1353891 九、發明說明： . 【發明所屬之技術領域】 本案係關於-種流體輸送裝置，尤指—種具有複數個 雙腔體致動結構之流體輸送裝置。 【先前技術】 目前於各領域中無論是醫藥、電腦科技、列印、能源 Φ等工業，產品均朝精緻化及微小化方向發展，其中微果 浦:噴霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸，為發展之重要内容。 %參閱第—圖’其係為習知微系浦結構之結構示意 . 圖，習知微泵浦結構1〇係由閥體座11、閥體蓋體12、閥 體薄膜13、微致動器14及蓋體15所組成，其中，閥體薄 Φ 膜13係包含入口閥門結構131及出口閥門結構132，閥體 座11包含入口通道lu及出口通道112、閥體蓋體12與 微致動器14間定義形成一壓力腔室123 ,閥體薄膜13設 置在閥體座11與閥體蓋體12之間。 當一電壓作用在微致動器14的上下兩極時，會產生 一電場，使得微致動器14在此電場之作用下產生彎曲， ' 當微致動器14朝箭號X所指之方向向上彎曲變形，將使 . 得塵力腔室I23之體積增加，因而產生一吸力，使閥體薄 . 膜13之入口閥門結構131開啟’使液體可自閥體座u上 1353891 - 之入口通道111被吸取進來，並流經閥體薄膜13之入口閥 : 門結構131及閥體蓋體12上之入口闊片通道121而流入 * 壓力腔室123内，反之當微致動器14因電場方向改變而 朝箭號X之反方向向下彎曲變形時，則會壓縮壓力腔室123 之體積，使得壓力腔室123對内部之流體產生一推力，並 使閥體薄膜13之入口閥門結構131、出口閥門結構132承 受一向下推力，而出口閥門結構132將開啟，並使液體由 壓力腔室123經由閥體蓋體12上之出口閥門通道122、閥 • 體薄膜13之出口閥門結構132，而從閥體座11之出口通 道112流出微泵浦結構10外，因而完成流體之傳輸過程。 雖然習知微泵浦結構10能夠達到輸送流體的功能， 但是其係使用單一致動器配合單一壓力腔室、單一流通管 道、單一進出口以及單一對的閥門結構設計，若要使用微 ' 泵浦結構10來提升流量，必須利用銜接機構將多個微幫 浦結構10進行連接並堆疊設置，然而此種連接方式除了 I 需額外耗費銜接機構之成本外，多個微泵浦結構10所組 合起來的體積將過大，使得最終產品之體積增加而無法符 合微小化之趨勢。 因此，如何發展一種可改善上述習知技術缺失並達到 增加流量且縮小體積之具有複數個雙腔體致動結構之流 體輸送裝置，實為目前迫切需要解決之問題。 % 【發明内容】 本案之主要目的在於提供一種具有複數個雙腔體致 1353891 • 動結構之流體輸送裝置，俾解決以習知微泵浦結構來提升 流量時，必須利用銜接機構將多個微幫浦結構進行連接並 ' 堆疊設置，將額外耗費銜接機構之成本，且多個微泵浦結 構所組合起來的體積過大，無法符合產品微小化之趨勢等 缺點。 為達上述目的，本案之一較廣義實施樣態為提供一種 具有複數個雙腔體致動結構之流體輸送裝置，用以傳送一 流體，其係包含：匯流裝置，其係具有：兩側面，其係相 * 互對應；複數個第一流道及複數個第二流道，其係貫穿該 兩侧面；入口通道，其係設置於兩側面之間，並與複數個 第一流道相連通；出口通道，其係設置於兩侧面之間，並 與複數個第二流道相連通；複數個雙腔體致動結構，彼此 之間係並排設置於匯流裝置上；其中，每一雙腔體致動結 構係具有第一腔體及第二腔體，其係對稱設置於匯流裝置 之兩侧面上，第一腔體及第二腔體係各自包括：閥體蓋體， Φ 其係設置於匯流裝置上；閥體薄膜，其係設置於匯流裝置 與閥體蓋體之間；以及致動裝置，其週邊係設置於該閥體 蓋體上。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 ' 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 : 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 1353891 • 圖示在本質上係當作說明之用，而非用以限制本案。 ' 本案主要係藉由匯流裝置及利用對稱堆疊的方式，將 ' 複數個雙腔體致動結構與匯流裝置組成本案之流體輸送 裝置，能夠提昇流量及揚程，且流體輸送裝置的體積不會 過大，非常適合用於流量及揚程需求相對較高之應用場 合。 請參閱第二圖，其係本案較佳實施例之具有複數個雙 腔體致動結構之流體輸送裝置之分解結構示意圖，如圖所 • 示，本實施例之流體輸送裝置2係由匯流裝置21以及複 數個雙腔體致動結構所構成，於本案實施例中，將以流體 輸送裝置2包含2個雙腔體致動結構的實施態樣提出說 明，即第一雙腔體致動結構22及第二雙腔體致動結構23, 且第一雙腔體致動結構22與第二雙腔體致動結構23的結 構係實質上相同，但是本案之流體輸送裝置2可包含之雙 腔體致動結構並侷限於2個，可依實際需求增加設置。 _ 本案之流體輸送裝置2所包含之每一雙腔體致動結構 於匯流裝置21的上下側面各包含一腔室，且每一雙腔體 致動結構彼此之間係並排設置於匯流裝置21上，請再參 閱第二圖並配合第三圖A，其中第三圖A係為第二圖之組 裝完成後之結構示意圖，本案之第一雙腔體致動結構22 於匯流裝置21的第一側面211上係具有第一.腔體22a，而 、 第二侧面212上具有第二腔體22b，第一腔體22a具有閥 • 體蓋體221a、閥體薄膜222a、致動裝置223a及蓋體224a， 而第二腔體22b同樣具有閥體蓋體221b、閥體薄膜222b、 1353891 • 致動裝置223b及蓋體224b等結構，且第一腔體22a、第 . 二腔體22b係以匯流裝置21為中心鏡像對稱設置。 ' 另外，本案之第二雙腔體致動結構23於匯流裝置21 的第一側面211上同樣具有第一腔體23a，而第二側面212 上同樣具有第二腔體23b，第一腔體23a具有閥體蓋體 231a、閥體薄膜232a、致動裝置233a及蓋體234a，而第 二腔體23b同樣具有閥體蓋體231b、閥體薄膜232b、致 動裝置233b及蓋體234b，且第一腔體23a、第二腔體23b • 係以匯流裝置21為中心鏡像對稱設置。 至於，本實施例之第一雙腔體致動結構22係與第二 雙腔體致動結構23並排設置於匯流裝置21上，即第一雙 腔體致動結構22之第一腔體22a與第二雙腔體致動結構 23之第一腔體23a並排設置於匯流裝置21之第一侧面211 上，而第一雙腔體致動結構22之第二腔體22b與第二雙 腔體致動結構23之第二腔體23b並排設置於匯流裝置21 _ 之第二侧面212上。 請參閱第二圖、第三圖A並配合第三圖B、第三圖C 及第三圖D，其中第三圖B係為本案第三圖A之流體輸送 裝置之匯流裝置的A-A或是a-a剖面圖，第三圖C係為本 案第三圖A之流體輸送裝置之匯流裝置的C-C剖面圖，第 三圖D係為本案第三圖A之流體輸送裝置之匯流裝置的 、_ B-B剖面圖，如第二圖所示，匯流裝置21大致成一長條狀 , 矩形結構，具有相互對應之第一側面211及第二側面212’ 且匯流裝置21設置有複數個第一流道、複數個第二流道、 1353891 .甬道215以及出口通道216，如第三圖B至第三圖D 入複數個第-流道可為實質上垂直貫穿第一側面211 212之複數個入口分流道213 ’而複數個第二 實質上蜜直貫穿第一側面2U *第二側面212 心j個出口匯流道214，換言之，入口分流道213位於 之複η面如及第二侧面212上的開口係為同軸，而出口 第少亦然，且入口分流道213及出口匯流道214彼 匯"二如第三圖Β Μ示），因此第一側面211及第二侧面 此^過入口分流道213及出口匯流道214彼此相通。 21 閱第三圖C及第三圖D，入口通道215及出: /^6則為配置在第一侧面211及第二侧面212間的管 通ι 口通道215係用减外部之流體輸送至流體輸送裝 線而出口通道216則是將流體由流體輸送裝置2之 置2成#外部，且入口通道215與複數個人口分流道213 内：：（如第三圖D所示)，而出口通道216則與複數個 相’气道214連通（如第三圖C所示），換言之’當流 裝口組裝完成時，複數個入口分流道213可透過 入口J通道215與外不連通，而複數個出口匯流道214則可 透過出口通道216與外界速通° 請參閱第三圖B及C，匯流裝置21之複數個出口匯 流道214接近第一側面211的一端係向外擴充延伸，俾與 設置於第一侧面211上的闕體薄膜222a及232a共同定義 出一第二暫存室，即為圖中所示之出口暫存腔2141a，當 然，出口匯流道214接近笫二侧面212處同樣也與閥體薄 11 1353891 • 膜222b及232b設置出口暫存腔2141b，是以由第一腔體 - 22a、23a及第二腔體22b、23b匯入之流體可於出口暫存 ’ 腔2141a、2141b稍作緩衝’再平順地匯集於出口匯流道 214並沿出口通道216而輸出至流體輸送裝置2外。 而匯流裝置21之第一侧面211及第二側面212上更 分別設有複數個凹槽結構’其中凹槽217a、218a ' 217b、 218b係以入口分流遒213為中心環繞設置於出口分流道 213外圍，而凹槽219a、219b則以出口匯流道214為中心 鲁 環繞設置於出口匯流道214外圍’以利用凹槽217a-219a、 217b-219b對應容收複數個密封環26(如第六圖A所示）。 於本實施例中，匯流裝置21可採用熱塑性塑膠材料 製成；至於密封環26則可為耐化性佳的軟性材質所構成 之圓環結構，例如：对曱醇或耐醋酸之橡膠環，但皆不以 此為限。 請再參閱第二圖，第一、第二雙腔體致動結構22、23 φ 之第一腔體22a、23a的閥體薄膜222a及232a、閥體蓋體 221a及231a、致動裝置223a、233a以及蓋體224a、234a 係堆疊設置於匯流裝置21之第一侧面211上，其中閥體 薄膜222a、232a位於匯流裝置21之第一侧面211及閥體 蓋體221a、231a之間，並對應於匯流裝置21及閥體蓋體 221a、231a設置，而閥體蓋體221a、231a上相對應之位 ： 置則設置有致動裝置223a、233a，其主要包括振動薄膜 - 2231a、2331a、以及致動器2232a、2332a，且致動裝置 223a、233a可受電壓驅動而振動’以驅動流體輸送裝置2 12 1353891 之作動，至於蓋體224a、234a則設置於致動裝置223a、 233a上相對於閥體蓋體221a、231a設置之一側，用以密 封整個第一腔體22a、23a，而當閥體薄膜222a、232a、閥 體蓋體221a、231a、致動裝置223a、233a及蓋體224a、 234a依序堆疊並利用鎖固元件（未圖示）等設置於匯流裝置 21之第一側面211後，便可構成第一雙腔體致動結構22 之第一腔體22a，第二雙腔體致動結構23之第一腔體23a。 而由於第一雙腔體致動結構22之第二腔體22b與第一腔 體22a係以匯流裝置21為中心地鏡像對稱設置在匯流裝置 21之第二側面212上，以及第二雙腔體致動結構23之第 二腔體23b與第一腔體23a係以匯流裝置21為中心地鏡像 對稱設置在匯流裝置21之第二側面212上（如第二圖及第 六圖A所示），因此以下主要以第一雙腔體致動結構22之 第一腔體22a為例，說明本案流體輸送裝置2之細部結構。 請參閱第四圖A、B、C並配合第二圖及第三圖A’其 中第四圖A係為本案第三圖A之流體輸送裝置之第一雙腔 體致動結構之第一腔體之閥體蓋體的A-A剖面圖，第四圖 B係為本案第三圖A所示之第一、第二雙腔體致動結構之 第一腔體之閥體蓋體的C-C剖面圖，第四圖C係為本案第 三圖A所示之第一、第二雙腔體致動結構之第一腔體之閥 體蓋體的B-B剖面圖，如第二圖所示，第一雙腔體致動結 構22之第一腔體22a的閥體蓋體221a係設置於匯流裝置 21的第一側面211上，其具有一上表面2211a及一下表面 2212a，其係以下表面2212a面對匯流裝置21之第一側面 13 1353891 ' 211，並將閥體薄膜221a夾設於下表面2212a與匯流裝置 ·· 21的第一側面211之間，而閥體蓋體^la包括貫穿上表 .面2211a及下表面2212a之第一閥門通道及第二閥門通 道，於本實施例中，第一閥門通道訏為入口閥門通道 2213a，第二閥門通道則巧·為出口闊門通道2214a (如第二 圖及第四圖B所示），其中入口閥門通道2213a係對應於 匯流裝置21之入口分流道213,出口闕門通道2214a則對 應於出口暫存區2141a(如第二圖及第六圖A所示）。此外， • 閥體蓋體221a之入口閥門通道2213a接近下表面2212a 處係向外擴充延伸，俾與闕體薄膜222a共同定義出一第一 暫存室，而本實施例之第一暫存室係由閥體蓋體221a之下 表面2212a於與入口閥門通道2213a相對應之位置產生部 份凹陷而形成之入口暫存腔2215a’且其係連通於入口閥 門通道2213a(如第六圖A及第四圖C所示）〇 讀再參閱第二圖及第六圖A’閥體蓋體221&之上表面 2211a有部份凹陷，俾與對應設置之致動裴置223a共同定 義出〆壓力腔室22i6a，且壓力腔室22l6a係經由二口閥 門通道2213a與入口暫存腔2215a連通(如第四圖c所 示），同時壓力腔室2216a亦與出口閥門通道221如相連通 (如第四圖B所示）。此外’閥體蓋體22la上具有複數個 凹槽姨構，其中閥體蓋體2化之下表面22l2a具有以入口 -閥严1通道2灿為中心環繞設置之凹槽勿仏，以及以出 • 口闕門通道2214a為中心環㈣置22122a、 • 22W，而上表面22山則設有環繞壓力室2施之凹槽 1353891 22111a’俾利用凹槽22121a-22123a、22111a容收密封環 27(如第六圖A所示）。至於閥體蓋體221a之材質可為熱塑 性塑膠材料，且其可選用之材料種類與匯流裝置21相同， 而密封環27之材質則可與密封環26相同，是以不再贅述。 請參閱第五圖並配合第二圖及第六圖A，其中第五圖 係為第二圖所示之第一雙腔體致動結構之第一腔體之閥 體薄膜之結構示意圖，如圖所示，閥體薄膜222a主要係以 傳統加工、或黃光蝕刻、或雷射加工、或電鑄加工、或放 電加工等方式製出，且為一厚度實質上相同之薄片結構， 具有複數個閥門結構，其係為鏤空的閥開關，於本實施例 中’閥體薄膜222a設有第一、第二鏤空閥門結構，其分別 為入口閥門結構2221a及出口閥門結構2222a，其中入口 閥門結構2221a對應於匯流裝置21之入口分流道213、閥 體蓋體221a之入口閥門通道2213a及入口暫存腔2215a， 而出口閥門結構2222a對應於匯流裝置21之出口匯流道 214、出口暫存腔2141a及閥體蓋體221a之出口閥門通道 2214a(如第六圖a所示）。 睛再參閱第五圖，入口閥門結構2221 a具有入口閥片 222lla及複數個環繞入口閥片22211a週邊設置的鏤空孔 洞22212a ’此外，在孔洞22212a之間更具有與入口閥片 2221 la相連接之延伸部22213a。而出口閥門結構2222a 之出口閥片22221a、孔洞22222a及延伸部22223a的配置 皆與入口閥門結構2221a相同，於此不再贅述。於本實施 例中’閥體薄膜222a實質上為厚度均一之可撓薄膜，且其 15 1353891 - 材質可選自任何耐化性佳的有機高分子材料或金屬材 料，例如：聚亞醯胺（Polyimide，PI)、鋁、鎳、不鏽鋼、銅、 * 鋁合金、鎳合金或銅合金等材質，然選用之材質並無所設 限。 由於閥體薄膜222a係為可撓薄片，因此當閥體薄膜 222a設置於匯流裝置21之第一側面211及閥體蓋體221a 之間時，若其承受壓力腔室2216a體積增加而產生之吸力 作用，入口閥門結構2221a及出口閥門結構2222a理應皆 ® 順勢向壓力腔室2216a之方向產生位移，然而由於閥體蓋 體221a其下表面2212a鄰近入口閥門通道2213a及出口閥 門通道2214a處之結構有所差異（如第四圖A及第六圖A 所示），因此當閥體薄膜222a受到壓力腔室2216a之負壓 吸引時，實質上僅入口閥門結構2221a可朝閥體蓋體221a 之方向產生位移（如第六圖B及第七圖B所示），出口閥門 結構2222a則貼附於閥體蓋體221a的下表面2212a而無法 _ 開啟（如第六圖B及第八圖B所示），此時流體僅能從閥體 薄膜222a靠近匯流裝置21之一側經由入口閥門結構 2221a之孔洞22212a流往靠近閥體蓋體22的一侧（如第六 圖B及第七圖B箭頭所示），並流入閥體蓋體221a之入口 暫存腔2215a及入口閥門通道2213a而傳送至壓力腔室 2216a内，且利用出口閥門結構2222a之關閉防止流體逆 : 流。 . 