1342831 九、發明說明： * » 【發明所屬之技術領域】 本案係關於一種流體輸送裝置，尤指一種具有防逆流 及高流量揚程設計之流體輸送裝置。 【先前技術】1342831 IX. INSTRUCTIONS: * » [Technical field to which the invention pertains] The present invention relates to a fluid delivery device, and more particularly to a fluid delivery device having a backflow prevention and a high flow head design. [Prior Art]
目前於各領域中無論是醫藥、電腦科技、列印、能源 荨工業，產品均朝精緻化及微小化方向發展，苴中 浦、噴霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸’為發展之重要内容。 請參閱第一圖A，其係為習知微泵浦結構之剖面示意 圖，習知微泵浦結構10係由閥體座u、閥體蓋體12、閥 體薄膜13、微致動器14及蓋體15所組成，其中，閥體薄 膜13係包含人π閥門結構131及出口閥門結構132，闊體 座11包含入口通道111、出口通道112、密封環113以及 出口暫存腔114 ’閥體盍體12與微致動器14間定義形成 一壓力腔冑123,閥體蓋體12包含入口闊門通道i2i、出 口閥門通道122、入口暫存腔124 薄膜13設置在閥體座11與閥體蓋 以及密封環125，閥體 體12之間。 田一电㈣驛微致動器14的上下兩極時，會產生 -電場，使得微致動器14在此電場之作用下產生彎油， 當微致動器Η朝箭號&所指之方向向下 1342831 付壓力腔至12 3之體積增加，因而產生一吸力，以使閥體 4膜13之入口閥門結構131開啟，液體可自閥體座11上 之入口通道111被吸取進來，並流經閥體薄膜13之入口 閥門結構13卜入口暫存腔丨24及間體蓋體丨2上之入口閥 門通道121而流入壓力腔室123内（如第一圖B所示）， 反之當微致動器14因電場方向改變而朝箭號b之方向向 上彎曲變形時，則會壓縮壓力腔室123之體積，使得壓力At present, in all fields, such as medicine, computer technology, printing, energy and niobium industries, the products are developing in the direction of refinement and miniaturization. The fluids contained in products such as Yuzhongpu, sprayers, inkjet heads, industrial printing devices, etc. The transportation structure is its key technology, which is how to break through its technical bottleneck with innovative structure as an important part of development. Please refer to FIG. A, which is a schematic cross-sectional view of a conventional micro-pump structure. The conventional micro-pump structure 10 is composed of a valve body seat u, a valve body cover 12, a valve body film 13, and a microactuator 14. And a cover body 15 , wherein the valve body film 13 comprises a human π valve structure 131 and an outlet valve structure 132 , and the wide body seat 11 includes an inlet passage 111 , an outlet passage 112 , a sealing ring 113 , and an outlet temporary storage chamber 114 'valve A body chamber 12 is defined between the body body 12 and the microactuator 14. The valve body cover 12 includes an inlet wide door passage i2i, an outlet valve passage 122, and an inlet temporary storage chamber 124. The film 13 is disposed on the valve body seat 11 and The valve body cover and the seal ring 125 are between the valve body bodies 12. When Tian Yi (4) 驿 the upper and lower poles of the microactuator 14 , an electric field is generated, so that the microactuator 14 generates a bending oil under the action of the electric field, when the micro actuator is pointing to the arrow & The direction downwards 1342831 increases the volume of the pressure chamber to 12 3, thereby generating a suction force to open the inlet valve structure 131 of the membrane body 13 of the valve body 4, and the liquid can be sucked in from the inlet passage 111 on the valve body seat 11, and The inlet valve structure 13 flowing through the valve body film 13 and the inlet valve passage 121 on the inlet chamber 24 and the inlet cover valve 2 flow into the pressure chamber 123 (as shown in the first figure B), and vice versa. When the microactuator 14 is bent upward and deformed in the direction of the arrow b due to the change of the electric field direction, the volume of the pressure chamber 123 is compressed, so that the pressure
腔室123對内部之流體產生—推力，並使閥體薄膜13之 入口閥門結構131、出口閥門結構132承受一向上推力， 而出口閥門結構132將開啟，並使液體由壓力腔室123經 由閥體盍體12上之出口閥門通道122、閥體薄膜13之出 口閥門結構132以及出口暫存腔114，而從閥體座n之出 口通道112流出微泵浦結構1G外，因而完成流體之傳輸 過程（如第一圖C所示）。 雖然習知微泵浦結構The chamber 123 generates a thrust to the internal fluid, and the inlet valve structure 131 of the valve body membrane 13 and the outlet valve structure 132 are subjected to an upward thrust, and the outlet valve structure 132 is opened and the liquid is passed from the pressure chamber 123 via the valve. The outlet valve passage 122 on the body body 12, the outlet valve structure 132 of the valve body film 13, and the outlet temporary chamber 114 exit the micropump structure 1G from the outlet passage 112 of the valve body seat n, thereby completing the fluid transfer. Process (as shown in Figure C). Although the conventional micro-pump structure
