TWI272381B - Visual check apparatus and inspection system - Google Patents
Visual check apparatus and inspection system Download PDFInfo
- Publication number
- TWI272381B TWI272381B TW94113097A TW94113097A TWI272381B TW I272381 B TWI272381 B TW I272381B TW 94113097 A TW94113097 A TW 94113097A TW 94113097 A TW94113097 A TW 94113097A TW I272381 B TWI272381 B TW I272381B
- Authority
- TW
- Taiwan
- Prior art keywords
- illumination
- substrate
- light
- information
- visual confirmation
- Prior art date
Links
- 230000000007 visual effect Effects 0.000 title claims abstract description 68
- 238000007689 inspection Methods 0.000 title claims description 73
- 238000005286 illumination Methods 0.000 claims abstract description 269
- 238000012790 confirmation Methods 0.000 claims abstract description 105
- 239000000758 substrate Substances 0.000 claims abstract description 103
- 230000007246 mechanism Effects 0.000 claims abstract description 90
- 230000004044 response Effects 0.000 claims abstract description 4
- 206010035148 Plague Diseases 0.000 claims description 9
- 241000607479 Yersinia pestis Species 0.000 claims description 9
- 230000008520 organization Effects 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 7
- 238000003384 imaging method Methods 0.000 description 57
- 238000012545 processing Methods 0.000 description 32
- 238000011179 visual inspection Methods 0.000 description 28
- 238000000034 method Methods 0.000 description 19
- 239000000463 material Substances 0.000 description 18
- 238000004891 communication Methods 0.000 description 13
- 230000006870 function Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
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- 230000008859 change Effects 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
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- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
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- 241001330002 Bambuseae Species 0.000 description 1
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Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004241315A JP2006058170A (ja) | 2004-08-20 | 2004-08-20 | 目視確認装置および検査システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200608005A TW200608005A (en) | 2006-03-01 |
| TWI272381B true TWI272381B (en) | 2007-02-01 |
Family
ID=36080421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW94113097A TWI272381B (en) | 2004-08-20 | 2005-04-25 | Visual check apparatus and inspection system |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2006058170A (ja) |
| CN (1) | CN100495000C (ja) |
| TW (1) | TWI272381B (ja) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4970901B2 (ja) * | 2006-10-30 | 2012-07-11 | 株式会社メガトレード | 目視検査装置、および、当該目視検査装置のレビュー機を動作させるためのコンピュータープログラム |
| CN101393137B (zh) * | 2008-10-24 | 2011-02-02 | 胡伟 | 一种产品外观质量检测系统及产品外观质量检测设备 |
| CN101922996B (zh) * | 2009-06-17 | 2012-03-28 | 财团法人金属工业研究发展中心 | 检测光源的选用方法及其系统 |
| CN101826289B (zh) * | 2010-05-11 | 2012-06-27 | 友达光电股份有限公司 | 测试装置 |
| CN102374994A (zh) * | 2010-08-18 | 2012-03-14 | 全友电脑股份有限公司 | 自动光学检测系统以及自动光学检测方法 |
| JP2016070800A (ja) * | 2014-09-30 | 2016-05-09 | 株式会社Ｓｃｒｅｅｎホールディングス | 観察支援装置、観察支援方法およびプログラム |
| TWI542869B (zh) * | 2015-03-03 | 2016-07-21 | Machvision Inc | Automatic dimming method for optical detection and its optical inspection machine |
| JP6815787B2 (ja) * | 2016-08-09 | 2021-01-20 | オリンパス株式会社 | 観察装置、観察装置の制御方法及び観察装置の制御プログラム |
| JP2018059830A (ja) * | 2016-10-06 | 2018-04-12 | 川崎重工業株式会社 | 外観検査方法 |
| TWI630453B (zh) * | 2017-11-22 | 2018-07-21 | 牧德科技股份有限公司 | 投影式複檢機及其校正方法 |
| JP7178171B2 (ja) * | 2017-12-28 | 2022-11-25 | 日立Ｇｅニュークリア・エナジー株式会社 | 欠陥検査方法、および、欠陥検査システム |
| DE102018201957A1 (de) * | 2018-02-08 | 2019-08-08 | Krones Ag | Verfahren zum Kontrollieren von Flaschenzellen und Flaschenreinigungsmaschine |
| JP6638098B2 (ja) * | 2019-01-29 | 2020-01-29 | 株式会社キーエンス | 検査装置 |
| JP7415264B2 (ja) * | 2019-11-18 | 2024-01-17 | マツダ株式会社 | 歯車の検査装置 |
| JP2023017485A (ja) * | 2021-07-26 | 2023-02-07 | マクセル株式会社 | 確認作業支援システム、確認作業支援方法及び確認作業支援プログラム |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4331306B2 (ja) * | 1999-03-17 | 2009-09-16 | オリンパス株式会社 | 画像取込み装置 |
| JP2003256814A (ja) * | 2002-02-27 | 2003-09-12 | Olympus Optical Co Ltd | 基板検査装置 |
| CN1459628A (zh) * | 2002-05-24 | 2003-12-03 | 由田新技股份有限公司 | 电路板板材表面瑕疵检测即时汇报装置 |
-
2004
- 2004-08-20 JP JP2004241315A patent/JP2006058170A/ja not_active Abandoned
-
2005
- 2005-04-25 TW TW94113097A patent/TWI272381B/zh not_active IP Right Cessation
- 2005-05-20 CN CNB200510071396XA patent/CN100495000C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1737548A (zh) | 2006-02-22 |
| JP2006058170A (ja) | 2006-03-02 |
| TW200608005A (en) | 2006-03-01 |
| CN100495000C (zh) | 2009-06-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |