TWI748549B - Electrical inspection device and holding unit - Google Patents

Abstract

The subject of the present invention is to provide an electrical inspection device that can easily improve the efficiency of electrical inspection of an inspection target substrate. An electrical inspection device of one aspect of the present invention includes: an electrical inspection head 11 having a plurality of probes 11a capable of contacting the inspection target substrate P from the normal direction of the inspection target substrate P; a switching unit 12 having It can switch the circuit connected with a plurality of probes 11a; and the bearing 13, which supports the electrical inspection head 11 and the switching unit 12, so that it can rotate around an axis parallel to the normal line of the inspection target substrate P; and electrical inspection The head 11 and the switching unit 12 are directly connected in the normal direction of the inspection target substrate P so as to be detachable.

Description

Electricity inspection device and holding unit

The invention relates to an electrical inspection device and a holding unit.

In the manufacturing site of printed circuit boards, etc., an electrical inspection device is used. The electrical inspection device makes a plurality of probes (electric contacts) contact the measurement points of the inspection target substrate to inspect the electrical characteristics of the inspection target substrate.

As the electrical inspection device, there is known an electrical inspection head having a plurality of probes and a switching unit having a circuit capable of switching connections with the plurality of probes. The electrical inspection device can efficiently inspect the electrical characteristics of the inspection target substrate by using the switching unit to switch the electrical connection with the plurality of probes in a manner corresponding to the conductive pattern of the inspection target substrate.

As this type of electrical inspection device, there is proposed one having a holding portion that holds an inspection jig having a plurality of probes, and a selective member capable of switching the electrical connection with the plurality of probes (refer to Japanese Patent Laid-Open) Bulletin No. 2008-175595). The electrical inspection device described in the bulletin The holding portion is configured to be rotatable about a rotation axis parallel to the normal line of the inspection target substrate.

[Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2008-175595

The electrical inspection device described in the above publication can rotate the inspection jig and the selection member integrally with the holding portion by rotating the holding portion.

However, in this electrical inspection device, the selection member is held by the holding portion at a radially outer side of the rotating shaft than the inspection jig. Therefore, in the electrical inspection device, the moment of inertia generated by the rotation of the selected member becomes larger, and it is difficult to increase the rotation speed of the inspection jig. As a result, it is difficult for the electrical testing device described above to sufficiently improve the electrical testing efficiency. In addition, in the electrical inspection device, since the selected member is held on the radially outer side of the rotating shaft than the inspection jig, a relatively large space for avoiding interference is required when the selected member is rotated. Furthermore, in the above-mentioned electrical inspection device, the moment of inertia generated by the rotation of the selected member is likely to increase, and it is easy to apply a load to each part due to the rotation.

The subject of the present invention is to provide an electrical inspection device and a holding unit that can easily improve the efficiency of electrical inspection of an inspection target substrate.

An electrical inspection device of one aspect of the present invention completed to solve the above-mentioned problems includes: an electrical inspection head having a plurality of probes capable of contacting the inspection target substrate from the normal direction of the inspection target substrate; a switching unit, It has a circuit capable of switching the connection with the plurality of probes; and a bearing, which supports the electrical inspection head and the switching unit so that it can rotate around an axis parallel to the normal; and the electrical inspection head and the switch The unit is directly connected in the normal direction described above in a removable manner.

Alternatively, the electrical inspection head and the switching unit are included in the inner periphery of the bearing in a plan view.

Alternatively, the switching unit may be arranged in a state of penetrating the bearing in the normal direction.

Alternatively, the electrical inspection device may include a housing including a cylindrical main body portion having a central axis parallel to the normal line, and a bottom portion provided at the end of the main body portion on the side of the inspection target substrate The bottom portion has an opening through which the switching unit penetrates, and the bearing supports an end portion on the inspection target substrate side of the outer peripheral surface of the main body portion.

Alternatively, the electrical inspection device may further include a driving mechanism capable of three-dimensionally positioning the electrical inspection head.

The holding unit of another aspect of the present invention is provided with: a housing capable of connecting the electrical inspection head with The switching unit is directly connected in the normal direction. The electrical inspection head has a plurality of probes capable of contacting the inspection target substrate from the normal direction of the inspection target substrate. The connecting circuit of the probe; and the bearing, which supports the above-mentioned housing so that it can rotate around an axis parallel to the above-mentioned normal.

The electrical inspection device of one aspect of the present invention and the holding unit of another aspect of the present invention can easily improve the efficiency of the electrical inspection of the inspection target substrate.

1: body

2: drive mechanism

3: holding unit

11: Electrical inspection head

11a: Probe

11b: Holding part

11c: end face

11d: Opposite surface

11e: Through hole

12: Switching unit

12a: end face

12b: Switching circuit

12c: Contact

12d: spring

13: Bearing

14: Shell

14a: Main body

14b: bottom

14c: Lid

14d: Support Department

14e: Enlarging part

14f: opening

14g: guide wall

14h: hook

15: Frame

21: fixed track

22: Slider

23: movable track

24: The first moving body

25: The second moving body

25a: opening

33: Bearing

34: shell

34a: main body

34b: bottom

34c: Lid

34d: Support Department

A: axis

P: Inspection target substrate

Fig. 1 is a schematic partial cross-sectional perspective view showing an electrical inspection device according to an embodiment of the present invention.

Fig. 2 is a partial cross-sectional front view of Fig. 1;

Figure 3 is a bottom view of the body of Figure 1;

Fig. 4 is a schematic plan view showing a driving mechanism capable of driving the main body of Fig. 1;

Fig. 5 is a schematic cross-sectional view showing the connection structure of the inspection head and the switching unit of the main body of Fig. 1.

Fig. 6 is a schematic cross-sectional view corresponding to Fig. 2 showing a body having a different form from the body of Fig. 1;

Hereinafter, the embodiments of the present invention will be described in detail with reference to appropriate drawings.

[First Embodiment]

<Electrical Inspection Device>

As shown in FIGS. 1 to 3, the electrical inspection apparatus includes: an electrical inspection head 11 having a plurality of probes 11a that can contact the inspection target substrate P from the normal direction of the inspection target substrate P; a switching unit 12 , Which has a circuit capable of switching the connection with a plurality of probes 11a (hereinafter, also referred to as "switching circuit"); and a bearing 13, which supports the electrical inspection head 11 and the switching unit 12, so that it can go around the inspection object The normal to the substrate P is parallel to the axis rotating. In addition, the electrical inspection device includes a housing 14 that holds the electrical inspection head 11 and the switching unit 12. The electrical inspection head 11, the switching unit 12, the bearing 13 and the housing 14 constitute the main body 1 of the electrical inspection device. In addition, the bearing 13 and the housing 14 themselves constitute the holding unit 3 as one aspect of the present invention. Furthermore, as shown in FIG. 4, this electrical inspection apparatus is equipped with the drive mechanism 2 which can position the electrical inspection head 11 three-dimensionally. In addition, the electrical inspection device is equipped with a drive source (not shown) such as a motor that rotates the electrical inspection head 11 and the switching unit 12 around the central axis of the bearing 13 (hereinafter, also referred to as "axis A"), A measuring part (not shown) that can measure the conduction or insulation of the conductive pattern of the inspection target substrate P, resistance, impedance, etc., and the frame 15 that can fix the outer ring of the bearing 13. The above-mentioned driving source rotates the housing 14 so that the electrical inspection head 11 and the switching unit 12 held in the housing 14 rotate integrally with the housing 14. Furthermore, the electrical inspection apparatus may further include: an image processing device (not shown) that acquires position information of the inspection target substrate P, and a drive mechanism 2 that drives and controls the drive mechanism based on the position information acquired by the image processing device. A controller (not shown), and a transport mechanism (not shown) that transports the inspection target substrate P to a position opposed to the plurality of probes 11a.

(Substrate to be inspected)

The inspection target substrate P has a plate shape or a sheet shape. As the inspection target substrate P, for example, printing Brush the substrate. As the printed circuit board, for example, a plurality of functional parts can be formed on a film-like substrate, and a part including each functional part can be cut out to form a plurality of electronic components.

(Electrical inspection head)

The electrical inspection head 11 has a plurality of probes 11a and a holding portion 11b that holds the plurality of probes 11a. The holding portion 11b has a bottom surface facing the substrate P to be inspected. A plurality of probes 11a protrude from the bottom surface to the inspection target substrate P side. The plurality of probes 11a are arranged so as to be able to contact the conductive pattern of the inspection target substrate P. The plural probes 11a are arranged at a distance between about 0.1 mm and about 2 mm or less, for example. As the total number of the plural probes 11a, for example, it can be 2000 or more.

(Switching unit)

The switching unit 12 has a switching circuit (not shown in FIGS. 1 to 3) capable of switching the connection between the plurality of probes 11a and the measurement unit according to the type of the inspection target substrate P or the inspection item. The switching unit 12, for example, selectively turns ON the electrical connection of one or a plurality of probes 11a selected according to the conductive pattern of the inspection target substrate P and the measurement section. The switching unit 12, for example, selectively turns on the electrical connection between one or more probes 11a selected by a control unit (not shown) including a computer and the measurement unit in accordance with the instruction of the control unit.

(case)

The casing 14 includes a cylindrical main body portion 14a having a central axis parallel to the normal line of the inspection target substrate P, and a bottom portion 14b provided at the end of the main body portion 14a on the inspection target substrate P side. In addition, the housing 14 has a cover portion 14c provided on the end of the main body portion 14a opposite to the inspection target substrate P, and a support portion 14d provided on the bottom portion 14b and detachably supporting the electrical inspection head 11. Again In addition, the main body part 14a, the bottom part 14b, the cover part 14c, and the support part 14d are mutually attachable and detachable, and may not be attachable and detachable, and they may be integrally formed.

The main body portion 14a has an enlarged diameter portion 14e at an end portion on the side of the inspection target substrate P. The main body 14a is preferably cylindrical. The central axis of the main body 14a coincides with the axis A of the bearing 13. The main body 14a has a receiving space for accommodating the switching unit 12 inside.

The bottom 14b has a plate shape, preferably a circular plate shape. The bottom portion 14b closes the end opening of the main body portion 14a on the inspection target substrate P side. The bottom portion 14b is arranged to be perpendicular to the central axis of the main body portion 14a. The bottom 14b has an opening 14f through which the switching unit 12 passes. The opening 14f is, for example, a rectangular shape having a pair of opposed side edges. Furthermore, the housing 14 may have a fixing portion (not shown) that fixes the switching unit 12 in a state where it penetrates the opening 14f.

The support portion 14d has a pair of guide walls 14g mounted on the bottom surface of the bottom 14b (surface on the side opposite to the inspection target substrate P), and mounted on the bottom surface of the guide walls 14g, from the bottom to the inspection target substrate P side One pair of hooks protruded for 14h. The pair of guide walls 14g extend in the left-right direction (direction perpendicular to the normal line of the inspection target substrate P) along the pair of side edges of the opening 14f. A pair of guide walls 14g supports the electrical inspection head 11 from both sides. The pair of hooks 14h is configured to be able to sandwich the electrical inspection head 11 from both sides. The pair of hooks 14h are configured to be able to move relative to the guide wall 14g in the direction of the central axis of the main body 14a (that is, the normal direction of the inspection target substrate P) in a state where the electrical inspection head 11 is sandwiched.

〔Connection structure〕

Hereinafter, the connection structure of the electrical inspection head 11 and the switching unit 12 will be described in detail. Electricity The sexual inspection head 11 and the switching unit 12 are directly connected in the normal direction of the inspection target substrate P so as to be detachable.

〈Loading and unloading mechanism〉

1 and 2, the assembly and disassembly mechanism of the electrical inspection head 11 and the switching unit 12 will be described. First, the switching unit 12 is fixed to the casing 14 in a state of penetrating the opening 14f of the bottom 14b of the casing 14. In this fixed state, the end surface 12a of the switching unit 12 opposite to the inspection target substrate P is held in a state protruding from the bottom 14b of the housing 14 to the inspection target substrate P side. In the above-mentioned fixed state, the end surface 12a of the switching unit 12 is parallel to the bottom surface of the bottom portion 14b. In the above-mentioned fixed state, the portion of the switching unit 12 that is closer to the opposite side of the inspection target substrate P than the opening 14f is located in the main body portion 14a of the casing 14 (in the above-mentioned accommodating space).

Next, the electrical inspection head 11 is clamped by a pair of hooks 14h in the fixed state of the switching unit 12 described above. The electrical inspection head 11 is clamped by the pair of hooks 14h by sliding between the pair of hooks 14h along the length direction of the pair of guide walls 14g (the direction in which the pair of guide walls 14g extend). In addition, the pair of hooks 14h are moved toward the switching unit 12 with the electrical inspection head 11 clamped, and the end surface 12a of the switching unit 12 and the end surface 11c of the electrical inspection head 11 opposite to the switching unit 12 are moved. (In more detail, the end surface 11c of the holding portion 11b opposite to the switching unit 12) is pressed against. In this way, the electrical inspection head 11 is connected to the switching unit 12. Furthermore, when removing the electrical inspection head 11 from the switching unit 12, move the pair of hooks 14h to the opposite side of the switching unit 12, and then pull out the electrical inspection head 11 from the pair of hooks 14h. In this electrical inspection apparatus, the electrical inspection head 11 can be easily attached and detached from the switching unit 12 so that the electrical inspection head 11 can be easily replaced in accordance with the type of the inspection target substrate P and the like.

〈Electrical connection structure〉

Next, the electrical connection structure of the electrical inspection head 11 and the switching unit 12 will be described. In the electrical inspection device, the electrical inspection head 11 and the switching unit 12 are directly connected. In other words, the electrical inspection device presses the electrical inspection head 11 and the switching unit 12 against each other while simultaneously electrically connecting the plurality of probes 11a and the switching circuit capable of switching the electrical connections with the plurality of probes 11a. Sexual connection.

5, the electrical connection structure of the electrical inspection head 11 and the switching unit 12 will be described in detail. As shown in FIG. 5, the electrical inspection head 11 has a plurality of pins 11d protruding from the end surface 11c facing the switching unit 12 toward the switching unit 12 side. The pin 11d penetrates the through hole 11e provided in the end surface 11c, and is hold|maintained by the holding part 11b. The pins 11d are connected to the probes 11a on a one-to-one basis.

In addition, the switching unit 12 has: a plurality of contacts 12c corresponding to the plurality of pins 11d one-to-one in the normal direction of the inspection target substrate P; Spring 12d. The switching circuit 12b has contacts corresponding to the plurality of pins 11d one-to-one. The contact 12c is electrically connected to the aforementioned contact of the switching circuit 12b in a state where the spring 12d resists the restoring force and is compressed.

In the electrical inspection device, the end face 12a of the switching unit 12 is pressed against the end face 11c of the electrical inspection head 11, so that the pin 11d pushes the contact 12c. Thereby, the contact 12 is pressed into the side of the switching circuit 12b, and the probe 11a is electrically connected to the switching circuit 12b. This electrical inspection device does not have electrical wiring such as a flexible substrate or a lead wire between the spring 12d and the switching circuit 12b. In this electrical test In the inspection device, by pressing the contact 12c with the pins 11d, the electrical inspection head 11 and the switching unit 12 can be easily directly connected in the normal direction of the inspection target substrate P.

Furthermore, as the electrical connection structure between the probe 11a and the switching circuit 12b, for example, a slot (not shown) can be provided on the end surface 12a of the switching unit 12 and the slot is embedded with a plurality of pins 11d. The structure of electrical connection.

(Bearing)

The bearing 13 supports the main body 14a of the housing 14. The center axis (axis A) of the bearing 13 is arranged parallel to the normal line of the substrate P to be inspected. Preferably, the bearing 13 and the substrate P to be inspected are provided close to each other. The upper limit of the distance between the bearing 13 and the inspection target substrate P is preferably 180 mm, more preferably 125 mm, and still more preferably 100 mm. By setting the above distance to be equal to or less than the above upper limit, the positional deviation of the plurality of probes 11a with respect to the measurement point of the inspection target substrate P due to the inclination of the bearing 13 can be sufficiently reduced. Thereby, the electrical inspection device can sufficiently improve the electrical inspection accuracy of the inspection target substrate P. On the other hand, the lower limit of the distance is not particularly limited. For example, from the viewpoint of suppressing accidental contact between the plurality of probes 11a and the inspection target substrate P, it can be set to 10 mm. Furthermore, the so-called "distance between the bearing and the inspection target substrate" refers to the average distance between the bearing and the measurement point of the inspection target substrate, for example, the distance between the bearing in the normal direction of the inspection target substrate and any 5 measurement points average value.

The bearing 13 supports the outer peripheral surface of the main body portion 14a. The bearing 13 supports the end of the inspection target substrate P side of the outer peripheral surface of the main body portion 14a, and more specifically, supports the outer peripheral surface of the enlarged diameter portion 14e of the main body portion 14a. In this electrical inspection device, the inspection target substrate P of the main body 14a is supported by the bearing 13 It is easy to reduce the distance between the bearing 13 and the substrate P to be inspected. In addition, in this electrical inspection device, since the bearing 13 supports the outer peripheral surface of the enlarged diameter portion 14e, the diameter of the bearing 13 becomes larger, and the rotation angle around the axis A is easily adjusted with high accuracy, and it is easy to adjust the rotation angle with respect to the inspection object with high accuracy. A plurality of probes 11a are positioned on the substrate P.

The outer ring of the bearing 13 is fixed to the frame 15. Specifically, the outer ring of the bearing 13 is fixed to the frame 15 by a plurality of screws.

As shown in FIGS. 1 to 3, in the electrical inspection device, the electrical inspection head 11 and the switching unit 12 are included in the inner periphery of the bearing 13 in a plan view. Specifically, the switching unit 12 is fixed to the housing 14 in a state of being fitted into the opening 14f on the side of the end face 12a facing the inspection target substrate P. In the electrical inspection device, the electrical inspection head 11 and the switching unit 12 are included in the inner periphery of the bearing 13 in a plan view, and the mass of the electrical inspection head 11 and the switching unit 12 is easily concentrated on the central axis of the main body 14a nearby. Thereby, the electrical inspection device can make the electrical inspection head 11 and the switching unit 12 rotate with a small moment of inertia, the eccentricity is reduced, and the rotation is stable. As a result, it is possible to position a plurality of probes 11a with respect to the inspection target substrate P with high accuracy and speed.

The switching unit 12 is arranged in a state of penetrating the bearing 13 in the normal direction of the inspection target substrate P. In more detail, the switching unit 12 penetrates the inner peripheral edge of the bearing 13 on the side of the end face 12a facing the inspection target substrate P. In this electrical inspection device, the switching unit 12 penetrates the bearing 13 so that the bearing 13 can be easily brought close to the substrate P to be inspected. Thereby, the electrical inspection device can sufficiently improve the accuracy of the electrical inspection.

(Drive mechanism)

As the driving mechanism 2, an orthogonal coordinate system is used. As shown in Fig. 4, the driving mechanism 2 has: a fixed rail 21 extending in the X-axis direction perpendicular to the Z-axis (axis parallel to the axis A in Fig. 1), and a pair of fixed rails 21 that respectively move on a pair of fixed rails 21 Slider 22, a pair of movable rails 23 in the Y-axis direction perpendicular to the Z-axis direction and the X-axis direction between a pair of sliders 22, and a first moving body 24 movable on the pair of movable rails 23 , And a second moving body 25 connected to the first moving body 24 and having an opening 25a into which the housing 14 is inserted. The second moving body 25 holds the housing 14 so as to be able to move in a direction parallel to the Z axis. In this electrical inspection device, the drive mechanism 2 can position the electrical inspection head 11 three-dimensionally, so that a plurality of probes 11a can be easily aligned at a desired measurement point.

The electrical inspection apparatus is configured to be able to perform three-dimensional positioning of the electrical inspection head 11 by the drive mechanism 2, and furthermore, can rotate the electrical inspection head 11 around the axis A by the above-mentioned drive source. The rotation angle of the electrical inspection head 11 around the axis A is not particularly limited, and preferably exceeds 360°. In the electrical inspection device, since the electrical inspection head 11 and the switching unit 12 are directly connected in the normal direction of the inspection target substrate P, the avoidance of rotating the electrical inspection head 11 and the switching unit 12 can be reduced. Space for interference. Therefore, the electrical inspection device can easily increase the rotation angle of the electrical inspection head 11 around the axis A.

<Advantages>

In this electrical inspection device, since the electrical inspection head 11 and the switching unit 12 are directly connected in the normal direction of the inspection target substrate P, the electrical inspection head 11 and the switching unit 12 can be rotated with a small moment of inertia. It is possible to position a plurality of probes 11a with respect to the inspection target substrate P quickly and with high accuracy. Therefore, the electrical inspection device can easily improve the electrical inspection of the inspection target substrate P. Check efficiency. In addition, in this electrical inspection apparatus, since the electrical inspection head 11 and the switching unit 12 can be rotated with a small moment of inertia, the load on each part due to the rotation can be reduced. Furthermore, in the electrical inspection device, since the electrical inspection head 11 and the switching unit 12 are directly connected, the reliability of the electrical connection can be improved, and the increase in the number of parts can be suppressed, and the miniaturization of the device can be achieved.

<Holding Unit>

As shown in Figures 1 and 2, the holding unit 3 includes a housing 14 that can hold the electrical inspection head 11 and the switching unit 12 in a state of being directly connected in the normal direction of the inspection target substrate P, and the electrical The sexual inspection head 11 has a plurality of probes 11a that can contact the inspection target substrate P from the normal direction of the inspection target substrate P, the switching unit 12 has a circuit that can switch the connection with the plurality of probes 11a; and a bearing 13, It supports the housing 14 so that it can rotate about an axis A parallel to the normal line of the substrate P to be inspected.

<Advantages>

Since the holding unit 3 can hold the electrical inspection head 11 and the switching unit 12 in a state where the electrical inspection head 11 and the switching unit 12 are directly connected in the normal direction of the inspection target substrate P, it can make the electrical inspection head 11 and the switching unit 12 have a small inertia. With moment rotation, it is possible to position a plurality of probes 11a with respect to the inspection target substrate P quickly and with high accuracy. Therefore, the holding unit 3 can easily improve the electrical inspection efficiency of the inspection target substrate P.

[Other embodiments]

The above-mentioned embodiment does not limit the structure of the present invention. Therefore, it should be understood that the above In the embodiment, the omission, replacement or addition of the constituent elements of each part of the above-mentioned embodiment can be performed based on the description of this specification and technical common sense, and all of these are within the scope of the present invention.

For example, as shown in FIG. 6, the electrical inspection device may also adopt a configuration in which the electrical inspection head 11 and the switching unit 12 are not enclosed in the inner periphery of the bearing 33 in a plan view. In the electrical inspection device of FIG. 6, the housing 34 includes a cylindrical main body portion 34a having a central axis parallel to the normal line of the inspection target substrate P, and an end portion provided on the inspection target substrate P side of the main body portion 34a The bottom part 34b, the cover part 34c provided at the end of the main body part 34a opposite to the inspection target substrate P, and the support part 34d provided at the bottom part 34b and supporting the electrical inspection head 11 detachably. In this electrical inspection device, a bearing 33 is arranged on the outer surface of the cover portion 34c. The electrical inspection device is the same as the electrical inspection device in FIG. 1, by directly connecting the electrical inspection head 11 and the switching unit 12, the reliability of the electrical connection can be improved. In addition, the electrical inspection device can easily concentrate the mass of the electrical inspection head 11 and the switching unit 12 near the central axis of the main body 34a, so that the electrical inspection head 11 and the switching unit 12 can rotate with a small moment of inertia and be eccentric It becomes smaller and rotates steadily. Furthermore, in this electrical inspection device, since the bearing 33 is arranged on the outer surface of the cover portion 34c, the size of the device can be easily reduced.

The above-mentioned switching unit does not need to be arranged in a state that penetrates the bearing along the normal direction of the inspection target substrate. For example, the electrical inspection device may also be an electrical inspection head arranged in a state where the electrical inspection head penetrates the bearing along the normal direction of the substrate to be inspected. According to this structure, it is easy to reduce the distance between the bearing and the substrate to be inspected. Moreover, as shown in FIG. 6, the electrical inspection device may also adopt a configuration in which neither the electrical inspection head 11 nor the switching unit 12 penetrates the bearing 33.

The specific structure of the above-mentioned housing is not limited to the structure of the above-mentioned embodiment. For example, the above It is not necessary for the main body part to have an enlarged diameter part at the end part of the board|substrate side of inspection object. In addition, the housing may be configured to be able to hold a plurality of electrical inspection heads and/or a plurality of switching units. For example, the casing may have a cylindrical main body and a bottom portion of an end of the main body on the inspection target substrate side, and a plurality of openings through which a plurality of switching units can penetrate are formed in the bottom portion. Furthermore, a frame in which a plurality of frames are combined may be used instead of the above-mentioned casing.

The specific configuration of the above-mentioned drive mechanism is not limited to the configuration of the above-mentioned embodiment. For example, an articulated robot can also be used as the above-mentioned drive mechanism.

[Industrial availability]

As explained above, the electrical inspection device of one aspect of the present invention is suitable for electrical inspection of printed circuit boards.

1: body

3: holding unit

11: Electrical inspection head

11a: Probe

11b: Holding part

11c: end face

12: Switching unit

12a: end face

13: Bearing

14: Shell

14a: Main body

14b: bottom

14c: Lid

14d: Support Department

14e: Enlarging part

14f: opening

14g: guide wall

14h: hook

15: Frame

A: axis

P: Inspection target substrate

Claims (6)

An electrical inspection device comprising: an electrical inspection head having a plurality of probes capable of contacting the inspection target substrate from the normal direction of the inspection target substrate; Connected circuit; housing, which can hold the electrical inspection head and the switching unit in a state of being directly connected in the normal direction; and a bearing, which supports the housing so that it can be wound parallel to the normal The shaft rotates; the electrical inspection head and the switching unit are detachably directly connected in the normal direction. The electrical inspection device of claim 1, wherein the electrical inspection head and the switching unit are contained in the inner periphery of the bearing in a plan view. According to the electrical inspection device of claim 2, wherein the switching unit is arranged in a state of penetrating the bearing in the normal direction. The electrical inspection device of claim 3, wherein the housing includes a cylindrical main body portion having a central axis parallel to the normal line, and a bottom portion of the end portion of the inspection target substrate provided on the main body portion, the The bottom has an opening through which the switching unit penetrates, and the bearing supports the end of the inspection target substrate side of the outer peripheral surface of the main body. Such as the electrical inspection device of any one of claims 1 to 4, which further includes a driving mechanism capable of three-dimensional positioning of the electrical inspection head. A holding unit is provided with a housing capable of holding an electrical inspection head and a switching unit in a state of being directly connected in a normal direction, and the electrical inspection head is capable of contacting the inspection target substrate in the normal direction. A plurality of probes of the inspection target substrate, the switching unit having a circuit capable of switching the connection with the plurality of probes; and a bearing, which supports the housing so that it can rotate around an axis parallel to the normal.

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