TWI862273B - Transferring apparatus in airflow type - Google Patents

Abstract

The present invention provides a transferring apparatus in airflow type, which includes a transferring device, four cyclone pads disposed on the transferring device, and two springs that are disposed on the transferring device. The transferring device includes four supporting pads respectively arranged on four corners thereof, and top sides of the four supporting pads jointly define a loading plane. Top sides of the four cyclone pads and the two springs are lower than the loading plane. The four cyclone pads are respectively adjacent to the four supporting pads, and any two of the four cyclone pads arranged in one row are provided with one of the two springs arranged there-between. When the transferring apparatus is operated to transfer a substrate, edge of the substrate abuts against the four supporting pads, the four cyclone pads respectively suction and retain four corners of the substrate, and the two springs support the substrate.

Description

Air flow transmission equipment

The present invention relates to a transmission device, and in particular to an air flow transmission device.

The structures used by existing transmission equipment are mostly only suitable for transporting plates with a specific thickness (that is, the thickness range of the plates that can be transported by existing transmission equipment is relatively small). Therefore, when the plate increases in thickness or deforms after the processing, the existing transmission equipment is more likely to damage the plate when transporting the plate.

Therefore, the inventor believes that the above defects can be improved, so he has conducted intensive research and applied scientific principles to propose an invention that has a reasonable design and can effectively improve the above defects.

The embodiment of the present invention provides an air flow transmission device, which can effectively improve the defects that may occur in existing transmission equipment.

The present invention discloses an air flow transmission device, which includes: a transfer device, including: a plurality of mounting slots, arranged in two rows with intervals; wherein the mounting slots in each row are arranged along a configuration direction, and the plurality of mounting slots in any row correspond to the plurality of mounting slots in another row along a width direction perpendicular to the configuration direction; at least one air flow channel connected to the plurality of mounting slots; two front support pads, respectively arranged in front of the mounting slots in the two rows; and two rear support pads, respectively arranged in the rear of the mounting slots in the two rows; wherein the top edges of the two front support pads and the top edges of the two rear support pads jointly define a loading plane; four cyclone suction cups, respectively installed in the four mounting slots in the two rows and connected to the four rear support pads; The at least one air flow channel is connected to the four cyclone suction cups, respectively adjacent to the two front support pads and the two rear support pads; wherein the top edge of each cyclone suction cup is lower than the load plane; and two spring components are respectively installed in two installation slots located in different rows, and one spring component is arranged between two cyclone suction cups in any row; wherein wherein the top edge of each of the spring components is lower than the loading plane; wherein, when the airflow transport device is transporting a plate, the edge of the plate abuts against the two front support pads and the two rear support pads, and the four cyclone suction cups pass through at least one of the airflow channels to absorb and position the four corners of the plate, and the two spring components support the plate.

The present invention also discloses an air flow transmission device, which includes: a transfer device, including: at least one air flow channel; two front support pads, facing each other and spaced along a width direction; and two rear support pads, facing each other and spaced along the width direction, and the two front support pads correspond to the two rear support pads along a configuration direction perpendicular to the width direction; wherein the top edges of the two front support pads and the top edges of the two rear support pads jointly define a loading plane; four cyclone suction cups, respectively adjacent to the two front support pads and the two rear support pads; Support pads, and connected to at least one of the airflow channels; wherein the top edge of each of the cyclone suction cups is lower than the loading plane; and two spring components, whose top edges are lower than the loading plane, and one of the spring components is arranged between the two cyclone suction cups in any row; wherein, when the airflow transmission device is transmitting a plate, the edge of the plate abuts against the two front support pads and the two rear support pads, and the four cyclone suction cups pass through at least one of the airflow channels to absorb and position the four corners of the plate, and the two spring components support the plate.

In summary, the air flow transmission device disclosed in the embodiment of the present invention uses four cyclone suction cups with two front support pads and two rear support pads to make the four corners of the plate placed on the transfer device more stable and flat. Furthermore, the air flow transmission device can further provide a greater supporting force through two spring components to support the plate with a larger thickness or the plate with increased thickness in the later stage of the process.

To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and do not limit the scope of protection of the present invention.

100: Air flow transmission equipment

1:Transfer device

11: Fixed seat

12: Guidance module

121: Restriction block

1211: Front end

122:Sensor

123: Guidance Agency

13: Transfer arm

131: Mounting slot

14: Front support pad

15: Rear support pad

16: Air flow channel

2: Positioning module

21: Cyclone suction cup

21a: Left cyclone suction cup

21b: Right cyclone suction cup

22: Spring component

23: Bai Li tries hard to suck the cup

24: Front spring component

200: Plate

W: width direction

L: Configuration direction

P: Loading plane

Figure 1 is a three-dimensional schematic diagram of the air flow transmission device of an embodiment of the present invention.

Figure 2 is a top view of Figure 1.

Figure 3 is a schematic cross-sectional view of Figure 1 along line III-III.

Figure 4 is a three-dimensional schematic diagram of the cyclone suction cup in Figure 1.

Figure 5 is a schematic cross-sectional view of Figure 1 along the section line V-V.

FIG6 is a schematic diagram showing another configuration of the multiple cyclone suction cups in FIG2.

Figure 7 is a top view schematic diagram of the air flow transmission device of the embodiment of the present invention using another type of positioning module.

FIG8 is a schematic diagram of another configuration of the multiple cyclone suction cups in FIG7.

FIG9 is a top view schematic diagram of the air flow transmission device of the embodiment of the present invention using another type of positioning module.

FIG10 is a schematic diagram showing another configuration of the multiple cyclone suction cups in FIG9 .

The following is a specific embodiment to illustrate the implementation of the "air flow transmission device" disclosed in the present invention. The technical personnel in this field can understand the advantages and effects of the present invention from the content disclosed in this manual. The present invention can be implemented or applied through other different specific embodiments, and the details in this manual can also be modified and changed based on different viewpoints and applications without deviating from the concept of the present invention. In addition, the attached drawings of the present invention are only for simple schematic illustrations and are not depicted according to actual sizes. Please note in advance. The following implementation will further explain the relevant technical content of the present invention in detail, but the disclosed content is not used to limit the scope of protection of the present invention.

It should be understood that although the terms "first", "second", "third" and the like may be used in this article to describe various components, these components should not be limited by these terms. These terms are mainly used to distinguish one component from another. In addition, the term "or" used in this article may include any one or more combinations of the related listed items depending on the actual situation.

Please refer to Figures 1 to 10, which are an embodiment of the present invention. As shown in Figures 1 to 5, this embodiment discloses an airflow transmission device 100, which can be used to transport a plate 200 of different thicknesses. In other words, the thickness range of the plate 200 that can be transported by the airflow transmission device 100 is relatively wide (e.g., 0.4 mm to 3.2 mm), and the type of the plate 200 can be changed according to demand. For example, the plate 200 can be an ABF (Ajinomoto Build-up film) carrier, a copper foil substrate, or other plates, but the present invention is not limited here.

The air flow transmission device 100 includes a transfer device 1 and a positioning module 2 disposed on the transfer device 1. In this embodiment, the transfer device 1 is roughly U-shaped and includes a fixed seat 11, a guide module 12 installed on the fixed seat 11, two transfer arms 13 installed on the fixed seat 11 and located on opposite sides of the guide module 12, two front support pads 14 located at the front ends of the two transfer arms 13, and two rear support pads 15 located at the rear ends of the two transfer arms 13, but the present invention is not limited thereto.

The fixing seat 11 and each of the transfer arms 13 are provided with an air flow channel 16, which is used to connect to an air pressure input device (not shown in the figure). It should be further explained that, although the diagram of this embodiment shows two air flow channels 16, the two air flow channels 16 can also be connected to form one air flow channel 16 according to design requirements.

The guiding module 12 in this embodiment includes a limiting block 121 movably mounted on the fixing seat 11, a plurality of sensors 122 connected to one end of the limiting block 121, and a guiding mechanism 123 connected to the limiting block 121. The limiting block 121 is approximately located between the two rear support pads 15 along a width direction W, and is used to abut the plate 200 (through the front end surface 1211 of the limiting block 121). The plurality of sensors 122 are connected to different positions of the limiting block 121 in the width direction W, and are used to sense the deviation of the plate 200, but the number of the plurality of sensors 122 can also be adjusted to at least one according to design requirements. The guiding mechanism 123 is used to drive the limiting block 121 according to the sensing result of at least one of the sensors 122, so as to accurately guide the plate 200 to a predetermined position.

As described above, when the air flow transmission device 100 is transmitting the plate 200 (e.g., when the edge of the plate 200 abuts against the two front support pads 14 and the two rear support pads 15), the guiding module 12 can abut against the plate 200 to guide the plate 200 to the predetermined position (e.g., when the edge of the plate 200 abuts against the front end surface 1211 of the limiting block 121 with an offset, the guiding mechanism 123 can correspondingly drive the limiting block 121 to eliminate the offset, thereby correcting the position of the plate 200).

Each of the transfer arms 13 is long and parallel to a configuration direction L, and each of the transfer arms 13 is substantially perpendicular to the fixing seat 11. The lengths of the two transfer arms 13 are substantially equal and are arranged spaced apart from each other along the width direction W, and the two transfer arms 13 of the transfer device 1 are respectively provided with a plurality of mounting grooves 131, which are respectively connected to the two airflow channels 16.

That is, the plurality of mounting grooves 131 are arranged in two rows at intervals, each row of the mounting grooves 131 is arranged on one of the transfer arms 13 and along (e.g., substantially parallel to) the arrangement direction L, and the plurality of mounting grooves 131 in any row correspond to the plurality of mounting grooves 131 in another row along the width direction W.

In this embodiment, the plurality of mounting grooves 131 have substantially the same structure, and the plurality of mounting grooves 131 in any row are arranged substantially equidistantly along the configuration direction L, and the configuration direction L is substantially perpendicular to the width direction W, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the plurality of mounting grooves 131 in any row may also be spaced at different distances along the configuration direction L.

Furthermore, the two front support pads 14 are respectively arranged in front of the two rows of mounting slots 131, and the two rear support pads 15 are respectively arranged behind the two rows of mounting slots 131. In other words, the two front support pads 14 are arranged facing each other and spaced apart along the width direction W, and the two rear support pads 15 are arranged facing each other and spaced apart along the width direction W, and the two front support pads 14 correspond to the two rear support pads 15 along the configuration direction L. The top edges of the two front support pads 14 and the top edges of the two rear support pads 15 jointly define a loading plane P.

The positioning module 2 in this embodiment includes four cyclone pads 21, two spring components 22, four Bernoulli chucks 23, and two front spring components 24, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the four Bernoulli chucks 23 and the two front spring components 24 can also be omitted or replaced by other components according to design requirements.

It should be noted that the spring member 22 and the front spring member 24 are described as non-contact air springs in this embodiment, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the spring member 22 or the front spring member 24 may also be a contact compression spring according to design requirements.

Furthermore, the four cyclone suction cups 21, the two spring components 22, the four Bollinger suction cups 23, and the two front spring components 24 are respectively installed in the plurality of mounting grooves 131 and connected to the two air flow channels 16 in this embodiment, and their top edges are preferably all lower than the loading plane P.

Furthermore, each of the mounting grooves 131 can be used in geometric structure to disassemble and assemble any one of the cyclone suction cup 21, the spring component 22, the Bernoulli suction cup 23, and the front spring component 24, so as to facilitate adjusting the components required to be configured in each of the mounting grooves 131 according to different needs, but the present invention is not limited thereto.

For example, in other embodiments not shown in the present invention, the positioning module 2 can be fixed to the transfer device 1 in a non-detachable manner, so that the transfer device 1 does not need to form multiple mounting grooves 131; or, the four cyclone suction cups 21 and the two spring components 22 are fixed to the transfer device 1 in a non-detachable manner, and the four Parker suction cups 23 and the two front spring components 24 are detachably mounted in the corresponding mounting grooves 131 of the transfer device 1.

The four cyclone suction cups 21 are installed in the four installation slots 131 respectively located in two rows, and the four cyclone suction cups 21 are respectively adjacent to the two front support pads 14 and the two rear support pads 15. Accordingly, the four cyclone suction cups 21 can be matched with the two front support pads 14 and the two rear support pads 15 to make the four corners of the plate 200 placed on the transfer device 1 more stable and flat.

Furthermore, the four cyclone suction cups 21 in this embodiment preferably include two left cyclone suction cups 21a and two right cyclone suction cups 21b. The two left cyclone suction cups 21a are respectively installed in two mounting grooves 131 located in different rows and far away from each other, and the two right cyclone suction cups 21b are also respectively installed in two mounting grooves 131 located in different rows and far away from each other, so that the two left cyclone suction cups 21a correspond to the two right cyclone suction cups 21b along the width direction W.

That is, the two left cyclone suction cups 21a are disposed diagonally opposite to each other, and the two right cyclone suction cups 21b are also disposed diagonally opposite to each other, so that the rotating airflows generated by the four cyclone suction cups 21 can offset each other to avoid the sheet 200 from unilateral displacement on the transfer device 1, thereby enabling the sheet 200 to be more stably transported by the airflow transport device 100, but the present invention is not limited thereto.

For example, as shown in FIG6 , when the unilateral displacement requirement of the plate 200 on the transfer device 1 is not high or the unilateral displacement is low, the two left cyclone suction cups 21a can be respectively installed in two mounting grooves 131 in any row and far away from each other, and the two right cyclone suction cups 21b are respectively installed in two mounting grooves 131 in another row and far away from each other.

As shown in Figures 1 to 5, the two spring components 22 are respectively installed in the two installation grooves 131 located in different rows, and one spring component 22 is arranged between the two cyclone suction cups 21 in any row and connected to the same air flow channel 16. In this embodiment, the distance between any one of the spring components 22 and the adjacent rear support pad 15 is smaller than the distance between it and the adjacent front support pad 14, but the present invention is not limited thereto. For example, any one of the spring components 22 can be located at the center of the adjacent rear support pad 15 and the adjacent front support pad 14.

As described above, when the airflow transport device 100 transports the plate 200, the edge of the plate 200 abuts against the two front support pads 14 and the two rear support pads 15, and the four cyclone suction cups 21 pass through the two airflow channels 16 to absorb and position the four corners of the plate 200, and the two spring components 22 (through the two airflow channels 16 in a non-contact manner) support the plate 200.

Accordingly, the air flow transmission device 100 can provide a greater supporting force through the two spring components 22 to support the plate 200 with a greater thickness, or to support the plate 200 with increased thickness in the later stage of the process. Furthermore, the spring component 22 in this embodiment can be separated from the plate 200 by an air floating gap of 0.2 mm to 0.3 mm, so as to reduce the impact caused by contact with the plate 200.

In addition, there are one or two mounting grooves 131 between any of the cyclone suction cups 21 and the adjacent spring member 22 for mounting four of the Bernoulli suction cups 23 and two of the front spring members 24. The four Bernoulli suction cups 23 are mounted in four mounting grooves 131 located in two rows, and one of the Bernoulli suction cups 23 is disposed between any of the spring members 22 and any of the adjacent cyclone suction cups 21.

As described above, when the airflow transmission device 100 is transmitting the plate 200, the four Bernoulli suction cups 23 support the plate 200 in a non-contact manner through the two airflow channels 16. In this embodiment, the Bernoulli suction cups 23 can be separated from the plate 200 by an air floating gap of 0.06 mm to 0.12 mm, thereby reducing the impact caused by contact with the plate 200. Furthermore, the airflow transmission device 100 can be configured with the Bernoulli suction cups 23 at appropriate positions, thereby providing the suction and support force provided by the Bernoulli suction cups 23, and can transmit the plate 200 at high speed and stably.

Furthermore, the two front spring components 24 are respectively installed in the two installation slots 131 located in different rows, and a cyclone suction cup 21 is arranged between the front spring components 24 in any row and the front support pad 14, and a Bernoulli suction cup 23 is arranged between the front spring components 24 in any row and the spring components 22.

As described above, when the airflow transmission device 100 is transmitting the plate 200, the two front spring components 24 support the plate 200 in a non-contact manner through the two airflow channels 16. In this embodiment, the Parker suction cup 23 can be separated from the plate 200 by an air floating gap of 0.06 mm to 0.12 mm, so as to reduce the impact caused by contact with the plate 200.

Furthermore, the air flow transmission device 100 can further support the plate 200 with a larger thickness or the plate 200 with increased thickness in the later stage of the process by configuring the front spring component 24 at an appropriate position. In addition, any of the front spring components 24 and the adjacent cyclone suction cup 21 are slightly misaligned in this embodiment, so as to effectively improve the flatness of the thinner plate 200, but the present invention is not limited thereto.

It should be further explained that the specific configuration of the positioning module 2 of the air flow transmission device 100 can be adjusted according to design requirements (such as: lower gas consumption requirements, carrier weight, carrier thickness, carrier size, etc.). For example, as shown in Figures 7 and 8, the positioning module 2 can be configured with only four cyclone suction cups 21, two spring components 22, and four Bernoulli suction cups 23; or, as shown in Figures 9 and 10, the positioning module 2 can be configured with only four cyclone suction cups 21 and two spring components 22.

[Technical effects of the embodiments of the present invention]

In summary, the airflow transmission device disclosed in the embodiment of the present invention uses four cyclone suction cups with two front support pads and two rear support pads to make the four corners of the plate placed on the transfer device more stable and flat. Furthermore, the airflow transmission device can also provide a greater supporting force through the two spring components to support the plate with a larger thickness or the plate with increased thickness in the later stage of the process.

Furthermore, the air flow transmission device disclosed in the embodiment of the present invention can also be used for disassembly and assembly of any one of the cyclone suction cup, the spring component, the Pernicket suction cup, and the front spring component through each of the mounting slots on the geometric structure, so as to facilitate adjustment of the components required to be configured in each of the mounting slots according to different needs.

In addition, the airflow transmission device disclosed in the embodiment of the present invention has two left cyclone suction cups disposed diagonally opposite to each other, and two right cyclone suction cups disposed diagonally opposite to each other, so that the rotating airflows generated by the four cyclone suction cups can offset each other, thereby preventing the plate from unilaterally displacing on the transfer device, thereby enabling the plate to be more stably transmitted by the airflow transmission device.

The above disclosed contents are only the preferred feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the contents of the specification and drawings of the present invention are included in the patent scope of the present invention.

100: Air flow transmission equipment

1:Transfer device

11: Fixed seat

12: Guidance module

121: Restriction block

1211: Front end

122:Sensor

123: Guidance Agency

13: Transfer arm

131: Mounting slot

14:Front support pad

15: Rear support pad

16: Air flow channel

2: Positioning module

21: Cyclone suction cup

21a: Left cyclone suction cup

21b: Right cyclone suction cup

22: Spring component

23: Bai Li tries hard to suck the cup

24: Front spring component

200: Plate

W: width direction

L: Configuration direction

Claims (10)

An air flow transmission device comprises: a transfer device, comprising: a plurality of mounting slots arranged in two rows with intervals; wherein the mounting slots in each row are arranged along a direction of arrangement, and the plurality of mounting slots in any row correspond to the plurality of mounting slots in another row along a width direction perpendicular to the arrangement direction; two air flow channels respectively connected to the plurality of mounting slots; two front support pads respectively arranged in front of the mounting slots in the two rows; and two rear support pads respectively arranged in rear of the mounting slots in the two rows; wherein the top edges of the two front support pads and the top edges of the two rear support pads jointly define a loading plane; four cyclone suction cups; pads), which are installed in the four installation slots respectively located in two rows and are respectively connected to the two air flow channels, and the four cyclone suction cups are respectively adjacent to the two front support pads and the two rear support pads; wherein the top edge of each cyclone suction cup is lower than the load plane; and two spring components, which are respectively installed in the two installation slots located in different rows, and a spring is arranged between the two cyclone suction cups in any row. The spring components are connected to the same airflow channel; wherein the top edge of each spring component is lower than the load plane; wherein, when the airflow transmission device is transmitting a plate, the edge of the plate abuts against the two front support pads and the two rear support pads, and the four cyclone suction cups pass through the two airflow channels to absorb and position the four corners of the plate, and the two spring components support the plate. As described in claim 1, the four cyclone suction cups include two left cyclone suction cups and two right cyclone suction cups, and the two left cyclone suction cups are respectively installed in two mounting grooves located in different rows and far away from each other, and the two right cyclone suction cups are also respectively installed in two mounting grooves located in different rows and far away from each other, so that the two left cyclone suction cups correspond to the two right cyclone suction cups respectively along the width direction. The airflow transmission device as described in claim 1, wherein the airflow transmission device further comprises: four Bernoulli chucks, which are connected to the two airflow channels and installed in the four installation slots respectively located in two rows; one Bernoulli chuck is arranged between any one of the spring components and any one of the adjacent cyclone chucks; wherein, when the airflow transmission device is transmitting the plate, the four Bernoulli chucks support the plate in a non-contact manner through the two airflow channels. As described in claim 3, the four cyclone suction cups include two left cyclone suction cups and two right cyclone suction cups, and the two left cyclone suction cups are respectively installed in two mounting grooves located in different rows and far away from each other, and the two right cyclone suction cups are also respectively installed in two mounting grooves located in different rows and far away from each other, so that the two left cyclone suction cups correspond to the two right cyclone suction cups respectively along the width direction. The airflow transmission device as described in claim 3, wherein the airflow transmission device further comprises: two front spring components, respectively installed in two installation slots located in different rows; one of the Parker suction cups is arranged between the front spring components and the spring components in any row, and one of the cyclone suction cups is arranged between the front spring components and the front support pad in any row; wherein, when the airflow transmission device is transmitting the plate, the two front spring components support the plate. The air flow transmission device as described in claim 1, wherein the plurality of mounting grooves have the same spacing along the configuration direction, and there are one or two mounting grooves between any one of the cyclone suction cups and the adjacent spring member. The airflow transmission device as described in claim 1, wherein the transfer device comprises: a fixing seat; a guiding module mounted on the fixing seat; and two transfer arms mounted on the fixing seat and located on opposite sides of the guiding module, and the two transfer arms are arranged at intervals along the width direction; wherein the plurality of mounting grooves, the two front support pads, and the two rear support pads are respectively arranged on the two transfer arms; wherein when the airflow transmission device is transmitting the plate, the guiding module can guide the plate to a predetermined position by abutting against the plate. The air flow transmission device as described in claim 7, wherein the guiding module comprises: a limiting block, located between the two rear support pads along the width direction, for abutting the plate; a sensor, connected to one end of the limiting block, for sensing the deviation of the plate; and a guiding mechanism, connected to the limiting block, for driving the limiting block according to the sensing result of the sensor to guide the plate to the predetermined position. The air flow transmission device as described in any one of claims 1 to 8, wherein the plurality of mounting grooves have the same structure, and each mounting groove can be used in geometric structure for any one of the cyclone suction cup and the spring member to be disassembled and assembled. An air flow transmission device, comprising: a transfer device, including: two air flow channels; two front support pads, facing each other and spaced along a width direction; and two rear support pads, facing each other and spaced along the width direction, and the two front support pads correspond to the two rear support pads along a configuration direction perpendicular to the width direction; wherein the top edges of the two front support pads and the top edges of the two rear support pads jointly define a loading plane; four cyclone suction cups, respectively adjacent to the two front support pads and the two rear support pads, and respectively connected to the two rear support pads; The airflow channel; wherein the top edge of each cyclone suction cup is lower than the loading plane; and two spring components, whose top edges are lower than the loading plane, are arranged between two cyclone suction cups in any row and are connected to the same airflow channel; wherein, when the airflow transmission device is transmitting a plate, the edge of the plate abuts against the two front support pads and the two rear support pads, and the four cyclone suction cups pass through the two airflow channels to absorb and position the four corners of the plate, and the two spring components support the plate.

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