CN102803109B - Processing device and transfer device for a strip-shaped sheet substrate - Google Patents

Abstract

The invention provides a transfer device and a processing device for a strip-shaped sheet substrate, wherein the transfer device is provided with a first guide roller (G1) and a second guide roller (G2). A strip-shaped sheet substrate (FB), i.e. a resin film or foil, is turned over via diagonal folding by the first guide roller (G1) and turned over again via diagonal folding by the second guide roller (G2). An alignment camera (51) detects alignment marks (AM) on the substrate (FB), and on the basis thereof, adjustment mechanisms (52 and 53) shift or tilt the guide rollers (G1 and G2). This shifting (parallel movement) or tilting moves the substrate (FB) sideways between the first and second guide rollers (G1 and G2). A processing device (10) forms organic EL elements on a surface (Fp) of the substrate (FB). Circular cones (G3 and G4) may be used instead of the guide rollers (G1 and G2). A third guide roller (G23) or circular cone (G27) may be added. A fourth guide roller (G24) or circular cone (G28) may also be added. The guide rollers and circular cones do not touch the surface (Fp) of the substrate (FB) which is processed. Wrinkles do not form in the substrate (FB) during the aforementioned sideways movement of the substrate (FB).

Description

Conveying device and processing device for strip-shaped sheet substrate

technical field

The present invention relates to a transfer device and a substrate processing device.

Background technique

As a display element constituting a display device such as a display device, there are, for example, a liquid crystal display element, an organic electroluminescence (organic EL) element, an electrophoretic element used in electronic paper, and the like. At present, such display elements are active devices (Active devices) in which respective display elements are formed on the surface of a substrate after forming a switching element (Thin Film Transistor: TFT) called a thin film transistor (TFT).

In recent years, a technique of forming a display element on a sheet-like substrate (such as a film member, etc.) has been proposed. As such a technique, for example, a method called a roll-to-roll (roll to roll) method (hereinafter, abbreviated as a winding method) is widely known (for example, refer to Patent Document 1). The winding method is to send out a piece of sheet-shaped substrate (for example, a strip-shaped film member) wound on the supply roller on the substrate supply side, and wind the sent substrate to the recovery roller on the substrate recovery side. Transport the substrate.

In addition, during the period from sending out the substrate to being wound up, for example, while transferring the substrate using a plurality of transfer rollers, etc., a plurality of processing devices are used to form gate electrodes, gate oxide films, semiconductor films, source-drain electrodes, etc. constituting TFTs. , sequentially forming the components of the display element on the surface to be processed of the substrate. For example, when forming an organic EL element, a light-emitting layer, an anode, a cathode, and a motor circuit are sequentially formed on a substrate.

When forming a display element, for example, in order to arrange components on a substrate with high precision, it is necessary to perform alignment between a processing device and the substrate. Therefore, there has been developed a technique in which position adjustment rollers are respectively arranged at ends in a direction perpendicular to the substrate conveyance direction, and the position of the substrate is adjusted by adjusting the rotational speed of the position adjustment rollers.

prior art literature

[Patent Document 1] International Publication No. 2006/100868

Contents of the invention

Problems Solved by the Invention

However, in the above-mentioned position adjustment, a force in a direction different from the conveyance direction may be applied to the substrate due to a difference in rotational speed between the position adjustment rollers, causing wrinkles, for example, on the substrate.

In addition, when the substrate is transported, the surface to be processed is in contact with, for example, a transport roller, which may affect the processing state of the surface to be processed. Therefore, there is a demand for a configuration that minimizes contact with the substrate surface to be processed before and after various processes are performed on the substrate surface to be processed.

The various embodiments of the present invention aim to provide a conveying device and a substrate processing device capable of improving substrate positioning accuracy. Another object of an embodiment of the present invention is to provide a transfer device and a substrate processing device capable of transferring a substrate while suppressing contact with a surface of the substrate to be processed.

means to solve the problem

The present invention provides a conveying device, which is used for conveying strip-shaped sheet substrates, comprising:

The first guide, after obliquely bending the sheet substrate conveyed from the first direction (or toward the first direction), changes the conveying direction of the sheet substrate from the first direction to a direction different from the first direction. second direction;

The second guide, after obliquely bending the sheet substrate conveyed from the second direction (or towards the second direction), changes the conveying direction of the sheet substrate from the second direction to a direction different from the second direction. third directions; and

The adjustment mechanism is provided on at least one of the first guide and the second guide, and is used to adjust at least one of the position of the first guide and the second guide, so as to adjust the position in the direction intersecting with the second direction. The location of the sheet substrate.

The present invention also provides a substrate processing apparatus including: a conveying device for conveying a belt-shaped sheet substrate; and a processing device for performing predetermined processing on the sheet substrate, wherein the conveying device uses the above-mentioned conveying device.

The present invention also provides a conveying device, which conveys a belt-shaped sheet substrate, and includes: a first guide member, which supports the back surface of the sheet substrate, and transfers the sheet conveyed from the first direction (or toward the first direction). The sheet substrate is obliquely bent to change the conveying direction of the sheet substrate from the first direction to a second direction different from the first direction; the second guide supports the back side of the sheet substrate so that it can be moved from the second direction The sheet substrate conveyed in one direction (or toward the second direction) is obliquely bent to convert the conveying direction of the sheet substrate from the second direction to a third direction different from the second direction; and a third guide, It supports the back of the sheet substrate, and bends the sheet substrate conveyed from (or towards) the third direction obliquely to change the conveying direction of the sheet substrate from the third direction to the third direction. Different fourth direction.

The present invention also provides a substrate processing apparatus including: a conveying device for conveying a belt-shaped sheet substrate; and a processing device for performing predetermined processing on the sheet substrate; the conveying device uses the conveying device.

The present invention also provides a substrate processing device, which performs predetermined processing on the surface of a strip-shaped sheet substrate, and includes: a first guide for supporting the back surface of the sheet substrate so that it can be transported from the first direction (or to the second direction) One direction) the sheet substrate is bent obliquely, so that the conveying direction of the sheet substrate is changed from the first direction to a second direction different from the first direction; the second guide is to support the back side of the sheet substrate, Bending the sheet substrate conveyed from the second direction (or toward the second direction) obliquely to change the conveying direction of the sheet substrate from the second direction to a third direction different from the second direction; The third guide is to support the back of the sheet substrate, and bend the sheet substrate conveyed from the third direction (or toward the third direction) obliquely so as to change the conveying direction of the sheet substrate from the third direction. Convert to a fourth direction different from the third direction; the fourth guide supports the back of the sheet substrate, and bends the sheet substrate conveyed from the fourth direction (or toward the fourth direction) obliquely , to change the conveying direction of the sheet substrate from the fourth direction to a fifth direction different from the fourth direction; The surface is subject to the prescribed treatment.

Invention effect

With the above-described embodiments of the present invention, it is possible to adjust the position of the substrate with high positioning accuracy compared to before. In addition, it is possible to transfer the substrate while suppressing contact with the surface of the substrate to be processed.

Description of drawings

FIG. 1 is an overall view showing a schematic configuration of a substrate processing apparatus according to a first embodiment.

Fig. 2 is a side sectional view showing a partial configuration of the conveying device of this embodiment.

Fig. 3 is a plan view showing a partial configuration of the conveying device of the present embodiment.

FIG. 4 is a diagram showing the transport operation of the substrate processing apparatus of this embodiment.

Fig. 5 is a diagram showing the transport operation of the substrate processing apparatus according to the second embodiment.

6 is a diagram showing a partial configuration of a transfer device of a substrate processing apparatus according to a third embodiment.

Fig. 7 is a perspective view showing a partial configuration of the conveying device of this embodiment.

Fig. 8 is a diagram showing another configuration of the conveying device of the present embodiment.

9 is an overall view showing a schematic configuration of a substrate processing apparatus according to a fourth embodiment.

Fig. 10 is a plan view showing a partial configuration of the conveying device of this embodiment.

Fig. 11 is a diagram showing a partial configuration of a conveying device according to a fifth embodiment.

Fig. 12 is a diagram showing a partial configuration of a conveying device according to a sixth embodiment.

Fig. 13 is a diagram showing another configuration of the conveying device of this embodiment.

Reference number

FPA Substrate processing device

FB Sheet Substrate

CONT Control Department

Fp Treatment Surface

G1, G21 The first guide roller

G2, G2 Second guide roller

G23 The third guide roller

G24 The fourth guide roller

C1～C8 Central axis

G1a, G2a, G21a～G24a Roller surface

ST stage device

Sa bearing surface

AM Alignment Mark

CA Detection Area

G3, G25 The first hammer-shaped member

G4, G26 Second Hammer

G27 The third hammer member

G28 The fourth hammer member

G3a, G4a, G21a～G24a Roller surface

G25a～G28a Side view

10 Processing device

30 Conveying device

40 Adsorption part

51 Aim at the camera

52, 53 Adjustment mechanism

61, 63 Driving mechanism

63 Driving mechanism

64 Stage Drive Mechanism

Detailed ways

<First embodiment>

FIG. 1 is a configuration diagram showing a substrate processing apparatus FPA of a first embodiment.

As shown in FIG. 1 , the substrate processing apparatus FPA has a substrate supply unit SU that supplies a sheet substrate (for example, a strip-shaped film member) FB, a substrate processing unit PR that processes the surface (surface to be processed) of the sheet substrate FB, The board|substrate collection|recovery part CL which collect|recovers the sheet|seat board|substrate FB, and the control part CONT which controls each of these parts. The substrate processing apparatus FPA is installed in a factory or the like, for example.

The substrate processing apparatus FPA is a roll-to-roll system that applies various treatments to the surface of the sheet substrate FB after the sheet substrate FB is sent out from the substrate supply unit SU until the sheet substrate FB is recovered by the substrate recovery unit CL. (Hereinafter, simply referred to as the winding method) device. The substrate processing apparatus FPA can be used when forming display elements (electronic elements) such as organic EL elements and liquid crystal display elements on the sheet substrate FB. Of course, the processing apparatus FPA can also be used when forming elements other than these elements.

For the sheet substrate FB to be processed in the substrate processing apparatus FPA, for example, foils (films) such as resin films and stainless steel can be used. For the resin film, polyethylene resin, polypropylene resin, polyester resin, ethylene vinyl copolymer (Ethylene vinyl copolymer) resin, polyvinyl chloride resin, cellulose resin, polyamide resin, polyimide resin, polycarbonate resin, etc. Resin, polystyrene resin, vinyl acetate resin and other materials.

The dimension of the Y direction (short side direction) of the sheet|seat board|substrate FB is formed in about 1m-2m, for example, and the dimension of the X direction (long side direction) is formed in 10m or more, for example. Of course, this dimension is only an example and is not limited to this example. For example, the Y direction dimension of the sheet|seat board|substrate FB may be 1 m or less, or 50 cm or less, and may be 2 m or more. Moreover, the X direction dimension of the sheet|seat board|substrate FB may be 10 m or less.

The sheet substrate FB is formed to have flexibility, for example. Here, the term "flexibility" means, for example, the property that the substrate can be bent without breaking or cracking when a predetermined force of at least its own weight is applied to the substrate. In addition, for example, the property of being bent by the above-mentioned predetermined force is also included in the flexibility. In addition, the above-mentioned flexibility may change depending on the environment such as the substrate material, size, thickness, or temperature. In addition, the sheet|seat board|substrate FB may use the board|substrate of 1 strip shape, and may connect the board|substrate of several units, and may form the structure of a strip shape.

The sheet substrate FB preferably has a smaller coefficient of thermal expansion in which there is substantially no change in size (small thermal deformation) even when subjected to heat at a relatively high temperature (for example, about 200° C.). For example, inorganic fillers can be mixed with the resin film to reduce the coefficient of thermal expansion. Examples of the inorganic filler include titanium oxide, zinc oxide, aluminum oxide, silicon oxide and the like.

The substrate supply part SU feeds and supplies the sheet|seat board|substrate FB wound up into a roll shape, for example, to the board|substrate processing part PR. In the board|substrate supply part SU, the shaft part for winding up the sheet|seat board|substrate FB, the rotational drive source which rotates this shaft part, etc. are provided, for example. Of course, instead of and/or in addition, it is also possible to provide, for example, a covering portion for covering the sheet substrate FB wound in a roll-shaped state in the substrate supply unit SU.

The board|substrate collection|recovery part CL collect|recovers the sheet|seat board|substrate FB from the board|substrate processing part PR, for example, by winding it in roll form. Like the substrate supply unit SU, a shaft for winding the sheet substrate FB, a rotary drive source for rotating the shaft, and a covering portion for covering the recovered sheet substrate FB are provided in the substrate recovery unit CL. Alternatively and/or additionally, when the substrate processing unit PR cuts the sheet substrate FB into a panel shape, for example, the substrate recovery unit CL may also be configured to recover the sheet substrate FB into stacks, for example. A configuration in which the sheet substrate FB is collected in a state different from the state wound up in a roll shape, such as a state.

The substrate processing unit PR transports the sheet substrate FB supplied from the substrate supply unit SU to the substrate recovery unit CL, and processes the surface to be processed Fp of the sheet substrate FB during the transport. The substrate processing unit PR has, for example, a processing device 10 , a transfer device 30 , an alignment device 50 , and the like.

The processing apparatus 10 has various devices for forming, for example, an organic EL element on the surface to be processed Fp of the sheet substrate FB. As such a device, for example, there is a partition forming device for forming a partition between partition walls on the surface to be processed Fp, an electrode forming device for forming an electrode for driving an organic EL element, and a light emitting layer forming device for forming a light emitting layer. wait. Specifically, there are droplet coating devices (such as inkjet coating devices, spin coating coating devices, etc.), film forming devices such as vapor deposition devices, sputtering devices, exposure devices, developing devices, surface coating devices, etc. Reforming device, cleaning device, etc. Each of these devices is appropriately installed, for example, on the conveyance path of the sheet substrate FB.

For example, two or more processing apparatuses may be arranged along the conveyance direction.

The conveying device 30 includes a roller device R for conveying, for example, a sheet substrate FB toward the substrate collecting part CL in the substrate processing part PR, and guide rollers disposed on the upstream side and the downstream side of the processing device 10 with the processing device 10 interposed therebetween. g. For example, a plurality of roller devices R are provided along the conveyance path of the sheet substrate FB. A drive mechanism (not shown) is attached to at least some of the roller devices R among the plurality of roller devices R. By the rotation of such a roller device R, the sheet|seat board|substrate FB is conveyed to the X-axis direction. Among the plurality of roller devices R, for example, a part of the roller devices R may be provided so as to be movable in a direction perpendicular to the conveyance direction.

In addition, the conveying device 30 in this embodiment is related to the conveying direction of the sheet substrate FB, on the upstream side and the downstream side of the guide roller G, in order to avoid tension being applied to the sheet substrate FB, the sheet substrate FB is provided with There is a slack (not shown).

2 and 3 are schematic diagrams showing the configuration of the processing device 10 and the guide roller G. As shown in FIG. FIG. 2 shows the configuration of the substrate processing apparatus FPA viewed from the side (+X direction). FIG. 3 shows the structure of the substrate processing apparatus FPA viewed from above (+Z direction).

As shown in FIGS. 2 and 3 , the guide roller G has a first guide roller G1 and a second guide roller G2. The first guide roller G1 is formed in, for example, a columnar shape or a cylindrical shape, and is arranged on the upstream side in the conveyance direction of the sheet substrate FB with respect to the processing apparatus 10 . The second guide roller G2 is formed in, for example, a columnar shape or a cylindrical shape, and is arranged on the downstream side in the conveyance direction of the sheet substrate FB with respect to the processing apparatus 10 .

The first guide roller G1 is to face the first part of the sheet substrate FB conveyed in the first direction (+X direction) from the upstream side of the first guide roller G1 (before being guided by the first guide roller G1). Part, that is, the short side direction (width direction: Y direction here) relative to the first guide roller G1 and the upstream side part of the sheet substrate FB F1 is arranged so that the central axis C1 is inclined obliquely. The 1st guide roller G1 guides the back surface of the sheet|seat board|substrate FB on the roller surface (guide surface) G1a.

In addition, the sheet|seat board|substrate FB conveyed from the upstream side of the 1st guide roller G1 is the state which faced the back surface Fq of the sheet|seat board|substrate FB upwards in FIG.

The first guide roller G1 bends the sheet substrate FB obliquely with respect to the short side direction of the sheet substrate FB and folds the sheet substrate FB back along the roller surface of the first guide roller G1, thereby turning the sheet substrate FB The conveyance direction of the above-mentioned first direction is changed to the second direction (-Y direction). In this embodiment, the first guide roller G1 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while twisting through the first guide roller G1. In the sheet|seat board|substrate FB, the partial peripheral surface inclined with respect to a conveyance direction (1st direction) can be formed in the part guided by the 1st guide roller G1. The sheet|seat board|substrate FB which has the advancing direction of a 1st direction (+X direction) enters into 1st guide roller G1. The sheet|seat board|substrate FB which has the advancing direction of a 2nd direction (-Y direction) comes out from 1st guide roller G1. In this embodiment, the second direction is, for example, a direction orthogonal to the first direction. For example, the sheet|seat board|substrate FB folded back by the 1st guide roller G1 faces upward (processing apparatus 10 side) in the 2nd direction, and the to-be-processed surface Fp. Also, the sheet substrate FB is supported on the roller surface G1a of the first guide roller G1 until the first part F1 and the second part (guided to the front of the second guide roller G2) are front and rear of the first guide roller G1. The part, that is, with respect to the second guide roller G2, the upstream side part of the sheet substrate FB) F2 is parallel to each other.

The second guide roller G2 is disposed such that the central axis C2 thereof is inclined obliquely with respect to the second portion F2 of the sheet substrate FB conveyed in the second direction from the upstream side of the second guide roller G2. The 2nd guide roller G2 guides the back surface of the sheet|seat board|substrate FB on the roller surface (guide surface) G2a.

In addition, in FIG. 2, the sheet|seat board|substrate FB conveyed from the upstream side of the 2nd guide roller G2 is the state which the to-be-processed surface Fp of the sheet|seat board|substrate FB faces upward as mentioned above.

The second guide roller G2 bends the second portion F2 of the sheet substrate FB in an oblique direction relative to the short side direction of the sheet substrate FB, and folds the sheet substrate FB back along the roller surface of the second guide roller G2. , thereby changing the conveyance direction of the sheet substrate FB from the above-mentioned second direction to the third direction (+X direction). In this embodiment, the second guide roller G2 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while twisting through the second guide roller G2. In the sheet|seat board|substrate FB, the partial peripheral surface inclined with respect to a conveyance direction (2nd direction) can be formed in the part guided by the 2nd guide roller G2. The sheet|seat board|substrate FB which has the advancing direction of a 2nd direction (-Y direction) enters into 2nd guide roller G2. The sheet substrate FB having the traveling direction of the third direction (+X direction) comes out from the second guide roller G2. In this embodiment, the third direction is, for example, a direction parallel to the first direction. For example, in the sheet|seat board|substrate FB folded back by the 2nd guide roller G2, the back surface Fq faces upward and the surface to be processed Fp faces downward in a 3rd direction. Also, the sheet substrate FB is supported on the roller surface G2a of the second guide roller G2 until the second part F2 and the third part (the part before being guided by the third guide roller G3, that is, the part that is guided relative to the third guide roller G3). The upstream side part) F3 of the sheet|seat board|substrate FB of the drum G3 is parallel to each other.

The conveyance direction of the sheet substrate FB is the +X direction (first direction) on the upstream side (first portion F1) of the first guide roller G1 in the conveyance direction of the sheet substrate FB, and the first guide roller G1 The portion (second portion F2) between the second guide roller G2 is in the −Y direction (second direction), and the portion (third portion F3) on the downstream side of the conveyance direction of the second guide roller G2 is again +X direction (third direction). In this way, the sheet|seat board|substrate FB is conveyed by the crank-shaped path which makes the 1st guide roller G1 and the 2nd guide roller G2 into a bending angle.

The first guide roller G1 is supported by, for example, a bearing member 60 . The drive mechanism 61 which drives the 1st guide roller G1 is provided in the bearing member 60. As shown in FIG. The drive mechanism 61 rotates the first guide roller G1 in the central axis direction.

The 2nd guide roller G2 is supported by the bearing member 62 similarly to the 1st guide roller G1, for example. The drive mechanism 63 which drives the 2nd guide roller G2 is provided in the bearing member 62. As shown in FIG. The drive mechanism 63 rotates the second guide roller G2 in the central axis direction.

Moreover, for example, detection devices not shown, such as encoders which detect the rotation amount, rotation speed, etc., are provided in the 1st guide roller G1 and the 2nd guide roller G2, respectively. The detection result by this detection device is sent to the control part CONT, for example.

Between the 1st guide roller G1 and the 2nd guide roller G2, the stage apparatus ST which supports the sheet|seat board|substrate FB is arrange|positioned. The stage apparatus ST is arrange|positioned at the back side (-Z side) with respect to the 2nd part F2 of the sheet|seat board|substrate FB, and has the support surface Sa which supports the 2nd part F2 of the sheet|seat board|substrate FB. The supporting surface Sa is formed, for example, as a flat surface or a surface having curvature.

In the stage device ST, if the support surface Sa is, for example, a flat surface, the support surface Sa is arranged in parallel to the XY plane. The stage drive mechanism 64 is provided in the stage apparatus ST. The stage apparatus ST is provided so that it can move in X direction, Y direction, and Z direction by the stage drive mechanism 64, for example.

The stage apparatus ST has the adsorption|suction part 40 (refer FIG. 2) on the support surface Sa. The adsorption|suction part 40 is arrange|positioned at one place or several places on the support surface Sa, for example. A suction mechanism 41 such as a suction pump is connected to the suction unit 40 . Therefore, the stage apparatus ST can support the 2nd part F2 of the sheet|seat board|substrate FB, adsorb|sucking to the support surface Sa.

Returning to FIG. 1 , the alignment device 50 performs an alignment operation on the sheet substrate FB. The alignment device 50 has an alignment camera 51 for detecting the position state of the sheet substrate FB, and aligns the sheet substrate FB in the X direction, the Y direction, the Z direction, the θX direction, and the θY direction according to the detection results of the alignment camera 51 . direction and θZ direction, the first adjustment mechanism (first adjustment unit) 52 and the second adjustment mechanism (second adjustment unit) 53 for fine adjustment.

As shown in FIG. 3 , alignment marks AM are formed on the surface of the sheet substrate FB (the side of the surface to be processed Fp). The alignment marks AM are formed on the surface of the sheet substrate FB, for example, at both ends of the sheet substrate FB in the transverse direction. In FIG. 3 , only a pair of alignment marks AM is shown, but actually, for example, a plurality of them are arranged along each edge of the sheet substrate FB.

In addition, the alignment camera 51 in this Example is arrange|positioned facing each of the short-side direction edge part of the sheet|seat board|substrate FB. In this Example, the alignment camera 51 detects the alignment mark AM of both ends of the sheet|seat board|substrate FB, respectively. The detection area CA of each alignment camera 51 is set to include, for example, the alignment mark AM.

The first adjustment mechanism 52 supports both ends of the first guide roller G1, for example. Moreover, the first adjustment mechanism 52 moves the first guide roller G1 in a direction parallel to the central axis of the first guide roller G1, for example, makes the first guide roller G1 in the XY plane, perpendicular to the XY plane, or Move within the intersecting plane. Furthermore, the first adjustment mechanism 52 rotates the first guide roller G1 around the θX direction, the θY direction, and the θZ direction. In addition, the first adjustment mechanism 52 can set the rotation center of each rotation direction at one of the two ends of the first guide roller G1, or at the center of the central axis direction of the first guide roller G1. part.

The second adjustment mechanism 53 supports both ends of the second guide roller G2, for example. Moreover, the second adjustment mechanism 53 moves the second guide roller G2 in a direction parallel to the central axis of the second guide roller G2, for example, makes the second guide roller G2 in the XY plane, perpendicular to the XY plane, or Move within the intersecting plane. Furthermore, the second adjustment mechanism 53 rotates the second guide roller G2 around the θX direction, the θY direction, and the θZ direction. In addition, the second adjustment mechanism 53 can set the rotation center of each rotation direction at, for example, one of the two ends of the second guide roller G2, or at the center axis direction of the second guide roller G2. central part.

The alignment camera 51 detects the alignment mark AM and sends the detection result to the control unit CONT. The control unit CONT sends an adjustment signal for adjusting the position of the first guide roller G1 to the adjustment mechanism 52 according to the detection result, and sends an adjustment signal for adjusting the position of the second guide roller G2 to the adjustment mechanism 53 . The adjustment mechanism 52 adjusts the position of the first guide roller G1 based on an adjustment signal from the control unit CONT. The adjustment mechanism 53 adjusts the position of the second guide roller G2 based on an adjustment signal from the control unit CONT. In addition, the control part CONT may generate|occur|produce an adjustment signal without using the detection result of the alignment camera 51, and may send this generated adjustment signal to the adjustment mechanisms 52 and 53.

The substrate processing apparatus FPA configured as described above manufactures display elements (electronic elements) such as organic EL elements and liquid crystal display elements by a roll-to-roll system under the control of the control unit CONT. Hereinafter, a process of manufacturing a display element using the substrate processing apparatus FPA configured as described above will be described.

First, the strip-shaped sheet substrate FB wound around a drum is attached to the substrate supply unit SU. The control unit CONT rotates the drum so that the sheet substrate FB is sent out from the substrate supply unit SU in this state. And this sheet|seat board|substrate FB which passed the board|substrate processing part PR is wound up on the drum of the board|substrate recovery part CL. By controlling the substrate supply unit SU and the substrate recovery unit CL, the surface to be processed Fp of the sheet substrate FB can be continuously conveyed to the substrate processing unit PR.

The control unit CONT properly transports the sheet substrate FB in the substrate processing unit PR by the transport device 30 of the substrate processing unit PR during the period from the sheet substrate FB is sent out from the substrate supply unit SU to being wound up by the substrate recovery unit CL. While being transported, the components of the display element are sequentially formed on the sheet substrate FB by the processing device 10 .

When processing by the processing apparatus 10, the control part CONT performs alignment of the sheet|seat board|substrate FB using the alignment apparatus 50. For example, the alignment mark AM of the sheet substrate FB is detected by the alignment camera 51, and the driving amount of the roller device R of the conveying device 30 or the guide roller G (the first guide roller G1 and the second guide roller G1 and the second roller G1) are adjusted according to the detection result. The position, posture, rotation amount, rotation speed, etc. of the guide roller G2).

Next, the case of adjusting the position and posture of the guide roller G (the 1st guide roller G1 and the 2nd guide roller G2) is demonstrated.

Fig. 4 shows that from the state shown in Fig. 3, the first guide roller G1 and the second guide roller G2 are moved in a parallel direction (-X direction in the case of Fig. The state of the move. In this case, tension is applied to the sheet|seat board|substrate FB in the state folded back by the 1st guide roller G1 and the 2nd guide roller G2. Therefore, when the first guide roller G1 and the second guide roller G2 are moved as described above, the respective return positions are moved by an equal distance in the -X direction every time, and accordingly, the second part of the sheet substrate FB F2 moves in the -X direction.

In this way, even if the first guide roller G1 and the second guide roller G2 are moved, the direction of the force acting on the sheet substrate FB does not change, so it is possible to suppress or eliminate the difference in the conveyance direction of the sheet substrate FB acting on the sheet substrate FB. directional force. Therefore, for example, the second portion F2 of the sheet substrate FB can be moved in a direction perpendicular to the conveyance direction without causing wrinkles or the like on the sheet substrate FB. After the guide roller G moves, the control unit CONT moves the stage device ST in the X direction and the Y direction in accordance with, for example, the position of the second portion F2 of the sheet substrate FB.

In addition, regarding the conveyance direction of the sheet substrate FB, since the slack portion of the sheet substrate FB is provided on the upstream side of the first guide roller G1 and the downstream side of the second guide roller G2, even if the adjustment of the first guide roller G1 The position of the position and the position of the second guide roller G2 can also suppress or eliminate the force acting on the sheet substrate FB.

After adjusting the X-direction and Y-direction positions of the stage device ST, the control part CONT moves the stage device ST in the +Z direction, and brings the back surface of the sheet|seat board|substrate FB into contact with the support surface Sa. By this operation|movement, the back surface of the sheet|seat board|substrate FB is supported by the support surface Sa of stage apparatus ST. At this time, the control part CONT may make the sheet|seat board|substrate FB adsorb|suck to the adsorption|suction part 40 of the stage apparatus ST, for example. In addition, before the back surface of the sheet substrate FB is brought into contact with the support surface Sa of the stage device ST, the distance between the first guide roller G1 and the second guide roller G2 may be made close to each other so that the sheet substrate FB FB slack. By loosening the sheet substrate FB, the sheet substrate FB can be contacted and adsorbed to the support surface Sa of the stage device ST in a state where the sheet substrate FB has no tension. Moreover, the control part CONT adjusts the Z direction position of the sheet|seat board|substrate FB by moving the stage apparatus ST to +Z side, for example in the state which supports the sheet|seat board|substrate FB. In this case, the control part CONT moves the 1st guide roller G1 and the 2nd guide roller G2 to the Z direction depending on the movement amount of the stage apparatus ST to the Z direction.

After the Z-direction alignment of the sheet substrate FB is performed, the control unit CONT performs predetermined processing on the surface to be processed Fp of the second part F2 in the sheet substrate FB using the processing device 10 . When processing is performed while conveying the second portion F2 of the sheet substrate FB, the control unit CONT performs the above processing while adjusting the processing timing of the processing apparatus 10 and the conveyance timing of the sheet substrate FB. When the sheet substrate FB is attracted to the stage device ST, the control unit CONT moves the stage device ST in the substrate conveyance direction (for example, -Y direction) in accordance with the movement of the sheet substrate FB, for example.

By repeating the above series of processes on the sheet substrate FB, the components of the display element are formed on the processed surface Fp of the sheet substrate FB.

As described above, according to the present embodiment, since the first guide roller G1 is provided, the sheet substrate FB conveyed from the first direction (+X direction) is aligned with respect to the width direction (Y direction) of the sheet substrate FB. Bending obliquely, changing the conveying direction of the sheet substrate FB from the first direction to a second direction (-Y direction) different from the first direction; the second guide roller G2 will convey from the second direction The sheet substrate (sheet substrate conveyed in the second direction) FB is bent obliquely with respect to the width direction (X direction) of the sheet substrate FB, and the conveyance direction of the sheet substrate FB is changed from the second direction to the second direction. The third direction (+X direction) with two different directions; and the adjustment mechanism, which is located on the first guide roller G1 and the second guide roller G2, to adjust the position of the first guide roller G1 and the position of the second guide roller G2 respectively Position, adjust the position of the sheet substrate FB in a direction intersecting with the second direction; therefore, the force in a direction different from the conveying direction can be suppressed from acting on the sheet substrate FB. Accordingly, the sheet substrate FB can be conveyed with high conveyance accuracy while suppressing the formation of defects such as wrinkles on the sheet substrate FB.

Also, according to the present embodiment, since the second portion F2 between the first guide roller G1 and the second guide roller G2 in the sheet substrate FB is processed, it is possible to make the processing in the sheet substrate FB Partially efficient movement.

<Second embodiment>

Next, a second embodiment of the present invention will be described. In this embodiment, a description will be given using a substrate processing apparatus having the same configuration as the substrate processing apparatus FPA of the first embodiment. Hereinafter, when describing each component of the substrate processing apparatus, the same symbols as those used in the first embodiment are used.

In this embodiment, for example, an operation of rotating the first guide roller G1 and the second guide roller G2 in the θZ direction to incline the sheet substrate FB with respect to the conveyance direction will be described.

FIG. 5 is a diagram showing a conveyance state of the sheet substrate FB when the first guide roller G1 and the second guide roller G2 are rotated in the θZ direction. In FIG. 5 , it is shown that the first part F1 and the third part F3 of the sheet substrate FB are respectively maintained in the conveyance direction while maintaining the tension of the second part of the sheet substrate FB, and the first guide roller G1 is rotated. status.

For example, when only the first guide roller G1 is rotated while maintaining the conveyance direction of the first part F1, in order to avoid the change of the conveyance direction of the third part F3, the control part CONT makes the first guide roller G1 and the second guide roller G1 The guide roller G2 rotates synchronously around the θZ direction, and moves the second guide roller G2 in the −X direction. At this time, the rotation center of the second guide roller G2 may be offset relative to the rotation center of the first guide roller G1.

At this time, the control unit CONT sets the first guide roller G1 and the second guide roller G2 to match the timing, rotation direction, rotation angle, and rotation speed between the first guide roller G1 and the second guide roller G2. The two guide rollers G2 rotate. Moreover, the control part CONT moves the 2nd guide roller G2 to -X direction according to the amount which shifted by the rotation of the 1st guide roller G1 of the sheet|seat board|substrate FB.

According to this embodiment, by rotating the first guide roller G1 and the second guide roller G2 in the θZ direction, the second part F2 of the sheet substrate FB can be moved relative to the conveyance direction (-Y direction) of the second part F2. ) Tilt. Furthermore, since it is possible to prevent forces in directions different from the respective conveying directions from acting on the first portion F1 to the third portion F3 of the sheet substrate FB, it is also possible to prevent defects such as wrinkles from occurring on the sheet substrate FB. Thereby, while maintaining the conveyance state of the sheet|seat board|substrate FB, it becomes possible to perform conveyance with higher precision.

In addition, although this Example demonstrated the case where the X-direction position of the 2nd guide roller G2 was moved without changing the X-direction position of the 1st guide roller G1, it is not limited to this. For example, both of the first guide roller G1 and the second guide roller G2 may be moved in the X direction. Moreover, the rotation direction of the first guide roller G1 and the second guide roller G2 is not limited to the direction shown in FIG. 5 , for example, they may also be rotated in a direction opposite to the direction shown in FIG. 5 .

<Third embodiment>

Next, a third embodiment of the present invention will be described.

In this embodiment, the first guide and the second guide provided in the substrate processing apparatus are described, for example, using hammer-shaped members. In the substrate processing apparatus of the present embodiment, the constituent elements other than the first guide and the second guide have the same configuration as those of the above-described embodiments, and therefore are described with the same reference numerals.

FIG. 6 shows the configuration of the substrate processing apparatus FPA viewed from above (+Z direction).

As shown in FIG. 6, the conveyance apparatus 30 uses the 1st hammer-shaped member G3 as a 1st guide, and uses the 2nd hammer-shaped member G4 as a 2nd guide. Of course, a configuration in which the first hammer-shaped member G3 or the second hammer-shaped member G4 is applied to only one of the first guide and the second guide is also possible.

The first hammer-shaped member G3 and the second hammer-shaped member G4 are formed, for example, in a conical shape. Specifically, the first hammer-shaped member G3 and the second hammer-shaped member G4 have circular bottom surfaces (one end) 80a and 80b, respectively, and have circular bottom surfaces (one end) 80a and 80b from the bottom surfaces 80a and 80b to apexes (the other end) 81a and 81b. The side surface (guide surface) whose diameter gradually decreases.

The first hammer-shaped member G3 has a center axis C3 passing through the center point of the bottom surface 80a and the apex 81a. The first hammer-shaped member G3 is disposed so that its central axis C3 is parallel to the width direction (Y direction) of the first portion F1 of the sheet substrate FB. The drive mechanism 61 which rotates this hammer-shaped member G3 centering on the central axis C3 is provided in the 1st hammer-shaped member G3. The driving mechanism 61 also drives the first hammer-shaped member G3 in the X direction, the Y direction and the θZ direction. The first hammer-shaped member G3 guides the sheet substrate on the side surface (guide surface) G3a. The sheet|seat board|substrate FB is supported by the side surface G3a of the 1st hammer-shaped member G3 until the process-to-be-processed surface Fp of the 1st part F1 and the 2nd part F2 becomes parallel.

The second hammer-shaped member G4 has a central axis C4 passing through the center point of the bottom surface 80b and the apex 81b. The second hammer-shaped member G4 is arranged such that the central axis C4 is parallel to the width direction (X direction) of the second portion F2 of the sheet substrate FB. The drive mechanism 63 which rotates this hammer-shaped member G4 centering on the central axis C4 is provided in the 2nd hammer-shaped member G4. The driving mechanism 61 also drives the second hammer-shaped member G4 in the X direction, the Y direction and the θZ direction. The second hammer-shaped member G4 guides the sheet substrate on the side surface (guide surface) G4a. The sheet|seat board|substrate FB is supported by the side surface G4a of the 2nd hammer-shaped member G4 until the to-be-processed surface Fp becomes parallel in the 2nd part F2 and the 3rd part F3.

In the substrate processing apparatus FPA configured in this way, when moving, for example, the second portion F2 of the sheet substrate FB in the −X direction, the control unit CONT can make the first hammer-shaped member G3 and the second hammer-shaped member G4 In the -X direction, for example, each movement is equal to the movement amount. By the movement of the first hammer member G3 and the second hammer member G4, the winding position of the sheet substrate FB is moved in the -X direction, whereby the second portion F2 of the sheet substrate FB is moved in the -X direction .

As described above, according to this embodiment, even if the first hammer-shaped member G3 and the second hammer-shaped member G4 are moved, the force in a direction different from the conveyance direction can be suppressed from acting on the sheet substrate FB. The second part F2 of the sheet substrate FB is moved so that no wrinkles or the like are generated on the sheet substrate FB.

In addition, when using the first hammer-shaped member G3 and the second hammer-shaped member G4, as shown in FIG. The center axis C4 of the hammer member G3 is parallel. Also in this case, the same effect as that of the structure shown in FIG. 6 can be exhibited. Furthermore, compared with the structure shown in FIG. 6, since the movable range of the stage apparatus ST can be made wider, it can demonstrate that it is a preferable structure. Moreover, although the structure shown in FIG. 8 is a structure arrange|positioned so that the central axis C3 and the central axis C4 may become parallel to a Y direction, it is not limited to this. For example, it may arrange|position in the structure which the central axis C3 and the central axis C4 are parallel to the X direction.

Moreover, the shape of the 1st hammer-shaped member G3 and the 2nd hammer-shaped member G4 is not limited to the structure formed in a conical shape as shown, for example in FIG. 6 to FIG. 8 . For example, it is also applicable to the structure formed in other hammer shape (elliptic cone shape, polygonal hammer shape). Also, for example, a configuration in which a tapered portion is formed in a part of the cylindrical member and the sheet substrate FB is bent using the tapered portion can also be applied.

In addition, although each of the above-mentioned embodiments has been described as an example in which the first guide and the second guide are rotated, they are not limited thereto. For example, a cylindrical member fixed in the substrate processing apparatus FPA, a cylindrical member, and a hammer member can also be used. When such a cylindrical member, cylindrical member, and hammer-shaped member are used, the position adjustment of the sheet substrate FB can be performed by the same operation as the guide roller G, except that there is no rotational movement like the guide roller G. .

Also, when such a fixed cylindrical member, cylindrical member, and hammer-shaped member are used, only the guide surface supporting the back surface of the sheet substrate FB can be left, and the other parts can be removed.

In addition, in each of the above-mentioned embodiments, when the cylindrical member, the cylindrical member, and the hammer-shaped member are used as the first guide and the second guide, although the sheet substrate FB is brought into contact with these first guides, The configuration of the component and the second guide is described as an example, but it is not limited thereto. For example, the sheet substrate FB and the guide may be in a non-contact state. As such a configuration, for example, a gas layer is formed on the surface of the first guide and the second guide, and the sheet substrate FB is held through the gas layer.

Also, in the above-mentioned embodiment, the alignment camera 51 is arranged in the part between the first guide roller G1 and the second guide roller G2 in the sheet substrate FB, and the detection result of the alignment camera 51 is used to drive the first guide roller. The configuration of the guide roller G1 and the second guide roller G2 has been described as an example. In addition, other alignment cameras may be assigned to at least one of, for example, the upstream side of the first guide roller G1 in the conveyance direction and the downstream side of the second guide roller G2 in the conveyance direction. In this case, an adjustment mechanism that adjusts the position of the sheet substrate FB based on the detection result of a separately arranged alignment camera may be provided separately. In addition, as such an adjustment mechanism, for example, a roller device R or other configurations can be used.

Moreover, although the above-mentioned embodiment demonstrated the structure which performed the positional alignment of the sheet|seat board|substrate FB using the alignment mark AM formed in the sheet board|substrate FB as an example, it is not limited to this. For example, even when the alignment mark is not formed on the sheet substrate FB, the alignment camera 51 may detect both sides of the sheet substrate FB parallel to the conveying direction, and use the detection results to carry out the alignment of the sheet substrate FB. The composition of the positional alignment.

Moreover, although the above-mentioned embodiment demonstrated the case where the support surface Sa which supports the sheet|seat board|substrate FB in the stage apparatus ST is formed as a flat surface, it does not restrict to this. For example, the present invention is applicable regardless of whether the support surface Sa is a concave or convex curved surface. Moreover, you may arrange|position a roller in stage apparatus ST, and use part of the surface of this roller as support surface Sa.

Moreover, although the above-mentioned embodiment demonstrated the case where the sheet substrate FB is adsorb|sucked to the stage apparatus ST after aligning the position of the sheet substrate FB, it does not restrict to this. For example, before the alignment of the sheet substrate FB, for example, the sheet substrate FB may be adsorbed to the adsorption unit 40 of the stage device ST. In this case, when aligning the sheet substrate FB, for example, the driving of the stage device ST is synchronized with the driving of the first guide roller G1 and the second guide roller G2, while maintaining the force acting on the sheet substrate FB. The direction of the force is adjusted while adjusting the position of the sheet substrate FB.

The first guide and the second guide described in the above-mentioned embodiments are not limited to positions sandwiching the processing apparatus 10, but may be appropriately arranged on the conveyance path of the sheet substrate FB in the substrate processing apparatus FPA. In addition, in the above-mentioned embodiment, the processing devices 10 disposed between the first guide and the second guide may be singular or plural.

In addition, it is also possible to make a not-shown slack between the first guide roller G1 and the roller device R on the upstream side of the first guide roller G1, and to make a slack between the second guide roller G2 and the downstream side of the second guide roller G2. Make a slack between the roller device R. Furthermore, a configuration may be employed in which the upstream roller device R and the downstream roller device R are brought into contact with the front and back surfaces of the sheet substrate FB to pinch the sheet substrate FB.

<Fourth embodiment>

Next, a fourth embodiment of the present invention will be described. FIG. 9 is a diagram showing the configuration of a substrate processing apparatus FPA according to a fourth embodiment of the present invention. In the following description, the same reference numerals are given to the same or equivalent components as those of the above-mentioned embodiment, and the description thereof will be simplified or omitted.

In this embodiment, as shown in FIG. 9 , the substrate processing unit PR transports the sheet substrate FB supplied from the substrate supply unit SU to the substrate recovery unit CL, and performs processing on the surface Fp of the sheet substrate FB during the transport process. deal with. The substrate processing unit PR has, for example, a processing device 10 , a transfer device 30 , an alignment device (not shown), and the like.

The processing apparatus 10 has various processing units (for example, a processing unit 10A and a processing unit 10B, etc.) for forming, for example, an organic EL element on the surface to be processed Fp of the sheet substrate FB. As such a processing section, for example, a partition forming device for forming partition walls on the surface to be processed Fp, an electrode forming device for forming electrodes for driving organic EL elements, and a light emitting device for forming a light emitting layer are provided. layer forming device, etc. Specifically, there are droplet coating devices (such as inkjet coating devices, spin coating coating devices, etc.), film forming devices such as vapor deposition devices, sputtering devices, exposure devices, developing devices, surface coating devices, etc. Reforming device, cleaning device, etc. These respective devices are appropriately provided, for example, on the conveyance path of the sheet substrate FB.

The conveying device 30 includes a roller device R for conveying, for example, the sheet substrate FB to the substrate collecting part CL in the substrate processing part PR, and a roller device R arranged on the upstream side and the downstream side of the processing device 10 so as to sandwich the processing device 10 . The guide roller G. For example, a plurality of roller devices R are installed along the conveyance path of the sheet substrate FB. A drive mechanism (not shown) is attached to at least some of the roller devices R among the plurality of roller devices R. The sheet|seat board|substrate FB is conveyed in the X-axis direction by the rotation of such roller apparatus R. Among the plurality of roller devices R, for example, some roller devices R may be provided so as to be movable in a direction perpendicular to the conveyance direction. Moreover, the sheet|seat board|substrate FB is conveyed in +X direction in the whole board|substrate processing part PR.

FIG. 10 is a schematic diagram showing the configuration of the processing device 10 and the guide roller G. As shown in FIG. In addition, FIG. 10 has shown the structure when viewing the substrate processing apparatus FPA from above (+Z direction).

As shown in FIG. 10, the guide roller G has the 1st guide roller G21, the 2nd guide roller G22, the 3rd guide roller G23, and the 4th guide roller G24. The first guide roller G21 to the fourth guide roller G24 are sequentially arranged from the upstream side to the downstream side of the conveyance path of the sheet substrate FB. The 1st guide roller G21 - the 4th guide roller G24 are divided into columnar shape, cylindrical shape, etc., for example.

The first guide roller G21 is arranged so as to face the first part of the sheet substrate FB conveyed in the first direction (+X direction) from the upstream side of the first guide roller G21 (before being guided by the first guide roller G21). The central axis C1 of the short side direction (width direction: Y direction here) of the first guide roller G21 and the upstream side of the sheet substrate FB F1 is inclined to the oblique direction. The 1st guide roller G21 guides the back surface of the sheet|seat board|substrate FB on the roller surface (guide surface) G21a. In addition, the sheet|seat board|substrate FB conveyed from the upstream side of the 1st guide roller G21 is the state which faced the back surface Fq of the sheet|seat board|substrate FB upwards in FIG.

The first guide roller G21 bends the first portion F1 of the sheet substrate FB obliquely with respect to the short side direction of the sheet substrate FB, and folds the sheet substrate FB back along the roller surface of the first guide roller G21, thereby The conveyance direction of the sheet|seat board|substrate FB is switched from the said 1st direction to a 2nd direction (-Y direction). In this embodiment, the first guide roller G21 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while twisting through the first guide roller G21. In the sheet|seat board|substrate FB, the peripheral surface of the part inclined with respect to a conveyance direction (1st direction) can be formed in the part guided by the 1st guide roller G21. The sheet|seat board|substrate FB which has the advancing direction of a 1st direction (+X direction) enters into 1st guide roller G21. The sheet|seat board|substrate FB which has the advancing direction of a 2nd direction (-Y direction) comes out from the 1st guide roller G21. In this embodiment, the second direction is, for example, a direction orthogonal to the first direction. The 1st guide roller G21 folds back the sheet|seat board|substrate FB, supporting the back surface Fq of the sheet|seat board|substrate FB. For example, the sheet|seat board|substrate FB folded back by the 1st guide roller G21 has the surface to be processed Fp facing upward (processing apparatus 10 side) in a 2nd direction. Moreover, the sheet|seat board|substrate FB is supported by the roll surface G21a of this 1st guide roll G21 until the 1st part F1 and the 2nd part F2 mentioned later are parallel to each other before and after the 1st guide roll G21.

The second guide roller G22 is disposed so as to face the second portion of the sheet substrate FB conveyed in the second direction from the upstream side of the second guide roller G22 (the portion before being guided by the second guide roller G22, That is, with respect to the second guide roller G22 and the upstream side portion (F2) of the sheet substrate FB, the central axis C2 is inclined in an oblique direction. The 2nd guide roller G22 guides the back surface of the sheet|seat board|substrate FB on the roller surface (guide surface) G22a. In addition, the sheet|seat board|substrate FB conveyed from the upstream side of the 2nd guide roller G22 is the state which the to-be-processed surface Fp of the sheet|seat board|substrate FB faces upward in FIG. 10 as mentioned above.

The second guide roller G22 bends the second portion F2 of the sheet substrate FB to an oblique direction relative to the short side direction of the sheet substrate FB, and folds the sheet substrate FB back along the roller surface of the second guide roller G22. This changes the conveyance direction of the sheet|seat board|substrate FB from the said 2nd direction to the 3rd direction (+X direction). In this embodiment, the second guide roller G22 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while twisting through the second guide roller G22. In the sheet|seat board|substrate FB, the partial peripheral surface inclined with respect to a conveyance direction (2nd direction) can be formed in the part guided by the 2nd guide roller G22. The sheet|seat board|substrate FB which has the advancing direction of a 2nd direction (-Y direction) enters into 2nd guide roller G22. The sheet substrate FB having the traveling direction of the third direction (+X direction) comes out from the second guide roller G22. In this embodiment, the third direction is, for example, a direction parallel to the first direction. The second guide roller G22 folds back the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB. For example, the sheet substrate FB returned by the second guide roller G22 is in a state in which the back surface Fq faces upward and the surface to be processed Fp faces downward in the third direction. Moreover, the sheet|seat board|substrate FB is supported by the roll surface G22a of this 2nd guide roll G22 until the 2nd part F2 and the 3rd part F3 mentioned later are parallel to each other before and behind the 2nd guide roll G22.

The third guide roller G23 is disposed so as to face the third portion of the sheet substrate FB (guided by the third guide roller G23 ) conveyed in the third direction (+X direction) from the upstream side of the third guide roller G23. The central axis C3 of the front portion, that is, the short side direction (width direction: Y direction here) with respect to the third guide roller G23 and the upstream side portion of the sheet substrate FB F3 is inclined obliquely. The 3rd guide roller G23 guides the back surface of the sheet|seat board|substrate FB on the roller surface (guide surface) G23a. In addition, the sheet|seat board|substrate FB conveyed from the upstream side of the 3rd guide roller G23 is the state which faced the back surface Fq of the sheet|seat board|substrate FB upwards as mentioned above in FIG.

The third guide roller G23 bends the third portion F3 of the sheet substrate FB to an oblique direction relative to the short side direction of the sheet substrate FB, and folds the sheet substrate FB back along the roller surface of the third guide roller G23, thereby This changes the conveyance direction of the sheet|seat board|substrate FB from the said 3rd direction to a 4th direction (+Y direction). In this embodiment, the third guide roller G23 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB can be bent while being twisted through the third guide roller G23. In the sheet|seat board|substrate FB, the partial peripheral surface inclined with respect to a conveyance direction (third direction) can be formed in the part guided by the 3rd guide roller G23. The sheet substrate FB having the advancing direction of the third direction (+X direction) enters the third guide roller G23. The sheet substrate FB having the advancing direction of the fourth direction (+Y direction) comes out from the third guide roller G23. In this embodiment, the fourth direction is, for example, a direction perpendicular to the first direction and the third direction, and a direction opposite to the second direction. The third guide roller G23 folds back the sheet substrate FB while supporting the back surface Fq of the sheet substrate FB. For example, the sheet substrate FB turned back by the third guide roller G23 can be processed by the processing apparatus 10 with the surface to be processed Fp facing upward in the fourth direction. Moreover, the sheet|seat board|substrate FB is supported by the roll surface G23a of this 3rd guide roll G23 until the 3rd part and the 4th part mentioned later are parallel to each other before and after the 3rd guide roll G23.

The fourth guide roller G24 is disposed so as to face the fourth portion (guided by the fourth guide roller G24) of the sheet substrate FB conveyed in the fourth direction (+Y direction) from the upstream side of the fourth guide roller G24. The leading part, that is, the upstream side part) F4 of the fourth guide roller G24 and the sheet substrate FB, has its central axis C4 inclined in an oblique direction. The 4th guide roller G24 guides the back surface of the sheet|seat board|substrate FB on the roller surface (guide surface) G24a. In addition, the sheet substrate FB conveyed from the upstream side of the fourth guide roller G24 is in a state in which the surface to be processed Fp of the sheet substrate FB faces upward in FIG. 10 as described above.

The fourth guide roller G24 bends the fourth portion F4 of the sheet substrate FB to an oblique direction with respect to the short side direction of the sheet substrate FB, and folds the sheet substrate FB back along the roller surface of the fourth guide roller G24, thereby The conveyance direction of the sheet|seat board|substrate FB is switched from the said 4th direction to a 5th direction (+X direction). In this embodiment, the fourth guide roller G24 can substantially bend the sheet substrate FB obliquely. The sheet substrate FB is bent while being twisted by the fourth guide roller G24. In the sheet|seat board|substrate FB, the partial peripheral surface inclined with respect to a conveyance direction (4th direction) can be formed in the part guided by the 4th guide roller G24. The sheet substrate FB having the advancing direction of the fourth direction (+Y direction) enters the fourth guide roller G24. The sheet substrate FB having the traveling direction of the fifth direction (+X direction) comes out from the fourth guide roller G24. In this embodiment, the fifth direction is a direction parallel to, for example, the first direction and the third direction. The 4th guide roller G24 turns back the said sheet|seat board|substrate FB, supporting the back surface Fq of the sheet|seat board|substrate FB. For example, the sheet|seat board|substrate FB turned back by the 4th guide roller G24 will be in the state which the back surface Fq faces upwards, and the surface to be processed Fp faces downwards in a 5th direction. Also, the sheet substrate FB is supported on the roller surface G24a of the fourth guide roller G24 until the fourth part F4 and the fifth part F5 (guided by the fourth guide roller G24) are in front and rear of the fourth guide roller G24. The part behind, that is, the part on the downstream side with respect to the 4th guide roller G24 and the sheet|seat board|substrate FB) is parallel to each other.

The conveyance direction of the sheet substrate FB conveyed by the four guide rollers G21 to G24 is +X direction (first direction) in the first part F1, -Y direction (second direction) in the second part F2, and -Y direction (second direction) in the second part F2. The third part F3 is again in the +X direction (third direction), the fourth part F4 is in the +Y direction (fourth direction), and the fifth part F5 is in the +X direction (fifth direction).

At this time, the back surface Fq of the sheet substrate FB of the sheet substrate FB faces upward in the first direction, the third direction, and the fifth direction, and the processed surface Fp of the sheet substrate FB faces in the second direction and the third direction. above.

Therefore, before the processed surface Fp of the sheet substrate FB is processed by the processing apparatus 10 (processing part 10A, processing part 10B), the processed surface Fp faces downward, so the impact of dust and the like on the processed surface Fp can be reduced. attached.

As mentioned above, the sheet|seat board|substrate FB is conveyed on the crank-shaped path which makes the 1st guide roller G21, the 2nd guide roller G22, the 3rd guide roller G23, and the 4th guide roller G24 each a curved angle. In addition, the sheet substrate FB bent by the fourth guide roller G24 is conveyed in the fifth direction, that is, the conveyance direction of the sheet substrate FB that is the entire substrate processing part PR.

Furthermore, as shown in FIG. 10 , the processing device 10 has a processing unit 10A and a processing unit 10B. The processing part 10A is provided between the 1st guide roller G21 and the 2nd guide roller G22 in a Y direction, for example, and is arrange|positioned facing the to-be-processed surface Fp of the 2nd part F2 of the sheet|seat board|substrate FB. The processing unit 10B is, for example, disposed between the third guide roller G23 and the fourth guide roller G24 in the Y direction, and is arranged to face the processed surface Fp of the fourth portion F4 of the sheet substrate FB. In this embodiment, the processing unit 10A and the processing unit 10B perform, for example, different processes.

The processing unit 10A is connected to the driving mechanism 11, for example, and is provided so as to be movable in, for example, the X direction and the Y direction. For example, the processing part 10A is movable between the first position A1 on the second part F2 and the second position A2 on the fourth part F4 (movement in the X direction). Moreover, 10 A of processing parts are movable (Y direction movement) on the 2nd part F2 and the 4th part F4.

The processing part 10B is connected to the drive mechanism 12, for example, and is installed so that it can move in the X direction and the Y direction, for example. For example, the processing unit 10B can move between the first position B1 on the fourth part F4 and the second position B2 on the second part F2 (movement in the X direction). Moreover, the processing part 10B can move (movement in a Y direction) on the 2nd part F2 and the 4th part F4.

The 1st guide roller G21 - the 4th guide roller G24 are supported by the bearing member etc. which are not shown in figure, for example. The driving mechanism (not shown) which rotates the 1st guide roller G21 - the 4th guide roller G24 is provided in each bearing member. The driving mechanism rotates the first guide roller G21 to the fourth guide roller G24 around the central axes C1 to C4, respectively.

Moreover, it is good also as the structure which arrange|positioned the stage apparatus in the -Z side of the 2nd part F2 and the 4th part F4 in the sheet|seat board|substrate FB. This stage device supports parts to be processed by the processing unit 10A and the processing unit 10B. The support surface for supporting the second part F2 and the fourth part F4 in the stage device may be a flat surface or a curved surface.

An alignment device (not shown) performs an alignment operation on the sheet substrate FB. This alignment device has an alignment camera (not shown) for detecting the positional state of the sheet substrate FB, and an alignment camera (not shown) in the X direction, Y direction, Z direction, θX direction, θY direction, and θZ direction based on the detection results of the alignment camera. An adjustment mechanism (not shown) for finely adjusting the direction of the sheet substrate FB. Moreover, for example, the alignment mark which is not shown is formed in the to-be-processed surface Fp of the sheet|seat board|substrate FB. The alignment marks are formed on the surface to be processed Fp, for example, both ends in the short-side direction of the sheet substrate FB.

The substrate processing apparatus FPA configured as described above manufactures display elements (electronic elements) such as organic EL elements and liquid crystal display elements by a roll-to-roll system under the control of the control unit CONT. Hereinafter, a process for manufacturing a display element using the substrate processing apparatus FPA configured as described above will be described.

First, the strip-shaped sheet substrate FB wound on a drum is attached to the substrate supply unit SU. The control unit CONT rotates the drum so that the sheet substrate FB is sent out from the substrate supply unit SU in this state. And the sheet|seat board|substrate FB which passed through the board|substrate processing part PR is wound up by the roll of the board|substrate recovery part CL. By controlling the substrate supply unit SU and the substrate recovery unit CL, the surface to be processed Fp of the sheet substrate FB can be continuously conveyed with respect to the substrate processing unit PR.

The control unit CONT properly transports the sheet substrate FB in the substrate processing unit PR by the transport device 30 of the substrate processing unit PR during the period from the sheet substrate FB is sent out from the substrate supply unit SU to being wound up by the substrate recovery unit CL. While conveying, the constituent elements of the display element are sequentially formed on the sheet substrate FB by the processing apparatus 10 (each processing section including the processing section 10A and the processing section 10B).

In this case, as shown in FIG. 10 , the sheet substrate FB is held in a state where the back surface Fq is supported by the first guide roller G21, the second guide roller G22, the third guide roller G23, and the fourth guide roller G24. Turn back. Therefore, before and after the processing unit 10A and the processing unit 10B, the sheet substrate FB is conveyed without the surface to be processed Fp being in contact with the above-mentioned four guide rollers G21 to G24.

In addition, the sheet substrate FB is conveyed in such a manner that the surfaces to be processed Fp of the second part F2 and the fourth part F4 corresponding to the processing part 10A and the processing part 10B face the processing part 10A and the processing part 10B. . In this case, it is, for example, a state in which the second part F2 and the fourth part F4 are aligned in the X direction. Therefore, the processing unit 10A that processes the processed surface Fp of the second portion F2 can process the processed surface Fp of the fourth portion F4, and conversely, the processing portion 10B that processes the processed surface Fp of the fourth portion F4 can also process the second The processed surface Fp of the part F2.

Also, according to the present embodiment, since the substrate processing apparatus FPA has the above-mentioned first guide roller G21 to fourth guide roller G24, the conveyance direction of the sheet substrate FB can be specified so that the sheet substrate FB can be conveyed to The conveyance direction (for example, +X direction) of the whole substrate processing apparatus FPA.

Also, since the second part F2 and the fourth part F4 in the sheet substrate FB are in a state where the surface to be processed Fp is aligned in the direction of the processing parts 10A and 10B, the processing parts 10A and 10B are easy to be separated between the second part F2 and the fourth part. Move between sections F4. Thereby, various processing operations can be performed.

In addition, although the present embodiment has described the configuration in which the processing unit 10A processes the processed surface Fp of the second portion F2, and the processing unit 10B processes the processed surface Fp of the fourth portion F4, the configuration is not limited to this configuration. For example, when the processing unit 10B is omitted, the fourth guide roller G24 may be omitted, and the sheet substrate FB may be conveyed by the first guide roller G21, the second guide roller G22, and the third guide roller G23.

As described above, according to this embodiment, since the conveying device 30 is configured to include at least three of the first guide roller G21, the second guide roller G22, and the third guide roller G23, it is possible to support only the sheet. Simultaneously with the back surface Fq of the substrate FB, the sheet substrate FB is conveyed. Thereby, the said sheet|seat board|substrate FB can be conveyed, preventing contact with the to-be-processed surface Fp of the sheet|seat board|substrate FB from the outside.

<Fifth Embodiment>

Next, a fifth embodiment of the present invention will be described.

In this embodiment, a structure using, for example, a hammer-shaped member as the first guide to the fourth guide provided in the substrate processing apparatus will be described. In the following description, the same reference numerals are given to the same or equivalent components as those of the above-mentioned embodiment, and the description thereof will be simplified or omitted.

FIG. 11 shows the configuration of the substrate processing apparatus FPA viewed from above (+Z direction).

As shown in FIG. 11, the conveyance apparatus 30 uses the 1st hammer-shaped member G25 as a 1st guide, and uses the 2nd hammer-shaped member G26 as a 2nd guide. Also, the third hammer G27 is used as the third guide, and the fourth hammer G28 is used as the fourth guide. Of course, only a part of the first to fourth guides may use hammer-shaped members.

FIG. 12 is a diagram showing an example of the configuration of the first hammer member G25. As shown in FIGS. 11 and 12 , the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are each formed in a conical shape. Specifically, the first hammer-shaped member G25 to the fourth hammer-shaped member G28 each have a circular bottom surface (one end) 80 and an apex (the other end) 81, and have an outer diameter formed from the bottom surface 80 to the apex 81. Sides (leading faces) with decreasing dimensions. The first hammer-shaped member G25 to the fourth hammer-shaped member G28 respectively have central axes C5 to C8 passing through the center point of the bottom surface 80 and the apex 81 .

The first hammer-shaped member G25 is disposed so that the central axis C5 is parallel to the width direction (Y direction) of the first portion F1 of the sheet substrate FB. The drive mechanism (not shown) which rotates this 1st hammer-shaped member G25 centering on the central axis C5 is provided in the 1st hammer-shaped member G25. The first hammer-shaped member G25 guides the sheet substrate on the side surface (guide surface) G25a. The sheet|seat board|substrate FB is supported by the side surface G25a of the 1st hammer-shaped member G25 until the to-be-processed surface Fp becomes parallel to the 1st part F1 and the 2nd part F2.

The second hammer-shaped member G26 is disposed so that the central axis C6 is parallel to the width direction (X direction) of the second portion F2 of the sheet substrate FB. The drive mechanism (not shown) which rotates this 2nd hammer-shaped member G26 centering on the central axis C6 is provided in the 2nd hammer-shaped member G26. The second hammer-shaped member G26 guides the sheet substrate on the side surface (guide surface) G26a. The sheet|seat board|substrate FB is supported by the side surface G26a of the 2nd hammer-shaped member G26 until the surface to be processed Fp becomes parallel with the 3rd part F3 in the 2nd part F2.

The third hammer-shaped member G27 is arranged such that the central axis C7 is parallel to the width direction (Y direction) of the third portion F3 of the sheet substrate FB. The third hammer-shaped member G27 is provided with a drive mechanism (not shown) that rotates the third hammer-shaped member G27 about the central axis C7. The third hammer-shaped member G27 guides the sheet substrate on the side surface (guide surface) G27a. The sheet|seat board|substrate FB is supported by the side surface G27a of the 3rd hammer-shaped member G27 until the surface to be processed Fp becomes parallel with the 4th part F4 in the 3rd part F3.

The fourth hammer-shaped member G28 is disposed so that the central axis C8 is parallel to the width direction (X direction) of the fourth portion F4 of the sheet substrate FB. The drive mechanism (not shown) which rotates this 4th hammer-shaped member G28 centering on the central axis C8 is provided in the 4th hammer-shaped member G28. The fourth hammer-shaped member G28 guides the sheet substrate on the side surface (guide surface) G28a. The sheet substrate FB is supported by the side surface G28a of the fourth hammer G28 until the surface to be processed Fp becomes parallel to the fifth part F5 in the fourth part F4.

As described above, according to this embodiment, since the sheet substrate FB is folded back by the first hammer-shaped member G25 to the fourth hammer-shaped member G28, the back surface Fq of the sheet substrate FB can also be supported in this case. The sheet substrate FB is conveyed. Thereby, the said sheet|seat board|substrate FB can be conveyed, preventing contact with the to-be-processed surface Fp of the sheet|seat board|substrate FB from the outside.

In addition, when using the first hammer-shaped member G25 to the fourth hammer-shaped member G28, for example, as shown in FIG. C8 is parallel, and the central axis C6 of the second hammer-shaped member G26 is parallel to the central axis C7 of the third hammer-shaped member G27.

With this configuration, the same effect as that of the configuration shown in FIG. 11 can be exhibited. Furthermore, compared with the structure shown in FIG. 11, the distance between the 2nd part F2 of the sheet|seat board|substrate FB and the 4th part F4 becomes short. Therefore, the processing parts 10A and 10B are easy to move between the second part F2 and the fourth part F4, which is a preferable configuration.

In addition, the shapes of the first hammer-shaped member G25 to the fourth hammer-shaped member G28 are preferably formed in a conical shape as shown in FIGS. polygonal hammer shape). Also, for example, a tapered portion may be formed in a part of the cylindrical member, and the sheet substrate FB may be bent using the tapered portion.

In addition, although the above-mentioned each embodiment demonstrated the structure which rotates the 1st guide to the 4th guide as an example, it is not limited to this. For example, a cylindrical member fixed in the substrate processing apparatus FPA, a cylindrical member, and a hammer member can also be used. When such a cylindrical member, cylindrical member, and hammer-shaped member are used, the position adjustment of the sheet substrate FB can be performed by the same operation as the guide roller G, except that there is no rotational movement like the guide roller G. .

Also, when such a fixed cylindrical member, cylindrical member, and hammer-shaped member are used, only the guide surface supporting the back surface of the sheet substrate FB can be left, and the other parts can be removed.

Also, in each of the above-mentioned embodiments, when using the guide roller G and the cylindrical member, the cylindrical member, and the hammer-shaped member as the first to fourth guides, although the sheet substrate FB is brought into contact with the The configuration of these first to fourth guides has been described as an example, but is not limited thereto. For example, a non-contact state may be employed between the sheet substrate FB and each guide. Such a configuration includes, for example, a configuration in which a gas layer is formed on the surfaces of the first to fourth guides, and the sheet substrate FB is held through the gas layer.

The first to fourth guides described in the above embodiments are not limited to being arranged near the processing apparatus 10 on the transport path of the sheet substrate FB, for example, and may be appropriately arranged at other positions. In addition, the configurations of the first guide to the fourth guide in the above-mentioned embodiment may be configured to be repeatedly arranged in the X direction, for example.

In addition, although the above-mentioned embodiment has been described as an example where different processing is performed between the processing unit 10A and the processing unit 10B, it is not limited thereto. For example, it is also possible to apply the present invention when the same processing is performed between the processing unit 10A and the processing unit 10B.

Also, in the above-mentioned embodiment (for example, referring to FIG. 11 ), although the third guide member is used to turn the sheet substrate FB back in the +Y direction, so that the second part F2 and the fourth part F4 of the sheet substrate FB are aligned in the X direction. The configuration adjacent to each other is not limited thereto, and the sheet substrate FB may be folded back in the direction opposite to the second portion F2 (for example, -Y direction in FIG. 10 ) using a third guide, for example.

In addition, in the above embodiment, although the first guide is used to turn back until the first part F1 and the second part F2 are parallel to each other, it can also be turned back so that the second part F2 is higher or lower than the first part F1. The relationship between the second part F2 and the third part F3 , the third part F3 and the fourth part F4 , the fourth part F4 and the fifth part F5 is not limited to be parallel.

In addition, although the above-mentioned embodiment has described that the relationship between the first direction and the third direction, and the relationship between the second direction and the fourth direction are parallel to each other, they are not limited to being parallel, and directions other than parallel may also be used.

Also, the roller device R on the upstream side of the first guide roller G21 functions as a transport roller before the processing of the surface of the sheet substrate FB is performed, so that the roller device R can be brought into contact with the surface of the sheet substrate FB. The front surface and the back surface sandwich the sheet substrate FB. In addition, after all the processes are performed on the surface to be processed of the sheet substrate FB, the downstream side of the fourth guide roller G24 may contact the back surface and the surface of the sheet substrate FB and sandwich the sheet substrate FB. Configure the roller unit R.

The technical scope of the present invention is not limited to the above-mentioned embodiments, and can be appropriately changed within the scope not departing from the gist of the present invention.

Claims (41)

1. a carrying device, is characterized in that, is to transport banded sheet material substrate, and described carrying device comprises:

First guiding element, after the described sheet material substrate that comes from first direction conveyance in addition oblique bending, is transformed into the second direction different from described first direction by the conveyance direction of described sheet material substrate from described first direction;

Second guiding element, after the described sheet material substrate that comes from the conveyance of described second direction in addition oblique bending, is transformed into the third direction different from described second direction by the conveyance direction of described sheet material substrate from described second direction; And

Multiple adjusting mechanism, is located at described first guiding element and described second guiding element respectively, in order to the position of the position and described second guiding element that adjust described first guiding element, to adjust the position of the described sheet material substrate in the direction intersected with described second direction;

First, second guiding element described, all relative to the long side direction of described sheet material substrate and conveyance direction and Width tilted configuration, and configure in the mode becoming the line of centers be parallel to each other, and be provided separately in the conveyance direction of described sheet material substrate, conveyance of by this described sheet material substrate being turned back;

Between first, second guiding element described, be provided with the bearing table device of the areal of support with the back side of supporting described sheet material substrate, carry out the processing equipment of set process in the processed surface part of the described sheet material substrate supported by described areal of support and detect the aligning video camera being formed in each alignment mark of the Width both sides of described sheet material substrate;

Described multiple adjusting mechanism, according to the mark testing result of described aligning video camera, make first, second guiding element described in the face parallel with the processed surface of described sheet material substrate, move in parallel toward equidirectional with equal amount of movement at every turn, or, described first guiding element is rotated in the face parallel with the processed surface of described sheet material substrate, and the amount making described second guiding element offset because of this rotation according to described sheet material substrate moves, carry out position skew adjustment or the tilt adjustments of the Width of the described sheet material substrate portion supported by described areal of support by this.

2. carrying device according to claim 1, is characterized in that, described first guiding element has cylindrical element, and the Width that this cylindrical element possesses relatively described sheet material substrate extends the center shaft of tilted direction.

3. carrying device according to claim 2, is characterized in that, described first guiding element possesses the driver train that described cylindrical element is rotated centered by described center shaft.

4. carrying device according to claim 1, it is characterized in that, described first guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, along with the end from described center shaft is gradually little toward the other end outside dimension.

5. carrying device according to claim 4, is characterized in that, described first guiding element possesses the driver train that described hammer shape component is rotated centered by described center shaft.

6. carrying device according to claim 1, is characterized in that, described second guiding element has cylindrical element, and the Width that this cylindrical element possesses relatively described sheet material substrate extends the center shaft of tilted direction.

7. carrying device according to claim 6, is characterized in that, described second guiding element possesses the driver train that described cylindrical element is rotated centered by described center shaft.

8. carrying device according to claim 1, it is characterized in that, described second guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

9. carrying device according to claim 8, is characterized in that, described second guiding element possesses the driver train that described hammer shape component is rotated centered by described center shaft.

10. the carrying device according to claim arbitrary in claim 1 to 9, it is characterized in that, described first guiding element has guiding face, described sheet material substrate bends by this guiding face, until toward the described sheet material substrate of described second direction conveyance face, with transport from described first direction and the face of described sheet material substrate parallel to each other.

11. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described second guiding element has guiding face, described sheet material substrate bends by this guiding face, until toward the described sheet material substrate of described third direction conveyance face, with transport from described second direction and the face of described sheet material substrate parallel to each other.

12. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described second direction is the direction intersected with described first direction.

13. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described third direction is the direction parallel with described first direction.

14. carrying devices according to claim arbitrary in claim 1 to 9, it is characterized in that, described adjusting mechanism comprises:

First adjustment part, adjusts the position of described first guiding element;

Second adjustment part, adjusts the position of described second guiding element; And

Control part, controls described first adjustment part and described second adjustment part.

15. carrying devices according to claim 14, is characterized in that, described control part controls described first guiding element and described second guiding element makes described sheet material substrate tilt.

16. carrying devices according to claim arbitrary in claim 1 to 9, is characterized in that, described bearing table device, are arranged to support described sheet material substrate and at least removable in the direction promoting described sheet material substrate.

17. carrying devices according to claim 16, is characterized in that, described bearing table device comprises: adsorption section, and this adsorption section is by the described areal of support of described sheet material substrate adsorption in the described sheet material substrate of supporting.

18. 1 kinds of substrate board treatments, is characterized in that, described substrate board treatment comprises:

Carrying device, the sheet material substrate that conveyance is banded; And

Processing equipment, carries out set process to described sheet material substrate;

Described carrying device uses the carrying device any one of claim 1 to 17.

19. substrate board treatments according to claim 18, is characterized in that, described processing equipment is configured to carry out described set process to described sheet material substrate meta in the region between described first guiding element and described second guiding element of described carrying device.

20. 1 kinds of carrying devices, is characterized in that, the sheet material substrate that described carrying device conveyance is banded, and described carrying device comprises:

First guiding element, supports the back side of described sheet material substrate, by come from first direction conveyance the in addition oblique bending of described sheet material substrate, so that the conveyance direction of described sheet material substrate is transformed to the second direction different from described first direction from described first direction;

Second guiding element, supports the back side of described sheet material substrate, makes the next oblique bending of described sheet material substrate from described second direction conveyance, so that the conveyance direction of described sheet material substrate is converted to the third direction different from described second direction from described second direction;

3rd guiding element, supports the back side of described sheet material substrate, makes the next oblique bending of described sheet material substrate from described third direction conveyance, so that the conveyance direction of described sheet material substrate is converted to the fourth direction different from described third direction from described third direction; And

Multiple adjusting mechanism, is located at described first guiding element and described second guiding element respectively, in order to the position of the position and described second guiding element that adjust described first guiding element, to adjust the position of the described sheet material substrate in the direction intersected with described second direction;

First, second guiding element described, all relative to the long side direction of described sheet material substrate and conveyance direction and Width tilted configuration, and configure in the mode becoming the line of centers be parallel to each other, and be provided separately in the conveyance direction of described sheet material substrate, conveyance of by this described sheet material substrate being turned back;

Between first, second guiding element described, be provided with the bearing table device of the areal of support with the back side of supporting described sheet material substrate, carry out the processing equipment of set process in the processed surface part of the described sheet material substrate supported by described areal of support and detect the aligning video camera being formed in each alignment mark of the Width both sides of described sheet material substrate;

Described multiple adjusting mechanism, according to the mark testing result of described aligning video camera, make first, second guiding element described in the face parallel with the processed surface of described sheet material substrate, move in parallel toward equidirectional with equal amount of movement at every turn, or, described first guiding element is rotated in the face parallel with the processed surface of described sheet material substrate, and the amount making described second guiding element offset because of this rotation according to described sheet material substrate moves, carry out position skew adjustment or the tilt adjustments of the Width of the described sheet material substrate portion supported by described areal of support by this.

21. carrying devices according to claim 20, it is characterized in that, described first guiding element has the first guiding face, this first guiding face described sheet material substrate is bent to the described sheet material substrate come from the conveyance of described first direction surface, parallel to each other with the surface of the described sheet material substrate transported toward described second direction till.

22. carrying devices according to claim 20 or 21, it is characterized in that, described second guiding element has the second guiding face, this second guiding face described sheet material substrate is bent to come from the conveyance of described second direction the surface of described sheet material substrate, parallel to each other with the surface of the described sheet material substrate transported toward described third direction till.

23. carrying devices according to claim 20 or 21, it is characterized in that, described 3rd guiding element has the 3rd guiding face, this 3rd guiding face described sheet material substrate is bent to the described sheet material substrate come from the conveyance of described third direction surface, parallel to each other with the surface of the described sheet material substrate transported toward described fourth direction till.

24. carrying devices according to claim 20 or 21, it is characterized in that, at least one in described first guiding element, described second guiding element and described 3rd guiding element possesses cylindrical element, and this cylindrical element has the center shaft of the oblique extension of Width of relatively described sheet material substrate.

25. carrying devices according to claim 20 or 21, it is characterized in that, at least one in described first guiding element, described second guiding element and described 3rd guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

26. carrying devices according to claim 20 or 21, it is characterized in that, described second direction is the direction intersected with described first direction.

27. carrying devices according to claim 20 or 21, it is characterized in that, described third direction is the direction parallel with described first direction.

28. carrying devices according to claim 20 or 21, it is characterized in that, described fourth direction is the direction parallel with described second direction.

29. carrying devices according to claim 20 or 21, it is characterized in that, described first guiding element possesses the cylindrical element of the center shaft of the oblique extension of Width with relatively described sheet material substrate;

Described second guiding element possesses the cylindrical element with the center shaft extended in parallel with the center shaft of described first guiding element.

30. carrying devices according to claim 29, is characterized in that, described 3rd guiding element possesses cylindrical element, and this cylindrical element has the center shaft to the direction extension that the center shaft of described second guiding element intersects.

31. carrying devices according to claim 20 or 21, it is characterized in that, described first guiding element has hammer shape component, the center shaft that the Width that this hammer shape component possesses relatively described sheet material substrate is parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft;

Described second guiding element has hammer shape component, the center shaft that the center shaft that this hammer shape component has relatively described first guiding element extends in parallel, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

32. carrying devices according to claim 31, it is characterized in that, described 3rd guiding element has hammer shape component, and this hammer shape component possesses the center shaft to the direction extension that the center shaft of described second guiding element intersects, and toward the other end, its outside dimension is gradually little from an end of described center shaft.

33. carrying devices according to claim 20 or 21, it is characterized in that, described carrying device also comprises: the 4th guiding element, this the 4th guiding element supports the back side of described sheet material substrate, the Width of the relatively described sheet material substrate of described sheet material substrate come from described fourth direction conveyance is bent towards tilted direction, is transformed to five direction different from described fourth direction to make the conveyance direction of described sheet material substrate from described fourth direction.

34. 1 kinds of substrate board treatments, is characterized in that, described substrate board treatment comprises:

Carrying device, the sheet material substrate that conveyance is banded;

Described carrying device uses the carrying device according to any one of claim 20 to 33.

35. 1 kinds of substrate board treatments, is characterized in that, the sheet material substrate surface of described substrate board treatment to band shape implements set process, and described substrate board treatment comprises:

Carrying device as claimed in claim 1;

3rd guiding element, supports the back side of described sheet material substrate, by the in addition oblique bending of the described sheet material substrate that comes from the conveyance of described third direction, so that the conveyance direction of described sheet material substrate is transformed to the fourth direction different from described third direction from described third direction;

4th guiding element, supports the back side of described sheet material substrate, by the in addition oblique bending of the described sheet material substrate that comes from the conveyance of described fourth direction, so that the conveyance direction of described sheet material substrate is transformed to five direction different from described fourth direction from described fourth direction; And

First handling part, between described first guiding element and described second guiding element, carries out set process to the surface of described sheet material substrate.

36. substrate board treatments according to claim 35, it is characterized in that, described first guiding element has the first guiding face, this first guiding face bends described sheet material substrate, until the surface of the described sheet material substrate come from the conveyance of described first direction, parallel to each other with the surface of the described sheet material substrate transported toward described second direction;

Described second guiding element has the second guiding face, and this second guiding face bends described sheet material substrate, until the surface of the described sheet material substrate come from the conveyance of described second direction, parallel to each other with the surface of the described sheet material substrate transported toward described third direction;

Described 3rd guiding element has the 3rd guiding face, described 3rd guiding face bends described sheet material substrate, until the surface of the described sheet material substrate come from the conveyance of described third direction, parallel to each other with the surface of the described sheet material substrate transported toward described fourth direction.

37. substrate board treatments according to claim 35 or 36, it is characterized in that, described first handling part is configured to move between the primary importance that arranges between described first guiding element and described second guiding element and the second place arranged between described 3rd guiding element and described 4th guiding element.

38. substrate board treatments according to claim 35 or 36, it is characterized in that, described substrate board treatment is included in the second handling part between described 3rd guiding element and described 4th guiding element, the surface of described sheet material substrate being carried out to set process.

39., according to substrate board treatment according to claim 38, is characterized in that, described first handling part and described second handling part carry out process different from each other.

40. 1 kinds of substrate board treatments, are implement set process to the sheet material substrate surface of band shape, it is characterized in that possessing:

First guiding element, supports the back side of described sheet material substrate, by the oblique bending of described sheet material substrate transported in first direction, is transformed to the second direction different from described first direction to make the conveyance direction of described sheet material substrate;

Second guiding element, supports the back side of described sheet material substrate, by the oblique bending of described sheet material substrate transported in described second direction, is transformed to the third direction different from described second direction to make the conveyance direction of described sheet material substrate;

Processing equipment, carries out set process to the surface of described sheet material substrate between described first guiding element and described second guiding element; And

Alignment device, between described first guiding element and described second guiding element, by detecting each mark being formed at the both ends of described sheet material substrate, detect the location status by the described sheet material substrate between described first guiding element and the second guiding element, according to the testing result of its location status, make described first, second guiding element is in the face parallel with the processed surface of described sheet material substrate, move in parallel toward equidirectional with equal amount of movement at every turn, or, described first guiding element is rotated in the face parallel with the processed surface of described sheet material substrate, and the amount making described second guiding element offset because of this rotation according to described sheet material substrate moves, adjust position or the posture of the described sheet material substrate between described first guiding element and described second guiding element by this,

First, second guiding element described, all relative to the long side direction of described sheet material substrate and conveyance direction and Width tilted configuration, and configure in the mode becoming the line of centers be parallel to each other, and be provided separately in the conveyance direction of described sheet material substrate, conveyance of by this described sheet material substrate being turned back.

41. 1 kinds of substrate processing method using sames, are implement set process to the sheet material substrate surface of band shape, it is characterized in that, comprise:

By first guiding element at the back side of the described sheet material substrate of supporting, by the oblique bending of described sheet material substrate transported in first direction, be transformed to the second direction different from described first direction to make the conveyance direction of described sheet material substrate;

By second guiding element at the back side of the described sheet material substrate of supporting, by the oblique bending of described sheet material substrate transported in described second direction, be transformed to the third direction different from described second direction to make the conveyance direction of described sheet material substrate;

By the processing equipment be arranged between described first guiding element and described second guiding element, set process is carried out on the surface of the described sheet material substrate transported for described second direction;

Video camera is aimed between described first guiding element with described second guiding element by being arranged at, detect each mark being formed at the both ends of described sheet material substrate, and the location status detected by the described sheet material substrate between described first guiding element and described second guiding element, according to the testing result of its location status, make described first, second guiding element is in the face parallel with the processed surface of described sheet material substrate, move in parallel toward equidirectional with equal amount of movement at every turn, or, described first guiding element is rotated in the face parallel with the processed surface of described sheet material substrate, and the amount making described second guiding element offset because of this rotation according to described sheet material substrate moves, adjust position or the posture of the described sheet material substrate between described first guiding element and described second guiding element by this.