TWM658133U - Wafer box and position limiting device thereof - Google Patents

Abstract

A wafer box and a limiting device thereof, the wafer box comprises a base, a storage frame and a cover, the limiting device comprises a pedestal, a plurality of movable plates, at least two baffles and a supporting assembly; the pedestal comprises a crossbar and two extension arms, and each movable plate comprises a rotating shaft and a fixed rod. The invention utilizes baffles to limit the turning path of the movable plate, so that the supporting assembly can be better positioned at a position that effectively contacts the wafer.

Description

Wafer box and its limiting device

The invention relates to a wafer box and a limiting device thereof, and in particular to a wafer box and a limiting device thereof for positioning and fixing stored wafers.

The manufacturing method of integrated circuits is the same as that of transistors and is suitable for mass production. This is because the so-called batch processing method is adopted, and most of the basic chips that constitute the integrated circuit can be formed on a wafer at the same time. Therefore, the more chips are obtained from a wafer, the higher its economy is.

Today's wafer manufacturing technology is quite mature, making industrial applications quite common and convenient; however, the storage and collection of wafers is an extremely important topic in the field of wafer applications; the purpose of wafer fixation is to ensure that the wafers are collected intact without any defects or breaks; the purpose of collection is to ensure that the wafers are not contaminated by dust.

In the prior art, the wafer is placed inside an inner box, and a plurality of grooves are cut on the outer edge of the inner box for placing and removing the wafer; the inner box is placed inside an outer box, and a cover is provided on the upper end to preserve and store the wafer in a sealed manner. Although this method is quite simple, the positioning and fixation of the wafer after placement are not protected, so that although the wafer is protected from external dust contamination in the protective box, it is easy to cause damage to the internal wafer due to vibration and shaking, or generate dust due to friction between wafers, so it is extremely unsatisfactory. In order to overcome the above problems, the industry has designed a linkage mechanism. When the wafer box cover covers the wafer box base, the linkage group is pushed out synchronously, and the panel of the linkage group is used to push the wafer that has not been positioned in a surface contact manner, so that the wafer can be installed in a positioned and fixed position.

However, when the connecting rod mechanism moves, it is easy for the connecting rod mechanism to fail to move to the correct positioning point due to external force or structural damage, and fail to contact the wafer at the best position, so that the wafer is damaged due to the collision of uneven contact force when being contacted by the connecting rod mechanism.

Therefore, in order to overcome the shortcomings and deficiencies in the prior art, it is necessary for the present invention to provide an improved wafer box and a limiting device thereof to solve the problems existing in the above-mentioned conventional technology.

The main purpose of this invention is to provide a wafer box and a limiting device thereof, which can limit the turning path of the movable plate by utilizing the design of the baffle plate, so that the abutment assembly can be better positioned at a position that effectively contacts the wafer.

To achieve the above-mentioned purpose, the present invention provides a wafer box limiting device for installation in a wafer box, the wafer box comprising a base, a storage frame and a cover, the limiting device comprising a pedestal, a plurality of movable plates, at least two baffles and a supporting assembly; the pedestal comprising a crossbar and two extension arms, the crossbar being configured to be assembled in the cover of the wafer box, the extension arms extending from the crossbar in a direction away from the crossbar, and a movable space being formed between the extension arms; the movable plates being configured to rotate in the movable space, each of the two extension arms being configured to rotate in the movable space, A movable plate body includes a rotating shaft and a fixed rod, and the rotating shaft is pivoted between the extension arms; the baffles are respectively arranged on the extension arms, and the baffles are configured to prevent the corresponding movable plate body from moving in a direction close to the crossbar; the abutment assembly is pivoted on the fixed rods of the movable plate bodies, and the abutment assembly is configured to move between a preparation position close to the base and an abutment position far from the base. When the abutment assembly moves to the abutment position, the abutment assembly abuts against the edge of the wafer located in the storage frame.

In one embodiment of the present invention, each baffle includes a main body, which is disposed on a corresponding extension arm and is located in the activity space.

In an embodiment of the present invention, each baffle further includes an extension portion and a bent portion, wherein the extension portion extends from the main body portion in a direction away from the extension arm, and the bent portion is located between the main body portion and the extension portion.

In one embodiment of the present invention, each movable plate further includes a fin, which extends outward from the rotating shaft, and the fixing rod is arranged on one side of the fin.

In one embodiment of the present invention, a fin width of the fin tapers from a center portion toward two opposite sides, and the fixing rod is located at the center portion.

In one embodiment of the present invention, the abutment assembly includes a base, two contact plates and a plurality of fasteners, wherein the contact plates are disposed on one surface of the base and configured to abut against the edge of the wafer in the storage frame, and the fasteners are disposed on the other surface of the base and configured to be fastened to corresponding fixing rods.

In one embodiment of the present invention, the limiting device further includes a plurality of sleeve components, each of which has a sleeve body, and the sleeve body is configured to be sleeved on a corresponding fixing rod.

In one embodiment of the present invention, each sleeve assembly further has at least one protrusion, which is formed on the sleeve body and is configured to engage with at least one groove of the abutment assembly.

In one embodiment of the present invention, an inner surface of the sleeve body is in a concave shape to match the corresponding fixing rod.

To achieve the above-mentioned purpose, the invention provides a wafer box, which includes a base, a storage frame and a cover, and the limiting device includes a base, a plurality of movable plates, at least two baffles and a supporting assembly; the base includes a crossbar and two extension arms, the crossbar is configured to be assembled in the cover of the wafer box, the extension arms all extend from the crossbar in a direction away from the crossbar, and a movable space is formed between the extension arms; the movable plates are configured to rotate in the movable space, and each movable plate includes a The invention relates to a storage frame comprising a rotating shaft and a fixed rod, wherein the rotating shaft is pivoted between the extension arms; the baffles are respectively arranged on the extension arms, and the baffles are configured to prevent the corresponding movable plate from moving in a direction close to the crossbar; the abutment assembly is pivoted on the fixed rods of the movable plate bodies, and the abutment assembly is configured to move between a preparation position close to the base and an abutment position far from the base, and when the abutment assembly moves to the abutment position, the abutment assembly abuts against the edge of the wafer located in the storage frame.

The limiting device of the wafer box of the invention can limit the turning path of the fins through the design of the baffles, so that the abutment assembly can be better positioned at a position that effectively contacts the wafer. At the same time, the extensions of the baffles can evenly apply force to the corresponding fins to prevent the fins from turning left and right. In addition, the extensions of the baffles respectively abut the two ends of the corresponding fins. Since the ends are equidistantly located on two opposite sides of the fixing rod, the extensions of the baffles can evenly apply force to the corresponding fins to prevent the fins from turning left and right. The sleeve-fitting components can be sleeved on the corresponding fixing rods, so that the fixing rods are limited in position and are not easily disengaged from the fasteners due to external forces.

In order to make the above and other purposes, features, and advantages of the invention more clearly understandable, the following will specifically cite the preferred embodiments of the invention and provide a detailed description in conjunction with the attached drawings. Furthermore, the directional terms mentioned in the invention, such as up, down, top, bottom, front, back, left, right, inside, outside, side, periphery, center, horizontal, transverse, vertical, longitudinal, axial, radial, topmost or bottommost, etc., are only referenced to the directions of the attached drawings. Therefore, the directional terms used are used to explain and understand the invention, but are not used to limit the invention.

Please refer to FIG. 1 and FIG. 2, which are a limiting device of a wafer box of an embodiment of the present invention, wherein the limiting device is installed in the wafer box, and the wafer box includes a base 101, a storage frame 102 and a cover 103. The storage frame 102 is installed on the base 101, and the storage frame 102 is configured to accommodate multiple wafers 104 therein, and the cover 103 covers the storage frame 102. The limiting device includes a base 2, multiple movable plates 3, at least two baffles 4 and a supporting component 5. The present invention will explain in detail the detailed structure, assembly relationship and operation principle of each component below.

1 , 3 and 4 , the base 2 includes a crossbar 21 and two extension arms 22 . The crossbar 21 is configured to be assembled in the cover 103 of the wafer box. The extension arms 22 extend from the crossbar 21 in a direction away from the crossbar 21 , and a movable space 20 is formed between the extension arms 22 .

In this embodiment, the crossbar 21 of the base 2 is screwed to the top of the cover 103 . When the cover 103 covers the storage frame 102 , the base 2 is located on one side of the storage frame 102 .

4 and 7, the movable panels 3 are configured to rotate in the movable space 20, and each movable panel 3 includes a rotating shaft 31, a fixing rod 32, and a fin 33, wherein the rotating shaft 31 is pivoted between the extension arms 22 of the base 2, the fin 33 extends outward from the rotating shaft 31, and the fixing rod 32 is disposed on one side of the fin 33. Specifically, a fin width of the fin 33 tapers from a central portion toward two opposite sides, and the fixing rod 32 is located at the central portion.

In this embodiment, the movable plates 3 move in conjunction with the up and down movement of the abutment assembly 5, so that the fins 33 rotate about the corresponding rotation shaft 31. When the abutment assembly 5 moves upward, the fins 33 turn upward, and when the abutment assembly 5 moves downward, the fins 33 turn downward.

Continuing to refer to FIG. 4 and FIG. 7 , the baffles 4 are respectively disposed on the extension arms 22 of the base 2, and the baffles 4 are configured to prevent the fins 33 of the corresponding movable plate 3 from moving in a direction close to the crossbar 21. Specifically, each baffle 4 includes a body 41, an extension 42, and a bent portion 43. The body 41 is disposed on the corresponding extension arm 22, and the body 41 is located in the activity space 20. Specifically, the extension 42 extends from the body 41 in a direction away from the extension arm 22, and the bent portion 43 is located between the body 41 and the extension 42.

In this embodiment, due to the design of the baffles 4, when the fins 33 flip upward and move to a horizontal position (see FIG. 8 ), the baffles 4 stop the fins 33 from continuously flipping, and the abutting assembly 5 stops linkage due to the fins 33 being limited, so that the abutting assembly 5 can be preferably positioned at a position that effectively contacts the wafer 104 as shown in FIG. 1 . In addition, the extensions 42 of the baffles 4 respectively abut against the two ends of the corresponding fins 33 (see FIG. 8 ). Since the ends are equidistantly located on two opposite sides of the fixing rod 32 , the extensions 42 of the baffles 4 can evenly apply force to the corresponding fins 33 to prevent the fins 33 from flipping left and right.

Please refer to Figures 1, 3 and 7. The abutment assembly 5 is pivoted on the fixing rods 32 of the movable plates 3. The abutment assembly 5 is configured to move between a preparation position close to the base 2 and an abutment position far away from the base 2. When the abutment assembly 5 moves to the abutment position, the abutment assembly 5 abuts against the edge of the wafer 104 located in the storage frame 102.

Please refer to Figures 1, 3 and 4, the abutment assembly 5 includes a base 51, two contact plates 52, a plurality of fasteners 53 and at least one supporting wheel 55, wherein the contact plates 52 are disposed on one surface of the base 51, and the contact plates 52 are configured to abut against the edge of the wafer 104 located in the storage frame 102, and the fasteners 53 are disposed on the other surface of the base 51, and the fasteners 53 are configured to be fastened to the corresponding fixing rods 32.

