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TWI260639B - Charge injection - Google Patents

Charge injection Download PDF

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Publication number
TWI260639B
TWI260639B TW092100296A TW92100296A TWI260639B TW I260639 B TWI260639 B TW I260639B TW 092100296 A TW092100296 A TW 092100296A TW 92100296 A TW92100296 A TW 92100296A TW I260639 B TWI260639 B TW I260639B
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TW
Taiwan
Prior art keywords
bit
programming
volts
voltage
dual
Prior art date
Application number
TW092100296A
Other languages
Chinese (zh)
Other versions
TW200302486A (en
Inventor
Darlene G Hamilton
Janet S Y Wang
Narbeh Derhacobian
Tim Thurgate
Michael K Han
Original Assignee
Advanced Micro Devices Inc
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Priority claimed from US10/050,483 external-priority patent/US6567303B1/en
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of TW200302486A publication Critical patent/TW200302486A/en
Application granted granted Critical
Publication of TWI260639B publication Critical patent/TWI260639B/en

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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3404Convergence or correction of memory cell threshold voltages; Repair or recovery of overerased or overprogrammed cells
    • G11C16/3409Circuits or methods to recover overerased nonvolatile memory cells detected during erase verification, usually by means of a "soft" programming step
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5657Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using ferroelectric storage elements
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5671Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using charge trapping in an insulator
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0466Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
    • G11C16/0475Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS] comprising two or more independent storage sites which store independent data
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3436Arrangements for verifying correct programming or erasure
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3436Arrangements for verifying correct programming or erasure
    • G11C16/344Arrangements for verifying correct erasure or for detecting overerased cells
    • G11C16/3445Circuits or methods to verify correct erasure of nonvolatile memory cells
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/10Programming or data input circuits
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/06Auxiliary circuits, e.g. for writing into memory
    • G11C16/34Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
    • G11C16/3404Convergence or correction of memory cell threshold voltages; Repair or recovery of overerased or overprogrammed cells

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Non-Volatile Memory (AREA)
  • Read Only Memory (AREA)
  • Semiconductor Memories (AREA)

Abstract

A system and methodology is provided for programming first bit (C0, C2, C4, C6) and second bit (C1, C3, C5, C7) of a memory array (68) of dual bit memory cells (10, 82, 84, 86, 88) at a substantially high delta VT. The substantially higher VT assures that the memory array (68) will maintain programmed data and erase data consistently after higher temperature stresses and/or customer operation over substantial periods of time. At a substantially higher delta VT, programming of the first bit (CO, C2, C4, C6) of the memory cell (10, 82, 84, 86, 88) causes the second bit (C1, C3, C5, C7) to program harder and faster due to the shorter channel (8) length. Therefore, the present invention employs selected gate and drain voltages and programming pulse widths during programming of the first bit (C0, C2, C4, C6) and second bit (C1, C3, C5, C7) that assures a controlled first bit VT and slows down programming of the second bit (C1, C3, C5, C7). Furthermore, the selected programming parameters keep the programming times short without degrading charge loss.

Description

1260639 九、發明說明: 【發明所屬之技術領域】 本發明係大致有關記憶體系統,尤係有關一種在使用 虛擬接地(virtual ground)架構,且在具有雙位元記憶電 晶體單元的電子快閃記憶體裝置中,用來編程及抹除數2 . 位元區段之系統及方法。 【先前技術】 快閃記憶體是一種可被重新寫入且可在沒有供電的情 形下保持其内容之電子記憶體媒體。快閃記憶體裝置通常籲 有10萬-人至30萬次寫入週期的使用壽命。與可抹除單 一位元組的動態隨機存取記憶體(Dynamic Rand〇m AaMs Memory,簡稱DRAM)及靜態機存取記憶體(Statie Random Access Memory;簡稱SRAM)的記憶體晶片不同, L系係以固疋多個位元的區塊或區段為單位對快閃記憶體 進行抹除及寫入。快閃記憶體係由可在原位置進行抹除的 電氣可抹除可程式唯讀記憶體(Electrieally Erasable1260639 IX. Description of the Invention: [Technical Field] The present invention relates generally to a memory system, and more particularly to an electronic flash using a virtual ground architecture and having a dual bit memory transistor unit A system and method for programming and erasing a number of bit segments in a memory device. [Prior Art] A flash memory is an electronic memory medium that can be rewritten and can retain its contents without power supply. Flash memory devices typically dictate a lifetime of 100,000-to-300,000 write cycles. Unlike a memory chip that can erase a single byte of Dynamic Random Access Memory (DRAM) and Static Memory Access Memory (SRAM), L system The flash memory is erased and written in units of blocks or segments of a plurality of bits. Flash memory system is electrically erasable programmable read-only memory (Electrieally Erasable) that can be erased in the original position

Programmable Read Only Memory ;簡稱 EEPROM)進展而· 來,快閃兄憶體具有較低的成本及較高的元件密度。此種 新的EEPROM類型已發展成一種結合了 EpR〇M的高元件 密度及EEPROM的可以電氣抹除這兩項優點之重要的非 揮發性記憶體。 —一傳,,快閃記憶體係以一種將單一位元的資訊儲存在 母一纪憶單元的記憶單元結構來建構。在此種單一位元記 L體木構中’每—$憶單元通常包含—金屬氧化物半導體 92257(修正版) 6 1260639 (Metal Oxide Semiconductor · - ^ 节社槿且右/ a ,間稱M〇s)電晶體結構, ::或”井中之-源極、-汲極、及- =^ 該通道之上的堆疊式間極結構。該堆疊Programmable Read Only Memory; referred to as EEPROM) Progressively, Flash Flash has a lower cost and higher component density. This new type of EEPROM has evolved into a non-volatile memory that combines the high component density of EpR〇M with the EEPROM's ability to electrically erase these two advantages. - One pass, the flash memory system is constructed by storing a single bit of information in the memory unit structure of the parent. In this single-bit L-body structure, the 'per-$ mem unit usually contains—metal oxide semiconductor 92257 (revision) 6 1260639 (Metal Oxide Semiconductor · - ^ 槿 槿 and right / a, nickname M 〇s) transistor structure, :: or "well - source, - drain, and - = ^ stacked interpole structure above the channel. The stack

式閘極可進一步包令為# P 質層(有時被稱為随道氧::)井= 在該_匕物之上二:式陶包含覆蓋 間極之上的多晶石夕間介質二夕及覆蓋在該浮接 、曰 ϋ亥夕晶梦間之介曾声ϋ堂早 =絕緣體例如具有兩個氧化物層而在其間夹二個氮 € C〇Xide-Ni^-0^ 0N0)層。最後,—多晶發控制閘 矽間之介質層之上。 復皿於4夕日日 一字Γ制Γ係連接到與一列與此種記憶單元相關聯之 以便以典型的峨組態而形成若干區段的此種 二:::在::,:及,該等記憶單元係由-導電位元線 在、 e ° 4早几的通道根據該堆疊式閘極結構 逞 生的電場,而在源極與汲 =0R組態中,單一行内的各電晶體之每^丨 晶^相同的位讀。此外,每—快閃記憶單元係使其堆 f端連接到不㈣字線,而陣财所有的快閃記情 体錢其源極端連接到共同源極端。在作業中,個別的 的閃把憶單元係利用周邊的解石馬器及控制電路而經由各別 兀線及字線而加以定址’以便執行編程(寫入)、 或抹除功能。 、 壓 此種單-位元的堆疊.極快閃記憶單元係將—電 92257(修正版) 7 1260639 把加到控制閘極,並將 源極電位之預定^ 將及極連接到高於該 所妒w:: 編程。跨越隧道氧化物兩端 y 冋电琢冒導致一種被稱為,,F〇w 隧效應之現象。在該過程中。rdheim牙 7而、w 仕T早兀通道區的雷 中牙S’::::而進入浮接閘極,且被困陷在浮接閘極 包圍。被多晶败介質及隧道氧化物所 由於以被困陷的電子,所以該記憶單4臨界電 it 了。由㈣陷的電子產生的記憶單元臨界電壓的改 ·:(及因而造成的通道導電係數之改變)使得該 被編程。 —為了要抹纟型的單—位元堆疊式間極快閃記憶單 凡將電壓施加到源極,並將控制閘極保持在一負電位, 同時可讓汲極浮接。在這些條件下,在介於浮接閘極與源 極之間之㈣氧化物兩端產生了—電場。原先被困陷在浮 接閘極中的電子朝向浮制極中覆蓋在祕區之上的部分 机動’亚群集在該部分中,且自浮接閘極粹取出來並在 hwler-Nordheim穿随效應下經由隨道氧化物而進入源極 區。當自浮接閘極移開該等電子時,即抹除了該記憶單元。 在傳統的單一位元快閃記憶體裝置中,要執行一抹除 ,以便決定是否已正確地抹除了一區塊或一組此種記 ^單7L中之每一記憶單元。目前的單一位元抹除確認方法 提供了確認位元或記憶單元的抹除,並將補充抹除脈波施 加到個別的記憶單元,此種方法無法通過初始的確認。然 後再度確認該已抹除之記憶單元的狀態,繼續執行該程 92257(修正版) 8 1260639The gate can be further ordered as a #P layer (sometimes referred to as a channel oxygen::) well = above the 匕 substance: the pottery contains a polycrystalline intergranular medium overlying the interpole On the eve of the eve, and covering the floating, the 曰ϋ 夕 晶 晶 之 曾 曾 = = = = = = = = = = = = = = = = 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘 绝缘)Floor. Finally, the polycrystalline control gate is above the dielectric layer between the turns. The splicing system is connected to a column associated with such a memory unit to form a plurality of segments in a typical 峨 configuration::: at::,: and, The memory cells are based on the electric field generated by the -conducting bit line in the channel of e ° 4 according to the stacked gate structure, and in the source and 汲 = 0R configuration, the transistors in a single row Each bit reads the same bit. In addition, each flash memory unit is connected to the (four) word line, and all the flash memory sources are connected to the common source terminal. In the operation, individual flash memory cells are addressed via respective ridges and control circuits via respective squall lines and word lines to perform programming (writing), or erase functions. The single-bit stack is pressed. The ultra-fast flash memory unit is applied to the control gate, and the predetermined potential of the source potential is connected to be higher than the The sow:: programming. Crossing the two ends of the tunnel oxide y 冋 琢 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致 导致In the process. Rdheim teeth 7 and w Shi T early in the channel area of the thunder tooth S':::: and entered the floating gate, and trapped in the floating gate surrounded. The memory of the polycrystalline media and the tunnel oxide is trapped by the trapped electrons. The change of the threshold voltage of the memory cell generated by the (four) trapped electrons: (and thus the change in the channel conductivity) causes the program to be programmed. - In order to erase the type of single-bit stacked inter-flash memory, the voltage is applied to the source and the control gate is held at a negative potential, and the drain is floated. Under these conditions, an electric field is generated across the (four) oxide between the floating gate and the source. The part of the maneuvering sub-cluster that was originally trapped in the floating gate and covered in the floating pole over the secret zone is in this part, and the self-floating gate is taken out and worn in hwler-Nordheim. Entering the source region via the accompanying oxide with the effect. When the electrons are removed from the floating gate, the memory unit is erased. In a conventional single bit flash memory device, an erase is performed to determine whether a memory block or a group of such memory cells 7L has been erased correctly. The current single bit erase confirmation method provides an erase of the acknowledgment bit or memory cell and applies the complementary erase pulse to the individual memory cells. This method cannot pass the initial confirmation. Then confirm the status of the erased memory unit and continue the process. 92257 (Revised) 8 1260639

序’直到成功地抹除了該記憶單元或位元Order until the memory unit or bit is successfully erased

…,、’此崎的改良式編程及抹除方法及系統將可確保 正確地編程及抹除雙位元記憶體虛擬接地架構中之資料位 元,並可應付此種架構的結構特性。 凡或位元或者該記憶單元. J圯惊早元,此種快閃記憶 單一記憶單元中。在單一位 統之編程及抹除確認方法不 ’已採用了並不使用多晶矽 結構,例如一種在ΟΝΟ層 字線連接之0Ν0快閃記憶 疼這類裝置相關聯之特性。鲁 所的改良式編程及抹除方法 【發明内容】 本發明提供了-種在一相當高的電慶差(deltaVT) 之下編程一記憶體陣列的雙位元記憶單元的第一及第二位 =之系統及方法。該相對較高的ντ保證在相當長的一段· 4間中經過較南的溫度應力及(或)客戶操作之後,該記 版陣列仍此一貫地保持所編程的資料並能抹除資料。在 一相對較高的電壓差之,對記憶單元的第一位元之編程會 使對第二位元的編程因較短的通道長度而變得較不易改變 且較快速。因此,本發明在編程第一及第二位元期間,採 用了經過選擇的閘極及汲極電壓、以及編程脈波寬度,此 種方式保證了一受到控制的第一位元ντ,並減緩了對第 9 92257(修正版) 1260639 二位元的編程。此外,亨 電荷耗損變差的情伴抖:二造擇的燒錄參數可在不使 本發明可造行有時間。 因而儘量減少了類似於—⑽〇&雔白、、扁私、抹除、及確認, j生的資料保持及過度抹除問 構形成的雙位元記情 田/、利用一 〇N〇架 發明提供了顯著的;= 雙位元記憶單元架構相關聯的方 不限於任何特定的雙 效用’且本發明並 然與編程雙位元記修單一 用之施行或組態。雖 離了,作是一—:中的早一位元相關聯之電荷被隔 不易改變...,, 'This improved programming and erasing method and system will ensure that the data bits in the dual-bit memory virtual ground architecture are correctly programmed and erased, and the structural characteristics of this architecture can be handled. Where or the bit or the memory unit. J圯 惊 early, this flash memory in a single memory unit. The single-program programming and erase-recognition methods have not used features that do not use polysilicon structures, such as a device such as 0Ν0 flash memory in a layered word line connection. MODIFIED PROGRAMMING AND ERASING METHODS FOR USE OF THE INVENTION The present invention provides a first and a second of a dual bit memory cell for programming a memory array under a relatively high deltaVT Bit = system and method. This relatively high ντ ensures that after a relatively long period of temperature stress and/or customer operation in a relatively long period of time, the stencil array consistently maintains the programmed data and erases the data. At a relatively high voltage difference, programming the first bit of the memory cell causes the programming of the second bit to become less variable and faster due to the shorter channel length. Therefore, the present invention employs the selected gate and drain voltages and the programmed pulse width during programming of the first and second bits, which ensures a controlled first bit ντ and slows down Programming of the 9280639 (Revised) 1260639 two-bit. In addition, the charge loss of the Heng charge is accompanied by the jitter: the second programming parameter can be made without making the invention work for a long time. Therefore, it is possible to minimize the double-dimensional record field similar to - (10) 〇 & white, flat, erase, and confirm, j raw data retention and excessive erasure formation, and use a 〇N〇 The invention provides significant; = the dual-bit memory cell architecture associated with the party is not limited to any particular dual-effects' and the invention is equally applicable to the programming or configuration of the dual-bit programming. Although it is gone, it is one---the early one-element associated with the charge is not easily changed.

的電荷可能聚产在D了早70較難以被抹除。例如,殘留 許人芽貝在5己憶单元的中麥F 獨抹除位元的方W S目而無法以正常單 法包含對除該記憶單元。因此,本系統及方 常位-月心早兀的在同-0N0電晶體的兩相對端之正 月姑=附餘位70 (complimentary bit)的編程、確認、 —矛、Θ抹除包括將—組抹除脈波施加到—單—的雙位| 5憶單元中之該正常位元及附餘位元。該組抹除脈波係 力7 °亥屯日日體的兩端的一個兩端抹除脈波、接著由施 加到端的一單端抹除脈波、以及施加到另一端的一單端 抹除脈波(所構成)。 在本毛明的一個面向中,提供了 一種用來確認一記憶 ,陣列的雙位元快閃記憶單元的抹除之系統及方法。該系 統及方法包括:預先編程各正常行位置及附餘行位置中之 10 92257(修正版) 1260639 二元確認各正常及附餘位元行位置中的位 二=抹除要求在移到次—地址之前,每一位元地址 執、過騎除確認。另外,可對㈤或字線的位元 ^丁抹除 以便在移到次一 1/0或字線之前,&quot;ο的正 及附餘位元都必須通過抹除確認。如果地址之位置 =低於用來界定空白狀態的最大ντ,則施加一組抹除 t °亥、、且抹除脈&gt;皮包括在指定的持續時間(例如10毫秒) 施加到正常及附餘行位置中的位元之—個兩端抹除脈 L、接者在指定的持續時Μ(例如i毫秒)t施加到正常 仃位置及附餘行位置中的—種行位置中的位元之一第一單 端抹除脈波、以及在-指定的持續時間(例如i毫秒)中 知加!!正!!订位置及附餘行位置中的另一種行位置中的位 二之:二I端抹除脈波。重複該等確認及抹除步驟,直到 —區段中的每-正常位元及附餘位元低於用來界定一空白 =單元之最大VT為止。然後針對每一區段而重複該等 ^後》平估δ轉位元,以便決定該等位元是否已被過度 抹=或低於用來界空白記憶單S的最小ντ。將一軟 式転式脈波提供給經決定已被過度抹除的該等位S。該軟 絲式確認應包括低料的源極電壓,以便關掉來自同一 行上的其他記憶單元之漏電流。對正f行位置及附餘行位 置中之位元執行第二或最後確認抹除程序,以便保證該軟 式程式脈波並未使料位元上升則來界定—Μ記憶單 元的最大VT之上。 92257(修正版) 11 1260639 為了達到前文所述的及相關的目的,本發明包含 =中完整說明且於中請專利範圍中明確指出的特徵。下 中之說明及:圖詳細述及了本發明的某些例示面向及實 原二=方=面:及實施例::是象徵了可採用本發明 詳細二人之—些方式。若參照下文中對本發明的 ,亚配s各圖式,將可易於了解本發明的且他目 的、優點、及創新特徵。 八他目 【實施方式】 照各附圖而對本發明所作的詳細說明。本發 在雔位元編程(寫人)、確認(讀取)、及正確地抹除 ^位讀式下工作的雙位元記憶單元之方法及系統。可 本=閃=體㈣的晶片抹除或區段抹除作業而使用 &quot; 卜,本發明提供了用來正確地 =元模式下工作的一陣列中之雙位元記憶單元之方隹= 、,、雖然後文中係以與將每一記憶單元的兩個位元用於資 位7&quot;記憶單元架構相關聯之方式示出及 x ’但疋我們當了解,亦可將本發明應用於1他 類型的架構及其他的雙位元架構使用體李。用於/、他 7在請參閱各圖式,第】圖示出可實施本發明的各種 例之。:或多個面向之-例示雙位元記憶單元。〇)。 夾::包含氮化矽層(16)’該氮化矽層(16)係 ίΐϋΓ 14)與下二氧切層(18)之間,而 穴二層,成。Ν層(3。)。—多晶石夕層⑼係設於該〇Ν 曰 上’且提供了記憶單元⑴)的-字線連接。 92257(修正版) 12 1260639 位元線(32)係設於第-區(4)之下的該⑽層⑼) ’二第二位元線(34)係設於第二區⑷之下的該⑽ :)之下。位元線(32)及(34)係由導電部分(24) =由選擇的氧化物部分(22)所構成。在每—位元線 )及(34)的兩端上設有石朋離子核心植入物(2〇),且 f寺位元線係在該等兩端處接觸下二氧切層(18)或广 ^個電晶體。該等娜子核心植人物的摻雜濃度高於P 土材的摻雜濃度,且有助於控制記憶單元(1〇)的v丁。 該記憶單元(1〇)係設於?型基材區(9)上,且 队钟離子植入物形成位元線(32) ⑼,因而跨越該p型基材之間形成了一通道口二 ^早疋⑽係由一單一的電晶體構成,該電晶體具有由該 队坤離子植入部(24)所形成之可交換源極的沒極,該n+石申 離子值入部(24)係與-形成為多晶石夕字線(12)的一部份之 閘極共同設於該p型基材區(9)之上。 雖然第-及第二位元線(32)及(34)係相對於導電 部分(24)及可自由選擇的氧化物部分(22)所圖示,但省 是我們當了解,亦可只利用導電部分形成該等位元線。此 外,雖然第!圖在氮化石夕層(16)中示出若干間隙,但是 我們當了解,亦可以沒有間隙而以單一條或單一層之方式 來製造該氮化矽層(16)。 氮化石夕層(16 )形成_ Φ m α 0 甩何困陷層。該記憶單元的編 程係將電壓施加到汲極及閘極,並將源極接地而完成的。 該電壓沿著該通道而產生電場,而使電子加速,並自基材 92257(修正版) 13 1260639 層(9)跳進該氮化物,而此種現象被稱為熱電子注入 electron injection )。因為該等電子在汲極上得到大部分的 能量’所以該等電子被困陷在且保持儲存在接近汲極的氛 化物層處。記憶單元(10)通常是均勻的,且汲極及源極 是可交換的。因為該氮化石夕不導電,所以可使第一電荷(Μ) 注入氮化物U6)中接近中央區(5)的第一端處,並可使 第二電荷(28)注入氮化物(16)中接近令央區⑸的第 二端處。因此’如果該等位元並未移動,則每一記憶單元 可以有兩個位元,而非一個位元。 如前文所述,可使該第一電荷(26)儲存在氮化物層 (16)中的中央區(5)第一端處,並可使該第二電荷⑶) f:存:氮化物層(16)中的中央區⑴第二端處,因而每 -兄憶单το (1G)可存在有兩個位元。該雙位元記憶單元 (1〇) 一般說來是對稱的,因而汲極及源極是可交換的。 因此,當編程左方位元⑶時,第—位元線(32)可用來 為汲極端’且第二位元線(34)可用來作為源極端。同 f地,當編程右方位時m線⑼)可用來 為及極端’且第—位元線(32)可用來作為源極端。第 』表不出用來對具有第—位元⑶及第二位元^的雙位元 記憶單元(10)執行讀取、編程、及單端抹除之一組特定 的電壓參數。 92257(修正版) 14The charge may be produced in D and early 70 is more difficult to erase. For example, the residual buds of the buds in the 5 mics of the hexagrams are simply erased by the singularity of the singularity. Therefore, the system and the square constant - the early heart of the same -0N0 transistor at the opposite end of the positive moon = the remaining bit 70 (complimentary bit) programming, confirmation, - spear, Θ erase including - The group erase pulse is applied to the two-bit |-memory unit of the normal bit and the residual bit. The group erases the pulse wave force at one end of the 7 ° day of the day, and wipes the pulse wave at both ends, followed by a single-end erase pulse applied to the end, and a single-ended erase applied to the other end Pulse wave (constructed). In one aspect of Ben Maoming, a system and method for erasing a dual bit flash memory unit for a memory and array is provided. The system and method include: pre-programming each of the normal line position and the remaining line position 10 92257 (revision) 1260639 binary confirmation bit 2 of each normal and residual bit line position = erasing request is moved to - Before the address, each bit address is executed, and the ride is confirmed. Alternatively, the bit of the (five) or word line can be erased so that the positive and the remaining bits of &quot;ο must be confirmed by erasing before moving to the next 1/0 or word line. If the location of the address = is lower than the maximum ντ used to define the blank state, then a set of erases is applied, and the erased veins are applied to the normal and attached for a specified duration (eg, 10 milliseconds). The bit in the remaining line position - the two ends erase the pulse L, the bit is applied to the normal position and the position in the line position in the specified line position (for example, i milliseconds) t One of the first single-end erased pulse waves, and in the - specified duration (for example, i milliseconds) knows!! Positive!! Position and the other line position in the remaining line position : The second I end erases the pulse wave. These acknowledgment and erase steps are repeated until the -normal and residual bits in the segment are below the maximum VT used to define a blank = cell. The </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> </ RTI> A soft mode pulse is provided to the bit S that has been determined to have been over erased. The cord confirmation should include a low source voltage to turn off leakage current from other memory cells on the same line. Performing a second or final acknowledgment erase procedure on the bit in the positive f-line position and the residual line position to ensure that the soft program pulse wave does not raise the level bit to define - above the maximum VT of the memory unit . 92257 (Revised) 11 1260639 In order to achieve the foregoing and related objects, the present invention includes the features fully described in the specification and clearly indicated in the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS The drawings illustrate in detail certain exemplary aspects of the invention and the actual two aspects of the invention: and the embodiments: are representative of the ways in which the invention may be employed. The invention, its advantages, and novel features will be readily apparent from the following description of the invention. Eight Objects [Embodiment] The present invention will be described in detail with reference to the accompanying drawings. The present invention relates to a method and system for programming (writing), confirming (reading), and correctly erasing a dual bit memory unit operating under the bit reading mode. The present invention provides a double-bit memory cell in an array for correct operation in the meta-mode using the &quot;flash=body=4 wafer erase or segment erase operation&quot; , and although the following text is shown in association with the use of two bits of each memory unit for the location 7&quot;memory unit architecture and x', but we can understand that the present invention can also be applied to 1 His type of architecture and other two-bit architectures use body Lee. For the sake of /, he is referred to the drawings, and the drawings illustrate various examples in which the present invention can be implemented. : or multiple oriented - instantiate a dual bit memory unit. 〇). The sandwich: comprises a tantalum nitride layer (16)' between the tantalum nitride layer (16) and the lower dioxy-cut layer (18), and the second layer is formed. Ν layer (3.). - a polycrystalline layer (9) is provided on the ’ 且 and provides a word line connection of the memory unit (1). 92257 (Revised) 12 1260639 bit line (32) is located in the (10) layer (9) below the first area (4). 'The second second bit line (34) is located below the second area (4). Under (10) :). The bit lines (32) and (34) are composed of a conductive portion (24) = selected oxide portion (22). A stone ion core implant (2〇) is placed on each end of each bit line and (34), and the f temple line line contacts the lower dioxygen layer at the two ends (18). ) or a wide transistor. The doping concentration of these core seeds is higher than the doping concentration of P soil, and helps to control the memory unit (1〇). Is this memory unit (1〇) located in? On the substrate region (9), and the team bell ion implant forms a bit line (32) (9), thus forming a channel between the p-type substrate and a channel (2) is composed of a single electric a crystal structure having a dipole of an exchangeable source formed by the Kunn ion implantation portion (24), and the n+ Shishen ion value input portion (24) is formed as a polycrystalline stone word line A portion of the gate of (12) is commonly disposed on the p-type substrate region (9). Although the first and second bit lines (32) and (34) are illustrated with respect to the conductive portion (24) and the freely selectable oxide portion (22), the province is to understand or use only A conductive portion forms the bit line. In addition, although the first! The figure shows a number of gaps in the layer of nitride (16), but it is understood that the tantalum nitride layer (16) can also be fabricated in a single or single layer without gaps. The nitride layer (16) forms a trapped layer of Φ Φ m α 0 . The programming of the memory cell is accomplished by applying a voltage to the drain and gate and grounding the source. This voltage generates an electric field along the channel, which accelerates the electrons and jumps into the nitride from the substrate 92257 (revision) 13 1260639 layer (9), a phenomenon known as hot electron injection electron injection). Because the electrons get most of the energy on the drain', the electrons are trapped and remain stored at the atmosphere layer near the drain. The memory unit (10) is generally uniform and the drain and source are interchangeable. Since the nitride is not electrically conductive, the first charge (Μ) can be injected into the nitride U6) near the first end of the central region (5), and the second charge (28) can be injected into the nitride (16). The middle is close to the second end of the central area (5). Therefore, if the bits are not moved, each memory unit can have two bits instead of one. As described above, the first charge (26) can be stored at the first end of the central region (5) in the nitride layer (16), and the second charge (3)) can be stored: a nitride layer At the second end of the central zone (1) in (16), there may be two bits per brother-remembering single το (1G). The two-bit memory cell (1〇) is generally symmetrical, so the drain and source are interchangeable. Thus, when programming the left azimuth element (3), the first bit line (32) can be used as the 汲 extreme ' and the second bit line (34) can be used as the source terminal. Similarly to f, the m-line (9) can be used as the source terminal when the right azimuth is programmed and the extreme ' and the first bit line (32) can be used. The first table does not show a group-specific voltage parameter for reading, programming, and single-ended erasing of the dual bit memory cell (10) having the first bit (3) and the second bit ^. 92257 (revision) 14

作業 -—---- 士志 記憶 tMJ — 早兀 閘極 &quot;~—------ 位元線0 位元線1 註釋 5貝取 ----—--- ηΓΓ CO Vcc 0伏 1.2伏 額外行 碩取 --~~~--—. Cl Vcc ------- _ 1.2 伏 一 0伏 ’ 1 J J 正常行 ---- CO y.25 至9.5伏 5 至 5.5 i Ιτ^0 伏 熱電子 編程 田 ^山 ±ί Cl 9.25 至9H —------- ^~~0^~— 5至5.5伏 ^熱電子 除 Ώ3 JWlXl It — λ CO -3 至-6伏 5至6伏— 浮接 熱電子注入 土 除 Xiit 」_丄 ^ χ Cl -3 至-6伏 浮接 _5至6伏 熱電子注人 除 C1,C0 -3 至-6伏 5 至 5至6伏 熱電子注入 A ,问w四叫I現雙位兀記憶單 構的各種實施例。本發明尤其適用於將一個雙位元記 憶單元的兩個位元用於資料或資訊儲存的記憶體裝置。本 考X明的發明人已發現:、編程及抹除此種記憶單元中的一個 元(例如位元C0 )日卞,將造成該位元的相關聯位元(例 汝位元C1 )的燒錄及(或)抹除。例如,對記憶單元(1 〇 ) 的位元C1之重複編程可能造成位元c〇中的電荷積聚,反 亦:、彳此外,將抹除電壓脈波重複地施加到位元c 1可 4成位元C0的過度抹除。相關聯的位元中的這些現 象又έ k成正g作業中該等位元的作業之性能下降(例 如’ ^效地讀取、寫入/編程、及(或)抹除一個或兩個位 元的此力)。本發明藉由選擇性地編程、確認、抹除、及重 新^心此種兄憶單元的個別位S,以便進一步確保在快閃 石己fe、體I置中的諸如區塊或區段抹除作業時對記憶單元有Homework------Shishi Memory tMJ - Early Gate Gate &quot;~------- Bit Line 0 Bit Line 1 Note 5 Baye Take-------- ηΓΓ CO Vcc 0 Volt 1.2 volt extra line master--~~~---. Cl Vcc ------- _ 1.2 volt-one 0 volt' 1 JJ normal line---- CO y.25 to 9.5 volts 5 to 5.5 i Ιτ^0 volts hot electronic programming Tian^shan ±ί Cl 9.25 to 9H —------- ^~~0^~—5 to 5.5 volts ^hot electrons Ώ3 JWlXl It — λ CO -3 to -6 5 to 6 volts - floating hot electron injection into the soil except Xiit" _ 丄 ^ χ Cl -3 to -6 volts floating _ 5 to 6 volts hot electrons in addition to C1, C0 -3 to -6 volts 5 to 5 Various embodiments of up to 6 volts of hot electron injection A are asked. The invention is particularly applicable to a memory device that uses two bits of a two-bit memory unit for data or information storage. The inventor of this test has found that: programming and erasing a cell (such as bit C0) in such a memory cell will cause the associated bit of the bit (e.g., bit C1) Burn and/or erase. For example, repeated programming of the bit C1 of the memory cell (1 〇) may cause charge accumulation in the bit c〇, and vice versa: 彳 In addition, the erase voltage pulse wave is repeatedly applied to the bit c 1 to 4 Excessive erasure of bit C0. These phenomena in the associated bit are further reduced in the performance of the job of the bit in the positive g job (eg '^ effectally read, write/program, and/or erase one or two bits This power of the yuan). The present invention further selectively ensures that individual bits S of such a brother cell are individually programmed, confirmed, erased, and re-centered to further ensure that the block or segment erase is performed in the flashing stone. Have a memory unit during work

正確的抹除,而解決了與雙位元記憶單元技術有 這些問題。 I 弟2圖不出對記憶單元(10)中的兩個位元之編程。 92257(修正版) 1^ 1260639 $ 了便於解說,將一個位元稱為正常位元(N〇rman 簡稱NB ),而將相關聯的位元稱為附餘位元 , (c〇mplimentary Bit; _ CB)。在讀取作業期間,最接 近被讀取的記憶單元之接面是接地端,而該電晶體的另— 端是汲極。此種方式被稱為反向讀取。在編程及抹除期間 該汲極被轉換到最接近的接面,而此時該最接近的接面之 電壓是汲極電壓而非接地,此種方式係用於讀取及確認作 業。 可將雙位元記憶單元(1 〇 )視為一起動作的三個部分, 這三個部分是一附餘位元區(40)、中央區(42)、及正常 位元區(44)。附餘位元區(40)及中央區(42)接近汲極 /源極接面,且於編程及抹除作業期間可修改局部的v丁。 中央區(42 )應接近記憶單元(1 〇 )的製程中所產生的自 然VT。來自ON堆疊(30)的氮化矽(16)係用於將第 電射(38)儲存在正常位元區(44),並將第二電荷(π) 儲存在額外位元區(40 )。因為氮化物並非一導體,所以在 、、爲程及抹除作業期間加入或移開的電荷本身應不會重新分 佈’而是應停留在原先被注入的位置。亦即,該電晶體的 每一端可以有與另一端幾乎無關的不同之電荷及不同之 VT。例如,如果該cb及NB的自然或抹除/空白ντ大約 為1·2伏,而且如果該nb被編程到約為3.8伏的VT,貝 u亥CB應仍然接近空白狀態。此外’如果兩個位元被編程 到3.8伏的VT,然後抹除該NB,則該CB應大約在3.8 伏,且該NB應大約在1.2伏。 16 92257(修正版) 1260639 变此外,在該NB的讀取作業期間,應由一汲極空 ^接㈣CB位元線的電荷之—部分,這是因為源極(接 :)必A疋在最接近被確認的記憶單元之接面。該作 :::反向讀取作業,這是因為被確認的記憶單元之接面 的該反向讀取法覆蓋了接近另-位元的接面 令分’但是在通道t央+的任何電荷將修改 =CB及邊NB的有效VT。當該等區域中的-個區域之 =變得較高或較低時’另—區域也可能受到影響,這 【為該等區域都是同一電晶體的一部分。第3圖示 戶編程參數對該CB進行編程之後,對請 何::::!:(,編程到_(44)之編程作業如 =的較短通道是由於接近在該第二位元:=;。 該第:位元上儲存的電荷。由於被充電的該第 將比的較短之通道長度,所以對第二位元的編程 方式編70的編程快許多。因為係以較不易改變之 位二:弟―位凡,所以該第二位元的抹除要比該第一 t兀的抹除緩慢。本發明藉由選擇可用來以-致之方1 編 位元並消除編程及抹除週期中積聚的殘留電 元(:心圖荷(46)可能停留在記憶單 及抹除特性。該額在:-週期中之編程 、、—位元編程電荷(46 )之位置將 92257(修正版) 17 1260639 改又CB區(40 )及區(4 間隨著編程及抹除週期的次紗加^νΤ,並使抹除時 除步驟的組合提供了 —制來^ ^加。兩端及單端抹 ^ 矛用末才工制陣列的記憶單元中之一 的雙位71抹除陣刺單 4之最外部位元通常有不同的通道長度二::: 會Γ慢地進行抹除,但是兩端抹除脈波 枯广“70有最佳的效果。以,加入了-個單端 末除’以便保持該陣列的記憶單元的最外部位元之抹除速 因此,重要的是要確定對NB區(44)、中央區⑷)、 及CB區(40)的ντ進行監視,並將該等區的ντ保持在 已知的位準’以便正確地操作該記憶單元。通常是在抹除 (後文中稱為,,雙位元抹除,,)期間執行監視並控制CB及 ΝΒ的VT之矛王序。因此,在本發明中,選擇編程參數,以 便確保該等位元不會因殘留f荷而被過度絲,且執行抹 除’以便確保中央區(42 )中之殘留電荷受到控制。藉由 &amp;制編程及抹除期間的ντ分佈,在編程及抹除週期的抹 除及編程時間將會保持穩定。第5圖示出採用本發明的雙 位元編私及抹除方法的記憶單元(丨〇 )在編程及抹除週 之後的情形。 許多快閃記憶體設有命令邏輯及嵌入式狀態機,用以 自動執行複雜的編程及抹除作業。靜態隨機存取記憶體 (SRAM)模組組件可包含用來控制命令邏輯及記憶體系 統的作業而由一微控制器實施之程式。當一系統開機時, 18 92257(修正版) 1260639 通常係將這些程式載入-SRAM中。可利用—匯流排將控 制命令自一處理器傳送到命令邏輯裝置,並將自該快閃記 憶體裝置讀取的資料或寫入該快閃記憶料: 命令邏輯及-主處理器交換。該快閃記憶體裝置=等故亥 入式狀態機產生用於詳細作業的命令邏輯㈣,例如執行 編程、讀取、及抹除作業所需的的各種個別步驟。該狀態 機因而係用來減少通常與一包含快閃記憶體的微晶片相關 聯地使用的一處理器(圖中未示出)所需之資源㈣。 現在請參閱第6圖,其中提供了—系統(⑻,該系統 (60)係用來對一採用本發明的雙位元記憶單元的記憶體 陣列(68)執行編程、確認、軟式編程、及抹除。在本例 子中,记憶體陣列(68 )係由複數個64κ區段(69 )所 構^快閃記憶體陣列的一區段(69)包含記憶體陣列(68) 的°卩刀,其中包含經由共用相同的區段位址的所有字線 而聚集在一起的所有記憶單元。該區段位址通常是用來定 址到該記憶體陣列中的一個或多個記憶單元的地址位元信 號之η個(例如六個)最高有效地址位元,其中η是一整 數例如可由8個1〇構成每一 64Κ區段(69 ),其中一 疋’、有4個正系位元及4個附餘位元的4個記憶單元或 4個雙位兀記憶單元構成之—列。我們當了解,記憶體陣 列f ^)可以疋任何數目的不同組態,例如,可由在8個 =L單兀上的8個正常位元及8個附餘位元構成工皿區 段。此外,可採用任何數目的區段,且只受限於應用的大 小、及採用快閃記憶體陣列(68 )的裝置之大小。 92257(修正版) 19 1260639 糸統(6 0 )包含一連接到快閃記情雕由 , 门體陣列(68)之地 址解碼器(62),用以在對陣列(喝行的各種作議 如編程、讀取、確認、抹除)期間將各1〇解碼。該位址 解碼器自一系統控制器(圖中未示出) 个丁囬)或類似的裝置接收 地址匯流排資訊。 -命令邏輯組件(64)包含一内部狀態機(65)。該命 t邏輯組件(64)係連接到地址記憶體陣列(68)。該命令 邏輯及狀態機自連接到一系統控制器或類似裝置的一資才= 匯流排接收命令或指令。該等命令或指令呼叫命令邏輯 (64)及狀態機(65)中所嵌入的演算法。該等演算法執 订將於本文中說明的各種編程、讀取、抹除、軟式編程、 及確認方法。-電壓產生H㈣(66)耗連接到記憶體 陣列(68)以及命令邏輯(64)及狀態機(65)。電壓產生 器組件(66)係由命令邏輯(64)及狀態機(65)所控制。 電壓產生器組件(66)可工作而產生用來編程、讀取、抹 除、軟式編程、及確認記憶體陣列(68 )的該等記憶單元 所需之電壓。 第7圖是例示64K區塊(70 )的部分記憶單元佈局之 俯視或平視圖。本範例係參照由16位元1/〇所構成的64κ 區塊而顯示。我們當了解,各區塊(block )可以由8位元、 32位元、64位元、或更多位元的I/O所構成,且不限於 64K (例如,可以是ι28κ、256K等)。該64K區塊(7〇) 可以是一區段(sect〇r )、或一區段的一部分。例如,具有 連接到共同金屬位元線的接點之一個或多個區塊可構成一 20 92257(修正版) 1260639 區段。ΟΝΟ堆疊條或層(72 )延伸到該記憶體陣列的長度, 且包含區塊(70)。區塊(70)包含16個1/〇或行(^又) 的群組。每一子或I/O的群組係由八個電晶體或八個 正常位元及八個附餘位元所構成。每一 1/〇包含一多晶矽 子線(74 ),用以定址到該等列的記憶單元。複數條位元線 係没於ΟΝΟ堆疊條層(72)之下,以便起動對該等記憶 單元的個別位元之讀取、寫入、及抹除。每一位元線係在 —組的十六列的一端上連接到一第一接點(78)及各金屬 位元線(圖中未示出),並在該組的另一端上連接到一第二 接點(79)。在圖7所示之例子中,示出了五條位元線,因 而一位兀線係連接到一行中的每隔一個的電晶體之一端, 且利用兩個選擇電晶體來選擇兩個電晶體的四個位元,以 便執行讀取、寫入、及抹除。 第8圖是利用若干選擇電晶體及三條位元線而定址到 歹J中的别四個雙位元記憶單元以便讀取、寫入、及抹除 各位7L之示意圖。第一雙位元記憶單元(82)包含第一位 兀C〇及第二位元C1,第二雙位元記憶單元(84)包含第 一位几C2及第二位元C3,第三雙位元記憶單元(% )包 3第一位tl C4及第二位元,以及第四雙位元記憶單元 (88 )包含第一位元C6及第二位元C7。這四個雙位元記 fe、單7^可構成一個8位元的字。設有選擇閘(88 ) ( SelO ) 及延擇閑(90) ( Sell),用以起動對雙位元記憶單元(82) 的位元CO、ci、以及雙位元記憶單元(84 )的位元C2、 C3之頃取、寫入、及抹除。設有選擇閘(92) (Sel2)及 21 92257(修正版) 1260639 選擇閘(94) ( Sel3),用以起動對雙位元記憶單元(86) 的位元C4、C5、以及雙位元記憶單元(⑽)的位元、 C7之讀取、寫入、及抹除。第一開關(96 )係連接到第一 位元線BL0 ’第二開關(98 )係連接到一第二位元線1, 以及第三開關(1 〇〇)係連接到第三位元線BL2。該第一、 第一、及第二開關係將對應的位元線耦合於電源(VDD ) 與接地點(GND)之間。藉由提供下表2所示之不同電壓 組態,即可讀取該等雙位元記憶單元之任何位元。在第8 圖所不之例子中’正在讀取雙位元記憶單元…)的位元 C0。 表2Correct erasure has solved these problems with dual-bit memory cell technology. I brother 2 does not show the programming of two bits in the memory unit (10). 92257 (Revised Edition) 1^ 1260639 $ For ease of explanation, a bit is called a normal bit (N〇rman NB for short), and the associated bit is called a reserved bit, (c〇mplimentary Bit; _ CB). During the read operation, the junction of the memory cell closest to the read is the ground terminal, and the other end of the transistor is the drain. This way is called reverse reading. During programming and erasing, the drain is switched to the closest junction, and the voltage at the closest junction is the drain voltage instead of ground, which is used to read and confirm the job. The two-bit memory unit (1 〇 ) can be considered as three parts of an action, which are a reserved bit area (40), a central area (42), and a normal bit area (44). The residual bit area (40) and the central area (42) are close to the drain/source junction, and the local v-single can be modified during programming and erasing operations. The central zone (42) should be close to the natural VT generated in the process of the memory unit (1 〇). The tantalum nitride (16) from the ON stack (30) is used to store the first electron (38) in the normal bit region (44) and the second charge (π) in the extra bit region (40). . Since nitride is not a conductor, the charge added or removed during, and during the erase and erase operations should not be re-distributed by itself, but should remain in the original implanted position. That is, each end of the transistor may have a different charge and a different VT that are almost independent of the other end. For example, if the natural or erase/blank ντ of the cb and NB is approximately 1.2 volts, and if the nb is programmed to a VT of approximately 3.8 volts, the Bayu CB should still be near blank. Furthermore, if two bits are programmed to a 3.8 volt VT and then the NB is erased, the CB should be approximately 3.8 volts and the NB should be approximately 1.2 volts. 16 92257 (Revised Edition) 1260639 In addition, during the read operation of the NB, the charge of the CB bit line should be connected by a pole, because the source (connected) must be The junction closest to the identified memory unit. The operation::: reverse reading operation, because the reverse reading method of the junction of the confirmed memory unit covers the junction of the other-bits, but any of the channels in the channel The charge will modify = CB and the effective VT of the edge NB. When the area of the areas becomes higher or lower, the other areas may also be affected, which are all part of the same transistor. After the third graphical user programming parameter is programmed for the CB, please ask::::!: (, programming to _(44) programming operation such as = the shorter channel is due to being close to the second bit: =;. The charge stored on the first: bit. Because of the shorter channel length of the first charge, the programming of the second bit is programmed much faster because it is less susceptible to change. The second position: the younger brother, so the erasing of the second bit is slower than the erasing of the first t. The invention can be used to select the bit 1 and eliminate the programming and The residual charge accumulated in the erase cycle (: the heart charge (46) may stay in the memory list and erase characteristics. The amount is in the :- cycle programming, - bit programming charge (46) position will be 92257 (Revised version) 17 1260639 Changed the CB area (40) and the area (4 times with the secondary yarn of the programming and erasing cycle plus ^νΤ, and the combination of the steps provided during the erasing is provided - ^ ^ plus. Both ends and single-ended wipes use the double-bit 71 of one of the memory cells of the last array to erase the outermost bit of the spurs 4 and usually have different passes. Length 2::: will be erased slowly, but both ends of the pulse wave dry "70 has the best effect. So, added a single-end finalization" in order to maintain the outermost part of the memory unit of the array Therefore, it is important to monitor the ντ of the NB area (44), the central area (4), and the CB area (40), and keep the ντ of the areas at a known level. 'In order to operate the memory unit correctly. It is usually performed during erasing (hereinafter referred to as "dual-bit erasure,") to monitor and control the CB and the VT of the VT. Therefore, in the present invention The programming parameters are selected to ensure that the bits are not over-wired due to residual f-charge and that erasing is performed to ensure that the residual charge in the central region (42) is controlled. Programming & erasing by &amp; During the ντ distribution, the erasing and programming time of the programming and erasing cycles will remain stable. Figure 5 shows the memory cell (丨〇) using the two-bit editing and erasing method of the present invention in programming and Erasing the situation after the week. Many flash memories have command logic and In-state state machine for automating complex programming and erase operations. SRAM module components can be used by a microcontroller to control the operation of command logic and memory systems. Program. When a system is powered on, 18 92257 (Revised) 1260639 usually loads these programs into the -SRAM. Available - Busbars transfer control commands from a processor to the command logic and will flash from that The data read by the memory device or written to the flash memory material: command logic and - main processor exchange. The flash memory device = the same state machine generates command logic for detailed operations (4), for example Perform the various individual steps required to program, read, and erase jobs. The state machine is thus used to reduce the resources (four) required for a processor (not shown) that is typically used in connection with a microchip containing flash memory. Referring now to Figure 6, there is provided a system ((8) for performing programming, validation, soft programming, and a memory array (68) employing the dual bit memory cell of the present invention, and In this example, the memory array (68) is constructed by a plurality of 64 kappa segments (69). A segment (69) of the flash memory array includes a memory array (68). A knife comprising all memory cells grouped together via all word lines sharing the same sector address. The sector address is typically an address bit used to address one or more memory cells in the memory array η (for example, six) most significant address bits of the signal, where η is an integer, for example, 8 〇 〇 each 64 Κ segment (69 ), one 疋 ', 4 Orthogonal bits, and 4 The four memory cells of the residual bit or the four double-bit memory cells form the column. We understand that the memory array f ^) can be configured in any number of different configurations, for example, it can be used in 8 = L 8 normal bits and 8 residual bits on the raft constitute the dish sectionIn addition, any number of segments can be employed and is limited only by the size of the application and the size of the device employing the flash memory array (68). 92257 (Revised Edition) 19 1260639 SiS (60) contains an address decoder (62) connected to the flash memory, the array of gates (68), used in the array (drinking various suggestions such as Each program is decoded during programming, reading, confirming, and erasing. The address decoder receives address bus information from a system controller (not shown) or similar device. - The command logic component (64) includes an internal state machine (65). The life logic component (64) is coupled to the address memory array (68). The command logic and state machine are connected to a system controller or similar device = bus to receive commands or instructions. These commands or commands call the command logic (64) and the algorithms embedded in the state machine (65). The algorithms define various programming, reading, erasing, soft programming, and validation methods as will be described herein. - Voltage generation H (four) (66) is connected to the memory array (68) as well as the command logic (64) and the state machine (65). The voltage generator component (66) is controlled by command logic (64) and state machine (65). The voltage generator component (66) is operative to generate the voltages required to program, read, erase, soft program, and validate the memory cells of the memory array (68). Figure 7 is a top or plan view illustrating a partial memory cell layout of a 64K block (70). This example is shown with reference to a 64κ block composed of 16 bits/〇. We understand that each block can be composed of 8-bit, 32-bit, 64-bit, or more bits of I/O, and is not limited to 64K (for example, it can be ι28κ, 256K, etc.) . The 64K block (7〇) can be a segment (sect〇r), or a portion of a segment. For example, one or more blocks having contacts connected to a common metal bit line may constitute a 20 92257 (Revision) 1260639 segment. The stack of strips or layers (72) extends to the length of the array of memory and includes blocks (70). Block (70) contains 16 groups of 1/〇 or lines (^又). Each sub- or I/O group consists of eight transistors or eight normal bits and eight residual bits. Each 1/〇 includes a polysilicon sub-wire (74) for addressing the memory cells of the columns. A plurality of bit lines are not below the stacking layer (72) to initiate reading, writing, and erasing of individual bits of the memory cells. Each of the meta-lines is connected to a first contact (78) and each metal bit line (not shown) at one end of the sixteen-column of the group, and is connected to the other end of the group. A second contact (79). In the example shown in FIG. 7, five bit lines are shown, and thus one twist line is connected to one end of every other transistor in a row, and two select transistors are used to select two transistors. Four bits to perform read, write, and erase. Figure 8 is a schematic diagram of reading, writing, and erasing each of the 7L bits by using a plurality of selected transistors and three bit lines to address the other four dual bit memory cells in 歹J. The first dual bit memory unit (82) includes a first bit C兀 and a second bit C1, and the second bit memory unit (84) includes a first bit C2 and a second bit C3, the third pair The bit memory unit (%) packet 3 has a first bit tl C4 and a second bit, and the fourth dual bit memory cell (88) includes a first bit C6 and a second bit C7. These four double-bit fes, single 7^ can form an 8-bit word. A selection gate (88) (SelO) and a delay (90) (Sell) are provided to activate the bit CO, ci, and the dual bit memory unit (84) of the dual bit memory unit (82). Bits C2, C3 are taken, written, and erased. There are selection gates (92) (Sel2) and 21 92257 (revision) 1260639 selection gates (94) (Sel3) for starting the bits C4, C5, and double bits of the dual-bit memory unit (86) The bit of the memory unit ((10)), C7 read, write, and erase. The first switch (96) is connected to the first bit line BL0 'the second switch (98) is connected to a second bit line 1, and the third switch (1 〇〇) is connected to the third bit line BL2. The first, first, and second open relationships couple the corresponding bit line between the power supply (VDD) and the ground (GND). Any of the bits of the two-bit memory cells can be read by providing different voltage configurations as shown in Table 2 below. In the example of Fig. 8, the bit C0 of the "two-bit memory unit... is being read". Table 2

