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TWI914245B - Method of forming semiconductor structure - Google Patents

Method of forming semiconductor structure

Info

Publication number
TWI914245B
TWI914245B TW114117577A TW114117577A TWI914245B TW I914245 B TWI914245 B TW I914245B TW 114117577 A TW114117577 A TW 114117577A TW 114117577 A TW114117577 A TW 114117577A TW I914245 B TWI914245 B TW I914245B
Authority
TW
Taiwan
Prior art keywords
semiconductor structure
forming semiconductor
forming
semiconductor
Prior art date
Application number
TW114117577A
Other languages
Chinese (zh)
Other versions
TW202534755A (en
Inventor
侯思羽
Original Assignee
南亞科技股份有限公司
Filing date
Publication date
Application filed by 南亞科技股份有限公司 filed Critical 南亞科技股份有限公司
Priority to TW114117577A priority Critical patent/TWI914245B/en
Publication of TW202534755A publication Critical patent/TW202534755A/en
Application granted granted Critical
Publication of TWI914245B publication Critical patent/TWI914245B/en

Links

TW114117577A 2023-04-24 Method of forming semiconductor structure TWI914245B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW114117577A TWI914245B (en) 2023-04-24 Method of forming semiconductor structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW114117577A TWI914245B (en) 2023-04-24 Method of forming semiconductor structure

Publications (2)

Publication Number Publication Date
TW202534755A TW202534755A (en) 2025-09-01
TWI914245B true TWI914245B (en) 2026-02-01

Family

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201129882A (en) 2009-08-20 2011-09-01 Varian Semiconductor Equipment Method and system for patterning a substrate
TWI675797B (en) 2013-11-07 2019-11-01 美商諾發系統有限公司 Soft landing nanolaminates for advanced patterning
TWI698039B (en) 2017-06-22 2020-07-01 日商東京威力科創股份有限公司 Pattern forming method
TWI766949B (en) 2018-02-22 2022-06-11 美商英特爾股份有限公司 Advanced lithography and self-assembled devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201129882A (en) 2009-08-20 2011-09-01 Varian Semiconductor Equipment Method and system for patterning a substrate
TWI675797B (en) 2013-11-07 2019-11-01 美商諾發系統有限公司 Soft landing nanolaminates for advanced patterning
TWI698039B (en) 2017-06-22 2020-07-01 日商東京威力科創股份有限公司 Pattern forming method
TWI766949B (en) 2018-02-22 2022-06-11 美商英特爾股份有限公司 Advanced lithography and self-assembled devices

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