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TWI800491B - 塗布裝置及塗布方法 - Google Patents

塗布裝置及塗布方法 Download PDF

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Publication number
TWI800491B
TWI800491B TW106134138A TW106134138A TWI800491B TW I800491 B TWI800491 B TW I800491B TW 106134138 A TW106134138 A TW 106134138A TW 106134138 A TW106134138 A TW 106134138A TW I800491 B TWI800491 B TW I800491B
Authority
TW
Taiwan
Prior art keywords
coating
coating method
coating device
Prior art date
Application number
TW106134138A
Other languages
English (en)
Other versions
TW201828397A (zh
Inventor
有川徹
Original Assignee
日商東京應化工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商東京應化工業股份有限公司 filed Critical 日商東京應化工業股份有限公司
Publication of TW201828397A publication Critical patent/TW201828397A/zh
Application granted granted Critical
Publication of TWI800491B publication Critical patent/TWI800491B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
TW106134138A 2016-12-20 2017-10-03 塗布裝置及塗布方法 TWI800491B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016246143A JP6809895B2 (ja) 2016-12-20 2016-12-20 塗布装置、及び塗布方法
JP2016-246143 2016-12-20

Publications (2)

Publication Number Publication Date
TW201828397A TW201828397A (zh) 2018-08-01
TWI800491B true TWI800491B (zh) 2023-05-01

Family

ID=62714451

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106134138A TWI800491B (zh) 2016-12-20 2017-10-03 塗布裝置及塗布方法

Country Status (3)

Country Link
JP (1) JP6809895B2 (zh)
KR (1) KR102358070B1 (zh)
TW (1) TWI800491B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108972405B (zh) * 2018-07-03 2021-11-09 Tcl王牌电器(惠州)有限公司 定位装置
JP7296536B2 (ja) * 2019-05-09 2023-06-23 Ａｉメカテック株式会社 基板支持装置、基板処理装置、及び基板支持方法
JP7329997B2 (ja) * 2019-07-09 2023-08-21 日本特殊陶業株式会社 静電チャック装置
CN110252613A (zh) * 2019-07-10 2019-09-20 昆山希盟自动化科技有限公司 一种克服玻璃翘曲用压边机构
JP7368263B2 (ja) * 2020-02-14 2023-10-24 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP7264857B2 (ja) * 2020-09-18 2023-04-25 株式会社Ｓｃｒｅｅｎホールディングス 基板保持装置、および、基板保持方法
KR102397888B1 (ko) * 2021-07-09 2022-05-13 김재우 전기차 배터리케이스 분체도장 및 석션 시스템
CN114873218B (zh) * 2022-05-24 2024-07-26 珠海格力智能装备有限公司 蒸发器自动涂胶设备及方法
KR20240080544A (ko) * 2022-11-30 2024-06-07 주식회사 엘지에너지솔루션 전극 건조 장치 및 이를 이용한 전극 건조 방법
JP2025153592A (ja) * 2024-03-29 2025-10-10 株式会社東京精密 半導体製造装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274148A (ja) * 1995-01-30 1996-10-18 Sony Corp 基体固定装置及び基体の固定方法
JP2013069969A (ja) * 2011-09-26 2013-04-18 Dainippon Screen Mfg Co Ltd 塗布装置
TW201341064A (zh) * 2012-02-15 2013-10-16 東京威力科創股份有限公司 基板處理裝置及基板處理方法
TW201507058A (zh) * 2013-07-18 2015-02-16 Nsk Technology Co Ltd 基板之保持裝置及緊貼曝光裝置以及近接曝光裝置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5977042B2 (ja) * 2012-02-27 2016-08-24 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置、基板保持装置および基板保持方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274148A (ja) * 1995-01-30 1996-10-18 Sony Corp 基体固定装置及び基体の固定方法
JP2013069969A (ja) * 2011-09-26 2013-04-18 Dainippon Screen Mfg Co Ltd 塗布装置
TW201341064A (zh) * 2012-02-15 2013-10-16 東京威力科創股份有限公司 基板處理裝置及基板處理方法
TW201507058A (zh) * 2013-07-18 2015-02-16 Nsk Technology Co Ltd 基板之保持裝置及緊貼曝光裝置以及近接曝光裝置

Also Published As

Publication number Publication date
TW201828397A (zh) 2018-08-01
KR20180071938A (ko) 2018-06-28
JP2018101676A (ja) 2018-06-28
KR102358070B1 (ko) 2022-02-03
JP6809895B2 (ja) 2021-01-06

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