同樣地，由於匯流裝置21之第一侧面211鄰近入口 分流道213及出口匯流道214處之結構不同（如第二圖及第 16 1353891 ’ 三圖B所示）’因此當閥體薄膜222a受到壓力腔室2216a • 之正壓推擠而承受自壓力腔室2216a傳遞而來的向下應力 • 時’實質上僅出口閥門結構2222a可朝匯流裝置21之方向 產生位移，入口閥門結構2221a則向下貼附於匯流裝置21 之第一側面211上而密封住匯流裝置21的入口分流道 213，即入口閥門結構2221a並無法開啟（如第六圖c及第 七圖C所示）’是以流體僅能由壓力腔室2216a經出口閥門 結構2222a之孔洞22222a流入匯流裝置21之出口暫存腔 肇 2141a(如第六圖C及第八圖C所示），如此一來，入口閥門 結構2221a便可因應壓力腔室2216a產生之負、正壓力差 而迅速的開啟或關閉’而出口閥門結構2222a則可對應於 入口閥門結構2221a關閉或開啟，以控制流體之進出並避 免流體逆流。 請再參閱第二圖，第一雙腔體致動結構22之第一腔 體22a之致動裝置223a包括振動薄膜223ia以及致動器 φ 2232a，致動裝置223a主要係利用振動薄膜22：31a之週邊 固設於閥體蓋體221a上，俾與閥體蓋體221a共同定義出 壓力腔室2216a(如第六圖A所示）。致動裝置223a之振動 薄膜2231a之材質可為單層金屬結構，例如：不銹鋼金屬 或銅金屬’但不以此為限；當然，於一些實施例中，振動 薄膜2231a可於金屬材料上貼附一層耐生化高分子薄板材 ： 料，以構成一雙層結構。至於致動器2232a則可貼附於振 • 動薄膜223la上，致動器2232a係為一壓電板，可採用高 壓電係數之鍅鈦酸鉛(PZT)系列的壓電粉末製成。而蓋體 17 1353891 224a則對應设置於致動裝置223a上，俾利用蓋體224a及 匯流裝置21之第一側面211共同將閥體薄膜222a、閥體 . 蓋體221a和致動裝置224a等結構夾設於其間，以組成本 案流體輸送裝置2之第一雙腔體致動結構22之第一腔體 22a(如第三圖A所示）。 請參閱第六圖A並配合第二圖及第三圖a，其中第六 圖A係為第三圖A之流體輸送裝置之A-A剖面於未作動 狀態之示意圖，至於，如第三圖A所示之流體輸送裝置之 籲 a-a剖面的結構及作動方式係與A-A相同，因此以下將僅 以A-A剖面之結構提出說明。如圖所示，當第一雙腔體致 動結構22之第一腔體22a組裝設置於匯流裝置21之第一 侧面211後，匯流裝置21之入口分流道213係對應於閥 體薄膜222a之入口閥門結構2221a、闊體蓋體221a之入 口暫存腔2215a和入口閥門通道2213a’匯流裝置21之出 口匯流道214則對應於出口暫存腔2141a、閥體薄膜222a φ 上之出口閥門結構2222a以及閥體蓋體221a上之出口閥門 通道2214a。 此外，匯流裝置21之第一侧面211上環繞入口分流 道213之凹槽217a(如第三圖B所示）内的密封環26厚度 係大於凹槽217a的深度，是以密鉗環26將部分凸出於凹 槽217a，並構成一微凸結構，使得閥體薄膜222a之入口 ： 閥門結構2221a的入口閥片22211a形成一向上隆起，如此 . 微凸結構將抵觸閥體薄膜222a而對入口閥門結構2221a 頂推以產生一預力（Preforce)作用，有助於流體釋出時產生 18 1353891 更大之預蓋緊效果以防止逆流，並使入σ間片222〇a與匯 ； 流裝置21之第一侧面211之間產生一間隙，以於流體進 入時利於入口閥門結構2221a順勢開啟。同樣地，設置於 間體盍體221a之下表面2212a並環繞出口閥門通道2214a 外圍之凹槽22122a與密封環27亦形成一微凸結構，使閥 體薄膜222a之出口閥門結構2222a向下凸出而相對於閥體 蓋體221a形成一向下隆起’並使出口閥片22221a與閥體 _ 蓋體222a之下表面2212a間產生一間隙，而出口闕門結構 2222a、入口閥門結構2221a之微凸結構僅方向反向設置， 但其功能相仿，因此不再贅述。上述之微凸結構除了使用 凹槽217a、22122a及密封環26、27搭配形成外，於一些 • 實施例中亦可採用半導體製程，例如：黃光蝕刻、鍍膜或 電鑄技術，直接在匯流裝置21及閥體蓋體221a上形成該 些微凸結構，或者直接在匯流裳置21及閥體蓋體222a上 採與基材一體射出成型形成，其中該基材係可採用熱塑性 鲁 塑膠材料。至於閥體薄膜222a之其餘部分則服貼於閥體蓋 體222a及匯流裝置21之間，並透過設置於凹槽218a、219a 及22121a、22123a、22111a内之密封環26、27使各結構 之間緊密貼合，俾防止流體外溢。 請再參閱第六圖A’第一雙腔體致動結構22之第二腔 體22b之閥體薄膜222b、閥體蓋體221b、致動裝置223b : 以及蓋體224b係設置於匯流裝置21之第二側面212上， ； 並以匯流裝置21為中心而與第一腔體22a之該些結構鏡像 對稱，由於第二腔體22b之各結構、功能皆與第一腔體22a 19 1353891 相同，至於第二雙腔體致動結構23之第一腔體23a及第二 腔體23b的各結構、功能皆與第一雙腔體致動結構22之 第一腔體22a及第二腔體23a相同，因此，為了簡化說明， 以下僅以第一雙腔體致動結構22之第一腔體22a為例詳述 流體之輸送過程，然而應當理解，本案流體輸送裝置2實 際運作時，第一雙腔體致動結構22之第二腔體22b與第 一腔體22a，以及第二雙腔體致動結構23之第二腔體23b 與第一腔體23a係以完全相同且同步之方式作動以進行流 體的輸送。 請參閱第六圖B，其係為第六圖A之壓力腔室膨脹狀 態示意圖。以第一腔體22a為例，當利用電壓驅動致動器 2232a時，致動裝置223a將會如圖所示，朝箭號a所指之 方向彎曲變形，使得壓力腔室2216a之體積增加而產生負 壓差，因而形成一股吸力，故閥體薄膜222a之入口閥門結 構2221a及出口閥門結構2222a將因負壓而承受向外之拉 力，此時由於入口閥門結構2221a所對應的是入口暫存腔 2215a的空間，因此其入口閥片22211a便可藉凹槽217a 及密封環26所構成之微凸結構提供的預力順勢迅速開啟 (如第六圖B及第七圖B所示），使流體大量地由匯流裝置 21之入口通道215被吸取進來，流入匯流裝置21並於入 口分流道213分流而使部分流體流往第一腔體22a，並經 由閥體薄膜222a上之入口閥門結構2221a的鏤空孔洞 22212a進入閥體蓋體221a上之入口暫存區2215a、入口閥 門通道2213a，進而傳送至壓力腔室2216a内，此時，由 1353891 •於閥體薄膜島之出口閥門結構2222a同時承受與入口閥 .門結構22213相同方向的拉力，且因閥體蓋體221a之下表 面22以對應出口閥門結構2如處之結構與對應入口間 ^結構2221a之結構不同，又凹槽22122a及密封環27可 提供一預蓋緊效果’故位於閥體薄膜222&上之出口閥門結 構2222a將因該拉力使得出口閥片22221a密封住出口閥門 通道2214a’因此流體不會逆流（如第六圖B及第八圖B所 示）。 籲 而當施加於致動器2232a的電場方向改變而如第六圖 C所示之朝箭號b之方向彎曲變形時，致動器2232a將使 致動裝置223a朝匯流裝置21方向變形，進而壓縮壓力腔 室2216a之體積，使壓力腔室2216a之體積減小而與外界 產生正壓力差，進而對壓力腔室2216a内部之流體產生一 推力’使流體瞬間大量宣洩而由出口閥門通道2214a流出 壓力腔室2216a外，於此同時，由於閥體薄膜222a之入口 φ 閥門結構2221a及出口閥門結構2222a亦承受壓力腔室 2216a之正壓產生的朝匯流裝置21方向之推力，因此設置 於密封環27上的出口閥門結構2222a之出口閥片22221a 便可藉一預力順勢迅速開啟，使流體可由壓力腔室2216a 經由閥體蓋體221a之出口閥門通道2214a、閥體薄膜222a 之出口閥門結構2222a的孔洞22222a進入匯流裝置21上 ； 之出口暫存區2141a及出口匯流道如第六圖c及第八 - 圖C所示），最後再由出口通道216流出流體輸送裝置2 之外，因而完成流體之傳輸過程。 21 1353891 另一方面，當入口閥門結構2221a承受該朝匯流裝置 21方向之推力時，由於匯流裝置21之第一側面211a靠近 入口分流道213處之結構與靠近出口匯流道214處不同， 且密封環26可提供預蓋緊效果，使得入口閥片22211a令 入口閥門結構2221a受壓成關閉狀態，進而密封住入口分 流道213 (如第六圖C及第七圖C所示），故流體無法通過 入口閥門結構2221a，因此便不會產生倒流的現象。 至於暫時儲存於入口暫存腔2215a内的流體，其將於 致動器2232a再受電壓致動且重複使致動裝置223a上凸變 形而增加壓力腔室2216a之體積時，再由入口暫存腔2215a 經入口閥門通道2213a而流入壓力腔室2216a内，並於致 動裝置223壓縮變形時自壓力腔室2216a排出，由此可知， 藉由改變電場方向，便可驅動致動裝置223a往復運動而使 流體輸送裝置2汲取、釋出流體，以達到流體的輸送之目 的。 請再參閱第七圖A〜C以及第八圖A〜C，其中第七圖 A係為第三圖A之流體輸送裝置之B-B剖面圖，第八圖A 係為第三圖A之流體輸送裝置之C-C剖面圖，如第七圖A 所示，入口通道215係為配置在匯流裝置21之第一侧面 211及第二側面212間的管線，主要用來使外部之流體輸 送至流體輸送裝置2内，並與複數個入口分流道213相連 通，用以經由入口分流道213將流體分送至第一雙腔體致 動結構22之第一腔體22a及第二腔體22b，以及，第二雙 腔體致動結構23之第一腔體23a及第二腔體23b，以進行 22 1353891 流體之傳送程序。如第八圖A所示，出口通道216係為為 配置在匯流裝置21之第一侧面211及第二側面212間的 管線，主要用來將流體輸送至流體輸送裝置2外部，並與 複數個出口匯流道214相連通，用以經由出口匯流道214 及出口通道216將由第一雙腔體致動結構22之第一腔體 22a及第二腔體22b，以及，第二雙腔體致動結構23之第 一腔體23a及第二腔體23b所輸出之流體匯流並排至外部。 請參閱第七圖B及第八圖B，如第七圖B所示，流體 流入入口通道215時，部分流體會先於第一雙腔體致動結 構22所對應之入口内流道213進入兩側之第一腔體22a 及第二腔體22b，其餘再往内流至第一雙腔體致動結構23 所對應之入口内流道213並進入兩側之第一腔體23a及第 二腔體23b後排出，若有橫向三組以上則依此類推。 當第一雙腔體致動結構22之第一腔體22a及第二腔體 22b，以及第二雙腔體致動結構23之第一腔體23a及第二 腔體23b所包含之致動器受相同振動頻率之電壓驅動時， 所有的致動裝置將外凸，將導致所有的入口閥門結構開啟 並汲取流體進入腔體（如第七圖B所示），此時出口閥門 結構更為緊閉，避免流體回流（如第八圖B所示），至於 詳細的作動關係已於上述第六圖B中提出說明，於此不再 贊述。 反之，請再參閱第七圖C及第八圖C，當第一雙腔體 致動結構22之第一腔體22a及第二腔體22b，以及第二雙 腔體致動結構23之第一腔體23a及第二腔體23b所包含之 23 1353891 致動器受相同振動頻率之電壓驅動時，所有的致動裝置將 . 内凹而壓縮壓力腔室且產生正壓時，將導致所有的出口閥 ' 門結構開啟並排出流體（如第八圖c所示），此時所有入 口閥門結構更為緊閉（如第七圖c所示），避免流體回流， 至於詳細的作動關係已於上述第六圖C中提出說明，於此 不再贅述。 綜上所述，本案之具有複數個雙腔體致動結構之流體 輸送裝置主要係利用匯流裝置將複數個流體輸送腔體整 • 合為一，亦即將兩組閥體薄膜、閥體蓋體、致動裝置分別 堆疊設置於匯流裝置的第一、第二側面，以形成具有兩個 鏡像對稱的流體輸送腔體之雙腔體致動結構，並再利用將 複數個雙腔體致動結構並排設置於匯流裝置上的方式，以 達到在橫向進行複數個雙腔體致動結構的擴充整合，可將 流體輸送裝置之流體流量及揚呈提升為數倍，但體積確非 多個習知單腔體之流體輸送裝置之加總，是以可確實符合 _ 產品微小化之趨勢。 是以，本案之具有複數個雙腔體致動結構之流體輸送 裝置極具產業之價值，爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 24 【圖式簡單說明】 f _圖·其係為習知微栗浦結構之結構示—意圖。 搂圖*係本案較佳實施例之具有複數個雙腔體致動結 構^流體輸送裝置之分解結構示意圖。 圖A.其係為第二圖之組裝完成後之結構示意圖。 圖B其係為本案第三圖人之流體輸送裝置之匯流裳 置的A-A或是a_a剖面圖。 第二圖C:其係為本案第三圖A之流體輸送裝置之匯流裝 置的C-C剖面圖。 第二圖D:其係為本案第三圖A之流錄送裝置之匯流裝 置的B-B剖面圖。 第四圖A:其係為本案第三圖A之流體輸送裝置之第一雙 ，體致動結構之第—腔體之㈣蓋體的A-A剖面圖。 第四圖B:其係為本案第三圖A所示之第―、第二雙腔體致 動結構之第一腔體之閥體蓋體的 C-C剖面圖。 第四圖C.其為本案第三圖A所示之第一、第二雙腔體致 動結構之第一腔體之閥體蓋體的B-B剖面圖。 第五圖：其係為第二圖所示之第一雙腔體致動結構之第一 腔體之閥體薄膜之結構示意圖。 第六圖A :係為第三圖a之流體輸送裝置之A A剖面於 未作動狀態之示意圖。 第六圖B .其係為第六圖A之壓力腔室膨脹狀態示意圖。 第六圖C·其係為第六圖A之壓力腔室壓縮狀態示意圖。 第七圖A:其係為第三圖A之流體輸送裝置之B-B剖面圖。 25 1353891 第七圖B :其係為第七圖A之壓力腔室膨脹狀態示意圖。 第七圖C :其係為第七圖A之壓力腔室壓縮狀態示意圖。 第八圖A:其係為第三圖A之流體輸送裝置之C-C剖面圖。 第八圖B :其係為第八圖A之壓力腔室膨脹狀態示意圖。 第八圖C :其係為第八圖A之壓力腔室壓縮狀態示意圖。 【主要元件符號說明】 微泵浦結構：10 閥體座：11 入口通道：111、215 出口通道：112、216 入口閥片通道：121 出口閥片通道：122 闊體蓋體：12、221a、221b、231a、231b 壓力腔室：123、2216a、2316a 閥體薄膜：13、222a、222b、232a、232b 微致動器：14 流體輸送裝置：2 蓋體：15、224a、224b、234a、234b 第一雙腔體致動結構：22 第二雙腔體致動結構：23 第一腔體：22a、23a 第二腔體：22b、23b 匯流裝置：21 第一側面：211 第二側面212 : 入口分流道：213 出口匯流道：214 出口 暫存腔：2141a、2141b 上表面：2211a 下表面：2212a 入口閥門通道：2213a、2213b、2313a 出口閥門通道：2214a、2214b、2314a 26 13538911353891 IX. Invention Description: . TECHNICAL FIELD The present invention relates to a fluid transport device, and more particularly to a fluid transport device having a plurality of dual cavity actuating structures. [Prior Art] At present, in various fields, such as medicine, computer technology, printing, energy Φ and other industries, the products are developing in the direction of refinement and miniaturization. Among them, micro-powder: sprayer, inkjet head, industrial printing device The fluid transport structure contained in such products is its key technology. It is how to break through its technical bottleneck with innovative structure and is an important part of development. % Refer to the figure - Figure' for the structure of the conventional micro-system structure. The conventional micropump structure 1 is composed of a valve body seat 11, a valve body cover 12, a valve body film 13, a microactuator 14 and a cover body 15, wherein the valve body thin Φ film 13 is included The inlet valve structure 131 and the outlet valve structure 132, the valve body seat 11 includes