TWI862593B - Structure for a quantum dot barrier rib and process for preparing the same - Google Patents
Structure for a quantum dot barrier rib and process for preparing the same Download PDFInfo
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- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G03F7/2012—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
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Abstract
Description
本發明關於用於量子點阻擋肋之結構(該結構滿足如高遮光特性和低反射率這樣的特徵)及其製備方法。The present invention relates to a structure for quantum dot barrier ribs, which structure satisfies characteristics such as high light shielding property and low reflectivity, and a method for preparing the same.
近年來,對採用量子點(QD)的各種電子器件之興趣增加了。In recent years, there has been increased interest in various electronic devices employing quantum dots (QDs).
量子點係作為具有約10 nm或更小的直徑的半導體材料的奈米晶體產生量子約束作用之材料。儘管它們由成千上萬或更多的電子構成,但大多數電子都牢固地結合到原子核上,使得未結合的自由電子的數量限制為約1到100。在此種情況下,不連續地限制電子的能級以顯示與形成連續帶的塊體狀態的半導體的那些不同之電和光學特徵。該等量子點即使在不改變材料類型的情況下也能夠藉由對每個粒徑產生不同長度的光波長來產生各種顏色。由於與常規光發射體相比,它們具有高色純度和光安全性的優點,因此它們目前用於如顯示器、太陽能電池、生物感測器和照明設備等各個領域中,並且作為下一代發光裝置引起關注。Quantum dots are materials that produce quantum confinement as nanocrystals of semiconductor materials with a diameter of about 10 nm or less. Although they are composed of thousands or more electrons, most of them are firmly bound to atomic nuclei, so that the number of unbound free electrons is limited to about 1 to 100. In this case, the energy levels of electrons are confined discontinuously to show electrical and optical characteristics different from those of semiconductors in bulk states forming continuous bands. These quantum dots can produce various colors by generating light wavelengths of different lengths for each particle size even without changing the material type. Since they have the advantages of high color purity and light safety compared to conventional light emitters, they are currently used in various fields such as displays, solar cells, biosensors, and lighting equipment, and are attracting attention as next-generation light-emitting devices.
圖1係說明典型的量子點裝置之示意圖。參考圖1,量子點裝置的基底結構(100)包括透明基底(110)和阻擋肋(120),形成該阻擋肋以分隔透明基底(110)上的區域。不同的量子點溶液,即,第一量子點溶液(130)、第二量子點溶液(140)、和第三量子點溶液(150)存在於對應的分隔區域。第一量子點溶液(130)、第二量子點溶液(140)、和第三量子點溶液(150)由具有不同能級的量子點構成。即,當操縱量子點的尺寸或材料時,它們被配置成具有不同的發射波長帶。FIG1 is a schematic diagram illustrating a typical quantum dot device. Referring to FIG1 , the base structure (100) of the quantum dot device includes a transparent substrate (110) and a barrier rib (120), which is formed to separate regions on the transparent substrate (110). Different quantum dot solutions, i.e., a first quantum dot solution (130), a second quantum dot solution (140), and a third quantum dot solution (150), exist in corresponding separation regions. The first quantum dot solution (130), the second quantum dot solution (140), and the third quantum dot solution (150) are composed of quantum dots with different energy levels. That is, when the size or material of the quantum dots is manipulated, they are configured to have different emission wavelength bands.
在此,阻擋肋(120)不僅發揮遮光作用,而且還發揮防止排放到分隔區域的各種顏色的組成物混合的作用。通常,它可以由光敏樹脂組成物形成為膜。Here, the blocking rib (120) not only plays a light shielding role, but also plays a role in preventing the various colored compositions discharged into the partition area from mixing. Generally, it can be formed into a film from a photosensitive resin composition.
在此種情況下,所使用的光敏樹脂組成物應該能夠防止由圖元之間的光洩漏引起的對比度和色純度之劣化。近年來(期間積極地進行對量子點裝置的研究),對於優異的圖案特徵、低反射率和高遮光特性方面的增強的性能存在要求。此外,為了應用於量子點裝置,必須實現均勻的膜和適當的膜厚度以保持優異的解析度。例如,如果膜不均勻或膜厚度太小,則其不適用於阻擋肋,使得量子點溶液可能溢出阻擋肋,導致顏色混合或解析度下降。如果為了解決此問題而藉由將光敏樹脂組成物厚塗並將其固化來調節膜厚度,則難以實現均勻的塗覆,由此存在可能產生污點或污染之問題。In this case, the photosensitive resin composition used should be able to prevent the deterioration of contrast and color purity caused by light leakage between picture elements. In recent years (during which research on quantum dot devices has been actively conducted), there has been a demand for enhanced performance in terms of excellent pattern characteristics, low reflectivity, and high light-shielding characteristics. In addition, for application to quantum dot devices, a uniform film and an appropriate film thickness must be achieved to maintain excellent resolution. For example, if the film is not uniform or the film thickness is too small, it is not suitable for use with barrier ribs, so that the quantum dot solution may overflow the barrier ribs, resulting in color mixing or reduced resolution. If the film thickness is adjusted by thickly applying the photosensitive resin composition and curing it in order to solve this problem, it is difficult to achieve uniform coating, and thus there is a problem that stains or contamination may occur.
發明之詳細說明 技術問題 因此,本發明旨在提供用於量子點阻擋肋之結構(該結構滿足如高遮光特性和低反射率這樣的特徵,同時解析度和圖案特徵保持為優異的)以及其製備方法。問題之解決方案 Detailed description of the invention Technical problem Therefore, the present invention aims to provide a structure for quantum dot barrier ribs (the structure satisfies characteristics such as high light shielding characteristics and low reflectivity while maintaining excellent resolution and pattern characteristics) and a method for preparing the same. Solution to the problem
為了實現以上目標,本發明提供了一種用於量子點阻擋肋之結構,該結構包括由光敏樹脂組成物形成的固化膜,該光敏樹脂組成物包含 (A) 共聚物;(B) 可光聚合化合物;(C) 光聚合引發劑;以及(D) 包含黑色著色劑的著色劑,To achieve the above objectives, the present invention provides a structure for quantum dot barrier ribs, the structure comprising a cured film formed from a photosensitive resin composition, the photosensitive resin composition comprising (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; and (D) a colorant comprising a black colorant.
其中該用於量子點阻擋肋之結構具有6 μm或更大的總厚度以及0.05/µm至2.0/µm的光學密度,並且在550 nm的波長下藉由SCI(包括鏡面反射分量)方法測量的反射率RSCI 和藉由SCE(不包括鏡面反射分量)方法測量的反射率RSCE 分別滿足以下關係式: (關係式1)RSCI ≤ 5.0% (關係式2)RSCE ≤ 0.5% (關係式3)2 ≤ RSCE /RSCI ≤10。The structure for quantum dot barrier ribs has a total thickness of 6 μm or greater and an optical density of 0.05/µm to 2.0/µm, and the reflectivity R SCI measured by the SCI (including the mirror reflection component) method and the reflectivity R SCE measured by the SCE (excluding the mirror reflection component) method at a wavelength of 550 nm respectively satisfy the following relationships: (Relationship 1) R SCI ≤ 5.0% (Relationship 2) R SCE ≤ 0.5% (Relationship 3) 2 ≤ R SCE /R SCI ≤10.
為了實現另一個目標,本發明提供了一種用於量子點阻擋肋之結構,該結構包含由第一光敏樹脂組成物形成的第一固化膜和在該第一固化膜上由第二光敏樹脂組成物形成的第二固化膜,To achieve another object, the present invention provides a structure for quantum dot barrier ribs, the structure comprising a first cured film formed of a first photosensitive resin composition and a second cured film formed of a second photosensitive resin composition on the first cured film.
其中該第一光敏樹脂組成物、該第二光敏樹脂組成物或兩者包含 (A) 共聚物;(B) 可光聚合化合物;(C) 光聚合引發劑;和 (D) 包含黑色著色劑的著色劑,並且該結構具有6 µm或更大的總厚度。wherein the first photosensitive resin composition, the second photosensitive resin composition, or both comprise (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; and (D) a colorant comprising a black colorant, and the structure has a total thickness of 6 µm or greater.
此外,為了實現另一個目標,本發明提供了一種用於製備用於量子點阻擋肋之結構之方法,該方法包括在基底上塗覆第一光敏樹脂組成物並且將其固化以形成第一固化膜;在該第一固化膜上塗覆第二光敏樹脂組成物並且將其固化以形成第二固化膜;並且使包含該第一固化膜和該第二固化膜的多層固化膜曝光和顯影以形成圖案並且然後將其固化,其中該第一光敏樹脂組成物、該第二光敏樹脂組成物或二者包含 (A) 共聚物;(B) 可光聚合化合物;(C) 光聚合引發劑;和 (D) 包含黑色著色劑的著色劑。本發明之有利效果 In addition, in order to achieve another object, the present invention provides a method for preparing a structure for quantum dot blocking ribs, the method comprising coating a first photosensitive resin composition on a substrate and curing it to form a first cured film; coating a second photosensitive resin composition on the first cured film and curing it to form a second cured film; and exposing and developing a multilayer cured film comprising the first cured film and the second cured film to form a pattern and then curing it, wherein the first photosensitive resin composition, the second photosensitive resin composition, or both comprise (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; and (D) a colorant comprising a black colorant. Advantageous Effects of the Invention
本發明之用於量子點阻擋肋之結構包括具有均勻的膜厚度和適當的膜厚度範圍的固化膜。在此,減小藉由SCI(包括鏡面反射分量)方法測量的反射率RSCI 和藉由SCE(不包括鏡面反射分量)方法測量的反射率RSCE ,並且將它們之間的比率(RSCE /RSCI )進行適當調節,使得可以同時滿足如高遮光特性和低反射率這樣的特徵,同時解析度和圖案特徵保持為優異的。 此外,當製備該用於量子點阻擋肋之結構時,可以在單個顯影過程中形成具有適合於該量子點阻擋肋的均勻膜厚度的多層圖案。因此,其可以有利地用於量子點顯示器。The structure for quantum dot barrier ribs of the present invention includes a cured film having a uniform film thickness and an appropriate film thickness range. Here, the reflectivity R SCI measured by the SCI (including the specular reflection component) method and the reflectivity R SCE measured by the SCE (excluding the specular reflection component) method are reduced, and the ratio ( RSCE / RSCI ) therebetween is appropriately adjusted, so that characteristics such as high light shielding characteristics and low reflectivity can be satisfied at the same time, while the resolution and pattern characteristics are kept excellent. In addition, when the structure for quantum dot barrier ribs is prepared, a multi-layer pattern having a uniform film thickness suitable for the quantum dot barrier ribs can be formed in a single development process. Therefore, it can be advantageously used for quantum dot displays.
進行本發明之最佳模式 本發明不受限於下面描述的那些。相反,只要不改變本發明之主旨,可以將其修改為各種形式。 Best Mode for Carrying Out the Invention The present invention is not limited to those described below. Instead, it can be modified into various forms as long as the gist of the present invention is not changed.
貫穿本說明書,除非另外明確說明,否則當零件被稱為「包括「一種要素時,應當理解,可以包括其他要素,而不是排除其他要素。此外,除非另外明確說明,否則本文所用的與組分的量、反應條件等有關的所有數字和表述應理解為由術語「約「修飾。Throughout this specification, unless expressly stated otherwise, when a part is referred to as “comprising” an element, it should be understood that other elements may be included rather than excluded. Furthermore, unless expressly stated otherwise, all numbers and expressions related to the amounts of components, reaction conditions, etc. used herein should be understood as being modified by the term “about”.
用於量子點阻擋肋之結構可以包括由光敏樹脂組成物形成的固化膜,該光敏樹脂組成物包含 (A) 共聚物;(B) 可光聚合化合物;(C) 光聚合引發劑;以及 (D) 包含黑色著色劑的著色劑。在此種情況下,該光敏樹脂組成物可以任性地進一步包含選自由以下組成之群組中的至少一種:(E) 表面活性劑、(F) 添加劑、以及 (G) 溶劑。The structure for quantum dot barrier ribs may include a cured film formed of a photosensitive resin composition, the photosensitive resin composition comprising (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; and (D) a colorant including a black colorant. In this case, the photosensitive resin composition may arbitrarily further comprise at least one selected from the group consisting of: (E) a surfactant, (F) an additive, and (G) a solvent.
根據實施方式,用於量子點阻擋肋之結構具有6 μm或更大的總厚度和0.05/µm至2.0/µm的光學密度。在550 nm的透射率可以使用光學密度計(由Xlite公司製造的361T)測量以獲得用於量子點阻擋肋之結構的基於1 µm的厚度的光學密度(OD,單位:/µm)。According to an embodiment, the structure for quantum dot blocking ribs has a total thickness of 6 μm or more and an optical density of 0.05/μm to 2.0/μm. The transmittance at 550 nm can be measured using an optical densitometer (361T manufactured by Xlite Corporation) to obtain the optical density (OD, unit: /μm) of the structure for quantum dot blocking ribs based on a thickness of 1 μm.
此外,在用於量子點阻擋肋之結構中,在360 nm至740 nm、或550 nm的波長下藉由SCI(包括鏡面反射分量)方法測量的反射率RSCI 和藉由SCE(不包括鏡面反射分量)方法測量的反射率RSCE 可以分別滿足以下關係式。 (關係式1)RSCI ≤ 5.0% (關係式2)RSCE ≤ 0.5% (關係式3)2 ≤ RSCE /RSCI ≤ 10。In addition, in the structure for quantum dot barrier ribs, the reflectivity R SCI measured by the SCI (including the mirror reflection component) method and the reflectivity R SCE measured by the SCE (excluding the mirror reflection component) method at a wavelength of 360 nm to 740 nm, or 550 nm can respectively satisfy the following relationships. (Relationship 1) R SCI ≤ 5.0% (Relationship 2) R SCE ≤ 0.5% (Relationship 3) 2 ≤ R SCE /R SCI ≤ 10.
RSCI 係指總反射率,其包括入射到物體表面並以相同角度反射的光的鏡面反射,以及在各個方向上散射和反射而沒有鏡面反射的散射反射。RSCE 僅是指散射反射,即,從中減去鏡面反射的總反射率。 RSCI refers to the total reflectance, which includes specular reflection of light incident on the surface of an object and reflected at the same angle, and diffuse reflection of light scattered and reflected in various directions without specular reflection. RSCE refers only to diffuse reflection, that is, the total reflectance from which specular reflection is subtracted.
在下文中,將詳細解釋光敏樹脂組成物之各組分。In the following, each component of the photosensitive resin composition will be explained in detail.
如本文中使用的,術語「(甲基)丙烯醯基「係指「丙烯醯基「和/或「甲基丙烯醯基「,並且術語「(甲基)丙烯酸酯「係指「丙烯酸酯「和/或「甲基丙烯酸酯「。As used herein, the term “(meth)acryl” refers to “acryl” and/or “methacryl”, and the term “(meth)acrylate” refers to “acrylate” and/or “methacrylate”.
藉由凝膠滲透層析法(GPC,洗脫液:四氫呋喃)參照聚苯乙烯標準品測量如下所述之各組分的重量平均分子量(克/莫耳,Da)。(A) 共聚物 The weight average molecular weight (g/mol, Da) of each component described below was measured by gel permeation chromatography (GPC, eluent: tetrahydrofuran) with reference to polystyrene standards. (A) Copolymer
在本發明中使用的共聚物 (A) 可以包含選自由以下組成之群組的至少兩種結構單元:(a-1) 衍生自烯鍵式不飽和羧酸、烯鍵式不飽和羧酸酐或其組合的結構單元、(a-2) 衍生自含有芳族環的烯鍵式不飽和化合物的結構單元、(a-3) 衍生自含有環氧基團的烯鍵式不飽和化合物的結構單元、以及 (a-4) 不同於 (a-1)、(a-2) 和 (a-3) 的衍生自烯鍵式不飽和化合物的結構單元。The copolymer (A) used in the present invention may contain at least two structural units selected from the group consisting of: (a-1) structural units derived from ethylenically unsaturated carboxylic acids, ethylenically unsaturated carboxylic acid anhydrides or combinations thereof, (a-2) structural units derived from ethylenically unsaturated compounds containing aromatic rings, (a-3) structural units derived from ethylenically unsaturated compounds containing epoxy groups, and (a-4) structural units derived from ethylenically unsaturated compounds different from (a-1), (a-2) and (a-3).
根據實施方式,共聚物 (A) 可以包含結構單元 (a-1) 和 (a-4)。According to the embodiment, the copolymer (A) may include structural units (a-1) and (a-4).
根據另一個實施方式,共聚物 (A) 可以包含結構單元 (a-1)、(a-2) 和 (a-4)。According to another embodiment, the copolymer (A) may include structural units (a-1), (a-2) and (a-4).
根據另一個實施方式,共聚物 (A) 可以包含結構單元 (a-1)、(a-3) 和 (a-4)。According to another embodiment, the copolymer (A) may include structural units (a-1), (a-3) and (a-4).
根據另一個實施方式,共聚物 (A) 可以包含結構單元 (a-1)、(a-2) 和 (a-3)。According to another embodiment, the copolymer (A) may comprise structural units (a-1), (a-2) and (a-3).
根據另一個實施方式,共聚物 (A) 可以包含結構單元 (a-1)、(a-2)、(a-3) 和 (a-4)。According to another embodiment, the copolymer (A) may include structural units (a-1), (a-2), (a-3) and (a-4).
共聚物 (A) 係用於顯影性的鹼溶性樹脂,並且還可以起到塗覆時用於形成膜的基材和用於形成最終圖案的結構的作用。 (a-1) 衍生自烯鍵式不飽和羧酸、烯鍵式不飽和羧酸酐或其組合的結構單元The copolymer (A) is an alkaline-soluble resin for development and can also serve as a base material for forming a film during coating and a structure for forming a final pattern. (a-1) Structural units derived from ethylenically unsaturated carboxylic acids, ethylenically unsaturated carboxylic anhydrides or combinations thereof
結構單元 (a-1) 衍生自烯鍵式不飽和羧酸、烯鍵式不飽和羧酸酐或其組合。烯鍵式不飽和羧酸和烯鍵式不飽和羧酸酐係在分子中含有至少一個羧基的可聚合不飽和單體。其具體實例可以包括不飽和單羧酸,如(甲基)丙烯酸、巴豆酸、α-氯代丙烯酸和肉桂酸;不飽和二羧酸及其酸酐,如馬來酸、馬來酸酐、富馬酸、衣康酸、衣康酸酐、檸康酸、檸康酸酐和中康酸;三價或更高價的不飽和多羧酸及其酸酐;以及二價或更高價的多羧酸的單[(甲基)丙烯醯氧基烷基]酯,如單[2-(甲基)丙烯醯氧基乙基]琥珀酸酯、單[2-(甲基)丙烯醯氧基乙基]鄰苯二甲酸酯等。衍生自以上示例性化合物的結構單元可單獨或以兩種或更多種的組合包含在共聚物中。The structural unit (a-1) is derived from an ethylenically unsaturated carboxylic acid, an ethylenically unsaturated carboxylic anhydride or a combination thereof. The ethylenically unsaturated carboxylic acid and the ethylenically unsaturated carboxylic anhydride are polymerizable unsaturated monomers containing at least one carboxyl group in the molecule. Specific examples thereof may include unsaturated monocarboxylic acids such as (meth) acrylic acid, crotonic acid, α-chloroacrylic acid, and cinnamic acid; unsaturated dicarboxylic acids and anhydrides thereof such as maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, liconic acid, liconic anhydride, and mesaconic acid; trivalent or higher valent unsaturated polycarboxylic acids and anhydrides thereof; and mono[(meth)acryloyloxyalkyl]esters of divalent or higher valent polycarboxylic acids such as mono[2-(meth)acryloyloxyethyl]succinate, mono[2-(meth)acryloyloxyethyl]phthalate, etc. The structural units derived from the above exemplary compounds may be contained in the copolymer alone or in combination of two or more.
基於構成共聚物 (A) 的結構單元的總莫耳,結構單元 (a-1) 的量可為5至65莫耳%、或10至50莫耳%。在以上範圍內,它可以具有有利的顯影性。 (a-2) 衍生自含有芳族環的烯鍵式不飽和化合物的結構單元The amount of the structural unit (a-1) may be 5 to 65 mol%, or 10 to 50 mol%, based on the total mole of the structural units constituting the copolymer (A). Within the above range, it may have favorable developing properties. (a-2) Structural units derived from an ethylenically unsaturated compound containing an aromatic ring
結構單元 (a-2) 衍生自含有芳族環的烯鍵式不飽和化合物。含有芳族環的烯鍵式不飽和化合物的具體實例可以包括(甲基)丙烯酸苯酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸2-苯氧基乙酯、苯氧基二乙二醇(甲基)丙烯酸酯、對壬基苯氧基聚乙二醇(甲基)丙烯酸酯、對壬基苯氧基聚丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸三溴苯酯;苯乙烯;含有烷基取代基的苯乙烯,如甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、三乙基苯乙烯、丙基苯乙烯、丁基苯乙烯、己基苯乙烯、庚基苯乙烯和辛基苯乙烯;含有鹵素的苯乙烯,如氟苯乙烯、氯苯乙烯、溴苯乙烯和碘苯乙烯;含有烷氧基取代基的苯乙烯,如甲氧基苯乙烯、乙氧基苯乙烯和丙氧基苯乙烯;4-羥基苯乙烯、對羥基-α-甲基苯乙烯、乙醯基苯乙烯;以及乙烯基甲苯、二乙烯基苯、乙烯基苯酚、鄰乙烯基苄基甲醚、間乙烯基苄基甲醚、對乙烯基苄基甲醚、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水甘油醚等。衍生自以上示例性化合物的結構單元可單獨或以兩種或更多種的組合包含在共聚物中。為了組成物的可聚合性,衍生自苯乙烯化合物的結構單元在該等實例之中是較佳的。The structural unit (a-2) is derived from an ethylenically unsaturated compound containing an aromatic ring. Specific examples of the ethylenically unsaturated compound containing an aromatic ring may include phenyl (meth)acrylate, benzyl (meth)acrylate, 2-phenoxyethyl (meth)acrylate, phenoxydiethylene glycol (meth)acrylate, p-nonylphenoxypolyethylene glycol (meth)acrylate, p-nonylphenoxypolypropylene glycol (meth)acrylate, tribromophenyl (meth)acrylate; styrene; styrene containing an alkyl substituent such as methylstyrene, dimethylstyrene, trimethylstyrene, ethylstyrene, diethylstyrene, triethylstyrene, propylstyrene, butylstyrene, Hexylstyrene, heptylstyrene and octylstyrene; halogen-containing styrenes such as fluorostyrene, chlorostyrene, bromostyrene and iodostyrene; alkoxy-substituent-containing styrenes such as methoxystyrene, ethoxystyrene and propoxystyrene; 4-hydroxystyrene, p-hydroxy-α-methylstyrene, acetylstyrene; and vinyltoluene, divinylbenzene, vinylphenol, o-vinylbenzyl methyl ether, m-vinylbenzyl methyl ether, p-vinylbenzyl methyl ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, etc. The structural units derived from the above exemplary compounds may be contained in the copolymer alone or in combination of two or more. For the polymerizability of the composition, the structural units derived from styrene compounds are preferred among the examples.
基於構成共聚物 (A) 的結構單元的總莫耳,結構單元 (a-2) 的量可為1至50莫耳%、或3至40莫耳%。在以上範圍內,其在耐化學性方面可能是更有利的。 (a-3) 衍生自含有環氧基團的烯鍵式不飽和化合物的結構單元The amount of the structural unit (a-2) may be 1 to 50 mol%, or 3 to 40 mol%, based on the total mole of the structural units constituting the copolymer (A). Within the above range, it may be more advantageous in terms of chemical resistance. (a-3) Structural units derived from an ethylenically unsaturated compound containing an epoxy group
結構單元 (a-3) 衍生自含有環氧基團的烯鍵式不飽和化合物。含有環氧基團的烯鍵式不飽和化合物的具體實例可以包括(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸4,5-環氧戊酯、(甲基)丙烯酸5,6-環氧己酯、(甲基)丙烯酸6,7-環氧庚酯、(甲基)丙烯酸2,3-環氧環戊酯、(甲基)丙烯酸3,4-環氧環己酯、丙烯酸α-乙基縮水甘油酯、丙烯酸α-正丙基縮水甘油酯、丙烯酸α-正丁基縮水甘油酯、N-(4-(2,3-環氧丙氧基)-3,5-二甲基苄基)丙烯醯胺、N-(4-(2,3-環氧丙氧基)-3,5-二甲基苯基丙基)丙烯醯胺、4-羥丁基(甲基)丙烯酸酯縮水甘油醚、4-羥丁基丙烯酸酯縮水甘油醚、烯丙基縮水甘油醚、2-甲基烯丙基縮水甘油醚等。衍生自以上示例性化合物的結構單元可單獨或以兩種或更多種的組合包含在共聚物中。從可共聚性和固化膜強度的增強的視角,選自衍生自以上之中的(甲基)丙烯酸縮水甘油酯、4-羥丁基丙烯酸酯縮水甘油醚以及4-羥丁基(甲基)丙烯酸酯縮水甘油醚的結構單元中的至少一種係更較佳的。The structural unit (a-3) is derived from an ethylenically unsaturated compound containing an epoxy group. Specific examples of the ethylenically unsaturated compound containing an epoxy group may include glycidyl (meth)acrylate, 3,4-epoxybutyl (meth)acrylate, 4,5-epoxypentyl (meth)acrylate, 5,6-epoxyhexyl (meth)acrylate, 6,7-epoxyheptyl (meth)acrylate, 2,3-epoxycyclopentyl (meth)acrylate, 3,4-epoxycyclohexyl (meth)acrylate, α-ethyl glycidyl ... α-n-propyl glycidyl acrylate, α-n-butyl glycidyl acrylate, N-(4-(2,3-epoxypropoxy)-3,5-dimethylbenzyl) acrylamide, N-(4-(2,3-epoxypropoxy)-3,5-dimethylphenylpropyl) acrylamide, 4-hydroxybutyl (meth) acrylate glycidyl ether, 4-hydroxybutyl acrylate glycidyl ether, allyl glycidyl ether, 2-methylallyl glycidyl ether, etc. The structural units derived from the above exemplary compounds may be included in the copolymer alone or in combination of two or more. From the viewpoint of enhancement of copolymerizability and cured film strength, at least one selected from structural units derived from glycidyl (meth)acrylate, 4-hydroxybutyl acrylate glycidyl ether and 4-hydroxybutyl (meth)acrylate glycidyl ether among the above is more preferred.
基於構成共聚物 (A) 的結構單元的總莫耳,結構單元 (a-3) 的量可為1至40莫耳%、或5至20莫耳%。在以上範圍內,在方法過程中的殘留物和預烘烤時的裕度方面可能是更有利的。 (a-4) 不同於 (a-1)、(a-2) 和 (a-3) 的衍生自烯鍵式不飽和化合物的結構單元The amount of the structural unit (a-3) may be 1 to 40 mol%, or 5 to 20 mol%, based on the total mole of the structural units constituting the copolymer (A). Within the above range, it may be more advantageous in terms of residues during the process and margin during prebaking. (a-4) Structural units derived from ethylenically unsaturated compounds other than (a-1), (a-2) and (a-3)
在本發明中使用的共聚物 (A) 除了 (a-1)、(a-2) 和 (a-3) 之外可以進一步包含不同於 (a-1)、(a-2) 和 (a-3) 的衍生自烯鍵式不飽和化合物的結構單元。The copolymer (A) used in the present invention may further contain a structural unit derived from an ethylenically unsaturated compound other than (a-1), (a-2) and (a-3) in addition to (a-1), (a-2) and (a-3).
不同於結構單元 (a-1)、(a-2) 和 (a-3) 的衍生自烯鍵式不飽和化合物的結構單元的具體實例可以包括不飽和羧酸酯,如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸三級丁酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸乙基己酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸羥乙酯、(甲基)丙烯酸2-羥丙酯、(甲基)丙烯酸2-羥基-3-氯丙酯、(甲基)丙烯酸4-羥丁酯、(甲基)丙烯酸甘油酯、α-羥甲基丙烯酸甲酯、α-羥甲基丙烯酸乙酯、α-羥甲基丙烯酸丙酯、α-羥甲基丙烯酸丁酯、(甲基)丙烯酸2-甲氧基乙酯、(甲基)丙烯酸3-甲氧基丁酯、乙氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基三丙二醇(甲基)丙烯酸酯、聚(乙二醇)甲醚(甲基)丙烯酸酯、(甲基)丙烯酸三氟乙酯、三氟(甲基)丙烯酸酯、(甲基)丙烯酸四氟丙酯、(甲基)丙烯酸六氟異丙酯、(甲基)丙烯酸八氟戊酯、(甲基)丙烯酸十七氟癸酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊氧基乙酯、和(甲基)丙烯酸二環戊烯基氧基乙酯;含有N-乙烯基的三級胺,如N-乙烯基吡咯啶酮、N-乙烯基咔唑和N-乙烯基𠰌啉;不飽和醚,如乙烯基甲醚和乙烯基乙醚;不飽和醯亞胺,如N-苯基馬來醯亞胺、N-(4-氯苯基)馬來醯亞胺、N-(4-羥苯基)馬來醯亞胺、N-環己基馬來醯亞胺等。衍生自以上示例性化合物的結構單元可單獨或以兩種或更多種的組合包含在共聚物中。Specific examples of the structural unit derived from an ethylenically unsaturated compound other than the structural units (a-1), (a-2) and (a-3) may include unsaturated carboxylic acid esters such as methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, dimethylaminoethyl (meth)acrylate, isobutyl (meth)acrylate, tertiary butyl (meth)acrylate, cyclohexyl (meth)acrylate, ethylhexyl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, hydroxyethyl (meth)acrylate, (meth)acrylate, 2-Hydroxypropyl (meth)acrylate, 2-Hydroxy-3-chloropropyl (meth)acrylate, 4-Hydroxybutyl (meth)acrylate, Glycerol (meth)acrylate, Methyl α-hydroxymethacrylate, Ethyl α-hydroxymethacrylate, Propyl α-hydroxymethacrylate, Butyl α-hydroxymethacrylate, 2-Methoxyethyl (meth)acrylate, 3-Methoxybutyl (meth)acrylate, Ethoxydiethylene glycol (meth)acrylate, Methoxytriethylene glycol (Meth)acrylate, methoxytripropylene glycol (meth)acrylate, poly(ethylene glycol) methyl ether (meth)acrylate, trifluoroethyl (meth)acrylate, trifluoro(meth)acrylate, tetrafluoropropyl (meth)acrylate, hexafluoroisopropyl (meth)acrylate, octafluoropentyl (meth)acrylate, heptadecafluorodecyl (meth)acrylate, isobornyl (meth)acrylate, dicyclopentyl (meth)acrylate, dicyclopentenyl (meth)acrylate , dicyclopentyloxyethyl (meth)acrylate, and dicyclopentenyloxyethyl (meth)acrylate; N-vinyl-containing tertiary amines such as N-vinylpyrrolidone, N-vinylcarbazole, and N-vinylthiophene; unsaturated ethers such as vinyl methyl ether and vinyl ethyl ether; unsaturated imides such as N-phenylmaleimide, N-(4-chlorophenyl)maleimide, N-(4-hydroxyphenyl)maleimide, N-cyclohexylmaleimide, etc. The structural units derived from the above exemplary compounds may be contained in the copolymer alone or in combination of two or more.
此外,根據實施方式,結構單元 (a-4) 可以包含含氟化合物。例如,其可以包含選自(甲基)丙烯酸三氟乙酯、(甲基)丙烯酸六氟異丙酯和(甲基)丙烯酸八氟戊酯中的至少一種。In addition, according to the embodiment, the structural unit (a-4) may contain a fluorine-containing compound. For example, it may contain at least one selected from trifluoroethyl (meth)acrylate, hexafluoroisopropyl (meth)acrylate, and octafluoropentyl (meth)acrylate.
基於構成共聚物 (A) 的結構單元的總莫耳,結構單元 (a-4) 的量可以大於0至80莫耳%、或30至70莫耳%。在以上範圍內,可以保持光敏樹脂組成物的儲存穩定性,並且可以更有利地增強膜保留率。The amount of the structural unit (a-4) may be greater than 0 to 80 mol%, or 30 to 70 mol%, based on the total mol of the structural units constituting the copolymer (A). Within the above range, the storage stability of the photosensitive resin composition can be maintained, and the film retention rate can be more advantageously enhanced.
根據實施方式,具有結構單元 (a-1) 至 (a-4) 的共聚物的實例可以包括(甲基)丙烯酸/苯乙烯/(甲基)丙烯酸甲酯/(甲基)丙烯酸縮水甘油酯的共聚物、(甲基)丙烯酸/苯乙烯/(甲基)丙烯酸甲酯/(甲基)丙烯酸縮水甘油酯/N-苯基馬來醯亞胺的共聚物、(甲基)丙烯酸/苯乙烯/(甲基)丙烯酸甲酯/(甲基)丙烯酸縮水甘油酯/N-環己基馬來醯亞胺的共聚物、(甲基)丙烯酸/苯乙烯/(甲基)丙烯酸正丁酯/(甲基)丙烯酸縮水甘油酯/N-苯基馬來醯亞胺的共聚物、(甲基)丙烯酸/苯乙烯/(甲基)丙烯酸縮水甘油酯/N-苯基馬來醯亞胺的共聚物、(甲基)丙烯酸/苯乙烯/4-羥丁基丙烯酸酯縮水甘油醚/N-苯基馬來醯亞胺的共聚物等。該共聚物中的一種、兩種或更多種可以包含在光敏樹脂組成物中。According to embodiments, examples of the copolymer having structural units (a-1) to (a-4) may include a copolymer of (meth)acrylic acid/styrene/methyl (meth)acrylate/glycidyl (meth)acrylate, a copolymer of (meth)acrylic acid/styrene/methyl (meth)acrylate/glycidyl (meth)acrylate/N-phenylmaleimide, a copolymer of (meth)acrylic acid/styrene/methyl (meth)acrylate/glycidyl (meth)acrylate/N-cyclohexylmaleimide, a copolymer of (meth)acrylic acid/styrene/n-butyl (meth)acrylate/glycidyl (meth)acrylate/N-phenylmaleimide, a copolymer of (meth)acrylic acid/styrene/glycidyl (meth)acrylate/N-phenylmaleimide, a copolymer of (meth)acrylic acid/styrene/glycidyl (meth)acrylate/N-phenylmaleimide, a copolymer of (meth)acrylic acid/styrene/4-hydroxybutyl acrylate glycidyl ether/N-phenylmaleimide, and the like. One, two or more of the copolymers may be contained in the photosensitive resin composition.
根據實施方式,具有結構單元 (a-1) 至 (a-4) 的共聚物的實例可以包括(甲基)丙烯酸/(甲基)丙烯酸甲酯/三氟(甲基)丙烯酸酯/(甲基)丙烯酸丁酯的共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯/(甲基)丙烯酸三氟乙酯/(甲基)丙烯酸丁酯的共聚物、(甲基)丙烯酸/(甲基)丙烯酸甲酯/(甲基)丙烯酸六氟異丙酯/(甲基)丙烯酸丁酯的共聚物、和(甲基)丙烯酸/(甲基)丙烯酸甲酯/(甲基)丙烯酸八氟戊酯/(甲基)丙烯酸丁酯的共聚物。According to embodiments, examples of the copolymer having structural units (a-1) to (a-4) may include a copolymer of (meth)acrylic acid/methyl (meth)acrylate/trifluoro(meth)acrylate/butyl (meth)acrylate, a copolymer of (meth)acrylic acid/methyl (meth)acrylate/trifluoroethyl (meth)acrylate/butyl (meth)acrylate, a copolymer of (meth)acrylic acid/methyl (meth)acrylate/hexafluoroisopropyl (meth)acrylate/butyl (meth)acrylate, and a copolymer of (meth)acrylic acid/methyl (meth)acrylate/octafluoropentyl (meth)acrylate/butyl (meth)acrylate.
共聚物 (A) 的重量平均分子量可為4,000至20,000 Da或6,000至15,000 Da。如果共聚物 (A) 的重量平均分子量在以上範圍內,則可以有利地改進由下部圖案產生的階差(step difference),並且在顯影時的圖案輪廓可為有利的。The weight average molecular weight of the copolymer (A) may be 4,000 to 20,000 Da or 6,000 to 15,000 Da. If the weight average molecular weight of the copolymer (A) is within the above range, the step difference generated by the lower pattern may be advantageously improved, and the pattern profile at the time of development may be advantageous.
基於光敏樹脂組成物的固體含量的總重量(即,不包括溶劑的重量),整個光敏樹脂組成物中的共聚物 (A) 的量可為5至50重量%、或10至40重量%。在以上範圍內,在顯影時的圖案輪廓可為有利的,並且可以增強如膜保留率和耐化學性這樣的特性。The amount of copolymer (A) in the entire photosensitive resin composition may be 5 to 50 wt %, or 10 to 40 wt %, based on the total weight of the solid content of the photosensitive resin composition (i.e., excluding the weight of the solvent). Within the above range, the pattern profile at the time of development may be favorable, and characteristics such as film retention and chemical resistance may be enhanced.
共聚物 (A) 可以藉由向反應器中裝入自由基聚合引發劑、溶劑、和結構單元 (a-1)、(a-2)、(a-3) 和 (a-4) 中的至少兩種,隨後向其中裝入氮氣並且緩慢攪拌混合物以聚合來製備。The copolymer (A) can be prepared by charging a radical polymerization initiator, a solvent, and at least two of the structural units (a-1), (a-2), (a-3) and (a-4) into a reactor, then charging nitrogen therein and slowly stirring the mixture for polymerization.
自由基聚合引發劑可為偶氮化合物,如2,2'-偶氮雙異丁腈、2,2'-偶氮雙(2,4-二甲基戊腈)和2,2'-偶氮雙(4-甲氧基-2,4-二甲基戊腈);或過氧化苯甲醯、過氧化月桂醯、過氧化新戊酸三級丁酯、1,1-雙(三級丁基過氧基)環己烷等,但它不限於此。自由基聚合引發劑可以單獨使用或以兩種或更多種的組合使用。The radical polymerization initiator may be an azo compound such as 2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile) and 2,2'-azobis(4-methoxy-2,4-dimethylvaleronitrile); or benzoyl peroxide, lauryl peroxide, tert-butyl peroxypivalate, 1,1-bis(tert-butylperoxy)cyclohexane, etc., but it is not limited thereto. The radical polymerization initiator may be used alone or in combination of two or more.
溶劑可為在共聚物 (A) 的製備中通常使用的任何常規的溶劑並且可以包括例如丙二醇單甲醚乙酸酯(PGMEA)。(B) 可光聚合化合物 The solvent may be any conventional solvent commonly used in the preparation of the copolymer (A) and may include, for example, propylene glycol monomethyl ether acetate (PGMEA). (B) Photopolymerizable Compound
本發明中使用的可光聚合化合物 (B) 可為具有至少一個烯鍵式不飽和雙鍵的單官能或多官能酯化合物。特別地,從耐化學性的視角,它可為具有至少兩種官能基的多官能化合物。The photopolymerizable compound (B) used in the present invention may be a monofunctional or polyfunctional ester compound having at least one ethylenically unsaturated double bond. In particular, from the viewpoint of chemical resistance, it may be a polyfunctional compound having at least two functional groups.
可光聚合化合物 (B) 可以選自由以下組成之群組:二新戊四醇六丙烯酸酯、二(三羥甲基丙烷)四丙烯酸酯、乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、甘油三(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯和琥珀酸的單酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯和琥珀酸的單酯、新戊四醇三丙烯酸酯-二異氰酸六亞甲基酯(新戊四醇三丙烯酸酯和二異氰酸六亞甲基酯的反應產物)、三新戊四醇七(甲基)丙烯酸酯、三新戊四醇八(甲基)丙烯酸酯、雙酚A環氧丙烯酸酯、乙二醇單甲醚丙烯酸酯及其混合物,但它不限於此。The photopolymerizable compound (B) may be selected from the group consisting of dipentatriol hexaacrylate, di(trihydroxymethylpropane) tetraacrylate, ethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, polyethylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, glycerol tri(meth)acrylate, trihydroxymethylpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tri(meth)acrylate, ) acrylate and monoester of succinic acid, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, dipentaerythritol penta(meth)acrylate and monoester of succinic acid, pentaerythritol triacrylate-hexamethylene diisocyanate (reaction product of pentaerythritol triacrylate and hexamethylene diisocyanate), tripentaerythritol hepta(meth)acrylate, tripentaerythritol octa(meth)acrylate, bisphenol A epoxy acrylate, ethylene glycol monomethyl ether acrylate and mixtures thereof, but it is not limited thereto.
可商購的可光聚合化合物的實例可以包括 (i) 單官能(甲基)丙烯酸酯,如由東亞合成株式會社(Toagosei Co., Ltd.)製造的Aronix M-101、M-111和M-114,由日本化藥株式會社(Nippon Kayaku Co., Ltd.)製造的KAYARAD T4-110S、T-1420和T4-120S,以及由大阪有機化學工業有限公司(Osaka Yuki Kagaku Kogyo Co., Ltd.)製造的V-158和V-2311;(ii) 雙官能(甲基)丙烯酸酯,如由東亞合成株式會社製造的Aronix M-210、M-240和M-6200,由日本化藥株式會社製造的KAYARAD HDDA、HX-220和R-604,以及由大阪由岐化藥工業株式會社製造的V-260、V-312和V-335 HP;以及 (iii) 三官能和更高官能的(甲基)丙烯酸酯,如由東亞合成株式會社製造的Aronix M-309、M-400、M-403、M-405、M-450、M-7100、M-8030、M-8060和TO-1382,由日本化藥株式會社製造的KAYARAD TMPTA、DPHA和DPHA-40H,以及由大阪由岐化藥工業株式會社製造的V-295、V-300、V-360、V-GPT、V-3PA、V-400和V-802。Examples of commercially available photopolymerizable compounds may include (i) monofunctional (meth)acrylates such as Aronix M-101, M-111, and M-114 manufactured by Toagosei Co., Ltd., KAYARAD T4-110S, T-1420, and T4-120S manufactured by Nippon Kayaku Co., Ltd., and V-158 and V-2311 manufactured by Osaka Yuki Kagaku Kogyo Co., Ltd.; (ii) difunctional (meth)acrylates such as Aronix M-210, M-240, and M-6200 manufactured by Toagosei Co., Ltd., KAYARAD T4-110S, T-1420, and T4-120S manufactured by Nippon Kayaku Co., Ltd., and V-158 and V-2311 manufactured by Osaka Yuki Kagaku Kogyo Co., Ltd. HDDA, HX-220 and R-604, and V-260, V-312 and V-335 HP manufactured by Yuki Kayaku Kogyo Co., Ltd. in Osaka; and (iii) trifunctional and higher functional (meth)acrylates such as Aronix M-309, M-400, M-403, M-405, M-450, M-7100, M-8030, M-8060 and TO-1382 manufactured by Toagosei Co., Ltd., KAYARAD TMPTA, DPHA and DPHA-40H manufactured by Nippon Kayaku Co., Ltd., and V-295, V-300, V-360, V-GPT, V-3PA, V-400 and V-802 manufactured by Yuki Kayaku Kogyo Co., Ltd. in Osaka.
基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),可光聚合化合物 (B) 的量可為10至200重量份、10至150重量份、15至100重量份、或15至90重量份。如果可光聚合化合物的量在以上範圍內,則圖案顯影性和塗層特徵可為優異的同時膜保留率保持恒定。如果可光聚合化合物的量小於以上範圍,則顯影時間變得更長,這可能影響製程和殘留物。如果其超過以上範圍,則其可能導致圖案解析度變得過高的問題。(C) 光聚合引發劑 The amount of the photopolymerizable compound (B) may be 10 to 200 parts by weight, 10 to 150 parts by weight, 15 to 100 parts by weight, or 15 to 90 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). If the amount of the photopolymerizable compound is within the above range, pattern development and coating characteristics may be excellent while the film retention rate remains constant. If the amount of the photopolymerizable compound is less than the above range, the development time becomes longer, which may affect the process and residues. If it exceeds the above range, it may cause a problem that the pattern resolution becomes too high. (C) Photopolymerization Initiator
本發明中使用的光聚合引發劑 (C) 可為任何已知的光聚合引發劑。The photopolymerization initiator (C) used in the present invention may be any known photopolymerization initiator.
光聚合引發劑 (C) 可以選自由以下組成之群組:基於苯乙酮的化合物、基於非咪唑的化合物、基於三𠯤的化合物、基於鎓鹽的化合物、基於苯偶姻的化合物、基於二苯甲酮的化合物、基於多核醌的化合物、基於硫口山口星酮的化合物、基於重氮的化合物、基於醯亞胺磺酸酯的化合物、基於肟的化合物、基於咔唑的化合物、基於硼酸鋶的化合物、基於酮的化合物、以及其混合物。The photopolymerization initiator (C) may be selected from the group consisting of acetophenone-based compounds, non-imidazole-based compounds, trioxane-based compounds, onium salt-based compounds, benzoin-based compounds, benzophenone-based compounds, polynuclear quinone-based compounds, thiophenone-based compounds, diazo-based compounds, imidosulfonate-based compounds, oxime-based compounds, carbazole-based compounds, borate-based compounds, ketone-based compounds, and mixtures thereof.
具體地,基於肟的化合物、基於三𠯤的化合物或其組合可以用作光聚合引發劑 (C)。更具體地,可以使用基於肟的化合物和基於三𠯤的化合物的組合。Specifically, an oxime-based compound, a trioxime-based compound, or a combination thereof may be used as the photopolymerization initiator (C). More specifically, a combination of an oxime-based compound and a trioxime-based compound may be used.
光聚合引發劑 (C) 的具體實例可以包括2,2'-偶氮雙(2,4-二甲基戊腈)、2,2'-偶氮雙(4-甲氧基-2,4-二甲基戊腈)、過氧化苯甲醯、過氧化月桂醯、過氧化新戊酸三級丁酯、1,1-雙(三級丁基過氧基)環己烷、對二甲基胺基苯乙酮、2-苄基-2-(二甲基胺基)-1-[4-(4-𠰌啉基)苯基]-1-丁酮、2-羥基-2-甲基-1-苯基-丙-1-酮、苄基二甲基縮酮、二苯甲酮、苯偶姻丙基醚、二乙基硫口山口星酮、2,4-雙(三氯甲基)-6-對甲氧基苯基-s-三𠯤、2-三氯甲基-5-苯乙烯基-1,3,4-側氧基二唑、9-苯基吖啶、3-甲基-5-胺基-((s-三𠯤-2-基)胺基)-3-苯基香豆素、2-(鄰氯苯基)-4,5-二苯基咪唑基二聚物、1-苯基-1,2-丙二酮-2-(鄰乙氧基羰基)肟、1-[4-(苯硫基)苯基]-辛烷-l,2-二酮-2-(鄰苯甲醯基肟)、鄰苯甲醯基-4'-(苯并巰基)苯甲醯基-己基-酮肟、2,4,6-三甲基苯基羰基-二苯基膦醯基氧化物、六氟偶磷-三烷基苯基鋶鹽、2-巰基苯并咪唑、2,2'-苯并噻唑基二硫化物、2-(4-苯乙烯基苯基)-4,6-雙(三氯甲基)-1,3,5-三𠯤、2-二甲基胺基-2-(4-甲基苄基)-1-(4-𠰌啉-4-基苯基)-丁烷-1-酮、及其混合物,但它不限於此。Specific examples of the photopolymerization initiator (C) may include 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2'-azobis(4-methoxy-2,4-dimethylvaleronitrile), benzoyl peroxide, lauryl peroxide, tert-butyl peroxypivalate, 1,1-bis(tert-butylperoxy)cyclohexane, p-dimethylaminoacetophenone, 2-benzyl-2-(dimethylamino)-1-[4-(4-phenoxy)phenyl]-1-yl]-2-[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[[ [2-(trichloromethyl)-6-(p-methoxyphenyl)-s-triazine]-1-butanone, 2-hydroxy-2-methyl-1-phenyl-propan-1-one, benzyl dimethyl ketal, benzophenone, benzoin propyl ether, diethylthiocarbamate, 2,4-bis(trichloromethyl)-6-p-methoxyphenyl-s-triazine, 2-trichloromethyl-5-phenylvinyl-1,3,4-oxadiazole, 9-phenylacridine, 3-methyl-5-amino-(s-triazine-2 -yl)amino)-3-phenylcoumarin, 2-(o-chlorophenyl)-4,5-diphenylimidazolyl dimer, 1-phenyl-1,2-propanedione-2-(o-ethoxycarbonyl)oxime, 1-[4-(phenylthio)phenyl]-octane-1,2-dione-2-(o-benzoyl)oxime, o-benzoyl-4'-(benzoyl)benzoyl-hexyl-ketone oxime, 2,4,6-trimethylphenylcarbonyl The present invention also includes but is not limited to diphenylphosphinoyl oxide, hexafluorophosphinoyl-trialkylphenylphosphine salt, 2-phenylbenzimidazole, 2,2'-benzothiazolyl disulfide, 2-(4-phenylvinylphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-dimethylamino-2-(4-methylbenzyl)-1-(4-oxo-4-ylphenyl)-butane-1-one, and mixtures thereof.
供參考,可商購的基於肟的光聚合引發劑的實例包括OXE-01(巴斯夫公司(BASF))、OXE-02(巴斯夫公司)、OXE-03(巴斯夫公司)、N-1919(旭電化株式會社(ADEKA))、NCI-930(旭電化株式會社)、NCI-831(旭電化株式會社)以及SPI-03(三陽公司(Samyang))。基於三𠯤的光引發劑的實例包括2-[4-(2-苯基乙烯基)苯基]-4,6-雙(三氯甲基)-1,3,5-三𠯤(三𠯤Y,強力公司(Tronly))等。For reference, examples of commercially available oxime-based photopolymerization initiators include OXE-01 (BASF), OXE-02 (BASF), OXE-03 (BASF), N-1919 (ADEKA), NCI-930 (ADEKA), NCI-831 (ADEKA), and SPI-03 (Samyang). Examples of tris-based photoinitiators include 2-[4-(2-phenylvinyl)phenyl]-4,6-bis(trichloromethyl)-1,3,5-tris-(tris-Y, Tronly), and the like.
光聚合引發劑 (C) 可以以基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑)的0.1至10重量份、0.1至8重量份、0.5至8重量份、或0.5至6重量份的量使用。The photopolymerization initiator (C) may be used in an amount of 0.1 to 10 parts by weight, 0.1 to 8 parts by weight, 0.5 to 8 parts by weight, or 0.5 to 6 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent).
具體地,基於100重量份的共聚物 (A),0.05至4重量份的量的基於肟的化合物和/或0.05至2重量份的量的基於三𠯤的化合物可以用作光聚合引發劑。Specifically, based on 100 parts by weight of the copolymer (A), an oxime-based compound in an amount of 0.05 to 4 parts by weight and/or a trioxane-based compound in an amount of 0.05 to 2 parts by weight may be used as a photopolymerization initiator.
更具體地,基於100重量份的共聚物 (A),0.05至3.5重量份的量的基於肟的化合物和/或0.05至1.5重量份的量的基於三𠯤的化合物可以用作光聚合引發劑。如果基於肟的化合物以在以上範圍內的量使用,則可以增強顯影和塗層特徵連同高敏感性。此外,如果基於三𠯤的化合物以在以上範圍內的量使用,則可以獲得具有優異的耐化學性和形成圖案後的錐角連同高敏感性的固化膜。(D) 著色劑 More specifically, based on 100 parts by weight of the copolymer (A), an oxime-based compound in an amount of 0.05 to 3.5 parts by weight and/or a trioxane-based compound in an amount of 0.05 to 1.5 parts by weight can be used as a photopolymerization initiator. If the oxime-based compound is used in an amount within the above range, the developing and coating characteristics can be enhanced together with high sensitivity. In addition, if the trioxane-based compound is used in an amount within the above range, a cured film having excellent chemical resistance and a tapered angle after patterning together with high sensitivity can be obtained. (D) Coloring Agent
本發明之光敏樹脂組成物可以包含著色劑 (D) 以賦予其遮光特性。著色劑 (D) 可以包含黑色著色劑。The photosensitive resin composition of the present invention may contain a colorant (D) to impart light-shielding properties thereto. The colorant (D) may contain a black colorant.
該黑色著色劑可以包含選自由以下組成之群組中的至少一種:黑色有機著色劑和黑色無機著色劑。具體地,著色劑 (D) 可以包含黑色有機著色劑和黑色無機著色劑的混合物。此外,著色劑 (D) 可以僅包含黑色有機著色劑或僅包含黑色無機著色劑。The black colorant may include at least one selected from the group consisting of a black organic colorant and a black inorganic colorant. Specifically, the colorant (D) may include a mixture of a black organic colorant and a black inorganic colorant. In addition, the colorant (D) may include only a black organic colorant or only a black inorganic colorant.
此外,著色劑 (D) 可以包含除了該黑色著色劑之外的著色劑。Furthermore, the colorant (D) may contain a colorant other than the black colorant.
具體地,著色劑 (D) 可以包含黑色有機著色劑和除了黑顏料之外的著色劑。可替代地,著色劑 (D) 可以包含黑色無機著色劑和除了黑顏料之外的著色劑。可替代地,著色劑 (D) 可以包含黑色有機著色劑、黑色無機著色劑、和除了黑顏料之外的著色劑。較佳的是著色劑 (D) 具有高發色性和高耐熱性。Specifically, the colorant (D) may include a black organic colorant and a colorant other than a black pigment. Alternatively, the colorant (D) may include a black inorganic colorant and a colorant other than a black pigment. Alternatively, the colorant (D) may include a black organic colorant, a black inorganic colorant, and a colorant other than a black pigment. It is preferred that the colorant (D) has high color development and high heat resistance.
根據實施方式,著色劑 (D) 可以以1至50 : 50至99的重量比包含黑色無機著色劑和黑色有機著色劑。According to an embodiment, the colorant (D) may include a black inorganic colorant and a black organic colorant in a weight ratio of 1 to 50:50 to 99.
根據實施方式,著色劑 (D) 可以以60至90 : 10至40的重量比包含黑色有機著色劑和除了黑顏料之外的著色劑。According to an embodiment, the colorant (D) may include a black organic colorant and a colorant other than a black pigment in a weight ratio of 60 to 90:10 to 40.
根據實施方式,著色劑 (D) 可以以1至40 : 60至99的重量比包含黑色無機著色劑和除了黑顏料之外的著色劑。According to an embodiment, the colorant (D) may include a black inorganic colorant and a colorant other than a black pigment in a weight ratio of 1 to 40:60 to 99.
根據實施方式,著色劑 (D) 可以以1至50 : 30至80 : 5至40的重量比包含黑色無機著色劑、黑色有機著色劑和除了黑顏料之外的著色劑。According to an embodiment, the colorant (D) may include a black inorganic colorant, a black organic colorant, and a colorant other than a black pigment in a weight ratio of 1 to 50:30 to 80:5 to 40.
該黑色有機著色劑的具體實例可為選自由苯胺黑、內醯胺黑和苝黑組成之群組的至少一種黑色有機著色劑。具體地,可以使用含有有機黑的BK-7539(TOKUSHIKI有限公司)。在此種情況下,可以改善低反射率、高遮光特性、光學密度、介電常數等。A specific example of the black organic coloring agent may be at least one black organic coloring agent selected from the group consisting of aniline black, lactamide black and perylene black. Specifically, BK-7539 (TOKUSHIKI Co., Ltd.) containing organic black may be used. In this case, low reflectivity, high light shielding properties, optical density, dielectric constant, etc. may be improved.
具體地,黑色有機著色劑可以降低能帶隙。能帶隙越小,光反射程度越低。此外,黑色有機著色劑可以吸收在可見範圍內的所有波長範圍,這對於最小化反射率係有利的。Specifically, black organic colorants can reduce the energy band gap. The smaller the energy band gap, the lower the degree of light reflection. In addition, black organic colorants can absorb all wavelength ranges within the visible range, which is beneficial for minimizing reflectivity.
可以使用本領域已知的任何黑色無機著色劑和任何除了黑顏料之外的著色劑。例如,可以使用在色彩索引(由Society of Dyers and Colourists [染色工作者及配色師協會]刊發的)中分類為顏料的任何化合物和本領域已知的任何染料。Any black inorganic colorant known in the art and any colorant other than black pigments may be used. For example, any compound classified as a pigment in the Color Index (published by the Society of Dyers and Colourists) and any dye known in the art may be used.
黑色無機著色劑的具體實例可以包括炭黑、鈦黑、金屬氧化物如基於Cu-Fe-Mn的氧化物和合成鐵黑等。Specific examples of black inorganic colorants may include carbon black, titanium black, metal oxides such as Cu-Fe-Mn based oxides, and synthetic iron black, etc.
基於著色劑 (D) 的固體含量的總重量(即,不包括溶劑的重量),黑色有機著色劑可以以20至100重量%或40至100重量%的量使用。如果黑色有機著色劑的量在以上範圍內,則在顯影時的圖案輪廓可為有利的,並且可以增強如膜保留率這樣的特性。然而,如果基於著色劑 (D) 的固體含量的總重量,黑色有機著色劑的量小於20重量%,則可能無法獲得本發明中希望的光學密度和低反射率。The black organic colorant may be used in an amount of 20 to 100 wt % or 40 to 100 wt % based on the total weight of the solid content of the colorant (D) (i.e., excluding the weight of the solvent). If the amount of the black organic colorant is within the above range, the pattern profile at the time of development may be favorable, and characteristics such as film retention rate may be enhanced. However, if the amount of the black organic colorant is less than 20 wt % based on the total weight of the solid content of the colorant (D), the optical density and low reflectivity desired in the present invention may not be obtained.
此外,基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),黑色有機著色劑可以以3至40重量份或5至30重量份的量使用。如果黑色有機著色劑的量在以上範圍內,則在顯影時的圖案輪廓可為有利的,並且可以增強如膜保留率這樣的特性。In addition, the black organic colorant may be used in an amount of 3 to 40 parts by weight or 5 to 30 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). If the amount of the black organic colorant is within the above range, the pattern profile at the time of development may be favorable, and characteristics such as film retention rate may be enhanced.
根據實施方式,基於著色劑 (D) 的固體含量的總重量(即,不包括溶劑的重量),黑色無機著色劑可以以0至20重量%或0至10重量%、特別是0.01至20重量%或0.01至10重量%的量使用。如果黑色無機著色劑的量過多,則可能無法獲得本發明中希望的光學密度和低反射率。According to the embodiment, the black inorganic colorant can be used in an amount of 0 to 20 wt % or 0 to 10 wt %, particularly 0.01 to 20 wt % or 0.01 to 10 wt %, based on the total weight of the solid content of the colorant (D) (i.e., excluding the weight of the solvent). If the amount of the black inorganic colorant is too much, the optical density and low reflectivity desired in the present invention may not be obtained.
此外,基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),黑色無機著色劑可以以0.01至10重量份或0.02至5重量份的量使用。如果黑色無機著色劑的量在以上範圍內,則在顯影時的圖案輪廓可為有利的,並且可以增強如膜保留率這樣的特性。In addition, the black inorganic colorant may be used in an amount of 0.01 to 10 parts by weight or 0.02 to 5 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). If the amount of the black inorganic colorant is within the above range, the pattern profile at the time of development may be favorable, and characteristics such as film retention rate may be enhanced.
除了黑顏料之外的著色劑的具體實例可以包括C.I.顏料紫13、14、19、23、25、27、29、32、33、36、37和38;以及C.I.顏料藍15(15 : 3、15 : 4、15 : 6等)、16、21、28、60、64和76。具體地,除了黑顏料之外的著色劑可以包含至少一種選自以下群組的著色劑,該群組由以下組成:藍色著色劑和紫色著色劑。從降低反射率的視角,在它們之中較佳的是C.I.顏料藍15 : 6和60,或C.I.顏料紫23。Specific examples of coloring agents other than black pigments may include C.I. pigment violet 13, 14, 19, 23, 25, 27, 29, 32, 33, 36, 37 and 38; and C.I. pigment blue 15 (15: 3, 15: 4, 15: 6, etc.), 16, 21, 28, 60, 64 and 76. Specifically, the coloring agent other than black pigment may include at least one coloring agent selected from the following group, the group consisting of: blue coloring agent and purple coloring agent. From the perspective of reducing reflectivity, C.I. pigment blue 15: 6 and 60, or C.I. pigment violet 23 are preferred among them.
根據實施方式,基於著色劑 (D) 的固體含量的總重量(即,不包括溶劑的重量),藍色著色劑可以以0至50重量%或0至40重量%、特別是0.01至50重量%或0.01至40重量%的量使用。According to the implementation mode, the blue colorant can be used in an amount of 0 to 50 wt % or 0 to 40 wt %, in particular 0.01 to 50 wt % or 0.01 to 40 wt %, based on the total weight of the solid content of the colorant (D) (i.e., excluding the weight of the solvent).
此外,基於著色劑 (D) 的固體含量的總重量(即,不包括溶劑的重量),紫色著色劑可以以0至50重量%或0至40重量%、特別是0.01至50重量%或0.01至40重量%的量使用。In addition, the violet colorant may be used in an amount of 0 to 50 wt % or 0 to 40 wt %, particularly 0.01 to 50 wt % or 0.01 to 40 wt %, based on the total weight of the solid content of the colorant (D) (ie, excluding the weight of the solvent).
此外,基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),藍色著色劑可以以0.01至10重量份或0.01至8重量份的量使用。In addition, the blue coloring agent may be used in an amount of 0.01 to 10 parts by weight or 0.01 to 8 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent).
同時,基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),紫色著色劑可以以0.01至10重量份或0.01至8重量份的量使用。Meanwhile, the violet colorant may be used in an amount of 0.01 to 10 parts by weight or 0.01 to 8 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent).
如果藍色著色劑和紫色著色劑的量在以上範圍內,在顯影時的圖案輪廓可為有利的,可以增強如膜保留率和光密度這樣的特性,並且可以實現如所希望的總反射率。然而,如果藍色著色劑和紫色著色劑的量超過以上各自的範圍,則可能無法獲得本發明中希望的光學密度和低反射率。If the amount of the blue colorant and the purple colorant is within the above range, the pattern profile at the time of development may be favorable, characteristics such as film retention and optical density may be enhanced, and the desired total reflectivity may be achieved. However, if the amount of the blue colorant and the purple colorant exceeds the above respective ranges, the desired optical density and low reflectivity in the present invention may not be obtained.
基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),著色劑 (D) 可以以1至40重量份或2至30重量份的量使用。如果著色劑 (D) 的量在以上範圍內,則在顯影時的圖案輪廓可為有利的,並且可以增強如膜保留率這樣的特性。如果著色劑 (D) 的量超過以上範圍,則可能無法獲得本發明中希望的光學密度和低反射率。The colorant (D) may be used in an amount of 1 to 40 parts by weight or 2 to 30 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). If the amount of the colorant (D) is within the above range, the pattern profile at the time of development may be favorable, and characteristics such as film retention rate may be enhanced. If the amount of the colorant (D) exceeds the above range, the optical density and low reflectivity desired in the present invention may not be obtained.
本發明中使用的著色劑 (D) 可以以與分散劑、分散樹脂(或黏合劑)、溶劑等混合的形式使用以便將著色劑分散在光敏樹脂組成物中。The coloring agent (D) used in the present invention may be used in a mixed form with a dispersant, a dispersing resin (or a binder), a solvent, etc. so as to disperse the coloring agent in the photosensitive resin composition.
分散劑的實例可以包括任何已知的用於著色劑的分散劑。其具體實例可以包括陽離子表面活性劑、陰離子表面活性劑、非離子表面活性劑、兩性離子表面活性劑、基於矽的表面活性劑、基於氟的表面活性劑等。可商購的分散劑可以包括來自畢克公司(BYK Co.)的Disperbyk-182、-183、-184、-185、-2000、-2150、-2155、-2163和-2164。它們可以單獨使用或以其兩種或更多種的組合使用。分散劑可以藉由用其對著色劑進行表面處理而預先添加到著色劑中或在製備光敏樹脂組成物的時候與著色劑一起添加。Examples of dispersants may include any known dispersants for colorants. Specific examples thereof may include cationic surfactants, anionic surfactants, nonionic surfactants, amphoteric surfactants, silicon-based surfactants, fluorine-based surfactants, etc. Commercially available dispersants may include Disperbyk-182, -183, -184, -185, -2000, -2150, -2155, -2163, and -2164 from BYK Co. They may be used alone or in combination of two or more thereof. The dispersant may be pre-added to the colorant by surface treating the colorant with it or added together with the colorant when preparing the photosensitive resin composition.
此外,著色劑 (D) 可以與分散樹脂混合,然後可以將其用於光敏樹脂組成物的製備中。在此種情況下,所使用的分散樹脂可為共聚物 (A)、已知的共聚物、或其混合物。In addition, the coloring agent (D) may be mixed with a dispersing resin, which may then be used in the preparation of a photosensitive resin composition. In this case, the dispersing resin used may be the copolymer (A), a known copolymer, or a mixture thereof.
即,著色劑 (D) 可以呈著色分散液的形式。That is, the coloring agent (D) may be in the form of a coloring dispersion.
著色分散液可以藉由將著色劑 (D)、分散樹脂以及分散劑同時混合並且然後研磨它們來製備。可替代地,它可以藉由如以上描述的將著色劑 (D) 和分散劑預先混合,隨後將它們與分散樹脂混合並且研磨它們來製備。在此,進行研磨直到著色分散液的原材料的平均直徑變為50至250 nm、50至150 nm或50至110 nm。在以上範圍內,在著色分散液中沒有形成多層結構,由此可以獲得更均勻的著色分散液。The coloring dispersion can be prepared by mixing the coloring agent (D), the dispersing resin and the dispersant at the same time and then grinding them. Alternatively, it can be prepared by pre-mixing the coloring agent (D) and the dispersant as described above, then mixing them with the dispersing resin and grinding them. Here, grinding is performed until the average diameter of the raw material of the coloring dispersion becomes 50 to 250 nm, 50 to 150 nm or 50 to 110 nm. Within the above range, a multilayer structure is not formed in the coloring dispersion, thereby obtaining a more uniform coloring dispersion.
基於光敏樹脂組成物的固體含量的總重量,本發明之著色分散液可以以20至70重量%或30至60重量%的量使用。The coloring dispersion of the present invention may be used in an amount of 20 to 70 wt % or 30 to 60 wt % based on the total weight of the solid content of the photosensitive resin composition.
