TWI854830B - Heat exchanging apparatus - Google Patents
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- TWI854830B TWI854830B TW112134541A TW112134541A TWI854830B TW I854830 B TWI854830 B TW I854830B TW 112134541 A TW112134541 A TW 112134541A TW 112134541 A TW112134541 A TW 112134541A TW I854830 B TWI854830 B TW I854830B
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本發明係關於一種熱交換裝置,並且特別是關於提供接觸面與物件進行熱交換且具有高熱交換效能之熱交換裝置。The present invention relates to a heat exchange device, and in particular to a heat exchange device which provides a contact surface for heat exchange with an object and has high heat exchange performance.
不少領域會採用熱交換裝置,但在此所謂的熱交換裝置是指提供接觸面與物件進行熱交換的熱交換裝置。Heat exchange devices are used in many fields, but the heat exchange devices referred to here refer to heat exchange devices that provide a contact surface for heat exchange with an object.
提供接觸面與物件進行熱交換的熱交換裝置也有不少應用領用,例如,電子元件、半導體元件的測試領域。熱交換裝置的接觸面抵接受測試的元件,高溫或低溫液體流入、流出熱交換裝置的內部,進而與抵接的受測試元件進行熱交換。藉此,受測試的元件可以在高、低溫下進行測試。Heat exchange devices that provide a contact surface for heat exchange with an object also have many applications, such as the testing of electronic components and semiconductor components. The contact surface of the heat exchange device contacts the component under test, and high-temperature or low-temperature liquid flows into and out of the heat exchange device to exchange heat with the contacted component under test. In this way, the component under test can be tested at high or low temperatures.
關於熱交換裝置之先前技術,請參閱美國專利公開號第20190302178號以及圖1。圖1係美國專利公開號第20190302178號所揭示之熱交換裝置1的剖面視圖。For the prior art of the heat exchange device, please refer to U.S. Patent Publication No. 20190302178 and Figure 1. Figure 1 is a cross-sectional view of the heat exchange device 1 disclosed in U.S. Patent Publication No. 20190302178.
如圖1所示,美國專利公開號第20190302178號揭示的熱交換裝置1包含熱塊10。熱塊10可以由熱傳導性優異的金屬材料所製成。供液體流通的流道100係形成在熱塊10的內部。流道100的入口1002及出口1004係形成在熱塊10的後端面102上,並且連接至溫度調整裝置(未繪示於圖中)。熱塊10定義縱向方向L1,如圖1所示。在流道100中,於熱塊10的前端面104的附近,形成複數個彼此平行且平行縱向方向L1的板殼狀流道106。相鄰的板殼狀流道106之間即存在類似散熱片108的結構。流道100與複數個板殼狀流道106連通。前端面104即做為與抵接的受測試元件進行熱交換的接觸面。As shown in FIG. 1 , the heat exchange device 1 disclosed in U.S. Patent Publication No. 20190302178 includes a heat block 10. The heat block 10 can be made of a metal material with excellent thermal conductivity. A flow channel 100 for liquid circulation is formed inside the heat block 10. The inlet 1002 and the outlet 1004 of the flow channel 100 are formed on the rear end surface 102 of the heat block 10 and are connected to a temperature adjustment device (not shown in the figure). The heat block 10 defines a longitudinal direction L1, as shown in FIG. 1 . In the flow channel 100, near the front end surface 104 of the heat block 10, a plurality of plate-shell-shaped flow channels 106 are formed that are parallel to each other and parallel to the longitudinal direction L1. There is a structure similar to a heat sink 108 between adjacent plate-shell-shaped flow channels 106. The flow channel 100 is connected to a plurality of plate-shell-shaped flow channels 106. The front end surface 104 serves as a contact surface for heat exchange with the abutting test element.
圖1所示的熱交換裝置1還包含第一熱傳片12以及第二熱傳片14。第一熱傳片12覆蓋熱塊10的前端面104。第二熱傳片14係隔著第一熱傳片12而覆蓋熱塊10的前端面104。下文將僅對熱塊10本身結構的問題、缺點詳細說明,對於第一熱傳片12以及第二熱傳片14就不多做說明。The heat exchange device 1 shown in FIG1 further includes a first heat transfer plate 12 and a second heat transfer plate 14. The first heat transfer plate 12 covers the front end surface 104 of the heat block 10. The second heat transfer plate 14 covers the front end surface 104 of the heat block 10 via the first heat transfer plate 12. The following will only describe in detail the problems and shortcomings of the structure of the heat block 10 itself, and will not describe the first heat transfer plate 12 and the second heat transfer plate 14 in detail.
流道100與複數個板殼狀流道106接觸部位具有流入方向d1。但是,流入方向d1與縱向方向L1垂直。這導致新流入流道100內的液體很難取代已流入複數個板殼狀流道106內的液體,甚至會導致複數個板殼狀流道106內的液體停滯不流動。這自然也會降低熱交換裝置1的熱交換效能。The contact portion of the flow channel 100 and the plurality of plate-shell-shaped flow channels 106 has an inflow direction d1. However, the inflow direction d1 is perpendicular to the longitudinal direction L1. This makes it difficult for the liquid newly flowing into the flow channel 100 to replace the liquid that has already flowed into the plurality of plate-shell-shaped flow channels 106, and may even cause the liquid in the plurality of plate-shell-shaped flow channels 106 to stagnate and not flow. This will naturally reduce the heat exchange efficiency of the heat exchange device 1.
並且,新流入流道100內的液體並非同時流入板殼狀流道106內,而是依序流入複數個平行排列的板殼狀流道106內。這自然導致越靠近流道100的出口1004的板殼狀流道106其利用流體的熱交換效能越差。Moreover, the liquid newly flowing into the flow channel 100 does not flow into the plate-shell-shaped flow channel 106 at the same time, but flows into a plurality of parallel plate-shell-shaped flow channels 106 in sequence. This naturally results in that the plate-shell-shaped flow channel 106 closer to the outlet 1004 of the flow channel 100 has a worse heat exchange performance of utilizing the fluid.
此外,美國專利公開號第20190302178號揭示的熱交換裝置1明顯地採用傳統的機械加工技術所製造,所以,其熱塊10僅能受限於熱傳導性優異的金屬材料所製成,而無法採用陶瓷等其他熱傳導係數更高的材料所製成。In addition, the heat exchange device 1 disclosed in U.S. Patent Publication No. 20190302178 is obviously manufactured using traditional machining technology, so its heat block 10 can only be made of metal materials with excellent thermal conductivity, and cannot be made of other materials with higher thermal conductivity coefficients such as ceramics.
因此,本發明所欲解決之一技術問題在於提供一種提供接觸面與物件進行熱交換且具有高熱交換效能之熱交換裝置。Therefore, one technical problem that the present invention aims to solve is to provide a heat exchange device that provides a contact surface for heat exchange with an object and has high heat exchange performance.
根據本發明之一較佳具體實施例之熱交換裝置包含主體以及N個接觸塊,其中N係自然數。主體具有頭端面以及尾端面。主體定義縱向方向。主體其內具有多圈流道、第一弧殼狀流道以及第二弧殼狀流道。多圈流道之入口以及出口係外露於主體上。N個接觸塊係形成於主體的頭端面上。每一個接觸塊具有各自的接觸面。每一個接觸塊其內具有複數個彼此平行且平行縱向方向之板殼狀流道。第一弧殼狀流道係分別連通多圈流道以及每一個接觸塊之複數個板殼狀流道。第二弧殼狀流道係分別連通多圈流道以及每一個接觸塊之複數個板殼狀流道。液體從多圈流道的入口流入多圈流道,且流經第一弧殼狀流道、複數個板殼狀流道、第二弧殼狀流道,並從多圈流道的出口流出。當液體流經複數個板殼狀流道時,液體與N個接觸塊進行熱交換。According to a preferred specific embodiment of the present invention, a heat exchange device includes a main body and N contact blocks, wherein N is a natural number. The main body has a head end face and a tail end face. The main body defines a longitudinal direction. The main body has a plurality of flow channels, a first arc-shell-shaped flow channel, and a second arc-shell-shaped flow channel therein. The inlet and outlet of the plurality of flow channels are exposed on the main body. N contact blocks are formed on the head end face of the main body. Each contact block has its own contact surface. Each contact block has a plurality of plate-shell-shaped flow channels therein that are parallel to each other and parallel to the longitudinal direction. The first arc-shell-shaped flow channel is respectively connected to the plurality of plate-shell-shaped flow channels of the plurality of flow channels and each contact block. The second arc-shell flow channel is connected to the multiple-circle flow channel and the multiple plate-shell flow channels of each contact block. The liquid flows into the multiple-circle flow channel from the inlet of the multiple-circle flow channel, flows through the first arc-shell flow channel, the multiple plate-shell flow channels, the second arc-shell flow channel, and flows out from the outlet of the multiple-circle flow channel. When the liquid flows through the multiple plate-shell flow channels, the liquid exchanges heat with the N contact blocks.
於一具體實施例中,第一弧殼狀流道具有流入方向。第一弧殼狀流道的流入方向與縱向方向所夾之第一角度係小於90度。In a specific embodiment, the first arc-shell-shaped flow channel has an inflow direction. A first angle between the inflow direction of the first arc-shell-shaped flow channel and the longitudinal direction is less than 90 degrees.
於一具體實施例中,第二弧殼狀流道具有流出方向。第二弧殼狀流道的流出方向與縱向方向所夾之第二角度係大於90度。In a specific embodiment, the second arc-shell-shaped flow channel has an outflow direction. The second angle between the outflow direction of the second arc-shell-shaped flow channel and the longitudinal direction is greater than 90 degrees.
於一具體實施例中,第一弧殼狀流道具有第一網格輪廓。In a specific embodiment, the first arc-shell-shaped flow channel has a first grid profile.
於一具體實施例中,第二弧殼狀流道具有第二網格輪廓。In a specific embodiment, the second arc-shell-shaped flow channel has a second grid profile.
於一具體實施例中,第一弧殼狀流道係連通每一個板殼狀流道之各自的下端口之第一側。In a specific embodiment, the first arc-shell-shaped flow channel is connected to the first side of the respective lower end port of each plate-shell-shaped flow channel.
於一具體實施例中,第二弧殼狀流道係連通每一個板殼狀流道之各自的下端口之第二側。In a specific embodiment, the second arc-shell-shaped flow channel is connected to the second side of the lower port of each plate-shell-shaped flow channel.
於一具體實施例中,主體還具有緊鄰尾端面之側面。多圈流道的入口以及出口係外露於主體的側面上。In a specific embodiment, the main body also has a side surface adjacent to the tail end surface. The inlet and outlet of the multi-circle flow channel are exposed on the side surface of the main body.
於一具體實施例中,N個接觸塊係自係主體的頭端面向上突出。In a specific embodiment, the N contact blocks protrude upward from the head end surface of the main body.
於一具體實施例中,主體以及N個接觸塊可以由金屬材料或陶瓷材料所製成。In a specific embodiment, the main body and the N contact blocks can be made of metal material or ceramic material.
與先前技術不同,根據本發明之熱交換裝置其主要與接觸面進行熱交換之複數個板殼狀流道內的液體能快速流動,進而讓根據本發明之熱交換裝置具有高熱傳導效能。Different from the prior art, the heat exchange device according to the present invention has a plurality of plate-shell-shaped flow channels that mainly exchange heat with the contact surface, and the liquid can flow quickly, thereby allowing the heat exchange device according to the present invention to have high heat transfer performance.
關於本發明之優點與精神可以藉由以下的發明詳述及所附圖式得到進一步的瞭解。The advantages and spirit of the present invention can be further understood through the following detailed description of the invention and the attached drawings.
請參閱圖2、圖3、圖4及圖5,該等圖式示意地描繪根據本發明之較佳具體實施例之具有熱交換裝置2。圖2係以外觀視圖示意地繪示根據本發明之較佳具體實例之熱交換裝置2。圖3係圖2中熱交換裝置2沿A-A線的局部剖面視圖。圖4係根據本發明之較佳具體實施例之熱交換裝置2其內部之流道的示意圖。圖5係根據本發明之較佳具體實施例之熱交換裝置2其內部之流道的另一示意圖。在此先行聲明,圖4及圖5所示的流道為了描繪清楚以實線描繪,但並非為實體結構。Please refer to Figures 2, 3, 4 and 5, which schematically depict a heat exchange device 2 according to a preferred specific embodiment of the present invention. Figure 2 schematically depicts a heat exchange device 2 according to a preferred specific embodiment of the present invention in an exterior view. Figure 3 is a partial cross-sectional view of the heat exchange device 2 along line A-A in Figure 2. Figure 4 is a schematic diagram of the flow passage inside the heat exchange device 2 according to a preferred specific embodiment of the present invention. Figure 5 is another schematic diagram of the flow passage inside the heat exchange device 2 according to a preferred specific embodiment of the present invention. It is hereby stated that the flow passages shown in Figures 4 and 5 are depicted with solid lines for clarity, but are not solid structures.
如圖2、圖3、圖4及圖5所示,根據本發明之較佳具體實施例之熱交換裝置2包含主體20以及N個接觸塊22,其中N係自然數。於圖2中,兩個接觸塊22係繪示做為代表。As shown in Fig. 2, Fig. 3, Fig. 4 and Fig. 5, the heat exchange device 2 according to the preferred embodiment of the present invention comprises a
如圖2及圖3所示,主體20具有頭端面200以及尾端面202。主體20定義縱向方向L2。如圖4及圖5所示,主體20其內具有多圈流道204、第一弧殼狀流道206以及第二弧殼狀流道208。多圈流道204之入口2040以及出口2042係外露於主體20上。於一具體實施例中,主體20還具有緊鄰尾端面202之側面203。多圈流道204的入口2040以及出口2042係外露於主體20的側面203上,如圖2及圖3所示。於實際應用中,主體20的尾端面202可以操作性耦合至動力系統(例如,機械式動力系統),以承受一施加外力。As shown in FIGS. 2 and 3 , the
於圖2中,入口管24連接多圈流道204的入口2040,出口管26連接多圈流道204的出口2042。入口管24以及出口管26連接至溫度調整裝置(未繪示於圖中)。In FIG2 , the
如圖2及圖3所示,N個接觸塊22係形成於主體20的頭端面200上。每一個接觸塊22具有各自的接觸面220。欲與根據本發明之熱交換裝置2進行熱交換的物件可以抵接N個接觸塊22的接觸面220。As shown in FIG2 and FIG3 , N contact blocks 22 are formed on the
於一具體實施例中,如圖2及圖3所示,N個接觸塊22係自係主體20的頭端面200向上突出。In a specific embodiment, as shown in FIG. 2 and FIG. 3 , N contact blocks 22 protrude upward from the
每一個接觸塊22其內具有複數個彼此平行且平行縱向方向L2之板殼狀流道222。第一弧殼狀流道206係分別連通多圈流道204以及每一個接觸塊22之複數個板殼狀流道222。第二弧殼狀流道208係分別連通多圈流道204以及每一個接觸塊22之複數個板殼狀流道222。Each
液體從多圈流道204的入口2040流入多圈流道204,且流經第一弧殼狀流道206、複數個板殼狀流道222、第二弧殼狀流道208,並從多圈流道204的出口2042流出。當液體流經複數個板殼狀流道222時,液體與N個接觸塊22進行熱交換。在此強調,與先前技術不同,液體流入根據本發明之熱交換裝置2內後,液體同時流入複數個板殼狀流道222,不會導致先前技術之散熱裝置1熱交換不均勻的問題。The liquid flows into the multi-circle flow channel 204 from the
於一具體實施例中,如圖4所示,第一弧殼狀流道206具有流入方向d2。第一弧殼狀流道206的流入方向與縱向方向L2所夾之第一角度係小於90度。在此強調,與先前技術不同,第一弧殼狀流道206的流入方向d2並未與縱向方向L2垂直。藉此,第一弧殼狀流道206內的液體輕易地流入複數個板殼狀流道222,進而提升根據本發明之熱交換裝置2的熱交換效能。In a specific embodiment, as shown in FIG. 4 , the first arc-shell-shaped flow channel 206 has an inflow direction d2. The first angle between the inflow direction of the first arc-shell-shaped flow channel 206 and the longitudinal direction L2 is less than 90 degrees. It is emphasized here that, unlike the prior art, the inflow direction d2 of the first arc-shell-shaped flow channel 206 is not perpendicular to the longitudinal direction L2. Thus, the liquid in the first arc-shell-shaped flow channel 206 easily flows into the plurality of plate-shell-shaped flow channels 222, thereby improving the heat exchange performance of the heat exchange device 2 according to the present invention.
於一具體實施例中,如圖5所示,第二弧殼狀流道208具有流出方向d3。第二弧殼狀流道208的流出方向d3與縱向方向L2所夾之第二角度係大於90度。在此強調,與先前技術不同,第二弧殼狀流道208的流出方向d3並未與縱向方向L2垂直。藉此,第二弧殼狀流道208內的液體輕易地流出複數個板殼狀流道222,進而提升根據本發明之熱交換裝置2的熱交換效能。In a specific embodiment, as shown in FIG. 5 , the second arc-shell-shaped flow channel 208 has an outflow direction d3. The second angle between the outflow direction d3 of the second arc-shell-shaped flow channel 208 and the longitudinal direction L2 is greater than 90 degrees. It is emphasized here that, unlike the prior art, the outflow direction d3 of the second arc-shell-shaped flow channel 208 is not perpendicular to the longitudinal direction L2. Thus, the liquid in the second arc-shell-shaped flow channel 208 can easily flow out of the plurality of plate-shell-shaped flow channels 222, thereby improving the heat exchange performance of the heat exchange device 2 according to the present invention.
於一具體實施例中,如圖4所示,第一弧殼狀流道206具有第一網格輪廓。第一網格輪廓的網格部分實際是製造主體20的材料所充填,藉此,可以提升根據本發明之熱交換裝置2的熱交換效能。In a specific embodiment, as shown in Fig. 4, the first arc-shell-shaped flow channel 206 has a first grid profile. The grid portion of the first grid profile is actually filled with the material of the
於一具體實施例中,如圖5所示,第二弧殼狀流道208具有第二網格輪廓。第二網格輪廓的網格部分實際是製造主體20的材料所充填,藉此,可以提升根據本發明之熱交換裝置2的熱交換效能。In a specific embodiment, as shown in Fig. 5, the second arc-shell-shaped flow channel 208 has a second grid profile. The grid portion of the second grid profile is actually filled with the material of the
於一具體實施例中,第一弧殼狀流道206係連通每一個板殼狀流道222之各自的下端口2220之第一側2222。In a specific embodiment, the first arc-shell-shaped flow channel 206 is connected to the first side 2222 of the respective lower end 2220 of each plate-shell-shaped flow channel 222 .
於一具體實施例中,第二弧殼狀流道208係連通每一個板殼狀流道222之各自的下端口2220之第二側2224。In a specific embodiment, the second arc-shell-shaped flow channel 208 is connected to the second side 2224 of the lower end 2220 of each plate-shell-shaped flow channel 222 .
於一具體實施例中,N個接觸塊22係自係主體20的頭端面200向上突出。In a specific embodiment, the N contact blocks 22 protrude upward from the
於一具體實施例中,主體20以及N個接觸塊22可以由金屬材料或陶瓷材料所製成。主體20以及N個接觸塊22可以藉由層機製造製程所製成。主體20以及N個接觸塊22可以先行區分為可以鑄造的區塊,經鑄造後再行接合在一起。In a specific embodiment, the
藉由以上對本發明之詳述,可以清楚了解根據本發明之其主要與接觸面進行熱交換之複數個板殼狀流道內的液體能快速流動,進而讓根據本發明之熱交換裝置具有高熱傳導效能。Through the above detailed description of the present invention, it can be clearly understood that the liquid in the plurality of plate-shell-shaped flow channels that mainly exchange heat with the contact surface according to the present invention can flow quickly, thereby allowing the heat exchange device according to the present invention to have high heat transfer performance.
藉由以上較佳具體實施例之詳述,係希望能更加清楚描述本發明之特徵與精神,而並非以上述所揭露的較佳具體實施例來對本發明之面向加以限制。相反地,其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的面向內。因此,本發明所申請之專利範圍的面向應該根據上述的說明作最寬廣的解釋,以致使其涵蓋所有可能的改變以及具相等性的安排。The above detailed description of the preferred specific embodiments is intended to more clearly describe the features and spirit of the present invention, but is not intended to limit the scope of the present invention to the preferred specific embodiments disclosed above. On the contrary, the purpose is to cover various changes and arrangements with equivalents within the scope of the patent application for the present invention. Therefore, the scope of the patent application for the present invention should be interpreted in the broadest sense based on the above description, so as to cover all possible changes and arrangements with equivalents.
1:熱交換裝置 10:熱塊 100:流道 1002:入口 1004:出口 102:後端面 104:前端面 106:板殼狀流道 108:散熱片 12:第一熱傳片 14:第二熱傳片 2:熱交換裝置 20:主體 200:頭端面 202:尾端面 203:側面 204:多圈流道 2040:入口 2042:出口 206:第一弧殼狀流道 208:第二弧殼狀流道 22:接觸塊 220:接觸面 222:板殼狀流道 2220:下端口 2222:第一側 2224:第二側 24:入口管 26:出口管 L1:縱向方向 d1:流入方向 L2:縱向方向 d2:流入方向 d3:流出方向 1: Heat exchange device 10: Heat block 100: Flow channel 1002: Inlet 1004: Outlet 102: Rear end face 104: Front end face 106: Plate shell-shaped flow channel 108: Heat sink 12: First heat transfer plate 14: Second heat transfer plate 2: Heat exchange device 20: Main body 200: Head end face 202: Tail end face 203: Side face 204: Multi-circle flow channel 2040: Inlet 2042: Outlet 206: First arc shell-shaped flow channel 208: Second arc shell-shaped flow channel 22: Contact block 220: Contact surface 222: Plate shell-shaped flow channel 2220: Lower port 2222: First side 2224: Second side 24: Inlet pipe 26: Outlet pipe L1: Longitudinal direction d1: Inflow direction L2: Longitudinal direction d2: Inflow direction d3: Outflow direction
圖1係先前技術之熱交換裝置的外觀視圖。 圖2係根據本發明之較佳具體實施例之熱交換裝置的外觀視圖。 圖3係圖2中熱交換裝置1沿A-A線的剖面視圖。 圖4係根據本發明之較佳具體實施例之熱交換裝置其內部之流道的示意圖。 圖5係根據本發明之較佳具體實施例之熱交換裝置其內部之流道的另一示意圖。 FIG. 1 is an external view of a heat exchange device of the prior art. FIG. 2 is an external view of a heat exchange device according to a preferred embodiment of the present invention. FIG. 3 is a cross-sectional view of the heat exchange device 1 along line A-A in FIG. 2. FIG. 4 is a schematic diagram of the flow channel inside the heat exchange device according to a preferred embodiment of the present invention. FIG. 5 is another schematic diagram of the flow channel inside the heat exchange device according to a preferred embodiment of the present invention.
204:多圈流道 204: Multi-circle flow channel
2040:入口 2040:Entrance
2042:出口 2042:Export
206:第一弧殼狀流道 206: The first arc shell-shaped flow channel
208:第二弧殼狀流道 208: Second arc shell-shaped flow channel
222:板殼狀流道 222: Plate shell flow channel
2220:下端口 2220: Lower port
2222:第一側 2222: First side
2224:第二側 2224: Second side
L2:縱向方向 L2: Longitudinal direction
d2:流入方向 d2: Inflow direction
Claims (8)
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4445569A (en) * | 1981-03-20 | 1984-05-01 | Hitachi, Ltd. | Scroll type laminated heat exchanger |
| US4628991A (en) * | 1984-11-26 | 1986-12-16 | Trilogy Computer Development Partners, Ltd. | Wafer scale integrated circuit testing chuck |
| US20020066726A1 (en) * | 2000-07-10 | 2002-06-06 | Cole Kenneth M. | Wafer chuck having thermal plate with interleaved heating and cooling elements, interchangeable top surface assemblies and hard coated layer surfaces |
| TW201305522A (en) * | 2011-07-27 | 2013-02-01 | 水冷系統公司 | Fluid heat exchange system |
| US20200033399A1 (en) * | 2018-07-24 | 2020-01-30 | Chroma Ate Inc. | Apparatus and method for a high temperature test and a low temperature test |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101862500B1 (en) * | 2012-04-02 | 2018-05-29 | 아사히 가세이 가부시키가이샤 | Optical substrate, semiconductor light-emitting element, and method for producing semiconductor light-emitting element |
| CN103809097B (en) * | 2012-11-13 | 2016-08-17 | 京元电子股份有限公司 | Test seat with improved pressure column and its test system |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4445569A (en) * | 1981-03-20 | 1984-05-01 | Hitachi, Ltd. | Scroll type laminated heat exchanger |
| US4628991A (en) * | 1984-11-26 | 1986-12-16 | Trilogy Computer Development Partners, Ltd. | Wafer scale integrated circuit testing chuck |
| US20020066726A1 (en) * | 2000-07-10 | 2002-06-06 | Cole Kenneth M. | Wafer chuck having thermal plate with interleaved heating and cooling elements, interchangeable top surface assemblies and hard coated layer surfaces |
| TW201305522A (en) * | 2011-07-27 | 2013-02-01 | 水冷系統公司 | Fluid heat exchange system |
| US20200033399A1 (en) * | 2018-07-24 | 2020-01-30 | Chroma Ate Inc. | Apparatus and method for a high temperature test and a low temperature test |
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| Publication number | Publication date |
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| TWI854755B (en) | 2024-09-01 |
| TW202424504A (en) | 2024-06-16 |
| TW202425707A (en) | 2024-06-16 |
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