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TWI405971B - - Google Patents

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Publication number
TWI405971B
TWI405971B TW98131188A TW98131188A TWI405971B TW I405971 B TWI405971 B TW I405971B TW 98131188 A TW98131188 A TW 98131188A TW 98131188 A TW98131188 A TW 98131188A TW I405971 B TWI405971 B TW I405971B
Authority
TW
Taiwan
Prior art keywords
probe
conductive material
insulating material
circuit board
test
Prior art date
Application number
TW98131188A
Other languages
Chinese (zh)
Other versions
TW201111790A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW98131188A priority Critical patent/TW201111790A/en
Publication of TW201111790A publication Critical patent/TW201111790A/en
Application granted granted Critical
Publication of TWI405971B publication Critical patent/TWI405971B/zh

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A high-frequency vertical probe card structure, including at least one probe and a top-down stacked circuit board, a first insulating material, a conductive material body, and a second insulating material, the probe penetrates the first insulating material, the conductive material body and the second insulating material and exposes the probe tip to contact the test points of the chip under test, the connection section of the probe connects to the circuit board to enable the probe to conduct high-frequency electrical signals between the circuit board and the test points, the probe body is surrounded by the conductive material body, and a gap exists between the probe and the conductive material body, so that the probe body can use air as the medium to provide the probe body with low dielectric conduction, thereby enhancing transmission quality of the high-frequency electrical signals and increasing test accuracy of the chip under test.
TW98131188A 2009-09-16 2009-09-16 High-frequency vertical probe card structure TW201111790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98131188A TW201111790A (en) 2009-09-16 2009-09-16 High-frequency vertical probe card structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98131188A TW201111790A (en) 2009-09-16 2009-09-16 High-frequency vertical probe card structure

Publications (2)

Publication Number Publication Date
TW201111790A TW201111790A (en) 2011-04-01
TWI405971B true TWI405971B (en) 2013-08-21

Family

ID=44909012

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98131188A TW201111790A (en) 2009-09-16 2009-09-16 High-frequency vertical probe card structure

Country Status (1)

Country Link
TW (1) TW201111790A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106124808A (en) * 2016-08-30 2016-11-16 四川汉舟电气股份有限公司 A kind of measurement control module of high-performance combination instrument

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6853208B2 (en) * 2000-08-09 2005-02-08 Nihon Denshizairyo Kabushiki Kaisha Vertical probe card
TW200813441A (en) * 2006-09-11 2008-03-16 Jung-Tang Huang Vertical probe card
TWI297077B (en) * 2002-04-16 2008-05-21 Nhk Spring Co Ltd Electroconductive contact probe
JP2008157831A (en) * 2006-12-26 2008-07-10 Japan Electronic Materials Corp Probe card
TWM362994U (en) * 2006-11-21 2009-08-11 Wen-Yu Lv Probe card

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6853208B2 (en) * 2000-08-09 2005-02-08 Nihon Denshizairyo Kabushiki Kaisha Vertical probe card
TWI297077B (en) * 2002-04-16 2008-05-21 Nhk Spring Co Ltd Electroconductive contact probe
TW200813441A (en) * 2006-09-11 2008-03-16 Jung-Tang Huang Vertical probe card
TWM362994U (en) * 2006-11-21 2009-08-11 Wen-Yu Lv Probe card
JP2008157831A (en) * 2006-12-26 2008-07-10 Japan Electronic Materials Corp Probe card

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106124808A (en) * 2016-08-30 2016-11-16 四川汉舟电气股份有限公司 A kind of measurement control module of high-performance combination instrument

Also Published As

Publication number Publication date
TW201111790A (en) 2011-04-01

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