TWI788505B - Cutting knife management method and cutting device - Google Patents

Abstract

The subject of this invention is to provide the management method of the cutting blade which can judge the breakage of a cutting blade more suitably. The solution is a cutting blade management method, which includes the light emitted from the light-emitting part is not blocked by the cutting blade, and enters the light-receiving part under the full-incidence state, and the value of the electrical signal output from the photoelectric conversion part becomes In the manner above the predetermined value or greater than the predetermined value, the initial adjustment step of adjusting the amount of light radiated from the light emitting part by the adjustment part, the cutting step of cutting the workpiece with a cutting blade after the initial adjustment step, and after the implementation After the cutting step, after the movable part is positioned at the open position, the cutting blade is brought close to the blade position detection unit, and the blade position detection step of detecting the position of the blade edge of the cutting blade consumed by the cutting step is performed, and the movable part is moved in the blade position detection step After the part is positioned at the open position, a normal-time readjustment step of readjusting the amount of light emitted from the light emitting part by the adjustment part is performed.

Description

Cutting knife management method and cutting device

The present invention relates to a cutting blade management method for managing a cutting blade mounted on a cutting device, and a cutting device using the cutting blade management method.

When processing plate-shaped workpieces represented by semiconductor wafers and package substrates, for example, a cutting device in which a ring-shaped cutting blade is attached to a spindle is used. The workpiece can be cut along the direction of the relative movement by moving the spindle and the cutting blade relative to the workpiece while rotating the spindle to cut the cutting blade into the workpiece.

The cutting device described above is provided with a cutting blade monitoring unit that monitors the state of the cutting blade during cutting of a workpiece (for example, refer to Patent Document 1). The cutting blade monitoring unit includes, for example, a light emitting unit and a light receiving unit disposed at a position where the cutting blade is interposed. If the amount of light emitted from the light emitting unit and incident on the light receiving unit locally increases, it is determined that the cutting blade is broken. [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2001-298001

[Problem to be Solved by the Invention]

However, in the above-mentioned cutting tool monitoring unit, if chips generated by cutting adhere to the surface of the light emitting unit or the light receiving unit, the amount of light incident on the light receiving unit decreases, and the cutting tool cannot be properly judged. Condition of damage.

The present invention was made in view of the related problems, and an object of the present invention is to provide a cutting blade management method capable of more appropriately determining breakage of a cutting blade, and a cutting device using the cutting blade management method. [Means to solve the problem]

According to one aspect of the present invention, there is provided a cutting tool management method, which is to manage the cutting tool installed in the cutting device; The cutting unit of the main shaft includes a fixed part fixed to the cutting unit, and a movable part that moves between an open position and a closed position for the fixed part, and covers the A portion of the cutting blade, a housing that exposes the portion of the cutting blade when the movable portion is positioned at the open position, and light emitting portions that are provided on the movable portion and face each other across a gap where the cutting blade penetrates And a light receiving part, a photoelectric conversion part that converts the light incident on the light receiving part into an electrical signal of a value corresponding to the amount of light, an adjustment part that adjusts the amount of light emitted from the light emitting part, and detects the cutting A blade position detection unit for the position of the blade edge of the knife, and a nozzle for supplying cutting fluid to the workpiece; the management method includes: an initial adjustment step of positioning the movable part at the open position and emitting light from the light emitting part The adjustment unit is used in such a way that the value of the electrical signal output from the photoelectric conversion unit becomes more than a predetermined value or greater than the predetermined value in a state where the light is not shielded by the cutting blade and enters the light receiving unit. Adjusting the amount of light emitted from the light-emitting part; cutting step, after the initial adjustment step is carried out, after the movable part is positioned at the closed position, the light emitted from the light-emitting part is partially shielded by the cutting blade In the shielded state, while supplying the cutting fluid to the workpiece, the workpiece is cut with the cutting knife, and the value of the electrical signal is monitored; the blade position detection step is performed after the cutting step, and the After the movable portion is positioned at the open position, the cutting knife is brought close to the blade position detection unit to detect the position of the blade edge of the cutting blade consumed by the cutting step; the movable portion is positioned in the blade position detection step After the open position, in the full-incidence state, the value of the electrical signal output from the photoelectric conversion part becomes more than the predetermined value or greater than the predetermined value, and the adjusting part is used to adjust the light emitting part again The usual adjustment procedure for the amount of emitted light.

In one aspect of the present invention, when the value of the electrical signal monitored during the cutting step decreases to a lower limit value, the cutting step is interrupted and the movable part is positioned at the open position, and in the full Temporary readjustment in which the amount of light emitted from the light emitting part is readjusted by the adjustment part in such a way that the value of the electrical signal output from the photoelectric conversion part becomes more than or greater than the predetermined value in the incident state steps are better.

Also, in one aspect of the present invention, the adjusting part is used to readjust the intensity of the light radiated from the light emitting part in such a way that the value of the electrical signal output from the photoelectric conversion part becomes more than or greater than the predetermined value. It is preferable to implement the adjustment amount determination step of determining whether the adjustment amount of the adjustment unit reaches the limit.

According to another aspect of the present invention, a cutting device is provided, which includes: a suction cup table, which holds a workpiece; a cutting unit, which includes a spindle for installing a cutting knife for cutting the workpiece; a tool holder, which includes a fixed The fixed portion of the cutting unit, and the movable portion that moves between the open position and the closed position for the fixed portion, cover a part of the cutting blade when the movable portion is positioned at the closed position, and the movable portion In the state of being positioned at the open position, the part of the cutting blade is exposed; the light-emitting part and the light-receiving part are arranged on the movable part, and face each other with the gap in which the cutting blade penetrates; the photoelectric conversion part is to emit The light entering the light-receiving part is converted into an electrical signal corresponding to the value of the light; the adjustment part is to adjust the amount of light emitted from the light-emitting part; the blade position detection unit is to detect the cutting edge of the cutting knife The position of the nozzle; the nozzle is used to supply cutting fluid to the workpiece; and the control unit is used to control each component; the control unit includes: an opening and closing control part, which is used to position the movable part at the open position or the closed position control; and a judging part, which judges that the light emitted from the photoelectric conversion is in a full-incidence state in which the movable part is positioned at the open position, and the light emitted from the light emitting part is not blocked by the cutting blade and enters the light receiving part. Whether the value of the electrical signal output from the part becomes above the predetermined value or greater than the predetermined value; in the full-injection state, it is determined that the value of the electrical signal output from the photoelectric conversion part does not become above the predetermined value or greater than the predetermined value , then in the total incident state, the adjusting part is used to adjust the intensity of the light radiated from the light emitting part in such a way that the value of the electrical signal output from the photoelectric conversion part becomes above the predetermined value or greater than the predetermined value. quantity.

In another aspect of the present invention, the judging unit judges whether the light from the photoelectric conversion is partially shielded when the movable part is positioned at the closed position and the light radiated from the light emitting part is partially shielded by the cutting blade. Whether the value of the electrical signal output from the photoelectric conversion part has decreased to the lower limit value; in the partially shielded state, when it is determined that the value of the electrical signal output from the photoelectric conversion unit has decreased to the lower limit value, then the total input In this state, it is preferable to use the adjustment unit to adjust the amount of light emitted from the light emitting unit so that the value of the electrical signal output from the photoelectric conversion unit becomes equal to or greater than the predetermined value. [Effect of the invention]

In the management method of the cutting blade according to the present invention, after the workpiece is cut with the cutting blade, when the position of the blade edge of the cutting blade consumed by the cutting is detected by the blade position detection unit, the damage detection method will be adjusted again. The amount of light emitted from the light-emitting part of the unit can maintain the amount of light emitted from the light-emitting part and enter the light-receiving part even if a little cutting debris adheres to the surface of the light-emitting part and the light-receiving part. Therefore, according to the management method of the cutting blade in one aspect of the present invention, it is possible to determine the breakage of the cutting blade more appropriately.

Embodiments related to one aspect of the present invention will be described with reference to the attached drawings. FIG. 1 is a perspective view showing a structural example of a cutting device 2 to which the cutting blade management method of the present embodiment is applied. In addition, in FIG. 1 , some components of the cutting device 2 are shown as functional blocks. In addition, the X-axis direction, the Y-axis direction, and the Z-axis direction used in the following description are assumed to be perpendicular to each other.

As shown in FIG. 1 , the cutting device 2 includes a base 4 that supports each component. An opening 4 a is formed at a front corner of the base 4 , and a cassette elevator 6 that is raised and lowered by a lifting mechanism (not shown) is provided in the opening 4 a. On the upper surface of the cassette elevator 6 , a cassette 8 capable of accommodating a plurality of workpieces 11 is placed. Furthermore, in FIG. 1 , for convenience of description, only the outline of the crystal box 8 is disclosed.

The workpiece 11 is, for example, a disk-shaped wafer made of semiconductor elements such as silicon. The surface (upper side in FIG. 1 ) side of the workpiece 11 is partitioned into a plurality of regions by a plurality of predetermined dividing lines (cut lines) crossing each other, and devices such as IC (Integrated Circuit) are formed in each region.

An adhesive tape (dicing tape) having a larger diameter than the workpiece 11 is attached to the back side of the workpiece 11 (lower surface in FIG. 1 ). The outer peripheral portion of the adhesive tape 13 is fixed to the ring-shaped frame 15 . The workpiece 11 is accommodated in the cassette 8 in a state supported by the frame 15 via the adhesive tape 13 .

Furthermore, in this embodiment, a disk-shaped wafer made of semiconductor elements such as silicon is used as the workpiece 11, but the material, shape, structure, size, etc. of the workpiece 11 are not limited. . For example, substrates made of other materials such as semiconductors, ceramics, resins, and metals may be used as the workpiece 11 . Likewise, the kind, number, shape, configuration, size, arrangement, etc. of the devices are not limited. No device may be formed on the workpiece 11 .

