JP2018179619A - Probe unit and printed wiring board inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe unit capable of moving a probe at high speed while miniaturizing the probe unit. The present invention is a probe unit in a printed wiring board inspection apparatus, comprising a first fixed node, a first link connected to the first fixed node, a first link and a first movable node. A linkage part having a second link connected via the second link, a third link connected to the second link via the second movable node, and a second fixed node connected to the third link. A voice coil motor connected to the first movable node with a probe support part for supporting the probe and the first fixed node via a connecting shaft, wherein And a voice coil motor connected to the connecting shaft so as to rotate the connecting shaft by moving the connecting shaft. To. [Selection diagram] Figure 1

Description

  The present invention relates to a printed wiring board inspection device and a probe unit in the device.

  The printed wiring board has a circuit electrically connected to a substrate of an insulator, and in recent years, the circuit of the printed wiring board has been miniaturized along with the improvement of the semiconductor manufacturing technology. The circuit of the printed wiring board manufactured is subjected to an inspection of electrical characteristics such as a continuity test and an insulation test.

  Generally, the inspection device of a printed wiring board is performed by bringing the probe main body into contact with the inspection pad of the printed wiring board when the inspection of the electrical characteristics is performed. In the inspection apparatus, the probe main body is moved in the parallel direction (XY direction) with respect to the printed wiring board, and then the probe main body is moved in the perpendicular direction (Z direction) with respect to the printed wiring board. A movable probe system for contacting an inspection pad is widely known. The moving mechanism of the probe unit of the inspection apparatus for the printed wiring board of the movable probe method is often made of a motor (servo motor or stepping motor), linear slide, timing belt, ball screw, etc. is there.

  For example, in the patent document 1, the applicant of the present invention is a print including a probe unit provided with two types of moving means, coarse movement means and fine movement means, in order to operate in the Z direction (perpendicular to the printed wiring board). We propose a board inspection system. Here, a stepping motor, a belt drive mechanism, etc. are used as the coarse movement means, and a linear motor is used as the fine movement means.

Unexamined-Japanese-Patent No. 11-145582

  By the way, the increase in inspection time has become remarkable with the increase in the number of inspection points in the highly integrated printed wiring board in recent years. The movement of the probe in the Z direction needs to make one reciprocation for one measurement, and the movement time in the Z direction increases as the number of inspection points increases, so the inspection time is reduced. In addition, it was necessary to move the probe at high speed.

  In addition, it is also desired that the probe unit of the printed circuit board inspection apparatus disclosed in Japanese Patent Laid-Open No. 11-145582 be miniaturized (weight reduction) from the viewpoint of shortening the inspection time. However, for example, in the case of using a linear motor as the moving means, a space corresponding to the amount of movement of the probe is also required, and there is a problem that miniaturization is difficult.

  The present invention has been made to solve such problems, and has as its main object to provide a probe unit capable of moving a probe at high speed while miniaturizing the probe unit.

  In order to achieve the above object, a probe unit as one aspect of the present invention includes a substrate placement unit for placing a substrate, and a probe is provided on a printed wiring board fixed to the substrate placement unit. A probe unit in a printed wiring board inspection apparatus for inspecting a circuit formed on the printed wiring board by bringing the circuit into contact, a first fixed node, and a first link connected to the first fixed node, A second link connected to the first link via the first movable node; a third link connected to the second link via the second movable node; and the third link A second fixed section connected to the second movable section, a probe supporting section supporting the probe connected to the first movable section, and a voice connected by the first fixed section and the connecting shaft A coil motor, which is And a coil, and a voice coil motor connected to the connection shaft so as to rotate the connection shaft by movement of the coil when the coil is energized, the connection by the voice coil motor By rotating the shaft, the first movable node is moved through the first fixed node and the first link according to the rotation to move the probe support, and the probe is printed. It is characterized in that it is moved in the vertical direction with respect to the wiring board.

