TWI638176B - Electrometric apparatus - Google Patents

Abstract

An electrical measuring device is used to detect crystal grains. The electrical measuring device comprises a bearing block, a needle seat assembly and an elastic sealing structure. The carrier block has a bearing surface and the perforations communicate with the bearing surface. The bearing surface is configured to carry the die. The perforation is configured to communicate to a vacuum source to vacuum attach the die to the load bearing surface. The hub assembly includes a plurality of spot probe assemblies configured to move toward or away from the carrier block such that the spot probes contact or move away from the die via the perforations. The resilient sealing structure is disposed between the carrier block and the hub assembly and is configured to maintain airtightness when the carrier block and the hub assembly are moved relative to each other.

Description

Electric measuring device

The present invention relates to an electrical measuring device, and more particularly to an electrical measuring device for detecting a crystal grain. The present invention also relates to an electrical measuring method and a needle block circuit structure.

Currently, a conventional detection architecture for detecting a conventional light-emitting diode (ie, front side illumination, back side electrode current) includes a carrier block and a probe. The carrier block has a pinhole and a vacuum hole. The back side of the LED die is placed on the carrier block, and the probe passes through the pinhole of the carrier block to touch the back electrode of the LED die. The vacuum hole of the carrier block is connected to the vacuum source to attract the LED die to prevent the probe from touching the back electrode of the LED die, and the LED die is lifted off the carrier block due to excessive contact force.

For the conventional back-point LED chip, the size of the LED chip is getting smaller and smaller due to the continuous progress of the LED process. However, if the small LED chip is continuously detected by the aforementioned conventional detection architecture, the area of the vacuum hole and the pinhole of the carrier block must also be designed to be smaller and smaller, and the vacuum hole requires a certain area size to stably hold the LED. The back side of the grain is adsorbed on the carrier block. Therefore, for small LED chips, the conventional detection architecture is no longer sufficient.

Therefore, how to propose an electric measuring device that can solve the above problems is one of the problems that the industry is eager to invest in research and development resources.

In view of the above, it is an object of the present invention to provide an electrical measuring device that can effectively solve the above problems.

In order to achieve the above object, according to an embodiment of the present invention, an electrical measuring device includes a carrier block, a hub assembly, and an elastic sealing structure. The carrier block has a bearing surface and the perforations communicate with the bearing surface. The bearing surface is configured to carry the die. The perforation is configured to communicate to a vacuum source to secure the die to the carrier surface by vacuum adsorption. The hub assembly includes a plurality of spot probes configured to move toward or away from the carrier block such that the spot probe contacts or moves away from the die via the perforations as the hub assembly moves. The resilient sealing structure is disposed between the carrier block and the hub assembly and is configured to maintain airtightness when the carrier block and the hub assembly are moved relative to each other.

According to the above configuration, the electrical measuring device of the present invention utilizes a perforation of the carrier block as both a spotted die (ie, an electrical signal for providing an electrical signal for the die) and an adsorbed die (to avoid contact of the spot probe with the die) The passage of the die from the bearing block due to excessive force. That is to say, the electrical measuring device of the present invention does not need to provide a plurality of perforations for the individual spotting probes, so even if the size of the crystal grains is reduced, the bearing block still has a sufficient vacuum adsorption area for adsorbing the crystal grains, and can be reduced. The cost of making micropores. In addition, the electrical measuring device of the present invention can utilize a resilient sealing structure to form a sealed passage between the carrier block and the hub assembly to hermetically communicate the perforations, thereby avoiding incomplete gas between the carrier block and the hub assembly. Secret question. Moreover, the shrinkage of the elastic sealing structure can also be used to control the function of the spotting probe to touch the force applied by the die to the die. In addition, after the test die is completed, the electrical measuring device of the present invention can also return the carrier block and the hub assembly to a separated state by using an elastic sealing structure to avoid friction between the needle block assembly and the carrier block (due to two The gap between the two is too small to cause separation problems.

The embodiments of the present invention are disclosed in the following drawings, and the details of However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

Please refer to Figure 1 and Figure 2. FIG. 1 is a partial perspective view of an electrical measuring device 100 according to an embodiment of the present invention. FIG. 2 is another partial perspective view of the electrical measuring device 100 of FIG. 1 in which the fixed stop 121 is removed. As shown in FIGS. 1 and 2, in the present embodiment, the electrical measuring device 100 includes a rotating module 111 and a plurality of cantilevers 112. The rotation module 111 has a rotation axis 111a. One end of each cantilever 112 is connected to the rotation module 111, and can be rotated by the rotation module 111 to rotate about the rotation axis 111a. The electrical measuring device 100 also includes a lifting rail 113. The lifting rail 113 is disposed at the other end of the cantilever 112 (ie, the end of the cantilever 112 away from the rotating shaft center 111a). The electrical testing device 100 also includes a carrier block 130, a hub assembly 140, and a circuit board 160. The hub assembly 140 is configured to move toward or away from the carrier block 130. The circuit board 160 is disposed below the hub assembly 140 for securing the hub assembly 140 to the circuit board 160, the circuit board 160 and the carrier block 130 being located on opposite sides of the hub assembly 140, respectively. The die 200 carries the die 200 thereon. The electrical measuring device 100 also includes a fixed stop 121. The fixed stop 121 is located on a side of the bearing block 130 opposite to the hub module 142 and is configured to abut the carrier block 130. The hub assembly 140 is slidably coupled to the lift rail 113 such that the hub assembly 140 can be guided by the lift rail 113 to move toward or away from the fixed stop 121. Specifically, the hub assembly 140 can be pushed by the external push block lifting module 122 to drive the carrier block 130 to move toward the fixed stop 121.

In some embodiments, the electrical measuring device 100 can include eight cantilevers 112, but the invention is not limited thereto, and can be elastically increased or decreased according to actual needs.

With the foregoing configuration, the rotating module 111 can drive all the cantilevers 112 to rotate together, so that the die 200 on the carrier block 130 at the end of each cantilever 112 can be sequentially located directly below the fixed block 121 for subsequent Test procedure. It should be noted that, when detecting the die 200 on any of the carrier blocks 130, the electrical measuring device 100 of the present invention will follow the steps of FIG. 3, FIG. 10, and FIG. 11 and back to FIG. One cycle is performed. The operation of the components included in the electrical measuring device 100 in these processes and the functions provided will be described in detail below.

Please refer to Figure 3, Figure 4 and Figure 5. 3 is a partial cross-sectional view of the electrical measuring device 100 of FIG. 1 along line 3-3, wherein the outer push block lifting module 122 has not yet pushed the hub assembly 140. FIG. 4 is an exploded view showing the carrier block 130, the hub assembly 140, the elastic sealing structure 150 and the circuit board 160. Fig. 5 is a partially enlarged view showing Fig. 3. As shown in FIGS. 3 to 5, in the present embodiment, the carrier block 130 has a bearing surface 131, a lower surface 134, and a through hole 132. The perforations 132 communicate with the bearing surface 131 and the lower surface 134. The bearing surface 131 is configured to carry the die 200. The hub assembly 140 includes a plurality of spot probes 141. One end of the spotting probe 141 is continuously abutted against the circuit board 160 to be electrically connected to the circuit board 160. The electrical testing device 100 also includes an elastomeric sealing structure 150. The elastic sealing structure 150 is disposed between the carrier block 130 and the hub assembly 140. The spotting probe 141 can be passed through the through hole 132 to penetrate the lower surface 134 of the carrier block 130 and the bearing surface 131.

