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TWI560161B - Apparatus for etching glass substrate and method of etching glass sustrate usnig the same - Google Patents

Apparatus for etching glass substrate and method of etching glass sustrate usnig the same

Info

Publication number
TWI560161B
TWI560161B TW103122213A TW103122213A TWI560161B TW I560161 B TWI560161 B TW I560161B TW 103122213 A TW103122213 A TW 103122213A TW 103122213 A TW103122213 A TW 103122213A TW I560161 B TWI560161 B TW I560161B
Authority
TW
Taiwan
Prior art keywords
etching glass
usnig
sustrate
same
glass substrate
Prior art date
Application number
TW103122213A
Other languages
Chinese (zh)
Other versions
TW201524927A (en
Inventor
Moon Hwan Kim
Original Assignee
Moon Hwan Kim
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Moon Hwan Kim filed Critical Moon Hwan Kim
Publication of TW201524927A publication Critical patent/TW201524927A/en
Application granted granted Critical
Publication of TWI560161B publication Critical patent/TWI560161B/en

Links

Classifications

    • H10P72/0424—
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • H10P72/0448—
    • H10P72/10—
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133302—Rigid substrates, e.g. inorganic substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Surface Treatment Of Glass (AREA)
TW103122213A 2013-12-20 2014-06-27 Apparatus for etching glass substrate and method of etching glass sustrate usnig the same TWI560161B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130160110A KR101373306B1 (en) 2013-12-20 2013-12-20 Apparatus for etching glass substrate and method of etching glass substrate using the same

Publications (2)

Publication Number Publication Date
TW201524927A TW201524927A (en) 2015-07-01
TWI560161B true TWI560161B (en) 2016-12-01

Family

ID=50648434

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103122213A TWI560161B (en) 2013-12-20 2014-06-27 Apparatus for etching glass substrate and method of etching glass sustrate usnig the same

Country Status (2)

Country Link
KR (1) KR101373306B1 (en)
TW (1) TWI560161B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108285274A (en) * 2017-12-29 2018-07-17 江西沃格光电股份有限公司 Residual plate etches the lithographic method of basket tool, residual plate component and sheet glass

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102286060B1 (en) * 2017-06-01 2021-08-06 삼성디스플레이 주식회사 Etching apparatus and etching method for glass
JP7183997B2 (en) * 2019-08-29 2022-12-06 Ａｇｃ株式会社 Glass substrate processing method
KR20230036568A (en) * 2021-09-06 2023-03-15 삼성디스플레이 주식회사 Manufacturing method of a cover window for a flexible display device and manufacturing method of the flexible display device
KR20240033714A (en) * 2022-09-02 2024-03-13 삼성디스플레이 주식회사 Cassette for loading glass and glass processign method using the same
KR102759725B1 (en) 2023-10-06 2025-02-03 김상호 Glass Substrate Etching System
KR102894632B1 (en) 2024-03-06 2025-12-02 김상호 Glass substrate cassette for etching
KR102807684B1 (en) 2024-03-06 2025-05-14 김상호 Glass Substrate Etching System

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040200788A1 (en) * 2003-04-07 2004-10-14 Houng Suk Shon Cassette for receiving glass substrates

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4079579B2 (en) 2000-06-23 2008-04-23 Ｎｅｃ液晶テクノロジー株式会社 Wet processing equipment
JP5790494B2 (en) 2011-12-28 2015-10-07 日本電気硝子株式会社 Etching method of glass substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040200788A1 (en) * 2003-04-07 2004-10-14 Houng Suk Shon Cassette for receiving glass substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108285274A (en) * 2017-12-29 2018-07-17 江西沃格光电股份有限公司 Residual plate etches the lithographic method of basket tool, residual plate component and sheet glass

Also Published As

Publication number Publication date
KR101373306B1 (en) 2014-03-11
TW201524927A (en) 2015-07-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees