1379040 六、發明說明： 【發明所屬之技術領域】 本案係關於一種流體輸送裝置，尤指一種結構簡化及可 使整體體積縮小之流體輸送裝置。 【先前技術】 $ 目前於各領域中無論是醫藥、電腦科技、列印、能源等 工業，產品均朝精緻化及微小化方向發展，其中微泵浦、喷 霧器、噴墨頭、工業列印裝置等產品所包含之流體輸送結構 為其關鍵技術，是以，如何藉創新結構突破其技術瓶頸，為 發展之重要内容。 請參閱第一圖A，其係為習知微泵浦結構之剖面示意 圖，習知微泵浦結構10係由閥體座11、閥體蓋體12、閥體 薄膜13、微致動器14及蓋體15所組成，其中，閥體薄膜 • 13係包含入口閥門結構131及出口閥門結構132，閥體座 11包含入口通道111、出口通道112、密封環113以及出口 暫存腔114，閥體蓋體12與微致動器14間定義形成一壓力 腔室123，閥體蓋體12包含入口閥門通道121、出口閥門通 道122、入口暫存腔124以及密封環125，閥體薄膜13設置 在閥體座11與閥體蓋體12之間。 當一電壓作用在微致動器14的上下兩極時，會產生一 電場，使得微致動器14在此電場之作用下產生彎曲，當微 致動器14朝箭號a所指之方向向下彎曲變形，將使得壓力 4 1379040 腔室123之體積增加，因而產生一吸力，以使間體薄膜13 之入口閥門結構131開啟，液體可自閥體座11上之入口通 道111被吸取進來，並流經閥體薄膜13之入口閥門結構 131、入口暫存腔124及闊體蓋體12上之入口閥門通道121 而流入壓力腔室123内（如第一圖B所示），反之當微致動 器14因電場方向改變而朝箭號b之方向向上彎曲變形時， 則會壓縮壓力腔室123之體積，使得壓力腔室123對内部之 $ 流體產生一推力，並使閥體薄膜13之入口閥門結構131、 出口閥門結構132承受一向上推力，而出口閥門結構132 將開啟，並使液體由壓力腔室123經由閥體蓋體12上之出 口閥門通道122、閥體薄膜13之出口閥門結構132以及出 口暫存腔114，而從閥體座11之出口通道112流出微泵浦 結構10外，因而完成流體之傳輸過程（如第一圖C所示）。 雖然習知微泵浦結構10能夠達到輸送流體的功能，且 藉由閥體座11之密封環113與入口閥門結構131相抵頂， • 使位於凹槽内之密封環113頂觸閥體薄膜之入口閥門結構 131而產生一預力（Preforce)作用，使得入口閥門結構131 在未作動時於閥體座11之下表面形成一間隙，以及閥體蓋 體12之密封環125與出口閥門結構132相抵頂，出口闊門 結構132亦藉由將密封環125設至於凹槽中的相同方式與閥 體蓋體12之上表面形成一間隙，有助於流體釋出時產生更 大之預蓋緊效果以防止逆流，但是整體體積因其組成結構的 關係並無法縮小，且整體的組成結構較複雜。 因此，如何發展一種可改善上述習知技術缺失之流體輸 5 1379040 送裝置，實為目前迫切需要解決之問題。 « 【發明内容】 本案之主要目的在於提供流體輸送裝置，俾解決習知流 體輸送裝置整體體積因其組成結構的關係無法縮小，且組成 結構較複雜等缺點。 為達上述目的，本案之一較廣義實施態樣為提供一種流 體輸送裝置，用以傳送一流體，其係包含：閥體座，其係具 • 有出口通道；閥體蓋體，其係部分與閥體座堆疊結合，且具 有入口通道及壓力腔室；間體薄膜，其係設置於閥體座及閥 體蓋體之間；致動裝置，其週邊係固設於閥體蓋體；入口密 封構件，其係設置於閥體蓋體與致動裝置之間，且具有入口 閥門，入口閥門係設置於壓力腔室及入口通道之間。 本案之另一較廣義實施樣態為提供一種流體輸送裝 置，用以傳送流體，其係包含：閥體座，其係具有出口通道； I .閥體蓋體，其係部分與閥體座堆疊結合，且具有入口通道及 壓力腔室；出口密封構件，其係設置於閥體座及閥體蓋體之 間，且具有出口閥門，出口閥門係與閥體座相抵觸；致動裝 置，其週邊係固設於閥體蓋體；入口密封構件，其係設置於 閥體蓋體與致動裝置之間，且具有入口閥門，入口閥門係設 置於壓力腔室及入口通道之間。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的說 6 1379040 明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各 « 種的變化，其皆不脫離本案的範圍，且其中的說明及圖示在 本質上係當作說明之用，而非用以限制本案。 請參閱第二圖A，其係為本案第一較佳實施例之流體輸 送裝置之結構示意圖，如圖所示，本案之流體輸送裝置20 可適用於醫藥生技、電腦科技、列印或是能源等工業，且可 輸送氣體或是液體，但不以此為限，流體輸送裝置20主要 I 係由閥體座21、閥體蓋體22、閥體薄膜23、致動裝置24、 蓋體25以及入口密封構件26所組成，閥體蓋體22及致動 裝置24之間形成一壓力腔室226，主要用來儲存流體，該 流體輸送裝置2 0之組裝方式係將閥體薄膜2 3設置於閥體座 21及閥體蓋體22之間，並使閥體薄膜23與閥體座21及部 分闊體蓋體.22相互堆疊結合，並且於閥體蓋體22之相對應 位置設置有致動裝置24，至於入口密封構件26則設置於閥 體蓋體22與致動裝置24之間，致動裝置24係由一振動薄 • 膜241以及一致動器242組裝而成，用以驅動流體輸送裝置 20之作動，最後，再將蓋體25設置於致動裝置24上，故 其係依序將閥體座21、閥體薄膜23、閥體蓋體22、入口密 封構件26、致動裝置24及蓋體25相對應堆疊設置，以完 成流體輸送裝置20之組裝（如第二圖D所示）。 其中，閥體座21、閥體蓋體22及入口密封構件26係 為本案流體輸送裝置20中導引流體進出之主要結構，請再 參閱第二圖A並配合第二圖B及第三圖A，其中第二圖B係 為第二圖A所示之閥體座之背面結構示意圖，第三圖A係為 7 1379040 • 第一圖D之A-Λ剖面結構示意圖，如圖所示，閥體座21係 具有一出〇通道211，並且閥體薄膜23及閥體座21之間係 形成如第二圖B及第三圖A中所示之出口暫存腔212,但不 以此為限’其係由閥體座21與出口通道211相對應之位置 產生部分凹陷而形成，並與出口通道2丨1相連通，該出口暫 存腔212係用以暫時儲存流體，並使該流體由出口暫存腔 212輸送至出口通道211，再流出閥體座21之外。 • 請參閱第二圖B並配合第二圖a，其中第二圖B係為第 二圖A所示之閥體蓋體之背面結構示意圖’如圖所示，閥體 蓋體22係具有一上表面22〇及一下表面228，以及在閥體 盍體22上係具有貫穿上表面mo至下表面228之入口通道 221及出口閥門通道222，且該入口通道221係設置於與壓 力腔室226相對應之位置，而出口閥門通道222則設置於與 間體座21之出口暫存腔212相對應之位置，且與壓力腔室 226相連通。 ® 請再參閱第二圖A，閥體蓋體22之下表面228係部份 凹陷’以形成一壓力腔室226，其係與致動裝置24之致動 器242相對應設置，壓力腔室226係與出口閥門通道222 相連通，另外閥體蓋體22於環繞壓力腔室226的週邊係具 有一凹槽227，用以供入口密封構件26之密封主體261(如 第二圖A所示）設置於其上，主要藉由設置於凹槽227内之 密封主體261使閥體薄膜23與振動薄膜241之間緊密的貼 合，以防止流體外洩。 請再參閱第一圖A及第三圖a，入口密封構件2 6的組 8 1379040 成結構除了密封主體261外，更包含一入口閥門262，其係 * 與密封主體261相連接且設置於密封主體261之内圈中，可 為但不限為以一體成型的方式形成，入口閥門262係設置於 壓力腔室226及入口通道221之間。 以及，如第二圖B所示，閥體座21於環繞出口暫存腔 212週邊係具有一凹槽213,用以供一密封環27(如第二圖A 所示）設置於其上，閥體蓋體22之上表面220於環繞出口閥 _ 門通道222的週邊係具有一凹槽225，用以供密封環28(如 第二圖A所示）設置於其上，主要藉由設置於凹槽213内之 密封環27及凹槽225内之密封環28使閥體座21與閥體薄 膜23之間緊密的貼合，以防止流體外洩。 請再參閱第二圖A，閥體薄膜23主要係以傳統加工、 或黃光i虫刻、或雷射加工、或電鑄加工、或放電加工等方式 製出，且為一厚度實質上相同之薄片結構，於本實施例中， 閥體薄膜23係為一出口閥門結構，其中，閥體薄膜23係具 φ 有出口閥片233以及複數個環繞出口閥片233週邊而設置之 鏤空孔洞232,另外，在孔洞232之間更具有與出口閥片233 相連接之延伸部231。 請再參閱第二圖A、第二圖C並配合第三圖A，於閥體 蓋體22之上表面220之出口閥門通道222的邊緣係環繞設 置一微凸結構224，其係包含一水平接觸面2241，該水平接 觸面2241係與閥體薄膜23之出口閥片233相抵頂，可使得 貼合設置於閥體蓋體22上之閥體薄膜23之出口閥片233 因微凸結構224而形成一向上隆起，而閥體薄膜23之其餘 9 1379040 部分係與閥體蓋體22相抵頂，如此微凸結構224對出口閥 片233頂推而產生一預力作用，一旦’入口密封構件26之 入口閥門262開啟而使流體流入壓力腔室226内部時，閥體 薄膜23仍能與微凸結搆224形成一段封閉面的接觸，能產 生更大更佳之預蓋緊防止逆流的效果，且藉由微凸結構224 之水平接觸面2241可使闊體薄膜23在未作動時使出口閥片 233與閥體蓋體22之上表面220之間具有一間隙。 請再參閱第二圖C並配合第三圖A，於閥體蓋體22之 下表面228之入口通道221的邊緣係環繞設置一微凸結構 223 ’其係包含一水平接觸面2231，該水平接觸面2231係 與入口密封構件26之入口閥門262相抵頂·，可使得貼合設 置於閥體蓋體23上之入口閥門262因微凸結構223而形成 一向下隆起’如此微凸結構223對入口閥門262頂推而產生 一預力作用’一旦，出口閥片233開啟而使流體釋出時，入 口閥門2 6 2仍能與微凸結構2 2 3形成一段封閉面的接觸，能 產生更大更佳之預蓋緊防止逆流的效果，且藉由微凸結構 223之水平接觸面2231可使入口閥門262在未作動時使入 口閥門262與閥體蓋體22之下表面228之間具有一間隙。 當然，上述之微凸結構223及224可採用半導體製程， J如用光钱刻或鑛膜或電~技術，直接在閥體蓋體22上 成或疋直接與閥體蓋體22以一體射出成型的方式形 成，以使閥體薄膜23與閥體座21以及入口閥門262與闊體 蓋體22之間分別產生一間隙，而對入口閥門2犯及出口闊 片233頂推以產生一預力作用，有助於開啟。 1379040 因此，當致動器242受電壓致動使致動裝置24變形， ' 造成壓力腔室226之體積膨脹而產生負壓差，可使入口閥門 262開啟流體將經入口通道221流至壓力腔室226内（如第 三圖B所示），而闊體薄膜23之出口閥片233係整個平貼於 閥體座21之上，此時出口閥片233會緊貼於微凸結構224 之水平接觸面2241，而密封住閥體座21上之出口閥門通道 222，且其外圍的鏤空孔洞232及延伸部231則順勢浮貼於 I 閥體蓋體22之上，故因此閥體薄膜23之關閉作用，使流體 無法流出。其後，當施加於致動器242的電場方向改變後， 致動器242將使致動裝置24變形以使壓力腔室226收縮而 體積減小，使壓力腔室226與外界產生正壓力差，促使流體 可經由鏤空之孔洞232由壓力腔室226經出口閥門通道222 而流至閥體座21之出口暫存腔212内，並可經由出口通道 211排出，於此同時，入口密封構件26之入口閥門262(如 第三圖C所示）係會緊貼於微凸結構223之水平接觸面 • 2231，而密封住閥體蓋體22上之入口通道221，故該流體 不會通過入口閥門262而產生倒流的現象。 當以一電壓驅動致動器242時，致動裝置24產生彎曲 變形，如第三圖B所示，致動裝置24係朝箭號c所指之方 向向下彎曲變形，使得壓力腔室226之體積增加，因而產生 一吸力，使閥體薄膜23以及入口密封構件26之入口閥門 262承受一向下之拉力，並使已具有一預力之入口閥門262 迅速開啟（如第三圖B所示），使液體可大量地自閥體蓋體 22上之入口通道221被吸取進來，而流入壓力腔室226之 11 1379040 内。 . 此時，閥體薄膜23係因該向下拉力使得位於閥體薄膜 23上之出口閥片233密封住出口閥門通道222,再加上微凸 結構224與出口閥片233接觸之表面為一水平接觸面2241 型態，一旦入口閥門262開啟而使流體流入閥體蓋體22内 部時，閥體薄膜23之出口閥片233仍能與微凸結構224形 成一段封閉面的接觸，能產生更大更佳之預蓋緊防止逆流的 鲁 效果。 當致動裝置24因電場方向改變而如第三圖C所示之箭 號d向上彎曲變形時，則會壓縮壓力腔室226之體積，使得 壓力腔室226對内部之流體產生一推力，並使閥體薄膜23 及入口閥門262承受一向上推力，此時，設置於微凸結構 224上之出口閥片233其可迅速開啟（如第三圖C所示），並 使液體瞬間大量宣洩，由壓力腔室226經由閥體蓋體22上 之出口閥門通道222、閥體薄膜23上之孔洞232、閥體座 • 21上之出口暫存腔212及出口通道211而流出流體輸送裝 置20之外，因而完成流體之傳輸過程，同樣地，此時由於 入口閥門262係承受該向上之推力，因而使得入口闊門262 密封住入口通道221，再加上微凸結構223與入口閥門262 接觸之表面為一水平接觸面2231型態，一旦出口閥片233 開啟而使流體釋出時，入口閥門262仍能與微凸結構223 形成一段封閉面的接觸，能產生更大更佳之預蓋緊防止逆流 的效果，因此，藉由入口閥門262及出口閥片233配合設置 於閥體蓋體22上之微凸結構223及224之設計，可使流體 12 1379040 於傳送過程中不會產生回流的情形，達到高效率之傳輸。 ' 請參閱第四圖，其係為本案第二較佳實施例之流體輸送 裝置未作動狀態時之剖面結構示意圖，於一些實施例中，入 口通道221及出口通道211的實施態樣可為側進側出的形 式，但不以此為限，可依實際設計需要變更。 請參閱第五圖A，其係為本案第三較佳實施例之流體輸 送裝置未作動狀態時之剖面結構示意圖，如圖所示，流體輸 送裝置30主要係由閥體座21、閥體蓋體22、致動裝置24、 蓋體25、入口密封構件26以及出口密封構件31所組成， 其中閥體座21、閥體蓋體22、致動裝置24、蓋體25、入口 密封構件26之結構、設置位置及所能達成之目的及功效係 已詳述於第一較佳實施例中，因此不再贅述。 於本實施例中，主要以出口密封構件31來取代第一較 佳實施例所述之閥體薄膜23及密封環27，且其運作原理及 結構係與入口密封構件26相同，請參閱第五圖A，出口密 φ 封構件31具有一密封主體311以及一出口閥門312，密封 主體311係設置於閥體座21之凹槽213内，主要用來使閥 體座21與閥體蓋體22之間緊密的貼合，以防止流體外洩， 而出口閥門312係與密封主體311相連接且設置於密封主體 311之内圈中，可為但不限為以一體成型的方式形成，出口 閥門312係設置於出口暫存腔212内且與閥體蓋體21之微 凸結構224相抵觸。 微凸結構224之水平接觸面2241與出口密封構件31 之出口閥門312相抵頂，可使得貼合設置於閥體蓋體23上 13 1379040 之出口閥門312因微凸結構224而形成一向上隆起，如此微 * 凸結構224對出口閥門312頂推而產生一預力作用，且藉由 微凸結構224之水平接觸面2241可使出口閥門312在未作 動時使出口閥門312與閥體蓋體22之間具有一間隙。 當以一電壓驅動致動器242時，致動裝置24產生彎曲 變形，如第五圖B所示，致動裝置24係朝箭號c所指之方 向向下彎曲變形，使得壓力腔室226之體積增加，因而產生 一吸力，使出口密封構件31之出口閥門312以及入口密封 構件26之入口閥門262承受一向下之拉力，並使已具有一 預力之入口閥門262迅速開啟，使液體可大量地自閥體蓋體 22上之入口通道221被吸取進來，而流入壓力腔室226之 内。 此時，出口密封構件31係因該向下拉力使得位於出口 閥門312密封住出口閥門通道222，再加上微凸結構224與 出口閥門312接觸之表面為一水平接觸面2241型態，一旦 φ 入口閥門262開啟而使流體流入閥體蓋體22内部時，出口 閥門312仍能與微凸結構224形成一段封閉面的接觸，能產 生更大更佳之預蓋緊防止逆流的效果。 當致動裝置24因電場方向改變而如第五圖C所示之箭 號d向上彎曲變形時，則會壓縮壓力腔室226之體積，使得 壓力腔室226對内部之流體產生一推力，並使出口閥門312 及入口閥門262承受一向上推力，此時，設置於微凸結構 224上之出口閥門312其可迅速開啟，並使液體瞬間大量宣 •洩，由壓力腔室226經由閥體蓋體22上之出口閥門通道 14 1379040 222、閥體座21上之出口暫存腔212及出口通道211而流出 * 流體輸送裝置30之外，因而完成流體之傳輸過程，同樣地， 此時由於入口閥門2 6 2係承受該向上之推力，因而使得入口 閥門262密封住入口通道221，再加上微凸結構223與入口 閥門262接觸之表面為一水平接觸面2231型態，一旦出口 閥門312開啟而使流體釋出時，入口閥門262仍能與微凸結 構223形成一段封閉面的接觸，能產生更大更佳之預蓋緊防 止逆流的效果，因此，藉由入口閥門262及出口閥門312 配合設置於閥體蓋體22上之微凸結構223及224之設計， 可使流體於傳送過程中不會產生回流的情形，達到高效率之 傳輸。 综上所述，本案之流體輸送裝置藉由入口密封構件將習 知入口暫存腔去除，直接讓入口通道與壓力腔室相連接，可 縮小整體體積，且藉由入口密封構件除了可使閥體蓋體與致 動裝置緊密結合外，更可利用入口閥門的開啟或關閉來控制 φ 流體的進入及防止逆流。另外，更可利用出口密封構件來取 代閥體薄膜，可使閥體蓋體與閥體座緊密結合外，更可利用 出口閥門的開啟或關閉來控制流體的排出及防止逆流。是 以，本案之流體輸送裝置極具產業之價值，爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修飾，然 皆不脫如附申請專利範圍所欲保護者。 15 1379040 【圖式簡單說明】 第一圖A:其係為習知微泵浦結構之剖面示意圖。 第一圖B:其係為第一圖A之壓力腔室膨脹狀態示意圖。 第一圖C:其係為第一圖A之壓力腔室壓縮狀態示意圓。 第二圖A :其係為本案第一較佳實施例之流體輸送裝置之結 構示意圖。 第二圖B:其係為第二圖A所示之閥體座之背面結構示意圖。 第二圖C:其係為第二圖A所示之閥體蓋體之背面結構示意 圖。 第二圖D:其係為第二圖A之組裝結構示意圖。 第三圖A:其係為第二圖D之A-A剖面結構示意圖。 第三圖B :其係為第三圖A之壓力腔室膨脹狀態示意圖。 第三圖C :其係為第三圖A之壓力腔室壓縮狀態示意圖。 第四圖：其係為本案第二較佳實施例之流體輸送裝置未作動 狀態時之剖面結構示意圖。 第五圖A :其係為本案第三較佳實施例之流體輸送裝置未作 動狀態時之剖面結構示意圖。 第五圖B:其係為第五圖A之壓力腔室膨脹狀態示意圖。 第五圖C:其係為第五圖A之壓力腔室壓縮狀態示意圖。 16 1379040 【主要元件符號說明】 微泵浦結構：10 閥體座：11、21 入口通道：111、221 出口通道:112、211 密封環：113、125、27、28 出口暫存腔：114、212 閥體蓋體:12、22 入口閥門通道：121 出口閥門通道：122、222 壓力腔室：123、226 入口暫存腔：124 閥體薄膜：13、23 入口閥門結構：131 出口闊門結構：132 微致動器：14 蓋體：15、25 流體輸送裝置：20、30 上表面：220 下表面：228 微凸結構：223、224 水平接觸面：2231、2241 延伸部：231 孔洞：232 入口閥門：262 出口閥片：233 致動裝置：24 振動薄膜：241 致動器：242 凹槽：213、225、227 入口密封構件·‘ 26 密封主體：261、311 出口密封構件：31 出口閥門：312 171379040 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a fluid delivery device, and more particularly to a fluid delivery device which is simplified in structure and which can reduce the overall volume. [Prior Art] $ Currently in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization, among which micro pump, sprayer, inkjet head, industrial column The fluid transport structure contained in products such as printing devices is its key technology. It is how to break through its technical bottleneck with innovative structure and is an important part of development. Please refer to FIG. 1A, which is a schematic cross-sectional view of a conventional micro-pump structure. The conventional micro-pump structure 10 is composed of a valve body seat 11, a valve body cover 12, a valve body film 13, and a microactuator 14. And a cover body 15 , wherein the valve body film 13 includes an inlet valve structure 131 and an outlet valve structure 132 , the valve body seat 11 includes an inlet passage 111 , an outlet passage 112 , a sealing ring 113 , and an outlet temporary storage chamber 114 , the valve A pressure chamber 123 is defined between the body cover 12 and the microactuator 14. The valve body cover 12 includes an inlet valve passage 121, an outlet valve passage 122, an inlet temporary storage chamber 124, and a seal ring 125. The valve body film 13 is disposed. Between the valve body seat 11 and the valve body cover 12. When a voltage is applied to the upper and lower poles of the microactuator 14, an electric field is generated, causing the microactuator 14 to bend under the action of the electric field, as the microactuator 14 points in the direction indicated by the arrow a. The lower bending deformation will increase the volume of the chamber 4 1379040, thereby generating a suction force to open the inlet valve structure 131 of the interlayer film 13, and the liquid can be sucked in from the inlet passage 111 on the valve body seat 11, And flowing through the inlet valve structure 131 of the valve body film 13, the inlet temporary storage cavity 124 and the inlet valve passage 121 on the wide body cover 12 into the pressure chamber 123 (as shown in the first figure B), and vice versa When the actuator 14 is bent upward and deformed in the direction of the arrow b due to the change of the direction of the electric field, the volume of the pressure chamber 123 is compressed, so that the pressure chamber 123 generates a thrust to the internal fluid, and the valve body film 13 is caused. The inlet valve structure 131, the outlet valve structure 132 is subjected to an upward thrust, and the outlet valve structure 132 is opened, and the liquid is passed from the pressure chamber 123 through the outlet valve passage 122 on the valve body cover 12, the outlet of the valve body film 13. Valve junction 132 and the outlet buffer cavity 114, from the outside of the valve seat 11 of the outlet passage 112 of outflow mini pumping structure 10, thus completing the transfer of a process fluid (e.g., first shown in FIG. C). Although the conventional micro-pump structure 10 can achieve the function of transporting fluid, and the seal ring 113 of the valve body seat 11 abuts against the inlet valve structure 131, the seal ring 113 located in the groove is in contact with the valve body film. The inlet valve structure 131 produces a pre-force action such that the inlet valve structure 131 forms a gap on the lower surface of the valve body seat 11 when not in operation, and the seal ring 125 and the outlet valve structure 132 of the valve body cover 12. At the same time, the outlet wide door structure 132 also forms a gap with the upper surface of the valve body cover 12 in the same manner as the sealing ring 125 is disposed in the recess, which contributes to a larger pre-tightening when the fluid is released. The effect is to prevent backflow, but the overall volume cannot be reduced due to the structure of the structure, and the overall composition is complicated. Therefore, how to develop a fluid delivery device that can improve the above-mentioned conventional technology is urgently needed to be solved. « [Summary of the Invention] The main purpose of the present invention is to provide a fluid transport device that solves the shortcomings of the conventional fluid transport device as a whole volume cannot be reduced due to its structural structure, and the composition of the structure is relatively complicated. In order to achieve the above object, a broader aspect of the present invention provides a fluid delivery device for delivering a fluid comprising: a valve body seat, an attachment having an outlet passage, and a valve body cover portion. The valve body is stacked and has an inlet passage and a pressure chamber; an intermediate film disposed between the valve body seat and the valve body cover; and an actuation device having a periphery fixed to the valve body cover; An inlet sealing member is disposed between the valve body cover and the actuating device and has an inlet valve disposed between the pressure chamber and the inlet passage. Another broad aspect of the present invention provides a fluid delivery device for transferring fluid, comprising: a valve body seat having an outlet passage; I. a valve body cover portion, the system portion being stacked with the valve body seat Combined with an inlet passage and a pressure chamber; an outlet sealing member disposed between the valve body seat and the valve body cover and having an outlet valve, the outlet valve being in contact with the valve body seat; and an actuating device The peripheral system is fixed to the valve body cover; the inlet sealing member is disposed between the valve body cover and the actuating device, and has an inlet valve, and the inlet valve is disposed between the pressure chamber and the inlet passage. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the later paragraph 6 1379040. It should be understood that the present invention is capable of various changes in various aspects without departing from the scope of the present invention, and the description and illustration thereof are used in the nature of the description, rather than limiting the case. . Please refer to FIG. 2A , which is a schematic structural view of a fluid transport device according to a first preferred embodiment of the present invention. As shown, the fluid transport device 20 of the present invention can be applied to medical technology, computer technology, printing or In the energy industry, and can transport gas or liquid, but not limited thereto, the fluid delivery device 20 is mainly composed of a valve body seat 21, a valve body cover 22, a valve body film 23, an actuating device 24, and a cover body. 25 and the inlet sealing member 26, a pressure chamber 226 is formed between the valve body cover 22 and the actuating device 24, and is mainly used for storing fluid. The fluid conveying device 20 is assembled by the valve body film 2 3 . The valve body film 23 is disposed between the valve body seat 21 and the valve body cover 22, and the valve body film 23 and the valve body seat 21 and the partial wide body cover body 22 are stacked on each other, and are disposed at corresponding positions of the valve body cover body 22. There is an actuating device 24, and the inlet sealing member 26 is disposed between the valve body cover 22 and the actuating device 24, and the actuating device 24 is assembled by a vibration thin film 241 and an actuator 242 for driving. Actuation of the fluid delivery device 20, and finally, the cover 25 is set On the actuating device 24, the valve body seat 21, the valve body film 23, the valve body cover 22, the inlet sealing member 26, the actuating device 24 and the cover body 25 are sequentially stacked to complete the fluid. Assembly of the delivery device 20 (as shown in Figure 2D). The valve body seat 21, the valve body cover 22 and the inlet sealing member 26 are the main structures for guiding fluid in and out of the fluid transport device 20 of the present invention. Please refer to FIG. 2A together with the second figure B and the third figure. A, wherein the second figure B is a schematic view of the back structure of the valve body seat shown in the second figure A, and the third figure A is 7 1379040. The schematic diagram of the A-Λ structure of the first figure D, as shown in the figure, The valve body seat 21 has an exit passage 211, and the outlet body 212 is formed between the valve body film 23 and the valve body seat 21 as shown in FIG. 2B and FIG. 3A, but not For example, it is formed by a partial depression of the position corresponding to the valve body seat 21 and the outlet passage 211, and is in communication with the outlet passage 2丨1 for temporarily storing the fluid and The fluid is delivered from the outlet storage chamber 212 to the outlet passage 211 and out of the valve body seat 21. • Please refer to the second figure B and cooperate with the second figure a. The second figure B is the schematic diagram of the back structure of the valve body cover shown in the second figure A. As shown in the figure, the valve body cover 22 has a The upper surface 22 and the lower surface 228, and the inlet passage 221 and the outlet valve passage 222 extending through the upper surface mo to the lower surface 228 on the valve body body 22, and the inlet passage 221 is disposed in the pressure chamber 226 Corresponding positions, and the outlet valve passage 222 is disposed at a position corresponding to the outlet temporary chamber 212 of the intermediate seat 21, and communicates with the pressure chamber 226. ® Referring again to Figure 2A, the lower surface 228 of the valve body cover 22 is partially recessed to form a pressure chamber 226 that is disposed corresponding to the actuator 242 of the actuator 24, the