In this embodiment, as shown in FIG5 , the abutting assembly 5 is in the ready position, and the abutting assembly 5 moves downward due to gravity and approaches the base 2, at which time, the supporting wheel 55 is in a suspended state. As shown in FIG6 , the abutting assembly 5 is in the abutting position, that is, the supporting wheel 55 contacts the base 101 and is pushed upward, so that the abutting assembly 5 moves upward, and at this time, the contact plates 52 move in a direction close to the storage frame 102 and contact the wafer 104 shown in FIG1 , so that the wafer 104 is limited and fixed in a space in the storage frame 102.

1, 3 and 7, the limit device further includes a plurality of sleeve components 6, each sleeve component 6 having a sleeve body 61 and at least one protrusion 62, wherein the sleeve body 61 is configured to be sleeved on the corresponding fixing rod 32. The protrusion 62 is formed on the sleeve body 61, and the protrusion 62 is configured to be engaged with at least one groove 54 of the abutting component 5.

In this embodiment, the at least one groove 54 is disposed on the base 51 of the abutting assembly, and the at least one groove 54 is located on one side of the corresponding fastener 53, and an inner surface of the sleeve body 61 is in a concave shape to match the corresponding fixing rod 32. The sleeve assemblies 6 are configured to limit the corresponding fixing rods 32, so that the fixing rods 32 are not easily disengaged from the fasteners 53 due to external forces.

According to the above structure, the movable plates 3 will be linked with the up and down movement of the abutting assembly 5, so that the fins 33 rotate around the corresponding rotation axis 31. When the fins 33 flip upward and move to a horizontal position (see FIG. 8 ), the baffles 4 stop the fins 33 from continuing to flip, and the abutting assembly 5 stops being linked because the fins 33 are limited, so that the abutting assembly 5 can be better positioned at a position that effectively contacts the wafer 104 as shown in FIG. 1 .

As described above, the limiting device of the wafer box of the present invention can limit the turning path of the fins 33 through the design of the baffles 4, so that the abutting assembly 5 can be better positioned at a position that effectively contacts the wafer 104. At the same time, the extensions 42 of the baffles 4 can evenly apply force to the corresponding fins 33 to prevent the fins 33 from turning left and right. In addition, the extensions 42 of the baffles 4 respectively abut the two ends of the corresponding fins 33. Since the ends are equidistantly located on two opposite sides of the fixing rod 32, the extensions 42 of the baffles 4 can evenly apply force to the corresponding fins 33 to prevent the fins 33 from turning left and right. The sleeve assemblies 6 can be sleeved on the corresponding fixing rods 32 so that the fixing rods 32 are restricted and are not easily disengaged from the fasteners 53 due to external forces.

Although this creation has been disclosed with preferred embodiments, it is not intended to limit this creation. Anyone skilled in the art can make various changes and modifications without departing from the spirit and scope of this creation. Therefore, the scope of protection of this creation shall be subject to the scope defined in the attached patent application.

101: base 102: storage frame 103: cover 104: wafer 2: base 20: movable space 21: crossbar 22: extension arm 3: movable plate 31: rotating shaft 32: fixed rod 33: fin 4: baffle 41: main body 42: extension part 43: bent part 5: abutment assembly 51: base 52: contact plate 53: fastener 54: groove 55: support wheel 6: fitting assembly 61: fitting body 62: bump

FIG. 1 is a three-dimensional exploded view of a wafer box according to an embodiment of the present invention. FIG. 2 is a side view of the wafer box of FIG. 1. FIG. 3 is a three-dimensional exploded view of a limiting device of a wafer box according to an embodiment of the present invention. FIG. 4 is a three-dimensional view of a limiting device of a wafer box according to an embodiment of the present invention from another perspective. FIG. 5 is a side view of a supporting assembly of a limiting device of a wafer box according to an embodiment of the present invention in a prepared position. FIG. 6 is a side view of a supporting assembly of a limiting device of a wafer box according to an embodiment of the present invention in a supporting position. FIG. 7 is a side view of a movable plate of a limiting device of a wafer box according to an embodiment of the present invention corresponding to a supporting assembly in a prepared position. FIG8 is a side view of the movable plate of the limiting device of the wafer box according to an embodiment of the present invention, corresponding to the abutment component in the abutment position.