an inlet passage lu and an outlet passage 112, the valve body cover 12 and the microactuator 14 define a pressure chamber 123, and the valve body film 13 is disposed on the valve Between the body seat 11 and the valve body cover 12. When a voltage is applied to the upper and lower poles of the microactuator 14, an electric field is generated, causing the microactuator 14 to bend under the action of the electric field, 'when the microactuator 14 is pointing in the direction indicated by the arrow X Bending upward deformation will make it. The volume of the dust chamber I23 is increased, thereby generating a suction force to make the valve body thin. The inlet valve structure 131 of the membrane 13 is opened to allow liquid to be drawn in from the inlet passage 111 of the valve body seat 1353891, and flows through the inlet valve of the valve body membrane 13: the door structure 131 and the valve body cover 12 The inlet wide channel 121 flows into the *pressure chamber 123, whereas when the microactuator 14 is bent downward in the opposite direction of the arrow X due to the change of the electric field direction, the volume of the pressure chamber 123 is compressed, so that The pressure chamber 123 generates a thrust to the internal fluid, and the inlet valve structure 131 of the valve body membrane 13 and the outlet valve structure 132 are subjected to a downward thrust, and the outlet valve structure 132 is opened and the liquid is passed from the pressure chamber 123. The outlet valve passage 122 on the valve body cover 12 and the outlet valve structure 132 of the valve body film 13 exit the micropump structure 10 from the outlet passage 112 of the valve body seat 11, thereby completing the fluid transfer process. Although the conventional micropump structure 10 is capable of transporting fluids, it uses a single actuator with a single pressure chamber, a single flow conduit, a single inlet and outlet, and a single pair of valve configurations for use with a micro-pump. In order to increase the flow rate, the micro-pump structure 10 must be connected and stacked by using the connection mechanism. However, in addition to the cost of the connection mechanism, the multiple micro-pump structure 10 is combined. The volume will be too large, so that the volume of the final product will increase and it will not meet the trend of miniaturization. Therefore, how to develop a fluid transporting device having a plurality of dual-cavity actuating structures which can improve the above-mentioned prior art and achieve increased flow and reduced volume is an urgent problem to be solved. [Invention] The main purpose of the present invention is to provide a fluid transport device having a plurality of double-cavity body 1353891 • dynamic structure, and to solve the problem of using a conventional micro-pump structure to increase the flow rate, it is necessary to use the connection mechanism to multi-micro The connection of the pump structure and the 'stacking setup will cost the additional connection mechanism, and the combined volume of the multiple micro-pumped structures is too large to meet the shortcomings of miniaturization of the product. In order to achieve the above object, a broader aspect of the present invention provides a fluid delivery device having a plurality of dual-cavity actuation structures for delivering a fluid comprising: a confluence device having two sides, The plurality of first flow passages and the plurality of second flow passages extend through the two sides; the inlet passage is disposed between the two sides and communicates with the plurality of first flow passages; a passageway disposed between the two sides and communicating with the plurality of second flow passages; the plurality of double-cavity actuating structures disposed side by side on the confluence device; wherein each of the two cavities The movable structure has a first cavity and a second cavity, which are symmetrically disposed on both sides of the confluence device, and the first cavity and the second cavity system each include: a valve body cover, Φ is disposed on the confluence device And a valve body film disposed between the busbar device and the valve body cover body; and an actuating device, the periphery of which is disposed on the valve body cover body. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the 'Description' of the following paragraph. It should be understood that the present invention can be implemented in different aspects: there are various changes, and the scope of the present invention is not deviated from the scope of the present invention, and the description thereof and 1353891 • the illustration is used for illustrative purposes, rather than for Limit the case. This case mainly consists of a manifold device and a symmetrical stacking method to form a plurality of dual-cavity actuation structures and confluence devices to form the fluid delivery device of the present invention, which can increase the flow rate and the lift, and the volume of the fluid delivery device is not too large. It is ideal for applications where flow and head requirements are relatively high. Please refer to the second drawing, which is a schematic exploded view of a fluid delivery device having a plurality of dual-cavity actuation structures according to a preferred embodiment of the present invention. As shown, the fluid delivery device 2 of the present embodiment is a confluence device. 21 and a plurality of dual cavity actuating structures, in the embodiment of the present invention, the embodiment of the fluid transport device 2 comprising two dual cavity actuating structures will be described, that is, the first dual cavity actuating structure 22 and the second dual cavity actuating structure 23, and the first dual cavity actuating structure 22 is substantially identical to the second dual cavity actuating structure 23, but the fluid delivery device 2 of the present invention may comprise a double The cavity actuation structure is limited to two, which can be increased according to actual needs. Each of the dual-cavity actuation structures included in the fluid delivery device 2 of the present invention includes a chamber on each of the upper and lower sides of the confluence device 21, and each of the dual-cavity actuation structures is disposed side by side to the confluence device 21 In addition, please refer to the second figure and cooperate with the third figure A, wherein the third figure A is the structural schematic diagram after the assembly of the second figure is completed, and the first double cavity actuating structure 22 of the present case is in the first embodiment of the confluence device 21. One side 211 has the first. The cavity 22a has a second cavity 22b. The first cavity 22a has a valve body cover 221a, a valve body film 222a, an actuating device 223a and a cover 224a, and the second cavity 22b also has a valve body cover 221b, a valve body film 222b, 1353891, an actuator 223b, a cover 224b, and the like, and the first cavity 22a, the first. The two cavities 22b are mirror-symmetrically disposed around the confluence device 21. In addition, the second dual cavity actuating structure 23 of the present case also has a first cavity 23a on the first side 211 of the manifold 21, and the second side 212 also has a second cavity 23b, the first cavity 23a has a valve body cover 231a, a valve body film 232a, an actuator 233a, and a cover 234a, and the second cavity 23b also has a valve body cover 231b, a valve body film 232b, an actuating device 233b, and a cover 234b. The first cavity 23a and the second cavity 23b are arranged symmetrically about the center of the current collecting device 21. As a result, the first dual cavity actuating structure 22 of the present embodiment is disposed side by side with the second dual cavity actuating structure 23 on the confluence device 21, that is, the first cavity 22a of the first dual cavity actuating structure 22. The first cavity 23a of the second dual cavity actuation structure 23 is disposed side by side on the first side 211 of the confluence device 21, and the second cavity 22b and the second dual cavity of the first dual cavity actuation structure 22 are disposed side by side. The second cavity 23b of the body actuating structure 23 is disposed side by side on the second side 212 of the confluence device 21_. Please refer to the second figure, the third figure A and the third figure B, the third figure C and the third figure D, wherein the third figure B is the AA of the confluence device of the fluid conveying device of the third drawing A of the present invention or Aa cross-sectional view, the third figure C is a CC cross-sectional view of the confluence device of the fluid transport device of the third figure A of the present case, and the third figure D is the confluence device of the fluid transport device of the third figure A of the present case, _ BB profile As shown in the second figure, the current collecting device 21 is substantially in the form of a strip, a rectangular structure having a first side surface 211 and a second side surface 212' corresponding to each other, and the confluent device 21 is provided with a plurality of first flow paths and a plurality of Second runner, 1353891. The ramp 215 and the exit passage 216, such as the third to the second diagram D, the plurality of first-flow passages may be a plurality of inlet runners 213' that substantially vertically penetrate the first side 211 212 and the plurality of second substantially Honey straight through the first side 2U * second side 212 core j exit chute 214, in other words, the entrance shunt 213 is located on the complex n-plane such as the opening on the second side 212 is coaxial, and the exit is less The inlet side runner 213 and the outlet manifold 214 are connected to each other. Therefore, the first side surface 211 and the second side surface are connected to each other through the inlet branch passage 213 and the outlet manifold 214. 21 Referring to FIG. 3C and FIG. 3D, the inlet passage 215 and the outlet: /^6 are the conduit passages 215 disposed between the first side 211 and the second side 212, and are transported to the external fluid to the outside. The fluid delivery line is connected to the outlet channel 216 by the fluid delivery device 2, and the inlet channel 215 and the plurality of individual port channels 213 are: (as shown in the third figure D), and the outlet The passage 216 is in communication with a plurality of phase 'air passages 214 (as shown in FIG. 3C), in other words, when the flow port assembly is completed, the plurality of inlet branch passages 213 can be disconnected from the outside through the inlet J passage 215. The plurality of outlet manifolds 214 can be fastened to the outside through the outlet passage 216. Referring to the third diagrams B and C, the end of the plurality of outlet manifolds 214 of the manifold 21 adjacent to the first side 211 is extended outwardly. A second temporary storage chamber is defined together with the body films 222a and 232a disposed on the first side surface 211, that is, the outlet temporary storage chamber 2141a shown in the figure. Of course, the outlet manifold 214 is adjacent to the second side 212. Also with the valve body thin 11 1353891 • Membrane 222b and 232b set the outlet The temporary storage chamber 2141b is such that the fluid introduced by the first chambers 22a, 23a and the second chambers 22b, 23b can be temporarily buffered at the outlets 'cavities 2141a, 2141b' and smoothly collected in the outlet manifold. 214 is output to the outside of the fluid delivery device 2 along the outlet passage 216. The first side surface 211 and the second side surface 212 of the current collecting device 21 are respectively provided with a plurality of groove structures. The grooves 217a, 218a 217b and 218b are disposed around the inlet branching channel 213 and are disposed around the outlet branching channel 213. The periphery, and the grooves 219a, 219b are disposed around the periphery of the outlet manifold 214 with the outlet bus 214 as the center to receive a plurality of sealing rings 26 by using the grooves 217a-219a, 217b-219b (such as the sixth figure). A shows). In the embodiment, the flow collecting device 21 can be made of a thermoplastic material; and the sealing ring 26 can be a ring structure composed of a soft material with good chemical resistance, for example, a rubber ring for sterol or acetic acid resistant, But they are not limited to this. Referring to the second figure, the valve body films 222a and 232a, the valve body covers 221a and 231a, and the actuating device 223a of the first cavity 22a, 23a of the first and second dual cavity actuating structures 22, 23 φ 233a and the cover bodies 224a, 234a are stacked on the first side surface 211 of the confluence device 21, wherein the valve body films 222a, 232a are located between the first side surface 211 of the confluence device 21 and the valve body cover bodies 221a, 231a, and Corresponding to the confluence device 21 and the valve body cover bodies 221a, 231a, and corresponding positions on the valve body cover bodies 221a, 231a: there are provided actuator devices 223a, 233a, which mainly include vibrating membranes - 2231a, 2331a, and Actuators 2232a, 2332a, and actuating devices 223a, 233a can be driven by voltage to vibrate 'to drive fluid delivery device 2 12 1353891, as caps 224a, 234a are disposed on actuating devices 223a, 233a relative to The valve body cover bodies 221a, 231a are provided on one side for sealing the entire first cavity 22a, 23a, and the valve body films 222a, 232a, the valve body cover 221a, 231a, the actuating means 223a, 233a and the cover body 224a, 234a are stacked in sequence and use locking elements (not shown Other means provided in the first side surface 21 of the bus 211, can constitute the first double-chamber actuating structure of the first chamber 22 of the body 22a, the second double-chamber actuating structure of the first chamber 23 of the body 23a. Since the second cavity 22b of the first dual cavity actuating structure 22 and the first cavity 22a are mirror-symmetrically disposed on the second side 212 of the confluence device 21 centered on the confluence device 21, and the second double cavity The second cavity 23b of the body actuating structure 23 and the first cavity 23a are disposed symmetrically on the second side 212 of the confluence device 21 with the confluence device 21 as the center (as shown in the second figure and the sixth figure A). Therefore, the following is mainly to take the first cavity 22a of the first dual cavity actuating structure 22 as an example to illustrate the detailed structure of the fluid transport device 2 of the present invention. Please refer to the fourth figure A, B, C and cooperate with the second figure and the third figure A', wherein the fourth figure A is the first cavity of the first double cavity actuating structure of the fluid conveying device of the third drawing A of the present case. AA cross-sectional view of the valve body cover of the body, and FIG. 4B is a CC cross-sectional view of the valve body cover of the first cavity of the first and second dual cavity actuating structures shown in FIG. Figure 4C is a BB cross-sectional view of the valve body cover of the first cavity of the first and second dual cavity actuating structures shown in Fig. A of the third embodiment, as shown in the second figure, first The valve body cover 221a of the first cavity 22a of the dual cavity actuating structure 22 is disposed on the first side surface 211 of the flow device 21, and has an upper surface 2211a and a lower surface 2212a facing the lower surface 2212a. The first side surface 13 1353891 ' 211 of the manifold 21 and the valve body film 221a are interposed between the lower surface 2212a and the first side surface 211 of the confluence device 21, and the valve body cover 11a extends through the upper surface. In the present embodiment, the first valve passage 訏 is the inlet valve passage 2213a, and the second valve passage is the outlet wide door passage 2214a (such as the first valve passage and the second valve passage of the lower surface 2212a). 2 and 4B), wherein the inlet valve passage 2213a corresponds to the inlet bypass passage 213 of the flow device 21, and the outlet gate passage 2214a corresponds to the outlet temporary storage region 2141a (as shown in the second and sixth figures). A shows). In addition, the inlet valve passage 2213a of the valve body cover 221a extends outwardly toward the lower surface 2212a, and the first temporary storage chamber is defined by the 阙 and the body film 222a, and the first temporary storage room of the embodiment The inlet temporary cavity 2215a is formed by the lower surface 2212a of the valve body cover 221a at a position corresponding to the inlet valve passage 2213a and is connected to the inlet valve passage 2213a (as shown in FIG. 6A). The fourth figure C shows) 第二reading and referring to the second figure and the sixth figure A', the valve body cover 221 & upper surface 2211a has a partial depression, and the correspondingly disposed actuation device 223a defines the pressure The chamber 22i6a, and the pressure chamber 2216a communicates with the inlet temporary chamber 2215a via the two-port valve passage 2213a (as shown in the fourth figure c), while the pressure chamber 2216a is also in communication with the outlet valve passage 221 (eg, Figure 4 is shown in Figure B). In addition, the valve body cover 22aa has a plurality of groove structures, wherein the valve body cover 2 lower surface 2212a has a groove which is arranged around the inlet-valve 1 channel 2, and • The port door channel 2214a is a central ring (four) 22122a, • 22W, while the upper surface 22 is provided with a groove 1353891 22111a' around the pressure chamber 2, and the sealing ring 27 is received by the grooves 22121a-22123a, 22111a ( As shown in Figure 6A). The material of the valve body cover 221a may be a thermoplastic plastic material, and the material type of the valve body cover 221a may be the same as that of the busbar device 21, and the material of the seal ring 27 may be the same as that of the seal ring 26, and will not be described again. Please refer to the fifth figure and cooperate with the second figure and the sixth figure A, wherein the fifth figure is a structural diagram of the valve body film of the first cavity of the first double cavity actuating structure shown in the second figure, such as As shown in the figure, the valve body film 222a is mainly produced by conventional processing, or yellow light etching, or laser processing, or electroforming processing, or electric discharge machining, and is a sheet structure having substantially the same thickness, and has a plurality of sheets. The valve structure is a hollow valve switch. In the embodiment, the valve body film 222a is provided with first and second hollow valve structures, which are an inlet valve structure 2221a and an outlet valve structure 2222a, respectively, wherein the inlet valve structure 2221a corresponds to the inlet branch passage 213 of the manifold device 21, the inlet valve passage 2213a of the valve body cover 221a, and the inlet temporary storage chamber 2215a, and the outlet valve structure 2222a corresponds to the outlet manifold 214 of the manifold 21 and the outlet temporary chamber 2141a. And the outlet valve passage 2214a of the valve body cover 221a (as shown in the sixth figure a). Referring again to the fifth figure, the inlet valve structure 2221a has an inlet valve piece 222lla and a plurality of hollow holes 22212a disposed around the periphery of the inlet valve piece 22211a. Further, the inlet valve plate 2221a is further connected between the holes 22212a. The extension portion 22213a. The arrangement of the outlet valve piece 22221a, the hole 22222a and the extension portion 22223a of the outlet valve structure 2222a are the same as the inlet valve structure 2221a, and will not be described herein. In the present embodiment, the valve body film 222a is substantially a flexible film having a uniform thickness, and the material thereof may be selected from any organic polymer material or metal material having good chemical resistance, for example, polyamidamine ( Polyimide, PI), aluminum, nickel, stainless steel, copper, * aluminum alloy, nickel alloy or copper alloy, etc., but the material selected is not limited. Since the valve body film 222a is a flexible sheet, when the valve body film 222a is disposed between the first side surface 211 of the manifold 21 and the valve body cover 221a, if it is subjected to the suction of the pressure chamber 2216a, the suction force is generated. The inlet valve structure 2221a and the outlet valve structure 2222a are all displaced to the direction of the pressure chamber 2216a. However, due to the structure of the lower surface 2212a of the valve body cover 221a adjacent to the inlet valve passage 2213a and the outlet valve passage 2214a, The difference (as shown in FIG. 4A and FIG. 6A), therefore, when the valve body film 222a is attracted by the negative pressure of the pressure chamber 2216a, substantially only the inlet valve structure 2221a can be directed toward the valve body cover 221a. The displacement is generated (as shown in FIG. 6B and FIG. 7B), and the outlet valve structure 2222a is attached to the lower surface 2212a of the valve body cover 221a and cannot be opened (as shown in FIG. 6B and FIG. In this case, the fluid can only flow from the side of the valve body film 222a close to the side of the confluence device 21 through the hole 22212a of the inlet valve structure 2221a to the side close to the valve body cover 22 (as shown in FIG. 6B and FIG. 7B). As indicated by the arrow And into the inlet valve cap buffer cavity 2215a and inlet valve channel 2213a 221a is transmitted to the internal pressure of the chamber 2216a, and the use of the outlet valve structure 2222a close to prevent reverse fluid: flow. . Similarly, since the first side 211 of the confluence device 21 is different in structure from the inlet shunt 213 and the outlet chute 214 (as shown in the second figure and 16 135 891 'three-figure B), the valve body film 222a is received. The positive pressure of the pressure chamber 2216a is pushed to withstand the downward stress transmitted from the pressure chamber 2216a. 'In essence, only the outlet valve structure 2222a can be displaced toward the confluence device 21, and the inlet valve structure 2221a is directed Attached to the first side 211 of the confluence device 21 to seal the inlet shunt 213 of the confluence device 21, that is, the inlet valve structure 2221a cannot be opened (as shown in the sixth figure c and the seventh figure C) The fluid can only flow from the pressure chamber 2216a through the bore 22222a of the outlet valve structure 2222a into the outlet temporary chamber 2141a of the manifold 21 (as shown in Figures 6C and 8C), such that the inlet valve structure 2221a The outlet valve structure 2222a can be closed or opened corresponding to the inlet valve structure 2221a in response to the negative and positive pressure differential generated by the pressure chamber 2216a, to control fluid in and out. Free fluid reflux. Referring to the second figure, the actuating device 223a of the first cavity 22a of the first dual cavity actuating structure 22 includes a vibrating membrane 223ia and an actuator φ 2232a. The actuating device 223a mainly utilizes the vibrating membrane 22: 31a. The periphery is fixed to the valve body cover 221a, and the valve body 221a defines a pressure chamber 2216a (as shown in FIG. 6A). The material of the vibrating film 2231a of the actuating device 223a may be a single-layer metal structure, such as stainless steel metal or copper metal 'but not limited thereto; of course, in some embodiments, the vibrating film 2231a may be attached to the metal material. A layer of biochemical resistant polymer sheet: material to form a two-layer structure. As for the actuator 2232a, it can be attached to the vibrating film 223la, and the actuator 2232a is a piezoelectric plate made of a piezoelectric powder of a high piezoelectric coefficient lead (PZT) series. The cover body 17 1353891 224a is correspondingly disposed on the actuating device 223a, and the valve body film 222a and the valve body are jointly used by the cover body 224a and the first side surface 211 of the flow collecting device 21. A cover 221a and an actuator 224a are interposed therebetween to form a first cavity 22a of the first dual cavity actuation structure 22 of the fluid delivery device 2 of the present invention (as shown in Figure 3A). Please refer to FIG. 6A and cooperate with the second diagram and the third diagram a, wherein the sixth diagram A is a schematic diagram of the AA cross section of the fluid transport device of the third diagram A in an unactuated state, as shown in FIG. 3A. The structure and actuation mode of the aa cross section of the fluid transport device shown are the same as those of AA, and therefore the following description will be made only with the structure of the AA cross section. As shown, when the first cavity 22a of the first dual cavity actuation structure 22 is assembled to the first side 211 of the manifold 21, the inlet runner 213 of the manifold 21 corresponds to the valve body film 222a. The inlet valve structure 2221a, the inlet temporary storage chamber 2215a of the wide body cover 221a, and the outlet manifold 214 of the inlet valve passage 2213a' confluence device 21 correspond to the outlet temporary storage chamber 2141a and the outlet valve structure 2222a on the valve body membrane 222a φ. And an outlet valve passage 2214a on the valve body cover 221a. In addition, the thickness of the seal ring 26 in the first side surface 211 of the confluence device 21 surrounding the recess 217a of the inlet shunt 213 (as shown in the third diagram B) is greater than the depth of the recess 217a, which is to be the clamp ring 26 The portion protrudes from the recess 217a and constitutes a micro-convex structure such that the inlet of the valve body film 222a: the inlet valve piece 22211a of the valve structure 2221a forms an upward bulge. The micro-convex structure will oppress the valve body membrane 222a and push the inlet valve structure 2221a to create a pre-force effect, which helps the fluid to release 18 1353891 greater pre-tightening effect to prevent backflow and A gap is formed between the σ interplate 222 〇 a and the sink; the first side 211 of the flow device 21 is adapted to facilitate the opening of the inlet valve structure 2221a when the fluid enters. Similarly, the recess 22122a disposed on the lower surface 2212a of the intermediate body 221a and surrounding the periphery of the outlet valve passage 2214a and the seal ring 27 also form a slightly convex structure, so that the outlet valve structure 2222a of the valve body film 222a protrudes downward. A downward bulge is formed with respect to the valve body cover 221a and a gap is formed between the outlet valve piece 22221a and the lower surface 2212a of the valve body 222a, and the exit door structure 2222a and the inlet valve structure 2221a are slightly convex. Only the direction is reversed, but its function is similar, so it will not be described again. In addition to the use of the recesses 217a, 22122a and the seal rings 26, 27, the above-described micro-convex structure can also be used in some embodiments, such as: yellow etching, coating or electroforming technology, directly in the confluence device 21 and the valve body cover 221a are formed on the micro-convex structure, or directly formed on the confluence skirt 21 and the valve body cover 222a, and the base material is formed by injection molding, wherein the substrate is made of a thermoplastic Lu plastic material. The remaining portion of the valve body film 222a is applied between the valve body cover 222a and the confluence device 21, and is passed through the seal rings 26, 27 provided in the grooves 218a, 219a and 22121a, 22123a, 22111a to make the structures They fit snugly together to prevent fluid spillage. Referring to FIG. 6A, the valve body film 222b of the second cavity 22b of the first dual cavity actuating structure 22, the valve body cover 221b, the actuating device 223b: and the cover body 224b are disposed on the confluence device 21. The second side surface 212 of the second cavity 212 is symmetrical with the structures of the first cavity 22a, and the structure and function of the second cavity 22b are the same as those of the first cavity 22a 19 1353891. The first cavity 23a and the second cavity 23b of the second dual cavity actuating structure 23 have the same structure and function as the first cavity 22a and the second cavity of the first dual cavity actuating structure 22. 23a is the same, therefore, in order to simplify the description, only the first cavity 22a of the first dual cavity actuating structure 22 is taken as an example to describe the fluid transport process. However, it should be understood that when the fluid transport device 2 of the present invention is actually operated, The second cavity 22b of the dual cavity actuating structure 22 and the first cavity 22a, and the second cavity 23b of the second dual cavity actuating structure 23 are identical and synchronized with the first cavity 23a. The mode is actuated for fluid delivery. Please refer to Figure 6B, which is a schematic diagram of the pressure chamber expansion state of Figure 6A. Taking the first cavity 22a as an example, when the actuator 2232a is driven by the voltage, the actuating device 223a will be bent and deformed in the direction indicated by the arrow a as shown, so that the volume of the pressure chamber 2216a is increased. The negative pressure difference is generated, thereby forming a suction force, so the inlet valve structure 2221a and the outlet valve structure 2222a of the valve body film 222a will be subjected to the outward pulling force due to the negative pressure. At this time, the inlet valve structure 2221a corresponds to the inlet temporarily. The space of the cavity 2215a is such that the inlet valve piece 22211a can be quickly opened by the pre-force provided by the micro-convex structure formed by the groove 217a and the sealing ring 26 (as shown in FIG. 6B and FIG. 7B). The fluid is drawn in a large amount from the inlet passage 215 of the manifold 21, flows into the manifold 21 and is split at the inlet runner 213 to cause a portion of the fluid to flow to the first chamber 22a and through the inlet valve structure on the valve body membrane 222a. The hollow hole 22212a of the 2221a enters the inlet temporary storage area 2215a and the inlet valve passage 2213a on the valve body cover 221a, and is then transferred into the pressure chamber 2216a. At this time, by 1353891, the outlet valve of the valve body membrane island Structure 2222a and the inlet valve withstand. The pulling force of the door structure 22213 in the same direction, and because the lower surface 22 of the valve body cover 221a is different from the structure of the corresponding outlet valve structure 2 and the corresponding inlet structure 2221a, the groove 22122a and the sealing ring 27 can be provided. A pre-tightening effect 'so that the outlet valve structure 2222a on the valve body membrane 222& will cause the outlet valve piece 22221a to seal the outlet valve passage 2214a' due to the pulling force so that the fluid does not flow backward (as in Figure 6 and Figure 8 B)). When the direction of the electric field applied to the actuator 2232a changes and is bent and deformed in the direction of the arrow b as shown in FIG. 6C, the actuator 2232a will deform the actuating device 223a toward the converging device 21, thereby Compressing the volume of the pressure chamber 2216a reduces the volume of the pressure chamber 2216a to create a positive pressure differential with the outside world, thereby generating a thrust to the fluid inside the pressure chamber 2216a, causing the fluid to vent a large amount instantaneously and flow out of the outlet valve passage 2214a. Outside the pressure chamber 2216a, at the same time, since the inlet φ valve structure 2221a and the outlet valve structure 2222a of the valve body film 222a are also subjected to the thrust generated by the positive pressure of the pressure chamber 2216a toward the confluence device 21, they are disposed on the seal ring. The outlet valve piece 22221a of the outlet valve structure 2222a on the 27 can be quickly opened by a preload, so that the fluid can be passed from the pressure chamber 2216a through the outlet valve passage 2214a of the valve body cover 221a, and the outlet valve structure 2222a of the valve body membrane 222a. The hole 22222a enters the confluence device 21; the outlet temporary storage area 2141a and the outlet confluence channel are as shown in the sixth figure c and the eighth-figure C), and finally The port channel 216 exits the fluid delivery device 2, thus completing the fluid transfer process. 21 1353891 On the other hand, when the inlet valve structure 2221a is subjected to the thrust in the direction of the confluence device 21, since the structure of the first side surface 211a of the confluence device 21 near the inlet branch passage 213 is different from that near the outlet manifold 214, and sealed The ring 26 provides a pre-tightening effect such that the inlet valve plate 22211a presses the inlet valve structure 2221a into a closed state, thereby sealing the inlet runner 213 (as shown in Figures 6C and 7C), so fluid cannot Through the inlet valve structure 2221a, there is no backflow phenomenon. As for the fluid temporarily stored in the inlet temporary chamber 2215a, the actuator 2232a is again subjected to voltage actuation and repeatedly deforms the actuator 223a to increase the volume of the pressure chamber 2216a, and then is temporarily stored by the inlet. The chamber 2215a flows into the pressure chamber 2216a through the inlet valve passage 2213a, and is discharged from the pressure chamber 2216a when the actuator 223 is compressed and deformed. Thus, it can be seen that the actuator 223a can be driven to reciprocate by changing the direction of the electric field. The fluid delivery device 2 draws and releases fluid to achieve fluid delivery. Please refer to the seventh diagrams A to C and the eighth diagrams A to C, wherein the seventh diagram A is a BB cross-sectional view of the fluid transport device of the third diagram A, and the eighth diagram A is the fluid transport of the third diagram A. CC cross-sectional view of the device, as shown in FIG. 7A, the inlet passage 215 is a line disposed between the first side 211 and the second side 212 of the confluence device 21, and is mainly used for conveying external fluid to the fluid delivery device. 2, and connected to a plurality of inlet split runners 213 for distributing fluid to the first cavity 22a and the second cavity 22b of the first dual cavity actuation structure 22 via the inlet split runner 213, and The first chamber 23a and the second chamber 23b of the second dual chamber actuating structure 23 perform a 22 1353891 fluid transfer procedure. As shown in FIG. 8A, the outlet passage 216 is a line disposed between the first side 211 and the second side 212 of the confluence device 21, and is mainly used for conveying fluid to the outside of the fluid delivery device 2, and a plurality of The outlet manifold 214 is in communication for actuating the first cavity 22a and the second cavity 22b of the first dual cavity actuation structure 22, and the second dual cavity via the outlet manifold 214 and the outlet channel 216 The fluid output from the first cavity 23a and the second cavity 23b of the structure 23 is merged and discharged to the outside. Referring to FIG. 7B and FIG. 8B, as shown in FIG. 7B, when fluid flows into the inlet passage 215, part of the fluid enters prior to the inlet inner flow passage 213 corresponding to the first dual chamber actuation structure 22. The first cavity 22a and the second cavity 22b on both sides flow to the inlet inner flow channel 213 corresponding to the first dual cavity actuation structure 23 and enter the first cavity 23a and the first side of the first dual cavity actuation structure 23 After the two chambers 23b are discharged, if there are three or more horizontal groups, the same is true. Actuation of the first cavity 22a and the second cavity 22b of the first dual cavity actuation structure 22, and the first cavity 23a and the second cavity 23b of the second dual cavity actuation structure 23 When the device is driven by the voltage of the same vibration frequency, all the actuators will be convex, which will cause all the inlet valve structures to open and draw fluid into the cavity (as shown in Figure 7B). Closed, avoiding fluid backflow (as shown in Figure 8B). The detailed actuation relationship is illustrated in Figure 6 above, and is not mentioned here. On the contrary, please refer to FIG. 7C and FIG. 8C again, when the first cavity 22a and the second cavity 22b of the first dual cavity actuating structure 22, and the second double cavity actuating structure 23 When the 23 1353891 actuator included in one cavity 23a and the second cavity 23b is driven by the voltage of the same vibration frequency, all the actuators will. Recessing and compressing the pressure chamber and producing a positive pressure will cause all of the outlet valve's door structure to open and discharge fluid (as shown in Figure 8c), at which point all inlet valve structures are more tightly closed (eg, seventh) Figure c), to avoid fluid recirculation, the detailed action relationship has been described in the sixth Figure C above, and will not be described again. In summary, the fluid conveying device having a plurality of dual-cavity actuation structures in the present invention mainly uses a confluence device to integrate and integrate a plurality of fluid delivery chambers into one, that is, two sets of valve body membranes and valve body covers. And actuating devices are respectively stacked on the first and second sides of the confluence device to form a dual cavity actuating structure having two mirror-symmetric fluid transport cavities, and reusing a plurality of dual cavity actuating structures Side-by-side arrangement on the confluence device to achieve the expansion and integration of a plurality of dual-cavity actuation structures in the lateral direction, which can increase the fluid flow rate and the elevation of the fluid delivery device by several times, but the volume is not a plurality of conventional singles. The sum of the fluid transport devices of the chamber is in a tendency to be truly compliant with the miniaturization of the product. Therefore, the fluid delivery device with multiple double-cavity actuation structures in this case is of great industrial value and is submitted according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 24 [Simple description of the diagram] f _ diagram · is the structure of the conventional micro-Lipu structure - intention. *图* is a schematic exploded view of a preferred embodiment of the present invention having a plurality of dual cavity actuated structures. Figure A. It is a schematic diagram of the structure after the assembly of the second figure is completed. Figure B is a cross-sectional view of the A-A or a_a of the confluence of the fluid transport device of the third figure of the present invention. Figure C: is a C-C cross-sectional view of the confluence device of the fluid delivery device of Figure 3 of the present invention. Figure 2D is a B-B cross-sectional view of the confluence device of the flow recording device of Figure 3 of the present invention. Figure 4A is a cross-sectional view of the first pair of fluid transport devices of Figure 3A of the present invention, and the (A) cover of the first cavity of the body actuating structure. Figure 4B is a C-C cross-sectional view of the valve body cover of the first cavity of the first and second double cavity actuating structures shown in Fig. 3A of the present invention. Figure IV C. It is a B-B cross-sectional view of the valve body cover of the first cavity of the first and second dual cavity actuating structures shown in Fig. 3A. Fig. 5 is a schematic view showing the structure of the valve body film of the first cavity of the first dual cavity actuating structure shown in Fig. 2. Fig. 6A is a schematic view showing the A A cross section of the fluid transporting device of Fig. 3 in an unactuated state. Figure VIB. It is a schematic diagram of the expansion state of the pressure chamber of Figure 6A. Figure 6C is a schematic view showing the compression state of the pressure chamber of Figure 6A. Figure 7A is a cross-sectional view of the B-B of the fluid delivery device of Figure 3A. 25 1353891 Figure 7B is a schematic view showing the state of expansion of the pressure chamber of Figure 7A. Figure 7C is a schematic view showing the compression state of the pressure chamber of Figure 7A. Figure 8A is a C-C cross-sectional view of the fluid delivery device of Figure 3A. Figure 8B is a schematic view showing the state of expansion of the pressure chamber of Figure 8A. Figure 8C is a schematic view showing the compression state of the pressure chamber of Figure 8A. [Main component symbol description] Micro-pump structure: 10 valve body seat: 11 inlet channel: 111, 215 outlet channel: 112, 216 inlet valve channel: 121 outlet valve channel: 122 wide body cover: 12, 221a, 221b, 231a, 231b Pressure chamber: 123, 2216a, 2316a Body film: 13, 222a, 222b, 232a, 232b Microactuator: 14 Fluid delivery device: 2 Cover: 15, 224a, 224b, 234a, 234b First dual cavity actuation structure: 22 Second dual cavity actuation structure: 23 First cavity: 22a, 23a Second cavity: 22b, 23b Confluence device: 21 First side: 211 Second side 212: Inlet runner: 213 Outlet manifold: 214 Outlet chamber: 2141a, 2141b Upper surface: 2211a Lower surface: 2212a Inlet valve channel: 2213a, 2213b, 2313a Outlet valve channel: 2214a, 2214b, 2314a 26 1353891
入口 暫存腔：2215a、2215b、2315a 致動裝置：223a、223b、233a、233b · 延伸部：22213a、22223a 入口閥門結構·· 2221a、131 出口閥門結構·· 2222a、132 匯流裝置：21 入口閥片：22211a 出 口閥片：22221a 孔洞：22212a、22222a 振動薄膜：2231a、2231b、2331a、2331b 致動器：2232a、2232b、2332a、2332b 方向：a、b、x 密封環：26、27 凹槽：217a、217b、218a、218b、219a、219b、22121a、 22121b 、 22122a 、 22123a 、 22111a 27Inlet temporary storage chamber: 2215a, 2215b, 2315a Actuating device: 223a, 223b, 233a, 233b · Extension: 22213a, 22223a Inlet valve structure · · 2221a, 131 Outlet valve structure · · 2222a, 132 Confluence device: 21 inlet valve Sheet: 22211a Outlet valve plate: 22221a Hole: 22212a, 22222a Vibrating membrane: 2231a, 2231b, 2331a, 2331b Actuator: 2232a, 2232b, 2332a, 2332b Direction: a, b, x Sealing ring: 26, 27 Groove: 217a, 217b, 218a, 218b, 219a, 219b, 22121a, 22121b, 22122a, 22123a, 22111a 27