TW202135959A - Electrode guiding device and electrical discharge machining device using the same - Google Patents

Abstract

The present invention provides a fluid guiding bearing comprising a first fluid bearing and a second fluid bearing. The first fluid bearing comprises a first through hole allowing a wire electrode passing therethrough. The first fluid bearing further comprises a plurality of first fluid channel communicated with the first through hole for providing fluid acting onto the wire electrode. The second fluid bearing arranged at a side of the first fluid bearing comprises a second through hole allowing the wire electrode passing therethrough. The second fluid bearing further comprises a plurality of second fluid channel communicated with the second through hole for providing the fluid acting onto the wire electrode. Alternatively, the present invention provides an electrical discharge machining device utilized the fluid guiding bearing for reducing vibration and loss of the wire electrode during machining process.

Description

Electrode guiding device and its electric discharge machining device

The present invention is a wire electrode guiding technology, in particular to an electrode guiding device and its electrical discharge machining device for improving electrode stability and reducing electrode loss during processing.

With the advancement of science and technology, industries in various fields have demand for miniaturization of parts. Among them, miniature holes play an important role in miniaturized components. Although micro-holes can be widely used in different industrial fields, especially in biotechnology, optoelectronic semiconductors or medical fields, how to control the dimensional accuracy or roughness of their processing also affects the evolution of the manufacturing process.

Fine hole electric discharge machining is a main processing method for fine hole or deep hole machining. The small hole electric discharge machine clamps the tubular electrode by the chuck set on the main shaft, rotates the tubular electrode, and sprays the high-pressure machining fluid from the tubular electrode, and conducts electric discharge machining on the workpiece by energizing the tubular electrode. To achieve the purpose of micro-hole and deep-hole machining on the workpiece.

Please refer to Figure 1, which is a schematic diagram of a conventional fine-hole EDM. One end of the wire electrode 10 is clamped by the rotating chuck 11, and the other end passes through the eye mold 12 fixed below the spindle. The eye mold 12 is used to constrain the wire electrode to avoid excessive vibration amplitude during rotation that affects the machining accuracy. Nevertheless, since the wire electrode 10 is subjected to electrical discharge machining, because the axis of the rotating chuck 11 and the axis of the wire electrode 10 will have an error, when the rotating chuck 11 rotates, the wire electrode 10 will be generated due to centrifugal effect. Vibration deformation, although there is clamping of the eye mold 12, the length of the wire electrode 10 itself enhances the effect of the centrifugal vibration . Therefore, the end of the wire electrode 10 is a common problem. This offset will cause adverse effects such as hole position deviation after machining and enlarged aperture, and the machining stability system cannot truly meet the needs of micro-hole machining.

In addition, in order to match different pore sizes, the wire electrode 10 will also have different sizes. In order to match the tubular electrodes of different sizes, in conventional processing machines, there will be a tool magazine for placing wire electrodes 10 of different sizes for replacement during processing. Although the wire electrode 10 can be replaced automatically, the eye mold 12 that matches the wire electrode 10 cannot be automatically replaced. Therefore, after replacing the wire electrode 10, the user must additionally manually replace the eye mold 12, which will increase the processing requirements. Time, and reduce the efficiency of production and processing.

In summary, there is a need for an electrode guiding device and an electrical discharge machining device to solve the shortcomings of the conventional technology.

The present invention provides an electrode guiding device and an electrical discharge machining device. The fluid is guided through a double-layer fluid bearing structure, such as liquid or gas-liquid mixed fluid or bubble, liquid and particle mixed fluid, and contact with wire electrode, This prevents the wire electrode in rotation from contacting the guiding structure (or eye mold), reducing the problems of wear and electrode vibration. In addition, through the design provided by the present invention, it is not necessary to replace the eye molds when processing fine holes or deep holes of different sizes, which avoids the problem that the conventional technology stops due to manual eye mold replacement and cannot be automated and reduces production efficiency.

In one embodiment, the present invention provides an electrode guiding device including a first fluid bearing and a second fluid bearing. The first fluid bearing has a first electrode through hole for providing a wire electrode to pass through. The first fluid bearing has a plurality of first drainage channels in communication with the first electrode through hole, and the plurality of first drainage channels guide a fluid to act on the wire electrode. The second fluid bearing is arranged on one side of the first fluid bearing, and the second fluid bearing has a second electrode through hole corresponding to the first electrode through hole for providing wire electrodes to pass through. There are a plurality of second drainage channels in the second fluid bearing, which are communicated with the through holes of the second electrode, and the plurality of second drainage channels guide fluid to act on the wire electrode.

In another embodiment, the present invention provides an electrical discharge machining device, which includes an electrode holding portion and an electrode guiding device. The electrode holding part is used for holding a wire electrode and rotating the wire electrode. The electrode guiding device is arranged on one side of the electrode holding part for guiding the wire electrode. The electrode guiding device includes a first fluid bearing and a second fluid bearing. The first fluid bearing has a first electrode through hole for providing a wire electrode to pass through. The first fluid bearing has a plurality of first drainage channels in communication with the first electrode through hole, and the plurality of first drainage channels guide a fluid to act on the wire electrode. The second fluid bearing is arranged on one side of the first fluid bearing, and the second fluid bearing has a second electrode through hole corresponding to the first electrode through hole for providing wire electrodes to pass through. There are a plurality of second drainage channels in the second fluid bearing, which are communicated with the through holes of the second electrode, and the plurality of second drainage channels guide fluid to act on the wire electrode.

In one embodiment, the present invention further provides an electrical discharge machining device, which includes a first electrode reel module, a second electrode reel module, and a pair of electrode guiding devices. The first electrode reel module is used to provide a wire electrode. The second electrode reel module receives the wire electrode. The pair of electrode guiding devices correspond to each other and are separated by a specific distance, and respectively correspond to the first and second electrode reel modules, and one of the electrode guiding devices is received by the first electrode reel module to receive the wire electrode , And transfer the wire electrode to another electrode guiding device to be received by the second electrode reel module. Each electrode guiding device includes a first fluid bearing and a second fluid bearing. The first fluid bearing has a first electrode through hole for the wire electrode to pass through. The first fluid bearing has a plurality of first drainage channels in communication with the first electrode through hole. A first drainage channel guides a first fluid to act on the wire electrode. The second fluid bearing has a second electrode through hole corresponding to the first electrode through hole for allowing the wire electrode to pass through. The second fluid bearing has a plurality of second drainage channels in it, and the second The electrode through holes are connected, and the plurality of second drainage channels guide the first fluid to act on the wire electrode.

Hereinafter, referring to the accompanying drawings, various exemplary embodiments may be described more fully, and some exemplary embodiments are shown in the accompanying drawings. However, the inventive concept may be embodied in many different forms, and should not be construed as being limited to the exemplary embodiments set forth herein. To be precise, the provision of these exemplary embodiments makes the present invention detailed and complete, and will fully convey the scope of the concept of the present invention to those skilled in the art. Similar numbers always indicate similar components. Hereinafter, various embodiments and drawings will be used to illustrate the electrode guiding device and its electrical discharge machining device. However, the following embodiments are not intended to limit the present invention.

Please refer to Figures 2 to 4, where Figure 2 is a schematic diagram of an embodiment of an electrode guiding device of the present invention, Figure 3 is a schematic top view of the first fluid bearing of the present invention, and Figure 4 is AA of the electrode guiding device of Figure 1 Schematic cross-section. In this embodiment, the electrode guiding device 2 includes a first fluid bearing 20 and a second fluid bearing 21. The first fluid bearing 20 has a first electrode through hole 200 for allowing a wire electrode 22 to pass through. In this embodiment, the wire electrode 22 is a tubular electrode with a hollow channel 220. The material can be selected as copper, but it is not limited to this. In another embodiment, the wire electrode 22 may also be a solid wire electrode without the hollow channel. In an embodiment, the diameter of the wire electrode 22 may be between 0.3 mm and 1 mm, but it is not limited thereto. The first fluid bearing 20 has a plurality of first drainage channels 201 in communication with the first electrode through hole 200, and the plurality of first drainage channels 201 guide a first fluid 90 to act on the wire electrode 22. In this embodiment, the first fluid 90 can be a liquid or a gas, or a gas-liquid mixed fluid, where the gas can be air or an inert gas, and the gas can also be nitrogen or oxygen. In an embodiment, the first fluid 90 may further contain micro- or nano-micro bubbles or micro- or nano-particles, or a fluid that is a mixture of bubbles and particles. For various combinations of liquid and particles, please refer to Japan The types of liquids and particles disclosed in Japanese Patent Publication Sho 59-93239. In addition, in the embodiment shown in FIG. 3, the number of the plurality of first drainage channels 201 is eight, and the first electrode through hole 200 is taken as the center, and the first fluid bearing 20 is equiangularly and uniformly annularly arranged. It should be noted that the number of first drainage channels 201 is not limited to eight, and can be determined according to requirements. The plurality of first drainage passages 201 communicate with an intake passage 23, and the intake passage 23 is connected to a fluid supply source 5 that can provide the first fluid.

Returning to FIG. 2 again, the second fluid bearing 21 is disposed on one side of the first fluid bearing 20. The second fluid bearing 21 has a second electrode through hole 210 that is connected to the first electrode through hole 200. Correspondingly, for allowing the wire electrode 22 to pass through, the second fluid bearing 21 has a plurality of second drainage channels 211 in communication with the second electrode through holes 210, and the plurality of second drainage channels 211 guide the The first fluid 90 acts on the wire electrode 22. In this embodiment, the structure of the second fluid bearing 21 and the first fluid bearing 20 may be the same or different, and the difference will be described later. The second fluid bearing 21 may share a fluid supply source with the first fluid bearing 20 or may be independently provided with a fluid supply source.

4, the channel center axis of the plurality of first drainage channels 201 and the center axis of the wire electrode 22 have a first included angle θ1; the channel center axis of the plurality of second drainage channels 211 and the wire electrode 22 The central axis has a first included angle θ2. The wire electrode 22 is an electrode with a hollow channel 220 inside, which can provide a second fluid 91 to pass through. In this embodiment, the second fluid 91 can be a liquid or a gas, or a gas-liquid mixed fluid, where the gas can be air or an inert gas, and the gas can also be nitrogen or oxygen. In an embodiment, the second fluid 91 may further contain micro- or nano-bubbles or micro- or nano-particles, or a fluid that is a mixture of bubbles and particles. For various combinations of liquid and particles, please refer to Japan The types of liquids and particles disclosed in Japanese Patent Publication Sho 59-93239. The first included angle θ1 or the second included angle θ2 may be greater than 90 degrees or less than 90 degrees.

Please refer to FIGS. 5A to 5D, which are schematic diagrams showing the arrangement of the first and second drainage channels 201 and 211 in the first and second fluid bearings 20 and 21, respectively. In FIG. 5A, the first included angle θ1 of the first drainage channel 201 of the first fluid bearing 20 and the second included angle θ2 of the second drainage channel 211 of the second fluid bearing 21 are both less than 90 degrees and are the same or different angles. . In the embodiment of FIG. 5A, in the first fluid bearing 20, the first fluid 90 flows along the first drainage channel 201, and a synthetic fluid 93 is formed in the first fluid bearing 20, which flows downward; In the second fluid bearing 21, the first fluid 90 flows along the second drainage channel 211, and a synthetic fluid 94 is formed in the second fluid bearing 21, which flows downward. As shown in FIG. 5A, S1 represents the contact position of the first fluid 90 flowing along the first drainage channel 201 in the first fluid bearing 20 and the wire electrode 22, and constitutes the first supporting point for supporting the wire electrode 22. S2 represents the contact position of the first fluid 90 flowing along the second drainage channel 211 in the second fluid bearing 21 and the wire electrode 22, and constitutes a second supporting point for supporting the wire electrode 22. In FIG. 5B, the first included angle θ1 of the first drainage channel 201 of the first fluid bearing 20 and the second included angle θ2 of the second drainage channel 211 of the second fluid bearing 21 are both greater than 90 degrees and are the same or different angles. . In the embodiment of FIG. 5B, in the first fluid bearing 20, the first fluid 90 flows along the first drainage channel 201, and a synthetic fluid 93 is formed in the first fluid bearing 20, which flows upward; In the fluid bearing 21, the first fluid 90 flows along the second drainage channel 211, and a synthetic fluid 94 is formed in the second fluid bearing 21, which flows upward. As shown in FIG. 5B, S1 represents the contact position of the first fluid 90 flowing along the first drainage channel 201 in the first fluid bearing 20 and the wire electrode 22, and constitutes the first supporting point for supporting the wire electrode 22. S2 represents the contact position of the first fluid 90 flowing along the second drainage channel 211 in the second fluid bearing 21 and the wire electrode 22, and constitutes a second supporting point for supporting the wire electrode 22.