由包含著色劑 (D) 的光敏樹脂組成物獲得的用於量子點阻擋肋之結構可為包括兩個或更多個固化膜的多層固化膜並且可以具有6 μm或更大的總厚度。此外,用於量子點阻擋肋之結構可以實現0.05/µm至2.0/µm的光學密度。另外,在360 nm至740 nm或550 nm的波長下,藉由SCI(包括鏡面反射分量)方法測量的反射率RSCI 可為5.0%或更小、4.8%或更小、4.6%或更小、4.0%至4.8%、或4.0%至4.6%,並且藉由SCE(不包括鏡面反射分量)方法測量的反射率RSCE 可為0.5%或更小、0.4%或更小、0.1%至0.5%、0.1%至0.4%、或0.2%至0.4%。此外,RSCI 與RSCE 之間的比率(即,RSCE /RSCI )可為2至10、2至9、2至8、3至8、4至8、或4至7.5。在以上範圍內,可以滿足低反射率和高遮光特性的特徵,並且可以防止紅色、綠色等的光洩漏。如果RSCI 、RSCE 、和RSCE /RSCI 中的任何一個不在以上範圍內,則可能無法同時滿足低反射率和高遮光特性的特徵。(E) 表面活性劑 The structure for quantum dot barrier ribs obtained from the photosensitive resin composition containing the coloring agent (D) may be a multi-layered cured film including two or more cured films and may have a total thickness of 6 μm or more. In addition, the structure for quantum dot barrier ribs may achieve an optical density of 0.05/μm to 2.0/μm. In addition, at a wavelength of 360 nm to 740 nm or 550 nm, the reflectivity RSCI measured by the SCI (including the specular reflection component) method may be 5.0% or less, 4.8% or less, 4.6% or less, 4.0% to 4.8%, or 4.0% to 4.6%, and the reflectivity RSCE measured by the SCE (excluding the specular reflection component) method may be 0.5% or less, 0.4% or less, 0.1% to 0.5%, 0.1% to 0.4%, or 0.2% to 0.4%. In addition, the ratio between RSCI and RSCE (i.e., RSCE / RSCI ) may be 2 to 10, 2 to 9, 2 to 8, 3 to 8, 4 to 8, or 4 to 7.5. Within the above range, the characteristics of low reflectivity and high light shielding characteristics can be satisfied, and light leakage of red, green, etc. can be prevented. If any of RSCI , RSCE , and RSCE / RSCI is outside the above range, the characteristics of low reflectivity and high light shielding properties may not be satisfied at the same time. (E) Surfactant
本發明之光敏樹脂組成物可以進一步包含表面活性劑 (E) 以便增強塗覆性並且以防止產生缺陷。The photosensitive resin composition of the present invention may further contain a surfactant (E) in order to enhance coating properties and prevent the generation of defects.
儘管表面活性劑 (E) 的種類不特別受限制,但是例如,可以使用基於氟的表面活性劑或基於矽的表面活性劑。Although the kind of the surfactant (E) is not particularly limited, for example, a fluorine-based surfactant or a silicon-based surfactant can be used.
可商購的基於矽的表面活性劑可以包括來自道康寧東麗矽酮公司(Dow Corning Toray Silicone)的DC3PA、DC7PA、SH11PA、SH21PA和SH8400,來自GE東芝有機矽公司(GE Toshiba Silicone)的TSF-4440、TSF-4300、TSF-4445、TSF-4446、TSF-4460和TSF-4452,來自畢克公司(BYK)的BYK-333、BYK-307、BYK-3560、BYK UV-3535、BYK-361N、BYK-354和BYK-399,等等。它們可以單獨使用或以其兩種或更多種的組合使用。Commercially available silicon-based surfactants may include DC3PA, DC7PA, SH11PA, SH21PA, and SH8400 from Dow Corning Toray Silicone, TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, and TSF-4452 from GE Toshiba Silicone, BYK-333, BYK-307, BYK-3560, BYK UV-3535, BYK-361N, BYK-354, and BYK-399 from BYK, etc. They may be used alone or in combination of two or more thereof.
可商購的基於氟的表面活性劑可以包括來自日本油墨株式會社(Dainippon Ink Kagaku Kogyo Co.(DIC))的Megaface F-470、F-471、F-475、F-482、F-489和F-563。Commercially available fluorine-based surfactants may include Megaface F-470, F-471, F-475, F-482, F-489, and F-563 from Dainippon Ink Kagaku Kogyo Co. (DIC).
從組成物的塗覆性的視角,在該等表面活性劑之中較佳的可為來自畢克公司的BYK-333和BYK-307以及來自DIC的F-563。From the perspective of the coating properties of the composition, preferred among the surfactants may be BYK-333 and BYK-307 from Becker and F-563 from DIC.
基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),表面活性劑 (E) 可以以0.01至5重量份、0.1至3重量份或0.1至1重量份的量使用。如果表面活性劑的量在以上範圍內,則可以光滑地塗覆光敏樹脂組成物。(F) 添加劑 The surfactant (E) may be used in an amount of 0.01 to 5 parts by weight, 0.1 to 3 parts by weight, or 0.1 to 1 part by weight, based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). If the amount of the surfactant is within the above range, the photosensitive resin composition can be smoothly coated. (F) Additives
此外,本發明之光敏樹脂組成物可以進一步包含選自由以下組成之群組中的至少一種添加劑:環氧化合物、光鹼產生劑、硫醇化合物、以及衍生自環氧樹脂的化合物,只要光敏樹脂組成物的物理特性不受到不利影響。In addition, the photosensitive resin composition of the present invention may further comprise at least one additive selected from the group consisting of an epoxy compound, a photobase generator, a thiol compound, and a compound derived from an epoxy resin, as long as the physical properties of the photosensitive resin composition are not adversely affected.
該環氧化合物可為含有至少一個環氧基團的不飽和單體,或者係其均-低聚物或雜-低聚物。含有至少一個環氧基團的不飽和單體的實例可以包括(甲基)丙烯酸縮水甘油酯、4-羥丁基丙烯酸酯縮水甘油醚、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸4,5-環氧戊酯、(甲基)丙烯酸5,6-環氧己酯、(甲基)丙烯酸6,7-環氧庚酯、(甲基)丙烯酸2,3-環氧環戊酯、(甲基)丙烯酸3,4-環氧環己酯、丙烯酸α-乙基縮水甘油酯、丙烯酸α-正丙基縮水甘油酯、丙烯酸α-正丁基縮水甘油酯、N-(4-(2,3-環氧丙氧基)-3,5-二甲基苄基)丙烯醯胺、N-(4-(2,3-環氧丙氧基)-3,5-二甲基苯基丙基)丙烯醯胺、烯丙基縮水甘油醚、2-甲基烯丙基縮水甘油醚、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水甘油醚、或其混合物。具體地,可以使用(甲基)丙烯酸縮水甘油酯。The epoxy compound may be an unsaturated monomer containing at least one epoxy group, or a homo-oligomer or hetero-oligomer thereof. Examples of the unsaturated monomer containing at least one epoxy group may include glycidyl (meth)acrylate, 4-hydroxybutyl acrylate glycidyl ether, 3,4-epoxybutyl (meth)acrylate, 4,5-epoxypentyl (meth)acrylate, 5,6-epoxyhexyl (meth)acrylate, 6,7-epoxyheptyl (meth)acrylate, 2,3-epoxycyclopentyl (meth)acrylate, 3,4-epoxycyclohexyl (meth)acrylate, α-ethyl glycidyl acrylate, and 1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1,2-dihydro-1 Glycidyl acrylate, α-n-propyl glycidyl acrylate, α-n-butyl glycidyl acrylate, N-(4-(2,3-epoxypropoxy)-3,5-dimethylbenzyl)acrylamide, N-(4-(2,3-epoxypropoxy)-3,5-dimethylphenylpropyl)acrylamide, allyl glycidyl ether, 2-methylallyl glycidyl ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, or a mixture thereof. Specifically, glycidyl (meth)acrylate can be used.
含有至少一個環氧基團的不飽和單體的可商購均-低聚物的實例可包括MIPHOTO GHP-03HHP(甲基丙烯酸縮水甘油酯,美源商事株式會社(Miwon Commercial Co., Ltd.))。Examples of commercially available homo-oligomers of unsaturated monomers containing at least one epoxy group may include MIPHOTO GHP-03HHP (glycidyl methacrylate, Miwon Commercial Co., Ltd.).
環氧化合物可以進一步包含以下結構單元。The epoxy compound may further include the following structural units.
具體實例包括衍生自以下項的結構單元:苯乙烯;含有烷基取代基的苯乙烯,如甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、三乙基苯乙烯、丙基苯乙烯、丁基苯乙烯、己基苯乙烯、庚基苯乙烯和辛基苯乙烯;含有鹵素的苯乙烯,如氟苯乙烯、氯苯乙烯、溴苯乙烯和碘苯乙烯;含有烷氧基取代基的苯乙烯,如甲氧基苯乙烯、乙氧基苯乙烯和丙氧基苯乙烯;對羥基-α-甲基苯乙烯,乙醯基苯乙烯;含有芳族環的烯鍵式不飽和化合物,如二乙烯基苯、乙烯基苯酚、鄰乙烯基苄基甲醚、間乙烯基苄基甲醚、對乙烯基苄基甲醚;不飽和羧酸酯,如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸三級丁酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸乙基己酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸羥乙酯、(甲基)丙烯酸2-羥丙酯、(甲基)丙烯酸2-羥基-3-氯丙酯、(甲基)丙烯酸4-羥丁酯、(甲基)丙烯酸甘油酯、α-羥甲基丙烯酸甲酯、α-羥甲基丙烯酸乙酯、α-羥甲基丙烯酸丙酯、α-羥甲基丙烯酸丁酯、(甲基)丙烯酸2-甲氧基乙酯、(甲基)丙烯酸3-甲氧基丁酯、乙氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基三丙二醇(甲基)丙烯酸酯、聚(乙二醇)甲醚(甲基)丙烯酸酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸2-苯氧基乙酯、苯氧基二乙二醇(甲基)丙烯酸酯、對壬基苯氧基聚乙二醇(甲基)丙烯酸酯、對壬基苯氧基聚丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸四氟丙酯、(甲基)丙烯酸1,1,1,3,3,3-六氟異丙酯、(甲基)丙烯酸八氟戊酯、(甲基)丙烯酸十七氟癸酯、(甲基)丙烯酸三溴苯酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊氧基乙酯、和(甲基)丙烯酸二環戊烯基氧基乙酯;含有N-乙烯基的三級胺,如N-乙烯基吡咯啶酮、N-乙烯基咔唑和N-乙烯基𠰌啉;不飽和醚,如乙烯基甲醚和乙烯基乙醚;不飽和醯亞胺,如N-苯基馬來醯亞胺、N-(4-氯苯基)馬來醯亞胺、N-(4-羥苯基)馬來醯亞胺、N-環己基馬來醯亞胺等。衍生自以上示例性化合物的結構單元可單獨或以其兩種或更多種的組合包含在環氧化合物中。Specific examples include structural units derived from: styrene; styrenes containing alkyl substituents, such as methylstyrene, dimethylstyrene, trimethylstyrene, ethylstyrene, diethylstyrene, triethylstyrene, propylstyrene, butylstyrene, hexylstyrene, heptylstyrene and octylstyrene; styrenes containing halogens, such as fluorostyrene, chlorostyrene, bromostyrene and iodostyrene; styrenes containing alkoxy substituents, such as methoxystyrene, ethoxystyrene and propoxystyrene; p-hydroxy-α-methylstyrene, acetylstyrene; ethylenically unsaturated compounds containing aromatic rings, such as divinylbenzene, vinylphenol, o-vinylbenzyl methyl ether, m-vinyl benzyl methyl ether, p-vinyl benzyl methyl ether; unsaturated carboxylic acid esters, such as methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, dimethylaminoethyl (meth)acrylate, isobutyl (meth)acrylate, tertiary butyl (meth)acrylate, cyclohexyl (meth)acrylate, ethylhexyl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-hydroxy-3-chloropropyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, glyceryl (meth)acrylate, methyl α-hydroxymethacrylate, ethyl α-hydroxymethacrylate, propyl α-hydroxymethacrylate, α-Butyl methacrylate, 2-methoxyethyl (meth)acrylate, 3-methoxybutyl (meth)acrylate, ethoxydiethylene glycol (meth)acrylate, methoxytriethylene glycol (meth)acrylate, methoxytripropylene glycol (meth)acrylate, poly(ethylene glycol) methyl ether (meth)acrylate, phenyl (meth)acrylate, benzyl (meth)acrylate, 2-phenoxyethyl (meth)acrylate, phenoxydiethylene glycol (meth)acrylate, p-nonylphenoxypolyethylene glycol (meth)acrylate, p-nonylphenoxypolypropylene glycol (meth)acrylate, tetrafluoropropyl (meth)acrylate, 1,1,1,3,3,3-hexafluoro (meth)acrylate Isopropyl (meth)acrylate, octafluoropentyl (meth)acrylate, heptadecafluorodecyl (meth)acrylate, tribromophenyl (meth)acrylate, isobornyl (meth)acrylate, dicyclopentyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentyloxyethyl (meth)acrylate, and dicyclopentenyloxyethyl (meth)acrylate; tertiary amines containing N-vinyl groups, such as N-vinylpyrrolidone, N-vinylcarbazole, and N-vinylthiophene; unsaturated ethers, such as vinyl methyl ether and vinyl ethyl ether; unsaturated imides, such as N-phenylmaleimide, N-(4-chlorophenyl)maleimide, N-(4-hydroxyphenyl)maleimide, N-cyclohexylmaleimide, etc. The structural units derived from the above exemplary compounds may be contained in the epoxy compound alone or in combination of two or more thereof.
環氧化合物可具有100至30,000 Da的重量平均分子量。具體地,環氧化合物可具有100至10,000 Da的重量平均分子量。如果環氧化合物的重量平均分子量為100 Da或更大,則固化膜的硬度可以更優異。如果其為30,000Da或更小,則固化膜的厚度變得均勻(具有較小的階差),其更適合於平坦化。The epoxy compound may have a weight average molecular weight of 100 to 30,000 Da. Specifically, the epoxy compound may have a weight average molecular weight of 100 to 10,000 Da. If the weight average molecular weight of the epoxy compound is 100 Da or more, the hardness of the cured film may be more excellent. If it is 30,000 Da or less, the thickness of the cured film becomes uniform (with a smaller step), which is more suitable for planarization.
基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),環氧化合物可以以0至3重量份、0.01至3重量份或0.1至1重量份的量使用。在以上範圍內,在顯影時的圖案輪廓可為有利的,並且可以增強耐化學性和平坦化。The epoxy compound may be used in an amount of 0 to 3 parts by weight, 0.01 to 3 parts by weight, or 0.1 to 1 parts by weight based on 100 parts by weight of the copolymer (A) based on solid content (excluding the solvent). Within the above range, the pattern profile at the time of development may be favorable, and chemical resistance and planarization may be enhanced.
此外,光鹼產生劑可以包含具有在光(或活化能射線)的照射下產生鹼的特性的化合物。例如,它可以包含即使在300 nm或更大的波長下也具有光敏範圍的高度敏感的化合物。In addition, the photoalkali generator may contain a compound having a property of generating an alkali under irradiation with light (or activation energy rays). For example, it may contain a highly sensitive compound having a photosensitivity range even at a wavelength of 300 nm or more.
光鹼產生劑可包含包含多胺光鹼產生劑組分的可交聯化合物。由於本發明包括此種光鹼產生劑,因此可以在低溫下和/或在製備固化膜時的短時間期間固化並形成精細圖案。此外,由於光鹼產生劑在光(例如,UV)的照射下產生鹼,因此它不受空氣中氧的抑制,使得其可用於防止腐蝕或劣化固化膜。The photobase generator may include a crosslinkable compound including a polyamine photobase generator component. Since the present invention includes such a photobase generator, it is possible to cure and form a fine pattern at a low temperature and/or in a short period of time when preparing a cured film. In addition, since the photobase generator generates a base under the irradiation of light (e.g., UV), it is not inhibited by oxygen in the air, so that it can be used to prevent corrosion or degradation of the cured film.
當光鹼產生劑暴露於光時,多胺光鹼產生劑組分的側光鹼基團斷裂或光分解以提供胺基。該胺基可與多官能胺反應性組分的胺反應性基團反應以交聯(甲基)丙烯酸酯共聚物組分。When the photobase generator is exposed to light, the pendant photobase groups of the polyamine photobase generator component cleave or photolyze to provide amine groups. The amine groups can react with the amine-reactive groups of the polyfunctional amine-reactive component to crosslink the (meth)acrylate copolymer component.
根據實施方式,適用的光鹼產生劑包括WPBG-018(和光純藥工業株式會社(Wako),CAS號122831-05-7,9-蒽基甲基-N,N-二乙基胺基甲酸酯)、WPBG-027(CAS號1203424-93-4,(E)-1-哌啶基-3-(2-羥苯基)-2-丙烯-1-酮)、WPBG-266(CAS號1632211-89-2,1,2-二異丙基-3-雙(二甲基胺基)亞甲基)胍鎓2-(3-苯甲醯基苯基)丙酸鹽)、WPBG-300(CAS號1801263-71-7,1,2-二環己基-4,4,5,5-四甲基二胍鎓正丁基三苯基硼酸鹽)等。光鹼產生劑可以單獨使用或以其兩種或更多種的組合使用。According to the embodiment, the photoalkali generators used include WPBG-018 (Wako Pure Chemical Industries, Ltd. (Wako), CAS No. 122831-05-7, 9-anthrylmethyl-N,N-diethylcarbamate), WPBG-027 (CAS No. 1203424-93-4, (E)-1-piperidinyl-3-(2-hydroxyphenyl)-2-propene-1 -ketone), WPBG-266 (CAS No. 1632211-89-2, 1,2-diisopropyl-3-bis(dimethylamino)methylene)guanidinium 2-(3-benzoylphenyl)propionate), WPBG-300 (CAS No. 1801263-71-7, 1,2-dicyclohexyl-4,4,5,5-tetramethylbiguanidinium n-butyltriphenylborate), etc. The photobase generator can be used alone or in combination of two or more thereof.
基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),光鹼產生劑可以以0至10重量份、特別是0至6重量份、更特別是0.01至5重量份的量使用。在以上範圍內,在顯影時的圖案輪廓可為有利的,並且耐化學性可為優異的。The photobase generator may be used in an amount of 0 to 10 parts by weight, particularly 0 to 6 parts by weight, and more particularly 0.01 to 5 parts by weight, based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). Within the above range, the pattern profile at the time of development may be favorable, and the chemical resistance may be excellent.
基於硫醇的化合物可以用作自由基或催化功能的添加劑。其可以藉由UV照射或熱反應來提高光固化轉化率,並且其可以藉由經由熱反應降低反應能量來提高環氧轉化率。基於硫醇的化合物防止自由基被氧消滅。它還藉由經由與可光聚合化合物 (B) 的交聯作用提高交聯度產生使結構更緻密的效果,從而即使在低溫下也改善固化度。The thiol-based compound can be used as an additive with free radical or catalytic function. It can increase the photocuring conversion rate by UV irradiation or thermal reaction, and it can increase the epoxide conversion rate by reducing the reaction energy through thermal reaction. The thiol-based compound prevents the free radical from being extinguished by oxygen. It also produces an effect of making the structure denser by increasing the degree of crosslinking through crosslinking with the photopolymerizable compound (B), thereby improving the curing degree even at low temperature.
基於硫醇的化合物的實例包括在分子中具有兩個或更多個巰基的化合物。例如,它可為脂族硫醇化合物或芳族硫醇化合物。Examples of thiol-based compounds include compounds having two or more hydroxyl groups in the molecule. For example, it may be an aliphatic thiol compound or an aromatic thiol compound.
脂族硫醇化合物的實例可包括甲烷二硫醇、1,2-乙烷二硫醇、1,2-丙烷二硫醇、1,3-丙烷二硫醇、1,4-丁烷二硫醇、1,5-戊烷二硫醇、1,6-己烷二硫醇、1,2-環己烷二硫醇、3,4-二甲氧基丁烷-1,2-二硫醇、2-甲基環己烷-2,3-二硫醇、1,2-二巰基丙基甲基醚、2,3-二巰基丙基甲基醚、雙(2-巰基乙基)醚、四(巰基甲基)甲烷、雙(巰基甲基)硫化物、雙(巰基甲基)二硫化物、雙(巰基乙基)硫化物、雙(巰基乙基)二硫化物、雙(巰基甲基硫代)甲烷、雙(2-巰基乙基硫代)甲烷、1,2-雙(巰基甲基硫代)乙烷、1,2-雙(2-巰基乙基硫代)乙烷、1,3-雙(巰基甲基硫代)丙烷、1,3-雙(2-巰基乙基硫代)丙烷、1,2,3-三(巰基甲基硫代)丙烷、1,2,3-三(2-巰基乙基硫代)丙烷、1,2,3-三(3-巰基丙基硫代)丙烷、4-巰基甲基-1,8-二巰基-3,6-二硫雜辛烷、5,7-二巰基甲基-1,11-二巰基-3,6,9-三硫雜十一烷、4,7-二巰基甲基-1,11-二巰基-3,6,9-三硫雜十一烷、4,8-二巰基甲基-1,11-二巰基-3,6,9-三硫雜十一烷、1,1,3,3-四(巰基甲基硫代)丙烷、4,6-雙(巰基甲基硫代)-1,3-二硫化環戊烷、2-(2,2-雙(巰基甲基硫代)乙基)-1,3-二硫雜乙烷、四(巰基甲基硫代甲基)甲烷、四(2-巰基乙基硫代甲基)甲烷、雙(2,3-二巰基丙基)硫化物、2,5-雙巰基甲基-1,4-二硫化環戊烷、乙二醇雙(2-巰基乙酸酯)、乙二醇雙(3-巰基丙酸酯)、二乙二醇雙(2-巰基乙酸酯)、二乙二醇雙(3-巰基丙酸酯)、2,3-二巰基-1-丙醇(3-巰基丙酸酯)、3-巰基-1,2-丙烷二醇雙(2-巰基乙酸酯)、3-巰基-1,2-丙烷二醇二(3-巰基丙酸酯)、三羥甲基丙烷三(2-巰基乙酸酯)、二(三羥甲基丙烷)四(2-巰基乙酸酯)、三羥甲基丙烷三(3-巰基丙酸酯)、二(三羥甲基丙烷)四(3-巰基丙酸酯)、三羥甲基乙烷三(2-巰基乙酸酯)、三羥甲基乙烷三(3-巰基丙酸酯)、新戊四醇四(2-巰基乙酸酯)、二新戊四醇六(2-巰基乙酸酯)、新戊四醇二(3-巰基丙酸酯)、新戊四醇三(3-巰基丙酸酯)、新戊四醇四(3-巰基丙酸酯)(PETMP)、二新戊四醇六(3-巰基丙酸酯)、甘油二(2-巰基乙酸酯)、甘油三(2-巰基乙酸酯)、甘油二(3-巰基丙酸酯)、甘油三(3-巰基丙酸酯)、1,4-環己烷二醇雙(2-巰基乙酸酯)、1,4-環己烷二醇雙(3-巰基丙酸酯)、羥基甲基硫化物雙(2-巰基乙酸酯)、羥基甲基硫化物雙(3-巰基丙酸酯)、羥基乙基硫化物(2-巰基乙酸酯)、羥基乙基硫化物(3-巰基丙酸酯)、羥基甲基二硫化物(2-巰基乙酸酯)、羥基甲基二硫化物(3-巰基丙酸酯)、硫代乙醇酸雙(2-巰基乙基酯)、硫代二丙酸雙(2-巰基乙基酯)、以及N,N',N"-三(β-巰基丙基羰基氧基乙基)異氰尿酸酯。Examples of the aliphatic thiol compound may include methanedithiol, 1,2-ethanedithiol, 1,2-propanedithiol, 1,3-propanedithiol, 1,4-butanedithiol, 1,5-pentanedithiol, 1,6-hexanedithiol, 1,2-cyclohexanedithiol, 3,4-dimethoxybutane-1,2-dithiol, 2-methylcyclohexane-2,3-dithiol, 1,2-dialkylpropyl methyl ether, 2,3-dialkylpropyl methyl ether, bis((1,2-dimethylthiol)-1,2-dimethylthiol) and 1,2-dialkylpropyl methyl ether. 2-Alkylethyl) ether, tetrakis(butylmethyl)methane, bis(butylmethyl)sulfide, bis(butylmethyl)disulfide, bis(butylethyl)sulfide, bis(butylethyl)disulfide, bis(butylmethylthio)methane, bis(2-butylethylthio)methane, 1,2-bis(butylmethylthio)ethane, 1,2-bis(2-butylethylthio)ethane, 1,3-bis(butylmethylthio)propane, 1,3-bis(2-butylethylthio) 1,2,3-tris(2-butylethylthio)propane, 1,2,3-tris(3-butylpropylthio)propane, 4-butylmethyl-1,8-dibutyl-3,6-dithiooctane, 5,7-dibutylmethyl-1,11-dibutyl-3,6,9-trithioundecane, 4,7-dibutylmethyl-1,11-dibutyl-3,6,9-trithioundecane, ,8-diphenylmethyl-1,11-diphenyl-3,6,9-trithiaundecane, 1,1,3,3-tetra(phenylmethylthio)propane, 4,6-bis(phenylmethylthio)-1,3-cyclopentane disulfide, 2-(2,2-bis(phenylmethylthio)ethyl)-1,3-disulfide ethane, tetra(phenylmethylthiomethyl)methane, tetra(2-phenylethylthiomethyl)methane, bis(2,3-diphenylpropyl)sulfide, 2, 5-Dibutylmethyl-1,4-disulfide cyclopentane, ethylene glycol bis(2-butyl acetate), ethylene glycol bis(3-butyl propionate), diethylene glycol bis(2-butyl acetate), diethylene glycol bis(3-butyl propionate), 2,3-dibutyl-1-propanol(3-butyl propionate), 3-butyl-1,2-propanediol bis(2-butyl acetate), 3-butyl-1,2-propanediol di(3-butyl propionate), trihydroxymethylpropane tris(2-butyl acetate), di(trihydroxymethylpropane)tetra(2-butyl acetate), tris(3-butyl propionate), di(trihydroxymethylpropane)tetra(3-butyl propionate), tris(2-butyl acetate), tris(3-butyl propionate), pentaerythritol tetra(2-butyl acetate), dipentaerythritol hexa(2-butyl acetate), pentaerythritol di(3-butyl propionate), pentaerythritol tris( 3-Alkylated Propionate), Pentaerythritol Tetrakis(3-Alkylated Propionate) (PETMP), Dipentaerythritol Hexa(3-Alkylated Propionate), Glycerol Di(2-Alkylated Acetate), Glycerol Tri(2-Alkylated Acetate), Glycerol Di(3-Alkylated Propionate), Glycerol Tri(3-Alkylated Propionate), 1,4-Cyclohexanediol Di(2-Alkylated Acetate), 1,4-Cyclohexanediol Di(3-Alkylated Propionate), Hydroxyl Methyl Sulfide Di(2-Alkylated Acetate) Ester), hydroxy methyl sulfide bis(3-butylpropionate), hydroxy ethyl sulfide (2-butyl acetate), hydroxy ethyl sulfide (3-butylpropionate), hydroxy methyl disulfide (2-butyl acetate), hydroxy methyl disulfide (3-butylpropionate), thioglycolic acid bis(2-butylethyl ester), thiodipropionic acid bis(2-butylethyl ester), and N,N',N"-tris(β-butylpropylcarbonyloxyethyl) isocyanurate.
芳族硫醇化合物的實例可以包括1,2-二巰基苯、1,3-二巰基苯、1,4-二巰基苯、1,2-雙(巰基甲基)苯、1,4-雙(巰基甲基)苯、1,2-雙(巰基乙基)苯、1,4-雙(巰基乙基)苯、1,2,3-三巰基苯、1,2,4-三巰基苯、1,3,5-三巰基苯、1,2,3-三(巰基甲基)苯、1,2,4-三(巰基甲基)苯、1,3,5-三(巰基甲基)苯、1,2,3-三(巰基乙基)苯、1,3,5-三(巰基乙基)苯、1,2,4-三(巰基乙基)苯、2,5-甲苯二硫醇、3,4-甲苯二硫醇、1,4-萘二硫醇、1,5-萘二硫醇、2,6-萘二硫醇、2,7-萘二硫醇、1,2,3,4-四巰基苯、1,2,3,5-四巰基苯、1,2,4,5-四巰基苯、1,2,3,4-四(巰基甲基)苯、1,2,3,5-四(巰基甲基)苯、1,2,4,5-四(巰基甲基)苯、1,2,3,4-四(巰基乙基)苯、1,2,3,5-四(巰基乙基)苯、1,2,4,5-四(巰基乙基)苯、2,2'-二巰基聯苯、以及4,4'-二巰基聯苯。Examples of the aromatic thiol compound may include 1,2-diphenylbenzene, 1,3-diphenylbenzene, 1,4-diphenylbenzene, 1,2-bis(alkylmethyl)benzene, 1,4-bis(alkylmethyl)benzene, 1,2-bis(alkylethyl)benzene, 1,4-bis(alkylethyl)benzene, 1,2,3-triphenylbenzene, 1,2,4-triphenylbenzene, 1,3,5-triphenylbenzene, 1,2,3-tri(alkylmethyl)benzene, 1,2,4-tri(alkylmethyl)benzene, 1,3,5-tri(alkylmethyl)benzene, 1,2,3-tri(alkylethyl)benzene, 1,3,5-tri(alkylethyl)benzene, 1,2,4-tri(alkylethyl)benzene, 2, The present invention also includes the following: 1,5-toluenedithiol, 3,4-toluenedithiol, 1,4-naphthalenedithiol, 1,5-naphthalenedithiol, 2,6-naphthalenedithiol, 2,7-naphthalenedithiol, 1,2,3,4-tetrabutylbenzene, 1,2,3,5-tetrabutylbenzene, 1,2,4,5-tetrabutylbenzene, 1,2,3,4-tetrabutylmethylbenzene, 1,2,3,5-tetrabutylmethylbenzene, 1,2,4,5-tetrabutylmethylbenzene, 1,2,3,4-tetrabutylethylbenzene, 1,2,3,5-tetrabutylethylbenzene, 1,2,4,5-tetrabutylbiphenyl, 2,2'-dibutylbiphenyl, and 4,4'-dibutylbiphenyl.
基於硫醇的化合物可為脂族硫醇化合物。具體地,它可以包括新戊四醇四(3-巰基丙酸酯)(PETMP)、SIRIUS-501(SUBARU-501,大阪有機化學工業有限公司)、以及甘脲衍生物(TS-G,四國化學品公司(SHIKOKU CHEMICALS CORPORATION))。The thiol-based compound may be an aliphatic thiol compound. Specifically, it may include pentaerythritol tetra(3-pentyl propionate) (PETMP), SIRIUS-501 (SUBARU-501, Osaka Organic Chemicals Co., Ltd.), and glycoluril derivatives (TS-G, SHIKOKU CHEMICALS CORPORATION).
基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),基於硫醇的化合物可以以0至10量份、0至6重量份或0.01至5重量份的量使用。如果基於硫醇的化合物的量在以上範圍內,則在顯影時的圖案輪廓可為有利的,並且耐化學性可為優異的。The thiol-based compound may be used in an amount of 0 to 10 parts by weight, 0 to 6 parts by weight, or 0.01 to 5 parts by weight, based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). If the amount of the thiol-based compound is within the above range, the pattern profile at the time of development may be favorable, and the chemical resistance may be excellent.
本發明之光敏樹脂組成物可以進一步包含衍生自環氧樹脂的化合物。該衍生自環氧樹脂的化合物具有至少一個雙鍵,可以具有軸節(cardo)骨架結構,可為基於酚醛清漆的樹脂,或者可為在其側鏈中含有雙鍵的丙烯酸樹脂。The photosensitive resin composition of the present invention may further comprise a compound derived from an epoxy resin. The compound derived from an epoxy resin has at least one double bond, may have a cardo skeleton structure, may be a novolac-based resin, or may be an acrylic resin containing a double bond in its side chain.
當藉由凝膠滲透層析法(參考聚苯乙烯)確定時,衍生自環氧樹脂的化合物的重量平均分子量(Mw)可以在3,000至18,000 Da或5,000至10,000 Da的範圍內。如果該衍生自環氧樹脂的化合物的分子量在以上範圍內,則顯影時的圖案輪廓可為有利的,並且可以改善如耐化學性和彈性恢復力這樣的特性。The weight average molecular weight (Mw) of the epoxy-derived compound may be in the range of 3,000 to 18,000 Da or 5,000 to 10,000 Da when determined by gel permeation chromatography (referenced to polystyrene). If the molecular weight of the epoxy-derived compound is within the above range, the pattern profile at the time of development may be favorable, and characteristics such as chemical resistance and elastic recovery may be improved.
具體地,該衍生自環氧樹脂的化合物可為具有如由下式1表示的軸節骨架結構的化合物: [式1] 在以上式1中, X各自獨立地是、、或;L1 各自獨立地是C1-10 伸烷基、C3-20 伸環烷基、或C1-10 伸烷基氧基;R1 至R7 各自獨立地是H、C1-10 烷基、C1-10 烷氧基、C2-10 烯基、或C6-14 芳基;R8 係H、甲基、乙基、CH3 CHCl-、CH3 CHOH-、CH2 =CHCH2 -、或苯基;並且n係0至10的整數。Specifically, the compound derived from epoxy resin may be a compound having an axonal skeleton structure as represented by the following Formula 1: In the above formula 1, X is each independently , , or ; L 1 is each independently C 1-10 alkylene, C 3-20 cycloalkylene, or C 1-10 alkyleneoxy; R 1 to R 7 are each independently H, C 1-10 alkyl, C 1-10 alkoxy, C 2-10 alkenyl, or C 6-14 aryl; R 8 is H, methyl, ethyl, CH 3 CHCl-, CH 3 CHOH-, CH 2 =CHCH 2 -, or phenyl; and n is an integer from 0 to 10.
C1-10 伸烷基的具體實例可以包括亞甲基、伸乙基、伸丙基、伸異丙基、伸丁基、伸異丁基、伸二級丁基、伸三級丁基、伸戊基、伸異戊基、伸三級戊基、伸己基、伸庚基、伸辛基、伸異辛基、伸三級辛基、2-乙基伸己基、伸壬基、伸異壬基、伸癸基、伸異癸基等。C3-20 伸環烷基的具體實例可以包括伸環丙基、伸環丁基、伸環戊基、伸環己基、伸環庚基、伸萘烷基、伸金剛烷等。C1-10 伸烷基氧基的具體實例可以包括伸甲基氧基、伸乙基氧基、伸丙基氧基、伸丁基氧基、伸二級丁基氧基、伸三級丁基氧基、伸戊基氧基、伸己基氧基、伸庚基氧基、伸辛基氧基、2-乙基-伸己基氧基等。C1-10 烷基的具體實例可以包括甲基、乙基、丙基、異丙基、丁基、異丁基、二級丁基、三級丁基、戊基、異戊基、三級戊基、己基、庚基、辛基、異辛基、三級辛基、2-乙基己基、壬基、異壬基、癸基、異癸基等。C1-10 烷氧基的具體實例可以包括甲氧基、乙氧基、丙氧基、丁氧基、二級丁氧基、三級丁氧基、戊氧基、己氧基、庚氧基、辛氧基、2-乙基己氧基等。C2-10 烯基的具體實例可以包括乙烯基、烯丙基、丁烯基、丙烯基等。C6-14 芳基的具體實例可以包括苯基、甲苯基、二甲苯基、萘基等。Specific examples of C1-10 alkylene groups may include methylene, ethylene, propylene, isopropylene, butylene, isobutylene, dibutylene, tertiary butylene, pentylene, isopentylene, tertiary pentylene, hexylene, heptylene, octylene, isooctylene, tertiary octylene, 2-ethylhexylene, nonylene, isononylene, decylene, isodecylene, etc. Specific examples of C3-20 cycloalkylene groups may include cyclopropylene, cyclobutylene, cyclopentylene, cyclohexylene, cycloheptylene, decalinylene, adamantane, etc. Specific examples of the C1-10 alkyleneoxy group may include a methyloxy group, an ethyloxy group, a propyloxy group, a butyloxy group, a dibutyloxy group, a tertiary butyloxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, and a 2-ethyl-hexyloxy group. Specific examples of the C1-10 alkyl group may include a methyl group, an ethyloxy group, a propyloxy group, a butyloxy group, a dibutyloxy group, a tertiary butyloxy group, a pentyloxy group, a isopentyl group, a tertiary pentyl group, a hexyl group, a heptyl group, an octyl group, an isooctyl group, a tertiary octyl group, a 2-ethylhexyl group, a nonyl group, an isononyl group, a decyl group, an isodecyl group, and the like. Specific examples of the C1-10 alkoxy group may include a methoxy group, an ethoxy group, a propyloxy group, a butoxy group, a dibutyloxy group, a tertiary butyloxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, and a 2-ethylhexyloxy group. Specific examples of the C 2-10 alkenyl group may include vinyl, allyl, butenyl, propenyl, etc. Specific examples of the C 6-14 aryl group may include phenyl, tolyl, xylyl, naphthyl, etc.
例如,可以藉由以下如由反應方案1表示的合成路線來製備具有軸節骨架結構的衍生自環氧樹脂的化合物。 [反應方案1] 在以上反應方案1中, Hal係鹵素;並且X、R1 、R2 和L1 與以上式1中所定義的相同。For example, a compound derived from an epoxy resin having an articulated skeleton structure can be prepared by the following synthetic route as represented by Reaction Scheme 1. [Reaction Scheme 1] In the above reaction scheme 1, Hal is a halogen; and X, R 1 , R 2 and L 1 are the same as defined in the above formula 1.
該具有軸節骨架結構的衍生自環氧樹脂的化合物可以藉由以下方式獲得:使具有軸節骨架結構的環氧樹脂與不飽和一元酸反應以產生環氧加合物並且然後使如此獲得的環氧加合物與多元酸酐反應,或使如此獲得的產物與單官能或多官能環氧化合物進一步反應。可以使用本領域已知的任何不飽和一元酸,例如丙烯酸、甲基丙烯酸、巴豆酸、肉桂酸、山梨酸等。可以使用本領域已知的任何多元酸酐,例如琥珀酸酐、馬來酸酐、偏苯三甲酸酐、均苯四甲酸酐、1,2,4,5-環己烷四甲酸二酐、六氫鄰苯二甲酸酐等。可以使用本領域已知的任何單官能或多官能環氧化合物,例如甲基丙烯酸縮水甘油酯、甲基縮水甘油醚、乙基縮水甘油醚、丙基縮水甘油醚、異丙基縮水甘油醚、丁基縮水甘油醚、異丁基縮水甘油醚、雙酚Z縮水甘油醚等。The compound derived from epoxy resin having an articulated skeleton structure can be obtained by reacting an epoxy resin having an articulated skeleton structure with an unsaturated monobasic acid to produce an epoxy adduct and then reacting the epoxy adduct thus obtained with a polyacid anhydride, or further reacting the product thus obtained with a monofunctional or polyfunctional epoxy compound. Any unsaturated monoacid known in the art can be used, such as acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, etc. Any polyacid anhydride known in the art can be used, such as succinic anhydride, maleic anhydride, trimellitic anhydride, pyromellitic anhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, hexahydrophthalic anhydride, etc. Any monofunctional or polyfunctional epoxy compound known in the art may be used, such as glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, isobutyl glycidyl ether, bisphenol Z glycidyl ether, and the like.
例如,可以藉由以下如由反應方案2表示的合成路線來製備具有軸節骨架結構的衍生自環氧樹脂的化合物。 [反應方案2] 在以上反應方案2中, R9 各自獨立地是H、C1-10 烷基、C1-10 烷氧基、C2-10 烯基、或C6-14 芳基;R10 和R11 各自獨立地是飽和或不飽和的C6 脂族或芳族環;n係1至10的整數;並且X、R1 、R2 和L1 與以上式1中所定義的相同。For example, a compound derived from an epoxy resin having an articulated skeleton structure can be prepared by the following synthetic route as represented by Reaction Scheme 2. [Reaction Scheme 2] In the above Reaction Scheme 2, R9 is each independently H, C1-10 alkyl, C1-10 alkoxy, C2-10 alkenyl, or C6-14 aryl; R10 and R11 are each independently a saturated or unsaturated C6 aliphatic or aromatic ring; n is an integer from 1 to 10; and X, R1 , R2 and L1 are the same as defined in Formula 1 above.
在使用具有軸節骨架結構的衍生自環氧樹脂的化合物的情況下,該軸節骨架結構可以改善固化材料與基底的黏合性、耐鹼性、加工性、強度等。另外,一旦在顯影時去除未固化的部分,就可以在圖案中形成高解析度的圖像。When a compound derived from an epoxy resin having an articulated skeleton structure is used, the articulated skeleton structure can improve the adhesion between the cured material and the substrate, alkali resistance, processability, strength, etc. In addition, once the uncured portion is removed during development, a high-resolution image can be formed in the pattern.
基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),衍生自環氧樹脂的化合物可以以0至50重量份、特別是0至40重量份、更特別是0.01至50重量份、0.01至40重量份、或0.01至30重量份的量使用。如果在以上量範圍內使用衍生自環氧樹脂的化合物,則顯影時的顯影性和圖案輪廓可為有利的。(G) 溶劑 The compound derived from epoxy resin may be used in an amount of 0 to 50 parts by weight, particularly 0 to 40 parts by weight, more particularly 0.01 to 50 parts by weight, 0.01 to 40 parts by weight, or 0.01 to 30 parts by weight, based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent). If the compound derived from epoxy resin is used within the above amount range, the developability and pattern profile at the time of development may be favorable. (G) Solvent
本發明之光敏樹脂組成物可以製備為液體組成物(其中以上組分與溶劑混合)。本領域中已知的任何溶劑(與光敏樹脂組成物中的組分相容但不反應)可以用作製備光敏樹脂組成物的溶劑 (G)。The photosensitive resin composition of the present invention can be prepared as a liquid composition (in which the above components are mixed with a solvent). Any solvent known in the art (compatible but not reactive with the components in the photosensitive resin composition) can be used as the solvent (G) for preparing the photosensitive resin composition.
溶劑 (G) 的實例可以包括二醇醚,如乙二醇單乙醚;乙二醇烷基醚乙酸酯,如乙基溶纖劑乙酸酯;酯,如2-羥基丙酸乙酯;二乙二醇,如二乙二醇單甲醚;丙二醇烷基醚乙酸酯,如丙二醇單甲醚乙酸酯和丙二醇丙醚乙酸酯;和乙酸烷氧基烷基酯,如乙酸3-甲氧基丁酯。溶劑 (G) 可以單獨使用或以兩種或更多種的組合使用。Examples of the solvent (G) may include glycol ethers such as ethylene glycol monoethyl ether; ethylene glycol alkyl ether acetates such as ethyl solvent acetate; esters such as ethyl 2-hydroxypropionate; diethylene glycol such as diethylene glycol monomethyl ether; propylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate and propylene glycol propyl ether acetate; and acetic acid alkoxyalkyl esters such as 3-methoxybutyl acetate. The solvent (G) may be used alone or in combination of two or more.
溶劑 (G) 的量不受特別限制,但從最終獲得的光敏樹脂組成物的塗覆性和穩定性的視角,基於100重量份的共聚物 (A) 基於固體含量(不包括溶劑),可為50至200重量份或80至150重量份。如果溶劑的量係在以上範圍內,則樹脂組成物被光滑地塗覆,並且可能在工作過程中發生的延遲裕度係小的。The amount of the solvent (G) is not particularly limited, but may be 50 to 200 parts by weight or 80 to 150 parts by weight based on 100 parts by weight of the copolymer (A) based on the solid content (excluding the solvent) from the viewpoint of coating and stability of the finally obtained photosensitive resin composition. If the amount of the solvent is within the above range, the resin composition is coated smoothly, and the margin of delay that may occur during working is small.
此外,本發明之光敏樹脂組成物可以進一步包含其他的添加劑,如抗氧化劑和穩定劑,只要不對光敏樹脂組成物的物理特性造成不利影響。In addition, the photosensitive resin composition of the present invention may further contain other additives, such as antioxidants and stabilizers, as long as they do not adversely affect the physical properties of the photosensitive resin composition.
包含上述組分的光敏樹脂組成物可以藉由常用方法製備為液體組成物。例如,將著色劑與分散樹脂、分散劑和溶劑預先混合並且使用珠磨機使其分散於其中直到著色劑的平均粒徑達到所希望的值,從而製備著色分散液。在此種情況下,可以將表面活性劑和/或共聚物部分地或完全地共混。添加到分散液中的是共聚物和表面活性劑的剩餘部分、可光聚合化合物和光聚合引發劑。將添加劑如環氧化合物或附加的溶劑(如果需要)進一步共混至某個濃度,隨後充分攪拌它們以製備液體光敏樹脂組成物。The photosensitive resin composition comprising the above components can be prepared as a liquid composition by a common method. For example, the coloring agent is pre-mixed with a dispersing resin, a dispersant and a solvent and dispersed therein using a bead mill until the average particle size of the coloring agent reaches a desired value, thereby preparing a colored dispersion. In this case, the surfactant and/or the copolymer can be partially or completely blended. Added to the dispersion is the remainder of the copolymer and the surfactant, a photopolymerizable compound and a photopolymerization initiator. Additives such as epoxy compounds or additional solvents (if necessary) are further blended to a certain concentration, and then they are fully stirred to prepare a liquid photosensitive resin composition.
本發明可以藉由在基底上塗覆此種光敏樹脂組成物並且將其固化來提供呈固化膜形式的用於量子點阻擋肋之結構。該用於量子點阻擋肋之結構可以包含二個或更多個層的多層固化膜。The present invention can provide a structure for quantum dot blocking ribs in the form of a cured film by coating such a photosensitive resin composition on a substrate and curing it. The structure for quantum dot blocking ribs can include a multi-layer cured film of two or more layers.
具體地,本發明可以提供用於量子點阻擋肋之結構,該結構包含由第一光敏樹脂組成物形成的第一固化膜和在該第一固化膜上由第二光敏樹脂組成物形成的第二固化膜,Specifically, the present invention can provide a structure for quantum dot barrier ribs, the structure comprising a first cured film formed of a first photosensitive resin composition and a second cured film formed of a second photosensitive resin composition on the first cured film,
其中該第一光敏樹脂組成物、該第二光敏樹脂組成物或兩者包含 (A) 共聚物;(B) 可光聚合化合物;(C) 光聚合引發劑;和 (D) 包含黑色著色劑的著色劑,並且該結構體具有6 µm或更大的總厚度。wherein the first photosensitive resin composition, the second photosensitive resin composition, or both comprise (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; and (D) a colorant comprising a black colorant, and the structure has a total thickness of 6 µm or greater.
該第一光敏樹脂組成物和該第二光敏樹脂組成物可以相同或不同。The first photosensitive resin composition and the second photosensitive resin composition may be the same or different.
此外,根據實施方式,該第一光敏樹脂組成物和該第二光敏樹脂組成物可以含有或可以不含有氟。In addition, according to the embodiment, the first photosensitive resin composition and the second photosensitive resin composition may or may not contain fluorine.
例如,該第一光敏樹脂組成物可以不含有氟,並且該第二光敏樹脂組成物可以含有氟。For example, the first photosensitive resin composition may not contain fluorine, and the second photosensitive resin composition may contain fluorine.
此外,該第一光敏樹脂組成物和該第二光敏樹脂組成物可以都不含有氟。In addition, the first photosensitive resin composition and the second photosensitive resin composition may not contain fluorine.
如果該第一光敏樹脂組成物或該第二光敏樹脂組成物含有氟,則當製備要用於光敏樹脂組成物中的共聚物 (A) 時,結構單元 (a-4) 可以包含含氟化合物。例如,結構單元 (a-4) 可以包含選自由以下組成之群組中的至少一種:(甲基)丙烯酸三氟乙酯、(甲基)丙烯酸四氟丙酯、(甲基)丙烯酸五氟苄酯、(甲基)丙烯酸六氟異丙酯、(甲基)丙烯酸十七氟-1-壬酯、(甲基)丙烯酸八氟戊酯、(甲基)丙烯酸4-三氟甲基-4-羥基-5,5,5-三氟-2-戊酯和甲基丙烯酸三甲氧基矽基丙酯。If the first photosensitive resin composition or the second photosensitive resin composition contains fluorine, when preparing the copolymer (A) to be used in the photosensitive resin composition, the structural unit (a-4) may contain a fluorine-containing compound. For example, the structural unit (a-4) may contain at least one selected from the group consisting of trifluoroethyl (meth)acrylate, tetrafluoropropyl (meth)acrylate, pentafluorobenzyl (meth)acrylate, hexafluoroisopropyl (meth)acrylate, heptadecafluoro-1-nonyl (meth)acrylate, octafluoropentyl (meth)acrylate, 4-trifluoromethyl-4-hydroxy-5,5,5-trifluoro-2-pentyl (meth)acrylate, and trimethoxysilylpropyl methacrylate.
同時,根據實施方式的用於量子點阻擋肋之結構可為由包括第一固化膜和第二固化膜的兩個層構成的多層固化膜。Meanwhile, the structure for the quantum dot barrier rib according to the embodiment may be a multi-layered cured film consisting of two layers including a first cured film and a second cured film.
具體地,該多層固化膜可為兩層固化膜,其包括藉由在基底上塗覆第一光敏樹脂組成物並且將其固化而形成的第一固化膜;和藉由在該第一固化膜上塗覆第二光敏樹脂組成物並且將其固化而形成的第二固化膜。Specifically, the multi-layer cured film may be a two-layer cured film, which includes a first cured film formed by coating a first photosensitive resin composition on a substrate and curing it; and a second cured film formed by coating a second photosensitive resin composition on the first cured film and curing it.
在由兩個層構成的多層固化膜中,該第一固化膜和該第二固化膜可以分別具有10 µm或更小、特別是4 µm至9 µm、更特別是5 µm至9 µm的厚度。此外,由兩個層構成的多層固化膜可以具有6 µm至20 µm、特別是6 µm至18 µm、更特別是10 µm至18 µm的總厚度,即,該第一固化膜和該第二固化膜的總厚度。In the multi-layered cured film composed of two layers, the first cured film and the second cured film may have a thickness of 10 μm or less, particularly 4 μm to 9 μm, more particularly 5 μm to 9 μm, respectively. In addition, the multi-layered cured film composed of two layers may have a total thickness of 6 μm to 20 μm, particularly 6 μm to 18 μm, more particularly 10 μm to 18 μm, that is, the total thickness of the first cured film and the second cured film.
根據另一個實施方式的用於量子點阻擋肋之結構可為由包括第一固化膜、第二固化膜和第三固化膜的三個層構成的多層固化膜。According to another embodiment, the structure for the quantum dot barrier rib may be a multi-layered cured film consisting of three layers including a first cured film, a second cured film, and a third cured film.
在由三個層構成的多層固化膜中,該第一固化膜、該第二固化膜和該第三固化膜可以分別具有8 µm或更小、特別是2 µm至8 µm、更特別是3 µm至8 µm的厚度。此外,由三個層構成的多層固化膜可以具有6 µm至24 µm、特別是9 µm至24 µm、更特別是12 µm至24 µm的總厚度,即,該第一固化膜、該第二固化膜和該第三固化膜的總厚度。In the multi-layered cured film composed of three layers, the first cured film, the second cured film, and the third cured film may have a thickness of 8 μm or less, particularly 2 μm to 8 μm, and more particularly 3 μm to 8 μm, respectively. In addition, the multi-layered cured film composed of three layers may have a total thickness of 6 μm to 24 μm, particularly 9 μm to 24 μm, and more particularly 12 μm to 24 μm, that is, the total thickness of the first cured film, the second cured film, and the third cured film.
根據另一個實施方式的用於量子點阻擋肋之結構可為由包括第一固化膜、第二固化膜和第n固化膜的n個層構成的多層固化膜。在此,n可為4或更大,特別是4至10、4至8、4至6、或4至5。According to another embodiment, the structure for quantum dot blocking ribs may be a multi-layered cured film consisting of n layers including a first cured film, a second cured film, and an nth cured film. Here, n may be 4 or more, particularly 4 to 10, 4 to 8, 4 to 6, or 4 to 5.
在由n個層構成的多層固化膜中,該第一固化膜、該第二固化膜和該第n固化膜可以分別具有8 µm或更小、特別是1.5 µm至8 µm、更特別是2 µm至8 µm的厚度。此外,由n個層構成的多層固化膜可以具有6 µm至80 µm、特別是6 µm至40 µm、更特別是6 µm至30 µm的總厚度。In the multilayered cured film composed of n layers, the first cured film, the second cured film, and the nth cured film may each have a thickness of 8 μm or less, particularly 1.5 μm to 8 μm, and more particularly 2 μm to 8 μm. In addition, the multilayered cured film composed of n layers may have a total thickness of 6 μm to 80 μm, particularly 6 μm to 40 μm, and more particularly 6 μm to 30 μm.
根據實施方式的用於量子點阻擋肋之結構具有如上所述之大的總膜厚度,使得即使著色劑的量比先前技術中少,也可以實現優異的光學密度(即,高遮光特性)和低反射率。The structure for quantum dot barrier ribs according to the embodiment has a large total film thickness as described above, so that excellent optical density (ie, high light shielding characteristics) and low reflectivity can be achieved even if the amount of colorant is smaller than in the prior art.
在用於量子點阻擋肋之結構中,多層固化膜的每個固化膜的厚度和光學密度可以相同或不同。例如,第一固化膜的厚度可以與第二固化膜的厚度相同或不同。此外,第一固化膜的光學密度可以與第二固化膜的光學密度相同或不同。In the structure for quantum dot blocking ribs, the thickness and optical density of each cured film of the multi-layer cured film can be the same or different. For example, the thickness of the first cured film can be the same or different from the thickness of the second cured film. In addition, the optical density of the first cured film can be the same or different from the optical density of the second cured film.
使用SCAN PLUS藉由設備探針尖端的豎直運動測量固化膜的高度差,該SCAN PLUS係α-台階儀器(α-台階輪廓儀)。從結果獲得固化膜的厚度。多層固化膜的厚度係初始膜厚度。它可為指在形成多層固化膜時的厚度,即,在量子點阻擋肋的製備中的曝光和顯影步驟之前在預烘烤時製備的膜的厚度。The height difference of the cured film is measured by the vertical movement of the probe tip of the equipment using SCAN PLUS, which is an α-step instrument (α-step profiler). The thickness of the cured film is obtained from the result. The thickness of the multi-layer cured film is the initial film thickness. It can refer to the thickness when the multi-layer cured film is formed, that is, the thickness of the film prepared at the time of pre-baking before the exposure and development steps in the preparation of the quantum dot barrier ribs.
在由光敏樹脂組成物獲得單層固化膜的情況下,存在固化膜僅以薄膜形式被應用的問題。此外,在將單層固化膜用於量子點阻擋肋的情況下,其厚度係薄的。因此,當滴落量子點溶液時,它可能溢出阻擋肋。如果它溢出阻擋肋,則可能產生由於顏色混合造成的污點,或者可靠性可能下降。此外,如果將組成物以單層厚地塗覆並且然後固化,則難以實現均勻固化膜,由於厚度變化可能產生污點,或者量子點溶液可能溢出具有薄厚度的阻擋肋。要用於量子點阻擋肋有一定限制。In the case where a single-layer cured film is obtained from a photosensitive resin composition, there is a problem that the cured film is applied only in the form of a thin film. In addition, in the case where a single-layer cured film is used for quantum dot barrier ribs, its thickness is thin. Therefore, when a quantum dot solution is dripped, it may overflow the barrier ribs. If it overflows the barrier ribs, stains due to color mixing may be generated, or reliability may be reduced. In addition, if the composition is applied in a single layer thickness and then cured, it is difficult to achieve a uniform cured film, stains may be generated due to thickness variation, or the quantum dot solution may overflow the barrier ribs having a thin thickness. There are certain limitations to use for quantum dot barrier ribs.
然而,根據實施方式的多層固化膜(或用於量子點阻擋肋之結構)具有6 µm的最小膜厚度。此外,由於施加了著色劑,因此當發射量子點的各種顏色的光時,具有藉由阻擋肋遮光的優點。此外,藉由調節每個固化膜的層的數目和厚度,可以形成具有均勻膜厚度的多層圖案。如果將含氟固化膜施加到最終第n層,則當在噴墨方法中填充量子點溶液時,可以防止排出的量子點溶液溢出到相鄰區域中。However, the multi-layered cured film (or structure for quantum dot blocking ribs) according to the embodiment has a minimum film thickness of 6 µm. In addition, since the coloring agent is applied, when the light of various colors of the quantum dots is emitted, there is an advantage of shielding the light by the blocking ribs. In addition, by adjusting the number and thickness of the layers of each cured film, a multi-layer pattern with a uniform film thickness can be formed. If a fluorine-containing cured film is applied to the final n-th layer, when the quantum dot solution is filled in the inkjet method, the discharged quantum dot solution can be prevented from overflowing into the adjacent area.
本發明能夠藉由以下方法製備呈多層固化膜形式的用於量子點阻擋肋之結構。當形成用於量子點阻擋肋之結構時,可以在單個顯影過程中形成具有適合於量子點阻擋肋的均勻膜厚度的多層圖案。The present invention can prepare a structure for quantum dot blocking ribs in the form of a multi-layered cured film by the following method. When forming the structure for quantum dot blocking ribs, a multi-layered pattern having a uniform film thickness suitable for quantum dot blocking ribs can be formed in a single development process.
具體地,用於製備用於量子點阻擋肋之結構之方法包括在基底上塗覆第一光敏樹脂組成物並且將其固化以形成第一固化膜 (S1);在該第一固化膜上塗覆第二光敏樹脂組成物並且將其固化以形成第二固化膜 (S2);以及使包括該第一固化膜和該第二固化膜的多層固化膜曝光和顯影以形成圖案並且然後將其固化 (S3),Specifically, the method for preparing a structure for quantum dot blocking ribs includes coating a first photosensitive resin composition on a substrate and curing it to form a first cured film (S1); coating a second photosensitive resin composition on the first cured film and curing it to form a second cured film (S2); and exposing and developing a multi-layer cured film including the first cured film and the second cured film to form a pattern and then curing it (S3),
其中該第一光敏樹脂組成物、該第二光敏樹脂組成物或兩者可以包含 (A) 共聚物;(B) 可光聚合化合物;(C) 光聚合引發劑;和 (D) 包含黑色著色劑的著色劑。The first photosensitive resin composition, the second photosensitive resin composition, or both may include (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; and (D) a colorant including a black colorant.
更具體地,根據實施方式的用於製備用於量子點阻擋肋之結構之方法可以包括在基底上塗覆第一光敏樹脂組成物並且將其固化以形成第一固化膜 (S1)。More specifically, the method for preparing a structure for quantum dot barrier ribs according to an embodiment may include coating a first photosensitive resin composition on a substrate and curing it to form a first cured film (S1).
在形成該第一固化膜的步驟中,藉由旋塗法、狹縫塗覆法、輥塗法、網版印刷法、敷抹器法等將根據本發明之光敏樹脂組成物以所希望的厚度(例如,4 µm至8 µm)塗覆在預處理過的基底上,將其藉由從其中除去溶劑固化以形成該第一固化膜。In the step of forming the first cured film, the photosensitive resin composition according to the present invention is coated on the pre-treated substrate with a desired thickness (e.g., 4 μm to 8 μm) by spin coating, slit coating, roll coating, screen printing, applicator method, etc., and is cured by removing the solvent therefrom to form the first cured film.
可以使用各種無機基底如玻璃基底、ITO沈積基底、SiNx 沈積基底和SiONx 沈積基底作為基底。任何材料可用於基底,只要它可用於形成用於量子點阻擋肋之結構。Various inorganic substrates such as a glass substrate, an ITO deposition substrate, a SiNx deposition substrate, and a SiONx deposition substrate can be used as the substrate. Any material can be used for the substrate as long as it can be used to form a structure for quantum dot barrier ribs.
用於形成該第一固化膜的固化可以在70°C至140°C下進行100秒至800秒。固化可以一次進行或分成兩次或更多次。The curing for forming the first cured film may be performed at 70° C. to 140° C. for 100 seconds to 800 seconds. The curing may be performed once or divided into two or more times.
當固化一次進行時,它可以在70°C至140°C下進行100秒至800秒、特別是在80°C至130°C下進行150秒至600秒、特別是在90°C至130°C下進行150秒至500秒。When curing is performed once, it can be performed at 70°C to 140°C for 100 seconds to 800 seconds, particularly at 80°C to 130°C for 150 seconds to 600 seconds, particularly at 90°C to 130°C for 150 seconds to 500 seconds.
當固化以兩次或更多次進行時,例如,它可以作為預烘烤在70°C至100°C下進行50秒至400秒、特別是在70°C至90°C下進行100秒至300秒,並且然後作為中間烘烤在80°C至140°C下進行100秒至500秒、特別是在90°C至130°C下進行100秒至300秒。When curing is performed in two or more times, for example, it can be performed as a pre-bake at 70°C to 100°C for 50 seconds to 400 seconds, particularly at 70°C to 90°C for 100 seconds to 300 seconds, and then as an intermediate bake at 80°C to 140°C for 100 seconds to 500 seconds, particularly at 90°C to 130°C for 100 seconds to 300 seconds.
根據實施方式的用於製備用於量子點阻擋肋之結構之方法可以包括在該第一固化膜上塗覆第二光敏樹脂組成物並且將其固化以形成第二固化膜 (S2)。The method for preparing a structure for quantum dot barrier ribs according to an embodiment may include coating a second photosensitive resin composition on the first cured film and curing it to form a second cured film (S2).
在形成該第二固化膜的步驟中,將該第二光敏樹脂組成物以所希望的厚度(例如,4 µm至8 µm)塗覆在以上步驟S1中獲得的該第一固化膜上,將其藉由從其中除去溶劑固化以形成該第二固化膜。In the step of forming the second cured film, the second photosensitive resin composition is coated on the first cured film obtained in the above step S1 at a desired thickness (eg, 4 to 8 μm), and is cured by removing the solvent therefrom to form the second cured film.
用於形成該第二固化膜的固化可以在70°C至140°C下進行100秒至800秒。固化可以一次進行或分成兩次或更多次。The curing for forming the second cured film may be performed at 70° C. to 140° C. for 100 seconds to 800 seconds. The curing may be performed once or divided into two or more times.
具體地,當固化一次進行時,它可以在70°C至140°C下進行100秒至800秒、特別是在80°C至130°C下進行150秒至600秒、更特別是在90°C至130°C下進行150秒至500秒。Specifically, when curing is performed once, it can be performed at 70°C to 140°C for 100 seconds to 800 seconds, particularly at 80°C to 130°C for 150 seconds to 600 seconds, more particularly at 90°C to 130°C for 150 seconds to 500 seconds.
當固化以兩次或更多次進行時,例如,它可以作為預烘烤在70°C至100°C下進行50秒至400秒、特別是在70°C至90°C下進行100秒至300秒,並且然後作為中間烘烤在80°C至140°C下進行100秒至500秒、特別是在90°C至130°C下進行100秒至300秒。When curing is performed in two or more times, for example, it can be performed as a pre-bake at 70°C to 100°C for 50 seconds to 400 seconds, particularly at 70°C to 90°C for 100 seconds to 300 seconds, and then as an intermediate bake at 80°C to 140°C for 100 seconds to 500 seconds, particularly at 90°C to 130°C for 100 seconds to 300 seconds.
用於該第一固化膜和該第二固化膜的固化條件可以相同或不同。The curing conditions for the first cured film and the second cured film may be the same or different.
在根據實施方式的用於製備用於量子點阻擋肋之結構之方法中,可以使由兩個層構成的多層固化膜曝光和顯影。在製備具有三個或更多個層的固化膜的情況下,可以在第二固化膜上進一步形成具有一個或多個層的固化膜,隨後使其曝光和顯影。在此種情況下,用於製備在該第二固化膜上形成的一個或多個固化膜的光敏樹脂組成物可以與用於製備該第一固化膜和該第二固化膜的光敏樹脂組成物相同或不同。此外,每個固化膜的光學密度可以隨用於製備該第一固化膜和該第二固化膜的光敏樹脂組成物的組分和含量而變化。In the method for preparing a structure for quantum dot blocking ribs according to the embodiment, a multilayer cured film composed of two layers can be exposed and developed. In the case of preparing a cured film having three or more layers, a cured film having one or more layers can be further formed on the second cured film, and then exposed and developed. In this case, the photosensitive resin composition used to prepare the one or more cured films formed on the second cured film can be the same as or different from the photosensitive resin composition used to prepare the first cured film and the second cured film. In addition, the optical density of each cured film can vary depending on the components and content of the photosensitive resin composition used to prepare the first cured film and the second cured film.
根據實施方式的用於製備用於量子點阻擋肋之結構之方法可以包括使包括該第一固化膜和該第二固化膜的多層固化膜曝光和顯影以形成圖案並且然後將其固化 (S3)。The method for preparing a structure for quantum dot barrier ribs according to an embodiment may include exposing and developing a multi-layered cured film including the first cured film and the second cured film to form a pattern and then curing it (S3).
在步驟S3中,為了在如此獲得的多層固化膜上形成圖案,將具有預定形狀的掩膜置於其上,然後將該掩膜用200 nm至500 nm的活化射線進行照射。可以使用低壓汞燈、高壓汞燈、超高壓汞燈、金屬鹵化物燈、氬氣雷射器等作為用於照射的光源。如果需要,還可以使用X射線、電子射線等。曝光劑量可以根據組成物的組分的種類和組成比以及經乾燥的塗層的厚度變化。如果使用高壓汞燈,則它可為500 mJ/cm2 或更低(在365 nm的波長下)。In step S3, in order to form a pattern on the multilayer cured film thus obtained, a mask having a predetermined shape is placed thereon, and then the mask is irradiated with 200 nm to 500 nm of activating rays. A low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, an argon laser, etc. can be used as a light source for irradiation. If necessary, X-rays, electron rays, etc. can also be used. The exposure dose can vary according to the type and composition ratio of the components of the composition and the thickness of the dried coating. If a high-pressure mercury lamp is used, it can be 500 mJ/ cm2 or less (at a wavelength of 365 nm).
在曝光步驟之後,使用鹼性水溶液如碳酸鈉、氫氧化鈉、氫氧化鉀,四甲基氫氧化銨等作為顯影劑來溶解並除去不必要的部分,由此僅曝光部分保留以形成圖案。將藉由顯影獲得的圖像圖案冷卻至室溫並且在熱風循環類型的乾燥爐中後烘烤,從而獲得最終圖案。After the exposure step, an alkaline aqueous solution such as sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, etc. is used as a developer to dissolve and remove unnecessary parts, whereby only the exposed parts remain to form a pattern. The image pattern obtained by development is cooled to room temperature and post-baked in a hot air circulation type drying oven to obtain a final pattern.
