TWI481499B - Double-layered single surface metal foil clad laminated sheet and method of fabricating thereof,and single surface print wiring board and method of fabricating thereof - Google Patents
Double-layered single surface metal foil clad laminated sheet and method of fabricating thereof,and single surface print wiring board and method of fabricating thereof Download PDFInfo
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- TWI481499B TWI481499B TW097112486A TW97112486A TWI481499B TW I481499 B TWI481499 B TW I481499B TW 097112486 A TW097112486 A TW 097112486A TW 97112486 A TW97112486 A TW 97112486A TW I481499 B TWI481499 B TW I481499B
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- metal foil
- release material
- sided metal
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- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Laminated Bodies (AREA)
Description
本發明是關於一種兩張合成的單面金屬箔積層板及其製造方法,以及單面印刷配線板及其製造方法,特別是關於一種應用於多層配線板、半導體晶圓搭載基板及半導體封裝基板等的兩張合成的單面金屬箔積層板及其製造方法,以及利用該兩張合成的單面金屬箔積層板的單面印刷配線板及其製造方法。The present invention relates to a two-composite single-sided metal foil laminate and a method of manufacturing the same, and a single-sided printed wiring board and a method of manufacturing the same, and more particularly to a multilayer wiring board, a semiconductor wafer mounting substrate, and a semiconductor package substrate Two synthetic single-sided metal foil laminates, and a method for producing the same, and a single-sided printed wiring board using the two synthetic single-sided metal foil laminates and a method of manufacturing the same.
在習知技術中,電路板設於晶片上(Board On Chip,BOC)之基板等所利用的單面金屬箔積層板多數是如下所述那樣進行製造的。首先,將所需張數的預浸片(prepreg)進行重疊而形成積層體。繼而,在其兩面側重合金屬箔而形成雙面金屬箔積層板。然後,只對雙面金屬箔積層板的一面進行蝕刻,除去銅箔而形成單面金屬箔積層板。在這一過程中,必然存在一面上的銅箔量變得無用之問題。In the prior art, a single-sided metal foil laminate used for a substrate such as a board on a wafer (Board On Chip, BOC) is manufactured as follows. First, a prepreg of a desired number of sheets is superposed to form a laminate. Then, the metal foil is superposed on both sides thereof to form a double-sided metal foil laminate. Then, only one side of the double-sided metal foil laminate is etched to remove the copper foil to form a single-sided metal foil laminate. In this process, there must be a problem that the amount of copper foil on one side becomes useless.
因此,為了效率良好地製造單面金屬箔積層板而提出有一種這樣的方法,在離型材料的各個面側,將規定張數的預浸片及金屬箔進行重疊並加熱加壓,形成兩張合成的單面金屬箔積層板,接著再分離為兩張(例如,參照專利文獻1)。而且,還提出有一種這樣的方法,藉由使用離型薄膜以提高與基材之間的剝離性,而希望效率良好地製造出單面金屬箔積層板(例如,參照專利文獻2)。另外,還提出有一種方法是利用兩張合成的銅積層板,在其間將 預浸片和較銅積層板小、與銅積層板相互不接觸的薄膜,設置在銅積層板的內側上,並利用加熱加壓而形成偽多層板,且在電路加工後進行剝離(例如,參照專利文獻3)。Therefore, in order to efficiently manufacture a single-sided metal foil laminated board, there has been proposed such a method in which a predetermined number of prepreg sheets and a metal foil are superposed and heated and pressed on the respective surface sides of the release material to form two The laminated single-sided metal foil laminate is then separated into two pieces (for example, refer to Patent Document 1). Further, there has been proposed a method in which a release film is used to improve the peeling property with a substrate, and it is desired to efficiently produce a single-sided metal foil laminate (for example, refer to Patent Document 2). In addition, there is also proposed a method of using two synthetic copper laminates in between The prepreg and the film which are smaller than the copper laminate and which are not in contact with the copper laminate are disposed on the inner side of the copper laminate, and are formed by heating and pressing to form a pseudo multilayer board, and are peeled off after the circuit is processed (for example, Refer to Patent Document 3).
專利文獻1:日本專利早期公開之特開平7-302977號公報 專利文獻2:日本專利早期公開之特開2007-90581號公報 專利文獻3:日本專利早期公開之特開2001-308548號公報Patent Document 1: Japanese Laid-Open Patent Publication No. Hei 7-302977 Patent Document 2: Japanese Patent Laid-Open Publication No. 2007-90581 Patent Document 3: Japanese Patent Laid-Open Publication No. 2001-308548
如專利文獻1所示,在不將兩張合成的單面金屬箔積層板分離為兩張的狀態下,當對兩面進行電路加工、防焊劑(solder resist)塗敷、Ni-Au電鍍、外形加工等各項處理時,作業效率優良。但是,因為在離型材料中使用鋁,所以,當在兩張合在一起的狀態下進行各項處理時,有時在處理中所使用的藥液會滲入到兩張合成的單面金屬箔積層板的單面板與離型材料之對合面(以下,稱作〔對合面〕)上。在這種情況下,考慮設置一項對所附著的藥液成分進行清洗的工程,但利用通常的清洗方式難以除去滲入到對合面上的藥液。因此,存在藥液殘留而對其它處理中所使用的藥液形成污染之問題。而且,在電路加工中,也存在離型材料的鋁會溶解的問題。As shown in Patent Document 1, in the state where two synthetic single-sided metal foil laminates are not separated into two, circuit processing, solder resist coating, Ni-Au plating, and profile are performed on both surfaces. When processing such as processing, the work efficiency is excellent. However, since aluminum is used in the release material, when the two treatments are carried out in combination, the liquid used in the treatment sometimes penetrates into the two synthetic single-sided metal foils. The single panel of the laminate is placed on the mating surface of the release material (hereinafter referred to as the "composite surface"). In this case, it is conceivable to provide a process for cleaning the chemical component to be attached, but it is difficult to remove the chemical solution that has penetrated into the opposing surface by a usual cleaning method. Therefore, there is a problem that the chemical liquid remains and the chemical solution used in other treatments is contaminated. Moreover, in the circuit processing, there is also a problem that aluminum of the release material dissolves.
如專利文獻2那樣,在離型材料中利用離型薄膜,則可解決上述那樣的藥液的滲入、離型材料的溶解之問題。但是,在防焊劑的固化(cure)這種形成高溫的工程中, 存在因離型薄膜的收縮而使其對合面剝離的問題。As described in Patent Document 2, when the release film is used for the release material, the problem of penetration of the chemical liquid and dissolution of the release material as described above can be solved. However, in the curing of the solder resist, such a high temperature forming process, There is a problem in that the facing surface is peeled off due to shrinkage of the release film.
而且,在如專利文獻3那樣,利用兩張合成的銅積層板,將預浸片與較銅積層板小的、與銅積層板不相互黏接的薄膜,設置在銅積板層的內側而進行加工之方法,不能對支持基板全面進行電路加工,效率差。而且,在薄膜的位置偏離的情況下,無法良好地取得製品,使形成不合格品的機率增高。Further, as in Patent Document 3, a film in which a prepreg sheet and a copper laminate are not bonded to each other by a two-layered copper laminate is provided on the inner side of the copper laminate layer. The processing method cannot fully perform circuit processing on the support substrate, and the efficiency is poor. Further, when the position of the film is deviated, the product cannot be satisfactorily obtained, and the probability of forming a defective product is increased.
鑒於這些問題,本發明的目的是提供一種這樣的兩張合成的單面金屬箔積層板及其製造方法,亦即,在製造過程中所使用的藥液不會滲入,離型材料的剝離性良好,且在高溫處理時不會因離型薄膜的收縮而使對合面剝離。而且,本發明的目的是提供一種利用該兩張合成的單面金屬箔積層板的單面印刷配線板及其製造方法。In view of these problems, an object of the present invention is to provide such two synthetic single-sided metal foil laminates and a method of manufacturing the same, that is, the liquid used in the manufacturing process does not penetrate, and the release property of the release material It is good and does not peel off the mating surface due to shrinkage of the release film during high temperature processing. Further, it is an object of the present invention to provide a single-sided printed wiring board using the two synthetic single-sided metal foil laminates and a method of manufacturing the same.
上述課題利用下述的本發明加以解決。亦即,本發明為一種兩張合成的單面金屬箔積層板,其中,兩組在一張預浸片的一面或在多張預浸片積層體的一面上重合金屬箔所形成之構成體,這兩組構成體是藉著離型材料並使各個預浸片成為內側,並利用加熱加壓處理進行重合。而且,前述離型材料為樹脂材料或由該樹脂材料和金屬材料組合之複合材料所構成的薄膜,而且,前述離型材料的厚度為10~200 μm,且在施加前述加熱加壓處理之溫度下的前述離型材料的熱收縮率小於等於1.5%。The above problems are solved by the present invention described below. That is, the present invention is a two-synthesis single-sided metal foil laminate in which two groups are formed by superimposing a metal foil on one side of a prepreg or on one side of a plurality of prepreg laminates. The two sets of constituent bodies are formed by the release material and the respective prepreg sheets are made inside, and are superposed by heat and pressure treatment. Further, the release material is a resin material or a film composed of a composite material of the resin material and the metal material, and the release material has a thickness of 10 to 200 μm and is subjected to the temperature of the heat and pressure treatment. The heat release rate of the aforementioned release material is less than or equal to 1.5%.
而且,本發明為一種兩張合成的單面金屬箔積層板的 製造方法,包括在一張預浸片的一面或在多張預浸片積層片的一面上重合金屬箔,以製作一構成體。然後,對兩組該構成體,藉著離型材料並使各個預浸片成為內側之形態而施以加熱加壓處理進行重合。而且,前述離型材料為樹脂材料或由該樹脂材料和金屬材料組合之複合材料所構成的薄膜,且其厚度為10~200 μm,且在施加前述加熱加壓處理之溫度下的前述離型材料的熱收縮率小於等於1.5%。Moreover, the present invention is a composite single-sided metal foil laminate The manufacturing method comprises superposing a metal foil on one side of a prepreg or on one side of a plurality of prepreg sheets to form a constituent body. Then, the two sets of the constituent bodies were superposed by a heat and pressure treatment by means of a release material and the respective prepreg sheets were formed inside. Further, the release material is a resin material or a film composed of a composite material of the resin material and the metal material, and has a thickness of 10 to 200 μm, and the aforementioned release type is applied at a temperature at which the heat and pressure treatment is applied. The material has a heat shrinkage rate of 1.5% or less.
另外,本發明為一種單面印刷配線板,是在上述的兩張合成的單面金屬箔積層板的兩面上,施以電路加工處理、防焊劑塗敷處理、Ni-Au電鍍處理及外形加工處理後,或施以前述各項處理中的至少某一項處理後,使前述兩組單面金屬箔積層板分別從前述離型材料分離而形成。Further, the present invention is a single-sided printed wiring board which is subjected to circuit processing, solder resist coating treatment, Ni-Au plating treatment, and profile processing on both surfaces of the above-mentioned two synthetic single-sided metal foil laminates. After the treatment, or after at least one of the above-described various treatments, the two sets of single-sided metal foil laminates are separated from the release material.
而且,本發明為一種單面印刷配線板的製造方法,是在上述的兩張合成的單面金屬箔積層板的兩面上,施以電路加工處理、防焊劑塗敷處理、Ni-Au電鍍處理及外形加工處理後,或施以前述各項處理中的至少某一項處理後,使前述兩組單面金屬箔積層板分別從前述離型材料分離。Moreover, the present invention provides a method for producing a single-sided printed wiring board, which is subjected to circuit processing, solder resist coating treatment, and Ni-Au plating treatment on both surfaces of the two synthetic single-sided metal foil laminates described above. After the shape processing, or after at least one of the above-described various treatments, the two sets of single-sided metal foil laminates are separated from the release material.
如利用本發明,則可提供一種這樣的兩張合成的單面金屬箔積層板及其製造方法,亦即,在製造過程中所使用的藥液不會滲入,離型材料的剝離性良好,且在高溫處理時不會因離型薄膜的收縮而使對合面剝離。而且,如利用本發明,則可提供一種利用該兩張合成的單面金屬箔積層板的單面印刷配線板及其製造方法。According to the present invention, it is possible to provide such two synthetic single-sided metal foil laminates and a method for producing the same, that is, the chemical liquid used in the manufacturing process does not penetrate, and the release property of the release material is good. Moreover, at the time of high temperature treatment, the mating surface is not peeled off due to shrinkage of the release film. Further, according to the present invention, it is possible to provide a single-sided printed wiring board using the two synthetic single-sided metal foil laminates and a method of manufacturing the same.
本發明的兩張合成的單面金屬箔積層板,是兩組在一張預浸片的一面或在多張預浸片積層體的一面上與金屬箔重合之構成體,這兩組構成體是藉由離型材料並使各個預浸片成為內側,而利用加熱加壓處理進行重合。The two synthetic single-sided metal foil laminates of the present invention are two-component structures which are overlapped with a metal foil on one side of a prepreg or on one side of a plurality of prepreg laminates. The release is performed by a heat and pressure treatment by using a release material and making each prepreg into the inner side.
以下,對本發明的兩張合成的單面金屬箔積層板進行說明。Hereinafter, two synthetic single-sided metal foil laminated sheets of the present invention will be described.
(離型材料) 本發明所使用的離型材料,是利用加熱加壓處理,而在印刷配線板的製造過程中本身與預浸板不剝離地進行黏接,另一方面,在有意識地進行剝離時,形成一種可用手輕鬆地從兩張合成的單面金屬箔積層板剝離預浸板的形態。而且,該離型材料為一種由樹脂材料或使該樹脂材料和金屬材料組合之複合材料所構成的薄膜。如只由金屬材料構成離型材料,則在配線板的製造過程中,各種藥液容易產生滲入,但藉由利用上述那樣的材料構成離型材料,則可消除藥液的滲入,減輕因在與離型材料的對合面上所殘留的藥液而造成的不良影響。(release material) The release material used in the present invention is subjected to heat and pressure treatment, and is adhered to the prepreg without peeling off during the production process of the printed wiring board, and is formed when consciously peeled off. A form in which the prepreg can be easily peeled off from two synthetic single-sided metal foil laminates by hand. Further, the release material is a film composed of a resin material or a composite material in which the resin material and the metal material are combined. If the release material is made of only a metal material, various chemical liquids are likely to be infiltrated during the manufacture of the wiring board. However, by using the above-mentioned material to form a release material, the penetration of the chemical liquid can be eliminated, and the cause of the reduction can be alleviated. Adverse effects caused by the liquid remaining on the opposing surface of the release material.
離型材料的熱收縮率在施以加熱加壓處理的溫度下,必須要小於等於1.5%,小於等於1.0%較佳,在0.01~0.9%的範圍內更佳,在0.01~0.8%的範圍內特佳。如熱收縮率超過1.5%,則在防焊劑的固化這樣的高溫下(例如大於等於160℃),離型材料容易產生收縮,其對合面會剝離。亦即,會導致離型材料的耐熱性劣化。The heat shrinkage rate of the release material must be 1.5% or less, 1.0% or less, and preferably 0.01% to 0.9%, in the range of 0.01% to 0.8%, at a temperature at which heat and pressure treatment is applied. Nite Jia. If the heat shrinkage rate exceeds 1.5%, the release material tends to shrink at a high temperature (for example, 160 ° C or higher) at which the solder resist is cured, and the bonded surface peels off. That is, the heat resistance of the release material is deteriorated.
另外,熱收縮率是利用三維測定器(三豐製)測定180℃的乾燥機進行1小時處理之前後的尺寸,並求取(加熱處理前後的尺寸的差/加熱處理前的尺寸)而形成收縮率。In addition, the heat shrinkage rate is a size obtained by measuring a 180° C. dryer in a three-dimensional measuring device (manufactured by Mitutoyo Corporation) before and after the treatment for one hour, and is obtained by (a difference in size before and after heat treatment/a size before heat treatment). Shrinkage.
而且,離型材料在加熱加壓處理後的伸展性的下降率(descrasing rate),小於等於加熱加壓處理前的50%較佳,小於等於30%更佳,在1~20%的範圍內特佳。由於下降率小於等於50%,從而可防止剝離離型材料時產生破裂,使一剝離性更加良好。Further, the descrasing rate of the release property of the release material after the heat and pressure treatment is preferably 50% or less before the heat and pressure treatment, more preferably 30% or less, and in the range of 1 to 20%. Very good. Since the rate of decrease is 50% or less, it is possible to prevent cracking when peeling off the release material, and to make the peelability more favorable.
另外,關於伸展性的下降率,是利用精密萬能測試機(島津製作所製),對上述加熱加壓處理前的離型材料和上述加熱加壓處理後的離型材料,分別以5mm/min的拉伸速度進行拉伸並測定斷裂時的樣品長度L,且首先由測試前的樣品長度L0 和斷裂時的樣品長度L,利用下述式1而計算出上述加熱加壓處理前的伸展率(E0 )和上述加熱加壓處理後的伸展率(E)。In addition, the rate of decrease in the stretchability is 5 mm/min by using a precision universal testing machine (manufactured by Shimadzu Corporation) for the release material before the heat and pressure treatment and the release material after the heat and pressure treatment. The tensile speed was stretched and the length L of the sample at the time of the fracture was measured, and the elongation before the above-described heating and pressure treatment was calculated by the following formula 1 from the sample length L 0 before the test and the sample length L at the time of the fracture. (E 0 ) and the elongation (E) after the above heat and pressure treatment.
伸展率(E,E0 )(%)=(L-L0 )×100/L0 (式1)Elongation rate (E, E 0 ) (%) = (L - L 0 ) × 100 / L 0 (Formula 1)
接著,利用下述式2而計算並求出伸展性的下降率。Next, the rate of decrease in stretchability is calculated and calculated by the following formula 2.
伸展性的下降率(%)=(E0 -E)×100/E0 (式2)Rate of decrease in stretchability (%) = (E 0 - E) × 100 / E 0 (Formula 2)
作為構成離型材料的樹脂材料,可為聚苯硫醚、聚苯撑氧(polyphenylene oxide)、聚碸、聚醚碸、聚苯碸醚、聚醚亞胺、聚亞胺、聚醯胺亞胺、聚醯胺、聚碳酸酯、聚芳酯、聚醚酮、聚二醚酮、聚縮醛、醋酸纖維素、聚-4-甲基戊烯-1、聚對苯二甲酸乙二酯、聚苯二甲酸二乙酯及這些樹脂的衍生物。其中,以聚苯硫醚、聚亞胺較佳。As the resin material constituting the release material, it may be polyphenylene sulfide, polyphenylene oxide, polyfluorene, polyether oxime, polyphenylene ether, polyetherimide, polyimine, polyamidamine. Amine, polyamine, polycarbonate, polyarylate, polyether ketone, polydiether ketone, polyacetal, cellulose acetate, poly-4-methylpentene-1, polyethylene terephthalate , polyethylene terephthalate and derivatives of these resins. Among them, polyphenylene sulfide and polyimine are preferred.
而且,在離型材料是由將樹脂材料和金屬材料進行組合之複合材料構成的情況下,作為樹脂材料,可使用上述的材料。作為金屬材料,可使用不銹鋼、黃銅等。作為複合材料的形態,可採用以下這樣的形態,在樹脂材料構成的薄膜上,(a)利用壓制處理等而設置由金屬材料構成的薄膜(例如極薄的金屬箔)或薄片,或者(b)利用蒸鍍等而設置由金屬材料構成的層。而且,為了調整黏接性,也可在離型材料上施加表面粗面化處理(消光(mat)處理)。在這種情況下,金屬層的厚度不足1 μm較佳。如不足1μm,則即使在配線板的製造過程中,積層板末端被曝露在各種藥液中,藥液也不會浸入到內部,能够將藥液所造成的不良影響控制在最小限度。Further, in the case where the release material is composed of a composite material in which a resin material and a metal material are combined, the above-mentioned material can be used as the resin material. As the metal material, stainless steel, brass, or the like can be used. As a form of the composite material, a film made of a resin material may be used (a) a film (for example, an extremely thin metal foil) or a sheet made of a metal material, or (b), may be provided on a film made of a resin material. A layer made of a metal material is provided by vapor deposition or the like. Further, in order to adjust the adhesion, a surface roughening treatment (mat treatment) may be applied to the release material. In this case, the thickness of the metal layer is preferably less than 1 μm. If it is less than 1 μm, even if the end of the laminated board is exposed to various chemical liquids during the manufacturing process of the wiring board, the chemical liquid does not enter the inside, and the adverse effects caused by the chemical liquid can be minimized.
另外,在作為複合材料使用的情況下,作為樹脂材料,除了上述的材料以外,還可使用氟樹脂(聚偏二氟乙烯、聚四氟乙烯等)。Further, in the case of being used as a composite material, as the resin material, a fluororesin (polyvinylidene fluoride, polytetrafluoroethylene or the like) may be used in addition to the above materials.
離型材料的厚度為10~200 μm,較佳為12~125 μm,更佳為40~125 μm。如厚度不足10 μm,則離型材料的強度不足,在從兩張合成的單面金屬箔積層板分離離型材料時,離型材料會產生破損等,而使剝離性變差。而且,構成兩張合成的單面金屬箔積層板時的操作性也不佳。如厚度超過200 μm,則在入手的容易度、價格方面不佳。The thickness of the release material is 10 to 200 μm, preferably 12 to 125 μm, more preferably 40 to 125 μm. When the thickness is less than 10 μm, the strength of the release material is insufficient. When the release material is separated from the two synthetic single-sided metal foil laminates, the release material is broken or the like, and the peelability is deteriorated. Further, the operability in forming two synthetic single-sided metal foil laminates is not good. If the thickness exceeds 200 μm, it is not easy to start and the price.
另外,上述離型材料也可依據需要而在上述厚度的範圍內重疊使用多張。藉由將多張重疊,有時會使脫膜材料從兩張合成的單面金屬箔積層板的分離變得容易。Further, the release material may be used in a plurality of sheets in a range of the above thickness as needed. By overlapping a plurality of sheets, separation of the release material from the two synthetic single-sided metal foil laminates is sometimes facilitated.
(金屬箔) 作為金屬箔,可利用通常的印刷配線板所使用的金屬箔,例如銅箔。作為銅箔,可為電解銅箔及壓延銅箔中的某一種,厚度也並不特別限定。因此,可利用通常印刷配線板所使用的厚度小於等於105 μm的銅箔或可剝型的銅箔。(metal foil) As the metal foil, a metal foil used in a usual printed wiring board, for example, a copper foil can be used. The copper foil may be one of an electrolytic copper foil and a rolled copper foil, and the thickness is not particularly limited. Therefore, a copper foil or a peelable copper foil having a thickness of 105 μm or less which is usually used for a printed wiring board can be used.
另外,也可取代可剝型的銅箔,而利用具有鋁載體或鎳載體那樣的可蝕型的銅箔。Further, instead of the peelable copper foil, an erodible copper foil having an aluminum carrier or a nickel carrier may be used.
而且,雖然通常是對印刷配線板所利用的銅箔施以粗化處理,但本發明除了可使用那樣的銅箔以外,使用未施加粗化處理的銅箔也沒什麼特別問題。Further, although the copper foil used for the printed wiring board is usually subjected to a roughening treatment, the present invention is not particularly problematic except that a copper foil which is not subjected to roughening treatment can be used.
〔預浸片〕 預浸片是利用複合(matrix)樹脂組成物而對基材進行浸漬、塗敷或附著處理。[prepreg] The prepreg is a method of impregnating, coating or adhering a substrate with a matrix resin composition.
作為構成基材的材料,可採用玻璃類(E玻璃、D玻璃、S玻璃、T玻璃、石英玻璃(quartz玻璃)等)、陶瓷類(氧化鋁、氮化硼等)、耐熱性工程塑料類(全芳香族聚醯胺、聚苯硫醚、聚醚亞胺、聚亞胺、碳電極)等,並可斟酌將其中1種或2種以上一起使用。作為基材的形態,可為纖維、細切短纖(chop)等的織物或不織物、連續氣泡多孔質的氟樹脂薄膜或薄片等。As a material constituting the substrate, glass (E glass, D glass, S glass, T glass, quartz glass, etc.), ceramics (aluminum oxide, boron nitride, etc.), heat resistant engineering plastics can be used. (a wholly aromatic polyamine, a polyphenylene sulfide, a polyetherimide, a polyimine, a carbon electrode), and the like, and one or two or more of them may be used together. The form of the substrate may be a woven fabric such as a fiber or a chopped chop or a non-woven fabric, a continuous cell porous fluororesin film or a sheet, or the like.
作為預浸片的複合樹脂組成物的主成分之複合樹脂,可採用酚醛樹脂、聚酯樹脂、環氧樹脂、氰酸樹脂、熱硬化性聚醯亞胺樹脂、其它的熱硬化性樹脂,由其中的2種 以上所形成的組成物等。As the composite resin which is a main component of the composite resin composition of the prepreg, a phenol resin, a polyester resin, an epoxy resin, a cyanic resin, a thermosetting polyimide resin, or another thermosetting resin can be used. Two of them The composition formed above and the like.
在上述預浸片的複合用樹脂組成物中,為了提高可信性,也可含有無機填充物(filler)。該無機填充物並不特別限定,可為二氧化矽、熔融二氧化矽、滑石、氧化鋁、氫氧化鋁、硫酸鋇、氫氧化鈣、膠體二氧化矽(aerosil)及碳酸鈣等。它們可以單獨使用,也可以將2種以上組合使用。其中,從感應特性或低熱膨脹方面來看,以二氧化矽較佳。In the composite resin composition for the prepreg, the inorganic filler may be contained in order to improve the reliability. The inorganic filler is not particularly limited, and may be cerium oxide, molten cerium oxide, talc, aluminum oxide, aluminum hydroxide, barium sulfate, calcium hydroxide, aerosil, and calcium carbonate. These may be used alone or in combination of two or more. Among them, cerium oxide is preferred from the viewpoint of inductive characteristics or low thermal expansion.
出於提高分散性等的目的,也可對無機填充物利用矽烷偶合劑等各種偶合劑施以處理。For the purpose of improving dispersibility and the like, the inorganic filler may be treated with various coupling agents such as a decane coupling agent.
而且,在上述預浸片的複合用樹脂組成物中,為了提高可撓性,也可含有熱塑性樹脂。作為熱塑性樹脂,可為例如氟樹脂、聚苯醚、變性聚苯醚、聚苯硫醚、聚碳酸酯、聚醚亞胺、聚二醚酮、聚芳酯、聚醯胺、聚醯胺亞胺、聚丁二烯等,但並不限定於這些樹脂。熱塑性樹脂可以單獨使用,也可以將2種以上組合使用。Further, in the composite resin composition of the prepreg, the thermoplastic resin may be contained in order to improve flexibility. As the thermoplastic resin, for example, a fluororesin, a polyphenylene ether, a denatured polyphenylene ether, a polyphenylene sulfide, a polycarbonate, a polyether imine, a polydiether ketone, a polyarylate, a polyamine, a polyamidamine can be used. An amine, a polybutadiene or the like is not limited to these resins. The thermoplastic resin may be used singly or in combination of two or more.
在上述預浸片的複合用樹脂組成物中,也可依據需要,而調配入偶合劑、顏料、均化劑、消泡劑、離子捕捉(ion trap)劑等添加劑。In the composite resin composition of the prepreg, the additive such as a coupling agent, a pigment, a leveling agent, an antifoaming agent, or an ion trap may be blended as needed.
構成單面金屬箔積層板之預浸片的枚數至少為一張,但也可為多張。在積層後的預浸片之積層體的一面上,設置有前面所說明的金屬箔。The number of prepregs constituting the single-sided metal foil laminate is at least one, but it may be plural. On the one side of the laminated body of the laminated prepreg, the metal foil described above is provided.
本發明的兩張合成的單面金屬箔積層板是如下所述進行製造(參照圖1)的。亦即,首先在預浸片1的一面上 (在將多張預浸片進行層積的情況下,是在該積層體的一面上),重合金屬箔2而製作構成體。繼而,準備兩組該構成體,並以藉著關於本發明的離型材料3並使各個預浸片成為內側之形態而施以加熱加壓處理進行層積。加熱加壓處理是在例如兩張鑲板4之間插入這些材料而進行的。在本發明中,離型材料3與預浸片1及金屬箔2具有同等以上的長度(大小)。從製造印刷配線板時的操作性的觀點來看,使它們相同較佳。The two synthetic single-sided metal foil laminates of the present invention were produced as follows (see Fig. 1). That is, first on one side of the prepreg 1 (When a plurality of prepreg sheets are laminated, on one side of the laminated body), the metal foil 2 is superposed to form a constituent body. Then, two sets of the constituent bodies are prepared, and lamination is performed by applying heat and pressure treatment by the release material 3 of the present invention and the respective prepreg sheets are formed inside. The heat and pressure treatment is performed by, for example, inserting these materials between the two panels 4. In the present invention, the release material 3 has a length (size) equal to or higher than that of the prepreg 1 and the metal foil 2. From the viewpoint of operability in manufacturing a printed wiring board, they are preferably the same.
加熱加壓的條件根據預浸片的樹脂而有所不同,例如,在利用玻璃布基材環氧樹脂預浸片時,使溫度為150~250℃,壓力為0.5~8.0 MPa較佳The conditions for heating and pressurizing vary depending on the resin of the prepreg. For example, when using a glass cloth substrate epoxy prepreg, the temperature is 150 to 250 ° C, and the pressure is preferably 0.5 to 8.0 MPa.
本發明的單面印刷配線板是在本發明的兩張合成的單面金屬箔積層板的兩面上,施以電路加工處理、防焊劑塗敷處理、Ni-Au電鍍處理及外形加工處理後,或施以各項處理中的至少某一項處理後,使兩組單面金屬箔積層板分別從離型材料分離而製造的。The single-sided printed wiring board of the present invention is subjected to circuit processing, flux coating treatment, Ni-Au plating treatment, and outer shape processing on both surfaces of the two synthetic single-sided metal foil laminates of the present invention. Or after applying at least one of the treatments, the two sets of single-sided metal foil laminates are separately separated from the release material.
另外,也可在這些一系列的處理的最後,或者在利用任意的處理而將單面金屬箔積層板進行分離之後,進行連接不良(AOI)檢查等。Further, at the end of these series of processes, or after the single-sided metal foil laminate is separated by an arbitrary process, connection failure (AOI) inspection or the like may be performed.
製作兩組在厚度18 μm的銅箔(三井金屬株式會社製3EC-VLP-18)上,將兩張厚度0.1mm的預浸片(以玻璃布作為基材並在環氧樹脂中進行浸漬的預浸片(日立化 成工業株式會社製GEA-679FGB)依次進行重疊之構成體。將它們藉厚度50 μm的離型材料(離型薄膜)使各個預浸片成為內側,並利用加熱加壓處理(180℃,3MPa,1小時的加壓成形處理)進行層積,製作兩張合成的單面金屬箔積層板。Two sets of copper foil (3EC-VLP-18 manufactured by Mitsui Metals Co., Ltd.) having a thickness of 18 μm were produced, and two prepregs having a thickness of 0.1 mm (using glass cloth as a substrate and impregnated in epoxy resin) were prepared. Prepreg (Hitachi) GEA-679FGB manufactured by Seiko Co., Ltd.) is a structure in which the overlap is performed in order. Each of the prepregs was placed inside by a release material (release film) having a thickness of 50 μm, and laminated by heat and pressure treatment (180 ° C, 3 MPa, 1 hour press forming treatment) to prepare two sheets. Synthetic single-sided metal foil laminate.
另外,所使用的離型材料為宇部興產株式會社製的聚醯亞胺系的薄膜(商品名:Nubileikusu-S),在180℃下的熱收縮率為0.05%,在加壓後的伸縮性下降率為5%。而且,銅箔、玻璃布基材環氧樹脂預浸片、離型材料都使用尺寸為510mm×510mm的。In addition, the release material used is a polyimine-based film (trade name: Nubileikusu-S) manufactured by Ube Industries, Ltd., and the heat shrinkage rate at 180 ° C is 0.05%, and the expansion and contraction after pressurization The rate of decline was 5%. Further, the copper foil, the glass cloth substrate epoxy prepreg, and the release material were all used in a size of 510 mm × 510 mm.
除了使離型材料為厚度25 μm的預浸片(Toray株式會社製,在180℃下的熱收縮率為0.7%,在加壓後的伸展性下降率為10%,聚苯硫醚薄膜)以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。In addition, the release material was a prepreg having a thickness of 25 μm (manufactured by Toray Co., Ltd., the heat shrinkage rate at 180 ° C was 0.7%, and the stretchability after pressurization was 10%, polyphenylene sulfide film). Two synthetic single-sided metal foil laminates were produced in the same manner as in Example 1.
除了使離型材料為厚度75 μm的預浸片(Toray株式會社製,在180℃下的熱收縮率為0.5%,在加壓後的伸展性下降率為18%,聚苯硫醚薄膜)以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。The prepreg sheet having a thickness of 75 μm (manufactured by Toray Co., Ltd., having a heat shrinkage rate at 180 ° C of 0.5%, and a stretchability after pressurization of 18%, a polyphenylene sulfide film) was used. Two synthetic single-sided metal foil laminates were produced in the same manner as in Example 1.
除了使離型材料的厚度為12.5 μm以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。Two synthetic single-sided metal foil laminates were produced in the same manner as in Example 1 except that the thickness of the release material was 12.5 μm.
除了使離型材料的厚度為125 μm以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。Two synthetic single-sided metal foil laminates were produced in the same manner as in Example 1 except that the thickness of the release material was 125 μm.
除了使離型材料為厚度38 μm的MAQINAS(日鉱金屬株式會社製,在180℃下的熱收縮率為0.1%,在加壓後的伸展性下降率為5%,是在聚醯亞胺樹脂薄膜上蒸鍍厚度為0.3 μm的銅之薄膜)以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。In addition to the MAQINAS (manufactured by Nippon Metal Co., Ltd., which has a release material of 38 μm in thickness, the heat shrinkage rate at 180 ° C is 0.1%, and the elongation after extrusion is 5%, which is in the polyimide resin. Two synthetic single-sided metal foil laminates were produced in the same manner as in Example 1 except that a film of copper having a thickness of 0.3 μm was deposited on the film.
除了使脫膜材料,為在厚度25 μm的aflekkus薄膜(旭玻璃株式會社製,在180℃下的熱收縮率為2.0%,在加壓後的伸展性下降率為10%,氟樹脂)的薄膜表面上蒸鍍厚度0.3μm的銅而製作之薄膜(在180℃下的熱收縮率為0.5%,在加壓後的伸展性下降率為10%)以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。In addition to the release material, the aflekkus film having a thickness of 25 μm (manufactured by Asahi Glass Co., Ltd., the heat shrinkage rate at 180 ° C is 2.0%, and the elongation after stretching is 10%, fluororesin) A film produced by depositing copper having a thickness of 0.3 μm on the surface of the film (having a heat shrinkage rate at 180 ° C of 0.5% and a stretchability reduction rate after pressurization of 10%) was produced in the same manner as in Example 1. Sheet-synthesized single-sided metal foil laminate.
除了使離型材料為厚度50 μm的theonekus薄膜(帝人dupon株式會社製,在180C下的熱收縮率為1.5%,在加壓後的伸展性下降率為8%,聚萘乙烯薄膜)以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。In addition to the release material being the one of the thickness of 50 μm of theonekus film (manufactured by Teijin Dupon Co., Ltd., the heat shrinkage rate at 180 C is 1.5%, and the elongation after extrusion is 8%, the polyethylene naphthalene film). Two synthetic single-sided metal foil laminates were produced in the same manner as in Example 1.
除了使離型材料為厚度25 μm的aflekkus薄膜(旭玻璃株式會社製,在180℃下的熱收縮率為2.0%,在加壓後的伸展性下降率為10%,氟樹脂)以外,與實施例1同樣 地製作兩張合成的單面金屬箔積層板。In addition to the release material, the aflekkus film having a thickness of 25 μm (manufactured by Asahi Glass Co., Ltd., having a heat shrinkage rate at 180 ° C of 2.0%, and a stretchability after pressurization of 10%, a fluororesin), The same as in the first embodiment Two synthetic single-sided metal foil laminates were produced.
除了使離型材料為厚度4.5 μm的lumira薄膜(Toray株式會社製,在180℃下的熱收縮率為0.5%,在加壓後的伸展性下降率為60%,聚酯樹脂)以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。In addition to the release material being a lumira film having a thickness of 4.5 μm (manufactured by Toray Co., Ltd., a heat shrinkage ratio at 180 ° C of 0.5%, a stretchability after pressurization of 60%, a polyester resin), In the same manner as in Example 1, two synthetic single-sided metal foil laminates were produced in the same manner.
除了使離型材料為厚度7.5 μm以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。Two synthetic single-sided metal foil laminates were produced in the same manner as in Example 1 except that the release material was 7.5 μm thick.
除了使離型材料為厚度40 μm的sepanium(sunalumia工業株式會社製,在180℃下的熱收縮率為0.0%,在加壓後的伸展性下降率為0%,鋁製)以外,與實施例1同樣地製作兩張合成的單面金屬箔積層板。In addition to the fact that the release material was made of sepanium (manufactured by Sunulumia Co., Ltd., having a heat shrinkage rate of 180% at 180 ° C, a rate of decrease in elongation after pressurization of 0%, made of aluminum), Example 1 Two synthetic single-sided metal foil laminates were produced in the same manner.
在實施例1~8、比較例1~4所製作的兩張合成的單面金屬箔積層板上,依次實施下述的處理(1)~(3),並進行以下的評價(A)~(C)。測試結果如下述表2所示。In the two synthetic single-sided metal foil laminates produced in Examples 1 to 8 and Comparative Examples 1 to 4, the following treatments (1) to (3) were sequentially carried out, and the following evaluations (A) were carried out. (C). The test results are shown in Table 2 below.
(1)電路加工處理: 對各實施例及比較例所得到的兩張合成的單面金屬箔積層板的周邊進行切割,形成500mm×500mm的尺寸。接著,在該狀態下,於兩面上將幹膜(日立化成工業株式會社製,使用H-K425(商品名))進行疊合,並依次進行曝光、顯像、水洗、蝕刻、水洗各項處理,實施電路加工。(1) Circuit processing: The periphery of the two synthetic single-sided metal foil laminates obtained in each of the examples and the comparative examples was cut to have a size of 500 mm × 500 mm. Then, in this state, a dry film (H-K425 (trade name) manufactured by Hitachi Chemical Co., Ltd.) was laminated on both surfaces, and exposure, development, washing, etching, and water washing were sequentially performed. , the implementation of circuit processing.
(2)防焊劑塗敷處理: 在進行了電路加工處理的兩張合成的單面金屬箔積層板上,利用絲網印刷塗敷防焊劑(日立化成工業株式會社製SR-7200G),完成厚度為25 μm,並在80℃下乾燥30分鐘。接著,以500mJ/cm2 進行曝光烘烤,並利用1%碳酸氫鈉水溶液,在30℃下進行3分鐘的顯像。然後,利用流水進行清洗,並在170℃下進行60分鐘的加熱硬化。(2) Soldering agent coating treatment: A solder resist (SR-7200G, manufactured by Hitachi Chemical Co., Ltd.) was applied by screen printing on two synthetic single-sided metal foil laminates subjected to circuit processing to complete the thickness. It was 25 μm and dried at 80 ° C for 30 minutes. Subsequently, exposure baking was performed at 500 mJ/cm 2 , and development was carried out at 30 ° C for 3 minutes using a 1% aqueous sodium hydrogencarbonate solution. Then, it was washed with running water and heat-hardened at 170 ° C for 60 minutes.
(3)Ni-Au電鍍處理 接著,在這兩張合成的單面金屬箔積層板上,按照下述表1所示的順序,依次進行各種處理a)~q)。(3) Ni-Au plating treatment Next, on the two synthetic single-sided metal foil laminates, various treatments a) to q) were sequentially performed in the order shown in Table 1 below.
表1中的溶液所使用的材料的詳細內容如下述所示。The details of the materials used in the solutions in Table 1 are as follows.