From another point of view, in the present embodiment, the hub module 142, the plurality of spot probes 141, and the circuit board 160 can form at least a portion of a header circuit structure, and the electrical testing device 100 provides a plurality of power supplies. The probe 123 (please refer to FIG. 13 first, which is only a representative) is electrically connected to a power source (not shown) and is disposed separately from the hub circuit structure. When the electrical measurement device 100 tests the die 200, a plurality of power supply probes 123 provide power to the die 200 via the header circuit structure. The hub circuit structure is hermetically connected to the electrical measuring device 100. It should be noted that the hub circuit structure of the present invention corresponds to the number of cantilevers 112 on the electrical measuring device 100. As shown in FIG. 1 and FIG. 2, the configuration of the header circuit can be eight groups, but the invention is not limited thereto.

Specifically, please refer to FIG. 6 , which is a cross-sectional view showing the spotting probe 141 and the hub module 142 in FIG. 4 in one embodiment. As shown in FIGS. 3, 4, and 6, in the present embodiment, the hub assembly 140 further includes a hub module 142. A plurality of spotting probes 141 are bored in the hub module 142. The needle hub module 142 has an upper guide plate 142a and a lower guide plate. The lower guide plate may be a one-piece or a multi-piece. In this embodiment, the lower guide plate may be composed of a first lower guide plate 142b and a second lower guide. The plate 142c is composed of. The second lower guide plate 142c is located between the upper guide plate 142a and the first lower guide plate 142b. The upper guide plate 142a has a plurality of upper perforations 142a21, and the lower guide plate has a plurality of lower perforations. In this embodiment, each of the lower perforations is a first lower perforation 142b1 and a second lower guide plate 142c of the first lower guide plate 142b. The second lower through holes 142c1 are formed, and the spotting probes 141 respectively pass through one of the corresponding upper through holes 142a21 and one of the lower through holes (one of the first lower through holes 142b1 and the second lower through holes 142c1 in this embodiment). The circuit board 160 has a plurality of first contacts 161 and a plurality of second contacts 162. These first contacts 161 and these second contacts 162 are located on the same surface of the circuit board 160. Each of the first contacts 161 is correspondingly and electrically connected to one of the second contacts 162. When the hub module 142 is fixed to the circuit board 160, the spot probes 141 respectively contact one of the first contacts 161 to fix the spot probes 141 in the hub module 142 and the circuit board 160. The second contacts 162 are exposed outside the hub module 142 for contacting a plurality of power supply probes 123.

In some embodiments, as shown in FIG. 4, the distance between the two first contacts 161 or the distance between the two second contacts 162 is smaller than one of the first contacts 161 and one of the second contacts 162. The distance between them.

In some embodiments, in order to absorb the tolerances of the respective circuit boards 160, as shown in FIG. 4, the area of the second contacts 162 is made larger than the first contacts 161 to ensure that the power supply probe 123 can It does contact the second contact 162. As shown in FIG. 4, in terms of spacing, the spacing between the two first contacts 161 is less than the spacing between the two second contacts 162.

More specifically, as shown in FIGS. 4 and 6, the upper guide plate 142a of the hub module 142 has a bearing portion 142a1 and a projection portion 142a2. The bearing portion 142a1 has an upper surface 142a11 and a lower surface 142a12. The upper surface 142a11 of the bearing portion 142a1 is convex to form a projection 142a2. In other words, the upper surface 142a11 of the bearing portion 142a1 has a height difference from the upper end surface of the projection portion 142a2. After the upper guide plate 142a, the first lower guide plate 142b, and the second lower guide plate 142c are assembled, the lower surface of the upper guide plate 142a and the upper surface of the lower guide plate (further, the upper surface of the second lower guide plate 142c) There is an accommodating space A therebetween for the spotting probe 141 to pass through the upper through hole 142a21 and the lower through hole and disposed in the accommodating space A. Specifically, the accommodating space A is recessed by the lower surface 142a12 of the bearing portion 142a1, and the position of the accommodating space A corresponds to the position of the protruding portion 142a2 (that is, the lower surface of the protruding portion 142a2). Part will correspond to the accommodation space A). Further, the lower surface of the protruding portion 142a2 and the bearing portion 142a1 have a height difference from the upper surface 142a11 such that a portion of the accommodating space A is formed below the lower surface of the protruding portion 142a2. The projection 142a2 has at least one upper perforation 142a21. The area of the projection 142a2 is smaller than the bearing portion 142a1. The protrusion 142a2 of the present invention is designed to reduce the gap between the upper guide plate 142a of the hub module 142 and the carrier block 130, and increase the structural strength of the upper guide plate 142a to conform to the depth of the spot probe 141. Wide ratio demand.

Please refer to FIG. 7 , which is a cross-sectional view showing the spot probe 141 and the hub module 142 in FIG. 4 in another embodiment. It should be noted that, in comparison with the hub module 142 shown in FIG. 6, the present embodiment mainly modifies the structure of the first lower guide plate 142b and the second lower guide plate 142c of the hub module 142. Specifically, the second lower guide plate 142c shown in FIG. 6 has a portion that is convex toward the upper guide plate 142a, and the first lower guide plate 142b has a flat shape to provide sufficient support for the spotting probe 141. In contrast, the second lower guide plate 142c shown in FIG. 7 has a substantially flat shape and does not have a convex portion, and the surface of the first lower guide plate 142b facing the second lower guide plate 142c has a recessed surface. Part. In practical applications, if the structural strength of the spot probe 141 is weak, the second lower guide 142c shown in FIG. 6 can be used; if the spot probe 141 is used, it has sufficient structural strength. Then, the second lower guide plate 142c shown in Fig. 7 can be used.

As shown in FIG. 4, the hub assembly 140 further includes a carrier 143. Further, the hub circuit structure further includes the carrier 143. The carrier 143 has an opening 143c extending through the upper and lower surfaces of the carrier 143, and the hub module 142 is disposed at the opening 143c. The bearing portion 142a1 of the needle hub module 142 is used to bear against the upper surface of the carrier 143. The carrier 143 has a recessed space S1 which is recessed into a space from the lower surface of the carrier 143. The recessed space S1 communicates with the opening 143c. A portion of the circuit board 160 is disposed and hermetically connected to the recessed space S1. These first contacts 161 of the circuit board 160 are located in the recessed space S1. These second contacts 162 of the circuit board 160 are exposed outside of the carrier 143. The hub circuit structure further includes a carrier block 130 on the carrier 143.

The carrier 143 is fixed to a locking member 144. The locking member 144 is first fixed on the electrical measuring device 100, and the spotting probe 141 and the needle hub module 142 are disposed on the carrier 143, and the probe 141 and the needle are spotted. The seat module 142 can be mounted on or detached from the carrier 143. The elastic sealing structure 150 is disposed between the bearing block 130 and the carrier 143. Further, the carrier 143 has an annular groove 143a, and the elastic sealing structure 150 is disposed on the annular groove 143a.