In FIG. 5C, the first included angle θ1 of the first drainage channel 201 of the first fluid bearing 20 is greater than 90 degrees, and the second included angle θ2 of the second drainage channel 211 of the second fluid bearing 21 is less than 90 degrees. In the embodiment of FIG. 5C, in the first fluid bearing 20, the first fluid 90 flows along the first drainage channel 201, and a synthetic fluid 93 is formed in the first fluid bearing 20, which flows upward; In the fluid bearing 21, the first fluid 90 flows along the second drainage channel 211, and a synthetic fluid 94 is formed in the second fluid bearing 21, which flows downward. As shown in FIG. 5C, S1 represents the contact position of the first fluid 90 flowing along the first drainage channel 201 in the first fluid bearing 20 and the wire electrode 22, and constitutes the first supporting point for supporting the wire electrode 22. S2 represents the contact position of the first fluid 90 flowing along the second drainage channel 211 in the second fluid bearing 21 and the wire electrode 22, and constitutes a second supporting point for supporting the wire electrode 22. In FIG. 5D, the first included angle θ1 of the first drainage channel 201 of the first fluid bearing 20 is less than 90 degrees, and the second included angle θ2 of the second drainage channel 211 of the second fluid bearing 21 is greater than 90 degrees. In the embodiment of FIG. 5D, in the first fluid bearing 20, the first fluid 90 flows along the first drainage channel 201, and a synthetic fluid 93 is formed in the first fluid bearing 20, which flows downward; In the second fluid bearing 21, the first fluid 90 flows along the second drainage channel 211, and a synthetic fluid 94 is formed in the second fluid bearing 21, which flows upward. As shown in FIG. 5D, S1 represents the contact position of the first fluid 90 flowing along the first drainage channel 201 in the first fluid bearing 20 and the wire electrode 22, and constitutes the first supporting point for supporting the wire electrode 22. S2 represents the contact position of the first fluid 90 flowing along the second drainage channel 211 in the second fluid bearing 21 and the wire electrode 22, and constitutes a second supporting point for supporting the wire electrode 22. Unlike the flow directions of the synthetic fluids 93 and 94 shown in FIGS. 5A to 5C, the synthetic fluid 93 and the synthetic fluid 94 are in opposite directions in FIG. 5D, so the two fluids 93 and 94 are in the first fluid bearing 20 and the second fluid bearing 21 The intersection between them generates a force on the wire electrode 22 and constitutes a third supporting point for supporting the wire electrode 22.

Please refer to FIG. 6, which is a schematic diagram of another embodiment of the electrode guiding device of the present invention, which includes a cross-sectional schematic diagram of the flow guiding device. FIG. 6 shows that the first fluid bearing 20 and the second fluid bearing 21 are further provided with a plurality of support columns 24 to maintain a distance between the first fluid bearing 20 and the second fluid bearing 21. In an embodiment, the spacing can be used as a space for the fluid ejected from the first or second fluid bearings 20 and 21 to escape. The electrode guiding device 2 further has a guiding device 25 arranged on the other side of the first fluid bearing 20 so that the first fluid bearing 20 is located between the second fluid bearing 21 and the guiding device 25. The flow guiding device 25 has a third electrode through hole 250 corresponding to the first electrode through hole, and the third electrode through hole 250 is used for allowing the wire electrode 22 to pass through. In this embodiment, the flow guiding device 25 further includes a supporting seat 251, a flow guiding tube 252 and a connecting piece 253. The support base 251 is disposed on the first fluid bearing 20, and the connecting member 253 connects the flow guide tube 252 to the support base 251. In this embodiment, the purpose and principle of the guiding device 25 is to pass through the first and second fluid bearings 20 and 21, and the fluid guided by the plurality of first and second guiding channels 211 generates injection pressure to form two The fulcrum can suppress the electrode vibration. In addition, since the wire electrode 22 extends upwards to the position of the pinch electrode in the third electrode through hole 250, the wheelbase at both ends is very long, so a great vibration is generated, and the upward jet flow guided by the guide device 25 is suppressed Because of the vibration of the wire electrode 22, the vibration of the wire electrode can be stabilized again.

Please refer to FIG. 7A, which is a schematic diagram of an embodiment of the electrical discharge machining apparatus of the present invention. In this embodiment, the electrical discharge machining device 3 is a fine hole electrical discharge machining device or a deep hole electrical discharge machining device, but it is not limited thereto. The electrical discharge machining device 3 drives the wire electrode 22 to drill a workpiece 92. The electrical discharge machining device 3 includes an electrode holding portion 31 and an electrode guiding device 2. The electrode holding portion 31 is coupled to a driving portion 30 of the electrical discharge machining device 3. The driving unit 30 has a driving device 300, such as a motor, which transmits the rotational power generated by the driving device to the electrode holding portion 31 through transmission elements, such as belts, gear sets, and other elements. The electrode holding portion 31 is used for holding the wire electrode 22 and rotating the wire electrode 22 by the rotational power generated by the driving device 300. The electrode guiding device 2 is arranged on one side of the electrode holding portion 31 for guiding the wire electrode 22. The wire electrode 22 extends from the electrode holding portion 31 to the electrode guiding device 2. The structure of the electrode guiding device 2 is as described in FIGS. 2 to 6 and will not be repeated here.

Please refer to FIG. 7B. In this embodiment, it is basically similar to FIG. 7A. The difference is that the fluid supply source 5 of this embodiment is provided inside the electrical discharge machining device 3 instead of being provided in the electrical discharge machining device 3 as shown in FIG. 7A. external. In addition, in the embodiment of FIG. 7C, it is basically similar to that of FIG. 7B. The difference is that the output shaft of the driving device 300, such as a motor, of the driving portion 30 in this embodiment is directly coupled to the electrode holding portion 31, and directly The electrode holding portion 31 is driven to rotate. As shown in Fig. 7D, this embodiment is basically similar to Fig. 7C. The difference is that, in this embodiment, the fluid supply source 5 is provided inside the electrical discharge machining device 3 and its pipeline is connected to the first fluid bearing via a connecting piece 253. 20 is coupled to the intake passage 23 of the second fluid bearing 21. In addition, it should be noted that other components of the fine hole EDM device or the deep hole EDM device, such as the power supply, the structure of the machine body, or the drive device that carries the workpiece platform, etc., although not shown in the figure, are well-known in the art , I won’t repeat it here.

Please refer to FIG. 8, which is a schematic diagram of another embodiment of the electrical discharge machining apparatus of the present invention. In this embodiment, the electrical discharge machining device 4 is an electrical discharge wire cutting device, which has a pair of electrode guiding devices 2 and 2', which correspond to each other and are separated by a specific distance, and are respectively connected to the first and second electrode reels. Modules 401 and 406 correspond to each other. The first electrode reel module 401 is used to provide a wire electrode 1. In this embodiment, the first electrode reel module 401 includes a plurality of guide pulleys 42 a-42 e coupled by the wire electrode 1, the electrode guiding device 2 and the reel 41. The first electrode reel module 401 further includes a conveying roller 44 and pressing rollers 44a and 144b. The wire reel 41 is used to supply the wire electrode 1 required for processing. The wire reel 41 is coupled to a first drive motor 43a. The winding wheel 41 receives the rotation force provided by the first drive motor 43a to rotate, and releases the wire electrode 1 wound thereon. In this embodiment, the guiding pulleys 42a to 42e guide the wire electrode 1 on the winding wheel 41 to the pressure roller 44a, and then to the conveying roller 44, and then to the electrode guiding device 2 via the pressure roller 44b.

The structure of the electrode guiding device 2 is shown in FIG. 6, and the description of its components is not repeated here. The electrode guide 2 leads the lead electrode 1 through the workpiece 100 and is received by another electrode guide 2'. After that, the wire electrode 1 is recovered through the guidance of the second electrode reel module 406. In this embodiment, the second electrode reel module 406 includes a roller 45 and electrode recovery rollers 47a and 47b. The roller 45 is used to guide the wire electrode 1 passing through the electrode guiding device 2'to the guiding tube structure 46. The guide tube structure 16 then guides the wire electrode 1 to the electrode recovery rollers 47a and 47b and is received by the recovery rollers (not shown in the figure). The control unit 48 is used to control the first drive motor 43a coupled to the reel 41, the second drive motor 43b coupled to the conveying roller 44, and the third drive motor 43c coupled to one of the recovery rollers. Rotate.

In addition, it should be explained that other elements of the wire-cut electrical discharge machining device, such as power supply, the structure of the machine body, or the drive device for carrying the workpiece platform, etc., although not shown in the figure, are well-known in the art and will not be repeated here.

Please refer to FIG. 9, which is a graph showing the vibration state of the wire electrode guided by the electrode guiding device of the present invention and the conventional eye mold. In Figure 8, Figure 9-(A) represents the amplitude measurement result of the lead electrode using the conventional eye mold; Figure 9-(B) represents the amplitude measurement result of the lead electrode without the eye mold Figure 9-(C) ~ (F) respectively represent the amplitude measurement results of the lead electrode using the electrode guiding device shown in Figure 5A, Figure 5C, Figure 5D and Figure 5B; and Figure 9(G) represents Using the electrode guiding device shown in FIG. 6, the first drainage channel and the second drainage channel in the first fluid bearing 20 and the second fluid bearing 21 are the amplitude measurement results obtained by using the configuration of FIG. 5D.

It can be clearly seen from the above results that the amplitude of the electrode guiding device using the combination of FIGS. 5A to 5D or FIG. 6 plus FIG. It has a good vibration amplitude suppression effect. It can be seen that the design of the present invention, that is, the fluid bearing with multiple layers, can reduce the vibration of the wire electrode. In addition, especially for FIG. 5D, the first included angle θ1 of the first drainage channel 201 of the first fluid bearing 20 is less than 90 degrees, and the second included angle θ2 of the second drainage channel 211 of the second fluid bearing 21 is greater than 90 degrees. Compared with the other implementations of Figs. 5A to 5C, the degree of configuration has a better effect of reducing the vibration of the wire electrode. The main factor is that the radial drainage channels arranged at an angle can generate two-directional synthetic fluids facing each other. 93 and 94 intersect between the first fluid bearing 20 and the second fluid bearing 21 to generate a force on the wire electrode 22 to form a third supporting point for supporting the wire electrode 22. The action of the three supporting points S1~S3 on the wire electrode 22 helps to suppress the vibration amplitude of the wire electrode during rotation. If FIG. 6 is used with more guide device 25 and its first drainage channel 201 and second drainage channel 211 adopt the configuration of FIG. 5D, the effect of suppressing the vibration amplitude will be better. The reason is that the guide device 25 It can further guide the upward synthetic fluid to flow to the position where the wire electrode is pinched, which helps to stabilize the vibration amplitude generated by the rotation of the long-distance wire electrode from the pinch position to the electrode guiding device.

In summary, the electrode guiding device and its electrical discharge machining device provided by the present invention generate a synthetic fluid (upward and Downward jet) to suppress the vibration of the wire electrode, so that the rotating wire electrode will not contact the electrode guiding structure, reducing wear and electrode vibration problems, so that the accuracy of the processing aperture can be improved, and the processing efficiency can be improved. Reduce the loss of electrodes and electrode guides. In addition, through the design provided by the present invention, there is no need to replace the electrode guiding structure when processing pores of different sizes. With the aid of the double-layer fluid bearing, the opening of the lead electrode can be compared with the conventional technology. In terms of enlargement, under the condition of wire electrodes of different diameter sizes, it can still provide a good effect of suppressing the amplitude of the wire electrode, which can avoid the problem of the conventional technology that stops due to manual replacement of the eye mold and cannot be automated and reduces the production efficiency. .

The above description only describes the preferred implementations or examples of the technical means adopted by the present invention to solve the problems, and is not used to limit the scope of implementation of the patent of the present invention. That is to say, all changes and modifications that are consistent with the scope of the patent application of the present invention or made in accordance with the scope of the patent of the present invention are all covered by the scope of the patent of the present invention.

1: Wire electrode 2, 2’, 2a: Electrode guiding device 20: The first fluid bearing 200: first electrode through hole 201: The first drainage channel 21: Second fluid bearing 210: second electrode through hole 211: Second drainage channel 22: Wire electrode 23: intake channel 24: Support column 25: Diversion device 250: Third electrode through hole 251: Support seat 252: Draft tube 253: Connector 3, 4: Electric discharge machining device 400: Machining parts 401: The first electrode reel module 406: The second electrode reel module 41: reel 42a~42e: guide pulley 43a: The first drive motor 43b: second drive motor 43c: third drive motor 44: Conveyor roller 44a~44b: pressure roller 45: Roller 46: Guide tube structure 47a~47b: Electrode recovery roller 48: control unit 5: fluid supply source 90: First fluid 91: second fluid 92: Workpiece 93~94: synthetic fluid S1~S3: Support point

Figure 1 is a schematic diagram of a conventional fine-hole EDM. Fig. 2 is a schematic diagram of an embodiment of an electrode guiding device of the present invention. Figure 3 is a schematic top view of the first fluid bearing of the present invention. 4 is a schematic cross-sectional view of the electrode guiding device AA of FIG. 1. FIG. 5A to 5D are schematic diagrams showing the arrangement of the first and second drainage channels in the first and second fluid bearings, respectively. Fig. 6 is a schematic diagram of another embodiment of the electrode guiding device of the present invention. 7A to 7D are schematic diagrams of various embodiments of the electrical discharge machining device of the present invention. FIG. 8 is a schematic diagram of another embodiment of the electrical discharge machining device of the present invention. Fig. 9 is a graph showing the vibration state of the wire electrode guided by the electrode guiding device of the present invention and the conventional eye mold.

2: Electrode guide device

20: The first fluid bearing

200: first electrode through hole

21: Second fluid bearing

210: second electrode through hole

22: Wire electrode

Claims (23)

An electrode guiding device includes: A first fluid bearing has a first electrode through hole for providing a wire electrode to pass through. The first fluid bearing has a plurality of first drainage channels in communication with the first electrode through hole, and the plurality of The first drainage channel guides a first fluid to act on the wire electrode; and A second fluid bearing is arranged on one side of the first fluid bearing. The second fluid bearing has a second electrode through hole corresponding to the first electrode through hole for providing the wire electrode to pass through. There are a plurality of second drainage channels in the two fluid bearings, which are communicated with the second electrode through hole, and the plurality of second drainage channels guide the first fluid to act on the wire electrode. The electrode guide device according to claim 1, wherein a plurality of support columns are further provided between the first fluid bearing and the second fluid bearing to maintain a distance between the first fluid bearing and the second fluid bearing . The electrode guiding device according to claim 1, which further has a guiding device arranged on the other side of the first fluid bearing, so that the first fluid bearing is located between the second fluid bearing and the guiding device The flow guiding device has a third electrode through hole corresponding to the first electrode through hole, and the third electrode through hole is used for allowing the wire electrode to pass through. The electrode guiding device according to claim 1, wherein the channel central axis of the plurality of first drainage channels and the central axis of the wire electrode have a first included angle, and the channel central axis of the plurality of second drainage channels is with the The central axis of the wire electrode has a second included angle. The electrode guiding device according to claim 4, wherein the first included angle is greater than 90 degrees and the second included angle is greater than 90 degrees, the first included angle is less than 90 degrees and the second included angle is less than 90 degrees, and the first included angle is greater than The included angle of 90 degrees and the second angle is less than 90 degrees, or the first included angle is less than 90 degrees and the second included angle is greater than 90 degrees. The electrode guiding device according to claim 4, wherein when the first included angle is less than 90 degrees and the second included angle is greater than 90 degrees, the plurality of first drainage channels guide the first fluid to form a first synthetic fluid, The plurality of second drainage channels guide the first fluid to form a second synthetic fluid, wherein the flow directions of the first synthetic fluid and the second synthetic fluid are opposite and opposite. The electrode guiding device according to claim 1, wherein the first fluid contains micro- or nano-microbubbles or micro- or nano-particles or a fluid that is a mixture of the aforementioned bubbles and particles. The electrode guiding device according to claim 1, wherein the wire electrode is an electrode with a hollow channel or a solid core without a hollow channel. The electrode guiding device according to claim 8, which further has a second fluid passing through the hollow channel, the second fluid containing micro- or nano-micro bubbles or micro- or nano-particles or a mixture of the aforementioned bubbles and particles Fluid. An electric discharge machining device includes: An electrode holding portion for holding a wire electrode and rotating the wire electrode; and An electrode guiding device is arranged on one side of the electrode holding portion for guiding the wire electrode, and the electrode guiding device includes: A first fluid bearing has a first electrode through hole for providing a wire electrode to pass through. The first fluid bearing has a plurality of first drainage channels in communication with the first electrode through hole, and the plurality of The first drainage channel guides a first fluid to act on the electrode; and A second fluid bearing is arranged on one side of the first fluid bearing. The second fluid bearing has a second electrode through hole corresponding to the first electrode through hole for providing the wire electrode to pass through. There are a plurality of second drainage channels in the two fluid bearings, which are communicated with the second electrode through hole, and the plurality of second drainage channels guide the first fluid to act on the electrode. The electrical discharge machining device according to claim 10, wherein a plurality of supporting columns are further provided between the first fluid bearing and the second fluid bearing to maintain a distance between the first fluid bearing and the second fluid bearing. The electrical discharge machining device according to claim 10, which further has a flow guiding device arranged on the other side of the first fluid bearing, so that the first fluid bearing is located between the second fluid bearing and the flow guiding device, The flow guiding device has a third electrode through hole corresponding to the first electrode through hole, and the third electrode through hole is used for allowing the electrode to pass through. The electrical discharge machining device according to claim 10, wherein the channel center axis of the plurality of first drainage channels and the center axis of the electrode have a first included angle, and the channel center axis of the plurality of second drainage channels and the electrode The central axis has a second included angle. The electrical discharge machining device according to claim 13, wherein the first included angle is greater than 90 degrees and the second included angle is greater than 90 degrees, the first included angle is less than 90 degrees and the second included angle is less than 90 degrees, and the first included angle is greater than 90 The angle between two degrees and the second angle is less than 90 degrees, or the first angle is less than 90 degrees and the second angle is greater than 90 degrees. The electrical discharge machining device according to claim 13, wherein when the first included angle is less than 90 degrees and the second included angle is greater than 90 degrees, the plurality of first drainage channels guide the first fluid to form a first synthetic fluid, the A plurality of second drainage channels guide the first fluid to form a second synthetic fluid, wherein the flow directions of the first synthetic fluid and the second synthetic fluid are opposite and opposite. The electrical discharge machining device according to claim 10, wherein the first fluid contains micro- or nano-micro bubbles or micro- or nano-particles or a fluid mixed with the aforementioned bubbles and particles. The electrical discharge machining device according to claim 10, wherein the wire electrode is an electrode with a hollow channel or a solid core without a hollow channel. The electrical discharge machining device according to claim 17, which further has a second fluid passing through the hollow channel, the second fluid containing micro- or nano-micro bubbles or micro- or nano-particles or a mixture of the aforementioned bubbles and particles fluid. An electric discharge machining device includes: A first electrode reel module for providing a wire electrode; A second electrode reel module to receive the wire electrode; and A pair of electrode guiding devices correspond to each other and are separated by a specific distance, and respectively correspond to the first and second electrode reel modules, and one of the electrode guiding devices receives the wire electrode by the first electrode reel module , And transfer the wire electrode to another electrode guiding device to be received by the second electrode reel module. Each electrode guiding device includes: A first fluid bearing has a first electrode through hole for the wire electrode to pass through, the first fluid bearing has a plurality of first drainage channels in the first fluid bearing that communicate with the first electrode through hole, and the plurality of A first drainage channel guides a first fluid to act on the wire electrode; and A second fluid bearing has a second electrode through hole corresponding to the first electrode through hole for allowing the wire electrode to pass through. The second fluid bearing has a plurality of second drainage channels in it, and the second The electrode through holes are connected, and the plurality of second drainage channels guide the first fluid to act on the wire electrode. The electrical discharge machining device according to claim 19, which further has a flow guiding device arranged on the other side of the first fluid bearing, so that the first fluid bearing is located between the second fluid bearing and the flow guiding device The flow guiding device has a third electrode through hole corresponding to the first electrode through hole, and the third electrode through hole is used for allowing the electrode to pass through. The electrical discharge machining device according to claim 20, wherein the channel center axis of the plurality of first drainage channels and the center axis of the electrode have a first included angle, and the channel center axis of the plurality of second drainage channels and the electrode The central axis has a second included angle. The electrical discharge machining device according to claim 21, wherein the first included angle is greater than 90 degrees and the second included angle is greater than 90 degrees, the first included angle is less than 90 degrees and the second included angle is less than 90 degrees, and the first included angle is greater than 90 The angle between two degrees and the second angle is less than 90 degrees, or the first angle is less than 90 degrees and the second angle is greater than 90 degrees. The electrical discharge machining device according to claim 21, wherein when the first included angle is less than 90 degrees and the second included angle is greater than 90 degrees, the plurality of first drainage channels guide the first fluid to form a first synthetic fluid, the A plurality of second drainage channels guide the first fluid to form a second synthetic fluid, wherein the flow directions of the first synthetic fluid and the second synthetic fluid are opposite and opposite.

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