TWI863515B - Manufacturing method of embossing mask - Google Patents
Manufacturing method of embossing mask Download PDFInfo
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- TWI863515B TWI863515B TW112131073A TW112131073A TWI863515B TW I863515 B TWI863515 B TW I863515B TW 112131073 A TW112131073 A TW 112131073A TW 112131073 A TW112131073 A TW 112131073A TW I863515 B TWI863515 B TW I863515B
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Abstract
Description
本發明涉及一種製造方法,尤其涉及一種壓印光罩製造方法。 The present invention relates to a manufacturing method, and in particular to a method for manufacturing an embossing mask.
現有壓印光罩製造方法所製造的壓印光罩,其具備的壓印圖案常會需要由多個子圖案所構成;但,現有壓印光罩在用來壓印於一光學膜時,多個所述子圖案的間隙常會被轉印至所述光學膜所壓印成形的圖案、而產生肉眼可見的縫隙或缺陷,因而影響其後續應用。於是,本發明人認為上述缺陷可改善,乃特潛心研究並配合科學原理的運用,終於提出一種設計合理且有效改善上述缺陷的本發明。 The embossed pattern of the embossed mask produced by the existing embossed mask manufacturing method often needs to be composed of multiple sub-patterns; however, when the existing embossed mask is used to emboss on an optical film, the gaps between the multiple sub-patterns are often transferred to the pattern embossed on the optical film, resulting in gaps or defects visible to the naked eye, thus affecting its subsequent application. Therefore, the inventor believes that the above defects can be improved, and has conducted intensive research and combined with the application of scientific principles, and finally proposed a reasonable design and effective improvement of the above defects.
本發明實施例在於提供一種壓印光罩製造方法,其能有效地改善現有壓印光罩製造方法所可能產生的缺陷。 The present invention provides a method for manufacturing an embossing mask, which can effectively improve the defects that may be caused by the existing embossing mask manufacturing method.
本發明實施例公開一種壓印光罩製造方法,其包括:一前置步驟:提供一基材,其具有一穿透區塊、呈環形且圍繞所述穿透區塊的一對位區塊、及呈環形且圍繞所述對位區塊的一非穿透區塊;其中,所述基材僅以所述穿透區塊提供的一固化光線穿過,並且所述對位區塊能供一對位光線穿過,所述固化光線的波長不同於所述對位光線的波長;一標記成形步驟:於所述基材的所述對位區塊形成有彼此間隔設置的多個光罩對位標記;以及一 圖案成形步驟:於所述穿透區塊形成有一壓印層,並且所述壓印層能供所述固化光線穿過且於遠離所述基材的表面具有:一第一圖案,具有分別位於相反兩側的一第一內邊緣與一第一外邊緣;及一第二圖案,具有分別位於相反兩側的一第二內邊緣與一第二外邊緣;其中,所述第一內邊緣與所述第二內邊緣彼此間隔有不大於50微米(μm)的一長形組版縫隙,並且所述第一內邊緣與所述第二內邊緣皆呈非規則狀且形狀彼此互補。 The present invention discloses a method for manufacturing an imprinting mask, which includes: a pre-step: providing a substrate having a penetration block, an alignment block in a ring shape and surrounding the penetration block, and a non-penetration block in a ring shape and surrounding the alignment block; wherein the substrate is only penetrated by a curing light provided by the penetration block, and the alignment block can be penetrated by an alignment light, and the wavelength of the curing light is different from that of the alignment light; a mark forming step: forming a plurality of mask alignment marks spaced apart from each other in the alignment block of the substrate; and a Pattern forming step: forming an embossing layer in the penetration area, and the embossing layer can allow the curing light to pass through and has: a first pattern with a first inner edge and a first outer edge located at opposite sides; and a second pattern with a second inner edge and a second outer edge located at opposite sides; wherein the first inner edge and the second inner edge are separated from each other by a long slit of no more than 50 micrometers (μm), and the first inner edge and the second inner edge are both irregular and complementary in shape.
綜上所述,本發明實施例所公開的壓印光罩製造方法,其能夠以所述長形組版縫隙來組合出所需的圖案,據以有效地降低所述壓印光罩的製造難度,並能用來轉印以形成無法以肉眼觀察到組版縫隙的單位膜層。 In summary, the embossing mask manufacturing method disclosed in the embodiment of the present invention can combine the required pattern with the elongated assembly slit, thereby effectively reducing the manufacturing difficulty of the embossing mask, and can be used for transfer printing to form a unit film layer whose assembly slit cannot be observed with the naked eye.
為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。 To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and do not limit the scope of protection of the present invention.
100:組版式壓印設備 100: Group printing equipment
1:壓印光罩 1: Imprinting mask
11:基材 11: Base material
111:穿透區塊 111: Penetration block
112:對位區塊 112: Alignment block
113:非穿透區塊 113: Non-penetrating block
12:光罩對位標記 12: Mask alignment mark
13:壓印層 13: Embossing layer
130:單位圖案 130:Unit pattern
130-1:第一圖案 130-1: The first pattern
130-2:第二圖案 130-2: Second pattern
131:第一外邊緣 131: First outer edge
132:第二外邊緣 132: Second outer edge
133:上側邊緣 133: Upper edge
133-1:第一上側邊緣 133-1: First upper edge
133-2:第二上側邊緣 133-2: Second upper edge
134:下側邊緣 134: Lower edge
134-1:第一下側邊緣 134-1: First lower edge
134-2:第二下側邊緣 134-2: Second lower edge
135:反光壓印部 135: Reflective embossing unit
1351:反光壓印區 1351: Reflective embossed area
136:第一內邊緣 136: First inner edge
137:第二內邊緣 137: Second inner edge
2:載體 2: Carrier
21:載體對位標記 21: Carrier alignment mark
3a:膠層 3a: Adhesive layer
3:單位膜層 3: Unit film layer
30:子區塊 30: Sub-block
31:第一外緣 31: The first outer edge
32:第二外緣 32: The second outer edge
33:上側緣 33: Upper edge
34:下側緣 34: Lower edge
35:反光部 35: Reflective part
351:反光區 351: Reflective area
36:第一內緣 36: The first inner edge
37:第二內緣 37: The second inner edge
4:工作台 4: Workbench
5:位移機構 5: Displacement mechanism
6:塗佈機構 6: Coating mechanism
7:攝像機構 7: Camera mechanism
8:固化光源 8: Curing light source
200:組版式光學膜 200: Set of optical films
S100:準備步驟 S100: Preparation steps
S300:壓印固化步驟 S300: Imprint curing step
G1:第一間隙 G1: First gap
G2:第二間隙 G2: Second gap
S13:長形組版縫隙 S13: Long-shaped assembly seam
S3:組版縫隙 S3: Plate assembly gap
D1:第一方向 D1: First direction
D2:第二方向 D2: Second direction
H:高度方向 H: height direction
M:光罩 M: Mask
UV:曝光紫外線 UV: ultraviolet light exposure
L:固化光線 L: Curing light
IR:對位光線 IR: Positioning light
圖1為本發明實施例一的組版式光學膜製造方法的準備步驟(或壓印光罩製造方法)的立體示意圖。 Figure 1 is a three-dimensional schematic diagram of the preparation steps of the assembly type optical film manufacturing method (or the embossing mask manufacturing method) of the first embodiment of the present invention.
圖2為圖1的區域II的放大示意圖。 Figure 2 is an enlarged schematic diagram of area II in Figure 1.
圖3為本發明實施例一的組版式壓印設備的立體示意圖。 Figure 3 is a three-dimensional schematic diagram of the group plate type embossing device of the first embodiment of the present invention.
圖4~圖6為本發明實施例一的組版式光學膜製造方法的壓印固化步驟的平面示意圖。 Figures 4 to 6 are schematic plan views of the embossing and curing steps of the assembly optical film manufacturing method of the first embodiment of the present invention.
圖7為本發明實施例一的組版式光學膜的局部俯視示意圖。 Figure 7 is a partial top view of the assembly type optical film of the first embodiment of the present invention.
圖8為圖7的區域VIII的放大示意圖。 Figure 8 is an enlarged schematic diagram of region VIII of Figure 7.
圖9為本發明實施例二的組版式光學膜製造方法的準備步驟(或壓印光罩製造方法)的立體示意圖。 Figure 9 is a three-dimensional schematic diagram of the preparation step of the assembly type optical film manufacturing method (or the embossing mask manufacturing method) of the second embodiment of the present invention.
圖10為本發明實施例二的組版式光學膜的局部俯視示意圖。 Figure 10 is a partial top view of the assembly type optical film of the second embodiment of the present invention.
以下是通過特定的具體實施例來說明本發明所公開有關“壓印光罩製造方法”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。 The following is a specific embodiment to illustrate the implementation of the "imprint mask manufacturing method" disclosed in the present invention. Technical personnel in this field can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without deviating from the concept of the present invention. In addition, the attached drawings of the present invention are only for simple schematic illustrations and are not depicted according to actual sizes. Please note in advance. The following implementation will further explain the relevant technical content of the present invention in detail, but the disclosed content is not used to limit the scope of protection of the present invention.
應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者信號,但這些元件或者信號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一信號與另一信號。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。 It should be understood that although the terms "first", "second", "third" and so on may be used in this article to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used in this article may include any one or more combinations of the related listed items depending on the actual situation.
[實施例一] [Implementation Example 1]
請參閱圖1至圖8所示,其為本發明的實施例一。本實施例公開一種組版式光學膜製造方法,其包含有一準備步驟S100及一壓印固化步驟S300,為便於理解本實施例,以下將分別說明所述準備步驟S100及所述壓印固化步驟S300的各自內容。 Please refer to Figures 1 to 8, which are the first embodiment of the present invention. This embodiment discloses a method for manufacturing a modular optical film, which includes a preparation step S100 and an embossing and curing step S300. To facilitate understanding of this embodiment, the respective contents of the preparation step S100 and the embossing and curing step S300 will be described below.
所述準備步驟S100:如圖1和圖2所示,提供一壓印光罩1。其中,所述準備步驟S100於本實施例中也可以視為一種壓印光罩製造方法,其包含一前置步驟、一標記成形步驟、及一圖案成形步驟。 The preparation step S100: As shown in FIG. 1 and FIG. 2, a stamping mask 1 is provided. The preparation step S100 in this embodiment can also be regarded as a stamping mask manufacturing method, which includes a pre-step, a mark forming step, and a pattern forming step.
所述前置步驟:提供一基材11,其於本實施例中是以平板狀構 造來說明,但本發明不以此為限。其中,所述基材11具有一穿透區塊111、呈環形且圍繞所述穿透區塊111的一對位區塊112、及呈環形且圍繞所述對位區塊112的一非穿透區塊113。 The preceding step is to provide a substrate 11, which is described as a flat plate in this embodiment, but the present invention is not limited thereto. The substrate 11 has a penetration block 111, a ring-shaped alignment block 112 surrounding the penetration block 111, and a ring-shaped non-penetration block 113 surrounding the alignment block 112.
進一步地說,所述基材11僅以所述穿透區塊111提供的一固化光線L(如:圖5所示的紫外線)穿過;也就是說,所述固化光線L無法穿過所述對位區塊112與所述非穿透區塊113。再者,所述對位區塊112於本實施例中乘方環狀並能供一對位光線IR(如:圖4所示的紅外線)穿過,所述對位光線IR較佳是無法穿過所述非穿透區塊113,並且所述固化光線L的波長不同於所述對位光線IR的波長。 In other words, the substrate 11 is only penetrated by a curing light L (such as ultraviolet light as shown in FIG. 5) provided by the penetrating block 111; that is, the curing light L cannot penetrate the alignment block 112 and the non-penetrating block 113. Furthermore, the alignment block 112 is in a square ring shape in this embodiment and can allow a aligning light IR (such as infrared light as shown in FIG. 4) to penetrate, and the aligning light IR is preferably unable to penetrate the non-penetrating block 113, and the wavelength of the curing light L is different from the wavelength of the aligning light IR.
所述標記成形步驟:於所述基材11的所述對位區塊112形成有彼此間隔設置的多個光罩對位標記12,並且多個所述光罩對位標記12於本實施例中是以分別形成於所述對位區塊112的多個角落來說明。其中,每個所述光罩對位標記12可以是呈十字狀,以利於在相互垂直的兩個方向上進行對位,但不以此為限。 The mark forming step: forming a plurality of mask alignment marks 12 spaced apart from each other in the alignment block 112 of the substrate 11, and the plurality of mask alignment marks 12 are respectively formed at a plurality of corners of the alignment block 112 in this embodiment. Each of the mask alignment marks 12 may be in the shape of a cross to facilitate alignment in two mutually perpendicular directions, but is not limited thereto.
所述圖案成形步驟:於所述穿透區塊111形成有一壓印層13,並且所述壓印層13能供所述固化光線L穿過且於遠離所述基材11的表面具有一單位圖案130。於本實施例中,所述壓印層13是通過一曝光紫外線UV經由光罩M或干涉而照射在一光阻層而構成,並且所述曝光紫外線UV的預設曝光波長是落在所述固化光線L(如:圖5)的預設光固化波段之外。舉例來說,所述預設曝光波長可以是190奈米(nm)~250奈米,而所述預設光固化波段則與上述預設曝光波長相差至少100奈米(如:所述預設光固化波段為350奈米~410奈米)。 The pattern forming step: forming an embossing layer 13 in the penetration area 111, and the embossing layer 13 can allow the curing light L to pass through and has a unit pattern 130 on the surface away from the substrate 11. In this embodiment, the embossing layer 13 is formed by irradiating an exposure ultraviolet light UV on a photoresist layer through a mask M or interference, and the preset exposure wavelength of the exposure ultraviolet light UV falls outside the preset light curing band of the curing light L (such as: Figure 5). For example, the preset exposure wavelength can be 190 nanometers (nm) ~ 250 nanometers, and the preset light curing band is at least 100 nanometers different from the above-mentioned preset exposure wavelength (such as: the preset light curing band is 350 nanometers ~ 410 nanometers).
更詳細地說,所述單位圖案130的輪廓大致呈方形(如:長方形或正方形),但所述單位圖案130的邊緣為非規則狀。其中,所述單位圖案130 具有分別位於相反兩側的一第一外邊緣131與一第二外邊緣132、及分別位於相反另兩側的一上側邊緣133與一下側邊緣134。再者,所述第一外邊緣131的兩端與所述第二外邊緣132的兩端分別鄰近於多個所述光罩對位標記12。也就是說,所述壓印光罩1於所述壓印層13的外側形成有多個所述光罩對位標記12。 In more detail, the outline of the unit pattern 130 is roughly square (e.g., rectangular or square), but the edge of the unit pattern 130 is irregular. The unit pattern 130 has a first outer edge 131 and a second outer edge 132 located on opposite sides, and an upper edge 133 and a lower edge 134 located on the other two opposite sides. Furthermore, the two ends of the first outer edge 131 and the two ends of the second outer edge 132 are respectively adjacent to the plurality of mask alignment marks 12. That is, the embossing mask 1 forms a plurality of mask alignment marks 12 on the outer side of the embossing layer 13.
其中,所述第一外邊緣131與所述第二外邊緣132是沿一第一方向D1分別間隔地位於所述壓印層13的相反兩外側,並且所述第一外邊緣131與所述第二外邊緣132皆呈非規則狀且形狀彼此互補。再者,所述上側邊緣133與所述下側邊緣134則是沿垂直所述第一方向D1的一第二方向D2間隔地位於所述壓印層13的相反另兩外側,並且所述上側邊緣133與所述下側邊緣134皆呈非規則狀且形狀彼此互補,但不以此為限。舉例來說,在本發明未繪示的其他實施例中,所述單位圖案130也可以依據需求而採用規則狀的所述上側邊緣133與所述下側邊緣134。 The first outer edge 131 and the second outer edge 132 are respectively disposed at two opposite outer sides of the embossing layer 13 along a first direction D1 and are spaced apart from each other, and the first outer edge 131 and the second outer edge 132 are both irregular and complementary in shape. Furthermore, the upper edge 133 and the lower edge 134 are disposed at two opposite outer sides of the embossing layer 13 along a second direction D2 perpendicular to the first direction D1 and are spaced apart from each other, and the upper edge 133 and the lower edge 134 are both irregular and complementary in shape, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the unit pattern 130 may also adopt the regular upper edge 133 and the lower edge 134 according to needs.
需額外說明的是,所述單位圖案130於本實施例中是包含有非規則配置的多個反光壓印部135,其具有相同的外型。其中,每個所述反光壓印部135具有呈矩陣狀排列的多個反光壓印區1351,其能沿相同方向進行反光,並且多個所述反光壓印部135的反光方向為非規則配置。也就是說,當多個所述反光壓印部135被可見光照射時,其能反射形成多種顏色。 It should be further explained that the unit pattern 130 in this embodiment includes a plurality of irregularly arranged reflective embossed portions 135 having the same appearance. Each of the reflective embossed portions 135 has a plurality of reflective embossed areas 1351 arranged in a matrix shape, which can reflect light in the same direction, and the reflective directions of the plurality of reflective embossed portions 135 are irregularly arranged. In other words, when the plurality of reflective embossed portions 135 are irradiated with visible light, they can reflect to form a variety of colors.
進一步地說,每個所述反光壓印部135呈圓形,並且所述單位圖案130的多個所述反光壓印部135彼此交疊配置,以使所述第一外邊緣131、所述第二外邊緣132、所述上側邊緣133、及所述下側邊緣134各由多個所述反光壓印部135的圓弧邊所共同組成。 Specifically, each of the reflective embossed portions 135 is circular, and the multiple reflective embossed portions 135 of the unit pattern 130 are overlapped with each other, so that the first outer edge 131, the second outer edge 132, the upper edge 133, and the lower edge 134 are each composed of arc edges of multiple reflective embossed portions 135.
以上為所述準備步驟S100(或所述壓印光罩製造方法)於本實施例中的技術內容說明;也就是說,本實施例於上述說明之中也相當於公開 了一種壓印光罩1,其具有不同於以往的非規則結構。以下接著介紹所述壓印固化步驟S300的技術內容。 The above is a description of the technical content of the preparation step S100 (or the method for manufacturing the embossing mask) in this embodiment; that is, the above description of this embodiment is equivalent to disclosing an embossing mask 1, which has an irregular structure different from the previous ones. The technical content of the embossing curing step S300 is introduced below.
所述壓印固化步驟S300:如圖3至圖6所示,於一載體2形成有彼此間隔配置且厚度均勻的多個膠層3a,並以所述壓印光罩1的所述壓印層13依序對多個所述膠層3a進行壓印固化作業、而分別構成多個單位膜層3。其中,多個所述膠層3a於本實施例中是以塗佈或噴塗方式形成的多個光固化膠層來說明,其能被所述固化光線L所照射而固化;多個所述單位膜層3則是彼此間隔形成於所述載體2、並共同構成一組版式光學膜200。 The embossing and curing step S300: As shown in Figures 3 to 6, a plurality of adhesive layers 3a are formed on a carrier 2 and are spaced apart from each other and have uniform thickness, and the embossing layer 13 of the embossing mask 1 is used to sequentially emboss and cure the plurality of adhesive layers 3a to form a plurality of unit film layers 3. In this embodiment, the plurality of adhesive layers 3a are illustrated as a plurality of light-cured adhesive layers formed by coating or spraying, which can be cured by irradiation of the curing light L; the plurality of unit film layers 3 are spaced apart from each other and formed together on the carrier 2 to form a set of format optical films 200.
更詳細地說,所述載體2於本實施例中是以平坦片狀構造來說明,並且所述載體2具有間隔設置的多個載體對位標記21,但本發明不以此為限。於所述壓印固化步驟S300中,每個所述膠層3a大致形成在四個所述載體對位標記21所包圍的區域之內(也就是說,任一個所述單位膜層3設置於四個所述載體對位標記21所圍繞的區域之內),並且多個所述載體對位標記21未被多個所述膠層3a所遮蔽。 In more detail, the carrier 2 is described as a flat sheet structure in this embodiment, and the carrier 2 has a plurality of carrier alignment marks 21 arranged at intervals, but the present invention is not limited thereto. In the imprint curing step S300, each of the adhesive layers 3a is roughly formed within the area surrounded by the four carrier alignment marks 21 (that is, any one of the unit film layers 3 is arranged within the area surrounded by the four carrier alignment marks 21), and the plurality of carrier alignment marks 21 are not covered by the plurality of adhesive layers 3a.
進一步地說,所述壓印光罩1於所述壓印固化步驟S300之中是以多個所述光罩對位標記12沿垂直所述第一方向D1與所述第二方向D2的一高度方向H對位於任一個所述膠層3a旁的至少兩個所述載體對位標記21,而後以所述壓印層13沿所述高度方向H進行所述壓印固化作業,據以使多個所述單位膜層3能夠被精準地成形在預設位置而保有預設的間隔、並具有大致相同的外型。 Furthermore, in the imprint curing step S300, the imprint mask 1 uses a plurality of the mask alignment marks 12 to align at least two of the carrier alignment marks 21 located next to any one of the adhesive layers 3a along a height direction H perpendicular to the first direction D1 and the second direction D2, and then uses the imprint layer 13 to perform the imprint curing operation along the height direction H, so that the plurality of the unit film layers 3 can be accurately formed at the preset position and maintain the preset interval and have substantially the same appearance.
此外,如圖1、圖7、和圖8所示,以下接著介紹本實施例的所述組版式光學膜製造方法於實施之後所形成的所述組版式光學膜200;也就是說,本實施例於下述說明之中相當於公開了一種組版式光學膜200,其具有不同於以往的非規則結構。其中,所述組版式光學膜200的多個所述單位膜層3 是以矩陣狀排列來說明,但本發明不受限於此。舉例來說,在本發明未繪示的其他實施例中,多個所述單位膜層3也可以是沿所述第一方向D1排成一列。 In addition, as shown in FIG. 1 , FIG. 7 , and FIG. 8 , the following describes the group-type optical film 200 formed after the group-type optical film manufacturing method of this embodiment is implemented; that is, this embodiment is equivalent to disclosing a group-type optical film 200 in the following description, which has a different irregular structure from the previous one. Among them, the multiple unit film layers 3 of the group-type optical film 200 are described as being arranged in a matrix, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the multiple unit film layers 3 can also be arranged in a row along the first direction D1.
於本實施例中,每個所述單位膜層3包含有分別位於相反兩側的一第一外緣31與一第二外緣32,其分別由所述單位圖案130的所述第一外邊緣131與所述第二外邊緣132所壓印成形,據以使所述第一外緣31與所述第二外緣32皆呈非規則狀且形狀彼此互補。再者,每個所述單位膜層3也具有分別位於相反另兩側的一上側緣33與一下側緣34,其分別由所述單位圖案130的所述上側邊緣133與所述下側邊緣134所壓印成形,據以使所述上側緣33與所述下側緣34皆呈非規則狀且形狀彼此互補。 In this embodiment, each of the unit film layers 3 includes a first outer edge 31 and a second outer edge 32 located at opposite sides, respectively, which are embossed by the first outer edge 131 and the second outer edge 132 of the unit pattern 130, respectively, so that the first outer edge 31 and the second outer edge 32 are both irregular and complementary in shape. Furthermore, each of the unit film layers 3 also has an upper edge 33 and a lower edge 34 located on the other two opposite sides, which are respectively embossed by the upper edge 133 and the lower edge 134 of the unit pattern 130, so that the upper edge 33 and the lower edge 34 are both irregular and complementary in shape.
進一步地說,每個所述單位膜層3包含有非規則配置的多個反光部35,其由所述壓印層13的所述單位圖案130所壓印成形且具有相同的外型。也就是說,於本實施例的每個所述單位膜層3之中,每個所述反光部35具有呈矩陣狀排列的多個反光區351,其沿相同方向進行反光,並且多個所述反光部35的反光方向為非規則配置。也就是說,當多個所述反光部35被可見光照射時,其能反射形成多種顏色。 Furthermore, each of the unit film layers 3 includes a plurality of irregularly arranged reflective portions 35, which are embossed by the unit pattern 130 of the embossing layer 13 and have the same appearance. That is, in each of the unit film layers 3 of this embodiment, each of the reflective portions 35 has a plurality of reflective areas 351 arranged in a matrix, which reflect in the same direction, and the reflective directions of the plurality of reflective portions 35 are irregularly arranged. That is, when the plurality of reflective portions 35 are irradiated by visible light, they can reflect to form a variety of colors.
再者,每個所述反光部35於本實施例中呈圓形,並且每個所述單位膜層3的多個所述反光部35彼此交疊配置,以使每個所述單位膜層3的所述第一外緣31、所述第二外緣32、所述上側緣33、及所述下側緣34各由多個所述反光部35的圓弧邊所共同組成。 Furthermore, each of the reflective portions 35 is circular in this embodiment, and the multiple reflective portions 35 of each unit film layer 3 are overlapped with each other, so that the first outer edge 31, the second outer edge 32, the upper edge 33, and the lower edge 34 of each unit film layer 3 are each composed of the arc edges of the multiple reflective portions 35.
換個角度來看,沿所述第一方向D1彼此相鄰的兩個所述單位膜層3之中,其中一個所述單位膜層3的所述第一外緣31是與其中另一個所述單位膜層3的所述第二外緣32相鄰(並具有彼此互補的非規則形狀、)且間隔有不大於50微米的一第一間隙G1。再者,沿所述第二方向D2彼此相鄰的兩個所述單位膜層3之中,其中一個所述單位膜層3的所述上側緣33是與其中另一個 所述單位膜層3的所述下側緣34沿所述第二方向D2相鄰(並具有彼此互補的非規則形狀、)且間隔有不大於50微米的一第二間隙G2。 From another perspective, among the two unit film layers 3 adjacent to each other along the first direction D1, the first outer edge 31 of one of the unit film layers 3 is adjacent to the second outer edge 32 of the other unit film layer 3 (and has an irregular shape that complements each other), and there is a first gap G1 of no more than 50 microns. Furthermore, among the two unit film layers 3 adjacent to each other along the second direction D2, the upper edge 33 of one of the unit film layers 3 is adjacent to the lower edge 34 of the other unit film layer 3 along the second direction D2 (and has an irregular shape that complements each other), and there is a second gap G2 of no more than 50 microns.
也就是說,多個所述載體對位標記21裸露於多個所述單位膜層3之間的多個所述第一間隙G1與多個所述第二間隙G2。於本實施例中,多個所述第一間隙G1與多個所述第二間隙G2彼此相互連通且大致共同呈現棋盤狀,並且所述第一間隙G1與所述第二間隙G2的任一個較佳是不大於30微米,但不受限於此。 That is, the plurality of carrier alignment marks 21 are exposed in the plurality of first gaps G1 and the plurality of second gaps G2 between the plurality of unit film layers 3. In this embodiment, the plurality of first gaps G1 and the plurality of second gaps G2 are interconnected and roughly present a chessboard shape, and any one of the first gaps G1 and the second gaps G2 is preferably not greater than 30 microns, but is not limited thereto.
此外,如圖1、圖3至圖6所示,本實施例中還公開一種組版式壓印設備100,並且所述組版式光學膜製造方法能通過所述組版式壓印設備100來實施,但本發明不受限於此。也就是說,所述組版式光學膜製造方法也可以是通過其他設備來實施。此外,所述組版式壓印設備100於本實施例中是用來製造形成如同上述的組版式光學膜200,所以有關於所述組版式光學膜200的具體結構於下述說明之中不再加以贅述。 In addition, as shown in FIG. 1 and FIG. 3 to FIG. 6, a group plate type embossing device 100 is also disclosed in this embodiment, and the group plate type optical film manufacturing method can be implemented by the group plate type embossing device 100, but the present invention is not limited thereto. In other words, the group plate type optical film manufacturing method can also be implemented by other devices. In addition, the group plate type embossing device 100 is used in this embodiment to manufacture the group plate type optical film 200 as described above, so the specific structure of the group plate type optical film 200 will not be described in detail in the following description.
所述組版式壓印設備100於本實施例中包含一工作台4、設置於所述工作台的一位移機構5、對應於所述工作台4設置的一塗佈機構6、連接於所述位移機構5的所述壓印光罩1與一攝像機構7、及連接於所述位移機構5並對應於所述壓印光罩1配置的一固化光源8。於本實施例中,所述壓印光罩1的具體構造如同上述組版式光學膜製造方法的內容所載,所以下述說明之中不再加以贅述。 The assembly type embossing device 100 in this embodiment includes a workbench 4, a displacement mechanism 5 arranged on the workbench, a coating mechanism 6 arranged corresponding to the workbench 4, the embossing mask 1 connected to the displacement mechanism 5 and a camera mechanism 7, and a curing light source 8 connected to the displacement mechanism 5 and arranged corresponding to the embossing mask 1. In this embodiment, the specific structure of the embossing mask 1 is as described in the above-mentioned assembly type optical film manufacturing method, so it will not be repeated in the following description.
需額外說明的是,所述組版式壓印設備100於本實施例中是以上述多個構件的搭配來說明,但本發明不受限於此。舉例來說,在本發明未繪示的其他實施例中,所述攝像機構7及/或所述固化光源8也可以被省略或是以其他構件取代。 It should be further explained that the group-type imprinting device 100 is described in this embodiment by combining the above-mentioned multiple components, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the camera mechanism 7 and/or the curing light source 8 can also be omitted or replaced by other components.
所述工作台4用以供所述載體2設置,而所述載體2的具體構造大 致如同上述組版式光學膜製造方法的內容所載,所以下述說明之中不再加以贅述。 The workbench 4 is used to place the carrier 2, and the specific structure of the carrier 2 is roughly the same as that described in the above-mentioned method for manufacturing the composite optical film, so it will not be elaborated in the following description.
所述位移機構5能相對於所述工作台4沿相互正交的所述高度方向H、所述第一方向D1、及所述第二方向D2移動。再者,所述塗佈機構6於本實施例中是安裝於所述位移機構5,據以能夠被所述位移機構5驅使而用來依序於所述載體2形成有彼此間隔配置且厚度均勻的多個所述膠層3a,但本發明不以此為限。舉例來說,在本發明未繪示的其他實施例中,所述塗佈機構6的運作也可以是獨立於所述位移機構5。 The displacement mechanism 5 can move relative to the workbench 4 along the mutually orthogonal height direction H, the first direction D1, and the second direction D2. Furthermore, the coating mechanism 6 is installed on the displacement mechanism 5 in this embodiment, and can be driven by the displacement mechanism 5 to sequentially form a plurality of the adhesive layers 3a with spaced configurations and uniform thickness on the carrier 2, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the operation of the coating mechanism 6 can also be independent of the displacement mechanism 5.