  Further, in the present invention, preferably, the probe unit includes a base portion to which the voice coil motor is attached, the magnet is fixed to the base portion, and the coil is connected so as to pass a magnetic flux by the magnet. Held by a holder connected to a shaft, the voice coil motor moves the holder in a circumferential direction about the connection shaft according to the movement of the coil when current is supplied to the coil. To rotate the connecting shaft.

  In the present invention, preferably, at least one of the first link, the second link, and the third link is composed of a plurality of links.

  In the present invention, preferably, a counterweight connected to the first fixed node is further provided such that the first fixed node is located at the center of gravity of the linkage portion.

  In the present invention, preferably, a position detection unit for detecting the position of the holder is further provided, and the position of the probe is determined based on the detected position.

  In the present invention, a cooling mechanism for cooling the magnet and the coil is preferably further provided.

  In the present invention, preferably, the coarse moving part for supporting the base part is further provided, and the coarse moving part can move the probe by a distance larger than the movable distance by the voice coil motor.

  In addition, in order to achieve the above object, a printed wiring board inspection device as one aspect of the present invention includes the above-mentioned probe unit.

  According to the present invention, the probe can be moved at high speed while downsizing the probe unit.

It is a front view of the inspection device of the printed wired board by one embodiment of the present invention. FIG. 7 is a perspective view of a probe unit according to an embodiment of the present invention FIG. 7 is a perspective view of a coarse moving part according to an embodiment of the present invention. It is a perspective view of a fine movement part by one embodiment of the present invention. It is a side view of a fine movement part by one embodiment of the present invention. It is a perspective view which shows a part of micromotion part of FIG. It is a perspective view which shows a mode that one magnet was removed from FIG. FIG. 6 is a view showing the main part of an actuator unit according to an embodiment of the present invention. It is a figure explaining a mode that a probe moves by operation | movement of the linkage part in one Embodiment of this invention. It is a figure explaining a mode that a probe moves when a probe is attached to a connection shaft, without passing through a linkage part. It is a perspective view which shows a part of micromotion part of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same reference numerals indicate the same or corresponding portions unless otherwise noted, and for the sake of convenience of explanation, the vertical and horizontal scales of members or portions may be indicated differently from actual ones. Further, for convenience of the description, the description may be omitted more than necessary. For example, detailed descriptions of already well-known matters and redundant descriptions of substantially the same configurations may be omitted. In the following description of the embodiments, directions such as “upper”, “lower”, “left”, and “right” are simply described as such for the convenience of the description, and the arrangement of devices, parts, etc. It does not limit the direction or the like. Further, in the present specification, “connected” is a concept including both the case where they are directly connected without any member and the case where they are indirectly connected with some members interposed. . The same applies to “fixing” and “mounting”.

  FIG. 1 shows a front view of a movable probe type printed wiring board inspection apparatus 1 according to an embodiment of the present invention. The inspection apparatus 1 includes a substrate placement unit 2 for placing a printed wiring board, which is a substrate to be inspected, and clamps 10a and 10b for holding and fixing the printed wiring board around the substrate placement unit 2 And the printed wiring board is fixed on the surface (substrate mounting surface) of the substrate mounting portion 2 and arranged.

  The inspection apparatus 1 includes a probe 4, a probe unit 6 for supporting the probe 4, an imaging unit 8 for acquiring an image, a measurement unit (not shown) for measuring voltage and the like, and a control unit for controlling the operation of each unit And (not shown).

  The control unit includes a processing unit such as a CPU and a storage unit such as a ROM, a RAM, and a hard disk drive, and performs various operations by causing a general computer to read a program. For example, the control unit performs drive control of a motor described later. Thus, the inspection apparatus 1 moves the probe unit 6 in a direction (XY direction) parallel to the substrate mounting surface (printed wiring board) and in a vertical direction (Z direction). For example, the control unit performs processing of determining whether the resistance value measured by the measurement unit or the like is defective or processing of recognizing the position of the substrate from the image acquired by the imaging unit 8. The imaging unit 8 is formed of an imaging device such as a CCD or CMOS, and generates, for example, an optical image including alignment feature points (for example, fiducial marks) provided on a printed wiring board, and outputs the optical image as an electric signal Acquire an image by converting to. Note that FIG. 1 shows coordinate axes in the X direction, the Y direction, and the Z direction which are orthogonal to one another for the sake of simplicity.

  In order to move the probe unit 6 in the XY directions, the inspection apparatus 1 includes an X-axis moving mechanism extending in the X-axis direction and two Y-axis moving mechanisms supported by the X-axis moving mechanism and extending in the Y-axis direction. Prepare.

  The X-axis moving mechanism includes a pair of X-axis linear motion guides 12a and 12b extending in parallel in the X-axis direction across the substrate mounting portion 2 and one of the X-axis linear motion guides 12a and 12b and the substrate mounting And a pair of X-axis ball screw shafts 14a and 14b extending in the X-axis direction with the part 2. The X axis movement blocks 16a and 16b are attached to the X axis linear movement guide 12a, and the X axis movement blocks 16c and 16d are attached to the X axis linear movement guide 12b. Further, an X-axis movement block (not shown) is attached to each of the X-axis ball screw shafts 14a and 14b. In one example, as shown in FIG. 1, a pair of X-axis ball screw shafts 14 a and 14 b and one lower X-axis linear motion guide 12 a are disposed on the lower side (−Y direction side) of the substrate mounting portion 2. Thus, one upper X-axis linear motion guide 12b is disposed on the upper side (+ Y direction side).

  X-axis motors 18a and 18b are installed at one end of the X-axis ball screw shafts 14a and 14b, respectively. The X-axis ball screw shaft 14a and the rotation axis of the X-axis motor 18a are coupled via a coupling. When the X-axis motor 18a is driven by the control unit, its rotational motion is converted into linear motion by the X-axis ball screw shaft 14a, and an X-axis moving block (not shown) incorporating a nut is moved along the X axis. The above configuration is the same for the X-axis ball screw shaft 14b and the X-axis motor 18b. In one example, as shown in FIG. 1, the X-axis motor 18a is installed at the left end (-X direction side) of the lower (-Y direction side) ball screw shaft 14a, and the upper (+ Y direction side) X axis The X-axis motor 18b is installed at the right end (+ X direction side) of the ball screw shaft 14b.

  One Y-axis moving mechanism is disposed on the lower placement plate 20 a disposed on the lower side (−Y direction side) of the substrate placement unit 2 and on the upper side (+ Y direction side) of the substrate placement unit 2 It arrange | positions on the upper side mounting plate 20c. The lower mounting plate 20a is attached to an X-axis movement block 16a moving on the lower X-axis linear motion guide 12a and an X-axis movement block (not shown) moving on the ball screw shaft 14a. The upper placement plate 20c is attached to an X-axis moving block 16c that moves on the upper X-axis linear motion guide 12b.

  Similarly, the other Y-axis moving mechanism is on the lower mounting plate 20b disposed on the lower side (−Y direction side) of the substrate mounting portion 2 and the upper side (+ Y direction side) of the substrate mounting portion 2 Are disposed on the upper placement plate 20d disposed in The lower mounting plate 20b is attached to an X-axis movement block 16b moving on the lower X-axis linear motion guide 12a and an X-axis movement block (not shown) moving on the ball screw shaft 14b. The upper placement plate 20d is attached to an X-axis moving block 16d that moves on the upper X-axis linear motion guide 12b.

  In this manner, the two Y-axis moving mechanisms are configured to be parallelly movable in the X-axis direction on the X-axis moving mechanism.

  When a moving block (not shown) attached to the X-axis ball screw shaft 14a is moved by driving the X-axis motor 18a, the lower mounting plate 20a attached to the moving block is also moved. At this time, the Y-axis moving mechanism moves together with the X-axis moving block 16a and with the X-axis moving block 16c. The above configuration is the same for the X-axis motor 18b, the X-axis ball screw shaft 14b, the lower mounting plate 20b, and the upper mounting plate 20d.

  The Y-axis moving mechanism includes Y-axis ball screw shafts 22a and 22b extending in the Y-axis direction. Y-axis movement blocks 24a and 24b are attached to the Y-axis ball screw shafts 22a and 22b, respectively. Y-axis motors 26a and 26b are installed at one ends of the Y-axis ball screw shafts 22a and 22b, respectively. The Y-axis ball screw shaft 22a and the rotation axis of the Y-axis motor 26a are coupled via a coupling. When the Y-axis motor 26a is driven by the control unit, its rotational movement is converted into linear movement by the Y-axis ball screw shaft 22a, and the Y-axis movement block 24a incorporating a nut is moved. The above configuration is the same for the Y-axis ball screw shaft 22b and the Y-axis motor 26b. In one example, as shown in FIG. 1, Y-axis motors 26 a and 26 b are respectively installed at lower end portions (−Y direction side) of Y-axis ball screw shafts 22 a and 22 b.

  The probe unit 6 is connected to the Y-axis movement block 24a or 24b. Accordingly, the probe unit 6 moves in response to the movement of the Y-axis moving block 24a (or 24b) and moves in response to the movement of the X-axis moving blocks 16a, 16c (or 16b, 16d). However, the probe unit 6 may be attached to the Y-axis movement block 24a (or 24b) via any mechanism necessary for attaching to the Y-axis movement block 24a (or 24b).

  FIG. 2 is a perspective view of a probe unit 6 according to an embodiment of the present invention. The probe unit 6 includes a coarse movement unit 6a having coarse movement means for moving the probe 4 by a relatively large distance, and a fine movement unit 6b having fine movement means for moving the probe 4 by a relatively small distance. The probe unit 6 further includes a probe support 40 that supports the probe 4 main body. The probe support unit 40 is attached to the fine adjustment unit 6 b.

  The coarse movement means and the fine movement means are realized by an actuator such as a motor, and the operation is controlled by the control unit. The probe unit 6 is attached to the Y-axis movement block 24 a or 24 b so that the main body of the probe 4 can be moved in the Z direction by the coarse movement means and the fine movement means. The inspection apparatus 1 moves the main body of the probe 4 close to the printed wiring board by the coarse movement means, and then moves the main body of the probe 4 by the fine movement means to make the printed wiring board on the surface of the substrate mounting portion 2 Make contact. However, the probe unit 6 may be configured to include the fine movement unit 6 b and not include the coarse movement unit 6 a. In this case, the inspection apparatus 1 includes a mechanism capable of moving up and down the substrate apparatus table (substrate mounting surface).

  FIG. 3 is a perspective view of the coarse moving part 6a according to an embodiment of the present invention. The coarse moving portion 6 a includes a Z-axis motor (rotary motor) 30, a coupling 32, a ball screw shaft 34, a moving block 36, and a mounting plate 38.

  The ball screw shaft 34 is a Z-axis ball screw shaft extending in the Z-axis direction, and the Z-axis motor 30 is installed at one end thereof. The ball screw shaft 34 and the rotation axis of the Z-axis motor 30 are connected via a coupling 32. When the controller drives the Z-axis motor 30, its rotational movement is converted into linear movement by the ball screw, and the movement block 36 incorporating the nut is moved. The mounting plate 38 is fixed to the moving block 36 and moves along with the movement of the moving block 36.

  Thus, the coarse movement means comprises the Z-axis motor 30, the coupling 32, and the ball screw shaft 34.

  The micromotion unit 6b is mounted on the mounting plate 38 as shown in FIG. FIG. 4 is a perspective view of a fine adjustment unit 6b according to an embodiment of the present invention, and FIG. 5 is a side view of the fine adjustment unit 6b according to an embodiment of the present invention.

