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TWI794762B - Photographing apparatus for processing equipment of electronic components - Google Patents

Photographing apparatus for processing equipment of electronic components Download PDF

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TWI794762B
TWI794762B TW110107637A TW110107637A TWI794762B TW I794762 B TWI794762 B TW I794762B TW 110107637 A TW110107637 A TW 110107637A TW 110107637 A TW110107637 A TW 110107637A TW I794762 B TWI794762 B TW I794762B
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laser
camera
confirmation
electronic component
laser irradiator
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TW202138758A (en
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金熙泰
趙奉辰
梁熙明
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韓商泰克元股份有限公司
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    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50Constructional details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515Objects of complex shape, e.g. examined with use of a surface follower device
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/57Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/66Remote control of cameras or camera parts, e.g. by remote control devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765Method using an image detector and processing of image signal
    • G01N2021/177Detector of the video camera type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
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  • Electromagnetism (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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Abstract

本發明涉及一種用於電子部件處理設備的拍攝裝置。根據本發明的拍攝裝置具有雷射照射器的照射方向為水平方向或者確認用相機的拍攝中心線與水平線平行的設置結構。根據本發明,能夠設置於狹窄的設置空間的同時也能夠設定確認用相機的焦距、視角及雷射的照射方向與拍攝方向之間的適當的角度,因此可以提高對於裝載於裝載要素的電子部件的安置是否不良的檢查的可靠性。The present invention relates to a photographing device used in electronic component processing equipment. The imaging device according to the present invention has an installation structure in which the irradiation direction of the laser irradiator is the horizontal direction or the imaging center line of the confirmation camera is parallel to the horizontal line. According to the present invention, it is possible to set an appropriate angle between the focal length and the angle of view of the camera for confirmation and the irradiation direction of the laser and the imaging direction while being installed in a narrow installation space, so that the electronic components mounted on the mounting element can be improved. The reliability of the check of whether the placement is bad.

Description

用於電子部件處理設備的拍攝裝置Camera for electronic component processing equipment

本發明涉及一種在單獨管理並處理電子部件的電子部件處理設備中,掌握裝載於裝載要素的各個電子部件的安置狀態的技術。The present invention relates to a technique for grasping the placement state of each electronic component mounted on a loading element in an electronic component processing facility that individually manages and processes electronic components.

生產的電子部件經過測試製程或分類製程等多樣的形態的製程後出廠。在該程序中,使用用於處理電子部件的電子部件處理設備。The produced electronic components are shipped through various forms of processes such as testing process and sorting process. In this program, electronic component processing equipment for processing electronic components is used.

電子部件處理設備可以根據其工作功能以多樣的形式製造。為了向這種電子部件處理設備供應或回收電子部件的操作、移動電子部件的操作,使用可裝載電子部件的裝載要素。裝載要素可以根據電子部件的種類、所使用的操作的類型等以多樣的形式製造。Electronic component processing equipment can be manufactured in various forms according to its work function. For the operation of supplying or collecting electronic components to such electronic component processing facilities, and the operation of moving electronic components, loading elements capable of loading electronic components are used. The loading element can be manufactured in various forms depending on the kind of electronic parts, the type of operation used, and the like.

在使用裝載要素的情況下,可以從裝載要素向其他裝載要素移動電子部件,或者在裝載於裝載要素的狀態下對電子部件進行所需的處理操作。因此,為了適當地移動電子部件或對電子部件進行適當的處理操作,要求電子部件正確地安置於裝載要素上。否則,若電子部件以有缺陷的安裝狀態裝載於裝載要素上,則會在移動操作或處理操作中發生缺陷。因此,為了確認電子部件的裝載錯誤,本申請人提出了韓國公開專利10-2016-0018211號及10-2017-0093624號(以下稱為「引用技術1」)。In the case of using a loading element, it is possible to move the electronic component from the loading element to another loading element, or to perform required processing operations on the electronic component while being mounted on the loading element. Therefore, in order to properly move the electronic components or perform proper handling operations on the electronic components, it is required that the electronic components are correctly seated on the loading element. Otherwise, if the electronic components are loaded on the loading element in a defective mounting state, defects will occur in the moving operation or handling operation. Therefore, in order to confirm the loading error of electronic components, the present applicant proposed Korean Patent Laid-Open No. 10-2016-0018211 and No. 10-2017-0093624 (hereinafter referred to as "cited technology 1").

在引用技術1中,照射雷射並使用相機拍攝後,分析拍攝的雷射的圖案,由此能夠確認電子部件的裝載錯誤。對於這種引用技術,雷射的照射方向和相機的拍攝方向必須以預定角度分開。這是因為,如果雷射的照射方向與拍攝方向平行,則難以觀測到雷射的圖案變化。並且,雷射必須照射到所要觀測的部位,相機只有在相機鏡頭的正中央觀測到照射雷射的部位,這樣才能確保圖像的準確性。據此,需要設置雷射照射器和相機使得雷射的照射方向和通過相機的拍攝方向之間具有預定角度,由此,雷射照射器和相機會隔開相當大的距離。In Cited Technology 1, after irradiating lasers and taking pictures with a camera, the pattern of the taken laser beams is analyzed, whereby it is possible to confirm a loading error of an electronic component. For this cited technique, the irradiation direction of the laser and the shooting direction of the camera must be separated by a predetermined angle. This is because, if the irradiation direction of the laser is parallel to the imaging direction, it is difficult to observe the pattern change of the laser. Moreover, the laser must be irradiated to the part to be observed, and the camera can only observe the part where the laser is irradiated in the center of the camera lens, so as to ensure the accuracy of the image. Accordingly, the laser irradiator and the camera need to be arranged so that there is a predetermined angle between the irradiation direction of the laser and the photographing direction by the camera, whereby the laser irradiator and the camera are separated by a considerable distance.

但是,如引用技術1,若雷射照射器和相機隔開相當大的距離,則用於佈置對應構成的空間需要變大,因此,用於排除與其他裝置之間的干擾等的設計等較為複雜。因此,根據設備,可能會發生難以確保用於構成雷射照射器和相機的空間的情形。並且,這種問題在於,將雷射照射器和相機額外設置於各個構成以最佳化設計狀態生產出來之後現場運用的設備中變得困難。將參照圖1及圖2對這種問題的示例進行說明。However, as cited in Technology 1, if the laser irradiator and the camera are separated by a considerable distance, the space for arranging the corresponding components needs to be increased, so the design for eliminating interference with other devices, etc. complex. Therefore, depending on the equipment, it may occur that it is difficult to secure a space for configuring the laser irradiator and the camera. In addition, such a problem is that it becomes difficult to additionally install a laser irradiator and a camera in a device that is used on-site after each configuration is produced in an optimally designed state. An example of such a problem will be described with reference to FIGS. 1 and 2 .

配備於處理設備PE的拾取器模組PM用於將電子部件從一側裝載要素移動至另一側裝載要素,當考慮該拾取器模組PM的移動區域MS時,用於設置拍攝裝置的設置空間IS只允許在除了具有其他結構的斜線區域SF和移動區域MS之外的範圍內。即,在圖1的處理設備PE中,可以在移動區域MS的前端確保設置空間IS,而在圖2的處理設備PE中,可以在移動區域MS的左側或右側確保設置空間IS。當然,即使存在設置空間IS,其前後、左右及上下寬度也非常狹小,因此,尤其,應最小化將應用於圖1的處理設備PE的拍攝裝置的整體前後寬度和將應用於圖2的處理設備的拍攝裝置的整體左右寬度,同時,也需要充分確保相機的焦距、視角及雷射照射方向與相機的拍攝方向之間的角度。The picker module PM equipped with the processing equipment PE is used to move the electronic components from one side loading element to the other side loading element, and when considering the movement area MS of the picker module PM, it is used to set the setting of the photographing device The space IS is only allowed in the range except the oblique area SF and the mobile area MS with other structures. That is, in the processing equipment PE of FIG. 1, the installation space IS can be secured at the front end of the moving area MS, whereas in the processing equipment PE of FIG. 2, the installation space IS can be secured on the left or right side of the moving area MS. Of course, even if there is an installation space IS, its front-to-back, left-right, and top-bottom widths are very narrow, so in particular, the overall front-to-back width of the imaging device to be applied to the processing equipment PE of FIG. 1 and the processing to be applied to FIG. 2 should be minimized. The overall left and right width of the imaging device of the equipment, and at the same time, the focal length of the camera, the angle of view, and the angle between the laser irradiation direction and the shooting direction of the camera must be sufficiently ensured.