需說明的是,所述塗佈機構6是以有別於點膠的塗佈或噴塗方式來精準地形成多個所述膠層3a,以使每個所述膠層3a具有均勻厚度且形成在四個所述載體對位標記21所包圍的區域之內、並且未覆蓋在任一個所述載體對位標記21。 It should be noted that the coating mechanism 6 accurately forms multiple glue layers 3a in a coating or spraying method different from glue dispensing, so that each glue layer 3a has a uniform thickness and is formed within the area surrounded by the four carrier alignment marks 21 and does not cover any of the carrier alignment marks 21.
此外,所述壓印光罩1、所述攝像機構7、及所述固化光源8能夠通過所述位移機構5而同步移動。其中,所述壓印光罩1也能夠相對於所述攝像機構7與所述固化光源8沿所述高度方向H進行相對移動,但本發明不以此為限。 In addition, the embossing mask 1, the camera mechanism 7, and the curing light source 8 can move synchronously through the displacement mechanism 5. The embossing mask 1 can also move relative to the camera mechanism 7 and the curing light source 8 along the height direction H, but the present invention is not limited thereto.
據此,所述組版式壓印設備100能通過所述攝像機構7,以使所述壓印光罩1的多個所述光罩對位標記12沿所高度方向H對位於任一個所述膠層3a旁的至少兩個所述載體對位標記21,而後通過所述位移機構5來驅使所述壓印光罩1沿所高度方向H進行壓印,以使多個所述膠層3a被依序壓印而各形成為一個所述單位膜層3。其中,所述固化光源8能用來朝向被所述壓印光罩1的所述基材11發出所述固化光線L,以穿過所述穿透區塊111與所述壓印層13,進而固化所述單位膜層3。 Accordingly, the group-type imprinting device 100 can use the camera mechanism 7 to align the multiple mask alignment marks 12 of the imprinting mask 1 with at least two carrier alignment marks 21 located next to any one of the adhesive layers 3a along the height direction H, and then drive the imprinting mask 1 to be imprinted along the height direction H through the displacement mechanism 5, so that the multiple adhesive layers 3a are imprinted in sequence and each forms a unit film layer 3. The curing light source 8 can be used to emit the curing light L toward the substrate 11 of the imprinted mask 1 to pass through the penetration block 111 and the imprinting layer 13, thereby curing the unit film layer 3.
依上所述,所述組版式光學膜製造方法或所述組版式壓印設備 100於本實施例中能通過所述壓印光罩1的構造(如:具有呈非規則狀且形狀互補的所述第一外邊緣131與所述第二外邊緣132)及其所搭配的其他構件或步驟而製造形成所述組版式光學膜200,據以使所述組版式光學膜200的相鄰任兩個所述單位膜層3之間是由非規則狀且外型彼此互補的所述第一外緣31與所述第二外緣32以特定尺寸(如:不大於50微米)形成所述第一間隙G1,進而令使用者無法以肉眼觀察到所述第一間隙G1。反過來說,如果間隙是由規則狀的兩個邊緣所定義時,則該間隙的尺寸至少需要小於5微米,才較能夠使肉眼不易直接觀察。 As described above, the method for manufacturing the composite optical film or the composite embossing device 100 in this embodiment can manufacture the composite optical film 200 by means of the structure of the embossing mask 1 (e.g., the first outer edge 131 and the second outer edge 132 having irregular shapes and complementary shapes) and other components or steps matched therewith, so that the first gap G1 is formed by the first outer edge 31 and the second outer edge 32 having irregular shapes and complementary shapes with a specific size (e.g., not more than 50 microns) between any two adjacent unit film layers 3 of the composite optical film 200, so that the user cannot observe the first gap G1 with the naked eye. On the other hand, if the gap is defined by two edges of a regular shape, the size of the gap needs to be at least less than 5 microns to make it difficult to observe directly with the naked eye.
也就是說,如圖1、圖7和圖8所示,本實施例所提供的所述組版式光學膜200是具有不同於以往的構造,據以更利於生產製造、並能有效地提升其應用範圍。換個角度來說,本實施例所提供的所述壓印光罩1或其製造方法,其能夠以較低製造難度形成無法以肉眼觀察到所述第一間隙G1(及所述第二間隙G2)的所述組版式光學膜200。 That is to say, as shown in FIG. 1, FIG. 7 and FIG. 8, the optical film set 200 provided in this embodiment has a different structure from the previous one, which is more conducive to production and manufacturing, and can effectively improve its application range. In other words, the embossing mask 1 or its manufacturing method provided in this embodiment can form the optical film set 200 in which the first gap G1 (and the second gap G2) cannot be observed by the naked eye with a lower manufacturing difficulty.
[實施例二] [Implementation Example 2]
請參閱圖9和圖10所示,其為本發明的實施例二。由於本實施例類似於上述實施例一,所以兩個實施例的相同處不再加以贅述,而本實施例相較於上述實施例一的差異主要在於:所述壓印光罩1的所述單位圖案130於本實施例中(如:於所述圖案成形步驟之中)形成有彼此間隔配置的一第一圖案130-1與一第二圖案130-2,以使每個所述單位膜層3也對應形成有間隔配置的兩個子區塊30。 Please refer to Figures 9 and 10, which are the second embodiment of the present invention. Since this embodiment is similar to the first embodiment, the similarities between the two embodiments will not be described in detail. The difference between this embodiment and the first embodiment is mainly that the unit pattern 130 of the imprint mask 1 in this embodiment (e.g., in the pattern forming step) is formed with a first pattern 130-1 and a second pattern 130-2 that are spaced apart from each other, so that each unit film layer 3 is also formed with two spaced sub-blocks 30.
更詳細地說,所述第一圖案130-1具有(沿所述第一方向D1)分別位於相反兩側的所述第一外邊緣131及一第一內邊緣136,所述第二圖案130-2具有(沿所述第一方向D1)分別位於相反兩側的所述第二外邊緣132及一第二內邊緣137。所述第一內邊緣136與所述第二內邊緣137皆呈非規則狀且 形狀彼此互補,並且所述第一內邊緣136與所述第二內邊緣137彼此相鄰且沿所述第一方向D1間隔有不大於50微米的一長形組版縫隙S13。其中,所述長形組版縫隙S13較佳是不大於30微米且其長軸方向非平行於(如:大致垂直)所述第一方向D1。 In more detail, the first pattern 130-1 has the first outer edge 131 and a first inner edge 136 located at opposite sides (along the first direction D1), and the second pattern 130-2 has the second outer edge 132 and a second inner edge 137 located at opposite sides (along the first direction D1). The first inner edge 136 and the second inner edge 137 are both irregular and complementary in shape, and the first inner edge 136 and the second inner edge 137 are adjacent to each other and are separated by a long slit S13 of no more than 50 microns along the first direction D1. The long slit S13 is preferably no more than 30 microns and its long axis direction is not parallel to (e.g., substantially perpendicular to) the first direction D1.
所述第一圖案130-1具有分別位於相反另兩側的一第一上側邊緣133-1與一第一下側邊緣134-1,其皆呈非規則狀且形狀彼此互補。所述第一上側邊緣133-1與所述第一下側邊緣134-1的一端分別相連於所述第一內邊緣136的兩端,並且所述第一上側邊緣133-1與所述第一下側邊緣134-1的另一端分別相連於所述第一外邊緣131的兩端。 The first pattern 130-1 has a first upper edge 133-1 and a first lower edge 134-1 located on opposite sides, both of which are irregular and complementary in shape. One end of the first upper edge 133-1 and the first lower edge 134-1 are connected to the two ends of the first inner edge 136, and the other ends of the first upper edge 133-1 and the first lower edge 134-1 are connected to the two ends of the first outer edge 131.
所述第二圖案130-2具有分別位於相反另兩側的一第二上側邊緣133-2與一第二下側邊緣134-2,其皆呈非規則狀且形狀彼此互補。所述第二上側邊緣133-2與所述第二下側邊緣134-2的一端分別相連於所述第二內邊緣137的兩端,並且所述第二上側邊緣133-2與所述第二下側邊緣134-2的另一端分別相連於所述第二外邊緣132的兩端。 The second pattern 130-2 has a second upper edge 133-2 and a second lower edge 134-2 located on the opposite sides, both of which are irregular and complementary in shape. One end of the second upper edge 133-2 and the second lower edge 134-2 are connected to the two ends of the second inner edge 137, and the other ends of the second upper edge 133-2 and the second lower edge 134-2 are connected to the two ends of the second outer edge 132.
也就是說,所述上側邊緣133於本實施例中是由所述長形組版縫隙S13而被拆分為所述第一上側邊緣133-1與所述第二上側邊緣133-2,而所述下側邊緣134則是由所述長形組版縫隙S13而被拆分為所述第一下側邊緣134-1與所述第二下側邊緣134-2。此外,在本發明未繪示的其他實施例中,所述單位圖案130也可依據需求而被拆分為超過三個以上的圖案。 That is, the upper edge 133 is divided into the first upper edge 133-1 and the second upper edge 133-2 by the elongated slit S13 in this embodiment, and the lower edge 134 is divided into the first lower edge 134-1 and the second lower edge 134-2 by the elongated slit S13. In addition, in other embodiments not shown in the present invention, the unit pattern 130 can also be divided into more than three patterns according to needs.
進一步地說,所述第一圖案130-1與所述第二圖案130-2於本實施例中各自包含有非規則配置且具有相同外型的多個反光壓印部135,其各具有呈矩陣狀排列且沿相同方向進行反光的多個反光壓印區(圖中未示出),並且多個所述反光壓印部135的反光方向為非規則配置。 Furthermore, in this embodiment, the first pattern 130-1 and the second pattern 130-2 each include a plurality of reflective embossed portions 135 arranged irregularly and having the same appearance, each of which has a plurality of reflective embossed areas (not shown in the figure) arranged in a matrix and reflecting in the same direction, and the reflective directions of the plurality of reflective embossed portions 135 are arranged irregularly.
以上為本實施例的所述壓印層13相較於實施例一的差異說明, 而由本實施例的所述壓印層13(通過所述壓印固化步驟S300)所壓印成形的所述組版式光學膜200,其相較於實施例一的差異將接著說明如下。 The above is a description of the difference between the embossing layer 13 of this embodiment and the embodiment 1. The difference between the assembly type optical film 200 embossed by the embossing layer 13 of this embodiment (through the embossing curing step S300) and the embodiment 1 will be described as follows.
具體來說,每個所述單位膜層3具有彼此相鄰配置的一第一內緣36與一第二內緣37、(沿所述第一方向D1)分別位於相反兩側的所述第一外緣31與所述第二外緣32、及(沿所述第二方向D2)分別位於相反另兩側的一上側緣33與一下側緣34。其中,所述第一內緣36與所述第二內緣37皆呈非規則狀且形狀彼此互補,並且所述第一外緣31與所述第二外緣32皆呈非規則狀且形狀彼此互補,而所述上側緣33與所述下側緣34皆呈非規則狀且形狀彼此互補。 Specifically, each of the unit film layers 3 has a first inner edge 36 and a second inner edge 37 adjacent to each other, the first outer edge 31 and the second outer edge 32 located at opposite sides (along the first direction D1), and an upper edge 33 and a lower edge 34 located at the other opposite sides (along the second direction D2). The first inner edge 36 and the second inner edge 37 are both irregular and complementary in shape, and the first outer edge 31 and the second outer edge 32 are both irregular and complementary in shape, and the upper edge 33 and the lower edge 34 are both irregular and complementary in shape.
於每個所述單位膜層3之中,所述第一內緣36與所述第二內緣37是分別由所述單位圖案130的所述第一內邊緣136與所述第二內邊緣137所壓印成形、且彼此間隔有不大於50微米的一組版縫隙S3。其中,所述組版縫隙S3較佳是不大於30微米且其長軸方向非平行於(如:大致垂直)所述第一方向D1。 In each of the unit film layers 3, the first inner edge 36 and the second inner edge 37 are respectively formed by embossing the first inner edge 136 and the second inner edge 137 of the unit pattern 130, and are separated from each other by a set of plate gaps S3 of no more than 50 microns. The set of plate gaps S3 is preferably no more than 30 microns and its long axis direction is not parallel to (e.g., approximately perpendicular to) the first direction D1.
也就是說,所述上側緣33與所述下側緣34於本實施例中各是由所述組版縫隙S3而被拆分為彼此分離的兩段,其分別位於兩個所述子區塊30,但本發明不受限於此。舉例來說,在本發明未繪示的其他實施例中,所述單位膜層3也可依據需求而被拆分為超過三個以上的所述子區塊30。 That is, the upper edge 33 and the lower edge 34 are each divided into two separate sections by the assembly slit S3 in this embodiment, and are respectively located in two sub-blocks 30, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the unit film layer 3 can also be divided into more than three sub-blocks 30 according to needs.
此外,每個所述單位膜層3的具體構造(如:所述反光部35或其所包含的多個所述反光區)、及相鄰的任兩個所述單位膜層3沿所述第一方向D1或所述第二方向D2所形成的所述第一間隙G1或所述第二間隙G2,其皆如同實施例一所載,在此不加以贅述。需說明的是,任一個所述組版縫隙S3是連通於兩個所述第二間隙G2。 In addition, the specific structure of each unit film layer 3 (such as the reflective portion 35 or the multiple reflective areas contained therein), and the first gap G1 or the second gap G2 formed by any two adjacent unit film layers 3 along the first direction D1 or the second direction D2 are the same as those in the first embodiment and are not described in detail here. It should be noted that any of the assembly gaps S3 is connected to the two second gaps G2.
依上所述,所述組版式光學膜製造方法或所述組版式壓印設備 100於本實施例中能通過所述壓印光罩1的構造(如:具有呈非規則狀且形狀互補的所述第一內邊緣136與所述第二內邊緣137)及其所搭配的其他構件或步驟而製造形成所述組版式光學膜200,據以使所述組版式光學膜200的任一個所述單位膜層3形成有令使用者無法以肉眼觀察到所述組版縫隙S3,進而利於所述壓印光罩1的生產製造。 As described above, the assembly optical film manufacturing method or the assembly embossing device 100 in this embodiment can manufacture the assembly optical film 200 through the structure of the embossing mask 1 (e.g., the first inner edge 136 and the second inner edge 137 having irregular shapes and complementary shapes) and other matching components or steps, so that any of the unit film layers 3 of the assembly optical film 200 is formed with the assembly gap S3 that the user cannot observe with the naked eye, thereby facilitating the production of the embossing mask 1.
換個角度來說,本實施例所提供的所述組版式光學膜200是具有不同於以往的構造,其更利於所述壓印光罩1的生產製造、進而有助於其推廣與量產。再者,本實施例所提供的所述壓印光罩1或其製造方法,其能夠以所述長形組版縫隙S13來組合出所述單位圖案130,據以有效地降低所述壓印光罩1的製造難度,並能用來形成無法以肉眼觀察到所述組版縫隙S3的所述單位膜層3。 From another perspective, the assembly type optical film 200 provided in this embodiment has a different structure from the previous one, which is more conducive to the production and manufacturing of the embossing mask 1, and further helps its promotion and mass production. Furthermore, the embossing mask 1 or its manufacturing method provided in this embodiment can assemble the unit pattern 130 with the elongated assembly slit S13, thereby effectively reducing the manufacturing difficulty of the embossing mask 1, and can be used to form the unit film layer 3 where the assembly slit S3 cannot be observed with the naked eye.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的專利範圍內。 The above disclosed contents are only the preferred feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the contents of the specification and drawings of the present invention are included in the patent scope of the present invention.
1:壓印光罩 1: Imprinting mask
11:基材 11: Base material
111:穿透區塊 111: Penetration block
112:對位區塊 112: Alignment block
113:非穿透區塊 113: Non-penetrating block
12:光罩對位標記 12: Mask alignment mark
13:壓印層 13: Embossing layer
130:單位圖案 130:Unit pattern
130-1:第一圖案 130-1: The first pattern
130-2:第二圖案 130-2: Second pattern
131:第一外邊緣 131: First outer edge
132:第二外邊緣 132: Second outer edge
133:上側邊緣 133: Upper edge
133-1:第一上側邊緣 133-1: First upper edge
133-2:第二上側邊緣 133-2: Second upper edge
134:下側邊緣 134: Lower edge
134-1:第一下側邊緣 134-1: First lower edge
134-2:第二下側邊緣 134-2: Second lower edge
135:反光壓印部 135: Reflective embossing unit
136:第一內邊緣 136: First inner edge
137:第二內邊緣 137: Second inner edge
S100:準備步驟 S100: Preparation steps
S13:長形組版縫隙 S13: Long-shaped assembly seam
D1:第一方向 D1: First direction
D2:第二方向 D2: Second direction
H:高度方向 H: height direction
M:光罩 M: Mask
UV:曝光紫外線 UV: ultraviolet light exposure
Claims (10)
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| TW112131073A TWI863515B (en) | 2023-08-18 | 2023-08-18 | Manufacturing method of embossing mask |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11048175B2 (en) * | 2017-08-28 | 2021-06-29 | Asml Holding N.V. | Apparatus for and method cleaning a support inside a lithography apparatus |
| US20210223690A1 (en) * | 2014-12-19 | 2021-07-22 | Canon Kabushiki Kaisha | Photocurable composition for imprint, method for producing film using the same, method for producing optical component using the same, method for producing circuit board using the same, and method for producing electronic component using the same |
| CN114114829A (en) * | 2020-08-26 | 2022-03-01 | 佳能株式会社 | Imprint apparatus and method of manufacturing article |
| TW202248751A (en) * | 2020-12-29 | 2022-12-16 | 南韓商吉佳藍科技股份有限公司 | Apparatus and method for manufacturing pattern substrate, computer-readable recording medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210223690A1 (en) * | 2014-12-19 | 2021-07-22 | Canon Kabushiki Kaisha | Photocurable composition for imprint, method for producing film using the same, method for producing optical component using the same, method for producing circuit board using the same, and method for producing electronic component using the same |
| US11048175B2 (en) * | 2017-08-28 | 2021-06-29 | Asml Holding N.V. | Apparatus for and method cleaning a support inside a lithography apparatus |
| CN114114829A (en) * | 2020-08-26 | 2022-03-01 | 佳能株式会社 | Imprint apparatus and method of manufacturing article |
| TW202248751A (en) * | 2020-12-29 | 2022-12-16 | 南韓商吉佳藍科技股份有限公司 | Apparatus and method for manufacturing pattern substrate, computer-readable recording medium |
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