TWM362994U - Probe card - Google Patents

Description

M362994 V. New description: [New technical field] The present invention relates to a probe card, in particular to a plating treatment on the surface of a probe of a probe card, so that the probe on the probe card is more It has electrical conductivity, which can increase its wear resistance and reduce friction, reduce the residue and dirt attached to the surface of the probe, prevent electromagnetic interference, and can be easily trimmed and reused. It has a long service life and greatly improves the detection yield. Can significantly reduce the cost of testing. [Prior Art] The test object of the integrated circuit (such as wafer, IC, DRAM, etc.) must pass the test machine to test whether the test object meets the functional characteristics required by the design. 'The probe card is made up of multi-layer printed electricity: the structure of the board (PCB) is 'complex' and uses a lot of probes (4) to eliminate the touch of the electronic contacts on the test object, each probe and the receiver The contact point of the measuring object is smaller than the hairline, and the probe card is applied to the bare crystal system for functional testing of the bare crystal system before the integrated circuit is packaged, and the sealing work after the defective product is selected. The probe card is one of the important processes that cause considerable influence in the manufacture of integrated circuits, and the general probe card is made of a material such as nm, vertical, thin film and microspring, and is made of a general material. The probe system is divided into hanging; (4)), vertical probe 12 (as shown in the second figure), the bullet probe is not shown in the second diagram, and the thin probe 14 (dry as probe 15 (such as Five pictures... The circle does not) and the micro-spring type does not), and the general probe card (as shown in Figure 3, M362994) The probe system (e.g., a cantilever probe is arranged on the base 16, and then the probe 11 by half glue # 1 #

The contact point of the probe needle and the electronic contact shape of the object to be tested are connected to the input signal of the object to be tested and the output value of the detected object, and the process of cooling the coffee maker> by *•4·^ Jrrm

The degree of tolerance and the life of the material, and the (four) end surface of the probe needle is easy to wear for a long time, and the surface of the contact end that is subjected to grinding will be uneven, easy to have residue and dirt, and it is difficult to remove, and the test object is tested. The yield is greatly reduced, and the retest rate is increased. Therefore, it is generally used to remove the sandpaper to maintain the yield. However, the length of the probe will be shortened after being repaired by sandpaper several times. After grinding to a certain extent, it can no longer be used. The cost of the probe card is extremely high, and the replacement of another new probe card will increase the test cost of the integrated circuit, so that the use method is extremely uneconomical, and the probe on the probe card is electrically conductive. The probes are arranged in close spaced intervals, so that a short circuit occurs due to the foreign matter falling on the gap between the probe and the probe, so that the probe cannot operate normally. On the other hand, because the probe card inputs signals and detected signals to the object under test, sometimes it is a high-frequency signal, and the number of probes on the probe card is extremely large and densely arranged, so the probe and the probe are It is easy to generate electromagnetic interference and affect the electric Λ 5 input and rotation of the tiger, which will affect the test results and reduce the reliability of the test. Therefore, how to improve the structure of the probe to reduce the electromagnetic wave dryness M362994 The probe 2 includes: a needle body 21 connected to the base 16 at one end, a needle 22 connected to the end of the needle body 21, and - A film 3 covering the surface of the needle 22 and the needle body 21 is provided. Wherein, the needle 22 has an end surface 22 at one end edge. When the needle 22 is in contact with a test object not shown, 'mainly contacts the test object corresponding to the film 3 on the end surface 221'. By extending the film 3 on the end surface 221, the needle 22 can be prevented from being directly worn. Take rf= α

, a 叩 叩 文 文 徕 徕 徕 2、 2、 2、 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 The material of the conductive material is made into a vacuum electric circuit, and the probe card portion is shielded, and the surface of the needle 22 and the needle body 21 of the probe 2 is applied to the surface of the needle body 21 by vacuum electric ore, and the result is 4+? The surface of the guide kekefe 2 and the body 21 of the needle body 21 are protected by 1Χ10\, and the material of the film 3 is conductive, and the conductive film of the ruthenium film is 3 Ω), such as crane, steel, sho... /, the thickness of the film 3 is formed (4) is greater than 0 and less than 1 mm, and the quality of the cover 3 can be different depending on the object to be tested, the needle 22 of the needle 2 and the surface of the needle body 21; A single layer or a plurality of surfaces are plated with different materials' and the film 3 is etched with a plurality of layers of the same material. Referring to FIG. 9, an embodiment of the probe card of the second needle 2 of the present invention mainly comprises a probe placed in an electroplating furnace, and a conductive material such as a crane alloy is mainly used. The probe card and the probe are arranged by the crane metal or the money furnace; the electric ore furnace can be set as the vacuum electricity 22 portion to be shielded on the surface of the needle 22 of the probe 2, and the surface of the needle 2 is exposed to be coated by vacuum plating. M362994 is 'protecting the 2* of the probe 2, and the film 3 is electroconductive with a conductive film 3-shaped conductive material f Ϊ cutting coffee (3) (9)·1 = two cranes, copper, etc. Any of them can be covered with (4) into a ', greater than 0 is less than lmm, and the article is different or the conditions of use cannot be detected as the plating is not '5, and the surface of the needle 22 of the probe 2 is forged with an untwisted material, and The film 3 can be a multi-sound cream amine of the material key film, and the soap layer can be multi-layered, and can be extended to the Zou..." The other cover can extend the film 3 on the needle 22 to the main body. The part 21 of the needle body, the purpose of use and the work b as shown in Fig. 1G, also have the above-mentioned reference to Fig. 11, the probe card of the second type of the needle 2 of the present invention is placed in the application, mainly to install the probe Tungsten metal 箄 and , X 读 2 can be mainly set by tungsten metal or code σ gold with conductive 铋 ^ plating furnace, will be inclined +... Its plating furnace can be set to vacuum electric Τ probe card and probe 2 needles 22 parts 21, in the needle 2 of the probe 2 to expose the needle body, pass the Μ, the surface of the body 21 is applied by vacuum plating to the coating, so that the surface of the needle body 21 of the probe 2 is shovel徂i β φ double 茚€ plated with a conductive film 3 shape =, the material of the film 3 is more than ixi 〇 3 (m. 〇), conductive materials, such as tungsten, copper, Ming... # a , Looking for materials, the thickness of the film 3 is greater than 〇 less than i mm, and the items are different or the parts are not used. The material is tested according to the desired condition, and the material of the needle 2 of the probe 2 is different in material and the cover 3 can be a single layer or a plurality of layers, and the material can be plated in multiple layers. Membrane 3. Referring to FIG. 12 differently, the fourth embodiment of the present invention is mainly characterized in that the probe card with the probe is placed in the electric furnace, and the probe 2 is mainly made of tungsten alloy. Made of material, made of metal or shellfish, the plating furnace can be set to vacuum electric M3 62994 mine furnace, probe probe and probe, _ 21 part, probe 2: needle: 22: The mask is 'exposed to the needle body, so that the surface of the probe 2 is applied to the ore film by vacuum electric ore to provide isolation protection. The non-conductive insulating film 4 on the surface of the material 21 is shaped like this, in the probe St: body? The thick insulating film 4, the probe 2 and the probe; the surface of the surface is non-conductive and the residue of the insulating material falls on the probe 2, the separation of the incineration insulating film 4, if the probe 2 The gap, there will be no short circuit, so that the probe 2 can be stabilized normally, the retest rate of the road will be greatly reduced; in addition, the yield can be/operated and the test yield is better, to the partial needle 22 parts, as shown in Figure 13, upper = film 4 extension purpose and efficacy. The probe card of the fifth real needle 2 of the present invention is placed in an electric ore furnace, and the probe 2J ^ is made of a conductive material such as a hoist alloy. Into the ten ^ can be set by the crane metal or plating furnace, the probe card and the probe of the plating furnace can be set to 22 parts of the vacuum, shielding the 21 part of the probe 2 'exposing the needle, so that the needle of the probe 2 The surface of 2/bei/2 is protected by vacuum electric ore, and the surface of the film is protected by a conductive film. The materials such as crane, steel and Ming are all ζ1Χ. 〇...The thickness of the leaf 1 is greater than 〇 less than 1 mm, and the film 3 is different from the material formed by the film 3 or the conditions of use are different, and the material is different from the mineral to be tested, and the film is coated. 3 The surface of the needle 22 can be coated with a multi-layered cream. The second layer can also be used in different parts., Dew::==: and probe - the surface of the needle 21 of the wooden needle 2 is fed by M362994 = electric ore. Membrane treatment, the insulating film 4 of the surface of the needle body 2i of the probe 2 is isolated and protected, and the insulating raft 4 is formed to be greater than 0 and less than 1 mm; The coating on the needle 223 to the needle 21 extending body portion opening Ρ knife, and then the circular body of the needle body 21 Μ M t-plated on the insulating film 4, as does, also has the above-described purpose of use and effectiveness. As shown in the sixteenth embodiment, the sixth embodiment of the present invention is substantially the same as the first embodiment, and the difference is that one of the antagonists /# ® , the probe 2 of the actual example further comprises the main ill film. The insulating film 4 of the surface of the third surface, and the main formation position of the insulating film 4 is corresponding to the needle body 2, the needle 22 should be fed, and the δ edge film 4 should be extended to the opposite side for a long time. The needle card is placed in the electric _, the probe tungsten alloy and other conductive materials - by tungsten metal or plating furnace, the probe card adjacent (four) + t" electric ore furnace can be set to vacuum 22 and needle 22 The probe 2 is exposed, the needle needle 22 of the probe 2 and the needle body H vacuum electric ore are applied to the mineral film treatment, so that the probe 2 is protected and covered with π into a material such as crane, steel, and... Other materials can be used, covering (the wide conductive system is larger than 〇, and the thickness of the film 3 is different from the thickness of the film 3 or the conditions of use can be different depending on the surface of the object to be tested. The material is temporarily 3, the needle 22 of the probe 2 and the needle body 21 are plated with different materials, and the film 3 can be a single layer or a plurality of layers, and the probe 3 of the 2 needle layer can be 3 ' The probe card and the electric ore have a film covering portion, which is shielded at the weft portion to expose the electric money with the needle body edge of the medium 3 ' 4 'The insulating surface is made of a non-conductive and insulated insulating layer. More than 〇 is less than ^. M362994 Needle 2 ^ β film 3 covers the needle body 21 and the needle 22, which can provide the conductivity of the probe and the second layer to improve the measurement reliability and reduce the retest rate, and the cover film and the insulating film can be avoided. The needle or the needle 22 is directly subjected to the abrasion resistance of the I and the probe 2, and even if the surface of the probe 2 is subjected to abrasion, the surface of the membrane 2 is a residue of the membrane, and the surface of the needle 22 can be >The whole grinding consumes 'and re-plating a new film 3, the needle 22 and the needle body 21 are less severely pressed during the probe dressing process. Therefore, the present invention can achieve wear resistance, long life, and reduced exploration. And the residual 'checks the residual effect of the scale. The insulating film 4 is located on the eve layer and is covered by the needle body 21 to prevent the short circuit caused by the foreign matter falling between the pure needles 2, so that the test can be continued and smooth. The ground is carried out, so the new model can improve the stability and reliability of the test. The main method is to first record the surface of the probe with a conductive film. The material of the film is more than lxi〇3 (m ! = conductive material such as m. The formed mouth drought degree is greater than 〇 less than 1 mm, and the material f of the film may be different materials on the surface of the probe depending on the article to be tested or the conditions of use, and the film may be a single layer or The multilayer 'can be made of different materials and mineral film as a multi-layered coating'. In addition, a non-conductive insulating film is formed, and the thickness of the insulating film is greater than G is less than _, and then the probe is mounted on the probe card. And grinding the probe 2, and then attaching the probe needle 3 mounted on the probe card to the electroconductive coating of the probe, the material of the coating is conductivity (10) (ΙΏ·ΩΓ1 conductive (four), The thickness of the film formed is greater than 〇 less than 1 mm. 10 M362994 Referring to Fig. 17, when the probe 2 on the probe card is used, the film 3 on the surface of the needle 22 of the probe 2 is worn, and residue and dirt remain on the film 3 on the surface of the needle 22. 'The surface of the probe 2 of the probe 2 set on the probe card can be trimmed and coated again. First, the surface of the needle 22 of the probe 2 is polished and trimmed, and the probe card and the probe 2 are not coated. The part is shielded, only the part of the needle 22 to be treated is exposed, and the shielded probe card and the probe 2 are placed in the plating furnace, and the unshielded needle is placed.

The 22 part is further plated with a conductive film 3〇 to form a protection, so that the probe 2 itself is not subject to wear, and the worn portion is only the film 3 or the film 30 on the surface of the probe 2, and the film is covered. 3, 30 can be trimmed after being worn, and the coating is repeated for reuse. Further, the film 3 is extended to correspond to the portion of the needle body 21, and the film 3 is covered to cover the surface of the insulating film 4. Similarly, when the film 3 is initially applied, the coating may be directly applied. The film 3 extends over the insulating film 4. In the present embodiment, the film 3, 3, and the insulating film 4 are also used to increase the wear resistance of the gripper 2 and to reduce the adhesion and dirt adhesion. In addition, the bamboo shoots are provided on the outermost layer by the conductive film 3 or the film 30, and are coated on the outer circumference of the needle and the needle body 21 to achieve electrical use: the insulating probe 2 and the beam 咎 9 > Use electromagnetic waves between and , to avoid electromagnetic interference affecting the test results, and thus improve the detection yield. In general, the probe will have a contact with the probe card, and the weight of the probe will be appropriate. (4), the life of the probe is due to the probe 2, and the probe 2 is using the probe/probe card. On the surface of the contact with the test object, the contact surface of the test object is M3 62994. The material of the contact surface of the test object is too & & & ... ... 休 休 休 休 休 休 休 休 休 休 休 休 休 休 休After the ruthenium treatment, the probe is guided by thunder, "on the surface of the probe 2 - layer or wear resistance (4) 3, and the surface is relatively smooth, which can reduce the adhesion of the material, and the attachment of the material, and The yield, the right and the easy, and the monthly elimination can increase the test cost of the integrated circuit by a significant reduction, and can increase the production capacity, which is very economical.

The present invention can be mounted on the probe cassette in the (four) probe ^ 丨: 1), the vertical probe 12 (shown in Figure 2), the elastic cyanine probe (shown in Figure 3), Probes of various types, such as a thin film probe M (as shown in FIG. 4) and a microelastic probe 5 (as shown in FIG. 5), in the manner of the above-described embodiments, on the needle 22 or the needle body The (4) conductive film 3' or the non-conductive insulating film 4 on the needle body 21 is also provided with the purpose and effect as described above. According to the above description, the present invention has the following advantages: 1. The present invention is formed by plating a conductive film 3 on the surface of the probe 2 or the needle 22 mounted on the probe card to protect the probe. 2 conductivity, reduce contact resistance. Second, the surface of the probe 2 mounted on the probe card or the surface of the needle 22 can be surface-treated to increase the wear resistance, and the residue and dirt attached to the surface of the probe 2 can be reduced and easily removed. 3. The novel film 3 on the surface of the probe 2 or the needle U mounted on the probe card can be easily trimmed and reused for repeated use, which can increase the service life and save test cost. 4. The probe is mounted on the probe card. The surface of the needle body 21 is 12 M362994. There is an insulating film 4 to prevent the foreign matter from falling between the probes 2 (4) m to make the probe 2 stable and normal operation, and the test is good. The rate is better and the retest rate is lower. The above-mentioned ones are only the preferred embodiments of the present invention, and when the period is not limited to the scope of the new implementation, that is, the simple equivalent of the patent scope and the new description content of the present invention. Changes and modifications are still within the scope of this new patent.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view of a conventional cantilever probe; Figure 2 is not a schematic view of a conventional vertical probe; Figure 3 is a schematic view of a conventional spring probe; Figure 4 It is not a schematic diagram of a conventional thin film probe; FIG. 5 is a schematic diagram of a conventional microspring probe; FIG. 6 is a schematic diagram of a general probe card; Schematic diagram of the needle-needle and needle body of the needle card when the film is not coated; Figure 8 is a schematic view of the surface of the new probe plated with a coating; Figure 9 is a new type of probe needle A schematic diagram of the overlaying medium is shown; FIG. 10 is not a schematic view of the new probe needle and the forging film extending to the needle body portion; FIG. 11 is a schematic view showing the coating of the needle body of the novel probe; Figure 彳 is a schematic diagram of the insulating film on the probe body of the new type; Figure 13 is a schematic view of the needle body of the new probe and the insulating film extending to the needle portion; A schematic diagram of a new type of probe needle mineral coated with an insulating crucible; ♦ the needle needle figure is a new type of probe needle Extending to the mineral film of the needle body part, and then plating the insulating film on the probe needle body; " Probe Γ16 7^ is the new type of surface coating before the probe surface, and then on the money Schematic diagram of the insulating film; and Fig. 17 Yu Yi ^, is not a schematic diagram of the coating on the probe needle of the new type after being worn and then coated with two layers.

M362994 14 M362994 [Explanation of main component symbols] 2...... ...·Probe 21 •...··Needle 22•,...·Needle 221...··End face 3 .......... Laminate 30. ........film 4 ..........Insulation film

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Claims (1)

M3 62994 VI. Patent Application Range: 1. A probe card comprising: a circuit board; a base disposed on the circuit board; and a plurality of probes mounted on the base, the probes Each includes a needle body connected to the base of the crucible, a needle attached to one end of the needle body, an insulating film covering the surface of the needle body, and at least one surface covering the surface of the insulating film and having electrical conductivity The film. 2. The probe card according to claim 1, wherein the material of the coating is a conductive material having a conductivity greater than lxl03 (m·Ω)·1. 3. The probe card of claim 1, wherein the cover has a thickness greater than 〇 less than 1 mm. The probe card according to the first aspect of the invention, wherein the thickness of the insulating film is greater than 0 and less than 1 mm. 5. The probe card according to item 1 of the patent application scope includes several layers of overlays. 6. The probe card of claim 5, wherein the plurality of layers of film are made of different materials. 7. The probe card of claim 1, wherein the film extends further to correspond to the needle. 16