TW202124459A - Colored photosensitive resin composition and black matrix prepared therefrom - Google Patents
Colored photosensitive resin composition and black matrix prepared therefrom Download PDFInfo
- Publication number
- TW202124459A TW202124459A TW109141091A TW109141091A TW202124459A TW 202124459 A TW202124459 A TW 202124459A TW 109141091 A TW109141091 A TW 109141091A TW 109141091 A TW109141091 A TW 109141091A TW 202124459 A TW202124459 A TW 202124459A
- Authority
- TW
- Taiwan
- Prior art keywords
- resin composition
- photosensitive resin
- weight
- acrylate
- meth
- Prior art date
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 64
- 239000011159 matrix material Substances 0.000 title claims description 12
- -1 thiol compound Chemical class 0.000 claims abstract description 112
- 150000001875 compounds Chemical class 0.000 claims abstract description 87
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 23
- 239000003086 colorant Substances 0.000 claims description 72
- 229920001577 copolymer Polymers 0.000 claims description 59
- 239000000178 monomer Substances 0.000 claims description 39
- 239000003999 initiator Substances 0.000 claims description 23
- 239000007787 solid Substances 0.000 claims description 22
- 239000002253 acid Substances 0.000 claims description 20
- 125000003700 epoxy group Chemical group 0.000 claims description 16
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 14
- 125000004386 diacrylate group Chemical group 0.000 claims description 11
- 125000002723 alicyclic group Chemical group 0.000 claims description 8
- 125000002015 acyclic group Chemical group 0.000 claims description 6
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 claims description 5
- 229920000180 alkyd Polymers 0.000 claims description 5
- XDUZWPPSSHEDFK-VVXQKDJTSA-N C(C(C)(C)C)C([C@H](O)[C@H](O)CO)O Chemical compound C(C(C)(C)C)C([C@H](O)[C@H](O)CO)O XDUZWPPSSHEDFK-VVXQKDJTSA-N 0.000 claims description 4
- KDYFGRWQOYBRFD-UHFFFAOYSA-L succinate(2-) Chemical compound [O-]C(=O)CCC([O-])=O KDYFGRWQOYBRFD-UHFFFAOYSA-L 0.000 claims description 4
- RPCIZBFXTBMJFA-UHFFFAOYSA-N 4-[5-(2-methylprop-2-enoyloxy)pentoxy]-4-oxobutanoic acid Chemical compound CC(=C)C(=O)OCCCCCOC(=O)CCC(O)=O RPCIZBFXTBMJFA-UHFFFAOYSA-N 0.000 claims description 3
- XCGKPXUJHRZWBX-UHFFFAOYSA-N 4-oxo-4-(2-prop-1-enoxyethoxy)butanoic acid Chemical compound C(=CC)OCCOC(CCC(=O)O)=O XCGKPXUJHRZWBX-UHFFFAOYSA-N 0.000 claims description 3
- UZDMJPAQQFSMMV-UHFFFAOYSA-N 4-oxo-4-(2-prop-2-enoyloxyethoxy)butanoic acid Chemical compound OC(=O)CCC(=O)OCCOC(=O)C=C UZDMJPAQQFSMMV-UHFFFAOYSA-N 0.000 claims description 2
- 125000003003 spiro group Chemical group 0.000 claims description 2
- ZEWLHMQYEZXSBH-UHFFFAOYSA-N 4-[2-(2-methylprop-2-enoyloxy)ethoxy]-4-oxobutanoic acid Chemical compound CC(=C)C(=O)OCCOC(=O)CCC(O)=O ZEWLHMQYEZXSBH-UHFFFAOYSA-N 0.000 claims 1
- XNHJPNPNLMENTO-OKILXGFUSA-N C(C(C)(C)C)[C@@]([C@](CO)(O)CC(C)(C)C)(O)CO Chemical compound C(C(C)(C)C)[C@@]([C@](CO)(O)CC(C)(C)C)(O)CO XNHJPNPNLMENTO-OKILXGFUSA-N 0.000 claims 1
- 239000000038 blue colorant Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 25
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 110
- 239000010408 film Substances 0.000 description 37
- 230000000052 comparative effect Effects 0.000 description 36
- 239000000203 mixture Substances 0.000 description 36
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 25
- 230000018109 developmental process Effects 0.000 description 23
- 239000002904 solvent Substances 0.000 description 22
- 239000006185 dispersion Substances 0.000 description 18
- 239000004094 surface-active agent Substances 0.000 description 18
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 16
- 239000004593 Epoxy Substances 0.000 description 15
- 239000002270 dispersing agent Substances 0.000 description 14
- 239000007983 Tris buffer Substances 0.000 description 13
- 238000002360 preparation method Methods 0.000 description 13
- 239000000049 pigment Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 11
- 239000011230 binding agent Substances 0.000 description 10
- 238000001723 curing Methods 0.000 description 10
- 150000002923 oximes Chemical class 0.000 description 10
- 239000002318 adhesion promoter Substances 0.000 description 9
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- 239000002096 quantum dot Substances 0.000 description 7
- 125000003396 thiol group Chemical group [H]S* 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000004132 cross linking Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 5
- 150000001408 amides Chemical class 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- 230000009257 reactivity Effects 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 4
- JESXATFQYMPTNL-UHFFFAOYSA-N 2-ethenylphenol Chemical compound OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- MPMBRWOOISTHJV-UHFFFAOYSA-N but-1-enylbenzene Chemical compound CCC=CC1=CC=CC=C1 MPMBRWOOISTHJV-UHFFFAOYSA-N 0.000 description 4
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
- 238000005227 gel permeation chromatography Methods 0.000 description 4
- 235000011187 glycerol Nutrition 0.000 description 4
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 4
- 150000002576 ketones Chemical class 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 229920002554 vinyl polymer Polymers 0.000 description 4
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 3
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 3
- HDEWQSUXJCDXIX-UHFFFAOYSA-N 1-ethenyl-3-(methoxymethyl)benzene Chemical compound COCC1=CC=CC(C=C)=C1 HDEWQSUXJCDXIX-UHFFFAOYSA-N 0.000 description 3
- XVXKXOPCFWAOLN-UHFFFAOYSA-N 1-ethenyl-4-(methoxymethyl)benzene Chemical compound COCC1=CC=C(C=C)C=C1 XVXKXOPCFWAOLN-UHFFFAOYSA-N 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- NCAVPEPBIJTYSO-UHFFFAOYSA-N 4-hydroxybutyl prop-2-enoate;2-(oxiran-2-ylmethoxymethyl)oxirane Chemical compound C1OC1COCC1CO1.OCCCCOC(=O)C=C NCAVPEPBIJTYSO-UHFFFAOYSA-N 0.000 description 3
- 239000004386 Erythritol Substances 0.000 description 3
- UNXHWFMMPAWVPI-UHFFFAOYSA-N Erythritol Natural products OCC(O)C(O)CO UNXHWFMMPAWVPI-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 150000003863 ammonium salts Chemical class 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- LFYJSSARVMHQJB-QIXNEVBVSA-N bakuchiol Chemical compound CC(C)=CCC[C@@](C)(C=C)\C=C\C1=CC=C(O)C=C1 LFYJSSARVMHQJB-QIXNEVBVSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 3
- 239000006229 carbon black Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- MAWOHFOSAIXURX-UHFFFAOYSA-N cyclopentylcyclopentane Chemical group C1CCCC1C1CCCC1 MAWOHFOSAIXURX-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 235000019414 erythritol Nutrition 0.000 description 3
- 229940009714 erythritol Drugs 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 125000000524 functional group Chemical group 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 229920005646 polycarboxylate Polymers 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 239000003505 polymerization initiator Substances 0.000 description 3
- 229920001451 polypropylene glycol Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000007870 radical polymerization initiator Substances 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- XUIXZBXRQFZHIT-UHFFFAOYSA-N 1-[1-(1-hydroxypropan-2-yloxy)propan-2-yloxy]-3-methoxypropan-2-ol Chemical compound COCC(O)COC(C)COC(C)CO XUIXZBXRQFZHIT-UHFFFAOYSA-N 0.000 description 2
- VTRZMLZNHGCYLK-UHFFFAOYSA-N 1-ethenyl-2-(methoxymethyl)benzene Chemical compound COCC1=CC=CC=C1C=C VTRZMLZNHGCYLK-UHFFFAOYSA-N 0.000 description 2
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 2
- SDXHBDVTZNMBEW-UHFFFAOYSA-N 1-ethoxy-2-(2-hydroxyethoxy)ethanol Chemical compound CCOC(O)COCCO SDXHBDVTZNMBEW-UHFFFAOYSA-N 0.000 description 2
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 2
- MLBWTXHUVGBPNL-UHFFFAOYSA-N 1-pyridin-4-ylheptan-1-one Chemical compound CCCCCCC(=O)C1=CC=NC=C1 MLBWTXHUVGBPNL-UHFFFAOYSA-N 0.000 description 2
- HLIQLHSBZXDKLV-UHFFFAOYSA-N 2-(2-hydroxyethoxy)-1-phenoxyethanol Chemical compound OCCOCC(O)OC1=CC=CC=C1 HLIQLHSBZXDKLV-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- SBYMUDUGTIKLCR-UHFFFAOYSA-N 2-chloroethenylbenzene Chemical compound ClC=CC1=CC=CC=C1 SBYMUDUGTIKLCR-UHFFFAOYSA-N 0.000 description 2
- FZHNODDFDJBMAS-UHFFFAOYSA-N 2-ethoxyethenylbenzene Chemical compound CCOC=CC1=CC=CC=C1 FZHNODDFDJBMAS-UHFFFAOYSA-N 0.000 description 2
- KBKNKFIRGXQLDB-UHFFFAOYSA-N 2-fluoroethenylbenzene Chemical compound FC=CC1=CC=CC=C1 KBKNKFIRGXQLDB-UHFFFAOYSA-N 0.000 description 2
- OZPOYKXYJOHGCW-UHFFFAOYSA-N 2-iodoethenylbenzene Chemical compound IC=CC1=CC=CC=C1 OZPOYKXYJOHGCW-UHFFFAOYSA-N 0.000 description 2
- CTHJQRHPNQEPAB-UHFFFAOYSA-N 2-methoxyethenylbenzene Chemical compound COC=CC1=CC=CC=C1 CTHJQRHPNQEPAB-UHFFFAOYSA-N 0.000 description 2
- 125000004200 2-methoxyethyl group Chemical group [H]C([H])([H])OC([H])([H])C([H])([H])* 0.000 description 2
- BTOVVHWKPVSLBI-UHFFFAOYSA-N 2-methylprop-1-enylbenzene Chemical compound CC(C)=CC1=CC=CC=C1 BTOVVHWKPVSLBI-UHFFFAOYSA-N 0.000 description 2
- ILYSKJPEZAABAA-UHFFFAOYSA-N 2-propoxyethenylbenzene Chemical compound CCCOC=CC1=CC=CC=C1 ILYSKJPEZAABAA-UHFFFAOYSA-N 0.000 description 2
- ZTHJQCDAHYOPIK-UHFFFAOYSA-N 3-methylbut-2-en-2-ylbenzene Chemical compound CC(C)=C(C)C1=CC=CC=C1 ZTHJQCDAHYOPIK-UHFFFAOYSA-N 0.000 description 2
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 2
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 2
- JAGRUUPXPPLSRX-UHFFFAOYSA-N 4-prop-1-en-2-ylphenol Chemical compound CC(=C)C1=CC=C(O)C=C1 JAGRUUPXPPLSRX-UHFFFAOYSA-N 0.000 description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 description 2
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 2
- YMOONIIMQBGTDU-VOTSOKGWSA-N [(e)-2-bromoethenyl]benzene Chemical compound Br\C=C\C1=CC=CC=C1 YMOONIIMQBGTDU-VOTSOKGWSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N alpha-Methyl-n-butyl acrylate Natural products CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- 150000008064 anhydrides Chemical class 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 2
- 150000001733 carboxylic acid esters Chemical class 0.000 description 2
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 2
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 2
- RTVSUIOGXLXKNM-UHFFFAOYSA-N dec-1-enylbenzene Chemical compound CCCCCCCCC=CC1=CC=CC=C1 RTVSUIOGXLXKNM-UHFFFAOYSA-N 0.000 description 2
- 150000001991 dicarboxylic acids Chemical class 0.000 description 2
- 239000003480 eluent Substances 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 239000001530 fumaric acid Substances 0.000 description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 2
- KETWBQOXTBGBBN-UHFFFAOYSA-N hex-1-enylbenzene Chemical compound CCCCC=CC1=CC=CC=C1 KETWBQOXTBGBBN-UHFFFAOYSA-N 0.000 description 2
- 229920001519 homopolymer Polymers 0.000 description 2
- 239000012948 isocyanate Substances 0.000 description 2
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- HNEGQIOMVPPMNR-NSCUHMNNSA-N mesaconic acid Chemical compound OC(=O)C(/C)=C/C(O)=O HNEGQIOMVPPMNR-NSCUHMNNSA-N 0.000 description 2
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 2
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 2
- HNEGQIOMVPPMNR-UHFFFAOYSA-N methylfumaric acid Natural products OC(=O)C(C)=CC(O)=O HNEGQIOMVPPMNR-UHFFFAOYSA-N 0.000 description 2
- 150000002763 monocarboxylic acids Chemical class 0.000 description 2
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 2
- KNZIIQMSCLCSGZ-UHFFFAOYSA-N non-1-enylbenzene Chemical compound CCCCCCCC=CC1=CC=CC=C1 KNZIIQMSCLCSGZ-UHFFFAOYSA-N 0.000 description 2
- RCALDWJXTVCBAZ-UHFFFAOYSA-N oct-1-enylbenzene Chemical compound CCCCCCC=CC1=CC=CC=C1 RCALDWJXTVCBAZ-UHFFFAOYSA-N 0.000 description 2
- KHMYONNPZWOTKW-UHFFFAOYSA-N pent-1-enylbenzene Chemical compound CCCC=CC1=CC=CC=C1 KHMYONNPZWOTKW-UHFFFAOYSA-N 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 2
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 2
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 2
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 1
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 1
- HSLFISVKRDQEBY-UHFFFAOYSA-N 1,1-bis(tert-butylperoxy)cyclohexane Chemical group CC(C)(C)OOC1(OOC(C)(C)C)CCCCC1 HSLFISVKRDQEBY-UHFFFAOYSA-N 0.000 description 1
- JRNVQLOKVMWBFR-UHFFFAOYSA-N 1,2-benzenedithiol Chemical compound SC1=CC=CC=C1S JRNVQLOKVMWBFR-UHFFFAOYSA-N 0.000 description 1
- QWQFVUQPHUKAMY-UHFFFAOYSA-N 1,2-diphenyl-2-propoxyethanone Chemical compound C=1C=CC=CC=1C(OCCC)C(=O)C1=CC=CC=C1 QWQFVUQPHUKAMY-UHFFFAOYSA-N 0.000 description 1
- VYMPLPIFKRHAAC-UHFFFAOYSA-N 1,2-ethanedithiol Chemical compound SCCS VYMPLPIFKRHAAC-UHFFFAOYSA-N 0.000 description 1
- YGKHJWTVMIMEPQ-UHFFFAOYSA-N 1,2-propanedithiol Chemical compound CC(S)CS YGKHJWTVMIMEPQ-UHFFFAOYSA-N 0.000 description 1
- BIGYLAKFCGVRAN-UHFFFAOYSA-N 1,3,4-thiadiazolidine-2,5-dithione Chemical compound S=C1NNC(=S)S1 BIGYLAKFCGVRAN-UHFFFAOYSA-N 0.000 description 1
- HNHFTARXTMQRCF-UHFFFAOYSA-N 1,3,5-tris(3-sulfanylpropyl)-1,3,5-triazinane-2,4,6-trione Chemical compound SCCCN1C(=O)N(CCCS)C(=O)N(CCCS)C1=O HNHFTARXTMQRCF-UHFFFAOYSA-N 0.000 description 1
- XMEPRJBZFCWFKN-UHFFFAOYSA-N 1,3-Butanedithiol Chemical compound CC(S)CCS XMEPRJBZFCWFKN-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- SRZXCOWFGPICGA-UHFFFAOYSA-N 1,6-Hexanedithiol Chemical compound SCCCCCCS SRZXCOWFGPICGA-UHFFFAOYSA-N 0.000 description 1
- PGTWZHXOSWQKCY-UHFFFAOYSA-N 1,8-Octanedithiol Chemical compound SCCCCCCCCS PGTWZHXOSWQKCY-UHFFFAOYSA-N 0.000 description 1
- GJRCLMJHPWCJEI-UHFFFAOYSA-N 1,9-Nonanedithiol Chemical compound SCCCCCCCCCS GJRCLMJHPWCJEI-UHFFFAOYSA-N 0.000 description 1
- QYOJZFBQEAZNEW-UHFFFAOYSA-N 1-(2-methylphenyl)pyrrole-2,5-dione Chemical compound CC1=CC=CC=C1N1C(=O)C=CC1=O QYOJZFBQEAZNEW-UHFFFAOYSA-N 0.000 description 1
- PRZFFHNZHXGTRC-UHFFFAOYSA-N 1-(3-methylphenyl)pyrrole-2,5-dione Chemical compound CC1=CC=CC(N2C(C=CC2=O)=O)=C1 PRZFFHNZHXGTRC-UHFFFAOYSA-N 0.000 description 1
- FPZQYYXSOJSITC-UHFFFAOYSA-N 1-(4-chlorophenyl)pyrrole-2,5-dione Chemical compound C1=CC(Cl)=CC=C1N1C(=O)C=CC1=O FPZQYYXSOJSITC-UHFFFAOYSA-N 0.000 description 1
- BLLFPKZTBLMEFG-UHFFFAOYSA-N 1-(4-hydroxyphenyl)pyrrole-2,5-dione Chemical compound C1=CC(O)=CC=C1N1C(=O)C=CC1=O BLLFPKZTBLMEFG-UHFFFAOYSA-N 0.000 description 1
- KCFXNGDHQPMIAQ-UHFFFAOYSA-N 1-(4-methylphenyl)pyrrole-2,5-dione Chemical compound C1=CC(C)=CC=C1N1C(=O)C=CC1=O KCFXNGDHQPMIAQ-UHFFFAOYSA-N 0.000 description 1
- MKRBAPNEJMFMHU-UHFFFAOYSA-N 1-benzylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1CC1=CC=CC=C1 MKRBAPNEJMFMHU-UHFFFAOYSA-N 0.000 description 1
- KTZVZZJJVJQZHV-UHFFFAOYSA-N 1-chloro-4-ethenylbenzene Chemical compound ClC1=CC=C(C=C)C=C1 KTZVZZJJVJQZHV-UHFFFAOYSA-N 0.000 description 1
- PECUPOXPPBBFLU-UHFFFAOYSA-N 1-ethenyl-3-methoxybenzene Chemical compound COC1=CC=CC(C=C)=C1 PECUPOXPPBBFLU-UHFFFAOYSA-N 0.000 description 1
- NUIPOEWADWHGSP-UHFFFAOYSA-N 1-hydroxypropyl 2-methylprop-2-enoate Chemical compound CCC(O)OC(=O)C(C)=C NUIPOEWADWHGSP-UHFFFAOYSA-N 0.000 description 1
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 1
- KAJBSGLXSREIHP-UHFFFAOYSA-N 2,2-bis[(2-sulfanylacetyl)oxymethyl]butyl 2-sulfanylacetate Chemical compound SCC(=O)OCC(CC)(COC(=O)CS)COC(=O)CS KAJBSGLXSREIHP-UHFFFAOYSA-N 0.000 description 1
- TWWSEEHCVDRRRI-UHFFFAOYSA-N 2,3-Butanedithiol Chemical compound CC(S)C(C)S TWWSEEHCVDRRRI-UHFFFAOYSA-N 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- QNYBOILAKBSWFG-UHFFFAOYSA-N 2-(phenylmethoxymethyl)oxirane Chemical compound C1OC1COCC1=CC=CC=C1 QNYBOILAKBSWFG-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- PFHOSZAOXCYAGJ-UHFFFAOYSA-N 2-[(2-cyano-4-methoxy-4-methylpentan-2-yl)diazenyl]-4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)(C)OC PFHOSZAOXCYAGJ-UHFFFAOYSA-N 0.000 description 1
- JFWFAUHHNYTWOO-UHFFFAOYSA-N 2-[(2-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC=C1COCC1OC1 JFWFAUHHNYTWOO-UHFFFAOYSA-N 0.000 description 1
- LBNDGEZENJUBCO-UHFFFAOYSA-N 2-[2-(2-methylprop-2-enoyloxy)ethyl]butanedioic acid Chemical compound CC(=C)C(=O)OCCC(C(O)=O)CC(O)=O LBNDGEZENJUBCO-UHFFFAOYSA-N 0.000 description 1
- HCZMHWVFVZAHCR-UHFFFAOYSA-N 2-[2-(2-sulfanylethoxy)ethoxy]ethanethiol Chemical compound SCCOCCOCCS HCZMHWVFVZAHCR-UHFFFAOYSA-N 0.000 description 1
- SZTBMYHIYNGYIA-UHFFFAOYSA-N 2-chloroacrylic acid Chemical compound OC(=O)C(Cl)=C SZTBMYHIYNGYIA-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- DDBYLRWHHCWVID-UHFFFAOYSA-N 2-ethylbut-1-enylbenzene Chemical compound CCC(CC)=CC1=CC=CC=C1 DDBYLRWHHCWVID-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- HFCUBKYHMMPGBY-UHFFFAOYSA-N 2-methoxyethyl prop-2-enoate Chemical compound COCCOC(=O)C=C HFCUBKYHMMPGBY-UHFFFAOYSA-N 0.000 description 1
- FMFHUEMLVAIBFI-UHFFFAOYSA-N 2-phenylethenyl acetate Chemical compound CC(=O)OC=CC1=CC=CC=C1 FMFHUEMLVAIBFI-UHFFFAOYSA-N 0.000 description 1
- WYYQKWASBLTRIW-UHFFFAOYSA-N 2-trimethoxysilylbenzoic acid Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1C(O)=O WYYQKWASBLTRIW-UHFFFAOYSA-N 0.000 description 1
- AJCUDWCLDWDLNY-UHFFFAOYSA-N 3,6-dichlorobenzene-1,2-dithiol Chemical compound SC1=C(S)C(Cl)=CC=C1Cl AJCUDWCLDWDLNY-UHFFFAOYSA-N 0.000 description 1
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 1
- AYKYXWQEBUNJCN-UHFFFAOYSA-N 3-methylfuran-2,5-dione Chemical compound CC1=CC(=O)OC1=O AYKYXWQEBUNJCN-UHFFFAOYSA-N 0.000 description 1
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- FWTBRYBHCBCJEQ-UHFFFAOYSA-N 4-[(4-phenyldiazenylnaphthalen-1-yl)diazenyl]phenol Chemical compound C1=CC(O)=CC=C1N=NC(C1=CC=CC=C11)=CC=C1N=NC1=CC=CC=C1 FWTBRYBHCBCJEQ-UHFFFAOYSA-N 0.000 description 1
- AZQRVRFRYQYWBI-UHFFFAOYSA-N 4-[3-(2-methylprop-2-enoyloxy)propoxy]-4-oxobutanoic acid Chemical compound CC(=C)C(=O)OCCCOC(=O)CCC(O)=O AZQRVRFRYQYWBI-UHFFFAOYSA-N 0.000 description 1
- UVHHADIQQIICAV-UHFFFAOYSA-N 4-amino-3-[[4-[4-[(1-amino-4-sulfonaphthalen-2-yl)diazenyl]-2-methylphenyl]-3-methylphenyl]diazenyl]naphthalene-1-sulfonic acid Chemical compound C1=CC=CC2=C(N)C(N=NC=3C=C(C(=CC=3)C=3C(=CC(=CC=3)N=NC=3C(=C4C=CC=CC4=C(C=3)S(O)(=O)=O)N)C)C)=CC(S(O)(=O)=O)=C21 UVHHADIQQIICAV-UHFFFAOYSA-N 0.000 description 1
- YAXPDWVRLUOOBJ-UHFFFAOYSA-N 4-ethylhex-3-en-3-ylbenzene Chemical compound CCC(CC)=C(CC)C1=CC=CC=C1 YAXPDWVRLUOOBJ-UHFFFAOYSA-N 0.000 description 1
- YVXVUPOMFMRTPK-UHFFFAOYSA-N 6-oxabicyclo[3.1.1]heptan-2-yl 2-methylprop-2-enoate Chemical compound C(C(=C)C)(=O)OC1C2CC(CC1)O2 YVXVUPOMFMRTPK-UHFFFAOYSA-N 0.000 description 1
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 1
- GDUZPNKSJOOIDA-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]heptan-4-yl 2-methylprop-2-enoate Chemical compound C1C(OC(=O)C(=C)C)CCC2OC21 GDUZPNKSJOOIDA-UHFFFAOYSA-N 0.000 description 1
- MTRFEWTWIPAXLG-UHFFFAOYSA-N 9-phenylacridine Chemical compound C1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MTRFEWTWIPAXLG-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- CYJAWLISSWIHCD-UHFFFAOYSA-N C(C=C)(=O)OCC1CO1.C=O Chemical compound C(C=C)(=O)OCC1CO1.C=O CYJAWLISSWIHCD-UHFFFAOYSA-N 0.000 description 1
- XZODJGQAFMMEDR-UHFFFAOYSA-N CC1=C(C(=CC(=C1)C)C)C(=O)C1=C(C=CC=C1)P(C1=CC=CC=C1)OP(C1=CC=CC=C1)C1=C(C=CC=C1)C(=O)C1=C(C=C(C=C1C)C)C Chemical compound CC1=C(C(=CC(=C1)C)C)C(=O)C1=C(C=CC=C1)P(C1=CC=CC=C1)OP(C1=CC=CC=C1)C1=C(C=CC=C1)C(=O)C1=C(C=C(C=C1C)C)C XZODJGQAFMMEDR-UHFFFAOYSA-N 0.000 description 1
- NOEMSRWQFGPZQS-UHFFFAOYSA-N CCC(O)=S.CCC(O)=S.CCC(O)=S.CCC(CO)(CO)CO Chemical compound CCC(O)=S.CCC(O)=S.CCC(O)=S.CCC(CO)(CO)CO NOEMSRWQFGPZQS-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 1
- 229910002551 Fe-Mn Inorganic materials 0.000 description 1
- 244000147568 Laurus nobilis Species 0.000 description 1
- 235000017858 Laurus nobilis Nutrition 0.000 description 1
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 1
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229920002873 Polyethylenimine Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical class CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 1
- GXIDBFZJASKBSP-TVUYYUAGSA-N SCCC(=O)O[C@@H](C(OC(CCS)=O)CC(C)(C)C)[C@H](OC(CCS)=O)COC(CCS)=O Chemical compound SCCC(=O)O[C@@H](C(OC(CCS)=O)CC(C)(C)C)[C@H](OC(CCS)=O)COC(CCS)=O GXIDBFZJASKBSP-TVUYYUAGSA-N 0.000 description 1
- 229920002125 Sokalan® Chemical class 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 235000005212 Terminalia tomentosa Nutrition 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-ISLYRVAYSA-N V-65 Substances CC(C)CC(C)(C#N)\N=N\C(C)(C#N)CC(C)C WYGWHHGCAGTUCH-ISLYRVAYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- SEEVRZDUPHZSOX-WPWMEQJKSA-N [(e)-1-[9-ethyl-6-(2-methylbenzoyl)carbazol-3-yl]ethylideneamino] acetate Chemical compound C=1C=C2N(CC)C3=CC=C(C(\C)=N\OC(C)=O)C=C3C2=CC=1C(=O)C1=CC=CC=C1C SEEVRZDUPHZSOX-WPWMEQJKSA-N 0.000 description 1
- LJODQQVXMSKBHT-UHFFFAOYSA-N [2,4,5-tris(sulfanylmethyl)phenyl]methanethiol Chemical compound SCC1=CC(CS)=C(CS)C=C1CS LJODQQVXMSKBHT-UHFFFAOYSA-N 0.000 description 1
- FARWYUGFTNOIPS-UHFFFAOYSA-N [2-(trifluoromethyl)oxetan-3-yl]methyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1COC1C(F)(F)F FARWYUGFTNOIPS-UHFFFAOYSA-N 0.000 description 1
- OWDDXHQZWJBGMZ-UHFFFAOYSA-N [3,4-bis(sulfanylmethyl)phenyl]methanethiol Chemical compound SCC1=CC=C(CS)C(CS)=C1 OWDDXHQZWJBGMZ-UHFFFAOYSA-N 0.000 description 1
- STWRQBYJSPXXQE-UHFFFAOYSA-N [3,5-bis(sulfanylmethyl)phenyl]methanethiol Chemical compound SCC1=CC(CS)=CC(CS)=C1 STWRQBYJSPXXQE-UHFFFAOYSA-N 0.000 description 1
- JOBBTVPTPXRUBP-UHFFFAOYSA-N [3-(3-sulfanylpropanoyloxy)-2,2-bis(3-sulfanylpropanoyloxymethyl)propyl] 3-sulfanylpropanoate Chemical compound SCCC(=O)OCC(COC(=O)CCS)(COC(=O)CCS)COC(=O)CCS JOBBTVPTPXRUBP-UHFFFAOYSA-N 0.000 description 1
- OCWJXYQLKSYZGE-UHFFFAOYSA-N [SiH4].CO[Si](OC)(OC)C=C Chemical compound [SiH4].CO[Si](OC)(OC)C=C OCWJXYQLKSYZGE-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- BAPJBEWLBFYGME-UHFFFAOYSA-N acrylic acid methyl ester Natural products COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- ZWOASCVFHSYHOB-UHFFFAOYSA-N benzene-1,3-dithiol Chemical compound SC1=CC=CC(S)=C1 ZWOASCVFHSYHOB-UHFFFAOYSA-N 0.000 description 1
- WYLQRHZSKIDFEP-UHFFFAOYSA-N benzene-1,4-dithiol Chemical compound SC1=CC=C(S)C=C1 WYLQRHZSKIDFEP-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- BWHOZHOGCMHOBV-UHFFFAOYSA-N benzylideneacetone Chemical compound CC(=O)C=CC1=CC=CC=C1 BWHOZHOGCMHOBV-UHFFFAOYSA-N 0.000 description 1
- KQNZLOUWXSAZGD-UHFFFAOYSA-N benzylperoxymethylbenzene Chemical compound C=1C=CC=CC=1COOCC1=CC=CC=C1 KQNZLOUWXSAZGD-UHFFFAOYSA-N 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- SMTOKHQOVJRXLK-UHFFFAOYSA-N butane-1,4-dithiol Chemical compound SCCCCS SMTOKHQOVJRXLK-UHFFFAOYSA-N 0.000 description 1
- XXQBIYASOABGRU-UHFFFAOYSA-N butoxy-dimethoxy-propylsilane Chemical compound CCCCO[Si](OC)(OC)CCC XXQBIYASOABGRU-UHFFFAOYSA-N 0.000 description 1
- DTGWMJJKPLJKQD-UHFFFAOYSA-N butyl 2,2-dimethylpropaneperoxoate Chemical group CCCCOOC(=O)C(C)(C)C DTGWMJJKPLJKQD-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- SKOLWUPSYHWYAM-UHFFFAOYSA-N carbonodithioic O,S-acid Chemical compound SC(S)=O SKOLWUPSYHWYAM-UHFFFAOYSA-N 0.000 description 1
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- HNEGQIOMVPPMNR-IHWYPQMZSA-N citraconic acid Chemical compound OC(=O)C(/C)=C\C(O)=O HNEGQIOMVPPMNR-IHWYPQMZSA-N 0.000 description 1
- 229940018557 citraconic acid Drugs 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- UOQACRNTVQWTFF-UHFFFAOYSA-N decane-1,10-dithiol Chemical compound SCCCCCCCCCCS UOQACRNTVQWTFF-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000012954 diazonium Substances 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-O diazynium Chemical compound [NH+]#N IJGRMHOSHXDMSA-UHFFFAOYSA-O 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- UNXHWFMMPAWVPI-ZXZARUISSA-N erythritol Chemical compound OC[C@H](O)[C@H](O)CO UNXHWFMMPAWVPI-ZXZARUISSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- WMJVKNOOFUSBFQ-UHFFFAOYSA-N formaldehyde;prop-2-enoic acid Chemical compound O=C.OC(=O)C=C WMJVKNOOFUSBFQ-UHFFFAOYSA-N 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- UCNNJGDEJXIUCC-UHFFFAOYSA-L hydroxy(oxo)iron;iron Chemical compound [Fe].O[Fe]=O.O[Fe]=O UCNNJGDEJXIUCC-UHFFFAOYSA-L 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229920001427 mPEG Polymers 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 125000005641 methacryl group Chemical group 0.000 description 1
- 125000005394 methallyl group Chemical group 0.000 description 1
- BLLFVUPNHCTMSV-UHFFFAOYSA-N methyl nitrite Chemical compound CON=O BLLFVUPNHCTMSV-UHFFFAOYSA-N 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- PJUIMOJAAPLTRJ-UHFFFAOYSA-N monothioglycerol Chemical compound OCC(O)CS PJUIMOJAAPLTRJ-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- KWBIXTIBYFUAGV-UHFFFAOYSA-M n-ethylcarbamate Chemical compound CCNC([O-])=O KWBIXTIBYFUAGV-UHFFFAOYSA-M 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- AAPAGLBSROJFGM-UHFFFAOYSA-N naphthalene-1,5-dithiol Chemical compound C1=CC=C2C(S)=CC=CC2=C1S AAPAGLBSROJFGM-UHFFFAOYSA-N 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- SFBTTWXNCQVIEC-UHFFFAOYSA-N o-Vinylanisole Chemical compound COC1=CC=CC=C1C=C SFBTTWXNCQVIEC-UHFFFAOYSA-N 0.000 description 1
- ZDHCZVWCTKTBRY-UHFFFAOYSA-N omega-Hydroxydodecanoic acid Natural products OCCCCCCCCCCCC(O)=O ZDHCZVWCTKTBRY-UHFFFAOYSA-N 0.000 description 1
- KRGGVEDZUSPSAC-UHFFFAOYSA-N oxetan-2-ylmethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1CCO1 KRGGVEDZUSPSAC-UHFFFAOYSA-N 0.000 description 1
- AMUUFLNQHMIHRP-UHFFFAOYSA-N oxetan-3-ylmethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1COC1 AMUUFLNQHMIHRP-UHFFFAOYSA-N 0.000 description 1
- 150000002921 oxetanes Chemical class 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- KMTUBAIXCBHPIZ-UHFFFAOYSA-N pentane-1,5-dithiol Chemical compound SCCCCCS KMTUBAIXCBHPIZ-UHFFFAOYSA-N 0.000 description 1
- KAYZWQWACCVBRJ-UHFFFAOYSA-N pentane-3-thione Chemical compound CCC(=S)CC KAYZWQWACCVBRJ-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 235000021317 phosphate Nutrition 0.000 description 1
- 150000003014 phosphoric acid esters Chemical class 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004584 polyacrylic acid Chemical class 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- ZJLMKPKYJBQJNH-UHFFFAOYSA-N propane-1,3-dithiol Chemical compound SCCCS ZJLMKPKYJBQJNH-UHFFFAOYSA-N 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- WIBQWGGMNZFKOE-UHFFFAOYSA-N silane N-(3-trimethoxysilylpropyl)aniline Chemical compound [SiH4].C1(=CC=CC=C1)NCCC[Si](OC)(OC)OC WIBQWGGMNZFKOE-UHFFFAOYSA-N 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- 150000003527 tetrahydropyrans Chemical class 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229940035024 thioglycerol Drugs 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
- 239000002888 zwitterionic surfactant Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/0275—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with dithiol or polysulfide compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/86—Arrangements for improving contrast, e.g. preventing reflection of ambient light
- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
本發明關於一種即使在低溫下也能形成具有優良顯影性和解析度的固化膜之著色的光敏樹脂組成物及由其製備之黑色矩陣。The present invention relates to a photosensitive resin composition capable of forming a colored cured film with excellent developability and resolution even at low temperatures, and a black matrix prepared therefrom.
著色的光敏樹脂組成物廣泛用於LCD、OLED和基於量子點(QD)之顯示裝置中。Colored photosensitive resin compositions are widely used in LCD, OLED and quantum dot (QD)-based display devices.
LCD包括上基底、下基底和居於基底之間之液晶。如有必要,可以將觸控屏面板(TSP)等連接至上基底。通常,TSP在組裝步驟之後製造,在該組裝步驟中組合濾色器及薄膜電晶體(TFT)。為了最小化對已經製造的濾色器之影響,必須在低溫下使組成物固化以製備固化膜。然而,存在以下問題:當在低溫下固化時組成物未充分地交聯,未能形成固化膜,或其強度不足。因此,對能夠在低溫下固化之組成物存在需求。此外,OLED和基於量子點(QD)之顯示裝置要求適合於在低溫下固化之組成物,因為它們在低溫下製造。The LCD includes an upper substrate, a lower substrate, and liquid crystals between the substrates. If necessary, a touch screen panel (TSP), etc. can be connected to the upper substrate. Generally, the TSP is manufactured after the assembly step in which the color filter and the thin film transistor (TFT) are combined. In order to minimize the influence on the already manufactured color filter, the composition must be cured at a low temperature to prepare a cured film. However, there are problems in that the composition is not sufficiently crosslinked when cured at a low temperature, a cured film cannot be formed, or its strength is insufficient. Therefore, there is a demand for compositions that can be cured at low temperatures. In addition, OLEDs and quantum dot (QD)-based display devices require compositions suitable for curing at low temperatures because they are manufactured at low temperatures.
同時,藉由在低溫下固化包含基於丙烯酸酯的樹脂作為黏結劑之組成物來製備固化膜之技術已在相關領域中已知(參見韓國公開專利公佈案號2010-0029479)。但是,其不足以滿足耐化學性。Meanwhile, the technology of preparing a cured film by curing a composition containing an acrylate-based resin as a binder at a low temperature has been known in the related field (see Korean Laid-open Patent Publication No. 2010-0029479). However, it is not sufficient to satisfy chemical resistance.
在低溫下可固化的常規著色組成物使用過量之熱固化劑(比如環氧化合物)或用於降低反應能之添加劑,以便提高在低溫下之固化程度。然而,該等物質在儲存穩定性方面存在問題,在製備固化膜的過程中會導致諸如剝落、圖案撕裂和解析度不足之問題。Conventional coloring compositions that are curable at low temperatures use excessive heat curing agents (such as epoxy compounds) or additives for reducing reaction energy to increase the degree of curing at low temperatures. However, these materials have problems in storage stability, which can cause problems such as peeling, pattern tearing, and insufficient resolution during the process of preparing the cured film.
