TW201630686A - Dual-end surface grinding device - Google Patents

Abstract

The problem required to be solved in this invention retains the workpiece holding body to be difficult in displacing from the grinding position even if vibration is generated during workpiece grinding. For solving the aforementioned problem, in this invention, a first workpiece holder (30) and a second workpiece holder (40) are disposed thereon with a plurality of stopper bolts (62). The internal casing (8) is disposed thereon with a plurality of stopper blocks (63) leaning against the top end parts of the stopper bolts (62). The top end part of at least one stopper bolt (62) among the plurality of stopper bolts (62) is shifted toward the sliding direction relative to the top end parts of other stopper bolts (62). At the grinding position where the stopper bolt (62) leans against the stopper block (63), the first workpiece holder (30) and the second workpiece holder (40) are positioned in a configuration inclined to the axial direction of the guide rod (51) correspondingly relating to the shifted amount of the top end part of the stopper bolt (62).

Description

Double-head plane grinding device

The present invention relates to a double-headed planar grinding apparatus.

A double-head surface polishing apparatus for polishing both surfaces of a thin plate-shaped workpiece such as a semiconductor wafer has been known (for example, see Patent Document 1).

The double-head plane polishing apparatus includes a pair of workpiece holding bodies, a guide rod, and a slide drive mechanism. The pair of workpiece holding bodies are arranged to sandwich the workpiece, and the workpiece is supported non-contactly by the pressure of the fluid. The guide rod supports the workpiece holder to enable the workpiece holder to slide. The slide drive mechanism slides the workpiece holder along the guide rod. Further, in a state in which the workpiece is supported by the pair of workpiece holders, the workpiece and the grindstone are rotated to polish the surface to be polished on both surfaces of the workpiece.

[Patent Document] [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-205528

In recent years, the pattern formed on the surface of the wafer has been continuously miniaturized, and the depth of focus of the exposure apparatus has become very shallow, and along with this, the wafer surface is required to have a relatively high level of flatness.

However, there is a possibility that when the surface to be polished of the workpiece is polished by the grindstone, the vibration generated during the grinding is transmitted to the workpiece holding body, and the workpiece holding body is displaced from the position at the time of polishing. Once the workpiece holding body is displaced, the distance between the pair of workpiece holders becomes large, and the shape of the workpiece is unstable, so that the flatness of the wafer surface cannot be satisfied.

The present invention has been made in view of the above problems, and an object thereof is to make it difficult for a workpiece holder to be displaced from a position during polishing even if vibration occurs during polishing of a workpiece.

The present invention is directed to a double-headed planar polishing apparatus and adopts the following solutions. The double-head plane grinding device includes: a first workpiece holding body and a second workpiece holding body, the first workpiece holding body and the second workpiece holding body are arranged to sandwich the thin plate-shaped workpiece, and the first workpiece is held And the second workpiece holding body holds the workpiece; a plurality of guiding rods supporting the first workpiece holding body and the second workpiece holding body to make the first workpiece holding body and the second workpiece holding body Capable of sliding; a first cylinder and a second cylinder, the first cylinder and the second cylinder sliding the first workpiece holder and the second workpiece holder along the guiding rod; and a pair of grindstones, the grindstone The surface to be polished on both surfaces of the workpiece held by the first workpiece holding body and the second workpiece holding body is polished.

That is, the invention of the first aspect is characterized in that the above-described double-head plane grinding device is provided with a plurality of positioning members for at least one of the first workpiece holding body and the second workpiece holding body Positioning the at least one of the first workpiece holding body and the second workpiece holding body at a position inclined at a position at the time of grinding relative to the axial direction of the guiding rod, the grinding time position being the first workpiece The retaining body and the second workpiece retaining body maintain the position of the workpiece.

In the invention of the first aspect, the first workpiece holding body and the second workpiece holding body are positioned by the plurality of positioning members at the grinding position. At this time, at least one of the first workpiece holding body and the second workpiece holding body is inclined in the axial direction of the guide rod.

By adopting such a configuration, since the first workpiece holding body and the second workpiece holding body are in a state of being twisted with respect to the guide bar, even if vibration is generated in the grinding of the workpiece, the first workpiece holding body and the second workpiece holding body are also It is not easy to shift from the position when grinding. In this way, the first workpiece holding body and the second workpiece holding body can be stably held by the workpiece, so that the grinding accuracy of the workpiece can be improved.

The second aspect of the invention is based on the invention of the first aspect and has the following features:

The first workpiece holding body and the second workpiece holding body are positioned in parallel with each other in a state inclined at an axial position with respect to the guiding rod at the position of the grinding. In the second aspect of the invention, the first workpiece holding body and the second workpiece holding body are inclined in the axial position with respect to the guide rod at the position at the time of grinding and are parallel to each other. In this way, the distance between the first workpiece holder and the second workpiece holder can be kept constant, so that the shape of the workpiece is kept stable.