  The fine movement unit 6b is connected to the actuator unit via the connection unit and the base unit 50 including the base plate mounted on the mounting plate 38 of the coarse movement unit 6a, the actuator unit attached to the base unit 50, and A linkage portion and a linkage support portion 60 for supporting the linkage portion. The probe support 40 is attached to the linkage. The connection portion is configured to include the connection shaft 70, and preferably, the center of the connection shaft 70 is the pivot (pivot). The actuator portion is configured to rotate the connecting shaft 70. The linkage support 60 is fixed to the base 50.

  The actuator unit includes a coil 52, a magnet 54, and a holder 56 for holding the coil. In the present embodiment, the actuator unit is realized using a voice coil motor. The voice coil motor is generally used for a hard disk, and makes it possible to position the magnetic head at high speed and accurately. FIG. 6 is a perspective view showing a part of the micromotion unit 6b, and FIG. 7 is a perspective view showing a state in which one magnet 54 is further removed from FIG. FIG. 8 is a view showing the main part of the actuator unit in the embodiment of the present invention.

  The connection shaft 70 connected to the linkage portion has an expanded portion 72 in which the diameter of the shaft is expanded as shown in FIGS. 7 and 8. The holder 56 is composed of two arms connected and extended to the extension portion 72, and the two arms hold the coil 52 from both sides. When the holder 56 moves in the circumferential direction about the connecting shaft 70, the connecting shaft 70 rotates. In one example, the holder 56 is integrally formed with the extension 72. If the connecting shaft 70 does not have the extension 72, the holder 56 may be directly connected to the connecting shaft 70.

  The magnet 54 is composed of a pair of permanent magnets, and is fixed to the base 50. The pair of magnets 54 is configured and arranged such that both the magnetized N and S poles are facing surfaces of the respective magnets 54, and is disposed so that the opposing magnetic poles of the respective magnets 54 have different magnetic poles. Be done. Therefore, the magnetic flux formed between the pair of magnets 54 includes magnetic flux in different directions depending on the position of the facing surface of each magnet 54. However, the magnet 54 is not limited to the above configuration as long as it has the function of giving the same magnetic flux to the coil 52, and may be configured of, for example, one magnet and a yoke.

  The coil 52 is disposed between the pair of magnets 54 so that the magnetic flux from the magnets 54 can pass, and is held by the holder 56 as described above. When the control unit causes a current to flow through the coil 52, the coil 52 moves in the direction of one of the two arms of the holder 56 depending on the direction of the current. The arm in the moving direction of the coil 52 moves in the circumferential direction about the connecting shaft 70 according to the movement of the coil 52, and as a result, the connecting shaft 70 rotates.

  As described above, the actuator unit (voice coil motor) is configured to cause the connecting shaft 70 to rotate by moving the coil 52 by Lorentz force.

  The holder 56 has a function of holding the coil 52, and moves in accordance with the movement of the coil 52, and is configured to rotate the connecting shaft 70 by the movement of the holder 56. , It is not limited to the above-mentioned illustration.

  The linkage portion includes a first fixed node 80, a first link 82 connected to the first fixed node, a second link 86 connected to the first link 82, and a second link 86. It has a third linked link 90 and a second fixed node 92 to which the third link 90 is linked. The first fixed node 80 is connected to the connecting shaft 70 to be connected to the actuator unit, and the second fixed node 92 is connected to the connecting shaft 94 to be connected to the linkage support 60. The first link 82 and the second link 86 are connected via the first movable node 84, and the second link 86 and the third link 90 are connected via the second movable node 88. . The probe support 40 is coupled to the first movable node 84.