曝光可以藉由設置掩模使得每個圖案的間隔係10 µm至30 µm並在其上照射活化射線來進行。Exposure can be performed by setting a mask so that the interval between each pattern is 10 µm to 30 µm and irradiating activating rays thereon.
顯影可以進行50秒至300秒、特別是100秒至300秒。Development can be performed for 50 seconds to 300 seconds, particularly 100 seconds to 300 seconds.
在形成圖案後的固化,即,後烘烤在150°C至300°C下進行10分鐘至60分鐘、特別是在180°C至280°C下進行20分鐘至50分鐘、更特別是在200°C至260°C下進行20分鐘至40分鐘。Curing after patterning, i.e., post-baking, is performed at 150°C to 300°C for 10 to 60 minutes, particularly at 180°C to 280°C for 20 to 50 minutes, and more particularly at 200°C to 260°C for 20 to 40 minutes.
按照根據實施方式的用於製備量子點阻擋肋之方法,可以在單個顯影過程中形成具有適合於量子點阻擋肋的均勻膜厚度的多層圖案。According to the method for preparing quantum dot barrier ribs according to the embodiment, a multi-layer pattern having a uniform film thickness suitable for quantum dot barrier ribs can be formed in a single development process.
本發明提供了藉由根據以上實施方式的用於製備量子點阻擋肋之方法製備的用於量子點阻擋肋之結構。The present invention provides a structure for quantum dot barrier ribs prepared by the method for preparing quantum dot barrier ribs according to the above embodiments.
在根據實施方式的用於量子點阻擋肋之結構中,以規則的間隔形成圖案,如圖2至4所示。它可由具有兩個或更多個層的多層構成。In the structure for quantum dot barrier ribs according to the embodiment, a pattern is formed at regular intervals as shown in FIGS. 2 to 4. It may be composed of a multilayer having two or more layers.
根據實施方式的用於量子點阻擋肋之結構(200)可為由包括在基底(210)上形成的第一固化膜(211)和第二固化膜(212)的兩個層構成的用於量子點阻擋肋的多層結構(200),如圖2所示。The structure (200) for quantum dot blocking ribs according to the embodiment may be a multi-layer structure (200) for quantum dot blocking ribs composed of two layers including a first cured film (211) and a second cured film (212) formed on a substrate (210), as shown in FIG. 2 .
具體地,用於量子點阻擋肋之結構(200)可為用於量子點阻擋肋的兩層結構(200),其係藉由使兩層固化膜曝光和顯影以形成圖案並且然後將其後烘烤製備的,其中該兩層固化膜包含藉由在基底(210)上塗覆第一光敏樹脂組成物並且將其固化而形成的第一固化膜(211);和藉由在該第一固化膜(211)上塗覆第二光敏樹脂組成物並且將其固化而形成的第二固化膜(212)。Specifically, the structure (200) for quantum dot blocking ribs can be a two-layer structure (200) for quantum dot blocking ribs, which is prepared by exposing and developing two layers of cured films to form a pattern and then baking them, wherein the two layers of cured films include a first cured film (211) formed by coating a first photosensitive resin composition on a substrate (210) and curing it; and a second cured film (212) formed by coating a second photosensitive resin composition on the first cured film (211) and curing it.
根據另一個實施方式的用於量子點阻擋肋之結構(300)可為由包括第一固化膜(311)、第二固化膜(312)和第三固化膜(313)的三個層構成的用於量子點阻擋肋的多層結構(300),如圖3所示。According to another embodiment, the structure (300) for quantum dot blocking ribs may be a multi-layer structure (300) for quantum dot blocking ribs composed of three layers including a first cured film (311), a second cured film (312) and a third cured film (313), as shown in FIG. 3 .
具體地,用於量子點阻擋肋之結構(300)可為用於量子點阻擋肋的三層結構(300),其係藉由使三層固化膜曝光和顯影以形成圖案並且然後將其後烘烤製備的,其中該三層固化膜包含藉由在基底(310)上塗覆第一光敏樹脂組成物並且將其固化而形成的第一固化膜(311);藉由在該第一固化膜(311)上塗覆第二光敏樹脂組成物並且將其固化而形成的第二固化膜(312);和藉由在該第二固化膜(312)上塗覆第三光敏樹脂組成物並且將其固化而形成的第三固化膜(313)。Specifically, the structure (300) for quantum dot blocking ribs can be a three-layer structure (300) for quantum dot blocking ribs, which is prepared by exposing and developing a three-layer cured film to form a pattern and then baking it, wherein the three-layer cured film includes a first cured film (311) formed by coating a first photosensitive resin composition on a substrate (310) and curing it; a second cured film (312) formed by coating a second photosensitive resin composition on the first cured film (311) and curing it; and a third cured film (313) formed by coating a third photosensitive resin composition on the second cured film (312) and curing it.
根據另一個實施方式的用於量子點阻擋肋之結構(400)可為由包括第一固化膜(411)、第二固化膜(412)、第三固化膜(413)和第n固化膜(nn)的n個層構成的用於量子點阻擋肋的多層結構(400),如圖4所示。According to another embodiment, the structure (400) for quantum dot blocking ribs may be a multi-layer structure (400) for quantum dot blocking ribs composed of n layers including a first cured film (411), a second cured film (412), a third cured film (413) and an nth cured film (nn), as shown in FIG. 4 .
具體地,用於量子點阻擋肋之結構(400)可為用於量子點阻擋肋的n層結構(400),其係藉由使n層固化膜曝光和顯影以形成圖案並且然後將其後烘烤製備的,其中該n層固化膜包含藉由在基底(410)上塗覆第一光敏樹脂組成物並且將其固化而形成的第一固化膜(411);藉由在該第一固化膜(411)上塗覆第二光敏樹脂組成物並且將其固化而形成的第二固化膜(412);藉由在該第二固化膜(412)上塗覆第三光敏樹脂組成物並且將其固化而形成的第三固化膜(413);和藉由在該第三固化膜(413)上塗覆第n光敏樹脂組成物並且將其固化而形成的第n固化膜(nn)。在此,n可為4或更大,特別是4至10、4至8、4至6、或4至5。Specifically, the structure (400) for quantum dot blocking ribs may be an n-layer structure (400) for quantum dot blocking ribs, which is prepared by exposing and developing n-layer cured films to form patterns and then baking them, wherein the n-layer cured films include a first cured film (411) formed by coating a first photosensitive resin composition on a substrate (410) and curing it; A second cured film (412) is formed by coating a second photosensitive resin composition on a first cured film (411) and curing it; a third cured film (413) is formed by coating a third photosensitive resin composition on the second cured film (412) and curing it; and an nth cured film (nn) is formed by coating an nth photosensitive resin composition on the third cured film (413) and curing it. Here, n may be 4 or more, particularly 4 to 10, 4 to 8, 4 to 6, or 4 to 5.
在用於量子點阻擋肋之結構中,各自固化膜的厚度和光密度可以相同或不同。In the structure for quantum dot barrier ribs, the thickness and optical density of the respective cured films may be the same or different.
用於量子點阻擋肋之結構可以具有0.05/µm至2.0/µm、0.05/µm至1.5/µm、0.05/µm至1.0/µm、0.05/µm至0.5/µm、或0.1/µm至0.2/µm的光學密度。在此,在550 nm的透射率可以使用光學密度計(由Xlite公司製造的361T)測量以獲得基於1 µm的厚度的光學密度(OD,單位:/µm)。由此,用於量子點阻擋肋之結構可以具有0.5至10.0、1.0至6.0、或1.0至4.0的總光學密度。總光學密度係藉由將單位光學密度乘以用於量子點阻擋肋之結構的總厚度獲得的值。The structure for quantum dot blocking ribs may have an optical density of 0.05/µm to 2.0/µm, 0.05/µm to 1.5/µm, 0.05/µm to 1.0/µm, 0.05/µm to 0.5/µm, or 0.1/µm to 0.2/µm. Here, the transmittance at 550 nm may be measured using an optical densitometer (361T manufactured by Xlite Corporation) to obtain an optical density (OD, unit: /µm) based on a thickness of 1 µm. Thus, the structure for quantum dot blocking ribs may have a total optical density of 0.5 to 10.0, 1.0 to 6.0, or 1.0 to 4.0. The total optical density is a value obtained by multiplying the unit optical density by the total thickness of the structure for quantum dot blocking ribs.
如果光學密度和總光學密度在以上範圍內,則可以進一步提高顯示幕的解析度。If the optical density and total optical density are within the above range, the resolution of the display can be further improved.
使用SCAN PLUS藉由設備探針尖端的豎直運動測量用於量子點阻擋肋之結構的固化膜的高度差,該SCAN PLUS係α-台階儀器(α-台階輪廓儀)。從結果獲得固化膜的厚度。最終膜厚度係藉由測量藉由經由曝光和顯影形成圖案並且然後將其後烘烤製備的用於量子點阻擋肋之結構的最終膜獲得的值。其包括整個多層固化膜,並且最終膜厚度可為6 µm至20 µm。The height difference of the cured film of the structure for quantum dot blocking ribs is measured by the vertical movement of the tip of the probe of the equipment using SCAN PLUS, which is an α-step instrument (α-step profiler). The thickness of the cured film is obtained from the result. The final film thickness is a value obtained by measuring the final film of the structure for quantum dot blocking ribs prepared by forming a pattern through exposure and development and then baking it thereafter. It includes the entire multi-layer cured film, and the final film thickness can be 6 µm to 20 µm.
此外,在用於量子點阻擋肋之結構中,在360 nm至740 nm、或550 nm的波長下藉由SCI(包括鏡面反射分量)方法測量的反射率RSCI 和藉由SCE(不包括鏡面反射分量)方法測量的反射率RSCE 可以分別滿足以下關係式: (關係式1)RSCI ≤ 5.0% (關係式2)RSCE ≤ 0.5% (關係式3)2 ≤ RSCE /RSCI ≤10。In addition, in the structure for quantum dot barrier ribs, the reflectivity R SCI measured by the SCI (including the mirror reflection component) method and the reflectivity R SCE measured by the SCE (excluding the mirror reflection component) method at a wavelength of 360 nm to 740 nm, or 550 nm can respectively satisfy the following relationships: (Relationship 1) R SCI ≤ 5.0% (Relationship 2) R SCE ≤ 0.5% (Relationship 3) 2 ≤ R SCE /R SCI ≤10.
具體地,RSCI 可為5.0%或更小、4.8%或更小、4.6%或更小、4.0%至4.8%、或4.0%至4.6%。RSCE 可為0.5%或更小、0.4%或更小、0.1%至0.5%、0.1%至0.4%、或0.2%至0.4%。它們之間的比率(即,RSCE /RSCI )可為2至10、2至9、2至8、3至8、4至8、或4至7.5。因此,可以滿足低反射率和高遮光特性的特徵,並且可以防止紅色、綠色等的光洩漏。Specifically, RSCI may be 5.0% or less, 4.8% or less, 4.6% or less, 4.0% to 4.8%, or 4.0% to 4.6%. RSCE may be 0.5% or less, 0.4% or less, 0.1% to 0.5%, 0.1% to 0.4%, or 0.2% to 0.4%. The ratio therebetween (i.e., RSCE / RSCI ) may be 2 to 10, 2 to 9, 2 to 8, 3 to 8, 4 to 8, or 4 to 7.5. Therefore, the characteristics of low reflectivity and high light shielding properties can be satisfied, and light leakage of red, green, etc. can be prevented.
由於如此製備的用於量子點阻擋肋之結構具有優異的特性,所以它可以有利地用於量子點顯示器。進行本發明之實施方式 Since the structure for quantum dot barrier ribs prepared in this way has excellent properties, it can be advantageously used in quantum dot displays.
在下文中,將參照以下實例更詳細地描述本發明。然而,提供該等實例以說明本發明,並且本發明之範圍不僅限於此。Hereinafter, the present invention will be described in more detail with reference to the following examples. However, these examples are provided to illustrate the present invention, and the scope of the present invention is not limited thereto.
在以下合成實例中,重量平均分子量藉由凝膠滲透層析法(GPC,洗脫液:四氫呋喃)參照聚苯乙烯標準品來確定。合成實例 1 :共聚物 (A-1) 的製備 In the following synthesis examples, the weight average molecular weight was determined by gel permeation chromatography (GPC, eluent: tetrahydrofuran) with reference to a polystyrene standard. Synthesis Example 1 : Preparation of Copolymer (A-1)
向配備有回流冷凝器和攪拌器的500-ml圓底燒瓶中裝入100 g由50莫耳%的N-苯基馬來醯亞胺(PMI)、6莫耳%的苯乙烯(Sty)、10莫耳%的4-羥丁基丙烯酸酯縮水甘油醚(4-HBAGE)和34莫耳%的(甲基)丙烯酸(MAA)組成的混合物,連同300 g作為溶劑的丙二醇單甲醚乙酸酯(PGMEA)和2 g作為自由基聚合引發劑的2,2'-偶氮雙(2,4-二甲基戊腈)。此後,將混合物加熱至70°C並攪拌5小時以獲得具有31重量%的固體含量的共聚物 (A-1) 溶液。如此製備的共聚物具有100 mg KOH/g的酸值和7,000 Da的藉由凝膠滲透層析法測量的以聚苯乙烯為參考的重量平均分子量(Mw)。合成實例 2 :共聚物 (A-2) 的製備 Into a 500-ml round-bottom flask equipped with a reflux condenser and a stirrer, 100 g of a mixture consisting of 50 mol% of N-phenylmaleimide (PMI), 6 mol% of styrene (Sty), 10 mol% of 4-hydroxybutyl acrylate glycidyl ether (4-HBAGE) and 34 mol% of (meth)acrylic acid (MAA) was charged, together with 300 g of propylene glycol monomethyl ether acetate (PGMEA) as a solvent and 2 g of 2,2'-azobis(2,4-dimethylvaleronitrile) as a radical polymerization initiator. Thereafter, the mixture was heated to 70°C and stirred for 5 hours to obtain a copolymer (A-1) solution having a solid content of 31 wt%. The copolymer thus prepared had an acid value of 100 mg KOH/g and a weight average molecular weight (Mw) of 7,000 Da measured by gel permeation chromatography with reference to polystyrene. Synthesis Example 2 : Preparation of Copolymer (A-2)
在氮氣氛下在配備有回流冷凝器和攪拌器的250-ml圓底燒瓶中,將30 g由30莫耳%的(甲基)丙烯酸甲酯、20莫耳%的(甲基)丙烯酸、30莫耳%的(甲基)丙烯酸六氟異丙酯和20莫耳%的(甲基)丙烯酸丁酯組成的單體混合物和其中2.74 g作為自由基聚合引發劑的V-59已經溶於30 g作為溶劑的丙二醇甲醚乙酸酯(PGMEA)的混合物在4小時內滴加到加熱至80°C的溶劑中。然後使其進行聚合持續20小時以獲得共聚物 (A-2)。如此製備的共聚物具有85 mg KOH/g的酸值、當藉由凝膠滲透層析法測量並以聚苯乙烯為參考時9,053 Da的重量平均分子量(Mw)、30.5重量%的固體含量、以及2.3的多分散性(Mw/Mn)。合成實例 3 :共聚物 (A-3) 的製備 In a 250-ml round-bottom flask equipped with a reflux condenser and a stirrer under a nitrogen atmosphere, 30 g of a monomer mixture consisting of 30 mol% of methyl (meth)acrylate, 20 mol% of (meth)acrylic acid, 30 mol% of hexafluoroisopropyl (meth)acrylate and 20 mol% of butyl (meth)acrylate and a mixture in which 2.74 g of V-59 as a radical polymerization initiator had been dissolved in 30 g of propylene glycol methyl ether acetate (PGMEA) as a solvent were added dropwise to a solvent heated to 80°C over 4 hours. Then, polymerization was continued for 20 hours to obtain a copolymer (A-2). The copolymer thus prepared had an acid value of 85 mg KOH/g, a weight average molecular weight (Mw) of 9,053 Da when measured by gel permeation chromatography and referenced to polystyrene, a solid content of 30.5 wt %, and a polydispersity (Mw/Mn) of 2.3. Synthesis Example 3 : Preparation of Copolymer (A-3)
在氮氣氛下在配備有回流冷凝器和攪拌器的250-ml圓底燒瓶中,將30 g由30莫耳%的(甲基)丙烯酸甲酯、20莫耳%的(甲基)丙烯酸、30莫耳%的(甲基)丙烯酸八氟戊酯和20莫耳%的(甲基)丙烯酸丁酯組成的單體混合物和其中2.74 g作為自由基聚合引發劑的V-59已經溶於30 g作為溶劑的丙二醇甲醚乙酸酯(PGMEA)的混合物在4小時內滴加到加熱至80°C的溶劑中。然後使其進行聚合持續20小時以獲得共聚物 (A-3)。如此製備的共聚物具有66 mg KOH/g的酸值、當藉由凝膠滲透層析法測量並以聚苯乙烯為參考時14,968 Da的重量平均分子量(Mw)、31.2重量%的固體含量、以及2.3的多分散性(Mw/Mn)。合成實例 4 :共聚物 (A-4) 的製備 In a 250-ml round-bottom flask equipped with a reflux condenser and a stirrer under a nitrogen atmosphere, 30 g of a monomer mixture consisting of 30 mol% of methyl (meth)acrylate, 20 mol% of (meth)acrylic acid, 30 mol% of octafluoropentyl (meth)acrylate and 20 mol% of butyl (meth)acrylate and a mixture in which 2.74 g of V-59 as a radical polymerization initiator had been dissolved in 30 g of propylene glycol methyl ether acetate (PGMEA) as a solvent were added dropwise to a solvent heated to 80° C. over 4 hours. The polymerization was then continued for 20 hours to obtain a copolymer (A-3). The copolymer thus prepared had an acid value of 66 mg KOH/g, a weight average molecular weight (Mw) of 14,968 Da when measured by gel permeation chromatography and referenced to polystyrene, a solid content of 31.2 wt %, and a polydispersity (Mw/Mn) of 2.3. Synthesis Example 4 : Preparation of Copolymer (A-4)
在氮氣氛下在配備有回流冷凝器和攪拌器的250-ml圓底燒瓶中,將30 g由30莫耳%的(甲基)丙烯酸甲酯、20莫耳%的(甲基)丙烯酸、30莫耳%的(甲基)丙烯酸三氟乙酯和20莫耳%的(甲基)丙烯酸丁酯組成的單體混合物和其中2.74 g作為自由基聚合引發劑的V-59已經溶於30 g作為溶劑的丙二醇甲醚乙酸酯(PGMEA)的混合物在4小時內滴加到加熱至80°C的溶劑中。然後使其進行聚合持續20小時以獲得共聚物 (A-4)。如此製備的共聚物具有98 mg KOH/g的酸值、當藉由凝膠滲透層析法測量並以聚苯乙烯為參考時7,551 Da的重量平均分子量(Mw)、31.6重量%的固體含量、以及2.04的多分散性(Mw/Mn)。In a 250-ml round-bottom flask equipped with a reflux condenser and a stirrer under a nitrogen atmosphere, 30 g of a monomer mixture consisting of 30 mol% of methyl (meth)acrylate, 20 mol% of (meth)acrylic acid, 30 mol% of trifluoroethyl (meth)acrylate and 20 mol% of butyl (meth)acrylate and a mixture in which 2.74 g of V-59 as a radical polymerization initiator had been dissolved in 30 g of propylene glycol methyl ether acetate (PGMEA) as a solvent were added dropwise to a solvent heated to 80° C. over 4 hours. The polymerization was then continued for 20 hours to obtain a copolymer (A-4). The copolymer thus prepared had an acid value of 98 mg KOH/g, a weight average molecular weight (Mw) of 7,551 Da when measured by gel permeation chromatography and referenced to polystyrene, a solids content of 31.6 wt %, and a polydispersity (Mw/Mn) of 2.04.
在合成實例1至4的共聚物的製備中使用的結構單元及其含量在下表1中示出。The structural units used in the preparation of the copolymers of Synthesis Examples 1 to 4 and their contents are shown in Table 1 below.
[表1]
使用以上合成實例中製備的共聚物製備以下製備實例的光敏樹脂組成物。The photosensitive resin composition of the following Preparation Example was prepared using the copolymer prepared in the above Synthesis Example.
在以下製備實例中使用的組分如下表2中所示。The components used in the following preparation examples are shown in Table 2 below.
[表2]
將100重量份(固體含量)的作為共聚物的在合成實例1中獲得的共聚物 (A-1),40重量份的作為可光聚合化合物 (B) 的6-官能二新戊四醇六丙烯酸酯(DPHA)(B-1,日本化藥株式會社),40重量份的4-官能二(三羥甲基丙烷)四丙烯酸酯(B-2,商品名T-1420,日本化藥株式會社),作為光聚合引發劑 (C) 的2.0重量份的N-1919(基於肟的光引發劑1)(C-1)、1.0重量份的SPI-03(基於肟的光引發劑2)(C-2)、和0.4重量份的(E)-2-(4-苯乙烯基苯基)-4,6-雙(三氯甲基)-1,3,5-三𠯤(三𠯤光引發劑3)(C-3),6.8重量份的作為黑色有機著色劑 (D-2) 的BK-7539(TOKUSHIKI有限公司),0.2重量份的作為表面活性劑 (E) 的F563(DIC公司),以及0.5重量份的作為添加劑的MIPHOTO GHP03HHP(美源商事株式會社)(環氧固化劑 (F-1))均勻地混合。將丙二醇單甲醚乙酸酯(PGMEA)添加到混合物中使得混合物的固體含量係25重量%。將所得物使用振動器混合2小時以製備液相光敏樹脂組成物。製備實例 1-2 :第二光敏樹脂組成物 100 parts by weight (solid content) of the copolymer (A-1) obtained in Synthesis Example 1 as a copolymer, 40 parts by weight of 6-functional dipentatriol hexaacrylate (DPHA) (B-1, Nippon Kayaku Co., Ltd.) as a photopolymerizable compound (B), 40 parts by weight of 4-functional di(trihydroxymethylpropane) tetraacrylate (B-2, trade name T-1420, Nippon Kayaku Co., Ltd.) as a photopolymerization initiator (C) 2.0 parts by weight of N-1919 (oxime-based photoinitiator 1) (C-1), 1.0 parts by weight of SPI-03 (oxime-based photoinitiator 2) (C-2), and 0.4 parts by weight of (E)-2-(4-phenylvinylphenyl)-4,6-bis(trichloromethyl)-1,3,5-trioxane (trioxane photoinitiator 3) (C-3), 6.8 parts by weight of BK-7539 (TOKUSHIKI Co., Ltd.) as a black organic colorant (D-2), 0.2 parts by weight of F563 (DIC Corporation) as a surfactant (E), and 0.5 parts by weight of MIPHOTO as an additive. GHP03HHP (Migen Shoji Co., Ltd.) (epoxy curing agent (F-1)) was uniformly mixed. Propylene glycol monomethyl ether acetate (PGMEA) was added to the mixture so that the solid content of the mixture was 25% by weight. The resultant was mixed for 2 hours using a vibrator to prepare a liquid phase photosensitive resin composition. Preparation Example 1-2 : Second photosensitive resin composition
以與製備實例1-1中相同的方式製備光敏樹脂組成物,除了將0.6重量份的SPI-03(基於肟的光引發劑2)(C-2)和0.4重量份的(E)-2-(4-苯乙烯基苯基)-4,6-雙(三氯甲基)-1,3,5-三𠯤(三𠯤光引發劑3)(C-3) 用作光聚合引發劑 (C),以及將12.7重量份的BK-7539(TOKUSHIKI有限公司)用作有機著色劑 (D-2),將其均勻地混合而不添加添加劑,並且添加丙二醇單甲醚乙酸酯(PGMEA)(G-1)和乙酸3-甲氧基丁酯(3BMA)(G-2)的混合物使得混合物的固體含量係25重量%。製備實例 2-1 至 25-2 A photosensitive resin composition was prepared in the same manner as in Preparation Example 1-1, except that 0.6 parts by weight of SPI-03 (oxime-based photoinitiator 2) (C-2) and 0.4 parts by weight of (E)-2-(4-phenylvinylphenyl)-4,6-bis(trichloromethyl)-1,3,5-trioxane (trioxane photoinitiator 3) (C-3) were used as a photopolymerization initiator (C), and 12.7 parts by weight of BK-7539 (TOKUSHIKI Co., Ltd.) was used as an organic colorant (D-2), which were uniformly mixed without adding an additive, and a mixture of propylene glycol monomethyl ether acetate (PGMEA) (G-1) and 3-methoxybutyl acetate (3BMA) (G-2) was added so that the solid content of the mixture was 25% by weight. Preparation Examples 2-1 to 25-2
以與製備實例1-1中相同的方式製備光敏樹脂組成物,除了如下表3中所示改變對應組分的種類和/或含量。A photosensitive resin composition was prepared in the same manner as in Preparation Example 1-1, except that the kinds and/or contents of the corresponding components were changed as shown in Table 3 below.
[表3]
將在製備實例1-1中獲得的光敏樹脂組成物作為第一光敏樹脂組成物塗覆在浸入蒸餾水中的玻璃基底上並且然後使用旋轉塗覆器乾燥。將其在90°C下預烘烤150秒以形成厚度為6.0 µm或更大的塗覆膜。將該塗覆膜進一步在130°C下進行中間烘烤持續300秒以除去溶劑,以形成第一固化膜(即,下層膜)。The photosensitive resin composition obtained in Preparation Example 1-1 was coated as a first photosensitive resin composition on a glass substrate immersed in distilled water and then dried using a rotary coater. It was pre-baked at 90°C for 150 seconds to form a coating film having a thickness of 6.0 μm or more. The coating film was further intermediate-baked at 130°C for 300 seconds to remove the solvent to form a first cured film (i.e., lower film).
將在製備實例1-2中獲得的光敏樹脂組成物作為第二光敏樹脂組成物塗覆在該第一固化膜上。將其在90°C下預烘烤150秒以形成厚度為6.0 µm或更大的第二固化膜(即,上層膜),從而製備具有兩個層的多層固化膜。The photosensitive resin composition obtained in Preparation Example 1-2 was applied as a second photosensitive resin composition on the first cured film, and pre-baked at 90° C. for 150 seconds to form a second cured film (i.e., upper film) having a thickness of 6.0 μm or more, thereby preparing a multilayer cured film having two layers.
此後,將掩膜置於該多層固化膜上使得其5 cm乘5 cm的面積被100%曝光並且使得與基底的間隙以接觸方式最小化。此後,使用發射具有200 nm至450 nm波長的光的對準器(型號名稱:MA6),基於365 nm的波長以150 mJ/cm2 的曝光劑量使其曝光一定時間段。然後用稀釋至濃度為0.04重量%的氫氧化鉀水溶液在23°C下使其顯影直至將未曝光的部分完全洗掉。將如此形成的圖案在230°C的烘箱中後烘烤30分鐘以製備用於量子點阻擋肋之結構。實例 2 至 13 Thereafter, a mask was placed on the multi-layer cured film so that its 5 cm by 5 cm area was 100% exposed and the gap with the substrate was minimized in contact. Thereafter, an aligner (model name: MA6) emitting light with a wavelength of 200 nm to 450 nm was used to expose it for a certain period of time at an exposure dose of 150 mJ/ cm2 based on a wavelength of 365 nm. It was then developed at 23°C with an aqueous potassium hydroxide solution diluted to a concentration of 0.04 wt% until the unexposed portion was completely washed off. The pattern thus formed was post-baked in an oven at 230°C for 30 minutes to prepare a structure for quantum dot barrier ribs. Examples 2 to 13
以與實例1中相同的方式製備包含多層固化膜的用於量子點阻擋肋之結構,除了使用具有如上表3所示的組分和含量的第一光敏樹脂組成物和第二光敏樹脂組成物(製備實例2-1至13-2)以及如下表4和6所示改變顯影時間和膜厚度。對比實例 1 至 11 A structure for quantum dot barrier ribs comprising a multi-layered cured film was prepared in the same manner as in Example 1, except that the first photosensitive resin composition and the second photosensitive resin composition having the components and contents shown in Table 3 above were used (Preparation Examples 2-1 to 13-2) and the developing time and film thickness were changed as shown in Tables 4 and 6 below. Comparative Examples 1 to 11
以與實例1中相同的方式製備包含單層固化膜的用於量子點阻擋肋之結構,除了使用具有如上表3所示的組分和含量的光敏樹脂組成物(製備實例14至24)形成第一固化膜以及如下表4和6所示改變顯影時間和膜厚度以製備單層固化膜。對比實例 12 A structure for quantum dot barrier ribs including a single-layer cured film was prepared in the same manner as in Example 1, except that a photosensitive resin composition having the components and contents shown in Table 3 above (Preparation Examples 14 to 24) was used to form a first cured film and the development time and film thickness were changed as shown in Tables 4 and 6 below to prepare a single-layer cured film. Comparative Example 12
以與實例1中相同的方式製備包含多層固化膜的用於量子點阻擋肋之結構,除了使用具有如上表3所示的組分和含量的第一光敏樹脂組成物(製備實例25-1)和第二光敏樹脂組成物(製備實例25-2)以及如下表4和6所示改變顯影時間和膜厚度。評估實例 1 :顯影時間 A structure for quantum dot barrier ribs comprising a multi-layer cured film was prepared in the same manner as in Example 1, except that a first photosensitive resin composition (Preparation Example 25-1) and a second photosensitive resin composition (Preparation Example 25-2) having the components and contents shown in Table 3 above were used and the developing time and film thickness were changed as shown in Tables 4 and 6 below. Evaluation Example 1 : Development Time
在實例和對比實例的用於製備用於量子點阻擋肋之結構之方法中用0.04重量%的氫氧化鉀水溶液顯影時,測量未曝光部分完全洗掉的時間(直至顯影設備的台O型圈部分在基底後面完全可見)。When developing with a 0.04 wt % potassium hydroxide aqueous solution in the method for preparing a structure for quantum dot blocking ribs of Examples and Comparative Examples, the time until the unexposed portion was completely washed away (until the O-ring portion of the developing device was completely visible behind the substrate) was measured.
- 如果顯影時間係300秒或更短時,將其評估為○。如果它超過300秒,則將其評估為x。評估實例 2 :線圖案的解析度和臨界尺寸 - If the development time is 300 seconds or less, it is evaluated as ○. If it exceeds 300 seconds, it is evaluated as x. Evaluation Example 2 : Resolution and critical size of line pattern
為了測量實例和對比實例的用於量子點阻擋肋之結構中的線圖案的圖案解析度和臨界尺寸(CD;單位:µm),用微光學顯微鏡(STM6-LM,製造商:奧林巴斯公司(OLYMPUS))和X射線掃描電子顯微鏡(SEM;S4300)觀察線CD。結果在圖5和6中示出。In order to measure the pattern resolution and critical dimension (CD; unit: µm) of the line pattern in the structure of the quantum dot barrier rib of the example and the comparative example, the line CD was observed using a micro-optical microscope (STM6-LM, manufacturer: OLYMPUS) and an X-ray scanning electron microscope (SEM; S4300). The results are shown in FIGS. 5 and 6.
此外,觀察光掩模的13-µm線圖案的尺寸以測量解析度。即,測量在固化之後的線圖案的圖案尺寸(在最佳曝光劑量條件(150 mJ/cm2 )下13 µm圖案化)。該值越小,解析度越優異,因為可以形成更小的圖案。In addition, the size of the 13-µm line pattern of the photomask was observed to measure the resolution. That is, the pattern size of the line pattern after curing (13 µm patterning under the optimal exposure dose condition (150 mJ/cm 2 )) was measured. The smaller the value, the more excellent the resolution is because a smaller pattern can be formed.
- 如果解析度大於0至20 µm,則將其評估為○。如果它超過20 µm,則將其評估為x。評估實例 3 :後烘烤之前和之後的固化膜的厚度 - If the resolution is greater than 0 to 20 µm, it is evaluated as ○. If it exceeds 20 µm, it is evaluated as x. Evaluation Example 3 : Thickness of the cured film before and after post-baking
使用SCAN PLUS藉由設備探針尖端的豎直運動測量實例和對比實例各自的用於量子點阻擋肋之結構的高度差,該SCAN PLUS係α-台階儀器(α-台階輪廓儀)。從結果獲得其厚度。The height difference of the structure for the quantum dot blocking rib of each of the example and the comparative example was measured by vertical motion of the probe tip of the device using SCAN PLUS, which is an α-step instrument (α-step profiler). The thickness thereof was obtained from the result.
初始膜厚度係指在用於量子點阻擋肋之結構的製備中在曝光和顯影步驟之前在預烘烤後形成的膜的厚度(即,後烘烤之前的膜厚度)。The initial film thickness refers to the thickness of a film formed after pre-baking prior to exposure and development steps in the preparation of a structure for quantum dot barrier ribs (ie, the film thickness before post-baking).
最終膜厚度係指在用於量子點阻擋肋之結構的製備中在曝光和顯影步驟以形成圖案並將其後烘烤後形成的用於量子點阻擋肋之結構的最終膜的厚度(即,後烘烤之後的膜厚度)。The final film thickness refers to the thickness of the final film of the structure for quantum dot blocking ribs formed after exposure and development steps to form a pattern and subsequent baking in the preparation of the structure for quantum dot blocking ribs (i.e., the film thickness after post-baking).
- 如果初始膜厚度和最終膜厚度係多層的,則將其評估為○。如果它們係單層的,則將其評估為x。評估實例 4 :光學密度 - If the initial film thickness and the final film thickness are multi-layered, they are evaluated as ○. If they are single-layered, they are evaluated as x. Evaluation Example 4 : Optical Density
使用光學密度計(由Xlite公司製造的361T)測量實例和對比實例的用於量子點阻擋肋之結構的固化膜的在550 nm的透射率。確定基於1 µm的厚度的光學密度(OD,單位:/µm)和最終膜厚度的光學密度。總光學密度係藉由將基於1 µm的光學密度乘以最終膜厚度獲得的值(在對比實例11和12的情況下,總光學密度係基於後烘烤之前的膜厚度計算的)。The transmittance at 550 nm of the cured film of the structure for quantum dot blocking ribs of the examples and comparative examples was measured using an optical densitometer (361T manufactured by Xlite Corporation). The optical density (OD, unit: /µm) based on a thickness of 1 µm and the optical density of the final film thickness were determined. The total optical density is a value obtained by multiplying the optical density based on 1 µm by the final film thickness (in the case of comparative examples 11 and 12, the total optical density was calculated based on the film thickness before post-baking).
總光學密度 = 基於1 µm的光學密度(/µm) X 最終膜厚度(µm)評估實例 5 :反射率 Total optical density = optical density based on 1 µm (/µm) X final film thickness (µm) Evaluation Example 5 : Reflectivity
在550 nm的波長下使用分光光度計裝置(CM-3700A)測量實例和對比實例各自的用於量子點阻擋肋之結構的固化膜的RSCI 和RSCE 。然後計算它們之間的比率(RSCE /RSCI )。The R SCI and R SCE of the cured films of each of the Example and the Comparative Example for the structure of the quantum dot barrier rib were measured using a spectrophotometer device (CM-3700A) at a wavelength of 550 nm, and then the ratio therebetween (R SCE /R SCI ) was calculated.
- 如果RSCI 係5.0%或更小,則將其評估為○。如果它超過5.0%,則將其評估為x。- If RSCI is 5.0% or less, it is evaluated as ○. If it exceeds 5.0%, it is evaluated as x.
- 如果RSCE 係0.5%或更小,則將其評估為○。如果它超過0.5%,則將其評估為x。- If RSCE is 0.5% or less, it is evaluated as ○. If it exceeds 0.5%, it is evaluated as x.
- 如果RSCE /RSCI 係2%至10%,則將其評估為○。如果它係小於2.0%或大於10%,則將其評估為x。評估實例 6 :接觸角 - If R SCE /R SCI is 2% to 10%, it is evaluated as ○. If it is less than 2.0% or greater than 10%, it is evaluated as x. Evaluation Example 6 : Contact Angle
使用2-乙氧基乙醇(極性溶劑)和接觸角測量裝置(DM300,共和電業株式會社(Kyowa))測量實例和對比實例各自的用於量子點阻擋肋之結構的固化膜的接觸角。The contact angle of the cured film of each of the examples and comparative examples for the structure of the quantum dot blocking rib was measured using 2-ethoxyethanol (polar solvent) and a contact angle measurement device (DM300, Kyowa).
- 確認不含有含氟共聚物的固化膜,接觸角為0°,並且含有含氟共聚物的固化膜具有10°至20°的接觸角。- Confirm that the cured film without the fluorinated copolymer has a contact angle of 0°, and the cured film containing the fluorinated copolymer has a contact angle of 10° to 20°.
評估實例的結果在下表4至7中示出。The results of the evaluation examples are shown in Tables 4 to 7 below.
[表4]
[表5]
[表6]
[表7]
如表4至7所示,使用製備實例1-1至13-2的光敏樹脂組成物由多層固化膜製備的實例1至13的用於量子點阻擋肋之結構具有滿足6 µm至20 µm範圍之總厚度。可以形成可用於量子點阻擋肋的足夠的厚度。如果將具有在以上範圍內的厚度的多層固化膜用作量子點阻擋肋,則當滴落量子點溶液時,它不會溢出阻擋肋。因此,顏色的組成物不會混合,並且可以防止解析度劣化。As shown in Tables 4 to 7, the structures for quantum dot barrier ribs of Examples 1 to 13 prepared from multilayer cured films using the photosensitive resin compositions of Preparation Examples 1-1 to 13-2 have a total thickness satisfying the range of 6 µm to 20 µm. A sufficient thickness for quantum dot barrier ribs can be formed. If a multilayer cured film having a thickness within the above range is used as a quantum dot barrier rib, when a quantum dot solution is dripped, it does not overflow the barrier rib. Therefore, the color components are not mixed, and resolution degradation can be prevented.
此外,實例1至13的用於量子點阻擋肋之結構具有5%或更小的RSCI 、0.5%或更小的RSCE 、和2至10的RSCE /RSC 。因此,確認它們滿足低反射率特徵。此外,確認它們可以實現高遮光特性,因為後烘烤後最終膜厚度的總光密度落在本發明之範圍內。在12 µm至16 µm的水平的解析度係優異的。In addition, the structures for quantum dot barrier ribs of Examples 1 to 13 had RSCI of 5% or less, RSCE of 0.5% or less, and RSCE / RSC of 2 to 10. Therefore, it was confirmed that they satisfied the low reflectivity characteristics. In addition, it was confirmed that they could achieve high light shielding characteristics because the total optical density of the final film thickness after post-baking fell within the range of the present invention. The resolution at the level of 12 µm to 16 µm was excellent.
相比之下,由使用製備實例14至24的光敏樹脂組成物的單層固化膜製備的對比實例1至11的用於量子點阻擋肋之結構具有3 µm至小於6 µm的總厚度。如果將具有此厚度範圍的結構用作量子點阻擋肋,則量子點溶液可能溢出阻擋肋,使得顏色分離可能是困難的並且可能被污染,導致解析度劣化。In contrast, the structures for quantum dot barrier ribs of Comparative Examples 1 to 11 prepared from a single-layer cured film using the photosensitive resin composition of Preparation Examples 14 to 24 have a total thickness of 3 µm to less than 6 µm. If a structure having such a thickness range is used as a quantum dot barrier rib, the quantum dot solution may overflow the barrier rib, so that color separation may be difficult and may be contaminated, resulting in deteriorated resolution.
特別地,由於對比實例3和4的用於量子點阻擋肋之結構具有0.7的總光學密度,因此其遮光特性差。它們具有超過5%的RSCI 、超過0.5%的RSCE 、和超過10的RSCE /RSC ,表明與實例1至13的用於量子點阻擋肋之結構相比,它們具有高反射率。因此,它們不能實現如本發明中希望的低反射率和高遮光特性。In particular, since the structures for quantum dot barrier ribs of Comparative Examples 3 and 4 have a total optical density of 0.7, their light shielding properties are poor. They have RSCI of more than 5%, RSCE of more than 0.5%, and RSCE / RSC of more than 10, indicating that they have high reflectivity compared with the structures for quantum dot barrier ribs of Examples 1 to 13. Therefore, they cannot achieve low reflectivity and high light shielding properties as desired in the present invention.
圖5和6係用光學顯微鏡觀察到的實例1至13和對比實例1至12的用於量子點阻擋肋之結構的截面和側面的照片。5 and 6 are photographs of cross sections and sides of the structures for quantum dot blocking ribs of Examples 1 to 13 and Comparative Examples 1 to 12 observed with an optical microscope.
如由圖5確認,實例1至13的用於量子點阻擋肋之結構的固化膜線上寬方面都是清晰且不同的,以及在膜厚度方面係均勻且厚的。As confirmed by FIG. 5 , the cured film structures for the quantum dot blocking ribs of Examples 1 to 13 are all clear and distinct in line width, and are uniform and thick in film thickness.
相比之下,如由圖6確認,對比實例1至12的用於量子點阻擋肋之結構的固化膜不適合於量子點阻擋肋,因為它們具有薄的厚度。特別地,在對比實例11和12中,因為膜分離,所以未形成圖案;或者圖案不是清晰的。特別地,儘管將對比實例12的用於量子點阻擋肋之結構製備為多層固化膜,但著色劑的含量高,使得由於在最佳曝光劑量條件(150 mJ/cm2 )下缺乏光固化使膜分離,導致解析度為0 µm;並且圖案不是清晰的。In contrast, as confirmed by FIG. 6 , the cured films of the structures for quantum dot blocking ribs of Comparative Examples 1 to 12 are not suitable for quantum dot blocking ribs because they have thin thicknesses. In particular, in Comparative Examples 11 and 12, because the film is separated, no pattern is formed; or the pattern is not clear. In particular, although the structure for quantum dot blocking ribs of Comparative Example 12 is prepared as a multi-layered cured film, the content of the coloring agent is high, so that the film is separated due to lack of photocuring under the optimal exposure dose condition (150 mJ/cm 2 ), resulting in a resolution of 0 µm; and the pattern is not clear.
100:基底結構 110:透明基底 120:阻擋肋 130:第一量子點溶液 140:第二量子點溶液 150:第三量子點溶液 200、300、400:用於量子點阻擋肋之結構 210、310、410:基底 211、311、411:第一固化膜 212、312、412:第二固化膜 313、413:第三固化膜 nn:第n固化膜 100: substrate structure 110: transparent substrate 120: barrier ribs 130: first quantum dot solution 140: second quantum dot solution 150: third quantum dot solution 200, 300, 400: structure for quantum dot barrier ribs 210, 310, 410: substrate 211, 311, 411: first cured film 212, 312, 412: second cured film 313, 413: third cured film nn: nth cured film
[圖1]係說明典型的量子點裝置之示意圖。[Figure 1] is a schematic diagram illustrating a typical quantum dot device.
[圖2]係根據本發明之實施方式的包含兩層固化膜的用於量子點阻擋肋之結構之示意圖。[FIG. 2] is a schematic diagram of a structure for quantum dot blocking ribs comprising two layers of cured films according to an embodiment of the present invention.
[圖3]係根據本發明之實施方式的包含三層固化膜的用於量子點阻擋肋之結構之示意圖。[FIG. 3] is a schematic diagram of a structure for quantum dot blocking ribs comprising three layers of cured films according to an embodiment of the present invention.
[圖4]係根據本發明之實施方式的包含n層固化膜的用於量子點阻擋肋之結構之示意圖。[FIG. 4] is a schematic diagram of a structure for quantum dot blocking ribs comprising n layers of cured films according to an embodiment of the present invention.
[圖5]係用光學顯微鏡觀察到的實例1至13的用於量子點阻擋肋之結構的截面和側面之照片。[Fig. 5] is a photograph of the cross section and side surface of the structure of the quantum dot blocking rib of Examples 1 to 13 observed with an optical microscope.
[圖6]係用光學顯微鏡觀察到的對比實例1至12的用於量子點阻擋肋之結構的截面和側面之照片。[FIG. 6] is a photograph of the cross section and side surface of the structure of the quantum dot blocking rib of Comparative Examples 1 to 12 observed with an optical microscope.
無without
400:用於量子點阻擋肋之結構 400: Structure for quantum dot barrier ribs
410:基底 410: Base
411:第一固化膜 411: First curing film
412:第二固化膜 412: Second curing film
413:第三固化膜 413: The third curing film
nn:第n固化膜 nn: nth cured film
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