pressure chamber The 226 is in communication with the outlet valve passage 222. In addition, the valve body cover 22 has a recess 227 around the periphery of the pressure chamber 226 for the sealing body 261 of the inlet sealing member 26 (as shown in FIG. 2A). The upper surface of the valve body film 23 and the vibrating film 241 are closely adhered to each other by the sealing body 261 provided in the recess 227 to prevent leakage of fluid. Referring to FIG. 1A and FIG. 3A again, the group 8 1379040 of the inlet sealing member 26 is configured to include, in addition to the sealing body 261, an inlet valve 262 which is connected to the sealing body 261 and is disposed in the sealing. The inner ring of the main body 261 may be formed by, but not limited to, an integral molding, and the inlet valve 262 is disposed between the pressure chamber 226 and the inlet passage 221. As shown in FIG. 2B, the valve body seat 21 has a recess 213 around the periphery of the outlet storage cavity 212 for a sealing ring 27 (shown in FIG. 2A) to be disposed thereon. The upper surface 220 of the valve body cover 22 has a recess 225 around the periphery of the outlet valve _ door passage 222 for the sealing ring 28 (shown in FIG. A) to be disposed thereon, mainly by setting The seal ring 27 in the recess 213 and the seal ring 28 in the recess 225 provide a tight fit between the valve body seat 21 and the valve body membrane 23 to prevent fluid leakage. Referring to FIG. 2A again, the valve body film 23 is mainly produced by conventional processing, or yellow light engraving, or laser processing, electroforming, or electric discharge machining, and is substantially the same thickness. In the embodiment, the valve body film 23 is an outlet valve structure, wherein the valve body film 23 is provided with an outlet valve piece 233 and a plurality of hollow holes 232 disposed around the periphery of the outlet valve piece 233. In addition, an extension portion 231 connected to the outlet valve piece 233 is further provided between the holes 232. Referring to FIG. 2A and FIG. 2C together with FIG. 3A, a micro-convex structure 224 is disposed around the edge of the outlet valve passage 222 of the upper surface 220 of the valve body cover 22, which includes a horizontal The contact surface 2241 is abutting against the outlet valve piece 233 of the valve body film 23, so that the outlet valve piece 233 of the valve body film 23 disposed on the valve body cover 22 can be attached to the micro-convex structure 224. An upward bulge is formed, and the remaining 9 1379040 portions of the valve body film 23 abut against the valve body cover 22, such that the micro-convex structure 224 pushes the outlet valve piece 233 to generate a pre-stress, once the 'inlet sealing member When the inlet valve 262 of 26 is opened to allow fluid to flow into the interior of the pressure chamber 226, the valve body film 23 can still form a closed surface contact with the micro-convex structure 224, which can produce a larger and better pre-covering against backflow, and By the horizontal contact surface 2241 of the micro-convex structure 224, the wide-body film 23 can have a gap between the outlet valve piece 233 and the upper surface 220 of the valve body cover 22 when it is not actuated. Referring to FIG. 2C again, in conjunction with FIG. 3A, a micro-convex structure 223' is disposed around the edge of the inlet passage 221 of the lower surface 228 of the valve body cover 22, and the system includes a horizontal contact surface 2231. The contact surface 2231 is abutted against the inlet valve 262 of the inlet sealing member 26, so that the inlet valve 262 disposed on the valve body cover 23 can be formed with a downward convex ridge due to the micro-convex structure 223. The inlet valve 262 is pushed up to generate a pre-force action. Once the outlet valve piece 233 is opened to release the fluid, the inlet valve 262 can still form a closed surface contact with the micro-convex structure 2 2 3 to generate more The larger and better pre-tightening effect prevents backflow, and the horizontal contact surface 2231 of the micro-convex structure 223 allows the inlet valve 262 to have a between the inlet valve 262 and the lower surface 228 of the valve body cover 22 when the inlet valve 262 is not actuated. gap. Of course, the above-mentioned micro-convex structures 223 and 224 can be fabricated in a semiconductor process, such as by using a light engraving or a mineral film or an electro-technique, directly on the valve body cover 22 or directly projecting with the valve body cover 22 in one piece. Forming is formed such that a gap is formed between the valve body film 23 and the valve body seat 21 and the inlet valve 262 and the wide body cover 22, and the inlet valve 2 is caused to push the outlet wide piece 233 to push a pre-production. The role of force helps to open. 1379040 Thus, when the actuator 242 is actuated by voltage to deform the actuator 24, 'causing the volume of the pressure chamber 226 to expand to create a negative pressure differential, the inlet valve 262 opens the fluid and will flow through the inlet passage 221 to the pressure chamber. In the chamber 226 (as shown in FIG. 3B), the outlet valve piece 233 of the wide body film 23 is entirely flat on the valve body seat 21, and the outlet valve piece 233 is in close contact with the micro-convex structure 224. The horizontal contact surface 2241 seals the outlet valve passage 222 on the valve body seat 21, and the hollow hole 232 and the extension portion 231 of the outer periphery thereof are floated on the I valve body cover 22, so the valve body film 23 The closing action prevents the fluid from flowing out. Thereafter, when the direction of the electric field applied to the actuator 242 is changed, the actuator 242 will deform the actuator 24 to contract the pressure chamber 226 to reduce the volume, causing the pressure chamber 226 to create a positive pressure difference from the outside. The fluid can be caused to flow from the pressure chamber 226 through the outlet valve passage 222 to the outlet temporary chamber 212 of the valve body seat 21 via the hollow hole 232 and can be discharged through the outlet passage 211, while the inlet sealing member 26 is simultaneously removed. The inlet valve 262 (shown in FIG. 3C) is in close contact with the horizontal contact surface 2231 of the micro-convex structure 223, and seals the inlet passage 221 on the valve body cover 22 so that the fluid does not pass through the inlet. The valve 262 causes a backflow phenomenon. When the actuator 242 is driven by a voltage, the actuating device 24 produces a bending deformation. As shown in the third diagram B, the actuating device 24 is bent downwardly in the direction indicated by the arrow c, so that the pressure chamber 226 The volume is increased, thereby generating a suction force to cause the valve body film 23 and the inlet valve 262 of the inlet sealing member 26 to withstand a downward pulling force, and the inlet valve 262 having a pre-force is quickly opened (as shown in FIG. 3B). The liquid can be drawn in a large amount from the inlet passage 221 on the valve body cover 22 and into the 11 1379040 of the pressure chamber 226. At this time, the valve body film 23 is such that the outlet valve piece 233 on the valve body film 23 seals the outlet valve passage 222 due to the downward pulling force, and the surface of the micro-convex structure 224 contacting the outlet valve piece 233 is one. The horizontal contact surface 2241 type, when the inlet valve 262 is opened to allow fluid to flow into the interior of the valve body cover 22, the outlet valve piece 233 of the valve body film 23 can still form a closed surface contact with the micro-convex structure 224, which can generate more The better and better pre-covering is the effect of preventing the counterflow. When the actuating device 24 is bent upwardly as the arrow d shown in FIG. C is changed due to the change of the electric field direction, the volume of the pressure chamber 226 is compressed, so that the pressure chamber 226 generates a thrust to the internal fluid, and The valve body film 23 and the inlet valve 262 are subjected to an upward thrust. At this time, the outlet valve piece 233 disposed on the micro-convex structure 224 can be quickly opened (as shown in FIG. 3C), and the liquid is instantaneously vented. From the pressure chamber 226, the outlet valve passage 222 on the valve body cover 22, the hole 232 in the valve body film 23, the outlet temporary storage chamber 212 on the valve body seat 21, and the outlet passage 211 flow out of the fluid delivery device 20. In addition, the fluid transfer process is thus completed, and likewise, since the inlet valve 262 is subjected to the upward thrust, the inlet wide door 262 seals the inlet passage 221, and the micro-convex structure 223 is in contact with the inlet valve 262. The surface is a horizontal contact surface 2231 type. Once the outlet valve piece 233 is opened to release the fluid, the inlet valve 262 can still form a closed surface contact with the micro-convex structure 223, which can produce a larger and better pre-tightening. The anti-backflow effect is achieved. Therefore, by designing the inlet valve 262 and the outlet valve piece 233 to cooperate with the micro-convex structures 223 and 224 disposed on the valve body cover 22, the fluid 12 1379040 can be prevented from flowing back during the conveying process. Situation, to achieve efficient transmission. Please refer to the fourth figure, which is a schematic cross-sectional view of the fluid transport device in the second preferred embodiment of the present invention. In some embodiments, the implementation of the inlet channel 221 and the outlet channel 211 can be side. The form of entering the side, but not limited to this, can be changed according to the actual design needs. Please refer to FIG. 5A, which is a schematic cross-sectional view of the fluid transport device in the third embodiment of the present invention. The fluid transport device 30 is mainly composed of a valve body seat 21 and a valve body cover. The body 22, the actuating device 24, the cover 25, the inlet sealing member 26 and the outlet sealing member 31 are composed of a valve body seat 21, a valve body cover 22, an actuating device 24, a cover body 25, and an inlet sealing member 26. The structure, the location of the arrangement, and the objects and functions that can be achieved are detailed in the first preferred embodiment and therefore will not be described again. In the present embodiment, the valve body film 23 and the seal ring 27 described in the first preferred embodiment are mainly replaced by the outlet sealing member 31, and the operation principle and structure thereof are the same as those of the inlet sealing member 26, please refer to the fifth. The sealing member 31 has a sealing body 311 and an outlet valve 312. The sealing body 311 is disposed in the recess 213 of the valve body seat 21, and is mainly used for the valve body seat 21 and the valve body cover 22. The sealing valve 312 is tightly fitted to prevent leakage of fluid, and the outlet valve 312 is connected to the sealing body 311 and disposed in the inner ring of the sealing body 311, which may be, but is not limited to, formed in an integrally formed manner. The 312 is disposed in the outlet temporary cavity 212 and is in contact with the micro-convex structure 224 of the valve body cover 21 . The horizontal contact surface 2241 of the micro-convex structure 224 abuts the outlet valve 312 of the outlet sealing member 31, so that the outlet valve 312 disposed on the valve body cover 23 13 1379040 forms an upward bulge due to the micro-convex structure 224. The micro-convex structure 224 pushes the outlet valve 312 to generate a pre-stress, and the horizontal valve 2241 of the micro-convex structure 224 allows the outlet valve 312 to actuate the outlet valve 312 and the valve body cover 22 when not actuated. There is a gap between them. When the actuator 242 is driven by a voltage, the actuating device 24 produces a bending deformation. As shown in FIG. 5B, the actuating device 24 is bent downwardly in the direction indicated by the arrow c, so that the pressure chamber 226 The volume is increased, thereby generating a suction force, such that the outlet valve 312 of the outlet sealing member 31 and the inlet valve 262 of the inlet sealing member 26 are subjected to a downward pulling force, and the inlet valve 262 having a pre-force is quickly opened to make the liquid A large number of inlet passages 221 from the valve body cover 22 are drawn in and flow into the pressure chamber 226. At this time, the outlet sealing member 31 is caused by the downward pulling force so that the outlet valve 312 seals the outlet valve passage 222, and the surface of the micro-convex structure 224 contacting the outlet valve 312 is a horizontal contact surface 2241 type, once φ When the inlet valve 262 is opened to allow fluid to flow into the interior of the valve body cover 22, the outlet valve 312 can still form a closed face contact with the micro-convex structure 224, which can produce a greater and better pre-covering against backflow. When the actuating device 24 is bent upwardly as the arrow d shown in FIG. 5C changes due to the change of the electric field direction, the volume of the pressure chamber 226 is compressed, so that the pressure chamber 226 generates a thrust to the internal fluid, and The outlet valve 312 and the inlet valve 262 are subjected to an upward thrust. At this time, the outlet valve 312 disposed on the micro-convex structure 224 can be quickly opened, and the liquid is instantaneously released, and the pressure chamber 226 is covered by the valve body. The outlet valve passage 14 1379040 222 on the body 22, the outlet temporary chamber 212 and the outlet passage 211 on the valve body seat 21 flow out of the * fluid delivery device 30, thereby completing the fluid transfer process, and likewise, at this time due to the inlet The valve 2 6 2 is subjected to the upward thrust, so that the inlet valve 262 seals the inlet passage 221, and the surface of the micro-convex structure 223 in contact with the inlet valve 262 is in the form of a horizontal contact surface 2231, once the outlet valve 312 is opened. When the fluid is released, the inlet valve 262 can still form a closed surface contact with the micro-convex structure 223, which can produce a larger and better pre-covering against backflow, so Valve 262 and outlet valve 312 with raised structures 223 is provided at 22 on the valve cap 224 and designed to allow the fluid in the case of transfer process does not produce reflux, to achieve high transmission efficiency. In summary, the fluid delivery device of the present invention removes the conventional inlet temporary storage chamber by the inlet sealing member, directly connects the inlet passage to the pressure chamber, and can reduce the overall volume, and the valve can be replaced by the inlet sealing member. The body cover is tightly coupled with the actuating device, and the opening or closing of the inlet valve can be utilized to control the entry of the φ fluid and prevent backflow. In addition, the outlet sealing member can be used to replace the valve body film, and the valve body cover body can be tightly combined with the valve body seat, and the opening or closing of the outlet valve can be used to control the discharge of the fluid and prevent backflow. Yes, the fluid delivery device in this case is of great industrial value and is submitted in accordance with the law. This case has been modified by people who are familiar with the technology, and is not intended to be protected by the scope of the patent application. 15 1379040 [Simple description of the diagram] Figure A: This is a schematic cross-sectional view of a conventional micro-pumped structure. First Figure B: It is a schematic diagram of the pressure chamber expansion state of the first Figure A. First Figure C: This is a schematic circle of the pressure chamber compression state of the first Figure A. Figure 2A is a schematic view showing the structure of the fluid transporting device of the first preferred embodiment of the present invention. Second figure B: It is a schematic view of the back structure of the valve body seat shown in the second figure A. Fig. 2C is a schematic view showing the structure of the back surface of the valve body cover shown in Fig. A. Second figure D: It is a schematic diagram of the assembled structure of the second figure A. Third figure A: It is a schematic diagram of the A-A cross-sectional structure of the second figure D. Figure 3B is a schematic view showing the state of expansion of the pressure chamber of Figure 3A. Third Figure C: is a schematic view of the pressure chamber compression state of Figure 3A. Figure 4 is a schematic cross-sectional view showing the fluid transport device of the second preferred embodiment of the present invention in an unactuated state. Fig. 5A is a schematic cross-sectional view showing the fluid transporting device of the third preferred embodiment of the present invention in an unactuated state. Figure 5B is a schematic view showing the state of expansion of the pressure chamber of Figure 5A. Figure 5C is a schematic view showing the compression state of the pressure chamber of Figure 5A. 16 1379040 [Key component symbol description] Micro-pump structure: 10 valve body seat: 11, 21 inlet channel: 111, 221 outlet channel: 112, 211 sealing ring: 113, 125, 27, 28 outlet temporary storage cavity: 114, 212 Body cover: 12, 22 Inlet valve passage: 121 Outlet valve passage: 122, 222 Pressure chamber: 123, 226 Inlet temporary chamber: 124 Body film: 13, 23 Inlet valve structure: 131 Outlet wide door structure :132 Microactuator: 14 Cover: 15, 25 Fluid delivery: 20, 30 Upper surface: 220 Lower surface: 228 Micro convex structure: 223, 224 Horizontal contact surface: 2231, 2241 Extension: 231 Hole: 232 Inlet valve: 262 Outlet valve: 233 Actuator: 24 Vibrating membrane: 241 Actuator: 242 Groove: 213, 225, 227 Inlet sealing member · ' 26 Sealing body: 261, 311 Outlet sealing member: 31 Outlet valve :312 17