CN102236032A - Array detection equipment - Google Patents
Array detection equipment Download PDFInfo
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- CN102236032A CN102236032A CN2010101715164A CN201010171516A CN102236032A CN 102236032 A CN102236032 A CN 102236032A CN 2010101715164 A CN2010101715164 A CN 2010101715164A CN 201010171516 A CN201010171516 A CN 201010171516A CN 102236032 A CN102236032 A CN 102236032A
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- 238000001514 detection method Methods 0.000 title claims abstract description 84
- 239000000523 sample Substances 0.000 claims abstract description 194
- 239000000758 substrate Substances 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000010409 thin film Substances 0.000 abstract description 5
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 description 40
- 230000000694 effects Effects 0.000 description 7
- 238000005452 bending Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Abstract
The embodiment of the invention discloses array detection equipment, and relates to the field of thin film transistor-liquid crystal display (TFT-LCD) manufacturing processes. The array detection equipment solves the technical problems that a detection probe with high manufacturing cost is damaged and the detection efficiency is low because a probe framework easily collides with the detection probe when an array circuit is detected in the prior art. The array detection equipment provided by the embodiment of the invention comprises a base table and a detection probe, wherein at least one detection probe moving shaft which moves on the base table is arranged on the base table, at least one detection probe mounting frame which moves along the detection probe moving shaft is arranged on each detection probe moving shaft, and at least one group of detection probes in contact with the signal input end of an array substrate are arranged on each detection probe mounting frame. The scheme of the embodiment of the invention is mainly applied in the process of detecting the circuit of the array substrate.
Description
Technical field
The present invention relates to TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor-LCD) the substrate circuit electrology characteristic field tests after the manufacturing process, particularly a kind of array detection equipment that array circuit is detected.
Background technology
Array processes is a stage in the TFT-LCD manufacture process.In array processes, need on glass substrate, form thin film transistor array circuit.The quality of array circuit has directly determined the quality of thin film transistor liquid crystal display screen, also just becomes important procedure in the manufacturing process for the detection of array circuit.
Be illustrated in figure 1 as the checkout equipment of array circuit in the prior art.The detector probe 20 of installing on the prober frame 51 contacts with the signal input part 21 in the array circuit, test signal is loaded in the array circuit 31 by the detector probe 20 of prober frame 51, and detect, thereby reach the purpose of hot-wire array circuit effect by the zones that 41 pairs of detection probe load test signal.
In realize the process that array circuit detects by above-mentioned checkout equipment, the inventor finds that there are the following problems at least in the prior art:
In actual applications, because the signal input part position difference of different product, the arrangement mode difference need realize test by the prober frame of buying different model, causes the increase of production cost thus; The prober frame that need change simultaneously respective model when different product switches satisfies the detection needs, also caused workload bigger, debug difficulties, and owing to be subjected to the prober frame structural limitations, the distance of detection probe and prober frame is very near when the array of detection faces panel edges, the collision of detection probe and prober frame takes place easily, causes expensive detection probe damage etc.
Summary of the invention
Embodiments of the invention provide a kind of array detection equipment, can reduce the testing cost of array circuit, improve testing efficiency.
For achieving the above object, embodiments of the invention adopt following technical scheme:
A kind of array detection equipment comprises base station and detection probe; Wherein, described base station is provided with at least one detector probe kinematic axis that moves on base station, described each detector probe kinematic axis is provided with at least one along the detector probe erecting frame that the detector probe kinematic axis moves, and described each detector probe erecting frame is provided with at least one group and can be used to and the contacted detector probe of the signal input part of array base palte.
The equipment that the embodiment of the invention provides has following beneficial effect: detector probe kinematic axis and detector probe erecting frame are all removable, can adjust detector probe to the position and the size that are fit to array base palte to be measured by the detector probe kinematic axis with along the detector probe erecting frame that this kinematic axis moves; Therefore testable product type is unrestricted, need not according to the expensive prober frame of the replacement of products of different model, consumed time when having saved debugging and having changed prober frame; Simultaneously, also can avoid the technical matters of the detection probe infringement that the collision because of prober frame and detection probe causes, reduce testing cost, improve testing efficiency array circuit.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of the checkout equipment of array circuit in the prior art;
Fig. 2 is the structural representation of the array detection equipment in the embodiment of the invention 1;
Fig. 3 is the structural representation of the detector probe erecting frame of the array detection equipment in the embodiment of the invention 1;
Fig. 4 is detector probe and the spacing of detection probe and the gap ratio synoptic diagram of prior art middle probe framework and detection probe in the embodiment of the invention 1;
Fig. 5 is the structural representation of the array detection equipment in the embodiment of the invention 2;
Fig. 6 is the structural representation of the array detection equipment in the embodiment of the invention 3;
Fig. 7 is the structural representation of the array detection equipment in the embodiment of the invention 4;
Reference numeral: 20-detector probe; The 21-signal input part; The 31-array circuit; The 41-detection probe; The 51-prober frame; 1-detector probe kinematic axis; The 2-array base palte; 3-detection probe kinematic axis; The 4-detection probe; The 5-detector probe; The 6-base station; The 7-slide block; The 8-sliding bar; 9-base station layer; 10-detector probe erecting frame; 11-detection probe erecting frame; The 12-signal input part; The detector probe kinematic axis that 13-increases on parallel direction; The parallel both sides of 14-all need load the array base palte of test signal; The mutually vertical both sides of 15-need load the array base palte of test signal; The detector probe kinematic axis that 16-increases in vertical direction.
Embodiment
The embodiment of the invention provides a kind of array detection equipment, comprises base station and detection probe; Wherein, described base station is provided with at least one detector probe kinematic axis that moves on base station, described each detector probe kinematic axis is provided with at least one along the detector probe erecting frame that the detector probe kinematic axis moves, and described each detector probe erecting frame is provided with at least one group and can be used to and the contacted detector probe of the signal input part of array base palte.
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that is obtained under the creative work prerequisite.And, below each embodiment be possibility of the present invention, embodiment put in order and the numbering execution sequence preferred of embodiment with it irrelevant.
The embodiment of the invention specifically provides a kind of array detection equipment in conjunction with Fig. 2, as shown in Figure 2, comprises base station 6.Be provided with a detector probe kinematic axis 1 that can on base station 6, move (moving direction of establishing detector probe kinematic axis 1 is Y) on the base station 6, this detector probe kinematic axis 1 is provided with a detector probe erecting frame 10 that can move along this detector probe kinematic axis 1 (establishing the direction that erecting frame moves along detector probe kinematic axis 1 is X), and this detector probe erecting frame 10 is provided with at least one group of signal input part 12 contacted detector probe 5 that can be used to array base palte 2; In addition, also be provided with a detection probe kinematic axis 3 that can on base station 6, move on the base station 6, this detection probe kinematic axis 3 is provided with a detection probe erecting frame 11 that moves along detection probe kinematic axis 3, and this detection probe erecting frame 11 is provided with the detection probe 4 that can be used to detection arrays substrate 2.Both are separate for detector probe kinematic axis 1 and detection probe kinematic axis 3.
The part of detector probe erecting frame 10 is amplified, as shown in Figure 3, detector probe erecting frame 10 comprises the slide block 7 that moves along described detector probe kinematic axis 1, one side of slide block 7 is provided with sliding bar 8, the moving direction of the moving direction of sliding bar 8 and detector probe kinematic axis 1 and the moving direction of slide block 7 all vertical (establishing with all vertical direction of the moving direction of the moving direction of detector probe kinematic axis 1 and slide block 7 is Z, and promptly sliding bar 8 can move along the Z direction).And as shown in Figure 3, one end of sliding bar 8 is fixed with described at least one group and can be used to (be meant that at present embodiment and the signal input part mentioned among the embodiment down the pad (pad) on the substrate distinguishes with the signal input part of array base palte 2, and each pad district is used for corresponding one group of detector probe, and the test signal in the detector probe is loaded in the array base palte by the pad district) 12 contacted detector probe 5.Wherein, every group of detector probe 5 comprises the detector probe of two pieces of pawl formula structures.Detector probe comprises: free end is surveyed in the stiff end of the detector probe that contacts with slide block 7 and the detection that does not contact with slide block 7.As shown in Figure 3, the free end of detector probe is to the bent part of signal input part lateral bending, after sliding bar 8 descends, by this part to the signal input part bending, detector probe contacts with signal input part, and the detector probe with said structure is the detector probe of the pawl formula structure that proposes in the present embodiment.
As shown in Figure 4, because the detector probe in the present embodiment 5 need not to be installed on the prober frame 51, therefore prober frame 51 border widths have been saved, so under the situation of the same model array base palte of test, bigger than the distance b (being generally 10mm) between prior art middle probe framework 51 and the detection probe 41 apart from a between embodiment of the invention detector probe 5 and the detection probe 4 is so can effectively reduce detector probe 5 and detection probe 4 probability of collision mutually; In addition, because detector probe 5 can contact with signal input part 12 and its pawl formula structure has certain width by its pawl formula structure, therefore when detector probe 5 contacts with signal input part 12, also keep a segment distance between detector probe erecting frame 10 and the detection probe 4, thereby can further avoid detector probe erecting frame 10 and detection probe 4 mutual possibility of collision.
In the embodiment of the invention, required signal is provided with in program in the time of can and detecting parameter such as the model of array base palte to be measured, position, size, make detector probe kinematic axis 1, detector probe erecting frame 10, detector probe 5, detection probe kinematic axis 3 and detection probe 4 etc. move to suitable position according to set program and driving force, so that finish the test that this array base palte 2 to be measured is carried out.Wherein, type of drive is unrestricted, can be to drive by power motor, and also can be air pressure, hydraulic pressure etc.
When beginning to detect, after detector probe kinematic axis 1 moves to suitable position (mentioned suitable position all refers to position set in the program of moving in the present embodiment) along Y direction, detector probe erecting frame 10 moves to correct position by slide block 7 along directions X, sliding bar 8 drives detector probe 5 declines then, and the pawl formula structure by detector probe 5 contacts with the signal input part 12 of array base palte 2, thereby realization is loaded into test signal in the array circuit of array base palte 2.In like manner, after detection probe kinematic axis 3, detection probe erecting frame 11 moved to correct position along X, Y direction equally respectively, detection probe 4 descended, and begins array base palte 2 is detected.After a column array substrate 2 tests were finished, mobile detector probe 5 and detection probe 4 were tested to the next column array base palte, finished up to all array base palte tests, changed next glass then.
Wherein, the pawl formula structure of detector probe 5 and details constitute as shown in Figure 3, (one piece of detector probe is as the output terminal of test signal for two pieces of probes in the detector probe 5, one piece of detector probe is as the input end of test signal) be one group corresponding with the signal input part 12 on the array base palte 2 respectively, because the number of the signal input part on the different substrate and position are all inequality, so in order to tackle the variation of future products, many group detector probe can be set, and the group number of described detector probe generally be not less than (more preferably greater than) quantity of the signal input part of each array base palte correspondence, the detector probe that has more is used for still can loading test signal to this array base palte when the quantity of the signal input part of above-mentioned each array base palte increases, perhaps when a certain group of detector probe can not be worked, replace this a certain group of detector probe etc. so that increase extendability, and assurance is to the disposable loading procedure of finishing test signal of described each array base palte; And, when if the group number of the detector probe on the detector probe erecting frame is far longer than the quantity of signal input part of array base palte to be measured, can also be the loading procedure that two substrates to be measured or more substrate to be measured are finished test signal simultaneously by detector probe, thereby improve testing efficiency.
In addition, in the present embodiment, for the direction that makes signal input part 12 on the array base palte 2 consistent with the direction of detector probe 5, also be provided with the base station layer 9 of carrying array base palte on the base station 6, base station layer 9 is connected with base station 6 by rotating mechanism (not marking among the figure), by the rotation of described rotating mechanism, base station layer 9 can carry array base palte 2 and rotate on the plane parallel with base station 6.Here the rotating mechanism of mentioning can be a rotation axis.The angle that base station layer 9 rotates can be 90 degree, can be any number of degrees also, does not limit.After the array base palte 2 of base station layer 9 carrying turned to suitable position, base station layer 9 can carry array base palte 2 and be fixed on the described suitable position that turns to.For example: after base station layer 9 is carrying array base palte 2 rotations 90 degree, be fixed on the position after this rotation 90 is spent.Concrete fixedly base station layer mode has a variety of.For instance, driving above-mentioned rotation axis by power motor rotates, after the base station layer that is carrying array base palte 2 turned to 90 degree, power motor control rotation axis remained on and rotates on the position, 90 degree back, and the base station layer 9 that is carrying array base palte 2 thus also will be fixed on the position after this rotations 90 is spent.