基於如前述的理由,如韓國公開專利10-2020-0011352號(以下稱為「引用技術2」),本申請人提出了相鄰地佈置確認用相機和雷射照射器並將其結合於拾取器模組的結構。Based on the aforementioned reasons, the present applicant proposed arranging a confirmation camera and a laser irradiator adjacently and combining them with a pick-up The structure of the device module.

引用技術2提供了在最小限度地擴大將要生產的處理設備的尺寸或者不改變現有的已生產出的處理設備的結構的情況下添加拍攝裝置的自由。並且,由於設計成了將拍攝裝置結合於拾取器模組而可移動的結構,因此可以確認一個拾取器模組所負責的所有裝載要素的裝載不良,從而可以最小化構建成本。Cited technique 2 provides the freedom to add a camera without minimally enlarging the size of the processing equipment to be produced or without changing the structure of the existing produced processing equipment. In addition, since the imaging device is designed to be movable in combination with the pickup module, it is possible to check the loading failure of all the loading elements in charge of one pickup module, thereby minimizing the construction cost.

然而,由於處理設備PE主要由客戶定制製造,因此設置空間IS的位置可能根據不同設備而不同。因此,仍然難以將根據引用技術2的拍攝裝置適當地應用於所有處理設備,尤其是現有的已生產並使用中的所有處理設備。However, since the processing equipment PE is mainly custom-made by customers, the location of the setup space IS may differ from equipment to equipment. Therefore, it is still difficult to properly apply the photographing device according to Cited Technique 2 to all processing equipment, especially all processing equipment currently produced and in use.

並且,在引用技術2中,通過配備反射板來彎曲雷射照射器的照射角或彎曲確認用相機的拍攝角,從而使狹小的空間中的設置性良好。但是,為了實現反射板的適當的反射、確保確認用相機的適當的焦距及視角、獲得用於準確辨識雷射圖案變化的適當的圖像而設置雷射照射方向與確認用相機的拍攝方向之間的適當的角度等,通過反射板的彎曲較佳為90度,為此,反射板需要設置成相對於雷射的照射方向或確認用相機的拍攝中心線具有45度的角度。但是,可以確認的是通過引用技術2來實現這種設置是困難的。In addition, in Cited Technology 2, the irradiation angle of the laser irradiator or the imaging angle of the camera for bending confirmation is bent by providing a reflector, so that the installation property in a narrow space is improved. However, in order to achieve proper reflection of the reflector, ensure the proper focal length and viewing angle of the camera for confirmation, and obtain an appropriate image for accurately recognizing changes in the laser pattern, the difference between the irradiation direction of the laser and the shooting direction of the camera for confirmation is set. The appropriate angle between them, etc., is preferably 90 degrees through the bending of the reflector. For this reason, the reflector needs to be set at an angle of 45 degrees relative to the irradiation direction of the laser or the center line of the camera for confirmation. However, it can be confirmed that it is difficult to realize such a setting by citing technique 2.

更進一步,為了提高辨識率,需要將確認用相機、雷射照射器及反射板之間的間隔以能夠確保確認用相機的焦距等的程度的間隔隔開,但由於拍攝裝置的上升高度的限制或設置空間IS的狹小,在遵循引用技術2的結構時,經常發生無法確保這種隔開空間的情況。Furthermore, in order to improve the resolution, it is necessary to separate the distance between the camera for confirmation, the laser irradiator, and the reflector at such a distance that the focal length of the camera for confirmation can be ensured. Or because of the narrowness of the installation space IS, when the structure of cited technique 2 is followed, it often happens that such a separate space cannot be ensured.

另外,參照韓國公開專利10-2015-0041682號,如圖3所示,可知作為裝載要素的客戶托盤CT的裝載面Lf位於比基板BP的上部面更低的位置。在這種情況下,當雷射照射器LI傾斜地照射雷射L時,由雷射照射器LI照射的雷射L由於底盤BP阻擋而不能到達裝載於客戶托盤CT的最後部分的電子部件D,因此需要還能夠解決上述問題的拍攝裝置的結構。In addition, referring to Korean Laid-Open Patent No. 10-2015-0041682, as shown in FIG. 3 , it can be seen that the loading surface Lf of the customer tray CT serving as a loading element is located at a lower position than the upper surface of the substrate BP. In this case, when the laser irradiator LI irradiates the laser L obliquely, the laser L irradiated by the laser irradiator LI cannot reach the electronic part D loaded on the last part of the customer tray CT due to being blocked by the chassis BP, Therefore, there is a need for a structure of an imaging device that can also solve the above-mentioned problems.

著眼於本發明,有如下動機。 第一、需要實現能夠最小化用於設置檢查部分的設置空間的結構。 第二,需要實現拍攝裝置設置於拾取器模組的同時可以將通過雷射照射器的雷射的照射方向或通過確認用相機的拍攝角度彎曲90度的結構。 第三,即使設置空間狹小,仍能夠確保確認用相機的焦距及視角。 第四,即使設置空間狹窄,仍能夠將拍攝方向和雷射的照射方向設定成具有能夠充分辨識雷射的圖案變化的角度。 第五,即使在裝載要素的裝載面低於基板的上表面的情況下也需要使由雷射照射器照射的雷射可以到達電子部件而不被底盤遮擋的結構。Focusing on the present invention, there are the following motivations. First, there is a need to realize a structure capable of minimizing the installation space for installing the inspection section. Second, it is necessary to implement a structure that can bend the irradiation direction of the laser passing through the laser irradiator or the photographing angle of the confirmation camera by 90 degrees while the photographing device is installed on the pickup module. Third, even if the installation space is small, the focal length and angle of view of the camera for confirmation can be secured. Fourth, even if the installation space is narrow, the imaging direction and the irradiation direction of the laser can be set to have an angle at which the pattern change of the laser can be sufficiently recognized. Fifth, even if the mounting surface of the mounting element is lower than the upper surface of the substrate, a structure is required so that the laser irradiated by the laser irradiator can reach the electronic component without being blocked by the chassis.

根據本發明的第一形態的一種用於電子部件處理設備的拍攝裝置包括:雷射照射器,配備為向裝載於裝載要素的電子部件的上表面照射線性雷射,並且向水平方向照射雷射;確認用相機,配備為通過拍攝由所述雷射照射器照射的雷射來確認裝載於裝載要素的電子部件的安置狀態;反射板,將由所述雷射照射器向水平方向照射的雷射朝向位於垂直下方的電子部件反射,使所述確認用相機能夠拍攝照射雷射的電子部件;移動器,使所述雷射照射器、所述確認用相機及所述反射板沿水平方向移動,使得所述確認用相機能夠在兩個以上的位置拍攝電子部件;及控制器,控制所述雷射照射器、所述確認用相機及所述移動器,其中所述雷射照射器、所述確認用相機及所述反射板以藉由所述移動器而能夠一起移動的方式而彼此結合。An imaging device for electronic component processing equipment according to a first aspect of the present invention includes: a laser irradiator configured to irradiate a linear laser to an upper surface of an electronic component mounted on a loading element, and to irradiate the laser in a horizontal direction. The camera for confirmation is equipped to confirm the installation state of the electronic components loaded on the loading element by photographing the laser irradiated by the laser irradiator; Reflecting towards the electronic component located vertically below, so that the confirmation camera can photograph the electronic component irradiated with laser; the mover moves the laser irradiator, the confirmation camera and the reflector in the horizontal direction, enabling the confirmation camera to photograph electronic components at two or more positions; and a controller controlling the laser irradiator, the confirmation camera, and the mover, wherein the laser irradiator, the The confirmation camera and the reflecting plate are coupled to each other so as to be movable together by the mover.

所述雷射照射器、所述確認用相機及所述反射板設置成與包括為了移動電子部件而能夠抓持電子部件或解除電子部件的抓持的拾取器的拾取器模組結合,所述雷射照射器以向後方照射雷射的方式佈置於所述拾取器的前方,所述反射板佈置於所述雷射照射器與所述拾取器之間。The laser irradiator, the confirmation camera, and the reflector are provided in combination with a picker module including a picker capable of gripping or releasing the electronic component in order to move the electronic component. The laser irradiator is arranged in front of the pickup so as to irradiate the laser backward, and the reflection plate is arranged between the laser irradiator and the pickup.

所述確認用相機佈置於所述拾取器模組的前方且所述雷射照射器的上側方向,所述確認用相機的拍攝中心線相對於垂直線具有大於0度且小於90度的傾斜角。The confirmation camera is arranged in front of the pickup module and in the direction of the upper side of the laser irradiator, and the shooting center line of the confirmation camera has an inclination angle greater than 0 degrees and less than 90 degrees relative to the vertical line .

所述裝載要素的裝載面位於用於固定所述裝載要素的邊緣的基板的上表面的下方,所述拍攝中心線的傾斜度被設定為使得在進行藉由所述確認用相機的拍攝時在至少一個拍攝地點處防止所述確認用相機的拍攝中心線與所述底盤之間的干擾。The loading surface of the loading element is located below the upper surface of the substrate for fixing the edge of the loading element, and the inclination of the imaging center line is set so that when imaging with the confirmation camera, Interference between a shooting center line of the confirmation camera and the chassis is prevented at at least one shooting location.

所述控制器以使所述確認用相機沿一方向移動並能夠拍攝排列於所述裝載要素的電子部件的方式控制所述雷射照射器、所述確認用相機及所述移動器,用於藉由所述確認用相機的拍攝的所述反射板的一方向上的移動距離比排列於所述裝載要素的電子部件的一方向上的排列距離長,並且所述排列距離在所述移動距離內,所述排列距離定義為通過所述確認用相機拍攝第一個電子部件的時間點下的反射板的位置與拍攝最後一個電子部件的時間點下的反射板的位置之間的距離。The controller controls the laser irradiator, the confirmation camera, and the mover so that the confirmation camera moves in one direction and can photograph electronic components arranged on the loading element, for The movement distance of the reflection plate in one direction captured by the confirmation camera is longer than the arrangement distance of the electronic components arranged on the loading element in one direction, and the arrangement distance is within the movement distance, The arrangement distance is defined as the distance between the position of the reflector at the time point when the first electronic component is photographed by the confirmation camera and the position of the reflector at the time point when the last electronic component is photographed.

所述移動距離劃分為所述反射板進行加速移動的加速移動區間、所述反射板進行勻速移動的勻速移動區間、所述反射板進行減速移動的減速移動區間,並且所述排列距離在所述勻速移動區間內,所述控制器進行控制使得在所述反射板在所述勻速移動區間以勻速移動時進行通過所述確認用相機的電子部件的拍攝。The moving distance is divided into an accelerated moving section in which the reflecting plate moves at an accelerated speed, a constant moving section in which the reflecting plate moves at a constant speed, and a decelerated moving section in which the reflecting plate moves at a decelerated speed. In the constant-speed movement section, the controller controls so that the electronic component by the confirmation camera is photographed while the reflector moves at a constant speed in the constant-speed movement section.

根據本發明的第二形態的一種用於電子部件處理設備的拍攝裝置包括:雷射照射器,配備為向裝載於裝載要素的電子部件的上表面照射線性雷射而配備;確認用相機,通過拍攝由所述雷射照射器照射的雷射來確認裝載於裝載要素的電子部件的安置狀態,並且其拍攝中心線與水平線平行;反射板,將所述拍攝中心線向照射雷射的電子部件的上表面方向彎曲,使得所述確認用相機能夠拍攝照射了雷射的電子部件的上表面;移動器,使所述雷射照射器、所述確認用相機及所述反射板沿水平方向移動,使得所述確認用相機能夠在兩個以上的位置拍攝電子部件;及控制器,控制所述雷射照射器、所述確認用相機及所述移動器,其中所述雷射照射器、所述確認用相機及所述反射板以藉由所述移動器而能夠一起移動的方式而彼此結合。According to a second aspect of the present invention, an imaging device for electronic component processing equipment includes: a laser irradiator equipped to irradiate a linear laser on the upper surface of an electronic component mounted on a loading element; The laser irradiated by the laser irradiator is photographed to confirm the installation state of the electronic components loaded on the loading element, and the photographing center line thereof is parallel to the horizontal line; The direction of the upper surface is curved, so that the confirmation camera can photograph the upper surface of the electronic component irradiated with laser; the mover moves the laser irradiator, the confirmation camera and the reflector in the horizontal direction , enabling the confirmation camera to photograph electronic components at two or more positions; and a controller controlling the laser irradiator, the confirmation camera, and the mover, wherein the laser irradiator, the The confirmation camera and the reflection plate are combined with each other so as to be movable together by the mover.

所述雷射照射器、所述確認用相機及所述反射板設置成與包括為了移動電子部件而能夠抓持電子部件或解除電子部件的抓持的拾取器的拾取器模組結合,所述確認用相機以拍攝前方的方式佈置於所述拾取器的左側或右側方向,所述反射板佈置於所述確認用相機的前方。The laser irradiator, the confirmation camera, and the reflector are provided in combination with a picker module including a picker capable of gripping or releasing the electronic component in order to move the electronic component. The confirmation camera is arranged in a left or right direction of the pickup so as to photograph the front, and the reflection plate is arranged in front of the confirmation camera.

所述雷射照射器佈置於所述確認用相機的後方。The laser irradiator is arranged behind the confirmation camera.

所述雷射照射器、所述確認用相機及所述反射板沿一方向並排排列。The laser irradiator, the camera for confirmation, and the reflector are arranged side by side in one direction.

所述控制器以使所述確認用相機沿一方向移動並能夠拍攝排列於所述裝載要素的電子部件的方式控制所述雷射照射器、所述確認用相機及所述移動器,用於藉由所述確認用相機的拍攝的所述反射板的一方向上的移動距離比排列於所述裝載要素的電子部件的一方向上的排列距離長,並且所述排列距離在所述移動距離內,所述排列距離定義為通過所述確認用相機拍攝第一個電子部件的時間點下的反射板的位置與拍攝最後一個電子部件的時間點下的反射板的位置之間的距離。The controller controls the laser irradiator, the confirmation camera, and the mover so that the confirmation camera moves in one direction and can photograph electronic components arranged on the loading element, for The movement distance of the reflection plate in one direction captured by the confirmation camera is longer than the arrangement distance of the electronic components arranged on the loading element in one direction, and the arrangement distance is within the movement distance, The arrangement distance is defined as the distance between the position of the reflector at the time point when the first electronic component is photographed by the confirmation camera and the position of the reflector at the time point when the last electronic component is photographed.

所述移動距離分劃分所述反射板進行加速移動的加速移動區間、所述反射板進行勻速移動的勻速移動區間、所述反射板進行減速移動的減速移動區間,並且所述排列距離在所述勻速移動區間內,所述控制器進行控制使得在所述反射板在所述勻速移動區間以勻速移動時進行通過所述確認用相機的電子部件的拍攝。The moving distance is divided into an accelerated moving section in which the reflective plate moves at an accelerated speed, a constant moving section in which the reflecting plate moves at a constant speed, and a decelerated moving section in which the reflective plate moves at a decelerated speed, and the arrangement distance is between the In the constant-speed movement section, the controller controls so that the electronic component by the confirmation camera is photographed while the reflector moves at a constant speed in the constant-speed movement section.

根據本發明,在檢查部分設置成只佔據較小的區域的情況下也具有如下效果。 第一、可以最小化為了設置檢查部分而所需的設置空間,從而最小化處理設備的擴大化,或者也可以將檢查部分適當地設置於現有已生產的處理設備中。 第二,可以具有能夠使通過雷射照射器的雷射照射方向或通過確認用相機的拍攝角彎曲90度的佈置結構。 第三,由於可以佈置成確認用相機的拍攝中心線與雷射照射器的照射方向具有能夠明確確認圖案變化的差異的角度,因此提高了檢查的可靠性。 第四,由於能夠充分確保確認用相機的焦距及視角,因此能夠獲得鮮明的圖像,由此進一步提高了檢查的可靠性。 第五,根據本發明的一實施例,即使在裝載要素的裝載面低於基板的上表面的情況下也可以確認所有電子部件的安置是否不良。According to the present invention, the following effects are also obtained in the case where the inspection portion is arranged to occupy only a small area. First, the installation space required for installing the inspection section can be minimized, thereby minimizing the enlargement of the processing facility, or the inspection section can be properly installed in the existing processing facility. Second, it is possible to have an arrangement structure capable of bending the irradiation direction of the laser beam passing through the laser irradiator or the shooting angle of the camera passing through the confirmation by 90 degrees. Third, since it can be arranged so that the imaging center line of the confirmation camera and the irradiation direction of the laser irradiator have an angle at which a difference in pattern change can be clearly confirmed, the reliability of the inspection is improved. Fourth, since the focal length and angle of view of the checking camera can be sufficiently ensured, a clear image can be obtained, thereby further improving the reliability of the inspection. Fifth, according to an embodiment of the present invention, it is possible to confirm whether or not all electronic components are badly placed even if the mounting surface of the mounting element is lower than the upper surface of the substrate.

參照圖式對根據本發明的較佳實施例進行說明,為了說明的簡潔,盡可能省略或壓縮對於公知的或重複或實質上相同的構成的說明。The preferred embodiments according to the present invention will be described with reference to the drawings. For the sake of brevity, descriptions of known or repeated or substantially the same configurations are omitted or compressed as much as possible.

根據本發明的用於電子部件處理設備的拍攝裝置(以下,簡稱為「拍攝裝置」)可以具有如圖1所示地位於移動區域前方的示例和如圖2所示地位於移動區域的左側或右側的示例,因此將按不同實施例分開說明。 第一實施例The photographing device for electronic parts processing equipment (hereinafter, simply referred to as "photographing device") according to the present invention may have an example located in front of the moving area as shown in FIG. 1 and a left or right side of the moving area as shown in FIG. The example on the right will therefore be described separately for different embodiments. first embodiment

當如圖1所示地在移動區域MS的前方確保設置空間IS時,可以較佳地應用本實施例。This embodiment can be preferably applied when the setting space IS is ensured in front of the moving area MS as shown in FIG. 1 .

如參照圖4所示,根據本發明的第一實施例的拍攝裝置100包括檢查部分PP、前後移動器150、左右移動器160、垂直移動器170及控制器180。As shown with reference to FIG. 4 , the photographing apparatus 100 according to the first embodiment of the present invention includes an inspection part PP, a forward and backward mover 150 , a left and right mover 160 , a vertical mover 170 and a controller 180 .

檢查部分PP結合於拾取器模組PM,從而能夠與拾取器模組PM一起移動,如圖5的摘取分解圖所示,檢查部分PP包括雷射照射器110、確認用相機120、反射板130及設置部件141至145。The inspection part PP is combined with the pickup module PM so that it can move together with the pickup module PM. As shown in the exploded view of FIG. 130 and setting parts 141 to 145.

雷射照射器110配備為向裝載於裝載要素的電子部件的上表面照射線性雷射。這種雷射照射器110設置成朝向作為水平方向的後方照射雷射。為此,如參照圖6的示意圖所示,雷射照射器110佈置於位於拾取器模組PM的拾取器P的前方。在此,拾取器P是通過真空吸附力抓持電子部件D或解除電子部件D的抓持的工具。The laser irradiator 110 is equipped to irradiate a linear laser on the upper surface of the electronic component mounted on the loading element. Such a laser irradiator 110 is installed so as to irradiate laser toward the rear as the horizontal direction. For this, as shown in the schematic diagram with reference to FIG. 6 , the laser irradiator 110 is arranged in front of the pickup P of the pickup module PM. Here, the picker P is a tool for gripping or releasing the electronic component D by vacuum suction force.

確認用相機120配備為通過拍攝由雷射照射器110照射的雷射來確認裝載於裝載要素的電子部件的安置狀態。如參照圖6所示,本實施例的確認用相機120佈置於拾取器模組PM的前方且雷射照射器110的上側方向。並且,確認用相機120以其拍攝中心線CL相對於垂直線PL具有大於0度且小於90度的傾斜角θ的方式傾斜地設置。The confirmation camera 120 is equipped to confirm the placement state of the electronic components mounted on the loading element by imaging the laser irradiated by the laser irradiator 110 . As shown with reference to FIG. 6 , the confirmation camera 120 of this embodiment is arranged in front of the pickup module PM and above the laser irradiator 110 . And, the camera 120 for confirmation is installed obliquely so that the imaging center line CL may have an inclination angle θ larger than 0 degrees and smaller than 90 degrees with respect to the vertical line PL.

反射板130將由雷射照射器110向後方照射的雷射朝向位於垂直下方的電子部件D彎曲90度並反射,從而使確認用相機120能夠拍攝照射了雷射的電子部件。這種反射板130設置成相對於雷射照射方向形成45度角,並沿前後方向佈置於雷射照射器110與拾取器P之間。The reflector 130 bends and reflects the laser irradiated backward by the laser irradiator 110 by 90 degrees toward the electronic component D located vertically below, so that the confirmation camera 120 can image the electronic component irradiated with the laser. Such a reflection plate 130 is arranged to form an angle of 45 degrees with respect to the laser irradiation direction, and is arranged between the laser irradiator 110 and the pickup P in the front-rear direction.

設置部件141至145為了設置雷射照射器110、確認用相機120及反射板130而配備。因此,雷射照射器110、確認用相機120及反射板130在彼此之間隔開預定間隔,並通過搭載於設置部件141至145而彼此附隨在一起。並且,設置部件141至145結合於拾取器模組PM,從而與拾取器模組PM一起移動,因此,固定設置於設置部件141至145的雷射照射器110、確認用相機120及反射板130最終結合於拾取器模組PM而與拾取器模組PM一起移動。並且,設置部件141至145還起到作為用於阻斷外部的雜訊光入射到確認用相機120及反射板130的遮蔽部件的作用,從而防止因外部的雜訊光而導致的失真的拍攝。更進一步,設置部件141至145包圍雷射照射器110、確認用相機120及反射板130,從而還起到作為保護雷射照射器110、確認用相機120及反射板130免受其他構成或不期望的其他接觸物的影響的保護部件的作用。此外,設置部件141至145也起到保護使用者的作用。The installation members 141 to 145 are provided for installation of the laser irradiator 110 , the confirmation camera 120 , and the reflection plate 130 . Therefore, the laser irradiator 110 , the camera for confirmation 120 , and the reflection plate 130 are separated from each other by a predetermined interval, and are attached to each other by being mounted on the installation members 141 to 145 . In addition, the installation parts 141 to 145 are coupled to the pickup module PM to move together with the pickup module PM. Therefore, the laser irradiator 110, the confirmation camera 120, and the reflection plate 130 fixedly installed on the installation parts 141 to 145 Finally, it is combined with the pickup module PM to move together with the pickup module PM. In addition, the setting members 141 to 145 also function as shielding members for blocking external noise light from entering the confirmation camera 120 and the reflection plate 130, thereby preventing distorted shooting due to external noise light. . Furthermore, the installation parts 141 to 145 surround the laser irradiator 110, the camera 120 for confirmation, and the reflector 130, thereby also functioning as a function of protecting the laser irradiator 110, the camera 120 for confirmation, and the reflector 130 from other structures or unintended consequences. The effect of the protective component on the expected impact of other contacts. In addition, the setting parts 141 to 145 also function to protect users.

前後移動器150使拾取器模組PM沿前後方向上移動,從而最終使雷射照射器110、確認用相機120及反射板130沿前後方向移動。The front-back mover 150 moves the pickup module PM in the front-back direction, and finally moves the laser irradiator 110 , the confirmation camera 120 , and the reflector 130 in the front-back direction.

左右移動器160使拾取器模組PM沿左右方向移動,從而最終使雷射照射器110、確認用相機120及反射板130沿左右方向移動。The left-right mover 160 moves the pickup module PM in the left-right direction, and finally moves the laser irradiator 110 , the confirmation camera 120 , and the reflector 130 in the left-right direction.

垂直移動器170使拾取器模組PM沿上下方向移動,從而最終使雷射照射器110、確認用相機120及反射板130沿上下方向移動。因此,通過垂直移動器170的適當運行,確認用相機120能夠位於可拍攝電子部件D的適當高度。The vertical mover 170 moves the pickup module PM vertically, and finally moves the laser irradiator 110 , the confirmation camera 120 , and the reflector 130 vertically. Therefore, the camera 120 for confirmation can be positioned at the appropriate height which can image|photograph the electronic component D by appropriate operation|movement of the vertical shifter 170. FIG.

上述的前後移動器150、左右移動器160及垂直移動器170最終也用於利用拾取器模組PM的電子部件D的移動。並且,根據本實施例,前後移動器150在進行拍攝操作時使雷射照射器110、確認用相機120及反射板130向前方移動,從而起到使確認用相機120在沿前後方向排列的電子部件D的上側移動並拍攝所有電子部件D的工具的作用。即,由於在裝載要素上多個電子部件以矩陣形態排列,因此確認用相機120能夠通過前後移動器150移動的同時拍攝電子部件D。當然,如果採用檢查部分PP不是與拾取器模組PM一起移動的結構而是固定在某一位置並且裝載要素移動並拍攝電子部件D的實施方式,則從拍攝裝置100的構成中省略上述的前後移動器150、左右移動器160及垂直移動器170。The above-mentioned forward and backward mover 150 , left and right mover 160 , and vertical mover 170 are also finally used to move the electronic component D using the picker module PM. Moreover, according to the present embodiment, the front and rear mover 150 moves the laser irradiator 110, the confirmation camera 120, and the reflector 130 forward during the photographing operation, so that the confirmation cameras 120 are arranged electronically in the front-rear direction. The upper side of part D moves and photographs all electronic part D tools in action. That is, since a plurality of electronic components are arranged in a matrix form on the mounting element, the confirmation camera 120 can image the electronic components D while moving by the forward and backward mover 150 . Of course, if the inspection part PP is not a structure that moves together with the pickup module PM but is fixed at a certain position and the loading element moves to photograph the electronic component D, the above-mentioned before and after is omitted from the configuration of the photographing device 100 A mover 150 , a left-right mover 160 and a vertical mover 170 .

在進行拍攝操作時,控制器180控制包括雷射照射器110、確認用相機120及移動器150、160、170的自動運行構成的運行。這種控制器180具有分析單元,從來自確認用相機120的圖像分析雷射的圖案,並判斷電子部件D的裝載是否不良。The controller 180 controls the operation of the automatic operation configuration including the laser irradiator 110 , the camera 120 for confirmation, and the movers 150 , 160 , and 170 during the imaging operation. Such a controller 180 has an analysis unit that analyzes the pattern of the laser light from the image from the confirmation camera 120 to determine whether or not the electronic component D is defectively mounted.

接下來,將說明根據控制器180的控制而執行的拍攝裝置100的運行。Next, the operation of the photographing apparatus 100 performed according to the control of the controller 180 will be explained.

當作為裝載要素的一種的客戶托盤CT供應到拍攝位置時,如圖7的(a)所示,控制器180控制前後移動器150而使確認用相機120最大限度地向後方後退。然後,如圖7的(b)所示,在拾取器模組PM向前方移動並從反射板130位於裝載於客戶托盤CT的最後方的電子部件D1 的上方的時間點開始進行通過確認用相機120的拍攝,之後,如圖7的(c)所示,拍攝進行到反射板130位於裝載於客戶托盤CT的最前方的電子部件D2 的上方的時間點為止。然後,如圖7(d)所示,在反射板130從進行最後一次拍攝的時間點開始向前方進一步移動預定距離之後,檢查部分PP的移動結束。在此,當將通過確認用相機120拍攝第一個電子部件D1 (位於客戶托盤的最後方的電子部件)的時間點的反射板130的位置與拍攝最後一個電子部件D2 (位於客戶托盤的最前方的電子部件)的時間點的反射板130的位置之間的距離定義為電子部件所排列的排列距離S時,為了拍攝的準確性,較佳地,在通過確認用相機120進行拍攝操作時向前方移動的反射板130的移動距離M比排列距離S長,並且排列距離S在移動距離M內。這是因為,為了提高處理容量,包括反射板130的檢查部分PP需要持續移動而不停止,在這種情況下,為了計算準確的拍攝時間點而實現適當的拍攝,反射板130需要在排列距離S的區間以勻速移動。因此,反射板130從處於停止狀態開始移動之後到再次處於停止狀態為止,需要按照加速移動、勻速移動、減速移動的順序控制其移動。換句話說,移動距離M可以分為反射板130進行加速移動的加速移動區間A、反射板130進行勻速移動的勻速移動區間E、反射板130進行減速移動的減速移動區間R,排列距離S至少與勻速移動區間E一致或在勻速移動區間E內。因此,控制器180進行控制來使得在反射板130在勻速移動區間E勻速移動時實現通過確認用相機120電子部件D的拍攝。When a customer tray CT, which is a type of loading element, is supplied to the imaging position, as shown in FIG. 7( a ), the controller 180 controls the back-and-forth mover 150 to move the confirmation camera 120 back as far as possible. Then, as shown in (b) of FIG. 7 , the passage confirmation is performed from the time point when the pickup module PM moves forward and the reflection plate 130 is located above the electronic component D1 loaded on the rearmost side of the customer tray CT. After the imaging by the camera 120 , as shown in FIG. 7( c ), the imaging is performed until the reflector 130 is located above the electronic component D2 placed on the front of the customer tray CT. Then, as shown in FIG. 7( d ), after the reflective plate 130 further moves forward by a predetermined distance from the time point when the last shot was taken, the movement of the inspection portion PP ends. Here, when the position of the reflector 130 at the time point when the camera 120 photographs the first electronic component D 1 (the electronic component located at the rear of the customer tray) is compared with the position of the last electronic component D 2 (located at the rear of the customer tray) When the distance between the positions of the reflector 130 at the time point of the frontmost electronic component) is defined as the arrangement distance S where the electronic components are arranged, for the accuracy of shooting, preferably, when the camera 120 is used to confirm the shooting The moving distance M of the reflecting plate 130 moving forward during operation is longer than the arrangement distance S, and the arrangement distance S is within the movement distance M. FIG. This is because, in order to increase the processing capacity, the inspection part PP including the reflection plate 130 needs to continuously move without stopping. The interval of S moves at a constant speed. Therefore, the movement of the reflector 130 needs to be controlled in the order of accelerated movement, constant speed movement, and decelerated movement after the reflection plate 130 starts to move from the stopped state to the stopped state again. In other words, the moving distance M can be divided into an accelerated moving section A in which the reflecting plate 130 moves at an accelerated speed, a constant moving section E in which the reflecting plate 130 moves at a constant speed, and a decelerated moving section R in which the reflecting plate 130 decelerates. The arrangement distance S is at least It is consistent with the constant speed movement interval E or within the constant speed movement interval E. Therefore, the controller 180 performs control so that when the reflector 130 moves at a constant speed in the constant speed movement section E, the electronic component D passes through the confirmation camera 120 to be photographed.

並且,根據本實施例的拍攝裝置100,由於雷射因反射板130而彎曲90度而入射到電子部件D,因此即使客戶托盤CT的裝載面Lf位於用於固定客戶托盤CT的邊緣的基板BP的上表面的下方,也不會發生如圖3所示的由雷射照射器110照射的雷射被基板BP阻擋而不能到達電子部件D的情況。當然,在這種情況下,為了防止在用於拍攝與基板BP最近相鄰的電子部件D的拍攝地點處確認用相機120的拍攝中心線CL與基板BP之間的干擾,需要設定確認用相機120的拍攝中心線CL的傾斜度。In addition, according to the imaging device 100 of this embodiment, since the laser beam is bent by 90 degrees by the reflector 130 and enters the electronic component D, even if the loading surface Lf of the customer tray CT is located on the board BP for fixing the edge of the customer tray CT Below the upper surface of the substrate, the situation that the laser irradiated by the laser irradiator 110 is blocked by the substrate BP and cannot reach the electronic component D as shown in FIG. 3 does not occur. Of course, in this case, in order to prevent interference between the imaging center line CL of the confirmation camera 120 and the substrate BP at the photographing location for photographing the electronic component D nearest to the substrate BP, it is necessary to set the confirmation camera 120 for the inclination of the shooting center line CL.

另外,客戶托盤CT通常具有在前後方向上較長且在左右方向上較短的矩形形狀。在本實施例中,採用了確認用相機120從後方向前方移動的同時進行拍攝的實施方式,因此,如參照圖8所示,由雷射照射器110照射的線性雷射L具有在左右方向上較長的圖案。並且,確認用相機120的視角或焦距也根據如圖8所示的雷射圖案而設定。In addition, the customer tray CT generally has a rectangular shape that is long in the front-rear direction and short in the left-right direction. In this embodiment, an embodiment is adopted in which the camera 120 for confirmation is photographed while moving from the rear to the front. Therefore, as shown in FIG. 8, the linear laser L irradiated by the laser irradiator 110 has longer patterns. In addition, the angle of view and focal length of the camera 120 for confirmation are also set based on the laser pattern shown in FIG. 8 .

然而,如參照圖9所示,由雷射照射器110照射的線性雷射L也可以根據實施方式而具有在前後方向上較長的圖案。在這種情況下,確認用相機120的視角或焦距也應根據其而設定。並且,由於用於拍攝的確認用相機120的移動需要沿左右方向進行,因此為了進行用於拍攝的移動,需要程式設計為左右移動器160運行。However, as shown with reference to FIG. 9 , the linear laser L irradiated by the laser irradiator 110 may also have a long pattern in the front-rear direction according to an embodiment. In this case, the angle of view and focal length of the confirmation camera 120 should also be set accordingly. Furthermore, since the movement of the confirmation camera 120 for photographing needs to be performed in the left and right directions, it is necessary to program the movement of the left and right shifter 160 in order to perform the movement for photographing.

然而,為了確保更寬的視角而提高確認用相機120的上升高度會導致待生產的處理設備PE的擴大化,而對於已生產的處理設備PE,確認用相機120的上升高度會受到限制,因此可能難以確保充分的視角。因此,如本實施例,更較佳地,確認用相機120在客戶托盤CT的長度較長的方向上移動並一次性拍攝排列在客戶托盤CT的長度較短的方向上的電子部件D。However, increasing the rising height of the confirmation camera 120 in order to ensure a wider viewing angle will lead to enlargement of the processing equipment PE to be produced, and for the produced processing equipment PE, the rising height of the confirmation camera 120 will be limited, so It may be difficult to secure a sufficient viewing angle. Therefore, like this embodiment, it is more preferable that the confirmation camera 120 moves in the longer direction of the customer tray CT and photographs the electronic components D arranged in the shorter direction of the customer tray CT all at once.

作為參考,在本實施例中,雷射照射器110朝向後方照射雷射L。但是,根據實施方式,檢查部分PP可以設置於拾取器模組PM的後端,在這種情況下,需要設置成雷射照射器110向前方照射雷射L,據此,為了節省設置空間IS,較佳地,改變設置確認用相機120及反射板130的佈置。For reference, in this embodiment, the laser irradiator 110 irradiates the laser L toward the rear. However, according to the embodiment, the inspection part PP may be arranged at the rear end of the pickup module PM. In this case, it needs to be arranged so that the laser irradiator 110 irradiates the laser L forward. Accordingly, in order to save the installation space IS , Preferably, the arrangement of the camera 120 for setting confirmation and the reflector 130 is changed.

並且,在本實施例中,確認用相機120實現為向前方移動並進行拍攝,但是根據實施方式,確認用相機120也可以實現為向後方移動並進行拍攝。 第二實施例In addition, in the present embodiment, the confirmation camera 120 is realized to move forward and take pictures, but according to the embodiment, the confirmation camera 120 may be realized to move backward and take pictures. second embodiment

當如圖2所示地在移動區域MS的左側或右側確保設置空間IS時,可以較佳地應用本實施例。This embodiment can be preferably applied when the setting space IS is ensured on the left or right side of the moving area MS as shown in FIG. 2 .

如參照圖10所示,根據本發明的第二實施例的拍攝裝置200包括檢查部分PP、前後移動器250、左右移動器260、垂直移動器270及控制器280。As shown with reference to FIG. 10 , the photographing apparatus 200 according to the second embodiment of the present invention includes an inspection part PP, a forward and backward mover 250 , a left and right mover 260 , a vertical mover 270 and a controller 280 .

檢查部分PP結合於拾取器模組PM,從而能夠與拾取器模組PM一起移動,並且如圖11的摘取分解圖所示,檢查部分PP包括雷射照射器210、確認用相機220、反射板230及設置部件241至243。The inspection part PP is combined with the pickup module PM so as to be able to move together with the pickup module PM, and as shown in the extracted exploded view of FIG. The board 230 and the setting parts 241 to 243.

雷射照射器210配備為向裝載於裝載要素的電子部件的上表面照射線性雷射L,並佈置於拾取器模組PM的左側。如參照圖12所示,這種雷射照射器210以與垂直線PL具有預定的傾斜角Φ的方式傾斜地設置,以能夠向位於自身前方側下方的電子部件D的上表面照射雷射L。The laser irradiator 210 is equipped to irradiate the linear laser L on the upper surface of the electronic component mounted on the loading element, and is arranged on the left side of the pickup module PM. As shown in FIG. 12 , such a laser irradiator 210 is installed obliquely at a predetermined inclination angle Φ with respect to the vertical line PL so as to irradiate laser light L to the upper surface of the electronic component D positioned below its front side.

確認用相機220配備為通過拍攝由雷射照射器210照射的雷射來確認裝載於裝載要素的電子部件的安置狀態。本實施例的確認用相機220設置為拍攝中心線CL與前後方向的水平線HL平行且拍攝方向朝向前方。這種確認用相機220佈置於雷射照射器210的前方。作為參考,在本說明中,將確認用相機220的拍攝方向定義為朝向前方。The confirmation camera 220 is equipped to confirm the placement state of the electronic components mounted on the loading element by imaging the laser irradiated by the laser irradiator 210 . The confirmation camera 220 of this embodiment is installed so that the imaging center line CL is parallel to the horizontal line HL in the front-back direction, and the imaging direction is directed forward. Such a confirmation camera 220 is arranged in front of the laser irradiator 210 . For reference, in this description, the imaging direction of the confirmation camera 220 is defined as facing forward.

反射板230將確認用相機220的拍攝中心線CL向電子部件D的上表面方向彎曲,使得確認用相機220能夠拍攝由雷射照射器210照射到電子部件D的上表面的雷射L,為此,反射板230佈置於確認用相機220的前方。此時,反射板230設置成相對於水平線HL形成45度角,使得拍攝中心線CL彎曲的角度成90度而使拍攝中心線CL朝向正下方。The reflection plate 230 bends the imaging center line CL of the confirmation camera 220 toward the upper surface of the electronic component D, so that the confirmation camera 220 can photograph the laser L irradiated onto the upper surface of the electronic component D by the laser irradiator 210, as Here, the reflection plate 230 is arranged in front of the confirmation camera 220 . At this time, the reflecting plate 230 is set to form an angle of 45 degrees with respect to the horizontal line HL, so that the shooting center line CL is bent at an angle of 90 degrees so that the shooting center line CL faces directly downward.

如此,在本實施例中,雷射照射器210、確認用相機220及反射板230沿前後方向佈置成一列,從而能夠節省左右寬度的空間。In this way, in this embodiment, the laser irradiator 210 , the confirmation camera 220 , and the reflector 230 are arranged in a row along the front-rear direction, thereby saving the space of the left-right width.

設置部件241至243為了設置雷射照射器210、確認用相機220及反射板230而配備。因此,雷射照射器210、確認用相機220及反射板230沿一方向具有依次地佈置,並且以彼此之間隔開預定間隔的方式搭載設置部件241至243而彼此附隨在一起。同樣地,在本實施例中,設置部件241至243結合於拾取器模組PM,從而與拾取器模組PM一起移動,因此,雷射照射器210、確認用相機220及反射板230結合於拾取器模組PM而與拾取器模組PM一起移動。並且,設置部件241至243還起到作為用於阻斷外部的雜訊光入射到確認用相機220及反射板230的遮蔽部件的作用,還起到作為保護雷射照射器210、確認用相機220及反射板230的保護部件的作用。The installation members 241 to 243 are provided for installation of the laser irradiator 210 , the camera 220 for confirmation, and the reflection plate 230 . Therefore, the laser irradiator 210 , the camera for confirmation 220 , and the reflection plate 230 are sequentially arranged in one direction, and the installation members 241 to 243 are attached to each other with a predetermined interval therebetween. Likewise, in the present embodiment, the setting parts 241 to 243 are combined with the pickup module PM so as to move together with the pickup module PM. Therefore, the laser irradiator 210, the camera 220 for confirmation, and the reflector 230 are combined with the pickup module PM. The picker module PM moves together with the picker module PM. In addition, the installation members 241 to 243 also function as shielding members for blocking external noise light from entering the confirmation camera 220 and the reflection plate 230, and also serve as shielding members for protecting the laser irradiator 210 and the confirmation camera. 220 and the protective components of the reflection plate 230.

前後移動器250使拾取器模組PM沿前後方向移動,從而最終使雷射照射器210、確認用相機220及反射板230沿前後方向移動。The front-back mover 250 moves the pickup module PM in the front-back direction, and finally moves the laser irradiator 210 , the confirmation camera 220 , and the reflector 230 in the front-back direction.

左右移動器260使拾取器模組PM沿左右方向移動,從而最終使雷射照射器210、確認用相機220及反射板230沿左右方向移動。The left-right mover 260 moves the pickup module PM in the left-right direction, and finally moves the laser irradiator 210 , the confirmation camera 220 , and the reflector 230 in the left-right direction.

垂直移動器270使拾取器模組PM沿上下方向移動,從而最終使雷射照射器210、確認用相機220及反射板230沿上下方向移動。The vertical mover 270 moves the pickup module PM vertically, and finally moves the laser irradiator 210 , the confirmation camera 220 , and the reflector 230 vertically.

在進行拍攝操作時,控制器280控制包括雷射照射器210、確認用相機220及移動器250、260、270的自動運行構成的運行。The controller 280 controls the operation of the automatic operation configuration including the laser irradiator 210 , the camera 220 for confirmation, and the movers 250 , 260 , and 270 during the imaging operation.

在本實施例中,由於確認用相機220也向一方向移動並進行拍攝,因此需要包括反射板230的檢查部分PP的加速移動、勻速移動、減速移動。In this embodiment, since the checking camera 220 also moves in one direction to take pictures, the inspection portion PP including the reflection plate 230 needs to be moved at an accelerated speed, at a constant speed, and at a decelerated speed.

其餘的拍攝方式或包括反射板230的檢查部分PP的移動方式等與第一實施例相同,因此將省略其說明。The rest of the way of photographing or the way of moving the inspection portion PP including the reflection plate 230 and the like are the same as those of the first embodiment, so description thereof will be omitted.