2: Base

20: Activity space

21: Crossbar

22: Extension arm

31: Rotating axis

4: Baffle

41: Main body

42: Extension

43: bend

5: Abutment assembly

51: Seat

53:Hanging fasteners

54: Groove

55: Support wheel

6: Fitting components

61: Fit the main body

62: Bump

Claims (10)

A wafer box limiting device is used to be installed in a wafer box, the wafer box includes a base, a storage frame and a cover, the limiting device includes: a base, including a crossbar and two extension arms, the crossbar is configured to be assembled in the cover of the wafer box, the extension arms all extend from the crossbar in a direction away from the crossbar, and a movable space is formed between the extension arms; a plurality of movable plates, the movable plates are configured to rotate in the movable space, each movable plate includes a rotating shaft and a fixed rod, the rotating shaft is fixed to the fixed rod, and the fixed rod is fixed to the fixed rod. The shaft is pivoted between the extension arms; at least two baffles are respectively arranged on the extension arms, and the baffles are configured to prevent the corresponding movable plate from moving in a direction close to the crossbar; and a support assembly is pivoted on the fixed rods of the movable plate, the support assembly is configured to move between a preparation position close to the base and a support position far from the base, and when the support assembly moves to the support position, the support assembly is against the edge of the wafer located in the storage frame. The limiting device of the wafer box as described in claim 1, wherein each baffle includes a main body, which is arranged on the corresponding extension arm and is located in the activity space. As described in claim 2, the limiting device of the wafer box, each baffle further comprises an extension portion and a bent portion, the extension portion extends from the main body portion in a direction away from the extension arm, and the bent portion is located between the main body portion and the extension portion. As described in claim 1, the limiting device of the wafer box, each movable plate further includes a fin, the fin extends outward from the rotating shaft, and the fixing rod is arranged on one side of the fin. A limiting device for a wafer box as described in claim 4, wherein a fin width of the fin tapers from a center portion toward two opposite sides, and the fixing rod is located at the center portion. The limiting device of the wafer box as described in claim 1, wherein the abutment assembly comprises a base, two contact plates and a plurality of fasteners, the contact plates are arranged on one surface of the base, and the contact plates are configured to abut against the edge of the wafer in the storage frame, the fasteners are arranged on the other surface of the base, and the fasteners are configured to be fastened on the corresponding fixing rods. The limiting device of the wafer box as described in claim 6, wherein the limiting device further includes a plurality of fitting components, each fitting component having a fitting body, and the fitting body is configured to fit on a corresponding fixing rod. As described in claim 7, the limiting device of the wafer box, each of which has at least one protrusion formed on the fitting body, and the protrusion is configured to engage with at least one groove of the abutting component. As described in claim 7, the limiting device of the wafer box, wherein an inner surface of the sleeve body is in a concave shape to match the corresponding fixing rod. A wafer box comprises: a base; a storage frame, the storage frame is mounted on the base; a cover; and a position limiting device, the position limiting device comprises: a base, including a crossbar and two extension arms, the crossbar is configured to be assembled in the cover of the wafer box, the extension arms all extend from the crossbar in a direction away from the crossbar, and a movable space is formed between the extension arms; a plurality of movable plates, each of which is A movable plate body includes a rotating shaft and a fixed rod, the rotating shaft is pivoted between the extension arms; at least two baffles, the baffles are respectively arranged on the extension arms, and the baffles are configured to prevent the corresponding movable plate body from moving in a direction close to the crossbar; and a supporting assembly, pivoted on the fixed rods of the movable plate bodies, the supporting assembly is configured to abut against the wafer located in the storage frame.