200823461 、 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種已安裝在探針卡上之探針結構， 特別係指一種於探針之表面施予電鍍處理，使探針卡上之 探針更具導電性，可增加其耐磨性及減少摩擦，以減少探 針表面附著之雌及污垢，可防止電磁干擾，且可方便修200823461, IX, invention description: [Technical field of the invention] The present invention relates to a probe structure that has been mounted on a probe card, in particular to a plating treatment on a surface of a probe to enable a probe card The probe is more conductive, which can increase its wear resistance and reduce friction, reduce the female and dirt attached to the probe surface, prevent electromagnetic interference, and can be easily repaired.
整、重複使用，使用壽命長，並使檢測良率大幅提升，可 大幅降低測試成本者。 【先前技術】 按，-般積體電路之受測物（如晶圓、Ic、dram•.等） 須經由測試機台之測試，以探針卡測試受測物是否符人設It is reusable, reusable, has a long service life, and greatly improves the detection yield, which can greatly reduce the cost of testing. [Prior Art] According to the test object of the integrated circuit (such as wafer, Ic, dram, etc.), it must be tested by the test machine to test whether the test object is qualified by the probe card.
計上所要求之魏舰，其探針卡係由多騎刷電Z ⑽)所構成’結顧雜，並细許多探針各別接觸（探觸 )受測物上-連串的電子接點，每根探針與受測物的接觸 2遠比髮絲更㈣、，喊針卡係剌在碰電路尚未封裝 /則’針對裸晶係以探針做功能測試，篩選出不良品，再進 灯之後的封衣碎，目此，探針卡是積體電路製造中對製 造成本影響相當大的重 2 分為有懸臂式、m 而从針卡主要係 尤直式、溥版式及微彈簧式等構造，一般 用於探針卡上之探針大都係由鶴金屬或鶴合金等具導電性 之f質所製成，而探針係分為有懸臂探針η (如第-圖所 咖針12 (如第二圖所示）、彈簧探針m如第 5 200823461 一圖所不）、薄臈探針14 (如第四圖所示）及微彈簧式探 針15 (如第五圖所示）；而一般探針卡i (如第六圖所示） 其衣私係將彳請（如懸臂探針11)以人工方式逐根排列 於基座16_L再上膠將探針於基座16上，再將探針 11逐根以焊錫方式與印刷電路板17接合，之後將組裝好的 心針卡進她料與磨加王，錢行探雜置之檢查及 周正如此方可元成探針卡1之製程，而藉由探針針頭之 接觸端與受測物之電子接點形成接觸，以便直接對受測物 輸入信號及_輪出值，進行雜參數量測峨之傳送， 來測《式又測物之良率，x ’―般探針之針頭會有接觸性的 磨耗，磨耗的嚴重程度會影響探針卡戦的可靠度及使用 壽命，而探針針頭之接觸端表面長期使用易磨損，接觸端 受磨損之表面會呈凹凸不平狀，易附著有殘逢及污垢，不 易清除，使受測物職之良率大幅降低，重測率增加， 故-般係使用砂、紙來清除，方可維持良率，但探針經石少紙 多次修整絲後其長度會驗，磨至—定贿後，便不能 再使用，而探針卡之成本極高，更換另一新的探針卡，合 使積體電路之測試成本提高，如此之使財式極不符經濟 效益’且探針卡上之探針係以導電體製成，探針係採緊密 間隔排列’故會因異物掉落於探針與探針間之縫隙而產生 短路之縣，錄魅法正常運作；·，本㈣人有鑑 於習知探針卡之探針使用存在有如上述之缺失，乃潛心研 200823461 究、改良，遂得以首創出本發明。 【發明内容】 +贫明之主要 μ 触提供—射錄針卡上之拐 f具綱，可增加㈣雜物雜，以減少_According to the requirements of the Wei Ship, the probe card is composed of multiple riding brush Z (10)), and many probes are in contact with each other (exploration) on the object to be tested - a series of electronic contacts The contact between each probe and the test object is much longer than the hairline (4), and the needle card system is not packaged in the touch circuit, then the function test is performed on the probe for the bare crystal system, and the defective product is screened out. After the lamp is turned into a package, the probe card is a heavy weight in the manufacture of the integrated circuit. The weight is divided into a cantilever type, m, and the needle card is mainly straight, 溥 and micro Spring-type and other structures, the probes generally used on the probe card are mostly made of conductive material such as crane metal or crane alloy, and the probe system is divided into a cantilever probe η (such as the first figure The needle 12 (as shown in the second figure), the spring probe m (as shown in Figure 5 200823461), the thin probe 14 (as shown in the fourth figure) and the micro-spring probe 15 (such as Figure 5); and the general probe card i (as shown in Figure 6), the clothing system will be arbitrarily arranged (such as the cantilever probe 11) manually arranged on the base 16_L and then glued The probe is placed on the base 16, and the probe 11 