TWI840435B - Multilayer body and manufacturing method thereof, and manufacturing method of printed wiring board - Google Patents
Multilayer body and manufacturing method thereof, and manufacturing method of printed wiring board Download PDFInfo
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- TWI840435B TWI840435B TW108139227A TW108139227A TWI840435B TW I840435 B TWI840435 B TW I840435B TW 108139227 A TW108139227 A TW 108139227A TW 108139227 A TW108139227 A TW 108139227A TW I840435 B TWI840435 B TW I840435B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
- B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Laminated Bodies (AREA)
Abstract
本發明之積層體(100)之剛性支持體(30)之第一主面上,具備依序積層之離型片(21)及可撓性膜狀基材(11)。膜狀基材可為包含可撓性絕緣樹脂膜,且於絕緣樹脂膜之主面上具備金屬導體層者。支持體之外周比離型片之外周更向外側突出,膜狀基材之外周比離型片之外周更向外側突出。於比離型片之外周更外側之區域(8),支持體與膜狀基材接著。The first main surface of the rigid support (30) of the laminate (100) of the present invention has a release sheet (21) and a flexible film-like substrate (11) laminated in sequence. The film-like substrate may include a flexible insulating resin film, and a metal conductor layer is provided on the main surface of the insulating resin film. The outer periphery of the support protrudes further outward than the outer periphery of the release sheet, and the outer periphery of the film-like substrate protrudes further outward than the outer periphery of the release sheet. The support and the film-like substrate are in contact in a region (8) further outward than the outer periphery of the release sheet.
Description
本發明係關於一種積層體及其製造方法、與使用該積層體的印刷佈線板之製造方法。 The present invention relates to a multilayer body and a method for manufacturing the multilayer body, and a method for manufacturing a printed wiring board using the multilayer body.
於絕緣基板上具備包含金屬導體之電路之印刷佈線板大致分為剛性印刷佈線板與可撓性印刷佈線板。可撓性印刷佈線板主要用於充分發揮靈活性而將基板小型化彎折並收納於電子機器內部之用途。 Printed wiring boards with circuits containing metal conductors on an insulating substrate are generally divided into rigid printed wiring boards and flexible printed wiring boards. Flexible printed wiring boards are mainly used to fully utilize their flexibility to miniaturize and bend the substrate and store it inside electronic equipment.
於印刷佈線板之製造步驟中,在利用濕式鍍覆之金屬導體層之形成、利用濕式蝕刻之金屬導體層之圖案化、抗蝕劑之顯影、除渣處理等中,使用各種藥液。於剛性印刷佈線板之製造步驟中,使用片狀之剛性基材批量式地進行加工。由於可撓性印刷佈線板使用可撓性基材,故其製造步驟多藉由所謂卷軸式薄膜輸送製程而實施,與使用剛性基材批量式地進行加工之剛性印刷佈線板之製造步驟相比,其加工精度較低。例如,於被分類為剛性印刷佈線板之半導體封裝基板中,電路佈線逐步窄間距化,可量產電路寬度(線路/間距)為10μm以下之印刷佈線板,相對於此,可撓性印刷佈線板之電路寬度即便小,亦有20μm左右。 In the manufacturing process of printed wiring boards, various chemical solutions are used in the formation of metal conductor layers by wet plating, patterning of metal conductor layers by wet etching, development of anti-corrosive agents, and slag removal. In the manufacturing process of rigid printed wiring boards, sheet-shaped rigid substrates are used for batch processing. Since flexible printed wiring boards use flexible substrates, their manufacturing process is often implemented by a so-called roll-to-roll film conveying process, and their processing accuracy is lower than that of rigid printed wiring boards that are processed in batches using rigid substrates. For example, in semiconductor package substrates classified as rigid printed wiring boards, the circuit wiring pitch is gradually becoming narrower, and printed wiring boards with a circuit width (line/pitch) of less than 10μm can be mass-produced. In contrast, the circuit width of flexible printed wiring boards is small, but it is still around 20μm.
隨著電子機器之多功能化及小型化,要求印刷佈線板進一步窄間距化、及為了收納於小型化之電子機器內而要求軟硬複合化。為了製造窄間距之軟硬複合基板,需要於可撓性之膜基材形成與剛性印刷佈線板同程度之窄間距電路。 As electronic devices become more multifunctional and miniaturized, printed wiring boards are required to have narrower pitches, and rigid-flex composites are required to be accommodated in miniaturized electronic devices. In order to manufacture a narrow-pitch rigid-flex composite substrate, it is necessary to form a narrow-pitch circuit on a flexible film substrate to the same degree as a rigid printed wiring board.
作為於可撓性膜基材上進行高精度加工之方法,揭示有如下製程:使可撓性膜基材貼合於玻璃板等剛性支持體上而形成剛性積層體,於該積層體之可撓性膜基材上進行印刷或形成元件等加工後,將該可撓性膜基材自支持體剝離(例如專利文獻1)。 As a method for performing high-precision processing on a flexible film substrate, the following process is disclosed: a flexible film substrate is bonded to a rigid support such as a glass plate to form a rigid laminate, and after printing or forming elements on the flexible film substrate of the laminate, the flexible film substrate is peeled off from the support (for example, Patent Document 1).
[專利文獻1]日本專利特開2015-193101號公報 [Patent document 1] Japanese Patent Publication No. 2015-193101
如專利文獻1中所揭示般,因於剛性支持體上貼合有可撓性膜基材之積層體可應用於使用剛性基板之批量式製程,故認為於可撓性膜基材上,可形成具有與剛性印刷佈線板同程度之窄間距電路之印刷佈線板。但是,因於印刷佈線板之製造步驟中使用各種藥液,故存在藥液滲入支持體與可撓性膜基材之積層界面而產生非預期之剝離之情況。又,若設置於積層界面之接著劑或黏著劑溶解於藥液中,則可能會造成污染。 As disclosed in Patent Document 1, since a laminate having a flexible film substrate bonded to a rigid support can be applied to a batch process using a rigid substrate, it is believed that a printed wiring board having a narrow pitch circuit comparable to that of a rigid printed wiring board can be formed on the flexible film substrate. However, since various chemical solutions are used in the manufacturing steps of the printed wiring board, there is a possibility that the chemical solution penetrates into the laminate interface between the support and the flexible film substrate and causes unexpected peeling. In addition, if the adhesive or bonding agent disposed at the laminate interface dissolves in the chemical solution, it may cause contamination.
為防止因接著不良或溶解於藥液而產生之污染,考慮使用光固性或熱固性之接著材料,更牢固地貼合支持體與可撓性膜基材而防止藥液滲入積層界面或接著材料溶解於藥液。但是,若使用硬化性之接著材料,則存在難以將加工後之可撓性膜基材自支持體剝離之情況,及於可撓性膜之表面上殘存有接著材料從而造成污染的情況。 In order to prevent contamination caused by poor bonding or dissolution in the chemical solution, consider using photocurable or thermosetting bonding materials to more firmly bond the support and the flexible film substrate to prevent the chemical solution from penetrating the layer interface or the bonding material from dissolving in the chemical solution. However, if a hardening bonding material is used, it is difficult to peel the processed flexible film substrate from the support, and there may be residual bonding materials on the surface of the flexible film, causing contamination.
鑒於以上所述,本發明之目的在於提供一種可應用於剛性印刷佈線板之製造設備之積層體、及使用該積層體之印刷佈線基板之製造方法。 In view of the above, the purpose of the present invention is to provide a laminate that can be applied to a manufacturing device for a rigid printed wiring board, and a method for manufacturing a printed wiring board using the laminate.
本發明之積層體之剛性支持體之第一主面上,具備依序積層之離型片及可撓性膜狀基材。膜狀基材包含聚醯亞胺膜等可撓性絕緣樹脂膜。膜狀基材可由絕緣樹脂膜構成,亦可於絕緣樹脂膜之至少一主面上具備金屬導體層。 The first main surface of the rigid support of the laminate of the present invention has a release sheet and a flexible film substrate laminated in sequence. The film substrate includes a flexible insulating resin film such as a polyimide film. The film substrate can be composed of an insulating resin film, and can also have a metal conductor layer on at least one main surface of the insulating resin film.
於本發明之積層體中,支持體之外周及膜狀基材之外周比離型片之外周更向外側突出,比離型片之外周更向外側突出之支持體與膜狀基材接著。 In the laminate of the present invention, the periphery of the support and the periphery of the film-like substrate protrude further outward than the periphery of the release sheet, and the support protruding further outward than the periphery of the release sheet is in contact with the film-like substrate.
膜狀基材之外周亦可比支持體之外周更向外側突出。離型片上可設置開口,支持體之第一主面與膜狀基材之第二主面可於離型片上設置有開口之部分接著。 The outer periphery of the film-like substrate may also protrude further outward than the outer periphery of the support. An opening may be provided on the release sheet, and the first main surface of the support and the second main surface of the film-like substrate may be connected at the portion of the release sheet where the opening is provided.
上述積層體例如藉由對在支持體之第一主面上依序配置有離型片及膜狀基材之積層物進行熱壓而獲得。藉由熱壓,比離型片之外周更向外側突出之支持體與膜狀基材接著。例如,於支持體係預浸體之情形時,預浸體之含浸樹脂藉由加熱硬化而表現出接著性。 The above-mentioned laminate is obtained, for example, by heat-pressing a laminate having a release sheet and a film-like substrate arranged in sequence on the first main surface of the support. By heat-pressing, the support protruding outward from the outer periphery of the release sheet is bonded to the film-like substrate. For example, when the support is a prepreg, the impregnated resin of the prepreg exhibits adhesion by heat curing.
上述積層體可應用於印刷佈線板之製造。於印刷佈線板之製造中,於積層體之絕緣樹脂膜之第一主面上形成第一電路。例如,藉由對設置於絕緣樹脂膜之第一主面上之金屬導體層進行蝕刻而形成第一電路。亦可藉由圖案鍍覆而形成第一電路。於形成第一電路之前,可藉由濕式或乾式之無電解鍍覆等,於絕緣樹脂膜之第一主面上形成金屬導體層。 The above-mentioned laminate can be applied to the manufacture of printed wiring boards. In the manufacture of printed wiring boards, a first circuit is formed on the first main surface of the insulating resin film of the laminate. For example, the first circuit is formed by etching a metal conductor layer provided on the first main surface of the insulating resin film. The first circuit can also be formed by pattern plating. Before forming the first circuit, a metal conductor layer can be formed on the first main surface of the insulating resin film by wet or dry electroless plating.
於絕緣樹脂膜之第一主面上形成第一電路後,將絕緣樹脂膜自支持體及離型片分離。例如,藉由將支持體與膜狀基材接著之外周緣部切除而進行絕緣樹脂膜自積層體之分離。 After forming the first circuit on the first main surface of the insulating resin film, the insulating resin film is separated from the support and the release sheet. For example, the insulating resin film is separated from the laminate by cutting off the outer peripheral portion where the support and the film-like substrate are connected.
可設置將絕緣樹脂膜之第一主面及形成於其上之第一電路覆蓋之絕緣層,於絕緣層上形成第二電路而進行多層化。可於將絕緣樹脂膜自積層體分離之前實施多層化,亦可於將絕緣樹脂膜自積層體分離之後實施多層化。可於將絕緣樹脂膜自積層體分離後,於絕緣樹脂膜之第二主面上形成第三電路。 An insulating layer covering the first main surface of the insulating resin film and the first circuit formed thereon may be provided, and a second circuit may be formed on the insulating layer to perform multilayering. The multilayering may be performed before the insulating resin film is separated from the laminate, or after the insulating resin film is separated from the laminate. The third circuit may be formed on the second main surface of the insulating resin film after the insulating resin film is separated from the laminate.
因於剛性支持體上隔著離型片積層有膜狀基材之積層體具有剛性, 故可應用於剛性印刷佈線板用製造設備等處理剛性基材之裝置中。因此,可製造以軟硬複合佈線板等膜狀基材作為基底之印刷佈線板。 Since the laminated body having a film-like substrate laminated on a rigid support with a release sheet interposed therebetween has rigidity, it can be applied to equipment for processing rigid substrates such as manufacturing equipment for rigid printed wiring boards. Therefore, printed wiring boards using film-like substrates such as flexible and rigid composite wiring boards as bases can be manufactured.
於積層體之外周緣,支持體與膜狀基材接著,故於印刷佈線板之製造製程中,可防止藥液滲入離型片之積層界面。因此,可防止電路形成等製程中之膜狀基材之剝離,或製造步驟之污染。於電路形成後任意之階段,藉由積層體之外周緣之切除等,可容易地將膜狀基材自積層體分離。 The support body is connected to the film substrate at the outer periphery of the laminate, so that the chemical solution can be prevented from penetrating into the laminate interface of the release sheet during the manufacturing process of the printed wiring board. Therefore, the peeling of the film substrate during the circuit formation process or the contamination of the manufacturing step can be prevented. At any stage after the circuit is formed, the film substrate can be easily separated from the laminate by cutting off the outer periphery of the laminate.
1:外周端 1: Peripheral end
2:外周端 2: Peripheral end
3:外周端 3: Peripheral end
5:開口 5: Open mouth
7:區域 7: Region
8:外周區域 8: Peripheral area
9:區域 9: Region
11:膜狀基材 11: Film substrate
12:膜狀基材 12: Film substrate
21:離型片 21: Release film
22:離型片 22: Release film
30:支持體 30: Support body
42:保護片 42: Protective film
100:積層體 100: Layered body
101:積層體 101: Laminated body
102:積層體 102: Laminated body
103:積層體 103: Laminated body
C1、C2、C3、C4:線 C1, C2, C3, C4: lines
圖1係一種實施形態之積層體之模式剖視圖。 Figure 1 is a schematic cross-sectional view of a laminated body in one embodiment.
圖2係一種實施形態之積層體之模式俯視圖。 Figure 2 is a top view of a model of a multilayer structure in an implementation form.
圖3係一種實施形態之積層體之模式剖視圖。 Figure 3 is a schematic cross-sectional view of a laminated body in one implementation form.
圖4係一種實施形態之積層體之模式剖視圖。 Figure 4 is a schematic cross-sectional view of a laminated body in one embodiment.
圖5係一種實施形態之積層體之模式剖視圖。 Figure 5 is a schematic cross-sectional view of a laminated body in one implementation form.
圖1係一種實施形態之積層體100之剖視圖,圖2係其俯視圖。於積層體100中之支持體30之一主面上,離型片21及膜狀基材11依序積層。離型片21之尺寸比支持體30及膜狀基材11小一圈,支持體30之外周端3、及膜狀基材11之外周端1比離型片21之外周端2更向外側突出。 FIG1 is a cross-sectional view of a laminate 100 in an implementation form, and FIG2 is a top view thereof. On one main surface of a support 30 in the laminate 100, a release sheet 21 and a film-like substrate 11 are sequentially laminated. The size of the release sheet 21 is smaller than that of the support 30 and the film-like substrate 11, and the outer peripheral end 3 of the support 30 and the outer peripheral end 1 of the film-like substrate 11 protrude further outward than the outer peripheral end 2 of the release sheet 21.
於積層體之面內之中央區域7,在支持體30上,隔著離型片21積層有 膜狀基材11。於比離型片21之外周端2更外側之區域8,支持體30與膜狀基材11相互相接且二者接著。 In the central area 7 within the surface of the laminate, a film-like substrate 11 is laminated on the support 30 via a release sheet 21. In the area 8 outside the outer peripheral end 2 of the release sheet 21, the support 30 and the film-like substrate 11 are in contact with each other and are in contact with each other.
支持體30具有可供剛性印刷佈線板之製造裝置進行處理之剛性。又,要求支持體30具有為了應用於印刷佈線板之製造步驟之耐熱性及耐化學品性。作為支持體30之具體例,可列舉:玻璃板、樹脂片、及預浸體。預浸體係指於包括玻璃纖維、碳纖維、合成纖維等之不織布或布等纖維狀補強材料中,含浸熱固性樹脂、熱塑性樹脂等而具有剛性者。支持體30只要具有剛性,則其厚度並無特別限制。於支持體30係預浸體之情形時,為了使其具有充分之剛性,厚度較佳為30μm以上,更佳為80μm以上。 The support 30 has rigidity that can be processed by a manufacturing device for a rigid printed wiring board. In addition, the support 30 is required to have heat resistance and chemical resistance for use in the manufacturing steps of a printed wiring board. Specific examples of the support 30 include: a glass plate, a resin sheet, and a prepreg. A prepreg refers to a fibrous reinforcing material such as a non-woven fabric or cloth including glass fiber, carbon fiber, synthetic fiber, etc., which is impregnated with a thermosetting resin, a thermoplastic resin, etc. and has rigidity. As long as the support 30 has rigidity, its thickness is not particularly limited. When the support 30 is a prepreg, in order to have sufficient rigidity, the thickness is preferably 30μm or more, and more preferably 80μm or more.
支持體30於外周區域8中,需要與膜狀基材11接著之功能。於使用玻璃板或樹脂片等無接著功能之基板材料之情形時,可於基板之整個面或外周區域形成適宜之接著劑層,使該基板對膜狀基材11具有接著性。 The support 30 needs to have the function of bonding with the film substrate 11 in the peripheral area 8. When using a substrate material without bonding function such as a glass plate or a resin sheet, a suitable bonding agent layer can be formed on the entire surface or the peripheral area of the substrate to make the substrate have bonding properties to the film substrate 11.
因有可普遍使用於印刷佈線板之製造之實績,並且於步驟中之耐久性、可用性、價格等方面具有優勢,故作為支持體30,較佳可使用預浸體。作為預浸體,可使用半硬化狀態之預浸體。半硬化之預浸體會藉由加熱而使樹脂成分硬化,故而,藉由利用熱壓等於加熱條件下進行積層,對膜狀基材11表現出接著性。 Because it has a proven track record of being widely used in the manufacture of printed wiring boards and has advantages in terms of durability, availability, price, etc. during the process, a prepreg is preferably used as the support 30. As the prepreg, a semi-cured prepreg can be used. The semi-cured prepreg cures the resin component by heating, so by laminating under heating conditions such as hot pressing, it exhibits adhesion to the film-like substrate 11.
膜狀基材11為可撓性者,其包含成為印刷佈線板之基板材料之可撓性絕緣樹脂膜。膜狀基材11可為絕緣樹脂膜之單獨體,亦可於絕緣樹脂膜之單面或雙面具備為了電路形成之金屬導體層。可於支持體30上隔著離型片21積層絕緣樹脂膜後,於絕緣樹脂膜上藉由無電解鍍覆等形成金屬導體層。 The film-like substrate 11 is flexible and includes a flexible insulating resin film that serves as a substrate material for a printed wiring board. The film-like substrate 11 may be a single insulating resin film, or may have a metal conductor layer for circuit formation on one or both sides of the insulating resin film. After laminating the insulating resin film on the support 30 via the release sheet 21, the metal conductor layer may be formed on the insulating resin film by electroless plating or the like.
作為絕緣樹脂膜,較佳為與用於形成電路之導體層之密接性較高,且,耐熱性及耐化學品性優異者。作為絕緣樹脂膜之樹脂材料之例,可列舉:聚醯亞胺、液晶聚合物、聚醯胺、聚對苯二甲酸乙二酯(PET)、聚苯硫醚(PPS)等。由於耐熱性及耐化學品性優異,熱線膨脹係數較小,故適合使用聚醯亞胺膜作為絕緣樹脂膜。 As an insulating resin film, it is preferred to have a high degree of adhesion with the conductor layer used to form the circuit, and have excellent heat resistance and chemical resistance. Examples of resin materials for insulating resin films include: polyimide, liquid crystal polymer, polyamide, polyethylene terephthalate (PET), polyphenylene sulfide (PPS), etc. Since polyimide film has excellent heat resistance and chemical resistance and a small thermal expansion coefficient, it is suitable to use it as an insulating resin film.
絕緣樹脂膜可具有為了提高與金屬箔或鍍覆層等導體層之密接性的密接層。例如,可於成為核心之高耐熱性(非熱塑性)樹脂層之單面或雙面設置熱塑性樹脂層作為密接層。 The insulating resin film may have a bonding layer for improving the bonding with a conductive layer such as a metal foil or a coating layer. For example, a thermoplastic resin layer may be provided as a bonding layer on one or both sides of a high heat-resistant (non-thermoplastic) resin layer serving as a core.
絕緣樹脂膜只要具有可撓性,則其厚度並不特別限定。絕緣樹脂膜之厚度例如為3~150μm左右,可為5~100μm,亦可為75μm以下、50μm以下、30μm以下或20μm以下。可撓性膜具有厚度越小則越難以單獨體進行操作之傾向,但藉由將膜狀基材11與剛性支持體30及離型片21一併積層並形成積層體100從而使積層體100具有剛性。因此,於膜狀基材11之絕緣樹脂膜之厚度較小之情形時,亦易於進行操作。 As long as the insulating resin film is flexible, its thickness is not particularly limited. The thickness of the insulating resin film is, for example, about 3 to 150 μm, 5 to 100 μm, or less than 75 μm, less than 50 μm, less than 30 μm, or less than 20 μm. The thinner the thickness of the flexible film, the more difficult it is to handle as a single body. However, by laminating the film substrate 11 with the rigid support 30 and the release sheet 21 to form the laminate 100, the laminate 100 is made rigid. Therefore, when the thickness of the insulating resin film of the film substrate 11 is relatively small, it is also easy to handle.
將設置於絕緣樹脂膜表面之導體層用於藉由圖案化之電路之形成。作為導體層之材料,可列舉:Ni、Cr、Ti、Al、Zn、Sn、Cu、Ag、Cu等金屬、及包含該等金屬之合金。其中,較佳為銅或銅合金。作為於絕緣樹脂膜表面具備作為導體層之銅層(或銅合金層)之膜狀基材,可列舉:3層撓性銅箔積層板、層壓2層型撓性銅箔積層板、鑄軋2層型撓性銅箔積層板、PVD(Physical Vapor Deposition,物理氣相沈積)型撓性銅箔積層板等。 The conductor layer disposed on the surface of the insulating resin film is used to form a circuit by patterning. The material of the conductor layer includes metals such as Ni, Cr, Ti, Al, Zn, Sn, Cu, Ag, Cu, and alloys containing these metals. Among them, copper or copper alloy is preferred. As a film-like substrate having a copper layer (or copper alloy layer) as a conductive layer on the surface of an insulating resin film, there can be listed: a three-layer flexible copper foil laminate, a laminated two-layer flexible copper foil laminate, a cast two-layer flexible copper foil laminate, a PVD (Physical Vapor Deposition) type flexible copper foil laminate, etc.
導體層之厚度未特別限定,根據要製造之印刷佈線板之規格而適當選擇即可。於形成微細之電路之情形時,較佳為導體層之厚度較薄。於藉由加成法(包括半加成法)形成電路之情形時,絕緣樹脂膜上之導體層作為電解鍍覆時之饋電層起作用即可,導體層之厚度較佳為5μm以下。於藉由減成法形成電路之情形時,導體層之厚度一般為10~100μm左右。 The thickness of the conductor layer is not particularly limited and can be appropriately selected according to the specifications of the printed wiring board to be manufactured. When forming a fine circuit, it is preferred that the thickness of the conductor layer is thinner. When forming a circuit by an additive method (including a semi-additive method), the conductor layer on the insulating resin film can function as a feed layer during electrolytic plating, and the thickness of the conductor layer is preferably less than 5μm. When forming a circuit by a subtractive method, the thickness of the conductor layer is generally about 10~100μm.
導體層例如藉由濕式或乾式之無電解鍍覆而形成。再者,於本說明書中,只要無特別聲明,不僅是濕式無電解鍍覆(化學還原鍍覆及取代鍍覆),物理蒸鍍(PVD)法及化學氣相蒸鍍(CVD(Chemical Vapor Deposition,化學氣相沈積))法等乾式鍍覆亦屬於「無電解鍍覆」。無電解鍍覆之種類根據與絕緣樹脂膜之配合性(例如密接性)、印刷佈線板之規格等而適當選擇即可。例如,於PVD型撓性銅箔積層板中,在絕緣樹脂膜上,藉由PVD法形成銅層。作為PVD法,可列舉:濺鍍、蒸鍍、離子鍍 覆等。可將藉由無電解鍍覆而形成之導體層作為饋電層,於其上進而藉由電解鍍覆而形成導體層。導體層可為銅箔等金屬箔。於使用銅箔作為導體層之情形時,壓延銅箔及電解銅箔中之任一者皆可。 The conductive layer is formed, for example, by wet or dry electroless plating. Furthermore, in this specification, unless otherwise stated, not only wet electroless plating (chemical reduction plating and substitution plating) but also dry plating such as physical vapor deposition (PVD) and chemical vapor deposition (CVD (Chemical Vapor Deposition)) are considered "electroless plating". The type of electroless plating can be appropriately selected based on the compatibility with the insulating resin film (e.g., adhesion), the specifications of the printed wiring board, etc. For example, in a PVD-type flexible copper foil laminate, a copper layer is formed on an insulating resin film by the PVD method. As PVD methods, sputtering, evaporation, ion plating, etc. can be listed. The conductive layer formed by electroless plating can be used as a feeding layer, and a conductive layer can be formed thereon by electrolytic plating. The conductive layer can be a metal foil such as copper foil. When copper foil is used as the conductive layer, either rolled copper foil or electrolytic copper foil can be used.
作為配置於支持體30與膜狀基材11之間之離型片21,可採用如下類型:於形成積層體時、及於使用積層體之印刷佈線板之製造步驟中具有耐熱性,可容易地自膜狀基材11剝離,且不污染與膜狀基材11之接觸面。只要離型片21不會污染與膜狀基材11之接觸面,則亦可具有對支持體30及/或膜狀基材11之密接性。 As the release sheet 21 disposed between the support 30 and the film substrate 11, the following types can be adopted: when forming a laminate and in the manufacturing step of a printed wiring board using the laminate, it has heat resistance, can be easily peeled off from the film substrate 11, and does not contaminate the contact surface with the film substrate 11. As long as the release sheet 21 does not contaminate the contact surface with the film substrate 11, it can also have close adhesion to the support 30 and/or the film substrate 11.
離型片21之厚度未特別限制。於厚度過大之情形時,離型片21之外周端1處之階差變大,可能導致外周區域8之支持體30與膜狀基材11之接著性降低、或因氣泡之混入而導致剝離。因此,離型片21之厚度較佳為200μm以下,更佳為100μm以下,進而較佳為50μm以下。離型片之厚度亦可為5μm以上或10μm以上。 The thickness of the release sheet 21 is not particularly limited. When the thickness is too large, the step difference at the outer peripheral end 1 of the release sheet 21 becomes larger, which may lead to reduced adhesion between the support 30 and the film substrate 11 in the peripheral area 8, or separation due to the mixing of air bubbles. Therefore, the thickness of the release sheet 21 is preferably less than 200μm, more preferably less than 100μm, and further preferably less than 50μm. The thickness of the release sheet can also be more than 5μm or more than 10μm.
作為構成離型片21之耐熱性樹脂材料,可列舉:聚氯乙烯(PVC)、聚丙烯(PP)、聚對苯二甲酸乙二酯(PET)、聚對苯二甲酸丁二醇酯(PBT)、聚碳酸酯(PC)、聚醯胺(PA)、聚甲基戊烯等耐熱性聚烯烴、聚芳酯、氟系樹脂(聚四氟乙烯(PTFE)、聚氯三氟乙烯(PCTFE)、聚偏二氟乙烯(PVDF)、聚氟乙烯(PVF)、全氟烷氧基氟樹脂(PFA)、四氟乙烯‧六氟丙烯共聚物(FEP)、乙烯‧四氟乙烯共聚物(ETFE)、乙烯‧三氟氯乙烯共聚 物(ECTFE)等)、聚醯亞胺等。 The heat-resistant resin material constituting the release sheet 21 includes: polyvinyl chloride (PVC), polypropylene (PP), polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polycarbonate (PC), polyamide (PA), heat-resistant polyolefins such as polymethylpentene, polyarylate, fluorine resins (polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), polyvinyl fluoride (PVF), perfluoroalkoxy fluorine resin (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), ethylene-tetrafluoroethylene copolymer (ETFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), etc.), polyimide, etc.
離型片21亦可為於耐熱性膜之單面或雙面具備耐熱性黏著層者。作為耐熱性黏著層之黏著劑,可列舉:矽酮樹脂系黏著劑、丙烯酸樹脂系黏著劑等。 The release sheet 21 may also be a heat-resistant film having a heat-resistant adhesive layer on one or both sides. Examples of adhesives for the heat-resistant adhesive layer include silicone resin adhesives, acrylic resin adhesives, etc.
作為離型片21,可使用印刷佈線板之衝壓加工用離型片之市售品。作為不具備包含耐熱性膜之黏著層之離型片的市售品,可列舉:三井化學製造之「TPX」(離型片之製品名:「Opulent」)、旭硝子製造之「Aflex」等。表面上未設置黏著層之離型片具有不易產生與膜狀基材11之接觸面之污染之優點。尤其是氟系樹脂膜因耐熱性及離型性優異,並表現出對樹脂膜或導體層之密接性(微黏著性),故適合用作離型片之材料。 As the release sheet 21, a commercially available release sheet for stamping of printed wiring boards can be used. Commercially available release sheets that do not have an adhesive layer including a heat-resistant film include: "TPX" manufactured by Mitsui Chemicals (product name of the release sheet: "Opulent"), "Aflex" manufactured by Asahi Glass, etc. A release sheet without an adhesive layer on the surface has the advantage that it is not easy to cause contamination on the contact surface with the film substrate 11. In particular, fluorine-based resin films are suitable for use as materials for release sheets because of their excellent heat resistance and release properties, and their close adhesion (micro-adhesion) to resin films or conductive layers.
作為具備耐熱性黏著層之離型片的市售品,可列舉:TOYOCHEM製造之「LIOELM」系列(LE951、LE957等)、河村產業製造之「KT」系列(KT508ZZ等聚酯基材)及「KY」系列(KY5010等聚醯亞胺基材)、Okamoto製造之聚醯亞胺膜黏著帶(1030、1030S等)及聚酯膜黏著帶(2034、2230GX)等。 Commercially available release sheets with heat-resistant adhesive layers include: "LIOELM" series (LE951, LE957, etc.) manufactured by TOYOCHEM, "KT" series (polyester base materials such as KT508ZZ) and "KY" series (polyimide base materials such as KY5010) manufactured by Kawamura Sangyo, polyimide film adhesive tapes (1030, 1030S, etc.) and polyester film adhesive tapes (2034, 2230GX) manufactured by Okamoto, etc.
於支持體30之一主面上,藉由配置離型片21及膜狀基材11並將該積層體一體化,而形成積層體100。於膜狀基材11之絕緣樹脂膜表面具有導體層之情形時,導體層配置於外側(與離型片21相反側之面)。 On one main surface of the support 30, a release sheet 21 and a film-like substrate 11 are arranged and the laminate is integrated to form a laminate 100. When the insulating resin film surface of the film-like substrate 11 has a conductive layer, the conductive layer is arranged on the outer side (the side opposite to the release sheet 21).
支持體30之外周端3、及膜狀基材11之外周端1皆比離型片21之外周端2更向外側突出。為了形成該狀態,將離型片21裁斷為比支持體30小一圈之尺寸,將膜狀基材11裁斷為比離型片21大一圈之尺寸,以於邊框狀之外周區域8進行對位,以使支持體30與膜狀基材11接著即可。 The outer peripheral end 3 of the support 30 and the outer peripheral end 1 of the film-like substrate 11 both protrude further outward than the outer peripheral end 2 of the release sheet 21. To achieve this state, the release sheet 21 is cut into a size that is one circle smaller than the support 30, and the film-like substrate 11 is cut into a size that is one circle larger than the release sheet 21, and the outer peripheral area 8 of the frame is aligned so that the support 30 and the film-like substrate 11 are connected.
支持體30之形狀並不限定為矩形,根據印刷佈線板之形狀等,亦可為菱形、多邊形、圓形等。支持體30之面積例如為50~10,000cm2左右,可根據步驟之規格、或印刷佈線板之尺寸等而設定。 The shape of the support 30 is not limited to a rectangle, and may be a rhombus, a polygon, a circle, etc., depending on the shape of the printed wiring board. The area of the support 30 is, for example, about 50 to 10,000 cm2 , and may be set according to the specifications of the step or the size of the printed wiring board.
離型片21之尺寸只要比支持體30小即可。由於外周區域8最終不成為製品,故就面積效率之觀點而言,較佳為外周區域8之寬度儘量小。外周區域8之寬度較佳為50mm以下,更佳為30mm以下,進而較佳為20mm以下。另一方面,就利用外周區域8確保支持體30與膜狀基材11之接著性之觀點而言,外周區域8之寬度較佳為1mm以上,更佳為3mm以上,進而較佳為5mm以上。離型片21之面積較佳為支持體30之面積之0.6倍以上,更佳為0.8倍以上,進而較佳為0.9倍以上。 The size of the release sheet 21 only needs to be smaller than the support 30. Since the peripheral area 8 will not eventually become a product, from the perspective of area efficiency, it is preferred that the width of the peripheral area 8 is as small as possible. The width of the peripheral area 8 is preferably 50 mm or less, more preferably 30 mm or less, and further preferably 20 mm or less. On the other hand, from the perspective of using the peripheral area 8 to ensure the adhesion between the support 30 and the film-like substrate 11, the width of the peripheral area 8 is preferably 1 mm or more, more preferably 3 mm or more, and further preferably 5 mm or more. The area of the release sheet 21 is preferably 0.6 times or more of the area of the support 30, more preferably 0.8 times or more, and further preferably 0.9 times or more.
膜狀基材11之尺寸只要比離型片21大即可。就提高膜狀基材11之面積利用效率而抑制材料損耗之觀點而言,膜狀基材11之面積較佳為離型片21之面積之1.8倍以下,更佳為1.4倍以下,進而較佳為1.1倍以下。另一方面,如上所述,就提高離型片21外周之支持體30與膜狀基材11之接著性之觀點而言,較佳為確保支持體30及膜狀基材11突出於離型片21之外 周端之外側之外周區域8之寬度。膜狀基材11之自離型片21之外周端之突出量較佳為1mm以上,更佳為3mm以上,進而較佳為5mm以上。 The size of the film substrate 11 only needs to be larger than the release sheet 21. From the perspective of improving the area utilization efficiency of the film substrate 11 and suppressing material loss, the area of the film substrate 11 is preferably 1.8 times or less, more preferably 1.4 times or less, and further preferably 1.1 times or less of the area of the release sheet 21. On the other hand, as described above, from the perspective of improving the adhesion between the support 30 and the film substrate 11 at the periphery of the release sheet 21, it is preferred to ensure the width of the peripheral area 8 on the outer side of the peripheral end where the support 30 and the film substrate 11 protrude from the release sheet 21. The protrusion amount of the film substrate 11 from the outer peripheral end of the release sheet 21 is preferably 1 mm or more, more preferably 3 mm or more, and further preferably 5 mm or more.
只要支持體30及膜狀基材11二者比離型片21之外周端更向外側突出,則支持體30與膜狀基材11中可有任一者之尺寸較大,亦可二者之尺寸相同。於形成積層體時(例如,熱壓)或於印刷佈線板之製造步驟中,支持體30之接著層或樹脂材料(例如,預浸體之含浸樹脂之熔融物或軟化物)流回積層體100之表面(膜狀基材11之表面),會對作為製品之印刷佈線板或步驟造成污染。就防止源於支持體30之污染之觀點而言,如圖1所示,較佳為膜狀基材11之外周端1比支持體30之外周端3更向外側突出。 As long as both the support 30 and the film-like substrate 11 protrude further outward than the outer peripheral end of the release sheet 21, the size of either the support 30 or the film-like substrate 11 may be larger or the sizes of both may be the same. When forming a laminate (e.g., hot pressing) or in the manufacturing step of a printed wiring board, the bonding layer or resin material of the support 30 (e.g., the melt or softened product of the impregnated resin of the prepreg) flows back to the surface of the laminate 100 (the surface of the film-like substrate 11), which may contaminate the printed wiring board or the step as a product. From the perspective of preventing contamination from the support 30, as shown in FIG1 , it is preferred that the outer peripheral end 1 of the film-like substrate 11 protrude further outward than the outer peripheral end 3 of the support 30.
膜狀基材11突出於支持體30之外周端3之外側之區域9的寬度較佳為1mm以上,更佳為3mm以上,進而較佳為5mm以上。另一方面,於膜狀基材11自支持體30之外周的突出量(區域9之寬度)過大之情形時,膜狀基材之材料損耗會變大,會成為成本增加之要因。又,於膜狀基材之突出量較大之情形時,有時會妨礙積層體操作。因此,膜狀基材11之突出量較佳為50mm以下,更佳為30mm以下,進而較佳為15mm以下。膜狀基材11之面積較佳為支持體30之面積之1.3倍以下,更佳為1.2倍以下,進而較佳為1.1倍以下。 The width of the area 9 where the film substrate 11 protrudes from the outer peripheral end 3 of the support 30 is preferably 1 mm or more, more preferably 3 mm or more, and further preferably 5 mm or more. On the other hand, when the protrusion of the film substrate 11 from the outer periphery of the support 30 (the width of the area 9) is too large, the material loss of the film substrate will increase, which will become a factor of cost increase. In addition, when the protrusion of the film substrate is large, it may sometimes hinder the operation of the laminate. Therefore, the protrusion of the film substrate 11 is preferably 50 mm or less, more preferably 30 mm or less, and further preferably 15 mm or less. The area of the film substrate 11 is preferably 1.3 times or less, 1.2 times or less, and further preferably 1.1 times or less of the area of the support 30.
如上所述,準備與離型片21相比尺寸較大之支持體30及膜狀基材,於比離型片之外周端更外側之區域8,以支持體30與膜狀基材11接著之方式進行配置而進行積層一體化。可分別於支持體30、離型片21及膜狀基 材11上預先形成對位用孔,藉由銷等進行定位。 As described above, a support 30 and a film-like substrate having a larger size than the release sheet 21 are prepared, and the support 30 and the film-like substrate 11 are arranged in a manner of being connected to each other in a region 8 outside the outer peripheral end of the release sheet to be laminated and integrated. Alignment holes can be pre-formed on the support 30, the release sheet 21, and the film-like substrate 11, respectively, and positioning can be performed by pins or the like.
支持體30、離型片21及膜狀基材11可於積層前在單面或雙面進行電漿處理、電暈處理等表面處理。藉由進行表面處理,可提昇各層間之密接性。 The support 30, release sheet 21 and film substrate 11 can be subjected to surface treatment such as plasma treatment or corona treatment on one or both sides before lamination. By performing surface treatment, the adhesion between the layers can be improved.
於支持體30、離型片21及膜狀基材11之積層一體化中,可應用熱壓、真空加壓、輥壓、真空層壓等方法。積層時,較佳為採用可於外周區域8將支持體30與膜狀基材11接著之方法,根據支持體30之接著材料而選擇積層方法或條件即可。例如,於支持體30為普遍使用於印刷佈線板製造中之預浸體之情形時,藉由於200℃左右進行1小時左右之熱壓加工而於外周區域8使支持體30與膜狀基材11牢固地接著(熔合)。 In the lamination integration of the support 30, the release sheet 21 and the film-like substrate 11, methods such as heat pressing, vacuum pressing, roll pressing, and vacuum lamination can be applied. During lamination, it is preferred to adopt a method that can connect the support 30 and the film-like substrate 11 in the peripheral area 8. The lamination method or conditions can be selected according to the bonding material of the support 30. For example, when the support 30 is a prepreg commonly used in the manufacture of printed wiring boards, the support 30 and the film-like substrate 11 are firmly bonded (fused) in the peripheral area 8 by performing heat pressing at about 200°C for about 1 hour.
於積層體100中,由於膜狀基材11接著固定於剛性支持體30之外周區域8,故於進行設置於膜狀基材11之表面(不與離型片21相接之面)之導體層之圖案化(電路之形成)或絕緣層之形成等加工時之操作性優異。 In the laminate 100, since the film substrate 11 is fixed to the outer peripheral region 8 of the rigid support 30, the operability is excellent when processing such as patterning (circuit formation) of the conductive layer provided on the surface of the film substrate 11 (the surface not in contact with the release sheet 21) or forming an insulating layer.
於印刷佈線板之製造步驟中,藉由除渣處理、濕式鍍覆之導體層之形成、藉由蝕刻之導體層之圖案化、抗蝕劑等絕緣層之顯影等中,利用藥液進行處理。於積層體100中,因於外周區域8使支持體30與膜狀基材11接著固定,故於利用噴霧或浸漬進行藥液處理時,可抑制藥液自積層體100之側面向面內中央部之區域7滲入。因此,可抑制因藥液滲入而導致之離型片21與膜狀基材11於積層界面之剝離。又,由於抑制了藥液接觸離 型片21,故可防止構成離型片21之耐熱膜或黏著層因藥液而產生之浸蝕。因此,除可抑制積層界面上之剝離以外,亦可防止因離型片21之構成材料之溶解物混入等而導致之藥液污染。 In the manufacturing process of the printed wiring board, the treatment with the chemical solution is performed in the process of removing slag, forming the conductive layer by wet plating, patterning the conductive layer by etching, developing the insulating layer such as the resist, etc. In the laminate 100, since the support 30 and the film-like substrate 11 are fixed in contact at the peripheral region 8, when the chemical solution treatment is performed by spraying or dipping, the infiltration of the chemical solution from the side surface of the laminate 100 to the region 7 of the inner center portion of the surface can be suppressed. Therefore, the peeling of the release sheet 21 and the film-like substrate 11 at the laminate interface caused by the infiltration of the chemical solution can be suppressed. Furthermore, since the chemical solution is prevented from contacting the release sheet 21, the heat-resistant film or adhesive layer constituting the release sheet 21 can be prevented from being corroded by the chemical solution. Therefore, in addition to suppressing the peeling at the lamination interface, it can also prevent the chemical solution from being contaminated by the dissolution of the constituent material of the release sheet 21.
因於積層體100之面內中央部之區域7,在支持體30與膜狀基材11之間配置有離型片21,故即便於藉由熱壓等而使支持體30之接著材料熔融或軟化之情形時,亦不會附著於膜狀基材。因此,以積層體之狀態進行電路之形成或絕緣層之形成等加工後,可容易地將離型片21自膜狀基材11剝離。 Since the release sheet 21 is disposed between the support 30 and the film substrate 11 in the central region 7 of the laminate 100, even when the bonding material of the support 30 is melted or softened by heat pressing, it will not adhere to the film substrate. Therefore, after the laminate is processed such as forming a circuit or forming an insulating layer, the release sheet 21 can be easily peeled off from the film substrate 11.
就提高電路之形成或絕緣層之形成等步驟中之操作性之觀點而言,於積層體100中,較佳為除於外周區域8使支持體30與膜狀基材11接著以外,亦於設置有離型片21之區域7,在支持體30上密接積層膜狀基材11。例如,若離型片21對支持體30及膜狀基材11具有密接性,則於區域7,成為於支持體30上隔著離型片21密接積層有膜狀基材11之狀態。 From the perspective of improving the operability in steps such as forming a circuit or forming an insulating layer, in the laminate 100, in addition to making the support 30 and the film-like substrate 11 contact each other in the peripheral area 8, it is preferred that the film-like substrate 11 is closely laminated on the support 30 in the area 7 where the release sheet 21 is provided. For example, if the release sheet 21 has close contact with the support 30 and the film-like substrate 11, the film-like substrate 11 is closely laminated on the support 30 via the release sheet 21 in the area 7.
如圖3所示,離型片21上設置有開口5,於設置有開口5之區域,支持體30與膜狀基材11可相接。於設置有開口5之區域,由於與外周區域8同樣,使支持體30與膜狀基材11成為接著狀態,故而,於區域7內膜狀基材11亦固定於支持體30上,從而可提昇加工時之操作性。尤其是於積層體101之面積(離型片之面積)較大之情形時,或離型片21對膜狀基材11之密接性較低之情形時,隔著設置於離型片21之開口5使支持體30與膜狀基材為接著狀態較為有效。 As shown in FIG3 , an opening 5 is provided on the release sheet 21, and the support 30 and the film-like substrate 11 can be in contact with each other in the area where the opening 5 is provided. In the area where the opening 5 is provided, the support 30 and the film-like substrate 11 are in contact with each other as in the peripheral area 8, so the film-like substrate 11 is also fixed on the support 30 in the area 7, thereby improving the operability during processing. In particular, when the area of the laminate 101 (area of the release sheet) is large, or when the adhesion of the release sheet 21 to the film-like substrate 11 is low, it is more effective to make the support 30 and the film-like substrate in contact with each other through the opening 5 provided on the release sheet 21.
於離型片21上設置開口5之情形時,開口之形狀及尺寸、開口之數量等未特別限制。於開口5之尺寸較大之情形時,由於支持體30與膜狀基材11之接著面積較大,故於進行電路形成等加工後,有時難以自積層體將膜狀基材11分離。因此,1個開口之面積較佳為1000mm2以下,更佳為500mm2以下,進而較佳為300mm2以下,亦可為100mm2以下或50mm2以下。另一方面,就於開口形成部將膜狀基材11固定於支持體30上之觀點而言,1個開口之面積較佳為1mm2以上,更佳為5mm2以上。離型片21中之開口形成部之面積比率(開口率)較佳為10%以下,更佳為5%以下,進而較佳為3%以下。開口率亦可為0.1%以上、0.3%以上或0.5%以上。 When the opening 5 is provided on the release sheet 21, the shape and size of the opening, the number of the openings, etc. are not particularly limited. When the size of the opening 5 is relatively large, since the contact area between the support 30 and the film-like substrate 11 is relatively large, it is sometimes difficult to separate the film-like substrate 11 from the laminate after processing such as circuit formation. Therefore, the area of one opening is preferably 1000 mm2 or less, more preferably 500 mm2 or less, further preferably 300 mm2 or less, and may also be 100 mm2 or less or 50 mm2 or less. On the other hand, from the viewpoint of fixing the film-like substrate 11 on the support 30 at the opening forming portion, the area of one opening is preferably 1 mm2 or more, and more preferably 5 mm2 or more. The area ratio (opening ratio) of the opening forming portion in the release sheet 21 is preferably 10% or less, more preferably 5% or less, and further preferably 3% or less. The opening ratio may also be 0.1% or more, 0.3% or more, or 0.5% or more.
如圖4所示,積層體102可於支持體30之一主面上積層離型片21及膜狀基材11,並於支持體30之另一主面上積層離型片22及膜狀基材12。由於藉由於1個支持體之雙面上均積層離型片及膜狀基材,可使用1個積層體102實施2個膜狀基材11、12之加工,故可期待材料利用效率及生產效率之提昇。又,由於支持體30之兩主面被膜狀基材所覆蓋,故於支持體使用預浸體等具有接著性之材料之情形時,亦可防止步驟之污染。 As shown in FIG. 4 , the laminate 102 can laminate the release sheet 21 and the film substrate 11 on one main surface of the support 30, and laminate the release sheet 22 and the film substrate 12 on the other main surface of the support 30. Since the release sheet and the film substrate are laminated on both surfaces of one support, the processing of two film substrates 11 and 12 can be performed using one laminate 102, so it can be expected that the material utilization efficiency and production efficiency will be improved. In addition, since the two main surfaces of the support 30 are covered with the film substrate, when the support uses a material with adhesive properties such as a prepreg, contamination of the step can also be prevented.
如圖5所示,可於支持體30之一主面上積層離型片21及膜狀基材11,於另一面上,以覆蓋支持體30之整個面之方式積層保護片42。保護片42可比支持體30之外周端更向外側突出。於積層體103中,由於支持體30之一主面被膜狀基材11覆蓋,另一主面被保護片42覆蓋,故即便於支持體使用預浸體等具有接著性之材料之情形時,亦可防止步驟之污染。 As shown in FIG. 5 , a release sheet 21 and a film-like substrate 11 may be laminated on one main surface of a support 30, and a protective sheet 42 may be laminated on the other surface so as to cover the entire surface of the support 30. The protective sheet 42 may protrude further outward than the outer peripheral end of the support 30. In the laminate 103, since one main surface of the support 30 is covered by the film-like substrate 11 and the other main surface is covered by the protective sheet 42, contamination of the step can be prevented even when the support uses a material having adhesive properties such as a prepreg.
作為保護片42,使用耐熱性及耐化學品性優異且可與支持體30接著者。保護片42可具有剛性,亦可為可撓性。作為保護片42之材料,可列舉玻璃或樹脂材料。作為樹脂材料,適合使用作為膜狀基材11之絕緣樹脂膜之材料,或離型片21之耐熱樹脂膜之材料所例示者。 As the protective sheet 42, a material having excellent heat resistance and chemical resistance and capable of being bonded to the support 30 is used. The protective sheet 42 may be rigid or flexible. As the material of the protective sheet 42, glass or resin material may be listed. As the resin material, the material exemplified as the insulating resin film of the film-like substrate 11 or the material of the heat-resistant resin film of the release sheet 21 is suitable.
上述積層體可應用於如下印刷佈線板之製造中,該印刷佈線板之膜狀基材所包含之絕緣樹脂膜之一主面或雙主面上,具備包含被圖案化之金屬導體之電路。作為絕緣樹脂膜之主面上設置有電路之印刷佈線板,可列舉:多層印刷佈線板、軟硬複合佈線板、單面可撓性印刷基板、雙面可撓性印刷基板等。 The above-mentioned multilayer body can be applied to the manufacture of the following printed wiring boards, in which a circuit including a patterned metal conductor is provided on one or both main surfaces of an insulating resin film included in a film-like substrate of the printed wiring board. Examples of printed wiring boards having a circuit provided on the main surface of an insulating resin film include: multi-layer printed wiring boards, rigid-flex composite wiring boards, single-sided flexible printed circuit boards, double-sided flexible printed circuit boards, etc.
於使用積層體之印刷佈線板之製造步驟中,於膜狀基材之絕緣樹脂膜上形成電路(第一電路形成步驟)。於積層體中,因於剛性支持體30上隔著離型片21積層膜狀基材11而具有剛性,故可使用處理剛性基材之裝置而形成電路。因此,能夠於可撓性絕緣樹脂膜之主面上,形成與剛性印刷佈線板之電路同等之窄間距電路。於絕緣樹脂膜上形成電路後,將膜狀基材11(設置有電路之絕緣樹脂膜)自支持體30及離型片21分離(分離步驟)。 In the manufacturing step of a printed wiring board using a laminate, a circuit is formed on an insulating resin film of a film-like substrate (first circuit forming step). In the laminate, since the film-like substrate 11 is laminated on the rigid support 30 via the release sheet 21, the circuit can be formed using an apparatus for processing a rigid substrate. Therefore, a narrow pitch circuit equivalent to that of a rigid printed wiring board can be formed on the main surface of the flexible insulating resin film. After the circuit is formed on the insulating resin film, the film-like substrate 11 (insulating resin film provided with the circuit) is separated from the support 30 and the release sheet 21 (separation step).
於膜狀基材11之絕緣樹脂膜上具備導體層之情形時,利用膜狀基材之導體層,藉由減成法、加成法等形成電路。於預先設置於膜狀基材11上之導體層上,進而藉由電解鍍覆等形成導體層。於膜狀基材11包含絕緣樹 脂膜且具備導體層之情形時,於絕緣樹脂膜之主面上形成導體層,藉由減成法、加成法等形成電路。 When a conductive layer is provided on the insulating resin film of the film-like substrate 11, a circuit is formed by using the conductive layer of the film-like substrate by a subtractive method, an additive method, etc. On the conductive layer pre-set on the film-like substrate 11, a conductive layer is further formed by electrolytic plating, etc. When the film-like substrate 11 includes an insulating resin film and has a conductive layer, a conductive layer is formed on the main surface of the insulating resin film, and a circuit is formed by a subtractive method, an additive method, etc.
以下,將對印刷佈線板之製造中之各步驟之概要進行說明。 Below, we will provide an overview of each step in the manufacture of printed wiring boards.
於膜狀基材11之第一主面(與離型片21相反側之主面)上未設置導體層之情形時,藉由無電解鍍覆,於絕緣樹脂膜上形成導體層。亦可藉由於絕緣樹脂膜上貼合銅箔等金屬箔而設置導體層。於膜狀基材11具有導體層之情形時,無需形成導體層,但可於預先於絕緣樹脂膜上設置之導體層上,進而藉由電解鍍覆等而形成導體層。於膜狀基材11上設置孔之情形時,除膜狀基材11之第一主面以外,亦可於孔之壁面析出金屬而進行導體化。對膜狀基材進行開孔後,可根據需要進行除渣處理。 When no conductive layer is provided on the first main surface (the main surface on the opposite side of the release sheet 21) of the film-like substrate 11, a conductive layer is formed on the insulating resin film by electroless plating. A conductive layer can also be provided by laminating a metal foil such as copper foil on the insulating resin film. When the film-like substrate 11 has a conductive layer, it is not necessary to form a conductive layer, but a conductive layer can be formed on the conductive layer previously provided on the insulating resin film by electrolytic plating. When a hole is provided on the film-like substrate 11, in addition to the first main surface of the film-like substrate 11, metal can also be precipitated on the wall surface of the hole to make it conductive. After the film-like substrate is opened, a slag removal treatment can be performed as needed.
作為無電解鍍覆,可列舉:濕式無電解鍍覆、濺鍍、蒸鍍、離子鍍覆、CVD等。無電解鍍覆之種類可參照與膜狀基材之配合性、印刷佈線板之規格等而適當選擇。若考慮通用之印刷佈線板製造步驟.設備,則較佳為濕式無電解銅鍍覆。作為以電解鍍覆析出之金屬種,可列舉:銅、金、銀、鋅、鎳、鉻、各種合金(例如,焊錫、錫-銀、錫-鋅等)等。於印刷佈線板之製造中,一般較佳可使用銅。導體層之厚度未特別限制,可根據印刷佈線板之規格等而設定。 As electroless plating, there are: wet electroless plating, sputtering, evaporation, ion plating, CVD, etc. The type of electroless plating can be appropriately selected according to the compatibility with the film substrate, the specifications of the printed wiring board, etc. If the general printed wiring board manufacturing steps and equipment are considered, wet electroless copper plating is preferred. As the metal types deposited by electrolytic plating, there are: copper, gold, silver, zinc, nickel, chromium, various alloys (for example, solder, tin-silver, tin-zinc, etc.), etc. In the manufacture of printed wiring boards, copper is generally preferred. The thickness of the conductor layer is not particularly limited and can be set according to the specifications of the printed wiring board, etc.
利用預先設置於膜狀基材11之導體層、或於上述導體層形成步驟中所形成之導體層,於絕緣樹脂膜上形成電路。例如,以抗蝕劑選擇性地被覆成為電路之預定部分,藉由將未被抗蝕劑被覆之區域之導體層利用藥液(蝕刻液)溶解而形成電路(減成法)。亦可對成為電路非形成部(電路與電路間之間距)之預定部分以抗鍍覆劑進行選擇性被覆,藉由以導體層作為饋電層之電解鍍覆而進行圖案鍍覆,繼而剝離抗蝕劑,藉由利用蝕刻將所露出之饋電層除去而形成電路(半加成法)。電路之形成方法根據所製造之印刷佈線板之規格等而適當選擇即可。 A circuit is formed on the insulating resin film using a conductive layer pre-set on the film substrate 11 or a conductive layer formed in the conductive layer forming step. For example, a predetermined portion of the circuit is selectively coated with an anti-etching agent, and the conductive layer in the area not coated with the anti-etching agent is dissolved with a chemical solution (etching liquid) to form a circuit (subtractive method). It is also possible to selectively coat the predetermined portion that will become the non-circuit forming portion (the distance between circuits) with an anti-plating agent, perform pattern plating by electrolytic plating with a conductive layer as a feeding layer, then peel off the anti-etching agent, and remove the exposed feeding layer by etching to form a circuit (semi-additive method). The circuit formation method can be appropriately selected according to the specifications of the printed wiring board to be manufactured.
於電路之形成中,在利用濕式無電解鍍覆或電解鍍覆等濕式法之導體層之形成、抗蝕劑之圖案化時之顯影、利用蝕刻之導體層之圖案化、抗蝕劑之剝離、圖案鍍覆後之饋電層之蝕刻等中,使用各種藥液。若該等藥液滲入膜狀基材與離型片之積層界面,則存在膜狀基材自積層體剝離之情況。又,於離型片上設置黏著劑層之情形時,顧慮到因溶解於藥液之黏著劑之混入而導致藥液之污染。 In the formation of circuits, various chemical solutions are used in the formation of conductive layers using wet methods such as wet electroless plating or electrolytic plating, development during patterning with an anti-etchant, patterning of conductive layers using etching, stripping of anti-etchants, and etching of feed layers after patterning. If these chemical solutions penetrate into the laminated interface between the film substrate and the release sheet, there is a possibility that the film substrate will be peeled off from the laminated body. In addition, when an adhesive layer is provided on the release sheet, there is concern about the contamination of the chemical solution due to the mixing of adhesive dissolved in the chemical solution.
於上述積層體中,於離型片21之外周,支持體30與膜狀基材11接著,離型片21之外周端(端面)2未露出。因此,可抑制藥液向離型片21之端面及離型片21與膜狀基材11之積層界面之滲入,可防止電路形成等製程中之膜狀基材之剝離或步驟之污染。 In the above-mentioned laminate, the support 30 is in contact with the film substrate 11 at the periphery of the release sheet 21, and the peripheral end (end face) 2 of the release sheet 21 is not exposed. Therefore, the infiltration of the chemical solution into the end face of the release sheet 21 and the laminated interface between the release sheet 21 and the film substrate 11 can be suppressed, and the peeling of the film substrate or the contamination of the steps in the process of circuit formation can be prevented.
於絕緣樹脂膜之第一主面上形成電路後,將膜狀基材11(設置有電路 之絕緣樹脂膜)自積層體分離。膜狀基材11與支持體30可藉由將二者所接著之外周緣部之區域8切除而分離。例如,藉由沿著圖2之C1線、C2線、C3線及C4線切斷積層體而切除外周緣部。切除之方法根據支持體30及膜狀基材11之材質等適當選擇即可,可應用雕銑加工、模具加工(衝壓)等。 After forming the circuit on the first main surface of the insulating resin film, the film substrate 11 (insulating resin film with the circuit) is separated from the laminate. The film substrate 11 and the support 30 can be separated by cutting off the peripheral area 8 where the two are connected. For example, the peripheral part is cut off by cutting the laminate along the C1 line, C2 line, C3 line and C4 line in Figure 2. The cutting method can be appropriately selected according to the material of the support 30 and the film substrate 11, and can be applied to milling processing, mold processing (pressing), etc.
分離時,無需完全切斷外周緣部。例如,可沿外周緣部進行半切而切斷膜狀基材。又,亦可自膜狀基材11與支持體之接著部分將膜狀基材11剝離而進行分離。 When separating, it is not necessary to completely cut off the outer peripheral portion. For example, the film substrate can be cut in half along the outer peripheral portion. Alternatively, the film substrate 11 can be separated from the portion where the film substrate 11 is connected to the support.
由於膜狀基材11與離型片21於界面上之接著力較小,故兩者之積層界面上容易產生剝離,難以產生因離型片21導致之膜狀基材11之第二主面(與電路形成面相反側之主面)之污染。 Since the adhesion between the film substrate 11 and the release sheet 21 at the interface is relatively small, it is easy for the laminated interface between the two to peel off, and it is difficult for the second main surface (the main surface opposite to the circuit forming surface) of the film substrate 11 to be contaminated by the release sheet 21.
根據上述製程,獲得於絕緣樹脂膜之第一主面上形成有第一電路之印刷佈線板。可於形成有第一電路之絕緣樹脂膜之第一主面上進而積層另一絕緣層,並形成第二電路,從而進行多層化。又,自積層體將膜狀基材分離後,亦可於膜狀基材(絕緣樹脂膜)之第二主面上形成第三電路。 According to the above process, a printed wiring board having a first circuit formed on the first main surface of the insulating resin film is obtained. Another insulating layer can be further laminated on the first main surface of the insulating resin film having the first circuit formed thereon, and a second circuit can be formed, thereby achieving multi-layering. Furthermore, after separating the film substrate from the laminate, a third circuit can also be formed on the second main surface of the film substrate (insulating resin film).
多層化可按照印刷佈線板之普通工法而進行。例如,於設置有第一電路之絕緣樹脂膜之第一主面上形成絕緣層,形成貫通絕緣層之孔後,於絕緣層上形成第二電路。可藉由反覆進行電路上之絕緣層之形成、孔之形成及電路之形成而進行3層以上之多層化。 Multi-layering can be performed according to the common process of printed wiring boards. For example, an insulating layer is formed on the first main surface of the insulating resin film provided with the first circuit, a hole is formed through the insulating layer, and then a second circuit is formed on the insulating layer. Multi-layering of more than three layers can be performed by repeatedly forming an insulating layer on the circuit, forming a hole, and forming a circuit.
作為絕緣層之材料,可列舉:預浸體、包含熱固性樹脂之接合片、熱固性或光固性樹脂之油墨材料、熱固性增層膜、於單面銅箔積層板之銅層非形成面上設置有接著層之積層體等。預浸體、片材、膜狀之材料可藉由熱壓、輥壓、真空層壓等進行積層。油墨狀材料可藉由印刷法、淋幕式塗佈法等形成絕緣層。於絕緣層之形成時,亦可積層金屬箔。 Materials for the insulating layer include: prepregs, bonding sheets containing thermosetting resins, ink materials of thermosetting or photosetting resins, thermosetting build-up films, laminates with a bonding layer provided on the non-forming surface of the copper layer of a single-sided copper foil laminate, etc. Prepregs, sheets, and film-like materials can be laminated by heat pressing, roll pressing, vacuum lamination, etc. Ink-like materials can form an insulating layer by printing, curtain coating, etc. Metal foil can also be laminated when forming the insulating layer.
對絕緣層之孔之形成例如可藉由激光打孔、機械打孔等進行。亦可藉由電漿照射、化學蝕刻等進行絕緣層之開孔。除絕緣層以外,還可以貫通膜狀基材之方式進行開孔,亦可以貫通2層以上之絕緣層之方式進行開孔。 The holes in the insulating layer can be formed by laser drilling, mechanical drilling, etc. The holes in the insulating layer can also be opened by plasma irradiation, chemical etching, etc. In addition to the insulating layer, the holes can also be opened by penetrating the film substrate, and the holes can also be opened by penetrating more than two insulating layers.
形成孔後,對孔之壁面進行導體化。導體化例如藉由無電解鍍覆而進行。無電解鍍覆可為濕式鍍覆,亦可為乾式鍍覆(PVD法或CVD法),可根據絕緣層之材料或厚度、印刷佈線板之規格等而適當選擇。若考慮通用之印刷佈線板製造步驟.設備,則較佳為濕式無電解銅鍍覆。亦可對孔中印刷導電膏而使其導體化。 After the hole is formed, the wall surface of the hole is made conductive. Conductivity is performed, for example, by electroless plating. Electroless plating can be wet plating or dry plating (PVD or CVD), and can be appropriately selected according to the material or thickness of the insulating layer, the specifications of the printed wiring board, etc. If the general printed wiring board manufacturing steps and equipment are considered, wet electroless copper plating is preferred. Conductive paste can also be printed in the hole to make it conductive.
於絕緣層上設置用於形成第二電路之導體層之方法未特別限定,自無電解鍍覆、電解鍍覆、無電解鍍覆及電解鍍覆之組合等中適當選擇即 可。若考慮通用之印刷佈線板製造步驟.設備,則較佳為濕式無電解銅鍍覆。於絕緣層上形成導體層時,可使設置於絕緣層之孔之壁面上析出金屬而進行導體化。於使用在絕緣層之表面上具備導體層之積層體,例如為隔著單面銅箔積層板、預浸體或接合片等而積層金屬箔之積層體之情形時,可利用該積層體之導體層而形成第二電路。 The method for providing the conductor layer for forming the second circuit on the insulating layer is not particularly limited, and may be appropriately selected from electroless plating, electrolytic plating, or a combination of electroless plating and electrolytic plating. Considering the steps and equipment for manufacturing a general printed wiring board, wet electroless copper plating is preferred. When forming the conductor layer on the insulating layer, metal may be deposited on the wall surface of the hole provided in the insulating layer to make it conductive. When a laminate having a conductive layer on the surface of an insulating layer is used, for example, a laminate having a metal foil laminated thereon via a single-sided copper foil laminate, a prepreg, or a bonding sheet, the conductive layer of the laminate can be used to form a second circuit.
利用設置於絕緣層上之導體層,於絕緣層上形成第二電路。第二電路之形成方法未特別限定,可與第一電路之形成同樣,應用減成法、半加成法等。 A second circuit is formed on the insulating layer using a conductive layer disposed on the insulating layer. The method for forming the second circuit is not particularly limited, and can be formed in the same manner as the first circuit, using a subtractive method, a semi-additive method, etc.
膜狀基材之第一主面上之多層化可於上述分離步驟之前或之後實施。於分離步驟前進行多層化之情形時,與第一電路形成步驟同樣,可使用處理剛性基材之裝置形成第二電路。於使用剛性材料作為絕緣層之情形時,由於與支持體30分離後基材亦具有剛性,故即便於分離步驟後,亦可與上述第一電路形成步驟同樣,使用處理剛性基材之裝置而形成第二電路。可於多層化中途之階段中,實施支持體30及離型片21之分離。例如,可於膜狀基材11之第一主面後設置剛性之絕緣層而確保剛性之後,於實施開孔或電路之形成之前實施分離步驟。 The multi-layering on the first main surface of the film-like substrate can be implemented before or after the above-mentioned separation step. In the case of multi-layering before the separation step, the second circuit can be formed using an apparatus for processing a rigid substrate in the same manner as the first circuit forming step. In the case of using a rigid material as an insulating layer, since the substrate has rigidity after separation from the support 30, even after the separation step, the second circuit can be formed using an apparatus for processing a rigid substrate in the same manner as the first circuit forming step. The support 30 and the release sheet 21 can be separated in the middle of the multi-layering. For example, a rigid insulating layer may be provided behind the first main surface of the film-like substrate 11 to ensure rigidity, and then the separation step may be performed before opening holes or forming circuits.
藉由分離步驟,自膜狀基材11之第二主面將離型片21剝離之後,可於膜狀基材11之第二主面上形成第三電路。第三電路之形成方法可與上述 第一電路及第二電路之形成同樣,藉由恰當之方法而實施。例如,於絕緣樹脂膜之第二主面上形成導體層,並將該導體層圖案化,藉此形成電路。亦可以導體層作為饋電層,利用圖案鍍覆而形成電路。於膜狀基材11之第二主面上預先設置導電層之情形時,可使用該導電層而形成第三電路。 After the release sheet 21 is peeled off from the second main surface of the film-like substrate 11 by the separation step, a third circuit can be formed on the second main surface of the film-like substrate 11. The method for forming the third circuit can be implemented by an appropriate method in the same manner as the formation of the first circuit and the second circuit described above. For example, a conductive layer is formed on the second main surface of the insulating resin film, and the conductive layer is patterned to form a circuit. The conductive layer can also be used as a feed layer to form a circuit by pattern coating. When a conductive layer is pre-set on the second main surface of the film-like substrate 11, the conductive layer can be used to form the third circuit.
可於第三電路之形成前或形成後,形成貫通膜狀基材11(絕緣樹脂膜)之孔。於絕緣樹脂膜之第一主面上形成絕緣層而進行多層化之情形時,可以除膜狀基材11以外,亦貫通絕緣層之方式進行開孔。開孔後,利用無電解鍍覆或導電膏之印刷等而進行導體化。 A hole penetrating the film substrate 11 (insulating resin film) can be formed before or after the formation of the third circuit. When an insulating layer is formed on the first main surface of the insulating resin film to form a multilayer, a hole can be opened in a manner that penetrates the insulating layer in addition to the film substrate 11. After the hole is opened, the conductor is made by electroless plating or printing of conductive paste.
於第三電路之形成前,在絕緣樹脂膜之第一主面上形成絕緣層而進行多層化之情形時,由於基材具有剛性,故可與上述第一電路形成步驟同樣,使用處理剛性基材之裝置而形成第三電路。 Before forming the third circuit, when an insulating layer is formed on the first main surface of the insulating resin film to form a multilayer structure, since the substrate has rigidity, the third circuit can be formed using a device for processing a rigid substrate in the same manner as the above-mentioned first circuit formation step.
將形成第一電路後之膜狀基材11(絕緣樹脂膜)自支持體30及離型片21分離後,可於膜狀基材11之第一主面(第一電路形成面)側積層剛性支持體而形成積層體。藉由使用該積層體,可與對第一主面之第一電路之形成同樣,對第二主面之第三電路之形成中亦可應用處理剛性基材之裝置,故電路之窄間距化較容易。 After the film substrate 11 (insulating resin film) after the first circuit is formed is separated from the support 30 and the release sheet 21, a rigid support can be laminated on the first main surface (first circuit forming surface) of the film substrate 11 to form a laminate. By using this laminate, the device for processing a rigid substrate can be applied to the formation of the third circuit on the second main surface in the same way as the formation of the first circuit on the first main surface, so it is easier to narrow the pitch of the circuit.
可與上述積層體100之形成同樣,於膜狀基材與支持體之間配置離型片,以膜狀基材及支持體自離型片之外周端向外側突出之狀態,藉由熱壓等形成積層體。藉由形成此種積層體,於第三電路之形成中,亦與第一電 路之形成時同樣,可防止因藥液滲入積層體界面而導致之剝離或因溶解物所導致之藥液之污染。 Similar to the formation of the above-mentioned laminate 100, a release sheet may be arranged between the film substrate and the support, and the laminate may be formed by heat pressing or the like in a state where the film substrate and the support protrude outward from the outer peripheral end of the release sheet. By forming such a laminate, in the formation of the third circuit, similar to the formation of the first circuit, it is possible to prevent peeling caused by the infiltration of the chemical solution into the laminate interface or contamination of the chemical solution by dissolved substances.
若使用以膜狀基材之第二主面成為支持體側之方式所積層之積層體100,於第一主面形成第一電路,於分離步驟後,以膜狀基材之第一主面成為支持體側之方式形成積層體,且於第二主面形成第三電路,則可形成於絕緣樹脂膜之雙面具有電路之雙面可撓性印刷基板。 If a laminate 100 in which the second main surface of the film-like substrate is laminated is used as the support side, a first circuit is formed on the first main surface, and after the separation step, a laminate is formed in which the first main surface of the film-like substrate is formed as the support side, and a third circuit is formed on the second main surface, a double-sided flexible printed circuit board having circuits on both sides of the insulating resin film can be formed.
以下,示出實施例及比較例,對本發明進行更具體地說明,但本發明不限定於以下之實施例。 The following are examples and comparative examples to explain the present invention in more detail, but the present invention is not limited to the following examples.
使用Hitachi Chemical製造之FR-4預浸體「GEA-67N」(厚度150μm)作為支持體,使用於厚度50μm之聚對苯二甲酸乙二酯(PET)膜之一面上設置有厚度10μm之丙烯酸系微黏著層之耐熱微黏著膜(TOYOCHEM製造之「LIOELM LE951」)作為離型片,使用如下雙面銅箔積層板作為膜狀基材,該雙面銅箔積層板係於在聚醯亞胺核心層之雙面具備熱塑性聚醯亞胺接著層之合計厚度25μm之聚醯亞胺膜(Kaneka製造之「Pixeo FRS25」)上熱層壓福田金屬製造之電解銅箔「HD2」而成者。以將支持體切割為120mm×120mm之尺寸、將離型片切割為100mm×100mm之尺寸、將膜狀基材切割為140mm×140mm之尺寸、支持體自離型片之外周突出10mm之寬度、膜狀基材自離型片之外周突出20mm之寬度之方式 調整位置關係,以支持體、離型片、膜狀基材之順序進行重疊。離型片以黏著劑層形成面與膜狀基材相接之方式而配置。 A FR-4 prepreg "GEA-67N" (thickness 150μm) manufactured by Hitachi Chemical was used as a support, a heat-resistant micro-adhesive film ("LIOELM LE951" manufactured by TOYOCHEM) having a 10μm thick acrylic micro-adhesive layer provided on one side of a 50μm thick polyethylene terephthalate (PET) film was used as a release sheet, and the following double-sided copper foil laminate was used as a film substrate. The double-sided copper foil laminate was formed by hot laminating an electrolytic copper foil "HD2" manufactured by Fukuda Metal on a polyimide film ("Pixeo FRS25" manufactured by Kaneka) having a total thickness of 25μm and a thermoplastic polyimide bonding layer provided on both sides of a polyimide core layer. The support is cut into a size of 120mm×120mm, the release sheet is cut into a size of 100mm×100mm, the film substrate is cut into a size of 140mm×140mm, the support protrudes from the outer periphery of the release sheet by 10mm, and the film substrate protrudes from the outer periphery of the release sheet by 20mm. The positional relationship is adjusted, and the support, release sheet, and film substrate are overlapped in this order. The release sheet is arranged in a manner such that the adhesive layer forming surface is in contact with the film substrate.
使用熱壓裝置,以180℃/3MPa/60分鐘之條件進行層壓而獲得積層體。所獲得之積層體係具有充分之剛性以供剛性印刷佈線板用製造裝置進行操作者,其中,於配置有離型片之區域,離型片與膜狀基材密接,於支持體上隔著離型片而固定膜狀基材。於離型片外周之外側10mm寬之邊框狀區域中,支持體與膜狀基材牢固地接著。 The laminate is obtained by laminating using a hot press at 180°C/3MPa/60 minutes. The laminate has sufficient rigidity for operation in a rigid printed wiring board manufacturing device, wherein the release sheet is in close contact with the film substrate in the area where the release sheet is arranged, and the film substrate is fixed on the support body via the release sheet. In the 10mm wide frame-shaped area outside the outer periphery of the release sheet, the support body and the film substrate are firmly connected.
使用上述積層體,以表1中示出之條件進行除渣處理,以表2中示出之條件進行濕式無電解銅鍍覆處理。於膜狀基材之銅箔上形成銅鍍覆皮膜。又,積層體之外周並無藥液滲入,未見層間之剝離等異常。 The above-mentioned laminate was used for slag removal under the conditions shown in Table 1 and for wet electroless copper plating under the conditions shown in Table 2. A copper plating film was formed on the copper foil of the film-like substrate. In addition, there was no chemical solution infiltration around the laminate, and no abnormalities such as peeling between layers were observed.
以剪刀將積層體外周之邊框狀之接著部分切除後發現:於離型片與膜狀基材之界面可進行良好地剝離,膜狀基材與離型片之接觸面上未見污染等異常。 After using scissors to cut off the frame-shaped connecting part on the periphery of the laminate, it was found that the interface between the release sheet and the film substrate could be peeled off well, and no abnormalities such as contamination were found on the contact surface between the film substrate and the release sheet.
除將離型片變更為厚度25μm之氟系樹脂膜(旭硝子製造之「Aflex 25N NT」)以外與實施例1同樣地形成積層體,進行除渣處理及濕式無電解銅鍍覆處理。於實施例2中,亦與實施例1同樣,於膜狀基材之銅箔上形成銅鍍覆皮膜,積層體之外周並無藥液滲入,未見層間之剝離等異常。以剪刀將積層體外周之邊框狀之接著部分切除後發現:於離型片與膜狀基材之界面可進行良好地剝離,膜狀基材與離型片之接觸面上未見污染等異常。 In Example 1, except that the release sheet was changed to a 25μm thick fluorine resin film ("Aflex 25N NT" manufactured by Asahi Glass), a laminate was formed, and a slag removal treatment and a wet electroless copper plating treatment were performed. In Example 2, a copper plating film was formed on the copper foil of the film substrate in the same manner as in Example 1. There was no chemical solution infiltration on the periphery of the laminate, and no abnormalities such as peeling between layers were observed. After the frame-shaped connecting part on the periphery of the laminate was cut off with scissors, it was found that the interface between the release sheet and the film substrate could be well peeled, and no abnormalities such as contamination were observed on the contact surface between the film substrate and the release sheet.
除將離型片之尺寸變更為120mm×120mm(與支持體相同之尺寸),以覆蓋支持體上之整個面之方式配置離型片以外,與實施例1同樣地形成積層體。關於所獲得之積層體,離型片牢固地接著於支持體上之整個面,離型片與膜狀基材密接。使用該積層體,與實施例1同樣地進行除渣處理及濕式無電解銅鍍覆處理後發現:於離型片之外周及外周附近,有藥液滲入離型片之黏著劑,膜狀基材自離型片剝離。於此例中,認為因被藥液滲入之黏著劑混入於藥液中而產生了藥液之污染。 The laminate was formed in the same manner as in Example 1 except that the size of the release sheet was changed to 120 mm × 120 mm (the same size as the support) and the release sheet was arranged to cover the entire surface of the support. In the obtained laminate, the release sheet was firmly attached to the entire surface of the support, and the release sheet was in close contact with the film-like substrate. The laminate was used to perform the deslagging treatment and wet electroless copper plating treatment in the same manner as in Example 1, and it was found that the chemical solution infiltrated the adhesive of the release sheet at the periphery and near the periphery of the release sheet, and the film-like substrate was peeled off from the release sheet. In this case, it is believed that the contamination of the chemical solution was caused by the adhesive infiltrated by the chemical solution being mixed into the chemical solution.
除將離型片之尺寸變更為120mm×120mm(與支持體相同之尺寸),以覆蓋支持體上之整個面之方式配置離型片以外,與實施例2同樣地形成積層體。關於所獲得之積層體,離型片牢固地接著於支持體上之整個面,但離型片與膜狀基材之銅箔之密接性並不充分。使用該積層體,與實施例1、2同樣進行除渣處理及濕式無電解銅鍍覆處理後發現:自周圍產生了剝離。認為該原因在於:有藥液滲入離型片與膜狀基材之界面。 The laminate was formed in the same manner as in Example 2 except that the size of the release sheet was changed to 120 mm × 120 mm (the same size as the support) and the release sheet was arranged to cover the entire surface of the support. Regarding the obtained laminate, the release sheet was firmly attached to the entire surface of the support, but the adhesion between the release sheet and the copper foil of the film-like substrate was not sufficient. Using the laminate, after the deslagging treatment and wet electroless copper plating treatment were carried out in the same manner as in Examples 1 and 2, it was found that peeling occurred from the periphery. It is believed that the reason is that the chemical solution penetrated into the interface between the release sheet and the film-like substrate.
根據上述實施例及比較例之結果可知:藉由使用支持體(預浸體)及膜狀基材(銅箔積層板)之尺寸比離型片之尺寸大、且支持體與膜狀基材於外周之邊框狀區域接著之積層體,可阻斷印刷佈線板之製造步驟中之藥液向積層界面之滲入,從而可防止界面之剝離或藥液之污染。 According to the results of the above-mentioned embodiments and comparative examples, it can be seen that by using a laminate in which the size of the support (prepreg) and the film substrate (copper foil laminate) is larger than the size of the release sheet, and the support and the film substrate are connected in the peripheral frame-shaped area, the infiltration of the chemical solution into the laminate interface during the manufacturing step of the printed wiring board can be blocked, thereby preventing the interface from peeling off or the contamination of the chemical solution.
1:外周端 1: Peripheral end
2:外周端 2: Peripheral end
3:外周端 3: Peripheral end
7:區域 7: Region
8:外周區域 8: Peripheral area
9:區域 9: Region
11:膜狀基材 11: Film substrate
21:離型片 21: Release film
30:支持體 30: Support body
100:積層體 100: Layered body
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201101950A (en) * | 2009-04-09 | 2011-01-01 | Atotech Deutschland Gmbh | A method of manufacturing a circuit carrier layer and a use of said method for manufacturing a circuit carrier |
| WO2014050933A1 (en) * | 2012-09-27 | 2014-04-03 | 新日鉄住金化学株式会社 | Display device production method |
| TW201514007A (en) * | 2013-10-04 | 2015-04-16 | Ind Tech Res Inst | Release layer, substrate structure, and method for manufacturing flexible electronic device |
| TW201717724A (en) * | 2012-10-04 | 2017-05-16 | Jx日鑛日石金屬股份有限公司 | Method for manufacturing multilayer printed wiring substrate and base substrate |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH09293951A (en) * | 1996-04-25 | 1997-11-11 | Matsushita Electric Ind Co Ltd | Manufacturing method of flexible wiring board |
| EP1333708A4 (en) * | 2001-07-19 | 2008-08-13 | Toray Industries | Circuit board, circuit board-use member and production method therefor and method of laminating fexible film |
| CN100579333C (en) * | 2003-01-23 | 2010-01-06 | 东丽株式会社 | Circuit board component, circuit board manufacturing method, and circuit board manufacturing apparatus |
| JP2004247391A (en) * | 2003-02-12 | 2004-09-02 | Toray Ind Inc | Method for manufacturing circuit board |
| JP2007251080A (en) * | 2006-03-20 | 2007-09-27 | Fujifilm Corp | Fixing method of plastic substrate, circuit board and manufacturing method thereof |
| TWI654090B (en) * | 2013-07-24 | 2019-03-21 | 尤尼吉可股份有限公司 | Laminated product, treatment method thereof and production method of flexible device |
| CN104512075B (en) * | 2013-10-04 | 2017-06-23 | 财团法人工业技术研究院 | Release layer, substrate structure and flexible electronic element process |
| JP6333560B2 (en) * | 2014-01-23 | 2018-05-30 | 旭化成株式会社 | Substrate applied to flexible electronic device having predetermined structure and method for manufacturing the same |
| JP2017149041A (en) * | 2016-02-25 | 2017-08-31 | 東洋紡株式会社 | Layered body and method for producing the same |
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-
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201101950A (en) * | 2009-04-09 | 2011-01-01 | Atotech Deutschland Gmbh | A method of manufacturing a circuit carrier layer and a use of said method for manufacturing a circuit carrier |
| WO2014050933A1 (en) * | 2012-09-27 | 2014-04-03 | 新日鉄住金化学株式会社 | Display device production method |
| TW201717724A (en) * | 2012-10-04 | 2017-05-16 | Jx日鑛日石金屬股份有限公司 | Method for manufacturing multilayer printed wiring substrate and base substrate |
| TW201514007A (en) * | 2013-10-04 | 2015-04-16 | Ind Tech Res Inst | Release layer, substrate structure, and method for manufacturing flexible electronic device |
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