The array detection equipment that present embodiment provides substitutes existing prober frame by the detector probe that has pawl formula structure on it, has avoided when array circuit is detected, and prober frame and detection probe case of collision take place; Simultaneously, by its movably independent detection probe motion axle that has and detector probe erecting frame movably, scalable goes out to be fit to the position and the size of various product types, thereby saved the expense of buying various model prober frame, and the process of frequently changing prober frame, not only can effectively reduce array detection equipment and be out of order the time, also can improve the mobility of array detection equipment.
Embodiment 2
Present embodiment provides a kind of array detection equipment, as shown in Figure 5, be with the difference of array detection equipment among the embodiment 1, in the array detection equipment of present embodiment, detector probe kinematic axis 1 is provided with a plurality of detector probe erecting frames 10, wherein the concrete structure of each detector probe erecting frame and effect all can be as described in the detector probe erecting frames 10 among the embodiment 1, and other structures can not given unnecessary details at this as described in the array detection equipment among the embodiment 1 yet.
The array detection equipment that present embodiment provides participates in test because be provided with a plurality of detector probe erecting frames, therefore can more effectively save the test duration, and a plurality of detector probe erecting frames are worked simultaneously, can also realize a plurality of substrate regions to be measured or a plurality of array base palte to be measured are loaded simultaneously the technique effect of test signal.
Embodiment 3
The polygon signal input part that is provided with of the array base palte of some large scale model.In order to satisfy the test needs of this class array base palte, when the array circuit of this array base palte is tested, need be polygon to it, all load test signal as relative both sides.Present embodiment provides a kind of array detection equipment for this reason, as shown in Figure 6, in the array detection equipment of present embodiment, is provided with detector probe kinematic axis 1 and detector probe kinematic axis 13.Separately the concrete structure of detector probe erecting frame and detector probe etc. can be identical with detector probe 5 with the detector probe erecting frame 10 among the embodiment 1 with effect on detector probe kinematic axis 1 and the detector probe kinematic axis 13.Wherein, the difference with embodiment 1 is that this detector probe kinematic axis 1 is parallel to each other with detector probe kinematic axis 13.The array base palte 14 that this position relation that is parallel to each other can be convenient to all need to load both sides test signal is tested.
Wherein, the concrete structure of this detector probe kinematic axis 13 and effect can be with the detector probe kinematic axiss 1 among the embodiment 1; In addition, on detector probe motion 1 that also can be in the present embodiment and/or the detector probe kinematic axis 13 a plurality of detector probe erecting frames are set, shown in the detector probe kinematic axis 1 among Fig. 5, so that improve detection efficiency.All the other structures can not given unnecessary details at this as described in the array detection equipment among the embodiment 1.
The array detection equipment that present embodiment provides not only can reduce the testing cost to array circuit, improves testing efficiency, and the both sides of can also satisfying the demand all load the needs of some test base of test signal.
Some array base palte may be at the both sides input test signal that it intersects vertically.In order to satisfy the test needs of this array base palte, when the array circuit of this array base palte is tested, need load test signal to the signal input part on its adjacent both sides that intersect vertically.Present embodiment provides a kind of array detection equipment for this reason, as shown in Figure 7, in the array detection equipment of present embodiment, is provided with detector probe kinematic axis 1 and detector probe kinematic axis 16.The detector probe erecting frame 10 in can embodiment 1 such as separately concrete structure and the effect of detector probe erecting frame and detector probe etc. is identical with detector probe 5 on detector probe kinematic axis 1 and the detector probe kinematic axis 16.Wherein, be with the difference of embodiment 1, this detector probe kinematic axis 1 is vertical mutually with detector probe kinematic axis 16, and be not in contact with one another, as shown in Figure 7, this is to collide mutually when mobile for fear of detector probe kinematic axis 1 and detector probe kinematic axis 16, so the plane of movement of detector probe kinematic axis 1 is arranged on the plane of movement with detector probe kinematic axis 16 different levels.This mutually vertical, and the different position relation of plane of movement not only is convenient to the intersect vertically signal input part on both sides of array base palte 15 is loaded test signal, also be convenient to moving freely of detector probe kinematic axis 1 and detector probe kinematic axis 16.
