TWI911649B - Wafer box and limiting device thereof - Google Patents

Abstract

A wafer box and a limiting device thereof are provided. The wafer box includes a base, a storage frame, and a cover. The limiting device includes a limiting base, a plurality of movable plate bodies, at least two plates and a resisting component. The limiting base comprises a pole and two extension arms. Each movable plate body includes a rotating shaft, and a fixed rod. The invention limits the flipping path of the movable plate bodies through the plates, so that the resisting component can be better positioned at a position that effectively contacts the wafer.

Description

Wafer box and its limiting device

This invention relates to a wafer cassette and its positioning device, and more particularly to a wafer cassette and its positioning device for positioning and fixing stored wafers.

Integrated circuits are manufactured using the same methods as transistors, making them suitable for mass production. This is because they employ a batch processing approach, allowing multiple basic chips that make up an integrated circuit to be formed simultaneously on a single wafer. The more chips obtained from a single wafer, the more economical it becomes.

Modern wafer manufacturing technology is quite mature, making industrial applications widespread and convenient. However, wafer storage and preservation is a crucial issue in the field of wafer applications. The purpose of securing wafers is to ensure their integrity during storage, preventing damage or breakage; the purpose of storage is to protect wafers from dust contamination.

In existing technology, wafers are placed inside an inner casing, and the outer edge of the inner casing has several grooves for placing and removing wafers. The inner casing is housed within an outer casing, and there is a cover at the top to store the wafers in a sealed manner. Although this method is quite simple, it does not protect the positioning and fixation of the wafers after they are placed inside. Although the wafers are protected from external dust contamination inside the protective casing, they are easily damaged by vibration and shaking, or dust is generated due to friction between wafers, which is far from ideal. To overcome the above problems, manufacturers have designed a linkage mechanism that simultaneously pushes out a linkage assembly when the wafer cassette cover is placed over the wafer cassette base. The panel of the linkage assembly then uses surface contact to push any wafers that have not yet reached their designated position, thus positioning and securing the wafers.

However, during movement, the linkage mechanism is prone to failure to reach the correct positioning point due to external forces or structural damage, thus failing to contact the wafer at the optimal position. This results in uneven contact forces during the contact process with the wafer, causing damage.

Therefore, to overcome the shortcomings and deficiencies of the existing technology, the present invention needs to provide an improved wafer cassette and its limiting device to solve the problems existing in the aforementioned conventional technology.

The main objective of this invention is to provide a wafer cassette and its limiting device, which, through the design of a baffle, restricts the flipping path of the movable plate, allowing the abutment component to be better positioned to effectively contact the wafer.

To achieve the above objectives, the present invention provides a limiting device for a wafer cassette, for installation in a wafer cassette, the wafer cassette comprising a base, a storage frame, and a cover, the limiting device comprising a base, a plurality of movable plates, at least two baffles, and a stop component; the base comprises a crossbar and two extension arms, the crossbar being configured to be assembled in the cover of the wafer cassette, the extension arms extending from the crossbar in a direction away from the crossbar, and forming a movable space between the extension arms; the movable plates are configured to rotate in the movable space, each A movable plate includes a pivot and a fixed rod, the pivot being hinged between the extension arms; baffles are respectively disposed on the extension arms, and the baffles are configured to prevent the corresponding movable plate from moving towards the crossbar; an abutment component is hinged to the fixed rod of the movable plate, the abutment component being movable between a ready position near the base and an abutment position away from the base, the abutment component abutting against the edge of a wafer located in the storage frame when it moves to the abutment position.

In one embodiment of the invention, each baffle includes a main body disposed on a corresponding extension arm and located within the movable space.

In one embodiment of the invention, each baffle further includes an extension and a bend, the extension extending from the body portion in a direction away from the extension arm, and the bend located between the body portion and the extension portion.

In one embodiment of the invention, each movable plate further includes a fin extending outward from the pivot, and the fixing rod is disposed on one side of the fin.

In one embodiment of the invention, the width of one fin gradually narrows from a central portion toward two opposite sides, and the fixing rod is located at the central portion.

In one embodiment of the present invention, the abutment component includes a base, two contact plates, and a plurality of hooks. The contact plates are disposed on one surface of the base and configured to abut against the edge of a wafer located in the storage frame. The hooks are disposed on the other surface of the base and configured to hook onto corresponding mounting posts.

In one embodiment of the invention, the limiting device further includes a plurality of fitting components, each fitting component having a fitting body configured to fit onto a corresponding fixed rod.

In one embodiment of the invention, each fitting further includes at least one protrusion formed on the fitting body, the protrusion being configured to engage with at least one recess of the abutting fitting.

In one embodiment of the invention, an inner surface of the fitting body is concave to mate with a corresponding fixing rod.

To achieve the above objectives, the present invention provides a wafer cassette comprising a base, a storage frame, and a cover. The limiting device includes a base, a plurality of movable plates, at least two baffles, and a stop component. The base includes a crossbar and two extension arms. The crossbar is configured to be assembled in the cover of the wafer cassette. The extension arms extend from the crossbar in a direction away from the crossbar, and a movable space is formed between the extension arms. The movable plates are configured to rotate within the movable space, and each movable plate includes a... A pivot and a fixed rod are provided, the pivot being pivotally connected between the extension arms; baffles are respectively disposed on the extension arms, and the baffles are configured to prevent corresponding movable plates from moving in a direction closer to the crossbar; an abutment assembly is pivotally connected to the fixed rod of the movable plates, the abutment assembly being disposed between a ready position near the base and an abutment position away from the base, the abutment assembly abutting against the edge of a wafer located in the storage frame when it moves to the abutment position.

As described above, the wafer cassette limiting device of the present invention, through the design of the baffles, can restrict the flipping path of the fins, allowing the abutment component to be better positioned at the effective contact point with the wafer. Simultaneously, the extensions of the baffles can evenly apply force to the corresponding fins, preventing the fins from tilting left or right. Furthermore, the extensions of the baffles abut against the two ends of the corresponding fins, and since these ends are equidistantly positioned on opposite sides of the fixing rod, the extensions of the baffles can evenly apply force to the corresponding fins, preventing the fins from tilting left or right. These fitting components can be fitted onto corresponding fixed bars, thus limiting the fixed bars from easily detaching from the hooks due to external forces.

101: Base

102: Storage Framework

103: Cover Body

104: Wafer

2: Base

20: Event Space

21: Horizontal bar

22: Extended Arm

3: Movable board

31: Rotary Shaft

32: Fixed bar

33: Fins

4: Baffle

41: Main Body

42: Extension Section

43: Curved section

5: Abutment Components

51: Seat

52: Contact plate

53: Hanging fasteners

54: Groove

55: Support Wheel

6: Assembly Components

61: Fitting Body

62: Bump

Figure 1 is an exploded perspective view of a wafer cassette according to an embodiment of the present invention.

Figure 2 is a side view of the wafer cassette shown in Figure 1.

Figure 3 is an exploded perspective view of a wafer cassette positioning device according to an embodiment of the present invention.

Figure 4 is another perspective perspective view of the limiting device for a wafer cassette according to an embodiment of the present invention.

Figure 5 is a side view of the abutting component of the limiting device of a wafer cassette according to an embodiment of the present invention in the ready position.

Figure 6 is a side view of the abutting component of the limiting device for a wafer cassette according to an embodiment of the present invention in the abutting position.

Figure 7 is a side view of the movable plate of the limiting device for a wafer cassette according to an embodiment of the present invention, corresponding to the abutment component in the ready position.

Figure 8 is a side view of the movable plate of the limiting device for a wafer cassette according to an embodiment of the present invention, corresponding to the abutting component in the abutting position.

To make the aforementioned and other objects, features, and advantages of this invention more apparent and understandable, specific embodiments of the invention will be provided below, along with detailed explanations in conjunction with the accompanying drawings. Furthermore, the directional terms used in this invention, such as up, down, top, bottom, front, back, left, right, inside, outside, side, surrounding, center, horizontal, transverse, vertical, longitudinal, axial, radial, uppermost, or lowermost, are merely for reference to the accompanying drawings. Therefore, the directional terms used are for explaining and understanding this invention, and not for limiting it.

Referring to Figures 1 and 2, this invention provides a wafer cassette positioning device according to an embodiment. The device is installed within the wafer cassette, which includes a base 101, a storage frame 102, and a cover 103. The storage frame 102 is mounted on the base 101 and is configured to accommodate multiple wafers 104. The cover 103 covers the storage frame 102. The positioning device includes a base 2, multiple movable plates 3, at least two baffles 4, and abutment components 5. The detailed structure, assembly relationship, and operating principle of each component will be described in detail below.

Referring to Figures 1, 3, and 4, the base 2 includes a crossbar 21 and two extension arms 22. The crossbar 21 is configured to fit within the cover 103 of the wafer cassette. The extension arms 22 extend from the crossbar 21 in a direction away from it, and a space 20 is formed between the extension arms 22.

In this embodiment, the crossbar 21 of the base 2 is locked to the top of the cover 103 by screws. When the cover 103 covers the storage frame 102, the base 2 is positioned on one side of the storage frame 102.

Referring to Figures 4 and 7, the movable plates 3 are configured to rotate within the movable space 20. Each movable plate 3 includes a pivot 31, a fixing rod 32, and a fin 33. The pivot 31 is hinged between the extending arms 22 of the base 2. The fin 33 extends outward from the pivot 31, and the fixing rod 32 is disposed on one side of the fin 33. Specifically, the width of one fin of the fin 33 gradually narrows from a central portion towards two opposite sides, and the fixing rod 32 is located at the central portion.

In this embodiment, the movable plates 3 move in tandem with the up-and-down movement of the abutment assembly 5, causing the fins 33 to rotate about their respective pivot axes 31. When the abutment assembly 5 moves upward, the fins 33 flip upward; when the abutment assembly 5 moves downward, the fins 33 flip downward.

Referring again to Figures 4 and 7, the baffles 4 are respectively disposed on the extension arms 22 of the base 2, and the baffles 4 are configured to prevent the fins 33 of the corresponding movable plate 3 from moving towards the crossbar 21. Further, each baffle 4 includes a main body 41, an extension 42, and a curved portion 43. The main body 41 is disposed on the corresponding extension arm 22 and is located within the movable space 20. Specifically, the extension 42 extends from the main body 41 in a direction away from the extension arm 22, and the curved portion 43 is located between the main body 41 and the extension 42.

In this embodiment, due to the design of the baffle plate 4, when the fins 33 rotate upwards and move to a horizontal position (see Figure 8), the baffle plate 4 stops the fins 33 from continuing to rotate. The abutment component 5 stops moving because the fins 33 are limited, allowing the abutment component 5 to be better positioned to effectively contact the wafer 104 as shown in Figure 1. Furthermore, the extensions 42 of the baffle plate 4 abut against the two ends of the corresponding fins 33 (see Figure 8). Since these ends are equidistantly positioned on opposite sides of the fixed rod 32, the extensions 42 of the baffle plate 4 can evenly apply force to the corresponding fins 33, preventing the fins 33 from tilting left or right during rotation.

Referring to Figures 3, 4, and 7, the abutment component 5 is hinged to the fixed rods 32 of the movable plates 3. The abutment component 5 is positioned between a ready position near the base 2 and an abutment position away from the base 2. When the abutment component 5 moves to the abutment position, it abuts against the edge of the wafer 104 located in the storage frame 102.

Referring to Figures 1, 3, and 4, the abutment component 5 includes a base 51, two contact plates 52, multiple hooks 53, and at least one support wheel 55. The contact plates 52 are disposed on one surface of the base 51 and are configured to abut against the edges of wafers located in the storage frame 102. The hooks 53 are disposed on the other surface of the base 51 and are configured to hook onto corresponding fixing rods 32.

In this embodiment, as shown in Figure 5, the abutment component 5 is in the ready position. Due to gravity, the abutment component 5 moves downwards and approaches the base 2. At this time, the support wheel 55 is suspended. As shown in Figure 6, the abutment component 5 is in the abutment position, i.e., the support wheel 55 contacts the base 101 and is pushed upwards, causing the abutment component 5 to move upwards. At this time, the contact plates 52 move towards the storage frame 102 and contact the wafer 104 as shown in Figure 1, so that the wafer 104 is confined and fixed within a space within the storage frame 102.

Referring to Figures 1, 3, and 7, the limiting device further includes multiple fitting components 6. Each fitting component 6 has a fitting body 61 and at least one protrusion 62, wherein the fitting body 61 is configured to fit onto a corresponding fixing rod 32. The protrusion 62 is formed on the fitting body 61, and the protrusion 62 is configured to engage with at least one groove 54 of the abutment component 5.

In this embodiment, at least one groove 54 is provided on the seat 51 of the abutment component, and the at least one groove 54 is located on one side of the corresponding hook 53. An inner surface of the fitting body 61 is concave to mate with the corresponding fixing rod 32. The fitting components 6 are configured to limit the corresponding fixing rods 32, making it difficult for the fixing rods 32 to disengage from the hooks 53 due to external forces.

According to the above structure, the movable plates 3 move up and down in conjunction with the abutment assembly 5, causing the fins 33 to rotate about the corresponding pivot 31. When the fins 33 flip upwards and move to a horizontal position (see Figure 8), the baffles 4 stop the fins 33 from continuing to flip, and the abutment assembly 5 stops moving due to the fins 33 being limited, allowing the abutment assembly 5 to be better positioned to effectively contact the wafer 104 as shown in Figure 1.

As described above, the limiting device of the wafer cassette of the present invention, through the design of the baffle 4, can restrict the flipping path of the fins 33, so that the abutment component 5 can be better positioned at the position of effectively contacting the wafer 104. At the same time, the extension 42 of the baffle 4 can evenly apply force to the corresponding fins 33, preventing the fins 33 from tilting left and right. In addition, the extension 42 of the baffle 4 abuts against the two ends of the corresponding fins 33 respectively. Since the ends are equidistantly positioned on the two opposite sides of the fixing rod 32, the extension 42 of the baffle 4 can evenly apply force to the corresponding fins 33, preventing the fins 33 from tilting left and right. These fitting components 6 can be fitted onto the corresponding fixing rods 32, thereby limiting the fixing rods 32 and preventing them from easily detaching from the hooks 53 due to external forces.

Although embodiments have been disclosed in this invention, they are not intended to limit it. Any person skilled in the art may make various modifications and alterations without departing from the spirit and scope of this invention. Therefore, the scope of protection of this invention shall be determined by the appended patent application.

2: Base

20: Event Space

21: Horizontal bar

22: Extended Arm

31: Rotary Shaft

4: Baffle

41: Main Body

42: Extension Section

43: Curved section

5: Abutment Components

51: Seat

53: Hanging fasteners

54: Groove

55: Support Wheel

6: Assembly Components

61: Fitting Body

62: Bump

Claims (10)

A limiting device for a wafer cassette, for installation in a wafer cassette including a base, a storage frame, and a cover, the limiting device comprising: a base including a crossbar and two extension arms, the crossbar being configured to be assembled in the cover of the wafer cassette, the extension arms extending from the crossbar in a direction away from the crossbar, and forming a movable space between the extension arms; a plurality of movable plates configured to rotate within the movable space, each movable plate including a pivot and a fixed rod, the pivot hinged between the extension arms; At least two baffles, each disposed on one of the extension arms, and configured to prevent corresponding movable plates from moving toward a direction close to the crossbar; and a stop assembly, linked to the fixed rods of the movable plates, the stop assembly being movable between a ready position near the base and a stop position away from the base, wherein when the stop assembly is moved to the stop position, the stop assembly abuts against the edge of a wafer located in the storage frame. The wafer cassette limiting device as described in claim 1, wherein each baffle includes a body disposed on a corresponding extension arm and located in the movable space. The wafer cassette limiting device as described in claim 2, wherein each baffle further includes an extension and a bend, the extension extending from the body in a direction away from the extension arm, and the bend being located between the body and the extension. The wafer cassette limiting device as described in claim 1, wherein each movable plate further includes a fin extending outward from the pivot, and the fixing rod is disposed on one side of the fin. The wafer cassette limiting device as described in claim 4, wherein the width of one fin of the fin gradually narrows from a central portion toward two opposite sides, and the fixing rod is located at the central portion. The wafer cassette positioning device as described in claim 1, wherein the abutment component includes a base, two contact plates and a plurality of hooks, the contact plates being disposed on one surface of the base and configured to abut against the edge of a wafer located in the storage frame, the hooks being disposed on the other surface of the base and configured to hook onto corresponding fixing rods. The wafer cassette positioning device as described in claim 6, wherein the positioning device further includes a plurality of fitting components, each fitting component having a fitting body configured to fit onto a corresponding fixed rod. The wafer cassette positioning device as described in claim 7, wherein each assembly further has at least one protrusion formed on the assembly body, the protrusion being configured to engage with at least one groove of the abutment assembly. The wafer cassette positioning device as described in claim 1, wherein an inner surface of the fitting body is concave to match a corresponding retaining rod. A wafer cassette includes: a base; a storage frame; a cover; and a limiting device, the limiting device comprising: a base including a crossbar and two extension arms, the crossbar being configured to be assembled in the cover of the wafer cassette, the extension arms extending from the crossbar in a direction away from the crossbar, and forming a movable space between the extension arms; a plurality of movable plates, each movable plate including a pivot and a fixed rod, the pivot pivot being hinged between the extension arms; at least two baffles, the baffles being respectively disposed on the extension arms, and the baffles being configured to prevent corresponding movable plates from moving toward the crossbar; and A stop assembly, linked to the fixed rods of the movable plates, is configured to abut against a wafer located in the storage frame.