According to a third aspect of the invention, in the first or second aspect of the invention, the double-headed planar polishing apparatus includes the first workpiece holding body and the second workpiece holding body. The positioning member has a plurality of stop bolts respectively disposed on the first workpiece holding body and the second workpiece holding body, and is disposed on the housing and for the stop bolt a plurality of stoppers abutting at a top end portion, a top end portion of at least one of the plurality of stop bolts being disposed to be held toward the first workpiece with respect to a tip end portion of the other of the stopper bolts The body and the second workpiece holder are offset in a sliding direction.

In the third aspect of the invention, the first workpiece holding body and the second workpiece holding body are provided with a plurality of stopper bolts, and the housing is provided with a plurality of stoppers. Moreover, the tip end portion of the at least one stopper bolt is disposed to be displaced in the sliding direction with respect to the tip end portion of the other stopper bolt. In this way, when the stopper bolt abuts against the stopper, the first workpiece holding body and the second workpiece holding body can be inclined in accordance with the amount by which the tip end portion of the stopper bolt is offset.

According to a fourth aspect of the invention, in the first or second aspect of the invention, the double-headed planar polishing apparatus includes the first workpiece holding body and the second workpiece holding body. The positioning member has a plurality of stop bolts respectively disposed on the first workpiece holding body and the second workpiece holding body, and is disposed on the housing and for the stop bolt a plurality of stoppers abutting the top end portion, the abutting surface of the at least one of the plurality of stoppers facing the first workpiece holder and the abutting surface of the other of the stoppers The sliding direction of the second workpiece holding body is offset.

In the fourth aspect of the invention, the first workpiece holding body and the second workpiece holding body are provided with a plurality of stopper bolts, and the housing is provided with a plurality of stoppers. Moreover, the abutting faces of the at least one stop block are arranged to be offset with respect to the abutting surface sliding direction of the other stop blocks. In this way, when the stopper bolt abuts against the stopper, the first workpiece holding body and the second workpiece holding body can be inclined in accordance with the amount by which the abutting surface of the stopper is offset.

The fifth aspect of the invention is based on any of the first to fourth aspects, and has the following features: The double-headed planar polishing apparatus includes an eccentric absorbing mechanism, and the eccentric absorbing mechanism supports At least one of the first cylinder and the second cylinder enables the at least one of the first cylinder and the second cylinder to swing, and the eccentric absorbing mechanism allows the cylinder rod to be relative to the first The workpiece holding body and the second workpiece holding body are protruded and retracted in a state in which the sliding direction is inclined.

In the fifth aspect of the invention, at least one of the first cylinder and the second cylinder is supported by the eccentric absorbing mechanism to be swingable. The eccentric absorbing mechanism is constituted by, for example, a spherical bearing. In this manner, even when the first workpiece holding body and the second workpiece holding body are inclined at the position at the time of polishing, the first workpiece holding body and the second body can be absorbed by the eccentric absorbing mechanism. Since the workpiece holding body is inclined, the first cylinder rod and the second cylinder rod can be smoothly protruded and retracted.

According to the present invention, since the first workpiece holding body and the second workpiece holding body are in a state of being twisted with respect to the guide bar, even if vibration is generated in the grinding of the workpiece, the first workpiece holding body and the second workpiece holding body are not easily obtained from Position shift during grinding. In this way, the first workpiece holding body and the second workpiece holding body can be stably held by the workpiece, so that the grinding accuracy of the workpiece can be improved.

Hereinafter, embodiments of the present invention will be described based on the drawings. It should be noted that the following preferred embodiments are merely examples in nature and are not intended to limit the scope of the invention, its application, or its use. In each of the figures, the directions of up and down, front, back, left and right are indicated by arrows. Unless otherwise specified, the directions of up and down and the like are indicated in the directions indicated by the arrows.

<First Embodiment> As shown in FIGS. 1 to 4 , a double-head plane polishing apparatus 1 includes a workpiece driving device 2 and a grindstone device 4 . The workpiece driving device 2 is for holding a thin plate-shaped workpiece W such as a semiconductor wafer and driving the workpiece W to rotate. The grinding stone device 4 grinds both surfaces of the workpiece W held by the workpiece driving device 2 and rotated by the workpiece driving device 2 by means of a grinding stone 3. The workpiece drive unit 2 and the grindstone unit 4 are detachably fixed to the horizontal base 5.

The workpiece driving device 2 is a device for holding the workpiece W and driving the rotation of the workpiece W when polishing both surfaces of the workpiece W. The workpiece driving device 2 includes a workpiece holding mechanism 6, a workpiece rotating mechanism 7, an inner casing 8, and a sliding drive. Mechanism 9 and outer casing 10. The workpiece holding mechanism 6 holds the workpiece W from the peripheral portion and the both sides of the workpiece W. The workpiece rotating mechanism 7 drives the workpiece W held by the workpiece holding mechanism 6 to rotate. The inner casing 8 houses the workpiece holding mechanism 6 and supports the workpiece holding mechanism 6 to move the workpiece holding mechanism 6. The slide drive mechanism 9 causes the workpiece holding mechanism 6 to slide relative to the inner casing 8. The outer casing 10 supports the inner casing 8 and covers the outer side of the inner casing 8.

The inner casing 8 is formed in an approximately rectangular box shape having an opening above and below, and the inner casing 8 is disposed on the upper side in the outer casing 10. The outer casing 10 is formed in an approximately rectangular box shape having an opening above, and the bottom surface of the outer casing 10 is fixed to the upper surface of the base 5. A front side support portion 13 for supporting the front side of the inner casing 8 is provided on the front side of the outer casing 10, and a rear side support portion 14 for supporting the rear side of the inner casing 8 is provided on the rear side of the outer casing 10.

The front side support portion 13 supports the inner casing 8 so that the inner casing 8 can swing with its front side as a fulcrum, and the front side support portion 13 includes a pair of support rods 16 and a support bracket 17. The pair of support rods 16 are respectively disposed above the front side of the side wall panels on the right and left sides of the outer casing 10. The support bracket 17 is disposed on the left and right sides of the front side of the inner casing 8, and the support rod 16 is slidably inserted through the support bracket 17. In this way, the inner casing 8 can be oscillated by being supported by the support rod 16 via the support bracket 17 on the front side thereof.

The rear side support portion 14 supports the inner casing 8 such that the height position can be adjusted on the rear side of the inner casing 8. The rear side support portion 14 includes a cam 21, a cam motor 23, and a cam follower 24. The cam motor 23 drives the cam 21 to rotate via the cam shaft 22. The cam follower 24 is disposed on the rear side of the inner casing 8.

Here, when the cam motor 23 is operated, the cam 21 is driven to rotate via the cam shaft 22, and the position of the cam follower 24 that is in sliding contact with the cam 21 is moved up and down. That is, the inner casing 8 is supported by the cam 21 via the cam 21 on the rear side thereof in such a manner as to be capable of height position adjustment.

A trimming device 25 for trimming the grindstone 3 is disposed at a lower portion of the outer casing 10. The dressing device 25 is detachably fixed to the base 5, for example.

The workpiece holding mechanism 6 is composed of a first workpiece holding body 30 and a second workpiece holding body 40, which are opposed to each other and supported by the inner casing 8 in the left-right direction. mobile.

The first workpiece holding body 30 is provided with a first support plate 31 and a first support pad 32, and the second workpiece holding body 40 is provided with a second support plate 41 and a second support pad 42, the first support plate 31 and the second support plate 41 are respectively arranged in parallel with the vertical plane in the front-rear direction, the first support pad 32 is provided on the side of the first support plate 31 opposite to the second support plate 41, and the second support pad 42 is provided in the second The side of the support plate 41 opposite to the first support plate 31.

It should be noted that, in FIG. 4, only the side faces of the first support plate 31 and the first support pad 32 are shown, but since the structures of the first support plate 31 and the second support plate 41 are substantially the same, and The structure of a support pad 32 and the second support pad 42 are substantially the same, and thus the sides of the second support plate 41 and the second support pad 42 are omitted in the drawings.

The first support pad 32 and the second support pad 42 support the workpiece W non-contactly from both sides of the workpiece W by the pressure of a fluid such as water, and the first support pad 32 and the second support pad 42 are formed in a substantially disk shape. A plurality of fluid supplies for ejecting fluid are formed on a side of the first support pad 32 opposite the second support pad 42 and on a side of the second support pad 42 opposite the first support pad 32. Hole 65.

On the lower side of the first support pad 32 and the second support pad 42, a grindstone notch portion 66 is formed, which is formed from the outer edge side of the first support pad 32 and the second support pad 42 to a slight The grindstone notch portion 66 has an arc shape corresponding to the grindstone 3 beyond the center positions of the first support pad 32 and the second support pad 42.

The first support plate 31 and the second support plate 41 are formed to have a size in the up-and-down direction substantially equal to the first support pad 32 and the second support pad 42 and the dimension in the front-rear direction is larger than the first support pad 32 and the second support pad 42. An approximately rectangular shape, the first support pad 32 is detachably fixed to a substantially central position of the first support plate 31 opposite to the second support plate 41, and the second support pad 42 is detachably fixed to the second support plate A substantially central position of the side of the 41 opposite to the first support plate 31. A notch portion 67 corresponding to the grindstone notch portion 66 on the first support pad 32 and the second support pad 42 side is formed on the first support plate 31 and the second support plate 41.

Four support rollers 61 are disposed on the first support plate 31 of the first workpiece holding body 30, and the four support rollers 61 are arranged on the first workpiece holding body 30 at substantially equal intervals along the outer circumference of the first support pad 32. On the side opposite to the second workpiece holding body 40 and on the peripheral portion of the first support pad 32, the workpiece holding stage 60 for holding the workpiece W is rotatably supported by the four support rollers 61.

The workpiece holding stage 60 is formed in an annular shape in which the workpiece W can be loosely fitted, and is formed on a part of the inner peripheral side of the workpiece holding stage 60, and is not shown in the radial direction. The notches on the W side mesh with each other. As a result, as the workpiece holding stage 60 rotates in the circumferential direction, the workpiece W also rotates.

The workpiece rotating mechanism 7 is provided with a workpiece rotating motor 27 for rotating a workpiece rotating shaft 26 to which a workpiece driving gear (not shown) is attached at its tip end. The rotational driving force of the workpiece rotating motor 27 is transmitted to the workpiece holding stage 60 via the workpiece rotating shaft 26, and the workpiece W is also rotated while the workpiece holding stage 60 is rotated.

The first workpiece holding body 30 and the second workpiece holding body 40 are supported by the plurality of, for example, four guiding rods 51 extending in the left-right direction on the side of the inner casing 8 so as to be freely slidable in the left-right direction. In other words, on the inner casing 8 side, a guide rail 51 having a total of four front and rear and a total of four is provided.

Four through holes 52 corresponding to the guide bars 51 are provided on the first workpiece holding body 30 and the second workpiece holding body 40, and the four through holes 52 are provided in the first workpiece holding body 30 and the second workpiece holding body 40 is also at the position of the left and right sides of the first support pad 32 and the second support pad 42. The guide rod 51 on the inner casing 8 side is slidably fitted to the through hole 52 via the bushing 53, so that the first workpiece holding body 30 and the second workpiece holding body 40 are supported to be slidable in the left-right direction.

Here, as the bushing 53, it is preferable to use a double bush to prevent the guide rod 51 from being bent when the workpiece W is polished. However, if all of the bushings 53 use a double bushing, the total length of the device becomes long, so in the present embodiment, the guide for supporting the upper front portion and the lower rear portion on the side of the first workpiece holding body 30 is provided. The bushing 53 of the lever 51 and the bushing 53 that supports the lower front portion and the upper rear guide bar 51 on the second workpiece holding body 40 side use a double bushing.

The first workpiece holding body 30 and the second workpiece holding body 40 are driven by the slide drive mechanism 9 to slide along the guide rod 51, which is disposed between the upper and lower guide rods 51 and disposed at the first position sandwiching the workpiece W The left and right sides of the workpiece holding body 30 and the second workpiece holding body 40.

The slide drive mechanism 9 is provided with a first cylinder 35 for sliding the first workpiece holding body 30 and a second cylinder 45 for sliding the second workpiece holder 40. The first cylinder 35 and the second cylinder 45 are constituted by, for example, a pneumatic cylinder.

The first cylinder 35 has a first cylinder body 36 and a first cylinder rod 37 that extends or retracts from the first cylinder body 36 to the first cylinder body 36. The right end portion of the first cylinder body 36 is mounted on the left side wall of the inner casing 8. The left end portion of the first cylinder main body 36 penetrates the outer casing 10 to protrude to the left outer side of the outer casing 10.

The distal end portion of the first cylinder rod 37 penetrates the inner casing 8 and is swingably attached to the first support plate 31 of the first workpiece holding body 30 via the spherical bearing 55. It should be noted that the structure of the spherical bearing 55 will be described later.

The second cylinder 45 has a second cylinder body 46 and a second cylinder rod 47 that extends or retracts from the second cylinder body 46 to the second cylinder body 46. The left end portion of the second cylinder main body 46 is mounted on the second support plate 41 of the second workpiece holding body 40. The right end portion of the second cylinder main body 46 penetrates the inner casing 8 and the outer casing 10 to protrude to the right outer side of the outer casing 10. The distal end portion of the second cylinder rod 47 is swingably attached to the first support plate 31 of the first workpiece holding body 30 via the spherical bearing 55. It should be noted that the structure of the spherical bearing 55 will be described later.

By providing the slide driving mechanism 9, when the workpiece W is polished, the first workpiece holding body 30 and the second workpiece holding body 40 are held at the "polishing position" (refer to FIG. 1), and the "grinding position" is The first support pad 32 and the second support pad 42 are located close to each other at a substantially central position in the left-right direction in the inner casing 8.

A cylindrical cover 54 is provided on the first workpiece holding body 30 and the second workpiece holding body 40, and the cover 54 covers the guide rod 51 and the second cylinder rod 47 to make the guide rod 51, at the "position at the time of grinding" The second cylinder rod 47 is not exposed. Specifically, a cover 54 for covering the guide bar 51 of the upper front portion and the guide bar 51 of the lower rear portion is provided on the side of the second support plate 41 opposite to the first support plate 31. A cover 54 for covering the second cylinder rod 47 is provided on the side of the second support plate 41 opposite to the first support plate 31. A cover 54 for covering the lower front guide bar 51 and the upper rear guide bar 51 is provided on the side of the first support plate 31 opposite to the second support plate 41.

When the workpiece W is attached or detached, the first workpiece holding body 30 and the second workpiece holding body 40 are changed from the state at the "position at the time of polishing" to the position at the time of "mounting and detaching the workpiece" (refer to FIG. 2), which is the position at the time of loading and unloading the workpiece. It is the position where only the second cylinder 45 is moved in the direction in which the second cylinder rod 47 protrudes, so that the second workpiece holding body 40 is away from the first workpiece holding body 30 by a predetermined distance.

When the grinding stone 3 is trimmed by the dressing device 25, for example, the first workpiece holding body 30 and the second workpiece holding body 40 are changed from the state at the "position at the time of grinding" to the position at the "dressing operation" (refer to FIG. 3). The "position at the time of trimming operation" is that the second cylinder 45 operates in a direction (leftward) in which the second cylinder rod 47 protrudes, and the first cylinder 35 operates in a direction (leftward) in which the first cylinder rod 37 is retracted. Thus, the first workpiece holding body 30 and the second workpiece holding body 40 are moved in a direction away from each other.

At the "position at the time of grinding", in order to support the workpiece W non-contactly by the pressure of the fluid, the distance between the first support pad 32 and the second support pad 42 is very important. Thus, in order to accurately position the first workpiece holding body 30 and the second workpiece holding body 40 at the "grinding position", a plurality of positioning members 70 are provided.

As shown in FIG. 5, the positioning member 70 has a stopper bolt 62 and a stopper 63. The stopper bolts 62 are respectively provided at the four corner portions of the first workpiece holding body 30 and the second workpiece holding body 40, and are held by the bolt holding portions 64. The amount of protrusion of the stopper bolt 62 from the bolt holding portion 64 can be adjusted by advancing and retracting the distal end portion of the stopper bolt 62 in the sliding direction of the first workpiece holding body 30 and the second workpiece holding body 40.

The stopper 63 is provided on the inner casing 8 side. The stopper block 63 on the front side and the stopper block 63 on the rear side are arranged in a row in the front-rear direction. Thus, the abutting faces of the stopper 63 that abut against the distal end portions of the stopper bolts 62 are located on the same plane extending in the front-rear direction.

Here, in the first workpiece holding body 30, the distal end portion of the stopper bolt 62 on the rear side protrudes by a predetermined amount from the distal end portion of the stopper bolt 62 on the front side. On the other hand, in the second workpiece holding body 40, the distal end portion of the stopper bolt 62 on the front side protrudes by a predetermined amount from the distal end portion of the stopper bolt 62 on the rear side.

In addition, in FIG. 5, in order to understand easily, the case where the front-end|tip part of the stopper bolt 62 provided in the front side and the back side is mutually mutually offset is demonstrated, and the protrusion amount of the stopper bolt 62 is enlarged. Actually, when the offset amount between the front and rear side stopper bolts 62 is x [mm], and the center-to-center distance of the front and rear side stopper bolts 62 is D [mm], the relationship between x and D It is set to satisfy the following formula (1).

0<x/D<0.001 ...(1)

Specifically, when the distance D between the centers of the stopper bolts 62 is 100 mm, the offset x is 0 to 0.1 mm (0 to 100 μm). More preferably, the offset x is set to 0.02 to 0.07 mm (20 to 70 μm).

For example, when the polishing apparatus is a polishing apparatus capable of polishing a workpiece W such as a 300 mm wafer, the center-to-center distance D of the stopper bolt 62 is about 400 mm. In this case, it is preferable to set the offset amount x to 0.08 to 0.28 mm (80 to 280 μm).

As shown in FIG. 6, when the stopper bolt 62 of the first workpiece holding body 30 and the second workpiece holding body 40 abuts against the stopper 63 on the inner casing 8 side, the first workpiece holding body 30 and the second workpiece The holding body 40 is positioned at the "grinding position" in a state in which it is inclined with respect to the axial direction of the guide rod 51 by an amount which is offset from the tip end portion of the stopper bolt 62.

By adopting such a configuration, since the first workpiece holding body 30 and the second workpiece holding body 40 are twisted with respect to the guide rod 51, even if vibration is generated in the grinding of the workpiece W, the first workpiece holding body 30 and the first The two workpiece holders 40 are also not easily displaced from the position at the time of polishing. In this way, the workpiece W can be stably held by the first workpiece holding body 30 and the second workpiece holding body 40, so that the polishing precision of the workpiece W can be improved.

Further, since the first workpiece holding body 30 and the second workpiece holding body 40 are inclined in parallel with each other at the "position at the time of grinding", it is possible to make the between the first workpiece holding body 30 and the second workpiece holding body 40 The distance is kept constant so that the shape of the workpiece W is kept stable.

Further, in the present embodiment, the second cylinder rod 47 of the second cylinder 45 is mounted on the first workpiece holding body 30, and the second cylinder main body 46 of the second cylinder 45 is mounted on the second workpiece holding body 40. That is, the second cylinder 45 is not directly mounted on the inner casing 8. Therefore, at the "position at the time of grinding", the impact force when the stopper bolt 62 of the first workpiece holding body 30 and the second workpiece holding body 40 abuts against the stopper 63 is held by the first workpiece via the stopper bolt 62. The transfer between the body 30 and the second workpiece holder 40 is performed instead of being transmitted to the inner casing 8 side.

In this way, it is possible to suppress the occurrence of vibration, deflection, warpage, deformation, and the like on the inner casing 8 side. As a result, the distance between the first workpiece holding body 30 and the second workpiece holding body 40 can be stabilized, and the workpiece W can be polished with high precision.

At the "position at the time of polishing", since the first workpiece holding body 30 and the second workpiece holding body 40 are inclined, the first cylinder rod 37 and the second cylinder rod 47 may not be smoothly protruded and retracted.

Therefore, in the present embodiment, in order to allow the first cylinder rod 37 and the second cylinder rod 47 to protrude and retract in an inclined state, a spherical bearing 55 as an eccentric absorbing mechanism is provided.

Specifically, as shown in FIG. 7 , the spherical bearing 55 has a shape in which the left and right sides of the spherical body are formed into a flat shape, and the spherical bearing 55 has a hole penetrating in the left-right direction. A spherical bearing 55 is fastened and fixed to the distal end portion of the first cylinder rod 37 by a fastening bolt 58. A spherical bearing 55 is also fastened and fixed to the distal end portion of the second cylinder rod 47 by a fastening bolt 58.

A bearing housing 56 is embedded in the left side surface and the right side surface of the first support plate 31, respectively. The bearing housing 56 has a curved concave surface corresponding to the curved convex surface of the spherical bearing 55, and the bearing housing 56 supports the spherical bearing 55 so that the spherical bearing 55 can slide. A holding plate 57 is provided to the left of the bearing housing 56 on the left side. A holding plate 57 is also provided on the right side of the bearing housing 56 on the right side. The holding plates 57 on the left and right sides are fastened by fastening bolts 58 that penetrate the first support plate 31 in the left-right direction, thereby sandwiching the left and right bearing housings 56 and the first support plate 31.

As described above, the tip end portions of the first cylinder rod 37 and the second cylinder rod 47 are swingably mounted to the first support plate 31 of the first workpiece holding body 30 via the spherical bearing 55, thereby even in the first workpiece When the holding body 30 and the second workpiece holding body 40 are inclined at the "polishing position", the inclination of the first workpiece holding body 30 and the second workpiece holding body 40 can be absorbed by the spherical bearing 55. . In this way, it is sufficient for the first cylinder rod 37 and the second cylinder rod 47 to smoothly protrude and retract.

The grindstone device 4 is provided with a cup-type grindstone 3 and a drive motor (illustration omitted) for driving the grindstone 3 to rotate, and a grindstone device 4 is disposed on each of the left and right sides of the workpiece drive device 2. The grindstone 3 of the grindstone device 4 is disposed so as to sandwich the notch portion 67 of the first workpiece holding body 30 and the second workpiece holding body 40 and the grindstone notch portion 66 of the first support pad 32 and the second support pad 42 The both sides of the workpiece W held by the workpiece holding stage 60 are opposed to each other.

The grinding stone device 4 is configured to be movable in the axial direction (left-right direction), and to move the grinding stone 3 from the "polishing position" to the predetermined "standby position" when the workpiece W is attached or detached.

In the double-headed surface grinding apparatus 1 having the structure as described above, when the grinding of the workpiece W is performed, the grinding stone 3 is held at the "standby position" and the first workpiece holding body 30 and the second workpiece holding body 40 are held. The workpiece W is mounted on the workpiece holding stage 60 between the first workpiece holding body 30 and the second workpiece holding body 40 by a loader (not shown) while being held in the "position at the time of workpiece loading and unloading". (Refer to Figure 2).

