TWI406881B - Novel polyimide resins and photosensitive polyimide resin compositions - Google Patents
Novel polyimide resins and photosensitive polyimide resin compositions Download PDFInfo
- Publication number
- TWI406881B TWI406881B TW097131881A TW97131881A TWI406881B TW I406881 B TWI406881 B TW I406881B TW 097131881 A TW097131881 A TW 097131881A TW 97131881 A TW97131881 A TW 97131881A TW I406881 B TWI406881 B TW I406881B
- Authority
- TW
- Taiwan
- Prior art keywords
- polyimide resin
- formula
- photosensitive
- polyimine resin
- acid dianhydride
- Prior art date
Links
- 229920001721 polyimide Polymers 0.000 title claims abstract description 70
- 239000009719 polyimide resin Substances 0.000 title claims abstract description 50
- 239000000203 mixture Substances 0.000 title claims abstract description 36
- -1 siloxane diamine compound Chemical class 0.000 claims abstract description 78
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims abstract description 61
- 150000004985 diamines Chemical class 0.000 claims abstract description 27
- 239000002253 acid Substances 0.000 claims abstract description 20
- 239000003431 cross linking reagent Substances 0.000 claims abstract description 20
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000011347 resin Substances 0.000 claims description 45
- 229920005989 resin Polymers 0.000 claims description 45
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 claims description 39
- 150000001875 compounds Chemical class 0.000 claims description 23
- 239000011342 resin composition Substances 0.000 claims description 17
- 125000006158 tetracarboxylic acid group Chemical group 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004642 Polyimide Substances 0.000 claims description 11
- 239000004593 Epoxy Substances 0.000 claims description 9
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 claims description 8
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 claims description 6
- BCHZICNRHXRCHY-UHFFFAOYSA-N 2h-oxazine Chemical group N1OC=CC=C1 BCHZICNRHXRCHY-UHFFFAOYSA-N 0.000 claims description 5
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Natural products C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 claims description 4
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 claims description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 4
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 4
- GYSCBCSGKXNZRH-UHFFFAOYSA-N 1-benzothiophene-2-carboxamide Chemical compound C1=CC=C2SC(C(=O)N)=CC2=C1 GYSCBCSGKXNZRH-UHFFFAOYSA-N 0.000 claims description 3
- GHVNFZFCNZKVNT-UHFFFAOYSA-N Decanoic acid Natural products CCCCCCCCCC(O)=O GHVNFZFCNZKVNT-UHFFFAOYSA-N 0.000 claims description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 3
- 239000004305 biphenyl Substances 0.000 claims description 3
- 235000019260 propionic acid Nutrition 0.000 claims description 3
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- HUWSZNZAROKDRZ-RRLWZMAJSA-N (3r,4r)-3-azaniumyl-5-[[(2s,3r)-1-[(2s)-2,3-dicarboxypyrrolidin-1-yl]-3-methyl-1-oxopentan-2-yl]amino]-5-oxo-4-sulfanylpentane-1-sulfonate Chemical compound OS(=O)(=O)CC[C@@H](N)[C@@H](S)C(=O)N[C@@H]([C@H](C)CC)C(=O)N1CCC(C(O)=O)[C@H]1C(O)=O HUWSZNZAROKDRZ-RRLWZMAJSA-N 0.000 claims 1
- 238000004132 cross linking Methods 0.000 abstract description 12
- 238000006243 chemical reaction Methods 0.000 abstract description 10
- ZHBXLZQQVCDGPA-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)sulfonyl]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(S(=O)(=O)C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 ZHBXLZQQVCDGPA-UHFFFAOYSA-N 0.000 abstract description 7
- 125000003368 amide group Chemical group 0.000 abstract 1
- 239000013039 cover film Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 21
- 239000000243 solution Substances 0.000 description 20
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 19
- 239000010410 layer Substances 0.000 description 17
- 238000006116 polymerization reaction Methods 0.000 description 17
- 239000003513 alkali Substances 0.000 description 14
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 12
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 11
- 239000000126 substance Substances 0.000 description 11
- 238000012360 testing method Methods 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 238000005227 gel permeation chromatography Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 238000007747 plating Methods 0.000 description 10
- 239000010931 gold Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 239000001257 hydrogen Substances 0.000 description 9
- 150000001412 amines Chemical class 0.000 description 7
- 239000004020 conductor Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 238000011161 development Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 239000006078 metal deactivator Substances 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000004793 Polystyrene Substances 0.000 description 5
- 125000003118 aryl group Chemical group 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229920002223 polystyrene Polymers 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- CMLFRMDBDNHMRA-UHFFFAOYSA-N 2h-1,2-benzoxazine Chemical compound C1=CC=C2C=CNOC2=C1 CMLFRMDBDNHMRA-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- HTQNYBBTZSBWKL-UHFFFAOYSA-N 2,3,4-trihydroxbenzophenone Chemical compound OC1=C(O)C(O)=CC=C1C(=O)C1=CC=CC=C1 HTQNYBBTZSBWKL-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 238000007259 addition reaction Methods 0.000 description 3
- 125000003277 amino group Chemical group 0.000 description 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 238000002845 discoloration Methods 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 238000006713 insertion reaction Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 3
- FMZPVXIKKGVLLV-UHFFFAOYSA-N 3-phenyl-2,4-dihydro-1,3-benzoxazine Chemical compound C1OC2=CC=CC=C2CN1C1=CC=CC=C1 FMZPVXIKKGVLLV-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229930185605 Bisphenol Natural products 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical group C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N ethyl benzoate Chemical compound CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002466 imines Chemical class 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- UKVIEHSSVKSQBA-UHFFFAOYSA-N methane;palladium Chemical compound C.[Pd] UKVIEHSSVKSQBA-UHFFFAOYSA-N 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 238000000425 proton nuclear magnetic resonance spectrum Methods 0.000 description 2
- 239000011541 reaction mixture Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- XBTRYWRVOBZSGM-UHFFFAOYSA-N (4-methylphenyl)methanediamine Chemical compound CC1=CC=C(C(N)N)C=C1 XBTRYWRVOBZSGM-UHFFFAOYSA-N 0.000 description 1
- KETQAJRQOHHATG-UHFFFAOYSA-N 1,2-naphthoquinone Chemical compound C1=CC=C2C(=O)C(=O)C=CC2=C1 KETQAJRQOHHATG-UHFFFAOYSA-N 0.000 description 1
- MSFRWCFRUFMTMS-UHFFFAOYSA-N 1,3-dibromo-2,2-dimethyl-3-(oxiran-2-ylmethoxy)propan-1-ol Chemical compound C(C1CO1)OC(C(C)(C(O)Br)C)Br MSFRWCFRUFMTMS-UHFFFAOYSA-N 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical class N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- SNTWKPAKVQFCCF-UHFFFAOYSA-N 2,3-dihydro-1h-triazole Chemical compound N1NC=CN1 SNTWKPAKVQFCCF-UHFFFAOYSA-N 0.000 description 1
- WTYYGFLRBWMFRY-UHFFFAOYSA-N 2-[6-(oxiran-2-ylmethoxy)hexoxymethyl]oxirane Chemical compound C1OC1COCCCCCCOCC1CO1 WTYYGFLRBWMFRY-UHFFFAOYSA-N 0.000 description 1
- KUAUJXBLDYVELT-UHFFFAOYSA-N 2-[[2,2-dimethyl-3-(oxiran-2-ylmethoxy)propoxy]methyl]oxirane Chemical compound C1OC1COCC(C)(C)COCC1CO1 KUAUJXBLDYVELT-UHFFFAOYSA-N 0.000 description 1
- FSYPIGPPWAJCJG-UHFFFAOYSA-N 2-[[4-(oxiran-2-ylmethoxy)phenoxy]methyl]oxirane Chemical compound C1OC1COC(C=C1)=CC=C1OCC1CO1 FSYPIGPPWAJCJG-UHFFFAOYSA-N 0.000 description 1
- PULOARGYCVHSDH-UHFFFAOYSA-N 2-amino-3,4,5-tris(oxiran-2-ylmethyl)phenol Chemical compound C1OC1CC1=C(CC2OC2)C(N)=C(O)C=C1CC1CO1 PULOARGYCVHSDH-UHFFFAOYSA-N 0.000 description 1
- PUCRCVZEFZKZAL-UHFFFAOYSA-N 3-[4-(2,3-dihydroxypropoxy)phenoxy]propane-1,2-diol Chemical compound OCC(O)COC1=CC=C(OCC(O)CO)C=C1 PUCRCVZEFZKZAL-UHFFFAOYSA-N 0.000 description 1
- LVGAZNUUPCRHIJ-UHFFFAOYSA-N 3-phenyl-6-[(3-phenyl-2,4-dihydro-1,3-benzoxazin-6-yl)methyl]-2,4-dihydro-1,3-benzoxazine Chemical compound C=1C=C2OCN(C=3C=CC=CC=3)CC2=CC=1CC(C=C1C2)=CC=C1OCN2C1=CC=CC=C1 LVGAZNUUPCRHIJ-UHFFFAOYSA-N 0.000 description 1
- ZXVONLUNISGICL-UHFFFAOYSA-N 4,6-dinitro-o-cresol Chemical group CC1=CC([N+]([O-])=O)=CC([N+]([O-])=O)=C1O ZXVONLUNISGICL-UHFFFAOYSA-N 0.000 description 1
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 1
- ILSLNOWZSKKNJQ-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]hept-4-ene Chemical compound C1=CCCC2OC21 ILSLNOWZSKKNJQ-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical class C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- 238000005481 NMR spectroscopy Methods 0.000 description 1
- 239000004693 Polybenzimidazole Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 108010039918 Polylysine Proteins 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- HEDRZPFGACZZDS-MICDWDOJSA-N Trichloro(2H)methane Chemical compound [2H]C(Cl)(Cl)Cl HEDRZPFGACZZDS-MICDWDOJSA-N 0.000 description 1
- 229920001646 UPILEX Polymers 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 125000005577 anthracene group Chemical group 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- JRPRCOLKIYRSNH-UHFFFAOYSA-N bis(oxiran-2-ylmethyl) benzene-1,2-dicarboxylate Chemical compound C=1C=CC=C(C(=O)OCC2OC2)C=1C(=O)OCC1CO1 JRPRCOLKIYRSNH-UHFFFAOYSA-N 0.000 description 1
- NEPKLUNSRVEBIX-UHFFFAOYSA-N bis(oxiran-2-ylmethyl) benzene-1,4-dicarboxylate Chemical compound C=1C=C(C(=O)OCC2OC2)C=CC=1C(=O)OCC1CO1 NEPKLUNSRVEBIX-UHFFFAOYSA-N 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229930188620 butyrolactone Natural products 0.000 description 1
- 239000007810 chemical reaction solvent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- DIOQZVSQGTUSAI-NJFSPNSNSA-N decane Chemical group CCCCCCCCC[14CH3] DIOQZVSQGTUSAI-NJFSPNSNSA-N 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- URQUNWYOBNUYJQ-UHFFFAOYSA-N diazonaphthoquinone Chemical compound C1=CC=C2C(=O)C(=[N]=[N])C=CC2=C1 URQUNWYOBNUYJQ-UHFFFAOYSA-N 0.000 description 1
- 125000001142 dicarboxylic acid group Chemical group 0.000 description 1
- 229940105990 diglycerin Drugs 0.000 description 1
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 1
- CZZYITDELCSZES-UHFFFAOYSA-N diphenylmethane Chemical compound C=1C=CC=CC=1CC1=CC=CC=C1 CZZYITDELCSZES-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- CCGKOQOJPYTBIH-UHFFFAOYSA-N ethenone Chemical compound C=C=O CCGKOQOJPYTBIH-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- NYMPGSQKHIOWIO-UHFFFAOYSA-N hydroxy(diphenyl)silicon Chemical group C=1C=CC=CC=1[Si](O)C1=CC=CC=C1 NYMPGSQKHIOWIO-UHFFFAOYSA-N 0.000 description 1
- 238000006358 imidation reaction Methods 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 150000002828 nitro derivatives Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004843 novolac epoxy resin Substances 0.000 description 1
- 238000010534 nucleophilic substitution reaction Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002480 polybenzimidazole Polymers 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000223 polyglycerol Polymers 0.000 description 1
- 229920000656 polylysine Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 150000004060 quinone imines Chemical class 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- RSPCKAHMRANGJZ-UHFFFAOYSA-N thiohydroxylamine Chemical group SN RSPCKAHMRANGJZ-UHFFFAOYSA-N 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1039—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors comprising halogen-containing substituents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1046—Polyimides containing oxygen in the form of ether bonds in the main chain
- C08G73/1053—Polyimides containing oxygen in the form of ether bonds in the main chain with oxygen only in the tetracarboxylic moiety
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1057—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
- C08G73/106—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing silicon
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1057—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain
- C08G73/1064—Polyimides containing other atoms than carbon, hydrogen, nitrogen or oxygen in the main chain containing sulfur
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/14—Polyamide-imides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/42—Block-or graft-polymers containing polysiloxane sequences
- C08G77/452—Block-or graft-polymers containing polysiloxane sequences containing nitrogen-containing sequences
- C08G77/455—Block-or graft-polymers containing polysiloxane sequences containing nitrogen-containing sequences containing polyamide, polyesteramide or polyimide sequences
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/10—Block- or graft-copolymers containing polysiloxane sequences
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0387—Polyamides or polyimides
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/70—Siloxanes defined by use of the MDTQ nomenclature
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
- C08K5/0025—Crosslinking or vulcanising agents; including accelerators
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/35—Heterocyclic compounds having nitrogen in the ring having also oxygen in the ring
- C08K5/357—Six-membered rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Description
本發明係關於一種新穎聚醯亞胺樹脂及含有其之感光性聚醯亞胺樹脂組成物。
於製造可撓性印刷配線與硬式配線板時,係廣泛於以覆銅積層板所作之底材上使用由樹脂組成物所構成之液狀光阻或乾膜、以及附有接著劑之聚醯亞胺膜等作為覆蓋材。再者,於此等中已被賦予感光性之感光性樹脂組成物(液狀感光性光阻)與感光性乾膜亦被使用作為感光性覆膜。作為此等之構成材料而言,有耐熱性優異之聚苯并咪唑樹脂、聚苯并噁唑樹脂、聚醯亞胺樹脂,而就樹脂製造之容易性與製造成本之考量,尤以聚醯亞胺樹脂為佳。
然而,此等可撓性配線板與硬式配線板係採用有機物及/或無機物之積層構造。此時,依構成積層體之材料不同,會有發生基板翹曲之虞。翹曲可基於各構成材料之物性而用下式表示。因而,為防止此等之配線板翹曲,有幾種做法,使用聚醯亞胺系之覆材時,只要降低由聚醯亞胺樹脂所構成之膜本身的彈性模數即可。為因應此要求,已提案出使用矽氧烷二胺作為構成聚醯亞胺樹脂的複數之二胺成分之一(專利文獻1)。又,使用此矽氧烷二胺之聚醯亞胺樹脂需要求成膜性與耐藥品性之提高,為因應此要求,而於聚醯亞胺樹脂中導入乙烯醚殘基作為可與丙烯酸酯反應的
交聯基。
專利文獻1:日本專利特開2003-131371號公報
然而,於專利文獻1中所記載的矽氧烷二胺,對於由使用其所調製的聚醯亞胺樹脂所形成的膜,雖可賦予所期望之低彈性模數,但於另一方面卻有使無電鍍Ni/Au耐性降低的問題。又,於此聚醯亞胺樹脂中所必須導入之乙烯醚殘基,由於係於矽氧烷二胺與酸二酐反應成為聚醯亞胺之後,再導入已分離之聚醯亞胺樹脂中,故於工業生產上不能說是良好的導入方法。且,對於適用於電子零件之聚醯亞胺樹脂,以賦予其難燃性為佳。
本發明係用以解決上述習知之技術問題,其目的在於:可對由聚醯亞胺樹脂所形成之膜,賦予較低的彈性模數與良好的無電鍍耐性及難燃性,及事先導入用以構成和交聯劑反應的端基之交聯點的反應基到聚醯亞胺樹脂中。
本發明者等發現:藉由使用分子內具有醯胺基(其可和含有環氧基之化合物等之交聯劑進行反應而形成交聯點)之特定構造的新穎含有醯胺基矽氧烷二胺化合物作為構成聚
醯亞胺樹脂之二胺成分之一的矽氧烷二胺,可達成上述目的,而完成本發明。
亦即,本發明提供一種聚醯亞胺樹脂,其係由含有以通式(1)表示之含有醯胺基矽氧烷二胺化合物的二胺成分,與含有選自由均苯四甲酸四羧酸二酐、3,3’,4,4’-二苯基酮四羧酸二酐、3,3’,4,4’-二苯基醚四羧酸二酐、3,3’,4,4’-二苯基碸四羧酸二酐、2,2’-雙(3,4-二羧基苯基)丙酸二酐、1,4,5,8-萘四羧酸二酐、4,4’-(六氟異亞丙基)二苯二甲酸二酐、9,9-雙(3,4-二羧基苯氧基苯基)茀酸二酐、9,9-雙[4-(3,4-二羧基苯氧基)苯基]茀酸二酐及1,2,3,4-環丁酸二酐所構成的群中之至少一種芳香族酸二酐的酸二酐成分,進行醯亞胺化所成者;
通式(1)中,R1
及R2
為分別獨立之亦可經取代之伸烷基,m為1~30之整數,n為0~20之整數。
又,本發明提供一種含有前述之新穎聚醯亞胺樹脂及感光劑之聚醯亞胺樹脂組成物。
再者,本發明提供一種配線基板,其係於具有聚醯亞胺樹脂層之配線基板中,聚醯亞胺樹脂層為前述感光性聚醯亞胺樹脂組成物的膜。
於本發明之新穎聚醯亞胺樹脂中,由於係以具有矽氧烷單位之新穎含有醯胺基矽氧烷二胺化合物作為必要之二
胺成分,故可降低聚醯亞胺樹脂之彈性模數。又,新穎含有醯胺基矽氧烷二胺化合物,由於在分子內具有醯胺鍵,故可提高聚醯亞胺樹脂對配線板之銅等導體部的接著性。又,由於醯胺基係與環氧基進行加成反應或插入反應而形成交聯點,故不需要在聚醯亞胺樹脂分離後再將用以構成之交聯點(作為和交聯劑反應的端基)之反應基導入到聚醯亞胺樹脂之操作。如此之含有新穎聚醯亞胺樹脂之感光性聚醯亞胺樹脂組成物,對由其所形成的膜,可賦予比較低之彈性模數與無電鍍耐性。因而,利用感光性聚醯亞胺樹脂組成物所作成之配線基板即使為可撓性基板,其翹曲亦小,且可抑制因鍍敷所致之聚醯亞胺樹脂組成物層之末端拱起。又,由於在分子內具有多數之芳香環,故難燃性亦優。
本發明之新穎聚醯亞胺樹脂,其係由含有以通式(1)表示之含有醯胺基矽氧烷二胺化合物的二胺成分,與含有選自由均苯四甲酸四羧酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、3,3’,4,4’-二苯基醚四羧酸二酐、3,3’,4,4’-二苯基碸四羧酸二酐、2,2’-雙(3,4-二羧基苯基)丙酸二酐、1,4,5,8-萘四羧酸二酐、4,4’-(六氟異亞丙基)二苯二甲酸二酐、9,9-雙(3,4-二羧基苯基)茀酸二酐、9,9-雙[4-(3,4-二羧基苯氧基)苯基]茀酸二酐及1,2,3,4-環丁酸二酐所構成的群中之至少一種芳香族酸二酐的酸二酐成分,進行醯亞胺化所成者。
本發明之新穎聚醯亞胺樹脂之必須二胺成分之新穎含有醯胺基矽氧烷二胺化合物具有通式(1)之構造。
通式(1)中,R1
及R2
為分別獨立之亦可經取代之伸烷基,作為其具體例可舉出:亞甲基、伸乙基、伸丙基、伸丁基、伸戊基、伸己基。作為取代基,可舉出例如:甲基、乙基等之低級烷基、苯基等之芳基。其中,就原料取得之容易性考量以伸丙基為佳。又,R1
及R2
可相同,亦可不同,為免於原料取得之困難,以相同者為佳。
又,m為1~30之整數,以1~20為佳,以2~20之整數為更佳。理由在於,m若為0,則原料取得會有困難;若超過30會無法與反應溶劑混合而分離之故。另一方面,n為0~20之整數,以1~20為佳,以1~10之整數為更佳。理由在於,n若為1以上,則可導入難燃性優異之二苯基矽氧烷單位,而較未導入之情況可提高耐熱性;若超過20則對賦予低彈性之作用變小之故。
通式(1)之新穎含有醯胺基矽氧烷二胺化合物之數量平均分子量係依m,n之數而改變,以500~3000為佳,以1000~2000為更佳。
通式(1)之新穎之含有醯胺基矽氧烷胺化合物,由於在分子之兩末端部具有醯胺鍵,故自其所調製之聚醯亞胺樹脂中醯胺鍵亦相接續著。因此,對配線板之銅等導體部,
來自本發明之新穎之含有醯胺基矽氧烷胺化合物的聚醯亞胺樹脂之接合性可得以提高。又,已知醯胺基會與環氧基進行加成反應或插入反應乃習知者(日立化成技術報告No.39(2002-7),29頁),故只要將通常用於樹脂組成物或乾膜的環氧樹脂與來自本發明之新穎之含有醯胺基矽氧烷胺化合物的聚醯亞胺樹脂併用,醯胺基即可發揮作為用以構成為交聯點(與交聯劑反應的端基)的反應基之作用。因而,不需要在分離聚醯亞胺樹脂後再進行導入交聯基之步驟。
通式(1)之新穎之含有醯胺基矽氧烷二胺化合物,可依照下述之反應流程製造。
通式(1)~(4)中,R1
、R2
、m及n,係與通式(1)中說明者相同,X為氟、氯、溴、碘等之鹵原子。
於通式(1)之新穎含有醯胺基矽氧烷二胺化合物之製造方法中,首先,使通式(2)之二胺化合物與通式(3)之硝基苯甲醯鹵化物進行親核取代反應而形成通式(4)之含有醯胺基二硝基化合物。此情況,可藉由例如在三乙胺等之鹼存在下,於甲苯等之溶劑中將通式(2)之化合物與通式(3)之化合物加熱混合而形成通式(4)之二硝基化合物(參照Organic Chemistry,第5版,283頁(Ed.Stanley H.Pine))。
接著,將通式(4)之二硝基化合物的硝基還原為胺基。藉此可得到通式(1)之新穎含有醯胺基矽氧烷二胺化合物。只要可將硝基轉變為胺基以得到通式(1)之化合物,還原方法並無限制,可舉出例如:在苯甲酸乙酯與乙醇之混合溶液中,於鈀碳觸媒存在下,使通式(4)之化合物與過量的氫接觸之方法(參照Organic Chemistry,第5版,642頁(Ed.Stanley H.Pine))。
構成本發明之聚醯亞胺樹脂之二胺成分中之以通式(1)表示之含有醯胺基矽氧烷二胺化合物的含有量若過少,則無電鍍耐性會變差,若過多則翹曲會變大,故以0.1~20莫耳%為佳,以0.1~15莫耳%為更佳。
二胺成分,於必要成分之通式(1)之含有醯胺基矽氧烷二胺化合物之外,為減小翹曲之目的亦可含有通式(2)之矽氧烷二胺化合物。通式(2)之矽氧烷二胺化合物之含有量若過少,則降低翹曲之效果會不佳,若過多則難燃性會降低,
故以40~90莫耳%為佳,以50~80莫耳%為更佳。再者,二胺成分,除了通式(1)及通式(2)之二胺化合物之外,為達成作為賦予正型之感光性的基礎之鹼溶解性之目的,可含有3,3’-二胺基-4,4’-二羥基苯基碸。3,3’-二胺基-4,4’-二羥基苯基碸於二胺成分中之含有量若過少,則無法得到鹼溶解性,若過多則鹼溶解性會太高,故以20~50莫耳%為佳,以25~45莫耳%為更佳。
通式(2)中,R1
、R2
、m、n係與通式(1)中所說明者相同。
作為二胺成分,於通式(2)及3,3’-二胺基-4,4’-二羥基苯基碸之外,在無損於本發明的效果之範圍內,亦可併用與通常的聚醯亞胺樹脂中作為二胺成分使用者相同之二胺化合物(參照日本特許第3363600號說明書段落0008)。
作為用以構成本發明之新穎聚醯亞胺樹脂之酸二酐成分,可舉出含有選自由均苯四甲酸四羧酸二酐、3,3’,4,4’-二苯甲酮四羧酸二酐、3,3’,4,4’-二苯基醚四羧酸二酐、3,3’,4,4’-二苯基碸四羧酸二酐、2,2’-雙(3,4-二羧基苯基)丙酸二酐、1,4,5,8-萘四羧酸二酐、4,4’-(六氟異亞丙基)二苯二甲酸二酐、9,9-雙(3,4-二羧基苯基)茀酸二酐、9,9-雙[4-(3,4-二羧基苯氧基)苯基]茀酸二酐及1,2,3,4-環丁酸二酐
所構成的群中之至少一種芳香族酸二酐的酸二酐成分。其中,就提高作為賦予正型之感光性的基礎之鹼溶解性之考量,以使用3,3’,4,4’-二苯基碸四羧酸二酐為佳。
作為酸二酐成分,於上述化合物之外,在無損於本發明的效果之範圍內,亦可併用與通常的聚醯亞胺樹脂中作為酸二酐成分使用者相同之酸二酐(參照日本特許第3363600號說明書段落0009)。
本發明之聚醯亞胺樹脂可藉由使含有上述通式(1)之含有醯胺基矽氧烷二胺化合物的二胺成分、與酸二酐成分進行醯亞胺化而製造。此處,相對於二胺成分1莫耳之酸二酐成分之莫耳比通常為0.8~1.2,以0.9~1.1莫耳為佳。又,為將聚醯亞胺樹脂之分子末端封閉,視需要,於醯亞胺化時可共存有二羧酸酐或單胺化合物(參照日本特許第3363600號說明書段落0011)。
作為醯亞胺化之條件,可自公知的醯亞胺化條件之中適當地採用。此情況,亦包含先形成聚醯胺酸等之中間體、接著再進行醯亞胺化之條件。例如,可藉由公知的溶液醯亞胺化條件、加熱醯亞胺化條件、化學醯亞胺化條件進行(適合次世代之電機電子材料的新聚醯亞胺之開發與高機能賦予技術,技術情報協會,2003,p42)。
上述說明之本發明之聚醯亞胺樹脂的較佳形態,係含有以下述構造式(a)表示之聚醯亞胺樹脂作為必要成分。又,以進一步含有下述構造式(b)與構造式(c)之聚醯亞胺樹脂為更佳。
本發明之感光性聚醯亞胺樹脂組成物含有上述之聚醯亞胺樹脂與感光劑。藉由含有此感光劑可對形成之聚醯亞胺樹脂組成物賦予感光性。作為該感光劑可舉出例如重氮萘醌化合物。含有上述重氮萘醌化合物之聚醯亞胺樹脂,藉由曝光鹼溶解性會改變。於曝光之前,對鹼水溶液之溶解性低。另一方面,於曝光後,重氮萘醌化合物之分子構造會改變而生成乙烯酮(ketene),與鹼水溶液反應而生成羧酸。然後,生成之羧酸會與水再反應而溶解。因而,藉由光照射,對鹼水溶液之溶解性得以提高。
藉由含有作為感光劑之重氮萘醌化合物,由具有羥基之聚醯亞胺所構成的聚醯亞胺樹脂組成物此羥基會與重氮萘醌化合物互相作用。藉此,可保護容易溶解於鹼之羥基而降低鹼溶解性。對此狀態之聚醯亞胺組成物進行曝光,
則重氮萘醌化合物之分子構造會發生變化而可呈現鹼溶解性。因而,由於含有作為感光劑之重氮萘醌化合物,於配線板曝光後,藉由使用氫氧化鈉、氫氧化四甲基銨等之鹼水溶液進行顯影而可形成圖案。
作為感光劑之重氮萘醌化合物,只要是具有重氮萘醌化合物骨架之化合物皆可,並無特別限定,可舉出:2,3,4-三羥基二苯甲酮o-萘醌二疊氮-4-磺酸酯、2,3,4-三羥基二苯甲酮o-萘醌二疊氮-5-磺酸酯、2,3,4-三羥基二苯甲酮o-苯醌二疊氮-4-磺酸酯等。
本發明之感光性聚醯亞胺樹脂組成物中,相對於聚醯亞胺樹脂100質量份之感光劑的配合量以5~30質量份為佳。
本發明之感光性聚醯亞胺樹脂組成物可含有金屬減活劑。作為此金屬減活劑,可舉出醯肼系之金屬減活劑之2,3-雙[3-(3,5-二-第三丁基-4-羥苯基)丙醯基]丙醯肼(CDA-10,ADEKA股份有限公司),於使用於配線板之情況,可防止與金屬接觸之聚醯亞胺樹脂之樹脂劣化。
作為CDA-10以外之金屬減活劑,可舉出:作為醯肼系者之伸癸基羧酸二水楊醯基醯肼、作為三唑系者之3-(N-水楊醯基)胺基-1,2,4-三唑等,惟並非限定於此等。
本發明之感光性聚醯亞胺樹脂組成物可提高銅箔等導體與聚醯亞胺樹脂之密合性,而為了提高鍍敷耐性亦可含有交聯劑。交聯劑為用以與聚醯亞胺樹脂之醯胺基反應,或交聯劑彼此間進行反應以形成三維交聯構造者。作為此
種交聯劑,可使用以往使用於電子零件用之樹脂中者,就反應性之考量,較佳者可舉出環氧系交聯劑與噁嗪系交聯劑。
作為環氧系交聯劑之具體例,以顯示對聚醯亞胺樹脂有良好相溶性者為佳,可使用以往於環氧樹脂形成用之各種環氧單體、低聚物或聚合物,可舉出例如:雙酚F型環氧化合物、雙酚A型環氧化合物、3,4-環氧環己烯甲基-3’,4-環氧環己烯羧酸酯等之脂環型環氧化合物、山梨糖醇聚縮水甘油醚、聚甘油聚縮水甘油醚、季戊四醇聚縮水甘油醚、二甘油聚縮水甘油醚、甘油聚縮水甘油醚、聚羥甲基丙烷聚縮水甘油醚、間苯二酚二甘油醚、新戊二醇二縮水甘油醚、1,6-己二醇二縮水甘油醚、氫化雙酚A二縮水甘油醚、聚乙二醇縮水甘油醚、聚丙二醇縮水甘油醚、氫醌二縮水甘油醚等之縮水甘油醚化合物;苯二甲酸二縮水甘油酯、對苯二甲酸二縮水甘油酯等之縮水甘油酯;二溴新戊二醇縮水甘油醚等之鹵化難燃性環氧化合物;甲苯酚清漆環氧樹脂、苯酚清漆環氧樹脂等之清漆環氧樹脂;四縮水甘油二胺二苯基甲烷、四縮水甘油間二甲苯二胺、三縮水甘油胺基苯酚、二縮水甘油苯胺等之縮水甘油胺化合物等。
又,作為噁嗪系交聯劑,可使用原本利用於作為藉由熱而進行開環聚合之熱硬化性單體者,可舉出例如:雙酚F型苯并噁嗪(例如,6,6’-亞甲基雙[3,4-二氫-3-苯基-2H-1,3-苯并噁嗪]等)、雙酚S型苯并噁嗪(例如,6,6’-磺醯基雙[3,4-二氫-3-苯基-2H-1,3-苯并噁嗪]等)、雙酚A型苯并噁嗪(以
下通式(d))、苯酚清漆型苯并噁嗪(以下通式(e))等。
本發明之感光性聚醯亞胺樹脂組成物視需要可含有溶劑、填料、顏料等之添加劑。
本發明之感光性聚醯亞胺樹脂組成物,可藉由將本發明之聚醯亞胺樹脂、感光劑、視需要而添加之金屬減活劑、交聯劑、乃至其他添加劑,用通常方法均一混合而調製。
本發明之感光性聚醯亞胺樹脂組成物,可適用於作為具有聚醯亞胺樹脂層之配線基板之該聚醯亞胺樹脂。如此所構成之配線基板亦屬本發明之範疇。作為適用之作法,可採用公知之作法。此處,作為聚醯亞胺樹脂層,自其機能面看,可舉出乾膜光阻層、覆膜層。亦可使用作為層間絕緣膜。
茲就適用之作法之一例說明如下。亦即,在覆銅積層板之銅上,用公知之塗佈方法塗佈本發明之感光性聚醯亞胺樹脂組成物,使其乾燥,形成感光性聚醯亞胺樹脂組成
物層。對此感光性聚醯亞胺樹脂組成物層,透過遮罩以例如超高壓水銀燈(g線、h線、i線之三線混合)曝光,然後,以氫氧化鈉水溶液、氫氧化四甲基銨水溶液等之鹼水溶液進行顯影。將藉由顯影形成圖案之配線基板,於例如200℃下進行後烘烤,視需要再浸漬於無電鍍鎳液,然後浸漬於無電鍍金液,可在銅上形成鍍敷層,而製造出配線基板。如此得到之配線基板,聚有由二胺成分與酸二酐所構成的新穎聚醯亞胺樹脂作為主成分的聚醯亞胺樹脂層。此層顯示有比較低之彈性模數與良好的無電鍍耐性及耐熱性。因而,利用感光性聚醯亞胺樹脂組成物所作成之配線基板,即使為可撓性基板,其翹曲亦小,且可抑制因鍍敷所致之導體之變色或聚醯亞胺樹脂組成物層的末端之拱起,且防火性亦優異。
首先,於下述參考例1中,就通式(1)之新穎含有醯胺基矽氧烷二胺化合物之製造例做說明,接著於聚合例1~5中,就聚醯亞胺化合物之聚合例做說明。其後,將實施例與比較例對比,就本發明具體地做說明。又,於表1及表2中,分別表示出依於聚合例1~5之聚醯亞胺化合物之二羧酸成分與二胺成分之組成物及其所對應之數值,其等數值係以全部二胺成分(X-22-9409、BSDA及參考例1之矽氧烷二胺)合計作為100莫耳時之各成分(亦即DSDA、X-22-9409、BSDA、及參考例1之矽氧烷二胺)之莫耳數。惟於比較例1之情況,由於未使用參考例1之矽氧烷二胺,
故全部二胺成分為X-22-9409及BSDA之合計。
(參考例1)
於具備有冷卻機、溫度計、分液漏斗及攪拌機之2L反應器中,置入甲苯50g、通式(2)之矽氧烷二胺(R1
、R2
=伸丙基;商品名:X-22-9409、信越化學工業股份有限公司)200g(0.148毫莫耳)、及三乙胺30g(0.297莫耳)。接著,將溶解於甲苯300g中之對硝基苯甲醯氯54.7g(0.295莫耳)之溶液裝入分液漏斗。於一邊對反應器內攪拌一邊昇溫至50℃後,以1小時的時間將分液漏斗內之溶液滴入。滴入完成後,昇溫並攪拌6小時,於回流下使其反應。反應完成後,冷卻至30℃,加入800g水強力攪拌後,移液至分液漏斗中,使其靜置分液。以5%氫氧化鈉水溶液300g洗淨3次,再以飽和氯化鈉水溶液300g洗淨2次。將有機層以硫酸鎂乾燥,再將甲苯溶劑加熱減壓餾除而濃縮後,於60℃下進行減壓乾燥1日。得到之α-(p-硝基苯甲醯亞胺基丙基二甲基矽烷氧基)-ω-(p-硝基苯甲醯亞胺基丙基二甲基矽烷基)低聚(二甲基矽氧烷-co-二苯基矽氧烷)(以下,稱為二硝基物),得產量235g(產率96%)。二硝基物為淡黃色之油狀物。
將得到之二硝基物112g(0.068莫耳),與醋酸乙酯180g、乙醇320g及2%之鈀-碳20g(含水率50%)一起放入具備有攪拌器、氫氣導入管、氫球之1L反應器中。使反應器內取代成氫氣環境氣氛下之後,於氫球壓力下在室溫繼續攪拌2日。自反應混合液過濾除去觸媒,使反應液於減壓
加熱下濃縮後,於減壓下在60℃下進行乾燥2日,得到淡黃色油狀之α-(p-胺基苯甲醯亞胺基丙基二甲基矽烷氧基)-ω-(p-胺基苯甲醯亞胺基丙基二甲基矽烷基)低聚(二甲基矽氧烷-co-二苯基矽氧烷)(本發明之新穎含有醯胺基矽氧烷胺化合物),產量102g(產率95%)。得到的新穎含有醯胺基矽氧烷二胺化合物之胺值為69.96KOHmg/g,胺基當量為802g/莫耳。又,胺值係用電位差自動滴定裝置(AT-500,京都電子工業製)測量。胺基當量由56.106/(胺值)×1000算出。
又,對得到的新穎之含有醯胺基矽氧烷二胺化合物進行紅外線吸收光譜與1
H-NMR光譜之測定結果,可確認為所要之目的物。又,紅外線光譜係用傅立葉轉換紅外分光光度計(FT-IR420,日本分光股份有限公司)以透過法測定。又,1
H-NMR光譜係用NMR分光光度計(MERCURY VX-300,Varian Technologies Japan Ltd.)於重氯仿(CDCl3
)中測定。此結果如下述:IR光譜:3450cm-1
(νN-H
)、3370cm-1
(νN-H
)、3340cm-1
(νN-H
)、3222cm-1
(νN-H
)、1623cm-1
(νC=O
)、1260cm-1
(νCH3
)、1000~1100 cm-1
(νSi-O
)
1
H-NMR(CDCl3
,δ):-0.2~0.2(m,甲基)、0.4~0.6(m,4H,亞甲基)、1.4~1.8(m,4H,亞甲基)、3.2~3.5(m,4H,亞甲基)、3.9(bs,4H,胺基氫)、5.8~6.3(m,2H,醯胺基氫)、6.4(m,4H,鄰接胺基之芳香環氫)、7.1~7.7(m,芳香環氫)
(聚合例1)(於全部二胺成分中含有1莫耳%的通式(1)之新穎含有醯胺基矽氧烷二胺化合物之例)
於具備有氮導入管、攪拌機、及迪恩-史塔克收集器(Dean-Stark trap)之20L反應器中,加入矽氧烷二胺(X-22-9409:信越化學工業股份有限公司)4460.6g(3.30莫耳)、3,3’,4,4’-二苯基碸四羧酸二酐(DSDA,新日本理化股份有限公司,純度99.70%)1912.7g(5.34莫耳)、γ-丁內酯287g、與參考例1中得到之新穎含有醯胺基矽氧烷二胺化合物89.0g(54.3毫莫耳,純度97.10%)之混合液、以及三甘二甲醚2870g,將其混合液攪拌。再加入甲苯1100g後,於185℃使其加熱回流2小時,接著進行減壓脫水以去除甲苯,製得酸酐末端低聚醯亞胺溶液。
使得到之酸酐末端低聚醯亞胺溶液冷卻至80℃,加入三甘二甲醚3431g與γ-丁內酯413g與3,3’-二胺基-4,4’-二羥基二苯基碸(BSDA,小西化學工業股份有限公司,純度99.70%)537.80g(1.92莫耳)的分散液,於80℃下攪拌2小時。對其加入三甘二甲醚524g以調整溶劑量,於185℃加熱回流2小時。將得到之反應混合物冷卻至室溫後,將累積在收集器(trap)之甲苯及水去除。藉由上述操作合成具有醯胺基之新穎之聚醯亞胺化合物。得到之聚醯亞胺之實測固體成分為47.5%。又,藉由GPC(凝膠滲透色層分析)之聚苯乙烯換算分子量,以重量平均分子量計為63000。
(聚合例2)(於全部二胺成分中含有5莫耳%的通式(1)之新穎含有醯胺基矽氧烷二胺化合物之例)
於聚合例1中,除了將矽氧烷二胺(X-22-9409:信越化學工業股份有限公司)改為4099.8g(3.04莫耳)、3,3’,4,4’-二苯基碸四羧酸二酐(DSDA,新日本理化股份有限公司,純度99.70%)改為1907.0g(5.32莫耳)、將參考例1中得到之新穎含有醯胺基矽氧烷二胺化合物改為443.7g(270.5毫莫耳,純度97.10%)、3,3’-二胺基-4,4’-二羥基二苯基碸(BSDA,小西化學工業股份有限公司,純度99.70%)549.5g(1.96莫耳)之外,其餘進行與聚合例1同樣的操作,合成具有醯胺基之新穎聚醯亞胺化合物。得到之聚醯亞胺之實測固體成分為47.4%。又,藉由GPC(凝膠滲透色層分析)之聚苯乙烯換算分子量,以重量平均分子量計為57000。
(聚合例3)(於全部二胺成分中含有10莫耳%的通式(1)之新穎含有醯胺基矽氧烷二胺化合物之例)
於聚合例1中,除了將矽氧烷二胺(X-22-9409:信越化學工業股份有限公司)改為3665.3g(2.72莫耳)、3,3’,4,4’-二苯基碸四羧酸二酐(DSDA,新日本理化股份有限公司,純度99.70%)改為1895.1g(5.29莫耳)、將參考例1中得到之新穎含有醯胺基矽氧烷二胺化合物改為881.9g(537.7毫莫耳,純度97.10%)、3,3’-二胺基-4,4’-二羥基二苯基碸(BSDA,小西化學工業股份有限公司,純度99.70%)557.8g(1.99莫耳)之外,其餘進行與聚合例1同樣的操作,合成具有醯胺基之新穎聚醯亞胺化合物。得到之聚醯亞胺之實測固體成分為47.4%。又,藉由GPC(凝膠滲透色層分析)之聚苯乙烯換算分子量,以重量平均分子量計為77000。
(聚合例4)(不含通式(1)之新穎含有醯胺基矽氧烷二胺化合物之例)
於聚合例1中,除了將矽氧烷二胺(X-22-9409:信越化學工業股份有限公司)改為4550.2g(3.37莫耳)、3,3’,4,4’-二苯基碸四羧酸二酐(DSDA,新日本理化股份有限公司,純度99.70%)改為1914.5g(5.34莫耳)、3,3’-二胺基-4,4’-二羥基二苯基碸(BSDA,小西化學工業股份有限公司,純度99.70%)535.3g(1.91莫耳)、以及不添加參考例1中得到之新穎含有醯胺基矽氧烷二胺化合物之外,其餘進行與聚合例1同樣的操作,合成聚醯亞胺化合物。得到之聚醯亞胺之實測固體成分為47.3%。又,藉由GPC(凝膠滲透色層分析)之聚苯乙烯換算分子量,以重量平均分子量計為65000。
(聚合例5)(於全部二胺成分中含有1莫耳%的通式(1)之新穎含有醯胺基矽氧烷二胺化合物之例)
於聚合例1中,除了將矽氧烷二胺(X-22-9409:信越化學工業股份有限公司)改為4289.6g(3.18莫耳)、3,3’,4,4’-二苯基碸四羧酸二酐(DSDA,新日本理化股份有限公司,純度99.70%)改為1988.4g(5.62莫耳)、將參考例1中得到之新穎含有醯胺基矽氧烷二胺化合物改為90.5g(54.8毫莫耳)、3,3’-二胺基-4,4’-二羥基二苯基碸(BSDA,小西化學工業股份有限公司,純度99.70%)631.5g(2.25莫耳)之外,其餘進行同樣的操作,合成具有醯胺基之新穎聚醯亞胺化合物。得到之聚醯亞胺之實測固體成分為49.50%。又,藉由GPC(凝膠滲透色層分析)之聚苯乙烯換算分子量,以重量平
均分子量計為69000。
(實施例1~27、比較例1)
依照表1,對聚合例1~5中任一者之聚醯亞胺化合物100質量份,依各既定的配合量添加作為感光劑之重氮萘醌(4NT-300,東洋合成工業股份有限公司)、作為交聯劑之Bis-F型環氧樹脂(jER807,日本環氧樹脂股份有限公司)、四縮水甘油基二胺基二苯基甲烷(jER807,日本環氧樹脂股份有限公司)、作為交聯劑之噁嗪化合物之(6,6’-(1-亞甲基)雙[3,4-二氫-3-苯基-2H-1,3-苯并噁嗪])(BF-BXZ,小西化學工業)與金屬減活劑(CDA-10,ADEKA股份有限公司),充分混合至均一狀態,調製成聚醯亞胺樹脂組成物。對得到之聚醯亞胺樹脂組成物,如下述說明般,就顯影性、無電鍍Ni/Au耐性、捲曲性、難燃性進行試驗評估。得到之結果示於表1及表2。
(顯影性)
將聚醯亞胺樹脂組成物以使乾燥厚度可成為10 μm之方式先塗佈於相當於0.3 μm之施行過化學研磨處理之銅箔之一面上,於80℃乾燥10分鐘,在銅箔之一面形成聚醯亞胺樹脂層,作成試驗片A。對得到之試驗片A之聚醯亞胺樹脂層透過既定之正型圖案的曝光遮罩,用超高壓水銀燈(g,h,i三線混合)進行光照射達2500mJ/cm3之累積光量。然後,將試驗片A浸漬於40℃之3%氫氧化鈉水溶液中,接著於40℃之溫水中浸漬2分鐘,藉此進行鹼顯影。再浸漬於10%硫酸水溶液中使其中和後,以蒸餾水充分洗淨,使其乾
燥,完成一連串之顯影製程。3%氫氧化鈉水溶液之浸漬時間只要為60秒以下,則可評估為具有實用之鹼顯影性。
顯影性評估基準
A:以3%氫氧化鈉水溶液(40℃)之顯影時間為60秒以下之情況B:以3%氫氧化鈉水溶液(40℃)之顯影時間為超過60秒之情況
(捲曲性)
於平坦的25 μm厚之聚醯亞胺膜(Upilex25S,宇部興產公司)上,以使乾燥厚度可成為10 μm之方式,塗佈聚醯亞胺樹脂組成物,於80℃乾燥10分鐘(單面塗佈)。接著,於氮環境氣氛下於200℃加熱1小時,使聚醯亞胺樹脂層之交聯完成(後烘烤),得到試驗片B。將得到之試驗片B裁切成10cm見方,以使捲曲之內側朝向天花板之方式載置於平坦的平盤上,測定其四個角落之浮起的高度,求出其等之平均值。其平均值只要未達10mm,則可評估為實用的捲曲性。
捲曲性評估基準
AA:平均值為未滿2mm之情況A:平均值為2mm以上、未滿10mm之情況B:平均值為10mm以上,惟未捲曲為圓筒狀之情況C:捲曲為圓筒狀之情況
(無電鍍Ni/Au耐性)
使顯影性試驗中使用之試驗片A於氮環境氣氛下於200℃加熱1小時,使其完成聚醯亞胺樹脂層之交聯(後烘
烤)。接著,進行無電鍍鎳處理(使用鍍敷液:NPR-4,上村工業公司),連續再進行無電鍍金處理(使用鍍敷液:TKK-51,上村工業公司)。無電鍍Ni/Au後之試驗片A之導體開口部周邊之聚醯亞胺樹脂層端部之變色,若自其邊緣起只要未達50 μm,則可評估為具有實用的無電鍍Ni/Au耐性。
無電鍍Ni/Au耐性評估基準
AA:開口邊緣未能確認到變色之情況A:開口邊緣變色為20 μm以上~50 μm未滿之情況C:開口邊緣變色為50 μm以上之情況
(難燃性)
於平坦的25 μm厚之聚醯亞胺膜(Upilex25S,宇部興產公司)上,以分別使乾燥厚度可成為10 μm之方式,於雙面上塗佈聚醯亞胺樹脂組成物,於80℃乾燥10分鐘。接著,於氮環境氣氛下於200℃加熱1小時,使聚醯亞胺樹脂層之交聯完成(後烘烤),藉此得到試驗片C。將所得之試驗片C依照UL-94-VTM規格進行試驗,依下述基準進行評估。
難燃性評估基準
A:滿足UL-94-VTM-0之情況C:未能滿足UL-94-VTM-0之情況
比較例1之聚醯亞胺樹脂組成物由於未使用本發明之新穎聚醯亞胺樹脂,故有於無電鍍Ni/Au耐性之問題。相對於此,實施例1~15之聚醯亞胺樹脂組成物於任一評估項目中皆無「C」之評價。
又,由實施例6及實施例25之結果可知:噁嗪交聯劑之配合量若過多,則會有捲曲性降低之傾向。又,由實施例9、10、14及18之結果可知:於本發明之聚醯亞胺樹脂中參考例1之新穎含有醯胺基矽氧烷二胺化合物之含有比例若過多,則亦有捲曲性降低之傾向。