On the side of the cassette elevator 6, an opening 4b long in the X-axis direction (front-back direction, processing feeding direction) is formed. In the opening 4b, a ball screw type X-axis moving mechanism (processing feeding unit) 10 and a bellows-shaped cover 12 covering the upper part of the X-axis moving mechanism 10 are arranged. The X-axis moving mechanism 10 includes an X-axis moving stage (not shown), and moves the axis moving stage in the X-axis direction. In addition, the upper part of this X-axis moving table is covered with the base cover 10a.

On the X-axis moving table, a chuck table (holding table) 14 holding the workpiece 11 is arranged in a state exposed from the table cover 10a. The chuck table 14 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotational axis approximately parallel to the Z-axis direction (vertical direction). Furthermore, the chuck table 14 is moved in the X-axis direction together with the X-axis moving table by the above-mentioned X-axis moving mechanism 10 (processing feed).

The upper surface of the holding table 14 serves as a holding surface 14 a for holding the workpiece 11 . The stroke of the holding surface 14a is roughly parallel to the X-axis direction and the Y-axis direction (left-right direction, indexing feed direction), and is connected to a suction source (not shown) through a suction path (not shown) formed in the suction cup table 14, etc. icon). In addition, four jaws 16 for fixing and supporting a ring-shaped frame 15 of the workpiece 11 from four directions are provided around the chuck table 14 .

Above the opening 4b, a transfer unit (not shown) for transferring the above-mentioned workpiece 11 (frame 15) to the chuck table 14 and the like is arranged. The workpiece 11 conveyed by the conveying unit is placed on the holding surface 14 a of the chuck table 14 such that the surface side thereof is exposed upward, for example.

At a position adjacent to the opening 4b, a cantilever-shaped support structure 20 for supporting the cutting unit 18 for cutting the workpiece 11 is arranged. On the upper front surface of the support structure 20, a cutting unit moving mechanism (index feeding unit, knife feeding unit) 22 for moving the cutting unit 18 in the Y-axis direction and the Z-axis direction is provided.

The cutting unit moving mechanism 22 is provided with a pair of Y-axis guide rails 24 arranged in front of the support structure 20 and roughly parallel to the Y-axis direction. A Y-axis moving plate 26 constituting the cutting unit moving mechanism 22 is slidably provided on the Y-axis guide rail 24 .

A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 26 , and a Y-axis ball screw 28 substantially parallel to the Y-axis guide rail 24 is screwed to the nut portion. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28 . When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24 .

On the surface (front) of the Y-axis moving plate 26, a pair of Z-axis guide rails 30 roughly parallel to the Z-axis direction are provided. A Z-axis moving plate 32 is slidably mounted on the Z-axis guide rail 30 .

A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 32 , and the Z-axis ball screw 34 parallel to the Z-axis guide rail 30 is screwed to the nut portion. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34 . When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36 , the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rail 30 .

A cutting unit 18 is provided on the lower part of the Z-axis moving plate 32 . FIG. 2 is a perspective view showing a structural example of the cutting unit 18 and the like, and FIG. 3 is a schematic view showing a structural example of the cutting unit 18 and the like. In addition, also in FIG. 3, a part of constituent elements are shown using a functional block.

The cutting unit 18 includes a cylindrical spindle housing 38 ( FIG. 1 ). The spindle housing 38 accommodates a spindle 40 ( FIG. 3 ) serving as a rotation axis. One end of the spindle 40 is exposed from one end of the spindle housing 38 to the outside, and a cutting blade 44 for cutting the workpiece 11 is attached to the one end of the spindle 40 through a tool holder 42 or the like. A rotary drive source (not shown) including a motor is connected to the other end side of the main shaft 40 .

A tool holder 46 for accommodating the cutting blades 44 and the like attached to the main shaft 40 is attached to one end of the main shaft housing 38 . The tool holder 46 includes a fixed portion 48 fixed to one end of the spindle housing 38 , and a movable portion 50 movable relative to the fixed portion 48 .

The movable part 50 is connected to the fixed part 48 through the air cylinder 52 (refer to FIG. When the movable portion 50 is positioned at the closed position closest to the fixed portion 48 , a part of the cutting blade 44 is covered by the blade case 46 . On the other hand, when the movable portion 50 is positioned at the open position closest to the fixed portion 48 , a part of the cutting blade 44 is covered by the blade case 46 .

The movable part 50 is provided with a pair of blade cooling nozzles 54 sandwiching the lower part of the cutting blade 44 . Each of the insert cooling nozzles 54 is formed in a substantially L-shape, and a cutting fluid such as pure water is supplied to the base end side through the coupling 56 . A plurality of slits (not shown) are formed at positions facing the cutting blade 44 of each insert cooling nozzle 54 , and the cutting fluid is supplied to the cutting blade 44 and the workpiece 11 through the plurality of slits.

On the other hand, a spray head (not shown) for supplying cutting fluid to the cutting blade 44 is provided inside the fixing portion 48 . A cutting fluid such as pure water is supplied through a coupling 58 to the base end side of the shower head. A supply hole (not shown) is formed at the tip of the head facing the cutting blade 44 , and the cutting fluid is mainly supplied to the cutting blade 44 through the supply hole.

Moreover, a part of the breakage detection unit 60 which detects breakage of the cutting blade 44 etc. is arrange|positioned at the upper part of the movable part 50. As shown in FIG. As shown in FIG. 3 , the breakage detection unit 60 includes a light emitting unit 60 a and a light receiving unit 60 b facing each other across a gap through which the cutting blade 44 can penetrate. When the movable portion 50 is positioned at the closed position, the cutting blade 44 enters the gap, and the light emitting portion 60 a and the light receiving portion 60 b face each other with the cutting blade 44 interposed therebetween.

The light emitting part 60a is connected to a light emitting element 60c such as an LED (Light Emitting Diode) through an optical fiber or the like, and can emit light toward the light receiving part 60b. Furthermore, an amplifier (adjustment unit) 60d is connected to the light emitting element 60c. For example, if the power supplied to the light emitting element 60c is controlled by the amplifier 60d, the amount of light emitted from the light emitting portion 60a can be adjusted.

On the other hand, the light receiving unit 60b is connected to a light receiving element (photoelectric conversion unit) 60e such as a photodiode through an optical fiber or the like. The light receiving element 60e generates electric power (typically, a voltage) corresponding to the light received by the light receiving unit 60b. That is, the light receiving element 60e converts the light incident on the light receiving part 60b into an electrical signal having a value corresponding to the amount of the light.

In the breakage detection unit 60 configured in this way, for example, the amount of light emitted from the light-emitting portion 60a is kept approximately constant without being shielded by the cutting blade 44, and the amount of light incident on the light-receiving portion 60b is monitored, thereby enabling immediate detection. The gap of the cutting blade 44 etc. is calculated.

As shown in FIG. 1 , an imaging unit (camera) 62 for imaging the workpiece 11 is provided at a position adjacent to the cutting unit 18 . When the cutting unit moving mechanism 22 moves the Y-axis moving plate 26 in the Y-axis direction, the cutting unit 18 and the imaging unit 62 move in the Y-axis direction (index feed). Moreover, when the Z-axis moving plate 32 is moved in the Z-axis direction by the cutting unit moving mechanism 22, the cutting unit 18 and the imaging unit 62 are moved in the Z-axis direction.

Below the cutting unit 18 , a blade position detecting unit 64 is arranged to detect the position (height) of the blade edge (tip) of the cutting blade 44 in the Z-axis direction. The blade position detection unit 64 has a structure similar to that of the damage detection unit 60, and can detect the blade edge of the cutting blade 44 by intruding the cutting blade 44 between the light-emitting part (not shown) and the light-receiving part (not shown). s position.

For example, when the above-mentioned cutting blade 44 is consumed by cutting processing, etc., the depth (cutting depth) of the lower end of the cutting blade 44 when the cutting blade 44 penetrates into the workpiece 11 deviates from the target depth. At this time, the position of the blade edge of the cutting blade 44 is detected by the blade position detection unit 64 and an appropriate correction is performed so that the cutting blade 44 can cut to an appropriate depth.

An opening 4c is formed at a position opposite to the opening 4a with respect to the opening 4b. In the opening 4c, a cleaning unit 66 for cleaning the workpiece 11 and the like after cutting is disposed. A control unit 68 is connected to each component such as the X-axis moving mechanism 10 , the cutting unit 18 , the cutting unit moving mechanism 22 , the breakage detection unit 60 , and the blade position detection unit 64 . The control unit 68 controls each component in accordance with the processing conditions of the workpiece 11 and the like.

As shown in FIG. 3 , the control unit 68 includes an opening/closing instruction portion 68 a for controlling the position of the movable portion 50 relative to the fixed portion 48 of the tool holder 46 . For example, when the position of the blade edge of the cutting blade 44 is detected by the above-mentioned blade position detection means 64, the movable part 50 is positioned at the open position by the instruction of the opening and closing instruction part 68a. On the other hand, when the workpiece 11 held by the chuck table 18 is cut by the cutting blade 44 , the movable portion 50 is positioned at the closed position by an instruction from the opening/closing instruction portion 68 a.

In addition, the control unit 68 includes a determination unit 68b that performs various determination processes. The judging unit 68b further includes a predetermined value storage unit 68c for storing a predetermined value used in the judging process of the judging unit 68b, and a lower limit value storage unit 68d for storing a lower limit value. The specific functions of the determination unit 68b, the predetermined value storage unit 68c, and the lower limit storage unit 68d will be described later.

Next, a method of managing cutting blades using the cutting device 2 described above will be described. In the cutting blade management method of this embodiment, first, an initial adjustment step is performed to adjust the amount of light emitted from the light emitting unit 60a so that the value of the electrical signal output from the light receiving element 60e becomes a predetermined value or more.

FIG. 4(A) is a side view showing an initial adjustment step and the like. As shown in FIG. 4(A), in this initial adjustment step, first, the opening/closing instruction portion 68a positions the movable portion 50 at the open position to expose a part of the cutting blade 44 from the blade housing 46 . In this way, when the movable part 50 is positioned at the open position, the cutting blade 44 is not disposed in the gap between the light emitting part 60a and the light receiving part 60b.

Therefore, the light emitted from the light emitting unit 60 a of the damage detection unit 60 enters the light receiving unit 60 b without being shielded by the cutting blade 44 . In the present embodiment, the state in which light rays emitted from the light emitting portion 60a are incident on the light receiving portion 60b without being shielded by the cutting blade 44 is referred to as a total incident state.

In the initial adjustment step, the amount of light emitted from the light emitting unit 60a is adjusted by the amplifier 60d so that the value of the electrical signal output from the light receiving element 60e in the total incident state becomes equal to or greater than a predetermined value. That is, the control unit 68 adjusts the slave amplifier so that the value of the electrical signal output from the light receiving element 60e becomes equal to or greater than the predetermined value while comparing the value of the electrical signal output from the light receiving element 60e with a predetermined value. 60d supplies power to the light emitting element 60c.

When the power supplied from the amplifier 60d to the light-emitting element 60c is appropriately adjusted, and the state of the amplifier 60d at this time is stored in the control unit 68 as a reference state, the initial adjustment step ends. The predetermined value used in the initial adjustment step is arbitrarily set within a range in which breakage of the cutting blade 44 can be appropriately detected, and is stored in the predetermined value storage unit 68c of the determination unit 68b in advance.

After the initial adjustment step, a cutting step of cutting the workpiece 11 with the cutting blade 44 is performed. FIG. 4(B) is a side view showing the cutting step, and FIG. 5 is a partial cross-sectional side view showing the cutting step. As shown in FIG. 4(B), in this cutting step, first, the opening and closing instruction portion 68 a positions the movable portion 50 at the closed position, and the cutting blade 44 is covered with the blade case 46 .

In this way, when the movable part 50 is positioned at the closed position, the cutting blade 44 is placed in the gap between the light emitting part 60a and the light receiving part 60b. Therefore, the light emitted from the light emitting unit 60 a of the breakage detection unit 60 is partially shielded by the cutting blade 44 . In this embodiment, the state in which the light emitted from the light emitting portion 60a is partially shielded by the cutting blade 44 is referred to as a partially shielded state.

In the cutting step of this embodiment, the workpiece 11 is cut while monitoring the value of the electrical signal output from the light receiving element 60e in this partially shielded state. Specifically, when the amplifier 60d is adjusted to the above-mentioned reference state, as shown in FIG. The processed object 11 is kept.

Thereby, cutting processing is performed on the workpiece 11 . In this cutting step, the workpiece 11 is cut while monitoring the value of the electrical signal output from the light-receiving element 60e in the above-mentioned partial shielding state. Therefore, it is possible to immediately find the cutting edge generated during the cutting process. 44 damage such as a notch.

FIG. 6(A) is a diagram illustrating an example of an electrical signal output from the light receiving element 60e in a partially shielded state. In addition, in FIG. 6(A), the state where the voltage is output as an electrical signal from the light receiving element 60e is illustrated. In the example of FIG. 6(A), at time t ₁ , a high voltage V ₁ exceeding the allowable range with respect to the average voltage V _a1 is output from the light receiving element 60 e. In such a situation, the judging unit 68b judges that the cutting blade 44 is broken.

Furthermore, when it is determined that the cutting blade 44 is damaged during this cutting step, it is preferable to interrupt or stop the cutting step and perform a cutting blade exchange step of exchanging the cutting blade 44 . Thereby, the possibility of the quality reduction of a cutting process due to the breakage of the cutting blade 44 can be suppressed low.

After the cutting step, for example, a blade position detection step of detecting the position of the blade edge of the cutting blade 44 is performed in order to correct a variation in the cutting depth due to wear of the cutting blade 44 or the like. In this blade position detection step, first, the opening/closing instructing portion 68a positions the movable portion 50 at the open position ( FIG. 4(A) ).

Next, the cutting unit 18 is lowered while emitting light from the light emitting unit of the blade position detecting unit 64 , and the cutting blade 44 is inserted between the light emitting unit and the light receiving unit of the blade position detecting unit 64 . Thereby, the position of the blade edge of the cutting blade 44 can be detected according to the change of the light receiving amount of the light receiving part of the blade position detecting unit 64 . The detected position of the cutting edge of the cutting blade 44 is used to correct deviations in the cutting depth of the cutting blade 44 .

In the blade position detection step of the present embodiment, by positioning the movable portion 50 at the open position, the blade cooling nozzle 54 and the like can be positioned sufficiently away from the cutting blade 44 . Therefore, when the cutting blade 44 enters between the light emitting unit and the light receiving unit of the insert position detecting unit 64 , the insert cooling nozzle 54 and the like do not interfere with the insert position detecting unit 64 .

After the movable part 50 is positioned at the open position in the blade position detection step, a readjustment step (ordinary readjustment step) for readjusting the state of the amplifier 60d is performed in synchronization with the blade position detection step. The specific process of the re-adjustment step is the same as the above-mentioned initial adjustment step.

Specifically, the amount of light emitted from the light emitting unit 60a is adjusted by the amplifier 60d so that the value of the electrical signal output from the light receiving element 60e in the above-mentioned full-incidence state becomes a predetermined value or more. That is, the control unit 68 adjusts the slave amplifier so that the value of the electrical signal output from the light receiving element 60e becomes equal to or greater than the predetermined value while comparing the value of the electrical signal output from the light receiving element 60e with a predetermined value. 60d supplies power to the light emitting element 60c.

When the power supplied from the amplifier 60d to the light-emitting element 60c is appropriately adjusted, and the state of the amplifier 60d at this time is stored in the control unit 68 as a reference state, the readjustment step ends. Furthermore, it is sufficient that the set value used in the readjustment step is the same as the set value used in the initial adjustment step. That is, even in this readjustment step, the predetermined value stored in advance in the predetermined value storage unit 68c is used.

In this way, by performing the readjustment step synchronously with the blade position detection step performed after the cutting step, for example, even in a situation where cutting chips and the like generated by the cutting process adhere to the surface of the light emitting part 60a or the light receiving part 60b, it is possible to The amount of light emitted from the light emitting unit 60a and incident on the light receiving unit 60b is maintained. Therefore, it is easy to properly determine damage such as chipping of the cutting blade 44 .

Also, in the present embodiment, the readjustment step is performed synchronously with the blade position detection step, so the time available for cutting the workpiece 11 (the cutting device 2's Substantial operating time) will not be shortened. In the blade position detection step and the readjustment step, the movable part 50 needs to be positioned at the open position, and these two steps cannot be performed simultaneously with the cutting process. Therefore, synchronously performing the blade position detection step and the readjustment step is very effective.

Furthermore, when the value of the electrical signal output from the light receiving element 60e drops to the lower limit of the allowable range during the above-mentioned cutting step, it is preferable to interrupt the lowering step and perform the readjustment step (temporary readjustment step). FIG. 6(B) is a graph showing how the electrical signal output from the light receiving element 60e decreases.

At this time, the determination unit 68b determines whether or not the value of the electrical signal output from the light receiving element 60e has decreased to a lower limit value during the execution of the cutting step. That is, the determination unit 68b performs the above determination by comparing the value of the electrical signal output from the light receiving element 60e with the lower limit value V ₂ previously stored in the lower limit value storage unit 68d. In addition, in FIG.6(B), the low voltage which exceeds the allowable range with respect to average electric power V _a2 is set as the lower limit value _V2 .

The specific flow of the readjustment step performed after the cutting step is interrupted is the same as the above-mentioned initial adjustment step. Specifically, first, the opening and closing instructing portion 68a positions the movable portion 50 at the open position. Then, the amount of light radiated from the light emitting unit 60a is adjusted by the amplifier 60d so that the value of the electrical signal output from the light receiving element 60e in the above-mentioned total incident state becomes a predetermined value or more.

That is, the control unit 68 adjusts the slave amplifier so that the value of the electrical signal output from the light receiving element 60e becomes equal to or greater than the predetermined value while comparing the value of the electrical signal output from the light receiving element 60e with a predetermined value. 60d supplies power to the light emitting element 60c. When the power supplied from the amplifier 60d to the light-emitting element 60c is appropriately adjusted, and the state of the amplifier 60d at this time is stored in the control unit 68 as a reference state, the readjustment step ends.

In addition, the set value used in this readjustment process should just be the same as the set value used in the initial stage adjustment process etc. That is, even in this readjustment step, the predetermined value stored in advance in the predetermined value storage unit 68c is used. In addition, after the readjustment step is completed, the cutting step may be restarted.

As described above, in the cutting blade management method of the present embodiment, after cutting the workpiece 11 with the cutting blade 44, the position of the blade edge of the cutting blade 44 consumed by the cutting is detected by the blade position detection means 64. , the amount of light emitted from the light emitting portion 60a of the breakage detection unit 60 will be adjusted again, so even if a little cutting chips adhere to the surfaces of the light emitting portion 60a and the light receiving portion 60b, the light emitted from the light emitting portion 60a can be kept incident on the light receiving portion. The amount of light from the portion 60b. Therefore, according to the management method of the cutting blade of this embodiment, it is possible to determine the damage of the cutting blade 44 more appropriately.

In addition, this invention is not limited to description of the said embodiment, It can change variously and can implement. For example, after (or after) the readjustment step (ordinary readjustment step, temporary readjustment step) in the above-mentioned embodiment, it is preferable to perform the adjustment amount determination step of judging whether the adjustment amount of the amplifier 60d has reached the limit. This adjustment amount determination step is performed by the determination unit 68b.

When it is determined that the adjustment amount of the amplifier 60d has not reached the limit, that is, when the amplifier 60d can be properly adjusted, the appropriate readjustment step (normal readjustment step, temporary readjustment step) can be continued. On the other hand, when it is determined that the adjustment amount of the amplifier 60d has reached the limit, for example, the operator of the cutting device 2 is notified of the fact. With this notification as an opportunity, the operator can clean the light emitting unit 60a and the light receiving unit 60b.

Also, in the initial adjustment step and the readjustment step of the aforementioned embodiment, the amount of light emitted from the light emitting unit 60a is adjusted so that the value of the electrical signal output from the light receiving element 60e becomes equal to or greater than a predetermined value. The amount of light emitted from the light emitting portion 60a may be adjusted so that the electrical signal output from the element 60e is greater than a predetermined value.

In addition, the structures, methods, and the like of the above-mentioned embodiments and modified examples can be appropriately changed and implemented as long as they do not depart from the scope of the object of the present invention.

2‧‧‧Cutting device 4‧‧‧Abutment 4a, 4b, 4c‧‧‧Opening 6‧‧‧Case elevator 8‧‧‧Case 10‧‧‧X-axis moving mechanism (processing feed unit) 10a‧ ‧‧Pedestal cover 11‧‧‧Workpiece 12‧‧‧Concertina cover 13‧‧‧Adhesive tape (cutting tape) 14‧‧‧Sucker table (holding table) 14a‧‧‧Holding surface 15‧‧‧ Frame 16‧‧‧Clamp 18‧‧‧Cutting Unit 20‧‧‧Supporting Structure 22‧‧‧Moving Mechanism of Cutting Unit (Indexing Feeding Unit, Tooling Unit) 24‧‧‧Y-axis Guide Rail 26‧‧ ‧Y-axis moving plate 28‧‧‧Y-axis ball screw 30‧‧‧Z-axis guide rail 32‧‧‧Z-axis moving plate 34‧‧‧Z-axis ball screw 36‧‧‧Z-axis pulse motor 38‧‧‧ Spindle housing 40‧‧‧Spindle 42‧‧‧Knife seat 44‧‧‧Cutting tool 46‧‧‧Knife holder 48‧‧‧Fixed part 50‧‧‧Moving part 52‧‧‧Air cylinder 54‧‧‧Blade cooling Nozzles 56, 58 ‧‧‧connector 60‧‧‧damage detection unit 60a‧‧‧light emitting part 60b‧‧‧light receiving part 60c‧‧‧light emitting element 60d‧‧‧amplifier (adjustment part) 60e‧‧‧light receiving element ( Photoelectric conversion unit) 62‧‧‧camera unit (camera) 64‧‧‧blade position detection unit 66‧‧‧cleaning unit 68‧‧‧control unit 68a‧‧‧opening and closing instruction unit 68b‧‧‧judgment unit 68c‧‧ ‧Set value storage unit 68d‧‧‧lower limit value storage unit

[ Fig. 1 ] A perspective view showing a structural example of a cutting device. [Fig. 2] A perspective view showing a structural example of a cutting unit and the like. [Fig. 3] A schematic diagram showing a structural example of a cutting unit and the like. [Fig. 4] Fig. 4(A) is a side view showing the initial adjustment step, etc., and Fig. 4(B) is a side view showing the cutting step, etc. [Fig. 5] Partial sectional side view showing cutting steps etc. [Fig. 6] Fig. 6(A) is a graph showing an example of the electrical signal output from the light receiving element in a partially shielded state, and Fig. 6(B) is a graph showing how the value of the electrical signal output from the light receiving element decreases chart.

2‧‧‧Cutting device

4‧‧‧Abutment

4a, 4b, 4c‧‧‧opening

6‧‧‧Case elevator

8‧‧‧Crystal box

10‧‧‧X-axis moving mechanism

10a‧‧‧pedestal cover

11‧‧‧processed object

12‧‧‧Concertina-shaped cover

13‧‧‧Adhesive Tape

14‧‧‧Suction cup table

14a‧‧‧Retaining surface

15‧‧‧Framework

16‧‧‧Clamp

18‧‧‧Cutting unit

20‧‧‧Support structure

22‧‧‧Moving mechanism of cutting unit

24‧‧‧Y-axis guide track

26‧‧‧Y-axis moving plate

28‧‧‧Y-axis ball screw

30‧‧‧Z-axis guide track

32‧‧‧Z-axis moving plate

34‧‧‧Z-axis ball screw

36‧‧‧Z axis pulse motor

38‧‧‧Spindle housing

60‧‧‧Damage detection unit

62‧‧‧camera unit

64‧‧‧Blade position detection unit

66‧‧‧Cleaning unit

68‧‧‧Control Unit

Claims (5)

