code, QR code, Matrix barcode (Maxicode), RFID tag, NFC tag, a combination of any two of the above, or any two of the above A combination of the above.

Taking a one-dimensional barcode (1D barcode) as an example, the item information carrying unit 31 can be produced by a Code 39 barcode generator, and it will carry the item name and the specific item contained in the item container 3 Batch number, expiry date, and serial number. It is worth noting that, in order to facilitate the portable electronic device 5 to clearly read the product name, batch number, expiration date, and serial number, when creating the one-dimensional barcode of the item information carrying unit 31, it must be in two adjacent ones. A central seperating character is inserted between the basic messages, such as %, $, /, ~,! , @, #, ^, &, *, (,), -, _, |, {,},? , <, >, \, [,] or +.

It is conceivable that corresponding to the information carrying units (21, 31, 41) of different implementations, the reading unit 51 of the portable electronic device 5 can be any one of the following: RFID tag reader, NFC tag Reader, image recognizer, one-dimensional barcode reader, two-dimensional barcode reader, Hanxin code reader, QR code reader, matrix barcode reader, or image capture device. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capture module built in the portable electronic device 5 can be used as the Reading unit 51; In this way, after an image (or barcode) recognition software is installed on the portable electronic device 5, the reading unit 51 and the image recognition unit can be used together to make the portable electronic The device 5 completes the reading of the identity information carrying unit 21, the material information carrying unit 31, and/or the machine information carrying unit 41. However, in view of the fact that most IC foundries prohibit the use of any type of smart electronic devices in the factories, digital personal assistants equipped with barcode scanners (ie, reading unit 51) assistant (PDA) has become the best implementation aspect of the portable electronic device 5.

Continue to refer to FIG. 1 and also refer to FIG. 2, which is a perspective view of the portable electronic device. It is worth noting that although the portable electronic device 5 can confirm whether the operator holding the operator ID card 2 has the authority to operate the machine 4 by reading the identity information carrying unit 21, it is considered low Operators of different ranks may borrow the operator ID cards 2 of high-ranking factory directors or engineers to arbitrarily operate these machines 4 that do not require replacement of materials. The present invention adds a so-called electronic device to the chemical conversion system. Electronic token unit (Electronic token unit) 8; Among them, the electronic token unit 8 stores a one-time password (One-time password, OTP). In particular, after the portable electronic device 5 completes the reading of the identity information carrying unit 21, the central monitoring system CSRC can request the operator to provide communication with the electronic token unit 8 through the portable electronic device 5; The portable electronic device 5 can access the one-time authentication code by Method, repeatedly confirm whether the operator holding the operator ID card 2 has the authority to operate the machine 4, so as to prevent the operator ID card 2 of the high-level factory manager or engineer from being used for random operations that do not need to be replaced Item's machine 4. The present invention does not limit the implementation of the electronic token unit 8. As shown in FIG. 2, the electronic token unit 8 may be: a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. Moreover, after the portable electronic device 5 completes the access of the one-time authentication code from the electronic token unit 8, a token code generation unit (not shown) inside the portable electronic device 5 will A set of one-time authentication codes are regenerated and written into the electronic token unit 8 to increase the operating authority of the machine 4 in this way.

In this way, the above description is a complete and clear introduction to the chemical reloading system of the present invention. Next, the following will continue to describe a chemical repacking method of the present invention. Please refer to FIG. 2 repeatedly, and also refer to FIGS. 3A and 3B at the same time, which shows the flow chart of the chemical reloading method of the present invention. Also, please refer to FIG. 4A and FIG. 4B at the same time, which are front views showing the screen of the portable electronic device. As shown in FIG. 2 and FIG. 3A, the chemical reloading method first performs step S1 to install at least one identity information carrying unit 21 on at least one operator identity card 2, and carry at least one item information The unit 31 is arranged on at least one material container 3, and at least one machine information carrying unit 41 is arranged on at least one machine 4; wherein, the material container 3 houses a specific material Product (for example, grinding fluid or filter), and the machine 4 is used for pretreatment or directly using the specific product. In addition, in step S2, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example, a barcode scanner).

The chemical reloading method of the present invention then executes step S3. The reading unit 51 enables the portable electronic device 5 to confirm the operation of one of the machines 4 by reading the machine information carrying unit 41 status. And, in step S4, by the reading unit 51, the portable electronic device 5 confirms whether an operator holding the operator identity card 2 has the identity information carrying unit 21 by reading The authority to operate the machine 4. As shown in Figure 4A (a), after reading the machine information carrying unit 41, the machine ID of the machine 4 is displayed on the screen of the portable electronic device 5, and the portable electronic device 5 can Know the setting parameters and operation status of machine 4 from the central monitoring system CSRC. As shown in Figure 4A (b), if the operator confirms that he has the authority to operate the machine 4 after checking, the central monitoring system CSRC will automatically release the cabinet door of the machine 4 through the control device 7. At this time, as shown in Figure 4A (c), after clicking the item replacement operation option on the screen, the operator can then start the replacement operation of the item container 3.

After completing step S4, the chemical reloading method then executes step S5. With the reading unit 51, the portable electronic device 5 confirms the content of the item by reading the item information carrying unit 31. The plural basic information of the specific material contained in the holder 3 is used to ensure that the material holder 3 is loaded into the correct machine 4 when the specific material is in a normal state. As shown in Figure 4B (a), Figure (b) and Figure (c), before performing the replacement operation of the material container 3, the operator must use the portable electronic device 5 to read the The plural basic information carried by the item information carrying unit 31 include: product name, batch number, effective date, and serial number. For example, if the machine 4 is a polishing liquid supply system, reading the material information carrying unit 31 can confirm whether the product name of the specific material contained in the material container 3 is a polishing liquid. In addition, read the item information and carry The unit 31 can also confirm whether the batch number of the specific item has been disabled, whether the batch number of the specific item has a storage record, and whether the storage date of the specific item exceeds the effective date.

After confirming that the product name, batch number, expiry date, and serial number are normal, the central monitoring system CSRC will automatically release the cabinet door of the machine 4 cabinet. At this time, the operator can remove the machine 4 from the machine 4 that has exhausted the specific The material container 3 of the material, and the new material container 3 is loaded into the machine 4. Conversely, if the system finds that any of the product name, batch number, expiration date, and serial number is abnormal, the central monitoring system CSRC will not remove the cabinet door of the machine 4 cabinet. At this time, the operator must replace the material container 3 carrying the correct material information carrying unit 31, and repeat step S1. After completing step S5, the chemical reloading method proceeds to step S6: by the reading unit 51, the portable electronic device 5 reads the identity information carrying unit 21 again, and completes the loading of the specific material in the The replacement operation in the machine 4 (as shown in Figure 4B (b) and Figure (d)).

The chemical reloading method of the present invention confirms whether the operator holding the operator ID card 2 has the authority to operate the machine 4 through step S4. However, it must be anticipated that lower-ranking operators may borrow the operator ID cards 2 of higher-ranking factory directors or engineers to recklessly operate these machines 4 that do not require replacement of materials. Therefore, this The invention also adds step 4A to this chemical reloading method, which can be inserted between step (4) and step (5). When performing step 4A, the portable electronic device 5 will request to communicate with an electronic token unit 8 (as shown in FIG. 2) to repeatedly confirm whether the operator holding the operator ID card 2 can operate the Permission of machine 4. general speaking, The portable electronic device 5 can repeatedly confirm whether the operator holding the operator ID card 2 has the authority to operate the machine 4 by accessing the one-time authentication code in the electronic token unit 8. Avoid high-ranking factory manager or engineer's operator ID card 2 from being used to randomly operate the machines 4 that do not require replacement of materials.

Thus, the above system has completely and clearly explained a chemical reloading system and method of the present invention; and, from the above, it can be seen that the present invention has the following advantages: (1) The present invention provides a chemical reloading system, which includes: at least one identity information carrying unit 21, at least one material information carrying unit 31, at least one machine information carrying unit 41, and at least one portable Electronic device 5. In particular, after the portable electronic device 5 uses its reading unit 51 to read the basic information carried by the information carrying units (21, 31, 41), the back-end central monitoring system CSRC can confirm Whether the operator has the authority to operate the machine and whether the product name, batch number, expiration date, and serial number of the material contained in the material container 3 are correct, the cabinet door of the machine will be automatically released and the operator will proceed Removal of the container 3 for the replacement operation. In this way, it is possible to ensure that all machine material replacements are carried out under the electronic system management, eliminating any paper records, so that it can effectively avoid the occurrence of man-made items during the process of implementing the replacement of old materials. Operation is abnormal.

It must be emphasized that the above detailed description is a specific description of possible embodiments of the present invention, but this embodiment is not intended to limit the scope of the present invention. Any equivalent implementation or modification without departing from the technical spirit of the present invention, All should be included in the patent scope of this case.

2: Operator ID card

3: Item container

4: Machine

5: Portable electronic device

21: Identity information carrying unit

31: Item information carrying unit

41: Machine information carrying unit

51: Reading unit

CSRC: Central Monitoring System

6: Transceiver

7: Control device

Claims (8)

A chemical reloading system includes: at least one identity information carrying unit, which is arranged on at least one operator identification card; at least one material information carrying unit, which is arranged on at least one material container , And the material container contains a specific material; at least one machine information carrying unit is set on at least one machine, and the machine is used for preprocessing or directly using the specific material And at least one portable electronic device having a reading unit; wherein, by means of the reading unit, the portable electronic device can confirm the machine by reading the machine information carrying unit At the same time, with the reading unit, the portable electronic device can confirm whether an operator holding the operator’s identity card has the ability to operate the machine by reading the identity information carrying unit The authority of the station; wherein, with the reading unit, the portable electronic device can confirm the plurality of the specific items contained in the item container by reading the item information carrying unit Basic information to ensure that the material container is loaded into the correct machine when the specific material is in a normal state; wherein the identity information carrying unit carries and holds the operator’s identity card The plural basic information of the operator, including: name, job number, affiliation, rank, and qualification test (Qualify) whether to complete the machine operation; among them, the plural basic information includes: product name, batch number, validity Date, serial number, and a message separator (Central separating character) is inserted between two adjacent basic messages; Among them, the normal status can be any of the following: the specific item’s name is correct, the specific item’s lot number is not forbidden, the specific item’s lot number has a storage record, or the specific item’s storage date has not exceeded Effective date. For example, the chemical reloading system described in item 1 of the scope of patent application further includes: a central monitoring system that communicates with the portable electronic device through a transceiver device, and monitors and controls the device through a control device 7 The operating status of the station. The chemical replacement system described in item 1 of the scope of patent application, wherein the specific material is a chemical fluid polishing liquid, a chemical polishing liquid, a chemical liquid, a related consumable material, an O-ring, and a gasket Or one of a filter material. The chemical reloading system described in item 1 of the scope of patent application, wherein the identity information carrying unit, the material information carrying unit and the machine information carrying unit can be any of the following: graphics, text, Letters, numbers, one-dimensional barcode (1D barcode), two-dimensional barcode (2D barcode), Chinese-sensible code, QR code, matrix barcode (Maxicode), RFID tag, NFC tag, any of the above Combination, or a combination of any two or more of the above. For example, the chemical reloading system described in item 1 of the scope of patent application, wherein the portable electronic device can be any of the following: smart phone, personal digital assistant, notebook computer, tablet computer, smart glasses, or smart Watch; the reading unit can be any of the following: RFID tag reader, NFC tag reader, image recognizer, one-dimensional barcode reader, two-dimensional barcode reader, Hanxin code reader, QR code reader, or matrix barcode reader. For example, the chemical reloading system described in item 1 of the scope of patent application, wherein the reading unit is an image capture device, and the portable electronic device further has an image recognition unit; wherein, by using the reading unit together The portable electronic device can complete the reading of the identity information carrying unit, the item information carrying unit, and/or the machine information carrying unit. For example, the chemical reloading system described in item 1 of the scope of patent application further includes: an electronic token unit, which is used to communicate with the portable electronic device; wherein, the portable electronic device After the electronic device completes the reading of the identity information carrying unit, the electronic token device is used to repeatedly confirm whether the operator holding the operator's identity card has the authority to operate the machine 4. For example, in the chemical reloading system described in item 1 of the scope of patent application, the message separator can be any of the following: %, $, /, ~,! , @, #, ^, &, *, (,), -, _, |, {,},? , <, >, \, [,] or +.

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