另外,如圖13所示,根據本實施例的檢查部分PP也可以分別配備於拾取器模組PM的左右。In addition, as shown in FIG. 13, the inspection part PP according to this embodiment may also be provided on the left and right of the pickup module PM, respectively.

通常,如參照圖14的處理設備PE所示,用於對在處理設備中完成處理的電子部件進行分類的拾取器模組PM需要以沿左右方向排列的多個客戶托盤CT為物件進行操作。因此,採用如圖13所示的實施方式,對於位於左側部位的客戶托盤CT,利用位於拾取器模組PM左側的檢查部分PP檢查安置是否不良,而對於位於右側部位的客戶托盤CT,利用位於拾取器模組PM右側的檢查部分PP檢查安置是否不良。這是因為,在僅在拾取器模組PM的左右中的一側具有檢查部分PP的情況下,可能存在因拾取器模組PM的左右寬度而無法對位於另一側方向的客戶托盤進行檢查的結構。當然,只要能夠確保用於雷射的照射和拍攝的視野角,檢查部分PP可以如圖10所示地僅設置於左右中的一側,也可以與具有其他佈置構成的檢查部分PP混用而分別使用於左右兩側。Generally, as shown with reference to the processing equipment PE of FIG. 14 , a picker module PM for sorting electronic parts processed in the processing equipment needs to operate with a plurality of customer trays CT arranged in the left-right direction as objects. Therefore, adopt the embodiment shown in Figure 13, for the customer tray CT located on the left side, use the inspection part PP located on the left side of the picker module PM to check whether the placement is bad, and for the customer tray CT located on the right side, use the inspection part PP located on the left side of the picker module PM The inspection part PP on the right side of the pickup module PM checks whether the placement is bad. This is because, in the case where the inspection portion PP is provided only on one of the left and right sides of the picker module PM, there may be a possibility that the customer pallet located in the other side direction cannot be inspected due to the left-right width of the picker module PM. Structure. Of course, as long as the angle of view for laser irradiation and imaging can be ensured, the inspection part PP can be installed on only one of the left and right sides as shown in FIG. Use on the left and right sides.

根據如前述的本發明,由於能夠實現確認用相機120、220的拍攝中心線CL與雷射照射器110、210的照射方向具有能夠充分確認因電子部件D的安置不良而導致的雷射圖案的變化的角度,因此通過圖案分析而具有優秀的檢查可靠性。According to the present invention as described above, since the imaging center line CL of the confirmation cameras 120, 220 and the irradiation direction of the laser irradiators 110, 210 can be realized, the laser pattern caused by the poor placement of the electronic component D can be fully confirmed. Varying angles and thus excellent inspection reliability through pattern analysis.

例如,在電子部件中的一個稍微傾斜的情況下,若確認用相機的拍攝中心線與雷射照射器的照射方向之間的角度較小,則可能無法確認雷射圖案的變化。For example, when one of the electronic components is slightly tilted, if the angle between the imaging center line of the confirmation camera and the irradiation direction of the laser irradiator is small, it may not be possible to confirm the change of the laser pattern.

但是,根據本發明的佈置結構,檢查部分PP設置於狹窄的設置空間IS的同時能夠充分確保確認用相機120、220的拍攝中心線CL與雷射照射器110、210的照射方向之間的角度,從而能夠在拍攝的圖像上確認雷射圖案的變化。However, according to the layout structure of the present invention, the inspection part PP is installed in the narrow installation space IS, and the angle between the imaging center line CL of the confirmation cameras 120, 220 and the irradiation direction of the laser irradiators 110, 210 can be sufficiently ensured. , so that the change of the laser pattern can be confirmed on the captured image.

作為參考,本發明以通過確認用相機120、220確認電子部件的安置狀態是否不良為主進行了說明。但是,也可以通過確認用相機120、220確認電子部件D是否不良(破損、凹痕、異物附著等),因此,在這種情況下,也可以直接應用上述的第一實施例及第二實施例的檢查部分PP的構成。即,根據實施方式,確認用相機120、220可以為了確認電子部件D的安置狀態而配備,也可以為了確認電子部件D的不良狀態而配備,還可以為了同時確認電子部件D的安置狀態和不良狀態而配備。因此,在本發明中,確認電子部件D的安置狀態的含義不僅可以定義為單純地確認安置狀態是否存在不良,還可以定義為包括確認電子部件D自身是否具有不良。For reference, the present invention has been mainly explained by confirming whether or not the mounting state of the electronic component is defective by the cameras 120 and 220 for confirmation. However, it is also possible to check whether the electronic component D is defective (damage, dent, adhesion of foreign matter, etc.) through the confirmation cameras 120 and 220. Therefore, in this case, the above-mentioned first and second embodiments can also be directly applied. The configuration of the inspection part PP of the example. That is, depending on the embodiment, the confirmation cameras 120 and 220 may be equipped for confirming the installation state of the electronic component D, may be equipped for confirming the defective state of the electronic component D, or may be used for simultaneously confirming the installation state and the defective state of the electronic component D equipped for the status. Therefore, in the present invention, the meaning of checking the installation state of the electronic component D can be defined not only as simply checking whether the installation state is defective, but also as including checking whether the electronic component D itself has a defect.

如前述,通過參照圖式的實施例對本發明進行了具體說明,但上述實施例僅對本發明的較佳實施例進行了說明,因此不應理解為本發明僅局限於上述實施例,本發明的權利範圍應理解為申請專利範圍及其等同範圍。As mentioned above, the present invention has been specifically described by referring to the embodiments of the drawings, but the above-mentioned embodiments have only described the preferred embodiments of the present invention, so it should not be understood that the present invention is only limited to the above-mentioned embodiments. The scope of rights should be understood as the scope of the patent application and its equivalent scope.

100,200:電子部件拍攝裝置 110,210:雷射照射器 120,220:確認用相機 130,230:反射板 141~145,241~243:設置部件 150,250:前後移動器 160,260:左右移動器 180,280:控制器 PM:拾取器模組 P:拾取器 BP:基板100,200: electronic component shooting device 110,210: Laser irradiators 120,220: camera for confirmation 130,230: reflector 141~145, 241~243: setting parts 150,250: front and rear shifters 160,260: left and right shifter 180,280: Controller PM: Pickup Module P: Pickup BP: Substrate

圖1至圖3是用於說明背景技術的參照圖。1 to 3 are reference diagrams for explaining the background art.

圖4是根據本發明的第一實施例的用於電子部件處理設備的拍攝裝置的示意性的立體圖。4 is a schematic perspective view of a photographing device for an electronic component processing apparatus according to a first embodiment of the present invention.

圖5是從圖4的用於電子部件處理設備的拍攝裝置中摘取並分解檢查部分的摘取分解圖。FIG. 5 is an extracted exploded view of an inspection portion extracted and disassembled from the photographing device for electronic component processing equipment of FIG. 4 .

圖6是用於說明圖5的檢查部分的構成佈置的示意性的參照圖。FIG. 6 is a schematic reference diagram for explaining the constitutional arrangement of the inspection portion of FIG. 5 .

圖7是用於說明圖4的用於電子部件處理設備的拍攝裝置的運行的參照圖。FIG. 7 is a reference diagram for explaining the operation of the photographing device used in the electronic component processing facility of FIG. 4 .

圖8和圖9是用於說明雷射圖案和檢查方式的參照圖。8 and 9 are reference diagrams for explaining laser patterns and inspection methods.

圖10是根據本發明的第二實施例的用於電子部件處理設備的拍攝裝置的示意性的立體圖。Fig. 10 is a schematic perspective view of a photographing device for an electronic component processing apparatus according to a second embodiment of the present invention.

圖11是從圖10的用於電子部件處理設備的拍攝裝置中摘取並分解檢查部分的摘取分解圖。FIG. 11 is an extracted exploded view of an inspection portion extracted and disassembled from the photographing device for electronic component processing equipment of FIG. 10 .

圖12是用於說明圖10的檢查部分的構成佈置的示意性的參照圖。FIG. 12 is a schematic reference diagram for explaining the constitutional arrangement of the inspection portion of FIG. 10 .

圖13和圖14是用於說明圖11的檢查部分可以成對配備的參照圖。13 and 14 are reference diagrams for explaining that the inspection portions of FIG. 11 can be provided in pairs.