Wherein, the concrete structure of this detector probe kinematic axis 16 and effect can be with the detector probe kinematic axiss 1 among the embodiment 1; In addition, on detector probe motion 1 that also can be in the present embodiment and/or the detector probe kinematic axis 16 a plurality of detector probe erecting frames are set, shown in the detector probe kinematic axis 1 among Fig. 5, so that improve detection efficiency.All the other structures can not given unnecessary details at this as described in the array detection equipment among the embodiment 1.
The array detection equipment that present embodiment provides not only can reduce the testing cost to array circuit, improves testing efficiency, can also satisfy the demand and the both sides that intersect vertically be loaded the needs of some test base of test signal.
The above; only be the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (8)
1. an array detection equipment comprises base station and detection probe; It is characterized in that, described base station is provided with at least one detector probe kinematic axis that moves on base station, described each detector probe kinematic axis is provided with at least one along the detector probe erecting frame that the detector probe kinematic axis moves, and described each detector probe erecting frame is provided with at least one group and can be used to and the contacted detector probe of the signal input part of array base palte.
2. equipment according to claim 1, it is characterized in that, described detector probe erecting frame comprises the slide block that moves along described detector probe kinematic axis, one side of described slide block is provided with sliding bar, the moving direction of the moving direction of described sliding bar and described detector probe kinematic axis and the moving direction of described slide block are all vertical, and an end of described sliding bar is fixed with described at least one group and can be used to and the contacted detector probe of the signal input part of array base palte.
3. equipment according to claim 1 is characterized in that, described every group of detector probe comprises the detector probe of two pieces of pawl formula structures.
4. equipment according to claim 1 is characterized in that, the group number of the detector probe that described each detector probe erecting frame is provided with is not less than the quantity of the signal input part of array base palte contacted with it.
5. equipment according to claim 1 is characterized in that, also comprises on described base station: carry the base station layer of described array base palte, described base station layer is connected with described base station by rotating mechanism; By the rotation of described rotating mechanism, described base station layer can carry described array base palte and rotate on the plane parallel with described base station.
6. equipment according to claim 5 is characterized in that, after the described array base palte of carrying turned to suitable position, described base station layer was carrying described array base palte and is being fixed on the described suitable position that turns to.
7. according to any described equipment in the claim 1 to 6, it is characterized in that a detector probe kinematic axis in described at least one detector probe kinematic axis parallels with another detector probe kinematic axis.
8. according to any described equipment in the claim 1 to 6, it is characterized in that a detector probe kinematic axis and another detector probe kinematic axis in described at least one detector probe kinematic axis are perpendicular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101715164A CN102236032A (en) | 2010-05-07 | 2010-05-07 | Array detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101715164A CN102236032A (en) | 2010-05-07 | 2010-05-07 | Array detection equipment |
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| CN102236032A true CN102236032A (en) | 2011-11-09 |