Z-200:World metal株式會社製SA-100:日立化成工業株式會社製NIPS-100:日立化成工業株式會社製Top kemialyi66:奧野藥品工業株式會社製Pallet:小島化學藥品株式會社製HGS-100:日立化成工業株式會社製HGS-2000:日立化成工業株式會社製Z-200: SA-100 manufactured by World Metal Co., Ltd.: NIPS-100 manufactured by Hitachi Chemical Co., Ltd.: Top kemialyi66 manufactured by Hitachi Chemical Co., Ltd.: Pallet, manufactured by Okuno Pharmaceutical Co., Ltd.: HGS-100, manufactured by Kojima Chemicals Co., Ltd.: HGS-2000 manufactured by Hitachi Chemical Co., Ltd.: manufactured by Hitachi Chemical Co., Ltd.
(A)剝離性評價 在施加各項處理後,將兩組單面金屬箔積層板分別從離型材料分離,並確認分離時的剝離性。表2中的〔◎〕表示從離型材料無問題地進行了剝離,〔○〕表示從離型材料基本無問題地進行了剝離,〔×〕表示剝離時離型材料的一部分破裂。另外,如為〔◎〕及〔○〕,則表示剝離性良好,在實用上沒有問題。(A) Stripability evaluation After each treatment was applied, two sets of single-sided metal foil laminates were separated from the release material, and the peeling property at the time of separation was confirmed. [◎] in Table 2 indicates that the release material was peeled off without problems, [○] indicates that the release material was substantially peeled off without problems, and [x] indicates that a part of the release material was broken at the time of peeling. Further, in the case of [◎] and [○], the peeling property was good, and there was no problem in practical use.
(B)藥液浸入評價 在實施各項處理之後,將兩組單面金屬箔積層板從離型材料分離,並以目視確認在離型材料的對合面上是否有藥液(在各項處理中所使用的溶液)的滲入。(B) Evaluation of liquid immersion After carrying out the various treatments, the two sets of single-sided metal foil laminates were separated from the release material, and it was visually confirmed whether there was a chemical liquid on the facing surface of the release material (solution used in each treatment) Infiltration.
(C)耐熱性評價 在進行防焊劑塗敷處理時,於達到170℃的防焊劑的加熱硬化部分,確認對合面有無剝離。表2中的〔◎〕表示在對合面上無剝離,耐熱性非常良好,〔○〕表示在對合面上無剝離,耐熱性良好,〔×〕表示在對合面上有剝 離,耐熱性差。(C) Heat resistance evaluation When the solder resist coating treatment was performed, it was confirmed whether or not the mating surface was peeled off at the heat-hardened portion of the solder resist which reached 170 °C. [◎] in Table 2 indicates that there is no peeling on the surface to be bonded, and the heat resistance is very good. [○] indicates that there is no peeling on the surface to be bonded, and heat resistance is good, and [x] indicates peeling on the surface of the joint. Off, poor heat resistance.
根據表2,實施例1~8所製作的樣品在剝離性、藥液浸入性、耐熱性方面都良好,可無問題地進行各項處理。而且,在之後分離為兩張合成的時也沒有問題。According to Table 2, the samples prepared in Examples 1 to 8 were excellent in peelability, chemical liquid immersion property, and heat resistance, and various treatments were possible without any problem. Moreover, there is no problem when it is separated into two compositions at a later time.
另一方面,在比較例1中,因為離型材料的熱收縮率大,所以如形成高溫,則在對合面上會產生剝離。比較例2因為加壓後的伸展性大大下降,所以在將兩張合成的單面金屬箔積層板進行分離時,離型材料會破損,無法良好地進行剝離。比較例3因為離型材料非常薄,沒有強度, 所以在分離時離型材料會發生破損。比較例4因為離型材料為金屬,所以在對合面上會滲入藥液,且離型材料有少許溶解。On the other hand, in Comparative Example 1, since the heat shrinkage rate of the release material was large, peeling occurred on the surface to be joined if a high temperature was formed. In Comparative Example 2, since the stretchability after pressurization was greatly lowered, when the two synthetic single-sided metal foil laminates were separated, the release material was broken and peeling could not be performed satisfactorily. Comparative Example 3 because the release material is very thin and has no strength. Therefore, the release material may be damaged when separated. In Comparative Example 4, since the release material was a metal, the chemical solution was infiltrated on the surface to be bonded, and the release material was slightly dissolved.
1‧‧‧預浸片1‧‧‧Prepreg
2‧‧‧金屬箔2‧‧‧metal foil
3‧‧‧離型材料3‧‧‧ Release material
4‧‧‧鑲板4‧‧‧ Paneling
圖1所示為本發明的兩張合成的單面金屬箔積層板的製造方法之一個例子的概略說明圖。1為預浸片,2為金屬箔,3為離型材料,4為鑲板。Fig. 1 is a schematic explanatory view showing an example of a method for producing two synthetic single-sided metal foil laminated sheets of the present invention. 1 is a prepreg, 2 is a metal foil, 3 is a release material, and 4 is a panel.
1‧‧‧預浸片1‧‧‧Prepreg
2‧‧‧金屬箔2‧‧‧metal foil
3‧‧‧離型材料3‧‧‧ Release material
4‧‧‧鑲板4‧‧‧ Paneling
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| JPH07302977A (en) * | 1994-04-28 | 1995-11-14 | Ibiden Co Ltd | Manufacture of multilayer printed-wiring board and copper-clad laminated board used for it |
| JP2004255705A (en) * | 2003-02-26 | 2004-09-16 | Teijin Dupont Films Japan Ltd | Release film |
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| JPH07302977A (en) * | 1994-04-28 | 1995-11-14 | Ibiden Co Ltd | Manufacture of multilayer printed-wiring board and copper-clad laminated board used for it |
| JP2004255705A (en) * | 2003-02-26 | 2004-09-16 | Teijin Dupont Films Japan Ltd | Release film |
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