在雙位元編程期間, -- , 、擇一較咼之ντ改變值, 電二耗損:在這些較高的改變值下,1 多的速率下㈣比編程電晶體上的第二位元慢 發生。第9圖不會在編程電壓低很多的時 改變值間之捫:网罘—位凡的編程時間與第-位元的V 間之關係圖(11〇)。因為對第二位元的編程呈現」 92257(修正版) 22 1260639 二改變及較快速的情況’所以第二位元決定了雙位元抹 除k間及可用來抹除雙位元的方法。重要的是要選擇使第 二位兀編程後的VT接近第一位元編程後的…之編程條 件:否則雙位元的抹除可能會非常緩慢,且編程後的第一 =兀將會被過度抹除。_般而言,最關鍵的是控制編程第 -位兀期間的汲極電壓,以便限制第一位元的VT範圍。 為了控制第-位元的VT,將兩個位元於編 電厂堅選擇為大約9.25伏至大約9.5伏,將沒極電麗選擇為 大約5.0伏至大約5.5伏’並將編程脈波的脈波寬 至0.5微秒。這些條件有助於維持—較嚴格的第一位元 VT ’並減緩對第二位元的編程。 ΟΝΟ雙位記憶單元的—關鍵性特性是··在加速高溫 烘烤(攝氏75至200声)至日μ予# 期的次數之—_。度第 不 口 ®以電壓表不的電荷#招 門、:程=:(Program and Erase;簡稱ρε )週㈣次數 2一關係圖(m)。該圖呈現可能的可靠性問題, ,為電何耗損量隨著編程及抹除週期的次數增加到 次而增加。兮兩日挪AA w ’ U0 曰r的: 元編程後狀態(當編程該電 曰曰體的但另—端是空白的或未被編程的,即發生 種狀態)出現了在較大的週期次數時有較大的電荷耗損之 ::::位元都被編程的情形所耗損的電荷小 耗損。·5伏之間’以便補償因循環使用而造成的電荷 92257(修正版) 23 1260639 考慮到前文所一 11至14圖之流 及况明的該等例不系統,請參閱第 施的一方法。A 將可更易於了解可根據本發明而實 方法係以循序執:::說明的簡潔,雖然第11至14圖之 解,本發明並不受限2而示出及說明,但是我們當了 發明而以不同之順序來劲順序,、因某些步驟可根據本 明的其他步驟同時執&gt; 仃’且(或)可與本文示出及說 是實施根據本發二仃方:外,並不是所有示出的步驟都 义月的一方法所必需的。 本發明的快閃記憶 鍵性特性是:在知、卜 甲的又位^己十思早7^之一關 兩/紅和 南溫烘烤(攝氏75至度)期Η的During double-bit programming, -- , , choose a more ντ change value, electric two-loss: at these higher change values, more than one rate (four) is slower than the second bit on the programming transistor occur. Figure 9 does not change the value between when the programming voltage is much lower: the network - the relationship between the programming time and the V of the first bit (11 〇). Because of the programming of the second bit, 92257 (Revised) 22 1260639 II changed and the faster case, so the second bit determines the double-bit erase between k and the method that can be used to erase the double bit. It is important to select the programming condition that makes the second 兀 programmed VT close to the first bit programming... otherwise the double bit erase may be very slow, and the programmed first = 兀 will be Excessive erasure. In general, the most critical is to control the gate voltage during the programming of the first bit to limit the VT range of the first bit. In order to control the VT of the first bit, the two bits are selected from about 9.25 volts to about 9.5 volts in the power plant, and the IGBT is selected from about 5.0 volts to about 5.5 volts and will program the pulse wave. The pulse wave is as wide as 0.5 microseconds. These conditions help to maintain the stricter first bit VT 'and slow down the programming of the second bit. The key characteristic of the ΟΝΟ two-bit memory unit is the number of times to accelerate the high-temperature baking (75 to 200 degrees Celsius) to the date of the day. Degree No. ® is the electric charge of the voltmeter #招门,:程=:(Program and Erase; referred to as ρε) week (four) times 2 a relationship diagram (m). This figure presents a possible reliability problem, which increases as the amount of power consumption increases as the number of programming and erase cycles increases.兮Two days to move AA w ' U0 曰r: After the meta-programming state (when programming the electric body but the other end is blank or unprogrammed, the state occurs) appears in a larger cycle There is a large charge loss when the number of times:::: The bit is lost when the programmed one is consumed. • 5 volts 'to compensate for the charge caused by recycling 92257 (revised version) 23 1260639 Considering the flow of the previous paragraphs 11 to 14 and the examples of the system, please refer to the method of the first application. . A will be easier to understand. The method according to the present invention can be carried out in a sequential manner::: The simplicity of the description, although the solutions of Figures 11 to 14 are not limited to 2, but are shown and described, but we are The invention is in a different order, and because some steps can be performed according to other steps of the present invention, and/or can be illustrated and implemented according to the present invention. Not all of the steps shown are necessary for a method of the moon. The flash memory key property of the present invention is: in the knowledge, the singularity, the singularity, the singularity, the singularity, the singularity, the singularity, the singularity, the singularity

Li可.Π燒錄及抹除週期的次數之-強函數。此種‘象 抹除週期的次數〜疋因為笔何耗損量隨著編程及 -端是空白的二 程該電晶體的—端,但另 未被編程的’即發生此種狀態)出現了在 度\二:=時有較大的電荷耗損之問題。在攝氏25〇 ;二烤/ 皿度下’記憶單元電晶體的行為不是高斯 的.::an)型。在攝氏250度之下’由於氮化物中電荷 、古&quot;刀佈、以及在接近較大多晶石夕間隙處的局部性辦強 =陷的氮化物電荷’所以接近較大字線(中心部分的 1 二間,)_、的記憶單元電晶體耗損較多的電荷。 务現1所有裝置經過相同週期次數的循環使用之後 a 在相H料型樣下的電荷耗損分佈 疋冒重複出現的。在循環使用次數超過咖週期之後,猶 92257(修正版) 24 1260639 3使用期間的編程及抹除條件呈現對電荷耗損與週期 巧之關係圖的影響很小之現象。 ' 改變:^在:_週期之後的電荷耗損,增加編程ντ =(例如’使ντ改變值等於2至25伏),以便確保 在快閃記憶體陣列的使用壽命後期中編 ; 輯效的VT。我們決定:可選擇特定的編程^ ί,在一 ·25至9·5伏…一仙 :一予的編程脈波施加G.5微秒),而將雙位元記憶單 程到一較高的VIY2 0你5 ? s' 由仅心 (伙至2.5幻,且仍然在雙位元作業 中保持極㈣編程時間。我們決定 : 摄吒危、 甘罕乂回的/皿度(例如 ^氏50度)下’電荷耗損是押週期次數的一函數。用 “修正此類與循環使用相關的電荷耗損問題 各記憶單元編程到2.0伏至2.5伏間之―竹 疋並 較慢的速率來編程該等位元(例如,在ν_9 25 ^; 1VdTln=5.0至5.5伏下,每一字的編程脈波施加w 二Μ ^對與雙位元編程相附餘位元干擾效應有 較佳的控制。 第11圖示出—種用來決定根據本發明的一個面向而 在雙位兀模式下操作的記憶體陣列的一個雙位元記憶單元 的VT 改交值之特定方法。本方法開始於步驟(200 ), 其中f疋對於-抵在—陣列中的記憶單元之正常空白或未 經編程VT。在步驟γ 0Λ、 ”、Α ( 05 )中,以各種編程改變值 該批中之該陣列勃并&amp; J钒仃右干次編程及抹除週期,然後執行一Li can be used to burn and erase the number of cycles - the strong function. This kind of 'image erasing cycle number ~ 疋 because the pen and the amount of wear and tear with the programming and - end is blank two-way the end of the transistor, but another unprogrammed 'this state occurs" appeared in Degree \ two: = there is a problem of large charge loss. At 25 摄 Celsius; the second baking/dishness of the 'memory cell transistor' is not Gaussian.::an). Below 250 degrees Celsius 'because of the charge in the nitride, the ancient &quot;knife cloth, and the localized strength near the larger polycrystalline litter gap = the nitride charge of the trap', so close to the larger word line (central part 1 two,) _, the memory cell transistor consumes more charge. After all the devices have been cycled through the same number of cycles, a. The charge dissipation distribution under the phase H material is repeated. After the number of cycles exceeds the coffee cycle, the programming and erasing conditions during the use of 92257 (Revised) 24 1260639 3 exhibit little effect on the relationship between charge loss and periodicity. 'Change: ^ After the :_ cycle charge loss, increase the programming ντ = (for example 'make ντ change value equal to 2 to 25 volts) to ensure that the flash memory array is in the late life of the flash memory; . We decided: you can choose a specific programming ^ ί, in a · 25 to 9 · 5 volts ... a fairy: a predetermined programming pulse applied G. 5 microseconds), and the two-bit memory one way to a higher VIY2 0 you 5 ? s' from the heart only (to the 2.5 illusion, and still maintain the pole (four) programming time in the double-bit job. We decided: Photographed endangered, sweet and sturdy / dish (such as ^ 50 The lower 'charge loss is a function of the number of cycles. Use the "correction of this type of charge loss associated with the use of the memory to program the memory cell to a slower rate between 2.0 volts to 2.5 volts. The equipotential (for example, at ν_9 25 ^; 1VdTln = 5.0 to 5.5 volts, the application of the pulse wave of each word to w Μ ^ has better control over the effect of the two-bit programming with the residual bit interference. Figure 11 illustrates a particular method for determining the VT handoff value of a two-bit memory cell of a memory array operating in a two-bit mode in accordance with one aspect of the present invention. The method begins with a step ( 200), where f疋 is - against - normal blank or unprogrammed VT of memory cells in the array In step γ 0Λ, ", Α (05) in the array to change the value of Bo variety of programming of the batch and the &amp; J Ding vanadium right vagus and erase programming cycle times, and then perform a