A cutting tool management method, which manages cutting tools installed in a cutting device; A fixed portion fixed to the cutting unit, and a movable portion that moves between an open position and a closed position for the fixed portion, covers a part of the cutting blade when the movable portion is positioned at the closed position, and the movable portion is positioned at the closed position. The cutter holder which exposes the part of the cutting blade in the state where the cutting blade is positioned at the open position is installed on the movable part, and the light-emitting part and the light-receiving part which are opposed to each other across the gap where the cutting blade penetrates will emit light into the The photoelectric conversion unit that converts the light from the light receiving unit into an electrical signal corresponding to the value of the light quantity, the adjustment unit that adjusts the quantity of light emitted from the light emitting unit, and the blade position that detects the position of the blade edge of the cutting blade A detection unit, and a nozzle for supplying cutting fluid to the workpiece; it is characterized by: an initial adjustment step, when the movable part is positioned at the open position, and the light emitted from the light-emitting part is not blocked by the cutting blade, the In the state of total incidence into the light-receiving part, the adjustment part is used to adjust the intensity of the light emitted from the light-emitting part in such a way that the value of the electrical signal output from the photoelectric conversion part becomes more than a predetermined value or greater than the predetermined value. Quantity; cutting step, after implementing the initial adjustment step, when the movable part is positioned at the closed position, the light emitted from the light emitting part is partially shielded by the part of the cutting blade, while the workpiece is processed supply the Cutting the workpiece with the cutting tool while the cutting fluid is cutting, and monitoring the value of the electrical signal; and the step of detecting the position of the blade is after the cutting step is performed, and after the movable part is positioned at the open position, the The cutting blade approaches the blade position detection unit to detect the position of the blade edge of the cutting blade consumed by the cutting step; after positioning the movable part at the open position in the blade position detection step, the full injection is performed In the normal state, the value of the electrical signal output from the photoelectric conversion part becomes more than or greater than the predetermined value, and the adjustment part is used to readjust the amount of light emitted from the light emitting part. ; The readjustment step is performed synchronously with the blade position detection step performed after the cutting step. The cutting tool management method described in Claim 1, wherein, when the value of the electrical signal monitored during the cutting step drops to a lower limit value, the cutting step is interrupted and the movable part is interrupted. Positioned at the open position, and in the full-incidence state, the value of the electrical signal output from the photoelectric conversion part becomes more than the predetermined value or greater than the predetermined value, and the adjustment part is used to adjust the light emission from the light source again. Temporary readjustment of the amount of light emitted from the part. The cutting tool management method described in claim 1 or claim 2, wherein the value of the electrical signal output from the photoelectric conversion unit becomes equal to or greater than the predetermined value, using the When the adjustment unit readjusts the amount of light emitted from the light emitting unit, an adjustment amount determination step of determining whether the adjustment amount of the adjustment unit has reached a limit is performed. A cutting device, characterized by comprising: a suction cup table holding a workpiece; a cutting unit including a main shaft on which a cutting knife for cutting the workpiece is mounted; a tool holder including a fixing portion fixed to the cutting unit , and the movable part that moves between the open position and the closed position for the fixed part covers a part of the cutting blade when the movable part is positioned at the closed position, and when the movable part is positioned at the open position In this state, the part of the cutting blade is exposed; the light-emitting part and the light-receiving part are arranged on the movable part, and they face each other with the gap in which the cutting blade penetrates; , which is converted into an electrical signal corresponding to the value of the amount of light; the adjustment part is to adjust the amount of light emitted from the light emitting part; the blade position detection unit is to detect the position of the blade edge of the cutting knife; the nozzle is to the The workpiece is supplied with cutting fluid; and The control unit controls each constituent element; the control unit includes: an opening and closing control part, which performs control to position the movable part at the open position or the closed position; and a determination part, which locates the movable part at the open position position, and the light radiated from the light-emitting part is not blocked by the cutting blade, and enters the light-receiving part in the full-incidence state, and determines whether the value of the electrical signal output from the photoelectric conversion part becomes a predetermined value or greater The predetermined value; in the state of full incidence, when it is determined that the value of the electrical signal output from the photoelectric conversion part is not above the predetermined value or greater than the predetermined value, then in the state of total incidence, the photoelectric signal from the photoelectric In such a way that the value of the electrical signal output by the conversion part becomes above the predetermined value or greater than the predetermined value, the adjustment part is used to adjust the amount of light emitted from the light emitting part; the adjustment of the light amount of the adjustment part is related to the The detection of the position of the blade edge of the cutting blade performed after the workpiece is cut is performed simultaneously. The cutting device described in claim 4 of the scope of the patent application, wherein the judging part is in a partially shielded state in which the movable part is positioned at the closed position and the light emitted from the light emitting part is partially shielded by the cutting blade , to determine whether the value of the electrical signal output from the photoelectric conversion unit has decreased to the lower limit value; in the partially shielded state, when it is determined that the value of the electrical signal output from the photoelectric conversion unit has decreased to the lower limit value, Then, in the full-incidence state, the value of the electrical signal output from the photoelectric conversion part becomes more than the predetermined value or greater than the predetermined value, the adjustment unit is used to adjust the amount of light emitted from the light emitting unit.

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