TWI849341B - Composite fluorine-based substrate - Google Patents
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本揭露是關於一種用於毫米波傳輸的高頻高速傳輸低損耗的軟性印刷電路板(flexible printed circuit,FPC)雙面板,由複合聚醯亞胺(polyimide,PI)層結構與氟系樹脂膠層結合製作,主要用於高傳輸領域,可改善FPC領域傳輸損失、加工以及成本。 This disclosure is about a high-frequency, high-speed, low-loss flexible printed circuit (FPC) double-sided board for millimeter wave transmission, which is made by combining a composite polyimide (PI) layer structure with a fluorine resin layer. It is mainly used in the high-transmission field and can improve the transmission loss, processing and cost in the FPC field.
隨著資訊技術的飛躍發展,當今全球5G等高傳輸技術大量推展、毫米波傳輸加速推進,為滿足信號傳送高頻高速化以及降低終端設備生產成本,市場上各種形式的混壓結構多層板設計與應用方興未艾。印刷電路板是電子產品中不可或缺的材料,而隨著消費性電子產品需求增長,對於印刷電路板的需求也是與日俱增。其中,由於FPC具有可撓曲性及可三度空間配線等特性,故在科技化電子產品強調輕薄短小、可撓曲性、在資訊技術要求高頻高速傳輸的發展趨勢下,目前FPC已被廣泛應用電腦及其週邊設備、通訊產品以及消費性電子產品等等。 With the rapid development of information technology, the global 5G and other high-speed transmission technologies are being promoted in large quantities, and millimeter wave transmission is being accelerated. In order to meet the high-frequency and high-speed signal transmission and reduce the production cost of terminal equipment, various forms of mixed pressure structure multi-layer board design and application are in the ascendant in the market. Printed circuit boards are indispensable materials in electronic products, and with the growth of demand for consumer electronic products, the demand for printed circuit boards is also increasing day by day. Among them, because FPC has the characteristics of flexibility and three-dimensional wiring, so in the technological electronic products emphasize light, thin, short, flexible, and the development trend of information technology requiring high-frequency and high-speed transmission, FPC has been widely used in computers and their peripheral equipment, communication products, and consumer electronic products, etc.
當前業界主要所使用的高頻板材主要為液晶高分子(liquid crystal polymer,LCP)板、氟系樹脂纖維板、改質聚醯亞胺(modified polyimide,MPI)板。然而,LCP薄膜製成的基板雖然加工性較佳且在高溫高濕環境下由於 低吸水率使得傳輸損耗表現也穩定,但其面臨的問題是介電性能很難再進一步改質下降,其損耗因數雖可達0.002~0.003但介電常數多在3.2~4.0之間,相比於氟系材料在高速傳輸領域較為受限。而且,其同氟系材料一樣因為表面特性的問題導致接著力偏低,在金屬導體的損失上亦很難再下降,而目前市場上量產的LCP薄膜熔點在300℃左右,這在後續高溫組裝製程會造成厚度均勻性不佳的問題。此外,目前市面上具備LCP薄膜供應能力的廠商較少,使得供應量無法滿足業界需求,成本也居高不下。 The high-frequency boards currently used in the industry are mainly liquid crystal polymer (LCP) boards, fluorine resin fiber boards, and modified polyimide (MPI) boards. However, although the substrate made of LCP film has better processability and stable transmission loss performance due to low water absorption in high temperature and high humidity environments, it faces the problem that it is difficult to further improve and reduce the dielectric performance. Although its loss factor can reach 0.002~0.003, the dielectric constant is mostly between 3.2~4.0, which is more limited in the field of high-speed transmission compared to fluorine materials. Moreover, like fluorine-based materials, it has low adhesion due to surface properties, and it is difficult to reduce the loss of metal conductors. The melting point of LCP films currently produced in the market is around 300°C, which will cause poor thickness uniformity in subsequent high-temperature assembly processes. In addition, there are currently few manufacturers on the market that have the ability to supply LCP films, so the supply cannot meet industry demand and the cost remains high.
其次,氟系樹脂具有低介電常數(dielectric constant,Dk)和低介電損耗等優異的電氣特性,如聚四氟乙烯(PTFE)氟系基板在頻率10GHz下之介電常數約為2.1、介電損耗因數(dielectric loss factor,Df)約為0.0004,其亦具有僅約為0.03%的低吸水率的優異性質。然而,其具有約200ppm/℃的高熱膨脹係數(coefficient of thermal expansion,CTE),易造成尺寸安定性不佳、雷射鑽孔時內縮量過大導致金屬化困難以及線路斷裂,尺寸的變化會直接影響到導體線路的製作及對位偏移等問題,尤其是高密度化要求,線路越來越微細的狀況下,影響程度則更為明顯。因此,若直接將氟系聚合物製成基板,雖可得到極低Dk/Df,但實際應用並不可行,一般都會搭配其他低熱膨脹係數的材料,在結構或組成上進行複合來改善加工性。 Secondly, fluorinated resins have excellent electrical properties such as low dielectric constant (Dk) and low dielectric loss. For example, the dielectric constant of polytetrafluoroethylene (PTFE) fluorinated substrate at a frequency of 10GHz is about 2.1, and the dielectric loss factor (Df) is about 0.0004. It also has the excellent property of low water absorption of only about 0.03%. However, it has a high coefficient of thermal expansion (CTE) of about 200ppm/℃, which can easily lead to poor dimensional stability, excessive shrinkage during laser drilling, resulting in difficulty in metallization, and circuit breakage. The change in size will directly affect the production of conductor circuits and alignment issues, especially with the requirements of high density. The impact is more obvious when the circuits are getting finer and finer. Therefore, if fluorine-based polymers are directly made into substrates, although extremely low Dk/Df can be obtained, it is not feasible for practical application. Generally, other materials with low thermal expansion coefficients are used to compound the structure or composition to improve processability.
舉凡於US 3676566 A提出聚醯亞胺和氟碳聚合物的複合層狀結構;TW M531056 U、CN 103096612 B、CN 202276545 U、TW M422159 U1、TW M436933 U1、CN 202773176 U等提出高頻基板結構;CN 105269884 B提出複合式高頻雙面銅箔基板及其製造方法;TW I645977 B提出PI型高頻高速傳輸用雙面銅箔基板及其製備方法;CN 207772540 U提出LCP或氟系聚合物高頻高傳輸 雙面銅箔基板;CN 207744230 U提出複合式氟系聚合物高頻高傳輸雙面銅箔基板及製備方法;CN 105295753 B提出高頻黏著膠水層的結構及其製備方法;CN 105282959 B提出具有低Dk和Df特性的高頻覆蓋膜及其製備方法,上述前期專利均未揭露與下述本揭露具有相同結構及性質的氟系聚合物基板。 For example, US 3676566 A proposed a composite layered structure of polyimide and fluorocarbon polymer; TW M531056 U, CN 103096612 B, CN 202276545 U, TW M422159 U1, TW M436933 U1, CN 202773176 U, etc. proposed a high-frequency substrate structure; CN 105269884 B proposed a composite high-frequency double-sided copper foil substrate and its manufacturing method; TW I645977 B proposed a PI type high-frequency high-speed transmission double-sided copper foil substrate and its preparation method; CN 207772540 U proposed a LCP or fluorine-based polymer high-frequency high-transmission double-sided copper foil substrate; CN 207744230 U proposed a composite fluorine-based polymer high-frequency high-transmission double-sided copper foil substrate and preparation method; CN 105295753 B proposed a high-frequency adhesive glue layer structure and preparation method; CN 105282959 B proposed a high-frequency cover film with low Dk and Df characteristics and preparation method. None of the above-mentioned previous patents disclosed a fluorine-based polymer substrate with the same structure and properties as the following disclosure.
鑒於上述,本揭露提供一種複合式氟系基板,包括依序疊合之第一銅箔層、第一氟系樹脂層、複合聚醯亞胺層、第二氟系樹脂層以及第二銅箔層,其中,該複合聚醯亞胺層係由交替的聚醯亞胺次層及高頻樹脂膠次層組成的奇數層結構,且該奇數層結構的最外層均為該聚醯亞胺次層。 In view of the above, the present disclosure provides a composite fluorine-based substrate, comprising a first copper foil layer, a first fluorine-based resin layer, a composite polyimide layer, a second fluorine-based resin layer and a second copper foil layer stacked in sequence, wherein the composite polyimide layer is an odd-numbered layer structure composed of alternating polyimide sublayers and high-frequency resin sublayers, and the outermost layer of the odd-numbered layer structure is the polyimide sublayer.
於一具體實施態樣中,該第一銅箔層及第二銅箔層各自係電解銅箔、壓延銅箔、HA箔或HA-V2箔。 In a specific embodiment, the first copper foil layer and the second copper foil layer are each electrolytic copper foil, rolled copper foil, HA foil or HA-V2 foil.
於一具體實施態樣中,該第一銅箔層及第二銅箔層之厚度介於6至70μm之間。於另一具體實施態樣中,該第一銅箔層及第二銅箔層之厚度介於12至18μm之間。 In one specific embodiment, the thickness of the first copper foil layer and the second copper foil layer is between 6 and 70 μm. In another specific embodiment, the thickness of the first copper foil layer and the second copper foil layer is between 12 and 18 μm.
於一具體實施態樣中,該第一氟系樹脂層及第二氟系樹脂層之Dk值介於2.00至3.50(10GHz)之間,且Df值介於0.0001至0.005(10GHz)之間。 In a specific embodiment, the Dk value of the first fluorine-based resin layer and the second fluorine-based resin layer is between 2.00 and 3.50 (10 GHz), and the Df value is between 0.0001 and 0.005 (10 GHz).
於一具體實施態樣中,該第一氟系樹脂層及第二氟系樹脂層之厚度介於2至50μm之間。於另一具體實施態樣中,該第一氟系樹脂層及第二氟系樹脂層之厚度介於5至38μm之間。 In one specific embodiment, the thickness of the first fluorine-based resin layer and the second fluorine-based resin layer is between 2 and 50 μm. In another specific embodiment, the thickness of the first fluorine-based resin layer and the second fluorine-based resin layer is between 5 and 38 μm.
於一具體實施態樣中,該第一氟系樹脂層及第二氟系樹脂層之材料係選自聚四氟乙烯(PTFE)、聚偏氟乙烯(PVDF)、聚氟乙烯(PVF)、氟 乙烯與乙烯基醚共聚物、四氟乙烯與乙烯的共聚物、聚三氟氯乙烯(PCTFE或PTFCE)與乙烯-三氟氯乙烯共聚物(CTFE)、乙烯-四氟乙烯共聚物(ETFE)、氟乙烯-丙烯的共聚物(FEP)、四氟乙烯-全氟乙烯基醚共聚物(PFA)、聚氯乙烯、四氟乙烯-六氟丙稀共聚物、乙烯-氟乙烯共聚物、以及四氟乙烯-六氟丙烯-三氟乙烯共聚物所組成群組的至少一種。 In a specific embodiment, the material of the first fluorine-based resin layer and the second fluorine-based resin layer is selected from at least one of the group consisting of polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF), polyvinyl fluoride (PVF), fluoroethylene and vinyl ether copolymer, tetrafluoroethylene and ethylene copolymer, polytrifluorochloroethylene (PCTFE or PTFCE) and ethylene-chlorotrifluoroethylene copolymer (CTFE), ethylene-tetrafluoroethylene copolymer (ETFE), fluoroethylene-propylene copolymer (FEP), tetrafluoroethylene-perfluorovinyl ether copolymer (PFA), polyvinyl chloride, tetrafluoroethylene-hexafluoropropylene copolymer, ethylene-fluoroethylene copolymer, and tetrafluoroethylene-hexafluoropropylene-trifluoroethylene copolymer.
於一具體實施態樣中,該聚醯亞胺次層之Dk值介於2.00至3.50(10GHz)之間,且Df值介於0.002至0.020(10GHz)之間。 In one embodiment, the polyimide sublayer has a Dk value between 2.00 and 3.50 (10 GHz), and a Df value between 0.002 and 0.020 (10 GHz).
於一具體實施態樣中,該聚醯亞胺次層之厚度介於8至100μm之間。於另一具體實施態樣中,該聚醯亞胺次層之厚度介於25至90μm之間。 In one embodiment, the thickness of the polyimide sublayer is between 8 and 100 μm. In another embodiment, the thickness of the polyimide sublayer is between 25 and 90 μm.
於一具體實施態樣中,該高頻樹脂膠次層之Dk值介於2.00至3.50(10GHz)之間,且Df值介於0.001至0.010(10GHz)之間。 In one embodiment, the Dk value of the high frequency resin sublayer is between 2.00 and 3.50 (10 GHz), and the Df value is between 0.001 and 0.010 (10 GHz).
於一具體實施態樣中,該高頻樹脂膠次層之厚度介於5至50μm之間。於另一具體實施態樣中,該高頻樹脂膠次層之厚度介於10至25μm之間。 In one embodiment, the thickness of the high-frequency resin sublayer is between 5 and 50 μm. In another embodiment, the thickness of the high-frequency resin sublayer is between 10 and 25 μm.
於一具體實施態樣中,該高頻樹脂膠次層之材料係選自氟樹脂、環氧樹脂、丙烯酸系樹脂、胺基甲酸酯系樹脂、矽橡膠系樹脂、聚對二甲苯系樹脂、雙馬來醯亞胺系樹脂以及聚醯亞胺系樹脂所組成群組的至少一種。 In a specific embodiment, the material of the high-frequency resin sublayer is at least one selected from the group consisting of fluorine resin, epoxy resin, acrylic resin, urethane resin, silicone rubber resin, polyparaxylene resin, dimaleimide resin and polyimide resin.
於一具體實施態樣中,該高頻樹脂膠次層係熱固性聚醯亞胺系膠層,且包括含量為40至95重量%的熱固性聚醯亞胺樹脂。 In a specific embodiment, the high-frequency resin sublayer is a thermosetting polyimide-based rubber layer and includes a thermosetting polyimide resin content of 40 to 95 weight percent.
於一具體實施態樣中,該複合式氟系基板之整體吸水率介於0.1%至10%。於另一具體實施態樣中,該複合式氟系基板之整體吸水率介於0.1%至0.4%。 In one specific embodiment, the overall water absorption rate of the composite fluorine-based substrate is between 0.1% and 10%. In another specific embodiment, the overall water absorption rate of the composite fluorine-based substrate is between 0.1% and 0.4%.
於一具體實施態樣中,該複合式氟系基板之整體熱膨脹係數介於5至40ppm/℃。於另一具體實施態樣中,該複合式氟系基板之整體熱膨脹係數介於10至20ppm/℃。 In one specific embodiment, the overall thermal expansion coefficient of the composite fluorine-based substrate is between 5 and 40 ppm/°C. In another specific embodiment, the overall thermal expansion coefficient of the composite fluorine-based substrate is between 10 and 20 ppm/°C.
於一具體實施態樣中,該複合式氟系基板之總厚度介於35至700μm。於另一具體實施態樣中,該複合式氟系基板之總厚度介於85至300μm。 In one specific embodiment, the total thickness of the composite fluorine-based substrate is between 35 and 700 μm. In another specific embodiment, the total thickness of the composite fluorine-based substrate is between 85 and 300 μm.
本揭露復提供一種製備複合式氟系基板的方法,包括: The present disclosure further provides a method for preparing a composite fluorine-based substrate, comprising:
分別形成該第一氟系樹脂層及第二氟系樹脂層於不同的該聚醯亞胺次層的一表面上並烘乾; The first fluorine-based resin layer and the second fluorine-based resin layer are formed on different surfaces of the polyimide sublayer and dried;
形成該高頻樹脂膠次層在其中一該聚醯亞胺次層的另一表面上,並貼合至另一該聚醯亞胺次層的的另一表面上;以及 Forming the high frequency resin sublayer on the other surface of one of the polyimide sublayers and bonding it to the other surface of another polyimide sublayer; and
高溫壓合,使該第一銅箔層壓合至該第一氟系樹脂層上,以及使該第二銅箔層壓合至該第二氟系樹脂層上。 High temperature pressing is performed to press the first copper foil layer onto the first fluorine resin layer, and the second copper foil layer onto the second fluorine resin layer.
對於高頻高速傳輸,至關重要的是必須選擇低Dk/Df的材料,而在滿足於毫米波頻率具低傳輸損耗條件下,尚須考慮如何搭配材料以便於FPC流程生產並降低成本。基此,本揭露的複合式氟系基板,除了包括氟系樹脂層及銅箔層外,還包括複合聚醯亞胺層,該複合聚醯亞胺層由交替的聚醯亞胺次層、高頻樹脂膠次層所組成。此結構的優點是可利用聚醯亞胺的低CTE來支撐基板整體的熱膨脹值,使基板具有低熱膨脹係數及良好的尺寸安定性。此外,和只使用聚醯亞胺層的基板相比,由於複合聚醯亞胺層中高頻樹脂膠的吸濕性及Dk/Df均較低,故若以複合聚醯亞胺層來取代聚醯亞胺層作為芯層,除了具有容易製造較厚的介質層的特點外,還可製成具有較佳吸濕性和電性的基板,亦可降低成本、增加競爭優勢。因此,本揭露所帶來的顯著功效包括:成本低、製程工序短、基板具有良好的電性(特別是傳輸損耗極低)、低CTE、良好的 尺寸安定性、在高溫濕度環境下穩定的Dk/Df性能、超低吸水率、極佳的機械性能以及可以提供較厚的低介電介質層等。 For high-frequency and high-speed transmission, it is crucial to select materials with low Dk/Df. While meeting the conditions of low transmission loss at millimeter-wave frequencies, it is also necessary to consider how to match materials to facilitate FPC process production and reduce costs. Therefore, the composite fluorine-based substrate disclosed herein, in addition to a fluorine-based resin layer and a copper foil layer, also includes a composite polyimide layer, which is composed of alternating polyimide sublayers and high-frequency resin sublayers. The advantage of this structure is that the low CTE of polyimide can be used to support the overall thermal expansion value of the substrate, so that the substrate has a low thermal expansion coefficient and good dimensional stability. In addition, compared with substrates using only polyimide layers, since the hygroscopicity and Dk/Df of the high-frequency resin in the composite polyimide layer are lower, if the composite polyimide layer is used to replace the polyimide layer as the core layer, in addition to the feature of easily manufacturing a thicker dielectric layer, a substrate with better hygroscopicity and electrical properties can be produced, which can also reduce costs and increase competitive advantages. Therefore, the significant effects brought by the present disclosure include: low cost, short process steps, good electrical properties of the substrate (especially extremely low transmission loss), low CTE, good dimensional stability, stable Dk/Df performance in high temperature and humidity environments, ultra-low water absorption, excellent mechanical properties, and the ability to provide a thicker low-dielectric dielectric layer, etc.
1:銅箔層 1: Copper foil layer
2:氟系樹脂層 2: Fluorine resin layer
3:複合聚醯亞胺層 3: Composite polyimide layer
30:聚醯亞胺次層 30: Polyimide sublayer
31:高頻樹脂膠次層 31: High frequency resin layer
圖1係本揭露複合式氟系基板之實施例之結構示意圖。 Figure 1 is a schematic diagram of the structure of an embodiment of the composite fluorine-based substrate disclosed herein.
圖2係本揭露複合式氟系基板之另一實施例之結構示意圖。 Figure 2 is a schematic structural diagram of another embodiment of the composite fluorine-based substrate disclosed herein.
以下藉由特定的具體實施例說明本揭露的實施方式,本揭露所屬技術領域中具有通常知識者可根據本文所記載的內容輕易地瞭解本揭露的範圍及功效。然而,本文所記載的具體實施例並非用以限定本揭露,所列舉的各技術特徵或方案可彼此組合,本揭露亦可藉由其它不同的實施方式加以實現或應用,本文所記載的各項細節亦可根據不同的觀點與應用,在不悖離本揭露下賦予不同的變化或修飾。 The following is a specific embodiment to illustrate the implementation of the present disclosure. A person with ordinary knowledge in the technical field to which the present disclosure belongs can easily understand the scope and efficacy of the present disclosure based on the content described in this article. However, the specific embodiments described in this article are not intended to limit the present disclosure. The listed technical features or solutions can be combined with each other. The present disclosure can also be implemented or applied through other different implementation methods. The details described in this article can also be given different changes or modifications based on different viewpoints and applications without deviating from the present disclosure.
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術內容得能涵蓋之範圍內。同時,本說明書中所引用之如「上」、「第一」及「第二」等之用語,亦僅為便於敘述之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實質變更技術內容下,當亦視為本發明可實施之範疇。 It should be noted that the structures, proportions, sizes, etc. depicted in the drawings attached to this specification are only used to match the contents disclosed in the specification for understanding and reading by people familiar with this technology, and are not used to limit the restrictive conditions for the implementation of the present invention. Therefore, they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "above", "first" and "second" used in this specification are only for the convenience of description, and are not used to limit the scope of implementation of the present invention. Changes or adjustments to their relative relationships, without substantial changes to the technical content, should also be regarded as the scope of implementation of the present invention.
本文中所述的「包括」、「包含」或「具有」特定要件時,除非另有說明,否則可另包含其他元件、組成分、結構、區域、部位、裝置、系統、步驟或連接關係等要件,而非排除該等其他要件。 When "includes", "comprising" or "having" a specific element in this article, unless otherwise stated, it may also include other elements, components, structures, regions, parts, devices, systems, steps or connections, rather than excluding such other elements.
除非本文中另有明確說明,否則本文中所述的單數形式「一」及「該」亦包含複數形式,且本文中所述的「或」與「及/或」可互換使用。 Unless otherwise expressly stated herein, the singular forms "a", "an" and "the" mentioned herein also include the plural forms, and "or" and "and/or" mentioned herein can be used interchangeably.
本文中所述的數值範圍是包含且可合併的,落在本文所述數值範圍內的任何數值皆可作為最大值或最小值以導出其次範圍;舉例而言,「2.00至3.50」的數值範圍應可理解為包含最小值為2.00及最大值為3.50之間的任何次範圍,例如:2.00至3.00、2.50至3.50、及2.50至3.00等次範圍;此外,若一數值落在本文所述的各範圍內(如最大值與最小值之間),即應視作包括在本揭露的範圍內。 The numerical ranges described herein are inclusive and combinable. Any numerical value falling within the numerical range described herein can be used as the maximum or minimum value to derive the sub-range; for example, the numerical range of "2.00 to 3.50" should be understood to include any sub-range between a minimum value of 2.00 and a maximum value of 3.50, such as: 2.00 to 3.00, 2.50 to 3.50, and 2.50 to 3.00. In addition, if a numerical value falls within the ranges described herein (such as between the maximum and minimum values), it should be considered to be included in the scope of the present disclosure.
本揭露的複合式氟系基板包括依序疊合之第一銅箔層、第一氟系樹脂層、複合聚醯亞胺層、第二氟系樹脂層以及第二銅箔層。 The composite fluorine-based substrate disclosed herein includes a first copper foil layer, a first fluorine-based resin layer, a composite polyimide layer, a second fluorine-based resin layer, and a second copper foil layer stacked in sequence.
於一具體實施態樣中,疊構如圖1所示,複合式氟系基板包括銅箔層1、氟系樹脂層2、複合聚醯亞胺層3,其中,圖1中之複合聚醯亞胺層3包括交替的聚醯亞胺次層30、高頻樹脂膠次層31以及聚醯亞胺次層30等3層;於另一具體實施態樣中,疊構則如圖2所示,其複合聚醯亞胺層3包括交替的聚醯亞胺次層30、高頻樹脂膠次層31、聚醯亞胺次層30、高頻樹脂膠次層31以及聚醯亞胺次層30等5層。
In a specific embodiment, the stacked structure is shown in FIG. 1. The composite fluorine-based substrate includes a
本揭露的複合式氟系基板中,銅箔層可選用電解銅箔(ED)、壓延銅箔(RA)、HA箔或HA-V2箔,且厚度可介於6至70μm之間、或者12至18μm之間,例如6、7、8、9、10、11、12、13、14、15、16、17、18、19、20、22、25、30、35、40、45、50、55、60、65、或70μm。 In the composite fluorine-based substrate disclosed herein, the copper foil layer may be electrolytic copper foil (ED), rolled copper foil (RA), HA foil or HA-V2 foil, and the thickness may be between 6 and 70 μm, or between 12 and 18 μm, such as 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 22, 25, 30, 35, 40, 45, 50, 55, 60, 65, or 70 μm.
本揭露的複合式氟系基板中,氟系樹脂層之Dk值可介於2.00至3.50(10GHz)之間,例如,Dk值可為2.00、2.10、2.20、2.30、2.40、2.50、2.60、2.70、2.80、2.90、3.00、3.10、3.20、3.30、3.40、或3.50。氟系樹脂層之Df值可介於0.0001至0.005(10GHz)之間,例如,0.0001、0.0002、0.0003、0.0004、0.0005、0.0006、0.0007、0.0008、0.0009、0.001、0.0015、0.002、0.0025、0.003、0.0035、0.004、0.0045、或0.005。 In the composite fluorine-based substrate disclosed herein, the Dk value of the fluorine-based resin layer may be between 2.00 and 3.50 (10 GHz), for example, the Dk value may be 2.00, 2.10, 2.20, 2.30, 2.40, 2.50, 2.60, 2.70, 2.80, 2.90, 3.00, 3.10, 3.20, 3.30, 3.40, or 3.50. The Df value of the fluorine resin layer may be between 0.0001 and 0.005 (10 GHz), for example, 0.0001, 0.0002, 0.0003, 0.0004, 0.0005, 0.0006, 0.0007, 0.0008, 0.0009, 0.001, 0.0015, 0.002, 0.0025, 0.003, 0.0035, 0.004, 0.0045, or 0.005.
氟系樹脂層之厚度則可介於2至50μm之間、或者5至38μm之間,例如2、3、4、5、6、7、8、9、10、15、20、25、30、35、40、45、50μm。 The thickness of the fluorine resin layer can be between 2 and 50 μm, or between 5 and 38 μm, for example, 2, 3, 4, 5, 6, 7, 8, 9, 10, 15, 20, 25, 30, 35, 40, 45, 50 μm.
為提供具有所需電氣特性的氟系樹脂層,本揭露之氟系樹脂可選用之材料係選自聚四氟乙烯(PTFE)、聚偏氟乙烯(PVDF)、聚氟乙烯(PVF)、氟乙烯與乙烯基醚共聚物、四氟乙烯與乙烯的共聚物、聚三氟氯乙烯(PCTFE或PTFCE)與乙烯-三氟氯乙烯共聚物(CTFE)、乙烯-四氟乙烯共聚物(ETFE)、氟乙烯-丙烯的共聚物(FEP)、四氟乙烯-全氟乙烯基醚共聚物(PFA)、聚三氟氯乙烯、聚氯乙烯、四氟乙烯-六氟丙稀共聚物、乙烯-氟乙烯共聚物、以及四氟乙烯-六氟丙烯-三氟乙烯共聚物所組成群組的至少一種。 In order to provide a fluorine-based resin layer with the desired electrical properties, the fluorine-based resin disclosed herein may be selected from at least one of the group consisting of polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF), polyvinyl fluoride (PVF), vinyl fluoride and vinyl ether copolymers, tetrafluoroethylene and ethylene copolymers, polytrifluorochloroethylene (PCTFE or PTFCE) and ethylene-trifluorochloroethylene copolymers (CTFE), ethylene-tetrafluoroethylene copolymers (ETFE), fluoroethylene-propylene copolymers (FEP), tetrafluoroethylene-perfluorovinyl ether copolymers (PFA), polytrifluorochloroethylene, polyvinyl chloride, tetrafluoroethylene-hexafluoropropylene copolymers, ethylene-vinyl fluoride copolymers, and tetrafluoroethylene-hexafluoropropylene-trifluoroethylene copolymers.
本揭露的複合式氟系基板中,聚醯亞胺次層之Dk值可如氟系樹脂層般同樣介於2.00至3.50(10GHz)之間,例如,Dk值可為2.00、2.10、2.20、2.30、2.40、2.50、2.60、2.70、2.80、2.90、3.00、3.10、3.20、3.30、3.40、或3.50。聚醯亞胺次層之Df值則可介於0.002至0.002(10GHz)之間,例如,0.002、0.003、0.004、0.005、0.006、0.007、0.008、0.009、0.010、0.011、0.012、0.013、0.014、0.015、0.016、0.017、0.018、0.019、0.020。 In the composite fluorine-based substrate disclosed herein, the Dk value of the polyimide sublayer may be between 2.00 and 3.50 (10 GHz) like the fluorine-based resin layer. For example, the Dk value may be 2.00, 2.10, 2.20, 2.30, 2.40, 2.50, 2.60, 2.70, 2.80, 2.90, 3.00, 3.10, 3.20, 3.30, 3.40, or 3.50. The Df value of the polyimide sublayer may be between 0.002 and 0.002 (10 GHz), for example, 0.002, 0.003, 0.004, 0.005, 0.006, 0.007, 0.008, 0.009, 0.010, 0.011, 0.012, 0.013, 0.014, 0.015, 0.016, 0.017, 0.018, 0.019, 0.020.
聚醯亞胺次層之厚度可介於8至100μm之間、或者介於25至90μm之間,例如,8、9、10、15、20、25、30、35、40、45、50、55、60、65、70、75、80、85、90、95、或100μm。 The thickness of the polyimide sublayer may be between 8 and 100 μm, or between 25 and 90 μm, for example, 8, 9, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, or 100 μm.
本揭露的複合式氟系基板中,高頻樹脂膠次層之Dk值可同樣介於2.00至3.50(10GHz)之間,例如,Dk值可為2.00、2.10、2.20、2.30、2.40、2.50、2.60、2.70、2.80、2.90、3.00、3.10、3.20、3.30、3.40、或3.50。由於高頻樹脂膠次層之Df較聚醯亞胺次層更低,選用Df值介於0.001至0.010(10GHz)之間,來降低整體複合式氟系基板的Df,例如,0.001、0.002、0.003、0.004、0.005、0.006、0.007、0.008、0.009、或0.010。 In the composite fluorine-based substrate disclosed herein, the Dk value of the high-frequency resin sublayer may also be between 2.00 and 3.50 (10 GHz). For example, the Dk value may be 2.00, 2.10, 2.20, 2.30, 2.40, 2.50, 2.60, 2.70, 2.80, 2.90, 3.00, 3.10, 3.20, 3.30, 3.40, or 3.50. Since the Df of the high-frequency resin sublayer is lower than that of the polyimide sublayer, a Df value between 0.001 and 0.010 (10GHz) is selected to reduce the Df of the overall composite fluorine-based substrate, for example, 0.001, 0.002, 0.003, 0.004, 0.005, 0.006, 0.007, 0.008, 0.009, or 0.010.
高頻樹脂膠次層之厚度介於5至50μm之間、或者介於10至25μm之間,例如,5、10、15、20、25、30、35、40、45、或50μm。 The thickness of the high frequency resin sublayer is between 5 and 50 μm, or between 10 and 25 μm, for example, 5, 10, 15, 20, 25, 30, 35, 40, 45, or 50 μm.
為提供具有所需電氣特性的高頻樹脂膠次層,本揭露之高頻樹脂膠之材料係選自氟樹脂、環氧樹脂、丙烯酸系樹脂、胺基甲酸酯系樹脂、矽橡膠系樹脂、聚對二甲苯系樹脂、雙馬來醯亞胺系樹脂以及聚醯亞胺系樹脂所組成群組的至少一種。於一具體實施例中,高頻樹脂膠次層係熱固性聚醯亞胺系膠層,且包括含量為40至95重量%的聚醯亞胺,或者50至90重量%、60至80重量%的聚醯亞胺,例如,40、45、50、55、60、65、70、75、80、85、90、95重量%的聚醯亞胺。該高頻樹脂膠次層可包括其他樹脂組分及添加劑,該其他樹脂組分包括但不限於為環氧樹脂、氟系樹脂等,添加劑可為習知添加劑,例如燒結二氧化矽、阻燃劑等。 In order to provide a high-frequency resin sublayer with desired electrical properties, the material of the high-frequency resin disclosed herein is selected from at least one of the group consisting of fluorine resin, epoxy resin, acrylic resin, urethane resin, silicone rubber resin, polyparaxylene resin, dimaleimide resin and polyimide resin. In a specific embodiment, the high-frequency resin sublayer is a thermosetting polyimide-based rubber layer, and includes 40 to 95% by weight of polyimide, or 50 to 90% by weight, 60 to 80% by weight of polyimide, for example, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95% by weight of polyimide. The high-frequency resin sublayer may include other resin components and additives, and the other resin components include but are not limited to epoxy resins, fluorine resins, etc., and the additives may be known additives, such as sintered silica, flame retardants, etc.
本揭露之複合式氟系基板,具有優異的低吸水率,具體地,其整體吸水率介於0.1%至10%、或者0.1%至0.4%,例如,0.1%、0.2%、0.3%、0.4%、0.5%、0.6%、0.7%、0.9%、1%、2%、3%、4%、5%、6%、7%、8%、9%、或10%。本揭露之複合式氟系基板,亦具有優異的低熱膨脹係數,具體地,其整 體熱膨脹係數介於5至40ppm/℃、或者10至20ppm/℃,例如,5、6、7、8、9、10、11、12、13、14、15、20、25、30、35、40ppm/℃。 The composite fluorine-based substrate disclosed herein has excellent low water absorption, specifically, its overall water absorption is between 0.1% and 10%, or 0.1% and 0.4%, for example, 0.1%, 0.2%, 0.3%, 0.4%, 0.5%, 0.6%, 0.7%, 0.9%, 1%, 2%, 3%, 4%, 5%, 6%, 7%, 8%, 9%, or 10%. The composite fluorine-based substrate disclosed herein also has excellent low thermal expansion coefficient, specifically, its overall thermal expansion coefficient is between 5 and 40ppm/℃, or 10 to 20ppm/℃, for example, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 20, 25, 30, 35, 40ppm/℃.
本揭露之複合式氟系基板的總厚度可依需求調整各層厚度來控制,具體地,總厚度可介於35至700μm、或者介於85至300μm,例如,35、40、45、50、55、60、65、70、75、80、85、90、95、100、150、200、250、300、350、400、450、500、550、600、650、或700μm。 The total thickness of the composite fluorine-based substrate disclosed herein can be controlled by adjusting the thickness of each layer as required. Specifically, the total thickness can be between 35 and 700 μm, or between 85 and 300 μm, for example, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, or 700 μm.
為獲得上述複合式氟系基板,本揭露復提供複合式氟系基板的製備方法,包括: In order to obtain the above-mentioned composite fluorine-based substrate, the present disclosure further provides a method for preparing the composite fluorine-based substrate, including:
分別形成該第一氟系樹脂層及第二氟系樹脂層於不同的該聚醯亞胺次層的一表面上並烘乾; The first fluorine-based resin layer and the second fluorine-based resin layer are formed on different surfaces of the polyimide sublayer and dried;
形成該高頻樹脂膠次層在其中一該聚醯亞胺次層的另一表面上,並貼合至另一該聚醯亞胺次層的的另一表面上;以及 Forming the high frequency resin sublayer on the other surface of one of the polyimide sublayers and bonding it to the other surface of another polyimide sublayer; and
高溫壓合,使該第一銅箔層壓合至該第一氟系樹脂層上,以及使該第二銅箔層壓合至該第二氟系樹脂層上。 High temperature pressing is performed to press the first copper foil layer onto the first fluorine resin layer, and the second copper foil layer onto the second fluorine resin layer.
以製備圖1之複合聚醯亞胺層為3層之複合式氟系基板為例,步驟可包括: Taking the preparation of a composite fluorine-based substrate having three composite polyimide layers as shown in Figure 1 as an example, the steps may include:
1.將氟系樹脂層2分別形成於兩個不同的聚醯亞胺次層30的一表面上,並烘乾;
1. Form a fluorine-based
2.隨後使步驟1其中一半成品的聚醯亞胺次層30的另一表面上形成高頻樹脂膠次層31,接著使其以該高頻樹脂膠次層31貼合至另一半成品的聚醯亞胺次層30,並烘乾;以及
2. Then, a high-frequency
3.最後進行高溫壓合製程,以將銅箔層1分別壓合至氟系樹脂層2上,得到複合聚醯亞胺層3為3層之複合式氟系基板。
3. Finally, a high temperature pressing process is performed to press the
製備複合聚醯亞胺層為5層(如圖2)之複合式氟系基板,步驟可包括: The steps for preparing a composite fluorine-based substrate having 5 composite polyimide layers (as shown in Figure 2) may include:
1.將氟系樹脂層2分別形成於兩個不同的聚醯亞胺次層30的一表面上,並烘乾;
1. Form a fluorine-based
2.隨後使步驟1半成品的聚醯亞胺次層30的另一表面上形成高頻樹脂膠次層31,且在其中一半成品的高頻樹脂膠次層31上貼合聚醯亞胺次層30,接著再使其貼合至另一半成品的高頻樹脂膠次層31,並烘乾;以及
2. Then, a high-
3.最後進行高溫壓合製程,以將銅箔層1分別壓合至氟系樹脂層2上,得到複合聚醯亞胺層3為5層之複合式氟系基板。
3. Finally, a high temperature pressing process is performed to press the
在製備複合聚醯亞胺層為大於5層之情況,步驟可包括: When preparing a composite polyimide layer with more than 5 layers, the steps may include:
1.將氟系樹脂層2分別形成於兩個不同的聚醯亞胺次層30的一表面上,並烘乾;
1. Form a fluorine-based
2.隨後於聚醯亞胺次層30的另一表面上形成高頻樹脂膠次層31;
2. Then, a high
3.另外準備一聚醯亞胺次層30,在其一表面上形成高頻樹脂膠次層31後貼合額外的聚醯亞胺次層30,並烘乾;
3. Prepare a
4.視需要在步驟3半成品的聚醯亞胺次層30上再形成高頻樹脂膠次層31且貼合額外的聚醯亞胺次層30,並烘乾,此步驟可重複n次,且其中n為0及正整數;
4. If necessary, form a high-
5.將步驟2半成品以高頻樹脂膠次層31分別貼合至步驟4半成品的兩面,並烘乾;以及
5. Lay the semi-finished product of
6.最後進行高溫壓合製程,以將銅箔層1分別壓合至氟系樹脂層2上,得到本揭露之複合式氟系基板。
6. Finally, a high temperature pressing process is performed to press the
由上述可知,本揭露之複合式氟系基板具有以下的有益效果:為了解決毫米波傳輸的傳輸損耗問題以及通過複合式結構解決LCP基板、氟系基板、複合型基板常見的加工性問題,通過設計一複合聚醯亞胺層來取代習知的聚醯亞胺膜,可得到具有極低的介電損耗及介電常數(低傳輸損耗)、均勻且低的熱膨脹係數、優異的傳輸性、且適用於高溫或高濕環境的複合式氟系基板,同時,複合式氟系基板能很有效的增厚。 From the above, it can be seen that the composite fluorine-based substrate disclosed in the present invention has the following beneficial effects: in order to solve the transmission loss problem of millimeter wave transmission and solve the common processing problems of LCP substrates, fluorine-based substrates, and composite substrates through a composite structure, a composite polyimide layer is designed to replace the known polyimide film, and a composite fluorine-based substrate with extremely low dielectric loss and dielectric constant (low transmission loss), uniform and low thermal expansion coefficient, excellent transmission performance, and suitable for high temperature or high humidity environment can be obtained. At the same time, the composite fluorine-based substrate can be effectively thickened.
本揭露將參照下列實施例敘述進一步細節,然而該等實施例絕非意圖用於限制本揭露的範圍。 This disclosure will be described in further detail with reference to the following embodiments, however, these embodiments are by no means intended to limit the scope of this disclosure.
實施例1至4及比較例1至4 Examples 1 to 4 and Comparative Examples 1 to 4
實施例1至4是本揭露之複合式氟系基板,疊構依序為第一銅箔層(福田公司之產品,CF-T49A-DS-HD2)、第一氟系樹脂層(AGC公司之產品,EA-2000)、複合聚醯亞胺層、第二氟系樹脂層(AGC公司之產品,EA-2000)以及第二銅箔層(福田公司之產品,CF-T49A-DS-HD2)。 Examples 1 to 4 are composite fluorine-based substrates disclosed herein, and the stacked structures are sequentially a first copper foil layer (product of Futian Company, CF-T49A-DS-HD2), a first fluorine-based resin layer (product of AGC Company, EA-2000), a composite polyimide layer, a second fluorine-based resin layer (product of AGC Company, EA-2000), and a second copper foil layer (product of Futian Company, CF-T49A-DS-HD2).
實施例1及3之複合聚醯亞胺層為聚醯亞胺次層/高頻樹脂膠次層/聚醯亞胺次層的3層結構,該高頻樹脂膠次層(Dk=2.9/Df=0.0026)以該層之總重量計含有60重量%的熱固性聚醯亞胺樹脂、10重量%的四縮水甘油胺型環氧樹脂、20重量%的阻燃劑(科萊恩公司之產品,OP935)、8重量%的燒結二氧化矽(Denka公司之產品,FB-3SDX)以及2重量%的氟系樹脂(杜邦公司之產品,300AS),而該聚醯亞胺次層為PIAM公司之產品(FS,Dk=3.2/Df=0.0038)。各聚醯亞胺次層及高頻樹脂膠次層厚度為25μm。 The composite polyimide layer of Examples 1 and 3 is a three-layer structure of polyimide sublayer/high frequency resin rubber sublayer/polyimide sublayer. The high frequency resin rubber sublayer (Dk=2.9/Df=0.0026) contains 60 wt% of thermosetting polyimide resin, 10 wt% of tetraglycidylamine type epoxy resin, and 20 wt% of Flame retardant (Clariant's product, OP935), 8% by weight of sintered silica (Denka's product, FB-3SDX) and 2% by weight of fluorine resin (DuPont's product, 300AS), and the polyimide sublayer is a product of PIAM (FS, Dk=3.2/Df=0.0038). The thickness of each polyimide sublayer and high-frequency resin sublayer is 25μm.
實施例2及4之複合聚醯亞胺層為聚醯亞胺次層/高頻樹脂膠次層/聚醯亞胺次層/高頻樹脂膠次層/聚醯亞胺次層的5層結構,該高頻樹脂膠次層(Dk=2.9/Df=0.0026)以各層之總重量計含有60重量%的熱固性聚醯亞胺樹脂、20重量%的阻燃劑、10重量%的四縮水甘油胺型環氧樹脂、8重量%的燒結二氧化矽以及2重量%的氟系樹脂,而該聚醯亞胺次層為PIAM公司之產品(FS,Dk=3.2/Df=0.0038)。各聚醯亞胺次層厚度為12.5μm,高頻樹脂膠次層厚度為25μm。 The composite polyimide layer of Examples 2 and 4 is a five-layer structure of polyimide sublayer/high frequency resin rubber sublayer/polyimide sublayer/high frequency resin rubber sublayer/polyimide sublayer, and the high frequency resin rubber sublayer (Dk=2.9/Df=0.0026) contains 60 wt% of thermal conductivity based on the total weight of each layer. Solid polyimide resin, 20% by weight flame retardant, 10% by weight tetraglycerolamine epoxy resin, 8% by weight sintered silica and 2% by weight fluorine resin, and the polyimide sublayer is a product of PIAM (FS, Dk=3.2/Df=0.0038). The thickness of each polyimide sublayer is 12.5μm, and the thickness of the high-frequency resin sublayer is 25μm.
比較例1及比較例2為市售LCP基板(松下公司之產品,R-F705S系列),其為兩銅箔層包夾LCP層的基板,疊構中不包括氟系樹脂層、聚醯亞胺次層或高頻樹脂膠次層。而比較例3及比較例4則為市售含改性氟系樹脂層的PI基板(比較例3為杜邦TK系列基板,比較例4為Shirre PT系列基板),其以聚醯亞胺(PI)層來替換實施例之複合聚醯亞胺層,即疊構中不包括高頻樹脂膠次層。 Comparative Examples 1 and 2 are commercially available LCP substrates (Panasonic products, R-F705S series), which are substrates with two copper foil layers sandwiching an LCP layer, and the laminate does not include a fluorine resin layer, a polyimide sublayer, or a high-frequency resin sublayer. Comparative Examples 3 and 4 are commercially available PI substrates containing a modified fluorine resin layer (Comparative Example 3 is a DuPont TK series substrate, and Comparative Example 4 is a Shirre PT series substrate), which replace the composite polyimide layer of the embodiment with a polyimide (PI) layer, that is, the laminate does not include a high-frequency resin sublayer.
實施例1至4及比較例1至4之各層厚度、接著強度、Dk/Df(10GHz)、吸水率及基板之整體Dk/Df(10GHz)、吸水率、插入損耗、熱膨脹係數、尺寸安定性、耐焊錫性、雷射鑽孔時最大內縮量等數值均記載於下表1,獲取上述各值之方法如下所述。 The thickness of each layer, bonding strength, Dk/Df (10GHz), water absorption rate of Examples 1 to 4 and Comparative Examples 1 to 4, and the overall Dk/Df (10GHz), water absorption rate, insertion loss, thermal expansion coefficient, dimensional stability, solder resistance, and maximum shrinkage during laser drilling are all recorded in Table 1 below. The method for obtaining the above values is as follows.
1.接著強度測試使用拉力機,並以IPC-TM-650 2.4.9D的標準進行測試; 1. Then use a tensile testing machine for strength testing and test according to the IPC-TM-650 2.4.9D standard;
2. Dk/Df測試使用網絡分析儀以及共振腔,並以IPC-TM-650 2.5.5.13的標準進行測試; 2. The Dk/Df test uses a network analyzer and a resonant cavity and is tested according to the IPC-TM-650 2.5.5.13 standard;
3.插入損耗測試使用網絡分析儀以及探針平台,按照IPC-TM-650 2.5.5.12的標準進行測試; 3. The insertion loss test uses a network analyzer and a probe platform and is conducted in accordance with the IPC-TM-650 2.5.5.12 standard;
4.吸水率測試使用稱重法,按照IPC-TM-650 2.6.2的標準進行測試; 4. The water absorption test uses the weighing method and is conducted in accordance with the standard of IPC-TM-650 2.6.2;
5.熱膨脹係數測試使用熱機械分析儀,按照測試規範IPC-TM-650 2.4.41.3來進行; 5. The thermal expansion coefficient test is conducted using a thermomechanical analyzer in accordance with the test specification IPC-TM-650 2.4.41.3;
6.尺寸安定性測試使用二次元坐標儀,按照IPC-TM-650 2.6.2C的標準進行測試; 6. The dimensional stability test uses a two-dimensional coordinate measuring instrument and is conducted in accordance with the IPC-TM-650 2.6.2C standard;
7.耐焊錫性測試使用無鉛錫爐,按照IPC-TM-650 2.4.13的標準進行測試;以及 7. The solder resistance test is conducted using a lead-free soldering furnace in accordance with IPC-TM-650 2.4.13; and
8.雷射鑽孔最大內縮量則使用光學顯微鏡來觀測雷射鑽孔後的樣品並記錄之。 8. The maximum shrinkage of the laser drilling hole is observed and recorded using an optical microscope.
表1
由表1之結果可知,本揭露之複合式氟系基板配置了氟系樹脂層、聚醯亞胺次層以及高頻樹脂膠次層,結合了各者之優點,相較於比較例可 保持或具有更優異的Dk/Df值、吸水率、插入損耗、耐焊錫性及雷射鑽孔時最大內縮量。 From the results in Table 1, it can be seen that the composite fluorine-based substrate disclosed in the present invention is configured with a fluorine-based resin layer, a polyimide sublayer, and a high-frequency resin sublayer, combining the advantages of each, and can maintain or have a better Dk/Df value, water absorption, insertion loss, solder resistance, and maximum shrinkage during laser drilling than the comparative example.
1:銅箔層 1: Copper foil layer
2:氟系樹脂層 2: Fluorine resin layer
3:複合聚醯亞胺層 3: Composite polyimide layer
30:聚醯亞胺次層 30: Polyimide sublayer
31:高頻樹脂膠次層 31: High frequency resin layer
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