Further, as shown in FIG. 4, in the present embodiment, the electrical measuring device 100 further includes a plurality of distance adjusting members 181. The distance adjusting member 181 is connected between the bearing block 130 and the hub assembly 140 and configured to adjust the distance between the carrier block 130 and the hub assembly 140 such that the elastic sealing structure 150 is pre-stressed on the carrier block 130 and the hub assembly 140. between. When the bearing block 130 and the hub assembly 140 are apart from the aforementioned adjustment distance, the elastic sealing structure 150 forms a sealed passage T1 between the bearing block 130 and the hub assembly 140 (please refer to FIG. 3), and the sealing passage T1 is airtightly connected. Perforation 132. At this time, the other end of the spotting probe 141 away from the circuit board 160 penetrates into the through hole 132 but has not yet electrically contacted with the die 200.

It can be seen that the present embodiment avoids the airtight connection 132 by forming the sealing passage T1 between the bearing block 130 and the hub assembly 140 by using the elastic sealing structure 150, so that the bearing block 130 can be avoided when it contacts the needle hub assembly 140. There is a problem of incomplete airtightness between the two. Moreover, the distance adjustment member 181 can be used to limit the maximum distance between the carrier block 130 and the hub assembly 140 to the aforementioned adjustment distance. In addition, the shrinkage of the elastic sealing structure 150 can also be used to control the magnitude of the force applied to the die 200 when the spotting probe 141 touches the die 200.

In some embodiments, the distance adjusting member 181 is a screw, and the distance adjusting member 181 is inserted through the through hole 135 of the bearing block 130 to lock into the needle seat assembly 140 (specifically, the screw hole 143b of the locking carrier 143). The depth of the lock into the hub assembly 140 can be changed by rotation to adjust the aforementioned adjustment distance, but the invention is not limited thereto.

Furthermore, as shown in FIG. 4, in the present embodiment, the electrical testing device 100 further includes a plurality of first guiding members 182 and a plurality of second guiding members 183. The first guiding member 182 is connected to the carrier block 130. For example, the first guide 182 can be embedded in the recess 136 on the lower surface 134 of the carrier block 130 to secure the first guide 182 to the carrier block 130, as shown in FIG. The invention is not limited thereto. The second guiding member 183 is disposed on the carrier 143. Further, the second guiding member 183 is fixed to the carrier 143. The second guiding member 183 slidably engages the first guiding member 182, respectively, so that the bearing member 143 drives the needle holder module 142 to move toward or away from the bearing block 130. In some embodiments, the first guiding member 182 is a bushing, and the second guiding member 183 is a guiding rod slidably coupled thereto, but the invention is not limited thereto, and the two are also interchangeable. That is, the first guiding member 182 is a guiding rod, and the second guiding member 183 is a bushing. In a practical application, the first guiding member 182 and the second guiding member 183 can be regarded as an integral guiding member. A part of the guiding member is connected to the carrier member 143, and a portion is connected to the carrier block 130 to limit the carrier member 143 and The relative position of the bearing block 130 and the position of the relative displacement enable the carrier 143 to move toward or away from the carrier block 130, and the guiding member may also be a spring piece (for example, a Z-shaped spring piece).

In some embodiments, the elastic sealing structure 150 is an O-ring, but the invention is not limited thereto.

In some embodiments, the material of the carrier 143 includes metal, but the invention is not limited thereto.

In addition, referring to FIG. 3 , in the present embodiment, the carrier block 130 has a vacuum channel T2 and a vacuum pumping port 133 , and the vacuum channel T2 is in communication with the sealing channel T1 and the vacuum pumping port 133 . Therefore, when the die 200 is carried on the bearing surface 131 of the carrier block 130 and covers the through hole 132, it can be evacuated from the vacuum pumping port 133 by an external air extracting device (not shown) such as a vacuum pump, thereby The through holes 132 are used to adsorb the crystal grains 200 on the bearing surface 131.

Further referring to FIG. 8 , a perspective view of the carrier block 130 in FIG. 4 is shown in another perspective. As shown in Fig. 8, the carrier block 130 has a recessed space S2. The recessed space S2 is disposed on the lower surface 134 of the carrier block 130, and the vacuum channel T2 is connected to the recessed space S2 (in FIG. 8, the vacuum channel T2 is partially located in the recessed space S2). The area of the recessed space S2 is larger than the area of the perforations 132. The perforations 132 are located in the recessed space S2. Further, the position of the projection 142a2 corresponds to the position of the recessed space S2.

However, the present invention is not limited thereto. Please refer to FIG. 14 , which is a partial cross-sectional view showing the structure of FIG. 3 in another embodiment. As shown in the figure, the vacuum channel T2 and the vacuum suction port 133 disposed on the carrier block 130 in FIG. 3 are instead disposed on the hub assembly 140 (the vacuum suction port 133 is not shown in FIG. The structure can be referred to Figure 3). Therefore, when the die 200 is carried on the bearing surface 131 of the carrier block 130 and covers the through hole 132, the air can be evacuated from the vacuum suction port 133 by an external air suction device (not shown), which can also be achieved via the through hole 132. The grain 200 is adsorbed on the bearing surface 131 for the purpose.

In addition, as shown in FIG. 3, before the die 200 is spotted, there is a gap G1 between the external push block lifting module 122 and the locking member 144 under the hub assembly 140, and the carrier block 130 and the fixed block 121. There is a gap G2 between them, so that when the rotation module 111 is rotated, no interference phenomenon occurs.

Please refer to FIG. 9, which is a side view of the circuit board 160 in FIG. As shown in FIG. 9, the circuit board 160 has a surface circuit layer 163 and a structural enhancement layer 164. The thickness of the structural enhancement layer 164 is greater than the thickness of the surface circuit layer 163. The first contact 161 and the second contact 162 are disposed on the same surface circuit layer 163. Thereby, the circuit board 160 can have better structural strength.

Please refer to FIG. 10 , which is another cross-sectional view of the components in FIG. 3 , wherein the external push block lifting module 122 pushes the hub assembly 140 such that the carrier block 130 abuts the fixed stop 121 . As shown in FIG. 10, in the present embodiment, the external push block lifting module 122 is moved upward from the position in FIG. 3 and pushes the needle hub assembly 140 such that the carrier block 130 abuts against the fixed stop 121. At this time, the die 200 enters the opening 121a of the fixed block 121, and the spot probe 141 has not yet been electrically contacted with the die 200 (in conjunction with the reference spot probe 141 and the die 200 in FIG. 5 relative position). After the carrier block 130 abuts the fixed stop 121, the hub module 142 that moves toward the carrier block 130 can further compress the resilient sealing structure 150.

Please refer to Figure 11 and Figure 12. 11 is another cross-sectional view of the components of FIG. 3, wherein the outer push block lift module 122 continues to push the hub assembly 140 toward the carrier block 130, thereby causing the hub assembly 140 to abut the carrier block 130. . Fig. 12 is a partially enlarged view showing Fig. 11. As shown in FIG. 11 and FIG. 12, in the present embodiment, the external push block lifting module 122 continues to push the hub assembly 140 toward the carrier block 130 by the state in FIG. 10, and the carrier block 130 is attached. It is blocked by the fixed stop 121 and cannot continue to move upward, so the elastic sealing structure 150 will continue to be compressed by the upwardly moving needle hub assembly 140 toward the carrier block 130. At this time, as shown in FIG. 12, when the hub assembly 140 and the carrier block 130 further compress the elastic sealing structure 150, the spot probe 141 contacts the die 200 via the through hole 132 as the hub assembly 140 moves. .

In some embodiments, in the case where the fixed stopper 121 and the die 200 are removed, when the hub assembly 140 abuts against the carrier block 130, the length of the spot probe 141 passing through the through hole 132 can be set to be 0 to 10 microns, but the invention is not limited thereto. Thereby, in the process of actually detecting the die 200, when the hub assembly 140 abuts against the carrier block 130, the spot probe 141 can electrically contact the contact of the die 200 with a slight force, and the crystal will not be crystallized. The pellets 200 are separated from the carrier block 130 (i.e., the aforementioned force is less than the vacuum suction).

In some embodiments, by controlling the external push block lifting module 122 such that the needle hub assembly 140 has not yet abutted against the carrier block 130, the spot probe 141 has been contacted by the through hole 132 to contact the die 200, thereby controlling the spot measurement. The force applied by the probe 141 to the die 200 is shown.

Please refer to FIG. 13 , which is a partial side view showing the electrical measuring device 100 in FIG. 1 . As shown in FIG. 13, in the present embodiment, the power supply probe 123 is separately provided outside the hub assembly 140. For example, as shown in FIG. 13, the power supply probe 123 is located above the external push block lifting module 122. During the movement of the hub assembly 140 toward the carrier block 130 such that the spotting probe 141 contacts the die 200 via the via 132 (ie, the operation of the electrical measuring device 100 proceeds from the 10th to the 11th), the power supply probe The 123 series electrical contact circuit board 160 is used to supply power to the die 200 via the circuit board 160 and the spot probe 141. In some embodiments, the foregoing die 200 is a Light-emitting Diode (LED) die that can be illuminated by the front side after the back electrode is energized via the spot probe 141. Thereby, the light emission characteristics can be known by detecting the light emitted by the crystal grain 200.

It can be seen from the foregoing configuration that the electrical testing device 100 of the present embodiment utilizes the through holes 132 of the carrier block 130 as both the spot die 200 (ie, provides an electrical signal for the photoelectric test of the die 200) and the adsorption die 200 (avoiding points). When the probe 141 contacts the die 200, the die 200 is disengaged from the channel of the carrier block 130) due to excessive force. Therefore, the electrical measuring device 100 of the present invention does not need to provide a plurality of perforations 132 for the individual spotting probes 141. Even if the size of the die 200 is reduced, the carrier block 130 has sufficient vacuum adsorption area for adsorbing the die 200, and the cost required for making the microvia can be reduced.

In some embodiments, in order to obtain a more accurate detection result, an integrating sphere (not shown) may be disposed over the opening 121a of the fixed stopper 121 shown in FIG. 11 to completely cover the die 200, so the integral The ball can prevent external light from entering and affect the detection result. In some embodiments, the opening 121a of the fixed block 121 is stepped (that is, expanded outward in a direction away from the die 200) to prevent the light emitted by the die 200 from being blocked by the inner wall of the opening 121a, thereby increasing The angle of collection of the integrating sphere.

After the die 200 is detected, the electrical measuring device 100 can return to the state shown in FIG. That is, the external push block lifting and lowering module 122 will move downward from the position in FIG. 11 and return to the position in FIG. 3 to leave the needle seat assembly 140, and the needle seat assembly 140 will also follow the gravity relationship. The lifting rail 113 is moved downward from the position in Fig. 11 to return to the position in Fig. 3.

Moreover, at this time, the elastic sealing structure 150 is elastically restored to return to the pre-stressed state shown in FIG. 3, and the spacing between the carrier block 130 and the hub module 142 is restored to maintain the aforementioned distance. That is, after the test die 200 is completed, the electrical testing device 100 of the present embodiment can also return the carrier block 130 and the hub assembly 140 to the separated state by using the elastic sealing structure 150 to avoid the bearing assembly 140 being loaded and loaded. The friction between the blocks 130 (because the gap between the two is too small) causes a problem that separation is impossible.

Please refer to FIG. 15 , which is a flow chart showing an electrical measurement method according to an embodiment of the present invention. As shown in Fig. 15, in the present embodiment, the electrical measurement method is for detecting a crystal grain by using an electrical measuring device. The electrical measuring device comprises a carrier block, a hub assembly comprising a plurality of spotting probes, an elastic sealing structure and a fixed stop. The carrier block has a bearing surface configured to carry the die and a perforation that communicates to the carrier surface. For example, the electrical measurement method can detect the die by using, for example, the electrical measuring device 100 shown in FIGS. 1 to 14 or the electrical measuring device 300 shown in FIGS. 16 to 25, but the present invention does not This is limited to this.

The electrical measurement method includes steps S101 to S105. Specifically, in step S101, the crystal grains are adsorbed on the bearing surface via the perforations. In step S102, the hub assembly moves toward the fixed stop, causing the carrier block to abut the fixed stop. In step S103, the hub assembly is continued to move toward the fixed stop and further compresses the resilient sealing structure such that the spot probe contacts the die via the perforations as the hub assembly moves. In step S104, the die is spotted via a spot probe. In step S105, after the spotting, the needle seat assembly is released, causing the elastic sealing structure to elastically recover to separate the needle seat assembly from the carrier block, thereby causing the spotting probe to leave the die.

In some embodiments, the electrical measurement device further includes a circuit board. The hub assembly is secured to the board. The spot probe is electrically connected to the board. The electrical measurement method further includes steps S106 to S109. In step S106, before the spot test, the resistance value of one of the spot probes is detected via the circuit board. In step S107, the resistance value of the detected spot probe is determined to be greater than a predetermined resistance value, and if so, the detected spot probe is cleaned. In step S108, the resistance value of the spot probe to be cleaned is detected via the circuit board. In step S109, the resistance value of the spot probe to be cleaned is determined to be greater than a predetermined resistance value, and if so, the spot probe to be cleaned is changed.

In some embodiments, the predetermined resistance value may be set to 0.5 to 15 ohms, but the invention is not limited thereto.

From the above detailed description of the specific embodiments of the present invention, it can be clearly seen that the electrical measuring device and the electrical measuring method of the present invention utilize a perforation of the carrier block as a spot die (ie, provide an electrical signal for the die). Photoelectric test) and the adsorption of crystal grains (avoiding the force of the probe to contact the die when the spot probe is in contact with the die). That is to say, the electrical measuring device and the electrical measuring method of the present invention do not need to provide a plurality of perforations for the individual spotting probes, so even if the size of the crystal grains is reduced, the bearing block still has sufficient vacuum adsorption area for adsorbing the crystal grains. And can reduce the cost of making micropores. In addition, the electrical measuring device and the electrical measuring method of the present invention can utilize a resilient sealing structure to form a sealed passage between the carrier block and the hub assembly to hermetically communicate the perforations, thereby avoiding the contact between the carrier block and the hub assembly. An incomplete airtight problem has occurred. Moreover, the shrinkage of the elastic sealing structure can also be used to control the function of the spotting probe to touch the force applied by the die to the die. In addition, after the test die is completed, the electrical measuring device and the electrical measuring method of the present invention can also return the carrier block and the hub assembly to a separated state by using an elastic sealing structure to avoid friction between the needle block assembly and the carrier block. The force (because the gap between the two is too small) causes problems that cannot be separated. However, the present invention does not limit the use of a single-element type of elastic sealing structure that can provide both an airtight effect and an elastic restoring force between the carrier block and the hub assembly, that is, the elastic sealing structure of the present invention can be made of one or more The components are configured to provide an airtight effect between the carrier block and the hub assembly and provide a return force for the carrier block and the hub assembly to return to the spot probe without contacting the die; secondly, the present invention The needle hub assembly also does not limit the aspects disclosed in the foregoing embodiments, and various modifications are possible.

For example, FIG. 16 illustrates an electrical measuring device 300 provided by another embodiment of the present invention. As shown in FIG. 16, the electrical measuring device 300 includes a rotating module 111, a cantilever 112, a lifting rail 113 disposed at one end of the cantilever 112, a fixed stopper 121, an external push block lifting module 122, and a power supply probe 123, etc. member. The detailed structure and the connection operation of the above-described members are the same as those of the previous embodiment, and thus will not be described herein. The difference between the electrical testing device 300 provided in this embodiment and the electrical testing device 100 provided in the previous embodiment is that the electrical testing device 300 further includes, but is not limited to, a probe block 410 and a hub assembly 420. The needle assembly 400, the probe assembly 400 is fixed to the lift rail 113, so the probe assembly 400 can move toward or away from the fixed stop 121 as the lift rail 113 moves up and down. Specifically, the probe assembly 400 can be pushed by the external push block lifting module 122 to drive the carrying block 410 to move toward the fixed stop 121, so that the carrying block 410 can abut against the fixed stop 121.

FIGS. 17 to 25 are diagrams showing the structural relationship between the respective members of the probe assembly 400 provided by the present embodiment. Referring to FIGS. 17-22, the probe assembly 400 includes a carrier block 410, a hub assembly 420, a resilient sealing structure 430, a heating assembly 440, and a bonding structure 450. As shown in FIGS. 18, 20 and 25, the carrier block 410 has a bearing surface 411, a lower surface 412 opposite to the bearing surface 411, a recessed portion 413 at the bottom and having a lateral opening, and a matching hole communicating with the recessed portion 413. 414, a through hole 415 that communicates with the matching hole 414 and the bearing surface 411, and a heating portion 416 that extends laterally opposite to the recessed portion 413. The die 200 is disposed on the bearing surface 411 and covers the through hole 415, whereby the vacuum source (not shown) such as a vacuum pump may be connected to the through hole 415. The die 200 is adsorbed and fixed on the bearing surface 411 (described in detail below).

As shown in FIGS. 18-21, the hub assembly 420 has a base 421, a plug 423, a conduit fitting 425, a circuit board 427, and a plurality of spot probes 429. The seat body 421 has a first recessed portion 421a at the bottom thereof and a lateral opening, a second recessed portion 421b located at the bottom portion and communicating with the first recessed portion 421a, and extending from the side of the seated body 421 to the inside. The flow path 421c of the second recessed portion 421b (please refer to FIG. 24 at the same time), the sliding engagement portion 421d protruding from the top surface of the seat body 421, and the second recessed portion 421b and the sliding mating through the sliding engagement portion 421d The flow path 421e on the top surface of the portion 421d (please refer to Figs. 23 and 24 at the same time). The outer circumferential surface of the sliding engagement portion 421d is recessed and provided with an annular groove 421f. The plug member 423 of the hub assembly 420 is an L-shaped block in this embodiment. The bottom surface of the second recessed portion 421b is closed by a screw (not shown) locked to the bottom of the base 421. The opening and a portion of the side opening. The pipe fitting 425 of the needle hub assembly 420 is a component commonly used in a general fluid pipeline for engaging a fluid pipeline. One end of the fitting joint 425 is inserted and locked in the flow passage 421c, and the other end is connected to the pipeline. (not shown) and connected to a vacuum source (not shown). The top surface of the circuit board 427 is provided with a plurality of contacts 427a for the power supply probe 123 to touch, and the other side is fixed with a plurality of L-shaped spot probes 429, that is, the spot probe 429 A vertical segment and a vertical segment integrally connected to the horizontal segment are fixed to the other side of the circuit board 427 and electrically connected to the contact 427a through the wiring of the circuit board 427.

When the hub assembly 420 is assembled, the circuit board 427 on which the fixed probe 429 is mounted is mounted from the bottom of the base 421 in the first and second recessed portions 421a and 421b, and is locked by a screw (not shown). The body 421 is fixed to the seat body 421, and the plug member 423 is locked to the seat body 421. Thus, an airtight flow passage having a flow passage 421c, a portion of the second recessed portion 421b and the flow passage 421e is integrally formed. The modularized needle hub assembly 420 of T3 (see Figure 24), that is, a modular hub assembly 420 can be obtained. The needle hub assembly 420 is internally provided with a gas-tight flow passage T3 having a two-end opening. One of the openings is an opening of the flow channel 421c at the side of the seat body 421, wherein the plug is provided with a fitting 425, and the other opening is an opening of the flow channel 421e at the top surface of the sliding mating portion 421d. In the assembled modular hub assembly 420, the horizontal section of the L-shaped spot probe 429 extends horizontally In the second recessed portion 421b (please refer to FIG. 23 at the same time), that is, completely in the airtight flow passage T3, and the vertical section of the L-shaped spotting probe 429 is placed upward in the flow passage 421e and The through-flow passage 421e is located at an opening of the top surface of the sliding mating portion 421d. Thus, the tip end (ie, the needle tip) of the vertical section of the spotting probe 429 protrudes from the top surface of the sliding mating portion 421d by a predetermined length (please simultaneously Referring to Figures 21 and 23), second, the contact 427a of the circuit board 427 is exposed to the outside of the body 421 (see also Figures 21 to 23), and can be touched by the power supply probe 123. It should be particularly noted that when the needle hub assembly 420 is assembled, the interface between the seat body 421, the plug member 423, the pipe fitting 425 and the circuit board 427 can be applied with an adhesive such as epoxy resin. Good airtight effect. Secondly, the needle hub assembly 420 is not limited to the components such as the seat body 421, the plug member 423, the pipe fitting 425, the circuit board 427, and the spot probe 429 disclosed in the embodiment. For example, the housing can be used with the circuit. The board and the spot probe are used to complete the needle hub module 420 having a gas tight flow path and having a protruding tip and a board contact.

As shown in Figures 18, 20 and 21, in the present embodiment, the elastic sealing structure 430 is composed of a plurality of elements and is not composed of a single element (such as the O-ring 15 of the foregoing embodiment). In detail, the elastomeric sealing structure 430 includes a seal 431 for providing a gas-tight effect between the carrier block 410 and the hub assembly 420, and for providing resilient support between the carrier block 410 and the hub assembly 420 and A resilient member 433 that restores strength. The seal member 431 is an annular member made of an elastic material such as rubber, and can be specifically realized by an O-ring commonly used in the mechanical industry. When assembled, the sealing member 431 is sleeved in the annular groove 421f of the sliding mating portion 421d of the seat body 421, and the sliding mating portion 421d is slidably inserted into the mating hole 414 of the carrier block 410 (see the 23 to 25), the carrier block 410 and the hub assembly 420 can be coupled together away from each other or close to each other. At this time, the elastic sealing member 431 is slightly compressed but still slidably pressed against The hole 414 is formed in the hole wall, whereby the flow path 421e inside the sliding mating portion 421d can communicate with the mating hole 414, and the bearing block 410 and the seat body 421 of the hub assembly 420 are achieved by the sealing member 431. The airtight effect, as described above, when the carrier block 410 and the hub assembly 420 are relatively far apart or close to each other, the airtight flow passage T3, a portion of the mating hole 414, and the through hole 415 communicating with the mating hole 414 will constitute A complete, airtight vacuum flow path, since one end of the airtight flow passage T3 is connected to a vacuum source through the pipe fitting 425, the grain 200 can be adsorbed by the aforementioned airtight vacuum flow path. It is fixed on the bearing surface 411 of the carrier block 410. Secondly, in the present embodiment, the elastic member 433 is realized by a coil spring, but the invention is not limited thereto, for example, an elastic member such as a spring piece or an elastic colloid can be used to achieve the same effect. The elastic member 433 is pre-compressed between the carrier block 410 and the seat body 421 of the hub assembly 420 (please refer to FIG. 24 at the same time), whereby the elastic members 433 can be mated together for sliding The carrier block 410 and the hub assembly 420 provide an elastic restoring force that moves the carrier block 410 and the hub assembly 420 away from each other. The elastic sealing structure 430 can also optionally include a positioning member 435. In the embodiment, the positioning member 435 is a column integrally protruding from the top surface of the seat body 421 (see FIGS. 21 and 24) for the elastic member 433. The sleeve is arranged to limit the position of the elastic member 433 to prevent the elastic member 433 from deviating during the reverse compression. In fact, the elastic member 433 is disposed on the positioning member 435 and is also disposed on the bottom surface 412 of the bearing block 410. In the present invention (see FIG. 24), however, the present invention is not limited to such a design. For example, the positioning hole for accommodating the elastic member 433 may be disposed on the top surface of the seat body 421 to set the positioning member on the carrier block. The bottom surface of 410 may or may not be provided with a positioning hole and/or a positioning member.

The probe assembly 400 can selectively configure the heating assembly 440, that is, if the die to be inspected must be tested under specific ambient temperature conditions, the probe assembly 400 can be configured with a particular heating assembly. As shown in FIGS. 18-20 and 23, in the present embodiment, the heating assembly 440 has a heat insulating lower cover 441, a heater holder 442, an electric heater 443, a temperature sensor 444, and a heat insulating upper cover 445. . The heat insulating lower cover 441 and the heat insulating upper cover 445 are made of a thermal insulation material such as glass fiber or asbestos, and the top cover of the heat insulating lower cover 441 has a receiving portion 441a; the heater fixing seat 442 is provided. The accommodating portion 411a is made of a metal material having good thermal conductivity, and the top mask has a receiving portion 442a; the electric heater 443 can use a general resistive heater, but the invention is not limited thereto. The electric heater 443 is disposed in the accommodating portion 442a of the heater holder 44 and abuts against the bottom surface of the heating portion 416 of the carrier block 410 for heating the carrier block 410 and indirectly for the crystal disposed on the bearing surface 411. The pellet 200 is heated; the temperature sensor 444 is attached to the electric heater 443 and electrically connected to a controller (not shown), thereby sensing the temperature of the electric heater 443 and being controlled by the controller. The operating temperature of the electric heater 443 covers the top surface of the heating portion 416 of the carrier block 410. The heat insulating lower cover 441, the heater holder 442, the electric heater 443, the temperature sensor 444, and the heat insulating upper cover 445 are combined with each other and fixed to the heating portion 416 of the carrier block 410 by screws (not shown). The carrier block 410 can be heated to provide a specific detection temperature for the die 200 to be measured.

The bonding structure 450 connects the carrier block 410 and the hub assembly 420, and the main purpose is to maintain the mating carrier block 410 and the hub assembly 420 in a combined state that can be relatively displaced between certain displacement distances but not separated from each other. That is, the carrier block 410 and the hub assembly 420 are not separated from each other by the elastic restoring force of the elastic member 433 disposed between the carrier block 410 and the hub assembly 420, and the carrier block 410 can be set and adjusted. The displacement stroke between the hub assemblies 420. As shown in FIGS. 18-20 and 22, in the present embodiment, the bonding structure 450 includes a second bonding member 451, which is a C-shaped block having a top plate, a bottom plate, and a side plate connected between the top and bottom plates. The joint member 451 has a three-sided open accommodating space 451a between the top and the bottom plate, and the top and bottom plates are provided with corresponding screw holes, whereby the joint portion 418 of the bearing block 410 protruding and having a screw hole is provided. And the joint portion 421g corresponding to the position of the joint portion 418 and located at the side of the seat body 421 of the needle hub assembly 420 can be simultaneously engaged in the accommodating space 451a of the joint member 451 to hold the carrier block 410 and the needle seat assembly. The 420 can be displaced relative to the disengaged state, and the bolts (not shown) that are disposed on the top plate of the coupling member 451 and the joint portion 418 can be used to adjust the relative position between the carrier block 410 and the hub assembly 420. The travel of the displacement. It should be noted that the bonding structure 450 is not limited to the structure disclosed in the embodiment. For example, the distance adjusting member 181 (screw or bolt) disclosed in the previous embodiment may be used to be disposed on the carrier block. 410 achieves the same function as the screw holes and/or perforations of the hub assembly 420. Next, in the present embodiment, the two coupling members 451 are provided on the joint portions 418, 421g of the opposite sides of the carrier block 410 and the seat body 421, but the number of the joint members provided by the present invention is not This is limited. In addition, in the embodiment, the joint structure 450 can also optionally include a joint bottom plate 453 for locking and fixing the joint member 451, and the joint bottom plate 453 is further locked to the top end of the lift rail 113 (see item 16). As such, the probe assembly 400 can be moved toward or away from the fixed stop 121 as the lift rail 113 moves up and down. Of course, the joint bottom plate 453 can be omitted, and the joint member 451 or other members of the probe assembly 400 can be directly fixed to the lift rail 113.

As shown in FIGS. 18 and 20, in the present embodiment, the probe assembly 400 of the electrical measuring device 300 also includes a plurality of first guiding members 182 and a plurality of second guiding members 183, and the guiding members 182. The 183 is disposed between the carrier block 410 and the seat 421 of the hub assembly 420. In detail, the first guiding member 182 is embedded in a recess 419 (see FIG. 20) on the lower surface 412 of the carrier block 410 to fix the first guiding member 182 on the carrier block 410. The second guiding member 183 is disposed on the top surface of the base body 410 to slidably engage the first guiding member 182, respectively, whereby the first and second guiding members are relatively close to or away from the needle seat assembly 420. The lead members 182, 183 can exert a good guiding effect. For detailed implementations and functions of the first and second guiding members 181 and 182, reference may be made to the description of the previous embodiment.

The mode of operation of the probe assembly 400 provided by the present embodiment will be further described below. Please refer to the figures 23 to 25, and the 23 and 24 diagrams show that the probe assembly 400 has not been pushed up by the external push block lifting module 122, and the spotting probe 429 has not contacted the die 200, and the 25 shows that the probe assembly 400 is pushed up by the external push block lifting module 122, causing the spotting probe 429 to contact the die 200. In detail, the manner shown in FIGS. 23~24 means that the rotating module 111 drives the cantilever 112 to rotate, so that the probe assembly 400 connected to the end of the cantilever 112 through the lifting rail 113 is displaced to the fixed stop. Directly below the 121, in preparation for the test procedure, at this time, there is a gap (not shown) between the external push block lifting module 122 and the bottom of the seat body 421 of the hub assembly 420, and the carrying block 410 and A slit (not shown) is also disposed between the fixed stoppers 121. Further, the tip of the spotting probe 429 is held in a state of being aligned with the through hole 415 of the carrying block 410 and below the die 200 by a predetermined distance. The die 200 is vacuum-applied and fixed to the bearing surface of the carrier block 410. The aspect shown in FIG. 25 means that the external push block lifting module 122 pushes the probe assembly 400 upward, so that the bearing block 410 is fixed against the fixed stop 121 and the die 200 is in the fixed position. In the opening 121a of the block 121, the external push block lifting module 122 continues to push the probe assembly 400 upwardly in the direction of the fixed stop 121, so that the hub assembly 420 relatively slides relative to the fixed carrier block 410. Therefore, the spotting probe 429 is driven upward into the through hole 415 of the carrying block 410 and touches the state under the die 200. At this time, the elastic member 433 of the elastic sealing structure 430 is further compressed, and the power supply is probed. The pin 123 electrically contacts the contact 427a of the circuit board 427, thereby supplying power to the die 200 via the circuit board 427 and the spot probe 429 to detect the die 200. During the sliding of the aforementioned needle holder assembly 420 relative to the stationary carrier block 410, the sealing member 431 of the elastic sealing structure 430 maintains the wall of the hole of the mating hole 414 of the carrier block 410 elastically, thereby The carrier block 410 and the hub assembly 420 maintain a good airtight effect, so that when the die 200 is in contact with the spot probe 429, it can still be firmly adsorbed on the bearing surface 411 of the carrier block 410 without being lifted off. Bearing surface 411. In addition, the displacement stroke setting between the carrier block 410 and the hub assembly 420 and the contraction of the elastic member 433 of the elastic sealing structure 430 can also be applied to the die 200 when the spotting probe 429 is touched by the die 200. The power of the size of the function.

After the detection of the die 200 is completed, the external push block lifting module 122 moves downward until it leaves the needle probe assembly 400. During the process, the elastic member 433 of the elastic sealing structure 430 restores the elasticity to the initial preload state, forcing The probe assembly 420 and the carrier block 410 are relatively displaced from each other and returned to the state shown in FIGS. 23 to 24.

It can be seen from the above description that the electrical measuring device 300 provided by the present embodiment also uses the through holes 415 of the bearing block 410 to simultaneously measure the channel of the die 200 and the vacuum adsorption die 200 as the spot probe 429. Secondly, another technical feature of the present embodiment is that a hub assembly 420 is provided which is modular and has an airtight flow passage T3 therein, and the needle hub assembly 420 is equipped with an exposed elastic sealing structure 430 and is slidably The mating block 410 is mated so that once the seal 431 of the elastic sealing structure 430 is worn, the hub assembly 420 can be easily detached from the carrier block 410 and the new seal can be quickly replaced, or once the spot is measured. The probe 429 is worn and the entire hub assembly 420 can be quickly replaced to improve maintenance efficiency.

The present invention has been disclosed in the above embodiments, and is not intended to limit the scope of the present invention, and the invention may be modified and modified in various ways without departing from the spirit and scope of the invention. The scope is subject to the definition of the scope of the patent application.

100‧‧‧Electrical measuring device

111‧‧‧Rotary Module

111a‧‧‧Rotary axis

112‧‧‧cantilever

113‧‧‧ Lifting rails

121‧‧‧Fixed stop

121a, 143c‧‧

122‧‧‧External push block lifting module

123‧‧‧Powered probe

130‧‧‧bearing block

131‧‧‧ bearing surface

132, 135‧‧‧ perforation

133‧‧‧Vacuum suction port

134, 142a12‧‧‧ lower surface

136‧‧‧Depression

140‧‧‧ needle seat assembly

141‧‧ ‧ spot probe

142‧‧‧ needle seat module

142a‧‧‧Upper guide

142a1‧‧‧Responsible Department

142a11‧‧‧ upper surface

142a2‧‧‧protrusion

142a21‧‧‧perforation

142b‧‧‧First lower guide

142b1‧‧‧First perforation

142c‧‧‧Second lower guide

142c1‧‧‧Second perforation

143‧‧‧Carrier

143a‧‧‧ring groove

143b‧‧‧ screw hole

144‧‧‧Locker

150‧‧‧Elastic sealing structure

160‧‧‧ boards

161‧‧‧ first joint

162‧‧‧second junction

163‧‧‧Surface circuit layer

164‧‧‧Structural enhancement layer

181‧‧‧ distance adjustment

182‧‧‧First guide

183‧‧‧Second guide

200‧‧‧ grain

300‧‧‧Electrical measuring device

400‧‧‧ probe assembly

410‧‧‧bearing block

411‧‧‧ bearing surface

412‧‧‧ lower surface

413‧‧‧Depression

414‧‧‧With holes

415‧‧‧Perforation

416‧‧‧ heating department

417‧‧‧Positioning holes

418‧‧‧Combination Department

419‧‧‧Depression

420‧‧‧ needle seat assembly

421‧‧‧ body

421a‧‧‧The first depression

421b‧‧‧second depression

421c‧‧‧ runner

421d‧‧‧Sliding mating

421e‧‧‧ runner

421f‧‧‧ring groove

421g‧‧‧Combination Department

423‧‧‧plugs

425‧‧‧Pipe fittings

427‧‧‧ boards

427a‧‧‧Contacts

429‧‧ ‧ spot probe

430‧‧‧Flexible sealing structure

431‧‧‧Seal

433‧‧‧Flexible parts

435‧‧‧ positioning parts

440‧‧‧heating components

441‧‧‧Insulated lower cover

441a‧‧‧ 容部

442‧‧‧heater mount

442a‧‧‧Receipt Department

443‧‧‧Electric heater

444‧‧‧temperature sensor

445‧‧‧Insulated upper cover

450‧‧‧Combination structure

451‧‧‧Connected parts

451a‧‧‧ accommodating space

453‧‧‧ combined with the bottom plate

A‧‧‧ accommodating space

G1, G2‧‧‧ gap

S1‧‧‧ recessed space

S2‧‧‧ recessed space

T1‧‧‧ sealed passage

T2‧‧‧ vacuum channel

T3‧‧‧ airtight runner

S101~S105‧‧‧Steps

The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; FIG. 2 is another partial perspective view of the electrical measuring device of FIG. 1 in which the fixed stop is removed. 3 is a partial cross-sectional view of the electrical measuring device of FIG. 1 along line 3-3, wherein the external push block lifting module has not yet pushed the hub assembly. Figure 4 is an exploded view showing the carrier block, the hub assembly, the elastic sealing structure and the circuit board. Fig. 5 is a partially enlarged view showing Fig. 3. Fig. 6 is a cross-sectional view showing the spotting probe and the hub module of Fig. 4 in an embodiment. Figure 7 is a cross-sectional view showing the spotting probe and the hub module of Figure 4 in another embodiment. Figure 8 is a perspective view showing the carrier block of Figure 4 in another perspective. Figure 9 is a side view showing the circuit board in Figure 4. Figure 10 is another cross-sectional view of the components of Figure 3, wherein the outer push block lift module pushes the hub assembly such that the carrier block abuts the fixed stop. 11 is a cross-sectional view showing the components of FIG. 3, wherein the outer push block lifting module continues to push the hub assembly toward the carrier block, thereby causing the hub assembly to abut the carrier block. Fig. 12 is a partially enlarged view showing Fig. 11. Figure 13 is a partial side elevational view showing the electrical measuring device of Figure 1. Figure 14 is a partial cross-sectional view showing the structure of Figure 3 in another embodiment. FIG. 15 is a flow chart showing an electrical measurement method according to an embodiment of the present invention. Figure 16 is a partially exploded perspective view showing the electrical measuring device according to another embodiment of the present invention. Figure 17 is a perspective view showing the combination of the probe assembly including the carrier block and the hub assembly. Figure 18 is an exploded view of the probe assembly depicted in Figure 17. Figure 19 is a combined perspective view showing the probe assembly including the carrier block and the hub assembly at another viewing angle. Figure 20 is an exploded view of the probe assembly shown in Figure 19. Figure 21 is a perspective view showing the combination of the needle hub assembly and the elastic sealing structure. Figure 22 is a top plan view of the probe assembly illustrated in Figure 17. Figure 23 is a partial cross-sectional view along line 22-23 of Figure 22, in which the spot probe has not been in contact with the die. Figure 24 is a cross-sectional view taken along line 24-24 in Figure 22. Figure 25 is similar to Figure 23 except that the spot probe is in contact with the grain.

Claims (14)

An electrical measuring device for detecting a die, the electrical measuring device comprising: a carrying block having a carrying surface and a through hole communicating to the carrying surface, the carrying surface configured to carry the die, the through hole configured to communicate a vacuum source to fix the die to the bearing surface by vacuum adsorption; a needle holder assembly comprising a plurality of spotting probes configured to move toward or away from the carrier block to enable the points The probe contacts or moves away from the die through the through hole as the hub assembly moves, wherein the hub assembly further includes a circuit board having a plurality of contacts, the plurality of contacts being The plurality of spotting probes are electrically connected and exposed to the outside of the hub assembly; and a resilient sealing structure disposed between the carrier block and the hub assembly and configured to the carrier block and the hub The components remain airtight as they move relative to each other. The electrical testing device of claim 1, wherein the elastic sealing structure comprises a sealing member disposed between the bearing block and the hub assembly to maintain the carrier block and the hub assembly when moving relative to each other airtight. The electrical testing device of claim 2, wherein the elastic sealing structure further comprises an elastic member configured to provide an elastic restoring force of the bearing block relative to the needle hub assembly. The electrical testing device of claim 2, wherein the carrier block includes a mating hole that communicates with the through hole; the needle hub assembly includes a sliding mating portion configured to be slidably disposed in the mating hole; the needle tip of the plurality of spotting probes protruding from the sliding mating portion; the sealing member is disposed at the mating hole and mating with the sliding Between the ministries. The electric measuring device of claim 4, wherein the sliding mating portion of the needle hub assembly has an annular groove disposed on an outer circumferential surface thereof; the sealing member is a set of O-shaped grooves disposed in the annular groove a seal ring configured to slidably press against the bore wall of the mating hole. The electrical testing device of claim 5, wherein the elastic sealing structure further comprises an elastic member disposed between the bearing block and the hub assembly to provide the bearing block and the needle holder assembly relatively far away from each other Elastic recovery. The electrical testing device of claim 6, wherein the elastic sealing structure further comprises a positioning member fixed to the bearing block or the needle seat assembly; the elastic member is a coil spring sleeved on the positioning member And being pre-compressed between the carrier block and the hub assembly. The electric measuring device of claim 4, wherein the needle seat assembly comprises an airtight flow passage, the airtight flow prop has an opening on a top surface of the sliding matching portion, the opening communicating with the matching hole The plurality of spotting probes are disposed in the airtight flow path and partially pass through the opening of the airtight flow path at the top surface of the sliding matching portion to protrude from the sliding matching portion. The electrical testing device of claim 8, wherein each of the spotting probes has a horizontal segment and a vertical segment integrally connected to the horizontal segment, one end of the horizontal segment being fixed to the circuit board and the circuit The contacts of the board are electrically connected; the horizontal section of each of the spotting probes is located in the airtight channel, and the vertical section protrudes partially from the sliding mating portion. The electric measuring device according to claim 9, wherein the sliding mating portion of the needle hub assembly has an annular groove disposed on an outer circumferential surface thereof; the sealing member is a set of O-shaped grooves disposed in the annular groove a sealing ring, the O-ring is configured to slidably press against the hole wall of the mating hole; wherein the elastic sealing structure further comprises an elastic member and a positioning member, the elastic member is disposed on the bearing block and the needle seat assembly Providing an elastic restoring force of the carrier block and the needle holder assembly; the positioning member is fixed to the carrier block or the needle holder assembly; the elastic member is a coil spring sleeved on the positioning member and Pre-compressed between the carrier block and the hub assembly. The electrical testing device of claim 2, wherein the elastic sealing structure further comprises an elastic member configured to provide an elastic restoring force of the bearing block and the needle holder assembly; the electrical measuring device further comprises The coupling structure connects the carrier block and the hub assembly to prevent the carrier block and the hub assembly from disengaging from each other due to the elastic restoring force provided by the elastic member. The electrical testing device of claim 11, wherein the bonding structure comprises a coupling member, the coupling member has an accommodating space; the carrier block has a joint portion, and the needle hub assembly has a bearing block combination The joint portion corresponding to the position; the joint portion of the bearing block and the joint portion of the needle seat assembly is embedded in the accommodating space of the joint member. The electric measuring device of claim 2, wherein the carrying block has a heating portion; the electric measuring device further comprises an electric heater attached to the heating portion for being disposed on the carrying block The grains on the bearing surface are indirectly heated. The electric measuring device according to claim 13 further comprising an insulated lower cover, a heater fixing seat disposed in the insulating lower cover, a temperature sensor and a heat insulating upper cover; the electric heater is disposed on The heater holder is attached to a bottom surface of the heating portion; the temperature sensor is attached to the electric heater for sensing the temperature of the electric heater; and the heat insulating upper cover covers the heating portion One of the top surfaces is fixed to the heat insulating lower cover.