南溫加速供烤(摄K 氏〇〇至250度)。然後在步驟(210) 92257(修正版) 25 1260639 中,決定該等記憶單元的 據電荷耗損量而増加;:值在:驟⑽)中,根 選擇編程參數(例如,/v文交值。在步驟(220)中, Vdrain=5.0 至 5 5 伏—gate=9·25 至 9.5 伏,且 VT,並減緩對第二 :夠控制第一位元的 娇、s裡人人 々、為私0在步驟(225 )中,你田 所&amp;擇的該等編程參數對該批的另—陣列勃―使用 抹除週期,然後執行加速供烤。在車干編程及 決定步驟(225 )由也— ”、A ( 230) _ ’本方法 Λ . 仃的該等編程及抹除週期的姓果3否{ 為可接受的。如果哕笼始# ^ 功日7、、、〇果疋否( 的(”否”分支),則2/ 期的結果是不可接受 及抹除週期的結果是可接受 果该寺絲 中將命令邏輯及狀能機—h 刀支)則在步驟(加) 狀心、枝叹疋成使用該VT改變值及所潠鍟 =壶及閘極電位來編程該等雙位元記憶單元的兩個位The south temperature is accelerated for roasting (K 〇〇 to 250 degrees). Then, in step (210) 92257 (Revised) 25 1260639, it is determined that the memory cells are charged according to the amount of charge loss; the value is: (10)), and the root selects a programming parameter (for example, /v text value). In step (220), Vdrain=5.0 to 5 5 volts-gate=9·25 to 9.5 volts, and VT, and slow down to the second: enough to control the first bit of the s, s, everyone, private 0 In step (225), the programming parameters selected by your field &amp; select the erase cycle for the other array of the batch, and then perform the accelerated bake. In the car dry programming and decision step (225) by - ”, A ( 230) _ 'This method Λ . 该 These programming and erasing cycles of the surrogate fruit 3 No { is acceptable. If the 哕 cage start # ^ 功日7,,, 〇果疋("No" branch), the result of 2/period is unacceptable and the result of the erasing cycle is acceptable. The logic and shape of the temple will be the same as in the step (plus). , sighing to use the VT to change the value and the 潠鍟=pot and gate potential to program the two bits of the two-bit memory unit

—我們當了解’不只是在正常的編程狀況下可採用使 較冋VT改變值的編程,而且在雙位元抹除方法中的預; 編程或編程階段亦可採用上述的編程方式。第12圖示出 種使用所選擇的編程參數(例如,在Vgate=9.25至95伏 Vdram-5.0至5.5伏,VT改變值介於2伏與2 5伏之間下 施加0.5微秒的編程脈波)之方法。 第Π至14圖所示之雙位元抹除方法包含一記憶單元 抹除程序’用以控制每—記憶電晶體的附餘位元端及正常 位元端在空白或被抹除狀況下的ντ臨界值上限及下限 92257(修正版) 26 1260639 (例如,最小VT吐〇伏’最大ντ吐8伏)。此外,該雙 位雄除方法包含軟式編程程序,用以避免可能造成較長 編知日^•間對記憶單元之過度抹除,而控制編程時間。該軟 式編私也可能影響到循環使用後的電荷耗損量。最後,該 。兀抹除私序可包含第二抹除程序,用以保證任何記憶 早70並未因該軟式編程程序而被編程。第12至14圖所示 =該雙位S方法改善了在延伸循環使用期間(例如1〇〇,咖 2的編程及抹除(ΡΕ)週期)工作的本發明的快閃記憶體 皁列之編程及抹除特性。 第12圖不出一種在接近正常位元及附餘位元的高電 纽極接面處利用熱電洞注入之抹除方法。對一位元的重 ^程程序會造成積聚的殘留電荷,而單端抹除或傳統的 未::会在可接受的電壓位準及(或)可接受的抹除時間範 圍内都無法觸及此種殘留電荷。本雙位元抹除方法在每一 =中藉由確認及修改後之抹除法,而確保對正常位元及 2餘位元的空白VT之控制。因此,本雙位元抹除方法在 „脈波期間將一系列的抹除條件或序列施加到單-記惊 ^内的附餘位元及其相關聯的正常位元。每—脈波的第 :抹除序列是一兩端或兩個汲極的抹除脈波,該脈波使所 有錢單元電晶體的源極及汲極成為高電屢(例如4至7 y。容許附餘位元及其相_的正常位元放電。铁後將一 ::輪波施加到附餘位元(例如,附餘位元嫌極 =兩㈣’而另一電晶體接面則是浮接),然後將-單端 讀波施加到正常位元(例如’正常位元端的汲極變為 92257(修正版) 27 1260639 而電壓,而另一雷曰雕丨立τ- 元為何,今等时二 是浮接)。不論所要確認的位 ',、、μ寻早鳊脈波的順序是可以交 者 除脈波的時間是嫡枯咚rr、士士 田该兩i而抹 _錐/脈波時間的大約75%至95%時,在 ΟΝΟ雙位元架構中達到了顯著改善的結果。 在 有雔二 12Λ示出一種用來對根據本發明的-個面向而具 單元的快閃記憶體陣列執行編程及抹除之特 :方法。该方法開始於步驟(3〇〇),此時啤叫抹除程序。 口 ’可將-命令自控制器傳送到設於 的狀態機’而Μ該抹除程序。在步驟⑽)中 订位置及額外行位置中之位元編程到ντ改變值。所 的編程錢參數是:在•㈣.25至9.5伏,Vdrain=5.〇 至5.5伏,VT改變值介於2伏與2 5伏之間下,施加^ 微秒的脈波。本方法然後進入步驟⑶〇),此時將指向該 陣列的記憶體地之地址計數器設定為第一地址。本方法然 後進入步驟(315)。在步驟(315)中,本方法對一區段; 之-地址位置執行確認抹除。該地址位置可以是單一位元 位置的一記憶體地址、或區段的1/〇或字位置之記情體地謂 址。如果該地址位置的確認抹除失敗了,則本方法繼續進 入步驟( 320 )。在步驟(32〇)中,本方法決定是否已達到 最大脈波計數。如果已達到最大脈波計數(”是”分支),則 本方法繼續進入步驟(325 ),此時指示該裝置為確實失敗。 如果尚未達到最大脈波計數(”否”分支),則本方法進入步 驟(330 ),以便施加抹除脈波。 在步驟(330)中,本方法在8至12亳秒的—段持續 92257(修正版) 28 1260639 =間:將-個兩端抹除脈波施加到該區段的各附 及正常行位置(例如一個 订位置 間之接纟的脈波卜在—段放電時 後,在.5至2宅秒(例如!毫秒)的一段持 中將一第一單端脈波施加到附餘行位置中之位元,缺^ I·5至2毫秒(例如1毫秒)的—段持續時間中將」、第在 皮施加到正常行位置中之位元。本方法然後 知⑶5),以便確認目前地址位置的抹除。如 位置的確認抹除通過了,則本方法繼續進入步驟⑶^止 以^決定目前位元或1/〇位址是否為最大地址位置。 目丽記憶單元$ I/O位址不是最大地址位置(”否 則在步驟(340)中將地址計數器的位址位置遞增到次一地 址位置。本方法然後回到步驟(315) ’以便執行對該次一 位,位置的抹除之讀認。如果在步驟(335 )中決定已達 :最大地址(”是”分支),則本方法進入第13圖所示之軟 式編餘序,以便確保記憶單元並未被過度抹除。 帛®所示的抹除方法之後’利用-種軟式編程方 法來控制空白狀態的最小(被過度抹除的)正常位元及附 f位元VT。被過度抹除的記憶單元是ντ低於空白狀態的 取小值之和記憶單元,並不是傳統的行漏電位元。雖然將 被困陷的電洞儲存在氮化物層中並不被認為是可能的:、但 是用來抹除記憶單元的電場是極高的’且可能將記憶單元 的局部VT降低到低於自然狀態。當發生此種情形時,被 過度抹除的記憶單元之正常位元及附餘位元的其中之一或 兩種位兀之編程時間將會增加。因此,執行第13圖所示之 92257(修正版) 29 1260639 =編程方法,以便消除被過度抹除的記憶單元,並維抄 循裱使用期間的穩定編程時間。 寸 第13圖示出一種用來對快閃記憶體陣列執行軟 程以便確保快閃記憶體的記憶單元部不會被過度抹除之 ,方法。在步驟(彻)巾,開始該軟式編程程序。例如寸, 可將w 7自控制器傳送到設於快閃記憶體裝置上的狀^ 機:而呼叫該軟式編程程序。在替代實施例中,該軟式: 程程序可以是整體抹除程序的一部分,且係在完成第12 圖所不之方法之後,開始該軟式編程程序。本方法然後進 入步驟(405 )’此時將地址計數器設定為帛一地址。本方 法f後繼續進入步驟(41〇)。在步驟(410)中,本方法對 »亥第地址位置的軟式編程執行確認。該確認應包含較低 的源極电壓’用以抑制任何次臨界漏電流 leakage current)。如果對該地址位置的確認軟式編程失敗 了,則本方法繼續進入步驟(415),以便決定是否已到達 最大脈波計數(例如5個脈波)。如果已到達了最大脈波計 數(”是”分支),則在步驟(425 )巾指示為確實失敗。如 果尚未到達最大脈波計數(&quot;否”分支),則本方法進入步驟 ( 420) ’以便將一軟式編程脈波施加到該地址位置,並回 到步驟(410),以便確認該地址位置是否已通過該軟式編 程確認條件。如果該區段的該位址位置在步驟(41〇)中通 過了,則本方法繼續進入步驟(43〇 ),此時決定是否已達 到該區段的最大地址。如果尚未到達該最大區段地址(,, 否分支)’則在步驟(435 )中將該地址計數器的地址位置 30 92257(修正版) 1260639 移到次-地址位置,且本方法回到步驟(4ι〇), 對该圮憶體陣列中的該次一地址位置 夂 該等步驟。如果在步驟(430)中決定已'、、,確5忍的 置(”是”分支),則本方法進入第〗4 攻大地址位 序。 弟14圖所不之第二抹除程 弟二4圖示出一種根據本發明—面向對快閃記憶 列執行第二抹除程序以便確保該軟式編 〜— 1;=…寺定方法。該方法開始於第二抹除程序的 ^〜4 ^如’可將—命令自控制11傳送到設於快閃 。己丨思脰衣置上的狀態機,而呼叫該第二抹除程序。 實施例中,該第二抹除程序可以是整體抹除程序的_曰代 12及13圖所示之方法之後,開始該第 ^抹除私序。本方S然後進人步驟(5G5),此時將地— We should understand that it is not only possible to use a program that changes the value of 冋VT under normal programming conditions, but also in the two-bit erase method; the programming method described above can also be used in the programming or programming phase. Figure 12 shows the programming parameters used with a selected programming parameter (for example, Vgate = 9.25 to 95 volts Vdram - 5.0 to 5.5 volts, VT change value between 2 volts and 25 volts applied 0.5 microseconds) Wave) method. The two-bit erase method shown in FIGS. 14 to 14 includes a memory cell erase program 'to control the residual bit end and the normal bit end of each memory transistor in a blank or erased state. Ντ threshold upper and lower limit 92257 (revised edition) 26 1260639 (for example, minimum VT spitting volts 'maximum ντ spit 8 volts'). In addition, the two-bit male division method includes a soft programming program to avoid the possibility of causing excessive erasure of the memory unit during a long programming day, and controlling the programming time. This soft editing may also affect the amount of charge loss after recycling. Finally, that. The erase private sequence may include a second erase program to ensure that any memory is not programmed by the soft programming program. Figures 12 through 14 = The two-bit S method improves the flash memory soap of the present invention operating during extended cycle use (e.g., 1 〇〇, programming and erasing (ΡΕ) cycles of coffee 2) Programming and erasing features. Figure 12 does not show an erase method using thermoelectric hole injection at the high-voltage junction of the normal and residual bits. The one-bit reprogramming process will cause accumulated residual charge, while single-ended erase or conventional un:: will not reach within acceptable voltage levels and/or acceptable erasure time. This residual charge. This two-bit erase method ensures the control of the normal bit and the blank VT of 2 bits by using the acknowledgment and modification after each =. Therefore, the two-bit erase method applies a series of erase conditions or sequences to the residual bits within the single-snapshot and their associated normal bits during the pulse period. The erase sequence is an erase pulse of one end or two poles, which makes the source and the drain of all the cells of the money cell high-voltage (for example, 4 to 7 y. Allowable margin) The normal bit of the element and its phase _ discharge. After the iron will be:: the wave is applied to the residual bit (for example, the residual bit is the pole = two (four)' and the other transistor junction is floating) Then, the - single-ended read wave is applied to the normal bit (for example, 'the bungee of the normal bit end becomes 92257 (revised version) 27 1260639 and the voltage, and the other thunder is erected τ-yuan, why is it? The second is floating.) Regardless of the bit to be confirmed, the order of the pulse of the 寻, μ, 鳊, 是, 可以, 除, 士, 士, 士, 士, _, _ Significantly improved results are achieved in the ΟΝΟ two-bit architecture at approximately 75% to 95% of the wave time. In the case of 雔二12Λ, one is used for the one according to the invention The programming and erasing of the flash memory array of the unit is performed: the method begins with the step (3〇〇), at which time the beer is called the erase program. The port 'can send the command from the controller to the The state machine is set to 'the erase program. The bit in the set position and the extra line position is programmed to the ντ change value in step (10)). The programmed money parameter is: at (4).25 to 9.5 volts. Vdrain=5.〇 to 5.5 volts, VT change value between 2 volts and 25 volts, apply a pulse of ^ microseconds. The method then proceeds to step (3) 〇), which will point to the memory of the array The address counter of the ground is set to the first address. The method then proceeds to step (315). In step (315), the method performs a confirm erase on the address location of a sector; the address location may be a single bit. A memory address of the location, or a 1/〇 or word location of the sector is addressed. If the acknowledgment erasure of the address location fails, the method continues to step (320). At step (32) 〇), this method determines whether the maximum pulse count has been reached. To the maximum pulse count ("YES" branch), the method continues to step (325), indicating that the device is indeed failing. If the maximum pulse count ("No" branch has not been reached), then the method proceeds to the step (330), in order to apply the erase pulse. In the step (330), the method is continued in the period of 8 to 12 sec., 92265 (revision) 28 1260639 = between: the two ends are erased by pulse application Each of the sections attached to the normal line position (for example, the pulse wave of the joint between the positions of a predetermined position is after the discharge of the section, and a period of .5 to 2 seconds (for example, ! milliseconds) will be A single-ended pulse wave is applied to a bit in the position of the residual line, and a bit that is in the range of 1 to 5 milliseconds (for example, 1 millisecond) is applied, and the bit is applied to the normal row position. . The method then knows (3) 5) to confirm the erasure of the current address location. If the confirmation of the location is erased, the method continues to step (3). The control determines whether the current bit or the 1/〇 address is the maximum address position. The memory unit $I/O address is not the maximum address location ("otherwise the address of the address counter is incremented to the next address location in step (340). The method then returns to step (315)' to perform the pair The next bit, the erase of the position is read. If it is determined in step (335) that the maximum address ("Yes" branch) has been reached, then the method proceeds to the soft sequence shown in Figure 13 to ensure The memory unit has not been over-erased. The erase method shown by 帛® is followed by a soft programming method to control the minimum (over-erased) normal bit and the f-bit VT of the blank state. The erased memory cell is a sum of small values of ντ below the blank state, and is not a conventional row drain potential element. Although it is not possible to store trapped holes in the nitride layer. :, but the electric field used to erase the memory cell is extremely high' and may reduce the local VT of the memory cell below the natural state. When this happens, the normal bit of the over-erased memory cell and Among the remaining bits The programming time of one or two bits will increase. Therefore, execute 92257 (revision) 29 1260639 shown in Figure 13 = programming method to eliminate the over-erased memory cells and to save the cycle Stable programming time. Figure 13 shows a method for performing a soft path on the flash memory array to ensure that the memory cell portion of the flash memory is not over-erased. In the step (cheer), The soft programming program is started, for example, the w7 can be transferred from the controller to the flash memory device: the soft programming program is called. In an alternative embodiment, the soft program can be It is part of the overall erase program and begins the soft programming procedure after completing the method shown in Figure 12. The method then proceeds to step (405) 'The address counter is now set to the first address. This method f Thereafter, proceeding to step (41〇). In step (410), the method performs a confirmation of the soft programming of the address position of »Hai. The confirmation should include a lower source voltage 'to suppress any sub-critical leakage. If the soft programming of the acknowledgement of the address location fails, the method continues to step (415) to determine if the maximum pulse count has been reached (eg, 5 pulses). If the maximum pulse has been reached. The wave count ("yes" branch) is indicated as a true failure at step (425). If the maximum pulse count has not been reached (&quot;no" branch), then the method proceeds to step (420) 'to make a soft programming A pulse wave is applied to the address location and returns to step (410) to confirm if the address location has passed the soft programming confirmation condition. If the address location of the sector is passed in step (41), the method continues to step (43A), at which point it is determined whether the maximum address of the sector has been reached. If the maximum sector address (,, no branch) has not been reached, then the address location 30 92257 (revision) 1260639 of the address counter is moved to the secondary-address location in step (435), and the method returns to the step ( 4 〇 〇), the next address position in the memory array 夂 these steps. If it is determined in step (430) that the ', ', and 5's are set ("Yes" branch), then the method enters the 4th attack address order. The second eraser of Figure 14 shows a method for performing a second erase process on a flash memory column in accordance with the present invention to ensure that the soft edit is performed. The method begins with the second erase program of ^~4^ such as 'can be'-the command is transmitted from control 11 to set to flash. I have thought about the state machine on the clothes and called the second erase program. In an embodiment, the second erasing procedure may be the method of the overall erasing procedure after the methods shown in FIG. 12 and FIG. 13 begin the wiping of the private sequence. The party S then enters the step (5G5), at this time

數器設定為第-地址位置。本方法然後繼續進入步驟U 51〇):在步驟(51〇)中,本方法對該記憶體陣列的一區 又中之地址位置執行確認抹除。該地址位置可以是單一位 元位置的記憶體地址、或該區段的1/〇或字位置之記情體 如果㈣錄置的確認絲失敗了,則本方法繼續 達了 ::驟(52〇)。在步驟(52〇)巾’本方法決定是否已到 取大脈波計數。如果已到達了最大脈波計數(”是,,分 則本方法繼續進入步驟( 530 ),此時指示該裝置的一 確貫失敗。如果尚未到達最大脈波計數(&quot;否”分支),則本 方去進入步驟(525 ),以便施加抹除脈波。 在步驟(525)中,本方法在8至12毫秒的一段持續 92257(修正版) 31 1260639 時間中將一抹除脈波施加到該區段的各附餘行位置及正常 行位置(例如一個10毫秒的脈波)。在一段放電時間之後, 在0.5至2毫秒(例如i毫秒)的一段持續時間中將單端 脈波施加到附餘行位置中之位元,然後在〇 5至2毫秒(例 如1毫秒)的一段持續時間中將一單端脈波施加到正常行 =置中之位元。本方法然後回到步驟(別),以便確認目 前地址位置的抹除。如果目前地址位置的確認抹除通過 了,則本方法繼續進入步驟(535 ),以便決定目前位元或 I/O位址是否為最大地址位置。如果目前記憶單元或ι/〇 位址不是最大地址位置否”分支),則在步驟⑸中 將地址計數器的地址位置遞增到次一地址位置。本方法然 後回到步驟(510),以便執行對該次一地址位置的抹除: 確認。如果在步驟(535 )中決定已達到了最大地址(”是” 分支)’、則本方法結束,且該裝置回到正常作業。 申二ίΠ明前述及其它目的,本發明包括有後敘之 二所完整敘述及特別指出之特徵,但是對此 員技*具有—般知識者當可了解,本發明 也是可能的。因此,本發明將包含在_ &quot;利關的精神及範圍内的所有此類改變、修改、及變 以只參照數種實施例中之-種實施例而 ==特徵,但是可將此種特徵與任何特定應 :要及有利的其他實施例之一個或多個其他特徵結 【圖式簡單說明】 92257(修正版) 32 1260639 弟1圖是可實施本發明的各 早兀之一侧視剖面圖; 例不雙位元記 第2圖是用來解說將一已編程之 憶單元的一正常區及—附餘區之雙位元::在雙位元記 圖; °丨思早7L侧視剖面 罘3圖是料解說由於雙 :[元的過度編程而將不均勻的電荷積上^ 央區=雙位元記憶單元側視剖面圖; 早凡的中 ^圖是用來解說在只使用單端抹 除_早兀之後殘留電荷 ㈣而抹除而抹 的中央區之雙位元计妾近陣列邊緣的記憶單元 — 又位己h早疋側視剖面圖; -第5圖是用來解說在抹除根據本 疋之後移開了停留在接近陣列 I位疋—早 殘留電荷之雙位元紀,产_ 、°己^早兀的中央區的 ^ 又位兀5己饫早凡側視剖面圖; 第6圖是適於實施本發 意圖; 月的各種面向的系統之方塊示 第7圖是根據本發明而呈古 的雙位元快閃記憶體陣列的:子:的16位元記憶體 $ 8 64Κ區段之—部分俯視圖; 分之示意Ξ 明的雙位元記憶單元的一列的-部 盘第第:圖^據本發明—面向的一第一位元ντ改變值 /、弟:位兀編/呈時間之間的關係圖; 程及是根據本發明面向的ν τ改變值電荷耗損與編 柱及抹除週期間之關係圖; 92257(修正版) 33 1260639 弟η圖是用來決定—相當高的v 程參數以便編程根據本發 、文值及砥擇的鳊 —及第二位元之方法之二面向的雙位元記憶單元的第 弟12圖是用來對根據本發明 ’ I +啜叼一面向的 π記,單元執行抹除確認的方法之流程圖; 弟13圖是用來在執行根據本發明 示抹除確認方法之後對該雙位向的乐U圖戶執㈣式編程的方法之流程圖,·=早轉列的記憶單力弟14圖是用來在執行根據本發明—面 示軟式編程方法之後對該雙位元计ί二向的弟13 _ 執行確認抹除的方法之流程圖。仏早7&quot;陣列的記憶單元【主要元件符號說明】 陣列的雙位 4 第一區 6 第二區 9 P型基材區 12 多晶秒層 16 氮化秒層 20 硼離子核心植入物 24 導電部分 28,39 第二電荷 32 第一位元線 40 額外位元區 46 電荷 68 5己fe、體陣列 5,42 8 10 14 18 22 26,38 30 34 44 60 中央區 通道 雙位元記憶單元 上二氧化石夕層 下 氧化層 氧化物部分 弟一電荷 ΟΝΟ層 第二位元線 正常位元區 系統The counter is set to the first address position. The method then proceeds to step U 51〇): In step (51〇), the method performs a confirm erase on the address locations of one region of the memory array. The address location may be a memory address of a single bit location, or a 1/〇 or word location of the segment. If the (4) recording confirmation fails, the method continues: : (52 〇). In the step (52〇) towel, the method determines whether a large pulse count has been taken. If the maximum pulse count has been reached ("Yes, the method continues to step (530), indicating a true failure of the device. If the maximum pulse count has not been reached (&quot;No" branch), Then the party goes to step (525) to apply the erase pulse. In step (525), the method applies a wipe pulse to the period of 8 to 12 milliseconds for a period of 92257 (revision) 31 1260639. Each of the remaining line positions of the segment and the normal line position (eg, a 10 millisecond pulse). After a period of discharge, a single-ended pulse is applied for a duration of 0.5 to 2 milliseconds (eg, i milliseconds) To the bit in the margin row position, then apply a single-ended pulse to the normal row = centered bit for a duration of 5 to 2 milliseconds (eg, 1 millisecond). The method then returns to the step (other), in order to confirm the erasure of the current address location. If the current address location confirmation erase is passed, the method proceeds to step (535) to determine whether the current bit or I/O address is the maximum address location. If If the pre-memory unit or the IP address is not the maximum address location "branch", then the address location of the address counter is incremented to the next address location in step (5). The method then returns to step (510) to perform the Erase of the next address position: Confirm. If it is determined in step (535) that the maximum address ("Yes" branch) has been reached, then the method ends and the device returns to normal operation. For other purposes, the present invention includes the full description and specific features of the second embodiment, but it will be understood by those skilled in the art that the present invention is also possible. Therefore, the present invention will be included in _ &quot All such changes, modifications, and variations within the spirit and scope of the invention are to be construed as merely referring to the embodiments of the various embodiments. One or more other features of other embodiments [Simplified illustrations] 92257 (Revised) 32 1260639 Figure 1 is a side cross-sectional view of each of the early embodiments in which the present invention can be implemented; 2nd It is used to explain a normal area of a programmed memory unit and the double bit of the attached area: in the double bit chart; °丨思早 7L side view section 罘3 picture is the material explanation due to double: [The over-programming of the element will result in uneven charge accumulation. The central area = double-dimensional memory unit side view; the early middle picture is used to explain the residual charge after using only single-ended erase_ early 兀(4) The double-dimensional unit of the central area erased and wiped is close to the memory unit at the edge of the array—there is a side view of the side of the array; and the fifth picture is used to explain the removal after the erase according to the present. Stayed in the double position of the array near the array I - early residual charge, the production of _, ° has been early in the central area of the ^ 兀 饫 饫 饫 饫 饫 饫 饫 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; The present invention is directed to a block diagram of various system-oriented systems of the month. Figure 7 is an array of ancient two-bit flash memory arrays according to the present invention: sub-port: 16-bit memory $8 64-section-part a top view of the two-dimensional memory unit of the two-dimensional memory unit: Figure 1. According to the present invention - a first Yuan ντ change value /, brother: bit 兀 edit / time between the relationship diagram; process and is according to the invention oriented ν τ change value charge loss and the relationship between the column and erase cycle; 92257 (revision) 33 1260639 The η diagram is used to determine the relatively high v-parameter parameters for programming the second-dimensional memory unit based on the method of the present invention, the value and the choice of the second-bit method. Figure 12 is a flow chart of a method for performing erase confirmation on a unit according to the 'I + 啜叼-face of the present invention; FIG. 13 is for performing the erase confirmation method according to the present invention. A flow chart of a method for bi-directional music U-picture (four) programming, ·= early memory of the memory single force 14 picture is used to perform the double-bit method after performing the soft programming method according to the present invention ί Two-way brother 13 _ A flowchart of the method of performing the confirmation erase.仏早7&quot;Array of memory cells [Main component symbol description] Array of double bits 4 First region 6 Second region 9 P-type substrate region 12 Polycrystalline seconds layer 16 Nitride seconds layer 20 Boron ion core implant 24 Conductive portion 28, 39 second charge 32 first bit line 40 extra bit area 46 charge 68 5 fe, body array 5, 42 8 10 14 18 22 26, 38 30 34 44 60 central channel double bit memory The second bit line normal bit region system of the oxide layer in the oxide layer of the oxide layer

69 64Κ區段 92257(修正版) 34 1260639 62 位址解碼器 64 命令邏輯組件 65 狀態機 66 電壓產生器組件 70 64K區塊 72 ΟΝΟ堆疊條 74 多晶秒子線 76 行 78 第一接點 79 第二接點 82 第一雙位元記憶單元 84 第二雙位元記憶單元 86 第三雙位元記憶單元 88 第四雙位元記憶單元 88,90,92,94 選擇閘 96 第一開關 98 第二開關 100 第三開關 35 92257(修正版)69 64Κ Section 92257 (Revised) 34 1260639 62 Address Decoder 64 Command Logic Component 65 State Machine 66 Voltage Generator Component 70 64K Block 72 ΟΝΟ Stacking Strip 74 Polycrystalline Second Strand 76 Row 78 First Contact 79 Second contact 82 first dual bit memory unit 84 second dual bit memory unit 86 third double bit memory unit 88 fourth double bit memory unit 88, 90, 92, 94 select gate 96 first switch 98 Second switch 100 third switch 35 92257 (revision)

Claims (1)

弟9 2 1 Ο Ο 2 9 6號專利申請宰 申請專利範圍修正本 (95年4月19曰) 1 · 一種用來編程在雙位元模式中工作的ΟΝΟ雙位元記 憶早元(1 〇 ’ 8 2 ’ 8 4,8 6,8 8 )中的位元之方法,該方法包-含下列步驟: 將編知脈波施加到该雙位元記憶單元(1 〇,8 2,8 4, 86,88 )的至少一個位元,其方式為將電壓施加到該 至少一個位元的汲極,且同時將電壓施加到該至少一 個位元的閘極; ® 確認該至少一個位元的VT改變值是在大約2〇 伏至大約2.5伏的範圍内;以及 重複施加編程脈波的步驟,直到該至少一個位元 的該VT改變值是在大約2·〇伏至大約2·5伏的範圍 内。 2·如申請專利範圍第1項之方法,其中施加編程脈波的 該步驟包含下列步驟··將範圍為大約5伏至大約5 5 _ 伏的一電壓施加到該汲極,且同時將範圍為大約9.25 伏至大約9 · 5伏的一電壓施力口到該閘極。 3.如申請專利範圍第1項之方法,其中該〇Ν〇雙位元 §己憶單元(10,82,84,86,88 )係在雙位元模式中工作, 其中該ΟΝΟ雙位元記憶單元(1〇,82,84,86,88 )具有 正常位元及一附餘位元,其中該正常位元及該附餘位 元被編程。 4· 一種用來決定編程參數以便編程雙位元模式中工作 92257(修正版) /9. 126^639 的一個ΟΝΟ雙位元記憶單元陣列(6 一 法,該方法包含下列步驟: 、位TL之方 對一批中之至少—個陣列執行一預 程及抹除週期,然後執行加速烘烤丨、-人的編 在該等編程及抹除週期及加速烘 至少-個陣列的至少-個位元之—電決定該 決定VT改變值的—增加,以=批 干額外陣列的至少一個陣列的至少::中的若 耗損;以及 70 &lt;電何 決定若干編程參數,以便可在可接 内在該增加的VT改變值下編程該等記憶單元^ 編私翏數包含-編程脈波寬度、在該位元的i 的該編程脈波之-電位、以及在該位元的沒極上的今 編程脈波之一電位。 ' M 5. 如申請專·圍第4項之方法,其中該編程脈波寬度 在大約9.25伏至大肖9.5伏的閘極電位上及在大約 5·〇伏至大約5.5伏的汲極電位上是大約為〇 5微秒。 6. 如申請專利範圍第5項之方法,進一步包含下列步 驟:設定命令邏輯(64)及狀態機(65),以便利^ 所選擇的該汲極及閘極電位而編程到該增加的ντ改 變值。 7· —種用來編程在雙位元模式中工作的〇Ν〇雙位元記 憶單元陣列(68 )之系統,該系統包含: ΟΝΟ雙位元快閃記憶單元陣列(); 耦合到該ΟΝΟ雙位元快閃記憶單元陣列(68 ) 92257(修正版) 2 L_— 之地址%碼裔組件(6 2 ),該地址解碼器組件(a ) 係適於提供對該等ΟΝΟ雙位元快閃記憶單元的位元 之存取; 電壓產生器(66),該電壓產生器(66)適於提 供適當的電壓,以便對該等0Ν0雙位元快閃記憶單 元的位元執行編程及抹除;以及 包含狀態機(65 )的命令邏輯組件(64 ),該命 令邏輯組件(64 )及狀態機(65 )係耦合到該陣列及 該位址解碼器組件(62 ),且係可作業而控制該電壓 產生為(66 ),該命令邏輯組件(64 )及狀態機(65 ) 係適於編程至少一個位元,其編程方式為:選擇該至 少一個位元;施加一編程脈波,該編程脈波將第一電 壓施加到該至少一個位元的一汲極,並將第二電壓施 加到該至少一個位元的閘極;確認該至少個位元的 VT改變值是在大約2.0伏至大約2.5伏的範圍内;以 及 重複施加一編程脈波的該步驟,直到該至少一個位元 的該VT改變值是在大約2.0伏至大約2.5伏的範圍 内。 8 ·如=请專利範圍第7項之系統,其中施加到該汲極的 電壓係在大約5.0伏至大約5·5伏的範圍,且施加到 該閘極的電壓係在大約9·25伏至大約9.5伏的範圍。 9·如申請專利範圍第8項之系統,其中該編程脈波具有 大約0.5微秒的一持續時間。 10·如申請專利範圍第7項之系統,其中該〇ΝΟ雙位元 吕己憶單元陣列(6 8 )係在雙位元模式中工作,其中每 3 92257(修正版) Φ . 換II Φ . 換II ·μ·« ·μ «ΐΜ·Μ**ΜνΊ&gt;ι^ ’ 一該等ΟΝΟ雙位元記憶單元具有正常位元及附餘位 元,其中該正常位元及該附餘位元被編程。 92257(修正版) 4Brother 9 2 1 Ο Ο 2 9 6 Patent Application Amendment Patent Application Revision (April 19, 1995) 1 · A ΟΝΟ double-bit memory early element (1 用来 for programming in dual-bit mode A method of bits in ' 8 2 ' 8 4,8 6,8 8 ), the method package comprising the steps of: applying a programmed pulse wave to the dual bit memory unit (1 〇, 8 2, 8 4 At least one bit of 86, 88) by applying a voltage to the drain of the at least one bit and simultaneously applying a voltage to the gate of the at least one bit; ® confirming the at least one bit The VT change value is in the range of about 2 volts to about 2.5 volts; and the step of repeatedly applying a programming pulse until the VT change of the at least one bit is at about 2 〇 至 to about 2.5 volts In the range. 2. The method of claim 1, wherein the step of applying a programming pulse comprises the steps of: applying a voltage ranging from about 5 volts to about 5 5 volts to the drain, and simultaneously A voltage is applied to the gate from a voltage of about 9.25 volts to about 9.5 volts. 3. The method of claim 1, wherein the double-bit § hex unit (10, 82, 84, 86, 88) operates in a two-bit mode, wherein the ΟΝΟ double-bit The memory unit (1, 82, 84, 86, 88) has a normal bit and a residual bit, wherein the normal bit and the residual bit are programmed. 4. A method for determining programming parameters to program a dual-bit memory cell array in the two-bit mode working 92257 (revision) / 9. 126^639 (6-method, the method comprises the following steps: , bit TL Performing a pre-processing and erasing cycle on at least one of the arrays, then performing accelerated baking, at least one of the programming and erasing cycles, and accelerating at least one of the arrays The bit-to-electricity determines the increment of the VT change value to = dry out at least one of the at least one array of the additional array; and 70 &lt; electrical determines several programming parameters so that it can be connected Programming the memory cells within the increased VT change value internally includes a programming pulse width, a potential of the programming pulse at i of the bit, and a current on the pole of the bit Programming one of the pulse potentials. ' M 5. For the method of applying the fourth item, the programming pulse width is about 9.25 volts to the gate potential of 9.5 volts and about 5 volts to About 5.5 volts, the potential of the drain is about 〇 5 microseconds. 6. The method of claim 5, further comprising the steps of: setting command logic (64) and state machine (65) to facilitate programming of the selected drain and gate potentials The increased ντ change value. 7. A system for programming a dual bit memory cell array (68) operating in a dual bit mode, the system comprising: ΟΝΟ dual bit flash memory cell array (); coupled to the address of the dual bit flash memory cell array (68) 92257 (revision) 2 L_- address % code component (6 2 ), the address decoder component (a) is adapted to provide a pair Accessing the bits of the dual bit flash memory cells; a voltage generator (66) adapted to provide an appropriate voltage for the 0Ν0 dual bit flash memory cells The bit is programmed and erased; and a command logic component (64) including a state machine (65) coupled to the array and the address decoder component ( 62), and is operable to control the voltage production For (66), the command logic component (64) and the state machine (65) are adapted to program at least one bit by programming: selecting the at least one bit; applying a programming pulse, the programming pulse will a first voltage is applied to a drain of the at least one bit and a second voltage is applied to the gate of the at least one bit; confirming that the VT change of the at least one bit is between about 2.0 volts to about 2.5 volts And the step of repeatedly applying a programming pulse until the VT change value of the at least one bit is in the range of about 2.0 volts to about 2.5 volts. 8. The system of claim 7, wherein the voltage applied to the drain is in the range of about 5.0 volts to about 5.5 volts and the voltage applied to the gate is about 9.25 volts. Up to a range of approximately 9.5 volts. 9. The system of claim 8 wherein the programming pulse has a duration of about 0.5 microseconds. 10. The system of claim 7, wherein the dual-element Lv Yiyi cell array (6 8) operates in a two-bit mode, wherein each 3 92257 (corrected version) Φ. changes II Φ Change II · μ·« ·μ «ΐΜ·Μ**ΜνΊ&gt;ι^ ' One of the two-bit memory cells has normal bits and residual bits, wherein the normal bits and the reserved bits Is programmed. 92257 (revision) 4
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