具體實施方式 技術問題 因此,本發明之目的在於提供一種能夠在低溫下充分交聯和固化並具有優良的耐化學性、顯影性和圖案解析度之著色的光敏樹脂組成物,以及由其製備之黑色矩陣。問題的解決方案 DETAILED DESCRIPTION Technical Problem Therefore, the object of the present invention is to provide a photosensitive resin composition that can be fully crosslinked and cured at low temperature and has excellent chemical resistance, developability, and pattern resolution, and a photosensitive resin composition prepared therefrom. Black matrix. The solution to the problem
為了實現以上目的,本發明提供了一種光敏樹脂組成物,其包含 (A) 共聚物;(B) 可光聚合的化合物;(C) 光聚合引發劑;(D) 著色劑;以及 (E) 多官能硫醇化合物。In order to achieve the above object, the present invention provides a photosensitive resin composition comprising (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; (D) a colorant; and (E) Multifunctional thiol compound.
為了實現另一目的,本發明提供了一種由光敏樹脂組成物製備之黑色矩陣。本發明之有利效果 In order to achieve another objective, the present invention provides a black matrix made of a photosensitive resin composition. Advantages of the present invention
本發明之著色的光敏樹脂組成物包含多官能硫醇化合物和/或含有雙鍵和羥基基團的化合物,由此其即使在低溫下也可以充分形成固化膜。此外,本發明之光敏樹脂組成物具有快速顯影速度、優良解析度及耐化學性。The colored photosensitive resin composition of the present invention contains a multifunctional thiol compound and/or a compound containing a double bond and a hydroxyl group, whereby it can sufficiently form a cured film even at low temperatures. In addition, the photosensitive resin composition of the present invention has a fast developing speed, excellent resolution and chemical resistance.
進行本發明之最佳模式 本發明不受限於下面描述的那些。相反,只要不改變本發明之主旨,可以將其修改為各種形式。 Best mode for carrying out the present invention The present invention is not limited to those described below. On the contrary, as long as the gist of the present invention is not changed, it can be modified into various forms.
貫穿本說明書,除非另外明確說明,否則當零件被稱為「包括」一種要素時,應當理解,可以包括其他要素,而不是排除其他要素。此外,除非另外明確說明,否則本文所用的與組分之量、反應條件等有關的所有數字和表述應理解為由術語「約」修飾。Throughout this specification, unless expressly stated otherwise, when a part is referred to as "comprising" one element, it should be understood that other elements may be included instead of excluding other elements. In addition, unless expressly stated otherwise, all numbers and expressions related to the amounts of components, reaction conditions, etc. used herein should be understood as modified by the term "about".
本發明提供了一種光敏樹脂組成物,其包含 (A) 共聚物;(B) 可光聚合的化合物;(C) 光聚合引發劑;(D) 著色劑;以及 (E) 多官能硫醇化合物。The present invention provides a photosensitive resin composition comprising (A) a copolymer; (B) a photopolymerizable compound; (C) a photopolymerization initiator; (D) a coloring agent; and (E) a multifunctional thiol compound .
組成物可以視需要進一步包含 (F) 含有兩個或更多個雙鍵和兩個或更多個羥基基團的化合物、(G) 光鹼產生劑、(H) 環氧化合物、(I) 助黏劑、(J) 表面活性劑和/或 (K) 溶劑。The composition may optionally further comprise (F) a compound containing two or more double bonds and two or more hydroxyl groups, (G) a photobase generator, (H) an epoxy compound, (I) Adhesion promoter, (J) surfactant and/or (K) solvent.
如本文中使用的,術語「(甲基)丙烯醯基」係指「丙烯醯基」和/或「甲基丙烯醯基」,並且術語「(甲基)丙烯酸酯」係指「丙烯酸酯」和/或「甲基丙烯酸酯」。As used herein, the term "(meth)acryl" refers to "acryl" and/or "methacryl", and the term "(meth)acrylate" refers to "acrylate" And/or "methacrylate".
藉由凝膠滲透層析法(GPC,洗脫液:四氫呋喃)(參照聚苯乙烯標準品)測量如下所述之各組分的重量平均分子量(g/mol或Da)。(A) 共聚物 Measure the weight average molecular weight (g/mol or Da) of each component as described below by gel permeation chromatography (GPC, eluent: tetrahydrofuran) (refer to polystyrene standards). (A) Copolymer
共聚物(A)可以包含選自由以下組成之群組的至少一種:(a1) 衍生自含有酸基團的不飽和單體的結構單元;(a2) 衍生自含有脂環族環氧基團的不飽和單體的結構單元;(a3) 衍生自含有無環環氧基團的不飽和單體的結構單元;以及(a4) 不同於 (a1) 至 (a3) 的衍生自不飽和單體的結構單元。The copolymer (A) may contain at least one selected from the group consisting of: (a1) a structural unit derived from an unsaturated monomer containing an acid group; (a2) a structural unit derived from an alicyclic epoxy group Structural units of unsaturated monomers; (a3) Structural units derived from unsaturated monomers containing acyclic epoxy groups; and (a4) Different from (a1) to (a3) derived from unsaturated monomers Structural units.
特別地,共聚物(A)可以包含選自由結構單元(a1)至(a4)組成之群組的兩種或更多種、三種或更多種、或四種或更多種。In particular, the copolymer (A) may include two or more, three or more, or four or more selected from the group consisting of structural units (a1) to (a4).
更特別地,共聚物(A)可以包含結構單元(a4)並且可以進一步包含(a1)、(a2)和/或(a3)。(a1) 衍生自含有酸基團的不飽和單體的結構單元 More specifically, the copolymer (A) may include a structural unit (a4) and may further include (a1), (a2), and/or (a3). (a1) Structural units derived from unsaturated monomers containing acid groups
共聚物(A)可以包含 (a1) 衍生自含有酸基團的不飽和單體的結構單元。The copolymer (A) may contain (a1) a structural unit derived from an unsaturated monomer containing an acid group.
本發明中的結構單元(a1)可以衍生自含有酸基團的不飽和單體。The structural unit (a1) in the present invention may be derived from an unsaturated monomer containing an acid group.
含有酸基團的不飽和單體可以是含有酸基團的烯鍵式不飽和化合物,特別是基於琥珀酸酯的丙烯酸酯化合物。The unsaturated monomer containing an acid group may be an ethylenically unsaturated compound containing an acid group, particularly a succinate-based acrylate compound.
基於琥珀酸酯的丙烯酸酯化合物之實例包括選自由以下組成之群組的至少一種:單-2-丙烯醯氧基乙基琥珀酸酯、單-2-甲基丙烯醯氧基乙基琥珀酸酯、4-(2-(丙烯醯氧基)乙氧基)-4-側氧基丁酸、4-(3-(甲基丙烯醯氧基)丙氧基)-4-側氧基丁酸、以及4-((5-(甲基丙烯醯氧基)戊基)氧基)-4-側氧基丁酸。
[表1]
結構單元(a1)的量可以是基於構成共聚物(A)的結構單元的總莫耳數的5莫耳%至50莫耳%、5莫耳%至40莫耳%、5莫耳%至30莫耳%、5莫耳%至20莫耳%、或5莫耳%至15莫耳%。在上述範圍內,改善組成物的溶解度以便圖案在顯影期間不脫離,並且可以獲得優良圖案平直度及解析度。(a2) 衍生自含有脂環族環氧基團的不飽和單體的結構單元 The amount of the structural unit (a1) may be 5 mol% to 50 mol%, 5 mol% to 40 mol%, 5 mol% to 50 mol%, based on the total number of mol% of the structural units constituting the copolymer (A) 30 mol%, 5 mol% to 20 mol%, or 5 mol% to 15 mol%. Within the above range, the solubility of the composition is improved so that the pattern does not come off during development, and excellent pattern flatness and resolution can be obtained. (a2) Structural units derived from unsaturated monomers containing alicyclic epoxy groups
共聚物(A)可以包含 (a2) 衍生自含有脂環族環氧基團的不飽和單體的結構單元。The copolymer (A) may contain (a2) a structural unit derived from an unsaturated monomer containing an alicyclic epoxy group.
本發明中的結構單元 (a2) 可以衍生自含有脂環族環氧基團的不飽和單體。The structural unit (a2) in the present invention may be derived from an unsaturated monomer containing an alicyclic epoxy group.
含有脂環族環氧基團的不飽和單體 (a2) 可以是2,4-環氧環己基甲基丙烯酸酯、3,4-環氧環己基甲基丙烯酸酯、或3,4-環氧環己基甲基甲基丙烯酸酯。The unsaturated monomer (a2) containing an alicyclic epoxy group can be 2,4-epoxycyclohexyl methacrylate, 3,4-epoxycyclohexyl methacrylate, or 3,4-cyclic Oxycyclohexyl methacrylate.
結構單元 (a2) 的量可以是基於構成共聚物(A)的結構單元的總莫耳數的5莫耳%至50莫耳%、5莫耳%至40莫耳%、5莫耳%至30莫耳%、5莫耳%至20莫耳%、10莫耳%至50莫耳%、10莫耳%至40莫耳%、10莫耳%至30莫耳%、10莫耳%至20莫耳%、或10莫耳%至15莫耳%。在以上範圍內,維持組成物的儲存穩定性,並且增強膜保留率。(a3) 衍生自含有無環環氧基團的不飽和單體的結構單元 The amount of the structural unit (a2) may be 5 mol% to 50 mol%, 5 mol% to 40 mol%, 5 mol% to 50 mol% based on the total number of mol% of the structural units constituting the copolymer (A) 30 mol%, 5 mol% to 20 mol%, 10 mol% to 50 mol%, 10 mol% to 40 mol%, 10 mol% to 30 mol%, 10 mol% to 20 mol%, or 10 mol% to 15 mol%. Within the above range, the storage stability of the composition is maintained, and the film retention rate is enhanced. (a3) Structural units derived from unsaturated monomers containing acyclic epoxy groups
共聚物(A)可以包含 (a3) 衍生自含有無環環氧基團的不飽和單體的結構單元。The copolymer (A) may contain (a3) a structural unit derived from an unsaturated monomer containing an acyclic epoxy group.
本發明中的結構單元 (a3) 可以衍生自含有無環環氧基團的不飽和單體。The structural unit (a3) in the present invention may be derived from an unsaturated monomer containing an acyclic epoxy group.
含有無環環氧基團的不飽和單體可以是丙烯酸縮水甘油酯、甲基丙烯酸縮水甘油酯或4-羥基丁基丙烯酸酯縮水甘油醚。The unsaturated monomer containing an acyclic epoxy group may be glycidyl acrylate, glycidyl methacrylate, or 4-hydroxybutyl acrylate glycidyl ether.
結構單元 (a3) 的量可以是基於構成共聚物(A)的結構單元的總莫耳數的5莫耳%至50莫耳%、5莫耳%至40莫耳%、5莫耳%至30莫耳%、5莫耳%至20莫耳%、或5莫耳%至15莫耳%。在以上範圍內,維持組成物的儲存穩定性,並且增強膜保留率。The amount of the structural unit (a3) may be 5 mol% to 50 mol%, 5 mol% to 40 mol%, 5 mol% to 50 mol%, based on the total number of mol% of the structural units constituting the copolymer (A) 30 mol%, 5 mol% to 20 mol%, or 5 mol% to 15 mol%. Within the above range, the storage stability of the composition is maintained, and the film retention rate is enhanced.
如果共聚物(A)同時包含結構單元 (a2) 和 (a3),則結構單元 (a2) 和 (a3) 的總量可以是基於共聚物(A)的結構單元的總莫耳數的5莫耳%至60莫耳%、10莫耳%至60莫耳%、10莫耳%至50莫耳%、或10莫耳%至45莫耳%。此外,結構單元(a2)和(a3)的莫耳比可以是50至99 : 50至1、50至90 : 50至10、50至85 : 50至15、50至80 : 50至20、或50至75 : 50至25。在以上範圍內,可能實現在室溫下隨著時間的推移優異的穩定性、耐熱性和耐化學性、以及增強圖案形成。以及 (a4) 不同於 (a1) 至 (a3) 的衍生自不飽和單體的結構單元 If the copolymer (A) contains both structural units (a2) and (a3), the total amount of the structural units (a2) and (a3) may be 5 moles based on the total number of moles of the structural units of the copolymer (A). Ear% to 60 mol%, 10 mol% to 60 mol%, 10 mol% to 50 mol%, or 10 mol% to 45 mol%. In addition, the molar ratio of the structural units (a2) and (a3) may be 50 to 99: 50 to 1, 50 to 90: 50 to 10, 50 to 85: 50 to 15, 50 to 80: 50 to 20, or 50 to 75: 50 to 25. Within the above range, it is possible to achieve excellent stability, heat resistance, and chemical resistance over time at room temperature, and enhanced pattern formation. And (a4) structural units derived from unsaturated monomers that are different from (a1) to (a3)
共聚物(A)可以包含 (a4) 不同於 (a1) 至 (a3) 的衍生自不飽和單體的結構單元。在這種情況下,結構單元 (a4) 可以衍生自一種或更多種、兩種或更多種、或三種或更多種不飽和單體。The copolymer (A) may contain (a4) structural units derived from unsaturated monomers other than (a1) to (a3). In this case, the structural unit (a4) may be derived from one or more, two or more, or three or more unsaturated monomers.
本發明中的共聚物(A)可以進一步包含不同於 (a1) 至 (a3) 的 (a4) 結構單元。結構單元 (a4) 可以衍生自不同於上文描述的結構單元的烯鍵式不飽和化合物。The copolymer (A) in the present invention may further include (a4) structural units different from (a1) to (a3). The structural unit (a4) may be derived from an ethylenically unsaturated compound other than the structural unit described above.
特別地,結構單元 (a4) 可以衍生自烯鍵式不飽和羧酸、烯鍵式不飽和羧酸酐、或它們的組合。它們的實例包括:不飽和單羧酸,比如(甲基)丙烯酸、巴豆酸、α-氯丙烯酸和肉桂酸;不飽和二羧酸及其酸酐,比如馬來酸、馬來酸酐、富馬酸、衣康酸、衣康酸酐、檸康酸、檸康酸酐和中康酸;以及三價或更高價的不飽和多羧酸及其酸酐。In particular, the structural unit (a4) may be derived from an ethylenically unsaturated carboxylic acid, an ethylenically unsaturated carboxylic acid anhydride, or a combination thereof. Examples of them include: unsaturated monocarboxylic acids, such as (meth)acrylic acid, crotonic acid, α-chloroacrylic acid, and cinnamic acid; unsaturated dicarboxylic acids and their anhydrides, such as maleic acid, maleic anhydride, and fumaric acid , Itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride and mesaconic acid; and trivalent or higher unsaturated polycarboxylic acids and their anhydrides.
此外,其可以是選自由以下組成之群組的至少一種:具有芳香族環的烯鍵式不飽和化合物,比如(甲基)丙烯酸苯酯、(甲基)丙烯酸苄酯、2-苯氧基乙基(甲基)丙烯酸酯、苯氧基二乙二醇(甲基)丙烯酸酯、對-壬基苯氧基聚乙二醇(甲基)丙烯酸酯、對-壬基苯氧基聚丙二醇(甲基)丙烯酸酯、三溴苯基(甲基)丙烯酸酯、苯乙烯、甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、三乙基苯乙烯、丙基苯乙烯、丁基苯乙烯、己基苯乙烯、庚基苯乙烯、辛基苯乙烯、氟苯乙烯、氯苯乙烯、溴苯乙烯、碘苯乙烯、甲氧基苯乙烯、乙氧基苯乙烯、丙氧基苯乙烯、對-羥基-α-甲基苯乙烯、乙醯基苯乙烯、乙烯基甲苯、二乙烯基苯、乙烯基苯酚、鄰-乙烯基苄基甲基醚、間-乙烯基苄基甲基醚、以及對-乙烯基苄基甲基醚;不飽和羧酸酯,如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸三級丁酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸乙基己酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸羥乙酯、(甲基)丙烯酸2-羥丙酯、(甲基)丙烯酸2-羥基-3-氯丙酯、(甲基)丙烯酸4-羥丁酯、(甲基)丙烯酸甘油酯、α-羥甲基丙烯酸甲酯、α-羥甲基丙烯酸乙酯、α-羥甲基丙烯酸丙酯、α-羥甲基丙烯酸丁酯、(甲基)丙烯酸2-甲氧基乙酯、(甲基)丙烯酸3-甲氧基丁酯、乙氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基三丙二醇(甲基)丙烯酸酯、聚(乙二醇)甲醚(甲基)丙烯酸酯、(甲基)丙烯酸四氟丙酯、(甲基)丙烯酸1,1,1,3,3,3-六氟異丙酯、(甲基)丙烯酸八氟戊酯、(甲基)丙烯酸十七氟癸酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊氧基乙酯、以及(甲基)丙烯酸二環戊烯基氧基乙酯;含有N-乙烯基的N-乙烯基三級胺,如N-乙烯基吡咯啶酮、N-乙烯基咔唑、以及N-乙烯基𠰌啉;不飽和醚,如乙烯基甲醚和乙烯基乙醚;以及不飽和醯亞胺,如N-苯基馬來醯亞胺、N-(4-氯苯基)馬來醯亞胺、N-(4-羥苯基)馬來醯亞胺和N-環己基馬來醯亞胺。In addition, it may be at least one selected from the group consisting of: ethylenically unsaturated compounds having an aromatic ring, such as phenyl (meth)acrylate, benzyl (meth)acrylate, 2-phenoxy Ethyl (meth)acrylate, phenoxydiethylene glycol (meth)acrylate, p-nonylphenoxy polyethylene glycol (meth)acrylate, p-nonylphenoxy polypropylene glycol (Meth) acrylate, tribromophenyl (meth)acrylate, styrene, methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, three Ethyl styrene, propyl styrene, butyl styrene, hexyl styrene, heptyl styrene, octyl styrene, fluorostyrene, chlorostyrene, bromostyrene, iodostyrene, methoxy styrene , Ethoxystyrene, propoxystyrene, p-hydroxy-α-methylstyrene, acetylstyrene, vinyl toluene, divinylbenzene, vinylphenol, o-vinylbenzylmethyl Base ether, m-vinyl benzyl methyl ether, and p-vinyl benzyl methyl ether; unsaturated carboxylic acid esters, such as methyl (meth)acrylate, ethyl (meth)acrylate, (methyl) ) Butyl acrylate, dimethylaminoethyl (meth)acrylate, isobutyl (meth)acrylate, tertiary butyl (meth)acrylate, cyclohexyl (meth)acrylate, (meth) Ethylhexyl acrylate, tetrahydrofurfuryl (meth)acrylate, hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-hydroxy-3-chloropropyl (meth)acrylate , 4-hydroxybutyl (meth)acrylate, glycerol (meth)acrylate, methyl α-hydroxymethacrylate, ethyl α-hydroxymethacrylate, α-hydroxypropyl methacrylate, α-hydroxyl Butyl methacrylate, 2-methoxyethyl (meth)acrylate, 3-methoxybutyl (meth)acrylate, ethoxydiethylene glycol (meth)acrylate, methoxytri Ethylene glycol (meth)acrylate, methoxytripropylene glycol (meth)acrylate, poly(ethylene glycol) methyl ether (meth)acrylate, tetrafluoropropyl (meth)acrylate, (methyl) ) 1,1,1,3,3,3-hexafluoroisopropyl acrylate, octafluoropentyl (meth)acrylate, heptafluorodecyl (meth)acrylate, isobornyl (meth)acrylate, Dicyclopentyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentyloxyethyl (meth)acrylate, and dicyclopentenyloxyethyl (meth)acrylate; N-vinyl tertiary amines containing N-vinyl groups, such as N-vinylpyrrolidone, N-vinylcarbazole, and N-vinyl 𠰌line; unsaturated ethers, such as vinyl methyl ether and vinyl Diethyl ether; and unsaturated amides, such as N-phenylmaleimide, N-(4-chlorophenyl)maleimide, N-(4-hydroxyphenyl)maleimide and N-Cyclohexylmaleimide.
結構單元(a4)的量可以是基於共聚物(A)的結構單元的總莫耳數的50莫耳%至99莫耳%、50莫耳%至90莫耳%、55莫耳%至85莫耳%、或60莫耳%至80莫耳%。在上述範圍內,可以控制共聚物(A)的反應性並且增加其溶解度,以便顯著增強光敏樹脂組成物之可塗覆性。The amount of the structural unit (a4) may be 50 mol% to 99 mol%, 50 mol% to 90 mol%, 55 mol% to 85% based on the total number of mol of the structural units of the copolymer (A) Mol%, or 60 mol% to 80 mol%. Within the above range, the reactivity of the copolymer (A) can be controlled and its solubility can be increased, so as to significantly enhance the coatability of the photosensitive resin composition.
本發明中使用的共聚物(A)可以具有10,000 Da或更大、或小於10,000 Da的重量平均分子量。在這種情況下,不能單獨使用具有小於10,000 Da的重量平均分子量的共聚物(A)。其必須與具有10,000 Da或更大的共聚物組合使用。特別地,本發明中使用的共聚物(A)可以具有10,000 Da或更多、15,000 Da或更大、10,000至50,000 Da、12,000至45,000 Da或15,000至40,000 Da的重量平均分子量。此外,本發明中使用的共聚物(A)可以具有5,000 Da至小於10,000 Da、5,000至9,000 Da、5,000至8,000 Da或5,000至7,000 Da的重量平均分子量。如果它具有在以上範圍內的重量平均分子量,則與基底的黏附性係優異的,物理和化學特性係有利的,並且黏度係適當的。The copolymer (A) used in the present invention may have a weight average molecular weight of 10,000 Da or more, or less than 10,000 Da. In this case, the copolymer (A) having a weight average molecular weight of less than 10,000 Da cannot be used alone. It must be used in combination with a copolymer having 10,000 Da or more. In particular, the copolymer (A) used in the present invention may have a weight average molecular weight of 10,000 Da or more, 15,000 Da or more, 10,000 to 50,000 Da, 12,000 to 45,000 Da, or 15,000 to 40,000 Da. In addition, the copolymer (A) used in the present invention may have a weight average molecular weight of 5,000 Da to less than 10,000 Da, 5,000 to 9,000 Da, 5,000 to 8,000 Da, or 5,000 to 7,000 Da. If it has a weight average molecular weight within the above range, the adhesion to the substrate is excellent, the physical and chemical properties are favorable, and the viscosity is appropriate.
本發明中使用的共聚物(A)可以包括選自由如上文所描述的結構單元(a1)至(a4)組成之群組的至少一種。例如,共聚物(A)可以包括結構單元 (a1) 至 (a4) 的組合、(a2) 至 (a4) 的組合、(a2) 和 (a3) 的組合、(a2) 和 (a4) 的組合、以及 (a3) 和 (a4) 的組合。The copolymer (A) used in the present invention may include at least one selected from the group consisting of structural units (a1) to (a4) as described above. For example, the copolymer (A) may include a combination of structural units (a1) to (a4), a combination of (a2) to (a4), a combination of (a2) and (a3), a combination of (a2) and (a4) , And the combination of (a3) and (a4).
用於本發明之共聚物 (A) 可以藉由本領域中已知的共聚進行合成。共聚物(A)的量的範圍可以是基於光敏樹脂組成物的總重量(不包括溶劑的餘量)的10至50重量%、10至40重量%、10至35重量%、15至40重量%、15至35重量%、或20至35重量%。在上述範圍內,顯影後的圖案輪廓可能是有利的,並且可以增強諸如膜保留率和耐化學性等性質。(B) 可光聚合的化合物 The copolymer (A) used in the present invention can be synthesized by copolymerization known in the art. The range of the amount of the copolymer (A) may be 10 to 50% by weight, 10 to 40% by weight, 10 to 35% by weight, 15 to 40% by weight based on the total weight of the photosensitive resin composition (excluding the remainder of the solvent). %, 15 to 35% by weight, or 20 to 35% by weight. Within the above range, the pattern profile after development may be advantageous, and properties such as film retention rate and chemical resistance may be enhanced. (B) Photopolymerizable compound
用於本發明之可光聚合的化合物(或單體)係在光聚合引發劑作用下可聚合的化合物。它可以包括具有至少一個烯鍵式不飽和基團的丙烯酸或甲基丙烯酸的單官能或多官能酯化合物。從耐化學性的觀點來看,它可以較佳的是具有至少兩個官能基的多官能化合物。The photopolymerizable compound (or monomer) used in the present invention is a compound that is polymerizable under the action of a photopolymerization initiator. It may include a monofunctional or polyfunctional ester compound of acrylic acid or methacrylic acid having at least one ethylenically unsaturated group. From the viewpoint of chemical resistance, it may preferably be a polyfunctional compound having at least two functional groups.
可聚合的化合物可以是選自由以下組成之群組中的至少一種:乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、甘油三(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯和琥珀酸的單酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯和琥珀酸的單酯、己內酯改性的二新戊四醇六(甲基)丙烯酸酯、新戊四醇三丙烯酸酯-二異氰酸六亞甲基酯(新戊四醇三丙烯酸酯和二異氰酸六亞甲基酯的反應產物)、三新戊四醇七(甲基)丙烯酸酯、三新戊四醇八(甲基)丙烯酸酯、雙酚A環氧丙烯酸酯、和乙二醇單甲醚丙烯酸酯,但它不限於此。The polymerizable compound may be at least one selected from the group consisting of ethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, Triethylene glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, polyethylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, glycerin Tri(meth)acrylate, trimethylolpropane tri(meth)acrylate, neopentaerythritol tri(meth)acrylate, neopentaerythritol tri(meth)acrylate and monoester of succinic acid , Neopentyl erythritol tetra (meth) acrylate, dine pentaerythritol penta (meth) acrylate, dine pentaerythritol hexa (meth) acrylate, dine pentaerythritol penta (meth) acrylate Monoester and succinic acid, caprolactone-modified dineopentaerythritol hexa(meth)acrylate, neopentaerythritol triacrylate-hexamethylene diisocyanate (neopentylerythritol three The reaction product of acrylate and hexamethylene diisocyanate), trineopentaerythritol hepta(meth)acrylate, trineopentaerythritol octa(meth)acrylate, bisphenol A epoxy acrylate , And ethylene glycol monomethyl ether acrylate, but it is not limited to this.
可商購的可光聚合的化合物的實例可以包括單官能(甲基)丙烯酸酯,如由東亞合成株式會社(Toagosei Co., Ltd.)製造的Aronix M-101、M-111和M-114,由日本化藥株式會社(Nippon Kayaku Co., Ltd.)製造的KAYARAD TC-110S和TC-120S,以及由大阪由岐化藥工業株式會社(Osaka Yuki Kagaku Kogyo Co., Ltd.)製造的V-158和V-2311;雙官能(甲基)丙烯酸酯,如由東亞合成株式會社製造的Aronix M-210、M-240和M-6200,和由日本化藥株式會社製造的KAYARAD HDDA、HX-220和R-604,以及由大阪由岐化藥工業株式會社製造的V-260、V-312和V-335 HP;以及三官能和更高官能的(甲基)丙烯酸酯,如Aronix M-309、M-400、M-403、M-405、M-450、M-7100、M-8030、M-8060,以及由東亞合成株式會社製造的TO-1382,由日本化藥株式會社製造的KAYARAD TMPTA、DPHA、DPHA-40H、DPCA-20、DPCA-30、DPCA-60和DPCA-120,以及由大阪由岐化藥工業株式會社製造的V-295、V-300、V-360、V-GPT, V-3PA和V-400。Examples of commercially available photopolymerizable compounds may include monofunctional (meth)acrylates such as Aronix M-101, M-111, and M-114 manufactured by Toagosei Co., Ltd. , KAYARAD TC-110S and TC-120S manufactured by Nippon Kayaku Co., Ltd., and V manufactured by Osaka Yuki Kagaku Kogyo Co., Ltd. -158 and V-2311; bifunctional (meth)acrylates, such as Aronix M-210, M-240 and M-6200 manufactured by Toagosei Co., Ltd., and KAYARAD HDDA, HX manufactured by Nippon Kayaku Co., Ltd. -220 and R-604, and V-260, V-312 and V-335 HP manufactured by Disproportionate Chemical Industry Co., Ltd. in Osaka; and trifunctional and higher-functional (meth)acrylates such as Aronix M- 309, M-400, M-403, M-405, M-450, M-7100, M-8030, M-8060, and TO-1382 manufactured by Toagosei Co., Ltd., manufactured by Nippon Kayaku Co., Ltd. KAYARAD TMPTA, DPHA, DPHA-40H, DPCA-20, DPCA-30, DPCA-60 and DPCA-120, as well as V-295, V-300, V-360, V- GPT, V-3PA and V-400.
可光聚合的化合物可以單獨使用或以其兩種或更多種的組合使用。可以採用基於共聚物(A)的100重量份數(基於固體含量)的10至100重量份數、10至90重量份數、10至80重量份數、20至90重量份數、20至80重量份數、25至80重量份數或25至60重量份數的量的可光聚合的化合物。在上述範圍內,圖案顯影係有利的,並且可以實現優良的耐化學性和彈性恢復力。(C) 光聚合引發劑 The photopolymerizable compound may be used alone or in a combination of two or more thereof. 10 to 100 parts by weight, 10 to 90 parts by weight, 10 to 80 parts by weight, 20 to 90 parts by weight, 20 to 80 parts by weight based on 100 parts by weight (based on the solid content) of the copolymer (A) can be used. Parts by weight, 25 to 80 parts by weight, or 25 to 60 parts by weight of the photopolymerizable compound. Within the above range, pattern development is advantageous, and excellent chemical resistance and elastic recovery can be achieved. (C) Photopolymerization initiator
在本發明中採用的光聚合引發劑可以是任何已知的光聚合引發劑。The photopolymerization initiator used in the present invention may be any known photopolymerization initiator.
光聚合引發劑可以選自由以下組成之群組:基於苯乙酮的化合物、基於非咪唑的化合物、基於三𠯤的化合物、基於鎓鹽的化合物、基於苯偶姻的化合物、基於二苯甲酮的化合物、基於多核醌的化合物、基於硫𠮿口星酮的化合物、基於重氮的化合物、基於醯亞胺磺酸酯的化合物、基於肟的化合物、基於咔唑的化合物、基於硼酸鋶的化合物、基於酮的化合物、以及它們的混合物。特別地,光聚合引發劑可以是選自由以下組成之群組的至少一種:基於肟的化合物、基於三𠯤的化合物、或基於酮的化合物。更特別地,光聚合引發劑可以是基於肟的化合物和基於三𠯤的化合物的組合,或基於肟的化合物、基於三𠯤的化合物和基於酮的化合物的組合。The photopolymerization initiator may be selected from the group consisting of: acetophenone-based compounds, non-imidazole-based compounds, tris-based compounds, onium salt-based compounds, benzoin-based compounds, benzophenone-based compounds Compounds, polynuclear quinone-based compounds, thioketone-based compounds, diazonium-based compounds, imine sulfonate-based compounds, oxime-based compounds, carbazole-based compounds, and boric acid-based compounds , Ketone-based compounds, and their mixtures. In particular, the photopolymerization initiator may be at least one selected from the group consisting of an oxime-based compound, a tris-based compound, or a ketone-based compound. More specifically, the photopolymerization initiator may be a combination of an oxime-based compound and a tris-based compound, or a combination of an oxime-based compound, a tris-based compound, and a ketone-based compound.
光聚合引發劑的特別的實例包括2,2'-偶氮雙(2,4-二甲基戊腈)、2,2'-偶氮雙(4-甲氧基-2,4-二甲基戊腈)、過氧化苯甲醯、過氧化月桂醯、過氧新戊酸三級丁酯、1,1-雙(三級丁基過氧基)環己烷、對-二甲基胺基苯乙酮、2-苄基-2-(二甲基胺基)-1-[4-(4-𠰌啉基)苯基]-1-丁酮、2-羥基-2-甲基-1-苯基-丙-1-酮、苄基二甲基縮酮、二苯甲酮、苯偶姻丙基醚、二乙基硫𠮿口星酮、2,4-雙(三氯甲基)-6-對-甲氧基苯基-s-三𠯤、2-三氯甲基-5-苯乙烯基-1,3,4-㗁二唑、9-苯基吖啶、3-甲基-5-胺基-((s-三𠯤-2-基)胺基)-3-苯基香豆素、2-(鄰-氯苯基)-4,5-二苯基咪唑基二聚體、1-苯基-1,2-丙二酮-2-(鄰-乙氧基羰基)肟、1-[4-(苯基硫基)苯基]-辛烷-1,2-二酮-2-(鄰-苯甲醯肟)、鄰-苯甲醯基-4'-(苯巰基)苯甲醯基-己基酮肟、2,4,6-三甲基苯基羰基-二苯基膦醯基氧化物、六氟磷酸-三烷基苯基鋶鹽、2-巰基苯并咪唑、2,2'-苯并噻唑基二硫化物、(E)-2-(4-苯乙烯基苯基)-4,6-雙(三氯甲基)-1,3,5-三𠯤、2-二甲基胺基-2-(4-甲基苄基)-1-(4-𠰌啉-4-基苯基)-丁烷-1-酮、以及它們的混合物,但其不限於此。Specific examples of the photopolymerization initiator include 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2'-azobis(4-methoxy-2,4-dimethyl Valeronitrile), benzyl peroxide, laurel peroxide, tertiary butyl peroxypivalate, 1,1-bis(tertiary butylperoxy)cyclohexane, p-dimethylamine Acetophenone, 2-benzyl-2-(dimethylamino)-1-[4-(4-𠰌olinyl)phenyl]-1-butanone, 2-hydroxy-2-methyl- 1-Phenyl-propan-1-one, benzyl dimethyl ketal, benzophenone, benzoin propyl ether, diethyl thioketone, 2,4-bis(trichloromethyl) )-6-p-methoxyphenyl-s-tris, 2-trichloromethyl-5-styryl-1,3,4-diazole, 9-phenylacridine, 3-methyl 5-amino-((s-tris-2-yl)amino)-3-phenylcoumarin, 2-(o-chlorophenyl)-4,5-diphenylimidazolyl Polymer, 1-phenyl-1,2-propanedione-2-(o-ethoxycarbonyl)oxime, 1-[4-(phenylthio)phenyl]-octane-1,2- Dione-2-(ortho-benzyl oxime), o-benzyl-4'-(phenylmercapto)benzyl-hexyl ketoxime, 2,4,6-trimethylphenylcarbonyl- Diphenylphosphino oxide, hexafluorophosphoric acid-trialkylphenyl sulfonate, 2-mercaptobenzimidazole, 2,2'-benzothiazolyl disulfide, (E)-2-(4- Styrylphenyl)-4,6-bis(trichloromethyl)-1,3,5-tris, 2-dimethylamino-2-(4-methylbenzyl)-1-( 4-𠰌lin-4-ylphenyl)-butan-1-one, and mixtures thereof, but it is not limited thereto.
作為參考,可商購的基於肟的光聚合引發劑的實例包括SPI-03(韓國三洋)、OXE-01(巴斯夫公司)、OXE-02(巴斯夫公司)、OXE-03(巴斯夫公司)、N-1919(ADEKA)、NCI-930(ADEKA)和NCI-831(ADEKA)。此外,可商購的基於三𠯤的光聚合引發劑的實例包括三𠯤-Y(Tronly)及三𠯤-Y(醫藥合成)。For reference, examples of commercially available oxime-based photopolymerization initiators include SPI-03 (Sanyo, Korea), OXE-01 (BASF), OXE-02 (BASF), OXE-03 (BASF), N -1919 (ADEKA), NCI-930 (ADEKA) and NCI-831 (ADEKA). In addition, examples of commercially available tris-based photopolymerization initiators include tris-Y (Tronly) and tris-Y (medical synthesis).
可以採用基於共聚物(A)的100重量份數(基於固體含量)的10至30重量份數、10至25重量份數、10至20重量份數、或10至18重量份數的量的光聚合引發劑。The amount of 10 to 30 parts by weight, 10 to 25 parts by weight, 10 to 20 parts by weight, or 10 to 18 parts by weight based on 100 parts by weight of the copolymer (A) (based on the solid content) can be used. Photopolymerization initiator.
特別地,可以採用基於共聚物(A)的100重量份數(基於固體含量)的1至20重量份數、1至18重量份數、5至20重量份數、5至18重量份數、8至20重量份數或8至18重量份數的量的基於肟的光聚合引發劑。可以採用1至10重量份數、1至9重量份數、1至8重量份數、2至10重量份數、2至8重量份數或3至6重量份數的量的基於三𠯤的光聚合引發劑。可以採用1至10重量份數、1至9重量份數、1至8重量份數、2至10重量份數、2至8重量份數或2至6重量份數的量的基於酮的光聚合引發劑。In particular, 1 to 20 parts by weight, 1 to 18 parts by weight, 5 to 20 parts by weight, 5 to 18 parts by weight, based on 100 parts by weight (based on the solid content) of the copolymer (A) can be used. An oxime-based photopolymerization initiator in an amount of 8 to 20 parts by weight or 8 to 18 parts by weight. Can be used 1 to 10 parts by weight, 1 to 9 parts by weight, 1 to 8 parts by weight, 2 to 10 parts by weight, 2 to 8 parts by weight, or 3 to 6 parts by weight based on three 𠯤 Photopolymerization initiator. The ketone-based light can be used in an amount of 1 to 10 parts by weight, 1 to 9 parts by weight, 1 to 8 parts by weight, 2 to 10 parts by weight, 2 to 8 parts by weight, or 2 to 6 parts by weight. Polymerization initiator.
如果採用在上述範圍內的量的基於肟的光聚合引發劑,則可以增強顯影和塗覆特性,同時具有高靈敏度。此外,如果採用在上述範圍內的量的基於三𠯤的光聚合引發劑,則可以獲得在形成圖案後具有優良的耐化學性和錐角連同高靈敏度的塗覆膜。(D) 著色劑 If the oxime-based photopolymerization initiator is used in an amount within the above range, the development and coating characteristics can be enhanced while having high sensitivity. In addition, if the tri-based photopolymerization initiator is used in an amount within the above range, a coating film having excellent chemical resistance and taper angle together with high sensitivity after pattern formation can be obtained. (D) Coloring agent
本發明之著色的光敏樹脂組成物包含賦予其遮光性質的著色劑。本發明中採用的著色劑可以是兩種或更多種無機或有機著色劑的混合物。它較佳的是具有高產色性和高耐熱性。The colored photosensitive resin composition of the present invention contains a coloring agent that imparts light-shielding properties to it. The coloring agent used in the present invention may be a mixture of two or more inorganic or organic coloring agents. It preferably has high color yield and high heat resistance.