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| CN2010101715164A Pending CN102236032A (en) | 2010-05-07 | 2010-05-07 | Array detection equipment |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280904A (en) * | 2014-09-26 | 2015-01-14 | 京东方科技集团股份有限公司 | Array substrate detecting head and device and array substrate detecting method |
| CN105467299A (en) * | 2015-12-10 | 2016-04-06 | 苏州世纪福智能装备股份有限公司 | FPCB automatic test device |
| CN105467258A (en) * | 2015-12-10 | 2016-04-06 | 苏州世纪福智能装备股份有限公司 | PCBA test apparatus |
| CN105467298A (en) * | 2015-12-10 | 2016-04-06 | 苏州世纪福智能装备股份有限公司 | Probe-free detection system |
| CN107449969A (en) * | 2017-09-14 | 2017-12-08 | 无锡格菲电子薄膜科技有限公司 | The measurement apparatus and measuring method of the resistance of Electric radiant Heating Film |
| CN109581007A (en) * | 2018-12-27 | 2019-04-05 | 南京协辰电子科技有限公司 | Double probe system and printed circuit board detection device |
| CN111312134A (en) * | 2020-04-02 | 2020-06-19 | 深圳市华星光电半导体显示技术有限公司 | Detection equipment for display panel |
| CN111812447A (en) * | 2020-08-10 | 2020-10-23 | 深圳市华腾半导体设备有限公司 | Test device for arrayed components and detection method for arrayed components |
| CN113740571A (en) * | 2020-05-29 | 2021-12-03 | 株式会社Tse | Array testing device capable of realizing automatic precise control of single probe block |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050179452A1 (en) * | 2004-02-12 | 2005-08-18 | Applied Materials, Inc. | Configurable prober for TFT LCD array test |
| CN1761883A (en) * | 2003-05-09 | 2006-04-19 | 德商·Atg测试系统股份有限公司 | Method for testing empty printed circuit boards |
| CN101017256A (en) * | 2006-02-06 | 2007-08-15 | 激光先进技术股份公司 | Repair device and repair method |
| CN200962121Y (en) * | 2006-09-07 | 2007-10-17 | 中国地质大学（武汉） | A driving device for a probe for simulating electrostatic field surveying and mapping |
| CN201429464Y (en) * | 2009-04-09 | 2010-03-24 | 张九六 | Automatic test spectrometer for united LED |
-
2010
- 2010-05-07 CN CN2010101715164A patent/CN102236032A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1761883A (en) * | 2003-05-09 | 2006-04-19 | 德商·Atg测试系统股份有限公司 | Method for testing empty printed circuit boards |
| US20050179452A1 (en) * | 2004-02-12 | 2005-08-18 | Applied Materials, Inc. | Configurable prober for TFT LCD array test |
| CN101017256A (en) * | 2006-02-06 | 2007-08-15 | 激光先进技术股份公司 | Repair device and repair method |
| CN200962121Y (en) * | 2006-09-07 | 2007-10-17 | 中国地质大学（武汉） | A driving device for a probe for simulating electrostatic field surveying and mapping |
| CN201429464Y (en) * | 2009-04-09 | 2010-03-24 | 张九六 | Automatic test spectrometer for united LED |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280904A (en) * | 2014-09-26 | 2015-01-14 | 京东方科技集团股份有限公司 | Array substrate detecting head and device and array substrate detecting method |
| CN105467299A (en) * | 2015-12-10 | 2016-04-06 | 苏州世纪福智能装备股份有限公司 | FPCB automatic test device |
| CN105467258A (en) * | 2015-12-10 | 2016-04-06 | 苏州世纪福智能装备股份有限公司 | PCBA test apparatus |
| CN105467298A (en) * | 2015-12-10 | 2016-04-06 | 苏州世纪福智能装备股份有限公司 | Probe-free detection system |
| CN105467258B (en) * | 2015-12-10 | 2018-06-19 | 苏州世纪福智能装备股份有限公司 | A kind of PCBA jigsaw test device |
| CN107449969A (en) * | 2017-09-14 | 2017-12-08 | 无锡格菲电子薄膜科技有限公司 | The measurement apparatus and measuring method of the resistance of Electric radiant Heating Film |
| CN109581007A (en) * | 2018-12-27 | 2019-04-05 | 南京协辰电子科技有限公司 | Double probe system and printed circuit board detection device |
| CN111312134A (en) * | 2020-04-02 | 2020-06-19 | 深圳市华星光电半导体显示技术有限公司 | Detection equipment for display panel |
| CN111312134B (en) * | 2020-04-02 | 2024-03-08 | 深圳市华星光电半导体显示技术有限公司 | Display panel's check out test set |
| CN113740571A (en) * | 2020-05-29 | 2021-12-03 | 株式会社Tse | Array testing device capable of realizing automatic precise control of single probe block |
| CN111812447A (en) * | 2020-08-10 | 2020-10-23 | 深圳市华腾半导体设备有限公司 | Test device for arrayed components and detection method for arrayed components |
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Application publication date: 20111109 |