國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無Domestic deposit information (please note in order of depositor, date, and number) none Overseas storage information (please note in order of storage country, institution, date, and number) none

110:雷射照射器 110:Laser irradiator

120:確認用相機 120: camera for confirmation

130:反射板 130: reflector

CL:中心線 CL: Centerline

D:電子部件 D: electronic components

P:拾取器 P: Pickup

PL:垂直線 PL: vertical line

PM:拾取器模組 PM: Pickup Module

Claims (8)

一種用於電子部件處理設備的拍攝裝置,包括:雷射照射器,配備為向裝載於裝載要素的電子部件的上表面照射線性雷射,並且向水平方向照射雷射;確認用相機,配備為通過拍攝由所述雷射照射器照射的雷射來確認裝載於裝載要素的電子部件的安置狀態;反射板,將由所述雷射照射器向水平方向照射的雷射朝向位於垂直下方的電子部件反射,使所述確認用相機能夠拍攝照射了雷射的電子部件;移動器,使所述雷射照射器、所述確認用相機及所述反射板沿水平方向移動,使得所述確認用相機能夠在兩個以上的位置拍攝電子部件;及控制器,控制所述雷射照射器、所述確認用相機及所述移動器,其中所述雷射照射器、所述確認用相機及所述反射板以藉由所述移動器而能夠一起移動的方式而彼此結合,其中所述雷射照射器、所述確認用相機及所述反射板設置成與包括為了移動電子部件而能夠抓持電子部件或解除電子部件的抓持的拾取器的拾取器模組結合,所述雷射照射器以向後方照射雷射的方式佈置於所述拾取器的前方,所述反射板佈置於所述雷射照射器與所述拾取器之間。 A photographing device for electronic component processing equipment, comprising: a laser irradiator equipped to irradiate a linear laser on an upper surface of an electronic component mounted on a loading element and irradiate the laser in a horizontal direction; a camera for confirmation equipped to The installation state of the electronic components mounted on the loading element is confirmed by photographing the laser irradiated by the laser irradiator; the reflection plate directs the laser irradiated in the horizontal direction from the laser irradiator to the electronic components located vertically below Reflection, enabling the confirmation camera to photograph electronic components irradiated with laser; a mover, moving the laser irradiator, the confirmation camera, and the reflector in the horizontal direction, so that the confirmation camera Electronic components can be photographed at two or more positions; and a controller that controls the laser irradiator, the confirmation camera, and the mover, wherein the laser irradiator, the confirmation camera, and the The reflection plate is combined with each other in such a manner that it can be moved together by the mover, wherein the laser irradiator, the camera for confirmation, and the reflection plate are provided with an electronic device capable of gripping an electronic part in order to move the electronic part. components or the pick-up module of the pick-up that releases the gripping of electronic components, the laser irradiator is arranged in front of the pick-up in a manner of irradiating the laser to the rear, and the reflector is arranged on the laser between the irradiator and the pick-up. 根據請求項1之用於電子部件處理設備的拍 攝裝置,其中所述確認用相機佈置於所述拾取器模組的前方且所述雷射照射器的上側方向,所述確認用相機的拍攝中心線相對於垂直線具有大於0度且小於90度的傾斜角。 Patches for processing equipment for electronic components according to claim 1 A photographing device, wherein the confirmation camera is arranged in front of the pickup module and in the direction of the upper side of the laser irradiator, and the photographing centerline of the confirmation camera has an angle greater than 0 degrees and less than 90 degrees relative to the vertical line. degrees of inclination. 根據請求項2之用於電子部件處理設備的拍攝裝置,其中所述裝載要素的裝載面位於用於固定所述裝載要素的邊緣的基板的上表面的下方,所述拍攝中心線的傾斜度被設定為使得在進行藉由所述確認用相機的拍攝時在至少一個拍攝地點處防止所述確認用相機的拍攝中心線與所述基板之間的干擾。 The imaging device for electronic component processing equipment according to claim 2, wherein the loading surface of the loading element is located below the upper surface of the substrate for fixing the edge of the loading element, and the inclination of the imaging center line is determined by It is set so as to prevent interference between the imaging center line of the checking camera and the substrate at at least one imaging location when imaging by the checking camera is performed. 一種用於電子部件處理設備的拍攝裝置,包括:雷射照射器,配備為向裝載於裝載要素的電子部件的上表面照射線性雷射而配備;確認用相機,通過拍攝由所述雷射照射器照射的雷射來確認裝載於裝載要素的電子部件的安置狀態,並且其拍攝中心線與水平線平行;反射板,將所述拍攝中心線向照射雷射的電子部件的上表面方向彎曲,使得所述確認用相機能夠拍攝照射了雷射的電子部件的上表面;移動器,使所述雷射照射器、所述確認用相機及所述反射板沿水平方向移動,使得所述確認用相機能夠在兩 個以上的位置拍攝電子部件;及控制器,控制所述雷射照射器、所述確認用相機及所述移動器,其中所述雷射照射器、所述確認用相機及所述反射板以藉由所述移動器而能夠一起移動的方式而彼此結合,其中所述雷射照射器、所述確認用相機及所述反射板設置成與包括為了移動電子部件而能夠抓持電子部件或解除電子部件的抓持的拾取器的拾取器模組結合,所述確認用相機以拍攝前方的方式佈置於所述拾取器的左側或右側方向,所述反射板佈置於所述確認用相機的前方。 An imaging device for electronic component processing equipment, comprising: a laser irradiator equipped to irradiate a linear laser on the upper surface of an electronic component mounted on a loading element; a camera for confirmation that is irradiated by the laser by imaging The laser irradiated by the laser is used to confirm the installation state of the electronic components loaded on the loading element, and its shooting center line is parallel to the horizontal line; the reflector bends the shooting center line toward the upper surface of the electronic component irradiated with the laser, so that The confirmation camera can photograph the upper surface of the electronic component irradiated with laser; the mover moves the laser irradiator, the confirmation camera, and the reflector in the horizontal direction so that the confirmation camera can be in two photographing electronic components at more than one position; and a controller that controls the laser irradiator, the confirmation camera, and the mover, wherein the laser irradiator, the confirmation camera, and the reflector are Combined with each other by being able to move together by the mover, wherein the laser irradiator, the camera for confirmation, and the reflection plate are provided to be able to grip or release the electronic component in order to move the electronic component. The pick-up module of the pick-up for grasping the electronic component is combined, the confirmation camera is arranged in the left or right direction of the pick-up in a manner of photographing the front, and the reflection plate is arranged in front of the confirmation camera . 根據請求項4之用於電子部件處理設備的拍攝裝置,其中所述雷射照射器佈置於所述確認用相機的後方。 The photographing device for electronic component processing equipment according to claim 4, wherein the laser irradiator is arranged behind the confirmation camera. 根據請求項4之用於電子部件處理設備的拍攝裝置,其中所述雷射照射器、所述確認用相機及所述反射板沿一方向並排排列。 The photographing device for electronic component processing equipment according to Claim 4, wherein said laser irradiator, said camera for confirmation, and said reflection plate are arranged side by side in one direction. 根據請求項1或請求項4之用於電子部件處理設備的拍攝裝置,其中所述控制器以使所述確認用相機沿一方向移動並能夠拍攝排列於所述裝載要素的電子部件的方式控制所述雷射照射器、所述確認用相機及所述移動器,用於藉由所述確認用相機的拍攝的所述反射板的一方 向上的移動距離比排列於所述裝載要素的電子部件的一方向上的排列距離長,並且所述排列距離在所述移動距離內,所述排列距離定義為通過所述確認用相機拍攝第一個電子部件的時間點下的反射板的位置與拍攝最後一個電子部件的時間點下的反射板的位置之間的距離。 The photographing device for an electronic component processing facility according to claim 1 or claim 4, wherein the controller controls the confirmation camera to move in one direction and photograph electronic components arranged on the loading element. The laser irradiator, the confirmation camera, and the mover are used for one of the reflectors to be photographed by the confirmation camera The upward movement distance is longer than the arrangement distance in one direction of the electronic components arranged on the loading elements, and the arrangement distance is within the movement distance, and the arrangement distance is defined as the first one photographed by the confirmation camera. The distance between the position of the reflector at the time point of the electronic part and the position of the reflector at the time point of photographing the last electronic part. 根據請求項7之用於電子部件處理設備的拍攝裝置,其中所述移動距離劃分為所述反射板進行加速移動的加速移動區間、所述反射板進行勻速移動的勻速移動區間、所述反射板進行減速移動的減速移動區間,並且所述排列距離在所述勻速移動區間內,所述控制器進行控制使得在所述反射板在所述勻速移動區間以勻速移動時進行通過所述確認用相機的電子部件的拍攝。 The photographing device for electronic component processing equipment according to claim 7, wherein the moving distance is divided into an accelerated movement section in which the reflective plate moves at an accelerated speed, a constant-speed movement section in which the reflective plate moves at a constant speed, and the reflective plate In a decelerated movement section in which the deceleration movement is performed, and the arrangement distance is within the constant-speed movement section, the controller controls to pass the confirmation camera when the reflector moves at a constant speed in the constant-speed movement section. shot of electronic components.
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