月匕约違到輸送流體的功能， 且藉由閥體座Η之密封環113與入口閥門結構⑶相抿 頂，使位於凹槽内之密封環113頂觸閥體薄膜之入口間門 以 二預編—作用，使得入 131在未作動日剩體座u之下表面形成—間隙^ ^闕體蓋體12之密封環125與出口闕門結構132相抵頂， = 由將密封環125設至於凹槽中的相 Μ φ φ ^ 表面形成一間隙，有助於流體 =預蓋緊效果以防正逆流，然而，如此的 '。構以顧具有防止㈣制，但是㈣㈣環⑴、 7 1342831 係具有環繞開口 213週邊之凹槽218，及環繞於出口暫存 腔215週邊之凹槽217，主要藉由設置於凹槽217及218 内之密封環26使閥體座21與閥體薄膜23之間緊密的貼 合，以防止流體外洩。 請參閱第二圖B並配合第二圖A，其中第二圖B係為 第二圖A所示之閥體蓋體之背面結構示意圖，如圖所示， 閥體蓋座22係具有一上表面220及一下表面228，以及在 閥體蓋座22上亦具有貫穿上表面220至下表面228之入 口闊門通道221及出口閥門通道222，且該入口閥門通道 221係設置於與閥體座21之開口 213相對應之位置，而出 口閥門通道222則設置於與閥體座21之出口暫存腔215 内之開口 214相對應之位置，並且閥體薄膜23及閥體蓋 體22之間所形成之第一暫存室即為圖中所示之入口暫存 腔223，且不以此為限，其係由閥體蓋體22之下表面228 於與入口閥門通道221相對應之位置產生部份凹陷而形 成，且其係連通於入口閥門通道221，其中，本案之入口 暫存腔223的最小口徑係大於入口通道211之管徑，即入 口閥門通道221係大於與入口通道211連接之開口 213的 管徑，如此導入流體之流速較不致有回流或減弱之情況發 生。 請再參閱第二圖A，閥體蓋體22之上表面220係部份 凹陷，以形成一壓力腔室226，其係與致動裝置24之致動 器242相對應設置，壓力腔室226係經由入口閥門通道221 連通於入口暫存腔223，並同時與出口閥門通道222相連 12 1342831 通，因此，當致動器242受電壓致動使致動裝置24變形， 造成壓力腔室226之體積膨脹而產生負壓差，可使流體經 入口閥門通道221流至壓力腔室226内（如第四圖B所 示），其後，當施加於致動器242的電場方向改變後，致動 器242將使致動裝置24變形以使壓力腔室226收縮而體 積減小，使壓力腔室226與外界產生正壓力差，促使流體 由出口閥門通道222流出壓力腔室226之外，於此同時， 同樣有部分流體會流入入口閥門通道221及入口暫存室 223内，然而由於此時的入口閥門結構231 (如第四圖C所 示）係為使受壓而關閉的狀態，故該流體不會通過入口闊片 2313而產生倒流的現象，至於暫時儲存於入口暫存腔223 内之流體，則於致動器242再受電壓致動，重複使致動裝 置24再上凸變形而增加壓力腔室226體積時，再由入口 暫存腔223經至入口閥門通道221而流入壓力腔室226 内，以進行流體的輸送。 另外如第四圖A所示，閥體蓋體22上同樣具有複數 個凹槽結構，以本實施例為例，在閥體蓋體22之上表面 220係具有環繞壓力腔室226而設置之凹槽227，而在下 表面228上則具有環繞設置於入口暫存腔223之凹槽 224、環繞設置於出口閥門通道222之凹槽229(如第四圖B 所示），同樣地，上述凹槽結構係用以供一密封環27設置 於其中，主要藉由設置於凹槽224及229内之密封環27 使閥體蓋體22與閥體薄膜23之間緊密的貼合，以防止流 體外洩，而設置於凹槽227内之密封環27則用來使致動 13 裝置24之致動薄膜241與閱.體蓋體22之間緊 以防止流體外茂（如第四圖A所示）。 貼0 請再參閱第二圖A，閥體薄膜23主 或黃光_、或雷射以、或電如I、錢電^^方 式製出’且為一厚度實質上相同之薄片結構 ί 复數個鎖空間開關，包含第-間開關以及第二間開= 本貫施例中，第一閥開關係為入口閥門結構23卜而第- 閭開關係為出口間η έ士谌β丄 币— 在1古 其中，人口閥門結構加 糸二有入口則2313以及複數個環繞人口㈣2313週邊 而。又置之鏤空孔洞2312，另外，在孔洞2312之間更具 與二閥片2313相連接之延伸部23u，當閥體薄膜23承 叉一自壓力腔室226傳遞而來之應力時，如第四圖[所 不入口閥門結構231係整個平貼於閥體座21之上，此 2 口閥片2313會緊貼於微凸結構216之水平接觸面 孔洞封住閥體座21上之開D213’且其外圍的鏤空 /_〇 及延伸部2311則順勢浮貼於閥體座21之上， 故因此入口閥門結構231之關閉作用，使流體無法流出。 -月再參閱苐二圖A並配合第四圖A，於閥體座2ι之 210之開〇 213的邊緣係環繞設置—微凸結構 、、係包含一水平接觸面2161及一導流面2162，該水 平接觸面2⑹係與入口閥門結構231之入口閥片2313相 抵頂’用以施-預力於該入口閥門結構23卜而該導流面 2162可為導角斜面’且該導流面2162可設置於微凸結構 216與開π 213相對應之壁面端緣處，藉由微凸結構μ 14 1342831 與入口閥門結構231接觸之表面為一水平接觸面2161型 態，且與入口通道211連接之開口 213的相對壁面端緣為 一導角斜面型態，一旦，出口閥門結構232開啟而使流體 釋出時，間體薄膜23之入口閥門結構231仍能與微凸結 構216形成一段封閉面的接觸，能產生更大更佳之預蓋緊 防止逆流的效果。 請再參閱第二圖B並配合第四圖A，於閥體蓋體22 之下表面228之出口閥門通道222的邊緣係環繞設置一微 凸結構225，其係包含一水平接觸面2251及一導流面 2252，該水平接觸面2251係與出口閥門結構232之出口 閥片2323相抵頂，用以施一預力於該出口閥門結構232， 而該導流面2252可為一導角斜面，且該導流面2252可設 置於微凸結構225與出口閥門通道222相對應之壁面端緣 處，藉由微凸結構225與出口閥門結構232接觸之表面為 一水平接觸面2251型態，且於出口閥門通道222的相對 壁面端緣為一導角斜面型態，一旦，入口閥門結構231開 啟而使流體流入閥體座21内部時，閥體薄膜23之出口閥 門結構232仍能與微凸結構225形成一段封閉面的接觸， 能產生更大更佳之預蓋緊防止逆流的效果。 當然，上述之微凸結構216及225可採用半導體製 程，例如：黃光姓刻或鍵膜或電鑄技術，直接在閥體座21 及閥體蓋體22上形成，或是直接與閥體座21及閥體蓋體 22以一體射出成型的方式形成，以使閥體薄膜23與閥體 座21以及閥體薄膜23與閥體蓋體22之間分別產生一間 15 1342831 隙，而對入口閥門結構231及出口閥門結構232頂推以產 生一預力作用，有助於開啟。 而當閥體薄膜23受到壓力腔室226體積增加而產生 之吸力作用下，由於設置於閥體座21之微凸結構216已 提供入口閥門結構231 —預力，因而入口閥片2313可藉 由延伸部2311的支撐而產生更大之預蓋緊效果，以防止 逆流，當因壓力腔室226之負壓而使入口閥門結構231產 生位移（如第四圖B所示），此時，流體則可經由鏤空之孔 洞2312由閥體座21流至閥體蓋體22之入口暫存腔223， 並經由入口暫存腔223及入口閥門通道221傳送至壓力腔 室226内，如此一來，入口閥門結構231即可因應壓力腔 室226產生之正負壓力差而迅速的開啟或關閉，以控制流 體之進出，並使流體不會回流至閥體座21上。 同樣地，位於同一閥體薄膜23上的另一閥門結構則 為出口閥門結構232，其中之出口閥片2323、延伸部2321 以及孔洞2322之作動方式均與入口閥門結構231相同， 因而不再贅述，惟與出口閥門結構232相抵頂之微凸結構 225設置方向係與與入口閥門結構231相抵頂之微凸結構 216反向設置，如第四圖C所示，因而當壓力腔室226壓 縮而產生一推力時，設置於閥體蓋體22下表面228之微 凸結構225將提供出口閥門結構232 —預力（Preforce)，使 得出口閥片2323可藉由延伸部2321之支撐而產生更大之 預蓋緊效果，以防止逆流，當因壓力腔室226之正壓而使 出口閥門結構232產生位移，此時，流體則可經由鏤空之 16 1342831 孔洞2322由壓力腔室226經閥體蓋體22而流至閥體座21 之出口暫存腔215内，並可經由開口 214及出口通道212 排出，如此一來，則可經由出口閥門結構232開啟之機制， 將流體自壓力腔室226内洩出，以達到流體輸送之功能。 請參閱第四圖A，其係為第二圖B所示之流體輸送裝 置之未作動狀態時之A-A剖面示意圖，於本實施例中，設 置於閥體座21之上表面210之開口 213邊緣之微凸結構 216，可使得貼合設置於閥體座21上之閥體薄膜23之入 口閥門結構231之入口閥片2313因微凸結構216而形成 一向下隆起，而閥體薄膜23之其餘部分係與閥體蓋體22 相抵頂，如此微凸結構216對入口閥門231頂推而產生一 預力作用，有助於產生更大之預蓋緊效果，以防止逆流， 且由於微凸結構216之水平接觸面2161係位於閥體薄膜 23之入口閥門結構231處，故使入口閥門結構231在未作 動時使入口閥片2313與閥體座21之上表面210之間具有 一間隙，同樣地，設置於環繞出口閥門通道222邊緣之微 凸結構225，由於其係設置於閥體蓋體22之下表面228， 因而可使閥體薄膜23之出口閥門結構232之出口閥片 2323向上凸出，此微凸結構225僅其方向與微凸結構216 係為反向設置，然而其功能均與前述相同，因而不再贅述。 請同時參閱第四圖A、B、C，如圖所示，當蓋體25、 致動裝置24、閥體蓋體22、閥體薄膜23、密封環26以及 閥體座21彼此對應組裝設置後，閥體座21上之開口 213 係與閥體薄膜23上之入口閥門結構231以及閥體蓋體22 17 1342831 '·上之入口間門通道221相對應，且闊體座上之開口 214 :則與閥體薄膜23上之出口間片攻以及閥體蓋體22上之 出口閥門通道222相對應’並且，由於微凸結構216設置 於閥體座21之開口 213邊緣，使得閥體薄膜23之入口閥 門結構2M微凸起於閥體座21之上，並藉由微凸結構216 頂觸閥體薄膜23而產生-預力作用，使得入口間門結構 23丨在未作動時則與閥體座21之上表面21〇形成一間隙， 豢同樣，，出口閥Η結構232亦藉由將微凸結構奶設置於 閥體盖體22上的方式，使出口閥門結構232與闕體蓋體 22之下表面228形成一間隙。 當以一電壓驅動致動器242時，致動裝置24 產^考曲變形，如第四圖Β所示，致動裝置24係朝箭號c 所指之方向向下彎曲變形，使得壓力腔室226之體積增 加，因而產生一吸力，使閥體薄膜23之入口閥門結構231、 出口閥門結構232承受一向下之拉力，並使已具有一預力 之入口閥門結構231之入口閥片2313迅速開啟（如第四圖 B所示）’使液體可大量地自閥體座21上之入口通道211 被吸取進來，並流經閥體座21上之開口 213、閥體薄膜 λ 上之入口閥門結構231之孔洞2312、閥體蓋體22上之 入口暫存腔223、入口閥片通道221而流入壓力腔室226 之内’此外’由於本案之入口暫存腔223的最小口徑係大 於入口通道211之管徑，即入口閥門通道221係大於與入 口通逼211連接之開口 213的管徑，如此導入流體之流速 不致有回流或減弱之情況發生。 18 1342831 此時’由於閥體薄膜23之入口閥門結構231、出口閱 門結構232承受該向下拉力，故位於另—端之出口閥^結 構232係因該向下拉力使得位於間體薄膜23上之出口間 片2323密封住出口閥門通道奶，而使得出口間門結構 232關閉’再加上微凸結構切與出口間門結構攻接觸 之表面為-水平接觸面2251型態，且於出口閥門通道奶 的^壁面端緣為-導角斜面型態，—旦人口閥門結構 231開啟而使流體流入閥體座21内部時，閥體薄膜”之 出口閥門結構232仍能與微凸結構奶形成一段封閉面的 接觸，能產生更大更佳之預蓋緊防止逆流的效果。 當致動褒置24因電場方向改變而如第四圖c所示之 前號d向上彎曲變形時，則會壓縮壓力腔室226之體積， ^壓力腔室226對内部之流體產生-推力，並使間體薄 膜23之入口閥門結構231、出口閥門結構加承受一向上 此時’設置於微凸結構225上之出口閥門結構232 ===2323其可迅速開啟（如第四圖c所示），並使液 ^間大夏”，由屋力腔室226經由閥體蓋體Μ上之 出口閥門通道222、閥體薄膜23上之出口閥門結構232之 m322、閥體座21上之出口暫存腔215、開口叫及 2 體輸送裝置2〇之外，因而完成流 體^輸過程，同樣地，此時由於入口間門結構231係承 因之推力，因而使得入口間片2313密封住開口 二=_入口_結構231 ’再加上微凸結構216與 間門結構231接觸之表面為—水平接觸面㈣型 19 丄 【圖式簡單說明】 第圖A:其係為習知微泵浦結構之剖面示意圖。 ^ θ β·其係為第一圖A之壓力腔室膨脹狀態示意圖。 ★一圖C.其係為第一圖a之壓力腔室壓縮狀態示意圖。 一圖A •其係為本案較佳實施例之流體輸送裝置之結構 不意圖。 第一圖B·其係為第二圖a所示之閥體蓋體之背面結構示 意圖。 第三圖：其係為第二圖A之組裝結構示意圖。 第四圖A:其係為第二圖b所示之流體輸送裝置之未作動 狀態日可之A-A剖面示意圖。 第四圖B .其係為第四圖A之壓力腔室膨脹狀態示意圖。 第四圖C :其係為第四圖A之壓力腔室壓縮狀態示意圖。The moon smashes the function of transporting the fluid, and the sealing ring 113 of the valve body seat is dome-shaped with the inlet valve structure (3), so that the sealing ring 113 located in the groove touches the inlet door of the valve body film to The pre-editing action causes the inlet 131 to form a surface below the unactuated daily seat u - the gap ^ ^ the sealing ring 125 of the body cover 12 abuts the outlet door structure 132, = by setting the sealing ring 125 to The phase Μ φ φ ^ in the groove forms a gap to help the fluid = pre-tightening effect to prevent positive backflow, however, such a '. The structure has a preventive (four) system, but the (four) (four) ring (1), 7 1342831 has a groove 218 surrounding the periphery of the opening 213, and a groove 217 surrounding the periphery of the outlet temporary cavity 215, mainly by being disposed in the grooves 217 and 218. The inner seal ring 26 tightly fits the valve body seat 21 and the valve body film 23 to prevent leakage of fluid. Please refer to the second figure B and cooperate with the second figure A, wherein the second figure B is a schematic view of the back structure of the valve body cover shown in the second figure A. As shown, the valve body cover 22 has an upper structure. The surface 220 and the lower surface 228, and the valve body cover 22 also has an inlet wide door passage 221 and an outlet valve passage 222 extending through