is soldered to the printed circuit board 17 one by one. After that, the assembled brooch is inserted into the material and the grinding king, and the money inspection and inspection are performed. In this way, the probe card 1 is processed, and the contact end of the probe needle is brought into contact with the electronic contact of the test object, so as to directly input the signal and the _ round-out value of the test object, and perform the parameter parameter. Measure the transmission of the sputum, to measure the yield of the measured object, and the needle of the x'-like probe will have contact wear. The severity of the wear will affect the reliability and service life of the probe cassette. The contact end surface of the needle needle is easy to wear for a long time, and the surface of the contact end that is worn is uneven, which is easy to adhere to the residue and dirt, and is difficult to remove, so that the yield of the tested object is greatly reduced, and the retest rate is increased. Therefore, it is generally used to remove sand and paper to maintain the yield, but the length of the probe after the stone is repaired several times by the stone less paper, after grinding to the bribe, it can no longer be used, and the probe card The cost is extremely high, replacing another new probe card to make the integrated circuit The trial cost is increased, so that the financial model is extremely inconsistent with the economic benefits' and the probes on the probe card are made of electrical conductors, and the probes are arranged closely spaced, so the foreign matter falls between the probe and the probe. In the county where the gap is short-circuited, the recording method works normally. · This (4) person has the above-mentioned missing in view of the use of the probe of the conventional probe card, and is the research and improvement of the 200823461. . [Summary of the Invention] + The main reason for poorness μ Touch provides - the abduction on the needle card, which can increase (4) miscellaneous materials to reduce _
表_著讀歧株，仰止電磁谓，且可方便㈣ 、重硬使用’使用壽命長，並使檢測良率大幅提升，可大 幅降低測試成本之積體魏探針卡之探針結構。 =日狀主在：將钱雜狀騎卡置於 麵中，於探針之針#針身之表面電鍍有具導電 =復膜，職膜之材質树電較於lxi 導電材質。 )l 本發明之主雜_七將絲雜針之探針卡置於 ，於探針之針猶面紐有具導紐 ’该覆膜之材質為導電率大於lxlG3(m,乂導電材質 本發明之主要概餘：將絲能針讀針卡置於 真空電鑛射，於探狀針身表面電財具導紐之覆膜 ’該覆膜之材質為導電率大於lxlO3 (m· Ω)—1之導電材質 Ο 本發明之主㈣鶴在：將安裝錢針之探針卡置於 真空電鑛射，雜針之針躲面魏替導電性且具絕 緣之絕緣膜。 a 本發明之主要特徵係在··將安裝有探針之探針卡置於 7 200823461 ％鏡爐中，於探針之針頭表面電鍍有具導電性之覆膜 ’該覆膜之材質為導電率大於lxlO3 (m· ΩΓ之導電材質 、探針之針身表面電鍍有非導電性且具絕緣之絕緣膜。、 本發明之主徵錄：將絲有探狀探針卡置於 真空電錄射，於探針之針頭和針身之表面電財具導電 =覆膜，該細之材質為導電率大於IxlG3 (m· Ω)-ι之 材貝，再於電鍍有覆膜之針身部位電鍍有非導電性且 具絕緣之絕緣膜。 =發明之主要特徵係在：先將探針表面鍍上具導電性 ^復膜’另外再鐘上非導電性之絕緣膜，再將探針裝設於 板針卡上’並雌針之針觀行研磨泣，再將安裝於探 針卡上之探針朗電鍍具導電性之細，該鶴之材 導電率大於1x103 〇η· Ω)1之導電材質。 、’ 【實施方式】 ' 有關本發明為達上述之使用目的與功效，所採用之技 術手段’ II舉出較佳可行之實_，並配合赋所示 述如下： ^ 首先’明茶閱第七圖所示，本發明之第一實施例，主 要係將安襄有探針2之探針卡置於電鍵爐中，探針2主要可 設^嫣金屬或鎢合金等具導電性之材質所製成，其電鑛爐 可°又為真空電鑛爐，將探針卡部位遮蔽，露出探針2，於 探針2之針頭和針身表面經真空電鑛施予賴處理，使探 針2之針頭和針身表面電财具導電性之覆戲形成保護 8 200823461 • 〇7騎不）’該_之材f為導群大於ω〇3〇η 3料之厂導電材f ’如鎢、L.等材質均可，其覆膜 制Λ摘小於丨时細之材質可依所欲檢 身I不同或使用條件之不同’祕探針2之針頭和針 身表面鍍上砰材質，且職膜3可為單層或多層，又可 以不同材質錢膜為多層之覆膜3。Table _ reading the stagnation, Yang Zhi electromagnetic, and convenient (four), heavy hard use ‘ long service life, and greatly improve the detection yield, can greatly reduce the test cost of the integrated probe card structure. = The main shape of the day: put the money in the face of the card, in the surface of the probe needle # plate body with a conductive = laminating film, the material of the film is better than the lxi conductive material. l The main hybrid of the present invention _ seven will be placed on the probe of the needle, and the needle of the probe has a guide button. The material of the coating is more than lxlG3 (m, 乂 conductive material The main surplus of the invention: the silk needle reading card is placed in the vacuum electric mine, and the coating on the surface of the probe body is the material of the coating. The material of the coating is more than lxlO3 (m· Ω). -1 conductive material Ο The main body of the invention (four) crane: the probe card with the money needle is placed in the vacuum electric mine, the needle of the needle is used to remove the conductive and insulating film with insulation. The main feature is that the probe card with the probe is placed in the 7 200823461 % mirror furnace, and the surface of the probe needle is plated with a conductive film. The material of the film is more than lxlO3 ( The conductive material of m· ΩΓ and the surface of the needle body of the probe are plated with a non-conductive and insulating insulating film. The main record of the present invention: the probe probe of the wire is placed in a vacuum electric recording, The needle of the needle and the surface of the needle body are electrically conductive = film, and the material of the pin is the material with a conductivity higher than IxlG3 (m· Ω)-ι, and then The plated body part is plated with a non-conductive and insulating insulating film. The main feature of the invention is that the surface of the probe is first plated with a conductive film, and the other is non-conductive. Insulation film, then the probe is mounted on the plate needle card' and the needle of the female needle is ground and weeped, and then the probe mounted on the probe card is electroplated with a fine conductivity, and the electrical conductivity of the crane material Conductive material larger than 1x103 〇η· Ω) 1. [Embodiment] With regard to the above-mentioned purpose and effect of the present invention, the technical means employed by the present invention II is better and more feasible, and The description is as follows: ^ First, as shown in the seventh figure of Mingcha, the first embodiment of the present invention mainly places the probe card of the ampoule with the probe 2 in the electric key furnace, and the probe 2 can be mainly set. ^ Made of conductive material such as bismuth metal or tungsten alloy. The electric ore furnace can be vacuum electric furnace, shield the probe card part, expose the probe 2, and the needle and needle body of the probe 2. The surface is treated with vacuum electric ore, so that the needle of the probe 2 and the surface of the needle body are electrically conductive. Cheng protection 8 200823461 • 〇7 ride not) 'The material f is the guide group is larger than ω〇3〇η 3 material of the factory conductive material f 'such as tungsten, L., etc., the coating system is less than the picking丨 细 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 之 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘The film is a multilayer film 3.
〜本發明之第二實施例，請參閱第七、九圖所示，主要 係將女裝絲針2之騎卡胁電舰巾，探針2主要可設 ^鶴金屬麵合鱗具導f性之材f所製成，其電鑛爐可 叹為真空電魏，贿針卡及探針2之_雜遮蔽，露 出針頭雜，於探針2之針頭表面經真空電鍍施予鍍膜處 理’使探針2之針頭表面電鑛有具導電性之覆膜邮成保護 (如第九圖所示），該覆膜3之材f為導電較於ΐχΐ〇3〇η •Ω)之導電材質，如鎢、銅、鋁…等材質均可，其覆膜 3形成之厚度係大於〇小於lmm，且覆膜3之材質可依所欲檢 測之物品不同錢贿狀不同，祕騎2之針頭表面 鍍上不同材質，且該覆膜3可為單層或多層，又可以不同 材質鍍膜為多層之覆膜3 ;另，可將針頭上之覆膜3延伸至 邛分之針身部位，如第十圖所示，同樣具有上述之使用目 的與功效。 本發明之第三實施例，請參閱第十一圖所示，主要係 將安裝有探針2之探針卡置於電鍍爐中，探針2主要可設由 9 200823461 鶴金屬或鶴合金等具導電性之材質所製成，其電鍍爐可設 為真空電鍍爐’將探針卡及探針2之針聊位遮蔽，露出 針身雜’於楝針2之針身表面經真空電鍍施予鐘膜處理 ’使探針2之針身表面電鑛有具導電性之覆膜3形成保護， 該覆膜3之材質為導電率大於(m·⑴―,之導電材質 ’如鶴、銅、銘…等材質均可，其覆膜3形成之厚度係大 塵 於〇小於1麵，且覆膜3之材質可依所欲檢測之物品不同或 攀 使用條件之不同，而於探針2之針身表面鑛上不同材質， 且該覆膜3可為單層❹層，又可以不同材質鍍膜為多層 之覆膜3。 本發明之第四實_，請參閱軒二_示，主要係 將安裝有探針2之探針卡置於t鍍爐中，探針2主要可設由 鎢金屬或鎢合金等具導電性之材質所製成，其電鑛爐可設 絲空魏爐，將探針卡及歡針頭部位遮蔽，露出 針身部位，於探針2之針身表面經真空電鍍施予鑛膜處 理，舰歡針躲面社轉雜之絕咖形成隔絕 . 倾，該絕緣膜4形成之厚度係大於叫則咖，如此，於 探針2之針身表面鍍有非導電性且具絕緣之絕緣靡，探針 2與探針2之間受絕緣膜4之隔絕，若異物殘鱗落於探針？ 與2針2間之縫隙，不會有短路之情況發生，使探針2得以 穩疋正枝作’且測試之良率更佳，重辭則大為降低； 另，可將針身上之絕緣膜4延伸至部分之針頭部位，如第 200823461 十三圖所示，同樣具有上述之使用目的與功效。 本發明之第五實施例，請翔第十四圖所示，主要係 將安裝有躺*2之探針卡置於電雜+，探針2主要可設由 鎢金屬或鎢合金等具導電性之材質所製成，其電魏可設 為真空電舰’祕針卡及探針2之針身雜遮蔽，露出 針頭部位，於探針2之針頭表面經真”鐘施予鑛膜處 理，使探針2之針頭表面電鍍有具導電性之覆膜3形成保 護’該覆膜3之材質為導電率大於1χ1〇3 (m ·时之導電材 質’如鎮、銅、！S·.·等材質均可，其制3形成之厚度係 大於0小於1mm ’且覆膜3之材質可依所欲檢測之物品不同 或使用條件之不同，秘探針2之針縣_上不同材 質’且該覆膜3可為單層或多層，又可以不同材質鐘膜為 多層之覆膜3，再將探針卡及探針2之針頭部位遮蔽，露出 針身部位，於探針2之料表祕真空魏辭鑛膜處 理^吏探針2之針身表面鑛上料之絕緣卿成隔絕 保護’該絕賴4軸之厚錢大则小於丨咖：另，可將 針頭上之覆膜3延伸至部分之針身部位，再於針身表面鑛 上絕緣膜4，如第十五圖所示，同樣具有上述之使用目的 與功效。 本發明之第六實施例，請參閲第十六圖所示，主要係 將安裝有探針2之探針卡置於電鍍爐中，探針2主要可設由 鶴金屬或齡鱗具導雜之材f所製成，其電鑛爐可設 11 200823461 為真空電鍍爐，將探針卡部位遮蔽，露出探針2，於探針2 之針頭和針身表面經真空電鑛施予鏟膜處理，使探針2之 針頭和針身表面賴有將概之賊3形成保護（如第 八圖所示），該細3之材質為導鲜大於如心·奸 之導電材質，如鶴m材質均可，其覆膜3形成 之厚度係細樹nun，域版材f可依所欲檢測之 物品不同或使贿叙不同，祕探辦之針頭和針身表 面鏡上不同材f，且該覆膜3可為單層或多層，又可以不 同材質麵為錢之_3 ’再贿針卡及電鍍有覆膜3之 探針2針頭雜祕，露㈣錢树齡之針身部位，於該 針身表面電鍍有非導電性且具絕緣之絕緣幽，如第十六 圖所示’該絕緣膜4形成之厚度係大於〇小於lmm。 本發明之第七實_，主要係先將探針表面錢上具導 電性之覆膜，該舰之材質鱗電敍於1x1q3 (m·狀 之導電材質’如鎢、銅、銘.··等材f均可，其覆膜形成之 厚度係大於0小於1mm ’且覆膜之材質可依所欲檢測之物品 不同或使祕狀不㈤，祕探針表面社獨材質，且 該覆膜可為單層或多層，又可以不同材_膜為多層之覆 膜’另外再鍍上⑽m之絕雜，該絕緣卿成之厚度 係大於0小於lmm ’再將探針裝設於探針卡上，並對探針之 針頭進行研磨加工’再將安裝於探針卡上之探針針頭再次 電鍍具導電性之覆膜，該覆膜之材質為導電率大於lxl〇s 12 200823461 (m· Ω)4之導電材質， 1mm ° 膜^t Γ使職，雜鞭_表面之覆 辦產生磨損’並於針頭表面之覆膜3上殘留有雜及污 ，可再讀對蚊於料卡上之_2針職祕予修整 、鑛膜處理，首先，將探針2之針頭表面予以研磨修整，將~ The second embodiment of the present invention, please refer to the seventh and ninth figures, mainly for the women's silk needle 2 riding the card against the electric ship towel, the probe 2 can be mainly set up ^ crane metal surface scale guide f Made of sex material f, its electric furnace can be sighed as vacuum electric Wei, bribe needle card and probe 2 _ miscellaneous shielding, revealing needle miscellaneous, the surface of the needle of probe 2 is vacuum plated for coating treatment' The electroplating of the needle surface of the probe 2 is protected by a conductive film (as shown in FIG. 9), and the material f of the film 3 is electrically conductive than ΐχΐ〇3〇η•Ω). For example, tungsten, copper, aluminum, etc., the thickness of the film 3 is greater than 〇 less than 1mm, and the material of the film 3 can be different depending on the item to be tested, and the needle of the secret ride 2 The surface is plated with different materials, and the film 3 can be a single layer or a plurality of layers, and can be coated with different materials into a plurality of layers 3; in addition, the film 3 on the needle can be extended to the needle body portion of the needle, such as As shown in the tenth figure, it also has the above-mentioned purpose and effect of use. In the third embodiment of the present invention, as shown in FIG. 11 , the probe card with the probe 2 is mainly placed in an electroplating furnace, and the probe 2 can be mainly provided by 9 200823461 crane metal or crane alloy. Made of conductive material, the electroplating furnace can be set as a vacuum plating furnace. 'The probe card and the probe 2 are covered by the needle position, and the needle body is exposed. The surface of the needle body of the needle 2 is vacuum-plated. Membrane treatment 'protects the coating 3 on the surface of the needle 2 of the probe 2 with conductive film 3, the material of which is more than (m·(1)―, the conductive material' such as crane, copper, Ming ... and other materials, the thickness of the film 3 is thicker than 1, and the material of the film 3 can be different depending on the item to be tested or the conditions of use, and the needle of the probe 2 The surface of the body is different in mineral material, and the film 3 can be a single layer of enamel layer, and can be coated with different materials as a multilayer film 3. The fourth embodiment of the invention, please refer to Xuan 2 _, the main system will be installed The probe card with the probe 2 is placed in a t-plating furnace, and the probe 2 can be mainly made of a tungsten metal or a tungsten alloy. Made of quality, the electric furnace can be equipped with a silk-air furnace, which shields the probe card and the needle part to expose the needle body. The surface of the needle body of the probe 2 is treated by vacuum plating to the ore film. The color of the insulating film 4 is greater than that of the coffee, so that the surface of the needle body of the probe 2 is plated with a non-conductive and insulating insulating layer. The needle 2 and the probe 2 are separated by the insulating film 4. If the foreign matter remains in the gap between the probe and the 2 pin 2, there is no short circuit, so that the probe 2 can be stabilized. Moreover, the test yield is better, and the resignation is greatly reduced; in addition, the insulating film 4 on the needle body can be extended to a part of the needle portion, as shown in Fig. 200823461, which also has the above-mentioned purpose and effect. According to a fifth embodiment of the present invention, as shown in the fourteenth figure, the probe card with the lying surface 2 is mainly placed in the electric hybrid +, and the probe 2 can be mainly made of tungsten metal or tungsten alloy. Made of material, the electric Wei can be set as a vacuum electric ship's secret needle card and probe 2 The needle part is applied to the surface of the needle of the probe 2 through a true "canal" treatment, so that the surface of the needle of the probe 2 is plated with a conductive film 3 to form a protection. The material of the film 3 is a conductivity greater than 1χ1. 〇3 (m · time conductive material 'such as town, copper, ! S · · · and other materials, the thickness of the system 3 is greater than 0 is less than 1mm ' and the material of the film 3 can be tested according to the desired Different or different conditions of use, the needle 2 of the secret probe 2 has different materials' and the film 3 can be a single layer or a plurality of layers, and the film of different materials can be multi-layered film 3, and then the probe is stuck. The needle part of the probe 2 is shielded, exposing the needle body part, and the surface of the probe 2 is secretly vacuumed. The membrane is treated with the membrane of the needle 2. The surface of the needle body of the probe 2 is insulated and insulated. The thick weight of the shaft is smaller than that of the coffee: in addition, the film 3 on the needle can be extended to a part of the needle body, and the insulating film 4 is cast on the surface of the needle body, as shown in the fifteenth figure, which also has the above Purpose and efficacy of use. According to the sixth embodiment of the present invention, as shown in the sixteenth embodiment, the probe card with the probe 2 is mainly placed in the electroplating furnace, and the probe 2 can be mainly provided by the crane metal or the age scale. Made of miscellaneous material f, its electric furnace can be set to 11 200823461 as a vacuum plating furnace, shielding the probe card part, exposing the probe 2, and applying the shovel to the needle and needle surface of the probe 2 via vacuum electric ore. Membrane treatment, so that the needle of the probe 2 and the surface of the needle body are protected by the thief 3 (as shown in the eighth figure), the material of the thin 3 is a conductive material larger than the heart and the traitor, such as a crane m material can be, the thickness of the film 3 is thin tree nun, the domain plate f can be different depending on the item to be tested or the bribe is different, the needle of the secret agent and the surface of the needle body are different materials f, And the film 3 can be a single layer or a plurality of layers, and different materials can be used for the money _3 're-bash needle card and electroplated with a film 3 probe 2 needle miscellaneous, dew (four) Qian Shuling needle body parts The surface of the needle body is plated with a non-conductive and insulating insulation, as shown in the sixteenth figure, the thickness of the insulating film 4 is greater than 〇 less than l Mm. The seventh embodiment of the present invention mainly uses a conductive film on the surface of the probe, and the material scale of the ship is described in 1x1q3 (m-shaped conductive material such as tungsten, copper, Ming.·· The material f can be formed, the thickness of the film formed is greater than 0 and less than 1 mm 'and the material of the film can be different according to the object to be tested or the secret is not (5), the surface of the secret probe is made of a material, and the film is coated. It can be a single layer or multiple layers, or it can be made of different materials. The film is a multi-layer film. In addition, it is further coated with (10)m. The thickness of the insulation is greater than 0 and less than 1mm. Then the probe is mounted on the probe card. Then, the probe of the probe is polished. Then, the probe needle attached to the probe card is electroplated with a conductive film, and the material of the film is more than lxl〇s 12 200823461 (m· Ω) 4 conductive material, 1mm ° film ^t Γ Γ , 杂 杂 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面The _2 needle job is trimmed and treated with mineral film. First, the needle surface of the probe 2 is ground and trimmed.
其覆膜形叙厚度係大於0小於 探針卡及娜賴賴之部位扣顧，健纽處理之 針頭部分，再將遮蔽後之探針卡與探針2置於電鑛爐中，於 核蔽之辆部分再鍍上具導概之__成保護(如 第十七圖所示）’如此’其探針2本身不會受磨損，被磨損 部位僅係探針2表面上讀勵，而伽3麵概可予以修 整，重複鍍膜再使用。 ’ 而-般的探針會有接酿的絲，磨耗之嚴重程度會 ,5V ·#抓針卡之可罪度及使用壽命，本發0月藉由於探針2表面 適當的鍍膜，可持續延長探針2於探針卡上之使用壽命，且 探針2在制上’會因與制試_接繼測試造成受測試 物的接觸面部分材料附著於探針之表面上，而本發明之探 針2經過鍍膜處理，於探針2之表面鑛上一層具導電性或耐 磨性之覆膜3 ’且表面較為光滑，可減少受測試物材料附著 之現象’且比較容易清除，可提升測試的良率，使積體電 路之測試費用大幅降低，並可提升產能，極具經濟效益者 13 200823461 又本發明可於一般安裝在探針卡^上之懸臂探針Μ (如第-騎示）、垂直探針12 (如第二騎示）、彈1 探針13 (如第三圖所示）、薄膜探針14 (如第四圖所示)貝 及微彈簀式探針15 (如第五圖所示）等各式之探針，以上 述該等實施例之方式，於其針頭或針身上電料導電性之 覆膜3，或於其針身上電鑛上非導電性之絕緣膜*，同樣具 有如同上述之使用目的及功效。 a 由以上說明可知，本發明具有以下之優點·· —、本發财安裝於探針卡上之探針表面或針頭部位電 鑛有具導電性之覆膜形成保護，可提升探針之導電性 、降低接觸阻抗。 二、 本發明在安裝於探針卡上之探針表面或針頭部位經 表面處理可增加其耐磨性，且可減少探針表面附著之 殘渣及污垢，並容易清除。 三、 本發明在安裝於探針卡上之探針表面或針頭上之覆 膜可方便修整’並重複鍍膜再使用，可增長使用壽命 ，可節省測試成本。 四、 本發明在安驗騎卡上之撕料麵财絕緣膜 ，可防止探針間異物掉落發生短路之情況，使探針得 以穩定正常運作，測試之良率更佳，重測率降低。于 综上所述，本發明實施例確實已能達到所預期之使用 目的及功效，且未見有相同結構特徵公知、公用在先者， 200823461 故本發明當能符合發明專利之申請要件，爰依法提出申請 ，懇請早日審結，並核賜專利，深感德澤。 【圖式簡單說明】 第一圖所示係為習知懸臂探針之示意圖。 第二圖所示係為習知垂直探針之示意圖。 第三圖所示係為習知彈簧探針之示意圖。 - 第四圖所示係為習知薄膜探針之示意圖。 _ 第五圖所示係為習知微彈簧式探針之示意圖。 第六圖所示係為一般探針卡之示意圖。 第七圖所示係為本發明探針之示意圖。 第八圖所示係為本發明探針表面鐘上覆膜之示意圖。 帛爛所示係為本發赌針針職上覆狀示意圖。 針圖卿係林發赚針針觀延伸至針身部位鑛上覆 膜之示意圖。 ♦ 針-®所示係為本發簡針針身鍍上伽之示意圖。 第十二圖所示係為本發爾針針顧上絕緣膜之示意圖。 奸三®所示係為本發雜針針身及延伸至針頭部位鍍上 絕緣膜之示意圖。 第十四圖所示係為本發明探針針頭鍍上覆膜，探針針身鑛 上絕緣膜之示意圖。 第十五圖所示係為本發_針針頭及延伸至針身部位鐘上 覆膜，再於探針針身鑛上絕緣膜之示意圖。又 15 200823461 第十六圖所雜為本發明先 弟十七 於探針表 之示意圖。 針針身鍍上絕緣膜 圖所示係為本發明探針針 面鍍上覆膜，再於探 -欠鐵上覆膜之示意圖 【主要元件符號說明】 1探針卡 頭上之覆膜磨損後修整再 11懸臂探針 14薄膜探針 17印刷電路板 2探針 12垂直探針 iq ^ , 13彈簧探針 15微彈簧式探針16基座The thickness of the film is greater than 0, which is smaller than the position of the probe card and Narayai. The needle part of the button is processed, and the shielded probe card and the probe 2 are placed in the electric furnace, and the core is placed on the core. The part of the cover is re-plated with a guide __ protection (as shown in Figure 17). 'So' the probe 2 itself is not subject to wear, and the worn part is only read on the surface of the probe 2, The gamma 3 surface can be trimmed, and the coating is repeated for reuse. 'And the general probe will have the wire, the severity of the wear will be, the viciousness and service life of the 5V ·# pin-up card, this month is due to the proper coating of the probe 2 surface, sustainable Extending the service life of the probe 2 on the probe card, and the probe 2 is attached to the surface of the probe due to the test and the subsequent test, and the present invention is attached to the surface of the probe. The probe 2 is subjected to coating treatment, and a layer of conductive or wear-resistant coating 3' is cast on the surface of the probe 2, and the surface is smooth, which can reduce the phenomenon of adhesion of the material to be tested' and is relatively easy to remove. Improve the yield of the test, greatly reduce the test cost of the integrated circuit, and increase the productivity, which is very economical. 13 200823461 The invention can be mounted on the probe card ^ generally cantilever probe Μ (such as - Riding), vertical probe 12 (such as the second ride), bomb 1 probe 13 (as shown in Figure 3), membrane probe 14 (as shown in Figure 4) and the micro-elastic probe 15 (as shown in Figure 5) and other types of probes, in the manner of the above embodiments, on their needles or needles The film 3 of the electrical conductivity of the body, or the non-conductive insulating film* on the body of the needle, also has the purpose and effect as described above. a It can be seen from the above description that the present invention has the following advantages: · The surface of the probe or the needle portion of the probe that is mounted on the probe card has a conductive film forming protection to enhance the conductivity of the probe. Sex, reduce contact impedance. 2. The surface treatment of the probe surface or the needle portion mounted on the probe card of the present invention can increase the wear resistance, and can reduce the residue and dirt adhering to the surface of the probe, and is easy to remove. 3. The invention can easily trim the coating on the surface of the probe or the needle mounted on the probe card and repeat the coating and reuse, which can increase the service life and save the test cost. 4. The invention discloses a tearing surface financial insulating film on the riding card, which can prevent the short circuit of the foreign matter falling between the probes, so that the probe can be stably operated normally, the test yield is better, and the retest rate is lowered. . In summary, the embodiments of the present invention have indeed achieved the intended use and efficacy, and the same structural features are not known and commonly used, 200823461. Therefore, the present invention can meet the requirements of the invention patent, Applying according to law, I urge you to conclude the case as soon as possible, and grant a patent, and deeply feel Deze. BRIEF DESCRIPTION OF THE DRAWINGS The first figure shows a schematic view of a conventional cantilever probe. The second figure is a schematic representation of a conventional vertical probe. The third figure is a schematic representation of a conventional spring probe. - The fourth figure is a schematic representation of a conventional thin film probe. _ The fifth figure shows a schematic diagram of a conventional microspring probe. The sixth figure shows a schematic diagram of a general probe card. Figure 7 is a schematic representation of the probe of the present invention. Figure 8 is a schematic view showing the coating on the surface clock of the probe of the present invention. The smashing indication is a schematic diagram of the top of the gambling needle. The needle figure is the schematic diagram of the forest needle that extends to the top of the needle body. ♦ The needle-® is a schematic diagram of the galvanized body of the needle. The twelfth figure shows a schematic view of the insulating needle of the present needle. Tracing III is a schematic diagram of the needle body and the insulating film attached to the needle. Fig. 14 is a schematic view showing the coating of the probe needle of the present invention and the insulating film on the probe needle body. The fifteenth figure shows a schematic diagram of the hair needle of the hair needle and the film which extends to the clock part of the needle body, and then the insulating film on the probe needle body. Further 15 200823461 The sixteenth figure is a schematic diagram of the probe table of the present invention. The needle body is plated with an insulating film as shown in the figure. The needle surface of the probe is coated with a film, and then the schematic of the probe on the underlying iron. [Main component symbol description] 1 After the film on the probe chuck is worn, Trimming again 11 cantilever probe 14 film probe 17 printed circuit board 2 probe 12 vertical probe iq ^ , 13 spring probe 15 micro spring probe 16 base