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TWI368271B - Equipment and method for cutting big size wafer - Google Patents

Equipment and method for cutting big size wafer

Info

Publication number
TWI368271B
TWI368271B TW097124953A TW97124953A TWI368271B TW I368271 B TWI368271 B TW I368271B TW 097124953 A TW097124953 A TW 097124953A TW 97124953 A TW97124953 A TW 97124953A TW I368271 B TWI368271 B TW I368271B
Authority
TW
Taiwan
Prior art keywords
equipment
big size
size wafer
cutting big
cutting
Prior art date
Application number
TW097124953A
Other languages
English (en)
Other versions
TW201003761A (en
Inventor
Li Chih Fang
Chun Hsien Liu
Original Assignee
Powertech Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powertech Technology Inc filed Critical Powertech Technology Inc
Priority to TW097124953A priority Critical patent/TWI368271B/zh
Priority to JP2008209233A priority patent/JP2010016324A/ja
Priority to US12/194,275 priority patent/US20100000384A1/en
Publication of TW201003761A publication Critical patent/TW201003761A/zh
Application granted granted Critical
Publication of TWI368271B publication Critical patent/TWI368271B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • H10P54/00—
    • H10P72/0428—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D9/00—Cutting apparatus combined with punching or perforating apparatus or with dissimilar cutting apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/04—Processes
    • Y10T83/0524—Plural cutting steps
    • Y10T83/0572—Plural cutting steps effect progressive cut

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
TW097124953A 2008-07-02 2008-07-02 Equipment and method for cutting big size wafer TWI368271B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW097124953A TWI368271B (en) 2008-07-02 2008-07-02 Equipment and method for cutting big size wafer
JP2008209233A JP2010016324A (ja) 2008-07-02 2008-08-15 大尺寸ウェハの切割方法、及び、その設備
US12/194,275 US20100000384A1 (en) 2008-07-02 2008-08-19 Method for cutting large-size wafer and apparatus for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097124953A TWI368271B (en) 2008-07-02 2008-07-02 Equipment and method for cutting big size wafer

Publications (2)

Publication Number Publication Date
TW201003761A TW201003761A (en) 2010-01-16
TWI368271B true TWI368271B (en) 2012-07-11

Family

ID=41463333

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097124953A TWI368271B (en) 2008-07-02 2008-07-02 Equipment and method for cutting big size wafer

Country Status (3)

Country Link
US (1) US20100000384A1 (zh)
JP (1) JP2010016324A (zh)
TW (1) TWI368271B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8598016B2 (en) * 2011-06-15 2013-12-03 Applied Materials, Inc. In-situ deposited mask layer for device singulation by laser scribing and plasma etch

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6103055A (en) * 1986-04-18 2000-08-15 Applied Materials, Inc. System for processing substrates
US5292393A (en) * 1986-12-19 1994-03-08 Applied Materials, Inc. Multichamber integrated process system
JP4220173B2 (ja) * 2002-03-26 2009-02-04 株式会社日立ハイテクノロジーズ 基板の搬送方法
JP2004047823A (ja) * 2002-07-12 2004-02-12 Tokyo Seimitsu Co Ltd ダイシングテープ貼付装置およびバックグラインド・ダイシングテープ貼付システム
JP2006278630A (ja) * 2005-03-29 2006-10-12 Lintec Corp ウエハ転写装置
JP4895671B2 (ja) * 2006-05-08 2012-03-14 株式会社ディスコ 加工装置

Also Published As

Publication number Publication date
US20100000384A1 (en) 2010-01-07
TW201003761A (en) 2010-01-16
JP2010016324A (ja) 2010-01-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees