TW201809695A - Temperature control device for electronic component test sorting machine and temperature control method applying by the same effectively improving the reliability of the test operations performed by electronic components - Google Patents
Temperature control device for electronic component test sorting machine and temperature control method applying by the same effectively improving the reliability of the test operations performed by electronic components Download PDFInfo
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Abstract
Description
本發明尤指其提供一種可使第一批次之電子元件在執行測試作業時即可確保其在預設的溫度範圍內,進而有效提升可靠度之電子元件測試分類機之溫控裝置及其應用之溫控方法。 The invention particularly relates to a temperature control device for an electronic component test classification machine which can ensure that the first batch of electronic components can ensure that they are within a preset temperature range when performing a test operation, thereby effectively improving reliability Application of temperature control method.
按,現今科技在不斷研發與創新下,以往必需由許多大型電子電路結合才能完成之工作已完全由積體電路(integrated circuit,簡稱IC)所取代,由於IC在生產過程中乃經過多道的加工程序,因此為了確保產品品質,業者於IC製作完成後,均會執行電路測試作業,以檢測出IC於製作過程中,是否遭受損壞,進而檢測出不良品。 According to the continuous development and innovation of today's technology, the work that could only be completed by the combination of many large electronic circuits in the past has been completely replaced by integrated circuits (ICs). Because ICs undergo multiple channels in the production process, Processing procedures, so in order to ensure product quality, after the IC is manufactured, the industry will perform a circuit test operation to detect whether the IC has been damaged during the manufacturing process, and then detect defective products.
IC在執行電路測試作業時,主要係將IC電性連結至測試機,而由測試機所內建的測試程式對該IC執行測試作業,然而為了使IC的測試作業達到自動化供料、測試及分類收料,設備業者即設計出一種測試分類機,該測試分類機主要係設有供料裝置、載送裝置及分類收料裝置,並於測試區內裝設由封測業者所提供之測試機,另該測試分類機設有一中央控制單元,該中央控制單元係訊號連結於該測試機,而由該測試機提供測試結果的訊號至中央控制單元,再由該中央控制單元控制各裝置自動化供料、測試及分類收料;亦即設備業者所製作之測試分類機係概屬於硬體的設備,封測業者所提供之測試機則概屬於軟體的設備,將軟體設備的測試機連結裝設於測試分類機上,該測試分類機即可依據測試機所提供的測 試結果訊號,自動化的進行供料、測試及分類收料作業,因此前述主要係說明測試分類機與測試機的區別。如前所述,測試機係由封測業者所提供,而測試機內建有許多的測試程式及測試訊息,由於這些資訊牽涉許多的商業機密,因此封測業者通常不會將這些資訊開放提供給設備業者所製作之測試分類機,導致設備業者僅能就有限的資訊盡可能的製作出符合封測業者需求之測試分類機,使得測試作業的過程中仍難免產生一些誤測的情形。 When the IC performs a circuit test operation, the IC is mainly electrically connected to the test machine, and the test program built in the test machine performs the test operation on the IC. However, in order to make the test operation of the IC to automatically supply, test and Sorting and receiving, the equipment industry has designed a test sorting machine. The testing and classifying machine is mainly equipped with a feeding device, a carrying device and a sorting and collecting device. The test provided by the packaging and testing industry is installed in the test area. In addition, the test classification machine is provided with a central control unit. The central control unit is a signal connected to the test machine, and the test machine provides a signal of the test result to the central control unit. The central control unit controls the automation of each device. Feeding, testing and sorting and receiving; that is, the testing and classifying machine made by the equipment manufacturer are all hardware equipment, and the testing machine provided by the packaging and testing industry are all software equipment. Set on the test classifier, the test classifier can The test result signals automatically supply, test, and classify and collect. Therefore, the foregoing is mainly to explain the differences between the test classifier and the tester. As mentioned earlier, the testing machine is provided by the packaging and testing industry, and the testing machine has many built-in testing programs and testing information. Because this information involves a lot of trade secrets, the packaging and testing industry usually does not provide this information to the public. The test classifiers made for equipment manufacturers have caused equipment manufacturers to make test classifiers that meet the needs of packaging and testing operators as much as possible, making it impossible to avoid some false test situations during the test operation.