  The first fixed node 80 is rotatable so that the position of the first fixed node 80 is fixed and the connected first link 82 can be moved only at one end (the first movable node 84). Configured The position of the second fixed node 92 is fixed, and the second fixed node 92 is rotatable so that the connected third link 90 can be moved only at one end (the second movable node 88). Configured On the other hand, the first movable node 84 and the second movable node 88 are configured to be movable according to the operation of the first link 82, the second link 86, and the third link 90.

  Specifically, the first movable node 84 is configured to move on the circumference centered on the connecting shaft 70 in response to the rotation of the connecting shaft 70 to which the first fixed node 80 is connected. The second movable node is configured to move circumferentially about the coupling shaft 94 in response to the movement of the first movable node 84. Preferably, the length of the third link 90 is less than the length of the first link 82 and the second link 86. In one example, the lengths of the first link 82 and the second link 86 are the same, and the length of the third link 90 is 0.4 times the length of the first link 82, The length between the first fixed segment 80 and the second fixed segment 92 is twice the length of the third link 90. Further, the tip of the probe 4 is provided such that the tip of the probe 4 and the middle point of the second movable node 88 become the first movable node 84. In this case, the linkage part can be considered to constitute a part of the Hawkins link, and the movement of the linkage part enables the probe support part 40 to be moved on a substantially straight line. Thus, the fine movement means is configured to include the actuator portion and the linkage portion.

  Next, with reference to FIG. 9, the movement of the probe 4 by the operation of the fine movement unit 6b in the present embodiment, in particular by the operation of the linkage unit, will be described. The probe 4 in the upper view of FIG. 9 is at the origin position. The probe 4 in the lower part of FIG. 9 approaches the printed wiring board on the surface of the substrate mounting portion 2 in the Z direction in response to the connection shaft 70 rotating clockwise from the upper part of FIG. It is in the position moved in the direction. In the example of FIG. 9, the length of the first link 82 and the second link 86 is 25 mm, and the length of the center of the first movable node 84 and the tip of the probe 4 is also 25 mm. The third link has a length of 10 mm, and the center of the connecting shaft 70 and the center of the coil 52 are 17.09 mm. Then, in the example of FIG. 9, the connecting shaft 70 is rotated by 6 degrees clockwise by moving the coil 52 clockwise by 1.79 mm in the lower drawing as compared with the upper drawing. As a result, the probe 4 in the lower drawing is moved by 3.124 mm in the Z direction in the direction approaching the printed wiring board on the surface of the substrate mounting portion 2 as compared to the probe 4 in the upper drawing. At this time, the probe 4 is at a position moved only by 0.009 mm in the X direction (direction parallel to the substrate mounting surface). Therefore, with such a configuration, it is possible to move the probe 4 in the Z direction by about 1.75 times the amount of movement of the coil 52 while minimizing the positional deviation of the probe 4 in the XY direction. .

  FIG. 10 illustrates the movement of the probe 4 when the probe 4 is attached to the connecting shaft 70 without passing through the linkage part. The probe 4 in the upper part of FIG. 10 is at the origin position. The probe 4 shown in the lower part of FIG. 10 approaches the printed wiring board on the surface of the substrate mounting portion 2 in the Z direction in response to the connection shaft 70 rotating clockwise from the upper part of FIG. It is in the position moved in the direction. In the example of FIG. 10, the lengths of the center of the connecting shaft 70 and the center of the coil 52 are 17.09 mm as in the example of FIG. 9, but the lengths of the center of the connecting shaft 70 and the tip of the probe 4 are Unlike the example of FIG. 9, it is 32 mm. In the example of FIG. 10, the connecting shaft 70 is rotated by 6 degrees clockwise by moving the coil 52 clockwise by 1.79 mm in the lower drawing as compared to the upper drawing. As a result, the probe 4 in the lower drawing is moved by 3.07 mm in the Z direction in the direction approaching the printed wiring board on the surface of the substrate mounting portion 2 as compared with the probe 4 in the upper drawing. However, at the same time, the probe 4 moves 1.811 mm in the X direction (the direction parallel to the substrate mounting surface). As described above, it is understood that the positional deviation in the X and Y directions becomes a problem when the linkage portion in the present embodiment is not interposed.

  As described above, in the present embodiment, the inspection apparatus 1 causes the connection shaft 70 to rotate by causing the control unit to flow the current through the coil 52, and the first link 82 around the connection shaft 70 according to the rotation. Operate (rotate). The rotation of the first link 82 moves the first movable node 84 in the circumferential direction about the connecting shaft 70. The probe support portion 40 connected to the first movable node 84 by the movement of the first movable node 84 is perpendicular to the printed wiring board on the surface of the substrate mounting portion 2 (Z direction) Move it. At this time, preferably, the linkage portion and the probe support portion 40 constitute a Hawkins link, and the probe 4 supported by the probe support portion 40 (preferably attached to the tip of the probe support portion 40) is substantially in the Z-axis direction. Move parallel to As a result, the probe 4 can be moved by a distance larger than the amount of movement of the coil 52 while minimizing the positional deviation in the XY direction. Therefore, when compared with the motor of the same size, it is possible to further increase the movement amount (gain the stroke), and as a result, it is possible to achieve miniaturization and weight reduction.

  Further, in the present embodiment, the actuator unit is configured to rotationally move the connecting shaft 70 by moving the coil 52 by Lorentz force, and is realized using a voice coil motor. Thus, the coil 52 can be moved at high speed, and the probe 4 can be moved at high speed via the connection shaft 70, the first fixed node 80, the first link 82, and the first movable node 84. Is possible. Therefore, the movement time in the Z direction can be reduced, and the entire inspection time can be reduced.

  FIG. 11 is a perspective view showing a part of the micromotion unit 6b, showing the connection shaft 70 and the first link 82 being connected. In the present embodiment, as shown in FIGS. 4 and 11, the first link 82 is composed of a first link 82 and a first link 82 ', and the second link 86 is a first link 82, The first movable node 84 is connected in a positional relationship of being sandwiched by 82 '. The third link 90 is also configured in the same manner as the first link. By configuring one link by a plurality of links in this manner, it is possible to increase the rigidity of the linkage, and high-speed movement and high-accuracy positioning become possible. In another example, the second link 86 is composed of two links (as in the first link 82 and the first link 82 '), and the first link 82 and the third link 90 are either 1 or It consists of two links.

  Further, in the present embodiment, as shown in FIG. 5, the fine movement unit 6 b further includes a counter weight 58 for adjusting the position of the center of gravity of the linkage unit. The counterweight 58 is connected to the first fixed node 80 and fixed to the base 50. The counterweight 58 is attached to adjust the center of gravity of the linkage. Preferably, by attaching the counterweight 58, the gravity center position of the linkage portion becomes the position of the axis of the connection shaft 70 (first fixed node 80). This makes it possible to reduce the force required for the movement of the linkage part and the movement of the probe 4 as a result. Therefore, the actuator unit (voice coil motor) can be further miniaturized and heat generation can be suppressed.

  Further, in the present embodiment, the fine movement unit 6 b further includes a position detection unit 64 connected to the base unit 50 and a position detection unit 66 connected to the holder 56. In one example, the position detection unit 64 is a linear encoder, and the position detection unit 66 is a linear scale. The linear encoder detects the position of the holder 56 by detecting the scale of the linear scale attached to the holder 56 as shown in FIG. 11, and the control unit determines the position of the probe 4. As a result, the inspection apparatus 1 can perform position control of the probe 4 more accurately. Furthermore, in the present embodiment, the fine movement unit 6 b further includes an origin position detection unit 62 connected to the base unit 50. In one example, the origin position detection unit 62 detects whether the U-shaped portion is blocked by the arm of the holder 56 on the side to which the position detection unit 66 is not attached, and the control unit It is determined whether 56 and the probe 4 are at the home position.

  In another embodiment, the probe unit 6 further comprises a cooling mechanism (not shown). In one example, the cooling mechanism includes a cold air generator that discharges cold air by supplying compressed air, and is configured to discharge the cold air near the coil 52. In one example, the cold air generator is mounted on the coarse moving part 6a or the fine moving part 6b, one end of the hose is connected to the discharge port of the cold air generating device, and the other end of the hose is located near the coil 52 Thus, the cold air is discharged near the coil 52. This makes it possible to suppress the heat generation of the coil 52 (voice coil motor).

  Each embodiment described above is an illustration for explaining the present invention, and the present invention is not limited to these embodiments. For example, although the case where the inspection apparatus 1 includes two probe units 6 is described in the above embodiment, the inspection apparatus 1 may include four probe units 6 or eight probe units 6. The examples can be combined as appropriate and applied to any embodiment of the present invention as long as no contradiction arises. That is, the present invention can be practiced in various forms without departing from the scope of the invention.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 of printed wiring board 2 board mounting part 4 probe 6 probe unit 6a coarse movement part 6b fine movement part 8 imaging part 10 clamp 12 X axis linear movement guide 14 X axis ball screw shaft 16 X axis movement block 18 X axis motor 20 Mounting plate 22 Y-axis ball screw shaft 24 Y-axis moving block 26 Y-axis motor 30 Z-axis motor 32 Coupling 34 ball screw shaft 36 Moving block 38 Mounting plate 40 Probe support 50 Base 52 Coil 54 Magnet 56 Holder 58 Counter weight 60 Linkage support portion 62 Origin position detection portion 64 Position detection portion 66 Position detection portion 70 Connection shaft 72 Expansion portion 80 First fixed node 82 First link 84 First movable node 86 Second link 88 Second movable node 90 Third link 92 Second fixed node 94 Coupling shaft

Claims (8)

A printed wiring board comprising a substrate mounting portion for mounting a substrate, and testing a circuit formed on the printed wiring board by bringing a probe into contact with the printed wiring board fixed to the substrate mounting portion. A probe unit in an inspection apparatus,
A first fixed node, a first link connected to the first fixed node, a second link connected to the first link and the first movable node, the second link and the second link A linkage having a third link connected via two movable nodes, and a second fixed node connected to the third link;
A probe support coupled to the first movable node for supporting the probe;
A voice coil motor coupled by the first fixed node and a coupling shaft, comprising a magnet and a coil, wherein movement of the coil when current is supplied to the coil causes the coupling shaft to rotate. A voice coil motor coupled to the coupling shaft;
By rotating the connection shaft by the voice coil motor, the first movable node is moved through the first fixed node and the first link according to the rotation to move the probe support portion. And moving the probe in a direction perpendicular to the printed wiring board. The probe unit comprises a base unit to which the voice coil motor is attached,
The magnet is fixed to the base portion, and the coil is held by a holder connected to the connecting shaft so that magnetic flux from the magnet can pass therethrough.
The voice coil motor rotates the connection shaft by moving the holder in the circumferential direction about the connection shaft according to the movement of the coil when current is supplied to the coil. The probe unit according to 1.   The probe unit according to claim 1, wherein at least one of the first link, the second link, and the third link is composed of a plurality of links.   The probe unit according to any one of claims 1 to 3, further comprising a counterweight connected to the first fixed node such that the first fixed node is at the center of gravity of the linkage portion.   The probe unit according to any one of claims 1 to 4, further comprising a position detection unit that detects the position of the holder, and determining the position of the probe based on the detected position.   The probe unit according to any one of claims 1 to 5, further comprising a cooling mechanism that cools the magnet and the coil.   The coarse movement part which supports the said base part, Comprising: The coarse movement part which can move the said probe by a larger distance than the movement distance by the said voice coil motor is further provided. The probe unit according to item 1.   The printed wiring board test | inspection apparatus provided with the probe unit of any one of Claims 1-7.

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