於本發明之新穎聚醯亞胺樹脂中,由於係以具有矽氧烷單位之新穎含有醯胺基矽氧烷二胺化合物作為必要之二胺成分,故可降低聚醯亞胺樹脂之彈性模數。又,此新穎含有醯胺基矽氧烷二胺化合物,由於在分子內具有醯胺鍵,故可提高聚醯亞胺樹脂對配線板之銅等導體部的接著性。又,由於醯胺基係與環氧基進行加成反應或插入反應,故不需要在聚醯亞胺化後之聚醯亞胺樹脂上導入構成交聯點之反應基。如此之含有本發明之聚醯亞胺樹脂之新穎之感光性聚醯亞胺樹脂組成物,對由其所形成的膜,可賦予比較低之彈性模數與無電鍍耐性。因而,利用感光性聚醯亞胺樹脂組成物所作成之配線基板即使為可撓性基板,其翹曲亦小,且可抑制因鍍敷所致之導體的變色或聚醯亞胺樹脂組成物層末端的拱起。又,由於在分子內具有多數之芳香環,故難燃性亦優。因而,本發明之感光性聚醯亞胺
樹脂組成物,於作為電子零件用感光性乾膜光阻或感光性覆膜甚為有用。
Claims (13)
- 一種聚醯亞胺樹脂,其係由含有以通式(1)表示之含有醯胺基矽氧烷二胺化合物的二胺成分,與含有選自由均苯四甲酸四羧酸二酐、3,3’,4,4’-二苯基酮四羧酸二酐、3,3’,4,4’-二苯基醚四羧酸二酐、3,3’,4,4’-二苯基碸四羧酸二酐、2,2’-雙(3,4-二羧基苯基)丙酸二酐、1,4,5,8-萘四羧酸二酐、4,4’-(六氟異亞丙基)二苯二甲酸二酐、9,9-雙(3,4-二羧基苯基)茀酸二酐、9,9-雙[4-(3,4-二羧基苯氧基)苯基]茀酸二酐及1,2,3,4-環丁酸二酐所構成的群中之至少一種芳香族酸二酐的酸二酐成分,進行醯亞胺化所成者;
(通式(1)中,R1 及R2 為分別獨立之亦可經取代之伸烷基,m為1~30之整數,n為0~20之整數),二胺成分更進一步含有以通式(2)表示之矽氧烷二胺化合物40~90莫耳%; (通式(2)中,R1 及R2 為分別獨立之亦可經取代之伸烷基,m為1~30之整數,n為0~20之整數)。 - 如申請專利範圍第1項之聚醯亞胺樹脂,其中,通式(1)中之R1 及R2 皆為伸丙基。
- 如申請專利範圍第1或2項之聚醯亞胺樹脂,其中,m為1~20,n為1~20。
- 如申請專利範圍第1或2項之聚醯亞胺樹脂,其中,二胺成分中之以通式(1)表示之含有醯胺基矽氧烷二胺化合物之含有量為0.1~20莫耳%。
- 如申請專利範圍第1或2項之聚醯亞胺樹脂,其中,二胺成分更進一步含有3,3’-二胺基-4,4’-二羥基二苯基碸20~50莫耳%。
- 如申請專利範圍第1或2項之聚醯亞胺樹脂,其中,酸二酐成分為3,3’,4,4’-二苯基碸四羧酸二酐。
- 一種感光性聚醯亞胺樹脂組成物,係含有申請專利範圍第1~6項中任一項之聚醯亞胺樹脂及感光劑。
- 如申請專利範圍第7項之感光性聚醯亞胺樹脂組成物,其含有相對於聚醯亞胺樹脂100質量份為5~30重量份之感光劑。
- 如申請專利範圍第7或8項之感光性聚醯亞胺樹脂組成物,其係更進一步含有交聯劑。
- 如申請專利範圍第9項之感光性聚醯亞胺樹脂組成物,其中,該交聯劑為環氧化合物。
- 如申請專利範圍第9項之感光性聚醯亞胺樹脂組成物,其中,該交聯劑為噁嗪。
- 如申請專利範圍第10項之感光性聚醯亞胺樹脂組 成物,其中,該交聯劑為噁嗪。
- 一種配線基板,係具有聚醯亞胺樹脂層,該聚醯亞胺樹脂層為申請專利範圍第7~12項中任一項之感光性聚醯亞胺樹脂組成物之膜。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007216203 | 2007-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200916504A TW200916504A (en) | 2009-04-16 |
| TWI406881B true TWI406881B (zh) | 2013-09-01 |
Family
ID=40378183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097131881A TWI406881B (zh) | 2007-08-22 | 2008-08-21 | Novel polyimide resins and photosensitive polyimide resin compositions |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8445621B2 (zh) |
| JP (1) | JP5439765B2 (zh) |
| CN (1) | CN101784583B (zh) |
| TW (1) | TWI406881B (zh) |
| WO (1) | WO2009025283A1 (zh) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1814713A4 (en) | 2004-11-09 | 2017-07-26 | Board of Regents, The University of Texas System | The fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns |
| JP4771100B2 (ja) * | 2008-08-27 | 2011-09-14 | 信越化学工業株式会社 | 無溶剤型ポリイミドシリコーン系樹脂組成物及びその硬化物 |
| JP5343494B2 (ja) * | 2008-09-30 | 2013-11-13 | デクセリアルズ株式会社 | 感光性シロキサンポリイミド樹脂組成物 |
| CN102325819B (zh) * | 2009-02-21 | 2014-11-12 | 索尼化学&信息部件株式会社 | 保护膜形成用原料液、保护膜、带有保护膜的布线基板 |
| US8613042B2 (en) | 2009-03-19 | 2013-12-17 | Nec Corporation | Access control list conversion system, and method and program threrfor |
| JP5740834B2 (ja) * | 2009-05-11 | 2015-07-01 | 三菱化学株式会社 | 液晶性ポリイミド、及びこれを含有する液晶性樹脂組成物、並びに半導体素子用樹脂膜 |
| JP5538779B2 (ja) * | 2009-08-31 | 2014-07-02 | 国立大学法人横浜国立大学 | 感光性樹脂組成物および該組成物を使用した反応現像画像形成方法 |
| JP5505215B2 (ja) * | 2009-11-10 | 2014-05-28 | デクセリアルズ株式会社 | 感光性ポリイミド樹脂組成物、フレキシブルプリント配線板及びその製造方法 |
| JP5668375B2 (ja) * | 2009-11-12 | 2015-02-12 | デクセリアルズ株式会社 | フレキシブルプリント配線板の製造方法及び端子部形成方法 |
| US8946852B2 (en) | 2010-07-02 | 2015-02-03 | Toray Industries, Inc. | Photosensitive resin composition, photosensitive resin composition film, and semiconductor device using the photosensitive resin composition or photosensitive resin composition film |
| MY158488A (en) * | 2010-07-09 | 2016-10-14 | Toray Industries | Photosensitive adhesive composition, photosensitive adhesive film, and semiconductor device using them |
| JP5834778B2 (ja) * | 2011-11-02 | 2015-12-24 | 住友ベークライト株式会社 | ポジ型感光性樹脂組成物、硬化膜、保護膜、絶縁膜、半導体装置、および表示装置 |
| KR101912630B1 (ko) * | 2011-11-23 | 2018-10-31 | 삼성디스플레이 주식회사 | 액정표시장치, 배향막 및 이들을 제조하는 방법들 |
| JP6228605B2 (ja) | 2012-08-01 | 2017-11-08 | ザ ボード オブ リージェンツ,ザ ユニバーシティ オブ テキサス システム | コイル状および非コイル状ナノファイバー撚糸およびポリマーファイバーのねじりおよび引張アクチュエータ |
| DE102014210483A1 (de) | 2014-06-03 | 2015-12-03 | Conti Temic Microelectronic Gmbh | Verfahren zum Herstellen einer Folienanordnung und entsprechende Folienanordnung |
| JP2018151527A (ja) * | 2017-03-13 | 2018-09-27 | 日立化成デュポンマイクロシステムズ株式会社 | 感光性樹脂組成物 |
| KR101840977B1 (ko) * | 2017-09-14 | 2018-03-21 | 주식회사 엘지화학 | 폴리이미드 전구체 조성물 및 이를 이용한 폴리이미드 필름 |
| WO2020030678A1 (en) * | 2018-08-10 | 2020-02-13 | Solvay Specialty Polymers Italy S.P.A. | Compositions of ionisable organosiloxane polymers |
| US11667757B2 (en) | 2020-12-31 | 2023-06-06 | Industrial Technology Research Institute | Polymer, composition, and polysiloxane-polyimide material thereof |
| TWI776342B (zh) * | 2020-12-31 | 2022-09-01 | 財團法人工業技術研究院 | 聚合物、包含其之組合物、以及聚矽氧烷-聚醯亞材料 |
| CN117164854A (zh) * | 2023-07-07 | 2023-12-05 | 中国科学院长春应用化学研究所 | 一种交联型聚酰亚胺及其制备方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4395527A (en) * | 1978-05-17 | 1983-07-26 | M & T Chemicals Inc. | Siloxane-containing polymers |
| US6077924A (en) * | 1998-05-01 | 2000-06-20 | Nipopon Mektron Limited | Polyimides, process for producing the same and photosensitive composition containing the same |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4139547A (en) * | 1978-05-17 | 1979-02-13 | Bergston & Associates, Inc. | Silicone containing bis-thioether aromatic amines |
| US4499149A (en) * | 1980-12-15 | 1985-02-12 | M&T Chemicals Inc. | Siloxane-containing polymers |
| US4480009A (en) * | 1980-12-15 | 1984-10-30 | M&T Chemicals Inc. | Siloxane-containing polymers |
| JP3363600B2 (ja) | 1994-08-03 | 2003-01-08 | 三井化学株式会社 | ポリイミド及びそれよりなる耐熱性接着剤 |
| JP2000075478A (ja) * | 1998-08-31 | 2000-03-14 | Toray Ind Inc | ポジ型感光性樹脂前駆体組成物 |
| JP2002012666A (ja) * | 2000-06-29 | 2002-01-15 | Shin Etsu Chem Co Ltd | ポリイミドシリコーン樹脂、その製造方法およびその組成物 |
| JP2003131371A (ja) | 2001-10-24 | 2003-05-09 | Kanegafuchi Chem Ind Co Ltd | 難燃性の感光性ドライフィルムレジスト |
| EP1630605B1 (en) * | 2003-06-02 | 2017-10-11 | Toray Industries, Inc. | Photosensitive resin composition |
| JP2006083307A (ja) * | 2004-09-16 | 2006-03-30 | Kyocera Chemical Corp | 感光性ポリイミドシロキサンおよびその組成物 |
| JP2006206756A (ja) * | 2005-01-28 | 2006-08-10 | Sony Chem Corp | ポリイミド化合物及びフレキシブル配線板 |
| KR20090075797A (ko) * | 2007-02-09 | 2009-07-09 | 소니 케미카루 앤드 인포메이션 디바이스 가부시키가이샤 | 감광성 폴리이미드 수지 조성물 |
-
2008
- 2008-08-20 US US12/670,965 patent/US8445621B2/en active Active
- 2008-08-20 JP JP2008211393A patent/JP5439765B2/ja active Active
- 2008-08-20 WO PCT/JP2008/064794 patent/WO2009025283A1/ja not_active Ceased
- 2008-08-20 CN CN200880103968.XA patent/CN101784583B/zh active Active
- 2008-08-21 TW TW097131881A patent/TWI406881B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4395527A (en) * | 1978-05-17 | 1983-07-26 | M & T Chemicals Inc. | Siloxane-containing polymers |
| US6077924A (en) * | 1998-05-01 | 2000-06-20 | Nipopon Mektron Limited | Polyimides, process for producing the same and photosensitive composition containing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009068002A (ja) | 2009-04-02 |
| TW200916504A (en) | 2009-04-16 |
| CN101784583A (zh) | 2010-07-21 |
| US20100187001A1 (en) | 2010-07-29 |
| CN101784583B (zh) | 2013-05-08 |
| JP5439765B2 (ja) | 2014-03-12 |
| WO2009025283A1 (ja) | 2009-02-26 |
| US8445621B2 (en) | 2013-05-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI406881B (zh) | Novel polyimide resins and photosensitive polyimide resin compositions | |
| TWI418935B (zh) | 低溫固化感光樹脂組成物及其所製得之乾膜 | |
| JP5370676B2 (ja) | 新規なアミド基含有シロキサンアミン化合物 | |
| JP5362811B2 (ja) | 保護膜形成用原料液、保護膜、保護膜付き配線基板 | |
| JP4930883B2 (ja) | 感光性樹脂組成物及びそれを用いた回路基板 | |
| JP6568715B2 (ja) | 感光性熱硬化性樹脂組成物、ドライフィルムおよびプリント配線板 | |
| TW200927833A (en) | Polyimide composition, flexible wiring board and method for manufacturing flexible wiring board | |
| KR100969014B1 (ko) | 포지티브형 감광성 수지 조성물 및 패턴 형성방법 | |
| TW200306295A (en) | Amino group containing phenol derivative | |
| JPWO2005066242A1 (ja) | 芳香族ポリアミド酸及びポリイミド | |
| JP5505215B2 (ja) | 感光性ポリイミド樹脂組成物、フレキシブルプリント配線板及びその製造方法 | |
| JP4834962B2 (ja) | ポリアミドイミド樹脂及びその製造方法 | |
| JP4614349B2 (ja) | アルコール性水酸基を有するポリイミドおよびその製造方法 | |
| JPH10316751A (ja) | 感光性ポリイミド | |
| JP5354443B2 (ja) | ポリイミドインク組成物、保護膜、及びフレキシブルプリント配線板 | |
| JP5140758B2 (ja) | 配線基板 | |
| WO2022175169A1 (en) | Polyimides having low dielectric loss | |
| JP2011094131A (ja) | アルコール性水酸基を有する新規のポリイミドシリコーンおよびその製造方法 | |
| KR20170001752A (ko) | 감광성 수지 조성물, 그의 릴리프 패턴막, 릴리프 패턴막의 제조 방법, 릴리프 패턴막을 포함하는 전자 부품 또는 광학 제품, 및 감광성 수지 조성물을 포함하는 접착제 | |
| JP4982344B2 (ja) | 芳香族ポリアミド酸及び芳香族ポリイミド | |
| JP5668375B2 (ja) | フレキシブルプリント配線板の製造方法及び端子部形成方法 | |
| WO2022175168A1 (en) | Polyimides having low dielectric loss | |
| Choi et al. | Synthesis and characterization of photo‐crosslinkable poly (amic acid ester) s with 2‐hydroxy‐4‐oxo‐hept‐5‐enyl side chain | |
| JP2022159177A (ja) | 硬化性樹脂組成物、硬化物および電子部品 | |
| CN116848177A (zh) | 具有低介电损耗的聚酰亚胺 |