以電子元件的測試溫度而言,不同的電子元件可能應用在高溫的作業環境,也可能應用在低溫的作業環境,因此在執行測試作業時,必須使電子元件模擬在實際的作業環境下,而在預設的溫度範圍內執行測試,也因此測試分類機必須另設有溫控裝置,以使電子元件在預設的溫度範圍內執行熱測作業或冷測作業。然而,電子元件又可區分內部溫度(Tj)及表面溫度(Tc),在測試作業的溫控過程中,封測業者係以電子元件的內部溫度(Tj)作為預設的溫度範圍標準,而電子元件的內部溫度(Tj)則又必須透過測試機的電性連結才能讀取獲得,當封測業者之測試機沒有開放提供電子元件的內部溫度(Tj)時,設備業者所製作之測試分類機僅能藉由溫控裝置之感溫器接觸電子元件的表面,才能讀取電子元件的表面溫度(Tc),並根據電子元件的表面溫度(Tc)來推估其內部溫度(Tj)是否在預設的溫度範圍內,而這樣的方式在測試機本身的溫度與電子元件的溫度具有很大的溫差而加劇熱傳導效應時,即經常導致電子元件的內部溫度(Tj)無法在預設的溫度範圍內,這種情形常見於第一批次電子元件的測試作業。 In terms of the test temperature of electronic components, different electronic components may be applied in high-temperature operating environments or low-temperature operating environments. Therefore, when performing test operations, the electronic components must be simulated in the actual operating environment. The test is performed within a preset temperature range, so the test classifier must be additionally equipped with a temperature control device to enable the electronic components to perform hot or cold test operations within the preset temperature range. However, electronic components can distinguish between internal temperature (Tj) and surface temperature (Tc). In the temperature control process of testing operations, the packaging and testing industry uses the internal temperature (Tj) of electronic components as the preset temperature range standard, and The internal temperature (Tj) of the electronic component must be read through the electrical connection of the tester. When the tester of the packaging and testing industry does not open the internal temperature (Tj) of the electronic component, the test classification made by the equipment supplier The machine can only read the surface temperature (Tc) of the electronic component by contacting the surface of the electronic component with the temperature sensor of the temperature control device, and estimate whether the internal temperature (Tj) of the electronic component is based on the surface temperature (Tc) of the electronic component. Within the preset temperature range, and when the temperature of the test machine and the temperature of the electronic component have a large temperature difference and the heat conduction effect is aggravated, the internal temperature (Tj) of the electronic component often cannot be In the temperature range, this situation is common in the first batch of testing of electronic components.
請參閱第1圖所示,設備業者所製作之測試分類機係設有一可由驅動源驅動升降之壓取臂21,於該壓取臂21頭端則裝設有致冷晶片22,於加熱模式時,電流方向係使致冷晶片22 之下方放熱端產生熱面,上方則為吸熱端,藉由致冷晶片22通電所產生的熱面,即可與電子元件30進行冷熱交換;另於壓取臂21之端部係設有吸嘴23及凸設有一感溫器24,該感溫器24係藉由彈簧25的推頂而凸伸出壓取臂21之端部,並以線路將訊號連結至訊號轉換器26,訊號轉換器26再連結於中央控制單元27,該中央控制單元27並連結至一電源供應器28,該電源供應器28係可控制輸出至致冷晶片22之電流量,而調整控制致冷晶片22之輸出功率,藉以控制致冷晶片22之加熱程度;一可與電子元件30電性連結之測試座40,該測試座40係電性連結於封測業者所提供之測試機41,該測試機41再訊號連結至測試分類機之中央控制單元27,而由該測試機41提供測試結果的訊號至中央控制單元27,再由該中央控制單元27控制各裝置自動化供料、測試及分類收料。當壓取臂21取放及下壓電子元件30於測試座40執行測試作業時,感溫器24藉由彈簧25之彈力係可保持接觸於電子元件30之表面,並將所感測到電子元件30之表面溫度(Tc)訊號傳輸至訊號轉換器26,訊號轉換器26將溫度訊號轉換後再傳輸至中央控制單元27,中央控制單元27於接收該溫度訊號後即與預設的溫度範圍進行比對運算,並將比對運算後所獲致之溫差值轉換為致冷晶片22所需的電流量,再由電源供應器28輸出所需的電流量至致冷晶片22,而調整控制致冷晶片22之輸出功率(P),進而藉以控制致冷晶片22之加熱程度。如前所述,封測業者係以電子元件30的內部溫度(Tj)作為預設的溫度範圍標準,而電子元件30的內部溫度(Tj)則又必須透過測試機41的讀取才能獲得,當封測業者之測試機41沒有開放提供電子元件30的內部溫度(Tj)時,設備業者所製作之測試分類機僅能藉由感溫器24讀取電子元件的表面溫度(Tc)來推估其內部溫度 (Tj)是否在預設的溫度範圍內,而這樣的方式卻常在第一批次電子元件的測試作業中發生誤測的情形,例如,預設的溫度範圍在130±10℃,雖然致冷晶片22可以將電子元件30的表面溫度(Tc)加熱在130±10℃的溫度範圍內,但因測試機41於初始測試時其本身的溫度大約只有在15~25℃間,因此電子元件30的內部溫度(Tj)將會大量的透過測試座40熱傳導至測試機41,從而導致電子元件30的內部溫度(Tj)低於預設的溫度範圍130±10℃,由於電子元件30的內部溫度(Tj)低於預設的溫度範圍,此時測試機41即會對中央控制單元27發出為不良品的訊號,而將該電子元件30收置於不良品區,實際上該電子元件30並非真正的不良品,只不過是內部溫度(Tj)因熱傳導至測試機41而導致低於預設的溫度範圍,而這種誤測的情形必須一直到測試機41經熱傳導升溫至相當的程度後,才能使後續電子元件的熱傳導降低,後續電子元件的內部溫度(Tj)也才會趨近於表面溫度(Tc)而獲得改善,一般而言,大約經過3、4顆第一批次電子元件的測試後,這種誤測的情形即可獲得改善,由於該前3、4顆第一批次電子元件並非真正的不良品,因此最後再將該前3、4顆第一批次電子元件重新測試,如此即影響測試分類機的測試產能。 Please refer to FIG. 1. The test sorting machine made by the equipment manufacturer is provided with a pressing arm 21 that can be driven up and down by a driving source. A cooling chip 22 is installed at the end of the pressing arm 21. In the heating mode, The direction of current is to make the cooling chip 22 The heat generating surface at the lower side generates a hot surface, and the upper side is a heat absorbing end. The hot surface generated by the cooling chip 22 when energized can exchange cold and heat with the electronic component 30. The end of the pressing arm 21 is provided with a heat absorption surface. The mouth 23 and a protrusion are provided with a temperature sensor 24, which is pushed out by the end of the spring 25 to push out the end of the pressing arm 21, and the signal is connected to the signal converter 26 by a line, and the signal is converted The device 26 is further connected to a central control unit 27. The central control unit 27 is connected to a power supply 28. The power supply 28 can control the amount of current output to the cooling chip 22, and adjust and control the cooling chip 22. The output power is used to control the heating degree of the cooling chip 22; a test base 40 which can be electrically connected to the electronic component 30, and the test base 40 is electrically connected to a testing machine 41 provided by a packaging and testing industry. The testing machine 41 The signal is connected to the central control unit 27 of the test classification machine, and the test machine 41 provides a signal of the test result to the central control unit 27, and the central control unit 27 controls each device to automatically supply, test and classify the material. When the pressing arm 21 picks up and down the electronic component 30 and performs the test operation on the test base 40, the temperature sensor 24 can keep contact with the surface of the electronic component 30 by the elastic force of the spring 25, and sense the electronic component. The surface temperature (Tc) signal of 30 is transmitted to the signal converter 26. The signal converter 26 converts the temperature signal and then transmits it to the central control unit 27. After receiving the temperature signal, the central control unit 27 performs the preset temperature range. The comparison operation is performed, and the temperature difference obtained after the comparison operation is converted into the amount of current required for the cooling chip 22, and then the required amount of current is output to the cooling chip 22 by the power supply 28, and the cooling is adjusted and controlled The output power (P) of the wafer 22 is used to control the heating degree of the cooled wafer 22. As mentioned above, the packaging and testing industry uses the internal temperature (Tj) of the electronic component 30 as a preset temperature range standard, and the internal temperature (Tj) of the electronic component 30 must be obtained by reading the test machine 41. When the testing machine 41 of the packaging and testing industry is not open to provide the internal temperature (Tj) of the electronic component 30, the test classification machine made by the equipment industry can only be read by the surface temperature (Tc) of the electronic component through the temperature sensor 24. Estimate its internal temperature (Tj) Whether the temperature is within a preset temperature range, but this method often causes a mismeasurement during the test operation of the first batch of electronic components. For example, the preset temperature range is 130 ± 10 ° C. The cold wafer 22 can heat the surface temperature (Tc) of the electronic component 30 in a temperature range of 130 ± 10 ° C. However, since the temperature of the tester 41 during the initial test is only about 15-25 ° C, the electronic component The internal temperature (Tj) of 30 will be transmitted to the testing machine 41 through the test base 40, resulting in the internal temperature (Tj) of the electronic component 30 being lower than the preset temperature range of 130 ± 10 ° C. The temperature (Tj) is lower than the preset temperature range. At this time, the tester 41 sends a signal to the central control unit 27 as a defective product, and the electronic component 30 is placed in the defective product area. Actually, the electronic component 30 It is not a real defective product, it is just that the internal temperature (Tj) is lower than the preset temperature range due to heat conduction to the test machine 41, and this kind of mismeasurement must be continued until the test machine 41 heats up to a considerable degree through heat conduction Can make subsequent electrons The thermal conductivity of the electronic component is reduced, and the internal temperature (Tj) of the subsequent electronic components will approach the surface temperature (Tc) and improve. Generally speaking, after testing about 3 or 4 first batch of electronic components, this kind of The situation of mistesting can be improved. Since the first 3 or 4 first batch of electronic components are not truly defective, the last 3 or 4 first batch of electronic components are finally retested, which will affect the Test classifier test capacity.
有鑑於此,本發明人遂以其多年從事相關行業的研發與製作經驗,針對目前所面臨之問題深入研究,經過長期努力之研究與試作,終究研創出一種可使第一批次之電子元件在執行測試作業時有效提升可靠度,進而有效避免因誤測而重新測試的問題,此即為本發明之設計宗旨。 In view of this, the inventor then used his years of research and development and production experience in related industries to conduct in-depth research on the current problems. After long-term research and trial work, he finally developed an electronic component that enables the first batch of electronic components. Effectively improve the reliability when performing the test operation, and then effectively avoid the problem of re-testing due to mis-testing, which is the design purpose of the present invention.
本發明之目的一,係提供一種電子元件測試分類機之溫控裝置及其應用之溫控方法,該溫控裝置包括有對電子元件進行 預溫手段之第一溫控裝置,以及對測試座進行預溫手段之第二溫控裝置,該第一溫控裝置係使第一批次之電子元件的表面溫度預溫至超出預設的溫度值10%~60%,該第二溫控裝置則係使該測試座預溫至超出預設的溫度值10%~60%;藉此,當第一批次之電子元件在執行測試作業時,即不會因熱傳導至測試機而導致該電子元件的內部溫度無法控制在預設的溫度範圍內,進而有效提升第一批次之電子元件執行測試作業的可靠度。 A first object of the present invention is to provide a temperature control device for an electronic component test classification machine and a temperature control method for the same. The temperature control device includes an electronic component A first temperature control device for pre-warming means and a second temperature control device for pre-warming means for the test stand. The first temperature control device pre-heats the surface temperature of the first batch of electronic components beyond a preset temperature. The temperature value is 10% ~ 60%, and the second temperature control device preheats the test seat to a preset temperature value of 10% ~ 60%; thus, when the first batch of electronic components is performing a test operation At this time, the internal temperature of the electronic component cannot be controlled within a preset temperature range due to heat conduction to the testing machine, thereby effectively improving the reliability of the first batch of electronic components performing the test operation.
本發明之目的二,係提供一種電子元件測試分類機之溫控裝置及其應用之溫控方法,其主要係使第一批次之電子元件在執行測試作業時即可確保其內部溫度在預設的溫度範圍內,進而避免因誤測而須重新測試的情形,達到有效提升測試產能之效益。 The second object of the present invention is to provide a temperature control device for an electronic component test classification machine and a temperature control method for the application, which mainly make the first batch of electronic components to ensure that their internal temperature is within In the set temperature range, the situation of retesting due to mismeasurement is avoided to achieve the benefit of effectively increasing the test capacity.
21‧‧‧壓取臂 21‧‧‧Press arm
22‧‧‧致冷晶片 22‧‧‧Refrigerated Chip
23‧‧‧吸嘴 23‧‧‧Nozzle
24‧‧‧感溫器 24‧‧‧ Temperature Sensor
25‧‧‧彈簧 25‧‧‧Spring
26‧‧‧訊號轉換器 26‧‧‧Signal Converter
27‧‧‧中央控制單元 27‧‧‧ Central Control Unit
28‧‧‧電源供應器 28‧‧‧ Power Supply
30‧‧‧電子元件 30‧‧‧Electronic components
40‧‧‧測試座 40‧‧‧Test Block
41‧‧‧測試機 41‧‧‧testing machine
50‧‧‧供料裝置 50‧‧‧feeding device
51‧‧‧料盤 51‧‧‧ tray
60‧‧‧收料裝置 60‧‧‧Receiving device
61‧‧‧料盤 61‧‧‧Tray
70‧‧‧輸送裝置 70‧‧‧ conveyor
71‧‧‧第一移料機構 71‧‧‧The first material transfer mechanism
711‧‧‧第一移料器 711‧‧‧The first feeder
72‧‧‧轉載機構 72‧‧‧Reproduced by
721‧‧‧第一供料載台 721‧‧‧The first feeding platform
722‧‧‧第二供料載台 722‧‧‧Second feeding platform
723‧‧‧第一收料載台 723‧‧‧The first receiving platform
724‧‧‧第二收料載台 724‧‧‧Second receiving platform
725‧‧‧第一壓取臂 725‧‧‧First pressing arm
726‧‧‧第二壓取臂 726‧‧‧Second pressing arm
727‧‧‧吸嘴 727‧‧‧Nozzle
728‧‧‧吸嘴 728‧‧‧Nozzle
73‧‧‧第二移料機構 73‧‧‧Second material transfer mechanism
731‧‧‧第二移料器 731‧‧‧second feeder
80‧‧‧測試裝置 80‧‧‧test device
81‧‧‧測試電路板 81‧‧‧test circuit board
82‧‧‧測試座 82‧‧‧Test Block
90‧‧‧預溫盤 90‧‧‧Pre-warming plate
91‧‧‧致冷晶片 91‧‧‧Refrigerated chip
92‧‧‧感溫器 92‧‧‧Temperature Sensor
921‧‧‧彈簧 921‧‧‧Spring
93‧‧‧訊號轉換器 93‧‧‧Signal Converter
94‧‧‧電源供應器 94‧‧‧ Power Supply
95‧‧‧封閉容室 95‧‧‧ closed container
96‧‧‧溫度流體供應管路 96‧‧‧ temperature fluid supply line
100‧‧‧中央控制單元 100‧‧‧ Central Control Unit
110‧‧‧測試機 110‧‧‧testing machine
120‧‧‧電子元件 120‧‧‧Electronic components
第1圖:習知電子元件測試分類機之溫控架構示意圖。 Figure 1: Schematic diagram of the temperature control architecture of a conventional electronic component test classifier.
第2圖:本發明電子元件測試分類機之配置示意圖。 Fig. 2: Schematic diagram of the configuration of the electronic component test classifier of the present invention.
第3圖:本發明電子元件測試分類機之溫控架構示意圖。 Fig. 3: Schematic diagram of the temperature control architecture of the electronic component test and classification machine of the present invention.
第4圖:本發明電子元件測試分類機之溫控流程示意圖。 Figure 4: Schematic diagram of the temperature control process of the electronic component test and classification machine of the present invention.
第5圖:本發明電子元件測試分類機之溫控作動示意圖(一)。 Figure 5: Schematic diagram of the temperature control operation of the electronic component test and classification machine of the present invention (1).
第6圖:本發明電子元件測試分類機之溫控作動示意圖(二)。 Figure 6: Schematic diagram of the temperature control operation of the electronic component test and classification machine of the present invention (2).
第7圖:本發明電子元件測試分類機之溫控作動示意圖(三)。 Figure 7: Schematic diagram of the temperature control operation of the electronic component test and classification machine of the present invention (3).
為使 貴審查委員對本發明作更進一步之瞭解,茲舉較佳實施例並配合圖式,詳述如后:請參閱第2、3圖,本發明之電子元件測試分類機包含有供料裝置50、收料裝置60、輸送裝置70、測試裝置80、溫控裝置及中央控制單元100,該供料裝置50係配置於機台 上,用以容納至少一待測之電子元件,於本實施例中,供料裝置50係配置有至少一盛裝待測電子元件之料盤51;該收料裝置60係配置於機台上,用以容納至少一完測之電子元件,於本實施例中,係設有複數個可盛裝不同等級完測電子元件之料盤61;該測試裝置80係設有具測試座82之測試電路板81,測試座82內係具有探針並電性連結於封測業者所提供之測試機110;該輸送裝置70係配置於機台上,並設有至少一具移料器之移料機構,用以移載電子元件,於本實施例中,該輸送裝置70係包含有第一移料機構71、轉載機構72及第二移料機構73,該第一移料機構71係設有至少一第一移料器711,用以於供料裝置50及轉載機構72間移載待測之電子元件,該第二移料機構73係設有至少一第二移料器731,用以於轉載機構72及收料裝置60間移載完測之電子元件,該轉載機構72係於測試裝置80的二側分別設有第一供料載台721、第二供料載台722、第一收料載台723、第二收料載台724,用以於第一移料機構71及第二移料機構73間載送待測/完測之電子元件,另為了將第一供料載台721、第二供料載台722上待測之電子元件轉載於測試座82,以及將測試座82內完測之電子元件轉載於第一收料載台723、第二收料載台724,於測試座82的前後方分別設有第一壓取臂725及第二壓取臂726,該第一壓取臂725及第二壓取臂726除了分別設有吸嘴727、728取放轉載電子元件外,於電子元件轉載於測試座82內時,亦可下壓電子元件,使電子元件確保電性連結於測試座82內的探針,而使測試機110利用其內建之測試程式對該電子元件執行測試作業,並將測試結果傳輸至中央控制單元100,由中央控制單元100依據測試結果控制各裝置作動,由於該電子元件測試分類機供、收料的動作流程已為習知技術,且 非為本案之重點,因此不予贅述;該溫控裝置係包括有對電子元件進行預溫手段之第一溫控裝置,以及對測試座82進行預溫手段之第二溫控裝置,該第一溫控裝置係以第一溫度產生器及感溫器對電子元件進行預溫手段,該第一溫度產生器可為設置於機台上之預溫盤90,使待測之電子元件在放置於測試座82前先於預溫盤90上預溫,該第一溫度產生器或可為設置於第一供料載台721及第二供料載台722上之加熱器,使第一供料載台721及第二供料載台722在轉載過程中預溫待測之電子元件,該第一溫度產生器或可為設置於第一壓取臂725及第二壓取臂726上之加熱器,使第一壓取臂725及第二壓取臂726在轉載時預溫待測之電子元件,於本實施例中(以第一壓取臂725為例,第二壓取臂726係相同於第一壓取臂725),該第一溫度產生器係為設置於第一壓取臂725之致冷晶片91(如第3圖所示),另該感溫器92則設於第一壓取臂725的下方,該感溫器92並可藉由彈簧921的推頂而凸伸出第一壓取臂725的端部,以感測電子元件的表面溫度,該感溫器92另以線路將訊號連結至訊號轉換器93,訊號轉換器93再連結於中央控制單元100,該中央控制單元100並連結至一電源供應器94,該電源供應器94係可控制輸出至致冷晶片91之電流量,而調整控制致冷晶片91之輸出功率,藉以控制致冷晶片91之冷熱程度;另該第二溫控裝置係以第二溫度產生器對測試座82進行預溫手段,該第二溫度產生器可為設置於測試座82之加熱器,使測試座82於置入電子元件前先予以預溫,該第二溫度產生器或可為設置於第一壓取臂725之加熱器,使測試座82於置入電子元件前,先以第一壓取臂725上之加熱器下壓測試座82內之探針,而對測試座82予以預溫,該第二溫度產生器或可為設置於測試座82周測之封閉容室95,並於該封閉容 室95內連結溫度流體供應管路96,而使測試座82於置入電子元件前先注入溫度流體予以預溫(如第3圖所示)。 In order to make your reviewing committee further understand the present invention, the preferred embodiment will be given in conjunction with the drawings, and detailed as follows: Please refer to Figs. 2 and 3, the electronic component test classifier of the present invention includes a feeding device 50. Receiving device 60, conveying device 70, testing device 80, temperature control device and central control unit 100. The feeding device 50 is arranged on the machine. It is used to accommodate at least one electronic component to be tested. In this embodiment, the feeding device 50 is configured with at least one tray 51 for containing the electronic component to be tested. The receiving device 60 is configured on the machine. It is used for accommodating at least one electronic component under test. In this embodiment, a plurality of trays 61 capable of holding different levels of electronic components under test are provided. The test device 80 is provided with a test circuit board with a test base 82. 81. The test base 82 is provided with a probe and is electrically connected to the testing machine 110 provided by the packaging and testing industry. The conveying device 70 is arranged on the machine and is provided with at least one material transfer mechanism with a material transfer device. Used to transfer electronic components. In this embodiment, the conveying device 70 includes a first transfer mechanism 71, a transfer mechanism 72, and a second transfer mechanism 73. The first transfer mechanism 71 is provided with at least one A first transfer device 711 is used to transfer the electronic components to be tested between the feeding device 50 and the transfer mechanism 72. The second transfer mechanism 73 is provided with at least one second transfer device 731 for transferring The tested electronic components are transferred between the mechanism 72 and the receiving device 60. The reprint mechanism 72 is for testing. The two sides of the device 80 are respectively provided with a first feeding stage 721, a second feeding stage 722, a first receiving stage 723, and a second receiving stage 724, which are used for the first material moving mechanism 71 and The second material transfer mechanism 73 carries the electronic components to be tested / completed. In addition, in order to reproduce the electronic components to be tested on the first feeding stage 721 and the second feeding stage 722 on the test base 82, and The electronic components tested in the test base 82 are reproduced on the first receiving stage 723 and the second receiving stage 724. The first pressing arm 725 and the second pressing arm 726 are respectively provided at the front and rear of the test base 82. In addition to the first pressing arm 725 and the second pressing arm 726 provided with suction nozzles 727 and 728 for picking and placing the reprinted electronic component, respectively, when the electronic component is reprinted in the test base 82, the electronic component can also be pressed down, The electronic component ensures that the probe is electrically connected to the probe in the test base 82, so that the tester 110 performs a test operation on the electronic component by using a built-in test program, and transmits the test result to the central control unit 100. The central control unit 100 Controls the operation of each device based on the test results. Process known as learning technology, and This is not the focus of this case, so it will not be repeated; the temperature control device includes a first temperature control device for pre-warming means for electronic components, and a second temperature control device for pre-warming means for test base 82. A temperature control device uses a first temperature generator and a temperature sensor to pre-warm the electronic components. The first temperature generator may be a pre-temperature plate 90 provided on the machine table, so that the electronic components to be tested are placed. Pre-heating on the pre-temperature plate 90 before the test base 82, the first temperature generator may be a heater provided on the first feeding stage 721 and the second feeding stage 722, so that the first supply stage The material carrier 721 and the second supply carrier 722 pre-heat the electronic components to be measured during the reloading process. The first temperature generator may be one of the first and second pressing arms 725 and 726. The heater enables the first pressing arm 725 and the second pressing arm 726 to pre-heat the electronic components to be measured during reprinting. In this embodiment (taking the first pressing arm 725 as an example, the second pressing arm 726 Is the same as the first pressing arm 725), and the first temperature generator is a refrigerating chip 91 (such as the third (Shown), and the temperature sensor 92 is disposed below the first pressing arm 725, and the temperature sensor 92 can be protruded from the end of the first pressing arm 725 by the ejection of the spring 921, In order to sense the surface temperature of the electronic component, the temperature sensor 92 also connects a signal to a signal converter 93 by a line. The signal converter 93 is further connected to a central control unit 100, which is connected to a power supply. 94. The power supply 94 can control the amount of current output to the cooling chip 91, and adjust the output power of the cooling chip 91 to control the degree of cooling and heating of the cooling chip 91. In addition, the second temperature control device is based on The second temperature generator pre-heats the test base 82. The second temperature generator may be a heater provided on the test base 82, so that the test base 82 is pre-warmed before placing the electronic components. The second temperature The generator may be a heater provided on the first pressing arm 725, so that the test base 82 presses the probe in the testing base 82 with the heater on the first pressing arm 725 before placing the electronic component, The test base 82 is pre-warmed. The second temperature generator may be set at the test position. The closed chamber 95 measured by the test seat 82 weekly, and the closed chamber The temperature fluid supply line 96 is connected in the chamber 95, so that the test base 82 is pre-warmed by injecting temperature fluid before placing the electronic components (as shown in FIG. 3).
請參閱第4、5圖,以電子元件執行測試作業的預設溫度範圍130±10℃為例,由於測試機110於初始測試時其本身的溫度大約只有在15~25℃間,為了避免第一批次電子元件會透過測試座82大量的熱傳導至測試機110,而導致第一批次電子元件的內部溫度(Tj)低於預設的溫度範圍130±10℃,因此本發明係先對測試座82進行預溫手段,使該測試座82預溫至超出預設的溫度值10%~60%;於本實施例中,該測試座82的預溫手段係以中央控制單元100控制第二溫控裝置之第二溫度產生器開啟溫度流體供應管路96,以將溫度流體注入於封閉容室95內,使該測試座82預溫至超出預設的溫度值10%~60%。 Please refer to Figures 4 and 5, taking the preset temperature range of 130 ± 10 ℃ for electronic components as an example. Since the temperature of the testing machine 110 during the initial test is only about 15 ~ 25 ℃, in order to avoid the A batch of electronic components will be conducted to the testing machine 110 through a large amount of heat from the test base 82, and the internal temperature (Tj) of the first batch of electronic components will be lower than the preset temperature range of 130 ± 10 ° C. The pre-heating means of the test base 82 is used to pre-warm the test base 82 to a preset temperature value of 10% to 60%. In this embodiment, the pre-heating means of the test base 82 is controlled by the central control unit 100. The second temperature generator of the two temperature control devices opens the temperature fluid supply pipe 96 to inject the temperature fluid into the closed chamber 95, so that the test base 82 is preheated to a temperature value that exceeds a preset temperature by 10% to 60%.
請參閱第4、6圖,當測試座82開始預溫後,接著本發明即對第一批次電子元件120進行預溫手段,使該第一批次電子元件120的表面溫度預溫至超出預設的溫度值10%~60%;於本實施例中,該第一批次電子元件120的預溫手段,係於該第一批次電子元件120置入於測試座82前,以中央控制單元100控制第一溫控裝置之第一溫度產生器對第一批次電子元件120進行預溫,該中央控制單元100係控制第一壓取臂725轉載吸取該第一批次電子元件120時,同時使致冷晶片91作動加熱該第一批次電子元件120,由於該感溫器92係可感測該第一批次電子元件120的表面溫度,並將感測訊號透過訊號轉換器93傳輸至中央控制單元100,由中央控制單元100控制電源供應器94輸出至致冷晶片91之電流量,而調整控制致冷晶片91之輸出功率,藉以控制致冷晶片91加熱該第一批次電子元件120的表面溫度至超出預設的溫度值10%~60%(大約160℃)。 Please refer to FIGS. 4 and 6. After the test base 82 starts to warm up, the present invention pre-warms the first batch of electronic components 120 so that the surface temperature of the first batch of electronic components 120 is pre-warmed. The preset temperature value is 10% ~ 60%. In this embodiment, the pre-warming means of the first batch of electronic components 120 is placed in front of the test batch 82 of the first batch of electronic components 120 in the center. The control unit 100 controls the first temperature generator of the first temperature control device to pre-warm the first batch of electronic components 120. The central control unit 100 controls the first pressing arm 725 to reprint and suck the first batch of electronic components 120. At the same time, the cooling chip 91 is activated to heat the first batch of electronic components 120 at the same time, because the temperature sensor 92 is capable of sensing the surface temperature of the first batch of electronic components 120, and passing the sensing signal through the signal converter 93 is transmitted to the central control unit 100, and the central control unit 100 controls the amount of current output from the power supply 94 to the cooling chip 91, and adjusts and controls the output power of the cooling chip 91, thereby controlling the cooling chip 91 to heat the first batch Surface temperature of the sub-electronic component 120 exceeds Predetermined temperature value of 10 to 60% (about 160 ℃).
請參閱第4、7圖,當第一壓取臂725將該預溫後之第一批次電子元件120置入於測試座82後,該第一批次電子元件120即將該超出預設溫度值的熱能傳導至測試座82及測試機110;藉此,本發明由於第二溫控裝置之第二溫度產生器已經預溫測試座82,且該第一溫控裝置之第一溫度產生器也使第一批次電子元件120的部分熱能傳導至測試座82,因此不僅可使測試座82及測試機110升溫至趨近於電子元件執行測試作業的預設溫度範圍130±10℃,且可使該第一批次電子元件120的內部溫度控制在預設溫度範圍130±10℃內,使得該第一批次電子元件120即可在預設溫度範圍內執行測試作業,進而可有效提升該第一批次電子元件120執行測試作業的可靠度,從而避免因誤測而須重新測試的情形,達到有效提升測試產能之效益。本發明當第一批次電子元件完成測試作業,並使該測試座82及測試機110升溫至趨近於電子元件執行測試作業的預設溫度範圍130±10℃後,該中央控制單元100即控制第一溫控裝置之電源供應器94的電流量,而調整降低致冷晶片91之輸出功率,藉以控制致冷晶片91加熱後續批次之電子元件的表面溫度至預設溫度範圍130±10℃,由於該測試座82及測試機110已升溫至趨近於電子元件執行測試作業的預設溫度範圍130±10℃,因此該後續批次之電子元件的熱能不會被大量的傳導至測試座82及測試機110,進而該後續批次之電子元件即可以趨近於預設溫度範圍130±10℃的表面溫度執行測試作業。 Please refer to FIGS. 4 and 7. When the first pressing arm 725 places the pre-warmed first batch of electronic components 120 in the test base 82, the first batch of electronic components 120 is about to exceed the preset temperature. The value of the thermal energy is transmitted to the test base 82 and the tester 110; thus, the present invention has pre-heated the test base 82 because the second temperature generator of the second temperature control device has pre-heated the first temperature generator of the first temperature control device. It also allows part of the thermal energy of the first batch of electronic components 120 to be transmitted to the test base 82, so that not only the test base 82 and the tester 110 can be heated to a preset temperature range close to 130 ± 10 ° C, which is closer to the electronic component performing the test operation, and The internal temperature of the first batch of electronic components 120 can be controlled within a preset temperature range of 130 ± 10 ° C, so that the first batch of electronic components 120 can perform a test operation within a preset temperature range, thereby effectively improving The reliability of the first batch of electronic components 120 to perform the test operation, thereby avoiding the situation that the test must be re-tested due to mis-measurement, and the benefit of effectively increasing the test productivity is achieved. According to the present invention, when the first batch of electronic components has completed the test operation, and the test base 82 and the tester 110 are heated to a preset temperature range approaching the preset temperature range of 130 ± 10 ° C for the electronic component to perform the test operation, the central control unit 100 is The current of the power supply 94 of the first temperature control device is controlled, and the output power of the cooling chip 91 is adjusted to reduce, so as to control the surface temperature of the electronic components of the cooling wafer 91 to heat subsequent batches to a preset temperature range of 130 ± 10 ℃, because the test base 82 and the testing machine 110 have heated up to the preset temperature range of 130 ± 10 ° C, which is close to the electronic component performing the test operation, the thermal energy of the subsequent batch of electronic components will not be conducted to the test in large quantities. The base 82 and the testing machine 110, and then the subsequent batch of electronic components can approach the surface temperature of the preset temperature range 130 ± 10 ° C to perform the test operation.
綜上說明,本發明測試分類機之溫控裝置,不僅可分別對電子元件及測試座進行預溫手段,使得第一批次之電子元件在執行測試作業時即可確保在預設的溫度範圍內,且藉由中央控制單元的控制,亦可使後續批次之電子元件保持在預設的溫度範圍內, 進而有效提升測試產能,實為一深具實用性及進步性之設計,然未見有相同之產品及刊物公開,從而允符發明專利申請要件,爰依法提出申請。 In summary, the temperature control device of the test classification machine of the present invention can not only pre-warm the electronic components and the test stand separately, so that the first batch of electronic components can be guaranteed in the preset temperature range when performing the test operation. It can also keep the electronic components of subsequent batches within the preset temperature range through the control of the central control unit. Effectively increasing the testing capacity is a practical and progressive design. However, the same products and publications have not been disclosed. This allows the invention patent application requirements to be met, and applications are submitted in accordance with the law.
725‧‧‧第一壓取臂 725‧‧‧First pressing arm
726‧‧‧第二壓取臂 726‧‧‧Second pressing arm
727‧‧‧吸嘴 727‧‧‧Nozzle
728‧‧‧吸嘴 728‧‧‧Nozzle
81‧‧‧測試電路板 81‧‧‧test circuit board
82‧‧‧測試座 82‧‧‧Test Block
91‧‧‧致冷晶片 91‧‧‧Refrigerated chip
92‧‧‧感溫器 92‧‧‧Temperature Sensor
93‧‧‧訊號轉換器 93‧‧‧Signal Converter
94‧‧‧電源供應器 94‧‧‧ Power Supply
95‧‧‧封閉容室 95‧‧‧ closed container
96‧‧‧溫度流體供應管路 96‧‧‧ temperature fluid supply line
100‧‧‧中央控制單元 100‧‧‧ Central Control Unit
110‧‧‧測試機 110‧‧‧testing machine
120‧‧‧電子元件 120‧‧‧Electronic components
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI701447B (en) * | 2019-03-15 | 2020-08-11 | 鴻勁精密股份有限公司 | Test device with temperature control unit and test classification equipment for its application |
| TWI705254B (en) * | 2019-01-30 | 2020-09-21 | 日商阿德潘鐵斯特股份有限公司 | Electronic component processing device and electronic component testing device |
| CN113182198A (en) * | 2020-01-14 | 2021-07-30 | 鸿劲精密股份有限公司 | Testing device with temperature control unit and testing classification equipment applied by same |
| TWI849513B (en) * | 2022-03-11 | 2024-07-21 | 大陸商杭州長川科技股份有限公司 | Method for adjusting temperature of chip |
| TWI895871B (en) * | 2023-12-07 | 2025-09-01 | 鴻勁精密股份有限公司 | Pressing mechanism and processing apparatus |
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| TWI648808B (en) * | 2018-05-04 | 2019-01-21 | 鴻勁精密股份有限公司 | Electronic component pick-and-place unit and its application classification equipment |
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| CN100403043C (en) * | 2002-12-04 | 2008-07-16 | 株式会社爱德万测试 | Press parts and electronic parts handling equipment |
| JP2006125864A (en) * | 2004-10-26 | 2006-05-18 | Yokogawa Electric Corp | Device handler device |
| US7733106B2 (en) * | 2005-09-19 | 2010-06-08 | Formfactor, Inc. | Apparatus and method of testing singulated dies |
| TWI524078B (en) * | 2014-12-26 | 2016-03-01 | Hon Tech Inc | Electronic components operating unit and its application equipment |
| TWI534435B (en) * | 2015-02-06 | 2016-05-21 | Hon Tech Inc | Electronic component testing equipment and its application of test classification equipment |
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2016
- 2016-06-24 TW TW105119945A patent/TWI588501B/en active
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| TWI705254B (en) * | 2019-01-30 | 2020-09-21 | 日商阿德潘鐵斯特股份有限公司 | Electronic component processing device and electronic component testing device |
| US11372021B2 (en) | 2019-01-30 | 2022-06-28 | Advantest Corporation | Electronic component handling device and electronic component testing apparatus |
| TWI701447B (en) * | 2019-03-15 | 2020-08-11 | 鴻勁精密股份有限公司 | Test device with temperature control unit and test classification equipment for its application |
| CN113182198A (en) * | 2020-01-14 | 2021-07-30 | 鸿劲精密股份有限公司 | Testing device with temperature control unit and testing classification equipment applied by same |
| CN113182198B (en) * | 2020-01-14 | 2023-08-29 | 鸿劲精密股份有限公司 | Testing device with temperature control unit and testing classification equipment applied by same |
| TWI849513B (en) * | 2022-03-11 | 2024-07-21 | 大陸商杭州長川科技股份有限公司 | Method for adjusting temperature of chip |
| TWI895871B (en) * | 2023-12-07 | 2025-09-01 | 鴻勁精密股份有限公司 | Pressing mechanism and processing apparatus |
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| Publication number | Publication date |
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| TWI588501B (en) | 2017-06-21 |
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