著色劑包括黑色著色劑和除了黑色著色劑之外的著色劑 (d3)。Colorants include black colorants and colorants (d3) other than black colorants.
黑色著色劑可以是黑色無機著色劑 (d2)、黑色有機著色劑 (d1) 或它們的組合。特別地,黑色著色劑可以包括黑色無機著色劑並且可以採用基於著色的光敏樹脂組成物的固體含量的總重量的0.01至50重量%的量。The black colorant may be a black inorganic colorant (d2), a black organic colorant (d1), or a combination thereof. In particular, the black colorant may include a black inorganic colorant and may be used in an amount of 0.01 to 50% by weight based on the total weight of the solid content of the colored photosensitive resin composition.
可以使用本領域已知的任何黑色無機著色劑、任何黑色有機著色劑、和任何除了黑顏料之外的著色劑。例如,可以使用在色彩索引(由Society of Dyers and Colourists [染色工作者及配色師協會]刊發的)中分類為顏料的任何化合物和本領域已知的任何染料。Any black inorganic colorant, any black organic colorant, and any coloring agent other than black pigments known in the art can be used. For example, any compound classified as a pigment in the Color Index (published by the Society of Dyers and Colourists) and any dye known in the art can be used.
黑色無機著色劑的具體實例可以包括炭黑、鈦黑、金屬氧化物如基於Cu-Fe-Mn的氧化物和合成鐵黑等。從圖案特徵和耐化學性的視角,較佳的是使用在它們之中的炭黑。Specific examples of the black inorganic colorant may include carbon black, titanium black, metal oxides such as Cu-Fe-Mn-based oxides and synthetic iron black, and the like. From the viewpoint of pattern characteristics and chemical resistance, it is preferable to use carbon black among them.
黑色有機著色劑的具體實例可以包括苯胺黑、內醯胺黑、苝黑等。從光密度、介電性等的觀點來看,其中較佳的是內醯胺黑(例如,來自巴斯夫公司的黑582)。Specific examples of the black organic colorant may include nigrosine, internal amides black, perylene black, and the like. From the viewpoints of optical density, dielectric properties, etc., among them, internal amide black (for example, black 582 from BASF) is preferable.
除了黑色著色劑之外的著色劑的具體實例可以包括C.I.顏料黃20、24、31、53、83、86、93、94、109、110、117、125、137、138、139、147、148、150、153、154、166、173、180和185;C.I.顏料橙13、31、36、38、40、42、43、51、55、59、61、64、65和71;C.I.顏料紅9、97、105、122、123、144、149、166、168、176、177、179、180、192、215、216、224、242、254、255和264;C.I.顏料紫13、14、19、23、25、27、29、32、33、36、37和38;C.I.顏料藍15(15 : 3、15 : 4、15 : 6等)、16、21、28、60、64和76;C.I.顏料綠7、10、15、25、36、47和58;以及C.I.顏料棕28。特別地,除了黑色著色劑之外的著色劑可以是藍色著色劑、紫色著色劑或它們的組合。為了防止光洩露和光模糊現象的目的並且從著色的分散體組成物的可分散性和耐化學性的觀點看,在它們之中較佳的是C.I.顏料藍15 : 6和60,或C.I.顏料紫23。Specific examples of coloring agents other than black colorants may include CI Pigment Yellow 20, 24, 31, 53, 83, 86, 93, 94, 109, 110, 117, 125, 137, 138, 139, 147, 148 , 150, 153, 154, 166, 173, 180 and 185; CI Pigment Orange 13, 31, 36, 38, 40, 42, 43, 51, 55, 59, 61, 64, 65 and 71; CI Pigment Red 9 , 97, 105, 122, 123, 144, 149, 166, 168, 176, 177, 179, 180, 192, 215, 216, 224, 242, 254, 255 and 264; CI Pigment Violet 13, 14, 19, 23, 25, 27, 29, 32, 33, 36, 37 and 38; CI Pigment Blue 15 (15: 3, 15: 4, 15: 6 etc.), 16, 21, 28, 60, 64 and 76; CI Pigment Green 7, 10, 15, 25, 36, 47 and 58; and CI Pigment Brown 28. In particular, the coloring agent other than the black coloring agent may be a blue coloring agent, a purple coloring agent, or a combination thereof. For the purpose of preventing light leakage and light blurring and from the viewpoint of dispersibility and chemical resistance of the colored dispersion composition, preferred among them is CI Pigment Blue 15: 6 and 60, or CI Pigment Violet twenty three.
著色劑的量可以是基於著色的光敏樹脂組成物的固體含量的總重量(即,不包括溶劑的重量)的5至70重量%或8至60重量%。特別地,著色劑可以包括基於著色的光敏樹脂組成物的固體含量的總重量(即,不包括溶劑的重量)的0.01至50重量%的黑色著色劑和0.01至20重量%的除了黑色著色劑之外的著色劑。更特別地,著色劑包括黑色無機著色劑或黑色有機著色劑並且可以包括基於著色的光敏樹脂組成物的固體含量的總重量(即,不包括溶劑的重量)的0至15重量%的黑色無機著色劑、0至40重量%的黑色有機著色劑和0.01至20重量%的除了黑色著色劑之外的著色劑。較佳的是,它可以包括基於著色的光敏樹脂組成物的固體含量的總重量(即,不包括溶劑的重量)的0至8.2重量%的黑色無機著色劑、0至45重量%的黑色有機著色劑和0.01至15重量%的除了黑色著色劑之外的著色劑。如果著色劑的量在上述範圍內,則顯影後的圖案輪廓可以是有利的,可以增強諸如耐化學性和彈性恢復力的性質,並且可以實現期望的光密度和光透射率。The amount of the colorant may be 5 to 70% by weight or 8 to 60% by weight based on the total weight of the solid content of the colored photosensitive resin composition (ie, the weight excluding the solvent). In particular, the colorant may include 0.01 to 50% by weight of the black colorant and 0.01 to 20% by weight of the black colorant based on the total weight of the solid content of the colored photosensitive resin composition (ie, excluding the weight of the solvent). Outside the coloring agent. More specifically, the colorant includes a black inorganic colorant or a black organic colorant and may include 0 to 15% by weight of the black inorganic colorant based on the total weight of the solid content of the colored photosensitive resin composition (ie, the weight excluding the solvent). Colorant, 0 to 40% by weight of black organic colorant, and 0.01 to 20% by weight of coloring agent other than black colorant. Preferably, it may include 0 to 8.2% by weight of black inorganic colorant and 0 to 45% by weight of black organic Coloring agent and 0.01 to 15% by weight of coloring agent other than black coloring agent. If the amount of the colorant is within the above range, the pattern profile after development may be advantageous, properties such as chemical resistance and elastic restoring force may be enhanced, and desired optical density and light transmittance may be achieved.
包含本發明之黑色矩陣的顯示器必須在700 nm的波長帶具有5%或更小的透射率以便當以3 μm的厚度形成固化膜時防止紅色或綠色的光模糊現象。此外,在900至950 nm的範圍中的透射率必須是10%或更高以便利於在放置掩膜進行曝光的過程中識別對準碼。The display including the black matrix of the present invention must have a transmittance of 5% or less in the 700 nm wavelength band in order to prevent red or green light blur when the cured film is formed with a thickness of 3 μm. In addition, the transmittance in the range of 900 to 950 nm must be 10% or higher to facilitate recognition of the alignment code in the process of placing the mask for exposure.
同時,可以將本發明中使用的著色劑以與分散體樹脂混合的碾磨基料、溶劑等形式添加到著色的光敏樹脂組成物。At the same time, the coloring agent used in the present invention may be added to the colored photosensitive resin composition in the form of a mill base, a solvent, etc. mixed with the dispersion resin.
分散體樹脂用於將著色劑(或顏料)均勻地分散於溶劑中並且可以特別地是選自由分散劑和分散體黏結劑組成之群組的至少一種。The dispersion resin is used to uniformly disperse the colorant (or pigment) in the solvent and may particularly be at least one selected from the group consisting of a dispersant and a dispersion binder.
分散劑的實例可以包括用於著色劑的任何已知的分散劑。它們的具體實例包括陽離子型表面活性劑、陰離子型表面活性劑、非離子型表面活性劑、兩性離子型表面活性劑、基於矽酮的表面活性劑、基於氟的表面活性劑、基於聚酯的化合物、基於聚羧酸酯的化合物、基於不飽和聚醯胺的化合物、基於聚羧酸的化合物、聚羧酸烷基鹽化合物、聚丙烯酸化合物、基於聚乙烯亞胺的化合物、基於聚胺酯的化合物、聚胺酯、以聚丙烯酸酯為代表的聚羧酸酯、不飽和聚醯胺、聚羧酸、聚羧酸的胺鹽、聚羧酸的銨鹽、聚羧酸的烷基胺鹽、聚矽氧烷、長鏈聚胺基醯胺磷酸鹽、羥基基團被取代的聚羧酸酯及其改性產物、由具有游離羧基基團的聚酯與聚(低級伸烷基亞胺)或其鹽的反應形成的醯胺、(甲基)丙烯酸-苯乙烯共聚物、(甲基)丙烯酸-(甲基)丙烯酸酯共聚物、苯乙烯-馬來酸共聚物、聚乙烯醇、水溶性樹脂或水溶性聚合物化合物,比如聚乙烯吡咯啶酮、改性的聚丙烯酸酯、環氧乙烷/環氧丙烷的加合物、磷酸酯等。可商購的分散劑可以包括來自畢克公司(BYK Co.)的Disperbyk-182、-183、-184、-185、-2000、-2150、-2155、-2163和-2164。它們可以單獨使用或以其兩種或更多種的組合使用。分散劑可以具有胺基團和/或酸基團作為顏料親合性基團並且可以視需要係銨鹽類型。Examples of the dispersant may include any known dispersants used for colorants. Specific examples of them include cationic surfactants, anionic surfactants, nonionic surfactants, zwitterionic surfactants, silicone-based surfactants, fluorine-based surfactants, polyester-based surfactants Compounds, polycarboxylate-based compounds, unsaturated polyamide-based compounds, polycarboxylic acid-based compounds, polycarboxyalkyl salt compounds, polyacrylic acid compounds, polyethyleneimine-based compounds, polyurethane-based compounds , Polyamine ester, polycarboxylate represented by polyacrylate, unsaturated polyamide, polycarboxylic acid, amine salt of polycarboxylic acid, ammonium salt of polycarboxylic acid, alkylamine salt of polycarboxylic acid, polysilicon Oxanes, long-chain polyamino amide phosphates, polycarboxylates with substituted hydroxyl groups and their modified products, composed of polyesters with free carboxyl groups and poly(lower alkylene imines) or Amide formed by the reaction of salt, (meth)acrylic acid-styrene copolymer, (meth)acrylic acid-(meth)acrylate copolymer, styrene-maleic acid copolymer, polyvinyl alcohol, water-soluble resin Or water-soluble polymer compounds, such as polyvinylpyrrolidone, modified polyacrylates, ethylene oxide/propylene oxide adducts, phosphate esters, etc. Commercially available dispersants may include Disperbyk-182, -183, -184, -185, -2000, -2150, -2155, -2163, and -2164 from BYK Co.. They can be used alone or in combination of two or more kinds thereof. The dispersant may have an amine group and/or an acid group as a pigment affinity group and may be an ammonium salt type as necessary.
分散劑可以藉由用其對著色劑進行表面處理而預先添加到著色劑中或在製備著色的光敏樹脂組成物的時候與著色劑一起添加。The dispersant may be added to the colorant in advance by surface-treating the colorant with it or added together with the coloring agent when preparing the colored photosensitive resin composition.
分散劑的胺值可以是5至200 mg KOH/g、10至200 mg KOH/g或50至150 mg KOH/g。如果分散劑的胺值在上述範圍內,則著色劑的可分散性和儲存穩定性係優良的,並且改善了由樹脂組成物製備的固化膜的表面的粗糙度。The amine value of the dispersant may be 5 to 200 mg KOH/g, 10 to 200 mg KOH/g, or 50 to 150 mg KOH/g. If the amine value of the dispersant is within the above range, the dispersibility and storage stability of the colorant are excellent, and the surface roughness of the cured film prepared from the resin composition is improved.
可以採用基於著色的分散體的總重量的1至20重量%、或2至15重量%的量的分散劑。如果分散劑的量在上述範圍內,則著色劑被有效地分散以改善分散穩定性,並且憑藉在其應用時維持合適的黏度改善了光學、物理和化學性質。因此,從分散穩定性和黏度之間的優良的平衡方面來說它係令人希望的。The dispersant may be used in an amount of 1 to 20% by weight, or 2 to 15% by weight based on the total weight of the colored dispersion. If the amount of the dispersant is within the above range, the colorant is effectively dispersed to improve dispersion stability, and the optical, physical, and chemical properties are improved by maintaining an appropriate viscosity during its application. Therefore, it is desirable in terms of an excellent balance between dispersion stability and viscosity.
如果分散體黏結劑具有酸值,其可以包含具有羧基基團和不飽和鍵的單體。具有羧基基團和不飽和鍵的單體的具體實例包括:單羧酸,比如丙烯酸、甲基丙烯酸和巴豆酸;二羧酸,比如富馬酸、中康酸和衣康酸、以及二羧酸的酸酐;在兩個末端具有羧基基團和羥基基團的聚合物的單(甲基)丙烯酸酯,比如ω-羧基聚己內酯單(甲基)丙烯酸酯等。較佳的是丙烯酸和甲基丙烯酸。If the dispersion binder has an acid value, it may contain monomers having carboxyl groups and unsaturated bonds. Specific examples of monomers having carboxyl groups and unsaturated bonds include: monocarboxylic acids such as acrylic acid, methacrylic acid and crotonic acid; dicarboxylic acids such as fumaric acid, mesaconic acid and itaconic acid, and dicarboxylic acids Acid anhydrides; mono(meth)acrylates of polymers with carboxyl groups and hydroxyl groups at both ends, such as ω-carboxypolycaprolactone mono(meth)acrylates, etc. Preferred are acrylic acid and methacrylic acid.
此外,分散體黏結劑可以包含與具有羧基基團和不飽和鍵的單體可共聚的具有不飽和鍵的單體。具有可共聚的不飽和鍵的單體的實例可以例如包括:芳香族乙烯基化合物,比如苯乙烯、乙烯基甲苯、α-甲基苯乙烯、對-氯苯乙烯、鄰-甲氧基苯乙烯、間-甲氧基苯乙烯、對-甲氧基苯乙烯、鄰-乙烯基苄基甲基醚、間-乙烯基苄基甲基醚、對-乙烯基苄基甲基醚、鄰-乙烯基苄基縮水甘油醚、間-乙烯基苄基縮水甘油醚、以及對-乙烯基苄基縮水甘油醚;(甲基)丙烯酸烷基酯,比如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸二級丁酯、和(甲基)丙烯酸三級丁酯;脂環族(甲基)丙烯酸酯,比如環戊基(甲基)丙烯酸酯、環己基(甲基)丙烯酸酯、2-甲基環己基(甲基)丙烯酸酯、三環[5.2.1.02,6 ]癸-8-基(甲基)丙烯酸酯、2-二環戊基氧基乙基(甲基)丙烯酸酯、和異冰片基(甲基)丙烯酸酯;(甲基)丙烯酸芳基酯,比如(甲基)丙烯酸苯酯和(甲基)丙烯酸苄酯;羥基烷基(甲基)丙烯酸酯,比如2-羥基乙基(甲基)丙烯酸酯和2-羥基丙基(甲基)丙烯酸酯;N-取代的馬來醯亞胺化合物,比如N-環己基馬來醯亞胺、N-苄基馬來醯亞胺、N-苯基馬來醯亞胺、N-鄰-羥基苯基馬來醯亞胺、N-間-羥基苯基馬來醯亞胺、N-對-羥基苯基馬來醯亞胺、N-鄰-甲基苯基馬來醯亞胺、N-間-甲基苯基馬來醯亞胺、N-對-甲基苯基馬來醯亞胺、N-鄰-甲氧基苯基馬來醯亞胺、N-間-甲氧基苯基馬來醯亞胺、和N-對-甲氧基苯基馬來醯亞胺;不飽和醯胺化合物,比如(甲基)丙烯醯胺和N,N-二甲基(甲基)丙烯醯胺;以及不飽和氧雜環丁烷化合物,比如3-(甲基丙烯醯氧基甲基)氧雜環丁烷、3-(甲基丙烯醯氧基甲基)-3-乙基氧雜環丁烷、3-(甲基丙烯醯氧基甲基)-2-三氟甲基氧雜環丁烷、3-(甲基丙烯醯氧基甲基)-2-苯基氧雜環丁烷、2-(甲基丙烯醯氧基甲基)氧雜環丁烷、和2-(甲基丙烯醯氧基甲基)-4-三氟甲基氧雜環丁烷,它們可以單獨使用或以兩種或更多種的組合使用。In addition, the dispersion binder may include a monomer having an unsaturated bond which is copolymerizable with a monomer having a carboxyl group and an unsaturated bond. Examples of monomers having copolymerizable unsaturated bonds may include, for example, aromatic vinyl compounds such as styrene, vinyl toluene, α-methylstyrene, p-chlorostyrene, o-methoxystyrene , M-methoxystyrene, p-methoxystyrene, o-vinylbenzyl methyl ether, m-vinylbenzyl methyl ether, p-vinylbenzyl methyl ether, o-ethylene Benzyl glycidyl ether, m-vinyl benzyl glycidyl ether, and p-vinyl benzyl glycidyl ether; alkyl (meth)acrylates, such as methyl (meth)acrylate, (methyl) Ethyl acrylate, n-propyl (meth)acrylate, isopropyl (meth)acrylate, n-butyl (meth)acrylate, isobutyl (meth)acrylate, secondary butyl (meth)acrylate, And (meth) acrylate tertiary butyl ester; alicyclic (meth) acrylate, such as cyclopentyl (meth) acrylate, cyclohexyl (meth) acrylate, 2-methylcyclohexyl (methyl) ) Acrylate, tricyclo[5.2.1.0 2,6 ] dec-8-yl (meth)acrylate, 2-dicyclopentyloxyethyl (meth)acrylate, and isobornyl (methyl) ) Acrylic esters; aryl (meth)acrylates, such as phenyl (meth)acrylate and benzyl (meth)acrylate; hydroxyalkyl (meth)acrylates, such as 2-hydroxyethyl (methyl) Acrylate and 2-hydroxypropyl (meth)acrylate; N-substituted maleimide compounds, such as N-cyclohexylmaleimide, N-benzylmaleimide, N-benzene Maleimines, N-o-hydroxyphenylmaleimines, N-m-hydroxyphenylmaleimines, N-p-hydroxyphenylmaleimines, N-o- Methylphenylmaleimide, N-m-methylphenylmaleimide, N-p-methylphenylmaleimide, N-o-methoxyphenylmaleimide Imines, N-m-methoxyphenylmaleimines, and N-p-methoxyphenylmaleimines; unsaturated amide compounds, such as (meth)acrylamide and N , N-Dimethyl(meth)acrylamide; and unsaturated oxetane compounds, such as 3-(methacryloxymethyl)oxetane, 3-(methacrylamide Oxymethyl)-3-ethyloxetane, 3-(methacryloxymethyl)-2-trifluoromethyloxetane, 3-(methacryloxymethyl) Methyl)-2-phenyloxetane, 2-(methacryloxymethyl)oxetane, and 2-(methacryloxymethyl)-4-trifluoro Methyloxetane, which can be used alone or in combination of two or more.
分散體黏結劑可以包含基於構成單元的總莫耳數的30莫耳%或更少的馬來醯亞胺單體。The dispersion binder may include 30 mol% or less of the maleimide monomer based on the total mol number of the constituent units.
可以採用基於著色的分散體的總重量的1至20重量%、或2至15重量%的量的分散體黏結劑。如果採用在上述範圍內的分散體黏結劑,則樹脂組成物可以維持合適的黏度水平並且其在分散穩定性和顯影性方面係較佳的。The dispersion binder may be used in an amount of 1 to 20% by weight, or 2 to 15% by weight based on the total weight of the colored dispersion. If a dispersion binder within the above range is used, the resin composition can maintain a suitable viscosity level and it is better in terms of dispersion stability and developability.
可以採用基於共聚物(A)的100重量份數(基於固體含量)的100至300重量份數、100至250重量份數、100至200重量份數、或100至180重量份數的量的分散體黏結劑。(E) 多官能硫醇化合物 The amount of 100 to 300 parts by weight, 100 to 250 parts by weight, 100 to 200 parts by weight, or 100 to 180 parts by weight based on 100 parts by weight of the copolymer (A) (based on the solid content) can be used. Dispersion binder. (E) Multifunctional thiol compound
本發明之著色的光敏樹脂組成物可以包含多官能硫醇化合物以增加在固化時的交聯效率。特別地,多官能硫醇化合物藉由光和熱具有高反應性,以便其使著色的光敏樹脂組成物甚至能夠在100°C或更低的低溫下交聯以形成固化膜。更特別地,多官能硫醇化合物的官能基對光和熱起反應,以便其使藉由光和熱的交聯和固化在固化步驟期間適當地進行。此外,其除去未反應的官能基。The colored photosensitive resin composition of the present invention may contain a multifunctional thiol compound to increase the crosslinking efficiency during curing. In particular, the multifunctional thiol compound has high reactivity by light and heat so that it enables the colored photosensitive resin composition to be crosslinked even at a low temperature of 100° C. or lower to form a cured film. More specifically, the functional group of the multifunctional thiol compound reacts to light and heat so that it allows crosslinking and curing by light and heat to appropriately proceed during the curing step. In addition, it removes unreacted functional groups.
多官能硫醇化合物可以是具有2個或更多、3個或更多、或4個或更多巰基基團的化合物。在具有一個巰基基團的化合物的情況下,多官能硫醇化合物和含有雙鍵和羥基基團的化合物的反應性降低,使得可能劣化耐久性和黏合性。The multifunctional thiol compound may be a compound having 2 or more, 3 or more, or 4 or more mercapto groups. In the case of a compound having one mercapto group, the reactivity of the polyfunctional thiol compound and the compound containing a double bond and a hydroxyl group decreases, making it possible to deteriorate durability and adhesion.
具有兩個巰基基團的多官能硫醇化合物的實例包括1,3-丁二硫醇、1,4-丁二硫醇、2,3-丁二硫醇、1,2-苯二硫醇、1,3-苯二硫醇、1,4-苯二硫醇、1,10-癸二硫醇、1,2-乙二硫醇、1,6-己二硫醇、1,9-壬二硫醇、1,8-辛二硫醇、1,5-戊二硫醇、1,2-丙二硫醇、1,3-丙二硫醇、甲苯-3,5-二硫醇、3,6-二氯-1,2-苯二硫醇、1,5-萘二硫醇、1,2-苯二甲硫醇、1,3-苯二甲硫醇、1,4-苯二甲硫醇、4,4-硫代雙苯硫醇、2-二-正丁基胺基-4,6-二巰基-s-三𠯤、三羥甲基丙烷三(β-硫代丙酸酯)、2,5-二巰基-1,3,4-噻二唑、1,8-二巰基-3,6-二氧雜辛烷、以及1,5-二巰基-3-硫雜戊烷。Examples of polyfunctional thiol compounds having two mercapto groups include 1,3-butanedithiol, 1,4-butanedithiol, 2,3-butanedithiol, 1,2-benzenedithiol , 1,3-benzenedithiol, 1,4-benzenedithiol, 1,10-decanedithiol, 1,2-ethanedithiol, 1,6-hexanedithiol, 1,9- Nonanedithiol, 1,8-octanedithiol, 1,5-pentanedithiol, 1,2-propanedithiol, 1,3-propanedithiol, toluene-3,5-dithiol , 3,6-Dichloro-1,2-benzenedithiol, 1,5-naphthalene dithiol, 1,2-benzenedimethylthiol, 1,3-benzenedimethylthiol, 1,4- Benzene dimethyl mercaptan, 4,4-thiobisphenyl mercaptan, 2-di-n-butylamino-4,6-dimercapto-s-tris, trimethylolpropane tris(β-thio Propionate), 2,5-dimercapto-1,3,4-thiadiazole, 1,8-dimercapto-3,6-dioxaoctane, and 1,5-dimercapto-3-sulfur Heteropentane.
具有三個巰基基團的多官能硫醇化合物的實例包括硫代甘油、1,3,5-三𠯤-2,4,6-三巰基三𠯤、三羥甲基丙烷三硫代乙醇酸酯、三羥甲基丙烷三硫代丙酸酯、1,2,4-三(巰基甲基)苯、1,3,5-三(巰基甲基)苯、2,4,6-三(巰基甲基)甲基亞硝酸酯、三(巰基甲基)異氰脲酸酯、三(3-巰基丙基)異氰脲酸酯、2,4,6-三(巰基甲基)-1,3-二硫戊環、1,3,5-三𠯤-2,4,6-三巰基三𠯤、三(3-巰基丙醯氧基)乙基異氰脲酸酯、以及三羥甲基丙烷三-3-巰基丙酸酯。Examples of multifunctional thiol compounds having three mercapto groups include thioglycerol, 1,3,5-tris-2,4,6-trimercaptotris, trimethylolpropane trithioglycolate , Trimethylolpropane trithiopropionate, 1,2,4-tris(mercaptomethyl)benzene, 1,3,5-tris(mercaptomethyl)benzene, 2,4,6-tris(mercapto Methyl)methyl nitrite, tris(mercaptomethyl)isocyanurate, tris(3-mercaptopropyl)isocyanurate, 2,4,6-tris(mercaptomethyl)-1, 3-dithiolane, 1,3,5-tris-2,4,6-trimercaptotris, tris(3-mercaptopropionyloxy)ethyl isocyanurate, and trimethylol Propane tri-3-mercaptopropionate.
具有四個巰基基團的多官能硫醇化合物的實例包括新戊四醇四硫代乙醇酸酯、新戊四醇四硫代丙酸酯、1,2,4,5-四(巰基甲基)苯、四巰基丁烷、新戊四醇四-3-巰基丙酸酯、以及二新戊四醇四-3-巰基丙酸酯。Examples of polyfunctional thiol compounds having four mercapto groups include neopentyl erythritol tetrathioglycolate, neopentyl erythritol tetrathiopropionate, 1,2,4,5-tetra(mercaptomethyl ) Benzene, tetramercaptobutane, neopentylerythritol tetra-3-mercaptopropionate, and dineopentaerythritol tetra-3-mercaptopropionate.
較佳的是,多官能硫醇化合物可以是選自由以下組成之群組的至少一種:三(3-巰基丙醯氧基)乙基異氰脲酸酯、三羥甲基丙烷三-3-巰基丙酸酯、新戊四醇四-3-巰基丙酸酯、以及二新戊四醇四-3-巰基丙酸酯。Preferably, the multifunctional thiol compound may be at least one selected from the group consisting of: tris(3-mercaptopropoxy)ethyl isocyanurate, trimethylolpropane tri-3- Mercaptopropionate, neopentylerythritol tetra-3-mercaptopropionate, and dineopentaerythritol tetra-3-mercaptopropionate.
可以採用基於共聚物(A)的100重量份數(基於固體含量)的10至50重量份數、10至30重量份數、10至25重量份數、10至20重量份數、15至25重量份數或15至20重量份數的量的多官能硫醇化合物。10 to 50 parts by weight, 10 to 30 parts by weight, 10 to 25 parts by weight, 10 to 20 parts by weight, 15 to 25 parts by weight based on 100 parts by weight (based on the solid content) of the copolymer (A) can be used. Parts by weight or a multifunctional thiol compound in an amount of 15 to 20 parts by weight.
在上述範圍內,顯影後的圖案輪廓係有利的,並且可以實現優良的耐化學性和彈性恢復力。如果其小於上述範圍,則後烘烤未充分進行(即固化未完全進行)。如果其超過上述範圍,則很難控制交聯效率,因為藉由光和熱的反應性過高,從而在顯影期間可能會在圖案上出現諸如脫離或突起的缺陷。進一步,也可能劣化圖案的平直度和解析度。(F) 含有兩個或更多個雙鍵和兩個或更多個羥基基團的化合物 Within the above range, the pattern profile after development is favorable, and excellent chemical resistance and elastic recovery can be achieved. If it is less than the above range, post-baking does not fully proceed (that is, curing does not fully proceed). If it exceeds the above range, it is difficult to control the crosslinking efficiency because the reactivity by light and heat is too high, so that defects such as peeling or protrusions may occur on the pattern during development. Further, the flatness and resolution of the pattern may also be deteriorated. (F) Compounds containing two or more double bonds and two or more hydroxyl groups
本發明之著色的光敏樹脂組成物可以進一步包含含有雙鍵和羥基基團的化合物以更容易形成圖案。特別地,含有雙鍵和羥基基團的化合物可以包含兩個或更多個雙鍵和兩個或更多個羥基基團。The colored photosensitive resin composition of the present invention may further include a compound containing a double bond and a hydroxyl group to more easily form a pattern. In particular, the compound containing a double bond and a hydroxyl group may contain two or more double bonds and two or more hydroxyl groups.
含有雙鍵和羥基基團的化合物可以是選自由以下組成之群組的至少一種:1,3-二甘油醇酸二丙烯酸酯、甘油1,3-二甘油醇酸二丙烯酸酯、((氧基雙(4,1-伸苯基))雙(氧基))雙(2-羥基丙烷-3,1-二基)二丙烯酸酯、((丙烷-2,2-二基雙(4,1-伸苯基))雙(氧基))雙(2-羥基丙烷-3,1-二基)二丙烯酸酯、 以及(螺[茀-9,9'-𠮿口星]-3',6'-二基雙(氧基))雙(2-羥基丙烷-3,1-二基)二丙烯酸酯。The compound containing a double bond and a hydroxyl group may be at least one selected from the group consisting of: 1,3-diglyceryl alkyd diacrylate, glycerol 1,3-diglyceryl alkyd diacrylate, ((oxygen Bis(4,1-phenylene))bis(oxy))bis(2-hydroxypropane-3,1-diyl)diacrylate, ((propane-2,2-diylbis(4, 1-phenylene))bis(oxy))bis(2-hydroxypropane-3,1-diyl)diacrylate, and (Spiro[茀-9,9'-𠮿口星]-3', 6'-Diylbis(oxy))bis(2-hydroxypropane-3,1-diyl)diacrylate.
此外,它可以進一步包括藉由將具有直鏈伸烷基基團和具有兩個或更多個異氰酸酯基團的脂環族結構的化合物與分子中具有一個或更多個羥基基團和三個、四個或五個丙烯醯氧基基團和/或甲基丙烯醯氧基基團的化合物反應而獲得的多官能胺基甲酸酯(urethane)丙烯酸酯化合物。In addition, it may further include a compound having a linear alkylene group and an alicyclic structure having two or more isocyanate groups with a molecule having one or more hydroxyl groups and three , A polyfunctional urethane acrylate compound obtained by the reaction of four or five acryloxy groups and/or methacryloxy groups.
如上所述,含有雙鍵和羥基基團的化合物,藉由在後烘烤期間藉由熱和光適當地控制多官能硫醇化合物的反應性來實現高解析度。特別地,含有雙鍵和羥基基團的化合物的羥基基團在未曝光的部分提高了顯影速度,並且在曝光部分中羥基基團參與與多官能硫醇化合物的硫醇基團的交聯反應,從而提高固化程度。As described above, the compound containing a double bond and a hydroxyl group achieves high resolution by appropriately controlling the reactivity of the polyfunctional thiol compound by heat and light during post-baking. In particular, the hydroxyl group of the compound containing a double bond and a hydroxyl group increases the development speed in the unexposed part, and the hydroxyl group participates in the crosslinking reaction with the thiol group of the multifunctional thiol compound in the exposed part , Thereby improving the degree of curing.
可以採用基於共聚物(A)的100重量份數(基於固體含量)的10至50重量份數、10至45重量份數、10至30重量份數、15至40重量份數或15至30重量份數的量的含有雙鍵和羥基基團的化合物。10 to 50 parts by weight, 10 to 45 parts by weight, 10 to 30 parts by weight, 15 to 40 parts by weight, or 15 to 30 parts by weight based on 100 parts by weight (based on the solid content) of the copolymer (A) can be used. A compound containing a double bond and a hydroxyl group in parts by weight.
在上述範圍內,顯影後的圖案輪廓係有利的,並且可以實現優良的耐化學性和彈性恢復力。如果其小於上述範圍,則組成物的溶解度降低。如果其超過上述範圍,則溶解度過大,使得圖案厚度的降低速率在顯影步驟期間增加並且圖案在10 μm或更小的高解析度下可能脫離。(G) 光鹼產生劑 Within the above range, the pattern profile after development is favorable, and excellent chemical resistance and elastic recovery can be achieved. If it is less than the above range, the solubility of the composition decreases. If it exceeds the above range, the solubility is too large, so that the rate of decrease in the thickness of the pattern increases during the development step and the pattern may be detached at a high resolution of 10 μm or less. (G) Photobase generator
本發明之著色的光敏樹脂組成物可以包含光鹼產生劑以增加組成物中的交聯和固化效率。The colored photosensitive resin composition of the present invention may contain a photobase generator to increase the crosslinking and curing efficiency in the composition.
特別地,本發明之著色的光敏樹脂組成物在固化時使用光自由基聚合引發劑連同光鹼產生劑,使得光自由基聚合反應和來自鹼產生劑的鹼產生反應同時進行,這提高了組成物中的交聯效率。In particular, the colored photosensitive resin composition of the present invention uses a photoradical polymerization initiator together with a photobase generator during curing, so that the photoradical polymerization reaction and the base generation reaction from the base generator proceed simultaneously, which improves the composition. The cross-linking efficiency in the material.
光鹼產生劑並不特別受限制,而可以是例如響應短波長或長波長而產生鹼的光鹼化合物、或具有0至4的pKa的具有陰離子和銨離子的銨鹽。The photobase generator is not particularly limited, and may be, for example, a photobase compound that generates a base in response to a short wavelength or a long wavelength, or an ammonium salt having an anion and an ammonium ion having a pKa of 0 to 4.
由光鹼產生劑產生的鹼可以是二級胺、三級胺等,並且鹼可以具有80°C或更高的沸點。此外,鹼可以具有80至2,000 Da的重量平均分子量。The base generated from the photobase generator may be a secondary amine, a tertiary amine, etc., and the base may have a boiling point of 80°C or higher. In addition, the base may have a weight average molecular weight of 80 to 2,000 Da.
可以採用基於共聚物(A)的100重量份數(基於固體含量)的1至10重量份數、1至8重量份數、1至5重量份數、或1至3重量份數的量的光鹼產生劑。在上述範圍內,熱固化和光固化即使在低溫下也很好地進行,以便可以形成具有良好的圖案顯影的固化膜。(H) 環氧化合物 An amount of 1 to 10 parts by weight, 1 to 8 parts by weight, 1 to 5 parts by weight, or 1 to 3 parts by weight based on 100 parts by weight (based on the solid content) of the copolymer (A) can be used. Photo base generator. Within the above range, thermal curing and photocuring are performed well even at low temperatures, so that a cured film with good pattern development can be formed. (H) Epoxy compound
本發明之著色的光敏樹脂組成物可以包含環氧化合物以增加樹脂的內部密度,從而提高由此形成的固化膜的耐化學性。The colored photosensitive resin composition of the present invention may contain an epoxy compound to increase the internal density of the resin, thereby improving the chemical resistance of the cured film formed thereby.
該環氧化合物可以是含有至少一個環氧基團的不飽和單體,或者係其均-低聚物或雜-低聚物。含有至少一個環氧基團的不飽和單體的實例可以包括(甲基)丙烯酸縮水甘油酯、4-羥丁基丙烯酸酯縮水甘油醚、(甲基)丙烯酸3,4-環氧丁酯、(甲基)丙烯酸4,5-環氧戊酯、(甲基)丙烯酸5,6-環氧己酯、(甲基)丙烯酸6,7-環氧庚酯、(甲基)丙烯酸2,3-環氧環戊酯、(甲基)丙烯酸3,4-環氧環己酯、丙烯酸α-乙基縮水甘油酯、丙烯酸α-正丙基縮水甘油酯、丙烯酸α-正丁基縮水甘油酯、N-(4-(2,3-環氧丙氧基)-3,5-二甲基苄基)丙烯醯胺、N-(4-(2,3-環氧丙氧基)-3,5-二甲基苯基丙基)丙烯醯胺、烯丙基縮水甘油醚、2-甲基烯丙基縮水甘油醚、鄰乙烯基苄基縮水甘油醚、間乙烯基苄基縮水甘油醚、對乙烯基苄基縮水甘油醚、或其混合物。具體地,可以使用(甲基)丙烯酸縮水甘油酯。The epoxy compound may be an unsaturated monomer containing at least one epoxy group, or a homo-oligomer or hetero-oligomer. Examples of unsaturated monomers containing at least one epoxy group may include glycidyl (meth)acrylate, 4-hydroxybutyl acrylate glycidyl ether, 3,4-epoxybutyl (meth)acrylate, 4,5-epoxypentyl (meth)acrylate, 5,6-epoxyhexyl (meth)acrylate, 6,7-epoxyheptyl (meth)acrylate, 2,3 (meth)acrylate -Epoxycyclopentyl ester, 3,4-epoxycyclohexyl (meth)acrylate, α-ethyl glycidyl acrylate, α-n-propyl glycidyl acrylate, α-n-butyl glycidyl acrylate , N-(4-(2,3-glycidoxy)-3,5-dimethylbenzyl)acrylamide, N-(4-(2,3-glycidoxy)-3 ,5-Dimethylphenylpropyl)acrylamide, allyl glycidyl ether, 2-methyl allyl glycidyl ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether , P-vinyl benzyl glycidyl ether, or a mixture thereof. Specifically, glycidyl (meth)acrylate can be used.
含有至少一個環氧基團的不飽和單體的可商購的均-低聚物的實例可以包括GHP-03HP(甲基丙烯酸縮水甘油酯均聚物,美源商事株式會社)。Examples of commercially available homo-oligomers of unsaturated monomers containing at least one epoxy group may include GHP-03HP (glycidyl methacrylate homopolymer, Miwon Corporation).
環氧化合物可以進一步包含以下結構單元。The epoxy compound may further include the following structural unit.
其具體實例可以包括任何衍生自以下項的結構單元:苯乙烯;具有烷基取代基的苯乙烯,如甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、三乙基苯乙烯、丙基苯乙烯、丁基苯乙烯、己基苯乙烯、庚基苯乙烯和辛基苯乙烯;具有鹵素的苯乙烯,如氟苯乙烯、氯苯乙烯、溴苯乙烯和碘苯乙烯;具有烷氧基取代基的苯乙烯,如甲氧基苯乙烯、乙氧基苯乙烯和丙氧基苯乙烯;對羥基-α-甲基苯乙烯,乙醯基苯乙烯;具有芳香族環的烯鍵式不飽和化合物,如二乙烯基苯、乙烯基苯酚、鄰乙烯基苄基甲醚、間乙烯基苄基甲醚和對乙烯基苄基甲醚;不飽和羧酸酯,如(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸二甲基胺基乙酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸三級丁酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸乙基己酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸羥乙酯、(甲基)丙烯酸2-羥丙酯、(甲基)丙烯酸2-羥基-3-氯丙酯、(甲基)丙烯酸4-羥丁酯、(甲基)丙烯酸甘油酯、α-羥甲基丙烯酸甲酯、α-羥甲基丙烯酸乙酯、α-羥甲基丙烯酸丙酯、α-羥甲基丙烯酸丁酯、(甲基)丙烯酸2-甲氧基乙酯、(甲基)丙烯酸3-甲氧基丁酯、乙氧基二乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、甲氧基三丙二醇(甲基)丙烯酸酯、聚(乙二醇)甲醚(甲基)丙烯酸酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸2-苯氧基乙酯、苯氧基二乙二醇(甲基)丙烯酸酯、對壬基苯氧基聚乙二醇(甲基)丙烯酸酯、對壬基苯氧基聚丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸四氟丙酯、(甲基)丙烯酸1,1,1,3,3,3-六氟異丙酯、(甲基)丙烯酸八氟戊酯、(甲基)丙烯酸十七氟癸酯、(甲基)丙烯酸三溴苯酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊氧基乙酯和(甲基)丙烯酸二環戊烯氧基乙酯;具有N-乙烯基的三級胺,如N-乙烯基吡咯啶酮、N-乙烯基咔唑和N-乙烯基𠰌啉;不飽和醚,如乙烯基甲醚和乙烯基乙醚;不飽和醯亞胺,如N-苯基馬來醯亞胺、N-(4-氯苯基)馬來醯亞胺、N-(4-羥苯基)馬來醯亞胺和N-環己基馬來醯亞胺。衍生自以上示例的化合物的結構單元可單獨或以其兩種或更多種的組合包含在環氧化合物中。Specific examples thereof may include any structural unit derived from: styrene; styrene with alkyl substituents, such as methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, two Ethyl styrene, triethyl styrene, propyl styrene, butyl styrene, hexyl styrene, heptyl styrene and octyl styrene; styrene with halogen, such as fluorostyrene, chlorostyrene, Bromostyrene and iodostyrene; styrenes with alkoxy substituents, such as methoxystyrene, ethoxystyrene and propoxystyrene; p-hydroxy-α-methylstyrene, acetoxy Styrene; ethylenically unsaturated compounds with aromatic rings, such as divinylbenzene, vinylphenol, o-vinylbenzyl methyl ether, m-vinylbenzyl methyl ether, and p-vinylbenzyl methyl ether; no Saturated carboxylic acid esters, such as methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, dimethylaminoethyl (meth)acrylate, isobutyl (meth)acrylate Ester, tertiary butyl (meth)acrylate, cyclohexyl (meth)acrylate, ethylhexyl (meth)acrylate, tetrahydrofurfuryl (meth)acrylate, hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 2-hydroxy-3-chloropropyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, glycerol (meth)acrylate, α-hydroxymethyl Methyl acrylate, α-hydroxy ethyl methacrylate, α-hydroxy propyl methacrylate, α-hydroxy butyl methacrylate, 2-methoxyethyl (meth)acrylate, (meth)acrylic acid 3 -Methoxybutyl ester, ethoxydiethylene glycol (meth)acrylate, methoxytriethylene glycol (meth)acrylate, methoxytripropylene glycol (meth)acrylate, poly(ethyl) Glycol) methyl ether (meth)acrylate, phenyl (meth)acrylate, benzyl (meth)acrylate, 2-phenoxyethyl (meth)acrylate, phenoxydiethylene glycol (meth) Base) acrylate, p-nonylphenoxy polyethylene glycol (meth)acrylate, p-nonylphenoxy polypropylene glycol (meth)acrylate, tetrafluoropropyl (meth)acrylate, (methyl) ) 1,1,1,3,3,3-hexafluoroisopropyl acrylate, octafluoropentyl (meth)acrylate, heptafluorodecyl (meth)acrylate, tribromophenyl (meth)acrylate , Isobornyl (meth)acrylate, dicyclopentyl (meth)acrylate, dicyclopentenyl (meth)acrylate, dicyclopentyloxyethyl (meth)acrylate and dicyclopentyl (meth)acrylate Cyclopentenoxyethyl; tertiary amines with N-vinyl groups, such as N-vinylpyrrolidone, N-vinylcarbazole, and N-vinyl 𠰌line; unsaturated ethers, such as vinyl methyl ether And vinyl ether; unsaturated amides, such as N-phenylmaleimines, N-(4-chlorophenyl)maleimines, N-(4-hydroxyphenyl)maleimines Amine and N-cyclohexylmaleimide. The structural unit derived from the above-exemplified compound may be included in the epoxy compound alone or in a combination of two or more thereof.
環氧化合物可具有100至30,000 Da的重量平均分子量。具體地,環氧化合物可具有100至10,000 Da的重量平均分子量。如果環氧化合物的重量平均分子量為100 Da或更大,則固化膜的硬度可以更優異。如果其係30,000 Da或更小,則薄膜的厚度變得均勻,具有更小的步差(step difference),這更適合於平面化。The epoxy compound may have a weight average molecular weight of 100 to 30,000 Da. Specifically, the epoxy compound may have a weight average molecular weight of 100 to 10,000 Da. If the weight average molecular weight of the epoxy compound is 100 Da or more, the hardness of the cured film can be more excellent. If it is 30,000 Da or less, the thickness of the film becomes uniform with a smaller step difference, which is more suitable for planarization.
環氧化合物的量可以是基於共聚物(A)的100重量份數(基於固體含量)的1至20重量份數、1至10重量份數、5至20重量份數、5至15重量份數或5至10重量份數。在上述範圍內,顯影後的圖案輪廓可以是有利的,可以增強諸如耐化學性和彈性恢復力的性質,並且可以防止在顯影步驟中出現脫離或組成物的儲存穩定性劣化的問題。(I) 助黏劑 The amount of the epoxy compound may be 1 to 20 parts by weight, 1 to 10 parts by weight, 5 to 20 parts by weight, 5 to 15 parts by weight based on 100 parts by weight (based on the solid content) of the copolymer (A) Number or 5 to 10 parts by weight. Within the above range, the pattern profile after development can be advantageous, properties such as chemical resistance and elastic restoring force can be enhanced, and problems of separation or deterioration of the storage stability of the composition can be prevented during the development step. (I) Adhesion promoter
根據本發明之著色的光敏樹脂組成物可以進一步包含助黏劑以增強對基底的黏附性。The colored photosensitive resin composition according to the present invention may further include an adhesion promoter to enhance adhesion to the substrate.
助黏劑可以具有選自由以下組成之群組的至少一種反應基團:羧基基團、(甲基)丙烯醯基基團、異氰酸酯基團、胺基基團、巰基基團、乙烯基基團和環氧基團。The adhesion promoter may have at least one reactive group selected from the group consisting of: carboxyl group, (meth)acrylic group, isocyanate group, amine group, mercapto group, vinyl group And epoxy groups.
助黏劑的種類不是特別受限制。其可以是選自由以下組成之群組的至少一種:三甲氧基矽基苯甲酸、γ-甲基丙烯醯氧基丙基三甲氧基矽烷、乙烯基三乙醯氧基矽烷、乙烯基三甲氧基矽烷、γ-異氰酸基丙基三乙氧基矽烷、γ-縮水甘油氧基丙基三甲氧基矽烷、γ-縮水甘油氧基丙基三乙氧基矽烷、N-苯基胺基丙基三甲氧基矽烷、β-(3,4-環氧環己基)乙基三甲氧基矽烷、3-異氰酸酯丙基三乙氧基矽烷、N-苯基-3-胺基丙基三甲氧基矽烷、以及它們的混合物。The type of adhesion promoter is not particularly limited. It may be at least one selected from the group consisting of: trimethoxysilyl benzoic acid, γ-methacryloxypropyltrimethoxysilane, vinyl triethoxysilane, vinyl trimethoxysilane Silane, γ-isocyanatopropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, N-phenylamino Propyl trimethoxy silane, β-(3,4-epoxycyclohexyl) ethyl trimethoxy silane, 3-isocyanate propyl triethoxy silane, N-phenyl-3-aminopropyl trimethoxy silane Silane, and their mixtures.
較佳的是γ-縮水甘油氧基丙基三甲氧基矽烷、γ-縮水甘油氧基丙基三乙氧基矽烷、3-異氰酸酯丙基三乙氧基矽烷、N-苯基-3-胺基丙基三甲氧基矽烷、或N-苯基胺基丙基三甲氧基矽烷,其能夠增強對基底的膜保留率和黏附性。Preferably, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropyltriethoxysilane, 3-isocyanate propyltriethoxysilane, N-phenyl-3-amine Propyl propyl trimethoxy silane, or N-phenylamino propyl trimethoxy silane, which can enhance the film retention and adhesion to the substrate.
助黏劑的量可以是基於共聚物(A)的100重量份數(基於固體含量)的0.01至5重量份數、0.01至3重量份數、0.1至5重量份數、0.1至3重量份數、1至5重量份數、或1至3重量份數。在以上範圍內,可以進一步增強對基底的黏附性。(J) 表面活性劑 The amount of adhesion promoter may be 0.01 to 5 parts by weight, 0.01 to 3 parts by weight, 0.1 to 5 parts by weight, 0.1 to 3 parts by weight based on 100 parts by weight of the copolymer (A) (based on the solid content) Number, 1 to 5 parts by weight, or 1 to 3 parts by weight. Within the above range, the adhesion to the substrate can be further enhanced. (J) Surfactant
本發明之著色的光敏樹脂組成物可以進一步包含表面活性劑,以便增強可塗覆性並且防止缺陷的產生。The colored photosensitive resin composition of the present invention may further contain a surfactant in order to enhance coatability and prevent the occurrence of defects.
雖然表面活性劑的種類不是特別受限制,但是可以使用例如基於氟的表面活性劑或基於矽酮的表面活性劑。Although the kind of surfactant is not particularly limited, for example, a fluorine-based surfactant or a silicone-based surfactant may be used.
可商購的基於矽酮的表面活性劑可以包括來自道康寧東麗有機矽公司的DC3PA、DC7PA、SH11PA、SH21PA和SH8400,來自GE東芝有機矽公司的TSF-4440、TSF-4300、TSF-4445、TSF-4446、TSF-4460和TSF-4452,來自BYK的BYK-333、BYK-307、BYK-3560、BYK UV-3535、BYK-361N、BYK-354和BYK-399等。它們可以單獨使用或以其兩種或更多種的組合使用。Commercially available silicone-based surfactants can include DC3PA, DC7PA, SH11PA, SH21PA and SH8400 from Dow Corning Toray Silicone, TSF-4440, TSF-4300, TSF-4445, TSF-4445 from GE Toshiba Silicone TSF-4446, TSF-4460 and TSF-4452, BYK-333, BYK-307, BYK-3560, BYK UV-3535, BYK-361N, BYK-354 and BYK-399 etc. from BYK. They can be used alone or in combination of two or more kinds thereof.
可商購的基於氟的表面活性劑可以包括來自大日本油墨化學工業株式會社(DIC)的Megaface F-470、F-471、F-475、F-482、F-489和F-563以及來自千葉公司(Chiba)的F-563。Commercially available fluorine-based surfactants may include Megaface F-470, F-471, F-475, F-482, F-489, and F-563 from Dainippon Ink Chemical Industry Co., Ltd. (DIC) and from Chiba's F-563.
從組成物的可塗覆性的觀點看,在該等表面活性劑中較佳的可以是來自畢克公司(BYK)的BYK-333和BYK-307以及來自千葉的F-563。From the viewpoint of the coatability of the composition, preferred among these surfactants may be BYK-333 and BYK-307 from BYK and F-563 from Chiba.
表面活性劑的量可以是基於共聚物(A)的100重量份數(基於固體含量)的0.01至5重量份數、0.01至3重量份數、0.1至5重量份數或0.1至3重量份數。在上述範圍內,可以順利地塗覆著色的光敏樹脂組成物。(K) 溶劑 The amount of the surfactant may be 0.01 to 5 parts by weight, 0.01 to 3 parts by weight, 0.1 to 5 parts by weight, or 0.1 to 3 parts by weight based on 100 parts by weight of the copolymer (A) (based on the solid content) number. Within the above range, the colored photosensitive resin composition can be applied smoothly. (K) Solvent
本發明之著色的光敏樹脂組成物可以較佳的是製備為液體組成物(其中以上組分與溶劑混合)。本領域中已知的任何溶劑(與著色的光敏樹脂組成物中的組分相容但不反應)可以用於製備著色的光敏樹脂組成物。The colored photosensitive resin composition of the present invention can preferably be prepared as a liquid composition (in which the above components are mixed with a solvent). Any solvent known in the art (compatible with but not reactive with the components in the colored photosensitive resin composition) can be used to prepare the colored photosensitive resin composition.
溶劑的實例可以包括二醇醚,如乙二醇單乙醚;乙二醇烷基醚乙酸酯,如乙基溶纖劑乙酸酯;酯,如2-羥基丙酸乙酯;二乙二醇,如二乙二醇單甲醚;丙二醇烷基醚乙酸酯,如丙二醇單甲醚乙酸酯和丙二醇丙醚乙酸酯;和乙酸烷氧基烷基酯,如乙酸3-甲氧基丁酯。溶劑可以單獨使用或以兩種或更多種的組合使用。Examples of the solvent may include glycol ethers, such as ethylene glycol monoethyl ether; glycol alkyl ether acetates, such as ethyl cellosolve acetate; esters, such as ethyl 2-hydroxypropionate; Alcohols, such as diethylene glycol monomethyl ether; propylene glycol alkyl ether acetates, such as propylene glycol monomethyl ether acetate and propylene glycol propyl ether acetate; and alkoxyalkyl acetates, such as 3-methoxy acetate Butyl butyl ester. The solvent can be used alone or in combination of two or more.
從最終獲得的著色的光敏樹脂組成物的可塗覆性和穩定性的觀點看,溶劑的量不是特別受限制,但是其可以是基於最終製備的著色的光敏樹脂組成物的總重量的50至90重量%或70至85重量%。如果溶劑的量係在以上範圍內,則樹脂組成物被光滑地塗覆,並且可能在工作過程中發生的延遲裕度係小的。From the viewpoint of coatability and stability of the finally obtained colored photosensitive resin composition, the amount of the solvent is not particularly limited, but it may be 50 to 50 based on the total weight of the finally prepared colored photosensitive resin composition. 90% by weight or 70 to 85% by weight. If the amount of the solvent is within the above range, the resin composition is smoothly coated, and the delay margin that may occur during operation is small.
此外,本發明之著色的光敏樹脂組成物可以包含其他的添加劑,如抗氧化劑和穩定劑,只要不對著色的光敏樹脂組成物的物理特性造成不利影響。In addition, the colored photosensitive resin composition of the present invention may contain other additives, such as antioxidants and stabilizers, as long as it does not adversely affect the physical properties of the colored photosensitive resin composition.
本發明之包含以上描述的組分的著色的光敏樹脂組成物可以藉由常見方法,例如藉由以下方法來製備。The colored photosensitive resin composition of the present invention containing the above-described components can be prepared by a common method, for example, by the following method.
首先,將著色劑與分散樹脂、分散劑和溶劑預先混合並且使用珠磨機使其分散於其中直到著色劑的平均粒徑達到所希望的值,從而製備著色分散液。在此種情況下,可以將表面活性劑和/或共聚物部分地或完全地共混。添加至分散體液體的是剩餘的共聚物和表面活性劑、可光聚合的化合物、光聚合引發劑、多官能硫醇化合物、以及含有雙鍵和羥基基團的化合物。如有必要,進一步將添加劑比如環氧化合物或另外的溶劑共混至一定濃度,隨後充分攪拌它們以獲得期望的著色的光敏樹脂組成物。First, the colorant is mixed with a dispersion resin, a dispersant, and a solvent in advance and dispersed therein using a bead mill until the average particle diameter of the colorant reaches a desired value, thereby preparing a colored dispersion. In this case, the surfactant and/or copolymer may be partially or completely blended. Added to the dispersion liquid are the remaining copolymers and surfactants, photopolymerizable compounds, photopolymerization initiators, polyfunctional thiol compounds, and compounds containing double bonds and hydroxyl groups. If necessary, additives such as epoxy compounds or another solvent are further blended to a certain concentration, and then they are sufficiently stirred to obtain the desired colored photosensitive resin composition.
本發明還提供一種由著色的光敏樹脂組成物製備的遮光黑色矩陣。The invention also provides a light-shielding black matrix prepared from the colored photosensitive resin composition.
黑色矩陣可以藉由塗層形成步驟、曝光步驟、顯影步驟和加熱步驟來製備。The black matrix can be prepared by a coating forming step, an exposure step, a development step, and a heating step.
在塗層形成步驟中,將根據本發明之著色的光敏樹脂組成物藉由旋塗法、狹縫塗覆法、輥塗法、網版印刷法、塗布器法等以期望的厚度(例如1至25 µm)塗覆在預處理的基底上,其然後在70至100°C的溫度下預烘烤1至10分鐘以藉由除去其中的溶劑來形成塗覆的膜。In the coating forming step, the colored photosensitive resin composition according to the present invention is applied to a desired thickness (for example, 1 To 25 µm) is coated on the pretreated substrate, which is then pre-baked at a temperature of 70 to 100°C for 1 to 10 minutes to form a coated film by removing the solvent therefrom.
為了在塗覆的膜上形成圖案,將具有預定形狀的掩膜置於其上,然後將該掩膜用200至500 nm的活化射線進行照射。作為用於照射的光源,可以使用低壓汞燈、高壓汞燈、超高壓汞燈、金屬鹵化物燈、氬氣雷射器等。如果期望,也可以使用X-射線、電子射線等。曝光劑量可以根據組成物的組分的種類和組成比以及經乾燥的塗層的厚度變化。如果使用高壓汞燈,則它可以是500 mJ/cm2 或更低(在365 nm的波長下)。In order to form a pattern on the coated film, a mask having a predetermined shape is placed thereon, and then the mask is irradiated with 200 to 500 nm activating rays. As a light source for irradiation, a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a metal halide lamp, an argon laser, etc. can be used. If desired, X-rays, electron rays, etc. can also be used. The exposure dose may vary according to the types and composition ratios of the components of the composition and the thickness of the dried coating. If a high-pressure mercury lamp is used, it can be 500 mJ/cm 2 or lower (at a wavelength of 365 nm).
在曝光步驟之後,使用鹼性水溶液如碳酸鈉、氫氧化鈉、氫氧化鉀,四甲基氫氧化銨等作為顯影劑來溶解並除去不必要的部分,由此僅曝光部分保留以形成圖案。將藉由顯影得到的圖像圖案冷卻到室溫並且在50至100°C、50至90°C或60至90°C的溫度下在熱風循環式乾燥爐中後烘烤10至60分鐘,從而得到最終圖案。After the exposure step, an alkaline aqueous solution such as sodium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, etc. is used as a developer to dissolve and remove unnecessary parts, whereby only the exposed part remains to form a pattern. The image pattern obtained by the development is cooled to room temperature and post-baked in a hot air circulating drying oven at a temperature of 50 to 100°C, 50 to 90°C or 60 to 90°C for 10 to 60 minutes, So as to get the final pattern.
因為如此製備的遮光黑色矩陣具有優異的特性,它可以有利地用於液晶顯示器和量子點顯示器的電子器件中。因此,本發明提供了一種包括遮光黑色矩陣之電子器件。Because the light-shielding black matrix prepared in this way has excellent characteristics, it can be advantageously used in electronic devices of liquid crystal displays and quantum dot displays. Therefore, the present invention provides an electronic device including a light-shielding black matrix.
除了它們具有本發明之黑色矩陣之外,液晶顯示器和量子點顯示器可以包括熟悉該項技術者已知的其他部件。換言之,可以應用本發明之黑色矩陣的液晶顯示器和量子點顯示器可以落在本發明之範圍內。進行本發明之實施方式 In addition to having the black matrix of the present invention, liquid crystal displays and quantum dot displays may include other components known to those skilled in the art. In other words, liquid crystal displays and quantum dot displays to which the black matrix of the present invention can be applied can fall within the scope of the present invention. Implementation of the present invention
在下文中,將參照以下實例更詳細地描述本發明。然而,提供該等實例以說明本發明,並且本發明之範圍不僅限於此。Hereinafter, the present invention will be described in more detail with reference to the following examples. However, these examples are provided to illustrate the present invention, and the scope of the present invention is not limited thereto.
在以下製備實例中,重量平均分子量藉由凝膠滲透層析法(GPC,洗脫液:四氫呋喃)參照聚苯乙烯標準品來確定。實例 製備實例 1 :共聚物 (A-1) 的製備 In the following preparation examples, the weight average molecular weight is determined by gel permeation chromatography (GPC, eluent: tetrahydrofuran) with reference to polystyrene standards. Preparation of the copolymer (A-1) is: EXAMPLES Example 1 Preparation of
在氮氣氣氛中,向250 ml圓底燒瓶(配備回流冷凝器和攪拌器)中裝載溶解於107.98 g的丙二醇單甲醚乙酸酯(PGMEA)中的單體混合物連同作為自由基聚合引發劑的2.34 g(3.0莫耳%)的V-65,該單體混合物包含10.68 g(32莫耳%)的苯乙烯、8.01 g(25莫耳%)的甲基丙烯酸甲酯、10.43 g(15莫耳%)的2-丙烯醯氧基乙基琥珀酸酯、11.32 g(18莫耳%)的2,4-環氧環己基甲基甲基丙烯酸酯和4.56 g(10莫耳%)的甲基丙烯酸縮水甘油酯。此後,在65°C下進行聚合並且持續18小時以得到固體含量為31.32重量%的共聚物(A-1)。如此製備的共聚物具有19.93 mg KOH/g的酸值、4.38的多分散性(Mw/Mn)以及35,000 Da的重量平均分子量(Mw)。製備實例 2 :共聚物 (A-2) 的製備 In a nitrogen atmosphere, a 250 ml round bottom flask (equipped with a reflux condenser and stirrer) was charged with a monomer mixture dissolved in 107.98 g of propylene glycol monomethyl ether acetate (PGMEA) together with a radical polymerization initiator. 2.34 g (3.0 mol%) of V-65, the monomer mixture contains 10.68 g (32 mol%) of styrene, 8.01 g (25 mol%) of methyl methacrylate, 10.43 g (15 mol%) Ear%) 2-propenyloxyethyl succinate, 11.32 g (18 mol%) 2,4-epoxycyclohexyl methyl methacrylate and 4.56 g (10 mol%) formaldehyde Glycidyl acrylate. Thereafter, polymerization was carried out at 65°C and continued for 18 hours to obtain a copolymer (A-1) having a solid content of 31.32% by weight. The copolymer thus prepared has an acid value of 19.93 mg KOH/g, a polydispersity (Mw/Mn) of 4.38, and a weight average molecular weight (Mw) of 35,000 Da. Preparation of Copolymer (A-2): The preparation of Example 2
向500 ml圓底燒瓶(配備回流冷凝器和攪拌器)中裝載100 g的單體混合物連同作為溶劑的300 g的丙二醇甲醚乙酸酯(PGMEA)和作為自由基聚合引發劑的3 g的2,2'-偶氮雙(2,4-二甲基戊腈),該單體混合物包含43莫耳%的苯乙烯、27.5莫耳%的甲基丙烯酸甲酯、20.5莫耳%的甲基丙烯酸和9莫耳%的甲基丙烯酸縮水甘油酯。然後,將混合物加熱至70°C並且攪拌5小時以得到固體含量為29.8重量%的共聚物(A-2)。如此製備的共聚物具有28 mg KOH/g的酸值以及6,500 Da的重量平均分子量(Mw)。製備實例 3 :共聚物 (A-3) 的製備 A 500 ml round bottom flask (equipped with reflux condenser and stirrer) was charged with 100 g of the monomer mixture together with 300 g of propylene glycol methyl ether acetate (PGMEA) as a solvent and 3 g as a radical polymerization initiator. 2,2'-Azobis(2,4-dimethylvaleronitrile), the monomer mixture contains 43 mol% styrene, 27.5 mol% methyl methacrylate, 20.5 mol% formaldehyde Acrylic acid and 9 mole% glycidyl methacrylate. Then, the mixture was heated to 70° C. and stirred for 5 hours to obtain a copolymer (A-2) having a solid content of 29.8% by weight. The copolymer thus prepared had an acid value of 28 mg KOH/g and a weight average molecular weight (Mw) of 6,500 Da. Preparation of Copolymer (A-3): The preparation of Example 3
向500 ml圓底燒瓶(配備回流冷凝器和攪拌器)中裝載100 g的單體混合物連同作為溶劑的300 g的丙二醇甲醚乙酸酯(PGMEA)和作為自由基聚合引發劑的2 g的2,2'-偶氮雙(2,4-二甲基戊腈),該單體混合物包含51莫耳%的N-苯基馬來醯亞胺、4莫耳%的苯乙烯、10莫耳%的4-羥基丁基丙烯酸酯縮水甘油醚和35莫耳%的甲基丙烯酸。然後,將混合物加熱至70°C並且攪拌5小時以得到固體含量為31.3重量%的共聚物(A-3)。如此製備的共聚物具有31.7 mg KOH/g的酸值以及20,545 Da的重量平均分子量(Mw)。 實例和對比實例:光敏樹脂組成物的製備 A 500 ml round bottom flask (equipped with a reflux condenser and stirrer) was charged with 100 g of the monomer mixture together with 300 g of propylene glycol methyl ether acetate (PGMEA) as a solvent and 2 g as a radical polymerization initiator. 2,2'-Azobis(2,4-dimethylvaleronitrile), the monomer mixture contains 51mol% N-phenylmaleimide, 4mol% styrene, 10mol% Ear% 4-hydroxybutyl acrylate glycidyl ether and 35 mol% methacrylic acid. Then, the mixture was heated to 70°C and stirred for 5 hours to obtain a copolymer (A-3) having a solid content of 31.3% by weight. The copolymer thus prepared had an acid value of 31.7 mg KOH/g and a weight average molecular weight (Mw) of 20,545 Da. Examples and comparative examples: Preparation of photosensitive resin composition
以下實例和對比實例中使用的組分如下。
[表2]
將100重量份數的製備實例1的共聚物(A-1)、32.143重量份數的作為可光聚合化合物(B)的二新戊四醇六丙烯酸酯、10.944重量份數的基於肟的光聚合引發劑(C-1)、3.648重量份數的基於三𠯤的光聚合引發劑(C-2)、112.359重量份數的著色劑(D-1)、16.051重量份數的著色劑(D-2)、32.103重量份數的著色劑(D-3)、19.644重量份數的多官能硫醇化合物(E)、26.785重量份數的含有兩個或更多個雙鍵和兩個或更多個羥基基團的化合物(F-1)、1.824重量份數的光鹼產生劑(G)、7.296重量份數的環氧化合物(H)GHP-03、1.459重量份數的助黏劑(I)和0.547重量份數的作為表面活性劑(J)的F-563均勻混合。在此,相應的含量係基於不包括溶劑的固體含量的那些。將混合物溶解在PGMEA中,使得混合物的固體含量為19重量%。將生成物混合2小時以製備液相光敏樹脂組成物。實例 2 至 4 和對比實例 1 至 10 100 parts by weight of the copolymer (A-1) of Preparation Example 1, 32.143 parts by weight of dineopentaerythritol hexaacrylate as the photopolymerizable compound (B), and 10.944 parts by weight of oxime-based light Polymerization initiator (C-1), 3.648 parts by weight of three-based photopolymerization initiator (C-2), 112.359 parts by weight of coloring agent (D-1), 16.051 parts by weight of coloring agent (D -2), 32.103 parts by weight of coloring agent (D-3), 19.644 parts by weight of multifunctional thiol compound (E), 26.785 parts by weight containing two or more double bonds and two or more Compound with multiple hydroxyl groups (F-1), 1.824 parts by weight of photobase generator (G), 7.296 parts by weight of epoxy compound (H) GHP-03, 1.459 parts by weight of adhesion promoter ( I) and 0.547 parts by weight of F-563 as the surfactant (J) are uniformly mixed. Here, the corresponding contents are based on those excluding the solid content of the solvent. The mixture was dissolved in PGMEA so that the solid content of the mixture was 19% by weight. The resultant was mixed for 2 hours to prepare a liquid-phase photosensitive resin composition. Examples 2 to 4 and Comparative Examples 1 to 10
光敏樹脂組成物各自以與實例1相同的方式製備,除了相應組分的種類和/或含量如下文表3及4所示有所改變。
[表3]
使用旋轉塗覆機將在實例和對比實例中獲得的光敏樹脂組成物各自塗覆在玻璃基底上,並在85°C下預烘烤150秒以形成厚度為1.6 µm的塗覆的膜。將為了藉由100%曝光形成具有5 μm的尺寸的線圖案而製備的掩膜放置在塗覆的膜上以離基底50 μm的距離,然後使其經受曝光。此後,使用對準器(型號名稱:MA6)用光以50 mJ/cm2 的曝光劑量(基於365 nm的波長)照射塗覆的膜持續一定時間段,該對準器發射波長為200 nm至450 nm的光。此後,在24°C下用稀釋至0.04重量%的濃度的氫氧化鉀水溶液使其顯影,直到未曝光部分被完全沖洗出來。如此形成的圖案在烘箱中在85°C後烘烤60分鐘以獲得固化膜。評估實例 1 :顯影時間和可脫離性的評估 The photosensitive resin compositions obtained in Examples and Comparative Examples were each coated on a glass substrate using a spin coater, and prebaked at 85°C for 150 seconds to form a coated film with a thickness of 1.6 µm. A mask prepared in order to form a line pattern having a size of 5 μm by 100% exposure was placed on the coated film at a distance of 50 μm from the substrate, and then subjected to exposure. After that, use an aligner (model name: MA6) to irradiate the coated film with light at an exposure dose of 50 mJ/cm 2 (based on a wavelength of 365 nm) for a certain period of time. The aligner emits wavelengths from 200 nm to 450 nm light. Thereafter, it was developed with an aqueous potassium hydroxide solution diluted to a concentration of 0.04% by weight at 24°C until the unexposed part was completely washed out. The pattern thus formed was post-baked in an oven at 85°C for 60 minutes to obtain a cured film. Evaluation example 1 : Evaluation of development time and detachability
根據如上所述之製備固化膜的方法製備在後烘烤後具有1.5(± 0.1)µm的總厚度的固化膜。在這種情況下,在製備固化膜的過程中,用0.04重量%的氫氧化鉀水溶液將未曝光部分完全沖洗出來(直到顯影裝置的階段O形環部分在基底後面完全可見)的時間被測量作為顯影時間。此外,對在顯影期間的脫離程度在視覺上評估。結果示出於下表5中。Prepare a cured film having a total thickness of 1.5 (± 0.1) µm after post-baking according to the method for preparing a cured film as described above. In this case, in the process of preparing the cured film, the time for the unexposed part to be completely washed out with a 0.04% by weight potassium hydroxide aqueous solution (until the O-ring part is completely visible behind the substrate at the stage of the developing device) is measured As the development time. In addition, the degree of detachment during development was evaluated visually. The results are shown in Table 5 below.
顯影時間/可脫離性Development time/Releasability
◎:16秒至75秒/在視覺檢查後沒有缺陷◎: 16 seconds to 75 seconds / no defect after visual inspection
○:大於75秒至150秒/未曝光部分脫離成細晶粒○: more than 75 seconds to 150 seconds / the unexposed part breaks off into fine grains
×:小於16秒或大於150秒/未曝光部分脫離成不規則的塊評估實例 2 :圖案平直度和黏合性的評估 ×: Less than 16 seconds or more than 150 seconds/Unexposed part breaks off into irregular blocks Evaluation Example 2 : Evaluation of pattern flatness and adhesion
使用SNU設備測量藉由與評估實例1中相同的方法製備的厚度為1.5(± 0.1)µm的固化膜的厚度和臨界尺寸大小。此外,使用光學顯微鏡視覺地檢查固化膜上形成的線圖案的平直度以及圖案是否有任何損失。結果示出於下表5和圖1和圖2中。The thickness and critical dimension of a cured film with a thickness of 1.5 (± 0.1) µm prepared by the same method as in Evaluation Example 1 were measured using SNU equipment. In addition, an optical microscope was used to visually check the flatness of the line pattern formed on the cured film and whether there was any loss of the pattern. The results are shown in Table 5 below and in Figures 1 and 2.
◎:形成平行圖案而沒有諸如突起的缺陷(良好的平直度)◎: Form parallel patterns without defects such as protrusions (good straightness)
○:在圖案上諸如突起的缺陷○: Defects such as protrusions on the pattern
×:在圖案上很多諸如突起的缺陷評估實例 3 :耐化學性的評估 ×: Many defects such as protrusions on the pattern Evaluation Example 3 : Evaluation of chemical resistance
將藉由與評價實例1中相同的方法製備的厚度為1.5(± 0.1)µm的固化膜切割成2 cm × 1 cm的尺寸以製備樣品。向耐化學性容器中裝載10 ml的PGMEA,蓋上蓋子,並在85°C下進行水浴。然後將樣品浸沒並且浸泡10分鐘。在10分鐘後取出樣品,冷卻至室溫,並且用流水洗滌。使用SNU設備在浸沒於溶劑之前和之後測量樣品的厚度。結果示出於下表5中。A cured film having a thickness of 1.5 (±0.1) µm prepared by the same method as in Evaluation Example 1 was cut into a size of 2 cm × 1 cm to prepare samples. Load 10 ml of PGMEA into a chemical-resistant container, close the lid, and perform a water bath at 85°C. The sample was then submerged and soaked for 10 minutes. The sample was taken out after 10 minutes, cooled to room temperature, and washed with running water. Use SNU equipment to measure the thickness of the sample before and after immersion in the solvent. The results are shown in Table 5 below.
◎:10%或更小的厚度變化◎: 10% or less thickness change
○:大於10%至20%的厚度變化○: Thickness change greater than 10% to 20%
×:大於20%的厚度變化
[表5]
從表5和圖1和圖2的結果可以看出,由實例1至4的光敏樹脂組成物形成的固化膜全部都具有快速的顯影時間且在顯影期間示出良好的平直度和黏合性而沒有諸如圖案脫離或突起的缺陷。進一步,它們在耐化學性方面係優良的。在對比實例1至10中製備的固化膜未顯影或顯影時間過長,圖案脫離或丟失,並且在所形成的一些圖案上觀察到諸如突起的缺陷。進一步,它們在耐化學性方面不如實例。As can be seen from the results in Table 5 and Figures 1 and 2, the cured films formed from the photosensitive resin compositions of Examples 1 to 4 all have a fast development time and show good flatness and adhesion during development. There are no defects such as pattern detachment or protrusion. Furthermore, they are excellent in chemical resistance. The cured films prepared in Comparative Examples 1 to 10 were not developed or developed for too long, the patterns were detached or lost, and defects such as protrusions were observed on some of the formed patterns. Further, they are inferior to the examples in terms of chemical resistance.
無none
[圖1]係用光學顯微鏡拍攝的由實例的組成物製備的固化膜的表面之照片。[Figure 1] A photograph of the surface of a cured film prepared from the composition of the example taken with an optical microscope.
[圖2]係用光學顯微鏡拍攝的由對比實例的組成物製備的固化膜的表面之照片。[Figure 2] A photograph of the surface of a cured film prepared from the composition of the comparative example taken with an optical microscope.
無none
Claims (15)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20190173994 | 2019-12-24 | ||
| KR10-2019-0173994 | 2019-12-24 | ||
| KR1020200139634A KR20210082067A (en) | 2019-12-24 | 2020-10-26 | Colored photosensitive resin composition and black matrix prepared therefrom |
| KR10-2020-0139634 | 2020-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202124459A true TW202124459A (en) | 2021-07-01 |
Family
ID=76897335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109141091A TW202124459A (en) | 2019-12-24 | 2020-11-24 | Colored photosensitive resin composition and black matrix prepared therefrom |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20210082067A (en) |
| TW (1) | TW202124459A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116144198B (en) * | 2023-02-15 | 2024-05-28 | 广西平果市润丰钙新材料科技有限公司 | Antifogging agent special for transparent polyolefin film |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101339626B1 (en) | 2008-09-08 | 2013-12-09 | 동우 화인켐 주식회사 | A colored photosensitive resin composition, color filter and liquid crystal display device having the same |
-
2020
- 2020-10-26 KR KR1020200139634A patent/KR20210082067A/en active Pending
- 2020-11-24 TW TW109141091A patent/TW202124459A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| KR20210082067A (en) | 2021-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20210191259A1 (en) | Colored photosensitive resin composition and black matrix prepared therefrom | |
| US10534261B2 (en) | Colored photosensitive resin composition and light shielding spacer prepared therefrom | |
| TW201902945A (en) | Colored photosensitive resin composition and light shielding spacer prepared therefrom | |
| US10747110B2 (en) | Colored photosensitive resin composition and light shielding spacer prepared therefrom | |
| TWI862593B (en) | Structure for a quantum dot barrier rib and process for preparing the same | |
| JP7578420B2 (en) | Quantum dot barrier rib structure and preparation method thereof | |
| TWI775785B (en) | Colored photosensitive resin composition and light shielding spacer prepared therefrom | |
| TWI801387B (en) | Colored photosensitive resin composition and light shielding spacer prepared therefrom | |
| TWI788367B (en) | Colored photosensitive resin composition and light shielding spacer prepared therefrom | |
| TW201636389A (en) | Colored photosensitive resin composition and black column spacer prepared therefrom | |
| TW202124459A (en) | Colored photosensitive resin composition and black matrix prepared therefrom | |
| TWI832940B (en) | Colored photosensitive resin composition and black matrix prepared therefrom | |
| KR20200012218A (en) | Colored photosensitive resin composition and column spacer prepared therefrom | |
| TW202233703A (en) | Fluorinated acrylate-based copolymer and photosensitive resin composition comprising the same | |
| JP7402667B2 (en) | Colored photosensitive resin composition and black matrix made therefrom | |
| TWI762452B (en) | Photosensitive resin composition and organic insulating film prepared therefrom | |
| JP7617723B2 (en) | Photosensitive resin composition and insulating film prepared therefrom | |
| KR20210076490A (en) | Colored photosensitive resin composition and colored spacer prepared therefrom |