When the workpiece W is mounted on the workpiece holding stage 60, the second cylinder 45 is operated in a direction to retract the second cylinder rod 47, and the second workpiece holding body 40 is moved toward the first workpiece holding body 30, thereby A support pad 32 and a second support pad 42 are held in a "work-grinding position" close to both sides of the workpiece W. Then, fluid such as air or water is ejected from the fluid supply holes 65 on the side of the first support pad 32 and the second support pad 42, and the workpiece W is located outside the polishing position polished by the grindstone 3, on both sides thereof. The pressure of the fluid is withstood so as to be held in a non-contact state.

In this state, the workpiece holding stage 60 is driven to rotate by the workpiece rotating motor 27, and the workpiece W starts to rotate, and the grinding stones 3 on the left and right sides also start to rotate. When the workpiece W starts to rotate, the grindstones 3 on the left and right sides start to rotate, and move from the "standby position" to gradually approach the surface to be polished of the workpiece W, and thereafter the workpiece W is caught by the grindstone 3 on the left and right sides at the polishing position. The state of both sides starts the grinding of the workpiece W.

When the grinding of the workpiece W is completed, the grindstone 3 is moved from the "grinding position" to the "standby position", and the second workpiece holding body 40 is moved from the "grinding position" to the "position at the time of workpiece loading and unloading", and the workpiece W after grinding The loader (not shown) is taken out from the workpiece holding stage 60 and then carried out.

<Second Embodiment> Hereinafter, the same portions as those in the first embodiment will be denoted by the same reference numerals, and only different portions will be described. As shown in FIG. 8, the positioning member 70 has a stopper bolt 62 and a stopper 63. The stopper bolts 62 are respectively provided at the four corner portions of the first workpiece holding body 30 and the second workpiece holding body 40, and are held by the bolt holding portions 64. The amount of protrusion of the stopper bolt 62 from the bolt holding portion 64 can be adjusted by advancing and retracting the distal end portion of the stopper bolt 62 in the sliding direction of the first workpiece holding body 30 and the second workpiece holding body 40.

In the first workpiece holding body 30, the front side and the rear side stopper bolts 62 are adjusted such that their tip end portions are located on the same plane extending in the front-rear direction. Further, in the second workpiece holding body 40, similarly, the front side and the rear side stopper bolts 62 are adjusted such that the tip end portions thereof are located on the same plane extending in the front-rear direction.

The stopper 63 is provided on the inner casing 8 side. Here, the stopper block 63 on the front side is disposed to be shifted to the right by a predetermined offset amount with respect to the stopper block 63 on the rear side. As a result, the abutting surfaces on the left and right sides of the stopper block 63 on the front side are disposed to be shifted to the right by a predetermined offset amount with respect to the abutting surfaces on the left and right sides of the stopper block 63 on the rear side.

In addition, since the relationship between the offset amount x [mm] of the stopper 63 and the center-to-center distance D [mm] of the front and rear side stopper bolts 62 is the same as that of the first embodiment, the description is omitted. .

When the stopper bolts 62 of the first workpiece holding body 30 and the second workpiece holding body 40 abut against the stoppers 63 on the inner casing 8 side, the first workpiece holding body 30 and the second workpiece holding body 40 are The amount by which the abutting surface of the stopper 63 is offset is correspondingly positioned at the "grinding position" with respect to the form in which the axial direction of the guide rod 51 is inclined.

<Other Embodiments> The embodiment can also adopt the configuration described below.

In the present embodiment, an example in which the grindstone 3 is disposed to face the double-headed planar polishing apparatus in the left-right direction is shown, but it can also be applied to other double-headed planar polishing apparatuses, for example, having the grindstone 3 in the upper and lower sides. A device or the like that is opposed in the direction.

In the present embodiment, the front, rear, left, and right directions are indicated by arrows in the respective drawings, and the configuration of the device is described in the directions indicated by the arrows. However, the double-headed planar polishing apparatus 1 provided in the factory is provided. The actual front, rear, left and right directions may be opposite to the directions indicated by the arrows in the respective figures.

In the present embodiment, the first workpiece holding body 30 and the second workpiece holding body 40 are positioned in a state inclined at the "position at the time of grinding" with respect to the axial direction of the guide rod 51, but for example, only the second The workpiece holding body 40 is inclined.

In the present embodiment, four stop bolts 62 and four stoppers 63 are provided, but only at least three stop bolts 62 and three stoppers 63 are provided.

[Industrial Applicability] As described above, according to the present invention, it is possible to obtain a highly practical effect that the workpiece holder can be prevented from being displaced from the position during polishing even when vibration is generated during polishing of the workpiece, and therefore it is very useful. It is highly available in the industry.

1‧‧‧Double-head plane grinding device
3‧‧‧磨石
8‧‧‧Internal housing
30‧‧‧First workpiece holder
35‧‧‧First cylinder
37‧‧‧First cylinder rod
40‧‧‧Second workpiece holder
45‧‧‧Second cylinder
47‧‧‧Second cylinder rod
51‧‧‧ Guide rod
55‧‧‧Spherical bearings (eccentric absorbing mechanism)
62‧‧‧stop bolt
63‧‧‧stop block
70‧‧‧ Positioning parts
W‧‧‧Workpiece

Fig. 1 is a plan view showing a configuration of a double-head surface polishing apparatus according to a first embodiment of the present invention. Fig. 2 is a front cross-sectional view showing the workpiece holding body at a position at which the workpiece is attached or detached. 3 is a front cross-sectional view showing the structure of a double-headed planar polishing apparatus. Fig. 4 is a side cross-sectional view of the double-head plane polishing apparatus as seen from the right side. FIG. 5 is a plan view showing a state in which the first workpiece holding body and the second workpiece holding body are apart from each other. Fig. 6 is a plan view showing a state in which the first workpiece holding body and the second workpiece holding body are positioned at the position at the time of polishing. Fig. 7 is a cross-sectional view showing, in part, an enlarged state in which a cylinder rod is swung. FIG. 8 is a plan view showing a state in which the first workpiece holder and the second workpiece holder according to the second embodiment are positioned at the position at the time of polishing.

8‧‧‧Internal housing

30‧‧‧First workpiece holder

31‧‧‧First support plate

32‧‧‧First support pad

40‧‧‧Second workpiece holder

41‧‧‧Second support plate

42‧‧‧Second support mat

51‧‧‧ Guide rod

53‧‧‧ Bushing

54‧‧‧ Cover

62‧‧‧stop bolt

63‧‧‧stop block

64‧‧‧Bolt holding department

70‧‧‧ Positioning parts

Claims (5)

A double-head plane grinding apparatus comprising: a first workpiece holding body and a second workpiece holding body, the first workpiece holding body and the second workpiece holding body being arranged to sandwich a thin plate-shaped workpiece, and the first The workpiece holding body and the second workpiece holding body hold the workpiece; a plurality of guiding rods supporting the first workpiece holding body and the second workpiece holding body to make the first workpiece holding body and the second workpiece The holding body is slidable; the first cylinder and the second cylinder, the first cylinder and the second cylinder sliding the first workpiece holding body and the second workpiece holding body along the guiding rod; and a pair of grindstones, The grindstone grinds the surface to be polished on both surfaces of the workpiece held by the first workpiece holding body and the second workpiece holder, and the double-head plane polishing apparatus is characterized in that the double-head plane polishing apparatus includes a plurality of Positioning members for aligning at least one of the first workpiece holding body and the second workpiece holding body with respect to the lead at a position at the time of grinding The axially inclined shape of the rod positions the at least one of the first workpiece holding body and the second workpiece holding body, the grinding time position being maintained by the first workpiece holding body and the second workpiece holding body The position of the workpiece. The double-headed planar grinding apparatus according to claim 1, wherein: the first workpiece holding body and the second workpiece holding body are in an axial direction with respect to the guiding rod at the position at the time of grinding The inclined forms are positioned parallel to each other. The double-headed planar polishing apparatus according to claim 1 or 2, wherein the double-headed planar polishing apparatus includes a housing that houses the first workpiece holding body and the second workpiece holding body, the positioning The component has a plurality of stop bolts respectively disposed on the first workpiece holding body and the second workpiece holding body, and a plurality of stopper bolts provided on the housing and abutting the tip end portion of the stopper bolt a stopper, a top end portion of at least one of the plurality of stop bolts being disposed to face the first workpiece holder and the second workpiece with respect to a tip end portion of the other of the stopper bolts The sliding direction of the holding body is offset. The double-headed planar polishing apparatus according to claim 1 or 2, wherein the double-headed planar polishing apparatus includes a housing that houses the first workpiece holding body and the second workpiece holding body, the positioning The component has a plurality of stop bolts respectively disposed on the first workpiece holding body and the second workpiece holding body, and a plurality of stopper bolts provided on the housing and abutting the tip end portion of the stopper bolt Stopping block, the abutting surface of the at least one of the plurality of stopping blocks facing the first workpiece holding body and the second workpiece holding body with respect to the abutting faces of the other of the stopping blocks The sliding direction is offset. The double-head plane grinding apparatus according to claim 1, wherein: the double-head plane grinding apparatus includes an eccentric absorbing mechanism that supports the first cylinder and the second cylinder At least one of the first cylinder and the second cylinder being swingable, and the eccentric absorbing mechanism allows sliding of the cylinder rod relative to the first workpiece holder and the second workpiece holder When the direction is inclined, it protrudes and retracts.