TWI648130B - Double-head plane grinding device - Google Patents

Abstract

The problem to be solved by the present invention is that even if vibration occurs during the grinding of the workpiece, it is difficult for the workpiece holding body to be displaced from the position during grinding. In order to solve the above problems, in the present invention, a plurality of stop bolts 62 are provided on the first workpiece holding body 30 and the second workpiece holding body 40. The inner case 8 is provided with a plurality of stoppers 63 to which the distal end portion of the stopper bolt 62 abuts. A distal end portion of at least one of the plurality of stop bolts 62 is shifted in a sliding direction from a distal end portion of the other stop bolts 62. At the time of grinding where the stopper bolt 62 and the stopper 63 abut, the first workpiece holding body 30 and the second workpiece holding body 40 are offset relative to the leading end portion of the stopper bolt 62 with respect to the guide rod 51. The axially tilted form is positioned.

Description

Double-head plane grinding device

The invention relates to a double-headed plane grinding device.

Hitherto, a double-headed planar polishing apparatus for polishing both surfaces of a thin plate-like workpiece such as a semiconductor wafer has been known (for example, refer to Patent Document 1).

This double-headed planar grinding apparatus includes a pair of workpiece holders, a guide rod, and a slide drive mechanism. The pair of workpiece holders are arranged to sandwich the workpieces, and support the workpieces in a non-contact manner by the pressure of the fluid. The guide rod supports a workpiece holder so that the workpiece holder can slide. This slide driving mechanism slides the workpiece holding body along the guide rod. In a state where the workpiece is supported by a pair of workpiece holders, the workpiece and the grindstone are rotated to polish the surfaces to be polished on both surfaces of the workpiece.

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2005-205528

In recent years, the pattern formed on the wafer surface has been continuously refined, and the depth of focus of the exposure device has become very shallow. Along with this, a relatively high level of flatness on the wafer surface is required.

However, there may be a case in which, when the surface to be polished of a workpiece is polished with a grindstone, vibrations generated during polishing are transmitted to the workpiece holding body, and the workpiece holding body is displaced from the position during grinding and is displaced. Once the workpiece holder is displaced, the distance between a pair of workpiece holders becomes larger, the shape of the workpiece becomes unstable, and the requirements for the flatness of the wafer surface cannot be met.

The present invention has been made in view of the problems described above, and an object thereof is to make it difficult for the workpiece holder to be displaced from the position during grinding even if vibration occurs during grinding of the workpiece.

The present invention is directed to a double-headed planar grinding device, and adopts the following solutions. The double-headed surface grinding apparatus includes a first workpiece holder and a second workpiece holder, the first workpiece holder and the second workpiece holder are arranged to sandwich a thin plate-shaped workpiece, and the first workpiece holder And the second workpiece holding body hold the workpiece; a plurality of guide rods supporting the first workpiece holding body and the second workpiece holding body, so that the first workpiece holding body and the second workpiece holding body Slidable; a first cylinder and a second cylinder, the first cylinder and the second cylinder sliding the first workpiece holder and the second workpiece holder along the guide rod; and a pair of grinding stones, the grinding stones The to-be-polished surfaces on both surfaces of the workpiece held by the first workpiece holder and the second workpiece holder are polished.

That is, the invention of the first aspect is characterized in that the above-mentioned double-headed surface grinding apparatus is provided with a plurality of positioning members for using at least one of the first workpiece holder and the second workpiece holder. A state in which one side is inclined with respect to the axial direction of the guide rod at the position during grinding, the at least one of the first workpiece holding body and the second workpiece holding body is positioned, and the position during grinding is by the first workpiece The holding body and the second work holding body hold the position of the work.

In the first aspect of the invention, the first workpiece holding body and the second workpiece holding body are positioned at the position during grinding by a plurality of positioning members. At this time, at least one of the first work holding body and the second work holding body is in a form inclined with respect to the axial direction of the guide rod.

By adopting such a structure, the first and second workpiece holders are twisted relative to the guide rod. Therefore, even if vibration occurs during grinding of the workpiece, the first and second workpiece holders also have It is not easy to shift from the position during grinding. In this way, the first work holding body and the second work holding body can be used to stably hold the work, thereby improving the grinding accuracy of the work.

The invention of the second aspect is based on the invention of the first aspect, and has the following characteristics: The first workpiece holding body and the second workpiece holding body are positioned parallel to each other in a state inclined at the position during the grinding with respect to the axial direction of the guide rod.

In the second aspect of the invention, the first workpiece holding body and the second workpiece holding body are inclined to the axial direction of the guide rod at the position during grinding and are parallel to each other. In this way, the distance between the first workpiece holding body and the second workpiece holding body can be kept constant, and the shape of the workpiece can be kept stable.

The third aspect of the invention is based on the first or second aspect of the invention, and has the feature that the double-headed surface grinding apparatus includes the first workpiece holder and the second workpiece holder. The housing, the positioning member has a plurality of stop bolts respectively provided on the first workpiece holding body and the second workpiece holding body, and the stop bolts are provided on the housing and provided for the stop bolts. A plurality of stoppers abutting the top end portion, and the top end portions of at least one of the plurality of stop bolts are arranged to be held toward the first workpiece relative to the top end portions of the other stop bolts. The sliding direction of the body and the second workpiece holding body is shifted.

In a third aspect of the invention, a plurality of stop bolts are provided on the first work holding body and the second work holding body, and a plurality of stop blocks are provided on the housing. In addition, the distal end portions of at least one stopper bolt are provided to be shifted in the sliding direction relative to the distal end portions of the other stopper bolts. In this way, when the stopper bolt is in contact with the stopper, the first work holder and the second work holder can be inclined by an amount offset from the tip end portion of the stopper bolt.

The fourth aspect of the invention is based on the first or second aspect of the invention, and has the feature that the double-headed surface grinding apparatus includes the first workpiece holder and the second workpiece holder. Of the shell, The positioning member has a plurality of stop bolts respectively provided on the first workpiece holding body and the second workpiece holding body, and a tip portion of the housing is provided for the stop bolts to abut against. A plurality of stoppers connected, abutment surfaces of at least one of the plurality of stoppers with respect to abutment faces of other stoppers facing the first workpiece holding body and the second The sliding direction of the work holder is shifted.

In a fourth aspect of the invention, a plurality of stop bolts are provided on the first work holding body and the second work holding body, and a plurality of stop blocks are provided on the housing. In addition, the abutment surface of the at least one stopper is arranged to be offset from the sliding direction of the abutment surface of the other stopper. In this way, when the stopper bolt comes into contact with the stopper, the first workpiece holding body and the second workpiece holding body can be inclined by an amount offset from the contact surface of the stopper.

The fifth aspect of the invention is based on any of the first to fourth aspects of the invention, and has the following characteristics: the double-headed planar grinding device is provided with an eccentric absorption mechanism which supports the eccentric absorption mechanism At least one of the first cylinder and the second cylinder enables the at least one of the first cylinder and the second cylinder to swing, and the eccentric absorption mechanism allows support in the first and second cylinders On the other hand, the cylinder rod of the swingable cylinder protrudes and retracts in a state inclined with respect to the sliding direction of the first workpiece holder and the second workpiece holder.

In a fifth aspect of the invention, at least one of the first cylinder and the second cylinder is supported by the eccentric absorption mechanism so as to be swingable. The eccentric absorption mechanism is constituted by, for example, a spherical bearing. In this way, even in the case where the first and second workpiece holders are inclined at positions during grinding, the first and second workpiece holders can be absorbed by the eccentric absorption mechanism. The inclination of the workpiece holder can smoothly project and retract the first cylinder rod and the second cylinder rod.

According to the present invention, since the first workpiece holding body and the second workpiece holding body are twisted with respect to the guide rod, even if vibration occurs during grinding of the workpiece, the first workpiece holding body and the first workpiece holding body The two workpiece holders are not easily displaced from the position during grinding. In this way, the first work holding body and the second work holding body can be used to stably hold the work, thereby improving the grinding accuracy of the work.

1‧‧‧Double-head plane grinding device

3‧‧‧ millstone

8‧‧‧Inner case

30‧‧‧ the first workpiece holder

35‧‧‧first cylinder

37‧‧‧First cylinder rod

40‧‧‧Second workpiece holder

45‧‧‧Second Cylinder

47‧‧‧Second cylinder rod

51‧‧‧Guide

55‧‧‧eccentric absorption mechanism

62‧‧‧stop bolt

63‧‧‧stop

70‧‧‧Positioning parts

W‧‧‧ Workpiece

FIG. 1 is a plan view showing a configuration of a double-headed planar polishing apparatus according to the first embodiment.

FIG. 2 is a front cross-sectional view when the workpiece holding body is located at a position at the time of loading and unloading the workpiece.

FIG. 3 is a front cross-sectional view showing the structure of a double-headed planar polishing apparatus.

FIG. 4 is a side cross-sectional view of the double-headed planar polishing apparatus when viewed from the right.

FIG. 5 is a plan view showing a state where the first work holding body and the second work holding body are separated from each other.

FIG. 6 is a plan view showing a state where the first work holding body and the second work holding body are positioned at positions during polishing.

FIG. 7 is a partially enlarged sectional view showing a state where the cylinder rod is swung.

FIG. 8 is a plan view showing a state where the first workpiece holding body and the second workpiece holding body according to the second embodiment are positioned at positions during polishing.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. It should be noted that the following preferred embodiments are merely examples in nature, and are not intended to limit the scope of the present invention, its application objects, or its uses. In each drawing, the directions of up, down, left, right, and right are indicated by arrows. Unless otherwise specified, directions such as up and down are described in the directions indicated by arrows.

<First Embodiment>

As shown in FIGS. 1 to 4, the double-headed planar grinding apparatus 1 includes a workpiece driving apparatus 2 and a grinding stone apparatus 4. This workpiece driving device 2 is used to hold and rotate a thin plate-shaped workpiece W such as a semiconductor wafer. This grinding stone device 4 grinds both surfaces of a workpiece W held by the workpiece driving device 2 and rotated by the workpiece driving device 2 using a grinding stone 3. The workpiece driving device 2 and the grindstone device 4 are detachably fixed to a horizontal base 5.

The workpiece driving device 2 is a device for holding and rotating the workpiece W while grinding both sides of the workpiece W. The workpiece driving device 2 includes a workpiece holding mechanism 6, a workpiece rotating mechanism 7, an inner casing 8, and a slide drive.机构 9 and outer shell 10. The workpiece holding mechanism 6 holds the workpiece W from the peripheral edge portion and both sides of the workpiece W. The workpiece rotation mechanism 7 rotates a workpiece W held by the workpiece holding mechanism 6. The inner case 8 accommodates and supports the workpiece holding mechanism 6 so that the workpiece holding mechanism 6 can move. The slide driving mechanism 9 slides the workpiece holding mechanism 6 relative to the inner case 8. The outer casing 10 supports the inner casing 8 and covers an outer side of the inner casing 8.

The inner case 8 is formed in a substantially rectangular box shape with openings above and below, and the inner case 8 is arranged on the upper side in the outer case 10. The outer case 10 is formed in a substantially rectangular box shape with an opening at the top, and the bottom surface of the outer case 10 is fixed to the upper surface of the base 5. A front side support portion 13 for supporting the front side of the inner case 8 is provided on the front side of the outer case 10, and a back side support portion 14 for supporting the rear side of the inner case 8 is provided on the rear side of the outer case 10.

The front support portion 13 supports the inner casing 8 so that the inner casing 8 can swing with its front side as a fulcrum. The front support portion 13 includes a pair of support rods 16 and a support bracket 17. The pair of support rods 16 are provided above the front sides of the side wall plates on the left and right sides of the outer case 10, respectively. The support bracket 17 is provided on the left and right sides of the front side of the inner casing 8, and the support rod 16 is slidably inserted through the support bracket 17. In this way, the inner casing 8 is supported by the support rod 16 via the support bracket 17 located on the front side of the inner casing 8 to be able to swing.

The rear supporting portion 14 supports the inner casing 8 so that the height position can be adjusted on the rear side of the inner casing 8. The rear supporting portion 14 includes a cam 21, a cam motor 23, and a cam follower. twenty four. The cam motor 23 drives the cam 21 to rotate via a cam shaft 22. The cam follower 24 is provided on the rear side of the inner case 8.

Here, when the cam motor 23 is operated, the cam 21 is driven to rotate via the cam shaft 22, and the position of the cam follower 24 which is in sliding contact with the cam 21 is moved up and down. That is, the inner casing 8 is supported by the cam 21 via the cam follower 24 on the rear side thereof so that the height position can be adjusted.

A dressing device 25 for dressing the grindstone 3 is arranged at a lower portion in the outer case 10. The dressing device 25 is detachably fixed to the base 5, for example.

The work holding mechanism 6 is composed of a first work holding body 30 and a second work holding body 40, which are opposed to each other and are supported by the inner housing 8 so as to be capable of being left and right. mobile.

The first work holder 30 includes a first support plate 31 and a first support pad 32, and the second work holder 40 includes a second support plate 41 and a second support pad 42. The first support plate 31 and the second support plate. 41 are respectively arranged in parallel with the vertical surface in the front-rear direction. The first support pad 32 is provided on a side of the first support plate 31 opposite to the second support plate 41. The second support pad 42 is provided on the second The side of the support plate 41 opposite to the first support plate 31.

It should be noted that, in FIG. 4, only the side surfaces of the first support plate 31 and the first support pad 32 are shown. However, since the structures of the first support plate 31 and the second support plate 41 are substantially the same, and The structure of a support pad 32 is substantially the same as that of the second support pad 42. Therefore, the side surfaces of the second support plate 41 and the second support pad 42 are omitted in the figure.

The first support pad 32 and the second support pad 42 support the work W from both sides of the work W in a non-contact manner by the pressure of a fluid such as water, and the first support pad 32 and the second support pad 42 are formed in a substantially circular plate shape. A plurality of fluid supplies for ejecting fluid are formed on the first support pad 32 on the side opposite to the second support pad 42 and on the second support pad 42 on the side opposite to the first support pad 32. Hole 65.

Grindstone cutout portions 66 are formed on the lower sides of the first support pad 32 and the second support pad 42. The cutout portions 66 for the grindstone are formed slightly from the outer edge sides of the first support pad 32 and the second support pad 42. Beyond the center positions of the first support pad 32 and the second support pad 42, the cutout portion 66 for the grindstone has an arc shape corresponding to the grindstone 3.

The first support plate 31 and the second support plate 41 are formed so that the size in the up-down direction is substantially equal to the first support pad 32 and the second support pad 42 and the size in the front-back direction is larger than the first support pad 32 and the second support pad 42. The first support pad 32 is detachably fixed at a substantially central position on the side opposite to the second support plate 41 on the first support plate 31, and the second support pad 42 is detachably fixed on the second support plate. A substantially central position on the side opposite to the first support plate 31 on 41. The first support plate 31 and the second support plate 41 are formed with cutout portions 67 corresponding to the cutout portions 66 for grindstones on the first support pad 32 and the second support pad 42 sides.

Four support rollers 61 are arranged on the first support plate 31 of the first work holding body 30, and the four support rollers 61 are arranged on the first work holding body 30 at substantially equal intervals along the outer periphery of the first support pad 32. On the side opposite to the second workpiece holding body 40 and on the periphery of the first support pad 32, the workpiece holding stage 60 for holding the workpiece W is supported by the four support rollers 61 and can rotate freely.

The workpiece holding stage 60 is formed in a ring shape capable of loosely fitting the workpiece W, and is formed on a part of the inner peripheral side of the workpiece holding stage 60, and a protrusion (not shown) protruding toward the inside in the radial direction and the workpiece are formed. The notches on the W side mesh with each other. In this way, as the workpiece holding stage 60 rotates in the circumferential direction, the workpiece W also rotates.

The work rotation mechanism 7 includes a work rotation motor 27 for rotating a work rotation shaft 26 having a work drive gear (not shown) attached to the tip. The rotational driving force of the work rotating motor 27 is transmitted to the work holding stage 60 via the work rotating shaft 26, and the work holding stage 60 rotates and the work W also rotates.

The first workpiece holding body 30 and the second workpiece holding body 40 are supported on the inner housing 8 side by a plurality of, for example, four guide rods 51 extending in the left-right direction, and can slide freely in the left-right direction. In other words, a total of four guide rods 51 are provided on the inner casing 8 side, one in the front, one in the back, and one in the top.

The first workpiece holding body 30 and the second workpiece holding body 40 are provided with four through holes 52 corresponding to the guide rod 51, and the four through holes 52 are provided in the first workpiece holding body 30 and the second workpiece holding body. 40 is located on the left and right sides of the first support pad 32 and the second support pad 42. The guide rod 51 on the inner casing 8 side is slidably fitted into the through hole 52 via the bushing 53 so that the first work holding body 30 and the second work holding body 40 are supported to be slidable in the left-right direction.

Here, it is preferable to use a double bush as the bush 53 to prevent the guide rod 51 from bending when the workpiece W is ground. However, if all the bushings 53 use double bushings, the total length of the device becomes longer. Therefore, in this embodiment, guidance for supporting the upper front portion and the lower rear portion on the first workpiece holding body 30 side is provided. The bushing 53 of the rod 51 and the bushing 53 of the guide rod 51 supporting the lower front portion and the upper rear portion on the second workpiece holding body 40 side use a double bushing.

The first workpiece holding body 30 and the second workpiece holding body 40 are driven along the guide rod 51 by being driven by a slide driving mechanism 9 which is arranged between the upper and lower guide rods 51 and is arranged at the first position sandwiching the workpiece W Left and right sides of the workpiece holding body 30 and the second workpiece holding body 40.

The slide driving mechanism 9 includes a first cylinder 35 for sliding the first workpiece holding body 30 and a second cylinder 45 for sliding the second workpiece holding body 40. The first cylinder 35 and the second cylinder 45 are configured by, for example, a pneumatic cylinder.

The first cylinder 35 has a first cylinder body 36 and a first cylinder rod 37, and the first cylinder rod 37 extends or retracts from the first cylinder body 36. A right end portion of the first cylinder main body 36 is mounted on a left side wall of the inner casing 8. The left end portion of the first cylinder body 36 penetrates the outer casing 10 and protrudes to the left outside of the outer casing 10.

A distal end portion of the first cylinder rod 37 penetrates the inner case 8 and is swingably mounted on the first support plate 31 of the first workpiece holding body 30 via the eccentric absorption mechanism 55. The structure of the eccentric absorption mechanism 55 will be described later.

The second cylinder 45 has a second cylinder body 46 and a second cylinder rod 47 that extend or retract from the second cylinder body 46. The left end portion of the second cylinder body 46 is attached to the second support plate 41 of the second work holding body 40. The right end portion of the second cylinder body 46 penetrates the inner case 8 and the outer case 10 and protrudes to the right outside of the outer case 10. A distal end portion of the second cylinder rod 47 is swingably attached to the first support plate 31 of the first workpiece holding body 30 via an eccentric absorption mechanism 55. The structure of the eccentric absorption mechanism 55 will be described later.

By providing the slide driving mechanism 9, the first workpiece holding body 30 and the second workpiece holding body 40 are held at the “polishing position” (see FIG. 1) during polishing of the workpiece W. The “polishing position” is The first support pad 32 and the second support pad 42 are close to each other at substantially central positions in the left-right direction in the inner case 8.

A cylindrical cover 54 is provided on the first workpiece holding body 30 and the second workpiece holding body 40. The cover 54 covers the guide rod 51 and the second cylinder rod 47 so that the guide rod 51, The second cylinder rod 47 is not exposed. Specifically, a cover 54 for covering the guide rod 51 at the upper front portion and the guide rod 51 at the lower rear portion is provided on the second support plate 41 on the side opposite to the first support plate 31. A cover 54 for covering the second cylinder rod 47 is provided on the second support plate 41 on the side opposite to the first support plate 31. A cover 54 for covering the guide rod 51 at the lower front portion and the guide rod 51 at the upper rear portion is provided on a side of the first support plate 31 opposite to the second support plate 41.

During loading and unloading of the workpiece W, the first workpiece holding body 30 and the second workpiece holding body 40 are changed from the state of being at the “position during grinding” to being held at the “position of workpiece during loading and unloading” (see FIG. 2), and the “position during workpiece loading and unloading” It is a position where only the second cylinder 45 is operated in a direction in which the second cylinder rod 47 protrudes, so that the second workpiece holder 40 is separated from the first workpiece holder 30 by a predetermined distance.

When dressing the grindstone 3 with the dressing device 25, for example, the first work holding body 30 and the second work holding body 40 are changed from being in the "Position during grinding" state to being held in the "Position during dressing operation" (see FIG. 3). The “position during trimming operation” is that the second cylinder 45 works in a direction (left) where the second cylinder rod 47 protrudes, and the first cylinder 35 works in a direction (left) where the first cylinder rod 37 retracts. As a result, the first workpiece holding body 30 and the second workpiece holding body 40 are moved in positions away from each other.

At the “position during grinding”, in order to support the workpiece W in a non-contact manner by the pressure of the fluid, the distance between the first support pad 32 and the second support pad 42 is very important. Then, in order to accurately position the first workpiece holding body 30 and the second workpiece holding body 40 at the “position during grinding”, a plurality of positioning members 70 are provided.

As shown in FIG. 5, the positioning member 70 includes a stopper bolt 62 and a stopper 63. Stop bolts 62 are respectively provided on the four corner portions of the first work holding body 30 and the second work holding body 40 and are held by the bolt holding portions 64. The amount of protrusion of the stopper bolt 62 from the bolt holder 64 can be adjusted by advancing and retreating the tip end portion of the stopper bolt 62 in the sliding direction of the first and second work holders 30 and 40.

The stopper 63 is provided on the inner case 8 side. The front stopper 63 and the rear stopper 63 are arranged in a line in the front-rear direction. In this way, the abutment surface of the stopper 63 that abuts the tip end portion of the stopper bolt 62 is located on the same plane extending in the front-rear direction.

Here, in the first workpiece holding body 30, the distal end portion of the stop bolt 62 on the rear side protrudes by a predetermined amount from the distal end portion of the stop bolt 62 on the front side. On the other hand, in the second workpiece holding body 40, the front end portion of the stop bolt 62 on the front side protrudes by a predetermined amount from the front end portion of the stop bolt 62 on the rear side.

It should be noted that, in FIG. 5, in order to easily understand that the front ends of the stop bolts 62 provided on the front and rear sides are offset from each other, the protruding amount of the stop bolts 62 is exaggerated. Actually, the offset between the stop bolts 62 on the front and rear sides is set to x [mm], and When the distance between the centers of the front and rear stop bolts 62 is D [mm], the relationship between x and D is set to satisfy the following formula (1).

0 <x / D <0.001 ... (1)

Specifically, when the distance D between the centers of the stop bolts 62 is 100 mm, the offset x is 0 to 0.1 mm (0 to 100 μm). More preferably, the offset x is set to 0.02 to 0.07 mm (20 to 70 μm).

For example, when the polishing device is a polishing device capable of polishing a workpiece W such as a 300 mm wafer, the center-to-center distance D of the stopper bolt 62 is about 400 mm. In this case, it is preferable to set the offset amount x to 0.08 to 0.28 mm (80 to 280 μm).

As shown in FIG. 6, when the stopper bolts 62 of the first and second workpiece holders 30 and 40 abut against the stoppers 63 on the inner housing 8 side, the first and second workpiece holders 30 and 30 The holding body 40 is positioned at the "position during polishing" in a state where the holding body 40 is inclined relative to the axial direction of the guide rod 51 by an amount offset from the distal end portion of the stopper bolt 62.

By adopting such a structure, the first and second workpiece holding bodies 30 and 40 are twisted relative to the guide rod 51. Therefore, even if vibration occurs during grinding of the workpiece W, the first and second workpiece holding bodies 30 and 30 The two workpiece holders 40 are not easily displaced from the position during grinding. In this way, the workpiece W can be stably held by the first workpiece holding body 30 and the second workpiece holding body 40, and the grinding accuracy of the workpiece W can be improved.

In addition, since the first workpiece holding body 30 and the second workpiece holding body 40 are inclined in parallel to each other at the “position during grinding”, the distance between the first workpiece holding body 30 and the second workpiece holding body 40 can be made. The distance is kept constant, so that the shape of the workpiece W is kept stable.

Further, in the present embodiment, the second cylinder rod 47 of the second cylinder 45 is mounted on the first workpiece holding body 30, and the second cylinder body 46 of the second cylinder 45 is mounted on the second workpiece holding body 40. That is, the second cylinder 45 is not directly mounted on the inner casing 8. Therefore, at the “Position during grinding”, the impact when the stopper bolts 62 of the first workpiece holding body 30 and the second workpiece holding body 40 abut against the stopper 63 The force is transmitted between the first workpiece holding body 30 and the second workpiece holding body 40 via the stop bolt 62, and is not transmitted to the inner housing 8 side.

In this way, it is possible to suppress the occurrence of vibration, deflection, warping, deformation, and the like on the inner casing 8 side. As a result, the distance between the first work holding body 30 and the second work holding body 40 can be kept stable, and the work W can be polished with high accuracy.

At the “Position during grinding”, the first and second workpiece holders 30 and 40 may be inclined, so that the first and second cylinder rods 37 and 47 may not be smoothly projected and retracted.

Therefore, in the present embodiment, in order to allow the first cylinder rod 37 and the second cylinder rod 47 to protrude and retract in an inclined state, a spherical bearing is provided as the eccentric absorption mechanism 55.

Specifically, as shown in FIG. 7, the eccentric absorption mechanism 55 has a shape processed into a flat shape on the left and right sides, and holes are formed in the eccentric absorption mechanism 55 in the left-right direction. An eccentric absorption mechanism 55 is fastened and fixed to a distal end portion of the first cylinder rod 37 by a fastening bolt 58. An eccentric absorption mechanism 55 is similarly fastened and fixed to the front end portion of the second cylinder rod 47 by a fastening bolt 58.

Bearing seats 56 are embedded in the left and right sides of the first support plate 31, respectively. The bearing block 56 has a curved concave surface corresponding to the curved convex surface of the eccentric absorption mechanism 55. The bearing block 56 supports the eccentric absorption mechanism 55 so that the eccentric absorption mechanism 55 can slide. A clamping plate 57 is provided to the left of the left bearing seat 56. A clamping plate 57 is also provided on the right side of the right bearing seat 56. The left and right clamping plates 57 are fastened by fastening bolts 58 penetrating the first support plate 31 in the left-right direction, thereby sandwiching the left and right bearing holders 56 and the first support plate 31.

As described above, the top end portions of the first cylinder rod 37 and the second cylinder rod 47 are swingably mounted to the first support plate 31 of the first workpiece holding body 30 via the eccentric absorption mechanism 55, so that even in the first Even in the case where the first workpiece holding body 30 and the second workpiece holding body 40 are inclined at the "position during grinding", the first workpiece holding body 30 and the second workpiece holding body 55 can be absorbed by the eccentric absorption mechanism 55. The work holder 40 is inclined. In this way, the first cylinder rod 37 and the second cylinder rod 47 can be smoothly projected and retracted.

The grindstone device 4 includes a cup-shaped grindstone 3 and a drive motor (not shown) for driving the grindstone 3 to rotate, and one grindstone device 4 is arranged on each of the left and right sides of the workpiece driving device 2. The grindstone 3 of the grindstone device 4 is arranged so that the cutout portions 66 for the grindstone of the first support holder 32 and the second support pad 42 are interposed between the cutout portions 67 of the first workpiece holding body 30 and the second workpiece holding body 40 and the substrate. Both sides of the work W held by the work holding stage 60 are opposed to each other.

It should be noted that the grinding stone device 4 is configured to move the grinding stone 3 in the axial direction (left-right direction), and to move the grinding stone 3 from the "grinding position" to a predetermined "standby position" when the workpiece W is loaded and unloaded.

In the double-headed planar grinding apparatus 1 having the structure described above, when grinding the workpiece W, the grinding stone 3 is held at the "standby position" and the first workpiece holding body 30 and the second workpiece holding body 40 are held. The workpiece W is mounted on the workpiece holding stage 60 via the first workpiece holding body 30 and the second workpiece holding body 40 between the first workpiece holding body 30 and the second workpiece holding body in a state of being held at the “workpiece loading / unloading position”. (See Figure 2).

When the workpiece W is mounted on the workpiece holding stage 60, the second cylinder 45 works in a direction to retract the second cylinder rod 47, and the second workpiece holding body 40 moves toward the first workpiece holding body 30, so that the first The first support pad 32 and the second support pad 42 are held at the “positions during grinding of the workpiece” near the both sides of the workpiece W. Then, fluids such as air and water are ejected from the fluid supply holes 65 on the first support pad 32 and the second support pad 42 sides, and the workpiece W is located on the outer side of the grinding position by the grinding stone 3 from both sides thereof. Under the pressure of this fluid, it is maintained in a non-contact state.

In this state, the workpiece holding stage 60 is driven to rotate by the workpiece rotation motor 27, the workpiece W also starts to rotate as a result, and the grinding stones 3 on the left and right sides also start to rotate. When the workpiece W starts to rotate, the left and right grinding stones 3 start to rotate, and move from the "standby position" to gradually approach the workpiece W After that, the workpiece W is sandwiched on both sides by the left and right grinding stones 3 at the grinding position, and the grinding of the workpiece W is started.

When the grinding of the workpiece W is finished, the grinding stone 3 is moved from the "grinding position" to the "standby position", and the second workpiece holding body 40 is moved from the "grinding position" to the "workpiece loading and unloading position", and the workpiece W after grinding is It is removed from the workpiece holding stage 60 by a loader (not shown) and carried out.

<Second Embodiment>

Hereinafter, the same reference numerals are given to the same parts as those in the first embodiment, and only different parts will be described. As shown in FIG. 8, the positioning member 70 includes a stopper bolt 62 and a stopper 63. Stop bolts 62 are respectively provided on the four corner portions of the first work holding body 30 and the second work holding body 40 and are held by the bolt holding portions 64. The amount of protrusion of the stopper bolt 62 from the bolt holder 64 can be adjusted by advancing and retreating the tip end portion of the stopper bolt 62 in the sliding direction of the first and second work holders 30 and 40.

In the first workpiece holding body 30, the front and rear stop bolts 62 are adjusted such that the tip ends thereof are located on the same plane extending in the front-rear direction. Further, similarly, in the second workpiece holding body 40, the front and rear stop bolts 62 are adjusted so that the tip ends thereof are located on the same plane extending in the front-rear direction.

The stopper 63 is provided on the inner case 8 side. Here, the front stopper 63 is provided to the right by a predetermined offset amount with respect to the rear stopper 63. As a result, the contact surfaces on the left and right sides of the front stopper 63 are set to the right by a predetermined offset amount from the contact surfaces on the left and right sides of the rear stopper 63.

It should be noted that the relationship between the offset amount x [mm] of the stopper 63 and the center-to-center distance D [mm] of the stopper bolt 62 on the front and rear sides is the same as that of the first embodiment, so the description is omitted .

When the stopper bolts 62 of the first workpiece holding body 30 and the second workpiece holding body 40 abut against the stopper 63 on the inner housing 8 side, the first workpiece holding body 30 and the second workpiece holding body 40 are in contact with each other. The amount by which the abutment surface of the stopper 63 is shifted is positioned at the “Position at the time of grinding” correspondingly to the aspect in which the axial direction of the guide rod 51 is inclined.

<Other embodiments>

The embodiment can also adopt a structure described below.

In the present embodiment, an example is shown in which the grindstone 3 is arranged as a double-headed flat grinding device facing each other in the left-right direction. However, it can also be applied to other double-headed flat grinding devices, such as having the grindstone 3 up and down. A device having a structure opposed to each other.

In this embodiment, the directions of the front, back, left, and right directions are shown by arrows in the drawings, and the structure of the device is described in the directions shown by these arrows. The actual forward, backward, leftward, and rightward directions may be opposite to the directions shown by the arrows in each drawing.

In the present embodiment, the first workpiece holding body 30 and the second workpiece holding body 40 are positioned in a state of being inclined with respect to the axial direction of the guide rod 51 at the "position during polishing", but for example, only the second workpiece holding body 30 may be positioned. The work holding body 40 is inclined.

In this embodiment, four stop bolts 62 and four stop blocks 63 are provided, but at least three stop bolts 62 and three stop blocks 63 may be provided.

[Industrial availability]

As described above, the present invention can obtain a highly practical effect such that it is difficult to shift the position of the workpiece holder from the position during grinding even if vibration occurs during grinding of the workpiece. Therefore, it is very useful and has industrial applicability. high.

Claims (5)

A double-headed planar grinding device includes a first workpiece holder and a second workpiece holder, the first workpiece holder and the second workpiece holder are arranged to sandwich a thin plate-shaped workpiece, and the first workpiece holder The workpiece holding body and the second workpiece holding body hold the workpiece; a plurality of guide rods supporting the first workpiece holding body and the second workpiece holding body, so that the first workpiece holding body and the second workpiece A holder capable of sliding; a first cylinder and a second cylinder that slide the first work holder and the second work holder along the guide rod; and a pair of grinding stones, the The grindstone grinds the to-be-polished surfaces on both surfaces of the workpiece held by the first workpiece holder and the second workpiece holder, and the double-headed planar grinding device is characterized in that the double-headed planar grinding device includes a plurality of Positioning members for positioning at least one of the first workpiece holding body and the second workpiece holding body with respect to the guide rod at a position during grinding The axially inclined form positions the at least one of the first workpiece holding body and the second workpiece holding body, and the position during grinding is to hold the workpiece by the first workpiece holding body and the second workpiece holding body. s position. The double-headed flat grinding device according to claim 1, wherein the first workpiece holding body and the second workpiece holding body are in an axial direction with respect to the guide rod at the position during the grinding. The inclined forms are positioned parallel to each other. The double-headed surface grinding device according to claim 1 or 2, wherein the double-headed surface grinding device includes a housing that houses the first workpiece holder and the second workpiece holder, and the positioning The component includes a plurality of stop bolts provided on the first work holder and the second work holder, respectively, and a plurality of stop bolts provided on the housing and abutting the tip ends of the stop bolts. Stoppers, the top end portions of at least one of the plurality of stopper bolts are arranged to face the first workpiece holder and the second workpiece relative to the top end portions of the other stopper bolts. The sliding direction of the holding body is shifted. The double-headed surface grinding device according to claim 1 or 2, wherein the double-headed surface grinding device includes a housing that houses the first workpiece holder and the second workpiece holder, and the positioning The component includes a plurality of stop bolts provided on the first work holder and the second work holder, respectively, and a plurality of stop bolts provided on the housing and abutting the tip ends of the stop bolts. Stoppers, the abutment surfaces of at least one of the plurality of stoppers with respect to the abutment surfaces of the other stoppers face the first workpiece holder and the second workpiece holder The sliding direction is offset. The double-headed planar grinding device according to claim 1, wherein the double-headed planar grinding device includes an eccentric absorption mechanism that supports the first cylinder and the second cylinder. At least one of which enables the at least one of the first cylinder and the second cylinder to swing, and the eccentric absorption mechanism allows the cylinder rods of the cylinders supported by the first and second cylinders to be swingable relative to the The first work holding body and the second work holding body are slanted and retracted in a state in which the sliding direction is inclined.