[go: up one dir, main page]

TWI560161B - Apparatus for etching glass substrate and method of etching glass sustrate usnig the same - Google Patents

Apparatus for etching glass substrate and method of etching glass sustrate usnig the same

Info

Publication number
TWI560161B
TWI560161B TW103122213A TW103122213A TWI560161B TW I560161 B TWI560161 B TW I560161B TW 103122213 A TW103122213 A TW 103122213A TW 103122213 A TW103122213 A TW 103122213A TW I560161 B TWI560161 B TW I560161B
Authority
TW
Taiwan
Prior art keywords
etching glass
usnig
sustrate
same
glass substrate
Prior art date
Application number
TW103122213A
Other languages
English (en)
Other versions
TW201524927A (zh
Inventor
Moon Hwan Kim
Original Assignee
Moon Hwan Kim
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moon Hwan Kim filed Critical Moon Hwan Kim
Publication of TW201524927A publication Critical patent/TW201524927A/zh
Application granted granted Critical
Publication of TWI560161B publication Critical patent/TWI560161B/zh

Links

Classifications

    • H10P72/0424
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • H10P72/0448
    • H10P72/10
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133302Rigid substrates, e.g. inorganic substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Surface Treatment Of Glass (AREA)
TW103122213A 2013-12-20 2014-06-27 Apparatus for etching glass substrate and method of etching glass sustrate usnig the same TWI560161B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130160110A KR101373306B1 (ko) 2013-12-20 2013-12-20 유리기판의 식각 장치 및 이를 이용하는 유리기판의 식각 방법

Publications (2)

Publication Number Publication Date
TW201524927A TW201524927A (zh) 2015-07-01
TWI560161B true TWI560161B (en) 2016-12-01

Family

ID=50648434

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103122213A TWI560161B (en) 2013-12-20 2014-06-27 Apparatus for etching glass substrate and method of etching glass sustrate usnig the same

Country Status (2)

Country Link
KR (1) KR101373306B1 (zh)
TW (1) TWI560161B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108285274A (zh) * 2017-12-29 2018-07-17 江西沃格光电股份有限公司 防粘片刻蚀篮具、防粘片组件及玻璃片的刻蚀方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102286060B1 (ko) * 2017-06-01 2021-08-06 삼성디스플레이 주식회사 글라스 식각 장치 및 글라스 식각 방법
JP7183997B2 (ja) * 2019-08-29 2022-12-06 Agc株式会社 ガラス基板の処理方法
KR20230036568A (ko) * 2021-09-06 2023-03-15 삼성디스플레이 주식회사 플렉서블 표시 장치용 커버 윈도우의 제조 방법 및 플렉서블 표시 장치의 제조 방법
KR20240033714A (ko) * 2022-09-02 2024-03-13 삼성디스플레이 주식회사 유리 적재용 카세트 및 이를 이용한 유리 처리 방법
KR102759725B1 (ko) 2023-10-06 2025-02-03 김상호 유리기판 식각 시스템
KR102894632B1 (ko) 2024-03-06 2025-12-02 김상호 식각용 유리기판 카세트
KR102807684B1 (ko) 2024-03-06 2025-05-14 김상호 유리기판 식각 시스템

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040200788A1 (en) * 2003-04-07 2004-10-14 Houng Suk Shon Cassette for receiving glass substrates

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4079579B2 (ja) 2000-06-23 2008-04-23 Nec液晶テクノロジー株式会社 ウェット処理装置
JP5790494B2 (ja) 2011-12-28 2015-10-07 日本電気硝子株式会社 ガラス基板のエッチング方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040200788A1 (en) * 2003-04-07 2004-10-14 Houng Suk Shon Cassette for receiving glass substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108285274A (zh) * 2017-12-29 2018-07-17 江西沃格光电股份有限公司 防粘片刻蚀篮具、防粘片组件及玻璃片的刻蚀方法

Also Published As

Publication number Publication date
KR101373306B1 (ko) 2014-03-11
TW201524927A (zh) 2015-07-01

Similar Documents

Publication Publication Date Title
SG2014014054A (en) Device and Method for Alignment of substrates
TWI563560B (en) Substrate processing apparatus and substrate processing method
PL2860516T5 (pl) Urządzenie i sposób do sprawdzenia budowy podłoży mocowanych przylepnie
TWI560161B (en) Apparatus for etching glass substrate and method of etching glass sustrate usnig the same
PL3365289T3 (pl) Podłoża do zastosowania w sposobach wykrywania fluorescencji mające szklaną część podłoża
SG11201600923YA (en) Substrate structure and method of manufacturing same
TWI562221B (en) Substrate processing method and substrate processing apparatus
TWI563558B (en) Substrate treatment apparatus and substrate treatment method
EP3038444A4 (en) Substrate inspecting method and substrate inspecting system using same
EP2980837A4 (en) Substrate testing apparatus and substrate temperature adjustment method
EP3089202A4 (en) Method and apparatus for analyzing shape of wafer
TWI561123B (en) Plasma chamber and apparatus for treating substrate
EP3048640A4 (en) Electronic-component-equipped substrate and method for producing same
TWI799710B (zh) 用於基板表面處理之方法及裝置
IL239072A0 (en) Ion bombardment device and substrate surface cleaning method using the same
FI20135707L (fi) Menetelmä ja laitteisto substraatin pinnan pinnoittamiseksi
SG11201602316PA (en) Apparatus and method for bonding substrates
EP3073512A4 (en) Substrate treatment device and method
EP3087584A4 (en) Direct plasma densification process and semiconductor devices
EP3187861A4 (en) Substrate inspection device and substrate inspection method
EP3214641A4 (en) Method for manufacturing semiconductor device and resist glass
SG10201408268YA (en) Integrated circuit packaging system with vialess substrate and method of manufacture thereof
EP3037994A4 (en) Substrate inspection apparatus
GB2542316B (en) Manufacturing method and structure of oxide semiconductor TFT substrate
EP3088563A4 (en) Surface-treated substrate and substrate surface treatment method for same

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees