TWI843171B - Placement module and positioning device and inspection equipment equipped with the placement module - Google Patents

Abstract

The present invention provides a placement module and a positioning device and an inspection equipment provided with the placement module. The placement module is provided with a placement seat, and a positioning seat with an adsorption hole is provided on the placement seat. The placement seat is provided with a pneumatic joint that can introduce negative pressure to communicate with the adsorption hole through an air channel inside the placement seat; a plurality of groups of slides that can be displaced on a slide rail are provided on one side of the upper surface of the placement seat, and each slide is provided with a supporting part, and each supporting part jointly surrounds a accommodating interval; the slide is linked to an embedded part, and each embedded part jointly surrounds an embedded part; thereby, the object to be inspected can be inspected in a correct position.

Description

Placement module and positioning device and inspection equipment equipped with the placement module

The present invention relates to a placement module and a positioning device and inspection equipment equipped with the placement module, and in particular to a placement module used to place an object to be inspected when the object is subjected to image inspection, and a positioning device and inspection equipment equipped with the placement module.

Generally, electronic components are often inspected after they are manufactured. This type of inspection uses a CCD lens to perform visual inspections of images from all sides. These electronic components, such as IC semiconductor chips or passive component chips, can also be tiny devices of electronic products. When transporting these tiny objects, they are often transported with a suction nozzle.

Prior art patent I578428 "Chip picking device and method with multi-sided detection capability" proposes a chip picking device including: a supply module; a receiving module, which is adjacent to the supply module; a rotating module, which is arranged above the receiving module; a first pick-and-place module, which has a plurality of pick-and-place units, each of which is rotatably arranged on the rotating module; and a side detection module, which is arranged on one side of the first pick-and-place module; wherein the supply module is provided with at least one chip; each pick-and-place unit absorbs a chip, and each pick-and-place unit rotates a set angle so that the side detection module captures a plurality of side images of the chip, and the chip absorbed by each pick-and-place unit is placed in the receiving module. The die picking method includes: capturing a plurality of side images of a die, moving the die to a side detection module, the side detection module capturing each side image of the die; and placing the die in a receiving module.

The prior art I578428 uses a rotating module to move the die to the top of the receiving module. The receiving module can only move horizontally, that is, move in an X-axis direction or a Y-axis direction or move in both X-axis and Y-axis directions simultaneously or sequentially. Then, a first visual positioning module captures an image of the top of the receiving module, and then the pick-and-place unit places the die on the receiving module according to the image. In the module method, since the rotating module transports the die under high-speed intermittent rotation, if the die orientation shifts during the transport process, the receiving module performs an X-axis movement or a Y-axis movement or X-axis and Y-axis movements simultaneously or sequentially, and cannot adjust the deviation of the angular arc. The image of the top surface of the die captured by the first visual positioning module will be biased, so it needs to be improved.

Therefore, the purpose of the present invention is to provide a placement module that solves at least one disadvantage of the prior art.

Another object of the present invention is to provide a positioning device provided with the placement module.

Another object of the present invention is to provide an inspection device equipped with the placement module.

According to the placement module of the present invention, a placement seat is provided, a positioning seat with an adsorption hole is provided on the placement seat, and a pneumatic joint can introduce negative pressure through the air channel inside the placement seat to communicate with the adsorption hole; one side of the upper surface of the placement seat is provided with a plurality of sets of slides that can be displaced on a slide rail, each slide is provided with a supporting part, and each supporting part jointly surrounds a accommodating interval; the slide is linked to an embedded part, and each embedded part jointly surrounds an embedded part.

According to another purpose of the present invention, a positioning device is provided with a placement module as described above, including an embedding mechanism, which is provided with a top rod that can be driven to move. The top rod can be driven to embed into the embedding section of the placement module and push each of the embedding parts to link the abutment portion on the slide to move away from the adsorption hole, so that the accommodating section is expanded.

According to another purpose of the present invention, an inspection device is provided with a placement module as described above, including: a conveying device, provided with a frame, the frame is provided with a conveying frame, which can be driven to intermittently rotate to provide a conveying flow path with multiple stations, the conveying frame is provided with multiple pick-up and placement mechanisms, each located at a station where the conveying flow path intermittently rotates; a positioning device, located at a station where the conveying flow path intermittently rotates, and corresponding to the bottom of a pick-up and placement mechanism; the placement module is provided with an object that can be placed and positioned to withstand the transport of the pick-up and placement mechanism; an inspection unit is located above the positioning device, and an inspection unit is provided corresponding to the placement module, and can capture images of the object thereon.

The placement module of the embodiment of the present invention and the positioning device and inspection equipment equipped with the placement module are as follows: the placement module is provided with a placement seat, the placement seat is provided with a positioning seat with an adsorption hole, the placement seat is provided with an air pressure joint that can introduce negative pressure through the air passage inside the placement seat to communicate with the adsorption hole; one side of the upper surface of the placement seat is provided with a plurality of sets of slide seats that can be displaced on a slide rail, each slide seat is provided with the abutment part, and each abutment part jointly surrounds a accommodating space; the slide seat is linked with a The embedding members jointly enclose an embedding area; by placing the object to be inspected on the positioning seat with the adsorption hole, the accommodating area jointly enclosed by the abutting parts of the sliding seat and the embedding area jointly enclosed by the embedding members linked to the sliding seat are synchronously linked, and the object to be inspected may have directional deviations, which will be corrected when the abutting parts lean against each other to shrink the accommodating area and clamp it in position, so that the object to be inspected can be inspected in a correct position.

Please refer to FIG. 1. The present invention is illustrated by taking an object P1 extracted from a carrier P as an example. The carrier P is provided with a frame P3 made of a hard material around a film layer P2. The upper surface of the film layer P2 is sticky. The object P1 can be a semiconductor grain or a passive element grain, or a general electronic component.

Please refer to Figure 2. The embodiment of the present invention is explained by taking the inspection device shown in the figure as an example. The inspection device is provided with: A conveying device A, provided with a seat frame A1, the seat frame A1 is provided with a circular conveying frame A2, which can be driven to rotate intermittently to provide a conveying flow path with multiple stations intermittently, and the conveying frame A2 is provided with multiple pick-up and placement mechanisms A3 at equal intervals around the periphery, each of which is located at a station of the intermittent rotation of the conveying flow path; A positioning device B, located at a station of the intermittent rotation of the conveying flow path, and corresponding to the bottom of a pick-up and placement mechanism A3; a placement module B1 is provided for the object P1 transported by the pick-up and placement mechanism A3 to be placed and positioned; A viewing unit C is disposed on the conveying device A and correspondingly located above the positioning device B. It is provided with, for example, a CCD lens corresponding to the placement module B1 and can capture an image of the object P1 thereon.

Please refer to Figures 3 and 4. The frame A1 of the conveying device A is provided with upright columns A11 on both sides, and a horizontal frame A12 suspended above the two columns A11. A fixed seat A13 is provided on both sides of the horizontal frame A12. Each fixed seat A13 is provided with a catch A14 that can be driven to move up and down. The catch A14 is in the shape of an inverted fork, and a pressure seat A141 is provided below. The pressure seat A141 is in the shape of a horizontal The conveying frame A2 of the conveying device A is fixedly mounted under the cross frame A12 of the seat frame A11 with a fixed seat A21, and is in a ring shape and can be driven to rotate intermittently. The periphery of the conveying frame A2 is provided with multiple pick-and-place mechanisms A3 spaced apart, which can rotate intermittently with the conveying frame A2 to extract and transport the object P1 in Figure 1.

Please refer to Figure 5. A push mechanism A4 is provided between the conveying rack A2 and the fixed seat A21. The push mechanism A4 is provided with a cam plate A41. The cam plate A41 can be driven to make radial horizontal displacement on a slide rail A42. The arc-shaped periphery width of the cam plate A41 covers the distance around which the three pick-and-place mechanisms A3 are arranged. A push portion A411 is provided at the middle section of the arc-shaped periphery, a pre-push portion A412 is provided at one side of the push portion A411 and is located at the front section of the intermittent rotating flow path of the conveying rack A2, and a slow-down portion A413 is provided at the other side of the push portion A411 and is located at the rear section of the intermittent rotating flow path of the conveying rack A2.

Please refer to Figure 6. The pick-and-place mechanism A3 is provided with: A fixing member A31, which is a rod with a rectangular cross section, one end of which is fixed to the conveying frame A2 A slide rail A311 is provided on one side, a slide seat A312 is provided on the slide rail A311, a roller A313 is provided on the slide seat A312, and the roller A313 can be pushed by the cam plate A41 of the push mechanism A4 to link the slide seat A312 to move; the slide seat A312 is provided with a connecting member A314; an elastic member A316 composed of a coil spring is provided between the slide seat A312 and a fixing member A315 provided at one end of the fixing member A31, and the elastic member A316 provides a reverse restoring force for the slide seat A312 to move along the axial straight line of the fixing member A31; an axle seat A32 is provided below the fixing member A31 and is located on the conveying frame A2 circle A rotating member A33 is arranged above the fixing member A31 and outside the circumference of the conveying frame A2. It is limited by a U-shaped limiting member A331 fixed on the fixing member A31. The rotating member A33 is provided with a hinge part A332. The hinge part A332 is hinged with the connecting member A314 of the slide A312 and can link the rotating member A33 to rotate horizontally by a preset arc when the slide A312 moves. A shaft A34 passes through the rotating member A33, the fixing member A31 and the shaft seat A32. , a pressure-bearing portion A341 linked to it is provided at its upper end, and an adsorption portion A342 linked to it is provided at its lower end; the rotational displacement of the rotating member A33 is linked to the rotation of the shaft A34, and the up-down displacement and rotation of the shaft A34 are linked to the up-down displacement and rotation of the pressure-bearing portion A341 and the adsorption portion A342; wherein the pressure-bearing portion A341 is in an "I"-shaped plate shape and is perpendicular to the central axis of the shaft A34, and is provided with two pressure-bearing portions A343 spaced apart and located at both sides of the top end of the shaft A34, and the width of the two pressure-bearing portions A343 is greater than that of the two pressure-resisting portions A1 42, and each corresponds to the two pressing parts A142 below the catch A14 in FIG2; the outer diameter of the shaft A34 between the pressure-bearing part A341 and the limiting part A331 is sleeved with an elastic part A344 composed of a coil spring; the lower end of the adsorption part A342 is provided with a suction nozzle A345, which is connected to the air pressure joint A321 on the shaft seat A32 and can be introduced with negative pressure; an elastic part A346 composed of a coil spring is provided between the adsorption part A342 and the shaft seat A32, and the central axis of the elastic part A346 is offset from the shaft A34 at a distance.

Please refer to Figure 7. The push mechanism A4 is provided with an upper slot seat A43 with a slot facing downward and a lower slot seat A44 with a slot facing upward. The upper slot seat A43 is fixedly connected to the fixed seat A21, and the lower slot seat A44 is fixedly connected to the slide rail A42. The slide rail A42 is provided with two spaced apart and parallel to each other. Each of the slide rails A42 is respectively provided on a slide seat A421 fixedly connected to the cam plate A41. A guide member A414 in the shape of a round rod is provided between the two slide rails A42. A slot between the upper slot seat A43 and the lower slot seat A44 is fixedly connected to the slide rail A42. A driving member A45 composed of a pneumatic cylinder is fixedly arranged in the lower groove seat A44, and a sliding member A46 is arranged in a slot A441 of the lower groove seat A44, and can slide and displace in a direction perpendicular to the axis of the sliding rail A42. A first guide groove A442 is arranged at the bottom of the slot A441, and is hollowed out in a direction parallel to the axis of the sliding rail A42. A second guide groove A461 is arranged on the sliding member A46, and is hollowed out in a direction inclined. 62, the second guide groove A461 is provided with a retreat positioning portion A463 at one end and a forward positioning portion A464 at the other end, wherein the forward positioning portion A464 has a portion which is perpendicular to the axis of the slide rail A42, the linkage portion A462 is connected to and driven by the cylinder rod of the pneumatic cylinder of the drive member A45, so that the slide member A46 can make a reciprocating sliding displacement in the groove A441 in a direction perpendicular to the axis of the slide rail A42; the guide member A414 passes through the lower The first guide groove A442 of the slot seat A44 protrudes into the second guide groove A461 of the slide A46. When the slide A46 is driven to slide back and forth in the slot A441 in a direction perpendicular to the axis of the slide rail A42, the second guide groove A461 guides the guide member A414 to move from the backward positioning portion A463 to the forward positioning portion A464, and links the cam plate A41 fixed to the guide member A414 to make a relative displacement on the slide rail A42.

Please refer to FIG8 . The placement module B1 of the positioning device B is arranged on a turntable B21 of a driving seat B2. The driving seat B2 is arranged on a table B31 of a stand B3. The turntable B21 can be driven by the driving seat B2 to rotate intermittently. The placement module B1 is provided with a plurality of (four in this embodiment) modules arranged horizontally around the turntable B21 at intervals. A rotating joint B22 is provided in the center of the turntable B21. The rotating joint B22 includes an upper connecting seat B221 located at the top and a lower connecting seat B222 located at the bottom. The upper connecting seat B221 and the lower connecting seat B222 can rotate relative to each other. The upper end of the upper connecting seat B221 is driven by the stand B3. One end of a fixing piece B32 is fixed on the table B31 and cannot rotate. The lower end of the lower connection seat B222 is fixed on the turntable B21 and can rotate with the turntable B21. The rotating joint B22 is provided with a plurality of air pressure joint sets B23 corresponding to the number of the placement modules B1. Each of the air pressure joint sets B23 includes an upper joint B231 located on the upper connection seat B221 and a lower joint B232 located on the lower connection seat B222. The upper joint B231 is connected to the air pressure source. The upper joint B231 and the lower joint B232 are connected through the air passage inside the rotating joint B22.

Please refer to Figure 9. Each placement module B1 is provided with a placement seat B11. The placement seat B11 is provided with a positioning seat B112 with an adsorption hole B111. A pneumatic joint B12 is provided on one side of the placement seat B11. The pneumatic joint B12 is connected to the lower joint B232 of the rotary joint B22, and can introduce negative pressure through the air channel inside the placement seat B11 to communicate with the adsorption hole B111; a plurality of sets of slides B14 are provided on one side of the upper surface of the placement seat B11, each of which can perform linear sliding displacement on a slide rail B13. Each slide B14 is provided with a support that is linked to the slide B14 and faces the adsorption hole B111 on the positioning seat B112. The abutment portion B141, one end of each abutment portion B141 jointly surrounds a receiving space B142 located around the adsorption hole B111 and above the positioning seat B112; the positioning seat B112 is located at one end of the slide B14 and forms a stopper for the slide B14 to slide toward the end, and one side of the placement seat B11 is provided with a stopper B113 for limiting the slide B14 to slide toward the other end. An elastic member B114 composed of a coil spring is provided between the stopper B113 and the slide B14, and the elastic member B114 provides a driving force for the slide B14 toward the positioning seat B112.

Please refer to Figures 9 and 10. The slide B14 is provided with a linkage portion B143 extending downward through a long groove-shaped hollow section B115 of the placement seat B11 and protruding to the lower surface. The linkage portion B143 is provided with an inserting member B144 linked thereto and close to the center of the lower surface of the placement seat B11 below the lower surface of the placement seat B11. The inserting member B144 is provided with an inserting portion B145 in the shape of an inclined surface at one end close to the center of the lower surface of the placement seat B11. The inserting portions B145 of the inserting members B144 linked to each slide B14 jointly enclose an inserting section B146. The inserting section B146 is narrower on one side close to the lower surface of the placement seat B11 and wider on the other side far from the lower surface of the placement seat B11.

Please refer to Figures 8 and 10. A portion of the placement seat B11 is fixed near the periphery of the turntable B21, and another portion is suspended outside the periphery of the turntable B21, wherein the abutment section B146 is located outside the periphery of the turntable B21.

Please refer to Figures 2 and 8. The turntable B21 is driven to intermittently rotate the placement modules B1 thereon in a counterclockwise direction. On the intermittently rotating flow path, one of the placement modules B1 is located below the pick-and-place mechanism A3, and another one of the placement modules B1 is located below the inspection unit C. On the intermittently rotating flow path, the placement module B1 at the previous station of the placement module B1 corresponding to the inspection unit C, that is, the placement module B1 corresponding to the pick-and-place mechanism A3, and the placement module B1 at the next station of the placement module B1 corresponding to the inspection unit C, are respectively provided with an embedded top mechanism B4 at the bottom, and the embedded top mechanism B4 is provided on the table B31 of the stand B3.

Please refer to Figures 9 and 10. The embedded top mechanism B4 is provided with a mechanism that can be driven to move up and down. The top rod B41 is displaced, and a conical portion B411 is provided at the top end of the top rod B41. When the top rod B41 is driven to rise, it can be embedded in the embedding section B146 of the placement module B1, and push the embedding section B145 of each embedding member B144, so as to link the abutting section B141 on the slide B14 to move away from the adsorption hole B111, and compress the elastic member B114 to expand the accommodating section B142; when the top rod B41 is driven to move downward, the restoring force of the elastic member B114 will cause the slide B14 to move toward the positioning seat B112, so that the accommodating section B142 will shrink.

Please refer to Figures 1 to 10. When the embodiment of the present invention is implemented, the load in Figure 1 The plate A can be transported by a conveying channel or placed in a position. The transport device A is driven by the catch A14 and the two pressing parts A142 of the pressing seat A141 press down the pressure-bearing part A341 of the pick-and-place mechanism A3, so that the shaft A34 links the adsorption part A342 to move down to extract the object P1. When the pick-and-place mechanism A3 adsorbs the object P1, it is driven by the transport rack A2 to perform multi-station displacement transport with intermittent rotation. When the pick-and-place mechanism A3 is displaced to the pre-pushing part A412 of the cam plate A41, the pushing mechanism A4 will drive the cam plate A41 toward the radial direction of the transport rack A2, and according to the transport rack A2, the pick-and-place mechanism A3 is driven to move the cam plate A41 to the radial direction of the transport rack A2. The rotation center of the frame A2 is displaced outwardly in the straight line direction formed by the push portion A411 and the push portion A411. At this time, the roller A313 on the pick-and-place mechanism A3 will be abutted by the pre-pushing portion A412 of the cam plate A41. When the pick-and-place mechanism A3 is displaced to the arc path of the next station, the cam plate A41 will continue to move outward, so that the roller A313 is pushed and the slide seat A312 is linked to slide and displace. When the elastic member A316 is compressed, the connecting member A314 pushes the rotating member A33 to rotate. The rotation displacement of the rotating member A33 is linked to the rotation of the shaft A34, so that the pressure-bearing portion A341 and the adsorption portion A34 2 synchronously rotates and links, so that the object P1 adsorbed under the adsorption part A342 is deflected; when the pick-and-place mechanism A3 is displaced to the next station, the roller A313 has rolled along the cam plate A41 and abutted against the push part A411. At this time, the cam plate A41 is pushed outward to reach the front dead point, and the object P1 adsorbed under the adsorption part A342 has also been deflected by an angle (ninety degrees in this embodiment) to reach the position. If the purpose of the deflection of the object P1 is to change the direction and place the object P1, then at this time, the catch A14 on the seat frame A1 will be driven to cause the two pressure-abutting parts A141 with a spacing between them to be pressed. 2 presses down the pressure-bearing portion A341 of the pick-and-place mechanism A3 and compresses the elastic member A344. Since the pressure-bearing portion A341 is in an "I"-shaped plate shape and the width of the two pressure-bearing portions A343 is greater than the width between the two pressure-bearing portions A142, the pressure-bearing portion A341 is inclined relative to the two pressure-bearing portions A142. The two pressing parts A142 can still press against the inclined part, so that the pressure-bearing part A341 links the shaft A34, so that the adsorption part A342 at the lower end of the shaft A34 moves downward and compresses the elastic part A346, placing the object P1 adsorbed thereon and deflected by an angle to reach the position at the preset position, and releasing the negative pressure adsorption.

In this embodiment of the invention, the object P1 on the pick-and-place mechanism A3 is The top mechanism B4 is placed on the flow path of the intermittent rotation of the turntable B21 in the positioning device B and is located in the placement module B1 at the previous station of the placement module B1 corresponding to the lower side of the inspection unit C. Before the pick-and-place mechanism A3 places the object P1, the top mechanism B4 first drives the top rod B41 to rise and embed into the embedding section B146 of the placement module B1 to expand the accommodation section B142, so that the object P1 can be placed in the accommodation section B142 and adsorbed by the negative pressure in the adsorption hole B111; then when the top rod B41 is driven downward, the accommodation section B142 is reduced, and the object P1 is guided, positioned and clamped by the abutting parts B141 on the slide seats B14 that are clamped relatively.

The object P1 that has been corrected, positioned and clamped is moved to the bottom of the inspection unit C1 of the inspection unit C by the intermittent rotation of the turntable B21 in the placement module B1, so that the inspection unit C1 can take an image of the upper surface of the object P1. After the image is taken, the placement module B1 is transported to the next station by the intermittent rotation of the turntable B21. After the top embedding mechanism B4 drives the top rod B41 to rise and embed into the embedding section B146 of the placement module B1 to expand the accommodating section B142, the object P1 can be extracted by the next process for subsequent operations.

The present invention provides a placement module and a positioning device and inspection equipment equipped with the placement module. The placement module B1 is provided with a placement seat B11, and a positioning seat B112 with an adsorption hole B111 is provided on the placement seat B11. The placement seat B11 is provided with a pneumatic joint B12 that can introduce negative pressure to communicate with the adsorption hole B111 through the air passage inside the placement seat B11. A plurality of sets of slides B14 that can be displaced on a slide rail B13 are provided on one side of the upper surface of the placement seat B11. Each slide B14 is provided with a supporting portion B141, and each of the supporting portions B141 jointly surrounds a receiving space B142. The slide B14 is linked to an inserting member B144. Each of the abutting parts B144 jointly encloses an abutting interval; by placing the object P1 to be inspected on the positioning seat B112 with the adsorption hole B111, the accommodating interval B142 jointly enclosed by each of the abutting parts B141 of each of the slides B14 and the abutting interval B146 jointly enclosed by each of the abutting parts B144 linked to the slides B14 are synchronously linked, and the object P1 to be inspected may have a positional deviation, which will be corrected by the abutting parts leaning against each other to shrink the accommodating interval B142 and clamping it in position, so that the object P1 to be inspected can be inspected in a correct position.

However, what is described above is only a preferred embodiment of the present invention, and should not be used to limit the scope of implementation of the present invention. In other words, any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the invention description are still within the scope of the present patent.

A: Transport device A1: Frame A11: Column frame A12: Cross frame A13: Fixed seat A14: Latch A141: Pressing seat A142: Pressing part A2: Transport frame A21: Fixed seat A3: Pick-up and place mechanism A31: Fixed seat A311: Slide rail A312: Slide seat A313: Roller A314: Connector A315: Fixed part A316: Elastic part A32: Shaft seat A321: Air pressure joint A33: Rotating part A331: Limiting part A332: Hinged part A34: Shaft A341: Pressure bearing part A342: Adsorption part A343: Pressure bearing part A344: Elastic part A345: Suction nozzle A346: Elastic part A4: Pushing mechanism A41: Cam plate A411: Pushing part A412: Pre-pushing part A413: Slow-down part A414: Guide part A42: Slide rail A421: Slide seat A43: Upper slot seat A431: Slot space A44: Lower slot seat A441: Slot space A442: First guide groove A45: Driving part A46: Slide member A461: Second guide groove A462: Linking part A463: Retracting positioning part A464: Forward positioning part B: Positioning device B1: Placement module B11: Placement seat B111: Adsorption hole B112: Positioning seat B113: Stopper B114: Elastic part B115: hollow section B12: pneumatic joint B13: slide rail B14: slide seat B141: support part B142: storage section B143: linkage part B144: insert B145: insert B146: insert section B2: drive seat B21: turntable B22: swivel joint B221: upper seat B222: lower seat B23: pneumatic joint assembly B231: upper joint B232: lower joint B3: stand B31: table B32: fixing part B4: top mechanism B41: top rod B411: cone C: inspection unit P: carrier P1: object P2: membrane layer P3: Frame

Other features and functions of the present invention will be clearly presented in the implementation method with reference to the drawings, in which: Figure 1 is a three-dimensional diagram illustrating that the object to be extracted in the embodiment of the present invention is placed in a tray; Figure 2 is a three-dimensional diagram illustrating the inspection equipment in the embodiment of the present invention; Figure 3 is a three-dimensional diagram illustrating the relationship between the seat frame of the conveying device and the conveying frame in the embodiment of the present invention; Figure 4 is a partial three-dimensional diagram illustrating the relationship between the conveying frame and the pick-and-place mechanism and the latch in the embodiment of the present invention; Figure 5 is a partial three-dimensional diagram illustrating the relationship between the conveying frame and the pick-and-place mechanism in the embodiment of the present invention; Figure 6 is a three-dimensional exploded diagram illustrating the push mechanism in the embodiment of the present invention; Figure 7 is a partial three-dimensional diagram illustrating the pick-and-place mechanism in the embodiment of the present invention; FIG8 is a three-dimensional diagram illustrating the positioning device in the embodiment of the present invention; FIG9 is a three-dimensional diagram illustrating the placement module and the embedded top mechanism in the embodiment of the present invention; FIG10 is a three-dimensional exploded diagram illustrating the placement module and the embedded top mechanism in the embodiment of the present invention.

B1: Placement module

B11: Storage seat

B111: Adsorption hole

B112: Positioning seat

B113: Stopper

B114: Elastic parts

B12: Air pressure connector

B13: Slide rail

B14: Sliding seat

B141: The support part

B142: Storage area

B4: Embedded top mechanism

Claims (10)

A placement module is provided with a placement seat, a positioning seat with an adsorption hole is provided on the placement seat, and a pneumatic joint is provided on the placement seat to introduce negative pressure to communicate with the adsorption hole through the air channel inside the placement seat; a plurality of sets of slides are provided on one side of the upper surface of the placement seat, each of which can move on a slide rail, and each slide is provided with a supporting part, and each supporting part jointly surrounds a receiving area; an object can be placed in the receiving area and adsorbed by the negative pressure in the adsorption hole in the receiving area; the slide is linked to an inserting member, and each of the inserting members jointly surrounds an inserting area. The placement module as described in claim 1, wherein the positioning seat is located at one end of the slide and forms a stopper for the slide to slide toward the end, and a stopper is provided on one side of the placement seat for limiting the slide to slide toward the other end, and an elastic member is provided between the stopper and the slide, and the elastic member provides a driving force for the slide toward the positioning seat. As described in claim 1, the placement module, wherein the slide seat is provided with a linkage portion extending downward through a hollow space of the placement seat and protruding to the lower surface, and the linkage portion is provided with the inserting member below the lower surface of the placement seat and linked with it and facing the center of the lower surface of the placement seat. As described in claim 1, the placement module, wherein the end of the inserting member close to the center of the lower surface of the placement seat is provided with an inserting portion in the shape of an inclined surface, and the inserting section is narrower on the side close to the lower surface of the placement seat and wider on the other side far from the lower surface of the placement seat. A positioning device is provided with a placement module as described in any one of claim items 1 to 4, including an embedding mechanism, the embedding mechanism is provided with a top rod that can be driven to move, the top rod can be driven to embed into the embedding section of the placement module, and push each of the embedding parts to link the abutment part on the slide to move away from the adsorption hole, so that the accommodating section is expanded. As described in claim 5, the positioning device, wherein the placement module is arranged on a turntable of a driving seat, the turntable can be driven to intermittently rotate, the placement module is provided with a plurality of spaced-apart rings arranged on the turntable, a portion of the placement seat is fixed near the periphery of the turntable, and another portion is suspended outside the periphery of the turntable, wherein the embedding section is located outside the periphery of the turntable. A positioning device as described in claim 6, wherein one of the placement modules corresponds to being located below a pick-and-place mechanism, and one corresponds to being located below a viewing unit. As described in claim 6, the positioning device, wherein, on the intermittently rotating flow path, the placement module at the previous station of the placement module corresponding to the bottom of the inspection unit, that is, the placement module corresponding to the bottom of the pick-and-place mechanism, and the placement module at the next station of the placement module corresponding to the bottom of the inspection unit, are respectively provided with the top embedding mechanism corresponding to the bottom of the embedding section, and the top embedding mechanism is provided on a table of a rack. As described in claim 6, a swivel joint is provided in the center of the turntable, the swivel joint includes an upper connection seat located at the top and a lower connection seat located at the bottom, the upper connection seat and the lower connection seat can rotate relative to each other, wherein the upper end of the upper connection seat is fixed by one end of a fixing member on the table of the stand and cannot rotate, and the lower end of the lower connection seat is fixed on the turntable and can rotate with the turntable; the swivel joint is provided with a plurality of air pressure joint groups, each of which includes an upper joint located on the upper connection seat and a lower joint located on the lower connection seat, the upper joint is connected to the air pressure source, and the upper joint and the lower joint are connected through the air passage inside the swivel joint. An inspection device, using a placement module as described in any one of claims 1 to 4, comprising: a conveying device, provided with a frame, the frame provided with a conveying frame, which can be driven to intermittently rotate to provide a conveying flow path with multiple stations, the conveying frame provided with multiple pick-up and placement mechanisms respectively located at a station where the conveying flow path intermittently rotates; a positioning device, located at a station where the conveying flow path intermittently rotates, and corresponding to the bottom of a pick-up and placement mechanism; provided with the placement module for positioning an object carried by the pick-up and placement mechanism; an inspection unit, correspondingly located above the positioning device, provided with an inspection unit corresponding to the placement module, and capable of taking an image of the object thereon.