the upper surface 220 to the lower surface 228, and the inlet valve passage 221 is disposed in the valve body seat. The opening 213 of the 21 corresponds to the position, and the outlet valve passage 222 is disposed at a position corresponding to the opening 214 in the outlet temporary chamber 215 of the valve body seat 21, and between the valve body film 23 and the valve body cover 22 The first temporary storage chamber formed is the inlet temporary storage chamber 223 shown in the drawing, and is not limited thereto, and is disposed at a position corresponding to the inlet valve passage 221 by the lower surface 228 of the valve body cover 22 A portion of the recess is formed and communicated with the inlet valve passage 221, wherein the minimum diameter of the inlet temporary chamber 223 of the present case is greater than the diameter of the inlet passage 211, that is, the inlet valve passage 221 is larger than the inlet passage 211. The diameter of the opening 213, thus introducing the fluid Flow rate than the case would not have reflux or weaken it occurs. Referring to FIG. 2A again, the upper surface 220 of the valve body cover 22 is partially recessed to form a pressure chamber 226 corresponding to the actuator 242 of the actuator 24, the pressure chamber 226 It is connected to the inlet temporary storage chamber 223 via the inlet valve passage 221 and simultaneously connected to the outlet valve passage 222 12 1342831. Therefore, when the actuator 242 is actuated by the voltage to deform the actuator device 24, the pressure chamber 226 is caused. The volume expands to create a negative pressure differential that allows fluid to flow through the inlet valve passage 221 into the pressure chamber 226 (as shown in Figure 4B), after which, when the direction of the electric field applied to the actuator 242 changes, The actuator 242 will deform the actuator 24 to contract the pressure chamber 226 to reduce the volume, causing the pressure chamber 226 to create a positive pressure differential from the outside, causing fluid to flow out of the pressure chamber 226 from the outlet valve passage 222. At the same time, some of the fluid will flow into the inlet valve passage 221 and the inlet temporary chamber 223. However, since the inlet valve structure 231 (shown in FIG. 4C) at this time is in a state of being closed by pressure, The fluid does not pass through the inlet wide The phenomenon of backflow occurs in 2313. As for the fluid temporarily stored in the inlet temporary chamber 223, the actuator 242 is again actuated by the voltage, and the actuator 24 is repeatedly deformed again to increase the volume of the pressure chamber 226. Then, the inlet temporary storage chamber 223 flows into the pressure chamber 226 through the inlet valve passage 221 to perform fluid transportation. In addition, as shown in FIG. 4A, the valve body cover 22 also has a plurality of groove structures. In the embodiment, the upper surface 220 of the valve body cover 22 has a surrounding pressure chamber 226. The recess 227 has a recess 224 disposed around the inlet temporary cavity 223 on the lower surface 228, and a groove 229 disposed around the outlet valve passage 222 (as shown in FIG. 4B). The groove structure is used for a sealing ring 27 to be disposed therein, and the valve body cover 22 and the valve body film 23 are closely adhered to each other mainly by the sealing ring 27 disposed in the grooves 224 and 229 to prevent fluid. The seal ring 27 disposed in the recess 227 is used to tighten the actuating film 241 of the actuating device 13 and the body cover 22 to prevent fluid venting (as shown in Figure 4A). Show).贴0 Please refer to the second figure A, the body film 23 main or yellow light _, or laser to, or electricity such as I, money ^ ^ way to make 'and a thickness of substantially the same sheet structure ί The lock space switch includes the first-to-inter switch and the second open switch. In the present embodiment, the first valve open relationship is the inlet valve structure 23 and the first-open relationship is between the outlets η έ 谌 丄 丄 丄 - In 1 ancient, the population valve structure plus two has an entrance 2313 and a number of surrounding population (four) 2313. Further, the hollow hole 2312 is further disposed. Further, between the holes 2312, the extending portion 23u connected to the two valve piece 2313 is further provided. When the valve body film 23 bears a stress transmitted from the pressure chamber 226, In the four figures [the non-inlet valve structure 231 is entirely flat on the valve body seat 21, the two-port valve piece 2313 will be in close contact with the horizontal contact hole of the micro-convex structure 216 to seal the opening of the valve body seat 21 D213 'The outer hollow/_〇 and the extension 2311 are floated on the valve body seat 21, so that the closing of the inlet valve structure 231 prevents the fluid from flowing out. - Referring again to Figure 2A and in conjunction with Figure 4A, the edge of the opening 213 of the valve body seat 210 is surrounded by a micro-convex structure comprising a horizontal contact surface 2161 and a flow guiding surface 2162. The horizontal contact surface 2 (6) is abutting against the inlet valve piece 2313 of the inlet valve structure 231 for applying a pre-stress to the inlet valve structure 23 and the flow guiding surface 2162 can be a beveled surface and the flow guiding surface 2162 may be disposed at a wall edge of the micro-convex structure 216 corresponding to the opening π 213, and the surface of the micro-convex structure μ 14 1342831 contacting the inlet valve structure 231 is a horizontal contact surface 2161 type, and the inlet channel 211 The opposite wall end edge of the opening 213 of the connection is a lead-angled slope type. Once the outlet valve structure 232 is opened to release the fluid, the inlet valve structure 231 of the interlayer film 23 can still form a closed portion with the micro-convex structure 216. The contact of the surface can produce a larger and better pre-covering effect against backflow. Referring to FIG. 2B again, in conjunction with FIG. 4A, a micro-convex structure 225 is disposed around the edge of the outlet valve passage 222 of the lower surface 228 of the valve body cover 22, which includes a horizontal contact surface 2251 and a The flow guiding surface 2252 is abutting against the outlet valve piece 2323 of the outlet valve structure 232 for applying a pre-force to the outlet valve structure 232, and the flow guiding surface 2252 can be a lead angle bevel. The flow guiding surface 2252 can be disposed at a wall edge of the micro-convex structure 225 corresponding to the outlet valve passage 222, and the surface of the micro-convex structure 225 contacting the outlet valve structure 232 is a horizontal contact surface 2251 type, and The opposite wall end edge of the outlet valve passage 222 is in the shape of a beveled angle. Once the inlet valve structure 231 is opened to allow fluid to flow into the interior of the valve body seat 21, the outlet valve structure 232 of the valve body membrane 23 can still be slightly convex. The structure 225 forms a closed face contact that produces a greater and better pre-tightening effect against backflow. Of course, the above-mentioned micro-convex structures 216 and 225 can be formed directly on the valve body seat 21 and the valve body cover 22 by using a semiconductor process, such as a yellow light or key film or electroforming technology, or directly with the valve body. The seat 21 and the valve body cover 22 are integrally formed by injection molding so that a gap of 15 1342831 is generated between the valve body film 23 and the valve body seat 21 and the valve body film 23 and the valve body cover 22, respectively. The inlet valve structure 231 and the outlet valve structure 232 are pushed up to create a preload that assists in opening. When the valve body film 23 is subjected to the suction generated by the volume increase of the pressure chamber 226, since the micro-convex structure 216 provided on the valve body seat 21 has provided the inlet valve structure 231-pre-force, the inlet valve piece 2313 can be used by The support of the extension 2311 produces a greater pre-covering effect to prevent backflow, and when the inlet valve structure 231 is displaced due to the negative pressure of the pressure chamber 226 (as shown in Figure 4B), at this point, the fluid Then, it can flow from the valve body seat 21 to the inlet temporary storage chamber 223 of the valve body cover body 22 through the hollow hole 2312, and is transferred into the pressure chamber 226 through the inlet temporary storage chamber 223 and the inlet valve passage 221, so that The inlet valve structure 231 can be quickly opened or closed in response to the positive and negative pressure differentials generated by the pressure chamber 226 to control fluid ingress and egress and prevent fluid from flowing back to the valve body seat 21. Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. However, the direction of the micro-convex structure 225 abutting the outlet valve structure 232 is opposite to the micro-convex structure 216 abutting the inlet valve structure 231, as shown in FIG. 4C, and thus the pressure chamber 226 is compressed. When a thrust is generated, the micro-convex structure 225 disposed on the lower surface 228 of the valve body cover 22 will provide the outlet valve structure 232 - Preforce, such that the outlet valve piece 2323 can be made larger by the support of the extension 2321. The pre-covering effect to prevent backflow, when the outlet valve structure 232 is displaced due to the positive pressure of the pressure chamber 226, at this time, the fluid can be passed from the pressure chamber 226 through the valve body cover via the hollowed out 16 1342831 hole 2322 The body 22 flows into the outlet temporary chamber 215 of the valve body seat 21 and can be discharged through the opening 214 and the outlet passage 212. Thus, the fluid can be opened via the mechanism of the outlet valve structure 232. The escape of the pressure chamber 226 to achieve a function of fluid delivery. Please refer to FIG. 4A, which is a schematic cross-sectional view of the AA of the fluid delivery device shown in FIG. B in the unactuated state. In the embodiment, the opening 213 is disposed on the upper surface 210 of the valve body seat 21. The micro-convex structure 216 can make the inlet valve piece 2313 of the inlet valve structure 231 of the valve body film 23 disposed on the valve body seat 21 form a downward bulge due to the micro-convex structure 216, and the rest of the valve body film 23 The portion is abutted against the valve body cover 22, such that the micro-convex structure 216 pushes the inlet valve 231 to generate a pre-stressing effect, which contributes to a greater pre-covering effect to prevent backflow, and due to the micro-convex structure The horizontal contact surface 2161 of the 216 is located at the inlet valve structure 231 of the valve body film 23, so that the inlet valve structure 231 has a gap between the inlet valve piece 2313 and the upper surface 210 of the valve body seat 21 when the inlet valve structure 231 is not actuated. The micro-convex structure 225 disposed at the edge of the outlet valve passage 222 is disposed on the lower surface 228 of the valve body cover 22, so that the outlet valve piece 2323 of the outlet valve structure 232 of the valve body film 23 can be convex upward. Out, this micro-convex 225 only in a direction 216 with raised structures based reverse setting, but its functions are the same as defined above, and thus omitted herein. Please refer to the fourth drawing A, B, C at the same time. As shown in the figure, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the sealing ring 26 and the valve body seat 21 are assembled correspondingly with each other, Thereafter, the opening 213 in the valve body seat 21 corresponds to the inlet valve structure 231 on the valve body membrane 23 and the inlet door passage 221 on the valve body cover 22 17 1342831 '·, and the opening 214 on the wide body seat And corresponding to the exit tapping on the valve body film 23 and the outlet valve passage 222 on the valve body cover 22', and since the micro-convex structure 216 is disposed at the edge of the opening 213 of the valve body seat 21, the valve body film The inlet valve structure 2M of 23 is slightly protruded above the valve body seat 21, and generates a pre-force by the micro-convex structure 216 contacting the valve body film 23, so that the door structure 23 of the inlet door is not actuated. The upper surface 21 of the valve body seat 21 defines a gap. Similarly, the outlet valve structure 232 also causes the outlet valve structure 232 and the body cover by placing the micro-convex milk on the valve body cover 22. The lower surface 228 of the body 22 forms a gap. When the actuator 242 is driven by a voltage, the actuator 24 is deformed. As shown in FIG. 4, the actuator 24 is bent downward in the direction indicated by the arrow c, so that the pressure chamber is pressed. The volume of the chamber 226 is increased, thereby creating a suction force that causes the inlet valve structure 231 of the valve body membrane 23, the outlet valve structure 232 to withstand a downward pulling force, and the inlet valve piece 2313 of the inlet valve structure 231 having a pre-forced force to be rapidly Opening (as shown in FIG. 4B) 'allows a large amount of liquid to be sucked in from the inlet passage 211 on the valve body seat 21, and flows through the opening 213 on the valve body seat 21, the inlet valve on the valve body film λ The hole 231 of the structure 231, the inlet temporary cavity 223 on the valve body cover 22, and the inlet valve passage 221 flow into the pressure chamber 226. In addition, since the minimum diameter of the inlet temporary cavity 223 of the present case is larger than the inlet passage The pipe diameter of 211, that is, the inlet valve passage 221 is larger than the diameter of the opening 213 connected to the inlet port 211, so that the flow rate of the introduced fluid does not return or weaken. 18 1342831 At this time, since the inlet valve structure 231 of the valve body film 23 and the exit gate structure 232 are subjected to the downward pulling force, the outlet valve structure 232 located at the other end is located at the intermediate film 23 due to the downward pulling force. The upper exit piece 2323 seals the outlet valve passage milk, and the outlet door structure 232 is closed. The surface of the micro-convex structure cut and the exit door structure is in contact with the exit door structure. The surface is a horizontal contact surface 2251 type and is exported. The wall end edge of the valve passage milk is a lead-angled slope type. When the population valve structure 231 is opened and the fluid flows into the valve body seat 21, the outlet valve structure 232 of the valve body film can still be combined with the micro-convex structure milk. The contact forming a closed face can produce a larger and better pre-covering effect against backflow. When the actuating device 24 is bent upward due to the change of the electric field direction as shown in the fourth figure c, it is compressed. The volume of the pressure chamber 226, the pressure chamber 226 generates a thrust to the internal fluid, and the inlet valve structure 231 of the interlayer film 23, the outlet valve structure is subjected to an upward direction, and is disposed on the micro-convex structure 225. The outlet valve structure 232 === 2323 can be quickly opened (as shown in the fourth figure c), and the liquid is in the middle of the summer, and the outlet valve passage 222 is connected by the house chamber 226 via the valve body cover. The m322 of the outlet valve structure 232 on the valve body film 23, the outlet temporary storage chamber 215 on the valve body seat 21, and the opening are called the 2 body conveying device 2, thereby completing the fluid transfer process, and similarly, The inlet door structure 231 is subjected to the thrust, so that the inlet piece 2313 seals the opening 2=_inlet_structure 231' and the surface of the micro-convex structure 216 in contact with the door structure 231 is a horizontal contact surface (four) type 19 丄 [Simple description of the diagram] Figure A: This is a schematic cross-sectional view of a conventional micro-pumped structure. ^ θ β· is a schematic diagram of the expansion state of the pressure chamber of the first diagram A. ★ Figure C. It is a schematic diagram of the pressure chamber compression state of the first diagram a. Figure A • The structure of the fluid delivery device of the preferred embodiment of the present invention is not intended. First Figure B is a schematic illustration of the back structure of the valve body cover shown in Figure 2a. Third figure: It is a schematic diagram of the assembled structure of the second figure A. Figure 4A is a schematic cross-sectional view of the A-A of the fluid delivery device shown in Figure 2b. Figure 4B is a schematic view showing the state of expansion of the pressure chamber of Figure 4A. Figure 4C is a schematic view showing the compression state of the pressure chamber of Figure 4A.
21 1342831 【主要元件符號說明】 微泵浦結構：1 〇 閥體座：11、21 入口通道：Π1、211 最小管徑：1111 出口通道：112、212 密封環：113、125 出口暫存腔：114、215 閥體蓋體：12、22 土口閥門通道：121、221 出口閥門通道：122、222 壓力腔室：123、226 入口暫存腔·· 124、223 閥體薄膜：13、23 入口閥門結構：131、231 ^_閥門結構·· 132、232 微致動器：14 蓋體：15、25 流體輸送裝置：20 上表面：210 開口 ： 213、214 微凸結構：216、225 水平接觸面：2161、2251 導流面：2162、2252 下表面：228 延伸部：2311、2321 孔洞：2312、2322 入口閥片：2313 出口閥片：2323 置：24 致動薄膜：241 致動器：242 — 密封環：26、27 凹槽：217、218、224、227、 1----— 229 2221 1342831 [Explanation of main component symbols] Micro-pump structure: 1 〇 valve body seat: 11, 21 inlet channel: Π 1, 211 minimum pipe diameter: 1111 outlet channel: 112, 212 sealing ring: 113, 125 outlet temporary cavity: 114, 215 valve body cover: 12, 22 earth port valve channel: 121, 221 outlet valve channel: 122, 222 pressure chamber: 123, 226 inlet temporary cavity · · 124, 223 valve body film: 13, 23 entrance Valve structure: 131, 231 ^ _ valve structure · · 132, 232 micro actuator: 14 cover: 15, 25 fluid delivery device: 20 upper surface: 210 opening: 213, 214 micro convex structure: 216, 225 horizontal contact Surface: 2161, 2251 Guide surface: 2162, 2252 Lower surface: 228 Extension: 2311, 2321 Hole: 2312, 2322 Inlet valve: 2313 Outlet valve: 2323 Place: 24 Actuating film: 241 Actuator: 242 — Sealing ring: 26, 27 Groove: 217, 218, 224, 227, 1----- 229 22